Cleaning Equipment

Abstract

To provide a washing device for washing a frame set that allows an operator to refer later to the history of the frame set after washing including information on at least one of whether washing is performed or not and conditions for the washing.SOLUTION: A washing device 3 washes a frame set 199 in which a substrate 19 is supported through a sheet 198 in an opening of an annular frame 197, and the washing device 3 includes a holding table 2 holding the frame set 199, a washing nozzle 35 that supplies washing liquid to the frame set 199 held on the holding table 2, and a history recording unit 36 that records the history of washing performed via the frame set 199.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a cleaning device for cleaning a frameset. [Background technology]

[0002] In some cases, a processing device that processes a frame set consisting of a substrate such as a semiconductor wafer, an annular frame, and a support tape (support sheet) and a cleaning device that cleans the frame set (see, for example, Patent Document 1) are separate devices. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2000-33346 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-mentioned case, since the operator records in a list or the like whether or not cleaning has been performed for each substrate, there is a risk that some substrates may not be cleaned. Even when the processing equipment and cleaning equipment are integrated, if a defect occurs in the substrate or in the chips produced by dividing the substrate during the post-cleaning process, it may be necessary to review the cleaning conditions and cleaning history of the frame set later.

[0005] Therefore, in a cleaning device that cleans a frame set, there is a problem in that a history of the cleaned frame set, including at least any information regarding whether cleaning was performed or not and the cleaning conditions, can be made available for later reference. [Means for solving the problem]

[0006] In order to solve the above problem, the present invention is a cleaning apparatus for cleaning a frame set in which a substrate is supported in an opening of a frame via a sheet, the cleaning apparatus comprising: a holding table for holding the frame set; a cleaning nozzle for supplying cleaning liquid to the frame set held on the holding table; and a history recording unit for recording the history of cleaning performed via the frame set.

[0007] It is preferable that the history recording section is an ink ejection nozzle, and prints marks or characters on the sheet with ejected ink to record the history.

[0008] It is preferable that the history recording section is a pressure nozzle having a pressure surface at a tip thereof, and that the pressure surface is pressed against the sheet to form a mark by transferring the pressure surface onto the sheet, and the history is recorded by the mark.

[0010] It is preferable that the cleaning device of the present invention further includes a reader that reads a code pre-printed on the sheet or the frame, and that the history recording unit links the history of the cleaning performed to the information of the code read by the reader and records it.

[0011] It is preferable that the history recorded by the history recording section includes at least one of information on the implementation status of whether cleaning has been completed and information on the conditions under which cleaning was performed. Effect of the Invention

[0012] The cleaning apparatus of the present invention, which cleans a frame set in which a substrate is supported in an opening of a frame via a sheet, comprises a holding table for holding the frame set, a cleaning nozzle for supplying cleaning liquid to the frame set held on the holding table, and a history recording unit for recording the history of cleaning performed via the frame set, so that the frame set after cleaning has a history including at least any one of information on whether cleaning has been performed or not and the cleaning conditions, making it possible for workers etc. to refer to the history of the frame set at a later time.

[0013] In the cleaning device of the present invention, the history recording unit is an ink injection nozzle that prints marks or letters onto a sheet with the injected ink to record the history, so that the frame set after cleaning has marks or the like indicating a history including at least one of information on whether cleaning has been performed or not and the cleaning conditions, allowing workers etc. to recognize the history of the frame set later by referring to the marks or the like.

[0014] In the cleaning device of the present invention, the history recording unit is a pressure nozzle having a pressure surface at its tip, and the pressure surface is pressed against a sheet to form a mark by transferring the pressure surface to the sheet, and the history is recorded by the mark.By this, the frame set after cleaning has a transfer mark including at least one of information on whether cleaning has been performed or not and the cleaning conditions, workers etc. can later recognize the history of the frame set by referring to the transfer mark.

[0016] The cleaning apparatus of the present invention further includes a reader that reads a code pre-printed on the sheet or frame, and the history recording unit links the information of the code read by the reader to the history of the cleaning that has been performed and records it.As a result, the frame set after cleaning has a history that links at least one of information regarding whether cleaning has been performed or not and the cleaning conditions to, for example, the type of substrate, sheet or frame, making it possible for workers, etc. to easily refer to the history of the frame set at a later time. [Brief description of the drawings]

