Microscope objective lens, microscope optical system, and microscope device

Abstract

A microscope objective lens (OL) comprises a first lens group (G1) having positive refractive power, a second lens group (G2) having a concave surface facing the image side, and a third lens group (G3) having a concave surface facing the object side, which are arranged in order from the object side along an optical axis. The first lens group (G1) comprises one lens component having positive refractive power, the third lens group (G3) comprises three or more lenses including two negative lenses and one positive lens, and at least one predetermined negative lens out of the two negative lenses satisfies the following conditional expression.　νdA < 40 where νdA is the Abbe number of the predetermined negative lens of the third lens group (G3).

Description

[Technical field]

[0001] The present invention relates to a microscope objective lens, a microscope optical system, and a microscope apparatus. [Background technology]

[0002] In recent years, various objective lenses for microscopes having high magnification and large numerical aperture have been proposed (for example, see Patent Document 1). For such objective lenses, it is required to effectively correct various aberrations including chromatic aberration of magnification. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] U.S. Patent No. 8,988,780 Summary of the Invention

[0004] A microscope objective lens according to a first aspect of the present invention comprises, arranged in order from the object side along an optical axis, a first lens group having a positive refractive power, a second lens group having a concave surface facing the image side, and a third lens group having a concave surface facing the object side, the first lens group being made up of one lens component having a positive refractive power, and the third lens group being made up of two negative lenses and one positive lens. of 3 1 lenses, and at least one of the two negative lenses satisfies the following conditional expression: νdA<40 where νdA is the Abbe number of the predetermined negative lens in the third lens group. Furthermore, the following conditional expression is satisfied: 0<θA-(0.6438-0.001682×νdA+0.007) where θA is the partial dispersion ratio of the predetermined negative lens in the third lens group, and is defined by the following formula when the refractive index of the predetermined negative lens with respect to the g-line is ngA, the refractive index of the predetermined negative lens with respect to the F-line is nFA, and the refractive index of the predetermined negative lens with respect to the C-line is nCA. θA = (ngA-nFA) / (nFA-nCA)

[0005] The microscope objective lens of the second invention comprises, arranged in order from the object side along the optical axis, a first lens group having positive refractive power, a second lens group with a concave surface facing the image side, and a third lens group with a concave surface facing the object side, wherein the first lens group consists of one lens component having positive refractive power, and the second lens group has a predetermined positive lens that satisfies the following conditional expression: νd2P<35 0<θ2P-(0.6438-0.001682×νd2P+0.008) where νd2P is the Abbe number of the predetermined positive lens in the second lens group. θ2P: partial dispersion ratio of the predetermined positive lens of the second lens group, which is defined by the following formula, where ng2P is the refractive index of the predetermined positive lens with respect to the g-line, nF2P is the refractive index of the predetermined positive lens with respect to the F-line, and nC2P is the refractive index of the predetermined positive lens with respect to the C-line. θ2P=(ng2P-nF2P) / (nF2P-nC2P)

[0006] A microscope optical system according to the present invention includes the above-mentioned microscope objective lens and a second objective lens that collects light from the microscope objective lens.

[0007] A microscope apparatus according to the present invention includes the above-mentioned microscope objective lens. [Brief description of the drawings]

[0008] [Figure 1] 1 is a cross-sectional view showing the configuration of a microscope objective lens according to a first example. [Diagram 2] 3A to 3C are diagrams showing various aberrations of the microscope objective lens according to the first example. [Diagram 3] 3A to 3C are chromatic aberration diagrams of the microscope objective lens according to the first example. [Figure 4] 3A to 3C are diagrams showing coma aberration of the microscope objective lens according to the first example. [Diagram 5]FIG. 11 is a cross-sectional view showing the configuration of a microscope objective lens according to a second embodiment. [Figure 6] 7A to 7C are diagrams showing various aberrations of the microscope objective lens according to the second example. [Figure 7] 6A to 6C are chromatic aberration diagrams of the microscope objective lens according to the second example. [Figure 8] 6A to 6C are diagrams showing coma aberration of the microscope objective lens according to the second example. [Figure 9] FIG. 11 is a cross-sectional view showing the configuration of a microscope objective lens according to a third example. [Figure 10] 13A to 13C are diagrams showing various aberrations of the microscope objective lens according to the third example. [Figure 11] 13A to 13C are chromatic aberration diagrams of the microscope objective lens according to the third example. [Figure 12] 13A to 13C are diagrams showing coma aberration of the microscope objective lens according to the third example. [Figure 13] FIG. 4 is a cross-sectional view showing the configuration of a second objective lens. [Figure 14] FIG. 1 is a schematic diagram illustrating a confocal fluorescence microscope, which is an example of a microscope device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Preferred embodiments of the present invention will be described below. First, a microscope optical system and a confocal fluorescence microscope (microscope device) equipped with a microscope objective lens according to each embodiment will be described with reference to FIG. 14. As shown in FIG. 14, a confocal fluorescence microscope 1 is configured to have a stage 10, a light source 20, an illumination optical system 30, a microscope optical system 40, and a detection unit 50. In the following description, the coordinate axis extending in the direction of the optical axis of the microscope objective lens of the confocal fluorescence microscope 1 is defined as the z-axis. Moreover, coordinate axes extending in directions perpendicular to each other in a plane perpendicular to the z-axis are defined as the x-axis and y-axis, respectively.

[0010] A sample SA is placed on the stage 10, for example, held between a slide glass (not shown) and a cover glass (not shown). A sample SA contained in a sample container (not shown) together with an immersion liquid may also be placed on the stage 10. The sample SA contains a fluorescent substance such as a fluorescent dye. The sample SA is, for example, a cell that has been fluorescently stained in advance. A stage driver 11 is provided near the stage 10. The stage driver 11 moves the stage 10 along the z-axis.

[0011] The light source 20 generates excitation light in a predetermined wavelength band. For example, a laser light source capable of emitting laser light (excitation light) in a predetermined wavelength band is used as the light source 20. The predetermined wavelength band is set to a wavelength band capable of exciting the sample SA containing a fluorescent substance. The excitation light emitted from the light source 20 enters the illumination optical system 30.

[0012] The illumination optical system 30 illuminates the sample SA on the stage 10 with excitation light emitted from the light source 20. The illumination optical system 30 includes, in order from the light source 20 side to the sample SA side, a collimator lens 31, a beam splitter 33, and a scanner 34. The illumination optical system 30 also includes a microscope objective lens OL of the microscope optical system 40. The collimator lens 31 converts the excitation light emitted from the light source 20 into parallel light.

[0013] The beam splitter 33 has the property of reflecting the excitation light from the light source 20 and transmitting the fluorescence from the sample SA. The beam splitter 33 reflects the excitation light from the light source 20 toward the sample SA on the stage 10. The beam splitter 33 transmits the fluorescence generated in the sample SA toward the detection unit 50. An excitation filter 32 that transmits the excitation light from the light source 20 is disposed between the beam splitter 33 and the collimator lens 31. A fluorescence filter 35 that transmits the fluorescence from the sample SA is disposed between the beam splitter 33 and the second objective lens IL of the microscope optical system 40.

[0014] The scanner 34 scans the sample SA in two directions, the x direction and the y direction, with the excitation light from the light source 20. As the scanner 34, for example, a galvano scanner, a resonant scanner, or the like is used.

[0015] The microscope optical system 40 collects the fluorescence generated in the sample SA. The microscope optical system 40 includes, in order from the sample SA side to the detection unit 50 side, a microscope objective lens OL and a second objective lens IL. The microscope optical system 40 also includes a scanner 34 and a beam splitter 33 arranged between the microscope objective lens OL and the second objective lens IL. The microscope objective lens OL is arranged above and facing the stage 10 on which the sample SA is placed. The microscope objective lens OL collects excitation light from the light source 20 and irradiates the sample SA on the stage 10. The microscope objective lens OL also receives the fluorescence generated in the sample SA and converts it into parallel light. The second objective lens IL collects the fluorescence (parallel light) from the microscope objective lens OL.

