Substrate Liquid Processing Equipment

Abstract

This substrate liquid-treatment device comprises: a treatment tank for storing therein a treatment liquid for liquid treatment of a substrate; an imaging unit for acquiring an image of the treatment liquid inside the treatment tank; and an image processing unit having a foam data acquisition unit for acquiring foam data indicating the state of foam in the treatment liquid by performing image processing of the image.

Description

[Technical field]

[0001] The present disclosure relates to a substrate liquid processing apparatus. [Background technology]

[0002] Liquid processing of substrates can be promoted by controlling bubbles that are generated when the processing liquid boils and bubbles (of inert gas, etc.) that are ejected into the processing liquid.

[0003] For example, in the substrate liquid processing apparatus disclosed in Patent Document 1, the boiling state of the processing liquid is detected, and the pressure of the processing liquid is adjusted according to the boiling state, thereby adjusting the boiling state of the processing liquid, thereby improving the uniformity of substrate etching. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2017-220618 A Summary of the Invention

[0005] Even for an engineer, it is not easy to visually determine the state of bubbles in a processing liquid. In particular, since there are individual differences in the sense of engineers, it is difficult to accurately and stably determine the state of bubbles in a processing liquid by visual inspection.

[0006] The present disclosure provides a technique that is advantageous for accurately determining the state of air bubbles in a processing liquid and stably performing liquid processing on a substrate.

[0007] One aspect of the present disclosure relates to a substrate liquid processing apparatus comprising a processing tank that stores a processing liquid for liquid processing of a substrate, an imaging unit that acquires an image of the processing liquid inside the processing tank, and an image processing unit having a bubble data acquisition unit that performs image processing on the image to acquire bubble data indicating the state of bubbles in the processing liquid.

[0008] The present disclosure is advantageous in accurately determining the state of air bubbles in a processing liquid and stably performing liquid processing on substrates. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a schematic plan view showing an overall configuration of an example of a substrate liquid processing system. [Diagram 2] FIG. 2 is a system diagram showing the configuration of an example of an etching apparatus incorporated in the substrate liquid processing system. [Diagram 3] FIG. 3 is a schematic longitudinal sectional view of an example of a processing tank of an etching apparatus. [Figure 4] FIG. 4 is a schematic longitudinal cross-sectional view of an example of a treatment tank. [Diagram 5] FIG. 5 is a schematic plan view of an example of a treatment tank. [Figure 6] FIG. 6 is a transverse longitudinal cross-sectional view of an example of a treatment tank showing in detail only the cover and its surrounding members in the closed position. [Figure 7] FIG. 7 is a diagram showing an example of a captured image acquired by the imaging section. [Figure 8] FIG. 8 is a diagram showing an example of a processed image obtained by subjecting the photographed image shown in FIG. 7 to image processing. [Figure 9] FIG. 9 is a diagram showing another example of a processed image obtained by subjecting the captured image shown in FIG. 7 to image processing. [Figure 10] FIG. 10 shows an example of image data (i.e., air bubble data) created by taking representative values ​​(particularly average values) of pixel values ​​(particularly brightness values ​​of each pixel) of a plurality of images. [Figure 11] FIG. 11 is a functional block diagram illustrating an example of an image processing unit according to the first embodiment. [Figure 12] FIG. 12 is a flow chart showing an example of the substrate liquid processing method (particularly the processing liquid adjusting method) according to the first embodiment. [Figure 13] FIG. 13 is a functional block diagram illustrating an example of an image processing unit according to the second embodiment. [Figure 14]FIG. 14 is a flowchart showing an example of a substrate liquid processing method (particularly a bubbling state determining method) according to the second embodiment. [Figure 15] FIG. 15 is a functional block diagram illustrating an example of an image processing unit according to the third embodiment. [Figure 16] FIG. 16 is a flow chart showing an example of a substrate liquid processing method (particularly a bubbling state adjusting method) according to the third embodiment. [Figure 17] FIG. 17 is a flow chart showing an example of the flow of liquid treatment of a substrate. [Figure 18] FIG. 18 is a diagram illustrating an example of a bubbling section according to the fourth embodiment. [Figure 19] FIG. 19 is a functional block diagram illustrating an example of an image processing unit according to the fourth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] First, the entire substrate liquid processing system 1A in which the etching processing apparatus (substrate liquid processing apparatus) 1 is incorporated will be described.

[0011] As shown in FIG. 1, a substrate liquid processing system 1A includes a carrier loading / unloading section 2, a lot formation section 3, a lot placement section 4, a lot transport section 5, a lot processing section 6, and a control section .

[0012] Of these, the carrier loading / unloading section 2 loads and unloads a carrier 9 that accommodates a plurality of (for example, 25) substrates (silicon wafers) 8 arranged vertically in a horizontal position.

[0013] The carrier loading / unloading section 2 is provided with a carrier stage 10 on which a plurality of carriers 9 are placed, a carrier transport mechanism 11 which transports the carriers 9, carrier stocks 12 and 13 which temporarily store the carriers 9, and a carrier placement table 14 on which the carriers 9 are placed. The carrier stock 12 temporarily stores the substrates 8 which will become products before they are processed in the lot processing section 6. The carrier stock 13 temporarily stores the substrates 8 which will become products after they have been processed in the lot processing section 6.

[0014] The carrier loading / unloading section 2 transports the carrier 9, which has been loaded onto the carrier stage 10 from outside, to the carrier stock 12 or the carrier mounting table 14 using the carrier transport mechanism 11. The carrier loading / unloading section 2 also transports the carrier 9, which has been mounted on the carrier mounting table 14, to the carrier stock 13 or the carrier stage 10 using the carrier transport mechanism 11. The carrier 9 transported to the carrier stage 10 is then unloaded to the outside.

[0015] The lot formation unit 3 combines substrates 8 housed in one or more carriers 9 to form lots consisting of a plurality of substrates 8 (for example, 50 substrates 8) to be processed simultaneously. When forming lots, the lots may be formed so that the surfaces on which patterns are formed of two adjacent substrates 8 face each other, or the lots may be formed so that the surfaces of the substrates 8 on which patterns are formed all face the same direction.

[0016] The lot formation section 3 is provided with a substrate transport mechanism 15 that transports a plurality of substrates 8. The substrate transport mechanism 15 can change the orientation of the substrate 8 from a horizontal orientation to a vertical orientation and from a vertical orientation to a horizontal orientation during transportation of the substrate 8.

[0017] Then, the lot forming section 3 uses the substrate transport mechanism 15 to transport the substrates 8 from the carrier 9 placed on the carrier placement table 14 to the lot placement section 4, and places the substrates 8 forming the substrate lot on the lot placement section 4. The lot forming section 3 also transports the substrates placed on the lot placement section 4 to the carrier 9 placed on the carrier placement table 14 by the substrate transport mechanism 15. The substrate transport mechanism 15 has two types of substrate support sections for supporting a plurality of substrates 8: a pre-processing substrate support section for supporting the substrates 8 before processing (before being transported by the lot transport section 5), and a post-processing substrate support section for supporting the substrates 8 after processing (after being transported by the lot transport section 5). This prevents particles and the like attached to the pre-processing substrates 8 from being transferred to the processed substrates 8.

[0018] The lot placement unit 4 temporarily places (standbys) on the lot placement table 16 a lot that is transferred between the lot formation unit 3 and the lot processing unit 6 by the lot transfer unit 5.

[0019] This lot mounting section 4 is provided with an entrance lot mounting stage 17 on which a lot is mounted before processing (before being transported by the lot transport section 5), and an exit lot mounting stage 18 on which a lot is mounted after processing (after being transported by the lot transport section 5). A plurality of substrates 8 for one lot are mounted in a vertical position, lined up front to back, on the entrance lot mounting stage 17 and the exit lot mounting stage 18.

[0020] In the lot mounting section 4, the lot formed in the lot formation section 3 is mounted on the load-side lot mounting table 17, and the lot is carried into the lot processing section 6 via the lot transport section 5. In the lot mounting section 4, the lot carried out from the lot processing section 6 via the lot transport section 5 is mounted on the load-side lot mounting table 18, and the lot is transported to the lot formation section 3.

[0021] The lot transport section 5 transports lots between the lot placement section 4 and the lot processing section 6 and within the lot processing section 6 .

[0022] This lot transport section 5 is provided with a lot transport mechanism 19 that transports lots. The lot transport mechanism 19 is composed of rails 20 arranged along the lot mounting section 4 and the lot processing section 6, and a movable body 21 that moves along the rails 20 while holding a plurality of substrates 8. A substrate holder 22 that holds a plurality of substrates 8 lined up in a vertical position is provided on the movable body 21 so as to be able to move forward and backward.

[0023] The lot transport section 5 then receives the lot placed on the load-side lot mounting table 17 at the substrate holder 22 of the lot transport mechanism 19, and transfers the lot to the lot processing section 6. The lot transport section 5 also receives the lot processed in the lot processing section 6 at the substrate holder 22 of the lot transport mechanism 19, and transfers the lot to the unload-side lot mounting table 18. Furthermore, the lot transport section 5 transports the lot inside the lot processing section 6 using the lot transport mechanism 19.

[0024] The lot processing section 6 treats a plurality of substrates 8 arranged vertically one behind the other as one lot and performs processes such as etching, cleaning, drying, etc. on each of the lots.

[0025] The lot processing unit 6 is provided with a drying processing unit 23 which performs drying processing on the substrates 8, a substrate holder cleaning processing unit 24 which performs cleaning processing on the substrate holders 22, a cleaning processing unit 25 which performs cleaning processing on the substrates 8, and two etching processing units 1 which perform etching processing on the substrates 8, which are arranged side by side.

[0026] The drying processing device 23 has a processing bath 27 and a substrate lifting mechanism 28 provided in the processing bath 27 so as to be capable of being raised and lowered. A processing gas for drying (IPA (isopropyl alcohol) or the like) is supplied to the processing bath 27. The substrate lifting mechanism 28 holds a plurality of substrates 8 for one lot aligned in a vertical position from front to back. The drying processing device 23 receives the lot from the substrate holder 22 of the lot transport mechanism 19 by the substrate lifting mechanism 28, and raises and lowers the lot by the substrate lifting mechanism 28, thereby drying the substrates 8 with the processing gas for drying supplied to the processing bath 27. The drying processing device 23 also transfers the lot from the substrate lifting mechanism 28 to the substrate holder 22 of the lot transport mechanism 19.

[0027] The substrate holder cleaning processing device 24 has a processing tank 29, and is capable of supplying a cleaning processing liquid and a drying gas to the processing tank 29. After supplying the cleaning processing liquid to the substrate holder 22 of the lot transport mechanism 19, the substrate holder 22 is cleaned by supplying a drying gas.

[0028] The cleaning processing device 25 has a cleaning processing tank 30 and a rinsing processing tank 31, and substrate lifting mechanisms 32, 33 are provided in the processing tanks 30, 31 so as to be capable of moving up and down. A cleaning processing liquid (SC-1, etc.) is stored in the cleaning processing tank 30. A rinsing processing liquid (pure water, etc.) is stored in the rinsing processing tank 31.

