HEATER TERMINAL COVER, HEATER UNIT, AND HEAT TREATMENT APPARATUS

Abstract

To provide a heater terminal cover, a heater unit, and a thermal processor that can suppress powdering of a molybdenum disilicide heater more reliably.SOLUTION: A heater terminal cover 50 covers at least a part of terminals 11A and 11B of a heater 10, which are made of a molybdenum-containing material. The heater terminal cover 50 includes: a body 51 with cylindrical parts 58 surrounding the entire circumference of the outer edge part of exposed parts 23 of the terminals 11A and 11B; and a nozzle 61 in the body 51 for supplying an insert gas into the cylindrical parts 58.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a heater terminal cover, a heater unit, and a heat treatment apparatus. [Background technology]

[0002] 2. Description of the Related Art Heaters for heating a workpiece such as a semiconductor material are known (see, for example, Patent Documents 1 to 5).

[0003] As one type of the heater, a molybdenum disilicide heater may be used. A molybdenum disilicide heater is mainly composed of molybdenum disilicide, and is usually formed in a rod shape with a bent portion. This heater has a terminal portion and a heat generating portion. A metal film is formed on the surface of the terminal portion by spraying a metal such as aluminum. This metal film is connected to a power source via an electric wire or the like. Electric power output from the power source is transmitted to the heat generating portion via the electric wire and the metal film, and the heat generating portion generates heat. This heats the atmosphere in the furnace in which the workpiece is housed. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2012-114327 A [Patent Document 2] JP 2000-208236 A [Patent Document 3] Japanese Patent Application Publication No. 7-248193 [Patent Document 4] Special Publication No. 2-51234 [Patent Document 5] Japanese Utility Model Application Publication No. 5-61992 Summary of the Invention [Problem to be solved by the invention]

[0005] The temperature inside the furnace when the heater is in operation reaches a high temperature of nearly 1400°C, while the temperature of the terminal portion disposed outside the furnace is not significantly different from room temperature. Therefore, a temperature difference of 1000°C or more occurs between the terminal portion and the heating portion. Therefore, there is a region in the heater where the temperature reaches approximately 600°C. Molybdenum disilicide undergoes oxidation in a temperature range of approximately 350°C to 600°C. If the oxidation progresses as the heater is used for a long period of time, the oxide of molybdenum disilicide will pulverize. In other words, the pulverization phenomenon (pest) of molybdenum disilicide occurs. If the pulverization phenomenon of molybdenum disilicide progresses, the strength of the molybdenum disilicide will decrease, and there is a risk of breakage.

[0006] In order to suppress the pulverization of molybdenum disilicide, it is possible to supply an inert gas such as nitrogen gas to the temperature range portion of molybdenum disilicide that is easily oxidized, as described in Patent Document 1, for example. However, in the configuration described in Patent Document 1, a large cover is filled with the inert gas, and a large amount of the inert gas is consumed. Furthermore, if the cover is not airtight, the consumption of the inert gas may increase further.

[0007] In view of the above circumstances, the present invention aims to provide a heater terminal cover, a heater unit, and a heat treatment apparatus that can more reliably suppress powdering of a molybdenum disilicide heater while reducing the consumption of inert gas. [Means for solving the problem]

[0008] (1) In order to solve the above problems, a heater terminal cover according to one aspect of the present invention is a heater terminal cover that covers at least a part of a terminal of a heater including a terminal formed of a material containing molybdenum, the heater terminal cover including: a main body having a cylindrical portion configured to surround an outer periphery of the terminal over the entire periphery; and a nozzle formed in the main body for supplying an inert gas toward the inside of the cylindrical portion. The main body includes the cylindrical portion in which the nozzle is formed, an outer peripheral wall portion arranged to surround an outer periphery of the cylindrical portion, and a port for supplying the inert gas between the outer peripheral wall portion and the cylindrical portion. There are.

[0009] According to this configuration, by supplying the inert gas from the nozzle into the cylindrical portion, the atmosphere around the outer periphery of the terminal can be made into an inert gas atmosphere around the entire circumference of the terminal. This makes it possible to suppress the occurrence of pest caused by oxidation of molybdenum disilicide. Moreover, since the inert gas is supplied to a narrow area surrounded by the cylindrical portion, the inert gas can be more reliably supplied to the temperature range part of the outer periphery of the terminal that is easily oxidized, and the consumption of the inert gas can be reduced. Therefore, powdering of the molybdenum disilicide heater can be more reliably suppressed.

