Current measurement and diagnosis methods

Abstract

This electrical current measurement system is configured to measure alternating current that flows through a conductor and that has a frequency within a measurement range. The electrical current measurement system comprises: a current sensor having a measurement coil configured so as to magnetically couple with the conductor; and a shunt resistor having both ends electrically connected to both ends of the measurement coil, in parallel to the measurement coil. The output voltage across both ends of the shunt resistor is saturated at a saturation point at a saturation frequency, with respect to the frequency of the alternating current. The upper limit value of the measurement range of the frequency is higher than the fundamental frequency of the alternating current. The saturation frequency is greater than or equal to the upper limit value. This electrical current measurement system can improve sensitivity to frequency components that are higher than the fundamental frequency of the alternating current.

Description

[Technical field]

[0001] The present disclosure relates to a current measurement device for measuring alternating current. method , and current measurement Use the method diagnosis method Regarding. [Background technology]

[0002] Patent Document 1 discloses a current measuring device (current measuring system). The current measuring system of Patent Document 1 includes a current sensor. The current sensor has a detection coil wound around a magnetic core arranged in a ring shape around a conductor to be measured, and a shunt is connected between each of the hot side output terminal and the ground side output terminal of the detection coil. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2012-68191 A Summary of the Invention

[0004] A current measurement method according to an aspect of the present disclosure uses a current sensor and a shunt resistor to measure an AC current having a frequency within a measurement range flowing through a conductor. The current sensor has a measurement coil configured to be magnetically coupled to the conductor. The shunt resistor has both ends electrically connected to both ends of the measurement coil. In the current measurement method, an output voltage between the both ends of the shunt resistor with respect to the frequency of the AC current increases as the frequency increases when the frequency is equal to or lower than a saturation frequency, and saturates when the frequency exceeds the saturation frequency. In the current measurement method, an upper limit value of the measurement range of the frequency is higher than a fundamental frequency of the AC current. In the current measurement method, the self-inductance of the measurement coil, the reactance of the measurement coil, and the resistance value of the shunt resistor are set so that the saturation frequency is equal to or higher than the upper limit value. If the saturation frequency is P1, the reactance of the measurement coil is R1, the resistance value of the shunt resistor is R2, and the self-inductance of the measurement coil is L1, then P1 satisfies the following formula. P1 = (R1 + R2) / (2π L1). A diagnostic method according to one aspect of the present disclosure is a diagnostic method for diagnosing a drive device that drives an appliance. In the diagnostic method, a current of the drive device is measured by the current measurement method. In the diagnostic method, a state of the appliance is determined based on a result of the current measurement method. The drive device is supplied with the AC current to drive the appliance.

[0005] This current measurement Methods and diagnostic methods can improve sensitivity to frequency components higher than the fundamental frequency of the AC current. [Brief description of the drawings]

[0006] [Figure 1] FIG. 1 is a configuration diagram of a diagnostic system including a current measuring system according to an embodiment. [Diagram 2] FIG. 2 is a circuit diagram of the measurement unit of the current measurement system of the above embodiment. [Diagram 3] FIG. 3 is a diagram illustrating the measurement principle of the current measuring system of the above embodiment. [Figure 4] FIG. 4 is a diagram illustrating the frequency characteristics of the output of the current measuring system of the above embodiment. [Diagram 5] FIG. 5 is a graph showing frequency characteristics of the sensitivity of the current measuring system of the above embodiment. [Figure 6] FIG. 6 is a graph showing frequency characteristics of sensitivity of a current measurement system of the comparative example. [Figure 7] FIG. 7 is a graph showing frequency components obtained by the current measuring system of the above embodiment. [Figure 8] FIG. 8 is a graph showing frequency components obtained in the current measurement system of the comparative example. [Figure 9] FIG. 9 is a graph showing frequency components obtained by the current measuring system of the above embodiment. [Figure 10] FIG. 10 is a graph showing frequency components obtained in the current measurement system of the comparative example. [Figure 11] FIG. 11 is a graph showing frequency components of an AC current obtained by the current measuring system of the above embodiment. [Figure 12] FIG. 12 is a graph showing frequency components of an AC current obtained by the current measuring system of the above embodiment. [Figure 13] FIG. 13 is a graph showing frequency components of an AC current obtained by the current measurement system of the comparative example. [Figure 14] FIG. 14 is a graph of the frequency components of an AC current obtained by the current measurement system of the comparative example. [Figure 15] FIG. 15 is a flowchart showing the operation of the above-described diagnostic system. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] (1) Implementation form (1.1) Overview FIG. 1 shows a diagnostic system 10 including a current measurement system 20 according to the present embodiment. FIG. 2 is a circuit diagram of the current measurement system. The current measurement system 20 is configured to measure an AC current I1 flowing through a conductor 32. As shown in FIG. 2, the current measurement system 20 includes a current sensor 22 having a measurement coil 220 magnetically coupled to the conductor 32, and a shunt resistor 23 electrically connected between both ends 220a, 220b of the measurement coil 220. The shunt resistor 23 is connected to both ends 220a, 220b of the measurement coil 220 in parallel with the measurement coil 220. The current measurement system 20 has a saturation point at which an output voltage V2 between both ends of the shunt resistor 23 saturates at a saturation frequency with respect to the frequency of the AC current I1. The upper limit of the measurement range of the frequency of the AC current I1 is higher than the fundamental frequency of the AC current I1. The saturation frequency is equal to or higher than the upper limit of the measurement range.

[0008] In the current measurement system 20, an induced current corresponding to the AC current I1 flows through the measurement coil 220, and the output voltage V2 between both ends 23a, 23b of the shunt resistor 23 has a value corresponding to the induced current. In a frequency range lower than the saturation frequency at the saturation point, the output voltage V2 increases with increasing frequency. In the current measurement system 20, the saturation frequency is higher than the fundamental frequency of the AC current I1 and is equal to or higher than the upper limit of the measurement range. The current measurement system 20 of this embodiment can improve sensitivity to frequency components higher than the fundamental frequency of the AC current I1.

