Patterned reflective grids for LED arrays and displays

Abstract

The LED array includes a patterned reflective grid that enhances the contrast ratio between adjacent pixels or groups of adjacent pixels in the array. The pattern on the reflective grid can also improve adhesion between the reflective grid and one or more layers of material disposed and attached on the reflective grid. The reflective grid can be formed, for example, as a reflective metal grid, a grid of a dielectric reflector, or a grid of a distributed Bragg reflector (DBR). When formed as a metal grid, the reflective grid can provide electrical contacts to one side of the LED diode junctions. This specification also discloses a manufacturing process for such an LED array.

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims the benefit of priority to U.S. Patent Application No. 17 / 217,922, filed March 30, 2021, which is incorporated by reference in its entirety.

[0002] Technical Field The present invention generally relates to light emitting diode (LED) arrays, light sources comprising LED arrays, and displays comprising LED arrays. [Background technology]

[0003] Inorganic LEDs have been widely used to fabricate various types of displays, matrices, and light engines, such as headlights for automotive applications, augmented reality (AR) displays, virtual reality (VR) displays, mixed reality (MR) displays, smart glasses, cell phone displays, smart watches, monitors, televisions, and flash illumination for cell phone cameras. The area of ​​individual LED pixels in these architectures can range from a few square millimeters to several square micrometers, depending on the size of the matrix or display and the pixels per inch requirements. These types of LED matrices / displays are typically realized by transferring and mounting individual pixels from a donor substrate to a controller backplane or electronics board. Such arrays can also be fabricated by a monolithic approach, where an array of monolithically integrated LED pixels is processed into LED modules on a donor epitaxial wafer, which are then transferred and mounted to a controller backplane.

[0004] One of the key specifications for such arrays / displays is the contrast ratio (CR). CR is defined as the luminance ratio of one or more "ON" state pixels to adjacent "OFF" state pixels. That is, CR is significantly degraded by photon spillover from an "ON" state pixel to an adjacent "OFF" state pixel. A low CR typically results in a blurred image and poor projection beam pattern. Summary of the Invention

[0005] Disclosed herein is an LED array including a patterned reflective grid that enhances the contrast ratio between adjacent pixels or groups of adjacent pixels in the array. The pattern on the reflective grid can also enhance adhesion between the reflective grid and one or more material layers disposed and attached on the reflective grid. The reflective grid can be formed, for example, as a reflective metal grid, a grid of a dielectric reflector, or a grid of a distributed Bragg reflector (DBR). When formed as a metal grid, the reflective grid can provide electrical contacts to one side of the LED diode junctions. Also disclosed herein is a manufacturing process for such an LED array.

[0006] The LED arrays disclosed herein can comprise phosphor-converted LEDs or direct-emitting LEDs. Individual LEDs in the array can have a light-emitting surface with an area ranging from a few square micrometers (μLEDs) to square millimeters (conventional LEDs).

[0007] The LED arrays disclosed herein may be advantageously employed in any of the devices and applications listed in the Background section above. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a cross-sectional view showing a schematic example of a pcLED. [Figure 2A] FIG. 2A is a schematic cross-sectional view of an array of pcLEDs. [Figure 2B] FIG. 2B is a schematic top view of an array of pcLEDs. [Figure 3A] FIG. 3A is a schematic top view of an electronic board on which an array of pcLEDs is mounted. [Figure 3B] FIG. 3B similarly shows an array of pcLEDs mounted on the electronics board of FIG. 3A. [Figure 4A] FIG. 4A is a cross-sectional schematic diagram of a pcLED array disposed relative to a waveguide and a projection lens. [Figure 4B] FIG. 4B shows a similar arrangement to FIG. 4A, but without the waveguide. [Diagram 5] FIG. 5 is a schematic diagram of an example camera flash system with an adaptive lighting system. [Figure 6] FIG. 6 is a schematic diagram illustrating an example of a display (e.g., AR / VR / MR) system including an adaptive lighting system. [Figure 7] FIG. 7 is a schematic top view of an example LED array with a patterned reflective grid. [Figure 8A] FIG. 8A is a cross-sectional view showing a schematic view of a portion of an LED array similar to that shown in FIG. [Figure 8B] FIG. 8B is a cross-sectional view that shows a schematic view of a part of a modified LED array similar to that shown in FIG. 8A. [Figure 8C] FIG. 8C is a schematic cross-sectional view of a portion of an LED array similar to FIG. 8A, including a wavelength-converting structure. [Figure 8D] FIG. 8D is a schematic cross-sectional view of a portion of an LED array similar to FIG. 8B, including a wavelength-converting structure. [Figure 9A] 9A, 9B and 9C show steps in one example of a method for manufacturing the LED array of FIG. 8A. [Figure 9B] 9A, 9B and 9C show steps in one example of a method for manufacturing the LED array of FIG. 8A. [Figure 9C] 9A, 9B and 9C show steps in one example of a method for manufacturing the LED array of FIG. 8A. [Figure 10A] 10A and 10B are diagrams illustrating stages in another exemplary method of manufacturing the LED array of FIG. 8A. [Figure 10B] 10A and 10B are diagrams illustrating stages in another exemplary method of manufacturing the LED array of FIG. 8A. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] The following detailed description should be read with reference to the drawings, in which identical reference numbers refer to similar elements throughout the different drawings. The drawings, which are not necessarily to scale, depict selective embodiments and are not intended to limit the scope of the invention. The detailed description illustrates by way of example, not by way of limitation, the principles of the invention.