[0011] moreover The inert gas from the port travels between the outer peripheral wall and the cylindrical portion, and is further supplied to the inner space of the cylindrical portion through the nozzle in the cylindrical portion. The space between the outer peripheral wall and the cylindrical portion can function as a chamber space for the inert gas, so that the inert gas can be supplied from the nozzle to the inner space of the cylindrical portion at a more stable flow rate.

[0012] ( 2 The nozzles may be formed in a plurality of locations spaced apart from one another along the circumferential direction of the cylindrical portion.

[0013] According to this configuration, the inert gas supplied from the nozzle to the inner space of the cylindrical portion can be supplied more evenly in the circumferential direction of the heater terminal.

[0014] ( 3 ) There may be a pair of cylindrical portions provided to surround the pair of terminals, respectively, and the outer circumferential wall portion may surround the pair of cylindrical portions.

[0015] According to this configuration, the surroundings of each of the pair of terminals can be made to have an inert gas atmosphere with one heater terminal cover.

[0016] ( 4 ) The heater terminal cover may further include a seal member that seals the gap between the main body and the terminal.

[0017] With this configuration, it is possible to more reliably prevent oxygen from entering between the main body and the terminals from the outside of the heater terminal cover.

[0018] ( 5 ) One axial end portion of the cylindrical portion in the main body is configured to face a member to which the heater terminal cover is attached, and the sealing member may be arranged at the other axial end portion of the cylindrical portion.

[0019] With this configuration, the seal member is disposed at the other axial end portion, which is far from the high temperature portion where the heater terminal cover is attached, and thus the thermal load on the seal member can be reduced. Also, the material to which the heater terminal cover is attached prevents oxygen from entering the region between the cylindrical portion and the terminal at the one axial end portion of the cylindrical portion.

[0020] ( 6 The main body may be formed of a conductive material, and a cylindrical insulator may be disposed radially inward of the cylindrical portion.

[0021] According to this configuration, the main body can be made of a high-strength material, and short circuits between the main body and the heater terminals can be more reliably prevented.

[0022] ( 7 ) In order to solve the above problem, a heater unit according to one aspect of the present invention includes a heater including a terminal formed of a material containing molybdenum, and a heater terminal cover that covers at least a portion of the terminal.

[0023] ( 8 In order to solve the above problems, a heat treatment apparatus according to one aspect of the present invention has a heat treatment chamber for heat-treating a workpiece, and the heater unit for heating an atmosphere in the heat treatment chamber.

[0024] the above( 7 ), ( 8 ) the powdering of the molybdenum disilicide heater can be more reliably suppressed. Effect of the Invention

[0025] According to the present invention, powdering of the molybdenum disilicide heater can be more reliably suppressed. [Brief description of the drawings]

[0026] [Figure 1] FIG. 1 is a schematic cross-sectional view of a main part of a heat treatment apparatus according to one embodiment of the present invention. [Diagram 2] FIG. 2 is a perspective view showing a schematic view of a main part of a heater unit of the heat treatment apparatus. [Diagram 3] FIG. 3 is an enlarged view of a main part of the heater unit of FIG. [Figure 4] FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. [Diagram 5] FIG. 5 is a cross-sectional view taken along line VV in FIG. [Figure 6] FIG. 6 is a cross-sectional view of the main part of the modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0027] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0028] Fig. 1 is a schematic cross-sectional view of a main part of a heat treatment apparatus 1 according to one embodiment of the present invention. Fig. 2 is a schematic perspective view of a main part of a heater unit 3 of the heat treatment apparatus 1. Fig. 3 is an enlarged view of the main part of the heater unit 3 of Fig. 1. Fig. 4 is a cross-sectional view taken along line IV-IV in Fig. 3. Fig. 5 is a cross-sectional view taken along line VV in Fig. 3.

[0029] 1 to 5, heat treatment apparatus 1 is provided for performing heat treatment on object 100 to be treated. In this embodiment, heat treatment apparatus 1 is a heat treatment apparatus for manufacturing semiconductors, and is configured to be capable of performing oxidation treatment, diffusion treatment, etc. on disk-shaped object 100 to be treated. Heat treatment apparatus 1 is installed, for example, in a clean room of a factory. Note that heat treatment apparatus 1 may be used for manufacturing parts other than semiconductors, for example, for manufacturing electronic parts and metal parts.

[0030] The heat treatment apparatus 1 has a thermal insulator 2 , a heater unit 3 held by the thermal insulator 2 , and a tube 4 accommodated in a space 2 a within the thermal insulator 2 .

