Magnetic levitation devices and semiconductor processing equipment

Abstract

A magnetic levitation device and a semiconductor processing device are provided. The stator (20) of the magnetic levitation device includes at least three magnetic stator substrates (201), a permanent magnet (202), and a magnetizer (203), the at least three magnetic stator substrates (201) are spaced apart from one another in the axial direction of the stator (20) to define at least two gaps (201'), the permanent magnets (202) and the magnetizers (203) are alternately installed in the at least two gaps (201'), and each of the at least three magnetic stator substrates (201) includes a protrusion (2012), and the protrusions The protruding portion (2012) protrudes from the permanent magnet (202) and the magnetizer (202) toward the rotor (10) and is wound with a magnetic levitation coil 2012c, and the protruding portion (2012) and the magnetic levitation coil (2012c) of the first magnetic stator substrate (201a) of the at least three magnetic stator substrates (201) apply an upward force to the rotor (10) in the axial direction of the stator (20), and the ratio of the number of the first magnetic stator substrates (201a) to the total number of the at least three magnetic stator substrates (201) is 50% or more.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] For all purposes, this application claims priority to Chinese Patent Application No. 202210442450.0, filed on April 25, 2022, the entire contents of which are incorporated herein by reference. [Technical field]

[0002] At least one embodiment of the present disclosure relates to the field of magnetic levitation, and more particularly to a magnetic levitation device. [Background technology]

[0003] Levitation technologies mainly include magnetic levitation, optical levitation, acoustic levitation, airflow levitation, electric levitation, and particle beam levitation, among which magnetic levitation technology is relatively mature. In magnetic levitation technology, the rotor is levitated and rotated uniformly by the magnetic interaction between the stator and rotor, and there is no contact or mechanical friction between the rotor and stator, so magnetic levitation technology is particularly applicable in situations with high cleanliness requirements. Summary of the Invention [Means for solving the problem]

[0004] In an embodiment of the present disclosure, a magnetic levitation device is provided, comprising: a rotor; and a stator, the stator being disposed around the rotor or the rotor being disposed around the stator, the stator comprising at least three magnetic stator substrates, a permanent magnet and a magnetizer, the at least three magnetic stator substrates being spaced apart from one another in an axial direction of the stator to define at least two gaps in the axial direction of the stator, and the permanent magnets and the magnetizers being disposed alternately within the at least two gaps in the axial direction of the stator. Each of the at least three magnetic stator substrates includes a substrate body and a protrusion connected to the substrate body, the protrusion protruding from the permanent magnet and the magnetizer toward the rotor, and a magnetic levitation coil wound around the protrusion, the at least three magnetic stator substrates include a first magnetic stator substrate, and the protrusion and the magnetic levitation coil of the first magnetic stator substrate apply an upward force to the rotor in the axial direction of the stator, and a ratio of the number of the first magnetic stator substrates to the total number of the at least three magnetic stator substrates is 50% or more.

[0005] For example, the at least three magnetic stator substrates further include a second magnetic stator substrate, a protrusion and a magnetic levitation coil of the second magnetic stator substrate apply a downward force to the rotor in the axial direction of the stator, and the number of the first magnetic stator substrates is greater than or equal to the number of the second magnetic stator substrates.

[0006] For example, the number of the at least three magnetic stator substrates is four or more, and the magnetic properties of the surfaces of two adjacent permanent magnets facing each other in the axial direction of the stator are the same.

[0007] For example, the stator includes at least two of the permanent magnets, and the magnetic field strengths of the at least two permanent magnets are equal to each other.

[0008] For example, the rotor includes a rotor body and at least three flanges protruding from the rotor body to the stator, the at least three magnetic stator substrates and the at least three flanges are equal in number and correspond one-to-one to each other, the at least three flanges include a first flange corresponding to the first magnetic stator substrate, and a midline of the protruding portion of the first magnetic stator substrate in the axial direction of the stator is higher than a midline of the first flange in the axial direction of the stator.