[0016] The detection unit 50 detects the fluorescence generated in the sample SA via the microscope optical system 40. For example, a photomultiplier tube is used as the detection unit 50. A pinhole 45 is provided between the microscope optical system 40 and the detection unit 50. The pinhole 45 is disposed at a position conjugate with the focal position of the microscope objective lens OL on the sample SA side. The pinhole 45 passes only light from the focal plane of the microscope objective lens OL (a plane perpendicular to the optical axis of the microscope objective lens OL that passes through the focal position of the microscope objective lens OL) or a plane shifted from the focal plane in the optical axis direction within a predetermined deviation tolerance range, and blocks other light.

[0017] In the confocal fluorescence microscope 1 configured as above, the excitation light emitted from the light source 20 passes through the collimator lens 31 and becomes parallel light. The excitation light that passes through the collimator lens 31 passes through the excitation filter 32 and enters the beam splitter 33. The excitation light that enters the beam splitter 33 is reflected by the beam splitter 33 and enters the scanner 34. The scanner 34 scans the sample SA in two directions, the x direction and the y direction, with the excitation light that enters the scanner 34. The excitation light that enters the scanner 34 passes through the scanner 34 and passes through the microscope objective lens OL, and is focused on the focal plane of the microscope objective lens OL. The portion of the sample SA where the excitation light is focused (i.e., the portion that overlaps with the focal plane of the microscope objective lens OL) is two-dimensionally scanned in two directions, the x direction and the y direction, by the scanner 34. In this way, the illumination optical system 30 illuminates the sample SA on the stage 10 with the excitation light emitted from the light source 20.

[0018] Irradiation with the excitation light excites fluorescent substances contained in the sample SA, causing them to emit fluorescence. The fluorescence from the sample SA passes through the microscope objective lens OL and becomes parallel light. The fluorescence that passes through the microscope objective lens OL passes through the scanner 34 and enters the beam splitter 33. The fluorescence that enters the beam splitter 33 passes through the beam splitter 33 and reaches the fluorescence filter 35. The fluorescence that reaches the fluorescence filter 35 passes through the fluorescence filter 35 and passes through the second objective lens IL, and is focused at a position conjugate with the focal position of the microscope objective lens OL. The fluorescence focused at a position conjugate with the focal position of the microscope objective lens OL passes through the pinhole 45 and enters the detection unit 50.

[0019] The detection unit 50 performs photoelectric conversion of the light (fluorescence) incident on the detection unit 50, and generates data corresponding to the amount of light (brightness) of the light as a light detection signal. The detection unit 50 outputs the generated data to a control unit (not shown). The control unit treats the data input from the detection unit 50 as data for one pixel and performs a process of arranging this in synchronization with the two-dimensional scanning by the scanner 34, thereby generating one image data in which data for multiple pixels is arranged two-dimensionally (in two directions). In this way, the control unit can acquire an image of the sample SA.

[0020] Although the confocal fluorescence microscope 1 has been described as an example of the microscope apparatus according to the present embodiment, the present invention is not limited to this. For example, the microscope apparatus according to the present embodiment may be a confocal microscope, a multiphoton excitation microscope, a super-resolution microscope, or the like. Furthermore, the confocal fluorescence microscope 1 may be an upright microscope or an inverted microscope.

[0021] Next, a microscope objective lens according to the first embodiment will be described. As an example of the microscope objective lens OL according to the first embodiment, a microscope objective lens OL(1) shown in FIG. 1 is composed of a first lens group G1 having a positive refractive power, a second lens group G2 having a concave surface facing the image side, and a third lens group G3 having a concave surface facing the object side, which are arranged in order from the object side along the optical axis. The first lens group G1 is composed of one lens component having a positive refractive power. The third lens group G3 is composed of three or more lenses including two negative lenses and one positive lens. In each embodiment, the lens component indicates a single lens or a cemented lens. Also, in FIG. 1 etc., an object OB indicates an object surface.

[0022] With the above configuration, at least one predetermined negative lens (L302) of the two negative lenses in the third lens group G3 satisfies the following conditional expression (1). νdA<40 (1) where νdA is the Abbe number of a given negative lens in the third lens group G3.

[0023] According to the first embodiment, it is possible to obtain a microscope objective lens in which various aberrations including lateral chromatic aberration are well corrected, and a microscope optical system and a microscope apparatus equipped with this microscope objective lens. The microscope objective lens OL according to the first embodiment may be the optical system OL(2) shown in FIG. 5 or the optical system OL(3) shown in FIG.

[0024] Condition (1) defines an appropriate range for the Abbe number of a predetermined negative lens in the third lens group G3. By satisfying condition (1), first-order achromatism can be favorably achieved in correcting lateral chromatic aberration.

[0025] When the corresponding value of conditional expression (1) exceeds the upper limit, it becomes difficult to correct lateral chromatic aberration. By setting the upper limit of conditional expression (1) to 35, 33, 32, or further to 30, the effect of this embodiment can be further ensured.

[0026] In the microscope objective lens OL of the first embodiment, it is desirable that the specified negative lens in the third lens group G3 is one of the two negative lenses in the third lens group G3 and satisfies the following conditional expressions (2) and (3). 0<νdX-νdA (2) 0<(θA-θX) / (νdA-νdX)×(νdP-νdX)+θX-θP ···(3) where νdX is the Abbe number of the other of the two negative lenses in the third lens group G3. νdP: Abbe number of the positive lens in the third lens group G3 θA: partial dispersion ratio of a given negative lens in the third lens group G3, defined by the following formula when the refractive index of the given negative lens with respect to the g-line is ngA, the refractive index of the given negative lens with respect to the F-line is nFA, and the refractive index of the given negative lens with respect to the C-line is nCA. θA = (ngA-nFA) / (nFA-nCA) θX: partial dispersion ratio of the other negative lens in the third lens group G3, which is defined by the following formula when the refractive index of the other negative lens for the g-line is ngX, the refractive index of the other negative lens for the F-line is nFX, and the refractive index of the other negative lens for the C-line is nCX. θX=(ngX-nFX) / (nFX-nCX) θP: partial dispersion ratio of the positive lens in the third lens group G3, which is defined by the following formula when the refractive index of the positive lens for the g-line is ngP, the refractive index of the positive lens for the F-line is nFP, and the refractive index of the positive lens for the C-line is nCP. θP = (ngP-nFP) / (nFP-nCP)

[0027] Conditional formula (2) defines an appropriate relationship between the Abbe number of a predetermined negative lens in the third lens group G3 and the Abbe number of the other negative lens. Conditional formula (3) defines an appropriate relationship between the partial dispersion ratio and Abbe number of a predetermined negative lens in the third lens group G3, the partial dispersion ratio and Abbe number of the other negative lens, and the partial dispersion ratio and Abbe number of the positive lens. By satisfying conditional formulas (2) and (3), in addition to the first-order achromatism, the second-order spectrum can be well corrected in the correction of lateral chromatic aberration.

[0028] When the corresponding value of conditional expression (2) falls below the lower limit, it becomes difficult to correct lateral chromatic aberration. By setting the lower limit of conditional expression (2) to 3, 5, 8, or even 10, the effect of this embodiment can be further ensured.

[0029] When the corresponding value of conditional expression (3) falls below the lower limit, it becomes difficult to correct lateral chromatic aberration. By setting the lower limit of conditional expression (3) to 0.01, the effect of this embodiment can be more reliably achieved.

[0030] In the microscope objective lens OL of the first embodiment, the specified negative lens in the third lens group G3 may be one of the two negative lenses in the third lens group G3, and may be configured to satisfy the following conditional expressions (2) and (4). 0<νdX-νdA (2) 0<(θA-θX) / (νdA-νdX)×(νdP-νdX)+θX-θP-0.015 (4) where νdX is the Abbe number of the other of the two negative lenses in the third lens group G3. νdP: Abbe number of the positive lens in the third lens group G3 θA: partial dispersion ratio of a given negative lens in the third lens group G3, defined by the following formula when the refractive index of the given negative lens with respect to the g-line is ngA, the refractive index of the given negative lens with respect to the F-line is nFA, and the refractive index of the given negative lens with respect to the C-line is nCA. θA = (ngA-nFA) / (nFA-nCA) θX: partial dispersion ratio of the other negative lens in the third lens group G3, which is defined by the following formula when the refractive index of the other negative lens for the g-line is ngX, the refractive index of the other negative lens for the F-line is nFX, and the refractive index of the other negative lens for the C-line is nCX. θX=(ngX-nFX) / (nFX-nCX) θP: partial dispersion ratio of the positive lens in the third lens group G3, which is defined by the following formula when the refractive index of the positive lens for the g-line is ngP, the refractive index of the positive lens for the F-line is nFP, and the refractive index of the positive lens for the C-line is nCP. θP = (ngP-nFP) / (nFP-nCP)

[0031] As described above, conditional formula (2) defines an appropriate relationship between the Abbe number of a given negative lens in the third lens group G3 and the Abbe number of the other negative lens. Conditional formula (4) defines an appropriate relationship between the partial dispersion ratio and Abbe number of a given negative lens in the third lens group G3, the partial dispersion ratio and Abbe number of the other negative lens, and the partial dispersion ratio and Abbe number of the positive lens. By satisfying conditional formulas (2) and (4), in addition to the first-order achromatism, the second-order spectrum can be well corrected in the correction of lateral chromatic aberration.