[0029] The etching processing apparatus 1 has a processing tank 34 for etching and a processing tank 35 for rinsing, and substrate lifting mechanisms 36, 37 are provided in the processing tanks 34, 35 so as to be capable of moving up and down. A processing liquid for etching (aqueous phosphoric acid solution) is stored in the processing tank 34 for etching. A processing liquid for rinsing (pure water, etc.) is stored in the processing tank 35 for rinsing.

[0030] The cleaning processing device 25 and the etching processing device 1 have the same configuration. Regarding the etching processing device 1, the substrate lifting mechanism 36 holds a plurality of substrates 8 for one lot in a vertical posture arranged in front and behind. In the etching processing device 1, the substrate lifting mechanism 36 receives the lot from the substrate holder 22 of the lot transport mechanism 19, and the substrate lifting mechanism 36 raises and lowers the lot to immerse the lot in the etching processing liquid in the processing bath 34, thereby performing the etching processing of the substrates 8. Thereafter, the etching processing device 1 transfers the lot from the substrate lifting mechanism 36 to the substrate holder 22 of the lot transport mechanism 19. In addition, the substrate lifting mechanism 37 receives the lot from the substrate holder 22 of the lot transport mechanism 19, and the substrate lifting mechanism 37 raises and lowers the lot to immerse the lot in the rinsing processing liquid in the processing bath 35, thereby performing the rinsing processing of the substrates 8. Thereafter, the substrate lifting mechanism 37 transfers the lot to the substrate holder 22 of the lot transport mechanism 19.

[0031] The control unit 7 controls the operations of each unit of the substrate liquid processing system 1A (the carrier loading / unloading unit 2, the lot forming unit 3, the lot placing unit 4, the lot transport unit 5, the lot processing unit 6, and the etching processing device 1).

[0032] The control unit 7 is, for example, a computer, and includes a computer-readable storage medium 38. The storage medium 38 stores programs for controlling various processes executed in the etching processing device 1. The control unit 7 controls the operation of the etching processing device 1 by reading and executing the programs stored in the storage medium 38. The programs may be stored in the computer-readable storage medium 38, or may be installed in the storage medium 38 of the control unit 7 from another storage medium. Examples of the computer-readable storage medium 38 include a hard disk (HD), a flexible disk (FD), a compact disk (CD), a magnet optical disk (MO), and a memory card.

[0033] As described above, in the processing tank 34 of the etching processing apparatus 1, an aqueous solution (aqueous phosphoric acid solution) of a chemical (phosphoric acid) having a predetermined concentration is used as a processing liquid (etching liquid) to perform liquid processing (etching processing) on ​​the substrate 8.

[0034] Next, the schematic configuration and piping system of the etching processing apparatus 1 will be described with reference to FIG.

[0035] The etching processing apparatus 1 has the above-mentioned processing tank 34 that stores an aqueous phosphoric acid solution of a predetermined concentration as a processing liquid. The processing tank 34 has an inner tank 34A and an outer tank 34B. The aqueous phosphoric acid solution that overflows from the inner tank 34A flows into the outer tank 34B. The liquid level of the outer tank 34B is maintained lower than the liquid level of the inner tank 34A.

[0036] The upstream end of a circulation line 50 is connected to the bottom of the outer tank 34B. The downstream end of the circulation line 50 is connected to a treatment liquid supply nozzle 49 installed in the inner tank 34A. A pump 51, a heater 52, and a filter 53 are interposed in the circulation line 50, in this order from the upstream side. By driving the pump 51, a circulation flow of the aqueous phosphoric acid solution is formed, which is sent from the outer tank 34B through the circulation line 50 and the treatment liquid supply nozzle 49 into the inner tank 34A, and then flows out again from the inner tank 34A to the outer tank 34B.

[0037] The treatment tank 34, the circulation line 50, and the devices (51, 52, 53, etc.) in the circulation line 50 form a liquid treatment section 39. The treatment tank 34 and the circulation line 50 form a circulation system.

[0038] A gas nozzle 60 for discharging bubbles of an inert gas (e.g., nitrogen gas) (for bubbling) into the aqueous phosphoric acid solution in the inner tank 34A is provided below the processing liquid supply nozzle 49 in the inner tank 34A. An inert gas (e.g., nitrogen gas) is supplied to the gas nozzle 60 from a gas supply source 60B via a flow rate regulator 60C composed of an on-off valve, a flow rate control valve, a flow meter, etc.

[0039] The processing tank 34 is provided with the aforementioned substrate lifting mechanism 36. The substrate lifting mechanism 36 can hold a plurality of substrates 8 in a vertically upright position and arranged at intervals in the horizontal direction, and can raise and lower the substrates in this position.

[0040] The etching processing apparatus 1 has a phosphoric acid aqueous solution supply unit 40 that supplies a phosphoric acid aqueous solution to the liquid processing apparatus 39, and a pure water supply unit 41 that supplies pure water to the liquid processing apparatus 39. The etching processing apparatus 1 also has a silicon supply unit 42 that supplies a silicon solution to the liquid processing apparatus 39, and a phosphoric acid aqueous solution discharge unit 43 that discharges the phosphoric acid aqueous solution from the liquid processing apparatus 39.

[0041] The phosphoric acid aqueous solution supplying unit 40 supplies a phosphoric acid aqueous solution of a predetermined concentration to any part of the circulation system consisting of the treatment tank 34 and the circulation line 50, i.e., the liquid treatment unit 39, preferably to the outer tank 34B as shown in the figure. The phosphoric acid aqueous solution supplying unit 40 has a phosphoric acid aqueous solution supply source 40A consisting of a tank for storing phosphoric acid aqueous solution, and a phosphoric acid aqueous solution supplying line 40B connecting the phosphoric acid aqueous solution supply source 40A and the outer tank 34B. The phosphoric acid aqueous solution supplying unit 40 also has a flow meter 40C, a flow control valve 40D, and an opening / closing valve 40E interposed in this order from the upstream side on the phosphoric acid aqueous solution supplying line 40B. The phosphoric acid aqueous solution supplying unit 40 can supply the phosphoric acid aqueous solution to the outer tank 34B at a controlled flow rate via the flow meter 40C and the flow control valve 40D.

[0042] The pure water supply unit 41 supplies pure water to replenish the water evaporated by heating the phosphoric acid aqueous solution. The pure water supply unit 41 includes a pure water supply source 41A that supplies pure water at a predetermined temperature, and the pure water supply source 41A is connected to the outer bath 34B via a flow rate regulator 41B. The flow rate regulator 41B can be composed of an on-off valve, a flow rate control valve, a flow meter, etc.

[0043] The silicon supply unit 42 has a silicon supply source 42A consisting of a tank for storing a silicon-containing compound solution (e.g., a liquid in which colloidal silicon is dispersed), and a flow rate regulator 42B. The flow rate regulator 42B can be composed of an on-off valve, a flow rate control valve, a flow meter, etc.

[0044] The aqueous phosphoric acid solution discharge part 43 is provided for discharging the aqueous phosphoric acid solution in the circulation system consisting of the liquid treatment part 39 and the circulation line 50, i.e., in the liquid treatment part 39. The aqueous phosphoric acid solution discharge part 43 has a discharge line 43A branching off from the circulation line 50, and a flow meter 43B, a flow control valve 43C, an on-off valve 43D, and a cooling tank 43E provided in this order from the upstream side on the discharge line 43A. The aqueous phosphoric acid solution discharge part 43 can discharge the aqueous phosphoric acid solution at a flow rate controlled via the flow meter 43B and the flow control valve 43C.

[0045] The cooling tank 43E temporarily stores and cools the aqueous phosphoric acid solution that has flowed through the discharge line 43A. The aqueous phosphoric acid solution (see reference symbol 43F) that has flowed out of the cooling tank 43E may be disposed of in a factory waste liquid system (not shown), or may be sent to the aqueous phosphoric acid solution supply source 40A for reuse after silicon contained in the aqueous phosphoric acid solution is removed by a regenerator (not shown).

[0046] In the illustrated example, the discharge line 43A is connected to the circulation line 50 (at the position of the filter drain in the figure), but is not limited to this and may be connected to another location in the circulation system (for example, the bottom of the inner tank 34A).

[0047] A silicon concentration meter 43G for measuring the silicon concentration in the phosphoric acid aqueous solution is provided in the discharge line 43A. A phosphoric acid concentration meter 55B for measuring the phosphoric acid concentration in the phosphoric acid aqueous solution is provided in a branch line 55A that branches off from the circulation line 50 and is connected to the outer tank 34B. A liquid level meter 44 for detecting the liquid level in the outer tank 34B is provided in the outer tank 34B.

[0048] Next, the configuration of the processing tank 34 of the etching processing device 1 will be described in detail with reference to Figs. 3 to 6. For convenience of explanation, an XYZ orthogonal coordinate system is set and referred to as necessary. Note that the negative X direction may also be called the "front side" or "forward", the positive X direction may also be called the "rear side" or "rear", the negative Y direction may also be called the "right side" or "rightward", and the positive Y direction may also be called the "left side" or "leftward".

[0049] As described above, the treatment tank 34 has an inner tank 34A with an open top and an outer tank 34B with an open top. The inner tank 34A is accommodated inside the outer tank 34B. The aqueous phosphoric acid solution that overflows from the inner tank 34A flows into the outer tank 34B. During the liquid treatment, most of the inner tank 34A, including the bottom, is immersed in the aqueous phosphoric acid solution in the outer tank 34B.

[0050] The outer tank 34B is accommodated inside a liquid receiving container (sink) 80, and a drain space 81 is formed between the outer tank 34B and the liquid receiving container 80. A drain line 82 is connected to the bottom of the drain space 81.

[0051] The processing liquid supply nozzle 49 is formed of a cylindrical body extending in the X direction (horizontal direction) inside the inner tank 34A. The processing liquid supply nozzle 49 discharges the processing liquid from a plurality of discharge ports 49D (see FIGS. 3 and 4) drilled in its peripheral surface toward the substrate 8 held by the substrate lifting mechanism 36. Although two processing liquid supply nozzles 49 are provided in the figure, three or more processing liquid supply nozzles 49 may be provided. The processing liquid (aqueous phosphoric acid solution) is supplied to the processing liquid supply nozzle 49 from a pipe 49A extending in the vertical direction.

[0052] The gas nozzle 60 is a cylindrical body extending in the X direction (horizontal direction) at a height position lower than the processing liquid supply nozzle 49 in the inner tank 34A. The gas nozzle 60 ejects bubbles of an inert gas (e.g., nitrogen gas) from a plurality of ejection ports 60D (see FIGS. 3 and 4) drilled on its circumferential surface. The bubbling of the inert gas can stabilize the boiling state of the phosphoric acid aqueous solution in the inner tank 34A. The inert gas is supplied to the gas nozzle 60 from a pipe 60A extending in the vertical direction.

