Dual-beam microscope system for imaging during sample processing

Abstract

To process and image one area of a sample at the same time.SOLUTION: A method according to the present disclosure for processing a sample and imaging the processed portion of the sample using a dual beam microscopy system include a first step of radiating multiple electrons toward the sample and splitting the multiple electrons into electron beams, and then modifying the focal characteristics of at least one of the electron beams such that the two electron beams have different focal planes. When the two electron beams have different focal planes, the first electron beam is focused to function as a STEM beam. The STEM beam is then used to process a region of the sample to induce physical changes (e.g., perform milling, deposition, charge adjustment, phase change, etc.). The second electron beam is focused to function as a TEM beam to perform imaging of the area of the sample being processed.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present disclosure relates to charged particle microscopes, and more particularly to dual beam microscope systems. [Background technology]

[0002] Charged particle microscopes are used to perform many sample processing applications, including circuit edit and materials analysis. However, current charged particle microscope systems are not capable of real-time imaging during sample processing. This inability to monitor the area of ​​the sample being processed means that accidental growth / etching or processing errors cannot be diagnosed and / or corrected until after the processing has finished. For example, depending on the sample composition and the atmosphere of the vacuum chamber, accidental deposition, etching, and / or oxidation may occur during sample processing and the user may not be aware of it until the sample processing has stopped. This inability to monitor a sample as it is being processed limits the usefulness of charged particle microscopes for sample processing, forcing current users to either accept inaccurate performance or drastically reduce throughput time by periodically pausing sample processing to perform imaging. Thus, a system that can simultaneously process and image a region of a sample is desired. Summary of the Invention

[0003] A method according to the present disclosure for processing a sample and simultaneously imaging the processed portion of the sample using a dual beam microscope system includes an initial step of emitting a plurality of electrons toward the sample and splitting the plurality of electrons into a first electron beam and a second electron beam, and then modifying the focal properties of at least one of the first and second electron beams so that the two electron beams have different focal planes. Once the two beams have different focal planes, the method according to the present invention includes an additional step of focusing the first electron beam so that it acts as a STEM beam focused at the sample. This STEM beam is then used to process a region of the sample to induce a physical change (e.g., milling, deposition, etching, contamination growth, charge conditioning, radiation damage, sample deformation, heating, phase change, etc.).

[0004] The methods further include focusing a second electron beam so that it acts as a TEM beam, and using the second electron beam to perform imaging of the area of ​​the sample being processed, so that the user can see physical changes to the sample in real time or near real time. In some embodiments, the relative angles at which the STEM and TEM beams are incident on the sample are such that the STEM beam, and / or the sample radiation resulting from the STEM beam, is blocked by a beam blocker, so that the detector at least primarily detects the TEM beam, and / or the sample radiation resulting from the TEM beam. The methods can include using a beam deflector to deflect the STEM beam so that it is no longer detected (e.g., so that the STEM beam is blocked by the beam blocker or moves outside the field of view of the detector system). In this way, when the STEM beam is deflected, the TEM beam, and / or the sample radiation resulting from the TEM beam can be used to generate an image without interfering with the STEM beam, and / or the sample radiation resulting from the STEM beam.

[0005] Alternatively or additionally, image processing techniques can be used to distinguish between the STEM beam and / or sample radiation resulting from the STEM beam and the TEM beam and / or sample radiation resulting from the TEM beam. In this manner, image processing techniques can separate the TEM beam and / or sample radiation resulting from the TEM beam, thereby forming a TEM image of the processing area of ​​the sample. [Brief description of the drawings]

[0006] The detailed description will be set forth with reference to the accompanying drawings, in which the leftmost digit(s) of a reference number identifies the figure in which the reference number first appears. The same reference number in different drawings designates similar or identical elements.

[0007] [Figure 1] 1 illustrates an exemplary dual beam system for simultaneously processing a sample while imaging a processed portion of the sample, in accordance with the present invention. [Diagram 2] 1 illustrates an exemplary embodiment of an imaging beam and a processing beam interacting simultaneously with a sample during interrogation of the sample with a dual beam system. [Diagram 3] 1 is a sample process for simultaneously processing and imaging a sample according to the present invention. [Figure 4] 2 is a schematic diagram of a sample being etched with a processing beam and simultaneously imaged with an imaging beam in accordance with the present invention. [Diagram 5] 1 is a schematic diagram of performing gas-assisted deposition on a sample using a treatment beam while simultaneously imaging the sample using an imaging beam. [Figure 6] 1 shows the optical performance of a bifocal multi-beam system according to the present invention. [Figure 7] 1 illustrates an exemplary bifocal multi-beam system for investigating a sample, in which the bifocal beamformer comprises a MEMS device. [Figure 8] 1 illustrates an exemplary MEMS device according to the present invention. [Figure 9] 1 shows a top-down schematic view of an exemplary embodiment of a MEMS device comprising four electrodes. [Figure 10] 1 shows a top-down schematic view of an exemplary embodiment of a MEMS device comprising seven electrodes. [Figure 11] 13 illustrates the distortion of the second electron beam caused when the bifocal beamformer of the exemplary embodiment has at least a quadrupole lens effect applied thereto. [Figure 12] 1 illustrates an exemplary embodiment of a bifocal multi-beam system for investigating a sample, in which the bifocal beamformer comprises an aperture lens array. [Figure 13] 1 illustrates an exemplary electrode for an exemplary aperture lens array. [Figure 14] 1 illustrates an exemplary aperture-defining structure for an exemplary aperture lens array. [Figure 15] 1 shows a cross section of an exemplary aperture lens array having one aperture-defining structure. [Figure 16] 24 illustrates an exemplary central structure that can be used with the multiple aperture assemblies shown in FIG. 23. [Figure 17] 24 illustrates an exemplary central structure that can be used with the multiple aperture assemblies shown in FIG. 23. [Figure 18] 24 illustrates an exemplary central structure that can be used with the multiple aperture assemblies shown in FIG. 23. [Figure 19] 24 illustrates an exemplary central structure that can be used with the multiple aperture assemblies shown in FIG. 23. [Figure 20] 24 illustrates an exemplary central structure that can be used with the multiple aperture assemblies shown in FIG. 23. [Figure 21] 24 illustrates an exemplary central structure that can be used with the multiple aperture assemblies shown in FIG. 23. [Figure 22] 24 illustrates an exemplary central structure that can be used with the multiple aperture assemblies shown in FIG. 23. [Figure 23]24 illustrates an exemplary central structure that can be used with the multiple aperture assemblies shown in FIG. 23. [Figure 24] 24 illustrates an exemplary central structure that can be used with the multiple aperture assemblies shown in FIG. 23. [Diagram 25] 1 illustrates a cross-section of an exemplary aperture lens array comprising a first electrode, a second electrode, and an aperture-defining structure. [Figure 26] 1 illustrates an exemplary embodiment of a bifocal multi-beam system for investigating a sample, in which the bifocal beamformer comprises a beam splitting mechanism and one or more focusing devices.

[0008] Like reference numerals refer to corresponding parts throughout the several views of the drawings. Generally, in the figures, elements that are likely to be included in a given example are shown with solid lines, whereas elements that are optional for a given example are shown with dashed lines. However, elements shown with solid lines are not required for all examples of the present disclosure, and elements shown with solid lines may be omitted from particular examples without departing from the scope of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Included herein are methods and systems for simultaneously processing a sample and imaging the processed portion of the sample using a dual beam microscope system. More specifically, the methods and systems disclosed herein include a charged particle microscope and / or are configured to enable the charged particle microscope to perform both TEM imaging of the sample with a first beam while inducing a physical change in the sample using a second beam. In the methods and systems, a plurality of electrons emitted by an electron source are split into a first and a second electron beam, and the focal properties of at least one of the first and second electron beams are modified such that the corresponding focal planes of the first and second electron beams are different. The two beams can then be focused and / or directed such that the first electron beam (e.g., imaging beam) is incident on the sample while the second electron beam (e.g., processing beam) induces a desired physical change in the surface of the sample. Exemplary physical changes may include, but are not limited to, milling, deposition, etching, contamination growth, charge conditioning, radiation damage, sample deformation, heating, phase change, and the like. This allows the processing of the sample to be monitored and adjusted to correct errors, accidental growth, accidental milling, accidental deposition, and the like.

[0010] In various embodiments, the microscope system can include at least one beam blocker that allows one of the two beams, both of the two beams, or neither of the two beams to be blocked. For example, a beam blocker that blocks the STEM beam can be positioned below the sample. Alternatively, or additionally, a beam blocker can also be positioned above the sample, selectively blocking one or both of the two beams. The beam blocker(s) can be fixed or can be capable of shifting position to temporarily block a desired beam or combination thereof. In some embodiments, a beam blocker can be used to prevent the imaging beam, and / or radiation resulting from the imaging beam incident on the sample, from reaching the detector. For example, the imaging beam can be incident on the sample at an oblique angle, such that the imaging beam, and / or radiation resulting from the imaging beam incident on the sample is prevented from reaching the detector by the beam blocker, or an aperture of the objective lens positioned downstream of the sample. Additionally, in some embodiments, the beam blocker can be positioned such that when the beam is deflected, the beam blocker blocks the deflected beam.

[0011] FIG. 1 illustrates a bifocal multibeam system(s) 100 that is configured to simultaneously process a sample while also imaging the processed portion of the sample, in accordance with the present invention. Specifically, FIG. 1 illustrates an exemplary bifocal multibeam system(s) 102 for simultaneously processing and imaging a sample 104. The exemplary bifocal multibeam system(s) 102 may include an electron microscope (EM) device or an electron beam lithography device that is configured to illuminate or impinge an imaging beam (e.g., a TEM beam) and a processing beam (e.g., a STEM beam) on the sample 104. In various embodiments, the bifocal multibeam system(s) 102 may be or include one or more different types of EM and / or charged particle microscopes, such as, but not limited to, a scanning electron microscope (SEM), a scanning transmission electron microscope (STEM), a transmission electron microscope (TEM), a charged particle microscope (CPM), a dual beam microscope system, and the like. Additionally, in some embodiments, the bifocal multibeam system(s) 102 may be a TEM that can also operate as a STEM.

[0012] The exemplary bifocal multi-beam system(s) 102 includes an electron source 106 (e.g., a thermionic electron source, a Schottky emitter, a field emitter, etc.) that emits a plurality of electrons 108 (i.e., an electron beam) along an emission axis 110 and toward a bifocal beamformer 112. The emission axis 110 is a central axis that runs along the length of the exemplary bifocal multi-beam system(s) 102 from the electron source 106 and through the sample 104.

[0013] The bifocal beamformer 112 is one or more structures configured to (i) split the plurality of electrons 108 into at least a first electron beam 114 and a second electron beam 116, and (ii) modify focal properties of at least one of the first electron beam 114 and the second electron beam 116 such that one of the two beams becomes an imaging beam (i.e., a beam that is focused and directed to generate an image of an area of ​​the sample 104) and the other becomes a processing beam (i.e., a beam that is focused and directed to induce a physical change in the sample 104). In FIG. 1, the imaging beam is shown to be a TEM beam and the processing beam is shown to be a STEM beam. For example, the bifocal beamformer 112 can modify focal properties such that the first electron beam 114 and the second electron beam 116 have different corresponding focal planes. 1 illustrates the bifocal beamformer 112 as splitting a plurality of electrons 108 into a first electron beam 114 and a second electron beam 116 running along a radial axis 110. Because the first electron beam 114 and the second electron beam 116 are each formed from a plurality of electrons 108, the first electron beam 114 and the second electron beam 116 are mutually coherent.

[0014] FIG. 1 also illustrates the bifocal beamformer 112 as applying distortions to the second electron beam 116 that cause focal properties of the second electron beam to differ from those of the first electron beam 114. Specifically, FIG. 1 illustrates the bifocal beamformer 112 as configured to generate at least a quadrupole field (i.e., dipole field, quadrupole field, hexapole field, octapole field, etc.) that applies quadrupole lensing that affects the second electron beam 116 such that the two beams have different focal properties. This quadrupole lensing can deform, astigmatize, or otherwise correct at least one of the beams such that the corresponding focal properties of the beams differ. In some embodiments, the quadrupole lensing can apply a different lensing effect in one meridian plane (e.g., the xz plane) than in a perpendicular meridian plane (e.g., the yz plane), causing different changes in the focal properties of each of the two respective meridian planes. Such astigmatism correction is illustrated in the exemplary system illustrated in FIG. 6.

[0015] In such an embodiment, a multipole element (e.g., an astigmatism corrector) downstream of the bifocal beamformer can apply a complementary quadrupole lensing effect to one of the second electron beams 116 to correct the aberrations caused by the bifocal beamformer 112 and make the second electron beam 116 a cylindrically symmetric beam again. In this way, the multipole element makes the second electron beam 116 cylindrically symmetric downstream of such multipole element while also having a different focal plane than the first electron beam 114. In various arrangements, this multipole element can be located in the focal plane of the first electron beam 114, so that the complementary quadrupole lensing effect is not applied to the first electron beam 114.

[0016] In some embodiments, the bifocal beamformer 112 is configured to modify focal properties of at least one of the first electron beam 114 and the second electron beam 116 such that the second electron beam 116 is a STEM beam (i.e., has a focal plane at or near the sample 104) and the first electron beam 114 is a TEM beam (i.e., has a corresponding focal plane that is parallel, substantially parallel, or slightly converging at or near the sample 104). In various embodiments, the bifocal beamformer 112 can modify the focal plane of the first electron beam 114 such that it is focused to a plane located at least 0.1%, 1%, 10%, or 100% of the objective focal length above the upper objective lens 128. Alternatively or additionally, the bifocal beamformer 112 can be configured to modify focal properties of at least one of the first electron beam 114 and the second electron beam 116, such that the diameter of the first electron beam 114 at a specimen plane at or near the sample 104 is at least one of 20, 50, 100, 500, or 1000 times larger than the diameter of the second electron beam 116 at that specimen plane. In such an embodiment, the bifocal beamformer 112 can cause the diameter of the first electron beam 114 to be at least one of 20, 50, 100, 500, or 1000 times larger than the diameter of the second electron beam 116 at any plane where the second electron beam 116 is focused. In some embodiments, the bifocal beamformer 112 further deflects one or both of the first electron beam 114 and the second electron beam 116 away from the radiation axis 110.

[0017] Alternatively, the bifocal beamformer 112 can modify the focal properties of at least one of the electron beams so that the first electron beam 114 is a STEM beam (i.e., has a focal plane at or near the sample 104) and the second electron beam 116 is a TEM beam (i.e., has a corresponding focal plane such that the first electron beam 114 is parallel, substantially parallel, or slightly converging at or near the sample 104). In such an embodiment, the focal plane(s) can be modified such that the second electron beam 116 is focused to a plane located at least 0.1%, 1%, 10%, or 100% of the objective focal length above the sample 104.

[0018] Although FIG. 1 illustrates an embodiment in which the bifocal beamformer 112 is shown modifying the focal properties of the second electron beam 116, in other embodiments, the bifocal beamformer 112 can change the focal properties of the first electron beam 114, or both beams, so that the two beams become an imaging beam and a processing beam. That is, one skilled in the art will understand that an action or effect described as being applied to one beam can be applied to the other beam in different embodiments to enable the two beams to become an imaging beam and a processing beam. In various embodiments, the bifocal beamformer 112, or another component of the bifocal multibeam system 102, can apply a deflection to one or both of the beams to enable them to function as an imaging beam and a processing beam.

[0019] In some embodiments, the bifocal beamformer 112 can be configured with a single component that performs both the formation of the first electron beam 114 and the second electron beam 116 and the modification of focal properties of at least one of the two beams. For example, the bifocal beamformer 112 can correspond to a microelectromechanical system (MEMS) that both forms the two beams and creates at least a quadrupole electromagnetic field (i.e., a dipole field, a quadrupole field, a hexapole field, an octapole field, etc.) that applies at least a quadrupole lens effect to focus, correct astigmatism, or otherwise modify at least one of the beams such that corresponding different focal properties of the beams are created. In another example, the bifocal beamformer 112 can correspond to an aperture array that includes a structure defining a plurality of apertures and / or cavities that both forms the two beams and creates at least a quadrupole electromagnetic field that applies a quadrupole lens effect to one or more of the two beams. In some embodiments, quadrupole lensing can apply positive lensing in one meridian plane (e.g., the xz plane) and negative lensing in a perpendicular meridian plane (e.g., the yz plane) to cause different changes in the focal properties in each of the two meridian planes.

[0020] In such a system, a multipole element 124 (e.g., a corrector, an astigmatism corrector, or a multipole element that is part of an aberration corrector, a quadrupole / octopole type corrector, etc.) may be included further downstream in the exemplary bifocal multibeam system(s) 100 to apply complementary quadrupole lensing to reshape the beam into cylindrical symmetry. For example, FIG. 1 illustrates the bifocal multibeam system(s) 102 as including an astigmatism corrector. Alternatively, or additionally, the bifocal beamformer 112 may be positioned and / or configured such that at least one of the aberrations of one or more of the electron beams corrects another aberration of the bifocal multibeam system(s) 102. Such a system component may be positioned in the focal plane of the electron beam to which the bifocal beamformer 112 did not apply at least a quadrupole lensing. In embodiments in which the bifocal beamformer applies at least a first quadrupole lensing effect to the first electron beam 114 and a second quadrupole lensing effect to the second electron beam 116, such a bifocal multi-beam system(s) 100 may include a first multipole element 124 positioned in a focal plane of the first electron beam 114 and configured to apply a complementary quadrupole lensing effect to the second electron beam 116, and a second multipole element 124 positioned in a focal plane of the second electron beam 116 and configured to apply a complementary quadrupole lensing effect to the first electron beam 114.