[0009] (1.2) Details The diagnostic system 10 including the current measurement system 20 of the present embodiment will be described in more detail below. The diagnostic system 10 is configured to diagnose the device 30. The device 30 diagnosed by the diagnostic system 10 is, for example, a work device. The work device is a device that performs a predetermined operation. Examples of the predetermined operation include processing, transport, arrangement, and mounting of materials and objects. Processing includes physical processing such as boring, drilling, tapping, cutting, and polishing, and chemical processing such as heating and cooling. In addition, transport is not limited to transporting solid objects such as parts and products, but also includes transporting fluids in a flow path. Examples of such work devices include lathes, machining centers, machine tools such as end mills, grinders, and drills, component mounters, transporters, heat treatment devices, pumps (e.g., vacuum pumps), compressors, polishing devices (e.g., chemical mechanical polishing devices), and combinations thereof.

[0010] (1.2.1) Equipment The device 30 has a function as a lathe, for example. The device 30 may have a function as a machining center. The device 30 includes a drive device 31 and a power supply device 33.

[0011] The driving device 31 is a device for driving the mechanism. In other words, the driving device 31 is a power source for the mechanism. The driving device 31 includes a motor. The motor changes its output depending on the current given to it. The mechanism is a device for executing a predetermined operation. The predetermined operation is an operation of machining a workpiece by rotating one of the cutting tool and the workpiece relative to the other. In other words, the device 30 is a device for machining a workpiece to obtain a member of a desired shape. In the embodiment, the mechanism machines the workpiece by rotating the workpiece relative to the cutting tool. In other words, the device 30 has a function as a lathe. The cutting tool is a member for machining the workpiece. The cutting tool is replaceable. The workpiece is, for example, a metal body.

[0012] The motor is utilized to hold the cutting tool at a predetermined position relative to the workpiece in a direction along the central axis of rotation of the workpiece. That is, the drive device 31 is configured to press one of the cutting tool and the workpiece against the other in a direction along the central axis of rotation of the one of the cutting tool and the workpiece relative to the other by the motor. In this embodiment, the axial direction of the output shaft of the rotor of the motor rotates in a direction along the central axis of rotation of the one of the cutting tool and the workpiece relative to the other, but is not limited thereto.

[0013] The motor is an AC motor that operates on an AC current. The AC motor may be a three-phase AC motor or a single-phase AC motor. Specifically, the motor's output, i.e., the rotation speed, which is the number of rotations per unit time, changes in response to changes in the fundamental frequency of a given AC current. For example, if the fundamental frequency is higher, the output increases, i.e., the output shaft rotates faster, and if the fundamental frequency is lower, the output decreases, i.e., the output shaft rotates slower.

[0014] The power supply device 33 supplies an AC current I1 to the motor of the drive device 31. In particular, the power supply device 33 supplies the AC current I1 to the motor of the drive device 31 in order to execute a predetermined task in the mechanism. That is, the current I1 is supplied to the drive device 31 while the predetermined task of the device 30 is being executed. The power supply device 33 is connected to the motor via a conductor 32, which is an electric wire. In this embodiment, the AC current I1 has a fundamental frequency. The power supply device 33 has a function of adjusting the fundamental frequency of the AC current I1. The power supply device 33 can be realized by a known AC power supply circuit, and therefore a detailed description thereof will be omitted.

[0015] (1.2.2) Diagnostic Systems The diagnostic system 10 judges the state of the cutting tool as the state of the equipment 30. The state of the cutting tool is roughly divided into two types depending on whether or not it is damaged. The diagnostic system 10 judges the state of the equipment 30 to be normal when the cutting tool is not damaged. Examples of damage to the cutting tool include flank wear, rake face wear (crater wear), chipping, chipping, plastic deformation, built-up cutting edge (welding), thermal cracks, boundary wear, and flaking. Here, the wear of the cutting tool occurs in the same manner for the same equipment 30. However, with regard to the chipping of the cutting tool and its signs, the type of chipping that occurs varies from case to case even for the same equipment 30, and it is difficult to identify. In other words, the damage to the cutting tool may be easy to identify and difficult to identify. The diagnostic system 10 judges the state of the equipment 30 to be abnormal when there is easy-to-identify damage to the cutting tool. On the other hand, the diagnostic system 10 judges the state of the equipment 30 to be unspecified when there is difficult-to-identify damage to the cutting tool. That is, the abnormality in this embodiment is an abnormality known to the diagnostic system 10, and the unspecified state is an abnormality unknown to the diagnostic system 10. This unknown abnormality also includes a sign of a defect.

[0016] 1, the diagnostic system 10 includes a measurement unit 21, an acquisition unit 11, an extraction unit 12, a determination unit 13, an output unit 14, a collection unit 15, a generation unit 16, and a storage unit 17. In the diagnostic system 10, the acquisition unit 11 and the extraction unit 12 configure an analysis unit 24. The measurement unit 21 and the analysis unit 24 configure a current measurement system 20.

[0017] The measurement unit 21 measures the AC current I1 and outputs waveform data (current waveform data) indicating a waveform related to the AC current I1. In this embodiment, the measurement unit 21 measures the AC current I1 supplied to a driving device 31 of the device 30. The measurement unit 21 is attached to a conductor 32, which is an electric wire through which the AC current I1 flows from a power supply device 33 to the driving device 31. The measurement unit 21 includes a current sensor 22 and a shunt resistor 23, as shown in Figs. 1 and 2 .

