Probe card storage case

Abstract

To solve the problem in which a conventional resin probe card storage case made by injection molding has a shape error, and a probe card stored therein may vibrate during transport and may be broken.SOLUTION: A probe card storage case of the present invention comprises one case part made of synthetic resin, and the other case part made of synthetic resin for closing the one case part. The one case part includes a bottom plate, a side wall part erected from an outer peripheral edge part of the bottom plate, and a plurality of rib parts connecting the bottom plate and the side wall part to each other. The one case part is molded by injection molding. The other case part includes a ceiling plate, a side wall part suspended from an outer peripheral edge part of the ceiling plate, and a plurality of rib parts connecting the ceiling plate and the side wall part to each other. The other case part is integrally molded by injection molding.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a case for storing a probe card for testing semiconductor wafers. [Background technology]

[0002] (1. Conventional explanation)

[0003] In the final inspection of semiconductor chip (wafer) manufacturing, a probe card is used to measure the quality of the semiconductor chip. Extremely high-precision quality is required for the semiconductor chip, and the probes of the probe card are also highly accurate.

[0004] When the probe card is moved, a probe card storage case is required to protect the probe card from dust and other elements.

[0005] 22 to 29 show a conventional probe card 1 and a conventional probe card storage case 2 for storing the probe card 1. FIG.

[0006] (1.1. Description of Probe Card 1)

[0007] 23 and 24, the probe card 1 includes a disk-shaped ceramic probe card substrate 3, a number of probes (probe needles) 4 provided in the center of the lower surface of the probe card substrate 3, and a stiffener (reinforcing material) 5 for reinforcing the probe card substrate 3, which is fixed to the upper surface of the ceramic probe card substrate 3. The stiffener 5 is formed, for example, in a ring shape and is formed larger than the probe card substrate 3.

[0008] Furthermore, a plurality of plate-shaped brim portions (protruding plate portions) 6 protruding radially outward are formed at desired positions on the outer circumferential edge of the stiffener 5 at desired intervals. The brim portions 6 are provided with, for example, screw holes 21 into which male threads of a probe card removal tool (not shown) for engaging with and removing a probe card stored in the probe card storage case 2 are screwed, and one positioning portion 7 such as a recess for positioning in the probe card storage case 2 is formed on the outer circumferential edge 6a of the brim portions 6.

[0009] In addition, the probe card removal tool has at least three male screw portions spaced apart from each other to stably lift the stored probe card, and the probe card is provided with a brim portion 6 having a screw hole 21 that screws into the male screw portions, corresponding to the positions and number of the male screw portions.

[0010] Furthermore, the brim portion 6 may not have the screw holes 21 or one of the positioning portions 7, and may instead have an identification mark such as a bar code.

[0011] (1.2. Description of conventional probe card storage case 2)

[0012] 25 and 26, the conventional probe card storage case 2 is made up of a box-shaped lower case part 8 having an upper opening for inserting a probe card, and an upper case part 9 that opens and closes the upper opening of the lower case part 8. The lower case part 8 and the upper case part 9 are each made of aluminum or made by bonding together synthetic resin plates (plastic plates) in order to improve the shape accuracy.

[0013] The lower case portion 8 is composed of, for example, a rectangular bottom plate 8a and a rectangular side wall portion 8b erected from the outer peripheral edge of the bottom plate 8a, and mounting tables 10 for positioning the probe card are provided at desired positions on the upper surface of the bottom plate 8a, for example, in three locations, spaced apart by a desired distance, and fixed to the bottom plate 8a by screws, adhesive, or the like.

[0014] The positioning mounting table 10 comprises a mounting portion 10a having a flat mounting surface 11 on which the probe card 1 is mounted at a desired height from the bottom plate 8a, and a protruding portion 10b formed on the outer portion of the mounting surface 11 and protruding upward, and having on its inner surface the other positioning portion 12, such as a convex portion, which engages with the one positioning portion 7.

[0015] The inner surface of the protrusion 10b is formed in a shape that matches the surface of the outer circumferential edge 6a of the brim portion 6.