[0021] Alternatively, the bifocal beamformer 112 can be composed of multiple components 118. Each individual component 118 can perform one of forming the first electron beam 114 and the second electron beam 116 and modifying the focal properties of at least one of the two beams, or can contribute to one or both of forming the beams and modifying the focal properties in cooperation with other components 118. In some embodiments, the individual components 118 can include a physical structure that can block some of the plurality of electrons 108 while passing other electrons through a biprism (e.g., a charged wire), an amplitude-splitting electron beam splitter made of thin film crystals or nano-machined diffraction gratings, a beam-splitting laser system configured to split the plurality of electrons 108 into the first electron beam 114 and the second electron beam 116 using one or more laser pattern fringes, or the like. Alternatively or additionally, the individual components 118 may include one or more lenses (e.g., Einzel lenses, quadrupole lenses, etc.) positioned and / or configured to cause the first electron beam 114 and the second electron beam 116 to have different focal planes. For example, the bifocal beamformer 112 may be comprised of a physical structure defining two apertures and lenses positioned and / or configured to adjust focal properties of at least one of the first and second electron beams such that they have different corresponding focal planes. In various embodiments, such lenses may be positioned above or below the physical structure.

[0022] 1 also illustrates the bifocal beamformer 112 as being positioned upstream of a focusing component 120 configured to apply a lensing action to focus at least one of the first electron beam 114 and the second electron beam 116. This focusing component 120 is further positioned upstream of a multipole element 124. In the exemplary bifocal multibeam system(s) 102 illustrated in FIG. 1, the focusing component corresponds to an accelerator 122 that accelerates / decels, focuses, and / or directs the first electron beam 114 and the second electron beam 116 towards a focusing column 126. However, in other embodiments, the accelerator 122 may be positioned between the electron source 106 and the bifocal beamformer 112, such that the accelerator 122 accelerates / decels, focuses, and / or directs the electrons 108 to the bifocal beamformer 112, which splits and modifies the focal properties of the electrons 108 at their final energy (e.g., 30 kV). In such embodiments, the focusing component 120 may correspond to a lens or other structure configured to apply lensing action to focus at least one of the first electron beam 114 and the second electron beam 116.

[0023] The focusing column 126 focuses the electron beams 114 and 116 so that they are incident on the sample 104 as an imaging beam and a processing beam. Specifically, Figure 1 shows the focusing column 126 focusing the second electron beam 116 into a STEM beam (e.g., a beam having a focal plane at or near the sample plane of the sample 104) and the first electron beam 114 into a TEM beam (e.g., a beam that is parallel, substantially parallel, or slightly converging / diverging at or near the sample plane of the sample 104).

[0024] Although not shown in FIG. 1, one skilled in the art will appreciate that the focusing column 126 can include one or more correctors (e.g., Cs, or Cs+Cc aberration correctors), transform lenses, deflectors (for deflecting the imaging beam, the processing beam, and / or both), scanning coils, etc., necessary to enable and / or enhance the interrogation of the sample 104 with the bifocal multibeam system(s) 102. For example, the focusing column 126 can include one or more deflectors that cause the processing beam to scan across the surface of the sample without deflecting the imaging beam. Alternatively, such deflection can be caused or assisted by one or more electromagnetic fields (e.g., dipole electric fields) generated by the multipole element 124 and / or the bifocal beamformer 112. In some embodiments, such dynamic tilting can be caused by individual detectors / detector systems within the MEMS device bifocal beamformer 112. However, in other embodiments, this dynamic tilt may be induced and / or captured by one or more macroscopic deflector systems (e.g., in the collector optics). In embodiments where the deflector / deflection forces affect both electron beams, the bifocal multi-beam system 102 may be configured to rapidly switch between imaging modes such that the STEM beam can be deflected while the imaging results obtained from the TEM beam remain unaffected.

[0025] 1 also illustrates the bifocal multi-beam system(s) 102 as including an objective lens 128, which is an optical element that focuses one of the first electron beam 114 and the second electron beam 116 to a point near or on the sample 104. The objective lens 128 may include a single pole piece lens, a magnetic-electrostatic combination lens, an electrostatic detector objective lens, or another type of objective lens. For example, the objective lens 128 may correspond to a TEM objective lens, where the sample is immersed within the TEM objective lens and / or between the pre-sample and post-sample ends of the TEM objective lens 136.

[0026] FIG. 1 further illustrates the bifocal multi-beam system(s) 102 as including a beam blanker 129 configured to block one of the two beams, both of the two beams, or neither of the two beams. The beam blanker 129 can include a physical structure defining one or more apertures that allow electrons to pass through the beam blanker. For example, the beam blanker 129 can deflect one of the beams so that it is blocked by a blocking structure, such as a structure defining an aperture, a knife edge, a Faraday cup, or the like. An exemplary blocking structure can correspond to a single structure that defines a single aperture that is capable of passing both beams until the beam blanker 129 (or the bifocal beamformer 112) deflects one of the beams so that it no longer passes through the single aperture. In another embodiment, the blocking structure can define a first aperture that allows the TEM beam to pass through the blocking structure and a second aperture that allows the STEM beam to pass through the blocking structure. Then, when one of the two beams is deflected, the corresponding beam no longer passes through the corresponding aperture in the blocking structure and is therefore prevented from passing through the blocking structure (i.e., nulled). Alternatively, in some embodiments, the blocking structure may itself be translated and / or one of the apertures may be obstructed such that one of the beams is prevented from passing through the blocking structure. This allows the microscope system to be switched between a TEM mode of operation, a STEM mode of operation, and / or a simultaneous STEM and TEM mode of operation.

[0027] In some embodiments, the bifocal multi-beam system 102 may include at least one beam blocker 131 below the sample 104, which prevents the imaging beam and / or radiation resulting from the processing beam incident on the sample from reaching the detector 132. Alternatively, the processing beam may be incident on the sample at an oblique angle, such that the processing beam and / or radiation resulting from the imaging beam incident on the sample is partially, mostly, or completely prevented from reaching the detector 132 by an aperture of the objective lens. The beam blocker 131 may be fixed or may be capable of translation to selectively block the processing beam and / or radiation resulting therefrom. In some embodiments, the beam blocker 131 may be a needle positioned between the sample 104 and the detector 132 that blocks the unscattered portion of the STEM beam.

[0028] FIG. 1 further illustrates the bifocal multibeam system(s) 102 as including a sample holder 130 that holds the sample 104. As mentioned above, FIG. 1 illustrates the first electron beam 114 as being a TEM beam and the second electron beam 116 as being a STEM beam incident on the sample 104. The bifocal multibeam system(s) 102 also includes a detector 132 (e.g., a camera) positioned at a diffraction plane that is configured to detect the first electron beam 114, the second electron beam 116, diffracted electrons 134 that pass through the sample 104 as a result of the electron beam 114 incident on the sample 104, and diffracted electrons 135 that pass through the sample 104 as a result of the electron beam 116 incident on the sample 104. In this manner, sample radiation and / or diffracted electrons resulting from both beams incident on the sample are detected by a single detector 132 and / or a single detector array 132 and 140. Thus, the detector data from detector 132 / detector array 140 can generate a secondary electron image, a TEM image, or both, of the sample. For example, in some embodiments, by using a beam blanker 129 to first block the first beam 114 and then the second beam 116, the bifocal multi-beam system(s) 102 can acquire TEM and STEM images in rapid succession without having to switch off or reconfigure the detector system.

[0029] FIG. 1 further illustrates the bifocal multibeam system(s) 102 as optionally including a computing device(s) 142. In various embodiments, the computing device(s) 142 can be configured to determine or generate a TEM image and / or a STEM image based on detector data from the detector 132 and / or the detector array 140. This may include the ability to separate a portion of the detector data corresponding to STEM radiation from a portion of the detector data corresponding to TEM radiation. In addition, the computer system may be capable of controlling one or more functions of the bifocal multibeam system(s) 102, including, but not limited to, initiating processes discussed herein, modifying the functionality of the bifocal multibeam system(s) 102, switching between modes, etc. Those skilled in the art will appreciate that the computing device 142 illustrated in FIG. 1 is merely exemplary and is not intended to limit the scope of the present disclosure. Computing systems and devices may include any combination of hardware or software capable of performing the specified functions, including computers, network devices, Internet appliances, PDAs, wireless telephones, controllers, oscilloscopes, amplifiers, etc. Computing device 142 may be connected to other devices not shown, or may instead operate as a stand-alone system.

[0030] FIG. 2 illustrates an exemplary bifocal multi-beam system 100 showing imaging and processing beams simultaneously interacting with a sample during its investigation. Specifically, FIG. 2 illustrates an exemplary embodiment where a first beam 214 is a processing beam that is focused at a plane at or near the surface of the sample 104, and an imaging beam 216 is a TEM beam that is substantially perpendicular to the sample face of the sample 104. However, in other embodiments, the first electron beam 214 may function as an imaging / TEM illumination beam, and the second electron beam 216 may be focused at the surface of the sample to induce a physical change. FIG. 2 also illustrates a beam blanker 229, which deflects one of the beams so that it is blocked by a blocking structure, such as a structure defining an aperture, knife edge, Faraday cup, etc.

[0031] A single aperture 201 is defined through which the first beam 214 and the second beam 216 pass. It should be appreciated that one or more deflectors, multipole elements, bifocal beamformers, or combinations thereof may be used to generate the deflection that deflects one of the first beam 214 or the second beam 216, such that the deflected beam is nulled by the beam blanker 129.

[0032] As discussed in the commentary regarding FIG. 1, the first electron beam 214 can be scanned across the surface of the sample in an area of ​​interest to induce physical changes in the sample. For example, the first electron beam 214 can be used to mill the sample, etch the sample (e.g., gas-assisted etching), deposit on the sample (e.g., gas-assisted deposition), cause radiation damage to an area of ​​the sample, cause a phase change to that area of ​​the sample, reduce and / or induce charge accumulation in an area of ​​the sample, heat the sample, deform the sample, or a combination thereof. For example, when performing cryo-electron microscopy, the first electron beam 214 can be used to reduce sample distortion and / or melt a desired portion of the sample. In this manner, a user can use the first beam 214 to release large stresses on the sample without damaging the area of ​​interest, and then the second electron beam 216 can be used to generate the final image. In another example, the first electron beam 214 can be used to induce a phase change to an area of ​​the sample. Such phase change patterns can be created using the first electron beam 214 to perform various functions such as aberration correction.

[0033] In another exemplary use case, the bifocal multi-beam system 100 can include a gas injection system 203 that introduces gas into a volume near where the first electron beam 214 is incident on the sample 104 to cause the first electron beam 214 to increase physical deposition (e.g., mounds, ridges, bridges, needle structures, etc.) on the sample 104. It should be appreciated that one or more deflectors, multipole elements, bifocal beamformers, or combinations thereof can be used to generate a deflection that deflects either the first beam 214 or the second beam 216, thereby changing the location where the deflected beam is incident on the sample (i.e., where a physical change is induced).

[0034] 2 illustrates the first electron beam 214 as being a non-axial beam, although in other embodiments the first electron beam 214 is an axial beam. Similarly, FIG. 2 illustrates the second electron beam 216 as being an axial beam, although in other embodiments the second electron beam 216 may be a non-axial beam. FIG. 2 further illustrates the second electron beam 216 as having a front focal plane 204 positioned above the objective lens 130 and a back focal plane 206 corresponding to the imaging plane 208. In this manner, the bifocal multi-beam system 100 can perform imaging of a region of interest of the sample 104 using the second electron beam 216 while processing the sample 104 using the first electron beam 214. This allows the processing of the sample 104 by the first electron beam 214 to be performed and / or altered (e.g., changing one or more of the location of incidence of the first electron beam on the region of interest, the spot size of the first electron beam on the region of interest, the current of the first electron beam, etc.) based on the imaging information. For example, if TEM imaging indicates charge accumulation in a portion of the sample 104, the first electron beam 214 can be deflected to reduce the charge accumulation. The second electron beam 216 can image the processing of the sample being monitored in real time, so that the bifocal multibeam system 100 allows the characteristics of the first electron beam 214 to be changed in real time. Such dynamic control can enable the bifocal multibeam system 100 to reliably induce complex physical changes in the sample 104.

[0035] In some embodiments, the tilt angle 209 of the first electron beam 214 at the sample can prevent the first electron beam 214 and / or electrons emitted by the sample 104 due to the first electron beam incident on the sample 104 from being detected by the detector 232. For example, FIG. 2 shows an aperture at the bottom of the objective lens 211 that does not allow the first electron beam 214 and / or electrons emitted by the sample 104 due to the first electron beam incident on the sample 104 to be detected by the detector 232. In other embodiments, a different blocking structure positioned below the sample 104 can partially, mostly, or completely block the first electron beam 214 and / or electrons emitted by the sample 104 due to the first electron beam incident on the sample 104.

[0036] In an alternative embodiment, the tilt angle 209 of the first electron beam can be such that the first electron beam 214 is blocked by an optional beam blocker positioned below the sample 104. In this way, processing of the sample 104 with the electron beam 214 does not interfere (or only minimally interferes) with TEM imaging of the sample 104 with the second electron beam 216. This allows imaging and processing of the sample to be performed simultaneously.

[0037] 3 is a flow diagram of an exemplary process depicted as a collection of logical flow diagram blocks that represent a sequence of operations that may be performed in hardware, software, human operation, or a combination thereof. In the context of software, the blocks represent computer-executable instructions stored on one or more computer-readable storage media that, when executed by one or more processors, cause the performance of the recited operations. Generally, computer-executable instructions include routines, programs, objects, components, data structures, etc. that perform particular functions or implement particular abstract data types. The order in which the operations are described is not intended to be construed as limiting, and any number of the described blocks can be combined in any order and / or processes can be performed in parallel.

[0038] 3 is a description of a sample process 300 for simultaneously processing and imaging a sample in accordance with the present invention. Process 300 can be implemented in any of the exemplary microscope system(s) 100, 700, 1200, and 2600.

[0039] At 302, a plurality of electrons are emitted toward the sample by an electron source, which may include a thermionic electron source, a Schottky emitter, a field emitter, etc. The electron source emits a plurality of electrons along an emission axis.

[0040] At 304, the plurality of electrons is formed into a first electron beam and a second electron beam. In accordance with the present invention, the plurality of electrons is formed into two beams by a bifocal beamformer or components thereof. In some embodiments, the components of the bifocal beamformer define at least a first aperture configured to allow a first portion of the electrons (i.e., the first electron beam) to pass through the bifocal beamformer, and a second aperture configured to allow a second portion of the electrons (i.e., the second electron beam) to pass through the bifocal beamformer. Alternatively, or in addition, the bifocal beamformer can include a biprism, an amplitude-splitting electron beam splitter made of thin film crystals or nano-machined diffraction gratings, a beam-splitting laser system, or another type of mechanism for splitting an electron beam, known to one of skill in the art.

[0041] At 306, focal properties of at least one of the first and second electron beams are modified such that the first electron beam is the imaging beam and the second electron beam is the processing beam. In particular, according to the present invention, the bifocal beamformer, or components thereof, is further configured to modify focal properties of at least one of the first and second electron beams such that the two beams have different corresponding focal planes. That is, the first electron beam is modified such that it is parallel, substantially parallel, or slightly converging / diverging at or near the sample plane, and the second electron beam is modified such that it has a focal plane at or near the sample plane. In some embodiments, the focal properties and / or focal planes of both beams are adjusted. However, in other embodiments, the focal properties and / or focal planes of only one of the two beams are adjusted.

[0042] At 308, the imaging beam is directed so that it is incident on the sample. For example, the imaging beam may be a TEM beam that is focused so that it is a parallel beam (or a slightly converging / diverging beam in the case of converging TEM imaging techniques) when it is incident on the sample. The TEM beam is held at a constant position and orientation on the sample during the imaging process. Alternatively, if the imaging beam is a STEM beam, the beam may be scanned across the surface of the sample in the region of interest.

[0043] At 310, the processing beam is focused onto a second plane at or near the sample. During processing, the processing beam can be systematically deflected so that the location on the surface of the sample at which it is incident varies. That is, the processing beam can be systematically deflected to scan across the area of ​​the surface of the sample being investigated. In addition, in some embodiments, the imaging beam can also be deflected. In various embodiments, the deflection can be performed by a bifocal beamformer (e.g., a MEMS device) of the system, with a macroscopic deflector downstream of the bifocal beamformer, etc.

[0044] At 312, the surface of the sample is modified with a treatment beam. For example, the treatment beam can be used to mill the sample, etch the sample (e.g., gas-assisted etching), deposit on the sample (e.g., gas-assisted deposition), cause radiation damage to a region of the sample, cause a phase change to a region of the sample, reduce and / or induce charge accumulation in a region of the sample, heat the sample, deform the sample, or a combination thereof.

[0045] At 314, electrons and / or radiation resulting from the imaging beam interacting with the sample are detected. For example, one or more detectors positioned at the imaging plane can detect the portion of the electron beam that is transmitted through the sample, electron diffraction by the sample, radiation from the sample, or a combination thereof. This detection can occur all while the treatment beam is modifying the surface of the sample.