[0018] As shown in FIG. 2, the current sensor 22 includes a measurement coil 220 and a core 221. The measurement coil 220 is disposed near a conductor 32, which is an electric wire through which the AC current I1 to be measured flows. More specifically, the measurement coil 220 is magnetically coupled to the conductor 32, which is an electric wire through which the AC current I1 flows. The core 221 has a portion 221b that passes through the inside of the measurement coil 220. In this embodiment, the core 221 has a ring shape that surrounds the hollow portion 221a. The core 221 is disposed so that the conductor 32 (electric wire) through which the AC current I1 to be measured flows passes through the hollow portion 221a of the core 221. In this embodiment, the current sensor 22 is a current transformer. In particular, it is desirable that the current transformer can be attached to the conductor 32 later. That is, in this embodiment, the measurement unit 21 can be attached to the conductor 32 later.

[0019] The shunt resistor 23 is electrically connected between both ends 220a, 220b of the measurement coil 220. An output voltage V2 between both ends 23a, 23b of the shunt resistor 23 becomes the output of the measurement unit 21.

[0020] Next, the relationship between the current I1 to be measured and the output voltage V2, which is the output of the measuring unit 21, will be described. FIG. 3 is an equivalent circuit diagram of the measuring unit 21. In FIG. 3, the capacitance component of the measuring coil 220 is ignored. In FIG. 3, the conductor 32 through which the AC current I1 flows has a self-inductance L0. The measuring coil 220 has a self-inductance L1 and a reactance R1. The shunt resistor 23 has a resistance value R2. A voltage V1 is applied to the conductor 32. More specifically, the voltage V1 is the sum of the self-induced electromotive force due to the current I1 and the electromotive force generated by mutual induction between the conductor 32 and the measuring coil 220. The mutual inductance M is the mutual inductance between the conductor 32 and the measuring coil 220. A current I2 flows through the shunt resistor 23.

[0021] The voltages V1 and V2 are expressed by the above and the angular frequency ω of the AC current I1 in Equation 1.

[0022]

number

[0023] Since the voltage V2 is equal to the product of the resistance R2 and the current I2 (R2·I2), it can be expressed by the following equation 2.

[0024]

number

[0025] The voltage V2 is expressed by the following equation 3 using a coupling coefficient k between the conductor 32 and the measurement coil 220, a frequency f of the AC current I1, and the number of turns N of the measurement coil 220.

[0026]

number

[0027] When the frequency f is low, the voltage V2 can be expressed by the formula 4, and the voltage V2 is proportional to the frequency f.

[0028]

number

[0029] 4 is an explanatory diagram of the frequency characteristic of the output voltage V2 which is the output of the current measurement system 20. FIG 4 shows the actual measured value G11 and the theoretical value G12 of the output voltage V2. The theoretical value G12 is based on Equation 3. Measurement targetThe output voltage V2 across the shunt resistor 23 is saturated at a saturation point Q1 at a saturation frequency P1 with respect to the frequency f of the AC current I1. The saturation frequency P1 is given by (R1+R2) / (2π·L1). The resonant frequency P2 of the measurement coil 220 is given by 1 / {2π·(L1·C)1 / 2} due to the capacitance component C of the measurement coil. A normal coil or transformer used for transmitting an AC signal cannot achieve its purpose if the output fluctuates due to the frequency rather than the external magnetic field. A normal transformer, coil, or sensor is saturated at a low frequency of about several tens of Hz, so the frequency band where it does not saturate is very narrow. In contrast, the current sensor 20 in the embodiment can adjust the upper limit frequency at which it saturates, so it can be unsaturated up to a high frequency of several tens of kHz or several hundreds of kHz.

[0030] As is clear from Fig. 4, when the frequency f of the AC current I1 is lower than the saturation frequency P1, the output voltage V2 increases as the frequency f increases. In detail, when the frequency f of the AC current I1 is lower than the saturation frequency P1, the correlation between the frequency of the AC current I1 and the output voltage V2 is expressed by a straight line with a positive slope. When the frequency f is higher than the saturation frequency P1, the output voltage V2 between both ends 23a, 23b of the shunt resistor 23 becomes constant for the frequency f of the AC current I1. In Fig. 4, when the frequency is higher than the saturation frequency P1, the actual measurement value G11 and the theoretical value G12 are significantly different from each other. This is because the capacitance component C of the measurement coil 220 is ignored in the calculation of Equation 3.

[0031] FIG. 5 shows the sensitivity of the current measurement system 20 of this embodiment when the magnitude of the AC current I1 is constant. The sensitivity is the ratio (V2 / I1) of the output voltage V2 to the AC current I1. In this embodiment, the upper limit of the measurement range of the frequency f in the current measurement system 20 is higher than the fundamental frequency of the AC current I1, and the saturation frequency P1 is equal to or higher than the upper limit of the measurement range of the frequency of the current measurement system 20. Therefore, the sensitivity (V2 / I1) of the current measurement system 20 of this embodiment depends on the frequency, as shown in FIG. 5. In particular, the sensitivity of the current measurement system 20 of this embodiment increases as the frequency f increases. More specifically, the sensitivity of the current measurement system 20 of this embodiment is expressed by a straight line having a positive slope with respect to the frequency f of the AC current I1. As described above, the saturation frequency P1 is given by (R1+R2) / (2π·L1). That is, the saturation frequency P1 depends on the resistance value R2 of the shunt resistor 23 and the self-inductance L1 and reactance R1 of the measurement coil 220. In this embodiment, the self-inductance L1 and reactance R1 of the measurement coil 220 and the resistance value R2 of the shunt resistor 23 are set to values ​​that make the saturation frequency P1 equal to or greater than the upper limit of the measurement range.

[0032] When the reactance R1 of the measurement coil 220 is relatively small and can be ignored, the saturation frequency P1 is given by R2 / (2π·L1), and the formula 3 can be expressed as the formula 5.