[0031] The insulator 2 is a housing of the heat treatment device 1. The insulator 2 is made of a heat insulating material such as ceramic, and constitutes the outer shell of the heat treatment device 1. The insulator 2 is formed in a hollow shape with an open lower end.

[0032] The tube 4 is formed, for example, mainly from quartz, and is surrounded by a heat insulator 2. The tube 4 is supported by a support member (not shown). The tube 4 is formed in a cylindrical shape and has a closed upper end. The tube 4 forms a heat treatment chamber 5 for heat treating the workpiece 100. The lower end of the tube 4 is open downward, and is configured so that a boat 6 can be inserted and removed from the tube 4. The workpiece 100 is placed on the boat 6.

[0033] The heater unit 3 is provided to heat the atmosphere in the heat treatment chamber 5. A plurality of heater units 3 are installed on the insulator 2 and supported by the insulator 2. A plurality of heater units 3 (e.g., two) are arranged in the circumferential direction of the insulator 2, and one or more are arranged in the vertical direction. Since each heater unit 3 has the same configuration, the configuration of one heater unit 3 will be described below.

[0034] The heater unit 3 includes a heater 10 including a pair of terminals 11A, 11B formed of a material containing molybdenum, and a heater terminal cover 50 that covers at least a portion of the terminals 11A, 11B.

[0035] The heater 10 is provided to heat the heat treatment chamber 5 in the tube 4. The heater 10 is a molybdenum disilicide heater. In this embodiment, the maximum temperature of the heater 10 is about 1400° C. By using a molybdenum disilicide heater as the heater 10, the atmosphere in the tube 4 can be heated quickly. In this embodiment, the heater 10 is formed symmetrically (symmetrical in the left-right direction of FIG. 4). In this embodiment, the heater 10 is formed in an elongated shape, and is formed in a circular shape in a cross section perpendicular to the longitudinal direction of the heater 10. The heater 10 may be formed in a flat plate shape, and the specific cross-sectional shape of the heater 10 is not limited.

[0036] The heater 10 has a main body 12 formed mainly of molybdenum disilicide, and metal parts 13, 13 formed on a pair of ends of the main body 12. The main body 12 is formed in a long, thin shaft shape. Each metal part 13, 13 is a conductive member such as an aluminum alloy. The main body 12 and the metal parts 13, 13 form a heat generating part 14 and a pair of terminals 11A, 11B in the heater 10. That is, the heater 10 has the heat generating part 14 and a pair of terminals 11A, 11B.

[0037] The heating portion 14 is a portion that generates heat when power is supplied to the heater 10. The heating portion 14 is a part of the main body portion 12, and is disposed in the space 2a within the thermal insulator 2. In this embodiment, the heating portion 14 is formed in a U-shape. The shape of the heating portion 14 may be other shapes such as a corrugated shape, and the specific shape is not limited. In this embodiment, the diameter of the heating portion 14 is smaller than the diameter of the pair of terminals 11A, 11B. The pair of terminals 11A, 11B are continuous with the pair of ends of the heating portion 14.

[0038] Each of the terminals 11A and 11B has a connection portion 16 that extends along the inner wall surface 2d of the insulator 2 in the space 2a in the insulator 2 and is connected to the heat generating portion 14, a curved portion 17 that bends toward the outside of the insulator 2 as it moves away from the heat generating portion 14 in the space 2a in the insulator 2, and an extension portion 18 that is continuous with the curved portion 17 and extends toward the outside of the insulator 2. Although not shown in Figs. 1 and 3, the terminal 11B has a shape that is symmetrical to the terminal 11A (symmetrical in a direction perpendicular to the paper surface of Figs. 1 and 3). The connection portion 16 may extend in the vertical direction, may extend in the horizontal direction, or may extend in both the vertical direction and the horizontal direction. In this embodiment, the extension portion 18 extends linearly, and preferably extends horizontally.

[0039] The connection portion 16 and the curved portion 17 are formed by the main body 12, which is mainly composed of molybdenum disilicide. Moreover, most of the extension portion 18 is formed by the main body 12, and the remaining part of the extension portion 18, that is, a terminal end portion 22, is formed by the main body 12 and the metal portions 13, 13. In other words, the extension portion 18 has an extension portion main body 21 formed by the main body 12, and a terminal end portion 22 formed by the main body 12 and the metal portions 13, 13.