[0010] 1 shows an example of an individual pcLED 100 that includes a light emitting semiconductor diode (LED) structure 102 disposed on a substrate 104 and a phosphor layer 106 disposed on the LED. The light emitting semiconductor diode structure 102 typically includes an active region disposed between an n-type layer and a p-type layer. Upon application of an appropriate forward bias across the diode structure, light is emitted from the active region. The wavelength of the emitted light is determined by the composition and structure of the active region.

[0011] The LEDs may be, for example, III-nitride LEDs that emit ultraviolet, blue, green, or red light. LEDs formed from other suitable material systems and emitting light at other suitable wavelengths may also be used. Other suitable material systems include, for example, III-phosphide materials, III-arsenide materials, II-VI materials, etc.

[0012] Any suitable phosphor material can be used depending on the desired light output and color specifications from the pcLED.

[0013] 2A-2B show cross-sectional and top views, respectively, of an array 200 of pcLEDs 100 including phosphor pixels 106 disposed on a substrate 202. Such an array may include any suitable number of pcLEDs arranged in any suitable manner. In the illustrated example, the array is depicted as being monolithically formed on a shared substrate, although alternatively, the array of pcLEDs may be formed from individual pcLEDs. The substrate 202 may optionally include CMOS circuitry for driving the LEDs and may be formed from any suitable material.

[0014] 2A-2B show a 3×3 array of 9 pcLEDs, such an array may include, for example, tens, hundreds, or thousands of LEDs. Individual LEDs (pixels) may have a width (e.g., side length) in the plane of the array of, for example, 1 millimeter (mm) or less, 500 microns or less, 100 microns or less, or 50 microns or less. LEDs in such an array may be spaced apart from one another by streets or lanes having a width in the plane of the array of, for example, hundreds of microns, 100 microns or less, 50 microns or less, 10 microns or less, or 5 microns or less. Although the illustrated example shows rectangular pixels arranged in a symmetric matrix, the pixels and array may have any suitable shape or arrangement.

[0015] LEDs having an in-plane dimension (e.g., side length) of the array of about 50 microns or less are commonly referred to as micro LEDs, and an array of such micro LEDs may be referred to as a micro LED array.

[0016] An array of LEDs, or a portion of such an array, can be formed as a segmented monolithic structure in which the individual LED pixels are electrically isolated from one another by trenches and / or insulating materials, but the electrically isolated segments remain physically connected to one another by portions of the semiconductor structure.

[0017] Individual LEDs in an LED array may be individually addressable (operable), addressable as part of a group or subset of pixels in the array, or may not be addressable. Thus, light-emitting pixel arrays are useful for any application that requires or benefits from fine-grained intensity, spatial, and temporal control of light distribution. These applications may include, but are not limited to, precise special patterning of emitted light from pixel blocks or individual pixels. Depending on the application, the emitted light may be spectrally distinct, adaptive over time, and / or environmentally responsive. Such light-emitting pixel arrays may provide pre-programmed light distributions with various intensity, spatial, or temporal patterns. The emitted light may be based at least in part on received light sensor data and may be used for optical wireless communication. The associated electronics and optics may be distinct at the pixel, pixel block, or device level.

