Wavelength conversion device, light source device, and projector

Abstract

To provide a wavelength converter that can prevent reduction of a wavelength conversion efficiency caused by increase of fluorescence area where fluorescence is emitted.SOLUTION: The wavelength converter of the present invention includes: a wavelength conversion layer for converting the wavelength of excitation light; and an optical array layer made of a plurality of cells having a first surface, which light enters after being wavelength-converted by the wavelength conversion layer, and having a second surface, which emits light. The optical array layer has a reflection surface for reflecting light at the interface between cells adjacent to each other in the first surface and in the second surface.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a wavelength conversion device, a light source device, and a projector. [Background technology]

[0002] In recent years, solid-state light sources such as light-emitting diodes (LEDs) and laser diodes (LDs), which have excellent features such as low power consumption, small size and light weight, and easy adjustment of light intensity, have been used as light sources for projectors, instead of fluorescent lamps and incandescent lamps, which were previously mainstream. For example, a light-emitting device is known that combines a solid-state light source that emits blue light with a wavelength conversion mechanism (wavelength conversion device) that absorbs the light from the solid-state light source as excitation light and converts it to yellow light. In a light source device equipped with this light-emitting device, the blue light emitted from the solid-state light source and the yellow light emitted from the wavelength conversion device are combined to generate white light as illumination light for projectors and the like. For example, Patent Document 1 discloses a wavelength conversion member that includes a laminate including a phosphor layer and a translucent heat dissipation layer that is formed on both sides of the phosphor layer and has a thermal conductivity higher than that of the phosphor layer. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2016-027613 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the wavelength conversion member disclosed in Patent Document 1, before the excitation light enters the phosphor layer, the excitation light spreads in a planar direction in the light-transmitting heat dissipation layer when viewed from the direction in which the excitation light travels, and the fluorescent area from which the fluorescence is emitted increases, which may result in a decrease in wavelength conversion efficiency. [Means for solving the problem]

[0005] In order to solve the above problems, a light source device according to one embodiment of the present invention includes a wavelength conversion layer that converts the wavelength of excitation light, and an optical array layer made up of a plurality of cells each having a first surface onto which the light wavelength-converted by the wavelength conversion layer is incident and a second surface from which the light is emitted. The optical array layer has a reflective surface that reflects light at an interface between adjacent cells from the first surface to the second surface. [Brief description of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic configuration diagram of a projector according to a first embodiment. [Diagram 2] 2 is a schematic configuration diagram of a light source device provided in the projector of FIG. 1. [Diagram 3] 3 is a cross-sectional view of a portion of a wavelength converter of the first embodiment included in the light source device of FIG. 2. [Figure 4] 4 is a cross-sectional view showing how excitation light and fluorescence propagate in a part of the wavelength converter shown in FIG. 3. [Diagram 5] 4 is a plan view showing a state in which excitation light is incident on an optical array layer of the wavelength converter shown in FIG. 3. FIG. [Figure 6] 4 is a plan view showing a state in which excitation light is incident on a wavelength conversion layer of the wavelength converter shown in FIG. 3. [Figure 7] 4 is a plan view showing how fluorescence is emitted from a wavelength conversion layer and an optical array layer of the wavelength converter shown in FIG. 3. [Figure 8] FIG. 11 is a schematic configuration diagram of a light source device according to a second embodiment. [Figure 9] 9 is a cross-sectional view of a portion of a wavelength converter of a second embodiment included in the light source device of FIG. 8. [Figure 10] 13 is a cross-sectional view of a portion of a wavelength converter according to a modified example of the second embodiment. FIG. [Figure 11] FIG. 11 is a plan view of a first modified example of the optical array layer. [Figure 12] FIG. 13 is a plan view of a second modified example of the optical array layer. [Figure 13] FIG. 13 is a perspective view of a third modified example of the optical array layer. [Figure 14] FIG. 13 is a perspective view of a fourth modified example of the optical array layer. [Figure 15] FIG. 13 is a perspective view of a fifth modified example of the optical array layer. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] [First embodiment] A first embodiment of the present invention will be described below with reference to FIGS. Fig. 1 is a schematic configuration diagram showing a projector 1 of a first embodiment. Fig. 2 is a schematic configuration diagram of a light source device 2 provided in the projector 1. In the following drawings, the scale of the dimensions of some components may be changed to make the components easier to see.

[0008] The projector 1 is an example of a projector that uses three transmissive liquid crystal light valves as light modulation devices. For example, a reflective liquid crystal light valve may be used as the light modulation device. As the light modulation device, a light modulation device other than liquid crystal, such as a device using a micromirror or a device equipped with a DMD (Digital Micromirror Device) may be used.

[0009] (projector) First, the configuration of the projector 1 will be described. As shown in FIG. 1, the projector 1 includes a light source device 2, a color separation optical system 3, a light modulation device 4R, a light modulation device 4G, and a light modulation device 4B, a light synthesis optical system 5, and a projection optical system 6. The light source device 2 emits white light WL as illumination light. The color separation optical system 3 separates the white light WL emitted from the light source device 2 into red light LR, green light LG, and blue light LB. The light modulation device 4R, the light modulation device 4G, and the light modulation device 4B modulate the red light LR, the green light LG, and the blue light LB according to image information, respectively, to form image light of each color. The light synthesis optical system 5 synthesizes the image light of each color emitted from the light modulation device 4R, the light modulation device 4G, and the light modulation device 4B. The projection optical system 6 projects the image light synthesized by the light synthesis optical system 5 toward a screen SCR.

[0010] 2, the light source device 2 emits white light WL, which is illumination light, toward the color separation optical system 3. The white light WL includes blue light BL that is emitted from the wavelength converter 50 without being wavelength-converted, out of blue excitation light EL, i.e., blue light BL0, emitted from the array light source 20, and yellow fluorescence YL generated by the wavelength conversion of the blue light BL0. The white light WL is adjusted by the light source device 2 so as to have a substantially uniform illuminance distribution.

[0011] As shown in FIG. 1, the color separation optical system 3 includes a first dichroic mirror 7a, a second dichroic mirror 7b, a first reflecting mirror 8a, a second reflecting mirror 8b, and a third reflecting mirror 8c. The first dichroic mirror 7a separates the white light WL emitted from the light source device 2 into red light LR and light obtained by mixing green light LG and blue light LB. Therefore, the first dichroic mirror 7a transmits the red light LR and reflects the green light LG and the blue light LB. The second dichroic mirror 7b separates the light obtained by mixing the green light LG and the blue light LB into the green light LG and the blue light LB. Therefore, the second dichroic mirror 7b reflects the green light LG and transmits the blue light LB.

