Cover device for a storage container with adjustable insertion depth of a discharge module

Abstract

To provide a discharge module which enables easy adjustment of an insertion depth of the discharge module.SOLUTION: A cover device includes: a guide module 100 which is coupled to an upper end portion of a storage container 10, has an inclined protruding unit 110 that protrudes having an upward inclination at a preset angle, and is formed with a communication port through which the inside and the outside of a storage space 12 communicate; a discharge module which is formed in a long pipe form and in which one side along a longitudinal direction is disposed inside the storage container 10, penetrating through the communication port and the other side is exposed to the outside to form a discharge port 232; and a fixing module 300 which is fixedly coupled to the inclined protruding unit 110 in a state that a part of the other side of the discharge module penetrates therethrough and which is formed so that the discharge module is compressed toward the guide module 100. A coupling position of the fixing module 300 is adjusted along the longitudinal direction in which the inclined protruding unit 110 protrudes to adjust an insertion depth of the discharge module.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a container cover device in which the insertion depth of an exhaust module is adjustable, and the cover device is coupled to a container that injects gas to exhaust an aqueous photoresist solution therein, and adjusts the insertion depth of the exhaust module during coupling so that an end of the exhaust module can be as close as possible to the bottom of the container. [Background technology]

[0002] Generally, a photolithography process includes a process of coating a wafer, which has been subjected to a series of semiconductor manufacturing processes, with a photoresist by placing the wafer on a spin chuck of a coating device. Here, the photoresist includes a resin, an inhibitor as a sensitizer that is activated by light, and a liquid state solvent. The photoresist is contained in a container made of a glass bottle and supplied to a photoresist supply line through a photoresist supply pipe (Teflon tube) connected to the container cap. The photoresist supplied to the photoresist supply line is supplied to a coating device via multiple valves and an intermediate tank. Here, a container for supplying an aqueous photoresist solution and a cover device coupled thereto are used, and high-pressure gas is supplied into the container to exhaust the aqueous photoresist solution therein and to deliver the solution to a supply pipe. In this case, the container is provided with a cover device for discharging the photoresist aqueous solution and supplying high-pressure gas therein. However, since the inside of the container is maintained in a high-pressure state, it is difficult to adjust the insertion depth when connecting the discharge module. In particular, in the case of the discharge module, in order to stably discharge the aqueous solution inside the storage vessel without residue, the lower end of the flow path must be disposed so as to be as close as possible to or in contact with the bottom surface of the storage vessel. However, while such an arrangement is possible, there are structural problems in sealing the inside of the container and maintaining a high pressure state. In particular, if a part of the cover device is unintentionally separated, a user may be hit by the separated part, or part of the photoresist aqueous solution inside may be splashed onto the user's body, causing a safety accident. Therefore, technological development is needed to solve these problems. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Korean Patent Publication No. 10-2004-17479 Summary of the Invention [Problem to be solved by the invention]

[0004] The present invention has been devised to solve the problems of the prior art described above, and relates to a cover device for a storage container that is connected to a storage container that discharges an aqueous photoresist solution inside by injecting gas at high pressure, and that adjusts the insertion depth of a discharge module in stages so that an end of the discharge module approaches the bottom surface of the storage container. The objects of the present invention are not limited to the objects mentioned above, and other objects not mentioned herein will be clearly understood by those skilled in the art from the following description. [Means for solving the problem]