[0018] 3A-3B, the pcLED array 200 may be implemented on an electronics board 300 that includes a power and control module 302, a sensor module 304, and an LED mounting area 306. The power and control module 302 may receive power and control signals from an external source and a signal from the sensor module 304 based on which the power and control module 302 controls the operation of the LEDs. The sensor module 304 may receive a signal from any suitable sensor, such as, for example, a temperature sensor or a light sensor. Alternatively, the pcLED array 200 may be implemented on a separate board (not shown) from the power and control module and the sensor module.

[0019] The individual pcLEDs may optionally incorporate or be arranged in combination with lenses or other optical elements disposed adjacent to or on the phosphor layer. Such optical elements may be referred to as "primary optical elements" although not shown in the figures. Additionally, as shown in Figures 4A-4B, the pcLED array 200 (e.g., mounted on an electronic board 300) may be arranged in combination with secondary optical elements, such as a waveguide, a lens, or both, for use in an intended application. In Figure 4A, light emitted by the pcLEDs 100 is collected by a waveguide 402 and directed to a projection lens 404. The projection lens 404 may be, for example, a Fresnel lens. This arrangement may be suitable for use in, for example, an automobile headlight. In Figure 4B, light emitted by the pcLEDs 100 is collected directly by the projection lens 404 without the use of an intervening waveguide. This arrangement is particularly suitable when the pcLEDs can be spaced close enough together to be used in automobile headlights and camera flash applications. Micro LED display applications can use optical arrangements similar to those depicted in Figures 4A-4B, for example. In general, any suitable arrangement of optical elements can be used in combination with the LED arrays described herein depending on the desired application.

[0020] An array of independently operable LEDs can be used in combination with a lens, lens system, or other optical system (e.g., as described above) to provide adaptive lighting for a particular purpose. For example, such adaptive lighting systems can provide lighting that varies in color and / or intensity across an illuminated scene or object, and / or is directed in a desired direction, in operation. A controller can be configured to receive data indicative of the location and color characteristics of objects or people in the scene, and control the LEDs in the LED array based on that information to provide lighting adapted to the scene. Such data can be provided, for example, by an image sensor, optical (e.g., laser scanning) or non-optical (e.g., millimeter wave radar) sensor. Such adaptive lighting is becoming increasingly important for automotive, mobile device cameras, VR, and AR applications.

[0021] 5 shows a schematic example of a camera flash system 500 with an LED array and lens system 502, which may be similar or identical to the systems described above. The flash system 500 also includes an LED driver 506 controlled by a controller 504, such as a microprocessor. The controller 504 is also coupled to a camera 507 and a sensor 508, and may operate according to instructions and profiles stored in a memory 510. The camera 507 and the adaptive lighting system 502 may be controlled by the controller 504 to match their fields of view.

[0022] The sensors 508 may include, for example, position sensors (e.g., gyroscopes and / or accelerometers) and / or other sensors that may be used to determine the position, velocity, and orientation of the system 500. Signals from the sensors 508 may be provided to the controller 504 and used to determine the appropriate course of action of the controller 504 (e.g., which LEDs are currently illuminating the target and which LEDs will illuminate the target after a predetermined time).

[0023] In operation, illumination from some or all of the pixels of the LED array in 502 may be adjusted, deactivated, operated at full intensity, or operated at intermediate intensities. Beam focusing or steering of the light emitted by the LED array in 502 may be performed electronically by activating one or more subsets of the pixels, allowing dynamic adjustment of the beam shape without moving optics or changing the focus of the illuminator lens.

[0024] 6 illustrates an exemplary display (e.g., AR / VR / MR) system 600 including an adaptive light emitting array 610, a display 620, a light emitting array controller 630, a sensor system 640, and a system controller 650. Control inputs are provided to the sensor system 640, and power and user data inputs are provided to the system controller 650. In some embodiments, the modules included in the system 600 may be compactly arranged within a single structure, or one or more elements may be mounted separately and connected via wireless or wired communication. For example, the light emitting array 610, the display 620, and the sensor system 640 may be mounted in a headset or glasses, and the light emitting controller and / or the system controller 650 may be mounted separately.