[0012] The first reflecting mirror 8a is disposed in the optical path of the red light LR, and reflects the red light LR transmitted through the first dichroic mirror 7a toward the optical modulation device 4R. The second reflecting mirror 8b and the third reflecting mirror 8c are disposed in the optical path of the blue light LB, and reflect the blue light LB transmitted through the second dichroic mirror 7b, and guide the blue light LB to the optical modulation device 4B.

[0013] The light modulation device 4R modulates the red light LR according to image information while passing the light, forming a red image light. Similarly, the light modulation device 4G modulates the green light LG according to image information while passing the light, forming a green image light. The light modulation device 4B modulates the blue light LB according to image information while passing the blue light LB, forming a blue image light. Each of the light modulation device 4R, the light modulation device 4G, and the light modulation device 4B is composed of, for example, a liquid crystal panel. A polarizing plate (not shown) is disposed on the light incident side and the light exit side of each of the light modulation device 4R, the light modulation device 4G, and the light modulation device 4B. A field lens 10R that converts the red light LR incident on the light modulation device 4R into parallel light is provided on the incident side of the red light LR of the light modulation device 4R. A field lens 10G that converts the green light LG incident on the light modulation device 4G into parallel light is provided on the incident side of the green light LG of the light modulation device 4G. A field lens 10B that converts the blue light LB incident on the light modulation device 4B into parallel light is provided on the incident side of the blue light LB of the light modulation device 4B.

[0014] The light combining optical system 5 is configured by, for example, a cross dichroic prism. The light combining optical system 5 combines the image lights of the respective colors emitted from the light modulation device 4R, the light modulation device 4G, and the light modulation device 4B, and emits the combined image light toward the projection optical system 6.

[0015] The projection optical system 6 is composed of a plurality of projection lenses. The projection optical system 6 enlarges and projects the image light combined by the light combining optical system 5 onto the screen SCR. An enlarged color image is displayed on the screen SCR.

[0016] (Light source device) Next, the configuration of the light source device 2 will be described. 2, the light source device 2A of the first embodiment includes a light emitting unit 11, an integrator optical system 31, a polarization conversion element 32, and a superimposing lens 33A. The integrator optical system 31 and the superimposing lens 33A configure a superimposing optical system 33.

[0017] The light-emitting unit 11 includes an array light source 20, a collimator optical system 22, a focusing optical system 23, a first retardation plate 28A, an optical element 25A including a polarization separation element 150A, a first focusing optical system 26, a wavelength conversion device 50, a second retardation plate 28B, a second focusing optical system 29, and a diffuse reflection element 30.

[0018] The array light source 20, the collimator optical system 22, the focusing optical system 23, the first retardation plate 28A, the optical element 25A, the second retardation plate 28B, the second focusing optical system 29, and the diffuse reflection element 30 are arranged in sequence on the optical axis AX1. Meanwhile, the wavelength conversion device 50, the first focusing optical system 26, the optical element 25A, the integrator optical system 31, the polarization conversion element 32, and the superimposing lens 33A are arranged in sequence on the optical axis AX2. The optical axes AX1 and AX2 are in the same plane and are perpendicular to each other.

[0019] The array light source 20 includes a plurality of semiconductor lasers (excitation light sources) 21 as solid-state light sources. The plurality of semiconductor lasers 21 are arranged in an array in a plane perpendicular to the optical axis AX1. The semiconductor lasers 21 emit, for example, blue light BL0 as excitation light EL for the wavelength conversion layer 80 of the wavelength conversion device 50. The peak wavelength of the blue light BL0 is, for example, 445 nm, but can be arbitrarily changed as long as it can excite the wavelength conversion layer 80 as described above, and is determined according to the fluorescent material of the wavelength conversion layer 80, and may be, for example, 460 nm.

[0020] The blue light BL0 emitted as a bundle of rays from the array light source 20 is incident on the collimator optical system 22. The collimator optical system 22 converts the blue light BL0 emitted from the array light source 20 into parallel light. The collimator optical system 22 includes a plurality of collimator lenses 22A arranged, for example, in an array. Each of the plurality of collimator lenses 22A is arranged corresponding to each of the plurality of semiconductor lasers 21.

[0021] The blue light BL0 that has passed through the collimator optical system 22 is incident on the focusing optical system 23. The focusing optical system 23 adjusts the beam diameter of the blue light BL0. The focusing optical system 23 includes, for example, a convex lens 23A and a concave lens 23B.

[0022] The blue light BL0 that has passed through the light collecting optical system 23 is incident on the first retardation plate 28A. The first retardation plate 28A is, for example, a half-wave plate that is configured to be rotatable approximately around the optical axis AX1. The blue light BL0 emitted from the semiconductor laser 21 is linearly polarized light. By appropriately setting the rotation angle of the first retardation plate 28A, the blue light BL0 that passes through the first retardation plate 28A can be converted into a light beam that contains an S-polarized component and a P-polarized component with respect to the optical element 25A at a predetermined ratio. By rotating the first retardation plate 28A, the ratio of the S-polarized component and the P-polarized component can be changed.

[0023] The blue light BL0 containing an S-polarized component and a P-polarized component generated by passing through the first retardation plate 28A is incident on the optical element 25A. The optical element 25A is, for example, a dichroic prism having wavelength selectivity. The dichroic prism has an inclined surface 50a that is inclined at an angle of 45° with respect to the optical axis AX1 and the optical axis AX2 in the same plane.

[0024] The inclined surface 50a is provided with a polarization separation element 150A having wavelength selectivity. The polarization separation element 150A separates the blue light BL0 into blue light BL S and P-polarized blue light BL P That is, the polarization separation element 150A has a polarization separation function of separating the blue light BL S It reflects blue light BL P The polarization separation element 150A also has a color separation function of transmitting the fluorescence YL, which has a different wavelength band from the blue light BL0, regardless of the polarization state of the fluorescence YL.

[0025] Blue light BL emitted from the polarization separation element 150A SThe blue light BL S The first focusing optical system 26 focuses the light toward the wavelength converter 50. The first focusing optical system 26 includes, for example, a first lens 26A and a second lens 26B.

