Vibration device

Abstract

To prevent the generation of chatter vibration between a vibration table and a weight.SOLUTION: A vibrator according to an embodiment of the present invention comprises a vibration table and a counterbalance unit attached to the vibration table. The counterbalance unit comprises a weight, and spacers provided between the vibration table and the weight to hold the weight and the vibration table in a non-contact manner.SELECTED DRAWING: Figure 32

Description

[Technical field]

[0001] The present invention relates to a vibration device used for vibration testing and the like. [Background technology]

[0002] There is known a three-axis simultaneous vibration device that simultaneously vibrates a vibration table, on which a specimen is fixed, in three orthogonal axial directions (X-axis, Y-axis, and Z-axis directions). In order to vibrate the vibration table in three orthogonal axial directions, for example, it is necessary to connect the vibration table and a Z-axis actuator that vibrates it in the Z-axis direction via a two-axis slider (XY slider) so that they can slide in the X-axis and Y-axis directions.

[0003] Patent Document 1 describes a vibration device that enables three-axis vibration in a frequency range up to several hundred Hz by using a rolling guide-type linear guideway (hereinafter simply referred to as a "linear guide") on a two-axis slider.

[0004] Furthermore, Patent Document 2 describes a vibration device that enables three-axis vibration in a frequency range exceeding 1 kHz by using rollers as rolling elements to increase the rigidity of a linear guide. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] International Publication No. 2009 / 011433 [Patent Document 2] International Publication No. 2016 / 017744 Summary of the Invention [Problem to be solved by the invention]

[0006] Conventional vibration devices have a problem in that the vibration on the vibration table varies.

[0007] The present invention has been made in view of the above circumstances, and an object of the present invention is to reduce the variation in vibration on a vibration table. [Means for solving the problem]

[0008] A vibration device according to one embodiment of the present invention comprises a vibration table, an actuator for vibrating the vibration table, and a counterbalance section attached to the vibration table for compensating for imbalance in the vibrated section, the counterbalance section comprising a weight section and a spacer interposed between the vibration table and the weight section for holding the weight section out of contact with the vibration table.

[0009] In the above vibration device, the spacer may be a washer, and a bolt for fastening the weight portion and the vibration table may be passed through a hole in the washer. In the above vibration device, a tapped hole into which a bolt for attaching the weight portion is screwed may be formed in the vibration table, and the spacer may be formed in a boss shape integral with the vibration table at the edge of the tapped hole. In the above vibration device, the weight portion may be formed with a through hole through which a bolt for attaching the weight portion to the vibration table is passed, and the spacer may be formed in a boss shape integral with the weight portion at the edge of the through hole. In the above vibration device, a gap between the vibration table and the weight portion may be filled with a filler. In the above vibration device, the actuator may include a first actuator that vibrates the vibration table in a first direction, and a second actuator that vibrates the vibration table in a second direction perpendicular to the first direction. Effect of the Invention

[0010] According to an embodiment of the present invention, the variation in vibration on the vibration table can be reduced. [Brief description of the drawings]

[0011] [Figure 1] 1 is a front view of a vibration device according to a first embodiment of the present invention. [Diagram 2] 1 is a side view of a vibration device according to a first embodiment of the present invention. [Diagram 3] 1 is a plan view of a vibration device according to a first embodiment of the present invention. [Figure 4] FIG. 2 is a block diagram of a drive control system for a vibration excitation device according to an embodiment of the present invention. [Diagram 5] FIG. 2 is a front view of the Z-axis vibration unit according to the first embodiment of the present invention. [Figure 6] FIG. 2 is a side view of the Z-axis vibration unit according to the first embodiment of the present invention. [Figure 7] FIG. 2 is a plan view of the Z-axis vibration unit according to the first embodiment of the present invention. [Figure 8] 1 is a longitudinal sectional view of a vertical driving electrodynamic actuator according to a first embodiment of the present invention. [Figure 9] FIG. 2 is an external view of a movable part of a vertical actuator. [Figure 10] FIG. 2 is an external view of an extension frame. [Figure 11] FIG. 2 is an enlarged vertical cross-sectional view of the vicinity of a neutral spring mechanism of the horizontal driving electrodynamic actuator according to the first embodiment of the present invention. [Figure 12]1 is a plan view of an XY slider according to a first embodiment of the present invention. [Figure 13] FIG. 2 is a side view of a cross guide according to an embodiment of the present invention. [Figure 14] FIG. 2 is a plan view of an A-type linear guide according to an embodiment of the present invention. [Figure 15] FIG. 2 is a side view of an A-type linear guide according to an embodiment of the present invention. [Figure 16] FIG. 2 is a front view of an A-type linear guide according to the embodiment of the present invention. [Figure 17] 1 is a cross-sectional view of an A-type linear guide according to an embodiment of the present invention. [Figure 18] FIG. 16 is a cross-sectional view of FIG. 15 in accordance with II. [Figure 19] FIG. [Figure 20] FIG. 2 is a side view of the X-axis vibration unit according to the first embodiment of the present invention. [Figure 21] FIG. 2 is a front view of the X-axis vibration unit according to the first embodiment of the present invention. [Figure 22] FIG. 22 is an enlarged view of the YZ slider in FIG. 21. [Figure 23] FIG. 2 is a plan view of the vicinity of a vibration table of the vibration device according to the first embodiment of the present invention. [Figure 24] 4 is an enlarged side view of the support unit in the vicinity of a spring mechanism. FIG. [Diagram 25] FIG. 4 is a cross-sectional view of the X-axis counterbalance part. [Figure 26] FIG. 4 is a cross-sectional view of the Z-axis counterbalance part. [Figure 27] FIG. 13 is an enlarged plan view showing bolt fixing positions of the Z-axis counterbalance portion. [Figure 28] This is the relative acceleration spectrum in the X-axis direction measured at the four corners of the top surface of the vibration table. [Figure 29] This is the relative acceleration spectrum in the Y-axis direction measured at the four corners of the top surface of the vibration table. [Diagram 30] This is the relative acceleration spectrum in the Z-axis direction measured at the four corners of the top surface of the vibration table. [Diagram 31]FIG. 13 is a diagram showing acceleration monitoring points on the Z-axis counterbalance part. [Diagram 32] FIG. 13 is a cross-sectional view of a modified example of the X-axis counterbalance portion. [Diagram 33] This is an external view of the X-axis counterbalance unit. [Diagram 34] FIG. 13 is a plan view of a modified example of the XY slider. [Diagram 35] 11A and 11B are diagrams illustrating the behavior of a cross guide. [Diagram 36] FIG. 1 is a plan view of a vibration table according to a first embodiment of the present invention. [Figure 37] FIG. 1 is a front view of a vibration table according to a first embodiment of the present invention. [Figure 38] FIG. 2 is a left side view of the vibration table according to the first embodiment of the present invention. [Figure 39] FIG. 2 is a left side view of the vibration table according to the first embodiment of the present invention. [Diagram 40] FIG. 11 is an enlarged perspective view of the vicinity of a vibration table of a vibration device according to a second embodiment of the present [Diagram 41] FIG. 11 is an enlarged perspective view of the vicinity of a vibration table of a vibration device according to a third embodiment of the present [Diagram 42] FIG. 11 is an enlarged front view of the vicinity of a vibration table of a vibration device according to a fourth embodiment of the present invention. [Diagram 43] FIG. 11 is an enlarged side view of the vicinity of a vibration table of a vibration device according to a fourth embodiment of the present [Diagram 44] FIG. 11 is an enlarged plan view of the vicinity of a vibration table of a vibration device according to a fourth embodiment of the present [Diagram 45] FIG. 13 is a perspective view of a vibration device according to a fifth embodiment of the present invention. [Diagram 46] FIG. 13 is a diagram showing the tip of a Y-axis vibration unit to which a ZX slider of the fifth embodiment is attached. [Figure 47] FIG. 13 is a side view of the vicinity of the XY slider in the fifth embodiment. [Figure 48] FIG. 13 is a cross-sectional view of a linear guide according to a fifth embodiment. [Figure 49]Cross-sectional view II in Figure 48. [Figure 50] 13 is a diagram illustrating the arrangement of rails attached to the top plate of the movable part of the Z-axis vibration unit in the fifth embodiment. FIG. [Figure 51] FIG. 13 is a front view of an electrodynamic triaxial vibration device according to a sixth embodiment of the present invention. [Figure 52] FIG. 13 is a perspective view of a frame 6322 according to a sixth embodiment of the present invention. [Diagram 53] FIG. 13 is a perspective view of a frame 6322 according to a sixth embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the following description, the same or corresponding components are denoted by the same or corresponding reference numerals, and duplicated description will be omitted.

[0013] First Embodiment FIG. 1 is a front view of a mechanical unit 10 of an electrodynamic three-axis vibration device 1 (hereinafter abbreviated as "vibration device 1") according to a first embodiment of the present invention. In the following description, the left-right direction in FIG. 1 is the X-axis direction (the left direction is the X-axis positive direction), the up-down direction is the Z-axis direction (the up direction is the Z-axis positive direction), and the direction perpendicular to the paper surface is the Y-axis direction (the direction from the back side to the front side of the paper surface is the Y-axis positive direction). In this embodiment, the Z-axis direction is the vertical direction, and the X-axis and Y-axis directions are horizontal directions. Also, FIGS. 2 and 3 are a left side view and a plan view, respectively, of the mechanical unit 10 of the vibration device 1.

[0014] As shown in FIG. 1, the mechanical section 10 of the vibration device 1 includes a substantially box-shaped vibration table 400 on which a test piece (not shown) is housed and fixed, three vibration units (X-axis vibration unit 100, Y-axis vibration unit 200, and Z-axis vibration unit 300) that vibrate the vibration table 400 in the X-axis, Y-axis, and Z-axis directions, respectively, and an apparatus base 500 on which the vibration units 100, 200, and 300 are attached.

[0015] Each of the vibration units 100, 200, and 300 is a linear vibration unit equipped with an electrodynamic actuator (voice coil motor).

[0016] The X-axis vibration unit 100 is connected to the vibration table 400 via a two-axis slider (YZ slider 160) which is a slide connection mechanism. The YZ slider 160 is configured to allow relative movement (sliding) between the X-axis vibration unit 100 and the vibration table 400 in two directions (Y-axis and Z-axis directions) perpendicular to the vibration direction (X-axis direction) of the X-axis vibration unit 100, while accurately transmitting the vibration of the X-axis vibration unit 100 to the vibration table 400. Similarly, the Y-axis vibration unit 200 and the Z-axis vibration unit 300 are connected to the vibration table 400 via a ZX slider 260 and an XY slider 360 which are two-axis sliders, respectively. With this configuration, the vibration device 1 can simultaneously and independently vibrate the vibration table 400 and a test piece fixed to the vibration table 400 in three orthogonal axial directions using the vibration units 100, 200, and 300.

[0017] 4 is a block diagram showing a schematic configuration of a drive control system 1a of the vibration excitation device 1. The drive control system 1a includes a control unit 20 that controls the operation of the entire device, a measurement unit 30 that measures the vibration of the vibration table 400, a power supply unit 40 that supplies power to each unit of the vibration excitation device 1, and an interface unit 50 that performs input and output with the outside.

[0018] The interface unit 50 includes, for example, one or more of a user interface for inputting and outputting with a user, a network interface for connecting to various networks such as a LAN (Local Area Network), and various communication interfaces such as a Universal Serial Bus (USB) and a General Purpose Interface Bus (GPIB) for connecting to external devices. The user interface also includes, for example, one or more of various input / output devices such as various operation switches, a display, various display devices such as an LCD (Liquid Crystal Display), various pointing devices such as a mouse and a touch pad, a touch screen, a video camera, a printer, a scanner, a buzzer, a speaker, a microphone, a memory card reader / writer, and the like.

[0019] The measuring unit 30 includes a three-axis vibration sensor (three-axis vibration pickup) 32 attached to the vibration table 400, and amplifies and digitally converts signals (e.g., acceleration signals and speed signals) from the three-axis vibration sensor 32 and transmits them to the control unit 20. The three-axis vibration sensor 32 detects vibrations in the X-axis, Y-axis, and Z-axis directions independently. The measuring unit 30 calculates various parameters (e.g., including one or more of speed, acceleration, jerk, acceleration level (vibration level), amplitude, and power spectrum density) representing the vibration state of the vibration table 400 based on the signal from the three-axis vibration sensor 32, and transmits them to the control unit 20. The control unit 20 can vibrate the vibration table 400 at a desired amplitude and frequency by controlling the magnitude and frequency of the AC current input to the driving coils (described later) of the vibration units 100, 200, and 300 based on the vibration waveform input via the interface unit 50 and the data input from the measuring unit 30.

[0020] Next, the structure of each of the vibration units 100, 200, and 300 will be described. As described later, the X-axis vibration unit 100 and the Y-axis vibration unit 200 are equipped with horizontal driving electrodynamic actuators (hereinafter simply referred to as "horizontal actuators") 100A and 200A, respectively. The Z-axis vibration unit 300 is equipped with a vertical driving electrodynamic actuator (hereinafter simply referred to as "vertical actuator") 300A.

[0021] 5, 6 and 7 are a front view, a left side view and a plan view of the Z-axis vibration unit 300 (and the vibration table 400), respectively.

[0022] The vertical actuator 300A is equipped with an air spring 330 (FIG. 8) for supporting the weight (static load) of the specimen and the vibration table. On the other hand, the horizontal actuators 100A and 200A are equipped with neutral spring mechanisms 130 (FIG. 11) and 230 (not shown), respectively, which provide a restoring force to return the vibration table to a neutral position (origin, reference position). The horizontal actuators 100A and 200A have the same configuration as the vertical actuator 300A, except that the neutral spring mechanisms 130 and 230 are provided instead of the air spring 330 and that the specific structures of the support unit 350 and the support units 150 and 250, which will be described later, are different. Therefore, the detailed configuration of the vertical actuator 300A will be described as a representative of the actuators.

[0023] 8, the vertical actuator 300A includes a fixed part 310 having a cylindrical body 312, and a movable part 320 whose lower part is housed inside the cylinder of the fixed part 310. The movable part 320 is movable in the vertical direction (Z-axis direction) relative to the fixed part 310.

[0024] 9 is an external view showing a schematic configuration of the movable part 320. The movable part 320 includes a substantially cylindrical main frame 322, a drive coil 321 coaxially attached to the lower end of the main frame 322, and a rod 326 (FIG. 8) extending downward from the center of the lower surface of the main frame. In addition, an extension frame 324 having substantially the same diameter as the main frame 322 is coaxially attached to the upper end of the main frame 322.

[0025] The main frame 322 includes a substantially circular top plate 322a arranged perpendicular to the driving direction (Z-axis direction), a cylindrical main pillar 322c extending perpendicularly (in the driving direction) from the center of the lower surface of the top plate 322a, and eight substantially rectangular flat ribs 322b attached radially to the outer periphery of the main pillar 322c. The main pillar 322c and the eight ribs 322b form a substantially cylindrical body of the main frame 322. The eight ribs 322b are arranged around the main pillar 322c at equal intervals in the circumferential direction. The top plate 322a and the main pillar 322c are connected by the eight ribs 322b arranged in this manner, thereby providing the main frame 322 with sufficient rigidity. The top plate 322a, the ribs 322b, and the main pillar 322c are integrally joined to each other by welding or the like.

[0026] The outer periphery of the lower end of the rib 322b protrudes downward to form a coil attachment portion 322d. The coil attachment portions 322d of the eight ribs 322b are inserted into the upper end of the drive coil 321, and the drive coil 321 is attached to the main frame 322.

[0027] 8, a rod 326 is fitted into the main column 322c from below. The lower portion of the rod 326 protrudes downward from the main column 322c. In addition, an extension frame 324 is attached to the top plate 322b.

[0028] Fig. 10 is an external view of extension frame 324. As shown in Fig. 10, extension frame 324 includes body 324a having approximately the same diameter as main frame 322, and top plate 324b attached horizontally to the upper end of body 324a. Top plate 324b is a substantially rectangular flat member having a width (dimension in the X-axis direction) and depth (dimension in the Y-axis direction) equal to or greater than the outer diameter of body 324a.

[0029] Six grooves (a pair of vertical steps 324b1) extending in a lattice pattern in the X-axis and Y-axis directions are formed on the upper surface of the top plate 324b of the extension frame 324. Half of the rails 364a (nine in this embodiment) of the XY slider 360 described later are arranged along the steps 324b1 on one side of each groove. That is, the steps 324b1 are positioning structures for attaching the rails 364a to accurate positions on the top plate 324b. By providing the steps 324b1, it becomes possible to arrange the nine rails 364a on the top plate 324b with high parallelism / perpendicularity simply by attaching the rails 364a along the steps 324b1. Note that a plurality of screw holes 324b2 for fixing the rails 364a with bolts are formed on the bottom surface of each groove.

[0030] On both side surfaces in the X-axis direction and the Y-axis direction of the trunk 324a, there are formed steps 324a1 and a plurality of screw holes 324a2 for positioning and fixing a Z-axis rail 344a of the movable part support mechanism 340 described later. Also, on the bottom surface of the trunk 324a, there is formed a recess 324a3. With the top plate 322a of the main frame 322 fitted into this recess 324a3, the extension frame 324 is fixed to the main frame 322 with bolts.

[0031] An approximately cylindrical inner magnetic pole 316 is fixed inside the cylindrical body 312 of the fixed part 310 and is arranged coaxially with the cylindrical body 312. The cylindrical body 312 and the inner magnetic pole 316 are both formed of a magnetic material. The outer diameter of the inner magnetic pole 316 is smaller than the inner diameter of the drive coil 321, and the drive coil 321 is arranged in a gap between the outer peripheral surface of the inner magnetic pole 316 and the inner peripheral surface of the cylindrical body 312. In addition, a bearing 318 is fixed inside the cylinder of the inner magnetic pole 316 to support a rod 326 movably only in the Z-axis direction.

[0032] A plurality of recesses 312b are formed on the inner peripheral surface 312a of the cylindrical body 312, and each recess 312b accommodates an excitation coil 314. When a direct current (excitation current) is applied to the excitation coil 314, a magnetic field as indicated by arrow A is generated in the radial direction of the cylindrical body 312 at a location where the inner peripheral surface 312a of the cylindrical body 312 and the outer peripheral surface of the inner magnetic pole 316 are close to each other and face each other. When a drive current is applied to the drive coil 321 in this state, a Lorentz force is generated in the axial direction of the drive coil 321, i.e., in the Z-axis direction, and the movable part 320 is driven in the Z-axis direction.