[0033]

number

[0034] In this embodiment, the upper limit of the measurement range of the frequency f is set to be 10 times or more the fundamental frequency of the AC current I1 to be measured, and the lower limit of the measurement range is greater than 0.

[0035] In the device 30, if the condition of the cutting tool of the device 30 is not normal, shearing, tearing, and cracking may occur when the cutting tool processes the workpiece. In such a case, a force may be applied to the driving device 31 in a direction along the axis of rotation of the workpiece. Such a force in a direction in which the tool (cutting tool) presses the workpiece is also called a thrust force. In addition, a force opposite to the processing direction, i.e., the movement direction of the cutting tool to the workpiece, is also called a feed force. In particular, in the driving device 31, a force is applied in a direction along the axis of rotation of the workpiece to the rotor of the motor that holds the cutting tool at a fixed position relative to the workpiece in a direction along the axis of rotation of the workpiece. This force is applied to the driving device 31 (the rotor of the motor) during the execution of a specified operation of the device 30. Such a force may affect the change in the angular velocity of the rotor. The change in the angular velocity of the rotor may be reflected in the current I1 supplied to the motor. In addition, when a force is applied in a direction along the axis of rotation of the workpiece and the cutting tool is displaced from the specified position, the device 30 executes control to return the cutting tool to the specified position. Thus, a change in current due to such control may occur in the current I1 supplied to the motor.

[0036] That is, a change may occur in the current I1 supplied to the drive device 31 due to a component of a force acting on the drive device 31 in a specific direction, here, a direction along the axis of rotation of one of the cutting tool and the workpiece relative to the other. In particular, the AC current I1 is supplied to the drive device 31 while the device 30 is performing a predetermined task. The measurement unit 21 measures the AC current I1 supplied to the drive device 31 of the device 30, and outputs waveform data (current waveform data) showing a waveform related to the AC current I1. As an example, the measurement unit 21 is attached to the conductor 32.

[0037] In this way, in the diagnostic system 10, the measuring unit 21 does not need to be installed near the drive unit 31. Since the measuring unit 21 only needs to measure the current supplied to the motor, it can be installed inside a control panel or the like that houses the power supply unit 33. Therefore, in the mechanical part of the device 30, a device for installing the measuring unit 21 and wiring are not required, and balance adjustments and the like due to the installation of the measuring unit 21 are not required. Furthermore, therefore, when installing the measuring unit 21, measures (e.g., oil resistance measures, heat resistance measures, waterproof measures, etc.) are not required to enable the measuring unit 21 to be used in the environment of machining the workpiece. Therefore, the burden of maintenance of the measuring unit 21 can be reduced. In addition, the waveform data can be acquired even during the operation of the device 30. Therefore, it is not necessary to interrupt the operation of the device 30 in order to diagnose the diagnostic system 10. Therefore, the lengthening of the machining cycle due to the diagnosis can be reduced. Furthermore, since the waveform data can be acquired even during the operation of the device 30, the state of the cutting tool (e.g., the degree of wear of the cutting tool) can be grasped at any time, and the cutting tool can be used up. In addition, since the diagnostic system 10 can detect an unspecified state that is neither normal nor abnormal, it is possible to reduce problems that may occur due to the cutting tool being in an unspecified state (e.g., production of defective products). In other words, the diagnostic system 10 makes it possible to apply condition-based maintenance (CBM) to the maintenance of the equipment 30 instead of the conventional time-based maintenance (TBM).

[0038] The analysis unit 24 includes an acquisition unit 11 and an extraction unit 12 .

[0039] The acquiring unit 11 acquires waveform data (current waveform data) indicating a waveform related to the AC current I1 supplied to the driving device 31 of the device 30. More specifically, the acquiring unit 11 is connected to the measuring unit 21, and acquires the waveform data from the measuring unit 21. The waveform data from the measuring unit 21 is time-series data of the output voltage V2 of the measuring unit 21.

[0040] The acquiring unit 11 acquires waveform data indicating a waveform related to the AC current I1 supplied to the driving device 31 of the device 30, that is, time-series data of the output voltage V2.

[0041] The extraction unit 12 acquires information to be used by the determination unit 13 from the waveform data acquired by the acquisition unit 11. The information to be used by the determination unit 13 is information regarding changes caused by components of a force applied to the drive device in a specific direction. The extraction unit 12 converts the waveform indicated by the waveform data acquired by the acquisition unit 11 into a frequency axis waveform. More specifically, the extraction unit 12 executes frequency analysis on the time series data of the output voltage V2 to acquire data on harmonic components of the AC current I1 to be measured. The extraction unit 12 extracts a portion of interest that may include changes caused by components of a force applied to the drive device 31 in a specific direction from the frequency axis waveform obtained by the conversion.

[0042] Changes caused by the component of the force applied to the drive device 31 in a specific direction tend to appear in components in a frequency range higher than the fundamental frequency component in the AC current I1 supplied to the drive device 31 of the device 30. As described above, in the current measurement system 20 of this embodiment, the saturation frequency P1 is set to be equal to or higher than the upper limit of the measurement range including the fundamental frequency of the AC current I1 to be measured. The sensitivity (V2 / I1) of the current measurement system 20 of this embodiment has frequency dependency as shown in FIG. 5, and increases as the frequency f increases. Therefore, the current measurement system 20 of this embodiment can extract a portion of interest that may include changes caused by the component of the force applied to the drive device 31 in a specific direction with higher sensitivity.

[0043] Patent Document 1 describes that a shunt resistor of several tens to several hundreds of ohms is installed when measuring leakage current, and a shunt resistor with a low resistance value of several ohms is installed when measuring load current. This is in consideration of the amplitude of the AC current, and this document does not describe anything about sensitivity to the frequency of the AC current.