[0025] The light emitting array 610 can include one or more adaptive light emitting arrays, such as those described above, that can be used to project light in graphical or object patterns that can support AR / VR / MR systems, for example. In some embodiments, an array of micro LEDs can be used.

[0026] The system 600 can incorporate a wide range of optics into the adaptive light emitting array 610 and / or the display 620 , for example, to couple light emitted by the adaptive light emitting array 610 into the display 620 .

[0027] The sensor system 640 may include, for example, external sensors such as a camera, depth sensor, or audio sensor to monitor the environment, and internal sensors such as an accelerometer or a two- or three-axis gyroscope to monitor the position of the AR / VR / MR headset. Other sensors may include, but are not limited to, air pressure, stress sensors, temperature sensors, or other suitable sensors required for local or remote environmental monitoring. In some embodiments, the control input may include a detected touch or tap, a gesture input, or control based on the position of the headset or display.

[0028] In response to data from the sensor system 640, the system controller 650 can transmit images or instructions to the light emitting array controller 630. Changes or modifications to the images or instructions can also be made by user data input, or automatic data input, as desired. User data input can include, but is not limited to, voice instructions, tactile feedback, eye or pupil position, or provided by a connected keyboard, mouse, or game controller.

[0029] As mentioned above, disclosed herein is an LED array including a patterned reflective grid that enhances the contrast ratio between adjacent pixels or groups of adjacent pixels in the array, and a method for making such an LED array. When the reflective grid is formed as a reflective metal grid, this approach to reduce light leakage (also referred to as "crosstalk") between adjacent pixels of the LED array can use sidewall electrical contacts at each pixel that are formed by coating the pixel sidewalls with a highly reflective metal or metal alloy. This forms a metal grid between the pixels of the LED array. The light confinement at each pixel is further enhanced by patterning the top surface of the metal grid. The patterned metal surface promotes light scattering and increases absorption of side emissions, thus reducing light leakage from "on" state pixels to neighboring "off" state pixels. The top surface of a reflective grid formed from a dielectric reflector or DBR rather than a metal reflector can be patterned as well to further enhance light confinement.

[0030] Although the discussion associated with Figures 7, 8A-8D, 9A-9C, and 10A-10B is directed primarily to LED arrays having patterned metallic reflective grids, they also illustrate the structure and fabrication methods of LED arrays having patterned reflective grids formed from non-metallic reflectors, such as grids formed from DBRs or dielectric reflectors.

[0031] 7 is a top view of an LED array 700 made of a patterned reflective metal grid, which may be of similar structure and dimensions as the LED array 200 shown in FIG. 2B, and may be monolithic. The LED array 700 is made of LEDs 710 optically separated from one another by a metal grid 720. As shown, the top surface of the metal grid 720 is patterned or roughened (both referred to herein as "patterned"), as is the top surface of the LEDs 710. In the embodiment shown in this figure and described further below, the metal grid also serves as the cathode for the array, although this is optional. The metal grid may instead serve as the anode, or not serve as an electrical contact to the diodes.

[0032] The pattern on the metal grid and the pattern on the LEDs may be the same shape, size, and spacing. Alternatively, the patterns on the metal grid and the LEDs may have different shapes and sizes or spacing across the pixel field and / or the metal grid. Such pattern shapes, sizes, and spacing may be optimized for different applications and wavelengths. In the example of FIG. 7, the pattern on the metal grid 720 is different from the pattern on the LEDs 710.

[0033] The patterns on the metal grid and on the LEDs can have, for example, cone-like shapes and can range in size from hundreds of nanometers to a few microns laterally in the plane of the array (e.g., 100 nm, 300 nm, 500 nm, 1 micron, 2 microns, 5 microns, 10 microns), in heights vertical to the plane of the array in the range of hundreds of nanometers to a few microns (e.g., 100 nm, 300 nm, 500 nm, 1 micron, 2 microns, 5 microns, 10 microns), and spacings between features in the range of tens of nanometers to a few microns (e.g., 10 nm, 30 nm, 50 nm, 100 nm, 300 nm, 500 nm, 1 micron, 2 microns, 5 microns, 10 microns).

[0034] The metal grid may be formed from or include, for example, aluminum, copper with an aluminum coating, or a layer stack of aluminum, titanium tungsten, plated copper.

