Substrate storage container

Abstract

To provide a wafer storage container capable of preventing damage, etc., caused by wearing or eccentricity even if a resin pin is used, and further capable of improving a blocking effect between a container main body and a lid body by pulling and press-fitting the lid body into the container main body.SOLUTION: A wafer storage container comprises a lid body 10 fitted to an open front face of a container main body 1 for a semiconductor wafer and a lock mechanism 20 for the fitted lid body 10. The lock mechanism 20 consists of: an operation reel 21 which is rotated by an external operation; a connection bar 24 which is slid by the rotation of the operation reel 21; a lock claw 29 which is projected from the lid body 10 by sliding the connection bar 24; and a holder 37 with a plurality of groove cams for swinging the lock claw 29 and locking it to an inner periphery of the front face of the container main body 1. The lock claw 29 can be swung in a thickness direction of the lid body 10 by inserting a resin connection pin through the connection bar 24 and the lock claw 29, guide bosses are formed while protruding in both side parts of the lock claw 29, and both ends of the resin connection pin and the guide bosses are fitted into the groove cams in a slidable manner.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a substrate storage container used for transporting, storing, etc., semiconductor wafers in a semiconductor factory. [Background technology]

[0002] In semiconductor factories, substrate storage containers called FOUPs (Front Opening Unified Pods) are used to transport and store φ300 mm semiconductor wafers. This substrate storage container is equipped with a lid that fits into the open front of the container body that stores multiple semiconductor wafers, and a locking mechanism that locks the lid that fits into the front of the container body. The locking mechanism is installed in the lid, and this locking mechanism is operated by a lid opener that is standardized by the SEMI standard.

[0003] The lid is formed in a generally box shape that is detachably fitted to the open front of the container body, and has multiple openings for the locking mechanism drilled in its periphery. The locking mechanism is also composed of a pair of left and right operating reels that are supported by the lid and rotated by key operation from outside the lid opening / closing device, multiple pairs of connecting bars that move up and down with the rotation of each operating reel, and multiple locking claws that protrude from the openings in the periphery of the lid and can be engaged with locking holes in the inner periphery of the front of the container body (see Patent Documents 1, 2, and 3).

[0004] Each locking claw is bent into a curved, roughly L-shape, with the back surface near the bent part pivotally supported by the tip of the connecting bar via a metal pin so that it can swing, and a pressing roller that slides into the locking hole on the front inner circumference of the container body is pivotally supported by a metal pin at the tip, with a metal pin supported at the end and this metal pin supported near the opening of the lid. These multiple metal pins are, for example, φ1.0mm SUS pins, and are either strongly pressed into the hole at the tip of the connecting bar, the hole at the bent part of the locking claw, the hole at the tip, and the hole at the end, or inserted in a cantilever manner.

[0005] In the above, when the lid is fitted to the open front of the container body and locked, the lid opener fits the lid to the open front of the container body, and the operation key of the lid opener rotates each operation reel of the locking mechanism by a predetermined angle. Then, as the operation reel rotates, the pairs of connecting bars advance toward the peripheral edge of the lid, and as the connecting bars advance, the locking claws penetrate the recessed opening from inside the lid and protrude to the outside of the lid, and the protruding locking claws engage with the locking holes in the container body, and the lid fitted to the front of the container body is pressed in and locked by the locking of the locking claws.

[0006] On the other hand, when the lid is unlocked and removed from the front of the container body, the operation key of the lid opening / closing machine rotates each operating reel of the locking mechanism to its original reference position. Then, as the operating reel returns to its original rotation, the pairs of connecting bars that had advanced return to their original reference positions on the lid, and as the connecting bars return to their original positions, the protruding locking claws pass through the locking holes in the container body and the retraction openings to return to the inside of the lid. The return of the locking claws makes the lid that fits on the front of the container body removable, and the lid is removed by pulling it out from the front of the container body using the lid opening / closing machine. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] JP 2002-368074 A [Patent Document 2] JP 2005-306411 A [Patent Document 3] JP 2006-303015 A Summary of the Invention [Problem to be solved by the invention]

[0008] Conventional substrate storage containers are constructed as described above, and multiple metal pins are press-fitted or cantilever-inserted, but from the viewpoint of eliminating various adverse effects on the stored semiconductor wafers, it is desirable to use resin pins instead of metal pins as much as possible. However, simply changing the metal pins to resin pins may cause wear between the resin pins and the inner peripheral surface of the hole, or the resin pins may become eccentric and break.

[0009] In addition, in conventional substrate storage containers, the locking claws of the locking mechanism engage with the locking holes in the container body, thereby pressing the lid body into the front of the container body. However, if the lid body can be accurately pulled and pressed into a specified position within the container body after being fitted into the front of the container body, it is possible to improve the blocking effect between the container body and the lid body and more effectively prevent the intrusion of particles.