[0005] In order to achieve the above object, the present invention relates to a cover device which is coupled to an open portion of a container containing an aqueous photoresist solution to seal the inside of the container and discharge the aqueous photoresist solution to the outside, the cover device including: an inclined protrusion unit coupled to an upper end of the container and protruding with a preset angle upward, and a guide module having a communication port communicating between the inside and outside of the container; a discharge module formed in a long pipe shape, one side along a longitudinal direction of the discharge module being inserted through the communication port and disposed inside the container, and the other side being exposed to the outside to form a discharge port; and a fixing module fixedly coupled to the inclined protrusion unit with a portion of the other side of the discharge module being inserted through the inclined protrusion unit so that the discharge module is pressed toward the guide module, and the fixing module has a coupling position adjusted along a longitudinal direction of the inclined protrusion unit to adjust an insertion depth of the discharge module. The discharge module may include an expansion fixing unit that is expanded at a portion along a longitudinal direction, has a periphery corresponding to a periphery of the communication port, and is inserted and fixed inside the communication port. In addition, the exhaust module may further include a flow passage unit having an elongated shape, a portion of which is disposed inside the container and has an exhaust flow passage formed therein, and a connection unit having an exhaust port formed therein, which is extended and protruded from the expansion fixing unit and exposed to the outside, and which is extended from the exhaust flow passage and has an exhaust port formed therein. In addition, the fixing module includes a coupling unit through which a portion of the other side of the discharge module is inserted and which wraps at least a portion of the inclined protrusion unit while in contact with the expansion fixing unit, and an adjustment unit whose middle portion is fixed to the coupling unit with a certain length and whose one side along the longitudinal direction selectively contacts the inclined protrusion unit to adjust whether or not to couple with the coupling unit, and by operating the adjustment unit, the expansion fixing unit can be pressurized in the direction of the storage container to prevent it from being detached in the opposite direction. In addition, the inclined protrusion unit includes a locking protrusion portion having a sawtooth shape on at least a portion of its outer surface, and a plurality of such locking protrusions are formed continuously along the protruding longitudinal direction, and the adjustment unit can be selectively fixed by having one side end engage with at least a portion of the locking protrusions.

[0006] Also, the adjustment unit may be configured in a plurality of pieces and may be disposed at regular intervals around the coupling unit. In addition, the adjustment unit may be configured such that a middle portion along the longitudinal direction rotates while having a rotation axis in the coupling unit, and a restoring force is applied to one side of the adjustment unit such that the one side is pressed toward the inclined protrusion unit. Also, the communication hole may be formed such that an inner diameter of at least a portion of the communication hole decreases toward the inside of the container, and the communication hole may be fixed by compression. In addition, the inclined protruding unit may further include a protruding compression portion formed at least partially along an inner surface of the communication hole, protruding toward the center and contacting a side surface of the expansion fixing unit. Effect of the Invention

[0007] Advantageous Effects of Invention The cover device for a container in which the insertion depth of a discharge module can be adjusted according to the present invention for solving the above problems has the following advantages. The cover device according to the present invention includes a guide module having a protruding communication port, a discharge module that discharges the photoresist aqueous solution to the outside through the communication port, and a fixing module that maintains the connection between the discharge module and the guide module. The discharge module is inserted and fixed inside the storage container, and when the guide module and the fixing module are connected, the discharge module is pressurized in stages to adjust the insertion depth, thereby adjusting the lower end of the discharge module to be as close as possible to the bottom of the storage container. The effects of the present invention are not limited to those mentioned above, and other effects not mentioned can be clearly understood by those skilled in the art from the description of the claims. [Brief description of the drawings]

[0008] [Figure 1] FIG. 2 is a perspective view of a cover device for a storage container in which the insertion depth of the discharge module of the present invention is adjustable; [Diagram 2] FIG. 2 is an exploded perspective view showing a detailed configuration of a cover device for a storage container in which the insertion depth of a discharge module of the present invention is adjustable. [Diagram 3] FIG. 4 is a cross-sectional view showing an internal structure of a cover device for a storage container in which the insertion depth of a discharge module of the present invention is adjustable. [Figure 4] 2 is a diagram showing a configuration of a fixing module in a container cover device in which an insertion depth of a discharge module of FIG. 1 is adjusted; [Diagram 5] 2 is a view showing a state in which a fixing module is coupled to a guide module in a container cover device in which an insertion depth of a discharge module of FIG. 1 is adjustable; [Figure 6] 6 is a diagram illustrating a state in which an end position of a discharge module is adjusted according to a coupling state of a fixing module and a guide module of FIG. 5; [Figure 7] 2 is a view showing a modified form of a guide module in the cover device of FIG. 1; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings, in which the same components are designated by the same names and reference numerals, and additional description thereof will be omitted. In addition, in describing the embodiments of the present invention, the same names and the same reference numerals are used for components having the same functions, but it will be made clear in advance that the embodiments are not substantially completely the same as those of the prior art. In addition, the terms used in the embodiments of the present invention are merely used to describe specific embodiments and are not intended to limit the present invention. A singular expression includes a plural expression unless otherwise clearly indicated in the context. Furthermore, in the embodiments of the present invention, terms such as "include" or "have" are intended to specify the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the presence or additional possibility of one or more other features, numbers, steps, operations, components, parts, or combinations thereof. First, the covering device for a storage container according to the present invention will be outlined with reference to FIGS. 1 to 4. FIG. Fig. 1 is a perspective view of a cover device for a storage container in which the insertion depth of a discharge module of the present invention is adjustable, Fig. 2 is an exploded perspective view showing a detailed configuration of the cover device for a storage container in which the insertion depth of a discharge module of the present invention is adjustable, Fig. 3 is a cross-sectional view showing an internal structure of the cover device for a storage container in which the insertion depth of a discharge module of the present invention is adjustable, and Fig. 4 is a diagram showing the configuration of a fixing module in the cover device for a storage container in which the insertion depth of a discharge module of Fig. 1 is adjustable. The container cover device according to the present invention is coupled to the top of the container 10 containing the photoresist aqueous solution therein to seal it, and at the same time, a separate high-pressure gas is introduced from the outside, and the photoresist aqueous solution is supplied to the outside by the pressure.