[0040] A large portion of the extension portion body 21 is disposed within the through-hole portion 2b formed in the insulator 2 and is supported by the insulator 2. A portion of the extension portion body 21 is disposed outside the insulator 2 and serves as an exposed portion 23 that is exposed from the insulator 2. A portion of the exposed portion 23 of the extension portion body 21 is covered by a heater terminal cover 50. The terminal end portion 22 is continuous with the protruding portion 23 of the extension portion body 21.

[0041] A bus bar 24 is connected to each terminal end 22 of the pair of terminals 11A, 11B. In this embodiment, the bus bar 24 is covered with a cover 25 made of an insulating material. The pair of terminals 11A, 11B is electrically connected to a power source (not shown) using the bus bar 24 or the like.

[0042] In the heater 10 having the above configuration, the exposed portions 23 of the pair of terminals 11A, 11B near the insulator 2 reach a temperature of about 350°C to 600°C when the heat generating portion 14 is generating heat. In this temperature range, oxidation of the molybdenum disilicide of the main body 12 is promoted, and the molybdenum disilicide is likely to be pulverized. On the other hand, even if the temperature of the main body 12 is at the temperature at which oxidation is likely to occur, the pulverization of the main body 12 can be suppressed by creating a low-oxygen atmosphere around the main body 12. The heater terminal cover 50 creates a low-oxygen atmosphere around each exposed portion 23 of the main body 12 by supplying an inert gas around each exposed portion 23 of the main body 12. An example of the inert gas is nitrogen gas. Note that, as long as it is possible to create a low-oxygen atmosphere in the portions of the terminals 11A, 11B at a temperature at which pulverization occurs, a gas other than nitrogen gas may be used, and the specific type of gas is not limited.

[0043] As described above, the heater terminal cover 50 is disposed so as to cover a part of the exposed portions 23 of the terminals 11A, 11B that are disposed outside the insulator 2. The heater terminal cover 50 is disposed along the outer wall surface 2c of the insulator 2, and in this embodiment, is fixed to the insulator 2. The heater terminal cover 50 is formed in a hollow block shape that surrounds the periphery of the exposed portions 23, 23 of the pair of terminals 11A, 11B.

[0044] The heater terminal cover 50 has a main body 51 , insulators 52 , 52 held by the main body 51 , a seal member 53 , and a pressing member 54 for attaching the seal member 53 to the main body 51 .

[0045] In this embodiment, the main body 51 is formed using a metal material such as stainless steel, and can be said to be formed from a conductive material. The main body 51 is arranged along the outer wall surface 2c of the thermal insulator 2. The main body 51 is formed in a container shape that accommodates each exposed portion 23. In this embodiment, the main body 51 is formed by subjecting a metal plate to sheet metal processing or the like.

[0046] The main body 51 has a pair of side walls, that is, a first side wall 55 and a second side wall 56, and an outer circumferential wall portion 57 and cylindrical portions 58, 58 disposed between the first side wall 55 and the second side wall 56.

[0047] In this embodiment, the first side wall 55 and the second side wall 56 are arranged parallel to each other. The first side wall 55 is aligned along, for example, a flat portion of the outer wall surface 2c of the thermal insulator 2, and the second side wall 56 is spaced a predetermined distance from the first side wall 55 in a direction away from the thermal insulator 2. In this embodiment, the first side wall 55 and the second side wall 56 are formed in a rectangular plate shape. When viewed from the longitudinal direction of the parallel exposed portions 23, 23 of the pair of terminals 11A, 11B, the shape of the second side wall 56 is larger than the shape of the first side wall 55. The first side wall 55 is formed with a pair of through holes 55a, 55a through which the pair of terminals 11A, 11B penetrate. Similarly, the second side wall 56 is formed with a pair of through holes 56a, 56a through which the pair of terminals 11A, 11B penetrate.

[0048] The outer peripheral wall portion 57 is connected to the first side wall 55 and the second side wall 56. The outer peripheral wall portion 57 is formed in an annular shape, and in this embodiment, is formed in a quadrangular prism shape. The outer peripheral wall portion 57 may be formed in a polygonal tubular shape other than a rectangle, or may be formed in a cylindrical or elliptical shape. One end of the outer peripheral wall portion 57 is continuous with the outer peripheral edge portion of the first side wall 55. The other end of the outer peripheral wall portion 57 is fixed to a part of the second side wall 56 that is inside the outer peripheral edge portion of the second side wall 56. As a result, in the second side wall 56, the part of the outer peripheral wall portion 57 that protrudes outward becomes a flange 56b. The outer peripheral wall portion 57 is arranged to surround the outer periphery of the tubular portions 58, 58.