[0033] An air spring 330 is housed inside the cylinder of the inner magnetic pole 316. A lower end of the air spring 330 is fixed to the cylindrical body 312. A flange portion formed on the rod 326 is placed on the upper surface of the air spring 330. That is, the air spring 330 supports the main frame 322 from below via the rod 326. To explain in more detail, the air spring 330 supports the movable part 320, the XY slider 360 supported by the movable part 320, the vibration table 400, the X-axis counterbalance part 610, the Y-axis counterbalance part 620, and the Z-axis counterbalance part 630 described later, and the weight (static load) of the test specimen. Therefore, by providing the air spring 330 to the Z-axis vibration unit 300, it is no longer necessary to support the weight (static load) of the movable part 320, the vibration table 400, etc., by the driving force (Lorentz force) of the Z-axis vibration unit 300, and only the dynamic load for vibrating the movable part 320, etc. is required, so that the driving current (i.e., power consumption) to be supplied to the Z-axis vibration unit 300 is reduced. In addition, the reduction in the required driving force allows the driving coil 321 to be made smaller, and the weight of the movable part 320 is reduced, so that the Z-axis vibration unit 300 can be driven at a higher frequency. Furthermore, since it is no longer necessary to supply a large DC component to the driving coil 321 for supporting the weight of the movable part 320, the vibration table 400, etc., it is possible to adopt a power supply unit 40 that is small and has a simple configuration.

[0034] Furthermore, when the movable part 320 of the Z-axis vibration unit 300 is driven, the fixed part 310 also receives a large reaction force (excitation force) in the drive axis (Z-axis) direction. By providing the air spring 330 between the movable part 320 and the fixed part 310, the excitation force transmitted from the movable part 320 to the fixed part 310 is mitigated. Therefore, for example, the vibration of the movable part 320 is prevented from being transmitted as a noise component to the vibration table 400 via the fixed part 310, the device base 500, and the vibration units 100 and 200.

[0035] Here, the configuration of the horizontal actuator 100A will be described. As described above, the horizontal actuator 100A differs from the vertical actuator 300A in that it includes a neutral spring mechanism 130 (FIG. 11) instead of the air spring 330 (FIG. 8) and in the specific structure of the support unit 150, but the two share other basic configurations. Like the air spring 330, the neutral spring mechanism 130 is a shock absorber that elastically connects the fixed part 110 and the movable part 120 of the horizontal actuator 100A. The horizontal actuator 200A has the same configuration as the horizontal actuator 100A described below.

[0036] 11 is a vertical cross-sectional view of the horizontal actuator 100A, with an enlarged view of the neutral spring mechanism 130 and its vicinity. The area enclosed by the dashed line is a rear view of the neutral spring mechanism 130 as viewed in the positive direction of the X-axis.

[0037] The neutral spring mechanism 130 includes a U-shaped stay 131, a rod 132, a nut 133, and a pair of compression coil springs 134, 135 (elastic elements). The U-shaped stay 131 is fixed to the bottom (right end in FIG. 11) of the fixed part 110 at flange parts 131a formed on both ends of the U-shape. A through hole 131b1 is provided in the center of the bottom part 131b (left end in FIG. 11) of the U-shaped stay 131, through which the rod 132 extending in the X-axis direction is passed.

[0038] Rod 132 is provided with flange portion 132b at one end (left end in FIG. 11) and is connected via flange portion 132b to the tip (right end in FIG. 11) of rod 126 of movable portion 120. Also, the other end (right end in FIG. 11) of rod 132 is formed with male thread portion 132a into which nut 133 is fitted.

[0039] A pair of coil springs 134, 135 are placed on the rod 132. One coil spring 134 is sandwiched and held between a flange portion 133a of the nut 133 and a bottom portion 131b (elastic element support plate) of the U-shaped stay 131. The other coil spring 135 is sandwiched and held between the bottom portion 131b of the U-shaped stay 131 and a flange portion 132b of the rod 132. A preload is applied to the pair of coil springs 134, 135 by fastening the nut 133. The position where the restoring forces of the pair of coil springs 134, 135 are balanced becomes a neutral position (or an origin or a reference position) in the movable direction (X-axis direction) of the movable part 120 of the horizontal actuator 100A. When the movable part 120 moves away from the neutral position, a restoring force in a direction returning the movable part 120 to the neutral position is applied to the movable part 120 by the neutral spring mechanism 130 (directly, a pair of coil springs 134, 135). This enables the movable part 120 to always perform reciprocating drive in the X-axis direction based on the neutral position, eliminating the problem of the position of the movable part 120 fluctuating during operation.

[0040] Returning to the description of the vertical actuator 300A, the configuration of the movable part support mechanism 340 that supports the upper part of the movable part 320 from the side so as to be slidable in the axial direction will now be described.

[0041] As shown in Figures 6 and 8, the movable part 320 of the vertical actuator 300A is supported from the sides by four movable part support mechanisms 340 arranged at equal intervals around its periphery so as to be movable only in the driving direction (Z-axis direction).

[0042] The movable part support mechanism 340 of this embodiment includes an angle plate 342 and a Z-axis linear guide 344. The Z-axis linear guide 344 also includes a Z-axis rail 344a and a Z-axis carriage 344b. In this embodiment, the Z-axis linear guide 344 has the same configuration as an A-type linear guide 364 / A (FIG. 14-19) described later. A linear guide is a mechanism for guiding linear motion, and the Z-axis linear guide 344 guides linear motion in the Z-axis direction.

[0043] On the side surface of the body 324a of the extension frame 324 of the movable part 320, Z-axis rails 344a extending in the Z-axis direction of four pairs of movable part support mechanisms 340 are attached at equal intervals in the circumferential direction. In this embodiment, as shown in Figs. 3 and 7, two pairs of movable part support mechanisms 340 are arranged to face each other in the horizontal direction forming 45° with the X-axis direction and the Y-axis direction, respectively, but for convenience of explanation, in other drawings, the two pairs of movable part support mechanisms 340 are illustrated to face each other in the X-axis direction and the Y-axis direction, respectively. In addition, the number and arrangement of the movable part support mechanisms 340 are not limited to the configuration of this embodiment, but for example, a configuration in which the movable part 320 is supported by three or more pairs of movable part support mechanisms 340 arranged at approximately equal intervals around the movable part 320 is desirable.

[0044] Four angle plates 342 are fixed to the upper surface of the fixed portion 310 (cylindrical body 312) at equal intervals (90° intervals) along the inner peripheral surface of the cylindrical body 312. The angle plates 342 are fixed members having a U-shaped (or L-shaped) cross section reinforced with ribs. A Z-axis carriage 344b that engages with a Z-axis rail 344a is fixed to an upright portion 342u of each angle plate 342.

[0045] The Z-axis carriage 344b incorporates a number of balls RE (described later) that are rolling bodies, and together with the Z-axis rail 344a, constitutes a Z-axis linear guide 344 that is a rolling guide. That is, the movable part 320 is supported from the side by four support structures (movable part support mechanism 340) consisting of the angle plate 342 and the Z-axis linear guide 344 in the upper extension frame 324 so as to be slidable only in the Z-axis direction, and is not allowed to move in the X-axis and Y-axis directions. Therefore, crosstalk caused by the movable part 320 vibrating in the X-axis and Y-axis directions is prevented. In addition, the use of the Z-axis linear guide 344 (rolling guide) allows the movable part 320 to move smoothly in the Z-axis direction. Furthermore, as described above, the movable part 320 is also supported at its lower part by the bearing 318 so as to be movable only in the Z-axis direction, so that rotation around the X-axis, Y-axis, and Z-axis is also restricted, and unnecessary vibration (vibration other than the controlled translational movement in the Z-axis direction) is unlikely to occur.

[0046] In addition, in a normal use mode of a linear guide, the rail is attached to the fixed side and the carriage is attached to the movable side. However, in this embodiment, the Z-axis rail 344a is attached to the movable part 320, and the Z-axis carriage 344b is attached to the angle plate 342, which is the opposite of the normal use mode. By adopting such a unique mounting structure, unnecessary vibrations are suppressed. This is because the Z-axis rail 344a is lighter than the Z-axis carriage 344b, has a longer dimension in the driving direction (Z-axis direction) (hence the mass per unit length is smaller), and has a uniform mass distribution in the driving direction. Therefore, when the Z-axis rail 344a is fixed to the movable part 320, the fluctuation in mass distribution when the Z-axis vibration unit 300 is driven is smaller, and therefore the vibration caused by the fluctuation in mass distribution can be suppressed to a low level. In addition, since the center of gravity of the Z-axis rail 344a is lower than that of the Z-axis carriage 344b (i.e., the distance from the installation surface to the center of gravity is shorter), the moment of inertia is smaller when the Z-axis rail 344a is fixed to the movable side. Therefore, with this configuration, it is possible to make the resonance frequency of the fixed part 310 sufficiently higher than the excitation frequency band (for example, 0 to 2000 Hz or more), and deterioration of the excitation accuracy due to resonance is suppressed.

[0047] Next, the configuration of the XY slider 360 that connects the Z-axis vibration unit 300 and the vibration table 400 will be described.

[0048] Fig. 12 is a plan view for explaining the configuration of the XY slider 360. As shown in Figs. 5, 6 and 12, the XY slider 360 of this embodiment is composed of nine cross guides 364 (364L1-L3, 364M1-M3, 364R1-R3) arranged at equal intervals in the X-axis and Y-axis directions. These nine cross guides 364 each connect the Z-axis vibration unit 300 (specifically, the movable part 320 of the vertical actuator 300A) and the vibration table 400 so as to be slidable in the X-axis and Y-axis directions with low resistance.

[0049] FIG. 13 is a side view of the cross guide 364. The cross guide 364 is formed by overlapping and fixing the carriage top surfaces of the A-type linear guide 364 / A and the B-type linear guide 364 / B so that the moving directions are perpendicular to each other. As described later, the carriages of the A-type linear guide 364 / A and the B-type linear guide 364 / B are formed slightly longer in the running direction, so that the mass distribution in the length (L) direction and the mass distribution in the width (W) direction are different, which can be one factor that gives directionality to the vibration performance of the vibration device 1. In this embodiment, the carriages of the A-type linear guide 364 / A and the B-type linear guide 364 / B are directly fixed to each other with one length direction facing the other width direction, thereby forming a cross carriage (the carriage of the cross guide 364). As a result, the directionality of the mass distribution of the A-type linear guide 364 / A and the B-type linear guide 364 / B is offset to a considerable extent, and a cross carriage with less directionality of the mass distribution is obtained. The use of such a cross carriage reduces the directional nature of the vibration performance of the vibration device 1. The A-type linear guide 364 / A and the B-type linear guide 364 / B will be described in detail later.

[0050] In FIG. 12, of the pair of linear guides (X-axis linear guide 364X slidable in the X-axis direction and Y-axis linear guide 364Y slidable in the Y-axis direction) constituting each cross guide 364, the one arranged on the vibration table 400 side is indicated by a solid line, and the one arranged on the Z-axis vibration unit 300 side is indicated by a dashed line. When focusing on the linear guides on the vibration table 400 side indicated by a solid line, it can be seen that the cross guides 364P (cross guides 364M1, 364L2, 364R2, 364M3) in the first orientation in which the X-axis linear guide 364X is attached to the vibration table 400 and the cross guides 364 (cross guides 364L1, 364R1, 364M2, 364L3, 364R3) in the second orientation in which the Y-axis linear guide 364Y is attached to the vibration table 400 are mixed. The orientations of the adjacent cross guides 364 are alternated in each of the X-axis and Y-axis directions. That is, the cross guides 364P in the first orientation and the cross guides 364 in the second orientation are arranged alternately in the X-axis direction and the Y-axis direction. By arranging the cross guides 364 in such an alternating orientation, the directionality of the mass distribution of the cross guides 364 is averaged, and vibration performance with less directional characteristics is achieved.

[0051] Next, the A-type linear guide 364 / A and the B-type linear guide 364 / B that constitute the cross guide 364 will be described in detail.

[0052] 14, 15, and 16 are a plan view, a side view, and a front view, respectively, of the A-type linear guide 364 / A (B-type linear guide 364 / B). The A-type linear guide 364 / A (B-type linear guide 364 / B) includes a rail 364a and an A-type carriage 364b / A (B-type carriage 364b / B).

[0053] The A-type carriage 364b / A (B-type carriage 364b / B) has mounting holes HA (mounting holes HB) which are four screw holes (drilled holes) for bolt fixing at the four corners of the upper surface of the carriage. The A-type carriage 364b / A and the B-type carriage 364b / B have the same structure except for the type of the mounting holes HA and HB.

[0054] The four mounting holes HA, HB are formed so that their center lines pass through each vertex of a square Sq (shown by a chain line in FIG. 14) on the upper surface of the carriage. In other words, the intervals (the length of the sides of the square Sq) at which the mounting holes HA of the A-type carriage 364b / A are formed match the intervals at which the mounting holes HB of the B-type carriage 364b / B are formed, and the arrangement of the mounting holes HA, HB each has four-fold rotational symmetry.

[0055] Therefore, even if the A-type carriage 364b / A and the B-type carriage 364b / B are stacked with their travel directions shifted by 90 degrees from each other, the four mounting holes HA and the four mounting holes HB are connected to each other, and the A-type carriage 364b / A and the B-type carriage 364b / B can be connected by four bolts.

[0056] In addition, since the mounting hole HA of the A-type carriage 364b / A is a screw hole and the mounting hole HB of the B-type carriage 364b / B is a drilled hole, the A-type carriage 364b / A and the B-type carriage 364b / B can be directly connected without a connecting plate. This allows the cross guide 364 to be made smaller and lighter. In this way, by eliminating the connecting plate and making the cross guide 364 smaller and lighter, the rigidity of the cross guide 364 is increased (i.e., the natural frequency is increased), and the vibration performance of the vibration device 1 is improved. Specifically, vibration with less vibration noise is possible up to a higher frequency. In addition, the weight reduction also reduces the power required to vibrate the cross guide 364 (i.e., to drive the mechanism unit 10).

[0057] An L-shaped cutout C1 is formed at each of the four corners of the upper surface of the carriage of the type A carriage 364b / A (type B carriage 364b / B). Furthermore, a pair of L-shaped cutouts C2 extending in the running direction are formed at the lower part on both sides in the width direction (up and down direction in FIG. 14) of the type A carriage 364b / A (type B carriage 364b / B). That is, both ends in the width direction of the type A carriage 364b / A (type B carriage 364b / B) are cut off, except for the flange parts F protruding from both sides in the width direction where the mounting holes HA (mounting holes HB) are formed. This realizes a reduction in weight of the type A carriage 364b / A (type B carriage 364b / B).

[0058] In this way, the cross guide 364 is made up of only the A-type linear guide 364 / A and the B-type linear guide 364 / B, which are dedicated cross guides, and the four bolts that connect them, making it small, lightweight, and highly rigid. This makes it possible to realize an XY slider (slide connecting mechanism) with a high resonance frequency and little vibration noise.

[0059] As described above, the A-type carriage 364b / A and the B-type carriage 364b / B have the same structure except for the mounting holes HA and HB. Therefore, by connecting the A-type linear guide 364 / A and the B-type linear guide 364 / B with their running directions shifted by 90 degrees from each other, the directionality of the mass distribution of each linear guide in the length (L) direction and width (W) direction is offset, realizing a cross guide 364 with a small directionality of mass distribution.

[0060] Furthermore, each of the carriages 364b / A, 364b / B has approximately two-fold rotational symmetry around an axis in the up-down direction (the direction perpendicular to the paper surface in FIG. 14), but does not have four-fold rotational symmetry. Therefore, each of the carriages 364b / A, 364b / B has different response characteristics to an external force in the running direction (the left-right direction in FIG. 14) and the lateral direction (the up-down direction in FIG. 14).

[0061] The carriage (cross carriage) of the cross guide 364, which is formed by connecting the A-type carriage 364b / A and the B-type carriage 364b / B, which have essentially two-fold rotational symmetry and approximately equal mass distribution, by rotating them 90 degrees around the vertical axis (axis of rotational symmetry), has acquired approximately four-fold rotational symmetry, and the response characteristics to external forces are more uniform between the two traveling directions (X-axis and Y-axis directions).

[0062] By connecting the movable part 320 of the Z-axis excitation unit 300 and the vibration table 400 via a cross guide 364, the vibration table 400 is connected to the movable part 320 of the Z-axis excitation unit 300 so as to be slidable in the X-axis and Y-axis directions.

[0063] Next, the internal structure of each linear guide constituting the cross guide 364 will be described using the A-type linear guide 364 / A as an example.

[0064] FIG. 17 is a cross-sectional view of the A-type linear guide 364 / A. FIG. 18 is a cross-sectional view taken along line II of FIG. 17. In the A-type linear guide 364 / A of this embodiment, the outer diameter of the ball RE, which is a rolling element, is reduced to about half of the usual one, and the number of load paths of the rolling element is increased to eight, twice as many as usual, thereby increasing the number of balls RE (effective ball number) between the rail and the carriage by more than twice as many as usual. As a result, the load is distributed to more than twice as many balls RE as usual, so the load per ball RE is reduced by half, and the rigidity of the linear guide is significantly improved. In addition, by increasing the number of effective balls, more uniform rolling guidance is possible, and as a result, the movement accuracy of the carriage is improved (specifically, the carriage's posture fluctuation and vibration occurring during travel are reduced).

[0065] The A-type carriage 364b / A includes a main block 364b1 / A, a pair of end blocks 364b2 attached to both ends of the main block 364b1 / A in the running direction, and four rod members R1, R2, R3, and R4 inserted into four cylindrical through holes h1, h2, h3, and h4 that penetrate the main block 364b1 / A in the running direction. The rod members R1, R2, R3, and R4 in this embodiment are members of the same configuration.

[0066] In this embodiment, the main block 364b1 / A is a metal member (e.g., stainless steel), and the end block 364b2 and the rod members R1, R2, R3, and R4 are resin members. Note that the materials of the members constituting the A-type carriage 364b / A are not limited to those in this embodiment, and are appropriately selected from metals, resins, ceramics, various composite materials (e.g., fiber-reinforced plastics), etc.

[0067] 17, two grooves Ga extending in the length direction are formed adjacent to each other on both side surfaces (right side surface SR, left side surface SL) of the rail 364a. Also, two grooves Ga extending in the length direction are formed adjacent to each other on the left and right portions (upper right surface TR, upper left surface TL) of the upper surface of the rail 364a.

