Vibration Device

Abstract

To provide a vibration device that outputs an accurate oscillatory frequency.SOLUTION: A vibration device 1 has: a base 11 that has a first surface 11a and a second surface 11b that are in the front-and-back relationship; a vibration element 30 that is located facing the first surface 11a of the base 11 and includes a vibration substrate 31 and an electrode 34 arranged on a surface of the vibration substrate 31 facing the base 11; conductive layers 16 that are arranged on the first surface 11a and have junctions 17 joined to the electrode 34; and stress relaxation layers 24 that are interposed between the base 11 and the conductive layers 16 and at least partially overlap the junctions 17 in plan view of the base 11. The stress relaxation layers 24 have exposed parts 25 that are exposed from the conductive layers 16.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a vibration device. [Background technology]

[0002] Patent Document 1 discloses a quartz crystal resonator as a vibration device in which a quartz crystal resonator element is fixed to a package via metal bumps. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2016-127469 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, the vibration device described in Patent Document 1 has metal bumps with a high elastic modulus (Young's modulus) and are hard, so they are prone to plastic deformation due to thermal stress caused by the difference in linear expansion coefficient between the crystal vibration element and the package. If the metal bumps are plastically deformed, unwanted vibrations and frequency hysteresis occur in the crystal vibration element, deteriorating the vibration characteristics. [Means for solving the problem]

[0005] The vibration device comprises a base having a first surface and a second surface which are opposite surfaces, a vibration element located on the first surface side of the base and including a vibration substrate and an electrode arranged on the base side surface of the vibration substrate, a conductive layer arranged on the first surface and having a joint joined to the electrode, and a stress relaxation layer interposed between the base and the conductive layer and at least a portion of which overlaps with the joint in a planar view of the base, the stress relaxation layer having an exposed portion exposed from the conductive layer. [Brief description of the drawings]

[0006] [Figure 1] FIG. 1 is a plan view showing a schematic structure of a vibration device according to a first embodiment. [Diagram 2] Cross-sectional view taken along line AA in Figure 1. [Diagram 3] FIG. 1 is a plan view showing a schematic structure of a vibration device. [Figure 4] FIG. 11 is a plan view showing a schematic structure of a vibration device according to a second embodiment. [Diagram 5] FIG. 11 is a plan view showing a schematic structure of a vibration device according to a third embodiment. [Figure 6] FIG. 13 is a plan view showing a schematic structure of a vibration device according to a fourth embodiment. [Figure 7] Cross-sectional view taken along line BB in Figure 6. [Figure 8] FIG. 13 is a plan view showing a schematic structure of a vibration device according to a fifth embodiment. [Figure 9] Cross-sectional view taken along line CC in Figure 8. [Figure 10] FIG. 13 is a plan view showing a schematic structure of a vibration device according to a fifth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] 1. First embodiment First, a vibration device 1 according to a first embodiment will be described with reference to FIGS. 1, 2, and 3. FIG. In FIG. 1, for convenience of explaining the internal configuration of the vibration device 1, the lid 12 is removed. In FIG. 3, for convenience of explaining the internal configuration of the vibration device 1, the lid 12 and the vibration element 30 are removed. In addition, for convenience of explanation, the following figures show three mutually orthogonal axes, the X axis, the Y axis, and the Z axis. In addition, the direction along the X axis is called the "X direction", the direction along the Y axis is called the "Y direction", and the direction along the Z axis is called the "Z direction". In addition, the arrow side of each axis is called the "plus side", and the opposite side to the arrow is called the "minus side". In addition, the plus side of the Z direction is called the "upper side", and the minus side of the Z direction is called the "lower side". In this embodiment, the X direction is the first direction, and the Y direction is the second direction.

[0008] As shown in FIGS. 1 and 2, the vibration device 1 includes a package 10 including a base 11 and a lid 12, and a vibration element 30 housed in an internal space 29 of the package 10. As shown in FIG.