[0010] As shown in the figure, the cover device according to the present invention mainly includes a guide module 100, a discharge module 200 and a fixing module 300. The guide module 100 is coupled to the open portion of the receiving container 10 to seal the inside of the receiving space 12, and at the same time, allows the photoresist aqueous solution to be discharged to the outside through a separate communication port 112. Here, the receiving container 10 is formed with at least a portion extended upward and protruding with a preset angle and is coupled to the fixing module 300 which will be described later. Specifically, the guide module 100 includes an inclined protrusion unit 110 disposed at the open upper end of the receiving container 10 and protruding with an upward incline, and a cover unit 120 fixedly coupled to the receiving container 10 while being connected to the inclined protrusion unit 110. The inclined protrusion unit 110 is made of synthetic resin, has a piping shape, protrudes to a certain length, and has a communication port 112 formed therein to communicate with the receiving container 10. At this time, the inclined protrusion unit 110 includes a locking protrusion 113 having a sawtooth shape on at least a part of an outer surface, and a plurality of such locking protrusions are formed continuously along the protruding length to be coupled with a fixing module 300 described later. Here, the locking protrusions 113 are formed in a sawtooth shape, and the protruding direction of the inclined protrusion unit 110 is formed to have a relatively gentle incline compared to the direction toward the storage container 10, making it easier to insert the inclined protrusion unit 110 toward the storage container when combining with the fixing module 300 described below. The inclined protrusion unit 110 has a lower end configured to be in sealing contact with the opening of the receiving container 10 in accordance with the shape of the opening, and at least a portion of the lower end is formed to be coupled with the cover unit 120 .

[0011] In this embodiment, the inclined protrusion unit 110 has a T-shape, an expanded portion 114 is formed at the lower end, and the inclined protrusion unit 110 is elongated in the upward direction, as shown in the drawing. At this time, the communication hole 112 is elongated in the vertical direction and communicates with the inside of the receiving container 10. The cover unit 120 is configured to maintain the coupled state between the inclined protrusion unit 110 and the storage container 10 without separating them when they are in contact with each other, and is fixedly coupled to the opening of the storage container 10 while being connected to the expansion portion 114. Specifically, the cover unit 120 is formed in a ring shape, the inclined protrusion unit 110 is inserted therethrough, and at least a portion of the cover unit 120 encloses the extension portion 114 to be coupled to the receiving container 10. At this time, a screw thread is separately formed on the receiving container 10, and the cover unit 120 is fixed by enclosing the receiving container 10 at its lower side and engaging with the screw thread. Here, the cover unit 120 is ring-shaped with a hole formed in the center through which a portion of the inclined protrusion unit 110 passes, and the hole is formed relatively smaller than the extension portion 114, so that when the cover unit 120 is coupled to the storage container 10, the inclined protrusion unit 110 does not come off and the coupled state can be maintained. In this embodiment, the cover unit 120 is formed of two members stacked in the vertical direction, and the extension portion 114 is disposed between them so that the cover unit 120 and the inclined protrusion unit 110 can maintain a combined state. In this manner, the guide module 100 includes the inclined protrusion unit 110 and the cover unit 120, and is fixedly coupled to the opening of the receiving container 10 so that the inclined protrusion unit 110 is positioned in a protruding upward state at a preset angle. Furthermore, the inclined protrusion unit 110 according to the present invention is formed so that the inner diameter decreases toward the inside of the storage container 10 in at least a portion of the area of ​​the communication port 112, and is configured to be compressed by the inner surface of the communication port 112 when a portion of the discharge module 200 described later is inserted toward the storage container 10.