[0068] On the other hand, the main block 364b1 / A of the A-type carriage 364b / A has eight grooves Gb (two grooves x four sets) formed at positions facing each groove Ga. Each pair of facing grooves Ga and Gb forms a load path Pa (Pa1, Pa2, Pa3, Pa4) and a load path Pb (Pb1, Pb2, Pb3, Pb4). Here, the load path refers to the portion of the path of the rolling element where a load is applied to the rolling element.

[0069] The load paths Pa1 and Pb1 (load path pair P1) are formed close to each other between the right side surface SR of the rail 364a and the main block 364b1 / A. The load paths Pa2 and Pb2 (load path pair P2) are formed close to each other between the upper right surface TR of the rail 364a and the main block 364b1 / A. The load paths Pa3 and Pb3 (load path pair P3) are formed close to each other between the upper left surface TL of the rail 364a and the main block 364b1 / A. The load paths Pa4 and Pb4 (load path pair P4) are formed close to each other between the left side surface SL of the rail 364a and the main block 364b1 / A. Hereinafter, a pair of paths of rolling elements formed close to each other in parallel will be referred to as a "path pair".

[0070] Furthermore, gaps Gs1, Gs2, Gs3, and Gs4 are formed between the right side surface SR, the upper right side surface TR, the upper left side surface TL, and the left side surface SL of the rail 364a and the main block 364b1 / A, respectively. The load path pairs P1, P2, P3, and P4 are formed in the gaps Pc1, Pc2, Pc3, and Pc4, respectively.

[0071] The four through holes h1, h2, h3, and h4 are formed in parallel at positions facing the four load path pairs P1, P2, P3, and P4, respectively.

[0072] Through holes Qc (Qc1, Qc2, Qc3, Qc4) having a substantially rectangular cross section penetrate the rod members R1, R2, R3, R4 in the length direction. On the inner peripheral surface of each through hole Qc (specifically, on two surfaces facing each other with a narrow gap), there are formed unloaded paths Qa (Qa1, Qa2, Qa3, Qa4) and Qb (Qb1, Qb2, Qb3, Qb4) each consisting of two pairs of opposing grooves Gc and Ge (only the through hole Qc2 is labeled with a symbol) extending in the extension direction of the through hole Qc.

[0073] As shown in Fig. 18, both ends of the rod member R3 are provided with U-shaped protrusions Rp3 protruding from the through hole h3 of the main block 364b1 / A. The outer peripheral surface of each protrusion Rp3 is formed with the pair of parallel grooves Gcu described above. The other rod members R1, R2, and R4 are also provided with protrusions Rp1, Rp2, and Rp4 (not shown) each having a pair of U-shaped grooves Gc formed therein.

[0074] The end block 364b2 is formed with four recesses D1, D2, D3, and D4 (only recess D3 is shown) that accommodate the respective protrusions Rp (Rp1, Rp2, Rp3, and Rp4). In the recess D3, a pair of grooves Ge is formed that faces the pair of grooves Gcu formed in the protrusion Rp3. The two pairs of facing grooves Gc and Ge form two U-shaped return paths Ua3 and Ub3 (only path Ua3 is shown). Similarly, pairs of grooves Ge are formed in the other three recesses D1, D2, and D4, and pairs of return paths Ua1 and Ub1, Ua2 and Ub2, and Ua4 and Ub4 are formed between the pairs of grooves Gc formed in the corresponding protrusions Rp1, Rp2, and Rp4, respectively.

[0075] Gaps Gu1, Gu2, Gu3, and Gu4 (not shown) are formed between the protrusions Rp1, Rp2, Rp3, and Rp4 and the recesses D1, D2, D3, and D4, respectively. The turn-back paths Ua1 and Ub1, Ua2 and Ub2, Ua3 and Ub3, and Ua4 and Ub4 are formed in the gaps Gu1, Gu2, Gu3, and Gu4, respectively.

[0076] One end of the turn-back paths Ua and Ub is connected to the loaded paths Pa and Pb, and the other end is connected to the unloaded paths Qa and Qb, respectively. That is, the eight loaded paths Pa1, Pb1, Pa2, Pb2, Pa3, Pb3, Pa4, and Pb4 and the eight unloaded paths Qa1, Qb1, Qa2, Qb2, Qa3, Qb3, Qa4, and Qb4 are connected in a ring shape by eight pairs of turn-back paths Ua1, Ub1, Ua2, Ub2, Ua3, Ub3, Ua4, and Ub4, forming eight circulation paths.

[0077] Furthermore, the gaps Gs (Gs1, Gs2, Gs3, Gs4) and the through holes Qc (Qc1, Qc2, Qc3, Qc4) are connected in an annular shape by a pair of U-shaped gaps Gu (Gu1, Gu2, Gu3, Gu4) to form four annular gaps CG. The above-mentioned four pairs (eight rows) of circulation paths CP are formed in each of the four annular gaps CG.

[0078] Each of the eight circulation paths CP contains a number of stainless steel balls RE (rolling elements) aligned in a row, and each of the four annular gaps CG has an endless belt-like retainer RT passing through it.

[0079] FIG. 19 is a perspective view showing a part of the retainer RT. The retainer RT is a flexible resin member, and has a large number of through holes RTh formed in two rows at regular intervals in the length direction. The interval between the two rows of through holes RTh is the same as the interval between the two circulation paths CP (path pairs) provided in each annular gap CG. A large number of balls RE arranged in path pairs in the same annular gap CG are rotatably fitted into the two rows of through holes RTh of the retainer RT. The retainer RT circulates in the annular gap CG together with the large number of balls RE. The retainer RT prevents contact between the balls RE and reduces vibration noise and wear of the balls RE due to friction between the balls RE.

[0080] As shown in FIG. 14, the A-type carriage 364b / A (and the B-type carriage 364b / B) in this embodiment has a length L of 125 mm or less (approximately 120 mm) and an aspect ratio (the ratio L / W of the length L to the width W) of 1.35 or less (approximately 1.32).

[0081] Lengthening the carriage improves the running accuracy (waving characteristics, etc.) and rigidity, but has the disadvantage of increasing the weight and decreasing the vibration (acceleration) performance. The length L of the 8-row carriage used in the vibration device is preferably within the range of 70-160 mm (more preferably within the range of 90-140 mm, and even more preferably within the range of 110-130 mm).

[0082] Furthermore, in order to make the vibration performance uniform in each axial direction, it is better for the aspect ratio L / W to be close to 1. It is desirable for the aspect ratio L / W of an 8-row carriage such as that of this embodiment to be within the range of 0.65-1.5 (more preferably within the range of 0.7-1.4, and even more preferably within the range of 0.75-1.35).

[0083] In this way, by connecting the Z-axis vibration unit 300 and the vibration table 400 via the XY slider 360 which can slide with little resistance in the X-axis and Y-axis directions, even if the X-axis vibration unit 100 and the Y-axis vibration unit 200 vibrate the vibration table 400 in the X-axis and Y-axis directions, respectively, the vibration components of the vibration table 400 in the X-axis and Y-axis directions are not transmitted to the Z-axis vibration unit 300.

[0084] Furthermore, almost no force in the X-axis and Y-axis directions is applied to the vibration table 400 by driving the Z-axis vibration unit 300. Therefore, vibration with little crosstalk is possible.

[0085] As described above, the A-type linear guide 364 / A of this embodiment has eight grooves in the circulation path CP, twice as many as usual, by reducing the outer diameter of the ball RE to about half of the usual one. The number of balls RE arranged in each load path is also nearly double that of usual. As a result, the A-type carriage 364b / A is supported in a more dispersed manner by more than twice (almost four times) the number of balls RE compared to the conventional one. This results in improved rigidity and improved running accuracy (lower waving).

[0086] Until now, 8-row linear guides such as the A-type linear guide 364 / A have only been used to improve the positional accuracy of machine tools and the like, and therefore the conventional 8-row linear guides have a large carriage length L of 180 mm or more and an aspect ratio of 2.3 or more, resulting in poor weight balance. As a result, the conventional 8-row linear guides are not suitable for high-speed driving mechanisms such as vibration devices. The A-type linear guide 364 / A (B-type linear guide 364 / B) of this embodiment has a small carriage length L and aspect ratio, making the 8-row linear guide applicable to vibration devices. In addition, the use of the A-type linear guide 364 / A makes it possible to perform vibration at frequencies exceeding 2 kHz, which was previously difficult.

[0087] Next, the configuration of the YZ slider 160 that connects the X-axis vibration unit 100 and the vibration table 400 will be described.

[0088] FIG. 20 is a side view of the X-axis vibration unit 100 and the vibration table 400. As shown in FIG. FIG. 21 is a front view of the X-axis vibration unit 100. FIG. FIG. 22 is a front view of the YZ slider 160. FIG. 23 is a plan view of the vicinity of the vibration table 400.

[0089] As shown in FIG. 20, the YZ slider 160 includes a connecting arm 162 fixed to the tip surface of the movable part 120 (extension frame 124) of the X-axis vibration unit 100, and a cross guide part 164 that connects the connecting arm 162 to the vibration table 400 so as to be slidable in the Y-axis and Z-axis directions.

[0090] 22, the cross guide section 164 includes two Y-axis rails 164a / Y (164a / Y1, 164a / Y4), six Z-axis rails 164a / Z (164a / Z1, 164a / Z2, 164a / Z3, 164a / Z4, 164a / Z5, 164a / Z6), and six cross carriages 164b (164b / 1, 164b / 2, 164b / 3, 164b / 4, 164b / 5, 164b / 6) that connect the Y-axis rails 164a / Y and the Z-axis rails 164a / Z so as to be slidable in the Y-axis and Z-axis directions. The six cross carriages 164b are arranged in a lattice pattern (Y-axis direction: three rows, Z-axis direction: two rows).

[0091] The three Z-axis rails 164a / Z1, 164a / Z2, 164a / Z3 in the upper row and the single Y-axis rail 164a / Y4 in the lower row are fixed to the tip surface of the connecting arm 162. The remaining three Z-axis rails 164a / Z4, / Z5, / Z6 in the lower row and the single Y-axis rail 164a / Y1 in the upper row are fixed to the side surface of the vibration table 400.

[0092] The cross carriage 164b / 1 is formed by stacking the Y-axis carriage 164b / Y1, which engages with the Y-axis rail 164a / Y1, and the Z-axis carriage 164b / Z1, which engages with the Z-axis rail 164a / Z1, back-to-back (i.e., stacking the carriage tops together) and fixing them together. One of the Y-axis carriage 164b / Y1 and the Z-axis carriage 164b / Z1 has the same configuration as the above-mentioned A-type carriage 364b / A, and the other has the same configuration as the above-mentioned B-type carriage 364b / B. As with the cross carriage of the cross guide 364, the Y-axis carriage 164b / Y1 and the Z-axis carriage 164b / Z1 are directly fixed together with only four bolts, without the aid of a mounting plate.

[0093] The three cross carriages 164b / 1, 164b / 2, 164b / 3 in the upper stage each engage with one Y-axis rail 164a / Y1 in the upper stage, and also engage with the three Z-axis rails 164a / Z1, 164a / Z2, 164a / Z3 in the upper stage, respectively.

[0094] Similarly, the three cross carriages 164b / 4, 164b / 5, 164b / 6 on the lower tier each engage with one Y-axis rail 164a / Y4 on the lower tier, and also engage with the three Z-axis rails 164a / Z4, 164a / Z5, 164a / Z6 on the lower tier, respectively.

[0095] With the above-described configuration of the YZ slider 160, the vibration table 400 is connected to the movable part 120 of the X-axis vibration unit 100 so as to be slidable in the Y-axis and Z-axis directions.

[0096] In this way, by connecting the X-axis vibration unit 100 and the vibration table 400 via the YZ slider 160, which can slide in the Y-axis and Z-axis directions with little resistance, even if the vibration table 400 is vibrated in the Y-axis and Z-axis directions by the Y-axis vibration unit 200 and the Z-axis vibration unit 300, respectively, the vibration components of the vibration table 400 in the Y-axis and Z-axis directions are not transmitted to the X-axis vibration unit 100.

[0097] Furthermore, almost no force in the Y-axis and Z-axis directions is applied to the vibration table 400 by driving the X-axis vibration unit 100. Therefore, vibration with little crosstalk is possible.

[0098] Also, the ZX slider 260 connecting the Y-axis vibration unit 200 and the vibration table 400 has the same configuration as the YZ slider 160, and the vibration table 400 is connected to the movable part 220 of the Y-axis vibration unit 200 so as to be slidable in the Z-axis and X-axis directions. Therefore, even if the vibration table 400 is vibrated in the Z-axis and X-axis directions by the Z-axis vibration unit 300 and the X-axis vibration unit 100, respectively, the vibration components of the vibration table 400 in the Z-axis and X-axis directions are not transmitted to the Y-axis vibration unit 200.

[0099] Furthermore, almost no force in the Z-axis and X-axis directions is applied to the vibration table 400 by driving the Y-axis vibration unit 200. Therefore, vibration with little crosstalk is possible.

[0100] As described above, the vibration units 100, 200, and 300 can accurately vibrate the vibration table 400 in each driving direction without interfering with each other. In addition, since the movable parts of the vibration units 100, 200, and 300 are supported by the movable part support mechanism so as to be movable only in the driving direction, the vibration units 100, 200, and 300 are unlikely to vibrate in the non-driving direction. Therefore, uncontrolled vibrations in the non-driving direction are not applied to the vibration table 400 from the vibration units 100, 200, and 300. Therefore, the vibrations in each axial direction of the vibration table 400 are accurately controlled by driving the corresponding vibration units 100, 200, and 300.

[0101] The vibration table 400 is configured so that the center of gravity is approximately aligned with the center position of the outer dimensions in order to suppress the occurrence of unnecessary rotational motion (rotational vibration). However, when the biaxial sliders (YZ slider 160, ZX slider 260, XY slider 360) are attached to one side of the vibration table 400 in each axial direction, a part of the biaxial slider is fixed to the vibration table 400 (more precisely, it is constrained to the vibration table 400 and moves together with the vibration table 400), so that the center of gravity of the vibrated part (vibration table 400 and a part of the biaxial slider) is shifted from the center of the vibration table 400. This deviation of the center of gravity of the vibrated part induces rotational vibration of the vibration table 400, which results in variation in the vibration state (e.g., acceleration) depending on the position on the vibration table 400.

[0102] Therefore, in this embodiment, a counterbalance section that compensates for the imbalance caused by the biaxial slider is provided on the vibration table 400 on the opposite side of the biaxial slider, and the center of gravity of the vibrated part (the vibration table 400, the counterbalance section, and a part of the biaxial slider) is configured to approximately coincide with the central position of the vibration table 400.

[0103] As shown in Figures 1-3 and 5-7, an X-axis counterbalance part 610 (first counterbalance part) is provided on the side opposite to the side on which the YZ slider 160 of the vibration table 400 is attached (i.e., the side on the X-axis positive direction side).

[0104] Moreover, a Y-axis counterbalance unit 620 (second counterbalance unit) is provided on the side surface of the vibration table 400 opposite to the side surface to which the ZX slider 260 is attached (i.e., the side surface on the Y-axis positive direction side). The Y-axis counterbalance unit 620 in this embodiment has the same configuration as the X-axis counterbalance unit 610.

[0105] Furthermore, a Z-axis counterbalance portion 630 (third counterbalance portion) is provided on the upper surface (that is, the side surface on the Z-axis positive direction side) opposite to the lower surface to which the XY slider 360 of the vibration table 400 is attached.

[0106] 25 is a cross-sectional view of the X-axis counterbalance part 610 (and the Y-axis counterbalance part 620). The X-axis counterbalance part 610 includes a buffer layer 611 (buffer part) and a weight plate 612 (weight part). The buffer layer 611 is sandwiched between the weight plate 612 and the side surface of the vibration table 400 and is fastened.

[0107] The weight plate 612 is a member that provides a mass for compensating for the imbalance of the vibrated part caused by attaching the two-axis slider to the vibration table 400. The thickness of the weight plate 612 in this embodiment is 20 mm.

[0108] The buffer layer 611 blocks the transmission of vibration noise having a frequency component higher than the excitation frequency between the weight plate 612 and the vibration table 400. In addition, the buffer layer 611 prevents chattering from occurring between the vibration table 400 and the weight plate 612.

[0109] The weight plate 612 and the buffer layer 611 are attached to the side surface of the vibration table 400 by a plurality of bolts 613. A screw hole 400h is formed in the side surface of the vibration table 400, and a through hole 612c is formed in the weight plate 612. The bolt 613 is passed through the through hole 612c and screwed into the screw hole 400h, thereby fastening the weight plate 612 and the buffer layer 611 to the side surface of the vibration table 400. Note that the buffer layer 611 also has a through hole formed therein that communicates with the through hole 612c and the screw hole 400h.

[0110] 33(a), in the X-axis counterbalance part 610, a plurality of through holes 612c are formed in a lattice pattern at equal intervals P in two orthogonal directions (the Y-axis direction and the Z-axis direction). In this embodiment, the interval P between the through holes 612c is 50 mm. By shortening the interval P between the through holes 612c (preferably 100 mm or less, more preferably 50 mm or less), the occurrence of chatter vibrations can be effectively suppressed.

[0111] Next, a configuration of the Z-axis counterbalance part 630 will be described. Fig. 26 is a cross-sectional view of the Z-axis counterbalance part 630. Fig. 27 is an enlarged plan view showing bolt fixing positions of the Z-axis counterbalance part 630. Fig. 26 is a cross-sectional view taken along line JJ in Fig. 27.

[0112] The Z-axis counterbalance portion 630 includes a first buffer layer 631 (first buffer portion), a first weight plate 632 (first weight portion), a second buffer layer 634 (second buffer portion), a second weight plate 635 (second weight portion), a third buffer layer 637 (third buffer portion), and a third weight plate 638 (third weight portion). The first buffer layer 631, the first weight plate 632, the second buffer layer 634, the second weight plate 635, the third buffer layer 637, and the third weight plate 638 are stacked on the upper surface of the vibration table 400 in this order.

[0113] The first weight plate 632, the second weight plate 635, and the third weight plate 638 are members that provide mass to compensate for the imbalance of the vibrated part caused by attaching the biaxial slider to the vibration table 400, and are aluminum alloy plates in this embodiment. In this embodiment, the thicknesses of the first weight plate 632, the second weight plate 635, and the third weight plate 638 are 30 mm, 20 mm, and 10 mm, respectively. Note that the width (X-axis direction) and depth (Y-axis direction) of the vibration table 400 in this embodiment are each 500 mm, and the width and depth of the Z-axis counterbalance part 630 are each approximately 400 mm.