[0009] The package 10 has a base 11 and a lid 12 joined to the base 11, and houses a vibration element 30 in an internal space 29 formed between the base 11 and the lid 12. The base 11 is a semiconductor substrate containing single crystal silicon, and in particular, is a silicon substrate in this embodiment. Note that the base 11 is not particularly limited, and may be a semiconductor substrate other than silicon, such as a germanium, gallium arsenide, gallium phosphide, gallium nitride, silicon carbide, or a substrate other than a semiconductor substrate, such as a ceramic substrate.

[0010] The base 11 is plate-shaped and has a first surface 11a on which the vibration element 30 is disposed and a second surface 11b opposite to the first surface 11a. An insulating film 15 is formed on the surface of the base 11 except for the bonding area with the lid 12.

[0011] On the first surface 11a of the base 11, there are disposed a conductive layer 16 having a joint 17 joined to an electrode 34 arranged on the surface of the vibration substrate 31 of the vibration element 30 on the base 11 side via a conductive member 28 such as a metal bump, and a stress relief layer 24 interposed between the base 11 and the conductive layer 16 and at least partially overlapping the joint 17 in a plan view of the base 11, that is, in a plan view seen from the Z direction, as shown in Figs. 2 and 3. Here, "disposed on the first surface 11a" means "joined on the first surface 11a." Therefore, the stress relief layer 24, the conductive layer 16, the conductive member 28, and the electrode 34 are laminated and joined in this order on the first surface 11a.

[0012] The conductive layer 16 has a joint portion 17 which is a region joined to the conductive member 28, a wiring portion 18 arranged on the first surface 11a of the base 11, and a connection portion 19 which connects the joint portion 17 and the wiring portion 18.

[0013] The stress relaxation layer 24 is formed containing a resin material, and examples of the resin material include heat-resistant materials such as epoxy resin, acrylic resin, polyimide resin, and phenol resin. By interposing the stress relaxation layer 24 between the base 11 and the conductive layer 16, which has a smaller elastic modulus and is softer than the conductive layer 16 and the conductive member 28, a high stress relaxation effect can be obtained, and the occurrence of unnecessary vibrations and frequency hysteresis of the vibration element 30 and deterioration of vibration characteristics caused by plastic deformation of the conductive layer 16 and the conductive member 28 due to the difference in linear expansion coefficient between the vibration element 30 and the package 10 can be suppressed.

[0014] Moreover, the stress relaxation layer 24 has an exposed portion 25 exposed from the conductive layer 16 on the negative side of the X direction as the first direction in a plan view seen from the Z direction. Therefore, compared to a case where the conductive layer 16 is formed to cover the entire stress relaxation layer 24, it is possible to suppress cracks and breaks in the conductive layer 16 caused by deformation of the stress relaxation layer 24 that occurs when heat applied when joining the electrode 34 of the vibration element 30 and the conductive layer 16 via the conductive member 28 cools.

[0015] In this embodiment, the conductive layer 16 and the electrode 34 are joined via the conductive member 28, but the conductive layer 16 and the electrode 34 may be joined directly. In that case, the joint 17 of the conductive layer 16 refers to the region joined to the electrode 34.

[0016] On the second surface 11b of the base 11, an external terminal 14 is formed which is electrically connected to the excitation electrode 32 of the vibration element 30 via an electrode 34, a conductive layer 16, and the like.

[0017] In addition, the base 11 is formed with a pair of through holes 20 penetrating the base 11 in the thickness direction. A conductive material is filled in the through holes 20, and a through electrode 21 is formed. In addition, as shown in FIG. 2 and FIG. 3, a conductive layer 16 electrically connected to the vibration element 30 is disposed on the first surface 11a of the base 11. The conductive layer 16 is electrically connected to the external terminal 14 via the through electrode 21 and a wiring 22 formed on the second surface 11b of the base 11. Therefore, by applying a voltage from the external terminal 14, the vibration element 30 can be vibrated via the excitation electrode 32, and a vibration signal can be output from the external terminal 14 to the outside.