[0046] At 316, an image of the sample is generated using the detected radiation / electrons. If radiation from both the imaging beam and the processing beam is detected, generating the image may first include separating a portion of the detected radiation / electrons into a first portion associated with the imaging beam and a second portion associated with the processing beam. Alternatively, the processing beam and / or radiation originating therefrom can be blocked, such that only radiation attributable to the imaging beam is detected. Because the image is generated while the surface of the sample is being modified by the processing beam, a user can use the image to monitor the processing, control the processing, and / or vary properties of the processing beam in real time.

[0047] Figures 4 and 5 are useful illustrations of the ability of bifocal multibeam system(s) 100 to simultaneously image and process a sample in accordance with the present invention. Figure 4 shows a useful illustration of a sample 402 being etched with a processing beam 404 and simultaneously imaged with an imaging beam 406. Figure 4 shows a gas injection system 408 that introduces gas 410 into a volume near where the processing beam 404 is incident on the sample 402, causing the processing beam 404 to remove a portion of the sample 402.

[0048] Figure 5 provides a useful illustration of performing gas-assisted deposition on a sample 502 using a 504 treatment beam while simultaneously imaging the sample 502 using an imaging beam 506. Figure 5 shows a gas injection system 508 that introduces gas 510 into a volume proximate to where the treatment beam 504 is incident on the sample 502, causing the treatment beam 504 to cause the accumulation of physical deposits 512 (e.g., mounds, ridges, bridges, needle structures, etc.) on the sample 502.

[0049] 6 is a diagram illustrating the optical performance of a bifocal multibeam system 100 according to the present invention. Specifically, FIG. 6 illustrates an exemplary beam path of a bifocal multibeam charged particle system 600 in which at least a quadrupole lens effect is applied to a non-axial imaging beam 602 and an axial processing beam 604.

[0050] 6 depicts an electron source 106 emitting a plurality of electrons 108 toward a bifocal beamformer 112. The bifocal beamformer 112 is shown as splitting the plurality of electrons 108 into both a non-axial imaging beam 602 and a processing beam 604. FIG 6 further depicts the bifocal beamformer 112 as applying at least a quadrupole lens effect to the non-axial imaging beam 602, which effect changes the focal properties of the non-axial imaging beam 602.

[0051] In some embodiments, the result of the quadrupole lens effect is that the non-axial imaging beam 602 is no longer a cylindrically symmetric beam. A multipole element 124 (e.g., a multipole, astigmatism corrector, etc.) for correcting one or more astigmatisms and / or making the non-cylindrically symmetric non-axial imaging beam 602 cylindrically symmetric is shown in FIG. 6 as being positioned in the focal plane of the axial imaging beam 602. For example, the multipole element 124 can apply at least a quadrupole lens effect to the non-axial imaging beam 602, such that the imaging beam becomes cylindrically symmetric downstream of the multipole element 124. Because the corrector is positioned in a plane where the axial processing beam 604 is focused to a point, the effect of the corrector on the beam is minimized. Additionally, FIG. 6 illustrates an embodiment in which the multipole element 124 is further configured to apply an electromagnetic field (e.g., a dipole electric field) that applies a deflection to the beam perpendicular to the radiation axis. In FIG. 6, this deflection causes a non-axial imaging beam 602 to become an axial beam downstream of the multipole element 124 and an axial processing beam 604 to become a non-axial beam downstream of the multipole element 124 .

[0052] The focusing column 126 is shown as including a plurality of transverse lenses. The focusing column 126 is shown as focusing the non-axial imaging beam 602 so that the TE imaging beam 602 is substantially parallel (or a slightly converging or diverging beam in the case of non-parallel TEM imaging) when the imaging beam 602 is incident on the sample 506. FIG. 6 further shows the focusing column 126 focusing the processing beam 604 so that it has a focal plane at or near the sample plane. To illustrate this, FIG. 6 depicts an inset 608 showing the focal plane of the processing beam 604 as coinciding with the focal plane of the sample 606.

[0053] In the illustrated embodiment, one of the multibeam element 124 and the bifocal beam forming mechanism 112 of the bifocal multibeam system 600 is further configured to apply a dynamic deflection to the treatment beam 604 to cause the treatment beam 604 to scan the surface of the sample 606 to induce physical changes in the sample 606 (e.g., milling, deposition, etching, contamination growth, charge conditioning, radiation damage, sample deformation, heating, phase change, etc.). Because this dynamic deflection does not affect the imaging 602, a detector or detector array can simultaneously acquire detector data for imaging the sample while the sample is being treated by the treatment beam 604.

[0054] 6 illustrates the focusing column 126 as having a relative angle with the sample 606 such that the processing beam 604 is blocked by a lower portion of the objective lens 610. In other embodiments, the processing beam 604 has a relative angle with the sample 606 such that it is blocked by another type of beam blocker positioned below the sample.

[0055] 7 illustrates an exemplary embodiment 700 of a bifocal multi-beam system(s) 100 for investigating a sample 104, where the bifocal beamformer includes a MEMS device 702. The exemplary bifocal multi-beam system(s) 700 includes an electron source 106 that emits a plurality of electrons 108 along an emission axis 110 and toward an accelerator 120. The accelerator 120 accelerates / decels, focuses, and / or directs a first electron beam 114 and a second electron beam 116 toward the bifocal beamformer 112. While FIG. 7 illustrates the accelerator 120 as being positioned upstream of the bifocal beamformer 112, as discussed above, in other embodiments, the bifocal beamformer 112 can be positioned between the electron source 106 and the accelerator 120.

[0056] In the exemplary bifocal multi-beam system(s) 700, the bifocal beamformer 112 corresponds to a MEMS device 702. The MEMS device 702 defines a first aperture and a second aperture, each configured to allow a portion of the plurality of electrons 108 to pass through the MEMS device 702. As such, the first aperture and the second aperture split the plurality of electrons 108 into a first electron beam 114 and a second electron beam 116, respectively. Figure 7 illustrates the first electron beam 114 as being an axial beam.

[0057] The MEMS device 702 further includes a plurality of electrodes configured to generate a quadrupole electromagnetic field that applies at least a quadrupole lensing effect (i.e., a dipole field, a quadrupole field, a hexapole field, an octapole field, etc.) to the second electron beam 116 when a particular voltage is applied thereto. The quadrupole lensing effect focuses, astigmatizes, or otherwise modifies at least the second electron beam 116 such that corresponding focal characteristics of the beams are made different. In some embodiments, the electrodes are configured such that the first electron beam 114 is not affected by the electromagnetic field generated by the electrodes and / or such effects are reduced. Alternatively or additionally, some of the electrodes can generate electromagnetic fields that apply different lensing effects to the first electron beam 114 and the second electron beam 116.

[0058] 7 illustrates the MEMS device 702 as being positioned upstream of a focusing component 120 configured to apply lens action to focus at least one of the first electron beam 114 and the second electron beam 116. In the exemplary bifocal multi-beam system(s) 700 illustrated in FIG. 7, the focusing component corresponds to the lens 120 that focuses and / or directs the first electron beam 114 and the second electron beam 116 towards the focusing column 126. However, in other embodiments, the accelerator 122 may be positioned between the electron source 106 and the MEMS device 702, and the accelerator 122 may replace or augment the lens 704 (as shown in FIG. 1).

[0059] A focusing column 126 and objective lens 128 focus the electron beams 114 and 116 so that they are incident on the sample 104. Specifically, Figure 7 shows the focusing column 126 focusing the second electron beam 116 that is focused on the sample 104, and the first electron beam 114 that is not focused on the sample 104. Figure 7 shows the second electron beam 116 as being a reference beam passing through a thin portion of the sample 104, and the first electron beam 114 as being a TEM beam incident on the sample 104.

[0060] In some embodiments, the focal planes of the first electron beam 114 and the second electron beam 116 are modified such that one of the beams is focused at a plane at or near the sample 104, and the other beam is focused at a plane located at least 0.1%, 1%, 10%, or 100% of the objective focal length above and / or below the sample 104. Alternatively, or additionally, the focal planes of the first electron beam 114 and the second electron beam 116 can be modified such that the diameter of one of the electron beams at the sample 104 is at least one of 5, 10, 20, 50, 100, 500, or 1000 times larger than the diameter of the other electron beam at the sample.

[0061] FIG. 8 illustrates a cross-section of an exemplary embodiment 800 of a MEMS device 700 according to the present invention. In particular, FIG. 8 illustrates a cross-section of a MEMS device 700 configured to generate an electromagnetic field pattern that splits a plurality of electrons 802 into a first electron beam 804 and a second electron beam 806 and applies at least a quadrupole lensing effect to the second electron beam 806. The at least quadrupole lensing effect causes the first electron beam 804 and the second electron beam 806 to have different focal properties. For example, the quadrupole lensing effect can apply a positive lensing effect in one meridian plane (e.g., the yz plane) and a negative lensing effect in a perpendicular meridian plane (e.g., the xz plane) to cause different changes in the focal properties of each of the two meridian planes. In such an embodiment, another system component (e.g., a corrector or astigmatism corrector) can be included downstream of the bifocal beamformer 700 and another quadrupole lensing effect can be applied to form the beam into cylindrical symmetry again.

[0062] Figure 8 illustrates MEMS device 700 as including a surface layer 808, an electrode layer 810, and an optional shield layer 812. In Figure 8, surface layer 808 is illustrated as including a thin material (e.g., a foil) on which electrons 802 are incident. However, one skilled in the art will appreciate that in other embodiments, surface layer 808 may not correspond to separate component layers, but rather may correspond to a top surface of one or more components of MEMS device 700 on which electrons 802 are incident.

[0063] The surface layer 808 defines a first entrance 814 to a first aperture 816 and a second entrance 818 to a second aperture 820. In some embodiments, the first aperture 814 is an axial aperture (i.e., positioned on the emission axis of the electrons 802) and the second aperture 818 is a non-axial aperture. In such embodiments, the first electron beam 804 is an axial beam. The first entrance 814 allows a first portion of the electrons 802 (i.e., the first electron beam 804) to pass through the first aperture 816 and through the MEMS device 700. Similarly, the second entrance 818 allows a second portion of the electrons 402 (i.e., the second electron beam 806) to pass through the second aperture 820 and through the MEMS device 700. The surface layer 808 inhibits the ability of the remaining portion of the electrons 802 to dissipate and / or pass through the MEMS device 700 .

[0064] The electrode layer 810 includes a plurality of microelectrodes that are shaped, positioned, or configured such that when a corresponding voltage is applied to one or more electrodes, the one or more electrodes generate an electromagnetic field pattern that applies a lens effect to one or both of the first electron beam 804 and the second electron beam 806. The lens effect is such that the focal characteristics of the two beams are modified to have different corresponding focal characteristics. One or more of the magnitude of the voltage applied to the electrodes, the shape of the electrodes, and the thickness (L) of the electrodes can be modified to change the strength of the generated electromagnetic field pattern. In accordance with the present invention, the electrodes in the electrode layer 810 are configured such that they generate at least a quadrupole electromagnetic field pattern that applies at least a quadrupole lens effect (i.e., a dipole field, a quadrupole field, a hexapole field, an octopole field, etc.) to the second electron beam 806. In some embodiments, the electromagnetic field pattern can also apply a dipole field to one or both of the first electron beam 804 and the second electron beam 806. Such a dipole field can deflect at least one of the electron beams in a direction perpendicular to the emission axis.

[0065] FIG. 8 also shows the MEMS device 700 as including an optional shield layer 812 opposite the surface layer 808 and configured to at least partially insulate the first electron beam 814 from at least a quadrupole lens effect applied to the second electron beam 816.

[0066] 9 shows a top-down schematic view of an example embodiment 900 of a MEMS device 700 including four electrodes. Figures 9 and 10 show a first inlet 814 and a second inlet 818 in solid lines, as defined by a surface layer 808 in solid lines. In addition, Figures 9 and 10 show components of an electrode layer 810 in dashed lines. One skilled in the art will recognize that the dashed lines do not represent the exact shape, but rather show the general outline of the electrodes in the electrode layer 810.

[0067] FIG. 9 illustrates a radius R of the first aperture, as defined at least in part by the electrode 902. E1 The radius R of the first inlet 814 is smaller than A1 In one embodiment of the exemplary MEMS device 900, a radius R A1 may be approximately 10 μm, and the radius R E1 The radius R of the second inlet 818 may be approximately 14 μm or more. A2 The radius R of the second aperture as defined at least in part by the electrodes 902, 904, 906, and 908. E2 9 as being smaller than radius R E1 and radius R A1 , and / or radius R E2 and radius R A2 The exemplary embodiment 900 further includes equal and / or approximately equal radii R A1 and radius R A2 , although this is not required in all embodiments. The first inlet 814 and the second inlet 818 are separated by a distance D.

[0068] During use of the exemplary MEMS device 900, a voltage can be applied to one or more of the electrodes 902-908 such that the electrodes generate an electromagnetic field that applies at least a quadrupole lens effect to the second electron beam. In some embodiments, one or more of the electrodes can be grounded. For example, the exemplary MEMS device 900 can generate an electromagnetic field that applies at least a quadrupole lens effect to the second electron beam when a first voltage V1 is applied to the electrode 904, a second voltage V2 is applied to the electrode 908, and the electrodes 902 and 906 are grounded. In various embodiments, each of V1 and V2 can be greater than -20V and less than 20V, although larger voltages can also be used.

[0069] 10 illustrates a top-down schematic view of an exemplary embodiment 1000 of the MEMS device 700 including seven electrodes. FIG. 10 illustrates the radius R of the first aperture as at least partially defined by electrodes 1002, 1004, 1006, and 1008. E1 The radius R of the first inlet 814 is smaller than A1 10 illustrates the first aperture 814 as being an axial aperture through which the emission axes 1010 of the electrons pass.

[0070] Radius R of second inlet 818 A2 Also, the radius R of the second aperture, as at least partially defined by the electrodes 1006, 1012, 1014, and 1016, E2 10 as being smaller than radius R E1 and radius R A1 , and / or radius R E2 and radius R A2 One or both of these may be the same.

[0071] During use of the exemplary MEMS device 1000, a voltage can be applied to one or more of the electrodes 1002-1008 and 1012-1016 such that the electrodes generate an electromagnetic field that applies at least a quadrupole lens effect to the second electron beam. In some embodiments, one or more of the electrodes can be grounded. For example, the exemplary MEMS device 1000 can generate an electromagnetic field that applies at least a quadrupole lens effect to the second electron beam when a first set of voltages with values ​​between -20V and 20V are applied to the electrodes 1004, 1008, 1012, and 1016, a second set of voltages with values ​​between -5V and 5V are applied to the electrodes 1002 and 1014, and the electrode 1006 is grounded.

[0072] In addition, one of ordinary skill in the art will appreciate that the dashed lines in Figures 9 and 10 represent example configurations of electrodes, and that experiments may provide multiple electrode configurations (e.g., electrode sizes, electrode shapes, number of electrodes, electrode layout, combinations of voltages applied to electrodes, etc.) that cause the electrodes to generate an electromagnetic field that applies at least a quadrupole lensing effect to the second electron beam. Furthermore, while Figures 5 and 6 each illustrate an embodiment where at least a quadrupole lensing effect is applied to the second electron beam, in other embodiments, the electrode layer may be configured to generate an electromagnetic field that applies at least a quadrupole lensing effect to the first electron beam (or both electron beams) when a corresponding set of voltages is applied to the electrodes.

[0073] FIG. 11 is a diagram 1100 illustrating the change in focal properties of a second electron beam caused when an exemplary embodiment bifocal beamformer applies at least a quadrupole lens effect to the second electron beam. Specifically, FIG. 11 illustrates an emitter 1102 that emits a plurality of electrons 1104 along an emission axis 1106. The plurality of electrons 1104 impinge on a bifocal beamformer 1108 within a circular region 1110. The bifocal beamformer 1108 is illustrated in FIG. 11 as being a MEMS device that (i) defines a first aperture 1112 and a second aperture 1114 that split the electron beam 1104 into a first electron beam 1116 and a second electron beam 1118, respectively, and (ii) generates an electromagnetic field that, during use, applies at least a quadrupole lens effect to the second electron beam 1118.

[0074] As shown in Figure 11, in some embodiments, at least the quadrupole lens effect deforms the second electron beam 1118 such that (i) it has different focal characteristics than the first electron beam 1116 and (ii) it is no longer a cylindrically symmetric beam. Specifically, Figure 11 shows the cross-sectional areas of the first electron beam 1116 and the second electron beam 1118 at a plane 1120 downstream of the bifocal beamformer 1108, where the emission axis is perpendicular to the plane 1120. The first electron beam 1116 is shown as having a circular (or nearly circular) cross-section 1122 where it intersects the plane 1120, and the second electron beam 1118 is shown as having a non-circular cross-section 1124 where it intersects the plane 1120. Applicant points out that these cross-sections are not illustrative of the performance of all embodiments of a bifocal beamformer in accordance with the present invention, but are limited to the specific exemplary embodiment of the bifocal beamformer 1108.

[0075] FIG. 12 illustrates an exemplary embodiment 1200 of a bifocal multibeam system(s) 100 for investigating a sample 104, in which the bifocal beamformer comprises an aperture lens array 1203.