[0114] The first buffer layer 631, the second buffer layer 634, and the third buffer layer 637 each reduce transmission of vibration noise of a frequency component higher than the excitation frequency between the first weight plate 632 and the vibration table 400 or between the adjacent weight plates 632, 635, and 638. In addition, the first buffer layer 631, the second buffer layer 634, and the third buffer layer 637 prevent chatter vibration from occurring between the vibration table 400 and the first weight plate 632 or between the adjacent weight plates 632, 635, and 638.

[0115] In the first weight plate 632, a plurality of through holes 632c and a plurality of screw holes 632t are formed at equal intervals (the same intervals P as the through holes 612c of the X-axis counterbalance unit 610 in this embodiment) in two orthogonal directions (X-axis direction and Y-axis direction) in a lattice pattern. As shown in FIG. 27, the positions of the through holes 632c and the screw holes 632t are shifted by P / 2 in each arrangement direction. That is, in a plan view, the screw hole 632t is formed at the middle position of the four through holes 632c. The bolt 633 is passed through the through hole 632c and screwed into the screw hole 400h formed in the upper surface of the vibration table 400, whereby the weight plate 632 and the first buffer layer 631 are fastened to the upper surface of the vibration table 400.

[0116] The second weight plate 635 also has a plurality of through holes 635c and a plurality of screw holes 635t formed in a lattice pattern at equal intervals P in two orthogonal directions (X-axis direction and Y-axis direction). The positions of the through holes 635c and the screw holes 635t are shifted by P / 2 in each arrangement direction. The second weight plate 635 and the second buffer layer 634 are fastened to the upper surface of the first weight plate 632 by passing the bolt 636 through the through hole 635c and screwing it into the screw hole 632t formed in the upper surface of the first weight plate 632.

[0117] Only a through hole 638c is formed in the third weight plate 638. A bolt 639 is passed through the through hole 638c and screwed into a screw hole 635t formed in the upper surface of the second weight plate 635, whereby the third weight plate 638 and the third buffer layer 637 are fastened to the upper surface of the second weight plate 635.

[0118] As described above, the Z-axis counterbalance unit 630 is constructed with three layers of weight plates and cushioning layers stacked on top of each other, making it possible to effectively suppress vibration noise even when a heavy test specimen is placed on top of it.

[0119] Furthermore, instead of directly fixing (co-fastening) the three-layer weight plate and the buffer layer to the vibration table 400 with a single bolt, adjacent weight plates (the first weight plate 632 and the second weight plate 635, and the second weight plate 635 and the third weight plate 638) are fixed individually with a bolt in sequence, thereby effectively suppressing the transmission of vibration noise from the vibration table 400 to the third weight plate 638.

[0120] The shape of each of the weight plates 612, 632, 635, and 638 is not limited to a rectangular flat plate shape, and may be formed into various shapes. For example, by forming the weight plates into a shape corresponding to the shape (mass distribution) of the two-axis slider, it becomes possible to compensate for the imbalance with high accuracy.

[0121] The thickness of each weight plate 632, 635, 638 may be changed depending on the weight of the specimen, the vibration conditions, etc. For example, the weight plates 632, 635, and 638 may all be the same thickness. Furthermore, the weight plates in the upper layers may be thicker, or the middle weight plate 635 may be the thickest.

[0122] In addition, the materials used for each of the weight plates 612, 632, 635, 638 may be general structural materials such as aluminum alloys and steel, as well as vibration-absorbing materials such as lead, copper, metal foam, resin (including plastic and rubber), and fiber-reinforced resin.

[0123] The thickness of each of the buffer layers 611, 631, 634, 637 is determined within a range of 0.5 mm to 2 mm depending on the mass of the weight plate, the material and characteristics of the buffer layer, the size of the vibration device 1, the test conditions, etc. If the buffer layer is made too thick, the weight plate will be more likely to resonate, and the vibration performance in the low frequency range will decrease. Also, if the buffer layer is made too thin, the effect of suppressing vibration noise will not be sufficient.

[0124] The buffer layers 611, 631, 634, 637 can be made of various synthetic resins (e.g., plastics such as polyolefin, polyvinyl chloride, polyamide, PEEK (polyether ether ketone), polycarbonate, and polytetrafluoroethylene), various elastomers (vulcanized rubber such as natural rubber and various synthetic rubbers, thermosetting elastomers such as urethane rubber and silicone rubber, and thermoplastic elastomers), silicone gel (low cross-linking density silicone resin), various polymer alloys, fiber-reinforced plastics, resin foam, soft metals such as lead, and foamed metal, as well as sheets and felts (nonwoven fabrics) made of various materials.

[0125] Furthermore, a buffer layer may be formed by providing a gap between the vibration table 400 and the weight plates 612, 632 (or between adjacent weight plates 632, 635, 638) and filling the gap with an adhesive or caulking material and curing it.

[0126] In addition, although the Z-axis counterbalance unit 630 in this embodiment is formed by laminating three layers of buffer layers and weight plates alternately, it may be formed by laminating two layers or four or more layers. Also, the material and thickness of the buffer layers and weight plates may be changed for each layer.

[0127] Next, the vibration uniformity of the vibration device 1 of this embodiment will be described. Figures 28-30 are graphs showing the spectrum characteristics of the relative acceleration measured at four points on the vibration table 400 (more precisely, on the Z-axis counterbalance unit 630). Also, Figure 31 is a diagram showing the monitoring points (acceleration measurement points) on the Z-axis counterbalance unit 630.

[0128] The vibration device 1 is designed so that the reference point MP0, which is the center of the upper surface of the Z-axis counterbalance unit 630, vibrates with the same acceleration as the instruction value (i.e., single-point control based on the measured value of the acceleration at the reference point MP0 is performed). Note that a multi-point control may be performed to control the vibration based on the measurement results of parameters representing the vibration state such as acceleration at two or more of five monitoring points including the reference point MP0 (for example, the average value of the measured values ​​at a plurality of monitoring points). The vibration uniformity of the vibration device 1 was evaluated by measuring the relative acceleration level La at the four corner areas (monitoring points MP1, MP2, MP3, MP4) of the Z-axis counterbalance unit 630 where the difference in acceleration from the reference point MP0 is considered to be the largest. Here, the relative acceleration level La is the relative acceleration level at each monitoring point MP1 to MP4 with respect to the acceleration at the reference point MP0, and is defined by the following mathematical formula 1.

[0129]

number

[0130] Moreover, as shown in FIG. 31, the monitor points MP1, MP2, MP3, and MP4 are set at the centers of the four corner areas of the 16 areas obtained by dividing the upper surface of the Z-axis counterbalance unit 630 into a 4×4 grid.

[0131] In addition, the evaluation of vibration uniformity was performed for all vibration directions (X-axis, Y-axis, and Z-axis directions) for both the case of vibration with a sine waveform and the case of vibration with a random waveform.

[0132] Figures 28, 29, and 30 are graphs showing the measurement results in the X-axis, Y-axis, and Z-axis directions, respectively. The upper part (a) of each figure shows the measurement results when vibrating with a sine waveform, and the lower part (b) shows the measurement results when vibrating with a random waveform. Note that the sine waveform was measured in the frequency range of 200-2000Hz, and the random waveform was measured in the frequency range of 5-2000Hz.

[0133] As shown in Figures 28-30, in all conditions, the relative acceleration level was kept below ±3 dB in the frequency range below 1 kHz. In addition, in the frequency range below 2 kHz, the relative acceleration level was kept below ±6 dB except for some measurement conditions, and the relative acceleration level was kept below ±10 dB in all measurement conditions. When the counterbalance unit was not installed, the relative acceleration level exceeded ±10 dB in all measurement conditions in the frequency range below 2 kHz, confirming a significant improvement in vibration uniformity by installing the counterbalance unit.

[0134] 32 is a cross-sectional view of a first modified example 610A of the X-axis counterbalance unit 610. In this modified example 610A, a spacer 611a (e.g., a plain washer) is used instead of the buffer layer 611. A gap is provided between the weight plate 612 and the vibration table 400 except for the fixed point where the spacer 611a is interposed, and the weight plate 612 is held in a non-contact state with the vibration table 400. This makes it difficult for vibration to be transmitted between the vibration table 400 and the weight plate 612. In addition, chatter vibration is prevented from occurring between the vibration table 400 and the weight plate 612.

[0135] The spacer 611a can be made of various steels such as stainless steel, various non-ferrous metals such as aluminum alloys, copper alloys such as brass, and titanium alloys, as well as the materials usable for the buffer layer 611 described above.

[0136] Moreover, the spacer 611a may be formed as a boss-shaped protrusion integral with the vibration table 400 or the weight plate 612. Moreover, the gap between the vibration table 400 and the weight plate 612 may be filled with a filler (for example, silicone resin).

[0137] Also, one or more of the buffer layers 631, 634, 637 of the Z-axis counterbalance portion 630 may be replaced with a spacer 611a.

[0138] FIG. 33 is an external view of the X-axis counterbalance part. (a) shows the X-axis counterbalance part 610 of the first embodiment, and (b) and (c) show the second modified example 610B and the third modified example 610C, respectively. The X-axis counterbalance part 610 of the first embodiment is formed as a single body from one weight plate 612 (and one buffer layer 611). In contrast, in the second modified example 610B of (b), the weight plate 612 and the buffer layer 611 are divided into four in the length direction (left and right direction in the figure). In addition, in the third modified example 610C of (c), the weight plate 612 and the buffer layer 611 are further divided into two in the width direction (up and down direction in the figure), for a total of eight divisions. By dividing the X-axis counterbalance part 610 into small elements, the resonance frequency is increased and the generation of vibration noise in the test frequency range is reduced. The configuration of the first modified example 610A may be applied to the second modified example 610B and the third modified example 610C.

[0139] In addition, in this embodiment, the X-axis counterbalance unit 610, the Y-axis counterbalance unit 620, and the Z-axis counterbalance unit 630 are all attached to the outer surface of the vibration table 400, but one or more of these may be attached to the inside of the vibration table 400.

[0140] In this embodiment, the vibration table 400 itself does not have an unbalance, but an initial unbalance may be given to the vibration table 400 in advance so that the vibration table is balanced (the center of gravity of the vibration table coincides with the center of the outer shape) when the two-axis slider is attached. The initial unbalance can be given, for example, by making the thickness of the box-shaped vibration table or the arrangement of the reinforcing ribs inside the vibration table non-uniform.

[0141] Next, a structure for attaching the fixing parts of each vibration unit to the device base 500 will be described.

[0142] As shown in Figures 1-3 and 5-7, the fixed part 310 of the Z-axis vibration unit 300 is attached to the upper surface of the device base 500 via a pair of support units 350 (also called fixed part support mechanism, floating mechanism or elastic support mechanism) arranged on both sides of the Z-axis vibration unit 300 in the Y-axis direction.

[0143] 5 and 7, each support unit 350 includes a movable block 358, a pair of angle plates (fixed blocks) 352, and a pair of linear guides 354. The movable block 358 is a support member fixed to the side surface of the fixed part 310 of the Z-axis vibration unit 300. The pair of angle plates 352 are disposed facing both end faces of the movable block 358 in the X-axis direction, respectively, and are fixed to the upper surface of the device base 500. Both ends of the movable block 358 in the X-axis direction and each angle plate 352 are connected by the linear guides 354 to be slidable in the Z-axis direction.

[0144] The linear guide 354 includes a rail 354a and a carriage 354b that engages with the rail 354a. The rails 354a are attached to both end faces of the movable block 358 in the X-axis direction. Furthermore, a carriage 354b that engages with the opposing rail 354a is attached to each angle plate 352. Furthermore, a pair of air springs 356 are arranged side by side in the X-axis direction between the movable block 358 and the device base 500, and the movable block 358 is supported by the device base 500 via the pair of air springs 356.

[0145] In this way, the fixed part 310 of the Z-axis vibration unit 300 is elastically supported in the driving direction (Z-axis direction) relative to the device base 500 by the support unit 350 equipped with the linear guide 354 and the air spring 356, so that a strong reaction force (excitation force) in the Z-axis direction applied to the fixed part 310 when the Z-axis vibration unit 300 is driven is not directly transmitted to the device base 500, and high-frequency components in particular are greatly attenuated by the air spring 356. Therefore, the vibration noise transmitted from the Z-axis vibration unit 300 to the vibration table 400 via the device base 500 and the other vibration units 100 and 200 is greatly reduced.

[0146] 20-21, the fixed part 110 of the horizontal actuator 100A is attached to the upper surface of the device base 500 via a pair of support units 150 arranged on both sides in the Y-axis direction of the X-axis excitation unit 100. Each support unit 150 includes an inverted T-shaped fixed block 152 fixed to the upper surface of the device base 500, a substantially rectangular parallelepiped movable block 158 attached to the side of the fixed part 110 of the X-axis excitation unit 100, a linear guide 154 that connects the fixed block 152 and the movable block 158 so as to be slidable in the X-axis direction, and a spring mechanism 156 that elastically connects the movable block 158 and the fixed block 152.

[0147] The linear guide 154 includes a rail 154a extending in the X-axis direction and attached to the upper surface of the fixed block 152, and a pair of carriages 154b that engage with the rail 154a and are attached to the lower surface of the movable block 158. In addition, an L-shaped arm 155 extending upward is fixed to the side surface of the fixed block 152 on the negative side of the X-axis. The movable block 158 and the arm 155 are connected by a spring mechanism 156.

[0148] 24 is an enlarged side view of the spring mechanism 156 of the support unit 150. The spring mechanism 156 includes a bolt 156a, a fixed plate 156b, a ring 156c, a nut 156d, an anti-vibration spring 156e, a buffer plate 156f, a washer 156g, and a nut 156h. A through hole 155h extending in the X-axis direction is provided in the upper part of the arm 155, and a bolt 156a is passed through the through hole 155h. The tip of the bolt 156a is fixed to the movable block 158 via the fixed plate 156b. The tip of the bolt 156a also passes through a cylindrical ring 156c.

[0149] The ring 156c is sandwiched and fixed between a nut 156d screwed onto the bolt 156a and a fixed plate 156b. The tip side of the bolt 156a is inserted into a hollow portion of a cylindrical anti-vibration spring 156e. The anti-vibration spring 156e is sandwiched and held between the fixed plate 156b and the arm 155. The ring 156c is fitted into one end side of the hollow portion of the anti-vibration spring 156e.

[0150] The vibration-proof spring 156e is a cylindrical member in which a steel compression coil spring is embedded in a viscoelastic body (damper) such as acrylic resin. A coil spring alone may be used instead of the vibration-proof spring 156e. Also, a separate damper (such as a vibration-proof rubber or oil damper) may be provided in series or parallel with the coil spring.

[0151] Two nuts 156h are attached to the head side of the bolt 156a. The bolt 156a is passed through through holes provided in the buffer plate 156f and the washer 156g. The buffer plate 156f is sandwiched and held between the washer 156g supported by the two nuts 156h and the arm 155. The buffer plate 156f is made of, for example, anti-vibration rubber or a resin such as polyurethane (i.e., a rubber elastic body and / or a viscoelastic body).

[0152] By fastening the bolt 156a, a preload (compressive load in the X-axis direction) is applied to the vibration-proof spring 156e and the buffer plate 156f. The horizontal actuator 100A fixed to the movable block 158 is held in a neutral position where the restoring forces of the vibration-proof spring 156e and the buffer plate 156f are balanced. In other words, the spring mechanism 156 also functions as a neutral spring mechanism.

[0153] When the X-axis vibration unit 100 vibrates the vibration table 400 in the X-axis direction, the reaction force is transmitted to the movable block 158 of the support unit 150, and is further transmitted to the fixed block 152 via the spring mechanism 156 (vibration-proof spring 156e, buffer plate 156f) and the arm 155. Since the vibration-proof spring 156e and the buffer plate 156f attenuate vibrations of frequencies higher than their low resonance frequency, the transmission of vibration noise from the X-axis vibration unit 100 to the apparatus base 500 is suppressed by the support unit 150.

[0154] The reaction force acting on the support unit 150 in the positive direction of the X-axis is smaller than the reaction force in the negative direction of the X-axis. Therefore, in this embodiment, a small and inexpensive buffer plate 156f is used as an elastic element that receives the reaction force in the positive direction of the X-axis. If the reaction force in the positive direction of the X-axis is large, a vibration-proof spring or a coil spring may be used instead of the buffer plate 156f. Also, if the reaction forces in both directions are low, a buffer plate may be used instead of the vibration-proof spring 156e.

[0155] With the above configuration, the fixed part 110 of the X-axis vibration unit 100 is supported flexibly and elastically in the driving direction (X-axis direction) relative to the device base 500 by the support unit 150 including the linear guide 154 and the spring mechanism 156, so that a strong reaction force (excitation force) in the X-axis direction applied to the fixed part 110 when the X-axis vibration unit 100 is driven is not directly transmitted to the device base 500, but is transmitted to the device base 500 after particularly high frequency components are attenuated by the spring mechanism 156. Therefore, vibration noise transmitted from the X-axis vibration unit 100 to the vibration table 400 is reduced.

[0156] The Y-axis vibration unit 200 also includes a horizontal actuator 200A having the same configuration as the horizontal actuator 100A. The fixed part 210 of the horizontal actuator 200A is also elastically supported in the Y-axis direction on the device base 500 by a pair of support units 250 (FIG. 2). The support units 250 have the same configuration as the support units 150 of the X-axis vibration unit 100, so a detailed description of the same will be omitted.

[0157] As described above, by adopting a configuration in which each vibration unit 100, 200, 300 is elastically supported by support units 150, 250, 350 equipped with elastic elements (air springs or spring mechanisms), the transmission of vibrations (noise), especially high frequency components, between the vibration units via the device base 500 is suppressed, making it possible to perform vibration with higher precision.

[0158] The support unit 350 supporting the Z-axis vibration unit 300 is subjected to the weights (static load) of the Z-axis vibration unit 300, the vibration table 400 and the test specimen, in addition to the dynamic load for vibrating the test specimen and the vibration table 400. For this reason, an air spring 356 that is relatively small and capable of supporting a large load is employed. On the other hand, the support unit 150 supporting the X-axis vibration unit 100 and the support unit 250 supporting the Y-axis vibration unit 200 are not subjected to a large static load, so relatively small coil springs with a simple configuration are used.