[0032] When the corresponding value of conditional expression (2) falls below the lower limit, it becomes difficult to correct lateral chromatic aberration. By setting the lower limit of conditional expression (2) to 3, 5, 8, or even 10, the effect of this embodiment can be further ensured.

[0033] When the corresponding value of conditional expression (4) falls below the lower limit, it becomes difficult to correct lateral chromatic aberration. By setting the lower limit of conditional expression (4) to 0.001, the effect of this embodiment can be more reliably achieved.

[0034] In the microscope objective lens OL according to the first embodiment, it is desirable to satisfy the following conditional expression (5). 0<θA-(0.6438-0.001682×νdA+0.007) ···(5) where θA is the partial dispersion ratio of a given negative lens in the third lens group G3, and is defined by the following formula when the refractive index of the given negative lens with respect to the g-line is ngA, the refractive index of the given negative lens with respect to the F-line is nFA, and the refractive index of the given negative lens with respect to the C-line is nCA. θA = (ngA-nFA) / (nFA-nCA)

[0035] Condition (5) defines an appropriate relationship between the Abbe number and partial dispersion ratio of a predetermined negative lens in the third lens group G3. By satisfying condition (5), in addition to first-order achromatism, second-order spectrum can be well corrected in the correction of lateral chromatic aberration.

[0036] When the corresponding value of conditional expression (5) falls below the lower limit, it becomes difficult to correct lateral chromatic aberration. By setting the lower limit of conditional expression (5) to 0.01, the effect of this embodiment can be more reliably achieved.

[0037] In the microscope objective lens OL according to the first embodiment, the following conditional expression (6) may be satisfied. 0<θA-(0.6438-0.001682×νdA+0.017) ···(6) where θA is the partial dispersion ratio of a given negative lens in the third lens group G3, and is defined by the following formula when the refractive index of the given negative lens with respect to the g-line is ngA, the refractive index of the given negative lens with respect to the F-line is nFA, and the refractive index of the given negative lens with respect to the C-line is nCA. θA = (ngA-nFA) / (nFA-nCA)

[0038] Conditional expression (6) defines an appropriate relationship between the Abbe number and partial dispersion ratio of a predetermined negative lens in the third lens group G3. By satisfying conditional expression (6), in the correction of lateral chromatic aberration, in addition to the first-order achromatism, the second-order spectrum can be well corrected.

[0039] When the corresponding value of conditional expression (6) falls below the lower limit, it becomes difficult to correct lateral chromatic aberration. By setting the lower limit of conditional expression (6) to 0.005, the effect of this embodiment can be more reliably achieved.

[0040] In the microscope objective lens OL according to the first embodiment, it is preferable that the predetermined negative lens in the third lens group G3 is one of the two negative lenses in the third lens group G3, and the other of the two negative lenses is disposed closest to the object side of the third lens group G3 than the predetermined negative lens, thereby making it possible to satisfactorily correct off-axis coma aberration.

[0041] In the microscope objective lens OL according to the first embodiment, it is desirable to satisfy the following conditional expression (7). 1.68 <ndX ···(7) where ndX is the refractive index of the other negative lens in the third lens group G3 at the d line.

[0042] Condition (7) defines an appropriate range for the refractive index at the d-line of the other negative lens in the third lens group G3. By satisfying condition (7), off-axis coma can be effectively corrected.

[0043] When the corresponding value of conditional expression (7) falls below the lower limit, it becomes difficult to correct off-axis coma aberration. By setting the lower limit of conditional expression (7) to 1.69, the effect of this embodiment can be more reliably achieved.

[0044] In the microscope objective lens OL according to the first embodiment, it is desirable for the second lens group G2 to have a positive refractive power, which allows for excellent correction of spherical aberration and axial chromatic aberration.

[0045] In the microscope objective lens OL according to the first embodiment, it is desirable for the second lens group G2 to have a predetermined positive lens that satisfies the following conditional expression (8). νd2P<35 (8) where νd2P is the Abbe number of a given positive lens in the second lens group G2.

[0046] Conditional expression (8) defines an appropriate range for the Abbe number of the predetermined positive lens in the second lens group G2. In each embodiment, the predetermined positive lens is preferably a glass lens. By satisfying conditional expression (8), axial chromatic aberration can be effectively corrected.

[0047] When the corresponding value of conditional expression (8) exceeds the upper limit, it becomes difficult to correct longitudinal chromatic aberration. By setting the upper limit of conditional expression (8) to 33, or further to 30, the effect of this embodiment can be made more certain.

[0048] In the microscope objective lens OL of the first embodiment, it is desirable for the second lens group G2 to have a predetermined positive lens through which the light ray farthest from the optical axis passes in the second lens group G2 and which satisfies the following conditional expressions (8) and (9). νd2P<35 (8) 0<θ2P-(0.6438-0.001682×νd2P+0.008) (9) where νd2P is the Abbe number of a given positive lens in the second lens group G2. θ2P: partial dispersion ratio of a given positive lens in the second lens group G2, which is defined by the following formula, where ng2P is the refractive index of the given positive lens with respect to the g-line, nF2P is the refractive index of the given positive lens with respect to the F-line, and nC2P is the refractive index of the given positive lens with respect to the C-line. θ2P=(ng2P-nF2P) / (nF2P-nC2P)

[0049] As described above, conditional expression (8) defines an appropriate range for the Abbe number of a predetermined positive lens in the second lens group G2. Conditional expression (9) defines an appropriate relationship between the Abbe number and partial dispersion ratio of a predetermined positive lens in the second lens group G2. By satisfying conditional expressions (8) and (9), in addition to first-order achromatism, second-order spectrum can be well corrected in the correction of axial chromatic aberration.

[0050] When the corresponding value of conditional expression (8) exceeds the upper limit, it becomes difficult to correct longitudinal chromatic aberration. By setting the upper limit of conditional expression (8) to 33, or further to 30, the effect of this embodiment can be made more certain.

[0051] When the corresponding value of conditional expression (9) falls below the lower limit, it becomes difficult to correct longitudinal chromatic aberration. By setting the lower limit of conditional expression (9) to 0.001, the effect of this embodiment can be ensured.

[0052] In the microscope objective lens OL of the first embodiment, the second lens group G2 may have a positive lens in the second lens group G2 through which the light ray farthest from the optical axis passes, and a certain positive lens that is arranged on the object side of the positive lens through which the light ray farthest from the optical axis passes and satisfies the following conditional expressions (8) and (9). νd2P<35 (8) 0<θ2P-(0.6438-0.001682×νd2P+0.008) (9) where νd2P is the Abbe number of a given positive lens in the second lens group G2. θ2P: partial dispersion ratio of a given positive lens in the second lens group G2, which is defined by the following formula, where ng2P is the refractive index of the given positive lens with respect to the g-line, nF2P is the refractive index of the given positive lens with respect to the F-line, and nC2P is the refractive index of the given positive lens with respect to the C-line. θ2P=(ng2P-nF2P) / (nF2P-nC2P)

[0053] As described above, conditional expression (8) defines an appropriate range for the Abbe number of a predetermined positive lens in the second lens group G2. As described above, conditional expression (9) defines an appropriate relationship between the Abbe number and partial dispersion ratio of a predetermined positive lens in the second lens group G2. By satisfying conditional expressions (8) and (9), in addition to first-order achromatism, second-order spectrum can be well corrected in the correction of axial chromatic aberration.