[0016] The upper case portion 9 is made up of, for example, a rectangular ceiling plate 9a and a rectangular side wall portion 9b hanging down from the outer periphery of the ceiling plate 9a. The upper end of the side wall portion 8b of the lower case portion 8 comes into contact with the lower end of the side wall portion 9b of the upper case portion 9, so that the upper opening of the lower case portion 8 is closed by the upper case portion 9.

[0017] Reference numeral 13 denotes a rod-shaped pressing member protruding downward and provided on the lower surface of the ceiling plate 9a of the upper case part 9. When the lower case part 8 storing the probe card 1 is closed by the upper case part 9, the brim part 6 of the probe card 1 is clamped between the mounting surface 11 of the mounting stand 10 and the lower end of the pressing member 13, so that the probe card 1 can be fixed to the storage case 2.

[0018] In addition, 13a denotes an elastic member provided at the lower end of the pressing member 13, and 10c denotes an elastic member formed at the upper end of the mounting table 10. In this case, the upper surface of the elastic member 10c forms the mounting surface 11.

[0019] Also, 2a denotes a hinge portion which connects one side edge of the lower case portion 8 and one side edge of the upper case portion 9 so as to be able to tilt freely.

[0020] For example, a conventional probe card storage case is disclosed in Patent Document 1. [Prior art documents] [Patent documents]

[0021] [Patent Document 1] Utility Model Registration No. 3171687 Summary of the Invention [Problem to be solved by the invention]

[0022] (2. Explanation of the shortcomings of conventional probe card storage cases)

[0023] The above-mentioned conventional probe card storage case 2 is made of aluminum or made by bonding together synthetic resin plates (plastic plates) in order to improve the shape precision, and is heavy in weight.

[0024] For this reason, it has been proposed to form a probe card storage case from synthetic resin by integral injection molding.

[0025] In addition, since the above-mentioned probe card 1 is also heavy, a probe card 14 that does not use the stiffener 5 has been proposed.

[0026] 27 to 29 show a probe card 14 without the stiffener 5. The probe card 14 is formed by fixing a plurality of plate-like brim portions 15 formed separately and protruding radially outward to desired positions on the outer circumferential edge of a ceramic probe card substrate 3 by screws, adhesive, or the like.

[0027] However, for example, when a probe card storage case made of synthetic resin measuring 430 mm x 430 mm x 68 mm and having a plate thickness of 5 mm was created by injection molding, a shape error of 0.2 mm occurred. Because the shape error was so large, the probe card could not be positioned accurately, and the case was unsuitable for use.

[0028] In addition, the above-mentioned probe card removal tool is first positioned in the lower case part, and then the male screw portion of the probe card removal tool is screwed into the screw hole of the stored probe card to fix it in place. However, if there is a large shape error in the lower case part, the position of the male screw portion and the position of the screw hole may not match, making it impossible to screw them together.

[0029] Furthermore, if a probe card 14 without a stiffener is stored in the probe card storage case 2 formed as described above, it will not be positioned accurately, causing rattling during movement, which can lead to the probe card substrate 3 vibrating, causing the probe card substrate 3 to crack, or the brim portion 15 to come off from the probe card substrate.

[0030] The present invention aims to provide a probe card storage case with little shape error and a probe card storage case made of synthetic resin and molded by injection molding, which can store even a probe card that does not have a stiffener.

[0031] Another object of the present invention is to enable the probe card stored in a probe card storage case to be easily removed by a probe card removal tool even if the probe card storage case is made of synthetic resin formed by injection molding.

[0032] (3. Description of the Constituent Elements of the Invention) [Means for solving the problem]

[0033] The probe card storage case of the present invention comprises one case part made of synthetic resin for storing a probe card, and the other case part for covering the one case part, the one case part comprising a bottom plate, a side wall part erected from the outer peripheral edge part of the bottom plate, and a plurality of rib parts connecting the bottom plate and the side wall part, and the one case part is molded by injection molding.

[0034] In addition, the probe card storage case of the present invention comprises one case part for storing a probe card and another case part made of synthetic resin that covers the one case part, the other case part comprising a ceiling plate, a side wall part hanging down from the outer peripheral edge part of the ceiling plate, and a plurality of rib parts connecting the ceiling plate and the side wall part, and the other case part is characterized in that it is molded by injection molding.