[0009] For example, the axial centerline of the protruding portion of the first magnetic stator substrate is higher than the axial centerline of the first flange when (1) in the axial direction of the stator, the upper surface of the protruding portion of the first magnetic stator substrate is higher than the upper surface of the first flange, and the lower surface of the protruding portion of the first magnetic stator substrate is higher than the upper surface of the first flange or is at the same height as the upper surface of the first flange, (2) in the axial direction of the stator, the upper surface of the protruding portion of the first magnetic stator substrate is higher than the upper surface of the first flange or is at the same height as the upper surface of the first flange, and the lower surface of the first flange is lower than the lower surface of the protruding portion of the first magnetic stator substrate, and The present invention includes any one of the following cases: (1) an upper surface of the first flange is higher than a lower surface of the protruding portion of the first magnetic stator substrate; (2) in the axial direction of the stator, an upper surface of the protruding portion of the first magnetic stator substrate is higher than an upper surface of the first flange, and the lower surface of the first flange is higher than or at the same height as the lower surface of the protruding portion of the first magnetic stator substrate; and (3) in the axial direction of the stator, an upper surface of the protruding portion of the first magnetic stator substrate is higher than an upper surface of the first flange, and the lower surface of the first flange is higher than or at the same height as the lower surface of the protruding portion of the first magnetic stator substrate; and (4) in the axial direction of the stator, an upper surface of the protruding portion of the first magnetic stator substrate is the same height as the upper surface of the first flange or is lower than the upper surface of the first flange, and the lower surface of the protruding portion of the first magnetic stator substrate is higher than the lower surface of the first flange.

[0010] For example, in case (2), the distance between the upper surface of the protrusion of the first magnetic stator substrate and the upper surface of the first flange is H, H≦4 / 5Ha, and Ha is the size of the first flange in the axial direction of the stator.

[0011] For example, H≦1 / 5Ha.

[0012] For example, the at least three flanges include a second flange corresponding to the second magnetic stator substrate, and a midline of the second flange in the axial direction of the stator is higher than a midline of the protrusion of the second magnetic stator substrate in the axial direction of the stator.

[0013] For example, the axial centerline of the second flange being higher than the axial centerline of the protruding portion of the second magnetic stator substrate means that (1) in the axial direction of the stator, the upper surface of the second flange is higher than the upper surface of the protruding portion of the second magnetic stator substrate, and the lower surface of the second flange is higher than the upper surface of the protruding portion of the second magnetic stator substrate or is at the same height as the upper surface of the protruding portion of the second magnetic stator substrate, or (2) in the axial direction of the stator, the upper surface of the second flange is higher than the upper surface of the protruding portion of the second magnetic stator substrate or is at the same height as the upper surface of the protruding portion of the second magnetic stator substrate, and the lower surface of the protruding portion of the second magnetic stator substrate is higher than the lower surface of the second flange. and the lower surface of the second flange is lower than the upper surface of the protruding portion of the second magnetic stator substrate, (3) in the axial direction of the stator, the upper surface of the second flange is higher than the upper surface of the protruding portion of the second magnetic stator substrate, and the lower surface of the protruding portion of the second magnetic stator substrate is higher than the lower surface of the second flange or is at the same height as the lower surface of the second flange, and (4) in the axial direction of the stator, the upper surface of the second flange is at the same height as the upper surface of the protruding portion of the second magnetic stator substrate or lower than the upper surface of the protruding portion of the second magnetic stator substrate, and the lower surface of the second flange is higher than the lower surface of the protruding portion of the second magnetic stator substrate.

[0014] For example, in the case (2), the distance between the top surface of the second flange and the top surface of the protrusion of the second magnetic stator substrate is H, where H≦4 / 5Ha, and Ha is the size of the second flange in the axial direction of the stator.

[0015] For example, H≦1 / 5Ha.

[0016] For example, a radial distance of the stator between each of the at least three magnetic stator substrates and its corresponding flange is L, and a size of each of the at least two gaps in the axial direction of the stator is at least three times L.

[0017] For example, the size of each of the at least two gaps in the axial direction of the stator is at least five times the L.

[0018] For example, the size of each of the at least two gaps in the axial direction of the stator is at least 10 times L.

[0019] For example, the radial distance of the stator between each of the at least three magnetic stator substrates and its corresponding flange is L, where L≦Ha, and Ha is the size of the flange in the axial direction of the stator.

[0020] For example, L≦1 / 2Ha.

[0021] For example, at least one of the at least three magnetic stator substrates includes a plurality of teeth, the plurality of teeth being connected to the substrate body, the plurality of teeth protruding from the permanent magnet and the magnetizer toward the rotor, and a magnetic rotating coil being wound around each tooth.