[0054] When the corresponding value of conditional expression (8) exceeds the upper limit, it becomes difficult to correct longitudinal chromatic aberration. By setting the upper limit of conditional expression (8) to 33, or further to 30, the effect of this embodiment can be made more certain.

[0055] When the corresponding value of conditional expression (9) falls below the lower limit, it becomes difficult to correct longitudinal chromatic aberration. By setting the lower limit of conditional expression (9) to 0.001, the effect of this embodiment can be ensured.

[0056] In the microscope objective lens OL of the first embodiment, the second lens group G2 may have a positive lens in the second lens group G2 through which the light ray farthest from the optical axis passes, and a certain positive lens that is arranged on the image side of the positive lens through which the light ray farthest from the optical axis passes and satisfies the following conditional expressions (8) and (9). νd2P<35 (8) 0<θ2P-(0.6438-0.001682×νd2P+0.008) (9) where νd2P is the Abbe number of a given positive lens in the second lens group G2. θ2P: partial dispersion ratio of a given positive lens in the second lens group G2, which is defined by the following formula, where ng2P is the refractive index of the given positive lens with respect to the g-line, nF2P is the refractive index of the given positive lens with respect to the F-line, and nC2P is the refractive index of the given positive lens with respect to the C-line. θ2P=(ng2P-nF2P) / (nF2P-nC2P)

[0057] As described above, conditional expression (8) defines an appropriate range for the Abbe number of a predetermined positive lens in the second lens group G2. As described above, conditional expression (9) defines an appropriate relationship between the Abbe number and partial dispersion ratio of a predetermined positive lens in the second lens group G2. By satisfying conditional expressions (8) and (9), in addition to first-order achromatism, second-order spectrum can be well corrected in the correction of axial chromatic aberration.

[0058] When the corresponding value of conditional expression (8) exceeds the upper limit, it becomes difficult to correct longitudinal chromatic aberration. By setting the upper limit of conditional expression (8) to 33, or further to 30, the effect of this embodiment can be made more certain.

[0059] When the corresponding value of conditional expression (9) falls below the lower limit, it becomes difficult to correct longitudinal chromatic aberration. By setting the lower limit of conditional expression (9) to 0.001, the effect of this embodiment can be ensured.

[0060] In the microscope objective lens OL according to the first embodiment, the lens component of the first lens group G1 is preferably a cemented lens including a plano-convex positive lens with a flat surface facing the object side. This allows for good correction of field curvature. Note that the lens component of the first lens group G1 is not limited to a cemented lens, and may be a single lens.

[0061] Next, a microscope objective lens according to the second embodiment will be described. The microscope objective lens according to the second embodiment has the same configuration as the microscope objective lens OL according to the first embodiment, and therefore will be described using the same reference numerals as in the first embodiment. As an example of the microscope objective lens OL according to the second embodiment, the microscope objective lens OL(1) shown in FIG. 1 is composed of a first lens group G1 having a positive refractive power, a second lens group G2 with a concave surface facing the image side, and a third lens group G3 with a concave surface facing the object side, which are arranged in this order from the object side along the optical axis. The first lens group G1 is composed of one lens component having a positive refractive power.

[0062] With the above configuration, the second lens group G2 has a predetermined positive lens that satisfies the following conditional expressions (8) and (9). νd2P<35 (8) 0<θ2P-(0.6438-0.001682×νd2P+0.008) (9) where νd2P is the Abbe number of a given positive lens in the second lens group G2. θ2P: partial dispersion ratio of a given positive lens in the second lens group G2, which is defined by the following formula, where ng2P is the refractive index of the given positive lens with respect to the g-line, nF2P is the refractive index of the given positive lens with respect to the F-line, and nC2P is the refractive index of the given positive lens with respect to the C-line. θ2P=(ng2P-nF2P) / (nF2P-nC2P)

[0063] According to the second embodiment, it is possible to obtain a microscope objective lens in which various aberrations including chromatic aberration of magnification are well corrected, and a microscope optical system and a microscope apparatus equipped with this microscope objective lens. The microscope objective lens OL according to the second embodiment may be the optical system OL(2) shown in FIG. 5 or the optical system OL(3) shown in FIG. 9.

[0064] As described above, conditional expression (8) defines an appropriate range for the Abbe number of a predetermined positive lens in the second lens group G2. As described above, conditional expression (9) defines an appropriate relationship between the Abbe number and partial dispersion ratio of a predetermined positive lens in the second lens group G2. By satisfying conditional expressions (8) and (9), in addition to first-order achromatism, second-order spectrum can be well corrected in the correction of axial chromatic aberration.

[0065] When the corresponding value of conditional expression (8) exceeds the upper limit, it becomes difficult to correct longitudinal chromatic aberration. By setting the upper limit of conditional expression (8) to 33, or further to 30, the effect of this embodiment can be made more certain.

[0066] When the corresponding value of conditional expression (9) falls below the lower limit, it becomes difficult to correct longitudinal chromatic aberration. By setting the lower limit of conditional expression (9) to 0.001, the effect of this embodiment can be ensured.

[0067] In the microscope objective lens OL according to the second embodiment, the third lens group G3 has two negative lenses, and it is desirable that at least one of the two negative lenses satisfies the above-mentioned conditional expression (1). By satisfying conditional expression (1), it is possible to perform first-order achromatism well in the correction of lateral chromatic aberration, as in the case of the first embodiment. In addition, by setting the upper limit value of conditional expression (1) to 35, 33, 32, or even 30, the effect of this embodiment can be made more certain.

[0068] In the microscope objective lens OL according to the second embodiment, the third lens group G3 is composed of three or more lenses including two negative lenses and one positive lens, and the predetermined negative lens that satisfies the above-mentioned conditional expression (1) etc. is one of the two negative lenses in the third lens group G3, and it is preferable that the above-mentioned conditional expressions (2) and (3) are satisfied. As in the first embodiment, by satisfying the conditional expressions (2) and (3), in the correction of the lateral chromatic aberration, in addition to the first-order achromatism, the second-order spectrum can be well corrected. Moreover, by setting the lower limit of the conditional expression (2) to 3, 5, 8, or even 10, the effect of this embodiment can be made more certain. By setting the lower limit of the conditional expression (3) to 0.01, the effect of this embodiment can be made more certain.

[0069] In the microscope objective lens OL according to the second embodiment, the third lens group G3 is composed of three or more lenses including two negative lenses and one positive lens, and the predetermined negative lens satisfying the above-mentioned conditional expression (1) etc. may be one of the two negative lenses in the third lens group G3, and may satisfy the above-mentioned conditional expressions (2) and (4). By satisfying conditional expressions (2) and (4), in the correction of the lateral chromatic aberration, in addition to the first-order achromatism, the second-order spectrum can be corrected well, as in the case of the first embodiment. Moreover, by setting the lower limit of conditional expression (2) to 3, 5, 8, or even 10, the effect of this embodiment can be made more certain. By setting the lower limit of conditional expression (4) to 0.01, the effect of this embodiment can be made more certain.

[0070] In the microscope objective lens OL according to the second embodiment, the third lens group G3 has two negative lenses, and it is desirable that at least one of the two negative lenses satisfies the above-mentioned conditional expression (5). By satisfying the conditional expression (5), in the correction of the lateral chromatic aberration, in addition to the first-order achromatism, the second-order spectrum can be well corrected. Moreover, by setting the lower limit of the conditional expression (5) to 0.01, the effect of this embodiment can be made more certain.

[0071] In the microscope objective lens OL according to the second embodiment, the third lens group G3 may have two negative lenses, and at least one of the two negative lenses may satisfy the above-mentioned conditional expression (6). By satisfying the conditional expression (6), in the correction of the lateral chromatic aberration, in addition to the first-order achromatism, the second-order spectrum can be corrected well, as in the case of the first embodiment. Moreover, by setting the lower limit of the conditional expression (6) to 0.005, the effect of this embodiment can be made more certain.