[0035] As described further below, the patterned surface of the metal grid and LEDs can be created by growing epitaxial layers of a semiconductor diode structure on a patterned substrate, defining the pixels (individual LEDs) of the array with trenches in the semiconductor diode structure that reach down to the patterned substrate, depositing metal into the trenches to form the metal grid, and then removing the substrate (e.g., by a laser lift-off process). A patterned reflective grid of a dielectric reflector or DBR (rather than a reflective metal) can be similarly formed by depositing a dielectric reflector or DBR into the trenches instead of a metal.

[0036] Alternatively, epitaxial structures and metal grids can be grown on a planar substrate and the surface pattern created after removal from the planar substrate. This is also true for reflective grids formed from dielectric reflectors and DBRs.

[0037] Patterning the LED surface with a reflective grid results in improved light extraction efficiency combined with improved contrast ratio, sharper images, and better control of the beam profile / projection of the LED array / display by increasing the optical separation between the "on" and "off" state pixels. Additionally, patterning enhances adhesion of any layers deposited or precipitated on top of the patterned surface. For example, in phosphor-converted LED arrays and displays, a phosphor layer is deposited or precipitated on the surface for photon conversion. The patterned reflective grid and LED die surfaces facilitate the attachment of phosphor or other layers (e.g., encapsulant layer) or secondary optics on the dissimilar surfaces of the LED pixels.

[0038] 8A is a cross-sectional view of a portion of an LED array 800 comprising a patterned metal grid as described above. The LED array 800 comprises a plurality of LEDs 810 separated and optically isolated from one another by metal grid portions 820 formed from a reflective metal. In the illustrated example, each LED 810 consists of an active region 815 sandwiched between an n-type region 816 and a p-type region 817. The metal grid portions 820 are separated from the p-type region 817 by an insulating layer 818 and form an electrical contact to the n-type region 816. The metal grid thus functions as a cathode contact. An anode contact 819 provides electrical contact to the p-type region.

[0039] The light extracting top surface 825 in the plane of the array is patterned as described above. In the example shown, the pattern of the top surface of the metal grid portion 820 is identical to the pattern of the top emitting surface of the LEDs 810, although as described above, the patterns may be different.

[0040] In some embodiments, the metal grid portions (cathode contacts) can have a lateral width in the plane of the array of about 2 microns to about 10 microns, the center-to-center spacing of the metal grid portions 820 forming opposing sidewalls of the pixels 82 can be about 40 microns (e.g., 30 microns to 50 microns), the thickness of the epitaxial semiconductor structures (n-type regions, active regions, and p-type regions) perpendicular to the plane of the array can be about 6 microns or less, and the height of the surface features in the patterned surface perpendicular to the plane of the array can be about 1 micron to 2 microns. Any other suitable combinations may be used.

[0041] As shown in Figure 8B, in some variations, the patterned surface of the metal grid portion 820 extends above or beyond the light emitting surfaces of the LED 810. This pixel shape allows for better reflection / capture of lateral radiation within each pixel, thus improving the contrast ratio. The metal grid portion can extend above or beyond the LED surface by, for example, about 1 micron to about 10 microns.

[0042] As shown in Figures 8C and 8D, a wavelength-converting structure 830 may be formed on or attached to the patterned light extraction surface 825 of the semiconductor LED array. The wavelength-converting structure may include, for example, phosphor particles disposed in a binder material. The phosphor particles absorb light emitted by the semiconductor LEDs and responsively emit light at a longer wavelength. The binder material may be, for example, silicon, and is selected to be transparent to the light emitted by the semiconductor LEDs and the light emitted by the phosphor particles. The wavelength-converting structure may have a thickness perpendicular to the surface 825 of, for example, about 5 microns to about 40 microns, or about 10 microns to about 15 microns, For example, it can include phosphor particles having diameters of about 15 microns or less, about 10 microns or less, or about 5 microns or less.

[0043] Patterning a reflective (e.g., reflective metal) grid as described herein helps reduce lateral propagation of light in the wavelength-converting structures, thereby enhancing the CR of phosphor-converted LED arrays. Patterned reflective grids are particularly beneficial for thin, low-scattering wavelength-converting structures.