[0053] The substrate lifting mechanism 36 has a support plate 36A extending in the vertical direction (Z direction) that is lifted and lowered by a lifting mechanism (not shown), and a pair of substrate support members 36B extending in the horizontal direction (X direction) with one end supported by the support plate 36A. Each substrate support member 36B has a plurality of (e.g., 50 to 52) substrate support grooves (not shown) arranged at intervals in the horizontal direction (X direction). The peripheral portion of the substrate 8 is inserted into the substrate support grooves. The substrate lifting mechanism 36 can hold a plurality of (e.g., 50 to 52) substrates 8 in a vertical position and spaced apart in the horizontal direction (X direction). Such a substrate lifting mechanism 36 is well known in the art, and detailed structural illustration and description will be omitted.

[0054] The treatment tank 34 is provided with a first lid body 71 and a second lid body 72 for opening and closing the upper opening of the inner tank 34A. The first lid body 71 and the second lid body 72 are respectively coupled to rotation shafts 71S and 72S extending in the horizontal direction (X direction). The rotation shafts 71S and 72S are connected to a bearing 83 fixed to a liquid receiving container 80 and a rotation actuator 84 (see FIGS. 4 and 5). By operating the rotation actuator 84, the first lid body 71 and the second lid body 72 can rotate (pivot) about their respective rotation axes extending in the horizontal direction (X direction) (see arrows SW1 and SW2 in FIG. 3). The first lid body 71 and the second lid body 72 rotate between a closed position (position shown in Figures 3 and 6) in which they cover the first area (left half) and second area (right half) of the upper opening of the inner tank 34A, and an open position in which they are in a generally upright state and open the first area and second area of ​​the upper opening of the inner tank 34A.

[0055] The first lid 71 and the second lid 72 do not cover the area of ​​the upper opening of the inner tank 34A where the support plate 36A and the pipes 49A and 60A are provided.

[0056] During normal operation of the etching processing apparatus 1, the first lid 71 and the second lid 72 are located in the closed position except when the substrate 8 held by the substrate lifting mechanism 36 is being loaded into / unloaded from the inner bath 34A. This prevents a decrease in the temperature of the aqueous phosphoric acid solution in the inner bath 34A and inhibits water vapor generated from the boiling aqueous phosphoric acid solution from escaping to the outside of the processing bath 34.

[0057] The first cover 71 has a generally rectangular main body 71A when viewed from directly above, a first splash shielding portion 71B, a second splash shielding portion 71C, and a closing portion 71D extending in the X direction, and a third splash shielding portion 71E extending in the Y direction. Similarly, the second cover 72 has a generally rectangular main body 72A, a first splash shielding portion 72B, a second splash shielding portion 72C, and a closing portion 72D extending in the X direction, and a third splash shielding portion 72E extending in the Y direction.

[0058] A large rectangular recess 71R is formed in the upper surface of the main body 71A. The recess 71R is defined by a bottom wall 711R and four side walls 712R, 713R, 714R, and 715R. A large rectangular recess 72R is formed in the upper surface of the main body 72A. The recess 72R is defined by a bottom wall 721R and four side walls 722R, 723R, 724R, and 725R.

[0059] When the first lid 71 is in the closed position, a gap is provided between the side wall of the inner tank 34A and the adjacent side walls 712R, 713R facing it so as not to prevent overflow (see arrow OF in FIG. 6) of the aqueous phosphoric acid solution from the inner tank 34A to the outer tank 34B. Although not shown, a plurality of V-shaped notches are formed at intervals on the upper ends of the four side walls of the inner tank 34A to facilitate smooth overflow.

[0060] The bottom wall 711R of the first lid body 71 is inclined so as to become higher as it moves away from the second lid body 72 in the Y direction (as it approaches the side wall of the inner tank 34A in the Y direction). This inclination allows the above-mentioned overflow to occur smoothly.

[0061] Since the phosphoric acid aqueous solution in the inner tank 34A is in a boiling state, splashes of the phosphoric acid aqueous solution fly out of the inner tank 34A together with the phosphoric acid aqueous solution that overflows from the inner tank 34A into the outer tank 34B. The splashes collide with the first splash shielding portion 71B of the first lid 71 in the closed position, fall into the space between the side wall of the inner tank 34A and the side wall of the outer tank 34B, and do not fly outside the outer tank 34B. It is preferable that the lower end of the first splash shielding portion 71B of the first lid 71 in the closed position is at least lower than the upper end of the adjacent side wall of the inner tank 34A.

[0062] When the first lid body 71 is in the open position, the second splash shielding portion 71C plays the same role as the first splash shielding portion 71B when the first lid body 71 is in the closed position. It is preferable that the lower end of the first splash shielding portion 71B of the first lid body 71 in the open position is at least lower than the upper end of the adjacent side wall of the inner tank 34A.

[0063] The closing part 71D covers the upper part of the area from the rotation axis 71S to the side wall of the outer tank 34B in the gap between the upper end of the side wall of the inner tank 34A and the upper end of the side wall of the outer tank 34B when the first lid body 71 is in the open position. The closing part 71D guides the liquid adhering to the upper surface of the main body part 71A when the first lid body 71 is in the closed position to a drain space 81 between the outer tank 34B and the liquid receiving container 80 when the first lid body 71 is in the open position. This allows the liquid that falls from a wet substrate, for example, when the substrate passes above the processing tank 34 to be guided to the drain space 81, preventing the liquid from flowing into the outer tank 34B. The liquid that enters the drain space 81 is discarded through a drain line 82.

[0064] The third splash shielding portion 71E is provided so as to extend above the space between the side wall of the inner tank 34A and the side wall of the outer tank 34B on the side farther from the substrate lifting mechanism 36. The third splash shielding portion 71E extends in the Y direction from the rotation axis 71S along the edge of the first lid body 71 over the entire length of the edge. The third splash shielding portion 71E plays a role similar to that of the first splash shielding portion 71B when the first lid body 71 is in the closed position. It is preferable that the lower end of the third splash shielding portion 71E of the first lid body 71 in the open position is at least lower than the upper end of the adjacent side wall of the inner tank 34A.

[0065] It is not necessary to provide a splash shield extending along the edge of the first lid 71 extending in the Y direction on the side closer to the substrate lifting mechanism 36. This is because most of the phosphoric acid aqueous solution splashing in the positive X direction collides with the support plate 36A of the substrate lifting mechanism 36, the pipes 49A and 60A, etc., and does not reach the outer tank 34B.

[0066] The second cover 72 is formed substantially mirror-symmetrically with respect to the first cover 71, and the structures of the first cover 71 and the second cover 72 are substantially identical to each other. Therefore, the explanation of the configuration and function of the first cover 71 can be used to explain the configuration and function of the second cover 72. The same alphabet is added to the end of the reference numerals of corresponding members of the first cover 71 and the second cover 72 (members in symmetrical positions, members having the same function), and the only difference is whether the first two digits of the reference numerals are "71" or "72".

[0067] 6, when the first cover 71 and the second cover 72 are in the closed position, a side wall 712R extending upward from a bottom wall 711R of the first cover 71 and a side wall 722R extending upward from a bottom wall 721R of the second cover 72 face each other, and a gap G of height H is formed between the both side walls. By providing the recesses 71R and 72R, an increase in the weight of the first cover 71 and the second cover 72 caused by providing a gap of height H can be suppressed.

[0068] Consider the case where the lower surface (lower surface of bottom wall 711R) of the main body 71A of the first lid 71 in the closed position and the lower surface (lower surface of bottom wall 721R) of the main body 72A of the second lid 72 come into contact with the liquid level of the processing liquid in the inner tank 34A as shown in FIG. 6. In this case, the boiled phosphoric acid aqueous solution may splash upward from the gap between the first lid 71 and the second lid and splash around. However, by providing the gap G with height H as described above, the boiled processing liquid is less likely to splash out from the gap G. To achieve this effect, the height H may be set to, for example, about 5 cm or more.

[0069] When the treatment liquid in the inner tank 34A is a boiling phosphoric acid aqueous solution, at least the main body parts 71A and 72A of the first cover 71 and the second cover 72 are made of a material (such as quartz) that is not corroded by the treatment liquid. If the main body parts 71A and 72A are made of quartz, there is a risk that the quartz parts will collide with each other and crack or chip. To prevent this, it is desirable to provide a gap between the main body parts 71A and 72A so that they do not come into contact with each other when the first cover 71 and the second cover 72 are in the closed position. If a gap is provided between the main body parts 71A and 72A, there is a risk that the phosphoric acid aqueous solution in the treatment tank 34, especially in the inner tank 34A, will splash outward through the gap. However, by providing the gap G with the height H as described above, it is possible to at least significantly suppress the splashing of the phosphoric acid aqueous solution from the gap G.

[0070] Consider the case where the bottom wall 711R (721R) is inclined as described above and brought into contact with the phosphoric acid aqueous solution in the inner tank 34A in order to facilitate overflow. If there is no side wall 712R (722R) extending upward from the bottom wall 711R (721R), the tip of the bottom wall 711R (721R) will be submerged in the phosphoric acid aqueous solution. However, by providing the side wall 712R (722R) extending upward from the bottom wall 711R (721R) as described above, it is possible to make the liquid level of the phosphoric acid aqueous solution lower than the upper end of the side wall 712R (722R).

[0071] As shown in Fig. 6, it is preferable to provide a cover 73 on either the main body 71A of the first lid 71 or the main body 72A of the second lid 72 (main body 71A in this case) that extends to or exceeds the tip of the other (main body 72A in this case) and covers the gap G from above. By providing the cover 73, it is possible to prevent the processing liquid from spilling out upward from the gap G. Note that in Figs. 3 to 5, the cover 73 (and the plate-like body 73P) are not shown in order to avoid complicating the drawings.

[0072] In addition, since the gap G has a height H, the momentum of droplets of the treatment liquid scattered from the liquid surface of the phosphoric acid aqueous solution in the inner tank 34A weakens before colliding with the cover 73. Therefore, the treatment liquid that collided with the cover 73 does not fly out to the side.

[0073] 6, the cover 73 can be provided by attaching a plate-like body 73P having a substantially rectangular cutout portion 73Q that matches the contour of the recess 71R of the first cover body 71 to the upper surface of the main body portion 71A of the first cover body 71. In this case, the cover 73 is formed by the edge portion of the plate-like body 73P.

[0074] 6, when the first lid body 71 and the second lid body 72 are in the closed position, a gap may be provided between the cover 73 and the second lid body 72. Alternatively, when the first lid body 71 and the second lid body 72 are in the closed position, the cover 73 and the second lid body 72 may be in contact with each other. In this case, the cover 73 serves as a seal that closes the upper end of the gap G.

[0075] When the cover 73 is brought into contact with the second lid 72, it is preferable to form the cover 73 from a resin material that is flexible enough not to cause damage to the quartz even if it collides with the quartz and that has relatively high corrosion resistance. Examples of such resin materials include fluororesin materials such as PTFE and PFA.

[0076] The cover 73 may be formed integrally with the first lid 71. Also, the cover 73 does not have to be provided. When the cover 73 is not provided, it is preferable to make the height H higher than when the cover is provided.

[0077] Furthermore, a substrate holder 74 may be provided on either the main body 71A of the first cover 71 or the main body 72A of the second cover 72 (here, on the tip of the main body 72A of the second cover 72). A plurality of substrate holding grooves 74G are formed on the underside of the substrate holder 74 along the arrangement direction (X direction) of the substrates 8, and are arranged at the same pitch and in the same X direction positions as the substrate support grooves (not shown) of the substrate support member 36B. Each of the substrate holding grooves 74G accommodates the peripheral portion of one substrate 8.