[0022] For example, the magnetic levitation coil is farther from the rotor than the magnetic rotating coil.

[0023] For example, the teeth are located on an end of the projection facing the rotor.

[0024] For example, the at least one magnetic stator substrate is one, and is a magnetic stator substrate located in the uppermost layer or the lowermost layer in the axial direction of the stator among the at least three magnetic stator substrates.

[0025] For example, the at least one magnetic stator substrate is one, and is a magnetic stator substrate located in an intermediate layer in the axial direction of the stator among the at least three magnetic stator substrates.

[0026] For example, the at least one magnetic stator substrate is an even number and is disposed symmetrically about the midline of the stator in the axial direction of the stator, or the at least one magnetic stator substrate is an odd number greater than one, one magnetic stator substrate is a magnetic stator substrate located in a middle layer in the axial direction of the stator among the at least three magnetic stator substrates, and the remaining magnetic stator substrates are disposed symmetrically about the midline of the stator in the axial direction of the stator.

[0027] For example, the rotor includes a rotor body and at least three flanges protruding from the rotor body toward the stator, the at least three magnetic stator substrates and the at least three flanges are equal in number and correspond one-to-one to each other, and an end of the flange corresponding to the at least one magnetic stator substrate facing the at least one magnetic stator substrate has a plurality of teeth.

[0028] For example, the number of the first magnetic stator substrates is at least two, and the number of the second magnetic stator substrates is at least one.

[0029] For example, the number of the second magnetic stator substrates is one.

[0030] For example, in the axial direction of the stator, the permanent magnets are installed in the odd-numbered gaps from the top out of at least two gaps, while the magnetizers are installed in the even-numbered gaps from the top.

[0031] For example, the permanent magnets may be in direct contact with the adjacent magnetic stator substrate, or the permanent magnets may be spaced apart from the adjacent magnetic stator substrate, or a magnetized sheet may be interposed between the permanent magnets and the adjacent magnetic stator substrate.

[0032] For example, the magnetizer may be in direct contact with the adjacent magnetic stator substrate, or the magnetizer may be spaced apart from the adjacent magnetic stator substrate, or a magnetized sheet may be interposed between the magnetizer and the adjacent magnetic stator substrate.

[0033] For example, the at least three magnetic stator substrates are disposed at equal intervals in the axial direction of the stator.

[0034] For example, in the axial direction of the stator, the thickness of the permanent magnet is equal to the thickness of the magnetizer.

[0035] For example, in the axial direction of the stator, the thicknesses of the at least three magnetic stator substrates are the same as each other.

[0036] An embodiment of the present disclosure further provides a semiconductor processing device including the magnetic levitation device described above.

[0037] In order to more clearly describe the technical solutions of the embodiments of the present invention, the drawings of the embodiments are briefly described below. It should be apparent that the drawings in the following description are only related to some embodiments of the present invention, and do not limit the present invention. [Brief description of the drawings]