[0012] In this embodiment, the inclined protrusion unit 110 has a separate protruding compression portion 130 formed along the inner surface of the communication port 112, and the expansion fixing unit 220 formed on the discharge module 200 is inserted into the communication port 112 and pressurized by the protruding compression portion 130. A detailed configuration of the protruding compression portion 130 will be described later with reference to FIG. Meanwhile, the exhaust module 200 is formed in a long pipe shape and passes through the communication port 112 , one side of which is inserted into the receiving space 12 of the receiving container 10 and the other side of which is exposed to the outside to form an exhaust port 232 . Specifically, the discharge module 200 is connected and fixed in a state in which it penetrates the guide module 100, and one side of the discharge module 200 is disposed inside the receiving space 12 and the other side is disposed outside the receiving container 10 to discharge the contained photoresist aqueous solution to the outside. At this time, the discharge module 200 is inserted and fixed closely when it is combined with the guide module 100, and a discharge flow path and an air flow path are formed, and the discharge flow path is configured to contact the bottom surface of the inside of the receiving space 12 to discharge the photoresist solution to the outside. And, the remaining air flow path is connected to the upper part of the receiving space 12 and high pressure gas is supplied, so that the photoresist solution is discharged to the outside by pressure. In the present invention, the discharge module 200 is arranged in a form in which a portion of the discharge module 200 has a circumference that corresponds to the circumference of the communication port 112 along the longitudinal direction and is inserted into the inner surface of the communication port 112, and mainly includes a flow path unit 210, an expansion fixing unit 220, and a connection unit 230. The flow passage unit 210 is formed long, a part of which is disposed inside the receiving container 10, and has a discharge flow passage formed therein so that the photoresist aqueous solution can be discharged to the other side. Specifically, the passage unit 210 is formed long in a general piping shape, and one side is disposed to contact the bottom surface of the receiving container 10. At this time, as shown in the figure, the passage unit 210 is disposed in a state inclined at a certain angle by the guide module 100, and one side is seated to contact an end portion of the bottom surface of the receiving space 12, so that the remaining photoresist aqueous solution can be completely discharged.

[0013] In this embodiment, the passage unit 210 is formed long and narrower than the opening of the receiving container 10, and the discharge passage is formed therein. Meanwhile, the expansion fixing unit 220 is extended to the other side of the flow passage unit 210 and is configured to be inserted and fixed inside the communication port 112, and is formed in a shape in which a portion of the area along the longitudinal direction of the flow passage unit 210 is expanded, and the discharge flow passage is extended therein. Specifically, it is preferable that the expansion fixing unit 220 has a circumference and length corresponding to that of the communication opening 112, and is configured to be inserted through the communication opening 112 together with the passage unit 210 when the passage unit 210 is inserted, thereby sealing the communication opening 112. At this time, the expansion fixing unit 220 has an air passage formed therein in addition to the exhaust passage, and is connected to the connection unit 230 (to be described later) so that high pressure air can be supplied into the receiving space 12 . In this embodiment, the expansion fixing unit 220 is formed in a cylindrical shape corresponding to the shape of the communication port 112, and is provided with at least one seal around its periphery to prevent unintended fluid flow when it comes into contact with the communication port 112. Here, the expansion fixing unit 220 is configured to be pressed in a forced-fitting manner when a protruding compression part 130 (to be described later) contacts the side surface and is inserted into the communication opening 112, thereby maintaining a stable connection state. Meanwhile, the connection unit 230 is provided on the other side of the passage unit 210 with the expansion fixing unit 220 at the center, and is formed to independently connect the air passage and the exhaust passage. Specifically, as shown in the drawing, the connection unit 230 is extended and protruded from the expansion fixing unit 220 to be exposed to the outside, and has an outlet 232 connected to the exhaust passage and a supply part 234 connected to the air passage. At this time, the outlet 232 is connected to an equipment through which the photoresist solution is supplied, and the supply part 234 is connected to a means for supplying high-pressure air to be supplied into the receiving space 12, and in this embodiment, the high-pressure air is supplied as nitrogen gas.