[0017] [Figure 1] FIG. 11 is a perspective view showing an example of a cleaning device including an ink ejection nozzle as a history recording unit. [Diagram 2] 13 is a side view illustrating a state in which the history of cleaning performed on a frame set is recorded in a cleaning device equipped with an ink ejection nozzle as a history recording unit. FIG. [Diagram 3]Fig. 3(A) is a plan view showing the positional relationship between the frame set and the ink ejection nozzle after cleaning and drying and before marking begins. Fig. 3(B) is a plan view explaining the operation of the frame set and the ink ejection nozzle during marking. Fig. 3(C) is a plan view showing the positional relationship between the frame set and the ink ejection nozzle after marking has been completed. [Figure 4] 13 is a perspective view showing an example of a frame set in which a sheet is marked with ink in a cleaning device equipped with an ink ejection nozzle as a history recording unit. FIG. [Diagram 5] 11 is a side view illustrating a state in which the history of cleaning performed on a frame set is recorded in a cleaning device equipped with a pressure nozzle as a history recording unit. FIG. [Figure 6] Fig. 6(A) is a plan view showing the positional relationship between the frame set and the pressure nozzle before the pressure nozzle starts to transfer the mark. Fig. 6(B) is a plan view showing the operation of the frame set and the pressure nozzle during the mark transfer. Fig. 6(C) is a plan view showing the positional relationship between the frame set and the pressure nozzle after the mark transfer is completed. [Figure 7] 1 is a perspective view showing an example of a frame set in which a mark is formed by transferring the pressing surface of a pressure nozzle onto a sheet in a cleaning device equipped with a pressure nozzle as a history recording unit; FIG. [Figure 8] 13 is a side view illustrating a state in which the history of cleaning performed on a frame set is recorded in a cleaning device having a mark area on the holding surface of a holding table as a history recording section. FIG. [Figure 9] 1 is a perspective view showing an example of a frame set in a cleaning device having a mark area on a holding surface as a history recording section, in which a sheet-side recess is formed in the sheet by adsorbing the sheet in the mark area; FIG. [Figure 10] 1 is a perspective view showing an example of a cutting device provided with a cleaning device according to the present invention; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0018] The substrate 19 shown in FIG. 1 is, for example, a circular plate-shaped silicon semiconductor wafer, and on a surface 190 of the substrate 19 facing upward, devices 192 are formed in a grid-like area defined by planned division lines 191.

[0019] For example, the back surface 193 of the substrate 19 is attached to the attachment surface (front surface) of a circular sheet 198, which is a dicing tape or the like and has a larger diameter than the substrate 19. The substrate 19 is arranged in a circular opening of an annular frame 197 with their centers aligned with each other, and the outer periphery of the sheet 198 is attached to the lower surface of the annular frame 197, whereby the substrate 19 is supported by the annular frame 197 via the sheet 198, forming a frame set 199 that can be handled using the annular frame 197. The center of the annular frame 197 and the center of the substrate 19 are in a state where they are substantially aligned. The substrate 19 is not limited to the above example, and may be made of gallium arsenide, sapphire, gallium nitride, resin, ceramics, silicon carbide, or the like other than silicon, or may be a package substrate, or the like. Note that the substrate 19 shown in FIG. 1 has already been diced, for example, vertically and horizontally along the intended division lines 191 and divided into chips each having a device 192, but the object to be cleaned is not limited to this.

[0020] The cleaning device 3 shown in Figure 1 includes, for example, a holding table 2 that holds a frame set 199, a rotation mechanism 32 that rotates the holding table 2, and a bottomed cylindrical casing 34 with a circular opening on the upper end side, and is capable of cleaning the frame set 199.

[0021] The holding table 2 has, for example, a circular outer shape, and includes an adsorption section 20 made of a porous member or the like that adsorbs the frame set 199, and a frame body 21 that supports the adsorption section 20. The adsorption section 20 is connected to a suction source (not shown), and the suction force generated by the suction source is transmitted to a holding surface 200, which is the exposed surface of the adsorption section 20, so that the holding table 2 can adsorb and hold the frame set 199 on the holding surface 200. The holding surface 200 and the upper surface of the frame body 21 are flush with each other and flat. For example, the diameter of the holding table 2 is set to be larger than the diameter of the substrate 19 and smaller than the inner diameter of the annular frame 197. For example, four fixing clamps (not shown) for fixing the annular frame 197 may be evenly arranged around the periphery of the frame 21 at equal intervals in the circumferential direction.

[0022] The rotation mechanism 32 disposed below the holding table 2 includes at least a spindle 320 whose upper end is fixed to the lower surface of the holding table 2 and which is rotatable about an axis in the vertical direction (Z-axis direction), and a rotation drive source 321 constituted by a motor or the like and connected to the lower end side of the spindle 320. When the rotation drive source 321 rotates the spindle 320, the holding table 2 fixed to the spindle 320 also rotates.

[0023] The rotary drive source 321 is supported by a vertical movement mechanism 322 formed of an air cylinder or the like so as to be vertically movable. The vertical movement mechanism 322 raises the rotary drive source 321 to raise the holding table 2 and position the holding table 2 at the loading / unloading height position of the frame set 199, and lowers the rotary drive source 321 to lower the holding table 2 holding the frame set 199, and position the holding table 2 at the cleaning height position within the casing 34.

[0024] The holding table 2 is accommodated in the internal space of the casing 34. In FIG. 1, a part of the outer wall 340 of the casing 34 is cut away so that the inside can be seen. The casing 34 is composed of an outer wall 340 surrounding the holding table 2, a bottom plate 341 integrally connected to the lower part of the outer wall 340 and having an opening in the center through which the spindle 320 is inserted, and an inner wall 342 standing from the inner peripheral edge of the opening of the bottom plate 341. The casing 34 is supported by legs 343 whose upper ends are fixed to the bottom plate 341. A discharge port 344 is formed penetrating the bottom plate 341 in the thickness direction, and a drain hose 345 is connected to the discharge port 344 to discharge the cleaning liquid mixed with the machining chips that flowed down from above the holding surface 200 of the holding table 2 into the casing 34 to the outside of the casing 34.