[0159] In this embodiment, by using low-waving 8-row linear guides for the two-axis sliders (YZ slider 160, ZX slider 260, XY slider 360) that greatly affect the vibration performance, the rotational vibration of the vibration table 400 is suppressed, and as a result, the uniformity of the vibration state (acceleration) on the vibration table 400 is significantly improved. Conventionally, the specifications of the vibration performance could only be specified at the reference point (the center of the top surface of the vibration table), but this improvement in uniformity has made it possible to specify the specifications of the vibration performance over a wide area on the vibration table.

[0160] Furthermore, by providing a counterbalance section (or by previously imparting a predetermined imbalance to the vibration table), the center of gravity of the vibration-applied section (including a part of the vibration table and the biaxial slider) is aligned with the center of the vibration table, making it possible to reduce the variation in vibration (acceleration) on the vibration table to 3 dB or less in the frequency range up to 1 kHz and approximately 6 dB or less in the frequency range up to 2 kHz.

[0161] <Modification Example of XY Slider> FIG. 34 is a plan view for explaining the configuration of a modification example 360A of the XY slider. This modification example is obtained by removing the cross guide 364M2 in the second direction disposed at the center from the XY slider 360 of the first embodiment (FIG. 12) described above. In the XY slider 360A of this modification example, the number of X-axis linear guides 364X and the number of cross guides 364P (cross guides 364M1, 364L2, 364R2, 364M3) in the first direction attached to the vibration table 400 are the same, and the number of Y-axis linear guides 364Y and the number of cross guides 364S (cross guides 364L1, 364R1, 364L3, 364R3) in the second direction attached to the vibration table 400 are the same.

[0162] Here, the difference in the behavior of the cross guide 364 depending on the vibration direction will be described. FIG. 35(a) is a front view of the cross guide 364P in the first direction, and (b) is a left side view thereof.

[0163] As shown in FIG. 35(a), when the vibration table 400 is vibrated in the X-axis direction, in the cross guide 364P in the first direction to which the X-axis linear guide 364X (X-axis rail 364a / X) is attached to the vibration table 400, only the X-axis rail 364a / X (solid line) fixed to the vibration table 400 is vibrated in the X-axis direction together with the vibration table 400, and the cross carriage 364c and the Y-axis rail 364a / Y (dashed line) are not vibrated in the X-axis direction.

[0164] On the other hand, as shown in FIG. 35(b), when the vibration table 400 is vibrated in the Y-axis direction, in the cross guide 364P in the first orientation, the X-axis rail 364a / X and the cross carriage 364c (solid lines) are vibrated in the Y-axis direction together with the vibration table 400, and only the Y-axis rail 364a / Y (dashed lines) is not vibrated in the Y-axis direction.

[0165] In the cross guide 364S in the second orientation in which the Y-axis linear guide 364Y (Y-axis rail 364a / Y) is attached to the vibration table 400, opposite to the cross guide 364P in the first orientation described above, when the vibration table 400 is vibrated in the X-axis direction, the Y-axis rail 364a / Y and the cross carriage 364c (solid line) are vibrated in the X-axis direction together with the vibration table 400, and only the X-axis rail 364a / X (dashed line) is not vibrated in the X-axis direction. In addition, when the vibration table 400 is vibrated in the Y-axis direction, only the Y-axis rail 364a / Y (solid line) is vibrated in the Y-axis direction together with the vibration table 400, and the cross carriage 364c and the X-axis rail 364a / X (dashed line) are not vibrated in the Y-axis direction.

[0166] Table 1 summarizes the relationship between the mounting direction of the cross guide 364, the vibration direction of the vibration table 400, and the vibrated parts of the cross guide 364 (components of the cross guide 364 that are vibrated together with the vibration table 400).

[0167] [Table 1]

[0168] In this way, the cross guide 364 has different parts that are vibrated together with the vibration table 400 depending on the vibration direction and the mounting direction. For example, when the vibration table 400 is vibrated in the X-axis direction, as described above, in the cross guide 364P in the first orientation, only the X-axis rail 364a / X is vibrated in the X-axis direction, but in the cross guide 364S in the second orientation, the Y-axis rail 364a / Y and the cross carriage 364c are vibrated in the X-axis direction. The relationship between the vibration direction and the number of elements of the vibrated part of the cross guide 364 (i.e., the mass of the vibrated part) is opposite between the cross guide 364P in the first orientation and the cross guide 364S in the second orientation.

[0169] As shown in Table 1, if an XY slider is constructed using only the cross guide 364 in one mounting direction (for example, the cross guide 364P in the first direction), the mass of the vibrated part of the cross guide 364 changes when the vibration table 400 is vibrated in the X-axis direction and when it is vibrated in the Y-axis direction. This results in a directional characteristic in the vibration performance of the vibration excitation device 1. However, by providing the same number (multiple pairs) of cross guides 364P in the first direction and cross guides 364S in the second direction, the total mass of the vibrated parts of the cross guide 364 is constant regardless of whether vibration is applied in the X-axis or Y-axis direction, and therefore the directional characteristic in the vibration performance is reduced.

[0170] Therefore, the XY slider 360A of this modified example, which is composed of four pairs of first-orientation cross guides 364P and second-orientation cross guides 364S, is less directional than the XY slider 360 of the first embodiment, which has one more second-orientation cross guide 364S than the first-orientation cross guide 364P, allowing for uniform vibration.

[0171] Furthermore, since the total number of cross guides 364 included in XY slider 360A is smaller than that of XY slider 360 of the first embodiment, the vibrated portion is lighter and vibration at a higher frequency is possible.

[0172] In addition, by arranging the cross guides 364P, 364S with two mounting directions alternately (uniformly) in each direction, the directional behavior of each cross guide 364P, 364S and the bias in mass distribution are effectively canceled out, making it possible to vibrate each part of the vibration table 400 more uniformly.

[0173] Next, the vibration table 400 will be described.

[0174] 1-3, substantially the entire surface of the X-axis negative side of the vibration table 400 (the right side in FIG. 1) is substantially evenly supported by the slide connection mechanism 160 (specifically, a plurality of linear guideways provided in the slide connection mechanism 160) and the movable part 120 of the X-axis excitation unit 100. This allows the entire side surface of the X-axis negative side of the vibration table 400 to receive a substantially uniform vibration force from the X-axis excitation unit 100.

[0175] Similarly, substantially the entire surface of the side surface on the Y-axis negative direction side of the vibration table 400 (the left side surface in FIG. 2) is substantially evenly supported by the slide connecting mechanism 260 and the movable part 220 of the Y-axis excitation unit 200. This allows the entire side surface on the Y-axis negative direction side of the vibration table 400 to receive a substantially uniform vibration force from the Y-axis excitation unit 200.

[0176] 5 and 6, substantially the entire lower surface of the vibration table 400 is substantially evenly supported by the slide connection mechanism 360 (specifically, a plurality of linear guideways provided in the slide connection mechanism 360) and the movable part 320 of the Z-axis excitation unit 300. This allows the entire lower surface of the vibration table 400 to receive a substantially uniform vibration force from the Z-axis excitation unit 300.

[0177] Therefore, when the center of gravity of all the vibrated parts (the vibrated object and a part of the vibration device 1 such as the vibration table 400 that is vibrated together with the vibrated object) is inside the vibration table 400, the vibrated parts can be vibrated without applying a large force moment to all the vibrated parts. This reduces the generation of unnecessary vibration components (vibration noise) caused by the force moment applied to all the vibrated parts, enabling vibration to be performed with higher accuracy.

[0178] 36, 37 and 38 are respectively a plan view, a front view and a left side view of the vibration table 400 according to an embodiment of the present invention in a state where a vibration target T1 is attached. The vibration table 400 of the present embodiment is configured so as to be able to vibrate the vibration target while the vibration target is housed therein.

[0179] As shown in Fig. 37 and Fig. 38, the vibration table 400 includes a box part 400a having an opening on the upper surface, and a lid part 400b that closes the opening of the box part 400a. Fig. 36 shows a state in which the lid part 400b is removed. The lid part 400b is detachably attached to the box part 400a by a bolt (not shown) that fits with a female screw 421 provided on the upper surface of the box part 400a (more specifically, a frame part 420 described later). The vibration table 400 is configured so that its center of gravity is located approximately in the center of its outer shape.

[0180] The box portion 400a has a bottom plate 450 and a frame portion (wall portion) 420 protruding vertically upward from the periphery of the bottom plate 450. As shown in Fig. 36, the bottom plate 450 is formed in a square shape with the four corners rounded off.

[0181] A plurality of middle plates 430 and 440 are provided in a lattice pattern on the inside of frame portion 420, parallel to each wall surface (excluding the corner cut portions) of frame portion 420. Middle plate 430 extends in the Y-axis direction (left-right direction in FIG. 36), and middle plate 440 extends in the X-axis direction (up-down direction in FIG. 36). One end (or both ends) of middle plates 430 and 440 are joined to bottom plate 450 and frame portion 420.

[0182] An accommodation space S, which is a hollow portion where the middle plates (wall portions) 430 and 440 are not formed, is provided in the center of the vibration table 400. The object to be vibrated is accommodated in this accommodation space S.

[0183] The middle plates 430a and 440a that divide the accommodation space S have thick plate portions 431 and 441, respectively, at the center in the extension direction (horizontal direction) that are thicker than other portions. The thick plate portions 431 and 441 have through holes 432 and 442, respectively, through which bolts B for fixing the vibration target are passed. In Figs. 36-38, mounting parts 460 for mounting the vibration target T1 to the vibration table 400 are fixed to the middle plates 440a on both the left and right sides by the bolts B passed through the through holes 432.

[0184] Moreover, the vibration target T1 is disposed substantially in the center of the accommodation space S. As a result, the center of gravity of the vibration target T1 is located near the center of the vibration table 400.

[0185] The vibration table 400 of this embodiment is configured to be capable of vibrating an object having a rotating shaft (for example, a power transmission device such as an engine, a motor, or a differential gear) while rotating the rotating shaft. The object T1 of this embodiment (and object T2 described later) is a generator for a hybrid vehicle.

[0186] 37 and 38, an opening 422 for passing a drive belt DB for transmitting power is formed on the left side surface of the frame portion 420. An opening 443 for passing the drive belt DB is also formed on the left middle plate 440 at a position opposite to the opening 422. In this embodiment, the drive belt DB is stretched between a drive pulley (not shown) of an external drive device and a driven pulley FP attached to the vibration target T1, so that a driving force can be applied from outside to the vibration target T1 in the vibration table 400 during vibration, thereby vibrating the vibration target T1 while rotating the vibration target T1.

[0187] Note that instead of the drive belt DB (or in addition to the drive belt DB), other types of long objects connecting the vibration target T1 and an external device, such as pipes for supplying hydraulic or pneumatic pressure to the vibration target T1, power cables for supplying electric power, and communication cables for communicatively connecting an external information processing device and the vibration target (or a sensor or measuring device attached to the vibration target), can be passed through the openings 422 and 443. In addition to the openings 422 and 443, the vibration table 400 may be provided with openings for passing these pipes and cables.

[0188] Furthermore, for example, if the object to be excited is an engine, the object to be excited can be connected to an external measuring device by a drive belt DB, and the power generated by the object to be excited can be measured while the object is being excited.

[0189] Furthermore, the bottom plate 450 of the vibration table 400 is provided with a plurality of female screws 451 for fixing an object to be vibrated.

[0190] 39 is a left side view of the vibration table 400 with the vibration target T2 having a through hole for fixing at the bottom. The vibration target T2 is fixed to the bottom plate 450 of the vibration table 400 by screwing a bolt B passed through the through hole for fixing of the vibration target T2 into a female screw 451.

[0191] The vibration target T2 is also attached approximately at the center of the accommodation space S. This positions the center of gravity of the vibration target T2 near the center of the vibration table 400. In FIG. 39, the vibration target T2 is directly fixed to the bottom plate 450 of the vibration table 400. However, if the center of gravity of the vibration target T2 is low, the vibration target T2 may be fixed to the bottom plate 450 via a spacer or the like so that the center of gravity of the vibration target T2 is positioned at the center of the vibration table 400. If the center of gravity of the vibration target is high, the vibration target T2 may be attached to the vibration table 400 upside down by fixing the vibration target to the cover part 400b, for example.

[0192] As described above, in this embodiment, the vibration target and the vibration table 400 are vibrated in a state where the vibration target is accommodated inside the vibration table 400. By accommodating the vibration target inside the vibration table 400, the center of gravity of all the vibration target parts is always disposed inside the vibration table 400, so that it is possible to reliably reduce the generation of the force moment of all the vibration target parts.

[0193] The vibration table 400 in the above embodiment is configured in a box shape with a lid, but it is sufficient that the center of gravity of all the vibration receiving parts is arranged inside the vibration table 400 (more precisely, in a region where a space where the movable part 320 [slide linkage mechanism 360] of the Z-axis vibration unit 300 is extended in the Z-axis direction and a space where the movable part 122 [slide linkage mechanism 160] of the X-axis vibration unit 100 is extended in the X-axis direction intersects) when the vibration receiving object is attached. In other words, it is sufficient that the projection of the center of gravity of all the vibration receiving parts onto the XY plane perpendicular to the Z axis is included in the projection of the movable part 320 (slide linkage mechanism 360) of the Z-axis vibration unit 300 onto the XY plane, and the projection of the center of gravity of all the vibration receiving parts onto the YZ plane perpendicular to the X axis is included in the projection of the movable part 122 (slide linkage mechanism 160) of the X-axis vibration unit 100 onto the YZ plane. For example, a configuration may be adopted in which only the surface of the frame portion 420 to which the slide connecting mechanism 160 is attached and the bottom plate 450 to which the Z-axis vibration unit 300 is attached are provided.

[0194] In addition, in this embodiment, by providing the storage space S (the middle plates 430a and 440a that divide the storage space S) in the center of the vibration table 400, it is possible to more reliably bring the center of gravity of the vibrated object closer to the center of the vibration table 400.

[0195] <Second embodiment> Next, a second embodiment of the present invention will be described. The second embodiment differs from the first embodiment only in the configuration of the two-axis slider (slide connecting mechanism). In the following description of the second embodiment, the differences from the first embodiment will be mainly described, and the description of the configuration common to the first embodiment will be omitted.

[0196] Fig. 40 is an enlarged perspective view (partially see-through view) of the vicinity of a vibration table 2400 of the vibration device 2000 according to the second embodiment of the present invention. In Fig. 40, only the outline of the vibration table 2400 is shown by a two-dot chain line. Also, illustration of each counterbalance portion is omitted.

[0197] Each of the two-axis sliders (YZ slider 2160, ZX slider 2260, XY slider 2360) of this embodiment is composed of nine cross guides 2164, 2264, 2364 arranged at equal intervals in a lattice pattern (three rows and three columns), similar to XY slider 360 of the first embodiment. The cross guides 2164, 2264, 2364 have the same configuration as cross guide 364 of XY slider 360 of the first embodiment.

[0198] The XY slider 2360 of this embodiment has the same configuration as the XY slider 360 of the first embodiment (FIG. 12). That is, any two cross guides 2364 adjacent to each other in the X-axis direction or the Y-axis direction are arranged in the up-down (Z-axis direction) opposite directions. That is, one X-axis rail 2364a / X of any two cross guides 2364 adjacent to each other in the X-axis direction or the Y-axis direction is fixed to the tip surface (top plate 2324b) of the movable part 2320, and the other X-axis rail 2364a / X is fixed to the lower surface of the vibration table 2400. With this arrangement, the mass distribution and the directionality of the motion characteristics of each cross guide 2364 are averaged, and vibration performance with less directivity (or unevenness in directivity) is obtained.

[0199] In addition, since substantially the entire underside of the vibration table 2400 is uniformly vibrated via nine cross guides 2364 arranged evenly and densely, uniform vibration with less unevenness in the vibration state within the vibration table 2400 is possible.

[0200] In this embodiment, the cross guide 2164 of the YZ slider 2160 and the cross guide 2264 of the ZX slider 2260 also adopt the same arrangement configuration of the cross guides 364 (cross guide 364P in the first orientation, cross guide 364S in the second orientation) as in the first embodiment.

[0201] Specifically, for the YZ slider 2160, one Y-axis rail 2164a / Y of any two cross guides 2164 adjacent in the Y-axis or Z-axis direction is fixed to the tip surface (top plate 2124b) of the movable part 2120, and the other Y-axis rail 2164a / Y is fixed to the side of the vibration table 2400.

[0202] In addition, with regard to the ZX slider 2260, one of the X-axis rails 2264a / X of any two cross guides 2264 adjacent to each other in the Z-axis or X-axis direction is fixed to the tip surface (top plate 2224b) of the movable part 2220, and the other X-axis rail 2264a / X is fixed to the side surface of the vibration table 2400.

[0203] In this way, in three orthogonal directions, each surface of the vibration table 2400 is uniformly vibrated by the same configuration as the above-mentioned XY slider 2360. Therefore, uniform vibration with less unevenness in the vibration state can be achieved over the entire vibration table 2400. Also, in three orthogonal directions, the vibration table 2400 is vibrated via two-axis sliders (YZ slider 2160, ZX slider 2260, XY slider 2360) with the same configuration, so vibration with less directional characteristics can be achieved.

[0204] In addition, when the height of the vibration table 2400 is short, the YZ slider 2160 and the ZX slider 2260 may be configured by six cross guides 2164, 2264 arranged in two rows and three columns, excluding the top or bottom three of the nine cross guides 2164, 2264 arranged in three rows and three columns in the second embodiment. In this case, as in the modified example 360A (FIG. 34), the same number of cross guides in the first direction and cross guides in the second direction are arranged alternately in two orthogonal directions, so that the directionality of the vibration performance is reduced and each part of the vibration table 2400 can be vibrated more uniformly. <Third embodiment> Fig. 41 is an enlarged perspective view (partially see-through view) of the vicinity of a vibration table 3400 of a vibration excitation device 3000 according to the third embodiment of the present invention. In Fig. 41, only the outline of the vibration table 3400 is shown by a two-dot chain line. Also, illustration of each counterbalance unit is omitted.

[0205] In this embodiment, the arrangement of the cross guides 364 (cross guide 364P in the first direction and cross guide 364S in the second direction) in the above-mentioned XY slider variant 360A (Figure 34) is applied to each two-axis slider (YZ slider 3160, ZX slider 3260, XY slider 3360).