[0026] In the light source device 2A of the first embodiment, the wavelength converter 51 of the first embodiment is used as the wavelength converter 50. Fig. 3 is an enlarged view of a main part of the wavelength converter 51, and is a cross-sectional view taken along the optical axis AX2. The wavelength converter 51 emits blue light (excitation light) BL S The wavelength conversion layer 80 converts the wavelength of blue light BL S The fluorescent material is excited by absorbing the blue light BL and emits yellow fluorescence YL having a peak wavelength in the wavelength range of 500 nm to 700 nm. S , and depends on the fluorescent material of the wavelength-converting layer 80.

[0027] As shown in FIGS. 2 and 3, the blue light BL S A reflective layer 90 is provided on the side opposite to the side where the light is incident. The reflective layer 90 reflects a component of the fluorescence YL generated in the wavelength conversion layer 80 that travels toward the substrate 35 of the wavelength conversion device 51. A portion of the fluorescence YL generated in the wavelength conversion layer 80 is reflected by the reflective layer 90 and emitted to the outside of the wavelength conversion layer 80. The other portion of the fluorescence YL generated in the wavelength conversion layer 80 is emitted to the outside of the wavelength conversion layer 80 without passing through the reflective layer 90.

[0028] A heat sink 38 is disposed on the surface of the substrate 35 opposite to the surface supporting the wavelength conversion layer 80 and the reflective layer 90. In the wavelength conversion device 51, heat generated in the wavelength conversion layer 80 can be dissipated via the heat sink 38, so that thermal deterioration of the wavelength conversion layer 80 can be prevented.

[0029] The fluorescence YL emitted from the wavelength conversion layer 80 is unpolarized. The fluorescence YL passes through the first focusing optical system 26 and then enters the polarization separation element 150A. The fluorescence YL that enters the polarization separation element 150A travels from the polarization separation element 150A toward the integrator optical system 31.

[0030] On the other hand, as shown in FIG. 2, P-polarized blue light BL P The blue light BL emitted from the polarization separation element 150A is incident on the second retardation plate 28B. The second retardation plate 28B is, for example, a quarter-wave plate arranged in the optical path between the polarization separation element 150A and the diffuse reflection element 30. Therefore, the blue light BL P is polarized by the second retardation plate 28B into right-handed circularly polarized blue light BL C 1, the blue light BL C The light 1 is condensed and made to enter the diffuse reflecting element 30.

[0031] The diffuse reflection element 30 is disposed on the opposite side of the phosphor 34 in the polarization separation element 150A, and reflects the blue light BL C The diffuse reflector 30 reflects the blue light BL 1 toward the polarization separation element 150A while diffusing it. C In this case, an element that reflects the light 1 in a Lambertian manner without disturbing the polarization state is used.

[0032] Hereinafter, the light reflected in a diffused state by the diffuse reflecting element 30 will be referred to as blue light BL C 2. Blue light BL C By diffusing and reflecting the blue light BL1, a blue light BL2 with a substantially uniform illuminance distribution is generated. C For example, right-handed circularly polarized blue light BL C 1 is left-handed circularly polarized blue light BL C 2. Blue light BL C The light 2 is converted into parallel light by the second focusing optical system 29, and then enters the second retardation plate 28B again.

[0033] Left-handed circularly polarized blue light BL C 2 is polarized blue light BL by the second retardation plate 28B. S Converted to 1. Blue light BL S 1 is reflected by the polarization separation element 150A toward the integrator optical system 31.

[0034] blue light BL S The blue light BL1 is used as white light WL together with the fluorescent light YL transmitted through the polarization separation element 150A. S The blue light BL1 and the fluorescent light YL are emitted in the same direction from the polarization separation element 150A. S 1 is mixed with yellow fluorescence YL to produce white light WL.

[0035] The white light WL is emitted toward the integrator optical system 31. The integrator optical system 31 includes, for example, a lens array 31A and a lens array 31B. In each of the lens arrays 31A and 31B, a plurality of microlenses are arranged in a direction perpendicular to the optical axis AX2, i.e., along the optical axis AX1. The white light WL transmitted through the integrator optical system 31 is incident on the polarization conversion element 32. The polarization conversion element 32 has a polarization separation film and a retardation plate. The polarization conversion element 32 converts the unpolarized white light WL into linearly polarized light.

[0036] The white light WL polarized by the polarization conversion element 32 is incident on the superimposing lens 33A. The superimposing lens 33A cooperates with the integrator optical system 31 to homogenize the distribution of illuminance by the white light WL in the illuminated area. As described above, the light source device 2A emits the white light WL along the optical axis AX2.

[0037] (Wavelength conversion device) Next, a wavelength converter 51 of the first embodiment will be described. The wavelength converter 51 includes an optical array layer 60, a wavelength conversion layer 80, a reflective layer 90, a substrate 35, and a heat sink 38. The optical array layer 60, the wavelength conversion layer 80, and the reflective layer 90 in the wavelength converter 51 generate blue light BL SThe wavelength conversion unit 100 absorbs the reflected light and generates fluorescence YL. The reflective layer 90, wavelength conversion layer 80, and optical array layer 60 of the wavelength conversion unit 100 are sequentially laminated on the surface 35a of the substrate 35. The substrate 35 is made of a metal material with excellent heat dissipation properties, such as aluminum (Al) or copper (Cu).

[0038] FIG. 4 shows a wavelength conversion unit 100 of a wavelength conversion device 51 irradiated with blue light BL S 3 and 4 are cross-sectional views showing how light enters and how fluorescence YL exits. As shown in Fig. 3 and Fig. 4, a reflective layer 90 is laminated on a surface 35a of a substrate 35. A wavelength conversion layer 80 is laminated on the surface 90a of the reflective layer 90, and an optical array layer 60 is provided on the surface 80a of the wavelength conversion layer 80.

[0039] The wavelength conversion layer 80 receives the blue light BL emitted from the first light collecting optical system 26 described with reference to FIG. S The wavelength conversion layer 80 is configured to convert blue light BL S That is, the wavelength conversion layer 80 converts the wavelength of the incident blue light BL S The fluorescent material contains a fluorescent material that absorbs, is excited by, and emits fluorescent light YL. The fluorescent material is, for example, yttrium aluminum garnet (YAG (Y3Al5O4)) doped with cerium (Ce) as an activator. 12 ):Ce), or Y3(Al,Ga)5O 12 , Lu3Al5O 12 , TbAlO 12 The wavelength conversion layer 80 includes at least one of the oxide phosphors above. The wavelength conversion layer 80 may include europium (Eu) instead of Ce as an activator. The wavelength conversion layer 80 may also include a scattering agent. The fluorescence YL generated in the wavelength conversion layer 80 is emitted from a surface 80b of the wavelength conversion layer 80 opposite to the surface 80a.