[0072] In the microscope objective lens OL according to the second embodiment, the third lens group G3 has two negative lenses, and the predetermined negative lens that satisfies the above-mentioned conditional formula (1) is one of the two negative lenses in the third lens group G3, and the other of the two negative lenses is desirably disposed closest to the object side of the third lens group G3 than the predetermined negative lens. This allows off-axis coma to be well corrected.

[0073] In the microscope objective lens OL according to the second embodiment, it is desirable to satisfy the above-mentioned conditional expression (7). By satisfying conditional expression (7), off-axis coma aberration can be corrected well, as in the case of the first embodiment. In addition, by setting the lower limit of conditional expression (7) to 1.69, the effect of this embodiment can be made more certain.

[0074] In the microscope objective lens OL according to the second embodiment, it is desirable for the second lens group G2 to have a positive refractive power, which allows for good correction of spherical aberration and axial chromatic aberration.

[0075] In the microscope objective lens OL according to the second embodiment, the lens component of the first lens group G1 is preferably a cemented lens including a plano-convex positive lens with a flat surface facing the object side. This allows for good correction of field curvature. Note that the lens component of the first lens group G1 is not limited to a cemented lens, and may be a single lens. EXAMPLES

[0076] Examples of the microscope objective lens OL according to each embodiment will be described below with reference to the drawings. Figs. 1, 5, and 9 are optical path diagrams showing the configuration of the microscope objective lens OL{OL(1)-OL(3)} according to the first to third examples. In Figs. 1, 5, and 9, each lens group is represented by a combination of a symbol G and a number (or alphabet), and each lens is represented by a combination of a symbol L and a number (or alphabet). In this case, in order to prevent the number and types of symbols and numbers from increasing and becoming complicated, lenses, etc. are represented by independent combinations of symbols and numbers for each example. Therefore, even if the same combinations of symbols and numbers are used between examples, this does not mean that they have the same configuration.

[0077] Tables 1 to 3 are shown below, with Table 1 showing data on various elements in Example 1, Table 2 showing data on various elements in Example 2, and Table 3 showing data on various elements in Example 3. In each example, the d-line (wavelength λ=587.6 nm), C-line (wavelength λ=656.3 nm), and F-line (wavelength λ=486.1 nm) are selected as the targets for calculating the aberration characteristics.

[0078] In the table of [Overall Specifications], β indicates the magnification of the microscope objective lens. f indicates the focal length of the microscope objective lens. NA indicates the object-side numerical aperture of the microscope objective lens. WD is the working distance, which indicates the distance on the optical axis from the object (excluding the thickness of the cover glass) to the lens surface of the microscope objective lens closest to the object (the first surface described below). νdA indicates the Abbe number of a specific negative lens in the third lens group. θA indicates the partial dispersion ratio of a specific negative lens in the third lens group. νdX indicates the Abbe number of the other negative lens in the third lens group. θX indicates the partial dispersion ratio of the other negative lens in the third lens group. νdP indicates the Abbe number of a positive lens in the third lens group. θP indicates the partial dispersion ratio of a positive lens in the third lens group. νd2P indicates the Abbe number of a specific positive lens in the second lens group. θ2P represents the partial dispersion ratio of a predetermined positive lens in the second lens group.

[0079] In the [Lens Data] table, the surface numbers indicate the order of the lens surfaces from the object side, R is the radius of curvature corresponding to each surface number (positive values ​​are used for lens surfaces convex toward the object side), D is the lens thickness or air space on the optical axis corresponding to each surface number, nd is the refractive index of the optical material corresponding to each surface number with respect to the d-line (wavelength λ=587.6 nm), νd is the Abbe number based on the d-line of the optical material corresponding to each surface number, H is the distance between the most distant ray from the optical axis on the lens surface corresponding to each surface number and the optical axis, and θgF is the partial dispersion ratio of the material of the optical member corresponding to each surface number. The "∞" in the radius of curvature indicates a plane or an opening. Also, the description of the refractive index of air, nd=1.00000, is omitted.

[0080] The refractive index of the material of the optical component with respect to the g-line (wavelength λ=435.8 nm) is ng, the refractive index of the material of the optical component with respect to the F-line (wavelength λ=486.1 nm) is nF, and the refractive index of the material of the optical component with respect to the C-line (wavelength λ=656.3 nm) is nC. In this case, the partial dispersion ratio θgF of the material of the optical component is defined by the following formula (A).

[0081] θgF=(ng-nF) / (nF-nC) …(A)

[0082] The [Lens Group Data] table shows the starting surface (the surface closest to the object) and focal length of each lens group.

[0083] In the following, for all specifications, the focal length f, radius of curvature R, surface separation D, and other lengths are generally in "mm" unless otherwise specified; however, this is not limited to this because the optical system can provide the same optical performance even when proportionally enlarged or reduced.

[0084] The above explanation of the tables is common to all the embodiments, and therefore, duplicate explanations will be omitted below.

[0085] (First embodiment) The first embodiment will be described with reference to FIGS. 1 to 4 and Table 1. FIG. 1 is an optical path diagram showing the configuration of the microscope objective lens according to the first embodiment. The microscope objective lens OL(1) according to the first embodiment is composed of a first lens group G1 having positive refractive power, a second lens group G2 having a concave surface facing the image side and having positive refractive power, and a third lens group G3 having a concave surface facing the object side, which are arranged in this order from the object side along the optical axis. The space between the tip of the microscope objective lens OL(1) according to the first embodiment and the cover glass CV covering the object OB is filled with an immersion liquid (oil). The space between the cover glass CV and the object OB is also filled with an immersion liquid (oil). The refractive index of the immersion liquid for the d-line (wavelength λ=587.6 nm) is 1.39847. The refractive index of the cover glass CV for the d-line is 1.52439.

[0086] The first lens group G1 is composed of a cemented lens having positive refractive power, in which, in order from the object side along the optical axis, a plano-convex positive lens L101 with its flat surface facing the object side and a negative meniscus lens L102 with its concave surface facing the object side are cemented together.

[0087] The second lens group G2 is composed of, arranged in order from the object side along the optical axis, a positive meniscus lens L201 with a concave surface facing the object side, a cemented lens formed by cementing a negative meniscus lens L202 with a convex surface facing the object side and a biconvex positive lens L203, a cemented lens formed by cementing a biconcave negative lens L204 and a biconvex positive lens L205, a positive meniscus lens L206 with a concave surface facing the object side, a cemented lens formed by cementing a negative meniscus lens L207 with a convex surface facing the object side and a biconvex positive lens L208, a cemented lens formed by cementing a biconvex positive lens L209 and a biconcave negative lens L210, and a cemented lens formed by cementing a positive meniscus lens L211 with a convex surface facing the object side and a negative meniscus lens L212 with a convex surface facing the object side. The positive meniscus lens L206 in the second lens group G2 corresponds to the above-mentioned predetermined positive lens through which the light ray farthest from the optical axis passes in the second lens group G2.

[0088] The third lens group G3 is composed of a cemented lens in which, in order from the object side along the optical axis, a biconcave negative lens L301, a negative meniscus lens L302 with a convex surface facing the object side, and a biconvex positive lens L303 are cemented together. The negative meniscus lens L302 of the third lens group G3 corresponds to the above-mentioned predetermined negative lens. The negative lens L301 of the third lens group G3 corresponds to the above-mentioned other negative lens. The positive lens L303 of the third lens group G3 corresponds to the above-mentioned positive lens.

[0089] At least three lens components (single lenses or cemented lenses) in the second lens group G2 are moved along the optical axis, so that the air gap between the lens components in the second lens group G2 can be changed according to the thickness of the cover glass CV. The lens components in the second lens group G2 that can move along the optical axis function as a so-called correction collar, and can correct aberrations that change according to the thickness of the cover glass CV.

[0090] Table 1 below lists the values ​​of the specifications of the microscope objective lens according to Example 1. Note that the first surface is the object surface (OB).