[0010] The present invention has been made in consideration of the above, and aims to provide a substrate storage container which can prevent wear, breakage due to eccentricity, etc., even when using plastic pins, and which can enhance the insulating effect between the container body and the lid by drawing the lid body into the container body and pressing it in. [Means for solving the problem]

[0011] In order to solve the above problems, the present invention provides a container that includes a lid that is fitted into an opening of a container body that stores a substrate, and a locking mechanism that locks the lid that is fitted into the opening of the container body, The locking mechanism includes an operating member supported by the lid and rotated by an external operation, a sliding member that slides as the operating member rotates, a locking member that can protrude from the peripheral edge of the lid as the sliding member slides, and a plurality of grooved cams that swing (swing) the locking member to engage (engage and stop) with the inner periphery of the opening of the container body, A plastic connecting pin is inserted through the tip of the sliding member and the locking member to allow the locking member to swing in the thickness direction of the lid, guide protrusions are formed on both sides of the locking member, and a plurality of groove cams are provided on both sides of the sliding member and the locking member, with both ends of the plastic connecting pin and a plurality of guide protrusions of the locking member each being slidably fitted into the plurality of groove cams.

[0012] The container body is formed as a front-open box capable of storing a plurality of semiconductor wafers in an aligned manner, and a locking hole for a locking member of a locking mechanism is provided on the inner periphery of the open front surface. The lid body includes a roughly box-shaped lid body that is removably fitted into the open front of the container body, and a surface plate that covers the open surface of the lid body and is exposed to the outside. A locking mechanism is interposed between the lid body and the surface plate, and an access hole is preferably provided on the peripheral portion of the lid body through which the locking member of the locking mechanism passes.

[0013] In addition, the locking mechanism may preferably have a slide member formed in a roughly plate shape with a number of cylindrical portions arranged side by side and protruding from its tip, and a resin connecting pin that passes through the multiple cylindrical portions of the slide member may be inserted into the locking member. Also, a holder member can be fitted to the slide member and locking member of the locking mechanism, and grooved cams can be formed on both sides of the holder member.

[0014] In addition, a plurality of cam plates that sandwich the slide member and the locking member can be formed on the cover, and a grooved cam can be formed on each of the plurality of cam plates. In addition, the tip of the locking member of the locking mechanism can be branched into two to form an approximately groove shape, and a pressure roller that contacts the inner periphery of the opening of the container body can be rotatably mounted between the branched tips of the locking member via a resin support pin. Also, at least one of the resin connecting pin and the resin support pin can be formed as a stepped pin having a reduced diameter portion on the circumferential surface.

[0015] In addition, the groove cam of the locking mechanism includes a first groove cam located closer to the slide member, a second groove cam connected to the tip of the first groove cam and extending from the front surface side of the lid body toward the back surface side of the lid body while inclining, and a third groove cam connected to the tip of the second groove cam and inclined toward the front surface side of the lid body, Before the locking mechanism locks the lid, the guide protrusion of the locking member is positioned on the first grooved cam, and the resin connecting pin is positioned near the connection between the second grooved cam and the third grooved cam, When the lid is locked by the locking mechanism, the guide protrusion of the locking member is located near the connection between the first groove cam and the second groove cam, and the resin connecting pin is located in the third groove cam, After the lid is locked by the locking mechanism, the guide projection of the locking member is positioned in the second grooved cam, and the resin connecting pin is positioned at the tip of the third grooved cam.

[0016] In addition, a guide protrusion of the locking member when the locking mechanism is locked is located near the connection between the first groove cam and the second groove cam, a guide protrusion of the locking member before the locking mechanism is locked is located on the first groove cam, an end of the plastic connecting pin before the locking mechanism is locked is located near the connection between the second groove cam and the third groove cam, and a guide protrusion of the locking member when or after the locking mechanism is locked is located on the second groove cam, an end of the plastic connecting pin when the locking mechanism is locked is located near the middle of the third groove cam, and an end of the plastic connecting pin after the locking mechanism is locked is located at the tip of the third groove cam.

[0017] Here, the substrate in the claims includes semiconductor wafers, glass substrates, mask substrates, etc., each having a diameter of at least φ300 mm or φ450 mm. The container body and the lid may be transparent, opaque, or translucent. The container body is primarily a front-open box, but may also be a top-open box or a bottom-open box. The groove cam of the locking mechanism may preferably be formed by at least a long second groove cam and a short third groove cam, forming a substantially V-shape. Furthermore, the stepped pin may have a required number of reduced diameter portions formed on at least a portion of the peripheral surface of the stepped pin.

[0018] According to the present invention, a resin connecting pin is used instead of a metal pin, so that the source of metal ions can be reduced. Also, according to the present invention, when the lid is fitted to the opening of the container body and the operating member of the locking mechanism is rotated, the slide member slides toward the peripheral edge of the lid, and the locking member protrudes from inside the lid to outside the lid while being guided by the groove cam. At this time, the locking member oscillates toward the back side of the lid while being guided by a part of the groove cam, and protrudes outside the lid at an angle toward the back side of the lid, and then oscillates from the back side of the lid to the front side while being guided by the remaining part of the groove cam, and engages with the inner periphery of the front surface of the container body. Effect of the Invention

[0019] According to the present invention, even if a plastic pin is used, it is possible to prevent wear, breakage due to eccentricity, etc. Also, since both ends of the plastic connecting pin and the guide protrusions of the locking member are slidably fitted into the groove cams, the lid can be pulled and pressed into the container body, and the effect of blocking between the container body and the lid can be improved.