[0038] [Figure 1] FIG. 1 is a schematic perspective view of a magnetic levitation device according to an embodiment of the present disclosure. [Diagram 2] FIG. 2 is an exploded schematic view of the magnetic levitation device shown in FIG. [Diagram 3] FIG. 3 is a schematic diagram of the interaction between the protrusion 2012 of the magnetic stator substrate and the flange of the rotor in the magnetic levitation device shown in FIG. [Figure 4] FIG. 4 is a schematic diagram of magnetic field lines in the magnetic levitation device shown in FIG. [Diagram 5] FIG. 5 is a schematic perspective view 2 of a magnetic levitation device according to an embodiment of the present disclosure. [Figure 6] FIG. 6 is an exploded schematic view of the magnetic levitation device shown in FIG. [Figure 7] FIG. 7 is a schematic diagram of the interaction between the protrusion 2012 of the magnetic stator substrate and the flange of the rotor in the magnetic levitation device shown in FIG. [Figure 8] FIG. 8 is a schematic diagram 1 of the magnetic field lines of the magnetic levitation device shown in FIG. [Figure 9A] FIG. 9A is a schematic perspective view of a rotor of a magnetic levitation device according to an embodiment of the present disclosure. [Figure 9B] FIG. 9B is a schematic perspective view 1 of the magnetic stator substrate of the magnetic levitation device according to the embodiment of the present disclosure. [Figure 9C] FIG. 9C is a schematic perspective view of the permanent magnet 202 of the magnetic levitation device according to the embodiment of the present disclosure. [Figure 9D] FIG. 9D is a schematic perspective view of the magnetizer 203 of the magnetic levitation device according to the embodiment of the present disclosure. [Figure 9E] FIG. 9E is a schematic perspective view 2 of the magnetic stator substrate of the magnetic levitation device according to the embodiment of the present disclosure. [Figure 9F] FIG. 9F is a schematic perspective view 1 of a magnetic rotating coil of a magnetic levitation device according to an embodiment of the present disclosure. [Figure 10A] FIG. 10A is a schematic diagram 1 of case 1 of the positional relationship between the protrusion 2012 of the first magnetic stator substrate 201a and the first flange of the rotor in a magnetic levitation device according to an embodiment of the present disclosure. [Figure 10B] FIG. 10B is a schematic diagram 2 of case 1 of the positional relationship between the protruding portion 2012 of the first magnetic stator substrate 201a and the first flange of the rotor in the magnetic levitation device according to the embodiment of the present disclosure. [Figure 11A] FIG. 11A is a schematic diagram 1 of case 2 of the positional relationship between the protrusion 2012 of the first magnetic stator substrate 201a and the first flange of the rotor in a magnetic levitation device according to an embodiment of the present disclosure. [Figure 11B] FIG. 11B is a schematic diagram 2 of case 2 of the positional relationship between the protrusion 2012 of the first magnetic stator substrate 201a and the first flange of the rotor in the magnetic levitation device according to the embodiment of the present disclosure. [Figure 12A]FIG. 12A is a schematic diagram 1 of Case 3 of the positional relationship between the protrusion 2012 of the first magnetic stator substrate 201a and the first flange of the rotor in a magnetic levitation device according to an embodiment of the present disclosure. [Figure 12B] FIG. 12B is a schematic diagram 2 of Case 3 of the positional relationship between the protruding portion 2012 of the first magnetic stator substrate 201a and the first flange of the rotor in the magnetic levitation device according to the embodiment of the present disclosure. [Figure 13A] FIG. 13A is a schematic diagram 1 of Case 4 of the positional relationship between the protrusion 2012 of the first magnetic stator substrate 201a and the first flange of the rotor in a magnetic levitation device according to an embodiment of the present disclosure. [Figure 13B] FIG. 13B is a schematic diagram 2 of Case 4 of the positional relationship between the protrusion 2012 of the first magnetic stator substrate 201a and the first flange of the rotor in the magnetic levitation device according to the embodiment of the present disclosure. [Figure 14A] FIG. 14A is a schematic diagram 1 of case 1 of the positional relationship between the second flange of the rotor and the protruding portion 2012 of the second magnetic stator substrate in a magnetic levitation device according to an embodiment of the present disclosure. [Figure 14B] FIG. 14B is a schematic diagram 2 of case 1 of the positional relationship between the second flange of the rotor and the protruding portion 2012 of the second magnetic stator substrate in the magnetic levitation device according to the embodiment of the present disclosure. [Figure 15A] FIG. 15A is a schematic diagram 1 of case 2 of the positional relationship between the second flange of the rotor and the protruding portion 2012 of the second magnetic stator substrate in a magnetic levitation device according to an embodiment of the present disclosure. [Figure 15B] FIG. 15B is a schematic diagram 2 of case 2 of the positional relationship between the second flange of the rotor and the protruding portion 2012 of the second magnetic stator substrate in the magnetic levitation device according to the embodiment of the present disclosure. [Figure 16A] FIG. 16A is a schematic diagram 1 of Case 3 of the positional relationship between the second flange of the rotor and the protruding portion 2012 of the second magnetic stator substrate in a magnetic levitation device according to an embodiment of the present disclosure. [Figure 16B] FIG. 16B is a schematic diagram 2 of Case 3 of the positional relationship between the second flange of the rotor and the protruding portion 2012 of the second magnetic stator substrate in a magnetic levitation device according to an embodiment of the present disclosure. [Figure 17A]FIG. 17A is a schematic diagram 1 of Case 4 of the positional relationship between the second flange of the rotor and the protruding portion 2012 of the second magnetic stator substrate in a magnetic levitation device according to an embodiment of the present disclosure. [Figure 17B] FIG. 17B is a schematic diagram 2 of Case 4 of the positional relationship between the second flange of the rotor and the protruding portion 2012 of the second magnetic stator substrate in a magnetic levitation device according to an embodiment of the present disclosure. [Figure 18] FIG. 18 is a schematic diagram 2 of the magnetic field lines of the magnetic levitation device shown in FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0039] In order to make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be described clearly and completely below with reference to the drawings of the embodiments of the present invention. It is obvious that the described embodiments are only some of the embodiments of the present invention, but not all of the embodiments. Based on the described embodiments of the present invention, all other embodiments that a person skilled in the art can obtain without creative labor belong to the protection scope of the present invention.