[0025] 1, a cylindrical skirt cover 216 with a top is inserted into the spindle 320 and disposed between the lower surface of the holding table 2 and the upper end surface of the inner wall 342 of the casing 34. When the holding table 2 is positioned at the cleaning height position in the casing 34, the skirt cover 216 surrounds the outer circumferential surface of the inner wall 342. The skirt cover 216 prevents cleaning liquid flowing down from the holding surface 200 of the holding table 2 from entering the gap between the spindle 320 and the opening of the bottom plate 341.

[0026] As shown in FIG. 1, for example, disposed within casing 34 are a cleaning nozzle 35 that sprays and supplies cleaning liquid (e.g., pure water) onto the upper surface of frame set 199 held by suction on holding surface 200, an ink spray nozzle 36 that can spray / drop liquid ink onto the upper surface of frame set 199 held by suction on holding surface 200, and an air spray nozzle 37 that sprays air onto the upper surface of frame set 199 held by suction on holding surface 200 to air dry it. In addition, in cases where the frame set 199 is spin-dried, the air injection nozzle 37 does not need to be provided.

[0027] The cleaning nozzle 35, the ink ejection nozzle 36, and the air ejection nozzle 37 are, for example, erected from the bottom plate 341 of the casing 34 or attached to the inner surface of the outer wall 340, and have an outer shape that is roughly an inverted L-shape when viewed from the side. The water jet orifice, ink jet orifice 360, and air jet orifice formed at the tip portion of each of the cleaning nozzle 35, ink jet nozzle 36, and air jet nozzle 37 can face the holding surface 200 of the holding table 2. The cleaning nozzle 35, ink jet nozzle 36, and air jet nozzle 37 are rotatable about a rotation axis in the Z-axis direction, and the water jet orifice, ink jet orifice 360, and air jet orifice can be moved from above the holding table 2 to a retracted position. In this embodiment, the ink ejection nozzle 36 shown in FIGS. 1 and 2 functions as a history recording unit that records the history of cleaning performed on the frame set 199 in the cleaning device 3.

[0028] 1 is connected to a cleaning liquid supply source (not shown) which is made up of a pump or the like and can supply cleaning liquid such as stored pure water. In addition, the ink jet nozzle 36, which is, for example, an ink jet nozzle, is connected to an ink supply source 369 which is made up of a pump or the like and which stores, for example, a water-soluble ink. The ink which the ink supply source 369 can deliver may be, for example, an ink which is not soluble in water. In this embodiment, the ink ejection nozzle 36 functioning as a history recording unit prints marks or letters with ejected ink in an annular region extending beyond the outer periphery of the substrate 19 of the sheet 198 in the frame set 199, and records the cleaning history. If the substrate 19 has a wide outer periphery excess region that will not become product chips, the above-mentioned printing with ink may be performed in the outer periphery excess region. Also, the above-mentioned printing with ink may be performed on the upper surface of the annular frame 197. The history includes at least one of information on the implementation status, such as whether cleaning has been completed, and the conditions under which cleaning was performed.

[0029] The air injection nozzle 37 shown in FIG. 1 is connected to an air supply source (not shown) such as a compressor. For example, the cleaning nozzle 35, the ink injection nozzle 36, and the air injection nozzle 37 are set to a length such that their respective injection ports can pass above the center of the holding surface 200 of the holding table 2 but do not come into contact with each other, and are arranged, for example, at equal intervals around the circumference of the holding table 2.

[0030] The cleaning device 3 shown in Fig. 1 may be provided with a pressure nozzle 33 having a pressure surface 330 at its tip as a history recording unit, as shown in Fig. 5, instead of the ink injection nozzle 36 which is the history recording unit. Note that the cleaning nozzle 35 or the air injection nozzle 37 shown in Fig. 1 may be used as the pressure nozzle 33 shown in Fig. 5.

[0031] The pressing nozzle 33 shown in Fig. 5 is attached, for example, to the inner surface of the outer wall 340 of the casing 34 shown in Fig. 1 via a horizontal movement arm 338 shown in Fig. 5. The horizontal movement arm 338 can, for example, rotate or linearly move the pressing nozzle 33 in a horizontal plane (within the X-axis and Y-axis plane), and the pressing nozzle 33 and a support plate 337 opposed to the pressing nozzle 33 in the Z-axis direction are disposed on the tip side of the horizontal movement arm 338.

[0032] The pressure nozzle 33 is formed, for example, in a roughly L-shape when viewed from the side, and can be moved vertically (in the Z-axis direction) toward or away from a support plate 337 having a flat surface that supports the sheet 198 of the frame set 199 from below during mark transfer, by an air cylinder 336.

[0033] The pressing surface 330 of the pressing nozzle 33 is, for example, a hemispherical surface, and the mark transferred by pressing the pressing surface 330 against the sheet 198 of the frame set 199 to the sheet 198 is a circle in plan view. In addition, the tip of the pressing surface 330 may be engraved with at least one of a convex shape or a concave shape, such as a character "Completed" or a mark indicating that the surface has been cleaned. In this case, the mark transferred by the pressing surface 330 to the sheet 198 is, for example, "Completed". The mark engraved on the pressing surface 330 may be other figures, numbers, alphabets, bar codes, etc. Note that it is preferable that the corners of the convex or concave part of the pressing surface are rounded so that the sheet 198 is not torn when the pressing surface 330 is pressed against the sheet 198. In addition, the number of marks engraved on the pressing surface 330 may be multiple.