[0044] The advantages of the current measurement system 20 of this embodiment will be described using a comparative example of the current measurement system 20 of this embodiment. FIG. 6 is a graph showing the frequency characteristics of the sensitivity of the current measurement system of the comparative example. Unlike the current measurement system 20 of this embodiment, the current measurement system of the comparative example has a saturation frequency P1 lower than the fundamental frequency of the AC current I1 to be measured and below the lower limit of the measurement range. In other words, the sensitivity of the current measurement system 20 of the comparative example does not have frequency dependency as shown in FIG. 6 (the magnitude of the current I1 is constant in FIG. 6). In other words, the sensitivity of the current measurement system of the comparative example is constant regardless of the frequency.

[0045] Figures 7 and 9 are graphs showing frequency components of the waveform of the output voltage V2 obtained by the current measurement system 20 of this embodiment, and Figures 8 and 10 are graphs showing frequency components of the waveform of the output voltage V2 obtained by a current measurement system of a comparative example. Note that the frequency scales in Figures 7 to 10 are merely examples. The same applies to Figures 11 to 14.

[0046] 7 and 8 show the magnitude of the frequency components of the waveform of the output voltage V2 obtained by the current measurement system 20 of this embodiment and the current measurement system of the comparative example, to which the AC current I1 of the same magnitude having frequencies f0, f1, ... is input, i.e., the sensitivity. As described above, the sensitivity (V2 / I1) of the current measurement system 20 of this embodiment increases as the frequency f increases, and the sensitivity of the current measurement system of the comparative example is constant regardless of the frequency f. For example, when the AC current I1 to be measured contains components of the fundamental frequency f0 and harmonic frequencies f1, f2, f3, f4, f5, ..., as shown in Figs. 7 and 8, the current measurement system 20 of this embodiment produces a larger output corresponding to the components of harmonic frequencies f1, f2, f3, f4, f5, ... than that of the current measurement system of the comparative example. Therefore, according to the current measurement system 20 of this embodiment, the components of harmonic frequencies f1, f2, f3, f4, f5, ... can be distinguished from the noise region R10. In the current measurement system of the comparative example, the components of harmonic frequencies f4, f5, . . . are in the noise region R10 and cannot be distinguished from the noise region R10.

[0047] 9 and 10 show frequency components of the output voltage of the current measurement system 20 in the embodiment to which the AC current I1 supplied to the motor of the drive device 31 is input, and the current measurement system of the comparative example, respectively. In particular, in this embodiment, the AC current I1 to be measured is a current supplied to the motor of the drive device 31. Therefore, the AC current I1 to be measured may include a torque component caused by torque fluctuations and the component of the above-mentioned focused portion, which is a component caused by a state change such as an abnormality of the device 30. FIG. 9 shows the torque component G21 of the current measurement system 20 in the embodiment and the component of the focused portion G22, and FIG. 10 shows the torque component G31 of the current measurement system of the comparative example and the component of the focused portion G32. In the torque components G21 and G31, the component of the fundamental frequency of the current I1 to be measured has the strongest output, and the output becomes weaker as the frequency becomes higher. On the other hand, in the components G22 and G32 of the focused portion, the output tends to become stronger at frequencies f1, f2, ... higher than the fundamental frequency f0 of the AC current I1 to be measured. Therefore, according to the current measuring system 20 of the present embodiment, the output of the component of interest can be made larger than that of the current measuring system of the comparative example.

[0048] As an example, Fig. 11 and Fig. 12 show waveform data (current waveform data) output from the current measurement system 20 of this embodiment on the frequency axis. Fig. 11 shows waveform data when the cutting tool is normal (when the device 30 is normal), and Fig. 12 shows waveform data when the cutting tool is defective (when the device 30 is abnormal). From Fig. 11 and Fig. 12, a change such as a singular part P10 is seen in the frequency axis waveform. This change is considered to be caused by a force applied to the rotor of the motor of the driving device 31 in a direction along the axis of rotation of one of the cutting tool and the workpiece relative to the other. Therefore, the extraction unit 12 extracts a portion of interest that may include a change caused by the thrust force applied to the driving device 31 from the frequency axis waveform. In the example of Fig. 3 and Fig. 4, the extraction unit 12 may extract a region of frequencies from 1000 Hz to 1200 kHz as a portion of interest from the frequency axis waveform.

[0049] 13 and 14 show frequency axis waveforms obtained from the waveform data (current waveform data) output from the current measurement system of the comparative example. FIG. 13 shows the waveform when the cutting tool is normal (when the device 30 is normal), and FIG. 14 shows the waveform when the cutting tool is defective (when the device 30 is abnormal). From FIG. 13 and FIG. 14, no change is seen between the two cases in the frequency axis waveform. Therefore, it is clear that it is difficult to determine whether the device 30 is abnormal using the current measurement system of the comparative example.

[0050] The determination unit 13 determines the state of the device 30 from a change caused by a component of the force applied to the driving device 31 in a specific direction. In this embodiment, the determination unit 13 determines the state of the device 30 based on the portion of interest extracted by the extraction unit 12. The states of the device 30 include normal, abnormal, and an unspecified state that is neither normal nor abnormal. In other words, the determination unit 13 determines whether the state of the device 30 is normal, abnormal, or an unspecified state.

