Probe Structure

Abstract

To provide a probe structure.SOLUTION: A probe structure 1 comprises a plurality of bodies 11 and a plurality of protrusions 13. Each body 11 has an end portion 111. Each end portion 111 has a surface 110. The plurality of protrusions 13 are formed on the surfaces 110 and extend toward the same direction. At least one protrusion 13 is formed on each surface 110. In some embodiments, the plurality of bodies 11 includes a first body, and a second body continuous with the first body. The plurality of protrusions 13 includes a first protrusion and a second protrusion. The first protrusion is formed on a surface of an end portion of the first body, whereas the second protrusion is formed on a surface of an end portion of the second body.SELECTED DRAWING: Figure 1A

Description

[Technical field]

[0001] (CROSS REFERENCE TO RELATED APPLICATIONS) This application claims priority to Taiwan Application No. 11111988, filed March 29, 2022, which is incorporated by reference in its entirety.

[0002] The present disclosure relates to probes, and more particularly to probe structures including multiple probe bodies. [Background technology]

[0003] During the manufacturing process of conventional integrated circuit (IC) chips, the IC chips undergo electrical testing. To facilitate such testing, the IC chips contain solder balls or solder bumps that function as electrodes. Furthermore, to ensure good electrical connection between the electrodes and a probe used in the electrical testing, it is necessary to remove the oxide film covering the electrodes. The oxide film is pierced with the sharp end of the probe tip to ensure good contact.

[0004] However, the probe is deformed when it comes into contact with the IC chip under test. In order to mitigate the deformation of the probe and thus ensure the structural strength of the probe body, the conventional probe body includes a spiral spring. Such a spiral spring has several disadvantages, including (1) poor transmission of electrical signals, (2) unstable current direction, and (3) low recovery against wear and damage.

[0005] This Background section is provided for background information only. The statements in this Background section are not an admission that the subject matter disclosed in this section constitutes prior art to the present disclosure, and may not be used as an admission that any portion of this application, including this Background, constitutes prior art to the present disclosure. Summary of the Invention [Problem to be solved by the invention]

[0006] A probe structure according to an embodiment of the present disclosure includes a plurality of bodies, each body including an end portion having a surface, and a plurality of protrusions formed on the surfaces and extending in the same direction, at least one protrusion formed on each surface.

[0007] In some embodiments, the plurality of bodies includes a first body and a second body contiguous with the first body.

[0008] In some embodiments, the plurality of protrusions includes a first protrusion and a second protrusion, the first protrusion being formed on the surface of the end portion of the first body and the second protrusion being formed on the surface of the end portion of the second body.

[0009] In some embodiments, the plurality of protrusions includes a first protrusion, a second protrusion, and a third protrusion, wherein the first protrusion is formed on the surface of the end portion of the first body, the second protrusion is formed on the surface of the end portion of the second body, and the third protrusion is formed on the surface of the end portion of the second body.

[0010] In some embodiments, the plurality of protrusions includes a first protrusion, a second protrusion, a third protrusion, and a fourth protrusion, the first protrusion and the second protrusion being formed on the surface of the end portion of the first body, and the third protrusion and the fourth protrusion being formed on the surface of the end portion of the second body.

[0011] In some embodiments, the plurality of bodies includes a first body, a second body, and a third body, wherein the first body, the second body, and the third body are contiguous with one another.

[0012] In some embodiments, the plurality of bodies includes a first body, a second body, and a third body, the first body and the second body each being contiguous with the third body.

[0013] In some embodiments, the plurality of protrusions includes a first protrusion, a second protrusion, a third protrusion and a fourth protrusion, wherein the first protrusion is formed on the surface of the end portion of the first body, the second protrusion is formed on the surface of the end portion of the second body, the third protrusion is formed on the surface of the end portion of the third body, and the fourth protrusion is formed on the surface of the end portion of the third body.

[0014] In some embodiments, each body is contiguous with at least two of said bodies.

[0015] In some embodiments, each prong has a sharp end.

[0016] In some embodiments, apexes of the sharp ends of a plurality of protrusions define a plane, the plane being parallel to one or more of the surfaces.

[0017] In some embodiments, each protrusion extends in a direction perpendicular to a corresponding one of said surfaces.