[0035] The bottom plate also has a mounting table on which the probe card to be stored is placed and positioned, the mounting table comprising a mounting portion made of synthetic resin having a mounting surface for placing the probe card at a desired height, a protrusion formed on its inner side surface, one positioning portion formed on the probe card and positioned thereat, the other positioning portion being freely movable relative to the mounting portion, and a fixing means for fixing the protrusion to the mounting table, the mounting portion being formed by injection molding together with the bottom plate.

[0036] The probe card storage case of the present invention comprises one case part made of synthetic resin for storing a probe card, and another case part for closing the one case part. The bottom plate of the one case part has a mounting table for mounting and positioning the probe card to be stored, and the mounting table supports the probe card, From the bottom plate above A synthetic resin mounting section with a mounting surface for mounting at a desired height and a probe card that can be moved freely in the radial direction of the probe card to be stored. On the placement surface of the placement section The probe card is provided with a positioning portion formed on one side of the probe card, and the other positioning portion is positioned on the other side of the probe card, and the positioning portion comprises a protrusion formed on its inner side surface, and a fixing means for fixing the protrusion provided on the mounting portion so as to be movable in the radial direction, at a desired position for positioning the stored probe card, and when the protrusion is not fixed by the fixing means, it is movable in the radial direction of the stored probe card relative to the mounting portion, and when fixed by the fixing means, it is fixed to the mounting portion, and the mounting portion is formed by injection molding together with the bottom plate.

[0037] The present invention is also characterized in that a recess is formed on the inner edge of the protrusion, and that the recess can accommodate a portion of the bent portion of a rod-shaped engaging rod of a probe card removal device having a bent portion at its lower end that can be freely rotated around an axis.

[0038] In addition, the brim portion of the probe card of the present invention has an outer periphery Formed, A probe card extractor having a rod-shaped engaging rod with a bent portion formed at the lower end thereof and rotatable about an axis, said bent portion The cutout portion is for inserting the It is characterized by the above.

[0040] (4. Description of the Effects of the Invention) Effect of the Invention

[0041] According to the present invention, even if the probe card storage case is made of resin by injection molding, it can be manufactured with little shape error.

[0042] Furthermore, since the protruding portion is provided so as to be movable in the radial direction, the probe card to be stored can be accurately positioned. [Brief description of the drawings]

[0043] [Figure 1] 1 is a vertical cross-sectional side view of a probe card storage case according to the present invention. [Diagram 2] 2 is a plan view of a lower case portion of the probe card storage case of the present invention. FIG. [Diagram 3] 11 is a plan view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. [Figure 4] 11 is a vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. [Diagram 5] 11 is an enlarged vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. [Figure 6] 11 is a vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. [Figure 7] 11 is an enlarged vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. [Figure 8] 11 is an enlarged plan view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. [Figure 9] 11 is an enlarged vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. [Figure 10] 11 is a vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. [Figure 11] 11 is an enlarged vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. [Figure 12] 11 is an enlarged plan view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. [Figure 13] 11 is a vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. [Figure 14] 11 is an enlarged vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. [Figure 15] 11 is an enlarged plan view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. [Figure 16] 11 is a vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. [Figure 17] FIG. 2 is a plan view of the probe card of the present invention. [Figure 18] FIG. 2 is a plan view of another probe card of the present invention. [Figure 19] FIG. 2 is a side view of the probe card removal tool of the present invention. [Figure 20] 1 is an enlarged plan view for explaining a method of using a probe card removal tool for a probe card storage case of the present invention. FIG. [Figure 21] 1 is an enlarged plan view for explaining a method of using a probe card removal tool for a probe card storage case of the present invention. FIG. [Figure 22]FIG. 1 is a vertical sectional side view of a conventional probe card storage case. [Diagram 23] FIG. 2 is a vertical cross-sectional side view of the probe card. [Figure 24] FIG. 2 is a plan view of a probe card. [Diagram 25] FIG. 1 is a vertical sectional side view of a conventional probe card storage case. [Figure 26] FIG. 13 is a plan view of a lower case portion of a conventional probe card storage case. [Figure 27] FIG. 13 is a plan view of another probe card. [Figure 28] FIG. 13 is a vertical cross-sectional side view of another probe card. [Figure 29] FIG. 1 is a vertical sectional side view of a conventional probe card storage case. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0044] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0045] Incidentally, the parts not specifically explained are the same as those in the above-mentioned conventional example, and the explanation thereof will be omitted. EXAMPLES

[0046] (5.1. Description of the rib portion 17 of the present invention)

[0047] 1 and 2 show a probe card storage case 16 integrally molded by injection molding according to the present invention. In the probe card storage case 16, a plurality of ribs 17 are provided at a desired distance in the conventional lower case section 8, which connect the inner surface of the side wall section 8b and the upper surface of the bottom plate 8a.