[0018] The vibration element 30 stored in the internal space 29 is located on the first surface 11a side of the base 11 and includes a vibration substrate 31, an excitation electrode 32 that vibrates the vibration substrate 31, an electrode 34 that outputs a vibration signal to the outside and is located on the surface of the vibration substrate 31 facing the base 11, and a lead electrode 33 that electrically connects the excitation electrode 32 and the electrode 34. The vibration element 30 is disposed on the first surface 11a of the package 10 via a conductive member 28. As the vibration substrate 31, an AT-cut quartz crystal substrate, an SC-cut quartz crystal substrate, a BT-cut quartz crystal substrate, or the like is used.

[0019] The lid 12 is a silicon substrate, like the base 11. This makes the linear expansion coefficients of the base 11 and the lid 12 equal, suppressing the generation of thermal stress caused by thermal expansion, and resulting in a resonator device 1 with excellent vibration characteristics. In addition, since the resonator device 1 can be formed by a semiconductor process, the resonator device 1 can be manufactured with high precision and can be made small. However, the lid 12 is not particularly limited, and a semiconductor substrate other than silicon, such as a semiconductor substrate of germanium, gallium arsenide, gallium phosphide, gallium nitride, silicon carbide, or the like, may be used. In addition, a substrate other than a semiconductor substrate, such as a metal substrate such as kovar, or a glass substrate, may be used.

[0020] The lid 12 has an opening on the base 11 side and a bottomed recess 27 for housing the vibration element 30 therein. The lid 12 is joined to the base 11 at its lower surface via a bonding member 13. As a result, the lid 12, together with the base 11, forms an internal space 29 for housing the vibration element 30. Note that the method for joining the base 11 and the lid 12 may be a bonding method such as diffusion bonding that utilizes diffusion between metals contained in the base 11 and the lid 12, without using the bonding member 13.

[0021] Moreover, the internal space 29 is airtight and in a reduced pressure state, preferably in a state closer to a vacuum, which reduces viscous resistance and improves the oscillation characteristics of the vibration element 30. However, the atmosphere of the internal space 29 is not particularly limited, and may be, for example, an atmosphere filled with an inert gas such as nitrogen or argon, or may be in an atmospheric pressure state or a pressurized state instead of a reduced pressure state.

[0022] As described above, in the vibration device 1 of this embodiment, a stress relaxation layer 24 having a smaller elastic modulus and a softer elasticity than the conductive layer 16 and the conductive member 28 is disposed between the base 11 and the conductive layer 16, thereby obtaining a high stress relaxation effect and suppressing the occurrence of unnecessary vibrations and frequency hysteresis of the vibration element 30 and deterioration of vibration characteristics caused by plastic deformation of the conductive layer 16 and the conductive member 28 due to the difference in linear expansion coefficient between the vibration element 30 and the package 10.

[0023] Furthermore, since the stress relaxation layer 24 has an exposed portion 25 exposed from the conductive layer 16, it is possible to suppress breakage due to peeling or cracks caused by a decrease in adhesion between the conductive layer 16 and the stress relaxation layer 24 due to deformation of the stress relaxation layer 24 that occurs when the heat applied when joining the electrode 34 of the vibration element 30 and the conductive layer 16 via the conductive member 28 cools, compared to a case in which the conductive layer 16 is formed to cover the entire stress relaxation layer 24.

[0024] 2. Second embodiment Next, a resonation device 1a according to a second embodiment will be described with reference to Fig. 4. In Fig. 4, for the sake of convenience in describing the internal configuration of the resonation device 1a, the lid 12 and the resonator element 30 are removed.

[0025] The resonator device 1a of this embodiment is similar to the resonator device 1 of the first embodiment, except that it has a first connection portion 191 and a second connection portion 192 that extend from the joint portion 17 of the conductive layer 16a to the positive side and the negative side in the X direction as a first direction, respectively, and the exposed portions 25a of the stress relaxation layer 24a are positioned on both sides in the Y direction of the joint portion 17. Note that the following description will focus on the differences from the first embodiment described above, and similar items will be denoted by the same reference numerals and their description will be omitted.