[0018] Another embodiment of the present disclosure provides a probe structure, the probe structure comprising: a first body having a first contact end with a first surface; a second body having a second contact end with a second surface; at least one first sharp end formed on the first surface and extending in a particular direction; and at least one second sharp end formed on the second surface and extending in the same direction, wherein an apex of the at least one first sharp end and an apex of the at least one second sharp end are collinear or coplanar, and a line or plane defined by the apex of the at least one first sharp end and the apex of the at least one second sharp end is parallel to the first surface and the second surface.

[0019] In some embodiments, in a direction opposite to the particular direction, the line or the plane projects a projection image onto the first surface and the second surface, such that the projection image overlaps at least a portion of the first surface and the second surface.

[0020] In some embodiments, the first body and the second body are contiguous.

[0021] The technical features and advantages of the present disclosure are provided in the above description in general terms so that the present disclosure may be better understood from the details given in the following description. Additional technical features and advantages of the present disclosure that form the subject matter of the claims are provided in the following description. Those skilled in the art of the present disclosure should understand that they can easily achieve the same objectives of the present disclosure by modifying or designing other structures or processes based on the concepts and specific embodiments disclosed in the following description. Moreover, those skilled in the art should understand that such equivalent arrangements are encompassed within the spirit and scope of the present disclosure as defined by the appended claims. [Brief description of the drawings]

[0022] A more complete understanding of the present disclosure can be obtained by reference to the detailed description and claims when considered in conjunction with the drawings, in which like reference numbers refer to like elements throughout.

[0023] [Figure 1A] 1 is a perspective view of a probe structure according to some embodiments of the present disclosure. [Figure 1B] 1 is a top view of a probe structure according to some embodiments of the present disclosure. [Figure 2A] 1 is a perspective view of a probe structure according to some embodiments of the present disclosure. [Figure 2B] 1 is a top view of a probe structure according to some embodiments of the present disclosure. [Figure 2C] 1 is a top view of a probe structure according to some embodiments of the present disclosure. [Figure 3A]1 is a perspective view of a probe structure according to some embodiments of the present disclosure. [Figure 3B] 1 is a top view of a probe structure according to some embodiments of the present disclosure. [Figure 4A] 1 is a perspective view of a probe structure according to some embodiments of the present disclosure. [Figure 4B] 1 is a top view of a probe structure according to some embodiments of the present disclosure. [Figure 5A] 1 is a perspective view of a probe structure according to some embodiments of the present disclosure. [Figure 5B] 1 is a top view of a probe structure according to some embodiments of the present disclosure. [Figure 6A] 1 is a perspective view of a probe structure according to some embodiments of the present disclosure. [Figure 6B] 1 is a top view of a probe structure according to some embodiments of the present disclosure. [Figure 7A] 1 is a perspective view of a probe structure according to some embodiments of the present disclosure. [Figure 7B] 1 is a top view of a probe structure according to some embodiments of the present disclosure. [Figure 8A] 1 is a perspective view of a probe structure according to some embodiments of the present disclosure. [Figure 8B] 1 is a top view of a probe structure according to some embodiments of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0024] The following description of the present disclosure is accompanied by drawings that form a part of the present disclosure to illustrate embodiments of the present disclosure. However, it should be noted that the present disclosure is not limited to these embodiments. Furthermore, the following embodiments can be appropriately integrated into other embodiments.

[0025] The terms "embodiment," "one embodiment," "exemplary embodiment," "other embodiment," and "alternative embodiment" mean that the embodiments described in this disclosure may include a particular feature, structure, or characteristic. It should be noted, however, that not all embodiments need to include such a particular feature, structure, or characteristic. Furthermore, repeated use of the phrases "in an embodiment" or "in an embodiment" does not necessarily refer to the same embodiment, although it may.

[0026] In order to fully understand the present disclosure, the steps and structures are described in detail below. It will be apparent that the implementation of the present disclosure is not limited to specific details commonly known to those skilled in the art. Moreover, commonly known structures and steps are not described in detail to prevent unnecessary limitations to the present disclosure. The preferred embodiments of the present disclosure are described in detail below. However, apart from the detailed description, the present disclosure can be widely applied in other embodiments. The scope of the present disclosure is not limited to the contents given in the detailed description, but is defined according to the appended claims.