[0040] Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meanings understood by those skilled in the art. The terms "first", "second" and similar terms used in the present patent application specification and claims do not indicate any order, number or importance, but are merely used to distinguish different components. Similar terms such as "comprise" or "include" mean that the element or item appearing before the term covers the elements or items listed after the term and their equivalents, but do not exclude other elements or items.

[0041] The drawings in this disclosure are not strictly drawn to scale, and the specific size and number of each structure can be determined according to actual needs. The drawings described in this disclosure are merely schematic diagrams.

[0042] An embodiment of the present disclosure provides a magnetic levitation device. In the magnetic levitation device according to the embodiment of the present disclosure, the stator can apply a sufficient axial support force to the rotor, so that the rotor can rotate and levitate stably even if the rotor itself has a large mass, and the rotor can rotate and levitate stably even if the rotor supports or pulls an object with a large mass, so that the magnetic levitation device according to the embodiment of the present disclosure has a very wide range of application. An embodiment of the present disclosure further provides a semiconductor processing device including the magnetic levitation device according to the embodiment of the present disclosure.

[0043] Fig. 1 is a perspective schematic diagram 1 of a magnetic levitation device according to an embodiment of the present disclosure, Fig. 2 is an exploded schematic diagram of the magnetic levitation device shown in Fig. 1, Fig. 3 is a schematic diagram of the interaction between a protrusion of a magnetic stator substrate and a flange of a rotor in the magnetic levitation device shown in Fig. 1, and Fig. 4 is a schematic diagram of magnetic field lines of the magnetic levitation device shown in Fig. 1. Fig. 9A is a perspective schematic diagram of a rotor of a magnetic levitation device according to an embodiment of the present disclosure, Fig. 9B is a perspective schematic diagram 1 of a magnetic stator substrate of a magnetic levitation device according to an embodiment of the present disclosure, Fig. 9C is a perspective schematic diagram of a permanent magnet of a magnetic levitation device according to an embodiment of the present disclosure, and Fig. 9D is a perspective schematic diagram of a magnetizer of a magnetic levitation device according to an embodiment of the present disclosure. As shown in FIGS. 1 to 4 and 9A to 9D, the magnetic levitation device according to the embodiment of the present disclosure includes a rotor 10 and a stator 20, the stator 20 is arranged around the rotor 10, and the stator 20 includes at least three magnetic stator substrates 201, permanent magnets 202, and magnetizers 203, the at least three magnetic stator substrates 201 are spaced apart from each other in the axial direction Z of the stator 20 to define at least two gaps 201' in the axial direction Z of the stator 20, the permanent magnets 202 and the magnetizers 203 are alternately arranged in the at least two gaps 201' in the axial direction Z of the stator 20, and the at least three Each of the magnetic stator substrates 201 includes a substrate body 2011 and a protrusion 2012 connected to the substrate body 2011, the protrusion 2012 protrudes from the permanent magnet 202 and the magnetizer 203 toward the rotor 10, and a magnetic levitation coil 2012c is wound around the protrusion 2012, the at least three magnetic stator substrates 201 include a first magnetic stator substrate 201a, and the protrusion 2012 and the magnetic levitation coil 2012c of the first magnetic stator substrate 201a apply an upward force in the axial direction Z of the stator 20 to the rotor 10, and the ratio of the number of the first magnetic stator substrates 201a to the total number of the at least three magnetic stator substrates 201 is 50% or more.

[0044] In addition, in the embodiment of the present disclosure, "upward in the axial direction Z of the stator 20" is the direction opposite to the direction of gravity of the rotor 10, and "downward in the axial direction Z of the stator 20" is the same direction as the direction of gravity of the rotor 10.