[0091] (Table 1) [Overall specifications] β=60 times f=3.34 NA=1.30 WD=0.33 νdA=27.35 θA=0.6319 νdX=48.10 θX=0.5603 νdP=29.84 θP=0.6017 νd2P=28.69 θ2P=0.6065 [Lens data] Surface number RD nd νd H θgF 1 ∞ 0.23 1.39847 51.24 2 ∞ 0.17 1.52439 54.28 3 ∞ 0.10 1.39847 51.24 4 ∞ 0.70 1.45850 67.85 5 -2.033 3.44 1.95375 32.33 6 -3.746 0.15 7 -9.727 3.36 1.49782 82.57 4.92 8 -6.923 0.20 5.96 9 103.938 0.95 1.55298 55.07 7.98 10 16.911 7.11 1.49782 82.57 8.85 11 -14.628 0.20 9.26 12 -50.850 0.60 1.67300 38.26 9.54 13 21.429 8.17 1.43385 95.25 10.09 14 -14.740 0.20 10.45 15 -58.693 2.18 1.79504 28.69 10.41 0.6065 16 -31.348 0.20 10.51 17 27.743 0.85 1.74320 49.26 9.92 18 11.280 7.53 1.43385 95.25 9.03 19 -24.461 0.90 8.96 20 12.668 4.70 1.43425 94.77 7.59 21 -29.055 0.85 1.73211 46.18 7.07 22 15.117 0.20 6.25 23 7.224 4.26 1.43425 94.77 5.98 24 68.128 7.24 1.85026 32.35 5.38 25 3.610 3.01 2.47 26 -4.497 0.90 1.70000 48.10 0.5603 27 74.320 0.85 1.66382 27.35 0.6319 28 12.514 5.00 1.80000 29.84 0.6017 29 -8.336 - [Lens group data] Group starting plane focal length G1 4 8.32 G2 7 4.34 G3 26 159.75

[0092] FIG. 2 is a diagram showing various aberrations (spherical aberration, field curvature, and distortion aberration) of the microscope objective lens according to the first embodiment. FIG. 3 is a diagram showing the chromatic aberration of magnification (lateral chromatic aberration) of the microscope objective lens according to the first embodiment. FIG. 4 is a diagram showing the coma aberration (meridional coma aberration and sagittal coma aberration) of the microscope objective lens according to the first embodiment. Each aberration diagram shows various aberrations in a state where the microscope objective lens is combined with a second objective lens. In each aberration diagram of FIG. 2 to FIG. 4, d indicates various aberrations for the d-line (wavelength λ=587.6 nm), C indicates various aberrations for the C-line (wavelength λ=656.3 nm), and F indicates various aberrations for the F-line (wavelength λ=486.1 nm). In the spherical aberration diagrams, the vertical axis indicates values ​​normalized with the maximum value of the entrance pupil radius set to 1, and the horizontal axis indicates the aberration value [mm] for each light ray. In the aberration diagrams showing the field curvature, the solid line indicates the meridional image plane for each wavelength, and the dashed line indicates the sagittal image plane for each wavelength. In the aberration diagrams showing the field curvature, the vertical axis indicates the image height [mm], and the horizontal axis indicates the aberration value [mm]. In the distortion aberration diagrams (distortion), the vertical axis indicates the image height [mm], and the horizontal axis indicates the ratio of the aberration in percentage (% value). In the aberration diagrams showing the lateral chromatic aberration, the vertical axis indicates the image height [mm], and the horizontal axis indicates the aberration value [mm]. Each coma aberration diagram shows the aberration value when the image height ratio RFH (Relative Field Height) is 0.00 to 1.00. Note that the same symbols as in this embodiment are used in the aberration diagrams of each embodiment shown below, and duplicated explanations are omitted.

[0093] It can be seen from each aberration diagram that the microscope objective lens according to the first example has excellent imaging performance, with various aberrations including lateral chromatic aberration being well corrected.

[0094] (Second Example) The second embodiment will be described with reference to FIGS. 5 to 8 and Table 2. FIG. 5 is a light path diagram showing the configuration of the microscope objective lens according to the second embodiment. The microscope objective lens OL(2) according to the second embodiment is composed of a first lens group G1 having positive refractive power, a second lens group G2 having a concave surface facing the image side and having positive refractive power, and a third lens group G3 having a concave surface facing the object side, which are arranged in this order from the object side along the optical axis. The space between the tip of the microscope objective lens OL(2) according to the second embodiment and the cover glass CV covering the object OB is filled with an immersion liquid (oil). The space between the cover glass CV and the object OB is also filled with an immersion liquid (oil). The refractive index of the immersion liquid for the d-line (wavelength λ=587.6 nm) is 1.3985. The refractive index of the cover glass CV for the d-line is 1.5244.

[0095] The first lens group G1 is composed of a cemented lens having positive refractive power, in which, in order from the object side along the optical axis, a plano-convex positive lens L101 with its flat surface facing the object side and a negative meniscus lens L102 with its concave surface facing the object side are cemented together.

[0096] The second lens group G2 is composed of, arranged in order from the object side along the optical axis, a positive meniscus lens L201 with a concave surface facing the object side, a cemented lens formed by cementing together a positive meniscus lens L202 with a concave surface facing the object side, a biconcave negative lens L203, and a biconvex positive lens L204, a cemented lens formed by cementing together a negative meniscus lens L205 with a convex surface facing the object side and a biconvex positive lens L206, a cemented lens formed by cementing together a negative meniscus lens L207 with a convex surface facing the object side and a biconvex positive lens L208, a cemented lens formed by cementing together a biconvex positive lens L209 and a biconcave negative lens L210, and a cemented lens formed by cementing together a positive meniscus lens L211 with a convex surface facing the object side and a negative meniscus lens L212 with a convex surface facing the object side. The positive meniscus lens L202 of the second lens group G2 corresponds to the above-mentioned specific positive lens, which is arranged closer to the object side than the positive lens L206 in the second lens group G2 through which the light ray farthest from the optical axis passes.

[0097] The third lens group G3 is composed of a cemented lens in which, in order from the object side along the optical axis, a negative meniscus lens L301 with a concave surface facing the object side, a positive meniscus lens L302 with a concave surface facing the object side, and a negative meniscus lens L303 with a concave surface facing the object side are cemented together. The negative meniscus lens L303 of the third lens group G3 corresponds to the above-mentioned specific negative lens. The negative meniscus lens L301 of the third lens group G3 corresponds to the above-mentioned other negative lens. The positive meniscus lens L302 of the third lens group G3 corresponds to the above-mentioned positive lens.

[0098] At least three lens components (single lenses or cemented lenses) in the second lens group G2 are moved along the optical axis, so that the air gap between the lens components in the second lens group G2 can be changed according to the thickness of the cover glass CV. The lens components in the second lens group G2 that can move along the optical axis function as a so-called correction collar, and can correct aberrations that change according to the thickness of the cover glass CV.

[0099] The values ​​of the specifications of the microscope objective lens according to the second example are shown in Table 2 below. Note that the first surface is the object surface (OB).

[0100] (Table 2) [Overall specifications] β=60 times f=3.35 NA=1.30 WD=0.33 νdA=27.35 θA=0.6319 νdX=40.69 θX=0.5672 νdP=24.80 θP=0.6122 νd2P=27.35 θ2P=0.6319 [Lens data] Surface number RD nd νd H θgF 1 ∞ 0.23 1.3985 51.24 2 ∞ 0.17 1.5244 54.28 3 ∞ 0.10 1.3985 51.24 4 ∞ 0.71 1.4585 67.85 5 -1.950 4.09 1.9538 32.33 6 -4.018 0.20 7 -17.836 3.19 1.4978 82.57 5.78 8 -9.123 0.20 6.61 9 -74.406 1.60 1.6638 27.35 7.80 0.6319 10 -47.667 1.00 1.6127 44.46 8.19 11 20.763 7.53 1.4978 82.57 9.42 12 -14.741 0.20 9.97 13 94.360 0.60 1.6730 38.26 10.81 14 25.009 8.17 1.4339 95.25 10.96 15 -16.828 0.20 11.18 16 25.329 1.00 1.7432 49.26 10.11 17 10.896 8.10 1.4339 95.25 9.08 18 -22.754 0.65 8.99 19 13.846 6.26 1.4339 95.25 7.55 20 -19.624 1.00 1.7321 46.18 6.36 21 14.492 0.20 5.57 22 6.131 4.44 1.4978 82.57 5.30 23 155.535 3.11 1.8061 33.34 4.53 24 3.579 4.38 2.71 25 -5.941 1.00 1.8830 40.69 0.5672 26 -20.799 4.45 1.8548 24.80 0.6122 27 -4.874 1.00 1.6638 27.35 0.6319 28 -10.618 - [Lens group data] Group starting plane focal length G1 4 9.12 G2 7 5.33 G3 25 541.14

[0101] Fig. 6 is a diagram showing various aberrations (spherical aberration, field curvature, and distortion) of the microscope objective lens according to the second example. Fig. 7 is a diagram showing lateral chromatic aberration of magnification of the microscope objective lens according to the second example. Fig. 8 is a diagram showing coma aberrations (meridional coma aberration and sagittal coma aberration) of the microscope objective lens according to the second example. From each aberration diagram, it can be seen that the microscope objective lens according to the second example has excellent imaging performance, with various aberrations including lateral chromatic aberration of magnification being well corrected.