[0040] The optical array layer 60 is composed of a plurality of cells 62. Each cell 62 has a surface (first surface) 62b and a surface (second surface) 62a. Fluorescence (light) YL, which has been wavelength-converted by the wavelength conversion layer 80 and is emitted from the surface 80a, is incident on the surface 62b. The fluorescence YL is incident from the surface 62a to the outside of the wavelength conversion device 51 and is coupled to blue light BL S Each cell 62 is made of a material having high thermal conductivity such as sapphire, alumina, YAG, or quartz, and emits at least blue light BL S Since the cells 62 are made of a material having high thermal conductivity and high transmittance, heat TH generated during wavelength conversion in the wavelength conversion layer 80 is efficiently released to the outside of the wavelength conversion device 51 through the cells 62. In addition, the fluorescence YL emitted from the wavelength conversion layer 80 is efficiently emitted from the surface 62a, and the blue light BL S is incident on the wavelength conversion layer 80 with high efficiency.

[0041] Figure 5 shows blue light BL S When viewed in a plan view along the traveling direction of the blue light BL S 6 is a plan view showing how the blue light BL S 7 is a plan view showing how blue light BL S 5 and 6 are plan views showing how the fluorescence YL is emitted when it is incident on the wavelength converter 51. As shown in FIG. S In plan view along the direction of travel of the light, i.e., the optical axis AX2, the cell 62 has a square shape. 62 is the dimension w of the cell 62 shown in FIG. 5 and FIG. 6 in a plan view. 62 The dimension of cell 62 is w 62 is the dimension in a plane perpendicular to the height direction H of the cell 62, and the blue light BL S The dimension h of the cell 62 in the height direction H is the dimension in a plane perpendicular to the direction of travel of the cell 62 and the optical axis AX2. 62 is the dimension w of the cell 62 in plan view62 For example, it has a size of 1.0 to 1.5 times that of the above.

[0042] In the wavelength converter 51 of the first embodiment, a dielectric film 66 is interposed between the plurality of cells 62 in the optical array layer 60. The dielectric film 66 may be formed of a reflective material containing, for example, silver (Ag) or Al, or may be formed of a dielectric multilayer film in which a plurality of appropriate dielectrics are alternately stacked.

[0043] The optical array layer 60 transmits blue light BL from the surface 62b to the surface 62a of the plurality of cells 62 at the interface between the cells 62 adjacent to each other on the surfaces 60a and 60b. S The reflecting surface 68 is formed of side surfaces 66c and 66d of a dielectric film 66 disposed between adjacent cells 62. The blue light BL incident on the reflecting surface 68 from the cells 62 is S and the fluorescent light YL is specularly reflected by the reflecting surface 68.

[0044] In FIG. 3, blue light BL S The arrows indicate the propagation of the blue light BL and the fluorescence YL in each direction, as well as the movement of the heat flux. S 3, blue light BL and fluorescence YL are incident on wavelength conversion layer 80 from the outside of wavelength conversion unit 100, that is, from above wavelength conversion unit 100 in FIGS. S Of these, the blue light component BL S The path of the blue light component BL 11 has a small angle with respect to the height direction H and does not strike the reflecting surface 68. S The blue light BL 11 passes through the optical array layer 60 without being reflected by the reflective surface 68 and enters the wavelength conversion layer 80. On the other hand, the blue light BL S Of these, the blue light component BL S 12 strikes the reflective surface 68 within the cell 62. SThe fluorescence YL12 is reflected by the reflecting surface 68 and passes through the optical array layer 60 to enter the wavelength conversion layer 80. Similarly, of the fluorescence YL emitted from the wavelength conversion layer 80 to the outside of the wavelength conversion unit 100, the path of the fluorescence component YL11 forms a small angle with respect to the height direction H and does not hit the reflecting surface 68. Therefore, the fluorescence component YL11 passes through the optical array layer 60 without being reflected by the reflecting surface 68 and is emitted to the outside of the wavelength conversion unit 100. On the other hand, of the fluorescence YL emitted from the wavelength conversion layer 80 to the outside of the wavelength conversion unit 100, the path of the fluorescence component YL12 hits the reflecting surface 68 within the cell 62. Therefore, the fluorescence component YL12 is reflected by the reflecting surface 68 and passes through the optical array layer 60 to be emitted to the outside of the wavelength conversion unit 100.

[0045] blue light BL S The number of times each component of the fluorescence YL is reflected by the reflecting surface 68 in the cell 62 is expressed as the number of times that each component of the blue light BL S It is determined by the angle between the directions of the blue light (BL) and the fluorescence (YL). S Furthermore, the greater the angle that the traveling direction of each component of the fluorescence YL makes with respect to the optical axis AX2, the more times the component is reflected by the reflecting surface 68.

[0046] As described above, the wavelength conversion device 51 of the first embodiment emits blue light BL S The optical array layer 60 includes a wavelength conversion layer 80 that converts the wavelength of the fluorescent light YL into fluorescence YL, and an optical array layer 60 made up of a plurality of cells 62 having a surface 62b onto which the fluorescent light YL wavelength-converted by the wavelength conversion layer 80 is incident, and a surface 62a from which the fluorescent light YL is emitted. The optical array layer 60 has a reflective surface 68 that reflects the fluorescent light YL at the interface between adjacent cells 62, 62 on the surfaces 62a, 62b from the surface 62b to the surface 62a in the height direction H. As shown in FIG. 5, for example, blue light BL S When viewed in a plane along the direction of travel and the optical axis AX2, blue light BL S has a circular shape and is incident on the surface 60a of the optical array layer 60, i.e., the surface 62a of the plurality of cells 62, within an area occupied by 5 × 5 cells 62 in total, 25 cells 62. In this case, as can be seen with reference to Figures 3 and 4, in the optical array layer 60, blue light BL Sprogresses within the area occupied by overlapping cells 62 on surface 60a.

[0047] blue light BL S is reflected by the reflecting surface 68, and does not pass through any cell 62 outside the area occupied by the overlapping cells 62 on the surface 60a, and enters the wavelength conversion layer 80 while substantially maintaining the beam area on the surface 60a. However, as shown in Figs. 5 and 6, the blue light BL incident on at least a part of the surface 62a of the cell 62 of the optical array layer 60 in a plan view is S Since the blue light BL S The blue light BL 1 irradiated to the surface 60b of the optical array layer 60 and the surface 80a of the wavelength conversion layer 80 spreads to all the overlapping cells 62 on the surface 60a of the optical array layer 60. That is, as shown in FIG. S overlaps with a rectangular area occupied by 25 cells 62 (5 x 5).