[0049] The cylindrical portions 58, 58 are configured to surround the outer periphery of the exposed portions 23, 23 of the terminals 11A, 11B over the entire circumference, and in this embodiment, a pair is provided to surround each of the pair of exposed portions 23, 23. Each cylindrical portion 58 is connected to the first side wall 55 and the second side wall 56. In this embodiment, each cylindrical portion 58 is formed in a cylindrical shape. Note that each cylindrical portion 58 may be formed in a shape that surrounds the outer periphery of the corresponding exposed portions 23, 23 of the terminals 11A, 11B, and may be formed in a polygonal cylindrical shape other than a cylindrical shape, or may be formed in an elliptical shape. One end of each cylindrical portion 58 is continuous with the corresponding through hole portion 55a, 55a of the first side wall 55. The other end of each cylindrical portion 58 is continuous with the corresponding through hole portion 56a, 56a of the second side wall 56. Each cylindrical portion 58 is disposed so as to be surrounded by the outer circumferential wall portion 57, and surrounds the entire periphery of the corresponding exposed portions 23, 23 of the pair of terminals 11A, 11B.

[0050] With the above configuration, the first side wall 55, the second side wall 56, the outer peripheral wall portion 57, and the pair of cylindrical portions 58, 58 of the main body 51 form a chamber 59. The chamber 59 forms a space surrounded by the first side wall 55, the second side wall 56, the outer peripheral wall portion 57, and the pair of cylindrical portions 58, 58, and an inert gas is supplied into the chamber 59. More specifically, a port 60 is formed in the main body 51. The port 60 is provided to supply an inert gas to the space between the outer peripheral wall portion 57 and the cylindrical portions 58, 58, i.e., into the chamber 59, and is formed in the outer peripheral wall portion 57 in this embodiment. The port 60 may be formed in another member of the main body 51, such as the second side wall 56.

[0051] The port 60 includes a through hole formed in the main body 51, and an inert gas supply pipe 63 is connected to the port 60. The inert gas supply pipe 63 is connected to an inert gas supply source (not shown) such as a gas cylinder in which inert gas is stored. The inert gas is introduced from the inert gas supply source through the inert gas supply pipe 63 into the chamber 59. The inert gas in the chamber 59 is supplied to the periphery of the exposed parts 23, 23 of the pair of terminals 11A, 11B, i.e., the inner spaces 64, 64 of the insulators 52, 52 through nozzles 61 formed in each cylindrical portion 58 of the main body 51 and nozzles 62 formed in each insulator 52, 52. The flow of the inert gas is indicated by an arrow F in the figure.

[0052] The nozzles 61 are provided to supply an inert gas toward the inside (inner space 64) of each cylindrical portion 58. The nozzles 61 are formed along the radial direction of the corresponding cylindrical portions 58, 58, and penetrate the corresponding cylindrical portions 58, 58. At least one nozzle 61 is formed in each cylindrical portion 58. In this embodiment, a plurality of nozzles 61 are formed in each cylindrical portion 58, spaced apart from each other along the circumferential direction of the cylindrical portion 58, and preferably, a plurality of nozzles are formed at equal pitches in the circumferential direction of the cylindrical portion 58. The number of nozzles 61 in each cylindrical portion 58 is, for example, 2, 3, or 4 (4 in this embodiment), and is, for example, 5 or more.

[0053] Each nozzle 61 is formed, for example, in a circular shape when viewed in the radial direction of the corresponding cylindrical portion 58, 58. The diameter of each nozzle 61 is not particularly limited. In this embodiment, the position of the nozzle 61 in the axial direction of the exposed portion 23 is the center of each cylindrical portion 58, but does not have to be the center of each cylindrical portion 58. A cylindrical insulator 52 is disposed radially inward of each cylindrical portion 58.

[0054] The insulators 52, 52 are provided to prevent a short circuit between the main body 51 and the terminals 11A, 11B. In this embodiment, each insulator 52 is made of quartz. The insulators 52, 52 are formed in a shape that conforms to the shape of the inner circumferential surface of the corresponding cylindrical portion 58, 58, and in this embodiment, are formed in a cylindrical shape.

[0055] In this embodiment, the distance D1 between the inner circumferential surface of the insulator 52 and the exposed portion 23 of the corresponding terminal 11A, 11B is equal to or smaller than the diameter D2 of the exposed portion 23. It is preferable that the distance D1 is equal to or smaller than about three times the diameter D2 of the exposed portion 23. By setting the upper limit of the distance D1 in this manner, it is possible to reduce the space between the insulator 52 and the corresponding exposed portion 23 (the inner space 64 to which the inert gas is supplied) and supply a sufficient amount of inert gas to the space around the exposed portion 23 in the temperature range where the powdering of molybdenum disilicide occurs, i.e., the inner space 64 of the insulator 52.