[0027] It should be understood that the following disclosure provides a variety of different embodiments or examples for implementing different features of the present disclosure. Specific embodiments or examples of components and arrangements are described below to simplify the present disclosure. It should be noted that such details are exemplary and are not intended to be limiting. For example, the size of an element is not limited to the disclosed range or value, but may depend on manufacturing conditions and / or expected characteristics of the device. A first feature described as being formed "on" or "above" a second feature may include embodiments in which the first feature and the second feature are formed in a manner in which they are in direct contact, and may also include embodiments in which additional features are formed between the first feature and the second feature in a manner in which the first feature and the second feature do not need to be in direct contact. Various features may be drawn according to different scales for simplicity and clarity. In the accompanying drawings, some layers / features have been omitted for simplicity.

[0028] Furthermore, for better description, relative spatial relationship terms such as "below," "downward," "lower," "upward," and "upper" may be used to describe the relationship of one element or feature to another element or feature. Such relative spatial relationship terms are intended to cover different orientations of the elements during use or operation in addition to the orientation depicted in the drawings. The device may be otherwise oriented (rotated 90 degrees or have another orientation), and the relative spatial relationship descriptive terms used in the literature may be similarly and correspondingly interpreted.

[0029] The adjective "sharp" is used hereinafter to describe the shape of the component for the purpose of comparing shapes only. The term "sharp end" used hereinafter is not intended to impose a limitation on the shape of the end portion of the probe structure. The technical feature of an "end portion" does not depart from the scope of the shape of the probe structure of the present disclosure, as long as the end portion is effective for piercing the oxide film of the object under test.

[0030] 1A and 1B, FIG. 1A is a perspective view of a probe structure 1 according to some embodiments of the present disclosure, and FIG. 1B is a top view of the probe structure 1 according to some embodiments of the present disclosure. The probe structure 1 comprises a plurality of bodies 11 and a plurality of protrusions 13. Each body 11 comprises an end portion 111. Each end portion 111 has a surface 110. The plurality of protrusions 13 are formed on the surface 110 and extend in a direction D11. At least one protrusion 13 is formed on each surface 110. In some embodiments, a protrusion 13 is formed on each surface 110 and is adapted to contact an object under test (not shown), for example, an integrated circuit (IC) chip.

[0031] 2A and 2B, FIG. 2A is a perspective view of a probe structure 2 according to some embodiments of the present disclosure, and FIG. 2B is a top view of the probe structure 2 according to some embodiments of the present disclosure. The probe structure 2 includes a first body 21A, a second body 21B, a first protrusion 23A, and a second protrusion 23B. The first body 21A includes an end portion 211A. The end portion 211A has a surface 210A. The first protrusion 23A is formed on the surface 210A and extends in a direction D21. The second body 21B includes an end portion 211B. The end portion 211B has a surface 210B. The second protrusion 23B is formed on the surface 210B and extends in a direction D21. In some embodiments, the first protrusion 23A and the second protrusion 23B are adapted to contact an object under test (not shown), for example, an IC chip.

[0032] In some embodiments, the first body 21A and the second body 21B are continuous. The shortest distance between the first body 21A and the second body 21B is equal to zero and equal to or less than a certain numerical value. In some embodiments, the shortest distance between the first body 21A and the second body 21B is equal to zero. In some embodiments, when the shortest distance between the first body 21A and the second body 21B is equal to a certain numerical value, the maximum width of the probe structure 2 is smaller than the structural width of a conventional probe body.

[0033] Referring to FIG. 2C, FIG. 2C is a top view of the probe structure 2 according to some embodiments of the present disclosure. A projection point P23A formed by projecting an end point of the first protrusion 23A onto the surface 210A is a distance X1 away from the center C21A of the surface 210A. A projection point P23B formed by projecting an end point of the second protrusion 23B onto the surface 210B is a distance X2 away from the center C21B of the surface 210B. The projection point P23A is shifted in a direction D22 relative to the center C21A. The projection point P23B is shifted in a direction D23 opposite to the direction D22 relative to the center C21B.

[0034] In some embodiments, the vertices of the first protrusion 23A and the second protrusion 23B are collinear and define a line L21 that is parallel to the surfaces 210A and 210B. Thus, the shortest distance between the surface 210A and the vertex of the first protrusion 23A is the same as the shortest distance between the surface 210B and the vertex of the second protrusion 23B. The surfaces 210A and 210B are coplanar.