[0020] According to the invention described in claim 2, by inserting a resin connecting pin that penetrates multiple tubular portions of the slide member into the locking member, the locking member can be supported so as to be able to swing at the tip of the slide member, and further, even if the slide member slides repeatedly, damage to the locking member can be effectively prevented. According to the invention described in claim 3, by fitting a holder member into the slide member and locking member of the locking mechanism and forming grooved cams on both sides of the holder member, the locking mechanism can be installed not only on new lid bodies but also on existing lid bodies.

[0021] According to the invention described in claim 4, by forming a plurality of cam plates on the cover body that sandwich the slide member and the locking member, and by forming a groove cam on each of the plurality of cam plates, it is possible to eliminate the need to prepare and fit separate holder members into the slide member and locking member of the locking mechanism. According to the invention described in claim 5, by rotatably mounting a pressure roller that contacts the inner periphery of the opening of the container body between the branched tips of the locking member via a resin support pin, it is possible to prevent the locking member from coming into strong contact with the inner periphery of the opening of the container body, causing friction and generating dust.

[0022] According to the invention described in claim 6, by forming the resin connecting pin as a stepped pin, it is possible to form unevenness on the peripheral surface of the resin connecting pin, which makes it possible to prevent the slide member and the locking member from shifting position or separating and falling off. Similarly, by forming the resin support pin as a stepped pin, it is possible to form unevenness on the peripheral surface of the resin support pin, which makes it possible to prevent the pressing roller from coming off the tip of the locking member and falling off.

[0023] According to the invention described in claim 7, the first, second and third grooved cams of the grooved cams into which the resin connecting pin and the guide protrusion of the locking member are fitted can be used to tilt the tip of the locking member backward on the back side of the lid, then forward on the front side of the lid again, and lock it onto the front inner circumference of the container body, achieving a two-stage swing with a large movable distance. Therefore, the lid fitted into the container body can be pulled and pressed into a specified position with high precision, improving the blocking effect between the container body and the lid. [Brief description of the drawings]

[0024] [Figure 1] 1 is an overall perspective view showing an embodiment of a substrate storage container according to the present invention. [Diagram 2] 1 is a perspective view showing a lid and a locking mechanism in an embodiment of a substrate storage container according to the present invention. [Diagram 3] 1 is an exploded perspective view showing a schematic relationship between a connecting bar, a holder, and a resin connecting pin in an embodiment of a substrate storage container according to the present invention; FIG. [Figure 4] 1 is a perspective view of a main portion that typically illustrates the relationship between an assembled connecting bar, a locking claw, and a holder in an embodiment of a substrate storage container according to the present invention. FIG. [Diagram 5]1 is a rear perspective view illustrating a schematic relationship between a connecting bar, a locking claw, and a holder in an embodiment of a substrate storage container according to the present invention. FIG. [Figure 6] 1 is a front view illustrating a schematic relationship between a connecting bar, a locking claw, and a holder in an embodiment of a substrate storing container according to the present invention; FIG. [Figure 7] 11 is a perspective view showing a schematic relationship between a resin connecting pin and a locking claw in an embodiment of a substrate storage container according to the present invention. FIG. [Figure 8] 1A to 1C are explanatory views showing resin support pins in an embodiment of a substrate storage container according to the present invention. [Figure 9] 1 is an exploded perspective view showing a schematic diagram of a locking claw in an embodiment of a substrate storage container according to the present invention. FIG. [Figure 10] 1 is a perspective view that illustrates a holder in an embodiment of a substrate storage container according to the present invention; [Figure 11] 1 is a cross-sectional explanatory view of a main portion showing a state before locking of a locking mechanism in an embodiment of a substrate storing container according to the present invention. FIG. [Figure 12] 12 is an explanatory cross-sectional view of a main portion showing a state in which a locking claw of the locking mechanism shown in FIG. 11 protrudes slightly during locking. FIG. [Figure 13] 13 is an explanatory cross-sectional view of a main portion showing a state after locking in which the protruding locking claw of the locking mechanism shown in FIG. 12 has swung and engaged with the locking hole of the container body, and is thus locked. FIG. [Figure 14] 13 is an overall perspective view showing a portion of the front surface of a container body, a lid, and a locking mechanism in a second embodiment of a substrate storing container according to the present invention. FIG. [Figure 15] 13 is a perspective view of a main portion showing a locking mechanism in a substrate storage container according to a second embodiment of the present invention. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] A preferred embodiment of the present invention will be described below with reference to the drawings. The substrate storage container in this embodiment is a FOUP equipped with a lid 10 which is removably fitted to the open front of a container body 1 which stores a plurality of substrates, i.e., semiconductor wafers, as shown in FIGS. 1 to 13, and a locking mechanism 20 which locks the lid 10 fitted to the front of the container body 1. The locking mechanism 20 is composed of a pair of operating reels 21 which rotate by operating a lid opening / closing device, multiple pairs of connecting bars 24 which slide with the rotation of each operating reel 21, multiple locking claws 29 which protrude from the peripheral portion of the lid 10 with the sliding of each connecting bar 24, and multiple holders 37 which swing and engage each locking claw 29 with the inner front periphery of the container body 1, thereby contributing to the achievement of Goal 9 of the SDGs (the United Nations' International Goals for Sustainable Development, which consist of 17 global goals and 169 targets (achievement criteria)) adopted at the United Nations Summit.