[0048] Similarly, in the conventional upper case portion 9, a plurality of ribs 17 are provided at desired intervals to connect the inner surface of the side wall portion 9b and the lower surface of the ceiling plate 9a.

[0049] Conventionally, when a synthetic resin probe card storage case was formed by injection molding, a molding error of as much as 0.2 mm occurred, making the case unsuitable for use. However, in the present invention, by providing rib portion 17, it is possible to reduce the shape error.

[0050] Furthermore, if the above-mentioned rib portion 17 were not present, the thickness of the side wall of the upper case portion (or lower case portion) would have had to be 5 mm or more in order to increase strength; however, by providing the rib portion 17, this can be reduced to 4 mm or less, resulting in a reduction in weight of 20% or more.

[0051] The rib portion 17 is formed, for example, in the shape of a right-angled triangular plate, and the thickness of the rib portion 17 is made thinner than the thickness of the side wall portion, for example, the thickness is made to be half or less.

[0052] By thinning the rib portion 17, particularly by making it half or less, when the lower case portion (or lower case portion) made of synthetic resin is formed by injection molding, the amount of raw material supplied to form the rib portion can be significantly reduced compared to the amount of raw material supplied to form the side wall portion. This makes it possible to prevent the upper surface of the side wall portion from bending downward (or the lower surface upward) due to insufficient raw material supply (supply pressure) on the side wall portion 8b side when raw material is supplied, thereby improving the shape accuracy.

[0053] (5.2. Description of the mounting table 18 of the present invention)

[0054] In addition, whereas in the conventional method, the mounting table 10 having the mounting portion 10a and the protrusion 10b formed integrally therewith was fixed to the floor plate 8a by screws or adhesive, in the present invention, a mounting table 18 is provided, which, as shown in Figures 1 to 16, is composed of a mounting portion 18a having a mounting surface 19 on which the probe cards 1, 14 are placed at a desired height from the bottom plate 8a of the lower case portion 8, a protrusion 18b formed separately from the mounting portion 18a and having on its inner surface the other positioning portion 12, such as a convex portion, which engages with one of the positioning portions 7 of the probe cards 1, 14, and a fixing means 20 for fixing the protrusion 18b to the mounting portion 18a.

[0055] A synthetic resin mounting portion 18a is integrally molded with the synthetic resin floor plate 8a by injection molding, and the protrusion 18b is provided separately from the mounting portion 18a. The protrusion 18b is provided on the mounting surface 19 so as to be freely movable in the radial direction, and the protrusion 18b can be fixed to the mounting portion 18a at a desired position by the fixing means 20.

[0056] The fixing means 20 comprises, for example, a through hole 20a having a circular cross section that is provided perpendicular to the surface of the mounting surface 19 of the mounting portion 18a, a radially extending long hole 20b that is provided vertically penetrating the protruding portion 18b, and a screw portion 20d that passes through the long hole 20b and the through hole 20a and has a nut 20c screwed to its tip.

[0057] Then, the tip of the screw portion 20d inserted into the long hole 20b and the through hole 20a from above is screwed into the nut 20c, and without yet being tightly tightened, the protrusion 18b is moved radially relative to the mounting portion 18a to be positioned at the desired location, and the nut 20c is then tightly tightened, whereby the protrusion 18b is clamped between the head 20e of the screw portion 20d and the mounting portion 18a, and the protrusion 18b is fixed to the mounting portion 18a at the desired position.

[0058] In addition, between the head 20e of the screw portion 20d and the mounting surface 19, a washer (not shown) having an elliptical hole formed therein may be interposed.

[0059] In addition, as described later, a recess 23 recessed radially outward is formed on the inner peripheral edge of the protrusion 18b of the mounting stand 18 at a position opposite to the cutout portion 22 described later, making it easier to engage the bent tip of an improved probe card removal tool described later even if the case has a shape error.