[0076] The exemplary bifocal multi-beam system(s) 1202 comprises an electron source 106 that emits a plurality of electrons 108 along an emission axis 110 and towards an aperture lens array 1204. The aperture lens array 1204 includes at least one aperture that defines a structure 1206 that defines: (i) a first aperture that allows a first electron beam 114 to pass through at least one aperture that defines the structure 1206, (ii) a second aperture that allows a second electron beam 116 to pass through at least one aperture that defines the structure 1206, and (iii) a plurality of other apertures. The first aperture, the second aperture, and the multiple apertures collectively form a pattern that, when a voltage(s) is applied to the apertures and electrode(s) 1208 defining the structure 1206, creates an electromagnetic field that applies a lensing effect (e.g., at least a quadrupole lensing effect) to at least one of the first electron beam 114 and the second electron beam 116. The lensing effect deforms one or both of the first electron beam 114 and the second electron beam 116 such that they have different focal characteristics.

[0077] The aperture lens array 1204 further includes one or more electrodes (e.g., disk electrodes) 1208. Each of the one or more electrodes 1208 generates an electric field between a corresponding electrode and at least one aperture defining the structure 1206 when a voltage is supplied to the electrode. Additionally, in some embodiments, one or more of the electrodes 1208 can physically block a portion of the plurality of electrons 108 from reaching at least one aperture defining the structure 106. For example, one of the electrodes 1208 can define a first aperture (i.e., a first electron beam) that allows a first portion of electrons to pass through the electrode, and a second aperture (i.e., a second electron beam) that allows a second portion of electrons to pass through the electrode.

[0078] 12 illustrates the bifocal beamformer 112 as being positioned upstream of a focusing component 120 configured to apply lensing to focus at least one of the first electron beam 114 and the second electron beam 116. In the exemplary bifocal multi-beam system(s) 1202 illustrated in FIG. 12, the focusing component corresponds to an accelerator 122 that accelerates / decels, focuses, and / or directs the first electron beam 114 and the second electron beam 116 towards a focusing column 126.

[0079] The focusing column 126 and objective lens 128 focus the electron beams 114 and 116 so that they are incident on the sample 104. In particular, Figure 12 shows the focusing column 126 focusing the second electron beam 116 to a plane at or near the sample 104, and the first electron beam 114 not to be focused at or near the sample 104. In some embodiments, the focal properties of the first electron beam 114 and the second electron beam 116 are modified such that one of the electron beams is focused at or near the sample 104 and the other electron beam is focused at a plane located at least 0.1%, 1%, 10%, or 100% of the objective focal length above and / or below the sample 104. Alternatively, or in addition, the focal characteristics of the first electron beam 114 and the second electron beam 116 may be modified so that the diameter of one of the electron beams at the sample 104 is one of 50, 100, 500, or 1000 times larger than the diameter of the other electron beam at the sample.

[0080] Figure 13 shows an example 1300 electrode 1202 for an example aperture lens array 1204. The electrode 1208 is shown in Figure 13 as being a disk electrode 1302 that defines an aperture 1304 that allows electrons to pass through the disk electrode 1302.

[0081] 14 illustrates an exemplary 1400 apertures defining a structure 1402 for the exemplary aperture lens array 1204. The exemplary apertures defining the structure 1402 define (i) a first aperture 1404 that allows a first electron beam to pass through at least one aperture defining the structure 1402, (ii) a second aperture 1406 that allows a second electron beam to pass through at least one aperture defining the structure 1402, and (iii) a number of other apertures 1408. In the exemplary embodiment illustrated in FIG. 14, the first aperture 1404, the second aperture 1406, and each of the three apertures 1408 are positioned along a midline 1410 of the apertures defining the structure 1402.

[0082] 14 illustrates each of the plurality of other apertures 1408 as being holes that allow electrons to pass through the apertures that define the structure 1402. However, in other embodiments, one or more of the apertures 1408 may be cavities, where the apertures that define the structure 1402 define an empty space that allows electrons to enter but does not allow electrons to pass through the apertures that define the structure. The first aperture 1404, the second aperture 1406, and the plurality of apertures 1408 collectively form a pattern that induces an electromagnetic field that applies a lensing effect (e.g., at least a quadrupole lensing effect) to at least the second electron beam.

[0083] Figure 15 shows a cross-section of an exemplary aperture lens array 1500 having one aperture defining structure. Specifically, Figure 15 shows a cross-section of an exemplary aperture lens array 1500 including the exemplary electrode 1302 of Figure 13 and the exemplary aperture structure 1402 of Figure 14, with the cut of the cross-section aligned with the midline 1410 of the exemplary aperture structure 1402.

[0084] 15 shows electrons 1502 being emitted along an emission axis toward the electrode 1302. A portion of the electrons 1502 pass through both the aperture 1304 and the first aperture 1404 to become a first electron beam 1506. Another portion of the electrons 1502 pass through the aperture 1304 and the second aperture 1406 to become a second electron beam 1508. In some embodiments, the aperture lens array 1500 includes a second electrode positioned such that at least one aperture defining the structure 1402 is between the two electrodes. When a voltage is applied to the electrode 1302(A), the electrode 1302(B), the electrodes 1302(A) and 1302(B), and / or the apertures defining the structure 1402, an electromagnetic field is created between the electrode 1302 and the apertures defining the structure 1402. Although FIG. 15 shows aperture lens array 1500 as including two electrodes, in some embodiments, aperture lens array 1500 may include only one electrode (either electrode 1302(A) or 1302(B)).

[0085] The aperture lens array 1500 is configured such that the configuration of electrodes 1302 (i.e., one electrode, both electrodes, the location of such electrodes, the geometric shape of such electrodes, etc.), the voltages (or lack of voltages) applied to the individual electrodes 1302 and aperture-defining structures 1402, and the pattern in which the first aperture 1404, the second aperture 1406, and the plurality of apertures 1408 collectively create an electromagnetic field that creates a first lens effect on the first electron beam and a second lens effect on the second electron beam, where the first and second lens effects are different. For example, in one embodiment of the invention, the electromagnetic field can create a lens effect (e.g., at least a quadrupole lens effect) that causes the first electron beam 1506 and the second electron beam 1508 to have different focal characteristics.

[0086] In some embodiments, the electromagnetic field may also deflect one or both of the first electron beam 1506 and the second electron beam 1508 away from the emission axis 1504. Also, although Figure 15 illustrates the first electron beam 1508 as an axial beam traveling along the emission axis 1504 of the plurality of electrons 1502, this is not necessarily required in all embodiments.

[0087] Figures 16-24 show an exemplary central structure that can be used in the multi-aperture assembly 2500 shown in Figure 25. Specifically, Figure 16 shows an exemplary aperture-defining structure 1600 for an exemplary aperture lens array that includes a combination of holes and cavities. This exemplary aperture-defining structure 1602 defines (i) a first aperture 1604 that allows a first electron beam to pass through at least one aperture-defining structure 1602, (ii) a second aperture 1606 that allows a second electron beam to pass through at least one aperture-defining structure 1602, and (iii) a plurality of other apertures 1608. The first aperture 1604, the second aperture 1606, and the plurality of apertures 1608 collectively form a pattern that induces an electromagnetic field that applies a lensing effect (e.g., at least a quadrupole lensing effect) to at least the second electron beam when a voltage is applied to at least the aperture defining structure 1600, and the electrodes 2504 and 2512 during use of the multi-aperture assembly 2500. In some embodiments, the aperture lens structure 1602 includes a single physical component that defines each of the first aperture 1604, the second aperture 1606, and the plurality of apertures 1608. However, in other embodiments, the aperture lens structure 1602 can include a physical structure of two or more components.

[0088] 16 illustrates an exemplary embodiment in which five of the plurality of other apertures 1608 correspond to holes 1610 and four of the plurality of other apertures 1608 correspond to cavities 1612. However, in other embodiments, the plurality of other apertures 1608 can include other combinations and / or patterns of holes and cavities, including embodiments in which all of the plurality of other apertures 1608 correspond to one of the holes (e.g., the apertures defining the structure shown in FIG. 14) or cavities. In the exemplary embodiment illustrated in FIG. 16, each of the first aperture 1604, the second aperture 1606, and the two other apertures 1608 are positioned along a line 1614 of the aperture-defining structure 1602.

[0089] Figure 17 illustrates a cross-section 1700 of an exemplary aperture structure 1602 that includes a single physical structure 1702. Specifically, Figure 17 illustrates a cross-section of an embodiment of the exemplary aperture structure 1602 of Figure 16, with the cross-sectional cut aligned with line 1614. A first portion of electrons 1704 are able to pass through the physical structure 1702 via holes 1706. Figure 17 further illustrates that a second portion of electrons 1704 travels through a cavity 1708, which blocks the electrons from passing through the physical structure 1702.

[0090] FIG. 18 illustrates a cross-section 1800 of an exemplary aperture structure 1602 including a first physical structure 1802 and a second physical structure 1804. Specifically, FIG. 18 illustrates a cross-section of an embodiment of an exemplary aperture structure 1602 comprised of two structures (e.g., a foil), with the cut of the cross-section aligned with line 1614. FIG. 18 illustrates a hole 1806 in the exemplary aperture structure 1602 as corresponding to a complementary aperture in the first physical structure 1802 and the second physical structure 1804 that together allow a first portion of electrons 1808 to pass through the aperture structure 1602. FIG. 18 also illustrates a cavity 1810 as corresponding to an aperture in the first physical structure 1802 that does not have a complementary aperture in the second physical structure 1804. In other words, the cavity 1810 is configured such that the second portion of the electrons 1808 can travel into the space 1812 between the first physical structure 1802 and the second physical structure 1804, but are not allowed to pass through the aperture structure 1602.

[0091] 19 and 20 show a pair of component physical structures that can be used to form the aperture-defining structure 2306 in the aperture lens array 2500 shown in FIG. 25. Specifically, FIG. 19 shows an exemplary first component physical structure 1900 of an exemplary aperture-defining structure that includes two physical structures. This exemplary first component physical structure 1900 defines (i) a first aperture 1904 that allows a first electron beam to pass through the first component physical structure 1900, (ii) a second aperture 1906 that allows a second electron beam to pass through the first component physical structure 1900, and (iii) a number of other apertures 1908. Each of these apertures is shown as having a rectangular geometric shape (e.g., a long slot). Such a rectangular aperture is configured to create a cylindrical lens effect on electrons passing through the aperture during use of the exemplary aperture-defining structure. In the exemplary embodiment shown in FIG. 19, the first aperture 1904, the second aperture 1906, and each of the two apertures 1908 are positioned along a midline 1910 of the first component physical structure 1900.

[0092] FIG. 20 illustrates an exemplary second component physical structure 2000 of an exemplary aperture-defining structure that includes two physical structures. The exemplary second component physical structure 2000 defines (i) a first aperture 2004 that allows a first electron beam to pass through the second component physical structure 2000, (ii) a second aperture 2006 that allows a second electron beam to pass through the second component physical structure 2000, and (iii) a number of other apertures 2008. The apertures 2004 and 2008 are shown as having a rectangular geometry similar to the aperture defined by the first component physical structure 1900 illustrated in FIG. 19. The second aperture 2006 is illustrated in FIG. 20 as combining both a rectangular geometry and a circular geometry. In other words, the second aperture 2006 is illustrated as being centrally positioned and superimposed with an aperture having a rectangular geometry. The combination of the geometries of the second aperture 1906 and the second aperture 2006 applies a net quadrupole lens effect to the electron beam B as it passes through the second apertures 1906 and 2006. Similarly, the geometries of the first aperture 1904 and the first aperture 2004 apply no net lens effect to the electron beam A. In the exemplary embodiment shown in FIG. 20, each of the first aperture 2004, the second aperture 2006, and the two apertures 2008 are positioned along a midline 2010.

[0093] 21 and 20 illustrate a pair of component physical structures that can be used to form the aperture-defining structure 2306 in the aperture lens array 2500 shown in FIG. 25. Specifically, FIG. 21 illustrates an exemplary first component physical structure 2100 of an exemplary aperture-defining structure that includes two physical structures. This exemplary first component physical structure 2100 defines (i) a first aperture 2104 that allows a first electron beam to pass through the first component physical structure 2100, (ii) a second aperture 2106 that allows a second electron beam to pass through the first component physical structure 2100, and (iii) a number of other apertures 2108. Such apertures are configured to create a quadrupole lens effect on electrons passing through the second aperture 2106 during use of the exemplary aperture-defining structure. In the exemplary embodiment shown in FIG. 21, the first aperture 2104, the second aperture 2106, and the other aperture 2108 are each positioned along a midline 2110 of the first component physical structure 2100.

[0094] 22 illustrates an exemplary second component physical structure 2200 of an exemplary aperture-defining structure that includes two physical structures. The exemplary second component physical structure 2200 defines (i) a first aperture 2204 that allows a first electron beam to pass through the second component physical structure 2200, (ii) a second aperture 2206 that allows a second electron beam to pass through the second component physical structure 2200, and (iii) a number of other apertures 2208. The apertures 2204 and 2208 are shown as having a similar geometry to the aperture defined by the first component physical structure 2200 illustrated in FIG. 22. The combination of the geometries of the second aperture 2106 and the second aperture 2206 does not apply a net lens effect to the electron beam A. Similarly, the geometries of the first aperture 2104 and the first aperture 2204 apply a net quadrupole lens effect to the electron beam B as it passes through the second apertures 2106 and 2206. In the exemplary embodiment shown in FIG. 22, the first aperture 2204, the second aperture 2206, and each of the two apertures 2028 are positioned along the midline 2210.

[0095] 23 and 24 show a pair of component physical structures that can be used to form an aperture-defining structure 2506 in the aperture lens array 2500 shown in FIG. 25. Specifically, FIG. 23 shows an exemplary first component physical structure 2300 of an exemplary aperture-defining structure that includes two physical structures. This exemplary first component physical structure 2300 defines (i) a first aperture 2304 that allows a first electron beam to pass through the first component physical structure 2300, (ii) a second aperture 2306 that allows a second electron beam to pass through the first component physical structure 2300, and (iii) a number of other apertures 2308. Each of these apertures is illustrated as having a rectangular geometric shape (e.g., a long slot). Such a rectangular aperture is configured to create a cylindrical lens effect on electrons passing through the aperture during use of the exemplary aperture-defining structure. In the exemplary embodiment shown in FIG. 23, the first aperture 2304, the second aperture 2306, and each of the two apertures 2308 are positioned along a midline 2310 of the first component physical structure 2300.

[0096] 24 illustrates an exemplary second component physical structure 2400 of an exemplary aperture-defining structure that includes two physical structures. This exemplary second component physical structure 2400 defines (i) a first aperture 2404 that allows a first electron beam to pass through the second component physical structure 2400, (ii) a second aperture 2406 that allows a second electron beam to pass through the second component physical structure 2400, and (iii) a number of other apertures 2408. The apertures 2404 and 2408 are shown as having a rectangular shape similar to the aperture defined by the first component physical structure 2300 illustrated in FIG. 23. The combination of the geometries of the second aperture 2306 and the second aperture 2406 does not apply a net lens effect to the electron beam A. Similarly, the geometries of the first aperture 2304 and the first aperture 2404 impose a net quadrupole lens effect on the electron beam B passing through the second apertures 2306 and 2406. In the exemplary embodiment shown in FIG. 24, the first aperture 2404, the second aperture 2406, and each of the two apertures 2408 are positioned along a midline 2410.

[0097] FIG. 25 shows a cross section of an exemplary aperture lens array 2500 including a first electrode 2502, a second electrode 2504, and an aperture-defining structure 2506. FIG. 25 shows electrons 2508 emitted towards the first electrode 2502. The first electrode 2502 is shown as defining a pair of apertures 2512 that allow a portion of the electrons 2508 to pass through the first electrode 2502. In some embodiments, the first electrode 2502 can correspond to a conductive foil that defines two apertures 2512. A first portion of the electrons 2508 pass through both of the first apertures to become a first electron beam 2514. Another portion of the electrons 2508 pass through both of the second apertures to become a second electron beam 2516.

[0098] In all embodiments, the aperture lens array 2500 includes a second electrode 2504 positioned such that the aperture forming structure 2506 is between two electrodes. This second electrode 2504 can correspond to a disk electrode that forms an aperture 2518 that allows the first electron beam 2514 and the second electron beam 2516 to pass through the second electrode 2504.

[0099] When a specific voltage is applied to both electrodes 2502 and 2504, and / or to the aperture forming structure 2506, an electromagnetic field is created between electrodes 2502 and 2504. The pattern by the aperture defined by this electromagnetic field and the aperture forming structure 2506 collectively creates a lens effect that gives the first electron beam 2514 and the second electron beam 2516 different focal planes.

[0100] Although non-limiting, simple representative calculations can be used to illustrate the performance of some embodiments of the present invention having different array patterns for upstream and downstream components (e.g., the embodiments illustrated in FIGS. 19 and 20, the embodiments illustrated in FIGS. 21 and 22, the embodiments illustrated in FIGS. 23 and 24). To enable simple representative calculations, in the following paragraphs, (a) |φ0(z)| << U everywhere, (b) the electric field component E z = -φ’0(z) is close to the aperture array plate change from E up (i.e., the non-zero electric field above the aperture forming structure 2506) to 0 above the aperture forming structure 2306, (c) the electric field component E z = -φ’0(z) is close to the aperture array plate change from 0 to E low (i.e., the non-zero electric field below the aperture forming structure 2506) below the aperture forming structure 2506, and (d) the electric field between the array plates is a zero electric field (e.g., the plates of FIGS. 19 and 20) are assumed.