[0034] The cleaning device 3 shown in FIG. 1 may be provided with a history recording unit on the holding table 2 side as the history recording unit, instead of the ink ejection nozzle 36 shown in FIGS. That is, for example, as shown in FIG. 8, at least one mark area 207 including at least one of a predetermined shape of a concave portion or a convex portion is formed in an area on the outer periphery of a flat holding surface 200 made of a porous member of the holding table 2, that is, an area of ​​a ring shape in a plan view between the outer edge of the substrate 19 sucked and held on the holding surface 200 and the inner circumference of the ring frame 197. In this embodiment, the shape of the concave portion or the convex portion of the mark area 207 is a circle shape in a plan view, but it may be a square shape in a plan view, a concave portion or a convex portion of a character such as a number in a plan view, or an alphabet in a plan view, or a shape in which a concave portion and a convex portion are combined. In addition, the mark area 207 may be a convex portion instead of a concave portion. The mark area 207 becomes a history recording section that sucks the sheet 198 and forms at least one of a sheet side concave portion or a convex portion on the sheet 198 to record the history of the completion of cleaning.

[0035] The operation of the cleaning device 3 when cleaning the surface 190 of the frame set 199, which is mainly the surface 190 of the substrate 19 that has been machined, will be described below with reference to FIGS. First, the frame set 199 is placed on the holding surface 200 so that the center of the frame set 199 roughly coincides with the center of the holding surface 200 of the holding table 2. Then, a suction force generated by the operation of a suction source (not shown) is transmitted to the holding surface 200, causing the holding table 2 to suction and hold the lower surface of the sheet 198 of the frame set 199.

[0036] Thereafter, the rotating mechanism 32 shown in FIG. 1 rotates the holding table 2 at a predetermined rotation speed. The cleaning nozzle 35 also rotates and is moved from a retracted position outside the holding table 2 to above the center of the frame set 199 held by suction. The cleaning nozzle 35 then rotates back and forth at a predetermined angle, for example, within a horizontal plane between the center of the substrate 19 and the outer periphery, while spraying the cleaning liquid from the water spray nozzle, to clean the entire surface 190 of the substrate 19. After the substrate 19 has been cleaned for a predetermined time, the spraying of the cleaning liquid by the cleaning nozzle 35 is stopped, and then air is sprayed from the rotating air spray nozzle 37 toward the substrate 19, thereby air drying the frame set 199. The frame set 199 may be spin-dried.

[0037] As shown in Fig. 3(A), after the frame set 199 has been washed and dried and before marking begins, the ink ejection nozzle 36 is, for example, in a state of being retracted to the outside from above the frame set 199. When marking, i.e., printing on the sheet 198, begins, as shown in Figs. 2 and 3(B), the ink ejection port 360 of the ink ejection nozzle 36, which is rotated by a rotation drive source 366 including a rotation shaft, a motor, etc., shown in Fig. 3(B), is positioned above an annular region that protrudes from the outer periphery of the substrate 19 of the sheet 198 of the frame set 199 that has been air-dried. Then, ink is supplied from an ink supply source 369 to the ink ejection nozzle 36, and the ink ejected or dropped from the ink ejection port 360 adheres to the protruding region of the sheet 198 shown in Figures 2 and 3(B). Alternatively, the ink may be printed on the annular frame 197.

[0038] The marking of the protruding region of the sheet 198 with ink may be controlled, for example, by the rotation of the holding table 2 or the pivoting movement of the ink ejection nozzle 36. That is, for example, only the holding table 2 may be rotated at a very slow speed, and three consecutive ink marks 365 may be formed in the protruding region of the sheet 198 as shown in Fig. 3(C) and Fig. 4, which may be used as a mark indicating the cleaning completion history. Also, as shown in Fig. 3(B), the ink ejection nozzle 36 may eject ink while pivoting above the protruding region so as to retreat from the center side of the frame set 199 toward the outside, so that the ink ejection nozzle 36 after the mark formation is completed may be retreated from the frame set 199 as shown in Fig. 3(C) to prevent any additional formation of unnecessary ink marks.

[0039] Alternatively, the dropping of ink from ink ejection port 360 may be controlled for each unit time to form, for example, four ink marks in the protruding region of sheet 198 at 90 degree intervals in the circumferential direction of substrate 19 as a mark indicating the cleaning completion history. Of course, one ink mark may be formed in the protruding region of sheet 198 as a mark indicating the cleaning completion history, or, for example, the number of ink marks formed in the protruding region of sheet 198 at equal intervals in the circumferential direction of substrate 19 may be used to indicate the history of cleaning conditions such as the length of the cleaning time or the amount of cleaning liquid per unit time.

[0040] For example, a mask having characters such as "Done" or a two-dimensional code cut out therein may be attached to the ink ejection port 360 of the ink ejection nozzle 36 shown in FIG. 2, and ink jetted from the ink ejection nozzle 36 may be passed through the mask and sprayed onto the protruding area of ​​the sheet 198, printing a mark consisting of characters or the like with ink to record the cleaning history.

[0041] As described above, the cleaning apparatus 3 of the present invention, which cleans a frame set 199 in which a substrate 19 is supported via a sheet 198 in an opening of an annular frame 197, comprises a holding table 2 which holds the frame set 199, a cleaning nozzle 35 which supplies cleaning liquid to the frame set 199 held on the holding table 2, and a history recording unit which records the history of cleaning performed via the frame set 199.Since the frame set 199 after cleaning has a history including at least any one of information on whether cleaning has been performed or not, and the cleaning conditions, it becomes possible for workers, etc. to refer to the history of the frame set 199 at a later time.