[0048] The fluorescence YL generated in the wavelength conversion layer 80 is mixed with the blue light BL S The blue light BL is emitted with a beam area approximately equal to the beam area of ​​the fluorescent light YL in the area occupied by the cell 62 on the surface 60b of the optical array layer 60 that overlaps with the fluorescent light YL. S 3 and 4, the fluorescence YL is reflected by the reflecting surface 68 and is emitted from the optical array layer 60 while substantially maintaining the beam area on the surface 60b, without passing through any cells 62 outside the area occupied by the overlapping cells 62 on the surface 60b. Therefore, as shown in FIG. 7, the fluorescence YL emitted from the surface 80a of the wavelength conversion layer 80 and the surface 60a of the optical array layer 60 overlaps with a rectangular area occupied by a total of 25 cells 62 (5 x 5).

[0049] According to the wavelength conversion device 51 of the first embodiment, since the above-mentioned optical array layer 60 is provided, blue light BL S At least a part of the blue light BL S The blue light component BL S12, while reflecting blue light BL S The planar view area of ​​the blue light BL can be maintained and can be incident on the wavelength conversion layer 80. As a result, compared to when the optical array layer 60 is not provided, the blue light BL S This makes it possible to suppress a decrease in the wavelength conversion efficiency in the wavelength conversion layer 80 caused by an increase in the spread in a plan view.

[0050] Furthermore, according to the wavelength conversion device 51 of the first embodiment, the fluorescent component YL12 is reflected by the reflecting surface 68 of the cell 62 into which the fluorescence YL is incident, while the spread of the fluorescence YL in a planar view is suppressed, and the planar view area of ​​the fluorescence YL emitted from the surface 80a of the wavelength conversion layer 80 and the planar view area of ​​the fluorescence YL emitted from the surface 60a of the optical array layer 60 can be made to substantially coincide with each other. This makes it possible to suppress a decrease in the utilization efficiency of the fluorescence YL caused by an increase in the spread of the fluorescence YL in a planar view, compared to a case in which the optical array layer 60 is not provided.

[0051] In the wavelength converter 51 of the first embodiment, the reflecting surface 68 is formed by the side surfaces 66c and 66d of the dielectric film 66. Therefore, the blue light BL S and fluorescence YL can be reflected with high efficiency and guided inside the cell 62. As a result, blue light BL S And the loss of fluorescent YL can be suppressed.

[0052] In the wavelength converter 51 of the first embodiment, the reflecting surface 68 may be a diffuse reflecting surface. S The reflecting surface 68 may have minute projections and recesses designed to correspond to the wavelengths of blue light BL and fluorescence YL. S In addition, the direction of travel of the fluorescence YL and the directivity with respect to the optical axis AX2 can be improved.

[0053] In the wavelength converter 51 of the first embodiment, the material constituting the reflective surface 68 is not limited to the dielectric film 66. The reflective surface 68 is formed by the interface with the cell 62, and the blue light BL SIn other words, the material or medium constituting the reflective surface 68 may be a material or medium that can reflect the blue light BL and the fluorescence YL. S In addition, a material or medium having an appropriate refractive index can be used depending on the peak wavelengths of the blue light component BL S The material or medium constituting the reflecting surface 68 may be selected so that the blue light BL12 and the fluorescent component YL12 are totally reflected. S can be made to enter the wavelength conversion layer 80 with higher efficiency, and the fluorescence YL can be made to exit from the optical array layer 60 with higher efficiency. When the above-mentioned sapphire or the like is used as the material for the cells 62 of the optical array layer 60, the refractive index of the optical array layer 60 is about 1.7.

[0054] In the wavelength converter 51 of the first embodiment, an air layer is provided between adjacent cells 62, 62 on the surfaces 60a, 60b of the optical array layer 60, and blue light BL is emitted at the side surfaces (interfaces) 62c, 62d of the cells 62 due to the refractive index difference between the cells 62 and the air layer. S and fluorescent YL. This allows blue light BL S Moreover, since the surface area of ​​the cells 62 exposed to the outside air of the wavelength converter 51 through the air layer increases, the heat dissipation of the wavelength converter 51 can be improved and a temperature rise caused by the heat TH generated when the fluorescence YL is generated in the wavelength conversion layer 80 can be suppressed.

[0055] The wavelength converter 51 of the first embodiment includes a reflective layer 90 on the surface 80b of the wavelength conversion layer 80 opposite to the surface 80a facing the optical array layer 60 as described above. S The blue light (light) BL emitted from the surface 80b of the wavelength conversion layer 80 is reflected by the reflective layer 90 and passes through the wavelength conversion layer 80 to enter the optical array layer 60. In the wavelength conversion device 51 of the first embodiment, the blue light (light) BL SThe substantial irradiation area of ​​the fluorescence YL emitted from the wavelength conversion layer 80 is made to substantially coincide with the area occupied by the cells 62 that overlap the irradiation area in a plan view. Therefore, according to the wavelength conversion device 51 of the first embodiment, it is possible to suppress the spread of the irradiation area of ​​the fluorescence YL emitted from the wavelength conversion layer 80 in a plan view and the diffusion of the fluorescence YL, and to suppress the diffusion of the fluorescence YL emitted from the optical array layer 60. As a result, it is possible to suppress a decrease in the wavelength conversion efficiency in the wavelength conversion device 51 of the first embodiment compared to conventional wavelength conversion devices.

[0056] [Second embodiment] Next, a second embodiment of the present invention will be described with reference to FIGS. In the second and subsequent embodiments, configurations common to the first and other previously described embodiments are given the same reference numerals as those in the previously described embodiments, and descriptions thereof will be omitted.

[0057] Except for the fact that the light source device 2B shown in Fig. 8 is provided instead of the light source device 2A, the projector of the second embodiment has a similar configuration to the projector 1 of the first embodiment. Fig. 8 is a schematic configuration diagram of the light source device 2B provided in the projector of the second embodiment.

[0058] (Light source device) As shown in FIG. 8, a light source device 2B of the second embodiment includes a light emitting section 12, an integrator optical system 31, a polarization conversion element 32, and a superimposing lens 33A.

[0059] The light-emitting unit 12 includes an array light source 20, a collimator optical system 22, a focusing optical system 42, a dichroic film 45, a wavelength converter 52 of the second embodiment, and a pickup optical system 160. The array light source 20, the collimator optical system 22, the focusing optical system 42, the wavelength converter 52, and the pickup optical system 160 are sequentially arranged on the optical axis AX2.