[0060] (6. Brim part of probe card)

[0061] Furthermore, instead of the screw holes 21 provided in the brim portions 6, 15 of the conventional probe cards 1, 14, which are engaged with the probe card removal tool, in the probe cards 1, 14 of the present invention, as shown in Figures 17 and 18, a long groove-shaped cutout portion 22 extending radially inward is provided in the outer peripheral edges 6a, 15a of the brim portions 6, 15.

[0062] Moreover, in the present invention, an improved probe card extractor 24 is used instead of a conventional probe card extractor having a male thread portion, as shown in Fig. 19. The improved probe card extractor 24 comprises an extractor main body 25 and an L-shaped rod-like engaging lever 26 that is suspended downward from the extractor main body 25 and is slidable up and down in the axial direction relative to extractor main body 25 and rotatable about its axis, and the engaging lever 26 comprises a suspended rod 16a and a bent portion 26b formed by bending at a right angle at the lower end of the suspended rod 16a.

[0063] Then, as shown in Figure 20, the folded portion 26b of the improved probe card removal tool 24 is rotated so that it coincides with the longitudinal direction of the cutout portion 22, and then it is hung down from above the cutout portion 22 and penetrates into the cutout portion 22.Then, by rotating the folded portion 26b by 90 degrees, for example, as shown in Figure 21, the folded portion 26b is positioned on the underside of the brim portions 6, 15.As a result, by lifting the probe card removal tool 25 upward, the probe cards 1, 14 can be lifted upward.

[0064] As described above, by providing cutout portion 22 in the form of a long groove, even if the case has some shape error, the probe card remover can be engaged with the probe card.

[0065] Furthermore, since the portion of the protrusion 18b of the mounting stand 18 facing the cutout 22 is formed in a concave shape, even if there is some shape error in the case, a part of the bent portion of the probe card removal tool can be inserted into the cutout.

[0066] (7. Description of the manufacturing method of the probe card storage case 16)

[0067] Next, a method for manufacturing the probe card storage case of the present invention will be described.

[0068] First, in order to manufacture the lower case portion 8 of the present invention, a thermoplastic resin or the like is forced under injection pressure into a mold for forming the bottom plate 8a, the side wall portion 8b, the rib portion 17, and the mounting portion 18a formed at a desired height from the bottom plate 8a, to form a lower case portion that does not have the protrusion portion 18b, as shown in Figures 3 and 4.

[0069] If the through hole 20a is not formed in the mounting portion 18a, the through hole 20a is formed separately as shown in FIG.

[0070] 6 to 8, a separately prepared protruding portion 18b having the other positioning portion 12 is placed on the placement surface 19 of the placement portion 18a. Then, as shown in Fig. 9, for example, a screw portion 20d is passed through an elongated hole 20b formed in the placement portion 18a and a through hole 20a of the placement portion 18a, and a nut 20c is slightly screwed onto the tip of the screw portion 20d, thereby temporarily fixing the protruding portion 18b to the placement portion 18a with a fixing means 20.

[0071] The protruding portion 18b is positioned radially outward so that the probe cards 1 and 14 can be placed on the placement table later.

[0072] Then, as shown in FIGS. 10 to 12, the probe cards 1, 14 to be stored are placed on the placement surface 19b of the placement portion 18a.

[0073] At this time, since the protruding portion 18b is located radially outward, the other positioning portion 12 of the protruding portion 18b does not fit (match) with one positioning portion 7 of the probe card.

[0074] Next, as shown in Figures 13 to 15, each of the protrusions 18b is moved radially inward along the long holes 20b, so that the other positioning portion 12 of the protrusion 18b is engaged (aligned) with one of the positioning portions 7 of the probe card 14.

[0075] In addition, since it is only necessary to position the probe card storage case and the probe card, it is not necessary to move all the protruding parts 18b in the radial direction, and only the necessary protruding parts 18b may be moved.

[0076] Then, the nut 20c is tightly tightened onto the screw portion 20d, so that the protrusion 18b is clamped between the head 20e of the screw portion 20d and the mounting portion 18a, and the protrusion 18b is firmly fixed to the mounting portion 18a.