[0101] In this simple representative calculation, the electrostatic potential up to second order in the x and y directions can generally be expressed as: φ(x,y,z)=U+φ0(z)+pφ0″(z)x2+qφ0″(z)y 2 +φ2(z)(x 2 -y 2 ), (1) For an electrostatic potential that is mirror symmetric in the xz and yz planes. In equation (1), U represents the electron energy above the aperture lens array 2500, and the other terms are induced by voltages applied to both electrodes 2502 and 2504 and / or the aperture defining structure 2506. Laplace's equation for this electrostatic potential (Δφ=0) requires that p+q=−½. In some examples, this corresponds to p=q=−¼ for a round aperture lens, and p=−½ and q=0 for a cylindrical lens focusing in the xz plane (such as the embodiment illustrated in FIG. 19).

[0102] A simple representative calculation shows that the upstream component of the aperture-defining structure 2506 comprises a lens strength.

number

number

[0103] In some preferred embodiments, E up =E low≡E. In such an embodiment, the total lens power simplifies to: κ x =κ x,up +κ x,low =U -1 ((p low -p up )EQ), and (5) κ y =κ y,up +κ y,low =U -1 ((q low -q up )E+Q). (6) p up +q up =p low +q low =−½, meaning that in such an embodiment there is only pure quadrupole lensing, and κ y =-κ x It becomes.

[0104] In embodiments of the aperture lens array 2100 where the electromagnetic fields are the same on both sides of the physical structures 1900 and 2000, the lens effect caused by the first electron beam 2108 traveling through the first aperture 1904 is cancelled and / or otherwise countered by the lens effect caused by the first electron beam 2108 traveling through the first aperture 2004. Additionally, in such embodiments, the lens effect caused by the second electron beam 2110 traveling through the second aperture 1906 and the lens effect caused by the second electron beam 2110 traveling through the second aperture 2006 combine to form at least a quadrupole lens effect.

[0105] FIG. 26 is a diagram illustrating an exemplary embodiment 2600 of a bifocal multi-beam electron system(s) 100 for investigating a sample 104, in which the bifocal beamformer 112 includes a beam splitting mechanism 2604 and one or more focusing devices 2606.

[0106] An exemplary bifocal multi-beam electron system(s) 2602 includes an electron source 106 that emits a plurality of electrons 108 along an emission axis 110 toward a bifocal beamformer 112. In an illustrated embodiment of the invention, the bifocal beamformer 112 is shown as including at least (i) a beam splitting mechanism 2604 that splits the plurality of electrons 108 into a first electron beam 114 and a second electron beam 116, and (ii) one or more focusing devices 2606 configured to modify focal properties of one or both of the electron beams such that the two beams do not have the same corresponding focal plane. In some embodiments, the one or more focusing devices 2606 are further configured to deflect one or both of the first electron beam 114 and the second electron beam 116 away from the emission axis 110.

[0107] In FIG. 26, the beam splitting mechanism 2604 is shown as corresponding to a physical structure defining a first aperture that allows the first electron beam 114 to pass through the beam splitting mechanism 2604 and a second aperture that allows the second electron beam 116 to pass through the beam splitting mechanism 2604. FIG. 26 also shows one or more focusing devices 2606 as optionally corresponding to two lenses. However, in other embodiments, the focusing device 2606 can correspond to three or more lenses, a single lens that modifies only one of the electron beams, a single lens with a high degree of aberration such that both electron beams pass through the lens. In addition, while FIG. 26 illustrates the beam splitting mechanism 2604 as being upstream of the one or more focusing devices 2606, in other embodiments of the exemplary bifocal multi-beam electron system 2602, the beam splitting mechanism 2604 may be downstream of the one or more focusing devices 2606. Alternatively, in some embodiments, the focusing devices 2606 may be upstream of the beam splitting mechanism 2604 while others of the focusing devices 2606 may be downstream of the beam splitting mechanism 2604.

[0108] 26 illustrates the bifocal beamformer 112 as being positioned upstream of a focusing component 120 configured to apply lens action to focus at least one of the first electron beam 114 and the second electron beam 116. In the example bifocal multi-beam electron system(s) 2602 illustrated in FIG. 26, the focusing component corresponds to an accelerator 122 that accelerates / decels, focuses, and / or directs the first electron beam 114 and the second electron beam 116 towards the focusing column 126.

[0109] The focusing column 126 and objective lens 128 focus the electron beams 114 and 116 so that they are incident on the sample 104. Specifically, Figure 26 shows the focusing column 126 focusing the second electron beam 116 onto the sample 104 and the first electron beam 114 not focused onto the sample 104. In some embodiments, the focal planes of the first electron beam 114 and the second electron beam 116 are modified so that one of the beams is focused on a plane at or near the sample 104 and the other electron beam is focused on a plane located at least 0.1%, 1%, 10%, or 100% of the objective focal length above or below the sample 104. Alternatively, or in addition, the focal planes of the first electron beam 114 and the second electron beam 116 can be modified so that the diameter of one of the electron beams at the sample 104 is at least one of 50, 100, 500, or 1000 times larger than the diameter of the other electron beam at the sample.

[0110] Examples of inventive subject matter according to the present disclosure are described in the paragraphs listed below.

[0111] A1. A method for investigating a sample, the method including: emitting a plurality of charged particles toward the sample; forming the plurality of charged particles into a first charged particle beam and a second charged particle beam; and modifying a focal characteristic of at least one of the first charged particle beam and the second charged particle beam.

[0112] A1.1. The method of paragraph A1, wherein modifying focal characteristics of at least one of the first charged particle beam and the second charged particle beam includes modifying one or more of the first charged particle beam and the second charged particle beam such that the first charged particle beam has a first focal plane and the second charged particle beam has a second focal plane that is different from the first focal plane.

[0113] A1.1.1. The method of paragraph A1.1, wherein modifying the focal characteristics of at least one of the first charged particle beam and the second charged particle beam includes modifying one or more of the first charged particle beam and the second charged particle beam such that the first charged particle beam has a focal plane at or near the plane of the sample and the second charged particle beam does not have a focal plane at or near the plane of the sample.

[0114] A1.1.2. The method of paragraph A1.1, wherein modifying the focal characteristics of at least one of the first charged particle beam and the second charged particle beam includes modifying one or more of the first charged particle beam and the second charged particle beam such that the first charged particle beam has a focal plane at or near the plane of the sample and the second charged particle beam does not have a focal plane at or near the plane of the sample.

[0115] A1.2. The method of any of paragraphs A1-A1.1.2, wherein modifying focal characteristics of at least one of the first charged particle beam and the second charged particle beam includes applying a circular lens effect to one of the first charged particle beam and the second charged particle beam.

[0116] A1.2.1. The method of paragraph A1.2, wherein modifying focal characteristics of at least one of the first charged particle beam and the second charged particle beam includes applying a circular lens action to both the first charged particle beam and the second charged particle beam.

[0117] A1.2.1.1. The method of paragraph A1.2.1, wherein the circular lens action applied to the first charged particle beam is different from the circular lens action applied to the second charged particle beam.

[0118] A1.3. The method of any of paragraphs A1-A1.2.1.1, wherein modifying focal characteristics of at least one of the first charged particle beam and the second charged particle beam includes applying at least quadrupole lens action to one of the first charged particle beam and the second charged particle beam.

[0119] A1.4. The method of any of paragraphs A1-A1.3, wherein the first charged particle beam is an axial beam moving along a radial axis of the multiple charged particles, and the second charged particle beam is a non-axial beam.

[0120] A1.5. The method of any of paragraphs A1-A1.4, wherein the second charged particle beam is an axial beam moving along a radial axis of the multiple charged particles and the first charged particle beam is a non-axial beam.

[0121] A2. The method of any of paragraphs A1-A1.5, wherein the charged particles are electrons and the charged particle beam is an electron beam.

[0122] A3. The method of any of paragraphs A1-A2, wherein the second beam diameter of the second charged particle beam at the sample is at least one of 5, 10, 20, 50, 100, 500, or 1000 times larger than the first beam diameter of the first charged particle beam at the sample.

[0123] A3.1. The method of paragraph A3, wherein the second beam diameter is at least one of 5, 10, 20, 50, 100, 500, or 1000 times larger than the first beam diameter at or nearest each crossing point of the first charged particle beam.

[0124] A4. The method of any of paragraphs A1-A3.1, wherein the first charged particle beam is tilted at the sample relative to the second charged particle beam.

[0125] A5. The method of any of paragraphs A1-A4, wherein the first charged particle beam and the second charged particle beam are coherent beams.

[0126] A6. The method of any of paragraphs A1-A5, further comprising accelerating each of the first charged particle beam and the second charged particle beam in an accelerator to a final energy.

[0127] A7. The method of any of paragraphs A1-A5, further comprising accelerating the plurality of charged particles in an accelerator to a final energy.

[0128] A8. The method of any of paragraphs A1-A7, wherein each of forming the plurality of charged particles and modifying the focal characteristics is performed by a bifocal beamformer.

[0129] A8.1. The method of paragraph A8 when dependent on A6, wherein the bifocal beamformer is positioned above the accelerator.

[0130] A8.2. The method of paragraph A8 when dependent on A7, wherein the bifocal beamformer is positioned below the accelerator.

[0131] A8.3. The method of any of paragraphs A8-A8.2, wherein a bifocal beamformer distorts the second charged particle beam.

[0132] A8.4. The method of any of paragraphs A8-A8.3, wherein a bifocal beamformer varies the focal plane of the second charged particle beam.

[0133] A8.5. The method of any of paragraphs A8-A8.4, wherein the focal beamformer causes the second charged particle beam to be a non-cylindrically symmetric beam.

[0134] A8.5.1. The method of paragraph A8.5, further comprising forming the second charged particle beam into a cylindrically symmetric beam with a stigmator.

[0135] A8.6. A method according to any of A8 to A8.5.1, wherein the bifocal beamformer imparts one or more aberrations to the second charged particle beam.

[0136] The method of paragraph A8.6, wherein at least one of the one or more aberrations is a deterministic aberration.

[0137] A8.6.2. The method of any of paragraphs A8.6-8.6.1, wherein the bifocal beamformer is positioned and / or configured to cause at least one of the one or more aberrations to correct another aberration in the system.

[0138] A8.7. The method of any of paragraphs A8-A8.6.2, wherein the bifocal beamformer is further configured to deflect at least one of the first charged particle beam and the second charged particle beam away from the emission axis of the plurality of charged particles.

[0139] A9. The method of any of paragraphs A8-A8.7, wherein the bifocal beamformer comprises a MEMS device configured to generate at least a quadrupole lens effect that at least partially causes modification of focal properties of at least one of the first charged particle beam and the second charged particle beam.

[0140] A9.1. The method of paragraph A9, wherein the MEMS device includes a structure defining a first aperture and a second aperture, the first charged particle beam passing through the first aperture and the second charged particle beam passing through the second aperture.

[0141] A9.1.1. The method of paragraph A9.1, wherein the first aperture has the same radius as the second aperture.

[0142] A9.1.2. The method of paragraph A9.1, wherein the first aperture has a smaller radius than the second aperture.

[0143] A9.1.3. The method of paragraph A9.1, wherein the first aperture has a larger radius than the second aperture.

[0144] A9.1.4. The method of any of paragraphs A9.1-A9.1.3, wherein the MEMS device comprises a surface layer facing the plurality of charged particles, the first aperture and the second aperture being defined by the surface layer.

[0145] A9.1.4.1. The method of paragraph A9.1.4, wherein the surface layer is a foil.

[0146] A9.1.5. The method of any of paragraphs A9.1-A9.1.4.1, wherein the first aperture is an axial aperture positioned on the radial axis of the plurality of charged particles, and the second aperture is a non-axial aperture.

[0147] A9.1.6. The method of any of paragraphs A9.1-A9.1.4.1, wherein the second aperture is an axial aperture positioned on the radial axis of the plurality of charged particles and the first aperture is a non-axial aperture.

[0148] A9.2. The method of any of paragraphs A9-A9.1.5, wherein the MEMS device comprises one or more electrodes.

[0149] A9.2.1. The method of paragraph A9.2, wherein the one or more electrodes generate an electromagnetic field that at least partially applies a quadrupole lens effect when a corresponding voltage is applied to the one or more electrodes.

[0150] A9.2.1. The method of any of paragraphs A9.2-A9.2.1, wherein at least one of the one or more electrodes is grounded.

[0151] A9.2.2. The method of any of paragraphs A9.2 to A9.2.1 when subject to A9.1.4, wherein the MEMS device includes an insulating layer opposite the surface layer.

[0152] The method of paragraph A9.2.2, wherein the one or more electrodes are positioned on an electrode layer positioned between the insulating layer and the surface layer.

[0153] A9.2.3. The method of any of paragraphs A9.2 through A9.2.2.1, wherein the one or more electrodes include four electrodes.

[0154] A9.2.4. The method of any of paragraphs A9.2 to A9.2.2.1, wherein the one or more electrodes include seven electrodes.

[0155] A9.3. The method of any of paragraphs A9-A9.2.4, wherein the at least quadrupole lens effect is one of a dipole lens effect, a quadrupole lens effect, a hexapole lens effect, and an octopole lens effect.

[0156] A9.4. The method of any of paragraphs A9-A9.3, wherein at least the quadrupole field does not change the focal plane of the first charged particle beam.

[0157] A9.5. The method of any of paragraphs A9-A9.4, wherein the MEMS device is further configured to generate one or more dipole electric fields.

[0158] The method of paragraph A9.5, wherein one or more dipole fields deflect at least one charged particle beam in a direction perpendicular to the radiation axis.

[0159] A9.6. The method of any of paragraphs A9 to A9.5.1, wherein the quadrupole lens effect applies a positive lens effect to the first charged particle beam in a first meridional plane of the first charged particle beam and a negative lens effect to the first charged particle beam in a second meridional plane of the first charged particle beam, the first meridional plane being perpendicular to the second meridional plane.

[0160] A9.6.1. The method of paragraph A9.6, wherein a first change in the focal plane of the first charged particle beam in a first meridional plane caused by the quadrupole electric field is different from a second change in the focal plane of the first charged particle beam in a second meridional plane caused by the quadrupole electric field.

[0161] A9.7. The method of any of paragraphs A9 to A9.5.1, wherein the quadrupole lens effect applies a positive lens effect to the second charged particle beam in a first meridional plane of the second charged particle beam and applies a negative lens effect to the second charged particle beam in a second meridional plane of the second charged particle beam, the first meridional plane being perpendicular to the second meridional plane.

[0162] A9.7.1. The method of paragraph A9.7, wherein a first change in the focal plane of the second charged particle beam in the first meridional plane caused by the quadrupole electric field is different from a second change in the focal plane of the second charged particle beam in the second meridional plane caused by the quadrupole electric field.

[0163] A10. The method of any of paragraphs A8 to A8.6.2, wherein the bifocal beamformer comprises a physical structure defining a first aperture and a second aperture, where the first charged particle beam passes through the first aperture and the second charged particle beam passes through the second aperture, and a lens positioned and / or configured to adjust a focal characteristic of at least one of the first charged particle beam and the second charged particle beam so that the first charged particle beam and the second charged particle beam have different focal planes.

[0164] A10.1. The method of paragraph A10, in which a first charged particle beam passes through a first aperture and a second charged particle beam passes through a second aperture.

[0165] A10.2. The method of any of paragraphs A10-A10.1, wherein the lens is an Einzel lens.

[0166] A10.3. The method of any of paragraphs A10-A10.2, wherein the lens is positioned over the physical structure.

[0167] A10.4. The method of any of paragraphs A10-A10.2, wherein the lens is positioned below and above the physical structure.

[0168] A10.5. The method of any of paragraphs A10-A10.4, wherein a lens is positioned and / or configured to adjust focal characteristics of the second charged particle beam.

[0169] A10.5.1. The method of paragraph A10.5, wherein the lens is not positioned and / or configured to adjust the focal plane of the first charged particle beam.

[0170] A11. The method of any of paragraphs A6-A6.5, wherein the bifocal beamformer comprises at least one physical structure defining a first aperture that allows a first charged particle beam to pass through the at least one physical structure, a second aperture that allows a second charged particle beam to pass through the at least one physical structure, and a plurality of other apertures.

[0171] A11.1. The method of paragraph A11, wherein the first aperture, the second aperture, and a plurality of other apertures form a pattern that creates an electromagnetic field that applies a lens effect to the second charged particle beam during use of the bifocal beamformer.

[0172] A11.1.1. The method of paragraph A11.1, wherein the first aperture, the second aperture, and a plurality of other apertures form a pattern that creates an electromagnetic field that applies at least a quadrupole lens effect to the second charged particle beam during use of the bifocal beamformer.

[0173] A11.1.1.1. The method of paragraph A11.1.1, wherein the electromagnetic field does not apply a quadrupole lens effect to the first charged particle beam during use of a bifocal beamformer.

[0174] A11.1.2. The method of any of paragraphs A11.1-A11.1.1.1, wherein the first aperture, the second aperture, and a plurality of other apertures form a pattern that creates an electromagnetic field that applies a circular lens effect to the first charged particle beam during use of the bifocal beamformer.

[0175] A11.1.2.1. The method of paragraph A11.1.2, wherein a plurality of other apertures form a pattern that creates an electromagnetic field that applies at least a circular lens effect to the second charged particle beam during use of the bifocal beamformer.

[0176] A11.1.3. The method of any of paragraphs A11.1-A11.2.1, wherein the lens effect applied by the electromagnetic field causes, at least in part, a modification of focal characteristics of at least one of the first charged particle beam and the second charged particle beam.

[0177] A11.1.3.1. The method of paragraph A11.1.3, in which the electromagnetic field changes the focal plane of the first charged particle beam.