[0014] In this embodiment, as shown in the drawing, the connection unit 230 is configured to be exposed to the outside through the fixing module 300 described later, and is provided with the outlet 232 and the supply part 234 independently. As described above, the discharge module 200 includes the passage unit 210 , the expansion and fixing unit 220 and the connection unit 230 , and the expansion and fixing unit 220 is coupled to the communication port 112 with one side passing through the guide module 100 . Meanwhile, the fixing module 300 is fixedly coupled to the inclined protrusion unit 110 with a portion of the other side of the discharge module 200 penetrating therethrough, and is formed so that the discharge module 200 is pressed toward the guide module 100 . Specifically, the fixing module 300 encloses a portion of the other side of the discharge module 200 and is fixedly coupled to the inclined protruding unit 110 at the same time to press the expanding fixing unit 220 . At this time, the fixing module 300 is formed in a ring shape with a hole at the center of the upper end that is relatively smaller than the circumference of the expansion fixing unit 220, and is configured so that the connection unit 230 passes through, and is formed in a shape that wraps around the outer surface of the inclined protrusion unit 110. The inclined protrusion unit 110 includes a locking protrusion portion 113 having a sawtooth shape on at least a portion of its outer surface, and a plurality of such locking protrusion portions are formed continuously along the protruding longitudinal direction, and the fixing module 300 is configured to enclose the inclined protrusion unit 110 and have at least a portion selectively contact the locking protrusion portion 113 to be fixed. As a result, when the fixing module 300 moves along the longitudinal direction of the inclined protrusion unit 110 toward the storage container 10, it is fixed to the locking protrusion portion 113, thereby preventing the fixing module 300 from being unintentionally detached, and the expansion fixing unit 220 is pressurized inside the communication port 112 to maintain the coupled state.

[0015] Here, the inclined protrusion unit 110 according to the present invention is formed such that the inner diameter of at least a portion of the communication opening 112 decreases in the direction of the receiving container 10. As the expansion fixing unit 220 is pressurized into the communication opening 112 by the fixing module 300, the communication opening 112 is pressurized in the direction in which the inner diameter of the communication opening 112 decreases, and the communication opening 112 can be stably sealed. In this embodiment, the fixing module 300 mainly includes a coupling unit 310 and an adjustment unit 320 . The coupling unit 310 is configured to enclose the outer surface of the inclined protrusion unit 110 and press the expansion fixing unit 220 . Specifically, the coupling unit 310 is fixed to the oblique protrusion unit 110 by the adjusting unit 320 while being wrapped around the oblique protrusion unit 110 in a state where the connecting unit 230 is inserted through the coupling unit 310 and is in contact with the expanding fixing unit 220 . Here, as shown in FIG. 4, the coupling unit 310 has a cylindrical shape with a certain thickness, and the upper part is formed to have a relatively small inner diameter, and with the flow passage unit 210 penetrating, it encloses the expansion fixing unit 220 at the upper part so that it does not come off. The inclined protrusion unit 110 is coupled to the upper end of the inclined protrusion unit 110 in a manner that encloses the upper end of the inclined protrusion unit 110, and is configured so that its position toward the receiving container 10 can be adjusted. That is, the coupling unit 310 is coupled to the inclined protrusion unit 110 in a manner that wraps the expansion fixing unit 220 from above while the discharge module 200 is inserted and penetrated into the inclined protrusion unit 110, thereby preventing the discharge module 200 from coming off and at the same time adjusting the insertion depth. At this time, the coupling unit 310 is configured to be coupled with the adjusting unit 320 (to be described later) and to be selectively fixed to or separated from the inclined protrusion unit 110 by adjusting the adjusting unit 320 . In this embodiment, as shown in the figure, the coupling unit 310 has a cylindrical shape and a coupling groove 312 formed through part of the side along the circumference to expose a part of the outer surface of the inclined protrusion unit 110, and the adjustment unit 320 is coupled to the coupling groove 312 and fixed by selectively contacting the outer surface of the inclined protrusion unit 110.