[0078] In the illustrated embodiment, the substrate holder 74 is an elongated plate-like body formed separately from the second cover 72, and is fixed to the main body 72A of the second cover 72 by screws. Alternatively, the substrate holder 74 may be formed integrally with the second cover 72. In either case, the substrate holder 74 constitutes a part of the side wall 722R of the main body 72A of the second cover 72.

[0079] When the substrate 8 is being processed, the substrate presser 74 provided on the second lid 72 in the closed position engages with the substrate 8 supported by the substrate support member 36B to prevent or suppress upward displacement of the substrate 8. Therefore, even if the processing liquid is discharged at a high flow rate from the processing liquid supply nozzle 49, or even if the boiling level of the processing liquid in the inner tank 34A becomes high, or even if nitrogen gas bubbling is performed vigorously, there is no risk of the substrate 8 falling off the substrate support member 36B.

[0080] Next, a description will be given of the operation of the etching processing apparatus 1. First, the phosphoric acid aqueous solution supply unit 40 supplies the phosphoric acid aqueous solution to the outer tank 34B of the liquid processing unit 39. When a predetermined time has elapsed after the start of the supply of the phosphoric acid aqueous solution, the pump 51 of the circulation line 50 is operated, and a circulation flow circulating in the above-mentioned circulation system is formed.

[0081] Furthermore, the heater 52 of the circulation line 50 is operated to heat the phosphoric acid aqueous solution in the inner tank 34A to a predetermined temperature (for example, 160°C). The first lid 71 and the second lid 72 are positioned in the closed position at the latest by the time when heating by the heater 52 starts. The phosphoric acid aqueous solution at 160°C reaches a boiling state. When the phosphoric acid concentration meter 55B detects that the phosphoric acid concentration has exceeded a predetermined upper control limit due to evaporation of water caused by boiling, pure water is supplied from the pure water supply unit 41.

[0082] Before one lot of substrates 8 is put into the phosphoric acid aqueous solution in the inner tank 34A, the silicon concentration in the phosphoric acid aqueous solution present in the circulation system (including the inner tank 34A, the outer tank 34B, and the circulation line 50) is adjusted. This silicon concentration affects the etching selectivity of a silicon nitride film to a silicon oxide film. The silicon concentration can be adjusted by immersing a dummy substrate in the phosphoric acid aqueous solution in the inner tank 34A, or by supplying a silicon-containing compound solution from a silicon supply unit 42 to the outer tank 34B. In order to confirm that the silicon concentration in the phosphoric acid aqueous solution present in the circulation system is within a predetermined range, the phosphoric acid aqueous solution may be flowed through the discharge line 43A and the silicon concentration may be measured by a silicon concentration meter 43G.

[0083] After the silicon concentration adjustment is completed, the first lid 71 and the second lid 72 are moved to the open position. Then, the substrates 8 held by the substrate lifting mechanism 36, i.e., the substrates 8 (e.g., 50 substrates) forming one lot (also called a processing lot or batch), are immersed in the phosphoric acid aqueous solution in the inner tank 34A. Immediately thereafter, the first lid 71 and the second lid 72 are returned to the closed position. By immersing the substrates 8 in the phosphoric acid aqueous solution for a predetermined time, the substrates 8 are subjected to a wet etching process (liquid process).

[0084] By keeping the first lid 71 and the second lid 72 in the closed position during the etching process of the substrate 8, a decrease in temperature near the liquid surface of the aqueous phosphoric acid solution in the inner tank 34A is suppressed, and thus the temperature distribution of the aqueous phosphoric acid solution in the inner tank 34A can be kept small. In addition, since the inner tank 34A is immersed in the aqueous phosphoric acid solution in the outer tank 34B, a decrease in temperature of the aqueous phosphoric acid solution in the inner tank 34A due to heat radiation from the wall of the inner tank 34A is suppressed, and the temperature distribution of the aqueous phosphoric acid solution in the inner tank 34A can be kept small. Therefore, the in-plane and inter-plane uniformity of the etching amount of the substrate 8 can be maintained at a high level.

[0085] During the processing of one lot of substrates 8, silicon is eluted from the substrates 8, and the silicon concentration in the phosphoric acid aqueous solution present in the circulation system increases. In order to maintain or intentionally change the silicon concentration in the phosphoric acid aqueous solution present in the circulation system during the processing of one lot of substrates, the phosphoric acid aqueous solution can be supplied by the phosphoric acid aqueous solution supply unit 40 while the phosphoric acid aqueous solution is discharged by the phosphoric acid aqueous solution discharge unit 43.

[0086] When the processing of one lot of substrates 8 is completed as described above, the first lid body 71 and the second lid body 72 are moved to the open position, and the substrates 8 are removed from the inner bath 34A.

[0087] Thereafter, the first lid 71 and the second lid 72 are moved to the closed position again, and the temperature, phosphoric acid concentration, and silicon concentration of the phosphoric acid aqueous solution in the circulating system are adjusted, and then another lot of substrates 8 is processed in the same manner as described above.

[0088] As shown in Figures 3, 4 and 6, the above-mentioned etching processing device 1 further includes an imaging unit (camera) 100 that captures images of the inside of the inner tank (processing tank) 34A, and an image processing unit 101 that performs image processing of the images captured by the imaging unit 100.

[0089] The imaging unit 100 in this example is fixedly supported by a support frame (not shown) above the inner tank 34A, which stores processing liquid for liquid processing (particularly etching processing) of the substrate 8, and obtains images of the inside of the inner tank 34A from above under the control of the control unit 7.

[0090] In this example, the first lid body 71 and the second lid body 72 (particularly the main body parts 71A and 72A) are made of a transparent material such as quartz. The imaging unit 100 receives imaging light transmitted through the first lid body 71 and the second lid body 72, and obtains an image of the treatment liquid inside the inner tank 34A.

[0091] The image captured by the imaging unit 100 may be a moving image or a still image.

[0092] The installation position and shooting direction of the imaging unit 100 are not limited, and multiple imaging units 100 with different shooting directions may be provided. As shown in Fig. 4, an image of the inside of the inner tank 34A may be obtained from the side or below by the imaging unit 100 installed on the side (e.g., in the X direction) or below the inner tank 34A. When the imaging unit 100 is installed on the side or below the inner tank 34A, the members interposed between the imaging unit 100 and the inside of the inner tank 34A (i.e., the inner tank 34A, the outer tank 34B, and the container 80) are made of a transparent material that allows the shooting light to pass through.

[0093] The image processing unit 101 may be configured by the control unit 7, or may be provided separately from the control unit 7. When the image processing unit 101 is provided separately from the control unit 7, the image processing unit 101 may perform various processes under the control of the control unit 7.

[0094] The image processing unit 101 has an air bubble data acquisition unit (see FIG. 11 etc. described later). The air bubble data acquisition unit processes an image captured inside the inner tank 34A (i.e., an image captured of the treatment liquid) to acquire air bubble data indicating the state of air bubbles in the treatment liquid.

[0095] The type of bubble data and the method of acquiring the data are not limited. The bubble data typically includes data on at least one of the number, density, and size of bubbles.

[0096] Fig. 7 is a diagram showing an example of a captured image Dg1 acquired by the imaging section 100. Fig. 8 is a diagram showing an example of a processed image Dg2 obtained by image processing the captured image Dg1 shown in Fig. 7. Fig. 9 is a diagram showing another example of a processed image Dg2 obtained by image processing the captured image Dg1 shown in Fig. 7.

[0097] The air bubble data acquisition unit may perform image processing to extract only images of the air bubbles 90 from the captured image Dg1 (see FIG. 7) to acquire a processed image Dg2 (see FIG. 8). According to the processed image Dg2 shown in FIG. 8, the air bubble data acquisition unit can perform further image processing to acquire data on the number, density, and size of air bubbles in the processing liquid as air bubble data.

[0098] The air bubble data acquisition unit may utilize the property that air bubbles appear white in an image and acquire air bubble data based on the gray value of the image.

[0099] For example, when the imaging unit 100 acquires a grayscale image as the captured image Dg1 of the interior of the inner tank 34A, the air bubble data acquisition unit can acquire air bubble data directly from the captured image (grayscale image) sent from the imaging unit 100.

[0100] On the other hand, when the imaging unit 100 captures a color image as the captured image Dg1 of the interior of the inner tank 34A, the air bubble data acquisition unit can convert the captured image Dg1 (color image) into a grayscale image and acquire air bubble data from the grayscale image.

[0101] The air bubble data acquisition unit may also perform binarization processing on the captured image Dg1 (see FIG. 7) to acquire a processed image Dg2 (see FIG. 9). In the binarized processed image Dg2, white areas basically represent air bubbles 90. Therefore, when the number or area of ​​white areas in the binarized processed image Dg2 is large, the degree of air bubbles in the processing liquid is strong.

[0102] The state of bubbles in the treatment liquid is not necessarily reflected appropriately in a single image captured instantaneously inside the inner tank 34A. Therefore, the bubble data acquisition unit may acquire, as bubble data, a representative value (e.g., an average value or a median value) of data indicating the state of bubbles in the treatment liquid obtained from multiple images (which may include multiple video frames) of the inside of the inner tank 34A.

[0103] As an example, when the imaging unit 100 captures a video of the interior of the inner tank 34A, the bubble data acquisition unit can acquire bubble data based on the average or median of bubble state data obtained from each of the video frames obtained over a certain period of time (e.g., one minute).

[0104] The bubble data acquisition unit may also acquire, as the bubble data, data (e.g., image data) generated from multiple images of the processing liquid inside the inner tank 34A. For example, the bubble data acquisition unit may derive, for each pixel, a representative value (e.g., an average or median) of the pixel values ​​of each of the multiple images, and acquire, as the bubble data, data collectively including the representative values ​​of each pixel.

[0105] Fig. 10 shows an example of image data (i.e., air bubble data) made from representative values ​​(particularly average values) of pixel values ​​(particularly brightness values ​​of each pixel) of multiple images. In Fig. 10, it is shown that the amount of air bubbles is smaller in areas closer to black, and the amount of air bubbles is larger in areas closer to white.

[0106] Even when it is difficult to directly obtain data on individual bubbles in the processing liquid from the captured image, the state of the bubbles in the processing liquid can be accurately identified by using the bubble data obtained from the collection of representative values ​​of each pixel.

[0107] The above-described etching processing apparatus 1 capable of objectively identifying and evaluating the state of bubbles in a processing liquid based on a captured image of the processing liquid can be operated in various forms.

[0108] A typical example of the operation of the etching processing apparatus 1 will now be described.

[0109] [First embodiment] The etching processing apparatus 1 of this embodiment adjusts the concentration and temperature of the processing liquid to adjust the boiling state of the processing liquid to a desired state.

[0110] FIG. 11 is a functional block diagram showing an example of the image processing unit 101 according to the first embodiment.