[0102] (Third Example) The third embodiment will be described with reference to FIGS. 9 to 12 and Table 3. FIG. 9 is an optical path diagram showing the configuration of the microscope objective lens according to the third embodiment. The microscope objective lens OL(3) according to the third embodiment is composed of a first lens group G1 having positive refractive power, a second lens group G2 having a concave surface facing the image side and having positive refractive power, and a third lens group G3 having a concave surface facing the object side, which are arranged in this order from the object side along the optical axis. The space between the tip of the microscope objective lens OL(3) according to the third embodiment and the cover glass CV covering the object OB is filled with an immersion liquid (oil). The space between the cover glass CV and the object OB is also filled with an immersion liquid (oil). The refractive index of the immersion liquid for the d-line (wavelength λ=587.6 nm) is 1.3985. The refractive index of the cover glass CV for the d-line is 1.5244.

[0103] The first lens group G1 is composed of a cemented lens having positive refractive power, in which, in order from the object side along the optical axis, a plano-convex positive lens L101 with its flat surface facing the object side and a negative meniscus lens L102 with its concave surface facing the object side are cemented together.

[0104] The second lens group G2 is composed of, arranged in order from the object side along the optical axis, a positive meniscus lens L201 with a concave surface facing the object side, a cemented lens formed by cementing together a negative meniscus lens L202 with a convex surface facing the object side and a biconvex positive lens L203, a cemented lens formed by cementing together a biconcave negative lens L204 and a biconvex positive lens L205, a biconvex positive lens L206, a cemented lens formed by cementing together a negative meniscus lens L207 with a convex surface facing the object side and a biconvex positive lens L208, a cemented lens formed by cementing together a biconvex positive lens L209 and a biconcave negative lens L210, and a cemented lens formed by cementing together a positive meniscus lens L211 with a convex surface facing the object side and a negative meniscus lens L212 with a convex surface facing the object side. The positive lens L206 of the second lens group G2 corresponds to the above-mentioned specific positive lens, which is arranged closer to the image side than the positive lens L205 of the second lens group G2 through which the light ray farthest from the optical axis passes.

[0105] The third lens group G3 is composed of a negative meniscus lens L301 with a concave surface facing the object side, and a cemented lens in which a biconcave negative lens L302 and a biconvex positive lens L303 are cemented together, which are arranged in order from the object side along the optical axis. The negative lens L302 of the third lens group G3 corresponds to the above-mentioned predetermined negative lens. The negative meniscus lens L301 of the third lens group G3 corresponds to the above-mentioned other negative lens. The positive lens L303 of the third lens group G3 corresponds to the above-mentioned positive lens.

[0106] At least three lens components (single lenses or cemented lenses) in the second lens group G2 are moved along the optical axis, so that the air gap between the lens components in the second lens group G2 can be changed according to the thickness of the cover glass CV. The lens components in the second lens group G2 that can move along the optical axis function as a so-called correction collar, and can correct aberrations that change according to the thickness of the cover glass CV.

[0107] The values ​​of the specifications of the microscope objective lens according to Example 3 are shown in Table 3 below. Note that the first surface is the object surface (OB).

[0108] (Table 3) [Overall specifications] β=60 times f=3.33 NA=1.30 WD=0.33 νdA=24.71 θA=0.6291 νdX=48.10 θX=0.5603 νdP=24.80 θP=0.6122 νd2P=28.69 θ2P=0.6065 [Lens data] Surface number RD nd νd H θgF 1 ∞ 0.23 1.3985 51.24 2 ∞ 0.17 1.5244 54.28 3 ∞ 0.10 1.3985 51.24 4 ∞ 0.70 1.4585 67.85 5 -1.981 3.57 1.9538 32.33 6 -3.764 0.15 7 -9.331 3.35 1.4978 82.57 4.93 8 -6.865 0.20 5.96 9 52.128 0.95 1.5530 55.07 8.08 10 14.586 7.56 1.4978 82.57 8.83 11 -14.801 0.20 9.21 12 -42.665 0.60 1.6730 38.26 9.32 13 20.427 7.79 1.4339 95.25 9.80 14 -14.842 0.20 10.12 15 150.000 2.24 1.7950 28.69 10.01 0.6065 16 -82.523 0.20 9.96 17 32.209 1.00 1.7432 49.26 9.55 18 10.837 7.56 1.4339 95.25 8.65 19 -19.992 0.90 8.61 20 19.684 4.11 1.4343 94.77 7.40 21 -18.502 1.00 1.7321 46.18 6.98 22 31.936 0.20 6.45 23 7.227 4.32 1.4343 94.77 6.03 24 50.673 6.84 1.8503 32.35 5.39 25 3.661 2.82 2.50 26 -5.314 0.90 1.7000 48.10 0.5603 27 -20.000 0.40 28 -9.741 1.00 1.7558 24.71 0.6291 29 11.123 5.00 1.8548 24.80 0.6122 30 -8.575 ― [Lens group data] Group starting plane focal length G1 4 8.32 G2 7 4.73 G3 26 -305.23

[0109] Fig. 10 is a diagram showing various aberrations (spherical aberration, field curvature, and distortion) of the microscope objective lens according to Example 3. Fig. 11 is a diagram showing lateral chromatic aberration of magnification of the microscope objective lens according to Example 3. Fig. 12 is a diagram showing coma aberrations (meridional coma aberration and sagittal coma aberration) of the microscope objective lens according to Example 3. From each aberration diagram, it can be seen that the microscope objective lens according to Example 3 has excellent imaging performance with various aberrations including lateral chromatic aberration of magnification being well corrected.

[0110] Since the microscope objective lens according to each embodiment is an infinity correction type lens, it is used in combination with a second objective lens that collects light from the microscope objective lens. Therefore, an example of the second objective lens used in combination with the microscope objective lens will be described with reference to FIG. 13 and Table 4. FIG. 13 is a light path diagram showing the configuration of the second objective lens used in combination with the microscope objective lens according to each embodiment. The various aberration diagrams of the microscope objective lens according to each embodiment are when used in combination with this second objective lens. The second objective lens IL shown in FIG. 13 is composed of a cemented lens in which a biconvex positive lens L51 and a biconcave negative lens L52 are cemented together, and a cemented lens in which a biconvex positive lens L53 and a biconcave negative lens L54 are cemented together, which are arranged in order from the object side. The second objective lens IL is arranged on the image side of the microscope objective lens according to each embodiment. Also, FIG. 13 shows the entrance pupil plane Pu of the second objective lens IL.

[0111] The values ​​of the specifications of the second objective lens are shown in Table 4 below. In the [Overall specifications] table, f' indicates the focal length of the second objective lens. In the [Lens data] table, the surface number, R, D, nd, and νd are the same as those shown in the explanation of Tables 1 to 3 above.