[0051] The determination unit 13 determines the state of the device 30 from the portion of interest by using the trained models M11 and M12. The trained model M11 is designed to output an unknown value (degree of unknown) for a given input (portion of interest). The determination unit 13 provides the portion of interest obtained from the extraction unit 12 to the trained model M11, and determines whether the state of the device 30 is an unspecified state based on the value (unknown value) obtained from the trained model M11. For example, if the unknown value is equal to or greater than a threshold, the determination unit 13 may determine that the state of the device 30 is an unspecified state. Also, if the unknown value is less than the threshold, the determination unit 13 may determine that the state of the device 30 is not an unspecified state. Such a trained model M11 can be generated by unsupervised learning using the portion of interest when the device 30 is normal or abnormal as learning data (training sample). The trained model M12 is designed to output an abnormal value (degree of abnormality) for a given input (portion of interest). The determination unit 13 provides the portion of interest obtained from the extraction unit 12 to the trained model M12, and determines whether the state of the device 30 is normal or abnormal based on the value (abnormal value) obtained from the trained model M12. For example, if the abnormal value is equal to or greater than a threshold, the determination unit 13 may determine that the state of the device 30 is abnormal. Also, if the abnormal value is less than the threshold, the determination unit 13 may determine that the state of the device 30 is normal. Such a trained model M12 can be generated by supervised learning using learning data (dataset) that specifies the relationship between the label corresponding to the abnormal value and the portion of interest. The trained models M11 and M12 are stored in the storage unit 17. The storage unit 17 may store a set of trained models M11 and M12 for each type of cutting tool. In other words, the storage unit 17 may store multiple sets of trained models M11 and M12 that respectively correspond to multiple types of cutting tools.

[0052] The output unit 14 outputs the result of the judgment made by the judgment unit 13. The output unit 14 has, for example, an audio output device and a display. The display is, for example, a thin display device such as a liquid crystal display or an organic EL display. The output unit 14 may display the result of the judgment made by the judgment unit 13 on a display or may notify the result by an audio output device. The output unit 14 may also transmit the result of the judgment made by the judgment unit 13 as data to an external device or may accumulate the data. The output unit 14 does not need to have both an audio output device and a display. The output unit 14 may also output the result of the judgment made by the judgment unit 13 by email or the like.

[0053] The collection unit 15 collects and accumulates the data acquired by the acquisition unit 11. In this embodiment, the data acquired by the acquisition unit 11 includes waveform data from the measurement unit 21. The data collected by the collection unit 15 is used to generate and update the trained models M11 and M12.

[0054] The generating unit 16 generates the trained models M11, M12 used by the determining unit 13. The generating unit 16 generates the trained models M11, M12 by a machine learning algorithm using a predetermined amount or more of training data. The training data may be prepared in advance or may be generated from data accumulated by the collecting unit 15. By adopting the training data generated from the data accumulated by the collecting unit 15, it is expected that the accuracy of the state determination using the trained models M11, M12 can be further improved. In particular, even if it is determined to be an unspecified state, if there are cases where it may be determined to be normal or abnormal, additional learning is performed on the unspecified state that may be normal or abnormal, and the accuracy of the determination of normality or abnormality can be improved. The generation unit 16 evaluates the newly generated trained models M11, M12, and when the evaluation results of the trained models M11, M12 improve, the trained models M11, M12 stored in the storage unit 17 are replaced with the newly generated trained models M11, M12 to update the trained models M11, M12. As described above, the trained models M11, M12 can be generated by using unsupervised learning or supervised learning as appropriate depending on the contents of the state. As the unsupervised learning, typical dimensionality reduction methods such as principal component analysis, self-organizing map, and autoencoder can be used. As the supervised learning, a typical multilayer neural network having a supervised learning mechanism can be used.

[0055] In the diagnostic system 10, the acquisition unit 11, the extraction unit 12, the determination unit 13, the output unit 14, the collection unit 15, and the generation unit 16 can be realized by, for example, a computer system including one or more processors (microprocessors as an example) and one or more memories. That is, the one or more processors execute one or more programs stored in one or more memories to function as the acquisition unit 11, the extraction unit 12, the determination unit 13, the output unit 14, the collection unit 15, and the generation unit 16. The one or more programs may be pre-recorded in the memory, or may be provided via a telecommunication line such as the Internet, or recorded on a non-transitory recording medium such as a memory card.

[0056] (1.3) Operation Next, a brief explanation will be given of the basic operation of the diagnostic system 10. FIG.

[0057] The acquisition unit 11 acquires waveform data (current waveform data) indicating a waveform related to the AC current I1 supplied to the motor of the drive unit 31 of the device 30 from the measurement unit 21 (step S11). Next, the extraction unit 12 converts the waveform indicated by the waveform data acquired by the acquisition unit 11 into a frequency axis waveform, and extracts from the frequency axis waveform a portion including a change caused by a component of a specific direction of the force applied to the drive unit 31 (step S12). After this, the determination unit 13 uses a plurality of trained models M11 and M12 to determine the state of the device 30 from the portion extracted by the extraction unit 12 (step S13). Finally, the output unit 14 outputs the result of the determination by the determination unit 13 (step S14). In this way, the diagnosis system 10 can diagnose the mechanism driven by the drive unit 31 from the waveform data indicating the waveform related to the AC current I1 supplied to the drive unit 31, and present the result.

[0058] (2) Variations The embodiments of the present disclosure are not limited to the above-described embodiments. The above-described embodiments can be modified in various ways depending on the design, etc., as long as the object of the present disclosure can be achieved. Modifications of the above-described embodiments are listed below.

[0059] In one modification, the upper limit of the frequency measurement range of the current measurement system 20 is higher than the fundamental frequency f0 of the AC current I1 to be measured. In particular, the measurement range is set to include, in particular, harmonic components of the frequency components that contribute to the determination of the state of the device 30 by the determination unit 13. The upper limit of the measurement range is more than twice the fundamental frequency of the AC current I1. Furthermore, the upper limit may be more than five times, or more than ten times, the fundamental frequency of the AC current I1 to be measured. The lower limit of the measurement range is not particularly limited, but is higher than 0. As described above, since it is the harmonic components that contribute to the determination of the state of the device 30 by the determination unit 13, the lower limit may be the fundamental frequency of the AC current I1 to be measured, or may be higher than the fundamental frequency. In short, the frequency measurement range of the current measurement system 20 does not necessarily have to include the fundamental frequency of the AC current I1 to be measured.