[0111] The image processing unit 101 includes a bubble data acquisition unit 111 , a boiling state determination unit 112 , and an adjustment amount derivation unit 113 .

[0112] The bubble data acquisition unit 111 receives an image of the inside of the inner tank 34A (i.e., an image of the processing liquid) acquired by the imaging unit 100, and performs image processing on the image to acquire bubble data (e.g., data regarding the number, density or size of bubbles, or pixel representative value data, etc.).

[0113] The boiling state determination unit 112 determines the boiling state of the treatment liquid based on the bubble data acquired by the bubble data acquisition unit 111. Whether the boiling state of the treatment liquid is appropriate or not can be determined based on whether the bubble data is within an allowable range or not.

[0114] For example, in the case where the bubble data is data regarding the number of bubbles 90, if the number of bubbles 90 indicated by the bubble data is equal to or greater than the lower limit and equal to or less than the upper limit of the allowable range, it may be determined that the boiling state of the treatment liquid is appropriate. On the other hand, if the number of bubbles 90 indicated by the bubble data is smaller than the lower limit or larger than the upper limit of the allowable range, it may be determined that the boiling state of the treatment liquid is not appropriate.

[0115] The boiling state determination unit 112 may also determine whether the boiling state of the treatment liquid is appropriate by comparing the bubble data with reference data described below. As an example, if the absolute value of the difference between the bubble data (e.g., the average gray value or the median gray value described below) and the reference data is smaller than a tolerance value, it may be determined that the boiling state of the treatment liquid is appropriate.

[0116] The adjustment amount deriving unit 113 derives adjustment data for the concentration of the treatment liquid based on the determination result (i.e., the boiling state of the treatment liquid) of the boiling state determining unit 112. The adjustment data derived by the adjustment amount deriving unit 113 is sent to the treatment liquid adjusting unit 102.

[0117] The processing liquid adjuster 102 adjusts the concentration of the processing liquid in the inner tank 34A to a desired concentration based on adjustment data sent from the adjustment amount deriving unit 113 (image processing unit 101). The processing liquid adjuster 102 of this example adjusts the flow rate control valve 40D, the on-off valve 40E, the pump 51, and / or the flow rate regulator 41B to adjust the concentration of the processing liquid in the inner tank 34A.

[0118] FIG. 12 is a flow chart showing an example of the substrate liquid processing method (particularly the processing liquid adjusting method) according to the first embodiment.

[0119] The processing liquid adjustment method described below is carried out by the control unit 7 appropriately controlling various devices.

[0120] In the processing liquid adjustment method of this example, the flow rate regulator 60C is controlled by the control unit 7, and the method is performed in a state in which gas (hereinafter also referred to as "bubbling bubbles") is not discharged into the processing liquid from the multiple outlets 60D of the gas nozzle 60 (see Figures 2 to 5).

[0121] First, a process of adjusting the treatment liquid to a certain target concentration and target temperature (i.e., a treatment liquid adjustment process) is started by the treatment liquid adjuster 102 under the control of the controller 7 (S1 in FIG. 12). The controller 7 monitors the concentration (e.g., the measurement result of the phosphoric acid concentration meter 55B) and the temperature (e.g., the measurement result of a thermometer, not shown) of the treatment liquid inside the inner tank 34A, and controls the treatment liquid adjuster 102 based on the monitoring results, thereby performing the treatment liquid adjustment process.

[0122] The target concentration and the target temperature used in this step (S1) are set to, for example, a concentration and a temperature that are considered to be necessary to realize a target boiling state of the processing liquid. The target concentration and the target temperature used in this step (S1) may be automatically set by the etching processing apparatus 1 (for example, the control unit 7) based on various conditions, or may be manually set by an engineer.

[0123] Then, a treatment liquid stabilization process is performed to stabilize the treatment liquid at the adjusted temperature and concentration (S2). As an example of the treatment liquid stabilization process, the treatment liquid adjustment process described above is continuously performed until the variations in temperature and concentration of the treatment liquid (i.e., the range of fluctuations over a certain period of time) are sufficiently reduced.

[0124] Thereafter, the boiling state determination unit 112 determines whether or not the boiling state of the treatment liquid is appropriate based on the above-mentioned air bubble data (S3).

[0125] If it is determined that the boiling state of the treatment liquid is appropriate (Y in S3), the adjustment of the treatment liquid is completed.

[0126] On the other hand, if it is determined that the boiling state of the treatment liquid is not appropriate (N in S3), the adjustment amount derivation unit 113 resets the target concentration (S4), and the treatment liquid adjustment process is performed based on the reset target concentration (S1 and S2). That is, adjustment data corresponding to the reset target concentration is sent from the adjustment amount derivation unit 113 to the treatment liquid adjustment unit 102, and the treatment liquid adjustment unit 102 performs the treatment liquid adjustment process again based on the adjustment data.

[0127] In this example, the reset target concentration and adjustment data are determined based on a comparison between the bubble data and the allowable range. Specifically, the adjustment amount derivation unit 113 determines the reset target concentration and adjustment data so that the boiling state of the treatment liquid indicated by the bubble data approaches the target boiling state. In particular, the adjustment amount derivation unit 113 determines the reset target concentration and adjustment data so that the greater the deviation of the bubble data from the allowable range, the greater the difference between the current target concentration and the reset target concentration.

[0128] As described above, according to this embodiment, an image of the treatment liquid is captured by imaging, and the boiling state of the treatment liquid is quantified by analyzing the image. This makes it possible to represent the boiling state of the treatment liquid (e.g., boiling strength) by a numerical value derived based on the captured image.

[0129] Therefore, the boiling state of the processing liquid can be objectively grasped with high accuracy based on numerical values, and the processing liquid can be adjusted to a desired state while completely eliminating the subjective control of the device by the engineer. This allows the liquid processing of the substrate 8 to be performed stably and uniformly. Furthermore, when the liquid processing of the substrate 8 is performed using a plurality of etching processing devices 1, the liquid processing of the substrate 8 can be performed uniformly even between the etching processing devices 1.

[0130] In addition, the imaging of the processing liquid, the acquisition of bubble data by image analysis, the determination of the boiling state of the processing liquid based on the bubble data, and the derivation of adjustment data used to adjust the concentration of the processing liquid are all performed mechanically. Therefore, by automating this series of processes, the burden on engineers can be reduced. In particular, in this embodiment, the adjustment of the concentration of the processing liquid based on the adjustment data is also performed mechanically, so the processing liquid in the inner tank 34A is automatically adjusted to a desired state without any human intervention.

[0131] When visually checking the state of bubbles in the treatment liquid after changing the concentration and temperature of the treatment liquid, the engineer must wait until the state of the treatment liquid stabilizes before checking the state of bubbles in the treatment liquid. It may take a long time (e.g., one hour or more) for the treatment liquid to stabilize, and the engineer may be tied up for a long time to visually check the state of bubbles in the treatment liquid.

[0132] In contrast, with the present embodiment, the engineer is subject to little or no constraints even when the treatment liquid requires a long time to stabilize after changing its concentration and temperature.

[0133] [Second embodiment] In this embodiment, elements that are the same as or correspond to those in the above-described first embodiment are given the same reference numerals, and detailed description thereof will be omitted.

[0134] In this embodiment, the state of the gas (bubbling bubbles) in the processing liquid that is sent from the gas nozzle 60 (bubbling portion) to the processing liquid inside the inner tank 34A is evaluated, and a notification is given according to the evaluation.

[0135] In the phosphoric acid etching process, by appropriately releasing bubbling bubbles into the processing liquid (i.e., bubbling), regrowth can be suppressed and phosphoric acid etching can be promoted. However, the bubbling state can vary due to clogging of the gas nozzle 60 or variations in the flow path diameter. When the bubbling state varies, the regrowth suppression performance and etching performance of the etching processing device 1 vary. Therefore, from the viewpoint of ensuring the regrowth suppression performance and etching performance of the etching processing device 1, it is preferable to detect an abnormality in the bubbling state.

[0136] FIG. 13 is a functional block diagram showing an example of the image processing unit 101 according to the second embodiment.

[0137] The image processing unit 101 includes a bubble data acquisition unit 111 and a bubbling state determination unit 121 .

[0138] The air bubble data acquisition unit 111 receives an image of the inside of the inner tank 34A (that is, an image of the treatment liquid) acquired by the imaging unit 100, and performs image processing on the image to acquire air bubble data.

[0139] The air bubble data acquisition unit 111 in this example derives a representative value of each pixel value of a plurality of images for each pixel, and acquires image data created by a set of the representative values ​​of each pixel as air bubble data (see FIG. 10 above). The air bubble data (image data) acquired based on the brightness value of each pixel represents the state of air bubbles in the processing liquid by image contrast, and areas in the processing liquid with many air bubbles are displayed as whitish. This makes it possible to appropriately determine the state of air bubbles in the processing liquid even when it is difficult to directly determine the number, density, and size of air bubbles in the processing liquid from the image data acquired by the imaging unit 100.

[0140] The bubbling state determination unit 121 determines the state of the bubbling bubbles in the processing liquid inside the inner tank 34A based on the bubble data. The bubbling state determination unit 121 of this example determines the state of the bubbling bubbles in the processing liquid by comparing the bubble data with reference data.

[0141] The reference data used here is data based on a reference state of bubbling bubbles, and is stored by the bubbling state determination unit 121. Typically, bubble data when the state of bubbling bubbles in the treatment liquid is normal (see FIG. 10) is used as the reference data. In this case, the bubbling state determination unit 121 may calculate a difference value (hereinafter also referred to as a "pixel difference value") between the pixel value of the bubble data obtained from a captured image of the treatment liquid to be evaluated and the pixel value of the reference data.

[0142] The bubbling state determination unit 121 can determine the state of bubbling bubbles in the treatment liquid according to the pixel difference value of each pixel. That is, the bubbling state determination unit 121 can determine the state of bubbling bubbles in the treatment liquid based on the number and / or distribution of pixels with large pixel difference values ​​(e.g., pixels showing pixel difference values ​​larger than a predetermined value). When the number or density of pixels with large pixel difference values ​​is larger than a predetermined value, the bubbling state determination unit 121 can determine that an abnormality has occurred in the state of bubbling bubbles in the treatment liquid.

[0143] In particular, the bubbling state determination unit 121 of this embodiment determines the state of bubbling bubbles based on the entire range of the treatment liquid and the state of bubbling bubbles based on a local range of the treatment liquid, based on the bubble data. In this way, when the bubbling state determination unit 121 determines that an abnormality has occurred in the state of the bubbling bubbles, it can obtain information on factors that are thought to be causing the abnormality.

[0144] For example, when pixels with large pixel difference values ​​exist throughout the captured image (particularly the processing liquid image), it is considered that an abnormality has occurred in the state of bubbling bubbles throughout the processing liquid. Therefore, it is considered that there is a possibility that an abnormality has occurred in a factor that can affect the entire processing liquid. For example, it is considered that there is a possibility that an abnormality has occurred in the flow rate of the gas discharged from the gas nozzle 60 into the processing liquid, the concentration of the processing liquid, and / or the temperature of the processing liquid.