[0016] Meanwhile, the adjustment unit 320 is provided in the coupling unit 310 and is configured to selectively adjust the movement of the coupling unit 310, and has a certain length, a middle part fixed to the coupling unit 310, and one side along the longitudinal direction selectively contacts the inclined protrusion unit 110 to adjust whether or not to be coupled to the coupling unit 310. At this time, the adjustment unit 320 prevents the expansion fixing unit 220 from being pressurized in the direction of the receiving container 10 and from being unintentionally detached in the opposite direction, and allows the coupling unit 310 to be selectively separated by a user's operation. Specifically, at least one adjusting unit 320 is provided around the coupling unit 310, and is disposed vertically while being seated in the coupling groove 312, and a middle portion along the longitudinal direction is rotatably coupled to the coupling unit 310. One end portion along the longitudinal direction is formed to correspond to the shape of the locking protrusion 113 and selectively contacts it. Here, one end portion along the longitudinal direction of the adjusting unit 320 has at least one sawtooth and is engaged with at least a portion of the region of the locking protrusion 113 exposed through the coupling groove 312, thereby fixing the coupling unit 310. As a result, when one side along the longitudinal direction of the adjustment unit 320 contacts the locking protrusion 113, the coupling unit 310 can move toward the receiving container 10 without detaching from the inclined protrusion unit 110 or maintain the coupled state. Alternatively, as shown in FIG. 4, when the other side of the adjustment unit 320 is pressed so that one side is separated from the locking protrusion 113, the coupling unit 310 can be in a state in which it can be separated from the inclined protrusion unit 110. In this embodiment, the adjustment unit 320 is composed of a plurality of pieces, which are arranged at a certain distance apart around the coupling unit 310. When the user simultaneously presses and operates the other side of the adjustment unit 320, one side can be selectively separated or maintained in contact with the locking protrusion 113.

[0017] At this time, the adjusting unit 320 is configured so that an intermediate portion along the longitudinal direction rotates around a rotation axis in the coupling unit 310, and a restoring force acts on one side of the adjusting unit 320 by pressing the one side toward the inclined protrusion unit 110. That is, the adjusting unit 320 is coupled to the coupling unit 310 so as to be rotatable, and receives a restoring force through a separate elastic member (not shown), so that one side can maintain a contact state with the locking protrusion 113 when the user does not press the other side. As described above, the fixing module 300 according to the present invention includes the connecting unit 310 and the adjustment unit 320, and when the user connects the connecting unit 310 to the inclined protrusion unit 110, the user applies pressure toward the storage container 10 to move the expansion fixing unit 220 and the flow path unit 210 together toward the storage container 10, thereby positioning the lower end of the flow path unit 210 close to the bottom surface of the storage container 10. That is, the fixing module 300 is pressurized and fixed by the coupling unit 310 with the discharge module 200 penetrating the communication port 112, and when the coupling unit 310 presses the discharge module 200 toward the storage container 10, the locking protrusion 113 comes into contact with one side of the adjustment unit 320 to adjust the insertion depth in stages, thereby preventing the discharge module 200 from being inserted into the storage container 10 beyond a certain level. As described above, the cover device according to the present invention includes the guide module 100, the discharge module 200 and the fixing module 300, and the discharge module 200 is inserted and fixed inside the storage container 10, and the engaging protrusion 113 and one end of the adjustment unit 320 prevent the discharge module 200 from being pressurized toward the storage container 10 above a certain level, and the lower end of the flow path unit 210 can be arranged to contact or be maximally contacted with the bottom surface of the storage container 10. Next, with reference to FIGS. 5 and 6, a process in which the passage unit 210 is disposed adjacent to the bottom surface of the receiving container 10 will be described below.