[0026] 4, the resonator device 1a has a first connection portion 191 that extends from the joint portion 17 of the conductive layer 16a to the positive side in the X direction and connects to the first wiring portion 181, and a second connection portion 192 that extends from the joint portion 17 of the conductive layer 16a to the negative side in the X direction and connects to the second wiring portion 182. In addition, the exposed portions 25a of the stress relaxation layer 24a are located on both sides of the joint portion 17 in the Y direction.

[0027] With this configuration, the degree of adhesion between the conductive layer 16 and the stress relief layer 24 can be improved, and the same effects as those of the resonator device 1 of the first embodiment can be obtained.

[0028] 3. Third embodiment Next, a resonation device 1b according to a third embodiment will be described with reference to Fig. 5. In Fig. 5, for the sake of convenience in describing the internal configuration of the resonation device 1b, the lid 12 and the resonator element 30 are removed.

[0029] The resonator device 1b of this embodiment is similar to the resonator device 1 of the first embodiment except that it has a first connection portion 191 and a second connection portion 192 extending from the joint portion 17 of the conductive layer 16b to the positive side and the negative side of the X direction as a first direction, respectively, and a third connection portion 193 and a fourth connection portion 194 extending from the joint portion 17 of the conductive layer 16b to the positive side and the negative side of the Y direction as a second direction intersecting with the first direction, respectively, and that the exposed portion 25b of the stress relaxation layer 24b is positioned at the four corners of the upper surface of the stress relaxation layer 24b. Note that the following mainly describes the differences from the first embodiment described above, and similar items are denoted by the same reference numerals and their description is omitted.

[0030] 5, the resonator device 1b has a first connection portion 191 extending from the joint 17 of the conductive layer 16b to the positive side in the X direction and connecting to the first wiring portion 181, a second connection portion 192 extending from the joint 17 of the conductive layer 16b to the negative side in the X direction and connecting to the second wiring portion 182, a third connection portion 193 extending from the joint 17 of the conductive layer 16b to the positive side in the Y direction and connecting to the third wiring portion 183, and a fourth connection portion 194 extending from the joint 17 of the conductive layer 16b to the negative side in the Y direction and connecting to the fourth wiring portion 184. The exposed portions 25b of the stress relaxation layer 24b are located at the four corners of the upper surface of the stress relaxation layer 24b.

[0031] With this configuration, the degree of adhesion between the conductive layer 16b and the stress relief layer 24b can be further improved, and the same effects as those of the resonation device 1 of the first embodiment can be obtained.

[0032] 4. Fourth embodiment Next, a resonation device 1c according to a fourth embodiment will be described with reference to Fig. 6 and Fig. 7. In Fig. 6, for the sake of convenience in describing the internal configuration of the resonation device 1c, the lid 12 and the resonator element 30 are removed.

[0033] The resonator device 1c of this embodiment is similar to the resonator device 1 of the first embodiment, except that the first stress relaxation layer 241 and the second stress relaxation layer 242 are integrated, and the exposed portion 25c of the first stress relaxation layer 241 and the second stress relaxation layer 242 is disposed between the first conductive layer 161 and the second conductive layer 162. The following description will focus on the differences from the first embodiment, and similar items are denoted by the same reference numerals and their description will be omitted.

[0034] 6 and 7, the resonator device 1c includes a first conductive layer 161 bonded to a first electrode 341 via a conductive member 28, a second conductive layer 162 bonded to a second electrode 342 via a conductive member 28, a first stress relaxation layer 241 interposed between the base 11 and the first conductive layer 161, and a second stress relaxation layer 242 interposed between the base 11 and the second conductive layer 162, and the first stress relaxation layer 241 and the second stress relaxation layer 242 are integrated. In addition, an exposed portion 25c of the first stress relaxation layer 241 and the second stress relaxation layer 242 is located between the first conductive layer 161 and the second conductive layer 162.