[0145] Here, the "mean gray value" and the "median gray value" are gray values ​​derived by image analysis, which are the average and median gray values ​​of each pixel in the entire image, and can indicate the state of air bubbles in the processing liquid. In this example, the black pixel value is the minimum value (e.g., zero (0)), and the white pixel value is the maximum value. Therefore, the larger the mean gray value and the median gray value, the larger the amount of air bubbles (air-liquid interface) present in the processing liquid, and the smaller the mean gray value and the median gray value, the smaller the amount of air bubbles present in the processing liquid.

[0146] The mean gray value and median gray value of the image of the treatment liquid captured by the imaging unit 100 while bubbling bubbles are being discharged into the treatment liquid from the gas nozzle 60 vary depending on the gas flow rate, the treatment liquid temperature, and the treatment liquid concentration. That is, the mean gray value and median gray value can be expressed by functions f and f' with the gas flow rate, the treatment liquid temperature, and the treatment liquid concentration as variables, as follows:

[0147] Mean gray value = f(gas flow rate, process liquid temperature, process liquid concentration) Median gray value = f' (gas flow rate, process liquid temperature, process liquid concentration)

[0148] The functions f, f' of the mean gray value and the median gray value can be modeled in various forms such as a linear expression, a quadratic expression, a cubic or higher degree expression, an exponential function, etc., and can be expressed, for example, by the following multi-dimensional linear expression:

[0149] Average gray value = α + β1 gas flow rate + β2 treatment liquid temperature + β3 treatment liquid concentration Median gray value = α' + β1' gas flow rate + β2' processing liquid temperature + β3' processing liquid concentration

[0150] In the above formulas for the mean gray value and the median gray value, "α" and "α'" correspond to the gray value when no bubbles (including bubbling bubbles and bubbles caused by boiling of the processing liquid) are generated in the processing liquid. Therefore, the shading information (such as information on the background) that appears in the captured image due to the hardware configuration of the device is reflected in "α" and "α'".

[0151] “β1” to “β3” and “β1′” to “β3′” are values ​​that represent the influence of the gas flow rate, the processing liquid temperature, and the processing liquid concentration, and are values ​​that are determined according to the specific configuration of the etching processing apparatus 1.

[0152] The "gas flow rate" is the flow rate of the gas (inert gas in this example) discharged from the gas nozzle 60 into the processing liquid (that is, the amount of bubbling bubbles discharged per unit time).

[0153] In this example, the "treatment solution temperature" is the temperature of the aqueous phosphoric acid solution in the inner tank 34A.

[0154] In this example, the "treatment solution concentration" is the concentration of the aqueous phosphoric acid solution in the inner tank 34A.

[0155] According to the above model formula, the mean gray value and the median gray value increase as the flow rate of the gas discharged from the gas nozzle 60 to the processing liquid increases. Also, the mean gray value and the median gray value increase as the temperature of the processing liquid increases. On the other hand, the mean gray value and the median gray value decrease as the concentration of the processing liquid increases.

[0156] Thus, from the above model formula, it can be seen that the flow rate of the bubbling bubbles ejected from the gas nozzle 60 into the processing liquid, the concentration of the processing liquid, and the temperature of the processing liquid are factors that can affect the processing liquid as a whole.

[0157] On the other hand, when it is determined that there is an abnormality in the state of the bubbling bubbles only in a localized area of ​​the treatment liquid, it is considered possible that an abnormality has occurred in a factor that can affect only that localized area.

[0158] In the captured image Dg1 of this example, as shown in Fig. 7, the inner tank 34A is separated into two parts (i.e., the first inner tank part 34A-1 and the second inner tank part 34A-2) via the cover 73 and is captured. If there are many pixels with large pixel difference values ​​in the air bubble data only in one of the first inner tank part 34A-1 and the second inner tank part 34A-2 and few or no pixels in the other, it is considered that there may be an abnormality in a factor that affects only one of the inner tank parts. Specifically, it is considered that there may be a localized clogging or damage of the gas nozzle 60 present only in one of the inner tank parts, a shortage of gas flow rate in the gas nozzle 60 present only in one of the inner tank parts, and / or damage to the LFN nozzle.

[0159] The result of the determination by the bubbling state determination unit 121 thus obtained is sent to the notification unit 122 (see FIG. 13).

[0160] The notification unit 122 performs notification processing based on the result of the determination by the bubbling state determination unit 121. The specific content and method of the notification processing are not limited.

[0161] The notification unit 122 may perform notification processing to notify an engineer, for example, via audio or visual display, that the state of the bubbling bubbles in the processing liquid is normal and / or abnormal. The notification information notified to the engineer may include information on the presence or absence of an abnormality in the bubbling state, as well as information on factors that are thought to be causing the abnormality (for example, information on a device that may be malfunctioning) and other information. Furthermore, if there is an abnormality in the state of the bubbling bubbles in the processing liquid, the notification information may include information urging the engineer to perform maintenance.

[0162] The notification unit 122 may perform the notification process by storing data (which may include image data) indicating that the state of the bubbling bubbles in the processing liquid is normal and / or abnormal in a storage unit (for example, storage medium 38 shown in FIG. 1). For example, if there is an abnormality in the state of the bubbling bubbles in the processing liquid, the notification unit 122 may store in the storage unit, in association with each other, the identification data of the substrate 8 that has been subjected to liquid processing using the processing liquid in such an abnormal state, and abnormality flag data. The abnormality flag data stored in the storage unit in this manner may be read out and used as appropriate for subsequent processing.

[0163] FIG. 14 is a flowchart showing an example of a substrate liquid processing method (particularly a bubbling state determining method) according to the second embodiment.

[0164] First, in a state where bubbling bubbles are being discharged from the gas nozzle 60 into the processing liquid inside the inner bath 34A (i.e., in a bubbling state), the imaging unit 100 captures an image of the processing liquid inside the inner bath 34A (S11 in FIG. 14).

[0165] In this example, imaging is performed by the imaging unit 100 in a state where no bubbles are generated due to boiling of the processing liquid (i.e., boiling gas in the processing liquid: hereinafter, may also be referred to as "boiling bubbles"). Therefore, the bubbles captured in the image acquired by the imaging unit 100 are basically bubbling bubbles discharged from the gas nozzle 60. Therefore, according to the bubbling state determination method of this example, the state of the bubbling bubbles discharged from the gas nozzle 60 into the processing liquid (e.g., the amount and unevenness of the bubbling bubbles) can be determined with high accuracy.

[0166] In this example, the image capturing section 100 captures an image when the treatment liquid is not boiling. However, the image capturing section 100 may capture an image when the treatment liquid is boiling but no boiling bubbles that can be captured are generated.

[0167] The image of the treatment liquid acquired by the imaging unit 100 is sent to an air bubble data acquisition unit 111 .

[0168] Then, the air bubble data acquisition unit 111 performs image analysis on the image sent from the imaging unit 100 to acquire air bubble data (S12).

[0169] Then, the bubbling state determination unit 121 determines whether or not the bubbling state is normal based on the air bubble data (S13).

[0170] If it is determined that the bubbling state is normal (Y in S13), the bubbling state determination unit 121 uses the image captured by the imaging unit 100 as reference data held by the bubbling state determination unit 121 itself (S14).

[0171] In this step (S14), there is no limitation on the specific method of using the image currently acquired by the imaging unit 100 as reference data. For example, the bubbling state determination unit 121 may use the image currently acquired as reference data for the next or subsequent processing (i.e., processing using the image acquired by the imaging unit 100 next or subsequent). Alternatively, the bubbling state determination unit 121 may use the image currently acquired to perform an update process of the reference data (i.e., processing to correct the reference data).

[0172] On the other hand, if it is determined that the bubbling state is abnormal (N in S13), the notification process described above is performed by the notification unit 122 (S15). This allows an engineer to recognize the abnormality in the bubbling state and to consider the need for maintenance in a timely manner.

[0173] As described above, according to this embodiment, an image of the treatment liquid is captured by imaging, and the image is analyzed to quantify the bubbling state of the treatment liquid. This makes it possible to express the bubbling state of the treatment liquid (e.g., the amount and distribution of bubbling bubbles) by a numerical value derived based on the captured image.

[0174] Therefore, the bubbling state of the processing liquid can be objectively grasped with high accuracy based on numerical values, and the bubbling state can be adjusted to a desired state, thereby enabling stable and uniform liquid processing of the substrate 8.

[0175] Furthermore, by utilizing the highly accurate determination result of the bubbling state for detecting an abnormality in the apparatus, the occurrence of an abnormality in the apparatus can be detected in a timely manner.

[0176] Furthermore, by using, as reference data, a captured image of the treatment liquid that has been determined to have a normal bubbling state, the accuracy of determining the bubbling state can be improved.

[0177] [Third embodiment] In this embodiment, elements that are the same as or correspond to those in the first and second embodiments described above are given the same reference numerals, and detailed description thereof will be omitted.

[0178] In this embodiment, the state of the bubbling bubbles sent from the gas nozzle 60 to the processing liquid is evaluated, and the amount of bubbling bubbles sent from the gas nozzle 60 to the processing liquid is adjusted based on the evaluation, thereby optimizing the bubbling state.

[0179] In general, the boiling point of a processing liquid varies depending on the concentration of the processing liquid and the pressure (environmental pressure (e.g., atmospheric pressure)) applied to the processing liquid. Therefore, when bubbles caused by boiling of the processing liquid (i.e., boiling bubbles) are actively generated during liquid processing, the state of the boiling bubbles in the processing liquid varies depending on the environmental pressure.

[0180] A change in the state of the bubbles in the processing liquid changes the regrowth suppression performance and etching performance of the etching processing device 1, causing the liquid processing of the substrate 8 to become unstable or to be unable to be performed appropriately. To stabilize the state of the boiling bubbles in the processing liquid, it is necessary to keep the boiling state of the processing liquid constant.

[0181] For example, it is possible to keep the boiling state of the processing liquid constant by changing the concentration of the processing liquid according to the environmental pressure. However, a change in the concentration of the processing liquid may change the liquid processing state of the substrate 8 (e.g., etching rate), which may cause the liquid processing state of the substrate 8 to vary.

[0182] In view of these circumstances, in this embodiment, the bubbling state of the processing liquid during liquid processing is optimized by adjusting the flow rate of the bubbling bubbles ejected from the gas nozzle 60 into the processing liquid without changing the concentration of the processing liquid.

[0183] In the example described below, imaging by the imaging unit 100 and liquid processing of the substrate 8 are performed in a state in which the processing liquid has a temperature and concentration such that boiling bubbles are not generated even if a conceivable change in environmental pressure occurs. Therefore, the bubbling state of the processing liquid while imaging by the imaging unit 100 and liquid processing of the substrate 8 are being performed is basically brought about by bubbling bubbles discharged from the gas nozzle 60 into the processing liquid.

[0184] FIG. 15 is a functional block diagram showing an example of an image processing unit 101 according to the third embodiment.

[0185] The image processing unit 101 includes a bubble data acquisition unit 111 and a bubbling state determination unit 121. The bubble data acquisition unit 111 and the bubbling state determination unit 121 function in the same manner as in the second embodiment described above.