[0206] The YZ slider 3160 and the ZX slider 3260 of this embodiment connect the vibration table 400 and each horizontal actuator 3100A and 3200A with more cross guides 3164 and 3264 than the YZ slider 160 and the ZX slider 260 of the first embodiment, so that the vibration table 400 can be more uniformly vibrated. Also, the YZ slider 3160 and the ZX slider 3260 of this embodiment have a configuration in which the same number of cross guides in the first direction and cross guides in the second direction are alternately arranged, as in the modified example 360A (FIG. 34), so that the directionality of the vibration performance is reduced and each part of the vibration table 3400 can be more uniformly vibrated.

[0207] <Fourth embodiment> Next, a fourth embodiment of the present invention will be described. The fourth embodiment differs from the first embodiment described above only in the configuration of the two-axis slider (slide connecting mechanism). In the following description of the fourth embodiment, differences from the first embodiment will be mainly described, and a description of the configuration common to the first embodiment will be omitted.

[0208] 42, 43 and 44 are respectively an enlarged front view, a side view and a plan view of the vicinity of a vibration table 4400 of a vibration device 4000 according to the fourth embodiment of the present invention.

[0209] This embodiment differs from the configuration of the first embodiment in that in the cross guide sections 4164, 4264, 4364 of the two-axis sliders (YZ slider 4160, ZX slider 4260, XY slider 4360), connecting plates 4164c, 4264c, 4364c are used to connect the linear guides, thereby increasing the rigidity of the cross carriage section.

[0210] As shown in Fig. 43-25, the YZ slider 4160 of this embodiment includes three Y-axis linear guides 4164 / Y (Y-axis rails 4164a / Y and Y-axis carriages 4164b / Y), five Z-axis linear guides 4164 / Z (Z-axis rails 4164a / Z and Z-axis carriages 4164b / Z), and a connecting plate 4164c that connects all of the Y-axis linear guides 4164 / Y and the Z-axis linear guides 4164 / Z. The Y-axis carriage 4164b / Y and the Z-axis carriage 4164b / Z are eight-row carriages like the A-type carriage 364b / A of the first embodiment, but unlike the A-type carriage 364b / A, they are not made to have a low aspect ratio (shortened length) or to be lightweight by forming the notches C1 and C2. The A-type carriage 364b / A may be used as the Y-axis carriage 4164b / Y and the Z-axis carriage 4164b / Z. Also, instead of the A-type carriage 364b / A in other embodiments, the same carriage as the Y-axis carriage 4164b / Y (Z-axis carriage 4164b / Z) may be used.

[0211] As shown in FIG. 44, the Y-axis linear guide 4164 / Y is composed of one Y-axis rail 4164a / Y and two Y-axis carriages 4164b / Y.

[0212] 43, the Y-axis carriages 4164b / Y of the three Y-axis linear guides 4164 / Y are arranged with almost no gaps in the Z-axis direction and are fixed to the tip surface of the connecting arm 4162. The Y-axis rail 4164a / Y is fixed to one surface of a connecting plate 4164c. The three Y-axis linear guides 4164 / Y may be arranged with intervals in the Z-axis direction. In this case, in order to provide sufficient rigidity to the YZ slider 4160, it is desirable that the interval between the Y-axis linear guides 4164 / Y be narrower than the width of the Y-axis carriages 4164b / Y (size in the Z-axis direction).

[0213] Vibration performance is improved by attaching the Y-axis carriage 4164b / Y, which has a large mass, to a connecting arm 4162, which is vibrated only in the X-axis direction, rather than to a connecting plate 4164c, which is vibrated in two axial directions (X-axis and Y-axis).

[0214] In addition, since the Y-axis rail 4164a / Y has a uniform mass distribution in the Y-axis direction, there is little vibration caused by fluctuations in weight distribution when it is vibrated in the Y-axis direction. Therefore, by attaching the Y-axis rail 4164a / Y to the connecting plate 4164c that is vibrated in the Y-axis direction, the generation of vibration noise is reduced.

[0215] On the other hand, the Z-axis linear guide 4164 / Z is composed of one Z-axis rail 4164a / Z and one Z-axis carriage 4164b / Z.

[0216] 44, the Z-axis carriages 4164b / Z of the five Z-axis linear guides 4164 / Z are arranged in the Y-axis direction with almost no gaps between them, and are fixed to the other surface of the connecting plate 4164c. The Z-axis rails 4164a / Z are fixed to the side surface of the vibration table 4400. The three Z-axis linear guides 4164 / Z may be arranged with intervals between them in the Y-axis direction. In this case, in order to provide sufficient rigidity to the YZ slider 4160, it is desirable that the interval between the Z-axis linear guides 4164 / Z is narrower than the width (size in the Y-axis direction) of the Z-axis carriages 4164b / Z.

[0217] In this embodiment, the three Y-axis linear guides 4164 / Y are arranged in the Z-axis direction with no gaps. Similarly, the three Z-axis linear guides 4164 / Z are also arranged in the Y-axis direction with no gaps. In addition, all the Y-axis rails 4164a / Y and the Z-axis carriages 4164b / Z are directly fixed to a sufficiently rigid connecting plate 4164c. This configuration increases the rigidity of the YZ slider 4160 (particularly the connecting portion where the connecting plate 4164c, the Y-axis rails 4164a / Y, and the Z-axis carriages 4164b / Z are fixed together), and increases the resonance frequency.

[0218] The vibration performance is improved by attaching the Z-axis carriage 4164b / Z, which has a large mass, to a connecting plate 4164c, which is vibrated in only two axes (X-axis and Y-axis), rather than to a vibration table 4400, which is vibrated in three axes (X-axis, Y-axis, and Z-axis).

[0219] Furthermore, by attaching Z-axis rails 4164a / Z to the vibration table 4400 that is vibrated in the Z-axis direction, the generation of vibration noise is reduced.

[0220] Moreover, a plurality of Y-axis rails 4164a / Y are laid over substantially the entire surface of one surface of the connecting plate 4164c. The connecting plate 4164c is vibrated in the X-axis direction via the plurality of Y-axis rails 4164a / Y evenly covering one surface of the connecting plate 4164c. Therefore, the entire connecting plate 4164c is uniformly vibrated in the X-axis direction. Furthermore, the vibration forces transmitted from the Y-axis linear guides 4164 / Y are averaged by the highly rigid connecting plate 4164c, and are transmitted to the vibration table 4400 via the Z-axis linear guide 4164 / Z as a more uniform vibration force.

[0221] Similarly, a plurality of Z-axis rails 4164a / Z are laid over almost the entire surface of the side surface of the vibration table 4400 facing the movable part 120 of the X-axis vibration unit. The vibration table 4400 is vibrated in the X-axis direction via the plurality of Z-axis rails 4164a / Z that evenly cover this side surface. Therefore, the entire vibration table 4400 is evenly vibrated in the X-axis direction, and uniform vibration with little unevenness in acceleration and jerk within the vibration table 4400 is possible.

[0222] The ZX slider 4260 has the same configuration as the YZ slider 4160 described above, and therefore a detailed description thereof will be omitted.

[0223] 42-24, the XY slider 4360 of this embodiment includes three X-axis linear guides 4364 / X (X-axis rail 4364a / X and X-axis carriage 4364b / X), three Y-axis linear guides 4364 / Y (Y-axis rail 4364a / Y and Y-axis carriage 4364b / Y), and a connecting plate 4364c that connects all of the X-axis linear guides 4364 / X and the Y-axis linear guides 4364 / Y. The X-axis carriage 4364b / X and the Y-axis carriage 4364b / Y have the same configuration as the Y-axis carriage 4164b / Y and the Z-axis carriage 4164b / Z.

[0224] As shown in FIG. 43, the X-axis linear guide 4364 / X is composed of one X-axis rail 4364a / X and two X-axis carriages 4364b / X.

[0225] 42, X-axis rails 4364a / X of three X-axis linear guides 4364 / X are arranged at equal intervals in the Y-axis direction and fixed to the tip surface of movable part 320 of Z-axis vibration unit 300. X-axis carriages 4364b / X are fixed to the lower surface of connecting plate 4364c.

[0226] The Y-axis linear guide 4364 / Y is also composed of one Y-axis rail 4364a / Y and two Y-axis carriages 4364b / Y.

[0227] 43, the Y-axis rails 4364a / Y of the three Y-axis linear guides 4364 / Y are arranged at equal intervals in the X-axis direction and fixed to the upper surface of a connecting plate 4364c. The Y-axis carriages 4364a / Z are fixed to the lower surface of a vibration table 4400.

[0228] In this embodiment, the three X-axis linear guides 4364 / X are arranged at intervals narrower than the width (size in the Y-axis direction) of the X-axis carriage 4364b / X. Similarly, the three Y-axis linear guides 4364 / Y are arranged at intervals narrower than the width (size in the X-axis direction) of the Y-axis carriage 4364b / Y. In addition, all the X-axis carriages 4364b / X and the Y-axis rails 4364a / Y are directly fixed to a sufficiently rigid connecting plate 4364c. This configuration increases the rigidity of the XY slider 4360 (particularly the connecting portion where the connecting plate 4364c, the X-axis carriage 4364b / X, and the Y-axis rails 4364a / Y are fixed together), and increases the resonance frequency.

[0229] In this embodiment, the X-axis linear guides 4364 / X and Y-axis linear guides 4364 / Y of the XY slider 4360 are arranged with a gap between them, but similar to the Y-axis linear guides 4164 / Y and Z-axis linear guides 4164 / Z of the YZ slider 4160, the X-axis linear guides 4364 / X and Y-axis linear guides 4364 / Y may also be arranged with almost no gaps between them.

[0230] In addition, the connecting plates 4364c, 4264c, 4364c in this embodiment are formed from stainless steel, but if higher frequency vibration performance is required, the inertia of the two-axis slider may be reduced by using lightweight structural materials such as aluminum alloys such as duralumin, magnesium alloys, carbon fiber composite materials, etc.

[0231] <Fifth embodiment> Next, a fifth embodiment of the present invention will be described. Fig. 45 is an external view of a vibration device 5000 according to a fifth embodiment of the present invention. The fifth embodiment differs from the first embodiment in the configuration of the biaxial slider (slide coupling mechanism), the linear guides used in the movable part support mechanism and the fixed part support mechanism, and the configuration of the biaxial slider. In the following description of the fifth embodiment, the differences from the first embodiment will be mainly described, and the description of the configuration common to the first embodiment will be omitted.

[0232] First, the configuration of the ZX slider 5260 that connects the Y-axis vibration unit 5200 and the vibration table 5400 will be described.

[0233] 46 is a diagram showing the tip of the Y-axis vibration unit 5200 to which the ZX slider 5260 is attached. The ZX slider 5260 is equipped with two Z-axis rails 5264a / Z, four Z-axis carriages 5264b / Z, four X-axis carriages 5264b / X, two X-axis rails 5264a / X, and a connecting arm 5262. The connecting arm 5262 is a support member fixed to the top plate 5224b of the extension frame 5224.

[0234] Two Z-axis rails 5264a / Z extending in the Z-axis direction are arranged at a predetermined interval in the X-axis direction and fixed to the connecting arm 5262. Two Z-axis carriages 5264b / Z slidably engaged with each Z-axis rail 5264a / Z are attached to each Z-axis rail 5264a / Z.

[0235] Furthermore, two X-axis rails 5264a / X extending in the X-axis direction are arranged at a predetermined interval in the Z-axis direction and attached to the side surface of the vibration table 5400 (FIG. 45) facing the Y-axis excitation unit 5200. Two X-axis carriages 5264b / X that slidably engage with each X-axis rail 5264a / X are attached thereto.

[0236] Each Z-axis carriage 5264b / Z is fixed together with one of the X-axis carriages 5264b / X by bolts with the carriage tops overlapping each other, thereby forming a cross carriage 5264.

[0237] The pair of Z-axis rails 5264a / Z and the pair of X-axis rails 5264a / X are arranged in a lattice pattern and are connected at their intersecting positions by a cross carriage 5264. As a result, the movable part 5220 of the Y-axis vibration unit 5200 and the vibration table 5400 are connected to be slidable in both the X-axis and Z-axis directions.

[0238] As described above, the ZX slider 5260 of this embodiment includes a pair of Z-axis rails 5264a / Z and X-axis rails 5264a / X spaced apart from each other in the width direction (the X-axis direction for the Z-axis rail 5264a / Z, and the Z-axis direction for the X-axis rail 5264a / X). This configuration improves the rigidity of the ZX slider 5260 against the moment of force around the extension axis of each rail, enabling vibration at a higher frequency.

[0239] It is advantageous that the arrangement interval of each rail pair is as wide as possible. In this embodiment, the interval of the X-axis rails 5264a / X is limited by the height of the vibration table 5400. Therefore, one X-axis rail 5264a / X is attached to the upper end of the side of the vibration table 5400, and the other X-axis rail 5264a / X is attached to the upper end of the side of the vibration table 5400. In addition, the arrangement interval of the Z-axis rails 5264a / Z is limited by the diameter of the movable part 5220 (top plate 5224b) of the Y-axis vibration unit 5200. Therefore, as shown in FIG. 46, the interval of the pair of Z-axis rails 5264a / Z is the maximum interval within the range in which each Z-axis rail 5264a / Z does not go outside the cylindrical surface obtained by extending the outer circumferential surface of the movable part 5220 in the Y-axis direction.

[0240] Next, the internal structure of Z-axis linear guide 5264 / Z composed of Z-axis rail 5264a / Z and Z-axis carriage 5264b / Z will be described. Note that other linear guides used in vibration device 5000 also have the same structure as Z-axis linear guide 5264 / Z.

[0241] Fig. 48 is a longitudinal cross-sectional view of the Z-axis rail 5264a / Z and Z-axis carriage 5264b / Z of the ZX slider 5260 cut by a plane perpendicular to the long axis of the Z-axis rail 5264a / Z (i.e., the XY plane). Also, Fig. 49 is a view seen from the arrow II in Fig. 48. The Z-axis linear guide 5264 / Z of this embodiment uses rollers as the rolling elements. By using rollers as the rolling elements, high positional accuracy and rigidity can be obtained. It is also possible to use a linear guide that uses balls as the rolling elements.

[0242] In FIG. 48, a groove GR having a trapezoidal cross section is formed on both side surfaces in the Y-axis direction of the Z-axis rail 5264a / Z. As shown in FIG. 48 and FIG. 49, a groove GR extending in the Z-axis direction is formed in the Z-axis carriage 5264b / Z so as to surround the Z-axis rail 5264a / Z. A protrusion PR is formed on each side wall of the groove GR, extending along the groove GR of the Z-axis rail 5264a / Z. A pair of inclined surfaces is formed on the protrusion PR, which is parallel to each inclined surface of the trapezoidal groove GR of the Z-axis rail 5264a / Z. A gap is formed between the total of four inclined surfaces of the pair of grooves GR and the inclined surface of the protrusion PR facing each other. A number of stainless steel rollers RE' (RE'h, RE'i, RE'j, RE'k) and a resin retainer RT' that rotatably holds and connects the rollers are housed in each of the four gaps. The rollers RE' are held by being sandwiched between the inclined surfaces of the grooves GR and the inclined surfaces of the projections PR.

[0243] Furthermore, inside Z-axis carriage 5264b / Z, four unloaded paths [roller retreat paths] Q' (Q'a, Q'b, Q'c, Q'd) are formed parallel to the four gaps. As shown in FIG. 49, the unloaded paths Q'a, Q'b, Q'c, Q'd communicate with the corresponding gaps at both ends. This forms a circulation path for circulating rollers RE' (RE'h, RE'i, RE'j, RE'k) and retainer RT'.

[0244] When the Z-axis carriage 5264b / Z moves in the Z-axis direction relative to the Z-axis rail 5264a / Z, the numerous rollers RE'h, RE'i, RE'j, RE'k circulate together with the retainer RT' within each of the circulation paths CP'a, CP'b, CP'c, CP'd. Therefore, even if a large load is applied in a direction different from the Z-axis direction, the carriage can be supported by the numerous rollers, and the resistance in the Z-axis direction is kept small by the rolling of the rollers RE' (RE'h, RE'i, RE'j, RE'k), so that the Z-axis carriage 5264b / Z can be moved smoothly relative to the Z-axis rail 5264a / Z.

[0245] As shown in Fig. 49, the retainer RT' connecting multiple rollers (e.g., rollers RE'k) has multiple spacer portions RTs' arranged between the rollers RE'k, and a pair of bands RTb' connecting the multiple spacer portions RTs'. Both ends of each spacer portion RTs' are fixed to the pair of bands RTb', respectively, to form a ladder-shaped retainer RT'. Each roller RE'k is held in the space surrounded by a pair of adjacent spacer portions RTs' and a pair of bands RTb'.

[0246] In addition, by interposing a spacer portion RTs' of a retainer RT' with low hardness between the rollers RE'k, oil film breakdown and wear caused by direct contact between the rollers RE'k over a very small contact area are prevented, frictional resistance is reduced, and the lifespan is significantly extended.

[0247] In this way, by connecting the Y-axis vibration unit 5200 and the vibration table 5400 via the ZX slider 5260 which is slidable in the X-axis and Z-axis directions with very little frictional resistance, even if the X-axis vibration unit 5100 and the Z-axis vibration unit 5300 vibrate the vibration table 5400 in the X-axis and Z-axis directions, the vibration components of the vibration table 5400 in the X-axis and Z-axis directions are not transmitted to the Y-axis vibration unit 5200. In addition, since the vibration table 5400 receives almost no force in the Z-axis and X-axis directions due to the driving of the Y-axis vibration unit 5200, vibration with little crosstalk is possible.

[0248] Moreover, the YZ slider 5160 connecting the X-axis vibration unit 5100 and the vibration table 5400 has the same configuration as the ZX slider 5260, and the vibration table 5400 is connected to the movable part of the X-axis vibration unit 5100 so as to be slidable in the Y-axis and Z-axis directions. Therefore, even if the vibration table 5400 is vibrated in the Y-axis and Z-axis directions by the Y-axis vibration unit 5200 and the Z-axis vibration unit 5300, the vibration components of the vibration table 5400 in the Y-axis and Z-axis directions are not transmitted to the X-axis vibration unit 5100. Moreover, since the vibration table 5400 receives almost no force in the Y-axis and Z-axis directions due to the driving of the X-axis vibration unit 5100, vibration with little crosstalk is possible.

[0249] Next, the configuration of the XY slider 5360 that connects the Z-axis vibration unit 5300 and the vibration table 5400 will be described.

[0250] Fig. 47 is a side view of the vicinity of the XY slider 5360. Fig. 50 is a diagram for explaining the arrangement of rails of the XY slider 5360 attached to the top plate 5324bb of the movable part 5320 of the Z axis vibration unit 5300.