[0026] The semiconductor wafers, although not shown, are made of thin, brittle, high-quality silicon wafers, for example, φ300 mm, with a circuit pattern formed on the surface. They are stored inside the container body 1, and 25 of them are aligned vertically at predetermined intervals.

[0027] The container body 1 and the lid 10 are formed by combining a plurality of parts that are each injection molded with a molding material containing a required resin. Examples of the resin contained in the molding material include thermoplastic resins such as polycarbonate (PC) resin, cycloolefin polymer (COP) resin, cycloolefin copolymer (COC) resin, polypropylene (PP) resin, polyetherimide (PEI) resin, polyether ketone (PEK) resin, polyether ether ketone (PEEK) resin, polybutylene terephthalate (PBT) resin, polyacetal (POM) resin, and liquid crystal polymer, as well as alloys of these resins.

[0028] To these resins, conductive materials such as carbon fibers, carbon powder, carbon nanotubes, conductive polymers, etc., and various antistatic agents such as anionic, cationic, and nonionic are added as necessary. In addition, ultraviolet absorbers such as benzotriazoles, salicylates, cyanoacrylates, oxalic acid anilides, and hindered amines are added, and glass fibers, carbon fibers, etc. that improve rigidity are selectively added.

[0029] 1, 11 to 13, the container body 1 is injection molded into a front-open box with an opening at the front, and a pair of left and right support pieces for supporting a semiconductor wafer horizontally is provided on both inner side walls, and the pair of left and right support pieces are arranged at a predetermined interval in the vertical direction, and each support piece is formed as a long and narrow plate extending in the front-rear direction. The front of the container body 1 is formed by bending and projecting outward in the width direction from the peripheral wall of the container body 1 via a step portion, and the flat shoulder surface of the step portion defines a seal forming surface 2 for the lid 10. Locking holes 3 for locking are recessed and formed on both upper and lower sides of the inner periphery of the front of the container body 1, and each locking hole 3 is formed in a substantially rectangular shape.

[0030] As shown in Figures 1, 2, 11 to 13, the lid body 10 is an existing type that has a lid body 11 that is approximately rectangular in shape at the front and is removably fitted into the open front of the container body 1, and a surface plate 15 that covers the partially concave surface of the horizontally elongated lid body 11 and is exposed to the outside, and a locking mechanism 20 is installed between both sides of the surface of the lid body 11 and the surface plate 15.

[0031] The lid body 11 is formed, for example, in a shallow box-like cross section (or in a tray-like cross section), with openings 12 for a locking mechanism 20 that face the locking hole 3 of the container body 1 drilled through both upper and lower sides of the peripheral wall, and a vertically long front retainer that holds the front peripheral portion of the semiconductor wafer horizontally with an elastic piece is attached to the center of the back surface that faces the rear wall of the container body 1. A frame-shaped fitting groove 13 is provided around the peripheral portion of the back surface of the lid body 11, and an elastic seal gasket 14 that presses against the seal forming surface 2 of the container body 1 is fitted into this fitting groove 13.

[0032] The surface plate 15 is formed, for example, into a horizontally long transparent or opaque plate with an operation hole 16 for the locking mechanism 20 drilled through it near both sides of the center. A T-shaped operation key of a lid opening / closing device standardized by the SEMI standard passes through this operation hole 16, and when this operation key is rotated by a predetermined angle, the locking mechanism 20 is operated to perform a locking or unlocking operation.

[0033] As shown in Figures 1 to 13, the locking mechanism 20 is composed of a pair of left and right operating reels 21 supported by the lid body 10 and rotated by key operation from outside the lid body opener / closer, multiple pairs of connecting bars 24 that move back and forth in the vertical direction with the rotation of each operating reel 21, multiple locking claws 29 that protrude from the recessed openings 12 on the peripheral edge of the lid body 10 in conjunction with the advancement of each connecting bar 24 and can be engaged with locking holes 3 on the inner front circumference of the container body 1, and multiple holders 37 with grooved cams 41 that engage with each connecting bar 24 and the locking claws 29.

[0034] The operating reel 21, connecting bar 24, locking claw 29, and holder 37 of the locking mechanism 20 are injection molded from a molding material containing a required resin. Examples of the required resin for this molding material include polyetheretherketone (PEEK) resin, polycarbonate (PC) resin, polybutylene terephthalate (PBT) resin, polyacetal (POM) resin, polyetherimide (PEI) resin, polyethersulfone (PES) resin, polyphenylene sulfide (PPS) resin, polyamideimide (PAI) resin, and alloys thereof.