[0018] FIG. 5 is a diagram showing a state in which the fixing module 300 is combined with the guide module 100 in a cover device for a storage container 10 in which the insertion depth of the discharge module 200 in FIG. 1 is adjusted, and FIG. 6 is a diagram showing a state in which the end position of the discharge module 200 in FIG. 5 is adjusted depending on the combination state of the fixing module 300 with the guide module 100. 5(a), the fixing module 300 is fastened with the discharge module 200 inserted through the inclined protrusion unit 110. At this time, the fixing module 300 is not fully pressurized toward the receiving container 10, and the expansion fixing unit 220 is not fully inserted into the communication opening 112. In this case, as shown in FIG. 6(a), the lower end of the flow passage unit 210 is disposed with a certain distance from the bottom surface of the receiving container 10. As shown in FIG. Next, when the user presses the connection unit 310 toward the receiving container 10 as shown in FIG. 5(b), the expansion fixing unit 220 is pressurized together with the connection unit 310 and inserted into the communication port 112, and in conjunction with this, the flow path unit 210 moves downward. At this time, the adjusting unit 320 can adjust the insertion depth of the discharge module 200 by moving the coupling unit 310 along the inclined protruding unit 110 without any additional operation according to the shape of the locking protrusion 113 .

[0019] Here, the locking protrusion 113 has a plurality of sawtooths formed continuously in multiple stages, and one end of the adjustment unit 320 is formed to engage with the locking protrusion 113 correspondingly. When the coupling groove 312 is pressed toward the receiving container 10 by an external force, the insertion depth of the expansion fixing unit 220 can be adjusted in stages. In this manner, when the coupling unit 310 is pressurized to adjust the insertion depth of the expansion fixing unit 220, the lower end of the flow passage unit 210 can be moved and positioned so as to contact the bottom surface of the receiving container 10, as shown in (b) of FIG. 6. That is, in the cover device according to the present invention, the inclined protrusion unit 110 and the adjustment unit 320 are configured so that the coupling unit 310 can be pressurized in a stepwise manner toward the storage container 10, and the insertion depth of the discharge module 200 is adjusted so that the lower end of the flow path unit 210 is positioned so as to contact the bottom surface of the storage container 10 as much as possible, thereby enabling the remaining contents to be stably discharged and the storage container 10 to be separated with a simple operation. Next, referring to FIG. 7, the detailed structure of the oblique protrusion unit 110 according to the present invention will be described as follows. First, looking at the illustrated drawing, the inclined protrusion unit 110 has the communication port 112 in the form of a pipe formed at the center, and further includes a protruding compression part 130 that is formed to protrude toward the center along the inner surface of the communication port 112 and contact the expansion fixing unit 220. The protruding compression part 130 is formed in a general protrusion shape or a ring shape, and configured in a shape in which the inner diameter decreases along the longitudinal direction of the communication hole 112. Here, the protruding compression part 130 is configured to compress the side surface to prevent the expansion fixing unit 220 from being removed when the expansion fixing unit 220 is inserted, and the more the expansion fixing unit 220 is pressed and inserted, the greater the compression strength of the side surface.

[0020] As a result, when the fixing module 300 presses the expansion fixing unit 220 toward the communication opening 112, the protruding compression portion 130 also presses the side of the expansion fixing unit 220, thereby minimizing the possibility of the expansion fixing unit 220 being detached. In this embodiment, as shown in the figure, the protruding compression portion 130 is formed in a ring shape and is formed on at least a portion of the inner surface of the communication hole 112, and includes a first inclined surface 132 protruding with a certain angle of inclination along the longitudinal direction, and a second inclined surface 134 continuous with the first inclined surface 132 and inclined in the opposite direction. The first slope 132 is formed in a shape in which the inner surface of the communication opening 112 gradually decreases in the longitudinal direction at a preset angle, and the second slope 134 is configured to have an inclination in the opposite direction to the second slope 134. At this time, the second slope 134 is configured to have a relatively larger inclination angle than the first slope 132, and is configured to press the side of the expansion fixing unit 220 when the expansion fixing unit 220 is inserted into the communication opening 112. As a result, when the expansion fixing unit 220 is inserted into the communication opening 112, the first inclined surface 132 presses the expansion fixing unit 220, increasing the pressure on the side, while the second inclined surface 134 prevents the expansion fixing unit 220 from sliding in the opposite direction. In this way, the inclined protrusion unit 110 according to the present invention includes the protruding compression portion 130 on the inner surface of the communication opening 112, which allows the expansion fixing unit 220 to be completely sealed when the expansion fixing unit 220 is inserted, while at the same time preventing the expansion fixing unit 220 from unintentionally coming off in the opposite direction. As described above, it will be apparent to those skilled in the art that the present invention can be embodied in other specific forms without departing from the spirit and scope of the present invention, in addition to the above-described embodiments. Therefore, the above-described embodiments should be considered as illustrative and not restrictive, and the present invention is not limited to the above description, but may be modified within the scope of the appended claims and their equivalents. [Explanation of symbols]