[0178] A11.3. The method of any of paragraphs A11-A11.2.1, wherein at least one aperture of the plurality of apertures is a hole.

[0179] A11.3.1 Hole,

[0180] The method of paragraph A11.3, comprising an inlet defined in a first surface of at least one physical structure, the first surface facing the plurality of charged particles, an outlet defined in a second surface of the at least one physical structure opposite the first surface, and an empty volume connecting the inlet and the outlet.

[0181] The method of paragraph A11.3.1.1., wherein the first surface and the second surface are each surfaces of a single physical structure.

[0182] A11.3.1.2. The method of paragraph A11.3.1, wherein the first surface and the second surface are each surfaces of different physical structure.

[0183] A11.4. The method of any of paragraphs A11-A11.3.1.2, wherein at least one aperture of the plurality of apertures is a cavity.

[0184] A11.4.1. The method of paragraph A11.4, wherein the cavity comprises an entrance defined in a first surface of the at least one physical structure, the first surface facing the plurality of charged particles, and an empty volume in communication with the entrance and defined by the at least one physical structure, the at least one physical structure defining the empty volume such that charged particles of the plurality of charged particles entering the empty volume through the entrance do not pass through the bifocal beamformer.

[0185] A11.4.1.1. The method of paragraph A11.4.1, wherein the cavity is defined by a single physical structure.

[0186] A11.4.1.2. The method of paragraph A11.4.1, wherein the cavity is defined by multiple physical structures.

[0187] A11.5. The method of any of paragraphs A11.3-A11.4.1.2, wherein the plurality of apertures includes a combination of holes and cavities.

[0188] A11.6. The method of any of paragraphs A11-A11.5, wherein the geometric shape of at least one of the first aperture, the second aperture, or one of the plurality of apertures is circular.

[0189] A11.7 The method of any of paragraphs A11-A11.5, wherein the geometric shape of at least one of the first aperture, the second aperture, or one of the plurality of apertures is rectangular.

[0190] A11.7.1. The method of any of paragraphs A11-A11.5, wherein the geometric shape of at least one of the first aperture, the second aperture, or one of the plurality of apertures is a square.

[0191] A11.7.2. The method of any of paragraphs A11-A11.5, wherein the geometric shape of at least one of the first aperture, the second aperture, or one of the plurality of apertures has rounded corners.

[0192] A11.8. The method of any of paragraphs A11 through A11.7.2, wherein the geometric shapes of the first aperture, the second aperture, and the plurality of apertures are not uniform.

[0193] A11.9. The method of any of paragraphs A11-A11.8, wherein the first aperture, the second aperture, and the plurality of apertures are not uniform in size.

[0194] A11.10. The method of any of paragraphs A11-A11.9, wherein the bifocal beamformer further comprises a first electrode configured to receive a first applied voltage.

[0195] A11.10.1. The method of paragraph A11.10, wherein the first electrode comprises a physical structure at least partially defining an electrode entrance aperture that allows at least a portion of the plurality of charged particles to pass through the first electrode.

[0196] A11.10.1.1. The method of paragraph A11.10.1, wherein the electrode entrance aperture is a first electrode entrance aperture that allows a first portion of the plurality of charged particles to pass through the first electrode, and the second electrode further defines a second electrode entrance aperture that allows a second portion of the plurality of charged particles to pass through the first electrode.

[0197] A11.10.2. The method of any of paragraphs A11.10-A11.10.1.1, wherein the first electrode is upstream of the first aperture, the second aperture, and the plurality of apertures.

[0198] A11.10.3. The method of any of paragraphs A11.10 to A11.10.2, wherein the first electrode is a disk-shaped electrode.

[0199] A11.10.4. The method of any of paragraphs A11.10-A11.10.2, wherein the bifocal beamformer further comprises a second electrode configured to receive a second applied voltage.

[0200] The method of paragraph A11.10.4, wherein the first voltage is different from the second voltage.

[0201] A11.10.4.2. The method of paragraph A11.10.4, wherein the first voltage and the second voltage are different.

[0202] A11.10.4.3. The method of any of paragraphs A11.10.4 to A11.10.4.2, wherein the second electrode has a physical structure that at least partially defines an electrode exit aperture through which at least one of the first charged particle beam and the second charged particle beam passes through the second electrode.

[0203] A11.10.4.3.1. The method of paragraph A11.10.4.3, wherein the electrode exit aperture is a first electrode exit aperture that allows the first charged particle beam to pass through the second electrode, and the second electrode further comprises a second electrode exit aperture that allows the second charged particle beam to pass through the second electrode.

[0204] A11.10.4.3. The method of any of paragraphs A11.10.4 through A11.10.4.3.1, wherein a second electrode is positioned downstream of the first aperture, the second aperture, and the plurality of apertures.

[0205] A12. The method of any of paragraphs A8-A8.6.2, wherein the bifocal beamformer comprises a biprism positioned and / or configured to define a hole and split the plurality of charged particles into a first charged particle beam and a second charged particle beam.

[0206] A13. The method of any of paragraphs A8-A8.6.2, wherein a laser pattern fringe is used to split a plurality of charged particles into a first charged particle beam and a second charged particle beam.

[0207] A14. The method of any of paragraphs A1-A13, wherein a second charged particle beam is focused at a different plane positioned above the sample.

[0208] A13.1. The method of paragraph A13, wherein the different planes are positioned at at least 0.1%, 1%, 10%, or 100% of the focal length of the objective lens above the sample.

[0209] A14. The method of any of paragraphs A1-A13, wherein a second charged particle beam is focused at a different plane positioned below the sample.

[0210] A14.1. The method of paragraph A14, wherein the different planes are positioned at least 0.1%, 1%, 10%, or 100% of the focal length of the objective lens below the sample.

[0211] A15. The method of any of paragraphs A13-A14.1, wherein the distance between the plane of the sample or a plane near the sample and the different plane is at least 0.1%, 1%, 10%, or 100% of the focal length of the objective lens.

[0212] A16. The method of any of paragraphs A1-A15, wherein the second charged particle beam is a collimated beam at the sample.

[0213] B1. A method for investigating a sample using electron holography, comprising: emitting a plurality of electrons toward the sample; forming the plurality of electrons into a first electron beam and a second electron beam; modifying focal properties of at least one of the first electron beam and the second electron beam so that the two electron beams have different focal planes; focusing the first electron beam to have a focal plane at or near the sample; focusing the second electron beam to be incident on the sample and have a focal plane at a diffraction plane; and detecting an interference pattern of the first electron beam and the diffracted second electron beam in the diffraction plane.

[0214] B1.1. The method of paragraph B1, further comprising generating a holographic image of the sample based on an interference pattern of the first electron beam and the diffracted second electron beam at the diffraction plane.

[0215] B1.2. The method of any of paragraphs B1-B1.1, further comprising determining a phase of electrons diffracted by the sample based on an interference pattern of the first electron beam and the diffracted second electron beam at the diffraction plane.

[0216] B1.3. The method of any of paragraphs B1-B1.2, further comprising determining an exit wave function of electrons leaving the sample in response to the second electron beam being incident on the sample.

[0217] B1.3.1. The method of paragraph B1.3, wherein determining the exit wave function includes determining a phase and amplitude of an exit wave function of electrons leaving the sample in response to the second electron beam being incident on the sample.

[0218] B1.3.2. The method of any of paragraphs B1.3-B1.3.1, further comprising determining a structure of the sample based on the exit wave function.

[0219] B1.3.2.1. The method of paragraph B1.3.2, wherein the sample is crystalline and determining the structure of the sample includes determining a crystal lattice of the sample based on the exit wave function.

[0220] B2. The method of any of paragraphs B1-B1.3.2.1, wherein one of the first electron beam and the second electron beam is an axial beam traveling along a radial axis of the plurality of charged particles.

[0221] B3. The method of any of paragraphs B1-B2, wherein the diffraction plane corresponds to a first focal plane of a second electron beam downstream of the sample.

[0222] B4. The method of any of paragraphs B1-B3, wherein the first electron beam and the second electron beam are coherent.

[0223] B4. The method of any of paragraphs B1-B3, wherein the first electron surface passes through an aperture in the sample.

[0224] B4.1. The method of paragraph B4, further comprising burning an aperture in the sample with one of the electron beam and the ion beam.

[0225] B5. The method of any of paragraphs B1-B3, wherein the first electron beam passes through a thin region of the sample such that there is not sufficient scattering to interfere with the first electron beam.

[0226] B6. The method of any of paragraphs B1-B5, wherein the second electron beam is a collimated beam at the sample.

[0227] B7. The method of any of paragraphs B1-B6, wherein the second diameter of the second electron beam is 5, 10, 20, 50, and 100 times larger than the first diameter of the first electron beam.

[0228] B8. The method of any of paragraphs B1-B7, wherein the first charged particle beam is an axial beam moving along a radial axis of the plurality of charged particles, and the second charged particle beam is a non-axial beam.

[0229] B9. The method of any of paragraphs B1-B7, wherein the second charged particle beam is an axial beam moving along a radial axis of the plurality of charged particles, and the first charged particle beam is a non-axial beam.

[0230] B10. The method of any of paragraphs B1-B9, wherein modifying focal characteristics of at least one of the first electron beam and the second electron beam includes applying a round lens effect to one of the first electron beam and the second electron beam.

[0231] B10.1. The method of paragraph B10, wherein modifying a focal characteristic of at least one of the first electron beam and the second electron beam includes applying a round lens effect to both the first electron beam and the electron particle beam.

[0232] B10.1.1. The method of paragraph B10.1, wherein the round lensing applied to the first electron beam is different from the round lensing applied to the second electron beam.

[0233] B11. The method of any of paragraphs B1-B10.1.1, wherein modifying a focal characteristic of at least one of the first electron beam and the second electron beam includes applying at least quadrupole lens action to one of the first electron beam and the second electron beam.

[0234] B11.1. The method of paragraph B11, wherein at least quadrupole lensing applies astigmatism to one of the first electron beam and the second electron beam such that the beam is no longer cylindrically symmetric.

[0235] B11.2. The method of any of paragraphs B11-B11.1, wherein the method further includes applying at least an additional quadrupole lens effect to one of the first electron beam and the second electron beam.

[0236] B11.2.1. The method of paragraph B11.2, wherein one of the first electron beam and the second electron beam is a cylindrically symmetric beam due to an additional at least quadrupole lens effect.

[0237] B11.2.2. The method of any of paragraphs B11.2-B11.2.1, wherein at least a quadrupole lens effect is applied by a corrector.

[0238] The method of paragraph B11.2.2, wherein the corrector further applies a deflection perpendicular to the emission axis of the plurality of electrons.

[0239] B11.2.2.1.1. The method of paragraph B11.2.2.1, wherein the second electron beam is an axial beam and the deflection causes the second electron beam to become a non-axial beam downstream of the corrector.

[0240] B11.2.2.1.2. The method of paragraph B11.2.2.1, wherein the second electron beam is a non-axial beam and the deflection causes the second electron beam to become an axial beam downstream of the corrector.

[0241] B11.2.2.1.3. The method of paragraph B11.2.2.1, wherein the first electron beam is an axial beam and the deflection causes the first electron beam to become a non-axial beam downstream of the corrector.

[0242] B11.2.2.1.4. The method of paragraph B11.2.2.1, wherein the first electron beam is a non-axial beam and the deflection causes the first electron beam to become an axial beam downstream of the corrector.

[0243] B11.2.2.2. The method of any of paragraphs B11.2.2.1 through B11.2.2.1.4, wherein the corrector is positioned at a focal plane of the electron beam that did not receive at least a quadrupole lens effect.

[0244] B12. The method of any of paragraphs B1-B11.2.2.2, wherein the plurality of electrons is split and the first electron beam and the second electron beam are modified by a MEMS device.

[0245] The method of paragraph B12, wherein the MEMS device comprises a MEMS device according to any of paragraphs F1-F12.1.

[0246] B13. The method of any of paragraphs B1-B12, wherein the plurality of electron beams are split and the first electron beam and the second electron beam are modified by a multi-aperture device.

[0247] The method of paragraph B13, wherein the MEMS device comprises a MEMS device according to any of paragraphs F1-F12.1.

[0248] B14. The method of any of paragraphs B1-B13, wherein the sample is a crystal.

[0249] B14.1. The method of paragraph B14, wherein the diffraction peak in the diffraction image is an Airy disk.

[0250] B15. The method of any of paragraphs B1-B14.1, wherein electrons scattered by the sample have a focal plane at the diffraction plane.

[0251] C1. A system for investigating a sample, comprising: a sample holder configured to hold the sample; a charged particle emitter configured to emit charged particles toward the sample; and a bifocal beamformer positioned between the charged particle emitter and the sample holder, wherein the bifocal beamformer is configured to form a plurality of charged particles into a first charged particle beam and a second charged particle beam, and to modify focal properties of at least one of the first charged particle beam and the second charged particle beam such that the first charged particle beam is focused at a plane of the sample or a plane near the sample and the second charged particle beam is not focused at the plane of the sample or a plane near the sample.

[0252] C2. The system of paragraph C1, wherein the charged particle emitter is an electron emitter configured to emit electrons toward the sample, and the charged particle beam is an electron beam.

[0253] C3. The system of any of paragraphs C1-C2, wherein the second beam diameter of the second charged particle beam at the sample is at least one of 5, 10, 20, 50, 100, 500, or 1000 times larger than the first beam diameter of the first charged particle beam at the sample.

[0254] C3.1. The system of paragraph C3, wherein the second beam diameter is at least one of 5, 10, 20, 50, 100, 500, or 1000 times larger than the first beam diameter at or nearest each intersection of the first charged particle beam.

[0255] C4. The system of any of paragraphs C1-C3.1, wherein the first charged particle beam is tilted at the sample relative to the second charged particle beam.

[0256] C5. The system of any of paragraphs C1-C4, wherein the first charged particle beam and the second charged particle beam are coherent beams.

[0257] C6. The system of any of paragraphs C1-C5, further comprising an accelerator.

[0258] C6.1. The system described in paragraph C6, wherein the accelerator is positioned below the bifocal beamformer and configured to accelerate each of the first charged particle beam and the second charged particle beam to a final energy.

[0259] C6.2. The system of paragraph C6, wherein the accelerator is positioned above the bifocal beamformer and configured to accelerate the plurality of charged particles to a final energy.

[0260] C7. The system of any of paragraphs C1-C6.2, wherein the bifocal beamformer distorts the second charged particle beam.

[0261] C8. The system of any of paragraphs C1-C7, wherein the bifocal beamformer varies the focal plane of the second charged particle beam.

[0262] C9. The system of any of paragraphs C8-C8.4, wherein the bifocal beamformer causes one of the first charged particle beam and the second charged particle beam to be a non-cylindrically symmetric beam.

[0263] C9.1. The system of paragraph C9, further comprising a corrector configured to make the second charged particle beam a cylindrically symmetric beam.

[0264] C9.1.1. The system of paragraph C9.1, wherein the compensator is a stigmator.

[0265] C10. A system according to any of C1-C9.1.1, wherein the bifocal beamformer imparts one or more aberrations to the second charged particle beam.

[0266] C10.1. The system of paragraph C10, wherein at least one of the one or more aberrations is a deterministic aberration.

[0267] C10.2. The system of any of paragraphs C10-C10.1, wherein the bifocal beamformer is positioned and / or configured to cause at least one of the one or more aberrations to correct another aberration in the system.

[0268] C11. The system of any of paragraphs C1-C10.2, wherein the bifocal beamformer is further configured to deflect at least one of the first charged particle beam and the second charged particle beam away from the emission axis of the plurality of charged particles.

[0269] C12. The system of any of paragraphs C1-C11, wherein the bifocal beamformer comprises a MEMS device configured to generate at least a quadrupole electric field that at least partially causes modification of focal properties of at least one of the first charged particle beam and the second charged particle beam.

[0270] C12.1. The system of paragraph C12, wherein the MEMS device includes a structure defining a first aperture and a second aperture, the first charged particle beam passing through the first aperture and the second charged particle beam passing through the second aperture.

[0271] C12.1.1. The system of paragraph C12.1, wherein the first aperture has the same radius as the second aperture.

[0272] C12.1.2. The system of paragraph C12.1, wherein the first aperture has a smaller radius than the second aperture.

[0273] C12.1.3. The system of paragraph C12.1, wherein the first aperture has a larger radius than the second aperture.

[0274] C12.1.4. The system of any of paragraphs C12.1-C12.1.3, wherein the MEMS device comprises a surface layer facing the plurality of charged particles, the first aperture and the second aperture being defined by the surface layer.

[0275] C12.1.4.1. The system of paragraph C12.1.4, wherein the surface layer is a foil.

[0276] C12.1.5. The system of any of paragraphs C12.1-C12.1.4.1, wherein the first aperture is an axial aperture positioned on the emission axis of the multiple charged particles, and the second aperture is a non-axial aperture.

[0277] C12.1.6. The system of any of paragraphs C12.1-C12.1.4.1, wherein the second aperture is an axial aperture positioned on the emission axis of the multiple charged particles, and the first aperture is a non-axial aperture.

[0278] C12.2. The system of any of paragraphs C12.1-C12.1.6, wherein the MEMS device comprises one or more electrodes.

[0279] C12.2.1. The system of paragraph C12.2, wherein one or more electrodes generate at least a quadrupole electric field when a corresponding voltage is applied to the one or more electrodes.