[0042] In the cleaning device 3 of the present invention, the history recording unit is an ink injection nozzle 36, and by printing marks 365 or characters on the sheet 198 with the injected ink and recording the history, the frame set 199 after cleaning has marks 365 or the like indicating the history including at least any one of information on whether cleaning has been performed or not and the cleaning conditions, so that workers etc. can later recognize the history of the frame set 199 by referring to the marks 365 etc.

[0043] The following describes how the washed and air-dried frame set 199 is handled within the cleaning device 3 when the cleaning device 3 shown in FIG. 1 is equipped with a pressure nozzle 33 having a pressure surface 330 at its tip as shown in FIG. 5 as the history recording unit instead of the ink injection nozzle 36 that functions as the history recording unit.

[0044] As shown in FIG. 6(A), after the frame set 199 is washed and dried and before the mark transfer is started, the pressing nozzle 33 is, for example, in a state of being retreated from above the frame set 199 to the outside. When the mark transfer is started, the pressing nozzle 33 disposed at the tip side of the horizontally moving arm 338 which is turned and moved by the turning drive source 366 shown in FIG. 6(B) is positioned above the annular region of the sheet 198 of the frame set 199 which protrudes from the outer periphery of the substrate 19. In addition, together with the above positioning of the pressing nozzle 33, as shown in FIG. 5, the support plate 337 abuts against the lower surface of the sheet 198 which protrudes from the holding table 2, which corresponds to the protruding region. Note that the holding table 2 is not rotating or the like. After that, the air cylinder 336 lowers the pressing nozzle 33 which has stopped turning after the above positioning, and a part of the protruding region of the sheet 198 is sandwiched between the pressing surface 330 of the pressing nozzle 33 and the support plate 337. That is, the pressing surface 330 is pressed against a portion of the protruding region of the sheet 198 .

[0045] As a result, the pressing surface 330 of the pressing nozzle 33 is transferred to the sheet 198, and in this embodiment, as shown in Fig. 6(C) and Fig. 7, a mark 3338 that is circular in plan view is formed on the sheet 198, which becomes a mark indicating the cleaning completion history. In addition, if the tip of the pressing surface 330 is engraved with characters such as "Completed" or a symbol indicating that cleaning has been completed, including at least one of a convex shape and a concave shape, the mark formed by transferring the pressing surface 330 to the sheet 198 becomes, for example, "Completed". Then, the pressing nozzle 33 that has completed the mark transfer rises and moves away from the frame set 199, and then rotates and retreats from above the frame set 199 as shown in Fig. 6(C).

[0046] In addition, after the mark is transferred to the sheet 198 by the pressure nozzle 33, the holding table 2 is rotated at a predetermined step angle and then stopped, and the pressure nozzle 33 is lowered again to repeat the operation of forming marks 3338 in the circumferential direction of the protruding area of ​​the sheet 198, and the number of marks 3338 formed by the pressure surface 330 may indicate cleaning conditions such as the length of the cleaning time and the amount of cleaning liquid per unit time.

[0047] For example, a detachable spacer may be attached to the pressing surface 330 of the pressing nozzle 33. A predetermined mark is engraved on the lower surface of the spacer, which serves as the pressing surface, and the engraved mark is various figures, numbers, alphabets, bar codes, etc. In other words, when the substrate 19 or sheet 198 of the frame set 199 to be washed by the washing device 3 is changed to a different type of substrate or sheet, it becomes possible to change the pressing surface 330 of the pressing nozzle 33 to an optimal pressing surface.

[0048] As described above, in the cleaning device 3 according to the present invention, the history recording unit is the pressing nozzle 33 having a pressing surface at its tip, and the pressing surface 330 is pressed against the sheet 198 to form a mark 3338 by transferring the pressing surface 330 to the sheet 198, and the history is recorded by the mark 3338. Therefore, the frame set 199 after cleaning has the transfer mark 3338 including at least one of information on whether cleaning has been performed or not and the cleaning conditions, and therefore the worker or the like can later recognize the history of the frame set 199 by referring to the transfer mark 3338. In particular, by changing the shape of the pressing surface 330, even complex characters or the like can be easily transferred to the sheet 198. In addition, since the mark can be transferred only by pressing the pressing nozzle 33 against the sheet 198 rather than printing on the sheet 198 by ink jet, the efficiency of the cleaning work is further improved.

[0049] The following describes how the frame set 199 after cleaning and drying is handled within the cleaning device 3 when the cleaning device 3 shown in Figure 1 is equipped with a mark area 207 formed on the holding table 2 shown in Figure 8 as a history recording unit instead of the ink injection nozzle 36 that functions as a history recording unit.

[0050] As described above, at the time when frame set 199 is suction-held by holding table 2, sheet 198 is sucked by mark area 207 including at least one of a recess or protrusion of a predetermined shape formed in a circular area of ​​holding surface 200 in plan view between the outer edge of substrate 19 sucked and held on holding surface 200 and the inner periphery of annular frame 197, and as a result, sheet-side recess 1985 is formed in said circular area of ​​sheet 198 in plan view, as shown in Figures 8 and 9. Then, sheet-side recess 1985 becomes a mark indicating the cleaning completion history, that is, indicating the history of frame set 199 being transported to cleaning device 3.