[0056] The nozzle 62 is provided to supply the inert gas toward each exposed portion 23, 23 in cooperation with the nozzle 61. The nozzle 62 is formed along the radial direction of the corresponding insulator 52, 52, and penetrates the corresponding insulator 52, 52. The number of the nozzles 62 of each insulator 52 is the same as the number of the nozzles 61 of the corresponding cylindrical portion 58, 58. The nozzles 62 of each insulator 52 are arranged side by side with the nozzles 61 of the corresponding cylindrical portion 58, 58 in the radial direction of the corresponding cylindrical portion 58, 58. Each nozzle 62 is formed, for example, in a circular shape when viewed in the radial direction of the corresponding insulator 52, 52. The diameter of each nozzle 62 is not particularly limited.

[0057] With the above-mentioned configuration, the inert gas in the chamber 59 is supplied through the nozzles 61, 62 to the periphery of the exposed portions 23, 23 of the pair of terminals 11A, 11B, i.e., to the inner spaces 64, 64 of the insulators 52, 52. One end of the chamber 59 is aligned along the outer wall surface 2c of the insulator 2. Meanwhile, a seal member 53 is disposed at the other end of the chamber 59. That is, the first side wall 55 as one axial end portion of the cylindrical portions 58, 58 in the main body 51 is configured to face the insulator 2 to which the heater terminal cover 50 is attached. Meanwhile, the seal member 53 is disposed at the other axial end portion of the cylindrical portions 58, 58.

[0058] The sealing member 53 seals the gap between the main body 51 and the exposed portions 23, 23 of the terminals 11A, 11B. The sealing member 53 may hermetically seal the gap between the main body 51 and the exposed portions 23, 23, or may provide a gap to promote the flow of inert gas inside the heater terminal cover 50. The sealing member 53 is a member having a heat resistance of 600°C or higher, and in this embodiment is a ceramic cloth, which is a flexible sheet.

[0059] The seal member 53 is disposed along the outer surface of the second side wall 56. A pair of through holes 53a, 53a are formed in the seal member 53. The exposed portions 23, 23 of the pair of terminals 11A, 11B penetrate the pair of through holes 53a, 53a, respectively. It is preferable that each through hole 53a contacts the outer peripheral surface of the corresponding exposed portion 23, 23 over the entire circumferential area of ​​the exposed portion 23, 23. The seal member 53 is disposed between the second side wall 56 and the pressing member 54.

[0060] The pressing member 54 is provided to attach the seal member 53 to the main body 51. The pressing member 54 presses the seal member 53 against the main body 51. The pressing member 54 is formed of, for example, the same material as the material of the main body 51. The material of the pressing member 54 may be different from the material of the main body 51. The pressing member 54 is substantially a rigid plate. In this embodiment, the pressing member 54 is formed in a rectangular plate shape. The pressing member 54 may have any configuration capable of pressing the seal member 53 against the second side wall 56, and the specific shape of the pressing member 54 is not limited.

[0061] Through-hole portions 54a, 54a are formed in the pressing member 54. The through-hole portions 54a, 54a are provided as portions through which the exposed portions 23, 23 of the pair of terminals 11A, 11B penetrate, and to allow bending deformation of the portions of the sealing member 53 surrounding the through-hole portions 53a, 53a. The through-hole portions 54a, 54a are adjacent to the corresponding through-hole portions 53a, 53a, respectively, and are formed to have a diameter larger than the diameter of the corresponding through-hole portions 53a, 53a.

[0062] A plurality of seal fixing members 65 are disposed on the outer periphery of the pressing member 54. The seal fixing members 65 are, for example, screw members. In this embodiment, the seal fixing members 65 are disposed at each of the four corners of the pressing member 54. Each seal fixing member 65 penetrates the pressing member 54 and the seal member 53, and is screw-coupled to a female threaded portion 56c formed on the flange 56b of the second side wall 56. As a result, the pressing member 54 attaches the seal member 53 to the second side wall 56 of the main body 51, and is supported by the second side wall 56.