[0045] In the embodiment of the present disclosure, the protrusion 2012 and the magnetic levitation coil 2012c of the first magnetic stator substrate 201a apply an upward force in the axial direction Z of the stator 20 to the rotor 10, and the ratio of the number of the first magnetic stator substrates 201a to the total number of the at least three magnetic stator substrates 201 is 50% or more. That is, in the magnetic levitation device according to the embodiment of the present disclosure, more than half of the magnetic stator substrates among the at least three magnetic stator substrates 201 are the first magnetic stator substrates 201a that apply an upward force in the axial direction Z of the stator 20 to the rotor 10, thereby providing a sufficient axial support force to balance the gravity of the rotor 10 and the gravity of the object supported or pulled by the rotor 10, and even when the rotor 10 itself has a large mass and / or the rotor 10 supports or pulls an object with a large mass, the rotor 10 can rotate and levitate stably without becoming unstable due to the action of its own gravity and the gravity of the object it supports or pulls. Therefore, the application range of the magnetic levitation device according to the embodiment of the present disclosure is greatly expanded, and may include a rotor 10 with a large mass, and the rotor 10 may support or pull an object with a large mass. As is clear from the interaction between the stator 20 and the rotor 10 in FIG. 3 and the magnetic field distribution in FIG. 4, the first magnetic stator substrate 201a applies an upward force to the rotor 10 in the axial direction Z of the stator 20, and the ratio of the number of the first magnetic stator substrates 201a to the total number of at least three magnetic stator substrates 201 is 50% or more. For example, FIG. 4 is a cross-sectional view of the rotor 10, the magnetic stator substrate 201, the permanent magnet 202, and the magnetizer 203 cut along the line AA in FIG. 1.

[0046] For example, when the rotor 10 supports an article, the article may be placed on the upper surface of the rotor 10, in which case the article may be in direct contact with the upper surface of the rotor 10, or the article may be in direct contact with a support structure installed on the upper surface of the rotor 10 rather than in direct contact with the upper surface of the rotor 10. For example, when the rotor 10 pulls an article, the article may be connected to the lower surface of the rotor 10, in which case the article may be directly connected with the lower surface of the rotor 10, or the article may be directly connected with a connection structure connected to the lower surface of the rotor 10 rather than in direct contact with the lower surface of the rotor 10.

[0047] It should be noted that the protrusion 2012 and the magnetic levitation coil 2012c of the first magnetic stator substrate 201a apply an upward force in the axial direction Z of the stator 20 to the rotor 10, and the ratio of the number of the first magnetic stator substrates 201a to the total number of the at least three magnetic stator substrates 201 is 50% or more in the case where the magnetic levitation device is operating normally, during which the rotor 10 rotates and levitates stably under the action of the stator 20.

[0048] For example, in an embodiment of the present disclosure, in order to enable the magnetic levitation device to provide sufficient axial support to balance the gravity of the rotor 10 and the gravity of the item that the rotor 10 supports or pulls, the ratio of the number of first magnetic stator substrates 201a to the total number of the at least three magnetic stator substrates 201 is equal to or greater than 60%, even equal to or greater than 70%, even equal to or greater than 80%, even equal to or greater than 90%, and even equal to 100% (i.e., the at least three magnetic stator substrates 201 are all first magnetic stator substrates 201a). As shown in Figures 3 and 4, two of the three magnetic stator substrates 201 are first magnetic stator substrates 201a, so that the ratio of the number of first magnetic stator substrates 201a to the total number of the three magnetic stator substrates 201 is greater than 50%.

[0049] For example, a current flows through the magnetic levitation coil 2012c, and the rotor 10 is levitated under the action of the protrusion 2011 of the magnetic stator substrate 201 and the magnetic levitation coil 2012c. For example, the magnitude of the current in the magnetic levitation coil 2012c is adjustable, and the force applied by the stator 20 to the rotor is adjustable. For example, the magnitude of the current in the magnetic levitation coil 2012c wound around the protrusion 2012 of the first magnetic stator substrate 201a is adjustable, and the magnitude of the upward force in the axial direction Z of the stator 20 applied to the rotor 10 by the protrusion 2012 of the first magnetic stator substrate 201a and the magnetic levitation coil 2012c is adjustable. In this way, when the magnetic levitation device according to the embodiment of the present disclosure supports or pulls an article, different upward forces in the axial direction Z of the stator 20 can be applied to the rotor 10 depending on the article being supported or pulled, improving the flexibility of the operation of the magnetic levitation device according to the embodiment of the present disclosure. In other words, the magnetic levitation device according to the embodiments of the present disclosure can provide a sufficiently large and adjustable axial support force.