[0035] 1 and 2, the operation reel 21 is formed as a substantially convex disk with a reel cover attached via a rotary bearing to the center of the disk-shaped reel body, and is rotatably supported near the center on both sides of the surface of the cover body 11. The center 22 of the operation reel 21 consisting of the reel cover protruding toward the surface plate 15 faces the operation opening 16 of the surface plate 15, and is fitted into an operation key of a cover opening / closing device that penetrates the operation opening 16, so that the operation reel 21 is automatically rotated at a predetermined rotation angle. A pair of curved grooves 23 are drilled at intervals of 180° near the periphery of the operation reel 21, and each curved groove 23 is formed in a semicircular arc shape, and the end of a connecting bar 24 is connected to the curved groove 23.

[0036] 1 to 3, 5, 11 to 13, the multiple pairs of connecting bars 24 are slidably disposed on both sides of the surface of the lid body 11, and the pair of connecting bars 24 are located in the vertical direction of the operating reel 21. Each connecting bar 24 is formed in a generally elongated plate shape with a guide long hole oriented in the vertical direction, and a pair of tubular parts 25 are formed side by side at the tip and protrude from each other, each tubular part 25 being formed in a cylindrical shape, and a resin connecting pin 26 that penetrates the locking claw 29 is inserted into the pair of tubular parts 25.

[0037] As shown in Figures 3 to 5, 7, etc., the resin connecting pin 26 differs from conventional metal pins in that it is formed, for example, as a stepped pin of φ3 mm or φ4 mm from the same molding material as the locking mechanism 20, and has reduced diameter portions 27 formed on the circumferential surface between the tip and center, and on the circumferential surface between the center and end, to prevent misalignment or falling off.

[0038] A cylindrical latch boss 28 is formed integrally with the rear end of each connecting bar 24, and this latch boss 28 is loosely fitted so as to be slidable into the curved groove 23 of the operation reel 21. Due to this loose fitting of the latch boss 28, the connecting bar 24 moves up and down while being guided by the guide of the lid body 11 as the operation reel 21 rotates.

[0039] As shown in Figures 4 to 9 and 11 to 13, each locking claw 29 is formed as a generally groove-shaped block with a notched end, and is connected to the tip of the connecting bar 24 so as to be able to swing in the thickness direction (front-rear direction) of the lid 10. From the viewpoint of improving rigidity, this locking claw 29 is formed with a narrower width than the conventional type, and a resin connecting pin 26 that penetrates a pair of tubular portions 25 of the connecting bar 24 is axially supported between the center of both sides, and both ends of this resin connecting pin 26 are exposed.

[0040] A guide boss 30 parallel to the end of the resin connecting pin 26 is integrally formed on each end of both sides of the locking claw 29, and each guide boss 30 is formed in a cylindrical shape. In addition, a positioning guide 31 that can slide on the circumferential surface of the resin connecting pin 26 between the pair of cylindrical portions 25 is formed protrudingly near the center of the locking claw 29.

[0041] In addition, an enlarged diameter portion is formed on the inner surface of the hole through which the resin connecting pin 26 of the locking claw 29 passes, which is in close contact with the reduced diameter portion 27 of the resin connecting pin 26, and it is preferable that the close contact between the reduced diameter portion 27 and the enlarged diameter portion prevents the resin connecting pin 26 from shifting out of position.

[0042] The tip 32 of the locking claw 29 is branched into two and formed into a recess in the shape of an approximately groove, and a cylindrical pressing roller 33 that slides within the locking hole 3 of the container body 1 is axially mounted between the branched tip portions 32 of the locking claw 29 via a resin support pin 34.

[0043] 4, 5, 7 to 9, unlike conventional metal pins, the resin support pin 34 is formed as a stepped pin of φ3 mm or φ4 mm that penetrates the resin pressure roller 33 using the same molding material as the locking mechanism 20, and has a reduced diameter portion 35 formed on the circumferential surface between the tip and the center, and a flange 36 of an enlarged diameter that contacts the side of the tip 32 of the locking claw 29 is formed on the circumferential surface of the end portion to prevent displacement or falling off. From the viewpoint of stress dispersion, this resin support pin 34 is fixed to the tip 32 of the locking claw 29 and penetrates the freely rotatable pressure roller 33, but it may also be inserted into the pressure roller 33 and rotatably supported on the tip 32 of the locking claw 29.

[0044] In addition, an enlarged diameter portion is formed on the inner surface of the hole through which the resin support pin 34 penetrates the tip portion 32 of the locking claw 29, which is in close contact with the reduced diameter portion 35 of the resin support pin 34, and it is preferable that the close contact between the reduced diameter portion 35 and the enlarged diameter portion prevents the resin support pin 34 from shifting out of position.