[0035] In some embodiments, the projection of the line L21 falls on the surfaces 210A and 210B in the opposite direction to the direction D21 (i.e., the line L1 projects a projection on the surfaces 210A and 210B). Thus, the projection of the line L21 falls in the opposite direction to the direction D21 with respect to the surfaces 210A and 210B. Thus, the projection of the line L21 overlaps the surfaces 210A and 210B.

[0036] In some embodiments, when the probe structure 2 is adapted to contact a specific area to be tested on an object under test, the center of the line L21 defined by the apexes of the first protrusion 23A and the second protrusion 23B can be oriented toward the center of the specific area to be tested such that the center of the line L21 overlaps the center of the specific area to be tested. Thus, when the first protrusion 23A and the second protrusion 23B of the probe structure 2 contact the specific area to be tested, the force applied to the probe structure 2 by the contact is evenly distributed between the first protrusion 23A and the second protrusion 23B.

[0037] 3A and 3B, FIG. 3A is a perspective view of a probe structure 3 according to some embodiments of the present disclosure, and FIG. 3B is a top view of the probe structure 3 according to some embodiments of the present disclosure. The probe structure 3 includes a first body 31A, a second body 31B, a first protrusion 33A, a second protrusion 33B1, and a third protrusion 33B2. The first body 31A includes an end portion 311A. The end portion 311A ​​has a surface 310A. The first protrusion 33A is formed on the surface 310A and extends in a direction D31. The second body 31B includes an end portion 311B. The end portion 311B has a surface 310B. The second protrusion 33B1 and the third protrusion 33B2 are formed on the surface 310B and extend in a direction D31. In some embodiments, protrusions 33A, 33B1 and 33B2 are adapted to contact an object under test (not shown), for example an IC chip.

[0038] In some embodiments, the first body 31A and the second body 31B are continuous. The shortest distance between the first body 31A and the second body 31B is equal to zero and equal to or less than a certain value. In some embodiments, the shortest distance between the first body 31A and the second body 31B is equal to zero. In some embodiments, when the shortest distance between the first body 31A and the second body 31B is equal to a certain value, the maximum width of the probe structure 3 is smaller than the structural width of a conventional probe body.

[0039] In some embodiments, the vertices of the first protrusion 33A, the second protrusion 33B1, and the third protrusion 33B2 are coplanar and define a plane S31 parallel to the surfaces 310A and 310B. Thus, the shortest distance between the surface 310A and the vertex of the first protrusion 33A, the shortest distance between the surface 310B and the vertex of the second protrusion 33B1, and the shortest distance between the surface 310B and the vertex of the third protrusion 33B2 are equal. The surfaces 310A and 310B are coplanar.

[0040] In some embodiments, the projection image of the plane S31 falls on the surfaces 310A and 310B in the opposite direction to the direction D31 (i.e., the plane S31 projects a projection image onto the surfaces 310A and 310B). Thus, the projection image of the plane S31 falls in the opposite direction to the direction D31 with respect to the surfaces 310A and 310B. Therefore, the projection image of the plane S31 overlaps the surfaces 310A and 310B.

[0041] In some embodiments, when the probe structure 3 is adapted to contact a specific area to be tested on an object under test, the center of the plane S31 defined by the apexes of the first protrusion 33A, the second protrusion 33B1, and the third protrusion 33B2 can be oriented to the center of the specific area to be tested so as to overlap the center of the specific area to be tested. Thus, when the first protrusion 33A, the second protrusion 33B1, and the third protrusion 33B2 of the probe structure 3 contact the specific area to be tested, the force applied to the probe structure 3 by the contact is evenly distributed between the first protrusion 33A, the second protrusion 33B1, and the third protrusion 33B2.

[0042] 4A and 4B, FIG. 4A is a perspective view of a probe structure 4 according to some embodiments of the present disclosure, and FIG. 4B is a top view of the probe structure 4 according to some embodiments of the present disclosure. The probe structure 4 includes a first body 41A, a second body 41B, a first protrusion 43A1, a second protrusion 43A2, a third protrusion 43B1, and a fourth protrusion 43B2. The first body 41A includes an end portion 411A. The end portion 411A has a surface 410A. The first protrusion 43A1 and the second protrusion 43A2 are formed on the surface 410A and extend in a direction D41. The second body 41B includes an end portion 411B. The end portion 411B has a surface 410B. The third protrusion 43B1 and the fourth protrusion 43B2 are formed on the surface 410B and extend in a direction D41. In some embodiments, protrusions 43A1, 43A2, 43B1 and 43B2 are adapted to contact an object under test (not shown), for example an IC chip.