[0077] Next, as shown in FIG. 16, the probe cards 1 and 14 are removed from the probe card storage case, whereby the upper case portion 8 of the present invention can be manufactured.

[0078] The upper case portion 9 is also formed in the same manner as above.

[0079] The pressing member 13 of the upper case portion 9 may be molded integrally with the upper case portion 9 by a die, or may be attached to the upper case portion 9 as a separate member.

[0080] Furthermore, elastic members 10c and 13a may be provided as necessary.

[0081] One side of the upper case portion 8 and one side of the lower case portion 9 are connected by a hinge portion 2a so as to be able to tilt freely.

[0082] The projection 18b may be attached to the mounting portion 18a after the hinge portion 2c is attached.

[0083] In the present invention, a probe card storage case made of synthetic resin is molded by injection molding, and even if there is a shape error, the positioning of the probe card and the storage case is set after molding, so that a probe card storage case that can be accurately positioned can be created.

[0084] In addition, in the mounting table 18, the mounting portion 18a and the protruding portion 18b are molded separately, and when aligning, there is no need to move the mounting portion 18a on which the probe card is placed, so that the positioning of the probe cards 1, 14 is easy, and no excessive force is applied to the brim portions 6, 15 of the probe cards 1, 14, thereby preventing damage to the brim portions 6, 15.

[0085] In the present invention, in addition to the probe card 14 without the stiffener 5, the probe card 1 having the stiffener 5 can also be accommodated. [Explanation of symbols]

[0086] 1 Probe card 2 Probe card storage case 2a Hinge part 3 Probe card board 4. Probe 5 Stiffener 6 Brim 6a Outer rim 7 One of the positioning parts 8 Lower case part 8a bottom plate 8b Side wall part 9 Upper case part 9a Ceiling board 9b Side wall part 10. Placement table 10a Placement part 10b Protrusion 10c Elastic member 11 Placement surface 12 The other positioning part 13 Holding member 13a Elastic member 14 Probe Card 15 Brim 15a Outer rim 16 Probe card storage case 17 Rib section 18 Placement table 18a Placement section 18b Projection 19 Placement surface 20 Fixing means 20a through hole 20b long hole 20c nut 20d Threaded part 20e head 21 Screw hole 22 Notch 23 Recess 24 Probe card removal tool 25 Removal tool body 26 Engagement rod 26a hanging rod 26b Bend

Claims

1. The probe card is inserted into the probe holder 10. The probe card is inserted into the probe holder 10. The probe card is inserted into the probe holder 10. a mounting table for mounting and positioning a probe card to be stored on a bottom plate of the one of the case parts; the mounting table includes a mounting portion made of synthetic resin and having a mounting surface on which the probe card is mounted at a desired height from the bottom plate; A positioning portion is provided on the mounting surface of the mounting portion so as to be movable in the radial direction of the probe card to be accommodated, the positioning portion being positioned by one of the positioning portions formed on the probe card, the other positioning portion being a protrusion formed on an inner peripheral side surface of the positioning portion; a fixing means for fixing the protruding portion provided on the placement portion so as to be movable in the radial direction at a desired position for positioning the probe card to be stored; the protrusion is configured to be movable in a radial direction of the probe card relative to the placement section when not fixed by the fixing means, and is configured to be fixed to the placement section when fixed by the fixing means; The probe card storage case is characterized in that the placement portion is formed together with the bottom plate by injection molding.

2. The one case portion includes a bottom plate, a side wall portion standing on an outer peripheral edge portion of the bottom plate, and a plurality of ribs connecting the bottom plate and the side wall portion, 2. The probe card storage case according to claim 1, wherein the one case portion is formed by injection molding.

3. The other case portion is made of synthetic resin, the other case portion comprises a ceiling plate, a side wall portion hanging down from an outer peripheral edge of the ceiling plate, and a plurality of ribs connecting the ceiling plate and the side wall portion, 3. The probe card storage case according to claim 1, wherein the other case portion is formed by injection molding.

4. A recess is formed on an inner edge of the protrusion, A probe card storage case as described in any one of claims 1 to 3, characterized in that the recess can accommodate a portion of the bent portion of a probe card removal device having a rod-shaped engaging rod with a bent portion formed at its lower end and capable of rotating around an axis.

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