[0251] The XY slider 5360 has four cross guides 364. The cross guides 364 (364P, 364S) have one X-axis linear guide 5364 / X (5364 / XL, 5364 / XH) and one Y-axis linear guide 5364 / Y (5364 / YH, 5364 / YL). The X-axis linear guide 5364 / X is composed of one X-axis rail 5364a / X (5364a / XL, 5364a / XH) and one X-axis carriage 5364b / X (5364b / XL, 5364b / XH), and the Y-axis linear guide 5364 / Y is composed of one Y-axis rail 5364a / Y (5364a / YH, 5364a / YL) and one Y-axis carriage 5364b / Y (5364b / YH, 5364b / YL).

[0252] The X-axis carriage 5364b / X and the Y-axis carriage 5364b / Y are fixed together with bolts with their upper surfaces overlapping each other to form a cross carriage. This cross carriage has the same configuration as the cross carriage 5264 of the ZX slider 5260 described above.

[0253] The cross guide 364 includes a cross guide 364P in a first orientation in which an X-axis linear guide 5364 / X is attached to the vibration table 5400, and a cross guide 364S in a second orientation in which a Y-axis linear guide 5364 / Y is attached to the vibration table 5400. The X-axis rail 5364a / XL of the cross guide 364P is attached to the upper surface of the top plate 5324b, and the Y-axis rail 5364a / YH is attached to the lower surface of the vibration table 5400. In addition, the Y-axis rail 5364a / YL of the cross guide 364S is attached to the upper surface of the top plate 5324b, and the X-axis rail 5364a / XH is attached to the lower surface of the vibration table 5400. That is, each cross guide 364 connects the movable part 5320 of the Z-axis vibration unit 5300 and the vibration table 5400 to be slidable in the X-axis and Y-axis directions.

[0254] The X-axis linear guide 5364 / X and Y-axis linear guide 5364 / Y attached to the top plate 5324b are referred to as the low-level X-axis linear guide 5364 / XL (low-level X-axis rail 5364a / XL, low-level X-axis carriage 5364b / XL) and the low-level Y-axis linear guide 5364 / YL (low-level Y-axis rail 5364a / YL, low-level Y-axis carriage 5364b / YL), respectively. In addition, the X-axis linear guide 5364 / X and the Y-axis linear guide 5364 / Y attached to the vibration table 5400 are referred to as the high-level X-axis linear guide 5364 / XH (high-level X-axis rail 5364a / XH, high-level X-axis carriage 5364b / XH) and the high-level Y-axis linear guide 5364 / YH (high-level Y-axis rail 5364a / YH, high-level Y-axis carriage 5364b / YH), respectively.

[0255] As shown in FIG. 50, the four cross guides 364 are attached to the four corners of the upper surface of the approximately square top plate 5324b. The cross guides 364P and 364S are arranged alternately around the central axis Ax of the Z-axis vibration unit 5300. That is, the arrangement of the cross guides 364P and 364S has four-fold rotational symmetry around the central axis Ax. This arrangement of the cross guides 5364 equalizes the mass distribution around the central axis Ax of the XY slider 5360. As a result, the response characteristics of the XY slider 5360 to vibrations in the X-axis and Y-axis directions become more uniform.

[0256] The X-axis carriage 5364b / X and the Y-axis carriage 5364b / Y have the same structure except for the type of mounting holes (the X-axis carriage 5364b / X has four through holes, and the Y-axis carriage 5364b / Y has four screw holes). The X-axis rail 5364a / X and the Y-axis rail 5364a / Y are also the same. Each linear guide (the X-axis linear guide 5364 / X and the Y-axis linear guide 5364 / Y) has a different mass distribution in the X-axis direction and the Y-axis direction. However, by connecting these two to form the cross guide 5364, the mass distribution in the X-axis direction and the Y-axis direction is equalized. This configuration also makes the response characteristics of the XY slider 5360 to vibrations in the X-axis direction and the Y-axis direction more uniform.

[0257] Each vibration unit (X-axis vibration unit 5100, Y-axis vibration unit 5200, Z-axis vibration unit 5300) is attached to the device base 5500 via a pair of support units 5150, 210, 310 (fixed part support mechanism). The support units 5150, 210, 310 are shock absorbers equipped with elastic elements (coil springs or air springs) that elastically support each vibration unit 5100, 5200, 5300, and suppress the transmission of vibration (especially high frequency components) in the vibration direction of each vibration unit to the device base 5500. By attaching each vibration unit 5100, 5200, 5300 to the device base 5500 via the support units 5150, 5250, 5350, the transmission of vibration between the vibration units 5100, 5200, 5300 is suppressed, and more accurate three-axis vibration with less crosstalk is possible.

[0258] Sixth embodiment Next, a sixth embodiment of the present invention will be described. The sixth embodiment differs from the first embodiment in the frame structure of the movable parts of each electrodynamic actuator (each horizontal actuator in the X-axis direction and the Y-axis direction, and the vertical actuator 6300A). In the following description of the sixth embodiment, the differences from the first embodiment will be mainly described, and the description of the configuration common to the first embodiment will be omitted.

[0259] 51 is a front view of an electrodynamic three-axis vibration device 6000 according to a sixth embodiment of the present invention (only a Z-axis vibration unit 6300, a vibration table 400, an X-axis counterbalance unit 610, a Y-axis counterbalance unit 620, and a Z-axis counterbalance unit 630 are shown). A movable unit 6320 of a vertical actuator 6300A of the sixth embodiment includes a frame 6322.

[0260] Fig. 52 and Fig. 53 are perspective views showing the appearance of the frame 6322. Fig. 52 is a view of the frame 6322 seen from the front side (the vibration table 400 side), and Fig. 53 is a view of the frame 6322 seen from the back side. The frame 6322 is formed in a generally cylindrical shape having a central axis extending in the driving direction (Z-axis direction).

[0261] The frame 6322 in this embodiment is formed by casting and cutting an aluminum alloy, but the material and processing method of the frame 6322 are not limited to this. The frame 6322 may be formed from other metal materials such as stainless steel, titanium alloy, or magnesium alloy, or resin materials such as glass fiber reinforced plastic (GFRP) or carbon fiber reinforced plastic (CFRP). The frame 6322 may be integrally formed by welding, melting, bonding, injection molding, three-dimensional modeling (3D printer), or the like.

[0262] The frame 6322 includes a substantially cylindrical main pillar 6322a extending in the driving direction, eight plate-like ribs 6322b (6322b1, 6322b2) extending radially from the outer circumferential surface of the main pillar 6322a, a circular front peripheral portion 6322c connecting the tips of the eight ribs 6322b on the front side, a substantially circular rear peripheral portion 6322d connecting the tips of the eight ribs 6322b on the rear side, and a cylindrical intermediate connecting portion 6322e connecting the middle portions of the eight ribs 6322b in the radial direction (radial direction) on the front side. A rod 326 (see FIG. 8) is fitted into the main pillar 6322a from below.

[0263] The eight ribs 6322b are connected in a ring shape by the front peripheral portion 6322c, the back peripheral portion 6322d, and the intermediate connecting portion 6322e, thereby achieving both high rigidity and light weight for the frame 6322. Furthermore, the intermediate connecting portion 6322e makes it possible to support the base plate 6362 more uniformly (surface-wise).

[0264] A front surface of the frame 6322 (specifically, the rib 6322b, the front peripheral portion 6322c, and the intermediate connecting portion 6322e) is formed with a plurality of tapped holes 6322ft for attaching the base plate 6362. A rear surface of the frame 6322 (specifically, the rear peripheral portion 6322d) is formed with a plurality of screw holes 6322rt for attaching the drive coil 321.

[0265] A row of screw holes 6322bt for attaching the Z-axis rail 344a of the movable part support mechanism 340 is formed on the end faces (outer peripheral faces) of four ribs 6322b1 of the eight ribs 6322b. Furthermore, a fitting groove 6322bg for fitting with the coil attachment part 322d is formed on the end faces of the remaining four ribs 6322b2. The ribs 6322b1 and 6322b2 are alternately arranged in the circumferential direction.

[0266] A recess 6322ca is formed near the rib 6322b on the outer periphery of the front peripheral portion 6322c so as not to interfere with the Z-axis carriage 344b of the movable part support mechanism 340. A step 6322cb for positioning the Z-axis rail 344a in the horizontal direction is formed on the bottom surface of the recess 6322ca along the row of holes 6322bt. The end surface of the rib 6322b1 is also offset to the main column 6322a side to the same depth as the bottom surface of the recess 6322ca, forming a rail mounting surface 6322br. In addition, a step 6322bs for positioning the Z-axis rail 344a in the vertical direction is formed on the end surface of the rib 6322b1 at the boundary of the rail mounting surface 6322br.

[0267] The movable part 320 of the first embodiment described above has a two-piece frame in which an extension frame 324 is connected to a main frame 322 with bolts. By adopting a two-piece frame structure, it is possible to additionally equip a movable part support mechanism 340 to a standard electrodynamic actuator having only the main frame 322.

[0268] However, the two-split frame structure requires a structure for connecting the two parts (main frame 322, extension frame 324), and the entire frame structure cannot be optimized (i.e., the design must be based on the existing main frame 322), which increases the frame's weight and upsets the weight balance. As a result, the two-split frame structure is one of the factors that limits the vibration performance of the electrodynamic actuator. In addition, the two-split frame requires a process for connecting the two parts, and requires many man-hours for assembly.

[0269] In this embodiment, a one-piece frame 6322 is used instead of the main frame 322 and the extension frame 324 of the first embodiment. This configuration eliminates the need to provide a structure for connecting multiple parts of the frame, and also increases the degree of freedom in design, resulting in a frame 6322 that is lighter, has higher rigidity, has a better weight balance, and can be assembled with fewer steps.

[0270] In the first embodiment, the top plate 322b (corresponding to the base plate 6362 in this embodiment) for mounting the XY slider 360 to the extension frame 324 is integrally formed, but in this embodiment, the frame 6322 and the base plate 6362 are separate members. This eliminates the need to change the design of the frame 6322 in accordance with the design of the XY slider 360, making it easier to manage the design and manufacture of the frame 6322. Also, similar to the first embodiment, the frame 6322 and the base plate 6362 may be integrated.

[0271] The frame 6322 of this embodiment can also be applied to the first to fifth embodiments.

[0272] The above is a description of exemplary embodiments of the present invention. The embodiments of the present invention are not limited to those described above, and various modifications are possible within the scope of the technical ideas expressed by the claims. For example, the embodiments of the present application also include configurations that appropriately combine configurations of the embodiments etc. exemplified in this specification and / or configurations of the embodiments etc. that are obvious to a person skilled in the art from the description in this specification.

[0273] The above-described embodiments are examples in which the present invention is applied to an electrodynamic vibration device, but the present invention is not limited to this configuration, and the present invention can also be applied to a vibration device using another type of vibration unit (for example, a linear motor, a linear motion vibration unit combining a rotary electric motor or a hydraulic rotary motor with a rotary-linear motion conversion mechanism such as a feed screw mechanism, etc.). For example, the present invention can be applied to a vibration unit using a servo motor and a ball screw mechanism as described in Patent Document 1.

[0274] Further, each of the above embodiments is an example in which the present invention is applied to an electrodynamic three-axis simultaneous vibration excitation device, but the present invention can naturally be applied to a one-axis or two-axis vibration excitation device.

[0275] In addition, in the first embodiment, an air spring is used as a cushioning means for damping vibrations of the support unit 350 (fixed portion support mechanism), but it is also possible to use other types of springs (e.g., steel coil springs) or elastic bodies (such as vibration-isolating rubber) that have a vibration-damping effect.

[0276] The number (1, 2, 3, 4, 5 or more) and arrangement of linear guides for each axis of the slide connection mechanism are appropriately selected depending on the size of the vibration table, the size and mass distribution of the test specimen, the test conditions (frequency, amplitude), etc. Furthermore, the number of cross guides provided in the XY slider 360 of the first embodiment and the YZ slider 2160, ZX slider 2260, and XY slider 2360 of the third embodiment is not limited to nine, and can be any number of three or more depending on the size of the vibration table, the load of the test specimen, the test conditions, etc.

[0277] In each of the above embodiments (except for the fifth embodiment), balls RE are used as the rolling elements of the linear guide, but rollers may be used as the rolling elements.

[0278] In each of the above embodiments (except for the fifth embodiment), the linear guide has eight load paths, but five, six, seven, nine or more load paths may be provided. Also, in each of the above embodiments (except for the fifth embodiment), multiple pairs of paths are provided close to each other, but it is not necessary to provide load paths with path pairs as the basic unit. Multiple load paths may be provided at equal intervals, or may be provided at completely unequal intervals. It is also possible to use a four-row linear guide having a conventional four load paths.

[0279] In each of the above embodiments, the vertical direction is referred to as the Z-axis direction, but the vertical direction may also be referred to as the Y-axis direction or the X-axis direction. Also, although it is preferable that each vibration direction is a horizontal or vertical direction, the vibration device may be arranged so that two or more of the three vibration directions are non-vertical and non-horizontal.

[0280] In each of the above embodiments, the cross guides are arranged in a square lattice at equal intervals in two perpendicular directions, but they may be arranged in a hexagonal lattice (equilateral triangle arrangement). For example, in an XY slider, a cross guide in a first direction may be arranged at the center of gravity of a periodic structure (unit lattice) of equilateral triangles on the XY plane, and cross guides in a second direction may be arranged at each vertex of the equilateral triangle.

[0281] In the above-described first embodiment, the opening for inserting and removing the vibration target into and from the vibration table 400 is formed on the top surface of the box portion 400a, but this opening may be provided on the side surface of the box portion.

[0282] In the above first embodiment, the vibration table 400 is provided with the female screw 421 and the through holes 432 and 442 for attaching the object to be excited, but the vibration table 400 may be provided with other types of mounting structures (e.g., fixing bands, clamps, electromagnets, etc.) for attaching the object to be excited.

[0283] The above-described first embodiment is an example in which the present invention is applied to an electrodynamic vibration device, but the present invention is not limited to this configuration, and the present invention can also be applied to vibration devices that use other types of vibration units (for example, a linear motion vibration unit that combines a rotary electric motor or hydraulic rotary motor with a rotary-linear motion conversion mechanism such as a feed screw mechanism, a linear motor, a hydraulic cylinder, etc.).

[0284] Further, the vibration excitation device 1 of the first embodiment described above is an example in which the present invention is applied to a two-axis vibration excitation device, but the present invention can also be applied to one-axis and three-axis vibration excitation devices.

[0285] The above-described embodiments are examples in which the present invention is applied to an electrodynamic vibration device, but the present invention is not limited to this configuration, and the present invention can also be applied to a vibration device using another type of vibration unit (for example, a linear motor, a linear motion vibration unit combining a rotary electric motor or a hydraulic rotary motor with a rotary-linear motion conversion mechanism such as a feed screw mechanism, etc.). For example, the present invention can be applied to a vibration unit using a servo motor and a ball screw mechanism as described in International Publication No. 2009 / 011433.

[0286] Further, each of the above embodiments is an example in which the present invention is applied to an electrodynamic three-axis simultaneous vibration excitation device, but the present invention can naturally be applied to a one-axis or two-axis vibration excitation device.

[0287] In addition, in the first embodiment, an air spring is used as a cushioning means for damping vibrations of the support unit 350 (fixed portion support mechanism), but it is also possible to use other types of springs (e.g., steel coil springs) or elastic bodies (such as vibration-isolating rubber) that have a vibration-damping effect.

[0288] The number (1, 2, 3, 4, 5 or more) and arrangement of linear guides for each axis of the slide connection mechanism are appropriately selected depending on the size of the vibration table, the size and mass distribution of the test specimen, the test conditions (frequency, amplitude), etc. Furthermore, the number of cross guides provided in the XY slider 360 of the first embodiment and the YZ slider 2160, ZX slider 2260, and XY slider 2360 of the third embodiment is not limited to nine, and can be any number of three or more depending on the size of the vibration table, the load of the test specimen, the test conditions, etc.

[0289] In the above embodiment, balls RE are used as the rolling elements of the linear guide, but rollers may also be used as the rolling elements.

[0290] In the above embodiment, the linear guide has eight load paths, but five, six, seven, nine or more load paths may be provided. In addition, the linear guide of the above embodiment has a plurality of pairs of paths formed close to each other, but it is not necessary to provide the load paths with the path pairs as the basic unit. Multiple load paths may be provided at equal intervals, or may be provided at completely unequal intervals.

[0291] In addition, the scope of the present invention also includes those in which some of the components of each of the above-mentioned embodiments are omitted, those in which multiple combinations of each of the above-mentioned embodiments are combined, and those in which some or all of the components of two or more of the above-mentioned embodiments are combined.

[0292] <Summary> The above-mentioned embodiment of the present invention will be summarized below.

[0293] A vibration device according to one embodiment of the present invention includes a vibration table, an X-axis vibration unit that vibrates the vibration table in the X-axis direction, and a Y-axis linear guideway that slidably connects the vibration table and the X-axis vibration unit in the Y-axis direction perpendicular to the X-axis direction. The Y-axis linear guideway includes a Y-axis rail extending in the Y-axis direction, a plurality of rolling elements that can roll on the Y-axis rail, and a Y-axis carriage that can run on the Y-axis rail via the plurality of rolling elements. Five or more load paths, each of which has a plurality of rolling elements rolling thereon, are formed between the Y-axis carriage and the Y-axis rail.

[0294] According to this configuration, the rigidity and motion accuracy of the linear guide are improved, and vibration noise can be reduced.

[0295] The above vibration device may be configured so that eight load paths are formed.

[0296] With this configuration, the rigidity and motion accuracy of the linear guide are significantly improved, and it becomes possible to reduce vibration noise to a level that allows simultaneous multi-axis excitation in the frequency range of, for example, 2 kHz or higher.

[0297] In the above-mentioned vibration device, the Y-axis carriage may be formed with multiple unloaded paths corresponding to the multiple loaded paths, and each pair of loaded and unloaded paths may be connected at both ends to form a circulation path through which the rolling elements circulate.

[0298] In the above vibration excitation device, the Y-axis linear guideway may be configured to circulate along the circulation path together with the rolling elements and include a retainer that prevents the rolling elements from contacting each other.

[0299] In the above vibration device, the length L of the Y-axis carriage may be within a range of 70 to 160 mm.