[0060] In the measurement unit 21, the measurement coil 220 does not need to be configured by a single coil, and may be configured by one or more coils. Also, the shunt resistor 23 does not need to be configured by a single resistor, and may be configured by one or more resistors. Also, in the above embodiment, the output voltage V2 between both ends of the shunt resistor 23 is used as the output of the measurement unit 21, but the measurement unit 21 may include a circuit element such as an amplifier that amplifies the output voltage V2.

[0061] The current measurement system 20 does not need to include the analysis unit 24. Moreover, the measurement unit 21 does not need to include the core 221. The current sensor 22 does not need to be a current transformer, but only needs to have a function of measuring a current using a measurement coil that is magnetically coupled to a conductor through which the AC current I1 to be measured flows. In other words, the current sensor 22 can be a well-known type of current sensor other than a current transformer.

[0062] The determination unit 13 determines the state of the device 30 as one of normal, abnormal, and unspecified states, but is not limited thereto. The determination unit 13 may determine the degree of each of the normal, abnormal, and unspecified states. This allows the diagnostic system 10 to give different notifications depending on the degree of the normal, abnormal, and unspecified states. As an example, the diagnostic system 10 may notify that there is a high possibility of an abnormal or unspecified state when the degree of normality is low. In addition, the diagnostic system 10 may perform processing such as stopping the operation of the device 30 and issuing a notification when the degree of the abnormality and unspecified state exceeds a threshold value. Alternatively, the state of the device 30 is not limited to three types, namely, normal, abnormal, and unspecified, but may be four or more types, or may be two types.

[0063] Moreover, the diagnostic system 10 does not need to have the collection unit 15, the generation unit 16, and the storage unit 17. In other words, the diagnostic system 10 does not need to have a function of updating the trained models M11, M12, ... by itself. Moreover, the storage unit 17 does not need to store a plurality of trained models M11, M12, ....

[0064] Furthermore, the diagnostic system 10 may not include the extraction unit 12. For example, when the processing in the extraction unit 12 is performed by a user or another device, the diagnostic system 10 may not need to extract a portion including a change caused by a component of a force applied to the drive device 31 in a specific direction. Furthermore, the entire waveform indicated by the waveform data acquired by the acquisition unit 11 may be input, and the state of the device 30 may be obtained as an output from the trained models M11 and M12. In other words, the extraction of the portion including a change may be omitted.

[0065] Furthermore, the diagnostic system 10 does not need to have the output unit 14. As an example, the diagnostic system 10 may be capable of outputting the state of the device 30 determined by the determination unit 13 to the outside of the diagnostic system 10.

[0066] Furthermore, the diagnostic system 10 may be configured with a plurality of computers, and the functions of the diagnostic system 10 (particularly, the acquisition unit 11, the extraction unit 12, the determination unit 13, the output unit 14, the collection unit 15, and the generation unit 16) may be distributed among a plurality of devices. For example, the acquisition unit 11, the extraction unit 12, the determination unit 13, and the output unit 14 may be provided in a personal computer or the like installed in a facility where the equipment is located, and the generation unit 16 and the output unit 14 may be provided in an external server or the like. In this case, the diagnostic system 10 is realized by the cooperation of the personal computer and the server. Furthermore, at least a part of the functions of the diagnostic system 10 may be realized, for example, by the cloud (cloud computing).

[0067] The executing subject of the diagnostic system 10 described above includes a computer system. The computer system has a processor and a memory as hardware. The processor executes a program recorded in the memory of the computer system, thereby realizing the function of the executing subject of the diagnostic system 10 in the present disclosure. The program may be pre-recorded in the memory of the computer system, or may be provided through an electric communication line. The program may also be recorded and provided in a non-transitory recording medium such as a memory card, an optical disk, or a hard disk drive that can be read by the computer system. The processor of the computer system is composed of one or more electronic circuits including a semiconductor integrated circuit (IC) or a large scale integrated circuit (LSI). Here, the IC and LSI are referred to as ICs and LSIs, but the names may vary depending on the degree of integration, and may be called system LSIs, VLSIs (very large scale integration), or ULSIs (ultra large scale integration). A field programmable gate array (FGPA), which is programmed after the manufacture of the LSI, or a reconfigurable logic device that can reconfigure the connection relationship inside the LSI or set up the circuit partition inside the LSI, can also be used for the same purpose. The electronic circuits may be integrated into one chip, or may be distributed across multiple chips. The multiple chips may be integrated into one device, or may be distributed across multiple devices.

[0068] In the above embodiment, the device 30 is a lathe, but is not limited thereto. For example, the device 30 may be a pump. Specifically, the device 30 may be a vacuum pump. Vacuum pumps are used in various fields, such as the manufacture of semiconductor devices. In this case, the diagnostic system 10 may determine the state of an impeller or the deterioration of the impeller bearing as the state of the device 30. The device 30 may also be a component mounter. Specifically, the device 30 may be a robot (robot arm) for mounting (assembling) components. In this case, the diagnostic system 10 may determine the state of component mounting as the state of the device 30. The device 30 may also be a polishing device. Specifically, the device 30 may be a polishing device for performing chemical mechanical polishing. In this case, the diagnostic system 10 may determine the state of a polishing pad and a dresser as the state of the device 30.

[0069] (3) Description As is apparent from the above-described embodiment and modified examples, the present disclosure includes the following aspects. In the following, reference symbols are given in parentheses only to clarify the correspondence with the embodiment.