[0043] In some embodiments, the first body 41A and the second body 41B are continuous. The shortest distance between the first body 41A and the second body 41B is greater than or equal to zero and less than a certain value. In some embodiments, the shortest distance between the first body 41A and the second body 41B is equal to zero. In some embodiments, when the shortest distance between the first body 41A and the second body 41B is equal to a certain value, the maximum width of the probe structure 4 is smaller than the structural width of a conventional probe body.

[0044] In some embodiments, the vertices of the first protrusion 43A1, the second protrusion 43A2, the third protrusion 43B1, and the fourth protrusion 43B2 are coplanar and define a plane S41 parallel to the surfaces 410A and 410B. Thus, the shortest distance between the surface 410A and the vertex of the first protrusion 43A1, the shortest distance between the surface 410A and the vertex of the second protrusion 43A2, the shortest distance between the surface 410B and the vertex of the third protrusion 43B1, and the shortest distance between the surface 410B and the vertex of the fourth protrusion 43B2 are equal. The surfaces 410A and 410B are coplanar.

[0045] In some embodiments, the projected image of the plane S41 falls on the surfaces 410A and 410B in the opposite direction to the direction D41 (i.e., the plane S41 projects its projected image on the surfaces 410A and 410B). Thus, the projected image of the plane S41 falls in the opposite direction to the direction D41 with respect to the surfaces 410A and 410B. Therefore, the projected image of the plane S41 overlaps the surfaces 410A and 410B.

[0046] In some embodiments, when the probe structure 4 is adapted to contact a specific area to be tested on an object under test, the center of the plane S41 defined by the apexes of the first protrusion 43A1, the second protrusion 43A2, the third protrusion 43B1 and the fourth protrusion 43B2 can be oriented to the center of the specific area to be tested so as to overlap the center of the specific area to be tested. Thus, when the first protrusion 43A1, the second protrusion 43A2, the third protrusion 43B1 and the fourth protrusion 43B2 of the probe structure 4 contact the specific area to be tested, the force applied to the probe structure 4 by the contact is evenly distributed between the first protrusion 43A1, the second protrusion 43A2, the third protrusion 43B1 and the fourth protrusion 43B2.

[0047] 5A and 5B, FIG. 5A is a perspective view of a probe structure 5 according to some embodiments of the present disclosure, and FIG. 5B is a top view of the probe structure 5 according to some embodiments of the present disclosure. The probe structure 5 includes a first body 51A, a second body 51B, a third body 51C, a first protrusion 53A, a second protrusion 53B, and a third protrusion 53C. The first body 51A includes an end portion 511A. The end portion 511A has a surface 510A. The first protrusion 53A is formed on the surface 510A and extends in a direction D51. The second body 51B includes an end portion 511B. The end portion 511B has a surface 510B. The second protrusion 53B is formed on the surface 510B and extends in a direction D51. The third body 51C includes an end portion 511C. End portion 511C has a surface 510C. A third protrusion 53C is formed on surface 510C and extends in direction D51. In some embodiments, protrusions 53A, 53B and 53C are adapted to contact an object under test (not shown), for example an IC chip.

[0048] In some embodiments, the first body 51A, the second body 51B, and the third body 51C are continuous with each other. The shortest distance between any two of the first body 51A, the second body 51B, and the third body 51C is greater than or equal to zero and less than or equal to a specific numerical value. In some embodiments, the shortest distance between any two of the first body 51A, the second body 51B, and the third body 51C is equal to zero. In some embodiments, when the shortest distance between any two of the first body 51A, the second body 51B, and the third body 51C is equal to a specific numerical value, the maximum width of the probe structure 5 is smaller than the structural width of a conventional probe body.

[0049] In some embodiments, the vertices of the first protrusion 53A, the second protrusion 53B, and the third protrusion 53C are coplanar and define a plane S51 parallel to the surfaces 510A, 510B, and 510C. Thus, the shortest distance between the surface 510A and the vertex of the first protrusion 53A, the shortest distance between the surface 510B and the vertex of the second protrusion 53B, and the shortest distance between the surface 510C and the vertex of the third protrusion 53C are equal. The surfaces 510A, 510B, and 510C are coplanar.