[0045] As shown in Figures 1 to 6 and 10, the holder 37 comprises a rectangular facing covering plate 38 facing the front surface of the connecting bar 24 and the end side of the locking claw 29, a pair of left and right side plates 39 arranged on both sides of the facing covering plate 38 and holding the connecting bar 24 and the end side of the locking claw 29 from the left and right, and an anti-fall-out bar 40 stretched between the pair of side plates 39 and located on the back side of the connecting bar 24, and is fitted into the tip side of the connecting bar 24 and the locking claw 29.

[0046] The pair of side plates 39 of the holder 37 are formed vertically taller than the opposing cover plate 38. The pair of side plates 39 are each cut out to have grooved cams 41 located on both sides of the connecting bar 24 and the locking claw 29, and the pair of grooved cams 41 each extend from the connecting bar 24 toward the locking claw 29. Both ends of the resin connecting pin 26 and the pair of guide bosses 30 of the locking claw 29 are slidably fitted into the pair of grooved cams 41.

[0047] As shown in Figures 3 to 5, 10, etc., each groove cam 41 is integrally formed with a first groove cam 42 extending in the longitudinal direction of the side plate 39 and positioned closer to the connecting bar 24, a long second groove cam 43 connected to the tip of the first groove cam 42 and extending at an angle from the opposing covering plate 38 side of the holder 37 (the front side of the lid body 10) toward the anti-fall-off bar 40 (toward the back side of the lid body 10), and a third groove cam 44 connected to the tip of the second groove cam 43 and slightly inclined toward the opposing covering plate 38 side of the holder 37.

[0048] The first grooved cam 42 is cut out vertically or slightly inclined toward the opposing cover plate 38 of the holder 37. The guide boss 30 of the locking claw 29 when the locking mechanism 20 is locked (during locking) is located near the joint between the first grooved cam 42 and the second grooved cam 43 (see FIG. 12). The guide boss 30 of the locking claw 29 before the locking mechanism 20 is locked is located on the first grooved cam 42 (see FIG. 11).

[0049] The end of the resin connecting pin 26 before the locking mechanism 20 is locked is located near the connection between the second groove cam 43 and the third groove cam 44 (see FIG. 11). The guide boss 30 of the locking claw 29 when the locking mechanism 20 is locked and after the locking mechanism 20 is locked is located in the second groove cam 43 (see FIGS. 12 and 13). The third groove cam 44 is formed shorter than the second groove cam 43, and the end of the resin connecting pin 26 when the locking mechanism 20 is locked is located near the middle part (see FIG. 12), and the end of the resin connecting pin 26 after the locking mechanism 20 is locked is located at the tip part (see FIG. 13).

[0050] That is, before the locking mechanism 20 locks the lid 10, the guide boss 30 of the locking claw 29 is located on the first groove cam 42, and the end of the resin connecting pin 26 is located near the junction of the second groove cam 43 and the third groove cam 44. When the locking mechanism 20 locks the lid 10, the guide boss 30 of the locking claw 29 is located near the junction of the first groove cam 42 and the second groove cam 43, and the end of the resin connecting pin 26 is located near the middle of the third groove cam 44. After the locking mechanism 20 locks the lid 10, the guide boss 30 of the locking claw 29 is located on the second groove cam 43, and the end of the resin connecting pin 26 is located at the tip of the third groove cam 44.

[0051] The resin connecting pin 26 and the guide boss 30 of the locking claw 29 are guided by the first groove cam 42, the second groove cam 43, and the third groove cam 44, so that the tip 32 of the locking claw 29 swings toward the back surface of the lid main body 11 of the lid body 10 and then swings toward the front plate 15. In other words, the tip 32 of the locking claw 29 swings once toward the rear of the lid body 10, and then swings again from the rear of the lid body 10 to the front.

[0052] In the above configuration, when the lid 10 is fitted to the open front of the container body 1 and locked, the lid opener fits the lid 10 to the open front of the container body 1, and the operation key of the lid opener rotates each operation reel 21 of the locking mechanism 20 in one direction at an angle of 90°. Then, the rotation of the operation reel 21 advances the pairs of connecting bars 24 from the reference position toward the peripheral edge of the lid body 11, and the advancement of the connecting bars 24 causes the locking claws 29 to penetrate the inlet / outlet 12 from within the lid body 11 and protrude to the outside of the lid 10 while swinging.

[0053] At this time, the tip 32 of the locking claw 29 protrudes from the reference position (see FIG. 11) to the outside of the lid body 10 while being guided by a pair of groove cams 41 of the holder 37. That is, the tip 32 of the locking claw 29 oscillates toward the back surface of the lid body 11 of the lid body 10 while being guided by a part of the first groove cam 42, the second groove cam 43, and the third groove cam 44, so that it protrudes slightly to the outside of the lid body 10 while inclining toward the back surface of the lid body 11 (see FIG. 12), and then oscillates from the back surface of the lid body 11 toward the surface plate 15 while being guided by the vicinity of the tip, which is the remaining part of the second groove cam 43 and the third groove cam 44, and engages and locks into the locking hole 3 of the container body 1 (see FIG. 13). By such engagement and locking of the locking claw 29, the lid body 10 fitted to the front surface of the container body 1 is precisely drawn to a specified position, pressed in, and locked.