[0063] In addition, a plurality of main body fixing members 66 are arranged on the outer periphery of the pressing member 54. The main body fixing members 66 are, for example, screw members. In this embodiment, a pair of main body fixing members 66 are arranged above and below at the center in the left-right direction of the pressing member 54. Each main body fixing member 66 penetrates the pressing member 54, the sealing member 53, and the flange 56b of the second side wall 56, and is further screwed to, for example, a female thread portion formed in the thermal insulator 2. As a result, the heater terminal cover 50 including the main body 51, the sealing member 53, and the pressing member 54 is supported by the thermal insulator 2.

[0064] With the above-mentioned configuration, the inert gas in the chamber 59 is supplied through the nozzles 61, 62 to the corresponding inner spaces 64, 64 of the insulators 52, 52, and is discharged mainly toward the heat insulator 2 side.

[0065] As described above, according to this embodiment, the inert gas from the nozzles 61, 62 is supplied into the cylindrical portions 58, 58, so that the atmosphere around the exposed portions 23, 23 of the terminals 11A, 11B can be made into an inert gas atmosphere over the entire circumference of the exposed portions 23, 23. This makes it possible to suppress the occurrence of pest caused by oxidation of molybdenum disilicide. Moreover, since the inert gas is supplied to the narrow inner spaces 64, 64 surrounded by the cylindrical portions 58, 58, the inert gas can be more reliably supplied to the temperature range portion (exposed portions 23, 23) that is easily oxidized among the outer periphery of the terminals 11A, 11B. Therefore, the powdering of the molybdenum disilicide heater 10 can be more reliably suppressed. Furthermore, since the narrow inner spaces 64, 64 in the cylindrical portions 58, 58 are only required to be made into an inert gas atmosphere, the consumption of the inert gas can be reduced.

[0066] Furthermore, according to this embodiment, the inert gas from the port 60 advances between the outer peripheral wall portion 57 and the cylindrical portions 58, 58, and is further supplied to the inner spaces 64, 64 of the cylindrical portions 58, 58 through the nozzles 61, 62. Since the space between the outer peripheral wall portion 57 and the cylindrical portions 58, 58 can function as a chamber space for the inert gas, the inert gas can be supplied from the nozzles 61, 62 to the inner spaces 64, 64 of the cylindrical portions 58, 58 at a more stable flow rate.

[0067] Furthermore, according to the present embodiment, the nozzles 61, 62 are formed at intervals along the circumferential direction of the corresponding cylindrical portions 58, 58. With this configuration, the inert gas supplied from the nozzles 61, 62 to the inner spaces 64, 64 of the cylindrical portions 58, 58 can be supplied more evenly in the circumferential direction of the heater terminals 11A, 11B.

[0068] According to the present embodiment, a pair of cylindrical portions 58 are provided to surround the pair of terminals 11A, 11B, respectively, and the outer circumferential wall portion 57 surrounds the pair of cylindrical portions 58, 58. According to this configuration, the single heater terminal cover 50 can create an inert gas atmosphere around the exposed portions 23, 23 of the pair of terminals 11A, 11B.

[0069] According to the present embodiment, the sealing member 53 seals between the exposed portions 23, 23 of the pair of terminals 11A, 11B and the main body 51. This configuration can more reliably prevent oxygen from entering the inner spaces 64, 64 from the outside of the heater terminal cover 50.

[0070] According to this embodiment, the first side wall 55, which is one axial end portion of the cylindrical portions 58, 58 of the main body 51, is disposed to face the insulator 2 to which the heater terminal cover 50 is attached, and the seal member 53 is disposed at the other axial end portion (the portion on the second side wall 56 side) of the cylindrical portions 58, 58. According to this configuration, by disposing the seal member 53 in a portion having a low temperature far from the high temperature portion to which the heater terminal cover 50 is attached, the thermal load on the seal member 53 can be reduced. Also, the intrusion of oxygen into the region between the cylindrical portions 58, 58 near the first side wall 55 and the corresponding exposed portions 23, 23 of the pair of terminals 11A, 11B is suppressed by the insulator 2 to which the heater terminal cover 50 is attached.

[0071] Moreover, according to this embodiment, the main body 51 is made of a conductive material, and cylindrical insulators 52, 52 are arranged radially inward of the cylindrical portions 58, 58. With this configuration, the main body 51 is made of a high-strength material (stainless steel in this embodiment), and short circuits between the main body 51 and the heater terminals 11A, 11B can be more reliably suppressed.

[0072] Although the embodiment of the present invention has been described above, the present invention is not limited to the above-mentioned embodiment, and various modifications can be made to the present invention as long as they fall within the scope of the claims.