[0186] That is, the air bubble data acquisition unit 111 receives an image of the inside of the inner tank 34A (that is, an image of the treatment liquid) acquired by the imaging unit 100, and performs image processing on the image to acquire air bubble data.

[0187] The bubbling state determination unit 121 determines the state of the bubbling bubbles in the processing liquid, which are sent from the gas nozzle 60 (bubbling unit) to the processing liquid inside the inner tank 34A, based on the bubble data. Specifically, the bubbling state determination unit 121 determines the state of the bubbling bubbles in the processing liquid by comparing the bubble data with reference data.

[0188] The bubbling state discrimination unit 121 of this embodiment transmits the discrimination result to the bubbling control unit 131. The discrimination result transmitted from the bubbling state discrimination unit 121 to the bubbling control unit 131 includes information on the difference between the current bubbling bubble state and the desired bubbling bubble state (i.e., information on the difference between the current bubble data and the reference data).

[0189] 15 is provided as a part of the control unit 7, and controls the bubbling unit based on the determination result of the bubbling state determination unit. The bubbling control unit 131 may be provided separately from the control unit 7. In this case, the bubbling control unit 131 may be controlled by the control unit 7.

[0190] The bubbling section is composed of one or more devices that contribute to sending bubbling bubbles to the processing liquid inside the inner tank 34A. The bubbling section in this example includes a gas nozzle 60, a pipe 60A, a gas supply source 60B, and a flow rate regulator 60C, as shown in Figures 2 and 3. The bubbling control unit 131 controls the flow rate regulator 60C to adjust the amount of bubbling bubbles ejected from the outlet 60D of the gas nozzle 60 into the processing liquid (i.e., the flow rate of bubbling bubbles in the gas nozzle 60).

[0191] The bubbling control unit 131 of this example controls the flow rate regulator 60C to adjust the flow rate of the inert gas sent toward the gas nozzle 60 so as to realize a desired bubbling state. Specifically, the bubbling control unit 131 controls the flow rate regulator 60C based on "information on the difference between the current state of bubbling bubbles and the desired state of bubbling bubbles" sent from the bubbling state determination unit 121. As a result, an appropriate amount of bubbling bubbles is discharged from the gas nozzle 60 into the processing liquid, and the state of the bubbling bubbles in the processing liquid is adjusted to a desired state.

[0192] For example, the bubbling control unit 131 may determine the control amount of the flow rate regulator 60C by comparing the discrimination result of the bubbling state discriminator 121 with the reference model, and control the flow rate regulator 60C based on the control amount. The reference model is determined based on, for example, the amount of bubbling bubbles sent into the treatment liquid, the concentration of the treatment liquid, and the temperature of the treatment liquid. As an example, the reference model may be determined based on the model formula of the mean gray value or the median gray value described above.

[0193] Alternatively, the bubbling control unit 131 may determine the control amount of the flow rate regulator 60C by checking the determination result of the bubbling state determination unit 121 against a reference table, and control the flow rate regulator 60C based on the control amount. The reference table associates the state of the bubbling bubbles in the processing liquid with the amount of the bubbling bubbles sent out into the processing liquid.

[0194] According to the etching processing apparatus 1 of the present embodiment, even if the environmental pressure fluctuates, the discharge state of the bubbling bubbles from the gas nozzle 60 to the processing liquid can be adjusted, and the bubbling state of the processing liquid can be maintained in a desired state. In this way, by maintaining the bubbling state in a desired state without changing the concentration of the processing liquid, the liquid processing of the substrate 8 can be stably performed.

[0195] FIG. 16 is a flow chart showing an example of a substrate liquid processing method (particularly a bubbling state adjusting method) according to the third embodiment.

[0196] In this example, similarly to the substrate liquid processing method (second embodiment) shown in Fig. 14 described above, an image of the processing liquid in a bubbling state is acquired by the imaging unit 100 (S21 in Fig. 16), and bubble data is acquired by image analysis performed by the bubble data acquisition unit 111 (S22). In this example, the bubble data acquired by the bubble data acquisition unit 111 is based on gray values.

[0197] Then, the bubbling state determination unit 121 determines whether the bubbling state is normal or not based on the air bubble data (S23). If it is determined that the bubbling state is normal (Y in S23), the adjustment of the bubbling state of the treatment liquid is completed.

[0198] On the other hand, if it is determined that the bubbling state is abnormal (N in S23), the bubbling control unit 131 controls the bubbling unit (flow rate regulator 60C) as described above, and the flow rate of the bubbling bubbles is changed so that the bubbling state approaches the desired state (S24). After the flow rate of the bubbling bubbles is changed in this manner, the above steps S21 to S23 are repeated to adjust the bubbling state.

[0199] The above-mentioned adjustment of the bubbling state can be carried out in various adjustment modes. Typical examples of the adjustment mode of the bubbling state will be described below.

[0200] FIG. 17 is a flow chart showing an example of the flow of liquid treatment of substrate 8.

[0201] In the example shown in FIG. 17, before the substrate 8 is introduced into the inner tank 34A, bubbling bubbles are discharged from the gas nozzle 60 (pre-bubbling process; S31 in FIG. 17).

[0202] Thereafter, the substrates 8 are introduced into the inner bath 34A (S32). In this example, as described above, a plurality of substrates 8 (substrate lot) are introduced into the inner bath 34A at one time.

[0203] Thereafter, the substrate lot is subjected to liquid processing (etching processing) in the inner bath 34A (S33).

[0204] Thereafter, the substrate lot for which the liquid processing has been completed is removed from the inner bath 34A (S34).

[0205] Then, if liquid processing is required for the next lot of substrates (Y of S35), the above steps S31 to S34 are repeated.

[0206] On the other hand, if the liquid processing of the next substrate lot is not required (N in S35), the liquid processing of substrates 8 is completed.

[0207] In the substrate liquid processing method shown in FIG. 17, the bubbling state can be adjusted as follows.

[0208] [First bubbling state adjustment mode] The imaging of the processing liquid, the acquisition of bubble data, the determination of the bubbling state, and the control of the bubbling section may all be performed repeatedly and continuously while the liquid processing of the substrates 8 (substrate lot) is being performed (S33).

[0209] In this embodiment, the imaging section 100 captures an image of the processing liquid while the substrate 8 (substrate lot) is immersed in the processing liquid and bubbling bubbles are being discharged from the gas nozzle 60 into the processing liquid.

[0210] The bubble data acquisition unit 111 acquires bubble data by performing image processing on an image acquired while the substrate 8 (substrate lot) is immersed in the processing liquid, and the bubbling state determination unit 121 determines the bubbling state based on the bubble data.

[0211] Based on the determination result of the bubbling state determination unit 121, the bubbling control unit 131 controls the bubbling unit (flow rate regulator 60C) so as to send an appropriate amount of bubbling bubbles into the processing liquid in which the substrate 8 (substrate lot) is immersed.

[0212] According to this embodiment, a series of processes from imaging the processing liquid to controlling the bubbling section (adjusting the amount of bubbling bubbles sent out) is performed for each substrate lot, so that the processing liquid can be adjusted to a bubbling state that is individually suited to the substrate lot.

[0213] [Second bubbling state adjustment mode] In this embodiment, while the liquid processing of the first substrate lot is being performed (S33), an image of the processing liquid is captured by the imaging section 100, and bubble data is obtained and a bubbling state is determined based on the captured image.

[0214] Based on the thus obtained bubbling state discrimination result (i.e., the bubbling state discrimination result based on the image captured during the liquid processing of the first substrate lot), the bubbling section for the liquid processing of the second substrate lot (second substrate) is controlled. That is, the pre-bubbling process (S31) for the liquid processing of the second substrate lot and the bubbling process performed during the liquid processing of the second substrate lot (S33) are performed based on the bubbling state discrimination result during the liquid processing of the first substrate lot (S33).

[0215] As described above, according to this embodiment, the bubble data acquisition unit 111 acquires bubble data by performing image processing on an image acquired while the first substrate lot (first substrate) is immersed in the processing liquid.

[0216] Based on the discrimination result of the bubbling state discrimination unit 121, the bubbling control unit 131 controls the bubbling unit to send gas into the processing liquid in which the second substrate lot (second substrate) that is introduced into the inner tank 34A after the first substrate lot is removed from the inner tank 34A is immersed.

[0217] In this manner, in this embodiment, the result of determining the bubbling state during the liquid treatment of the preceding substrate (first substrate) 8 is used as feedback in the liquid treatment of the subsequent substrate (second substrate) 8.

[0218] [Third bubbling state adjustment mode] In this embodiment, in the pre-bubbling process (S31), an image of the processing liquid is captured by the imaging unit 100, and bubble data is acquired and the bubbling state is determined based on the captured image. Then, in the liquid processing of the substrate lot performed thereafter (S33), the bubbling unit is controlled based on the determination result of the bubbling state.

[0219] In this embodiment, the imaging section 100 captures an image of the processing liquid into which bubbling bubbles are being discharged, with the substrate 8 not being immersed in the processing liquid.

[0220] The air bubble data acquisition unit 111 acquires air bubble data by performing image processing on a captured image acquired when the substrate 8 is not immersed in the processing liquid.

[0221] The bubbling control unit 131 controls the bubbling unit so as to send bubbling bubbles into the processing liquid in which the substrate 8 is immersed, based on the determination result of the bubbling state determination unit 121 derived from the bubble data.

[0222] Usually, there is a short time between the timing of the pre-bubbling process (S31) and the timing of the liquid process (S33) of the substrate lot, and the environmental pressure of the processing liquid does not change suddenly during that short time. Therefore, in this embodiment, there is practically little or no inconvenience caused by the difference between the stage where the processing liquid is imaged and the bubbling state is determined and the stage where the bubbling unit is controlled.

[0223] [Fourth embodiment] In this embodiment, elements that are the same as or correspond to those in the above-described first to third embodiments are given the same reference numerals, and detailed description thereof will be omitted.

[0224] In this embodiment, the state of the bubbling bubbles sent from the gas nozzle 60 to the processing liquid is evaluated, and the state of sending out the bubbling bubbles from the gas nozzle 60 is adjusted based on the evaluation, thereby improving the balance of the liquid processing on each substrate 8.

[0225] The liquid processing is not necessarily performed uniformly even on each substrate 8, and the degree of liquid processing may vary depending on the location on the processing surface of the substrate 8. The main cause of such variation in liquid processing on each substrate 8 is considered to be a fixed factor derived from the configuration of the etching processing apparatus 1.

[0226] In fact, when the processed surface of the substrate 8 after the liquid processing by the etching processing device 1 was evaluated, the state of processing unevenness of the individual substrates 8 was similar among the substrates 8, and in particular, the state of processing unevenness was very similar among the substrates 8 that had been subjected to the liquid processing at the same position in the inner tank 34A. This also shows that factors derived from the configuration of the etching processing device 1 are the predominant cause of the liquid processing variation (i.e., processing unevenness) of the individual substrates 8, and that the liquid processing variation of each substrate 8 is reproducible.