[0050] In some embodiments, the projection image of the plane S51 falls on the surfaces 510A, 510B, and 510C in the opposite direction to the direction D51 (i.e., the plane S51 projects its projection image on the surfaces 510A, 510B, and 510C). Thus, the projection image of the plane S51 falls on the surfaces 510A, 510B, and 510C in the opposite direction to the direction D51. Therefore, the projection image of the plane S51 overlaps the surfaces 510A, 510B, and 510C.

[0051] In some embodiments, when the probe structure 5 is adapted to contact a specific area to be tested on an object under test, the center of the plane S51 defined by the apexes of the first protrusion 53A, the second protrusion 53B, and the third protrusion 53C can be oriented to overlap the center of the specific area to be tested. Thus, when the first protrusion 53A, the second protrusion 53B, and the third protrusion 53C of the probe structure 5 contact the specific area to be tested, the force applied to the probe structure 5 by the contact is evenly distributed among the first protrusion 53A, the second protrusion 53B, and the third protrusion 53C.

[0052] 6A and 6B, FIG. 6A is a perspective view of a probe structure 6 according to some embodiments of the present disclosure, and FIG. 6B is a top view of the probe structure 6 according to some embodiments of the present disclosure. The probe structure 6 includes a first body 61A, a second body 61B, a third body 61C, a first protrusion 63A, a second protrusion 63B, and a third protrusion 63C. The first body 61A includes an end portion 611A. The end portion 611A has a surface 610A. The first protrusion 63A is formed on the surface 610A and extends in a direction D61. The second body 61B includes an end portion 611B. The end portion 611B has a surface 610B. The second protrusion 63B is formed on the surface 610B and extends in a direction D61. The third body 61C includes an end portion 611C. End portion 611C has a surface 610C. A third protrusion 63C is formed on surface 610C and extends in direction D61. In some embodiments, protrusions 63A, 63B and 63C are adapted to contact an object under test (not shown), for example an IC chip.

[0053] In some embodiments, the first body 61A and the third body 61C are continuous with the second body 61B, respectively. The shortest distance between the first body 61A and the second body 61B is greater than or equal to zero and less than or equal to a specific value. The shortest distance between the third body 61C and the second body 61B is greater than or equal to zero and less than or equal to a specific value. In some embodiments, the shortest distance between the first body 61A and the second body 61B is equal to zero. In some embodiments, when the shortest distance between the first body 61A and the second body 61B is equal to a specific value and the shortest distance between the third body 61C and the second body 61B is equal to a specific value, the maximum width of the probe structure 6 is smaller than the structural width of the conventional probe body.

[0054] In some embodiments, the vertices of the first protrusion 63A, the second protrusion 63B, and the third protrusion 63C are collinear and define a line L61 that is parallel to the surfaces 610A, 610B, and 610C. Thus, the shortest distance between the surface 610A and the vertex of the first protrusion 63A, the shortest distance between the surface 610B and the vertex of the second protrusion 63B, and the shortest distance between the surface 610C and the vertex of the third protrusion 63C are equal. The surfaces 610A, 610B, and 610C are coplanar.

[0055] In some embodiments, the projection of the line L61 falls on the surfaces 610A, 610B, and 610C in the opposite direction to the direction D61 (i.e., the line L61 projects a projection on the surfaces 610A, 610B, and 610C). Thus, the projection of the line L61 falls on the surfaces 610A, 610B, and 610C in the opposite direction to the direction D61. Thus, the projection of the line L61 overlaps the surfaces 610A, 610B, and 610C.

[0056] In some embodiments, when the probe structure 6 is adapted to contact a specific area to be tested on an object under test, the center of the line L61 defined by the apexes of the first protrusion 63A, the second protrusion 63B, and the third protrusion 63C can be oriented to the center of the specific area to be tested so as to overlap the center of the specific area to be tested. Thus, when the first protrusion 63A, the second protrusion 63B, and the third protrusion 63C of the probe structure 6 contact the specific area to be tested, the force applied to the probe structure 6 by the contact is evenly distributed among the first protrusion 63A, the second protrusion 63B, and the third protrusion 63C.