[0035] With this configuration, the stress relaxation layers 241 and 242 can be manufactured more easily, and the size can be further reduced, so that the same effects as those of the vibration device 1 of the first embodiment can be obtained.

[0036] 5. Fifth embodiment Next, as an example of a vibration device 1d according to the fifth embodiment, an oscillator having an oscillation circuit 67 that oscillates the vibration element 30 will be described with reference to Fig. 8, Fig. 9, and Fig. 10. In Fig. 8, for convenience of explaining the internal configuration of the vibration device 1d, the lid 52 is removed. In Fig. 10, for convenience of explaining the internal configuration of the vibration device 1d, the lid 52 and the vibration element 30 are removed.

[0037] The resonator device 1d of this embodiment is similar to the resonator device 1 of the first embodiment, except that an integrated circuit 66 including an oscillator circuit 67 is formed on the second surface 51b of the base 51. The following description will focus on the differences from the first embodiment, and similar items are denoted by the same reference numerals and will not be described.

[0038] As shown in Figures 8 and 9, the vibration device 1d has a package 50 consisting of a base 51 and a lid 52 joined to the base 51 via a joining member 53, and a vibration element 30 stored in the internal space 60 of the package 50.

[0039] The base 51 and the lid 52 are semiconductor substrates containing single crystal silicon, and in particular, are silicon substrates in this embodiment. Note that the base 51 and the lid 52 are not particularly limited, and may be semiconductor substrates other than silicon, such as germanium, gallium arsenide, gallium phosphide, gallium nitride, silicon carbide, etc.

[0040] The base 51 is plate-shaped and has a first surface 51a on which the vibration element 30 is disposed and a second surface 51b opposite to the first surface 51a. An insulating film 55 is formed on the surface of the base 51 except for the bonding area with the lid 52.

[0041] A stress relaxation layer 24 and a conductive layer 16 are laminated on a first surface 51a of the base 51, and a vibration element 30 is joined thereto via a conductive member .

[0042] An integrated circuit 66 including an oscillator circuit 67 electrically connected to the vibration element 30 is disposed on the second surface 51b of the base 51. By forming the integrated circuit 66 on the base 51, the base 51 can be effectively utilized. In particular, by forming the integrated circuit 66 on the second surface 51b, a larger space can be secured for forming the integrated circuit 66 compared to forming the integrated circuit 66 on the first surface 51a since there is no bonding area with the lid 52. However, the integrated circuit 66 may be formed on the first surface 51a instead of the second surface 51b of the base 51.

[0043] The integrated circuit 66 includes an oscillation circuit 67 that is electrically connected to the vibration element 30 and oscillates the vibration element 30 to generate an oscillation signal such as a clock signal. The integrated circuit 66 may include other circuits in addition to the oscillation circuit 67. An example of such a circuit is a processing circuit that processes an output signal from the oscillation circuit 67, and an example of such a processing circuit is a PLL circuit.

[0044] A laminate 61 is formed on the second surface 51b, which is formed by laminating a wiring layer 62, an insulating layer 63, a passivation film 64, and a terminal layer 65. A plurality of active elements (not shown) formed on the second surface 51b are electrically connected via wiring 56 included in the wiring layer 62 to form an integrated circuit 66. The terminal layer 65 has a plurality of mounting terminals 54 electrically connected to an oscillation circuit 67. In the illustrated configuration, the laminate 61 includes one wiring layer 62, but is not limited to this, and a plurality of wiring layers 62 may be laminated via an insulating layer 63. In other words, the wiring layer 62 and the insulating layer 63 may be alternately laminated a plurality of times. This can increase the degree of freedom in routing the wiring 56 in the circuit and in installing a plurality of mounting terminals 54.