[0051] As described above, in the cleaning device 3 according to the present invention, the holding table 2 has the holding surface 200 that suction-holds the frame set 199, and in the region of the holding surface 200 between the outer edge of the substrate 19 suction-held on the holding surface 200 and the inner circumference of the annular frame 197, the mark area 207, which includes, for example, a recess, is formed, and the history recording section is the mark area 207, and by suctioning the sheet 198 in the mark area 207, the sheet side recess 1985 is formed in the sheet 198, and the sheet side recess 1985 is made the history of the completion of cleaning, so that the frame set 199 after cleaning has the sheet side recess 1985 indicating the completion of cleaning, and the worker or the like can recognize the history of the frame set 199 later by referring to the sheet side recess 1985. Instead of the sheet side recess 1985, a sheet side protrusion may be formed, or a shape in which the sheet side recess and the sheet side protrusion are combined may be used.

[0052] The cutting device 1 shown in Fig. 10 is, for example, a cutting device that performs cutting processing on a substrate 19 held on a holding table 2 by a cutting unit 17, and is equipped with a cleaning device 39 according to the present invention. The cleaning device 39 according to the present invention may be capable of being used alone like the cleaning device 3 shown in Fig. 1, or the cleaning device 39 may be provided in a laser processing device that performs a desired processing (for example, substrate modification or groove formation) on the substrate 19 by laser irradiation, a grinding device that grinds and thins the substrate 19 with a rotating grinding wheel, a byte cutting device that flattens the substrate with a rotating cutting byte, a plasma etching device that can form an etching groove in the substrate 19 by plasma etching, or a polishing device that polishes the substrate 19 with a polishing pad.

[0053] As shown in FIG. 10, the rear side (-X direction side) on the device base 10 of the cutting device 1 is a processing area where cutting processing is performed on the substrate 19 of the frame set 199, and the front side (+X direction side) on the device base 10 is a mounting / dismounting area where the frame set 199 is loaded and unloaded onto the chuck table 40, which can move back and forth in the X-axis direction, and where the frame set 199 that has been subjected to cutting processing is cleaned, etc.

[0054] The chuck table 40 is surrounded by a cover 41, and can be rotated about a rotation axis in the Z-axis direction by a rotation unit (not shown) disposed below the cover 41. A bellows cover 411 that expands and contracts in the X-axis direction is connected to the cover 41, and a cutting feed unit such as an electric slider (not shown) that moves the chuck table 40 back and forth in the cutting feed direction (X-axis direction) is disposed below the cover 41 and the bellows cover 411.

[0055] 10 for holding the substrate 19 has, for example, a circular shape in a plan view, and holds the substrate 19 by suction on a flat holding surface 400 that communicates with a suction source (not shown). In addition, around the periphery of the chuck table 40, for example, four fixing clamps 42 capable of clamping and fixing the annular frame 197 are evenly arranged at equal intervals in the circumferential direction.

[0056] As shown in Figure 10, a cassette mounting table 13 is installed in one corner on the -Y direction side of the device base 10 of the cutting device 1, and the cassette mounting table 13 can be moved up and down in the Z axis direction by an elevator (not shown) arranged below it.

[0057] For example, in front of an opening (not shown) on the +Y direction side of cassette 14 placed on cassette mounting table 13 shown in Figure 10, there are disposed a push-pull (not shown) for pulling out unprocessed frame set 199 from cassette 14 and inserting frame set 199 after cutting and cleaning into cassette 14, and a centering guide (not shown) for centering frame set 199 pulled out of cassette 14 by the push-pull.

[0058] A column 100 is erected on the rear side of the device base 10. An indexing feed unit 12 is arranged in front of the column 100 to reciprocate the cutting unit 17 in the Y-axis direction perpendicular to the X-axis direction in a horizontal plane. The indexing feed unit 12 is composed of a ball screw 120 having an axis in the Y-axis direction, a pair of guide rails 121 arranged parallel to the ball screw 120, a motor (not shown) for rotating the ball screw 120, and a movable plate 123 whose internal nut is screwed into the ball screw 120 and whose side is in sliding contact with the guide rail 121. When the motor (not shown) rotates the ball screw 120, the movable plate 123 is guided by the guide rail 121 to move in the Y-axis direction, and the cutting unit 17 arranged in front of the movable plate 123 via the cutting feed unit 16 is indexed and fed in the Y-axis direction.

[0059] On the movable plate 123, a cutting feed unit 16 is disposed which reciprocates the cutting unit 17 in the Z-axis direction (vertical direction) perpendicular to the X-axis direction and the Y-axis direction. The cutting feed unit 16 is composed of a ball screw 160 having an axis in the Z-axis direction, a pair of guide rails 161 disposed parallel to the ball screw 160, a motor 162 which rotates the ball screw 160, and a support member 163 having an internal nut screwed into the ball screw 160 and a side portion which slides against the guide rail 161. When the motor 162 rotates the ball screw 160, the support member 163 is guided by the guide rail 161 to move in the Z-axis direction, and the cutting unit 17 supported by the support member 163 is cut and fed in the Z-axis direction.