[0057] 7A and 7B, FIG. 7A is a perspective view of a probe structure 7 according to some embodiments of the present disclosure, and FIG. 7B is a top view of the probe structure 7 according to some embodiments of the present disclosure. The probe structure 7 includes a first body 71A, a second body 71B, a third body 71C, a first protrusion 73A, a second protrusion 73B1, a third protrusion 73B2, and a fourth protrusion 73C. The first body 71A includes an end portion 711A. The end portion 711A has a surface 710A. The first protrusion 73A is formed on the surface 710A and extends in a direction D71. The second body 71B includes an end portion 711B. The end portion 711B has a surface 710B. The second protrusion 73B1 and the third protrusion 73B2 are formed on the surface 710B and extend in a direction D71. The third body 71C includes an end portion 711C. The end portion 711C has a surface 710C. A third protrusion 73C is formed on the surface 710C and extends in a direction D71. In some embodiments, the protrusions 73A, 73B1, 73B2, and 73C are adapted to contact an object under test (not shown), for example, an IC chip.

[0058] In some embodiments, the first body 71A and the third body 71C are continuous with the second body 71B, respectively. The shortest distance between the first body 71A and the second body 71B is greater than or equal to zero and less than or equal to a specific value. The shortest distance between the third body 71C and the second body 71B is greater than or equal to zero and less than or equal to a specific value. In some embodiments, the shortest distance between the first body 71A and the second body 71B is equal to zero, and the shortest distance between the third body 71C and the second body 71B is equal to zero. In some embodiments, when the shortest distance between the first body 71A and the second body 71B is equal to a specific value and the shortest distance between the third body 71C and the second body 71B is equal to a specific value, the maximum width of the probe structure 7 is smaller than the structural width of the conventional probe body.

[0059] In some embodiments, the vertices of the first protrusion 73A, the second protrusion 73B1, the third protrusion 73B2, and the fourth protrusion 73C are coplanar and define a plane S71 parallel to the surfaces 710A, 710B, and 710C. Thus, the shortest distance between the surface 710A and the vertex of the first protrusion 73A, the shortest distance between the surface 710B and the vertex of the second protrusion 73B1, the shortest distance between the surface 710B and the vertex of the third protrusion 73B2, and the shortest distance between the surface 710C and the vertex of the fourth protrusion 73C are equal. The surfaces 710A, 710B, and 710C are coplanar.

[0060] In some embodiments, the projection of the plane S71 falls on the surfaces 710A, 710B, and 710C in the opposite direction to the direction D71 (i.e., the plane S71 projects its projection onto the surfaces 710A, 710B, and 710C). Thus, the projection of the straight line S71 falls on the surfaces 710A, 710B, and 710C in the opposite direction to the direction D71. Thus, the projection of the plane S71 overlaps the surfaces 710A, 710B, and 710C.

[0061] In some embodiments, when the probe structure 7 is adapted to contact a specific area to be tested on an object under test, the center of the plane S71 defined by the apexes of the first protrusion 73A, the second protrusion 73B1, the third protrusion 73B2, and the fourth protrusion 73C can be oriented to overlap the center of the specific area to be tested. Thus, when the first protrusion 73A, the second protrusion 73B1, the third protrusion 73B2, and the fourth protrusion 73C of the probe structure 7 contact the specific area to be tested, the force applied to the probe structure 7 by the contact is evenly distributed among the first protrusion 73A, the second protrusion 73B1, the third protrusion 73B2, and the fourth protrusion 73C.

[0062] 8A and 8B, FIG. 8A is a perspective view of a probe structure 8 according to some embodiments of the present disclosure, and FIG. 8B is a top view of the probe structure 8 according to some embodiments of the present disclosure. The probe structure 8 comprises a plurality of bodies 81 and a plurality of protrusions 83. Each body 81 comprises an end portion 811 having a surface 810. Each of the plurality of protrusions 83 is formed on the surface 810 and extends in a direction D81. At least one protrusion 83 is formed on each surface 810. In some embodiments, each protrusion 83 is adapted to contact an object under test (not shown), for example, an IC chip.

[0063] In some embodiments, each body 81 is contiguous with at least two other bodies 81. For example, as shown, each body 81 has four sides, two of which are contiguous with two other bodies 81.