[0054] On the other hand, when the lid 10 is unlocked and removed from the front of the container body 1, the operation key of the lid opening / closing machine rotates each operating reel 21 of the locking mechanism 20 by 90 degrees to its original reference position. Then, the pairs of connecting bars 24 that advanced as the operating reels 21 rotate and return to their original reference positions of the lid 10, and the locking claws 29 that protrude as the connecting bars 24 return to their original positions pass through the locking holes 3 of the container body 1 and the inlet / outlet 12 and return to the inside of the lid 10. The return of the locking claws 29 makes it possible to remove the lid 10 that is fitted to the front of the container body 1, and the lid 10 is pulled out and removed from the front of the container body 1 by the lid opening / closing machine.

[0055] At this time, the tip 32 of the locking claw 29 is guided in sequence by the third groove cam 44, the second groove cam 43, and the first groove cam 42 of the pair of groove cams 41 of the holder 37 to return to the reference position. That is, the tip 32 of the locking claw 29 swings from the locking hole 3 of the container body 1 to the back side of the lid body 11 of the lid body 10, and then swings from the back side of the lid body 11 into the inside of the lid body 10 to return to the reference position.

[0056] According to the above configuration, since the resin connecting pin 26 and the resin support pin 34 are used instead of the metal pin, no metal ions are generated, and various adverse effects on the semiconductor wafer can be eliminated. Furthermore, the resin connecting pin 26 and the resin support pin 34 are not used in a cantilever manner, but the vicinity of both ends of the resin connecting pin 26 is axially supported between both sides of the locking claw 29, and the vicinity of both ends of the resin support pin 34 is axially supported between the branched tip 32 of the locking claw 29, so that wear of these resin pins and the inner peripheral surface of the hole can be reduced. In addition, there is no risk of these resin pins being tilted or eccentrically damaged.

[0057] Furthermore, if the resin connecting pin 26 and the resin support pin 34 are molded from polyether ether ketone resin or polycarbonate resin, which are excellent in abrasion resistance, dust generation due to abrasion can be significantly suppressed. In addition, a pair of grooved cams 41 of the holder 37 can be expected to perform a complex two-stage swing with a large movable distance, in which the tip 32 of the locking claw 29 is once swung backward of the lid body 10 and then swung forward of the lid body 10 again to engage and lock into the locking hole 3 of the container body 1. Therefore, even if the lid body 10 is located forward of the container body 1 and is difficult to push in by the lid opening / closing device, the lid body 10 fitted into the container body 1 can be pulled in and pressed in to a specified position with high accuracy, thereby improving the blocking effect between the container body 1 and the lid body 10 and more effectively preventing the intrusion of particles.

[0058] In addition, since groove cams 41 are formed on each of the pair of side plates 39 of holder 37, a complex two-stage swinging motion of locking claw 29 can be expected by using this holder 37. Therefore, there is no need to develop or manufacture a new lid body 10, and it is possible to use the existing lid body 10 as is. In addition, since locking claw 29 is narrower than conventional locking claws, it is expected that the strength of locking claw 29 will be greatly improved.

[0059] Also, since a flange exhibiting an identification function is provided around the peripheral surface of the end portion of the resin support pin 34, there is no risk of mistaking the mounting direction of the resin support pin 34 when mounting the pressure roller 33 to the locking claw 29. Furthermore, since the pressure roller 33, which contributes to reducing friction, is in rotatable sliding contact with the inside of the locking hole 3 of the container body 1, the generation of particles can be effectively suppressed.

[0060] Next, Figures 14 and 15 show a second embodiment of the present invention. In this case, a pair of left and right cam plates 50 that clamp the connecting bar 24 and the locking claw 29 are formed on both sides of the surface of the lid body 11, and groove cams 41 are formed on each of the multiple cam plates 50.

[0061] Each cam plate 50 is formed vertically long and extends in the up-down direction of the lid body 11. Also, each groove cam 41 is integrally formed with a first groove cam 42 that extends in the longitudinal direction of the cam plate 50 and is located near the connecting bar 24, a long second groove cam 43 that is connected to the tip of the first groove cam 42 and extends while inclining from the front side of the lid body 11 (front side of the lid body 10) to the back side of the lid body 11 (back side of the lid body 10), and a short third groove cam 44 that is connected to the tip of the second groove cam 43 and is slightly inclined toward the front side of the lid body 11. The other parts are similar to those of the above embodiment, so a description thereof will be omitted.

[0062] In this embodiment as well, the same effects as those of the above embodiment can be expected, and furthermore, since multiple pairs of cam plates 50 are formed on both sides of the surface of the lid body 11, it is clear that the dedicated holder 37 can be omitted.