[0045] Further, the base 51 is formed with a pair of through holes 57 penetrating the base 51 in the thickness direction. The through holes 57 are filled with a conductive material, and through electrodes 58 are formed. Further, as shown in Figs. 9 and 10, a conductive layer 16 electrically connected to the vibration element 30 is disposed on the through electrodes 58 on the first surface 51a side. Therefore, the conductive layer 16 can be electrically connected to the oscillation circuit 67 via the through electrodes 58, and the vibration element 30 can be oscillated.

[0046] The lid 52 has an opening on the base 51 side and a bottomed recess 59 therein for accommodating the vibration element 30. The lid 52 is joined at its lower surface to the base 51 via a joining member 53. As a result, the lid 52, together with the base 51, forms an internal space 60 for accommodating the vibration element 30.

[0047] Moreover, the internal space 60 is airtight and in a reduced pressure state, preferably in a state closer to a vacuum, which reduces viscous resistance and improves the oscillation characteristics of the vibration element 30. However, the atmosphere of the internal space 60 is not particularly limited, and may be, for example, an atmosphere filled with an inert gas such as nitrogen or argon, or may be in an atmospheric pressure state or a pressurized state instead of a reduced pressure state.

[0048] With this configuration, the resonator device 1d having the oscillator circuit 67 can be made smaller, and the same effects as those of the resonator device 1 of the first embodiment can be obtained. [Explanation of symbols]

[0049] 1, 1a, 1b, 1c, 1d...vibration device, 10...package, 11...base, 11a...first surface, 11b...second surface, 12...lid, 13...bonding member, 14...external terminal, 15...insulating film, 16...conductive layer, 17...bonding portion, 18...wiring portion, 19...connection portion, 20...through hole, 21...through electrode, 22...wiring, 24...stress relaxation layer, 25...exposed portion, 27...recess, 28...conductive member, 29...internal space, 30...vibration element, 31...vibration substrate, 32...excitation electrode, 33...lead electrode, 34...electrode, 66...integrated circuit, 67...oscillating circuit.

Claims

1. a base having a first surface and a second surface in a reverse relationship; A vibration substrate and a base side of the vibration substrate are disposed on the first surface side of the base. a vibration element having an electrode disposed on a surface of the vibration element; a conductive layer disposed on the first surface and having a bonding portion bonded to the electrode; The conductive layer is disposed between the base and the conductive layer, and at least a portion of the base is in a front view. a stress relief layer overlapping the joint, the stress relief layer has an exposed portion exposed from the conductive layer, The conductive layer includes the bonding portion, a wiring portion disposed on the first surface, and a bonding portion and a wiring portion disposed on the first surface. a connection portion for connecting the wire portion, The wiring portion includes a first wiring portion provided on a positive side of the first direction of the joint portion, and a front wiring portion provided on a positive side of the first direction of the joint portion. a second wiring portion provided on the negative side of the joint portion in the first direction; a third wiring portion provided in a positive direction of a second direction intersecting with the first direction; a fourth wiring portion provided in a direction toward the negative side of the second direction, The connection portion extends from the joint portion to the positive side in the first direction and is connected to the first wiring portion. a first connection portion extending from the joint portion to the negative side in the first direction and connected to the second wiring portion; a second connection portion that is connected to the first wiring portion and that extends from the first wiring portion in the positive direction in the second direction; a third connection portion that is connected to the fourth wiring and that extends from the joint portion to the negative side in the second direction; and a fourth connection portion connected to the line portion. Vibration devices.

2. The stress relaxation layer is formed by containing a resin material. The vibration device according to claim 1 .

3. The electrode includes a first electrode and a second electrode, The conductive layer includes a first conductive layer bonded to the first electrode and a second conductive layer bonded to the second electrode. and a conductive layer; The stress relief layer includes a first stress relief layer interposed between the base and the first conductive layer; a second stress relief layer interposed between the base and the second conductive layer; The first stress relief layer and the second stress relief layer are integrated together. The vibration device according to claim 1 or 2.

4. an oscillation circuit disposed on the second surface and electrically connected to the vibration element; A vibration device according to any one of claims 1 to 3.

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