[0073] (1) In the above embodiment, the seal member 53 is provided on the second side wall 56 side of the main body 51. However, this is not necessarily the case. As shown in FIG. 6, which is a cross-sectional view of the main part of the modified example, the seal member 53 may be provided on the first side wall 55 side in addition to the second side wall 56 side of the main body 51. The seal member 53 on the first side wall 55 side is sandwiched between the first side wall 55 and the insulator 2, and the corresponding exposed parts 23, 23 of the pair of terminals 11A, 11B are passed through the pair of through-hole parts 53a, 53a. According to this modified example, both axial ends of the inner space 64, 64 of the insulator 52, 52 can be blocked by the pair of seal members 53, 53. This can reduce the amount of inert gas leaking to the outside in the inner space 64, 64 of the insulator 52, 52. Therefore, the consumption of the inert gas can be reduced.

[0074] (2) In the above embodiment, an example has been described in which the heater terminal cover 50 is fixed to the insulator 2. However, the member on which the heater terminal cover 50 is installed is not limited, and may be a member other than the insulator 2.

[0075] (3) In the above embodiment, a configuration has been described as an example in which a portion of the exposed portions 23, 23 of the pair of terminals 11A, 11B of the heater 10 is surrounded by the heater terminal cover 50. However, the heater terminal cover 50 may be configured to surround at least a portion of the periphery of the pair of terminals 11A, 11B of the heater 10, and the specific configuration is not limited.

[0076] (4) In the above embodiment, the exposed portions 23, 23 of the pair of terminals 11A, 11B are surrounded by one heater terminal cover 50. However, a heater terminal cover may be provided for each of the terminals 11A, 11B. In this case, one heater terminal cover is configured to surround one terminal.

[0077] (5) In the above embodiment, the main body 51 is formed from a conductive material and the insulators 52, 52 are provided. However, the insulators 52, 52 may be omitted. When the insulators 52, 52 are omitted, the main body 51 is preferably made of an insulating material.

[0078] (6) In the above embodiment, the nozzle 61 is formed in each cylindrical portion 58. However, the nozzle 61 may be formed in a portion other than the cylindrical portion 58 as long as it can supply an inert gas to the inner space 64 of each cylindrical portion 58. The nozzle 61 may be formed, for example, by a pipe extending from the second side wall 56 and opening in the inner spaces 64, 64, and the specific shape of the nozzle 61 is not limited. [Industrial Applicability]

[0079] The present invention is applicable to a heater terminal cover, a heater unit, and a heat treatment device. [Explanation of symbols]

[0080] 1 Heat treatment equipment 3 Heater unit 5. Heat Treatment Room 10 Heater 11A,11B terminal 50 Heater terminal cover 51 Main unit 52 Insulators 53 Sealing material 57 Outer wall 58 Cylindrical part 60 Ports 61 Nozzle 100 Processing object

Claims

1. A heater terminal cover for covering at least a portion of a terminal of a heater including a terminal formed of a material including molybdenum, a main body having a cylindrical portion configured to completely surround an outer periphery of the terminal; a nozzle formed in the main body for supplying an inert gas toward the inside of the cylindrical portion; Equipped with A heater terminal cover, wherein the main body includes a cylindrical portion in which the nozzle is formed, an outer peripheral wall portion arranged to surround the outer periphery of the cylindrical portion, and a port for supplying the inert gas between the outer peripheral wall portion and the cylindrical portion.

2. 2. The heater terminal cover according to claim 1, The heater terminal cover includes a plurality of nozzles formed at intervals along a circumferential direction of the cylindrical portion.

3. The heater terminal cover according to claim 1 or 2, a pair of the cylindrical portions are provided to surround the pair of the terminals, The heater terminal cover, wherein the outer peripheral wall portion surrounds the pair of cylindrical portions.

4. The heater terminal cover according to any one of claims 1 to 3, The heater terminal cover further comprises a sealing member that seals a gap between the main body and the terminal.

5. The heater terminal cover according to claim 4, an axial end portion of the cylindrical portion of the main body is configured to face a member to which the heater terminal cover is attached, The seal member is disposed at the other axial end portion of the cylindrical portion.

6. The heater terminal cover according to any one of claims 1 to 5, the body being formed of a conductive material; A heater terminal cover, comprising: a cylindrical insulator disposed radially inward of the cylindrical portion.

7. a heater including a terminal formed of a material including molybdenum; A heater terminal cover according to any one of claims 1 to 6, which covers at least a part of the terminal; The heater unit comprises:

8. a heat treatment chamber for heat treating the workpiece; a heater unit according to claim 7 for heating an atmosphere in the heat treatment chamber; The heat treatment device comprises:

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