[0280] C12.2.1. The system described in any of paragraphs C12.2-12.2.1, wherein at least one of the one or more electrodes is grounded.

[0281] C12.2.2. The system of any of paragraphs C12.2 to C12.2.1 when relying on C12.1.4, wherein the MEMS device has an insulating layer opposite the surface layer.

[0282] C12.2.2.1. The system of paragraph C12.2.2, wherein the one or more electrodes are positioned on an electrode layer positioned between the insulating layer and the surface layer.

[0283] C12.2.3. The system of any of paragraphs C12.2 through C12.2.2.1, wherein the one or more electrodes include four electrodes.

[0284] C12.2.4. The system of any of paragraphs C12.2 through C12.2.2.1, wherein the one or more electrodes include seven electrodes.

[0285] C12.3. The system of any of paragraphs C12.1-C12.2.4, wherein at least the quadrupole field is one of a dipole field, a quadrupole field, a hexapole field, or an octapole field.

[0286] C12.4. The system of any of paragraphs C12.1-C12.3, wherein at least the quadrupole field does not change the focal plane of the first charged particle beam.

[0287] C12.5. The system of any of paragraphs C12.1-C12.4, wherein the MEMS device is further configured to generate one or more dipole electric fields.

[0288] C12.5.1. The system of paragraph C12.5, wherein one or more dipole electric fields deflect at least one of the charged particle beams in a direction perpendicular to the radiation axis.

[0289] C13. The system of any of paragraphs C1-C11, wherein the bifocal beamformer comprises a physical structure defining a first aperture and a second aperture, where the first charged particle beam passes through the first aperture and the second charged particle beam passes through the second aperture, and a lens positioned and / or configured to adjust a focal characteristic of at least one of the first charged particle beam and the second charged particle beam so that the first charged particle beam and the second charged particle beam have different focal planes.

[0290] C13.1. The system of paragraph C13, wherein a first charged particle beam passes through a first aperture and a second charged particle beam passes through a second aperture.

[0291] C13.2. The system of any of paragraphs C13-C13.1, wherein the lens is an Einzel lens.

[0292] C13.3. The system of any of paragraphs C13-C13.2, wherein the lens is positioned over the physical structure.

[0293] C13.4. The system of any of paragraphs C13-C13.2, wherein the lens is positioned above the physical structure.

[0294] C13.5. The system of any of paragraphs C13-C13.4, wherein a lens is positioned and / or configured to adjust the focal plane of the second charged particle beam.

[0295] C13.5.1. The system of paragraph C13.5, wherein the lens is not positioned and / or configured to adjust the focal plane of the first charged particle beam.

[0296] C14. The system of any of paragraphs C14-C14.5, wherein the bifocal beamformer comprises at least one physical structure defining a first aperture that allows a first charged particle beam to pass through the at least one physical structure, a second aperture that allows a second charged particle beam to pass through the at least one physical structure, and a plurality of other apertures.

[0297] C14.1. The system of paragraph C14, wherein a plurality of other apertures form a pattern that creates an electromagnetic field that applies a lens effect to the second charged particle beam during use of the bifocal beamformer.

[0298] C14.1.1. The system of paragraph C14.1, wherein the multiple other apertures form a pattern that creates an electromagnetic field that applies at least a quadrupole lens effect to the second charged particle beam during use of the bifocal beamformer.

[0299] C14.1.1.1. The system of paragraph C14.1.1, wherein the electromagnetic field does not apply a quadrupole lens effect to the first charged particle beam during use of the bifocal beamformer.

[0300] C14.1.2. The system of any of paragraphs C14.1-C14.1.1.1, wherein a plurality of other apertures form a pattern that creates an electromagnetic field that applies a circular lens effect to the first charged particle beam during use of the bifocal beamformer.

[0301] C14.1.2.1. The system of paragraph C14.1.2, wherein the multiple other apertures form a pattern that creates an electromagnetic field that applies at least a circular lens effect to the second charged particle beam during use of the bifocal beamformer.

[0302] C14.1.3. The system described in any of paragraphs C14.1-C14.2.1, wherein the lens effect applied by the electromagnetic field at least partially causes modification of focal characteristics of at least one of the first charged particle beam and the second charged particle beam.

[0303] C14.1.3.1. The system of paragraph C14.1.3, wherein the electromagnetic field changes the focal plane of the first charged particle beam.

[0304] C14.3. The system of any of paragraphs C14-C14.2.1, wherein at least one aperture of the plurality of apertures is a hole.

[0305] C14.3.1. Holes,

[0306] The method of paragraph C14.3, comprising an inlet defined in a first surface of the at least one physical structure, the first surface facing the plurality of charged particles, an outlet defined in a second surface of the at least one physical structure opposite the first surface, and an empty volume connecting the inlet and the outlet.

[0307] C14.3.1.1. The system of paragraph C14.3.1, wherein the first surface and the second surface are each surfaces of a single physical structure.

[0308] C14.3.1.2. The system of paragraph C14.3.1, wherein the first surface and the second surface are each surfaces of different physical structure.

[0309] C14.4. The system of any of paragraphs C14-C14.3.1.2, wherein at least one aperture of the plurality of apertures is a cavity.

[0310] C14.4.1. The cavity is

[0311] The system described in paragraph C14.4, comprising: an entrance defined in a first surface of at least one physical structure, the first surface facing the plurality of charged particles; and an empty volume in communication with the entrance and defined by the at least one physical structure, wherein the at least one physical structure defines the empty volume such that charged particles of the plurality of charged particles that enter the empty volume through the entrance do not pass through the bifocal beamformer.

[0312] C14.4.1.1. The system of paragraph C14.4.1, wherein the cavity is defined by a single physical structure.

[0313] C14.4.1.2. The system of paragraph C14.4.1, wherein the cavity is defined by multiple physical structures.

[0314] C14.5. The system of any of paragraphs C14.3-C14.4.1.2, wherein the plurality of apertures includes a combination of holes and cavities.

[0315] C14.6. The system of any of paragraphs C14-C14.5, wherein the geometric shape of at least one of the first aperture, the second aperture, or one of the plurality of apertures is circular.

[0316] C14.7. The system of any of paragraphs C14-C14.5, wherein the geometric shape of at least one of the first aperture, the second aperture, or one of the plurality of apertures is rectangular.

[0317] C14.7.1. The system of any of paragraphs C14-C14.5, wherein the geometric shape of at least one of the first aperture, the second aperture, or one of the plurality of apertures is a square.

[0318] C14.7.2. The system of any of paragraphs C14-C14.5, wherein the geometric shape of at least one of the first aperture, the second aperture, or one of the plurality of apertures has rounded corners.

[0319] C14.8. The system of any of paragraphs C14-C14.7.2, wherein the geometric shapes of the first aperture, the second aperture, and the plurality of apertures are not uniform.

[0320] C14.9. The system of any of paragraphs C14-C14.8, wherein the first aperture, the second aperture, and the plurality of apertures are not uniform in size.

[0321] C14.10. The system of any of paragraphs C14-C14.9, wherein the bifocal beamformer further comprises a first electrode configured to receive a first applied voltage.

[0322] C14.10.1. The system of paragraph C14.10, wherein the first electrode includes a physical structure that at least partially defines an electrode entrance aperture that allows at least a portion of the plurality of charged particles to pass through the first electrode.

[0323] C14.10.1.1. The system described in paragraph C14.10.1, wherein the electrode entrance aperture is a first electrode entrance aperture that allows a first portion of the plurality of charged particles to pass through the first electrode, and the second electrode further defines a second electrode entrance aperture that allows a second portion of the plurality of charged particles to pass through the first electrode.

[0324] C14.10.2. The system of any of paragraphs C14.10-C14.10.1.1, wherein the first electrode is upstream of the first aperture, the second aperture, and the plurality of apertures.

[0325] C14.10.3. The system of any of paragraphs C14.10-C14.10.2, wherein the first electrode is a disk-shaped electrode.

[0326] C14.10.4. The system of any of paragraphs C14.10-C14.10.2, wherein the bifocal beamformer further comprises a second electrode configured to receive a second applied voltage.

[0327] C14.10.4.1. The system described in paragraph C14.10.4, wherein the first voltage is different from the second voltage.

[0328] C14.10.4.2. The system of paragraph C14.10.4, wherein the first voltage and the second voltage are different.

[0329] C14.10.4.3. The system described in any of paragraphs C14.10.4 to C14.10.4.2, wherein the second electrode includes a physical structure that at least partially defines an electrode exit aperture through which at least one of the first charged particle beam and the second charged particle beam passes through the second electrode.

[0330] C14.10.4.3.1. The system described in paragraph C14.10.4.3, wherein the electrode exit aperture is a first electrode exit aperture that allows the first charged particle beam to pass through the second electrode, and the second electrode further includes a second electrode exit aperture that allows the second charged particle beam to pass through the second electrode.

[0331] C14.10.4.3. The system of any of paragraphs C14.10.4 through C14.10.4.3.1, wherein the second electrode is positioned downstream of the first aperture, the second aperture, and the plurality of apertures.

[0332] C15. The system of any of paragraphs C1-C11, wherein the focal beamformer comprises a biprism positioned and / or configured to define a hole and split the plurality of charged particles into a first charged particle beam and a second charged particle beam.

[0333] C16. The system of any of paragraphs C1-C11, wherein a laser pattern fringe is used to split the multiple charged particles into a first charged particle beam and a second charged particle beam.

[0334] C17. The system of any of paragraphs C1-C16, wherein a second charged particle beam is focused at a different plane positioned below the sample.

[0335] C17.1. The system of paragraph C17, wherein the different planes are positioned at least 0.1%, 1%, 10%, or 100% of the focal length of the objective lens above the sample.

[0336] C18. The system of any of paragraphs C1-C16, wherein the second charged particle beam is focused at a different plane positioned below the sample.

[0337] C18.1. The system of paragraph C18, wherein the different planes are positioned at at least 0.1%, 1%, 10%, or 100% of the focal length of the objective lens below the specimen sample.

[0338] C19. The system of any of paragraphs C17-C18.1, wherein the distance between the plane of the sample or a plane near the sample and the different plane is at least 0.1%, 1%, 10%, or 100% of the focal length of the objective lens.

[0339] C20. The system of any of paragraphs C1-C19, wherein the second charged particle beam is a collimated beam at the sample.

[0340] D1. Use of the system of any of paragraphs C1-C20 to carry out any of the methods of paragraphs A1-A16, B1-B15, L1-L10.2, or M9.1.

[0341] E1. A non-transitory computer-readable medium comprising instructions that, when executed by one or more processing units, cause a system described in any of paragraphs C1-C20 to perform any method described in paragraphs A1-A16, B1-B15, L1-L10.2, or M1-M9.1.

[0342] F1. A MEMS device comprising: a physical structure defining a first aperture configured to allow a first portion of the charged particles of a plurality of charged particles to pass through the MEMS device; and a second aperture configured to allow a second portion of the charged particles of the plurality of charged particles to pass through the MEMS device; and one or more electrodes configured to generate at least a quadrupole electric field when a corresponding voltage is applied thereto, the quadrupole electric field at least partially causing a modification of a focal plane of at least one of the first portion of the charged particles and the second portion of the charged particles.

[0343] F1.1. The MEMS device of paragraph F1, wherein a plurality of charged particles form a source beam incident on the MEMS device.

[0344] F1.1.1. The MEMS device of any of paragraphs F1-F1.1, wherein the plurality of charged particles is a plurality of electrons.

[0345] F2. A MEMS device described in any of paragraphs F1-F1.1.1, wherein the first aperture is configured to form a first portion of the charged particles into a first charged particle beam and the second aperture is configured to form a second portion of the charged particles into a second charged particle beam.

[0346] F2.1. The MEMS device of paragraph F2, wherein the first aperture has the same radius as the second aperture.

[0347] F2.2. The MEMS device of paragraph F2, wherein the first aperture has a smaller radius than the second aperture.

[0348] F2.3. The MEMS device of paragraph F2, wherein the first aperture has a larger radius than the second aperture.

[0349] F3. The MEMS device of any of paragraphs F1-F2.3, wherein the physical structure includes a surface layer that defines a first aperture and a second aperture.

[0350] F3.1. The MEMS device of paragraph F3, wherein the surface layer prevents a third portion of the charged particles from passing through the MEMS device.

[0351] F3.2. The MEMS device of any of paragraphs F3-F3.1, wherein the surface layer is a foil.

[0352] F4. The MEMS device of any of paragraphs F1-F3.2, wherein the second aperture is an axial aperture positioned on the emission axis of the plurality of charged particles, and the first aperture is a non-axial aperture.

[0353] F5. The MEMS device of any of paragraphs F1-F3.2, wherein the second aperture is an axial aperture positioned on an emission axis of the plurality of charged particles, and the first aperture is a non-axial aperture.

[0354] F6. The MEMS device of any of paragraphs F1-F5, wherein at least one of the one or more electrodes is grounded.

[0355] F7. The MEMS device of any of paragraphs F1-F6 when subject to any of paragraphs F3-F3.1, wherein the MEMS device includes an insulating layer opposite the surface layer.

[0356] The MEMS device of paragraph F7, wherein the one or more electrodes are positioned on an electrode layer positioned between the insulating layer and the surface layer.

[0357] F8. The MEMS device of any of paragraphs F1-F7.1, wherein the one or more electrodes include four electrodes.

[0358] F9. The MEMS device of any of paragraphs F1-F7.1, wherein the one or more electrodes include seven electrodes.

[0359] F10. The MEMS device of any of paragraphs F1-F9, wherein at least the quadrupole field is one of a dipole field, a quadrupole field, a hexapole field, or an octopole field.

[0360] F11. The MEMS device of any of paragraphs F1-F10, wherein at least the quadrupole field does not change the focal plane of the first charged particle beam.

[0361] F12. The MEMS device of any of paragraphs F1-F11, wherein the MEMS device is further configured to generate one or more dipole electric fields.

[0362] The MEMS device of paragraph F12, wherein the one or more dipole fields deflect at least one charged particle beam in a direction perpendicular to the radiation axis.

[0363] G1. Any use of a MEMS device according to any of paragraphs F1 to F12.1.

[0364] G2. Any use of a MEMS device according to paragraphs F1-F12.1 to carry out any method according to paragraphs A1-A16, B1-B15, L1-L10.2, or M1-M9.1.

[0365] G3. Any use of a MEMS device as described in paragraphs F1-F12.1 to investigate a sample.

[0366] H1. Any use of a MEMS device according to paragraphs F1-F12.1 in a system according to any of paragraphs C1-C20.

[0367] I1. An aperture lens array device comprising at least one physical structure defining a first aperture configured to allow a first portion of the charged particles of the plurality of charged particles to pass through the aperture lens array device, a second aperture configured to allow a second portion of the charged particles of the plurality of charged particles to pass through the aperture lens array device, a plurality of other apertures, and at least one electrode, wherein the first aperture, the second aperture, and the plurality of other apertures form a pattern that, upon application of a voltage corresponding to the at least one physical structure and the at least one electrode, generates an electromagnetic field that applies a lens effect to the second portion of the charged particles during use of the aperture lens array device.

[0368] I1.1. The aperture lens array device of paragraph I1, wherein a plurality of charged particles form a source beam incident on the aperture lens array device.

[0369] I1.1.1. The aperture lens array device of any of paragraphs I1-I1.1, wherein the plurality of charged particles is a plurality of electrons.

[0370] I2. An aperture lens array device as described in any of paragraphs I.1 to I1.1.1, wherein the first aperture is configured to form a first portion of the charged particles into a first charged particle beam and the second aperture is configured to form a second portion of the charged particles into a second charged particle beam.

[0371] I2.1. The aperture lens array device of paragraph I2, wherein the electromagnetic field applies at least a quadrupole lens effect to the second charged particle beam during use of the aperture lens array device.

[0372] I2.1.1. The aperture lens array device of paragraph I2.1, wherein the electromagnetic field does not apply a quadrupole lens effect to the first charged particle beam during use of the aperture lens array device.

[0373] I2.1.2. The aperture lens array device of any of paragraphs I2-I2.1.1, wherein the electromagnetic field applies a circular lens effect to the first charged particle beam during use of the aperture lens array device.

[0374] I2.1.3. An aperture lens array device as described in any of paragraphs I2 to I2.1.2, wherein the electromagnetic field imparts at least a circular lens effect to the second charged particle beam during use of the aperture lens array device.

[0375] I3. The aperture lens array device of any of paragraphs I1-I2.1.3, wherein the lens effect applied by the electromagnetic field at least partially causes modification of a focal plane of at least one of the first charged particle beam and the second charged particle beam.

[0376] I3.1. The aperture lens array device of paragraph I1, wherein the first charged particle beam and the second charged particle beam have different focal planes due to focal plane modifications caused by the lens effect.

[0377] I3.2. An aperture lens array device as described in any of paragraphs I3-I3.1, wherein the electromagnetic field changes the focal plane of the first charged particle beam.

[0378] I4. The aperture lens array device of any of paragraphs I1-I3.2, wherein at least one aperture of the plurality of apertures is a hole.

[0379] I4.1. The aperture lens array device of paragraph I4, wherein the hole comprises an inlet defined in a first surface of the at least one physical structure, the first surface facing the plurality of charged particles, an outlet defined in a second surface of the at least one physical structure opposite the first surface, and an empty volume connecting the inlet and the outlet.

[0380] I4.1.1. The aperture lens array device of paragraph I4.1, wherein the first surface and the second surface are each surfaces of a single physical structure.