[0112] (Table 4) [Overall specifications] f´=200 [Lens data] Surface number RD nd νd 1 75.043 5.100 1.62280 57.03 2 -75.043 2.000 1.74950 35.19 3 1600.580 7.500 4 50.256 5.100 1.66755 41.96 5 -84.541 1.800 1.61266 44.40 6 36.911 -

[0113] Next, a table of [Values ​​Corresponding to Conditional Expressions] is shown below. This table shows the values ​​corresponding to each of the conditional expressions (1) to (9) for all the examples (Examples 1 to 3). Conditional expression (1) νdA<40 Conditional expression (2) 0<νdX-νdA Conditional expression (3) 0<(θA-θX) / (νdA-νdX)×(νdP-νdX)+θX-θP Conditional expression (4) 0<(θA-θX) / (νdA-νdX)×(νdP-νdX)+θX-θP-0.015 Conditional expression (5) 0<θA-(0.6438-0.001682×νdA+0.007) Conditional expression (6) 0<θA-(0.6438-0.001682×νdA+0.017) Condition (7) 1.68 <ndX Conditional expression (8) νd2P<35 Conditional expression (9) 0<θ2P-(0.6438-0.001682×νd2P+0.008)

[0114] [Conditional expression corresponding value] Conditional Expression 1st Example 2nd Example 3rd Example (1) 27.35 27.35 24.71 (2) 20.75 13.34 23.39 (3) 0.0216 0.0321 0.0166 (4) 0.0066 0.0171 0.0016 (5) 0.0271 0.0271 0.0199 (6) 0.0171 0.0171 0.0099 (7) 1.7000 1.8830 1.7000 (8) 28.69 27.35 28.69 (9) 0.0030 0.0261 0.0030

[0115] According to each of the above-mentioned embodiments, it is possible to realize a microscope objective lens in which various aberrations including lateral chromatic aberration are well corrected.

[0116] Here, the above examples show specific examples of this embodiment, and this embodiment is not limited to these. [Explanation of symbols]

[0117] G1 1st lens group G2 2nd lens group G3 3rd lens group

Claims

1. the first lens group having a positive refractive power, a second lens group having a concave surface facing the image side, and a third lens group having a concave surface facing the object side, the first lens group is composed of one lens component having a positive refractive power, the third lens group is made up of three lenses: two negative lenses and one positive lens; At least one of the two negative lenses satisfies the following conditional expression: νdA<40 where νdA is the Abbe number of the predetermined negative lens in the third lens group. Furthermore, the microscope objective lens must satisfy the following condition: 0<θA-(0.6438-0.001682×νdA+0.007) where θA is the partial dispersion ratio of the predetermined negative lens in the third lens group, and is defined by the following formula when the refractive index of the predetermined negative lens with respect to the g-line is ngA, the refractive index of the predetermined negative lens with respect to the F-line is nFA, and the refractive index of the predetermined negative lens with respect to the C-line is nCA. θA=(ngA-nFA) / (nFA-nCA)

2. 2. The microscope objective lens according to claim 1, which satisfies the following condition: 0<θA-(0.6438-0.001682×νdA+0.017)

3. the predetermined negative lens in the third lens group is one of the two negative lenses in the third lens group, 3. The microscope objective lens according to claim 1, which satisfies the following condition: 0<νdX-νdA 0<(θA-θX) / (νdA-νdX)×(νdP-νdX)+θX-θP where νdX is the Abbe number of the other of the two negative lenses in the third lens group. νdP: Abbe number of the positive lens in the third lens group θX: partial dispersion ratio of the other negative lens of the third lens group, which is defined by the following formula, where the refractive index of the other negative lens with respect to the g-line is ngX, the refractive index of the other negative lens with respect to the F-line is nFX, and the refractive index of the other negative lens with respect to the C-line is nCX. Be righteous θX=(ngX-nFX) / (nFX-nCX) θP: partial dispersion ratio of the positive lens of the third lens group, which is defined by the following formula when the refractive index of the positive lens with respect to the g-line is ngP, the refractive index of the positive lens with respect to the F-line is nFP, and the refractive index of the positive lens with respect to the C-line is nCP. θP=(ngP-nFP) / (nFP-nCP)

4. the predetermined negative lens in the third lens group is one of the two negative lenses in the third lens group, 4. The microscope objective lens according to claim 3, which satisfies the following condition: 0<(θA-θX) / (νdA-νdX)×(νdP-νdX)+θX-θP-0.015

5. the predetermined negative lens in the third lens group is one of the two negative lenses in the third lens group, A microscope objective lens according to any one of claims 1 to 4, wherein the other of the two negative lenses is arranged closest to the object in the third lens group than the specified negative lens.

6. 6. The microscope objective lens according to claim 5, which satisfies the following condition: 1.68<ndX where ndX is the refractive index of the other negative lens in the third lens group with respect to the d line.

7. The microscope objective lens according to any one of claims 1 to 6, wherein the second lens group has a positive refractive power.

8. 8. The microscope objective lens according to claim 1, wherein the second lens group has a predetermined positive lens that satisfies the following conditional expression: νd2P<35 where νd2P is the Abbe number of the predetermined positive lens in the second lens group.

9. 8. A microscope objective lens according to claim 1, wherein the second lens group has a predetermined positive lens through which the light ray farthest from the optical axis passes and which satisfies the following conditional expression: νd2P<35 0<θ2P-(0.6438-0.001682×νd2P+0.008) where νd2P is the Abbe number of the predetermined positive lens in the second lens group. θ2P: partial dispersion ratio of the predetermined positive lens of the second lens group, which is defined by the following formula when the refractive index of the predetermined positive lens with respect to the g-line is ng2P, the refractive index of the predetermined positive lens with respect to the F-line is nF2P, and the refractive index of the predetermined positive lens with respect to the C-line is nC2P. θ2P=(ng2P-nF2P) / (nF2P-nC2P)

10. the second lens group includes a positive lens through which a light ray farthest from an optical axis passes in the second lens group; 8. A microscope objective lens according to claim 1, further comprising: a positive lens which is arranged on the object side of the positive lens through which the light ray farthest from the optical axis passes and which satisfies the following conditional expression: νd2P<35 0<θ2P-(0.6438-0.001682×νd2P+0.008) where νd2P is the Abbe number of the predetermined positive lens in the second lens group. θ2P: partial dispersion ratio of the predetermined positive lens of the second lens group, which is defined by the following formula when the refractive index of the predetermined positive lens with respect to the g-line is ng2P, the refractive index of the predetermined positive lens with respect to the F-line is nF2P, and the refractive index of the predetermined positive lens with respect to the C-line is nC2P. θ2P=(ng2P-nF2P) / (nF2P-nC2P)

11. the second lens group includes a positive lens through which a light ray farthest from an optical axis passes in the second lens group; 8. A microscope objective lens according to claim 1, further comprising: a positive lens that is arranged on the image side of the positive lens through which the light ray farthest from the optical axis passes, and that satisfies the following conditional expression: νd2P<35 0<θ2P-(0.6438-0.001682×νd2P+0.008) where νd2P is the Abbe number of the predetermined positive lens in the second lens group. θ2P: partial dispersion ratio of the predetermined positive lens of the second lens group, which is defined by the following formula when the refractive index of the predetermined positive lens with respect to the g-line is ng2P, the refractive index of the predetermined positive lens with respect to the F-line is nF2P, and the refractive index of the predetermined positive lens with respect to the C-line is nC2P. θ2P=(ng2P-nF2P) / (nF2P-nC2P)

12. 12. The microscope objective lens according to claim 1, wherein the lens component of the first lens group is a cemented lens including a plano-convex positive lens with a flat surface facing the object side.

13. the first lens group having a positive refractive power, a second lens group having a concave surface facing the image side, and a third lens group having a concave surface facing the object side, the first lens group is composed of one lens component having a positive refractive power, The second lens group of the microscope objective lens has a predetermined positive lens that satisfies the following conditional expression: νd2P<35 0<θ2P-(0.6438-0.001682×νd2P+0.008) where νd2P is the Abbe number of the predetermined positive lens in the second lens group. θ2P: partial dispersion ratio of the predetermined positive lens of the second lens group, which is defined by the following formula when the refractive index of the predetermined positive lens with respect to the g-line is ng2P, the refractive index of the predetermined positive lens with respect to the F-line is nF2P, and the refractive index of the predetermined positive lens with respect to the C-line is nC2P. θ2P=(ng2P-nF2P) / (nF2P-nC2P)

14. the third lens group includes two negative lenses; 14. The microscope objective lens according to claim 13, wherein at least one of the two negative lenses satisfies the following conditional expression: νdA<40 where νdA is the Abbe number of the predetermined negative lens in the third lens group.

15. A microscope optical system comprising: the microscope objective lens according to any one of claims 1 to 14; and a second objective lens that collects light from the microscope objective lens.

16. A microscope apparatus comprising the microscope objective lens according to any one of claims 1 to 14.

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