[0044] As mentioned above, LED arrays with patterned reflective grids as disclosed herein can be grown on patterned substrates. Now referring to FIG. 9A, patterned substrate 900 can be formed, for example, from sapphire, silicon carbide, silicon, gallium nitride, gallium arsenide, or any other suitable material. The pattern on the substrate can be formed by wet and / or dry etching, or nanoimprinting processes, and can be created on the substrate or added on top of the substrate. That is, the patterned portion of the substrate can be formed from the same material composition as the rest of the underlying substrate, or can have a different composition. The shape, size, and spacing of the pattern can be optimized depending on the LED color or application requirements. If the reflective (e.g., metal) grid surface and the LED die surface have different patterns, the corresponding portions of the substrate can be patterned accordingly.

[0045] Epitaxial layers 817, 815, and 816 may be grown on substrate 900 using any conventional growth technique, such as MOCVD or MBE. Epitaxial layers grown directly on a patterned substrate will adopt a pattern complementary to that of the substrate.

[0046] As shown in Figure 9B, after the epitaxial layers are grown, trenches 910 are etched through the epitaxial layers down to the patterned substrate by wet and / or dry etching processes to define LED pixels or dies in the array and form sidewalls on the defined pixels. Referring now to Figure 9C, an insulating layer 818 is deposited in the trenches, after which a reflective metal can be deposited in the trenches to form a reflective metal grid, which in the illustrated example also serves as a cathode contact. The bottoms of the trenches reach the patterned substrate, so that the portions of the metal grid formed in contact with the substrate follow a complementary pattern to that of the substrate.

[0047] The metal grid can be formed by electroplating. Electroplating requires a seed layer, which is usually the same material as the material being electroplated (e.g., aluminum). Alternatively, a seed layer of a different material can be used, for example a more strongly absorbing metal material, such as a titanium-tungsten alloy. In one variation, a metal (e.g., aluminum) n-contact layer is deposited on the sidewalls of the n-type layer, then a titanium-tungsten seed layer is deposited on the bottom of the trench, and then the remainder of the metal grid is electroplated into the trench. This method allows for improved CR (by using an optically absorbing material on the patterned surface of the metal grid) without compromising the n-contact quality (and thus the forward voltage Vf) of the device.

[0048] The substrate is then removed using a wafer removal process such as laser lift-off, where a high-energy laser beam removes the substrate, leaving behind a patterned surface over the die / pixel field and an exposed metal grid between the pixels.

[0049] 10A and 10B, the process steps described above can be performed on a flat surface of a substrate 1000. Once the substrate is removed, the exposed surfaces 1025 of the metal grid and LEDs become flat surfaces. These flat surfaces can then be patterned using wet and / or dry etching processes to provide the desired patterns, as disclosed above.

[0050] After substrate removal (and surface patterning if a planar substrate was used), a cleaning liquid can be used to remove any residues from the lift-off process and to further shape the created pattern if necessary. If the reflective grid is a reflective metal grid, the cleaning liquid should be selected so as not to attack the metal layer. After this surface cleaning, a phosphor layer or a protective layer or a secondary optical layer can be added on top of these patterns to form a blanket layer or a segmented top layer over the die field and metal grid.

[0051] 8B, an LED array in which the patterned surface of the reflective (e.g., metal) grid portion 820 extends above the light emitting surface of the LEDs 810 can be formed, for example, by etching trenches into the substrate through the epitaxial layers (FIG. 9B). Alternatively, the light extraction surface 825 of the LEDs can be selectively etched after substrate removal, so that the patterned surface of the reflective grid portion extends beyond the etched patterned surface of the LEDs, and the reflective grid is protected from the etching process.

[0052] The present disclosure is illustrative and not limiting. Further modifications will be apparent to those skilled in the art in light of the present disclosure and are intended to be included within the scope of the appended claims.

Claims

1. A light emitting diode array, a plurality of light emitting diodes, each having a light emitting surface; a reflective grid defining a plurality of apertures within which the light emitting diodes are arranged such that light emitting surfaces of corresponding ones of the light emitting diodes face in the same direction outside the reflective grid; Equipped with the reflective grid provides a reflective sidewall for each light emitting diode, the reflective sidewall comprising a patterned light scattering surface adjacent to and oriented in the same direction as the light emitting surface; the light emitting diode array comprises a wavelength converting structure disposed on the patterned light scattering surface of the sidewall and on the light emitting surface. Light emitting diode array.