[0381] I4.1.2. The aperture lens array device of paragraph I4.1, wherein the first surface and the second surface are each surfaces of different physical structure.

[0382] I5. The aperture lens array device of any of paragraphs I1-I4.1.2, wherein at least one aperture of the plurality of apertures is a cavity.

[0383] I5.1. An aperture lens array device as described in paragraph I5, wherein the cavity comprises an entrance defined in a first surface of the at least one physical structure, the first surface facing the plurality of charged particles, and an empty volume in communication with the entrance and defined by the at least one physical structure, wherein the at least one physical structure defines the empty volume such that charged particles of the plurality of charged particles entering the empty volume through the entrance do not pass through the bifocal beamformer.

[0384] I5.1. The aperture lens array device of paragraph I5.1, wherein the cavity is defined by a single physical structure.

[0385] I5.2. The aperture lens array device of paragraph I5.1, wherein the cavity is defined by multiple physical structures.

[0386] I6. The aperture lens array device of any of paragraphs I4-I5.2, wherein the plurality of apertures comprises a combination of holes and cavities.

[0387] I7. The aperture lens array device of any of paragraphs I1-I6, wherein the geometric shape of at least one of the first aperture, the second aperture, or one of the plurality of apertures is circular.

[0388] I8. The aperture lens array device of any of paragraphs I1-I7, wherein the geometric shape of at least one of the first aperture, the second aperture, or one of the plurality of apertures is rectangular.

[0389] I9. The aperture lens array device of any of paragraphs I1-I8, wherein the geometric shape of at least one of the first aperture, the second aperture, or one of the plurality of apertures is a square.

[0390] I10. The aperture lens array device of any of paragraphs I1-I9, wherein the geometric shape of at least one of the first aperture, the second aperture, or one of the plurality of apertures has rounded corners.

[0391] I11. The aperture lens array device of any of paragraphs I1-I10, wherein the geometric shapes of the first aperture, the second aperture, and the plurality of apertures are not uniform.

[0392] I12. The aperture lens array device of any of paragraphs I1-I11, wherein the first aperture, the second aperture, and the plurality of apertures are not uniform in size.

[0393] I13. The aperture lens array device of any of paragraphs I1-I12, wherein the at least one electrode includes a first electrode configured to receive a first applied voltage.

[0394] I13.1. The aperture lens array device of paragraph I13, wherein the first electrode includes a physical structure that at least partially defines an electrode entrance aperture that allows at least a portion of the plurality of charged particles to pass through the first electrode.

[0395] I13.1.1. The aperture lens array device of paragraph I13.1, wherein the electrode entrance aperture is a first electrode entrance aperture that allows a first portion of the plurality of charged particles to pass through the first electrode, and the second electrode further defines a second electrode entrance aperture that allows a second portion of the plurality of charged particles to pass through the first electrode.

[0396] I13.2. The aperture lens array device of any of paragraphs I13-I13.1.1, wherein the first electrode is upstream of the first aperture, the second aperture, and the plurality of apertures.

[0397] I13.3. The aperture lens array device of any of paragraphs I13 to I13.2, wherein the first electrode is a disk-shaped electrode.

[0398] I13.4. The aperture lens array device of any of paragraphs I13-I13.3, wherein the at least one electrode further includes a second electrode configured to receive a second applied voltage.

[0399] I13.4.1. The aperture lens array device of paragraph I13.4, wherein the first voltage is different from the second voltage.

[0400] I13.4.2. The aperture lens array device of paragraph I13.4, wherein the first voltage and the second voltage are the same.

[0401] I13.4.3. An aperture lens array device as described in any of paragraphs I13.4 to I13.4.2, wherein the second electrode includes a physical structure that at least partially defines an electrode exit aperture through which at least one of the first charged particle beam and the second charged particle beam passes through the second electrode.

[0402] I13.4.3.1. The aperture lens array device of paragraph I13.4.3, wherein the electrode exit aperture is a first electrode exit aperture that allows the first charged particle beam to pass through the second electrode, and the second electrode further includes a second electrode exit aperture that allows the second charged particle beam to pass through the second electrode.

[0403] I13.4.4. The aperture lens array device of any of paragraphs I13.4-I13.4.3.1, wherein the second electrode is positioned downstream of the first aperture, the second aperture, and the plurality of apertures.

[0404] J1. Use of a multi-aperture device according to any of paragraphs I1 to I13.4.4.

[0405] J2. Use of a multi-aperture device according to any of paragraphs I1 to I13.4.4 to carry out any of the methods described in paragraphs A1 to A16, B1 to B15, L1 to L10.2, or M9.1.

[0406] J3. Use of a multi-aperture device according to any of paragraphs I1 to I13.4.4 to investigate a sample.

[0407] K1. Use of a multi-aperture device according to any of paragraphs I1 through I13.4.4 in a system according to any of paragraphs C1 through C20.

[0408] L1. A method for investigating a sample using TEM and STEM techniques, comprising: emitting a plurality of electrons towards the sample; forming the plurality of electron particles into a first electron beam and a second electron beam; modifying focal characteristics of at least one of the first electron beam and the second electron beam such that the first electron beam is the STEM beam focused at a plane of the sample or a plane near the sample, and the second electron beam is the TEM beam incident on the sample; and detecting radiation resulting from the STEM beam and the TEM beam incident on the sample.

[0409] L1.1. The method of paragraph L1, wherein the TEM beam is a collimated beam when incident on the sample.

[0410] L1.2. The method of paragraph L1, wherein the TEM beam is a converging beam when incident on the sample.

[0411] L1.3. The method of paragraph L1, wherein the TEM beam is a diverging beam when incident on the sample.

[0412] L2. The method of any of paragraphs L1-L1.3, further comprising generating one or both of a STEM image and a TEM image from detected radiation resulting from the STEM beam and the TEM beam being incident on the sample.

[0413] L3. The method of any of paragraphs L1-L2, wherein detecting radiation resulting from the STEM beam and the TEM beam impinging on the sample includes detecting (1) radiation resulting from the STEM beam impinging on the sample and (2) radiation resulting from the TEM beam impinging on the sample using the same detector and / or detector array.

[0414] L4. The method of any of paragraphs L1-L3, wherein detecting radiation resulting from the STEM beam and the TEM beam impinging on the sample includes simultaneously detecting (1) radiation resulting from the STEM beam impinging on the sample, and (2) radiation resulting from the TEM beam impinging on the sample.

[0415] L4.1. The method of paragraph L4, further comprising scanning the STEM beam across a surface region of the sample.

[0416] L4.1.1. The method of paragraph L4.1, wherein the TEM beam remains incident on the sample while the STEM beam is scanned.

[0417] L4.1.2. The method of any of paragraphs L4.1-L4.1.1, wherein the TEM beam remains incident on a stationary location while the STEM beam is scanned.

[0418] L5. The method of any of paragraphs L1-L4.1, further comprising switching between two of a STEM operating mode, a TEM operating mode, and a simultaneous STEM / TEM operating mode.

[0419] L5.1. The method of paragraph L5, wherein switching to a STEM mode of operation includes blocking the TEM beam so that only the STEM beam is incident on the sample.

[0420] L5.1.1. The method of paragraph 5.1, wherein blocking the TEM beam includes one of deflecting the TEM beam such that it is blocked by a beam blocker, moving a beam blocker such that it obstructs the path of the TEM beam, and blocking the aperture such that the TEM beam cannot pass through the aperture.

[0421] L5.2. The method of any of paragraphs L5-L5.1, wherein switching to the TEM mode of operation includes blocking the STEM beam so that only the TEM beam is incident on the sample.

[0422] L5.2.1. The method of paragraph 5.2, wherein blocking the STEM beam includes one of deflecting the STEM beam such that the STEM beam is blocked by the beam blocker, moving the beam blocker so that it blocks the path of the STEM beam, and blocking the aperture such that the STEM beam cannot pass through the aperture.

[0423] L6. The method of any of paragraphs L1-L5.2.1, further comprising determining a portion of the detected radiation resulting from the TEM beam being incident on the sample.

[0424] L6.1. The method of paragraph L6, further comprising determining a portion of the detected radiation that is attributable to the STEM beam being incident on the sample.

[0425] L7. The method of any of paragraphs L1-L6.1, further comprising generating a STEM image based on the STEM beam and detected radiation resulting from the TEM beam being incident on the sample.

[0426] L8. The method of any of paragraphs L1-L7, further comprising generating a TEM image based on the STEM beam and detected radiation resulting from the TEM beam being incident on the sample.

[0427] L9. The method of any of paragraphs L1-L8, wherein radiation resulting from the STEM beam and the TEM beam impinging on the sample is detected using a single detector and / or a detector array.

[0428] L9.1. The method of any of paragraphs L1-L8, wherein radiation resulting from the STEM beam is detected using a first detector and / or detector array, and the TEM beam incident on the sample is detected using a second detector and / or detector array.

[0429] L9.1.1. The method of paragraph L9.1, wherein the first detector and / or detector array is positioned in a different plane than the second detector and / or detector array.

[0430] L9.1.1. The method of paragraph L9.1, wherein the method further includes mechanically switching the first detector and / or detector array and / or the second detector and / or detector array.

[0431] L10. The method of any of paragraphs L1-L9, wherein forming the plurality of electron particles into a first electron beam and a second electron beam and modifying the focal characteristics is performed at least in part by a bifocal beamformer.

[0432] L10.1. The method of paragraph L10, wherein the bifocal beamformer is a MEMS device described in any of paragraphs F1-F12.1.

[0433] L10.2. The method of paragraph L10, wherein the bifocal beamformer is a multi-aperture array as described in any of paragraphs I1 to I13.4.4.

[0434] L10.2. The method of any of paragraphs L10-L10.2, wherein the bifocal beamformer applies at least a quadrupole lens effect to one of the first electron beam and the second electron beam.

[0435] M1. A method for bifocal multi-beam sample processing, the method including: emitting a plurality of electrons toward a sample; splitting the plurality of electrons into a first electron beam and a second electron beam; modifying a focal characteristic of at least one of the first electron beam and the second electron beam; treating a region of the sample with the first electron beam to induce a physical change in the sample; and imaging the region of the sample with the second electron beam during processing.

[0436] M2. The method of paragraph M1, wherein processing and imaging are performed simultaneously.

[0437] M3. The method of any of paragraphs M1-M2, wherein processing the region of the sample includes focusing a first electron beam at a plane at or near the surface of the sample.

[0438] M3.1. The method of paragraph M3, wherein the processing further includes introducing a gas into a volume proximate to the region of interest.

[0439] M3.2. The method of any of paragraphs M3-M3.1, wherein the treatment further includes causing radiation damage to a surface of the sample.

[0440] M3.3. The method of any of paragraphs M3-M3.2, wherein the processing further includes inducing a phase change in the irradiated area of ​​the sample.

[0441] M3.4. The method of any of paragraphs M3-M3.3, wherein the processing further includes electron beam induced etching.

[0442] M3.4.1. The method of paragraph M3.4, wherein processing further includes performing gas-assisted etching with the first electron beam.

[0443] M3.5. The method of any of paragraphs M3-M4.1, wherein the processing further includes electron beam induced deposition.

[0444] M3.5.1. The method of paragraph M3.5, wherein the processing further includes performing gas-assisted deposition with the first electron beam.

[0445] M3.5.2. The method of any of paragraphs M3.5 to M3.5.1, wherein performing electron beam induced deposition includes building a needle structure on the sample.

[0446] M3.6. The method of any of paragraphs M3-M3.5.2, wherein the processing includes reducing charging and / or bias effects on the region of interest of the sample.

[0447] M4. The method of any of paragraphs M1-M3.5.3, wherein imaging a region of the sample includes focusing a second beam to be incident on the region of interest.

[0448] M4.1. The method of paragraph M4, wherein imaging the region of the sample includes performing TEM imaging with a second electron beam.

[0449] M4.2. The method of paragraph M4, wherein imaging the region of the sample includes performing STEM imaging with a second electron beam.

[0450] M4.3. The method of any of paragraphs M4-M4.2, wherein the second beam is a collimated beam at the surface of the sample or at a plane supporting it.

[0451] M4.4. The method of any of paragraphs M4-M4.3, wherein imaging the region of the sample includes detecting, with a detector positioned downstream of the sample, the second electron beam and / or electrons emitted as a result of the second beam being incident on the sample, and generating one or more images of the region of interest based on the detected second electron beam and / or electrons emitted as a result of the second beam being incident on the sample.

[0452] M4.4.1. The method of paragraph M4.4, wherein the detector does not detect the first electron beam.

[0453] M4.4.1.1. The method of paragraph M4.4.1, wherein the tilt angle of the first electron beam at the sample is such that the second electron beam is not incident on the detector.

[0454] M4.3.1.2. The method of any of paragraphs M4.4.1-M4.4.1.1, wherein the second electron beam is blocked from impinging on the sample.

[0455] M4.3.1.2.1. The method of paragraph M4.3.1.2, wherein the second electron beam is blocked by an aperture in the objective lens.

[0456] M5. The method of any of paragraphs M1-M4.3.1.2, wherein modifying focal characteristics of at least one of the first electron beam and the second electron beam includes applying at least a quadrupole lens effect to at least one of the beams.

[0457] M5.1. The method of paragraph M5, wherein at least a quadrupole lens effect is applied by a bifocal beamformer.

[0458] M5.2. The method of paragraph M5.1., wherein the bifocal beamformer is a MEMS device described in any of paragraphs F1-F12.1.

[0459] M5.3. The method of paragraph M5.1., wherein the bifocal beamformer is a multi-aperture device as described in any of paragraphs I1 to I13.4.4.

[0460] M6. The method of any of paragraphs M1-M5.3, further comprising deflecting the first electron beam to perform processing of different regions of the sample.

[0461] M6.1. The method of paragraph M6, wherein the deflection of the first electron beam is performed by a bifocal beamformer.

[0462] M6.2. The method of any of paragraphs M6-6.1, wherein the deflection of the first electron beam is performed by a multipole element.

[0463] M7. The method of any of paragraphs M1-6.2, wherein splitting the plurality of electrons into a first electron beam and a second electron beam includes splitting the plurality of electrons into an axial first electron beam and a non-axial second electron beam.

[0464] M8. The method of any of paragraphs M1-6.2, wherein splitting the plurality of electrons into a first electron beam and a second electron beam includes splitting the plurality of electrons into a non-axial first electron beam and an axial second electron beam.

[0465] M9. The method of any of paragraphs M1-M8, varying a characteristic of the STEM beam based on imaging of the area of ​​the sample with the second electron beam.

[0466] M9.1. The method of paragraph M9, wherein varying the characteristics of the STEM beam includes varying one or more of: an incidence location of the first electron beam on the region of interest, a spot size of the first electron beam on the region of interest, and a current of the first electron beam.

Claims

1. 1. A method for bifocal multibeam sample processing, the method comprising: directing a plurality of electrons toward a sample; splitting the plurality of electrons into a first electron beam and a second electron beam; modifying a focal characteristic of at least one of the first electron beam and the second electron beam; treating an area of ​​the sample with the first electron beam to induce a physical change in the sample; imaging the area of ​​the sample with the second electron beam during the processing; the physical transformation comprises at least one of milling, deposition, and etching; a lens that is arranged to focus the first electron beam incident on the lens onto a plane at or near the surface of the sample, the lens being offset from a center of the first electron beam in a width direction of the lens, the first electron beam being focused onto the lens onto a plane at or near the surface of the sample, the diameter of the focused first electron beam being smaller than a diameter of the second electron beam on the surface of the sample.

2. The method of claim 1 , wherein the processing and the imaging are performed simultaneously.

3. The processing comprises: introducing a gas into a volume approximating the region of the sample; causing a phase change in an illuminated area of ​​the sample; Electron beam induced etching; performing gas assisted etching using the first electron beam; The method of claim 1 or 2, further comprising at least one of: e-beam induced deposition.

4. The method of any of claims 1 to 3, wherein said treating comprises reducing charging and / or bias effects in said region of the sample.

5. The method of any of claims 1 to 4, wherein said imaging said area of ​​said sample comprises performing TEM imaging with said second electron beam.

6. 6. The method of claim 1, further comprising using a fast blanker to block the first electron beam, and re-imaging the area of ​​the sample with the second electron beam while the first electron beam is blocked.

7. The method according to any one of claims 1 to 6, wherein the second electron beam is a parallel or nearly parallel beam in the plane of the sample.

8. Imaging the region of the sample detecting the second electron beam and / or electrons scattered as a result of the second electron beam being incident on the sample using a detector positioned downstream of the sample; and generating one or more images of the area of ​​the sample based on the detected second electron beam and / or electrons scattered as a result of the second electron beam being incident on the sample.

9. The method of claim 8 , wherein a tilt angle of the first electron beam at the sample is such that the first electron beam is not incident on the detector.

10. The method of claim 8 , wherein at least an unscattered portion of the first electron beam is blocked from impinging on the detector.

11. 11. The method of claim 1, wherein modifying focal properties of at least one of the first and second electron beams comprises applying at least a quadrupole lens effect to at least one of the electron beams.

12. The method of claim 11 , wherein the at least quadrupole lens effect is applied by one of a MEMS device and a multi-aperture device.

13. 13. The method of claim 1, wherein splitting the plurality of electrons into the first electron beam and the second electron beam comprises splitting the plurality of electrons into an axial first electron beam and a non-axial second electron beam.

14. A computer program which, when executed by one or more processing units of a system, causes said one or more processing units to carry out a method according to any of claims 1 to 13.

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