[0063] In addition, a cylindrical roller with excellent wear resistance may be rotatably fitted into the latch boss 28 of the connecting bar 24 in the above embodiment, and this roller may be slidably fitted loosely into the curved groove 23 of the operating reel 21 to prevent dust generation. Also, the resin connecting pin 26 may be rotatably supported between the center of both sides of the locking claw 29 instead of being fixed. Also, at least one of the resin connecting pin 26 and the resin support pin 34 may be molded into a straight pin or the like, unless it causes any particular trouble. Also, a reduced diameter portion 27 may be partially formed on a part of the circumferential surface between the tip portion 32 and the center portion of the resin connecting pin 26.

[0064] If necessary, a flange having an identification function may be provided around the peripheral surface of the end of the resin connecting pin 26 to improve workability. A reduced diameter portion 35 may be partially formed on a portion of the peripheral surface between the tip and center of the resin support pin 34. The locking claw 29 may be formed in a block shape without a groove, and a connecting tube portion adjacent to the tube portion 25 of the connecting bar 24 may be formed at the end of the locking claw 29, and the resin connecting pin 26 may be inserted through these multiple tube portions 25 and connecting tube portions. Furthermore, in the above embodiment, the tip portion 32 of the locking claw 29 is bifurcated into a groove shape, but if no particular problem occurs, the tip portion 32 of the locking claw 29 may not be bifurcated into two and the pressing roller 33 may be omitted. [Industrial Applicability]

[0065] The substrate storage container according to the present invention is used in the manufacturing fields of electricity, electronics, liquid crystal, precision instruments, semiconductors, and the like. [Explanation of symbols]

[0066] 1 Container body 3 Locking hole 10 Lid 11 Lid body 12 Outlet 15 Surface Plate 16 Operation port 20 Locking mechanism 21 Operation reel (operation member) 24 Connecting bar (slide member) 25 Cylinder 26 Resin connecting pin 27 Reduced diameter part 29 Locking claw (locking member) 30 Guide boss (guide protrusion) 32 Tip 33 Presser roller 34 Resin support pin 35 Reduced diameter part 36 Flange 37 Holder 38 Opposing Cover Plate 39 Side Panel 41 Groove Cam 42 First groove cam 43 Second groove cam 44 Third groove cam 50 Cam plate

Claims

1. A substrate storage container comprising a lid body that is fitted into an opening of a container body that stores substrates, and a locking mechanism that locks the lid body that is fitted into the opening of the container body, The locking mechanism includes an operating member supported on the lid and rotated by an external operation, a sliding member that slides as the operating member rotates, a locking member that can protrude from the peripheral edge of the lid as the sliding member slides, and a plurality of grooved cams that swing the locking member to engage with the inner periphery of the opening of the container body, A substrate storage container characterized in that a resin connecting pin is inserted through the tip of a sliding member and a locking member to allow the locking member to swing in the thickness direction of a lid body, guide protrusions are formed on both sides of the locking member, a plurality of groove cams are provided on both sides of the sliding member and the locking member, and both ends of the resin connecting pin and a plurality of guide protrusions of the locking member are slidably fitted into the plurality of groove cams.

2. The locking mechanism of the substrate storage container of claim 1 comprises a slide member formed in an approximately plate shape with a number of cylindrical portions arranged in a row protruding from its tip, and a resin connecting pin that passes through the multiple cylindrical portions of the slide member is inserted into the locking member.

3. 3. A substrate storage container according to claim 1, wherein a holder member is fitted into the slide member and the locking member of the locking mechanism, and a groove cam is formed on each of both sides of the holder member.

4. 3. A substrate storage container according to claim 1, wherein the lid is formed with a plurality of cam plates for sandwiching the slide member and the locking member therebetween, and a grooved cam is formed on each of the plurality of cam plates.

5. 4. A substrate storage container as described in claim 1, 2, or 3, wherein the tip of the locking member of the locking mechanism is bifurcated into two branches to form an approximately groove shape, and a pressing roller that contacts the inner periphery of the opening of the container body is rotatably mounted between the bifurcated tips of the locking member via a resin support pin.

6. 6. A substrate storage container according to claim 5, wherein at least one of the resin connecting pin and the resin supporting pin is formed as a stepped pin having a reduced diameter portion on its peripheral surface.

7. The grooved cam of the locking mechanism includes a first grooved cam located near the slide member, a second grooved cam connected to a tip end of the first grooved cam and extending from the front surface side of the lid body toward the back surface side of the lid body while inclining, and a third grooved cam connected to a tip end of the second grooved cam and inclined toward the front surface side of the lid body, Before the locking mechanism locks the lid, the guide protrusion of the locking member is positioned on the first grooved cam, and the resin connecting pin is positioned near the connection between the second grooved cam and the third grooved cam, When the lid is locked by the locking mechanism, the guide protrusion of the locking member is located near the connection between the first groove cam and the second groove cam, and the resin connecting pin is located in the third groove cam, 7. The substrate storage container according to claim 1, wherein after the lid is locked by the locking mechanism, the guide protrusion of the locking member is positioned in the second groove cam and the resin connecting pin is positioned at the tip of the third groove cam.

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