[0050] In the embodiment of the present disclosure, the distribution position of the first magnetic stator substrate 201a in the at least three magnetic stator substrates 201 is not limited, and it is sufficient that the protrusion 2012 and the magnetic levitation coil 2012c of the first magnetic stator substrate 201a apply a force in the axial direction Z of the stator 20 to the rotor 10, and the ratio of the number of the first magnetic stator substrates 201a to the total number of the at least three magnetic stator substrates 201 is 50% or more. For example, in FIG. 3, the upper two magnetic stator substrates 201 are shown to be the first magnetic stator substrates 201a, but the lower two magnetic stator substrates may also be the first magnetic stator substrates 201a.

[0051] Note that, for example, although FIGS. 1 to 4 show the stator 20 being disposed around the rotor 10, the embodiments of the present disclosure are not limited thereto, and the rotor 10 may be disposed around the stator 20.

[0052] For example, in the embodiment of the present disclosure, the rotor 10 and the stator 20 are spaced apart from each other, and further, for example, in the normal operation state of the magnetic levitation device, the rotor 110 and the stator 20 are spaced apart from each other, and the rotor 10 and the stator 20 do not contact each other, thereby avoiding a series of problems such as heat generation due to mechanical friction, contamination, etc. For example, when the stator 20 and the rotor 10 are spaced apart from each other, other structures may be installed in the gap between the stator 20 and the rotor 10 as necessary, or the stator 20 and the rotor 10 may be separated only by an air gap without installing other structures.

[0053] For example, in an embodiment of the present disclosure, at least three magnetic stator substrates 201 are spaced apart from one another in the axial direction Z of the stator 20 to define at least two gaps 201' in the axial direction Z of the stator 20, where, for example, the number of magnetic stator substrates 201 is N, N≧3, and the number of gaps 201' defined by the magnetic stator substrates 201 is N-1.

[0054] For example, in the embodiment of the present disclosure, the permanent magnets 202 and the magnetizers 203 are alternately installed in at least two gaps 201' in the axial direction Z of the stator 20, that is, for two adjacent gaps 201', the permanent magnets 202 are installed in one gap 201', and the magnetizers 203 are installed in the other gap 201'. As shown in FIG. 4, by alternately installing the permanent magnets 202 and the magnetizers 203 in at least two gaps 201' in the axial direction Z of the stator 20, a closed magnetic circuit acting on the rotor 10 can be formed in any two adjacent magnetic stator substrates 201, and each of the at least three magnetic stator substrates 201 can apply an acting force to the rotor 10, ensuring the controllability of the number of the first magnetic stator substrates 201a and the controllability of the ratio between the first magnetic stator substrates 201a and the total number of the at least three magnetic stator substrates 201. In addition, in the embodiment of the present disclosure, a permanent magnet 202 or a magnetizer 203 is installed in one gap 201', so that any two adjacent magnetic stator substrates 201 among the at least three magnetic stator substrates 201 are not in direct contact with each other.

[0055] For example, in the embodiment of the present disclosure, the rotor 1 is made of a magnetic material, examples of which include, but are not limited to, permanent magnet materials or ferromagnetic materials. Furthermore, for example, the ferromagnetic material is a soft magnetic material whose magnetic permeability is much greater than that of vacuum, examples of which include, but are not limited to, iron, cobalt, nickel and their alloys, carbon steel, silicon steel, and industrial pure iron. Examples of permanent magnetic materials include, but are not limited to, samarium cobalt, neodymium iron boron, and ferrite. For example, as shown in FIG. 9A, a support structure 102 is installed on the upper surface of the rotor 10, and an article supported by the rotor 10 can be placed on the support structure 102. For example, the rotor 10 is used to support a semiconductor wafer to be processed, and the semiconductor wafer is placed on the support structure 102.