[0060] The cutting unit 17 includes a rotating shaft 170 whose axial direction is in the Y-axis direction, a housing 171 fixed to the lower end of the support member 163 and rotatably supporting the rotating shaft 170, a motor (not shown) that rotates the rotating shaft 170, and a circular cutting blade 173 attached to the rotating shaft 170. As the motor (not shown) drives the rotating shaft 170 to rotate, the cutting blade 173 also rotates at high speed.

[0061] An alignment unit 105 for capturing and detecting positions (planned division lines 191) on the substrate 19 to be cut is disposed on the side of the housing 171. The alignment unit 105 includes an illumination means, an optical system for capturing reflected light from the substrate 19, and a camera 1058 configured with an image sensor (CCD) or the like, and can detect the planned division lines 191 on the surface 190 of the substrate 19 by image processing such as pattern matching based on the image captured by the camera 1058.

[0062] 10, the cutting device 1 includes a control unit 109 that controls the entire device, and the control unit 109 is composed of a CPU that performs calculations according to a control program, and a storage medium such as a memory. The control unit 109 is electrically connected to, for example, the indexing feed unit 12, the cutting unit 17, and the cleaning device 39 via a wired or wireless communication path (not shown), and the indexing feed operation of the cutting unit 17 by the indexing feed unit 12 and the rotation operation of the cutting blade 173 in the cutting unit 17 are controlled under the control of the control unit 109.

[0063] For example, the frame set 199 that has been subjected to cutting processing is transported by a transport pad (not shown) to the cleaning device 39 shown in Fig. 10. Below, the differences between the cleaning device 39 and the independently used cleaning device 3 shown in Fig. 1 will be explained, and similar parts will be given the same numbers and explanations will be omitted.

[0064] For example, under the movement path of a transport pad (not shown) that transports the frame set 199 from the chuck table 40, at a position that is one corner of the +Y direction side of the equipment base 10, an accommodation space 106 that accommodates the cleaning device 39 and has a circular opening is formed.

[0065] 1 described above is disposed within the accommodation space 106, and the holding table 2 is rotatable about the Z-axis by the rotation mechanism 32 shown in Fig. 1, and is also movable up and down within the accommodation space 106. Around the frame 21 of the holding table 2, four fixing clamps 215 for fixing the annular frame 197 are evenly disposed, for example, at equal intervals in the circumferential direction.

[0066] For example, in the accommodation space 106, a cleaning nozzle 35 having a generally inverted L shape in a side view is disposed rotatably about a rotation axis in the Z-axis direction, for spraying and supplying a cleaning liquid (e.g., pure water) onto the upper surface of the frame set 199 held by suction on the holding surface 200. The cleaning nozzle 35 is connected to a cleaning liquid supply source 359 capable of supplying stored cleaning liquid such as pure water.

[0067] For example, a code 196 (e.g., a barcode, not shown) indicating individual identification information of the substrate 19 is printed in advance on the sheet 198 of the frame set 199 or the annular frame 197 when cutting is performed by the cutting device 1. The individual identification information of the substrate 19 includes, for example, a lot number, the type of device 192, the material of the substrate 19, the outer diameter of the substrate 19, and the interval dimension of the planned division lines 191. The code 196 may be a QR code (registered trademark), RFID, or the like.

[0068] In the case where the frame set 199 to be cleaned has a code 196, the cleaning device 39 has a reader 398 (for example, a bar code reader) that reads the code 196 pre-printed on the sheet 198 or the annular frame 197. The reader 398 is disposed, for example, at a position above the holding table 2 in the accommodation space 106, and can read the code 196 of the frame set 199 held by suction on the holding surface 200 of the holding table 2. Information about the code 196 read by the reader 398 is transmitted to the control unit 109, for example.

[0069] 10, which records the history of cleaning performed on the frame set 199 by the cleaning device 39, is, for example, a control program set in the control unit 109 of the cutting device 1. Note that the history recording unit 1098 may be included in the reader 398, for example.

[0070] 10, the position of the reader 398 may be another position on the cutting device 1. That is, for example, the reader 398 may be disposed at a position above and in front of the opening of the cassette 14, and the code 196 may be read when the frame set 199 is pulled out of the cassette 14. Also, for example, the reader may be included in the alignment unit 105, and the code 196 of the frame set 199 may be read based on an image acquired by the camera 1058.

[0071] The operation of each component of the cutting device 1, particularly the operation of the cleaning device 39, when cutting the substrate 19 that is a frame set 199 using the cutting device 1 shown in FIG. 10 will be described in detail below. 10 is placed on the cassette placement table 13, and then the frame set 199 is pulled out from the cassette 14 by a push-pull operation (not shown), and the frame set 199 is centered. Thereafter, the chuck table 40 suction-holds the substrate 19 on the holding surface 400, and the annular frame 197 is clamped and fixed by the fixing clamps 42.

[0072] Next, the chuck table 40 which holds the frame set 199 by suction is sent in the -X direction by a cutting feed unit not shown, and after alignment of the target division line 191 is performed, the cutting feed of the chuck table 40, the indexing feed of the cutting unit 17, and the incision feed of the cutting unit 17 are repeated, and the substrate 19 is, for example, fully cut vertically and horizontally by the rotating cutting blade 173 along the planned division line 191, and divided into chips having devices 192.