[0070] The first aspect is a current measurement system (20) including a current sensor (22) having a measurement coil (220) magnetically coupled to a conductor (32) through which an AC current (I1) to be measured flows, and a shunt resistor (23) electrically connected between both ends (220a, 220b) of the measurement coil (220). The current measurement system (20) has a saturation point at which an output voltage (V2) between both ends of the shunt resistor (23) is saturated with respect to the frequency of the AC current (I1) to be measured. The upper limit of a frequency measurement range is greater than the fundamental frequency of the AC current (I1) to be measured. The saturation frequency at the saturation point is equal to or greater than the upper limit. According to the first aspect, it is possible to improve sensitivity to frequency components higher than the fundamental frequency of the AC current (I1).

[0071] The second aspect is a current measurement system (20) based on the first aspect. In the second aspect, the correlation between the frequency of the AC current (I1) to be measured and the output voltage (V2) in the measurement range is expressed by a straight line with a positive slope. According to the second aspect, it is possible to improve sensitivity to frequency components higher than the fundamental frequency of the AC current (I1).

[0072] The third aspect is a current measurement system (20) based on the first or second aspect. In the third aspect, the output voltage V2 is expressed by the following equation 3 using the output voltage V2, the AC current I1 to be measured, the coupling coefficient k between the conductor (32) and the measurement coil (220), the frequency f of the AC current I1 to be measured, the self-inductance L1 of the measurement coil (220), the reactance R1 of the measurement coil (220), the resistance value R2 of the shunt resistor (23), and the number of turns N of the measurement coil (220).

[0073]

number

[0074] According to the third aspect, it is possible to improve the sensitivity to frequency components higher than the fundamental frequency of the alternating current (I1).

[0075] A fourth aspect is a current measurement system (20) based on any one of the first to third aspects. In the fourth aspect, the self-inductance and reactance of the measurement coil (220) and the resistance value of the shunt resistor (23) are such that the saturation frequency is equal to or greater than the upper limit of the measurement range. According to the fourth aspect, it is possible to improve sensitivity to frequency components higher than the fundamental frequency of the AC current (I1).

[0076] A fifth aspect is a current measurement system (20) based on any one of the first to fourth aspects. In the fifth aspect, the upper limit value of the measurement range is 10 times or more the fundamental frequency of the AC current (I1) to be measured. According to the fifth aspect, it is possible to improve sensitivity to frequency components higher than the fundamental frequency of the AC current (I1).

[0077] A sixth aspect is a current measurement system (20) based on any one of the first to fifth aspects. In the sixth aspect, the current sensor (22) further includes a core (221) at least a portion of which passes through the inside of the measurement coil (220). According to the sixth aspect, it is possible to improve sensitivity to frequency components higher than the fundamental frequency of the AC current (I1).

[0078] A seventh aspect is a current measuring system (20) based on any one of the first to sixth aspects. In the seventh aspect, the current measuring system (20) further includes an analysis unit (24) that performs frequency analysis on time series data of the output voltage (V2) to obtain data on harmonic components of the AC current (I1) to be measured. According to the seventh aspect, it is possible to improve sensitivity to frequency components higher than the fundamental frequency of the AC current (I1).

[0079] An eighth aspect is a diagnostic system (100) including a current measurement system (20) and a determination unit (13). The current measurement system (20) is any one of the current measurement systems of the first to seventh aspects that measures a current (I1) supplied to a drive device (31) of a device (30) as the AC current to be measured. The determination unit (13) determines a state of the device (30) based on an output of the current measurement system (20). According to the eighth aspect, it is possible to improve sensitivity to frequency components higher than the fundamental frequency of the AC current (I1). [Explanation of symbols]

[0080] 10 Diagnostic Systems 13 Judgment section 20 Current Measurement System 22 Current Sensor 220 Measuring coil 221 Core 23 Shunt Resistor 24 Analysis Department 30 equipment 31 Drive unit 32 Conductor I1 AC current V2 Output voltage

Claims

1. A current measurement method for measuring an AC current having a frequency within a measurement range flowing through a conductor using a current sensor and a shunt resistor, comprising: the current sensor having a measurement coil configured to magnetically couple to the conductor; the shunt resistor has both ends electrically connected to both ends of the measurement coil; In the current measuring method, an output voltage across the shunt resistor with respect to a frequency of the AC current increases as the frequency increases when the frequency is equal to or lower than a saturation frequency, and saturates when the frequency exceeds the saturation frequency; an upper limit value of the measurement range of the frequency is higher than a fundamental frequency of the AC current; a self-inductance of the measurement coil, a reactance of the measurement coil, and a resistance value of the shunt resistor are set so that the saturation frequency is equal to or greater than the upper limit value, The saturation frequency is P1, The reactance of the measuring coil is R1, The resistance value of the shunt resistor is R2, If the self-inductance of the measurement coil is L1, then The P1 satisfies the following formula: P1=(R1+R2) / (2π・L1) Current measurement method.

2. The saturation frequency is set so that the correlation between the frequency of the AC current and the output voltage is expressed by a straight line having a positive slope in the measurement range. The current measurement method according to claim 1 .

3. The upper limit value of the measurement range is 10 times or more the fundamental frequency of the AC current. The current measuring method according to claim 1 or 2.

4. The current sensor further includes a core having a portion passing through the inside of the measurement coil. The current measuring method according to any one of claims 1 to 3.

5. A further analysis step is performed to perform a frequency analysis on the time series data of the output voltage to obtain data on harmonic components of the AC current. The current measuring method according to any one of claims 1 to 4.

6. A diagnostic method for diagnosing a drive device that drives equipment, comprising: measuring the current of the drive device by the current measurement method according to any one of claims 1 to 5; determining a state of the device based on a result of the current measurement method; The driving device is supplied with the AC current to drive the device. Diagnostic methods.

Images