2. the light emitting surface is patterned to scatter light; 2. The light emitting diode array according to claim 1.

3. the patterned light scattering surface of the sidewall and the patterned light emitting surface have different light scattering patterns; 3. The light emitting diode array according to claim 2.

4. the patterned light scattering surface of the sidewall and the patterned light emitting surface have the same light scattering pattern; 3. The light emitting diode array according to claim 2.

5. the patterned light scattering surface of the sidewall is coplanar with an adjacent light emitting surface; 2. The light emitting diode array according to claim 1.

6. the patterned light scattering surface of the sidewall extends beyond the light emitting surface in the direction toward which the light emitting surface faces; 2. The light emitting diode array according to claim 1.

7. the reflective grid includes or is a reflective metal grid providing electrical contact to the light emitting diodes.

2. The light emitting diode array according to claim 1.

8. the light emitting surface has a longest dimension parallel to the reflective sidewall that is no greater than 50 microns; Adjacent light emitting surfaces are spaced apart by 10 microns or less from each other; 2. The light emitting diode array according to claim 1.

9. The light emitting surface is patterned to scatter light; the wavelength converting structure has a thickness in a direction facing the light emitting surface of less than or equal to 30 microns; the wavelength-converting structure includes phosphor particles dispersed in a binder; the phosphor particles have a diameter of less than about 20 microns and greater than 1 micron; 9. The light emitting diode array according to claim 8.

10. 1. A display system comprising: The light emitting diode array according to any one of claims 1 to 9; A display and an optical element or system spaced from the light emitting diode array and arranged to couple light from the light emitting diode array into the display; A display system comprising:

11. 1. A mobile device comprising: A camera and a flash illumination system; The flash illumination system includes: The light emitting diode array according to any one of claims 1 to 9; an optical element or system spaced from the light emitting diode array and arranged to direct light emitted by the light emitting diode array into a field of view of the camera; Mobile devices.

12. 1. A method for manufacturing a light emitting diode array, comprising: disposing a stack of semiconductor layers on a patterned substrate, the semiconductor layers comprising an n-type region, a p-type region, and an active region disposed between the n-type and p-type regions; Etching trenches through the stack of semiconductor layers to expose the patterned substrate at a bottom of each trench, the trenches forming a grid and defining individual light emitting diodes of the light emitting diode array; disposing a reflector within the trench to form a reflective sidewall of the light emitting diode, the reflective sidewall having a surface in contact with the patterned substrate that is patterned by the patterned substrate; removing the patterned substrate from the light emitting diode and the reflective sidewall; The method includes:

13. the reflective sidewalls providing electrical contact to the light emitting diode.

13. The method of claim 12.

14. the light emitting diode has a light emitting surface patterned by the patterned substrate; 13. The method of claim 12.

15. etching the trench in the patterned substrate such that the patterned surfaces of the reflective sidewalls extend beyond adjacent surfaces of the light emitting diode.

13. The method of claim 12.

16. After the step of removing the patterned substrate, etching a surface of the light emitting diode that was previously in contact with the patterned substrate such that the patterned surface of the reflective sidewall extends beyond the etched surface of the light emitting diode.

13. The method of claim 12.

17. After the step of removing the patterned substrate, forming a wavelength converting structure on the light emitting diode in contact with a light emitting surface of the light emitting diode and a patterned surface of the reflective sidewall.

13. The method of claim 12.

18. 1. A method for manufacturing a light emitting diode array, comprising: disposing a stack of semiconductor layers on a planar substrate, the semiconductor layers comprising an n-type region, a p-type region, and an active region disposed between the n-type region and the p-type region; Etching trenches through the stack of semiconductor layers to expose the planar substrate at a bottom of each trench, the trenches forming a grid and defining individual light emitting diodes of the light emitting diode array; disposing a reflector within the trench to form a reflective sidewall of the light emitting diode; removing the planar substrate from the light emitting diode and the reflective sidewall; patterning a surface of the reflective sidewall that was previously in contact with the planar substrate to scatter light; The method includes:

19. the reflective sidewalls providing electrical contact to the light emitting diode.

20. The method of claim 18.

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