[0021] 10: Containment Container 12: Containment space 100: Guide module 110: Inclined protruding unit 120: Cover unit 130: Protruding compression part 200: Emission module 210: Flow path unit 220: Extended fixed unit 230: Connecting unit 300: Fixed module 310: Bonding unit 320: Adjustment unit

Claims

1. 1. A cover device for sealing an inside of a container for containing an aqueous photoresist solution, the cover device being coupled to an open portion of the container for sealing the inside of the container and discharging the aqueous photoresist solution to the outside, a guide module including an inclined protruding unit coupled to an upper end of the receiving container and protruding with an upward inclination at a preset angle, the guide module having a communication port through which the inside and outside of the receiving space are communicated; a discharge module formed in the form of a long pipe, one side of which is disposed inside the container through the communication port and the other side of which is exposed to the outside to form a discharge port; and a fixing module that is fixedly coupled to the inclined protrusion unit with a portion of the other side of the discharge module penetrating therethrough, and that is configured to press the discharge module toward the guide module; A cover device, wherein a coupling position of the fixing module is adjusted along a protruding longitudinal direction of the inclined protrusion unit to adjust an insertion depth of the discharge module.

2. The discharge module includes: The cover device according to claim 1 , further comprising an expansion fixing unit which is expanded in a portion of the longitudinal direction, has a periphery corresponding to a periphery of the communication opening, and is inserted and fixed inside the communication opening.

3. The discharge module includes: a flow passage unit that is formed long and has a portion disposed inside the container and has a discharge flow passage formed therein; and The cover device according to claim 2 , further comprising a connection unit that is extended and protruded from the expansion fixing unit and exposed to the outside, and has a discharge port that is extended from the discharge flow path.

4. The fixing module includes: a coupling unit through which a portion of the other side of the discharge module is inserted and which is in contact with the expansion fixing unit and which encloses at least a portion of the inclined protrusion unit; and an adjustment unit having a certain length and a middle portion fixed to the coupling unit, and one side along a longitudinal direction of the adjustment unit selectively contacting the inclined protrusion unit to adjust whether or not the adjustment unit is coupled to the coupling unit; The cover device according to claim 2 , wherein the adjustment unit is operated so that the expansion fixing unit is pressurized in the direction of the container and is prevented from being removed in the opposite direction.

5. The inclined protrusion unit includes a locking protrusion having a sawtooth shape on at least a part of an outer surface, and a plurality of such locking protrusions are formed continuously along a protruding longitudinal direction, The cover device according to claim 4, wherein one side end of the adjustment unit is selectively fixed by being engaged with at least a part of the locking protrusion.

6. The adjustment unit includes:

5. The cover device according to claim 4, which is made up of a plurality of units spaced apart at regular intervals around the circumference of said coupling unit.

7. The adjustment unit includes: The cover device according to claim 4 , wherein an intermediate portion along the longitudinal direction is configured to rotate while having a rotation axis in the connecting unit, and one side is configured to be subjected to a restoring force that presses the one side toward the inclined protrusion unit.

8. The communication port is The cover device according to claim 2 , which is formed so that an inner diameter of at least a portion of the cover device decreases toward the inside of the container and is fixed by compression.

9. The inclined protruding unit is The cover device according to claim 8 , further comprising a protruding compression portion formed at least partially along an inner surface of the communication port, protruding toward the center and contacting a side surface of the expansion fixing unit.

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