[0060] The array light source 20 includes a plurality of semiconductor lasers (excitation light sources) 21 as solid-state light sources. The plurality of semiconductor lasers 21 are arranged in an array in a plane perpendicular to the optical axis AX2.

[0061] The light-collecting optical system 42 is composed of, for example, one convex lens 42A. The light-collecting optical system 42 is disposed on the optical axis AX2 of the white light BL emitted from the array light source 20, and collects the blue light BL as the excitation light EL converted into parallel light by the collimator optical system 22 onto the wavelength converter 52.

[0062] The wavelength converter 52 has a function of transmitting a part of the blue light BL emitted from the array light source 20 and converting the remaining blue light BL into fluorescence YL. The wavelength converter 52 contains a fluorescent material that absorbs the remaining blue light B and emits yellow fluorescence YL containing red light and green light. The peak wavelength of the emission intensity of the fluorescence YL is, for example, about 550 nm.

[0063] The dichroic film 45 is provided on the incident side of the wavelength converter 52 on which the white light BL is incident. The dichroic film 45 transmits the blue light BL and reflects the fluorescence YL. The fluorescence YL and the blue light BL transmitted through the wavelength converter 52 are combined to generate the white light WL.

[0064] The pickup optical system 160 includes, for example, a pickup lens 162 and a pickup lens 164. The pickup optical system 160 takes in the white light WL emitted from the wavelength conversion device 52, converts it into approximately parallel light, and emits it toward the integrator optical system 31. The integrator optical system 31 includes, for example, a lens array 31C and a lens array 31D. In each of the lens arrays 31C and 31D, a plurality of microlenses are arranged along a direction perpendicular to the optical axis AX2.

[0065] The white light WL that enters the integrator optical system 31 enters the polarization conversion element 32. The polarization conversion element 32 converts the white light WL containing unpolarized fluorescence YL into linearly polarized light. The white light WL that passes through the polarization conversion element 32 generates white light WL with a uniform illuminance distribution in the illuminated area through cooperation of the superimposing lens 33A and the integrator optical system 31. That is, the light source device 2B generates white light WL as illumination light for the projector of the second embodiment.

[0066] In the light source device 2B of the second embodiment, the optical system can be configured to be approximately linear along the optical axis AX2, and the optical system can be easily assembled and designed.

[0067] (Wavelength conversion device) 9 is a cross-sectional view of a wavelength converter 52 of the second embodiment. The wavelength converter 52 does not include the reflective layer 90 of the wavelength converter 51 of the first embodiment, but includes an optical array layer (incident-side optical array layer) 70 instead of the reflective layer 90. That is, the wavelength converter 52 includes an optical array layer 60, a wavelength conversion layer 80, and an optical array layer 70. The optical array layer 60, the wavelength conversion layer 80, and the optical array layer 70 constitute a wavelength converter 100 in the wavelength converter 52 that absorbs blue light BL and generates fluorescence YL.

[0068] The optical array layer 70 is composed of a plurality of cells 72. Each cell 72 has a surface (third surface) 72b and a surface (fourth surface) 72a. The blue light (excitation light) BL emitted from the light-collecting optical system 42 described with reference to FIG. 8 is incident in a concentrated state on the surface 72b. The blue light BL propagated through the cell 72 is emitted from the surface 72a. Like the cell 62, each cell 72 is formed of a material having high thermal conductivity and high transmittance at least to the blue light BL and the fluorescence YL, such as sapphire, alumina, YAG, or quartz. Since the cell 72 is formed of a material having high thermal conductivity and high transmittance, the heat TH generated during wavelength conversion in the wavelength conversion layer 80 is efficiently released not only from the cell 62 but also through the cell 72 to the outside of the wavelength conversion device 52. In the wavelength converter 52, the fluorescence YL emitted from the wavelength conversion layer 80 enters the optical array layer 60 from the surface 62b, and is emitted from the surface 60a with high efficiency.

[0069] When viewed in a plan view along the traveling direction of the blue light BL, each cell 72 is formed, for example, in a square shape. 72 is the dimension w of the cell 72 in plan view 72 The dimension of cell 72 is w 72 is a dimension in a plane perpendicular to the height direction H of the cell 72, and is a dimension in a plane perpendicular to the traveling direction of the blue light BL and the optical axis AX2. 72 is the dimension w of the cell 72 in plan view 72 In the wavelength converter 52, the cell 72 has a size, for example, 1.2 to 2.0 times larger than the size w 72 is the dimension w of the cell 62 in plan view 62 is roughly equivalent to

[0070] In the wavelength converter 52, a dielectric film 76 is interposed between the plurality of cells 72 in the optical array layer 70. The dielectric film 76 may be made of a reflective material containing Ag and Al, similar to the dielectric film 66, or may be made of a dielectric multilayer film in which a plurality of appropriate dielectrics are alternately stacked.

[0071] The optical array layer 70 has a reflective surface 78 that reflects blue light BL at the interface between adjacent cells 72, 72 on the surfaces 70a, 70b from the surface 72b of the multiple cells 72 to the surface 72a. That is, the reflective surface 78 is composed of side surfaces 76c, 76d of the dielectric film 76 disposed between the adjacent cells 72. The blue light BL incident on the reflective surface 78 from the cells 72 is specularly reflected by the reflective surface 78.

[0072] 9 , blue light components whose paths form a small angle with respect to the height direction H and do not hit the reflective surface 78 pass through the optical array layer 70 and are incident on the wavelength conversion layer 80. On the other hand, blue light components whose paths hit the reflective surface 78 within the cell 72 pass through the optical array layer 70 and are incident on the wavelength conversion layer 80 while being reflected by the reflective surface 78.

[0073] blue light BL S The number of times that the blue light component is reflected by the reflecting surface 78 within the cell 72 is determined by the angle that the blue light component makes with respect to the optical axis AX2. The greater the angle that the blue light component makes with respect to the optical axis AX2, the greater the number of times that the blue light component is reflected by the reflecting surface 78.

[0074] As described above, the wavelength conversion device 52 of the second embodiment includes an optical array layer 70 that causes blue light BL to be incident on the surface 80b of the wavelength conversion layer 80, in addition to the optical array layer 60 of the first embodiment. The optical array layer 70 includes a plurality of cells 72 each having a surface 70b on which the blue light BL is incident and a surface 70a from which the incident blue light BL is emitted, and has a reflective surface 78 that reflects light at the interface between adjacent cells 72, 72 on the surfaces 70a, 70b from the surface 70b to the surface 70a. The blue light BL is incident on the wavelength conversion layer 80 through the optical array layer 70, and the fluorescence YL generated by wavelength conversion is incident on the optical array layer 60.