[0227] When liquid processing of the substrate 8 is performed while discharging bubbling bubbles from the gas nozzle 60, the bubbling state of the processing liquid is one of the causes of variation in the liquid processing of the substrate 8. In light of the fact that bubbles move in the height direction (especially upward) in the processing liquid, it is possible to improve the horizontal variation in the liquid processing of each substrate 8 by adjusting the discharge state of bubbling bubbles from the multiple gas nozzles 60 aligned in the horizontal direction.

[0228] FIG. 18 is a diagram illustrating an example of a bubbling section according to the fourth embodiment.

[0229] In this embodiment, a first bubbling section and a second bubbling section that send gas from different positions in the horizontal direction are provided to the processing liquid inside the inner tank 34A.

[0230] 18 includes a gas supply source 60B, a first flow rate regulator 60C-1, a second flow rate regulator 60C-2, a first gas nozzle 60-1, and a second gas nozzle 60-2 attached to a pipe 60A extending from the gas supply source 60B. One pipe 60A extending from the gas supply source 60B branches into two pipes 60A midway. One branched pipe 60A is provided with the first flow rate regulator 60C-1 and the first gas nozzle 60-1, and the other branched pipe 60A is provided with the second flow rate regulator 60C-2 and the second gas nozzle 60-2.

[0231] 18, the first bubbling section includes a pipe 60A, a gas supply source 60B, a first flow rate regulator 60C-1, and a first gas nozzle 60-1. The second bubbling section includes a pipe 60A, a gas supply source 60B, a second flow rate regulator 60C-2, and a second gas nozzle 60-2.

[0232] As shown in Fig. 3, the first gas nozzle 60-1 and the second gas nozzle 60-2 are disposed at different positions in the horizontal direction (Y direction) inside the inner tank 34A. In the example shown in Fig. 3, the first gas nozzle 60-1 is positioned in the first inner tank part 34A-1, and most of the bubbling bubbles discharged from the first gas nozzle 60-1 move through the processing liquid in the first inner tank part 34A-1. On the other hand, the second gas nozzle 60-2 is positioned in the second inner tank part 34A-2, and most of the bubbling bubbles discharged from the second gas nozzle 60-2 move through the processing liquid in the second inner tank part 34A-2.

[0233] Thus, inside the inner tank 34A, the location from which the first gas nozzle 60-1 (first bubbling section) ejects gas and the location from which the second gas nozzle 60-2 (second bubbling section) ejects gas are located on horizontally opposite sides to each other with respect to the position where the substrate 8 is placed.

[0234] 3 and other figures show that two gas nozzles 60 are provided inside the inner tank 34A, but the number of gas nozzles 60 is not limited, and any number of gas nozzles 60 equal to or greater than two may be arranged in the horizontal direction (particularly the Y direction). In this case, it is preferable that one or more gas nozzles 60 are assigned to the first inner tank portion 34A-1, and one or more gas nozzles 60 are assigned to the second inner tank portion 34A-2.

[0235] FIG. 19 is a functional block diagram showing an example of the image processing unit 101 according to the fourth embodiment.

[0236] The image processing unit 101 of this example has a configuration similar to that of the image processing unit 101 according to the above-described third embodiment (see FIG. 15), and includes a bubble data acquisition unit 111 and a bubbling state determination unit 121.

[0237] The bubbling state determination unit 121 determines the state of bubbling bubbles in the processing liquid based on the bubble data acquired by the bubble data acquisition unit 111 , and transmits the determination result to the bubbling control unit 131 .

[0238] The bubbling control unit 131 of this embodiment controls the first flow rate adjuster 60C-1 (first bubbling unit) and the second flow rate adjuster 60C-2 (second bubbling unit) based on the determination result of the bubbling state determination unit 121.

[0239] The determination of the bubbling state by the bubbling state determination unit 121 and the control by the bubbling control unit 131 are basically performed in the same manner as in the above-described second embodiment. That is, the bubbling state determination unit 121 determines the state of bubbling bubbles in the processing liquid by comparing the bubble data acquired by the bubble data acquisition unit 111 with reference data. The bubbling state determination unit 121 acquires information regarding the difference between the current state of bubbling bubbles and the desired state of bubbling bubbles by comparing the bubble data with the reference data.

[0240] The reference data used in this embodiment is bubble data when the state of bubbling bubbles in the processing liquid is normal (see FIG. 10). In particular, bubble data when there is little or no "horizontal variation in liquid processing of the substrate 8" resulting from the configuration of the etching processing device 1 can be used as the reference data.

[0241] When the bubble data and the reference data are constituted by a gray value map (see FIG. 10), the differential gray value between the bubble data and the reference data can be obtained as “information about the difference between the current bubbling bubble state and the desired bubbling bubble state.”

[0242] The bubbling control unit 131 controls the first flow rate regulator 60C-1 and the second flow rate regulator 60C-2 based on “information regarding the difference between the current bubbling bubble state and the desired bubbling bubble state” sent from the bubbling state determination unit 121.

[0243] In this way, the bubbling state determination unit 121 determines whether the state of the bubbling bubbles in the treatment liquid is normal or not from the viewpoint of suppressing horizontal variations in the liquid treatment. Then, the bubbling control unit 131 controls the first flow rate adjuster 60C-1 and the second flow rate adjuster 60C-2 so as to suppress horizontal variations in the liquid treatment.

[0244] As described above, according to this embodiment, the balance of the discharge flow rates of bubbling bubbles between the first bubbling section and the second bubbling section is optimized, and the uniformity of the liquid processing on each substrate 8 can be improved.

[0245] [Variations] In the above embodiment, the processing liquid is a phosphoric acid aqueous solution, but it is not limited thereto, and for example, a processing liquid obtained by mixing an additive such as acetic acid with SC1 or a phosphoric acid aqueous solution may be used. Also, in the above embodiment, the film to be etched is a silicon nitride film, but it is not limited thereto, and other films to be etched may be used. The substrate is not limited to a semiconductor wafer, and may be a substrate made of other materials such as glass or ceramic.

[0246] It should be noted that the embodiments and modifications disclosed in this specification are merely illustrative in all respects and are not to be construed as limiting. The above-mentioned embodiments and modifications can be omitted, substituted, and modified in various forms without departing from the scope and spirit of the appended claims. For example, the above-mentioned embodiments and modifications may be combined in part or in whole, and an embodiment other than the above-mentioned may be combined in part or in whole with the above-mentioned embodiment or modification.

[0247] Furthermore, the technical category in which the above-mentioned technical idea is embodied is not limited. For example, the above-mentioned substrate liquid processing apparatus may be applied to other apparatuses. Furthermore, the above-mentioned technical idea may be embodied by a computer program for causing a computer to execute one or more procedures (steps) included in the above-mentioned substrate liquid processing method. Furthermore, the above-mentioned technical idea may be embodied by a computer-readable non-transitory recording medium on which such a computer program is recorded.

Claims

1. a processing tank for storing a processing liquid for liquid processing of the substrate; an imaging unit for acquiring an image of the processing liquid in the processing tank; an image processing unit having an air bubble data acquiring unit that performs image processing on the image to acquire air bubble data indicating a state of air bubbles in the treatment liquid; a bubbling unit that delivers gas to the treatment liquid in the treatment tank; A notification unit that performs notification processing, the image processing unit includes a bubbling state determination unit that determines a state of the gas in the treatment liquid based on the bubble data, The notification unit performs notification processing based on the determination result of the bubbling state determination unit.

2. The substrate liquid processing apparatus according to claim 1 , wherein the image processing section includes a boiling state determination section that determines a boiling state of the processing liquid based on the bubble data.

3. The substrate liquid processing apparatus according to claim 2 , further comprising an adjustment amount deriving section for deriving adjustment data for the concentration of the processing liquid based on a result of the determination by the boiling state determining section.

4. The substrate liquid processing apparatus according to any one of claims 1 to 3, wherein the bubbling state determination unit determines the state of the gas in the processing liquid by comparing the bubble data with reference data based on a standard state of the gas in the processing liquid.

5. A substrate liquid processing apparatus as described in any one of claims 1 to 4, wherein the bubbling state determination unit determines, based on the bubble data, a gas state based on the entire range of the processing liquid and a gas state based on a local range of the processing liquid.

6. a bubbling unit that delivers gas to the treatment liquid in the treatment tank; A bubbling control unit that controls the bubbling unit, the image processing unit includes a bubbling state determination unit that determines a state of the gas in the treatment liquid based on the bubble data, 6. The substrate liquid processing apparatus according to claim 1, wherein the bubbling control section controls the bubbling section based on a determination result of the bubbling state determination section.

7. the air bubble data acquisition unit acquires the air bubble data by performing the image processing on the image acquired in a state where the substrate is not immersed in the processing liquid; 7. The substrate liquid processing apparatus according to claim 6, wherein the bubbling control section controls the bubbling section so as to send gas into the processing liquid in which the substrate is immersed, based on a determination result of the bubbling state determination section.

8. A processing tank for storing a processing liquid for liquid processing of a substrate; an imaging unit for acquiring an image of the processing liquid in the processing tank; an image processing unit having an air bubble data acquiring unit that performs image processing on the image to acquire air bubble data indicating a state of air bubbles in the treatment liquid; a bubbling unit that delivers gas to the treatment liquid in the treatment tank; A bubbling control unit that controls the bubbling unit, the image processing unit includes a bubbling state determination unit that determines a state of the gas in the treatment liquid based on the bubble data, The bubbling control unit controls the bubbling unit based on a determination result of the bubbling state determination unit, the air bubble data acquisition unit acquires the air bubble data by performing the image processing on the image acquired while the first substrate is immersed in the treatment liquid; The bubbling control unit controls the bubbling unit based on the discrimination result of the bubbling state discrimination unit so as to send gas into the processing liquid in which a second substrate is immersed and which is introduced into the processing tank after the first substrate is removed from the processing tank.

9. the bubble data acquisition unit acquires the bubble data by performing the image processing on the image acquired while the substrate is immersed in the processing liquid; 7. The substrate liquid processing apparatus according to claim 6, wherein the bubbling control section controls the bubbling section based on a determination result of the bubbling state determination section so as to send gas into the processing liquid in which the substrate is immersed.

10. the bubbling control unit performs control by comparing the determination result of the bubbling state determination unit with a reference model; 10. The substrate liquid processing apparatus according to claim 6, wherein the reference model is determined based on an amount of gas sent into the processing liquid, a concentration of the processing liquid, and a temperature of the processing liquid.

11. the bubbling control unit performs control by checking the determination result of the bubbling state determination unit against a reference table; 10. The substrate liquid processing apparatus according to claim 6, wherein the reference table associates a state of the gas in the processing liquid with an amount of the gas fed into the processing liquid.

12. The substrate liquid processing apparatus according to any one of claims 1 to 11, wherein the bubble data includes data relating to at least one of the number, density and size of bubbles.

13. The substrate liquid processing apparatus according to any one of claims 1 to 12, wherein the bubble data acquisition section acquires the bubble data based on a gray value of the image.

14. The substrate liquid processing apparatus according to any one of claims 1 to 13, wherein the imaging section captures the image of the interior of the processing tank from above.

15. The substrate liquid processing apparatus according to any one of claims 1 to 13, wherein the imaging section acquires the image of the interior of the processing tank from a side.

Images