[0073] After the chuck table 40 is fed in the +X direction by a cutting feed unit (not shown) and positioned within the attachment / detachment area, the frame set 199 is transported from the chuck table 40 to the holding table 2 of the cleaning device 39 by a transport pad (not shown). Then, the substrate 19 is suction-held on the holding surface 200 of the holding table 2 via the sheet 198, and the annular frame 197 is clamped and fixed by the fixed clamp 215.

[0074] Next, for example, the code 196 of the frame set 199 held by suction on the rotating holding table 2 passes below a reading portion of a reader 398 shown in Fig. 10, and the code 196 is read by the reader 398. Then, information about the code 196 is transmitted from the reader 398 to the control unit 109. Note that the reader 398 may be installed on the transport path from the cassette 14 to the chuck table 40 so that the reader 398 can read the code 196 at the timing when the frame set 199 is transported from the cassette 14. Furthermore, the reader 398 may be the alignment unit 105, and may read the code 196 when the alignment unit 105 performs alignment.

[0075] Next, under the control of the control unit 109, the cleaning device 39 starts cleaning the frame set 199. In this cleaning, the holding table 2 rotates at a predetermined rotation speed, and the cleaning nozzle 35 turns and is moved from a retracted position outside the holding table 2 to above the center of the frame set 199 that is suction-held. Then, the cleaning nozzle 35 reciprocates at a predetermined angle in a horizontal plane between the center of the substrate 19 and the outer periphery while spraying a cleaning liquid (e.g., pure water) from the water spray port, cleaning the entire surface 190 of the substrate 19 after cutting. After the substrate 19 has been cleaned for a predetermined time, the spraying of the cleaning liquid by the cleaning nozzle 35 is stopped, and then the frame set 199 is air-dried or spin-dried. In the above cleaning, the control unit 109 recognizes information on the cleaning conditions, such as the rotation speed of the holding table 2, the amount of cleaning liquid sprayed by the cleaning nozzle 35 per unit time, the rotation speed of the cleaning nozzle 35, and the cleaning time, and stores the information in a storage medium not shown.

[0076] The history recording unit 1098 of the control unit 109 shown in FIG. 10 links the individual identification information indicated by, for example, the code 196 of the substrate 19 sent from the reader 398 with the above-mentioned cleaning conditions and records them in the form of a data table, for example.

[0077] As described above, the cleaning apparatus 39 of the present invention further includes a reader 398 that reads the code 196 pre-printed on the sheet 198 or the annular frame 197, and the history recording unit 1098 links the history of the cleaning performed to the information of the code 196 read by the reader 398 (e.g., the individual identification information of the substrate 19) and records it. As a result, the frame set 199 after cleaning has a history of at least any of information regarding whether cleaning was performed or not, and the cleaning conditions, linked to, for example, the individual identification information of the substrate 19, so that an operator or the like can easily display the history of the frame set 199 on a monitor (not shown) of the cutting apparatus 1 for later reference.

[0078] The cleaning apparatus according to the present invention is not limited to the above-mentioned embodiment, and may be embodied in various different forms within the scope of the technical concept. Furthermore, each step of cleaning the substrate 19 using the cleaning apparatus is not limited to the above-mentioned embodiment, and may be appropriately changed within the scope of the effect of the present invention. [Explanation of symbols]

[0079] 19: Substrate 190: Surface of substrate 191: Dividing line 192: Device 193: Back side of board 197: Ring frame 198: Sheet 199: Frame set 196: Cord 3: Cleaning equipment 2: Holding table 20: Suction part 21: Frame 200: Holding surface 216: Skirt cover 207: Mark area 32: Rotation mechanism 320: Spindle 321: Rotation drive source 322: Vertical movement mechanism 34: Casing 340: Outer wall 342: Inner wall 341: Bottom plate 343: Leg 344: Outlet 345: Drain hose 35: Cleaning nozzle 36: Ink ejection nozzle 360: Ink ejection port 369: Ink supply source 366: Rotation drive source 37: Air injection nozzle 33: Pressing nozzle 330: Pressing surface 338: Horizontally moving arm 337: Support plate 336: Air cylinder 1: Cutting device 10: Device base 100: Column 13: Cassette stand 14: Cassette 40: Chuck table 400: Holding surface 12: Index feed unit 16: Infeed feed unit 17:Cutting unit 173:Cutting blade 105: Alignment unit 1058: Camera 39: Cleaning device 398: Leader 109: Control unit 1098: History recording unit

Claims

1. A cleaning device for cleaning a frame set in which a substrate is supported via a sheet in an opening of a frame, comprising: a holding table for holding the frame set; a cleaning nozzle for supplying a cleaning liquid to the frame set held on the holding table; and a history recording unit that records the history of cleaning performed via the frame set.

2. 2. The cleaning device according to claim 1, wherein the history recording unit is an ink ejection nozzle, and prints marks or characters on the sheet with ejected ink to record the history.

3. The cleaning device according to claim 1, characterized in that the history recording unit is a pressure nozzle having a pressure surface at a tip, and presses the pressure surface against the sheet to form a mark by transferring the pressure surface to the sheet, and records the history using the mark.

4. Further comprising a reader for reading a code pre-printed on the sheet or the frame, 2. The cleaning device according to claim 1, wherein the history recording unit records the history of cleaning performed in association with information on the code read by the reader.

5. 2. The cleaning device according to claim 1, wherein the history includes at least one of information on an implementation status of whether cleaning has been completed and information on conditions of the cleaning performed.

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