[0075] In the wavelength conversion device 52 having the above-mentioned configuration, in the optical array layer 70, the blue light BL travels within the region occupied by the overlapping cells 72 on the surface 70b. At least a portion of the blue light BL is reflected by the reflecting surface 78 and enters the wavelength conversion layer 80 while substantially maintaining the beam area and irradiation region on the surface 70b, without passing through cells 72 outside the region occupied by the overlapping cells 72 on the surface 70b. However, in the first embodiment, the blue light BL S Similar to the bleeding described above, the blue light BL incident on at least a portion of the surface 72b of the cell 72 of the optical array layer 70 in a planar view may spread to the entire cell 72. In other words, the blue light BL spreads to all the cells 72 overlapping on the surface 70b of the optical array layer 70.

[0076] In the wavelength conversion device 52, the fluorescence YL generated in the wavelength conversion layer 80 is emitted with a beam area and irradiation region approximately equal to the beam area of ​​the blue light BL held in the optical array layer 70, and travels in the same direction as the incident direction of the blue light BL into the wavelength conversion layer 80, within the region occupied by the cells 62 that overlap with the fluorescence YL on the surface 60b of the optical array layer 60. The fluorescence YL is emitted from the optical array layer 60 while maintaining approximately the beam area on the surface 60b, without passing through cells 62 outside the region occupied by the overlapping cells 62 on the surface 60b.

[0077] According to the wavelength conversion device 52 of the second embodiment, since the above-mentioned optical array layers 60 and 70 are provided, at least a part of the blue light BL can be reflected by the reflecting surfaces 78 of the cells 72 in the optical array layer 70 to which the at least a part of the blue light BL is incident, while the planar view area of ​​the blue light BL in the optical array layer 70 is maintained and the blue light BL can be incident on the wavelength conversion layer 80. This makes it possible to suppress a decrease in wavelength conversion efficiency in the wavelength conversion layer 80 caused by an increase in the spread of the blue light BL in a planar view, compared to a case where the optical array layer 70 is not provided.

[0078] Moreover, according to the wavelength conversion device 52 of the second embodiment, while reflecting the fluorescent component YL12 on the reflecting surface 68 of the cell 62 into which the fluorescence YL is incident, the spread of the fluorescence YL in a planar view can be suppressed, and the planar view area of ​​the fluorescence YL emitted from the surface 80a of the wavelength conversion layer 80 and the planar view area of ​​the fluorescence YL emitted from the surface 60a of the optical array layer 60 can be made to substantially coincide with each other. This makes it possible to suppress a decrease in the utilization efficiency of the fluorescence YL caused by an increase in the spread of the fluorescence YL in a planar view, compared to a case in which the optical array layer 60 is not provided. Furthermore, according to the wavelength conversion device 52 of the second embodiment, the optical array layer 70 can suppress the diffusion of the blue light BL in a planar view.

[0079] The wavelength conversion device 52 of the second embodiment can have similar modified examples to those of the wavelength conversion device 51 of the first embodiment, and these modified examples provide the same effects as the wavelength conversion device 51 of the first embodiment.

[0080] A wavelength converter 53 shown in Fig. 10 is a modified example of the wavelength converter 52 of the second embodiment. Fig. 10 is a cross-sectional view of the wavelength converter 53 of the modified example of the second embodiment. As shown in Fig. 10, in the wavelength converter 53, the dimension (cell size) w 62 is the dimension (cell size) w of the cell 72 in the plan view of the optical array layer 70 arranged on the side of the optical array layer 60 where the blue light BL is incident. 72 According to the wavelength conversion device 53 of the modified example of the second embodiment, the directivity of the fluorescence YL in the direction parallel to the optical axis AX2 can be increased more than that of the blue light BL as the excitation light EL.

[0081] [Other embodiments] Next, a description will be given of a modification common to the optical array layer 60 of the wavelength converters 51 and 52 of the first and second embodiments described above, and the optical array layer 70 of the wavelength converter 52 of the second embodiment and the wavelength converter 53 of the modification.

[0082] 11 and 12 are plan views of a first and second modified example of the optical array layer 60. The planar shape of the cells 62 of the optical array layer 60 is not limited to the square shape exemplified in each of the above-mentioned embodiments. As shown in FIG. 11, the planar shape of the cells 62 may be a regular hexagon. As shown in FIG. 12, the planar shape of the cells 62 may be an isosceles triangle divided by one diagonal of a square. When the planar shape of the cells 62 is a regular hexagon, the dimension w 62 is expressed as the diameter of a regular hexagon. When the planar shape of the cell 62 is an isosceles triangle, the dimension w 62 is represented by the lengths of the two sides of an isosceles triangle. The shape of the cell 62 in plan view may be any shape other than a square, regular hexagon, and isosceles triangle as exemplified in Figures 11 and 12. S It is preferable that the light source 100 is appropriately set so as to form a desired shape of the fluorescent YL in a plan view, taking into consideration the occurrence of bleeding of the fluorescent YL.

[0083] 13 to 15 are perspective views of a third to fifth modified examples of the optical array layer 60. As shown in Fig. 13 and Fig. 14, the cells 62 may be columnar structures. When the cells 62 are columnar structures, the dimension h 62 is the dimension w of the cell 62 in plan view 62 In this way, the cell 62 has a columnar structure, and thus the blue light BL S , it is possible to improve the directivity of the fluorescence BL and the fluorescence YL in a direction parallel to the height direction H of the cell 62. As a result, it is possible to suppress a decrease in the wavelength conversion efficiency in the wavelength converter.

[0084] 14, the cells 62 may be columnar structures, and the cells 62 may be spaced apart from one another. With this configuration, the surface area of ​​the wavelength converter 51 exposed to the outside air through the air layer is further increased compared to when the cells 62 are not columnar structures, improving the heat dissipation of the wavelength converter and suppressing a temperature rise caused by heat TH generated in the wavelength conversion layer 80.