[0064] The protrusions in the above embodiment may be tapered and each protrusion may have a sharp end for piercing an oxide film on the electrode surface of the object under test to ensure good electrical contact, and each protrusion extends in a direction substantially perpendicular to a corresponding one of the surfaces.

[0065] The present disclosure and its advantages have been described in detail above. However, it should be understood that various modifications, substitutions and alternatives can be made without departing from the spirit and scope of the present disclosure as defined by the appended claims. For example, the various processes described above may be implemented with different approaches, or other processes or combinations thereof may be used in place of the various processes described above.

[0066] Moreover, the scope of the present application is not limited to the particular embodiments of the process, machine, manufacture, composition of matter, means, methods, or steps described in the detailed description. Those skilled in the art can appreciate from the present disclosure that they can utilize currently existing or hereafter developed processes, machines, manufacture, compositions of matter, means, methods, or steps that perform substantially the same function or achieve substantially the same results as the corresponding embodiments described herein. Accordingly, the appended claims are intended to encompass within their scope such processes, machines, manufacture, compositions of matter, means, methods, and steps.

Claims

1. a plurality of bodies, each including an end portion having a surface, a distance between a first body and a second body of the bodies being equal to zero, and the surfaces of the end portions of each of the plurality of bodies being coplanar; a plurality of protrusions formed on said surfaces and extending in the same direction, at least one protrusion formed on each surface; A probe structure comprising:

2. The probe structure of claim 1 , wherein the plurality of bodies includes a first body and a second body contiguous with the first body.

3. 3. The probe structure of claim 2, wherein the plurality of protrusions includes a first protrusion and a second protrusion, the first protrusion being formed on the surface of the end portion of the first body and the second protrusion being formed on the surface of the end portion of the second body.

4. 3. The probe structure of claim 2, wherein the plurality of protrusions includes a first protrusion, a second protrusion, and a third protrusion, the first protrusion being formed on the surface of the end portion of the first body, the second protrusion being formed on the surface of the end portion of the second body, and the third protrusion being formed on the surface of the end portion of the second body.

5. 3. The probe structure of claim 2, wherein the plurality of protrusions includes a first protrusion, a second protrusion, a third protrusion, and a fourth protrusion, the first protrusion and the second protrusion being formed on the surface of the end portion of the first body, and the third protrusion and the fourth protrusion being formed on the surface of the end portion of the second body.

6. The probe structure of claim 1 , wherein the plurality of bodies includes a first body, a second body, and a third body, the first body, the second body, and the third body being contiguous with one another.

7. The probe structure of claim 1 , wherein the plurality of bodies includes a first body, a second body, and a third body, the first body and the second body each being contiguous with the third body.

8. 8. The probe structure of claim 6, wherein the plurality of protrusions include a first protrusion, a second protrusion, a third protrusion and a fourth protrusion, the first protrusion being formed on the surface of the end portion of the first body, the second protrusion being formed on the surface of the end portion of the second body, the third protrusion being formed on the surface of the end portion of the third body, and the fourth protrusion being formed on the surface of the end portion of the third body.

9. The probe structure of claim 1 , wherein each body is contiguous with at least two bodies.

10. The probe structure of claim 1 , wherein each prong has a sharp end.

11. The probe structure of claim 10 , wherein apexes of the sharp ends of a plurality of protrusions define a plane, the plane being parallel to one or more of the surfaces.

12. The probe structure of claim 1 , wherein each projection extends in a direction perpendicular to a corresponding one of the surfaces.

13. A probe structure comprising: a first body having a first contact end with the first surface; a second body having a second contact end with a second surface, a distance between the first body and the second body being equal to zero, and the first surface and the second surface being coplanar; at least one first sharp edge formed on the first surface and extending in a particular direction; at least one second sharp edge formed on the second surface and extending in the particular direction; Equipped with A probe structure, wherein an apex of the at least one first sharp end and an apex of the at least one second sharp end are collinear or coplanar, and a line or plane defined by the apex of the at least one first sharp end and the apex of the at least one second sharp end is parallel to the first surface and the second surface.

14. The probe structure of claim 13 , wherein the line or the plane projects a projection image onto the first surface and the second surface in a direction opposite to the specific direction, and the projection image overlaps at least a portion of the first surface and the second surface.

15. The probe structure of claim 13 , wherein the first body and the second body are contiguous.

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