[0300] In the above vibration device, the length L of the Y-axis carriage may be within a range of 90 to 140 mm.

[0301] In the above vibration device, the length L of the Y-axis carriage may be within a range of 110-130 mm.

[0302] In the above vibration device, the aspect ratio L / W, which is the ratio of the length L to the width W of the Y-axis carriage, may be within the range of 0.65 to 1.5.

[0303] In the above vibration device, the aspect ratio L / W, which is the ratio of the length L to the width W of the Y-axis carriage, may be within the range of 0.7 to 1.4.

[0304] In the above vibration device, the aspect ratio L / W, which is the ratio of the length L to the width W of the Y-axis carriage, may be within the range of 0.75 to 1.35.

[0305] In the above vibration device, the rolling elements may be balls or rollers.

[0306] In the above-mentioned vibration device, a plurality of grooves Ga extending in the Y-axis direction may be formed in the Y-axis rail, and a plurality of grooves Gb extending in the Y-axis direction may be formed in the Y-axis carriage at positions opposite each of the plurality of grooves Ga, so that a load path is formed by pairs of grooves Ga and grooves Gb facing each other.

[0307] In the above-mentioned vibration device, the Y-axis linear guideway may have four load path pairs each consisting of a pair of load paths formed close to each other, and the load path pairs may be formed near one side surface, the other side surface and both side surfaces of the top surface of the Y-axis rail, respectively.

[0308] In the above vibration device, the Z-axis direction perpendicular to the X-axis and Y-axis directions is a vertical direction, and a first connecting mechanism is provided that connects the vibration table and the X-axis vibration unit so as to be slidable in the Y-axis direction, and the first connecting mechanism may be configured to include a pair of Y-axis linear guideways arranged at a distance in the Z-axis direction.

[0309] In the above-mentioned vibration device, when the vibrating object is attached to the vibration table, the projection of the center of gravity of the vibrating object onto a projection plane perpendicular to the X-axis direction may be included in the projection of the movable part of the X-axis vibration unit onto the projection plane.

[0310] The above vibration device may be configured to include a table, a first actuator that vibrates the vibration table in a first direction, a first slide connection mechanism that connects the vibration table and the first actuator so that the vibration table and the first actuator can slide in a second direction perpendicular to the first direction, and a counterbalance part attached to the vibration table that compensates for imbalance in the vibrated part caused by attaching the first slide connection mechanism to the vibration table.

[0311] Furthermore, a vibration device according to another embodiment of the present invention includes a vibration table, a first actuator that vibrates the vibration table in a first direction, a first slide connection mechanism that connects the vibration table and the first actuator so that the vibration table and the first actuator can slide in a second direction perpendicular to the first direction, and a counterbalance unit attached to the vibration table that compensates for imbalance in the vibrated part caused by attaching the first slide connection mechanism to the vibration table.

[0312] Conventional vibration devices can apply vibration with sufficiently high accuracy to a reference point on the vibration table (for example, the center of the top surface of the vibration table), but the vibration state varies depending on the position on the vibration table, so the vibration accuracy is insufficient at positions other than the reference point. With this configuration, it is possible to reduce the variation in vibration on the vibration table, and it is possible to obtain sufficient vibration accuracy even at positions other than the reference point.

[0313] In the above vibration device, the counterbalance portion may have a weight portion and a buffer portion, and the weight portion may be fixed to the vibration table via the buffer portion.

[0314] In the above vibration device, the weight portion may be configured to have a flat plate shape.

[0315] In the above vibration device, the buffer portion may be in a sheet shape.

[0316] In the above vibration device, the buffer portion may include an elastomer.

[0317] In the above vibration device, the buffer section may have a spacer that supports the weight section at a distance from the vibration table.

[0318] In the above vibration device, the counterbalance portion may include a plurality of bolts for fixing the weight portion, and the fixing interval between the plurality of bolts may be 100 mm or less.

[0319] In the above vibration device, the fixing interval may be 50 mm or less.

[0320] In the above vibration device, the buffer section may be configured to have a first weight section, a first buffer section sandwiched between the vibration table and the first weight section, a second weight section, and a second buffer section sandwiched between the first weight section and the second weight section.

[0321] In the above vibration device, the buffer section may have a third weight section, and a third buffer section sandwiched between the second weight section and the third weight section.

[0322] In the above vibration device, the first weight portion may be fixed to the vibration table by a first bolt, the second weight portion may be fixed to the first weight portion by a second bolt, and the third weight portion may be fixed to the second weight portion by a third bolt.

[0323] Furthermore, a vibration device according to yet another embodiment of the present invention has three axial directions, X-axis, Y-axis, and Z-axis directions which are orthogonal to each other, and includes a vibration table, an X-axis actuator which vibrates the vibration table in the X-axis direction, a Y-axis actuator which vibrates the vibration table in the Y-axis direction, a Z-axis actuator which vibrates the vibration table in the Z-axis direction, a YZ slide coupling mechanism which couples the vibration table and the X-axis actuator slidably in the Y-axis and Z-axis directions, a ZX slide coupling mechanism which couples the vibration table and the Y-axis actuator slidably in the Z-axis and X-axis directions, and a vibration table and the Z-axis actuator slidably in the X-axis and Y-axis directions. The vibration table may be configured to include an XY slide connection mechanism that connects the vibration table and the YZ slide connection mechanism so as to be slidable in the vibration direction, an X-axis counterbalance unit attached to the vibration table and compensating for the imbalance of the vibrated part caused by attaching the YZ slide connection mechanism to the vibration table, a Y-axis counterbalance unit attached to the vibration table and compensating for the imbalance of the vibrated part caused by attaching the ZX slide connection mechanism to the vibration table, and a Z-axis counterbalance unit attached to the vibration table and compensating for the imbalance of the vibrated part caused by attaching the XY slide connection mechanism to the vibration table.

[0324] According to this configuration, the force moment applied to the object to be vibrated by the vibration is suppressed, thereby enabling vibration to be applied with higher accuracy.

[0325] In the above vibration device, the XY slide connection mechanism may include an X-axis linear guideway that guides linear motion in the X-axis direction and a Y-axis linear guideway that guides linear motion in the Y-axis direction, and the vibration table and the Z-axis actuator may be connected via the X-axis linear guideway and the Y-axis linear guideway.

[0326] In the above vibration device, the X-axis linear guideway may include an X-axis rail extending in the X-axis direction and an X-axis carriage engaging with the X-axis rail so as to be slidable in the X-axis direction, and the Y-axis linear guideway may include a Y-axis rail extending in the Y-axis direction and a Y-axis carriage engaging with the Y-axis rail so as to be slidable in the Y-axis direction.

[0327] In the above vibration excitation device, eight load paths, on each of which a plurality of rolling elements roll, may be formed between the X-axis carriage and the X-axis rail.

[0328] In the above vibration device, the Y-axis carriage may be fixed to the X-axis carriage, so that the X-axis linear guideway and the Y-axis linear guideway are connected to form a cross guide, and one of the X-axis rail and the Y-axis rail of the cross guide may be attached to the vibration table, and the other may be attached to the X-axis actuator.

[0329] In the above vibration device, the XY slide connection mechanism may be equipped with a plurality of cross guides, and the plurality of cross guides may be configured to include a cross guide in a first orientation in which the X-axis rail is attached to the vibration table, and a cross guide in a second orientation in which the Y-axis rail is attached to the vibration table.

[0330] In the above vibration device, the XY slide connection mechanism may be configured to include a plurality of cross guides in a first orientation and a plurality of cross guides in a second orientation, and the plurality of cross guides in the first orientation and the plurality of cross guides in the second orientation may be arranged alternately in two directions, the X-axis direction and the Y-axis direction.

[0331] In the above vibration device, the XY slide connection mechanism may be configured to include the same number of cross guides in the first direction and the same number of cross guides in the second direction.

[0332] In the above vibration excitation device, the multiple cross guides may be arranged in a lattice pattern in the X-axis and Y-axis directions.

[0333] Furthermore, a vibration device according to yet another embodiment of the present invention includes a vibration table, a first actuator that vibrates the vibration table in a first direction, and a first slide connection mechanism that connects the vibration table and the first actuator so that the vibration table and the first actuator can slide in a second direction perpendicular to the first direction, and a predetermined imbalance is given to the vibration table in advance, so that the center of gravity of the vibrated part including a part of the first slide connection mechanism and the vibration table coincides with the center of the vibration table.

[0334] According to this configuration, when the vibrated object is attached to the vibration table, the center of gravity of the vibrated part (including the vibrated object, the vibration table, and the part of the first slide connection mechanism fixed to the vibration table) coincides with the center of the vibration table, thereby suppressing the force moment applied to the vibrated part due to vibration, enabling more precise vibration.

[0335] Furthermore, a vibration device according to yet another embodiment of the present invention includes a vibration table, an X-axis actuator that drives the vibration table in the X-axis direction, which is the horizontal direction, and a first connecting mechanism that connects the vibration table and the X-axis actuator slidably in the Y-axis direction, which is the horizontal direction perpendicular to the X-axis direction, wherein the first connecting mechanism includes a pair of linear guideways that are spaced apart in the Z-axis direction, which is the vertical direction, and connect the vibration table and the X-axis actuator slidably in the Y-axis direction.

[0336] According to this configuration, the first connecting mechanism that connects the vibration table and the X-axis actuator slidably in the Y-axis direction includes a pair of linear guideways spaced apart in the Z-axis direction, thereby increasing the rigidity of the first connecting mechanism around the Y-axis and improving the vibration performance.

[0337] The above vibration device may be configured to include a Y-axis actuator that drives the vibration table in the Y-axis direction, and a second connecting mechanism that connects the vibration table and the Y-axis actuator so that they can slide in the X-axis direction, and the second connecting mechanism may include a pair of linear guideways that are spaced apart in the Z-axis direction and connect the vibration table and the Y-axis actuator so that they can slide in the X-axis direction.

[0338] The above vibration device may be configured to include a Z-axis actuator that drives the vibration table in the Z-axis direction, a first connecting mechanism that connects the vibration table and the X-axis actuator so that the vibration table and the X-axis actuator can slide in both the Y-axis and Z-axis directions, and a second connecting mechanism that connects the vibration table and the Y-axis actuator so that the vibration table and the Y-axis actuator can slide in both the X-axis and Z-axis directions.

[0339] In the above vibration excitation device, the linear guideway may be configured to include a rail extending in the sliding direction and a carriage running on the rail.

[0340] In the above vibration device, the rail may be attached to the vibration table.

[0341] The rail is longer than the carriage, and the width of the vibration table is greater than the width of the movable part of the actuator. Therefore, this configuration makes it possible to further increase the sliding width of the first connecting mechanism in the Y-axis direction (and the X-axis direction of the second connecting mechanism). Also, since the vibration table has a width (X-axis, Y-axis) greater than its height (Z-axis), when the connecting mechanism includes horizontal (Y-axis, X-axis) and vertical (Z-axis) linear guideways, this configuration (attaching the rail of the horizontal linear guideway to the vibration table) makes it possible to further increase the sliding width of the connecting mechanism in the Y-axis direction.

[0342] In the above vibration device, one of the pair of linear guideways may be attached to an upper end of the vibration table, and the other of the pair of linear guideways may be attached to a lower end of the vibration table.

[0343] According to this configuration, the rigidity against the moment of force about the Y-axis of the first connecting mechanism (as well as the rigidity about the X-axis of the second connecting mechanism) is further increased, and the vibration performance is further improved.

[0344] A vibration device according to yet another embodiment of the present invention comprises a vibration table on which an object to be vibrated is attached, and a vibration unit that vibrates the vibration table in a predetermined direction, and is configured such that when the object to be vibrated is attached to the vibration table, the projection of the center of gravity of the object to be vibrated onto a projection plane perpendicular to the predetermined direction is included in the projection of the movable part of the vibration unit onto the projection plane.

[0345] According to this configuration, the force moment applied to the object to be vibrated by the vibration is suppressed, thereby enabling vibration to be applied with higher accuracy.

[0346] In the above vibration device, the projection of the center of gravity of the vibration table onto the projection plane may be included in the projection of the movable part of the vibration unit onto the projection plane.

[0347] In the above vibration device, the center of gravity of the vibration table may be located at the center of the outer shape of the vibration table.

[0348] In the above vibration device, the vibration table may have a hollow portion capable of accommodating the object to be vibrated.

[0349] In the above vibration device, the vibration table may be configured to be substantially box-shaped.

[0350] In the above vibration device, the vibration table may be configured to include a box portion having a first opening formed on one side thereof for inserting and removing the object to be vibrated into the hollow portion, and a lid portion for closing the first opening.

[0351] In the above vibration device, the hollow portion may be formed in the center of the vibration table.

[0352] In the above vibration device, the vibration table may have a bottom plate and a frame portion protruding perpendicularly from an edge of the bottom plate.

[0353] The above vibration device may have a lattice-shaped middle plate disposed inside the frame and protruding perpendicularly from the bottom plate.

[0354] In the above vibration device, the middle plate may be joined to the bottom plate and the frame portion.

[0355] In the above vibration device, the vibration table may have a second opening through which a long object that connects the object to be vibrated and an external device is passed.

[0356] In the above vibration device, the vibration unit may include an X-axis vibration unit that vibrates the vibration table in the X-axis direction, which is the horizontal direction.

[0357] In the above vibration device, the vibration unit may include a Y-axis vibration unit that vibrates the vibration table in the Y-axis direction, which is a horizontal direction perpendicular to the X-axis direction.

[0358] In the above vibration device, the vibration unit may include a Z-axis vibration unit that vibrates the vibration table in the Z-axis direction, which is the vertical direction.

[0359] In the above vibration excitation device, the vibration table may have a bottom plate, and a mounting structure for mounting the object to be vibrated may be provided on the bottom plate.

[0360] In the above vibration excitation device, the vibration table may have a wall portion, and a mounting structure for mounting the object to be vibrated on the wall portion may be provided.

[0361] Furthermore, an electrodynamic actuator according to yet another embodiment of the present invention comprises a substantially cylindrical fixed part, at least a portion of which is housed within a hollow portion of the fixed part and is driven to reciprocate in the axial direction of the fixed part, and a movable part support mechanism that supports the movable part from the side so that it can move back and forth in the axial direction, wherein the movable part comprises a frame whose tip portion is supported by the movable part support mechanism, and a coil attached to the rear end of the frame, and the frame is formed as a single unit.

[0362] According to this configuration, since a structure for connecting a plurality of frames is not required, the weight of the movable part can be reduced, and thus it becomes possible to perform reciprocating drive at a higher frequency.

[0363] In the above electrodynamic actuator, the movable part support mechanism may include a linear guideway, which includes a rail extending in the axial direction of the fixed part, a plurality of rolling elements capable of rolling on the rail, and a carriage capable of moving on the rail via the rolling elements, and eight load paths are formed between the rail and the carriage, each of which has a plurality of rolling elements rolling thereon.

[0364] According to this configuration, the rigidity and motion accuracy of the linear guide are improved, and vibration noise can be reduced.

[0365] Furthermore, an electrodynamic actuator according to yet another embodiment of the present invention comprises a substantially cylindrical fixed part, at least a portion of which is contained within a hollow part of the fixed part and is driven to reciprocate in the axial direction of the fixed part, and a movable part support mechanism that supports the movable part from the side so that it can move back and forth in the axial direction, wherein the movable part support mechanism comprises a linear guideway, which comprises a rail extending in the axial direction of the fixed part, a plurality of rolling elements capable of rolling on the rail, and a carriage capable of running on the rail via the plurality of rolling elements, and between the rail and the carriage, eight load paths are formed, each of which has a plurality of rolling elements rolling on it.

[0366] According to this configuration, the rigidity and motion accuracy of the linear guide are improved, and vibration noise can be reduced.

[0367] In the electrodynamic actuator described above, the movable part may include a frame having a tip end portion supported by a movable part support mechanism, and a coil attached to a rear end of the frame, and the frame may be integrally formed.

[0368] In the electrodynamic actuator described above, the rail may be fixed to the movable portion, and the runner block may be fixed to the fixed portion.

[0369] In the electrodynamic actuator described above, the movable part support mechanism may be configured to support the frame of the movable part at a portion protruding outside the hollow part.

[0370] In the electrodynamic actuator described above, the movable part support mechanism may include a guide frame that connects one end face in the axial direction of the fixed part and the linear guideway.

[0371] The electrodynamic actuator described above may be configured to include a plurality of linear guideways, the plurality of linear guideways being arranged at equal intervals in the circumferential direction around the axis of the movable portion.

[0372] The electrodynamic actuator may include two pairs of movable part support mechanisms, and the movable part may be sandwiched between the two pairs of movable part support mechanisms from both sides in two perpendicular directions.

[0373] There is also provided a vibration device including the electrodynamic actuator and a vibration table connected to a movable portion of the electrodynamic actuator.

Claims

1. A vibration table, An actuator that vibrates the vibration table; A counterbalance unit is attached to the vibration table and compensates for imbalance of a vibrated part. Equipped with The counterbalance portion is A weight portion and a spacer interposed between the vibration table and the weight portion, the spacer provides a gap between the weight portion and the vibration table except for a fixed point where the spacer is interposed, and holds the weight portion in a non-contact state with the vibration table, thereby suppressing the transmission of vibration between the vibration table and the weight portion and the occurrence of chatter vibration. Vibration device.

2. The spacer is a washer, and a bolt for fastening the weight portion and the vibration table is passed through a hole in the washer. The vibration device according to claim 1 .

3. a tapped hole into which a bolt for attaching the weight portion is screwed is formed in the vibration table; The spacer is formed in a boss shape integral with the vibration table at the edge of the tapped hole. The vibration device according to claim 1 .

4. a through hole through which a bolt for attaching the weight to the vibration table is inserted is formed in the weight; The spacer is formed in a boss shape integral with the weight portion at the edge of the through hole. The vibration device according to claim 1 .

5. A filler is filled in the gap between the vibration table and the weight portion. The vibration device according to any one of claims 1 to 4.

6. A vibration table; An actuator that vibrates the vibration table; A counterbalance unit is attached to the vibration table and compensates for imbalance of a vibrated part. Equipped with The counterbalance portion is A weight portion and a spacer interposed between the vibration table and the weight portion to hold the weight portion in a non-contact state with the vibration table; A filler is filled in the gap between the vibration table and the weight portion. Vibration device.

7. The actuator, A first actuator that vibrates the vibration table in a first direction; A second actuator that vibrates the vibration table in a second direction perpendicular to the first direction. The vibration device according to any one of claims 1 to 6.

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