[0085] 15, in the optical array layer 60, a plurality of cells 62, which are columnar structures, may be stacked at predetermined height intervals in the traveling direction of the excitation light EL, i.e., in the height direction H, with their axial core directions rotated by 90° in a plan view along the traveling direction of the excitation light EL. According to the optical array layer 60 shown in FIG. 15, the portions of the plurality of cells 62 that overlap each other in the height direction H in a plan view function as secondary cells, and the blue light BL propagating within the cells 62 S The spread of the irradiation area of ​​the excitation light EL and the fluorescence YL is alternately suppressed in two directions forming an angle of 90° with each other in a plane perpendicular to the height direction H. This maintains the irradiation area of ​​the excitation light EL and the fluorescence YL in a planar view in the optical array layer, and allows the excitation light EL and the fluorescence YL to enter the wavelength conversion layer 80 or exit from the wavelength conversion layer 80.

[0086] Although the preferred embodiment of the present invention has been described in detail above, the present invention is not limited to the specific embodiment, and various modifications and changes are possible within the scope of the gist of the present invention described in the claims. Also, the components of multiple embodiments can be combined as appropriate.

[0087] For example, in the above-mentioned second embodiment, a so-called transmissive wavelength converter 52 has been described, but the wavelength converter 52 may be disposed on the circumferential surface of a rotating wheel (not shown). That is, the configuration of the light source device of the present invention is not particularly limited, and the light source device of the present invention includes at least an excitation light source that emits excitation light WL and the wavelength converter of the present invention.

[0088] In the above embodiment, an example in which the light source device according to the present invention is mounted on a projector has been shown, but the present invention is not limited to this. The light source device according to the present invention can also be applied to lighting fixtures, automobile headlights, head-mounted displays, etc.

[0089] The wavelength conversion device according to the aspect of the present invention may have the following configuration. One embodiment of the wavelength conversion device of the present invention comprises a wavelength conversion layer that converts the wavelength of excitation light, and an optical array layer consisting of a plurality of cells each having a first surface onto which light wavelength-converted by the wavelength conversion layer is incident and a second surface from which the light exits, and the optical array layer has a reflective surface that reflects light at the interface between adjacent cells from the first surface to the second surface.

[0090] In the wavelength conversion device according to one aspect of the present invention, the reflecting surface may be made of a dielectric film.

[0091] In the wavelength conversion device according to one aspect of the present invention, the reflecting surface may include a diffuse reflecting surface.

[0092] In the wavelength converter according to one aspect of the present invention, an air layer may be formed between adjacent cells, and light may be reflected at an interface between the cell and the air layer due to a refractive index difference between the cell and the air layer.

[0093] In a wavelength converter according to one aspect of the present invention, the dimension of the cell in the height direction may be larger than the dimension of the cell in a plane perpendicular to the height direction.

[0094] In the wavelength converter according to one aspect of the present invention, the plurality of cells may be spaced apart from each other.

[0095] In one embodiment of the wavelength conversion device of the present invention, a reflective layer is provided on the surface opposite to the opposing surface of the optical array layer of the wavelength conversion layer, and excitation light is incident on the wavelength conversion layer through the optical array layer, and light wavelength-converted by the reflective layer is incident on the optical array layer.

[0096] In one embodiment of the wavelength conversion device of the present invention, the wavelength conversion layer is provided with an incident-side optical array layer that allows excitation light to be incident on a surface opposite to the opposing surface facing the optical array layer, and the incident-side optical array layer is composed of a plurality of cells having a third surface onto which the excitation light is incident and a fourth surface from which the incident excitation light is emitted, and has a reflective surface that reflects light at the interface between adjacent cells from the third surface to the fourth surface, and the excitation light is incident on the wavelength conversion layer through the incident-side optical array layer, and the wavelength-converted light may be incident on the optical array layer.

[0097] In the wavelength converter according to one aspect of the present invention, the size of the cells in the optical array layer may be smaller than the size of the cells in the incident-side optical array layer.

[0098] A light source device according to one aspect of the present invention may have the following configuration. A light source device according to one aspect of the present invention includes an excitation light source and the light source device according to the above aspect of the present invention, and excitation light emitted from the excitation light source is irradiated onto a wavelength conversion layer of a wavelength conversion device.

[0099] A projector according to one aspect of the invention may have the following configuration. A projector according to one aspect of the present invention comprises a light source device according to any of the above aspects of the present invention, a light modulation device that modulates light from the light source device in accordance with image information, and a projection optical device that projects the light modulated by the light modulation device. [Explanation of symbols]

[0100] 1... projector, 2, 2A, 2B... light source device, 11, 12... light source device, 50, 51, 52, 53... wavelength conversion device, EL... excitation light, BL, BL S …Blue light, YL…Fluorescent

Claims

1. A wavelength conversion layer that converts the wavelength of the excitation light; A first surface onto which light having a wavelength converted by the wavelength conversion layer is incident, and a second surface from which the light is emitted. an optical array layer comprising a plurality of cells having the Equipped with The optical array layer has an interface between the adjacent cells from the first surface to the second surface. A reflecting surface that reflects the light is provided. The excitation light is incident on a surface of the wavelength conversion layer opposite to the surface on which the optical array layer faces. an incident-side optical array layer for reflecting light therethrough; The incident-side optical array layer has a third surface to which the excitation light is incident and a second surface to which the excitation light is irradiated. and a fourth surface extending from the third surface to the fourth surface. a reflecting surface that reflects light at an interface with the cell; The excitation light is incident on the wavelength conversion layer through the incident-side optical array layer and is wavelength-converted. The reflected light is incident on the optical array layer. Wavelength conversion device.

2. The reflecting surface is made of a dielectric film.

2. The wavelength conversion device according to claim 1.

3. The reflective surface includes a diffuse reflective surface.

2. The wavelength conversion device according to claim 1.

4. An air layer is formed between the adjacent cells, Due to the difference in refractive index between the cell and the air layer, the light is Reflective, 2. The wavelength conversion device according to claim 1.

5. The dimension of the cell in the height direction is greater than the dimension of the cell in a plane perpendicular to the height direction. Hey, The wavelength conversion device according to any one of claims 1 to 4.

6. The cells are spaced apart from one another.

6. A wavelength conversion device according to claim 5.

7. The size of the cells in the optical array layer is smaller than the size of the cells in the incident side optical array layer. stomach, 2. The wavelength conversion device according to claim 1.

8. An excitation light source; A wavelength conversion device according to any one of claims 1 to 7, The excitation light emitted from the excitation light source is irradiated onto a wavelength conversion layer of the wavelength conversion device. Light source device.

9. The light source device according to claim 8 , a light modulation device that modulates the light from the light source device in accordance with image information; a projection optical device that projects the light modulated by the light modulation device; Equipped with projector.

Images