[0056] For example, in the embodiment of the present disclosure, the at least three magnetic stator substrates 201 are made of a magnetic material, and further, for example, the magnetic material is a ferromagnetic material, and further, for example, the ferromagnetic material is a soft magnetic material whose magnetic permeability is much larger than that of a vacuum, and examples thereof include, but are not limited to, iron, cobalt, nickel and their alloys, carbon steel, silicon steel, and industrial pure iron. For example, the materials of the at least three magnetic stator substrates 201 may be the same or different. The materials of the at least three magnetic stator substrates 201 are the same, which can simplify the manufacturing process of the magnetic levitation device. For example, as shown in FIG. 9B, the substrate body 2011 of each of the at least three magnetic stator substrates 201 is a ring. For example, as shown in FIG. 9B, each of the at least three magnetic stator substrates 201 includes a plurality of protrusions 2012, each protrusion 2012 is connected to the substrate body 2011, and a magnetic levitation coil 2012c is wound around each protrusion 2012. For example, as shown in FIG. 9B, the multiple protrusions 2012 are disposed at equal intervals in the inner circumferential direction of the substrate body 2011. For example, as shown in FIG. 9B, the sizes of the multiple protrusions 2012 in the inner circumferential direction of the substrate body 2011 are equal to each other. For example, the multiple protrusions 2012 included in the same magnetic stator substrate 201 are disposed at the same height in the axial direction Z of the stator 20, and more specifically, the upper surfaces of the multiple protrusions 2012 included in the same magnetic stator substrate 201 are on the same plane in the axial direction Z of the stator 20, and the lower surfaces of the multiple protrusions 2012 included in the same magnetic stator substrate 201 are on the same plane in the axial direction Z of the stator 20. For example, if the permanent magnets 202 and the magnetizers 203 are not disposed between any two of the multiple protrusions 2012 in the axial direction Z of the stator 20, the multiple protrusions 2012 belong to the same magnetic stator substrate 201. In addition, in FIG. 9B, as an example, the same magnetic stator substrate 201 is shown to include three protrusions 2012, but the embodiments of the present disclosure are not limited thereto, and the same magnetic stator substrate 201 may include any number of protrusions 2012, allowing for flexible design depending on the circumstances.Note that the number of protrusions 2012 included in each of the at least three magnetic stator substrates 201 may be the same or different, and the embodiment of the present disclosure is not limited thereto. For example, the number of protrusions 2012 included in each of the at least three magnetic stator substrates 201 is the same, thereby simplifying the manufacturing process of the magnetic levitation device.

[0057] For example, in the embodiment of the present disclosure, the permanent magnet 202 is made of a permanent magnet material, examples of which include, but are not limited to, samarium cobalt, neodymium iron boron, and ferrite. For example, as shown in FIG. 9C, the permanent magnet 202 is a ring. For example, the radial sizes of the substrate body 2011 and the permanent magnet 202 of each of the at least three magnetic stator substrates 201 are the same, so that the substrate body 2011 and the permanent magnet 202 completely overlap in the axial direction Z of the stator 20.

[0058] For example, in the embodiment of the present disclosure, the magnetizer 203 may be made of a magnetic material, and further, for example, the magnetic material is a ferromagnetic material, and further, for example, the ferromagnetic material is a soft magnetic material whose magnetic permeability is much larger than that of a vacuum, and examples thereof include, but are not limited to, iron, cobalt, nickel and their alloys, carbon steel, silicon steel, and industrial pure iron. For example, as shown in FIG. 9D, the magnetizer 203 is a ring. For example, the radial sizes of the substrate body 2011 and the magnetizer 203 of each of the at least three magnetic stator substrates 201 are the same, so that the substrate body 2011 and the magnetizer 203 completely overlap in the axial direction Z of the stator 20. For example, the substrate body 2011, the permanent magnet 202, and the magnetizer 203 completely overlap in the axial direction Z of the stator 20.

[0059] 1 to 4, as an example, the magnetic levitation device includes three magnetic stator substrates 201, the three magnetic stator substrates 201 define two gaps 201', the permanent magnet 202 is installed in one of the two gaps 201', the magnetizer 203 is installed in the other of the two gaps 201', and two of the three magnetic stator substrates 201 are first magnetic stator substrates 201a. However, the embodiment of the present disclosure is not limited to this, and the number of magnetic stator substrates 201 may be four, five, six or more, and correspondingly, the number of gaps 201' also changes according to the number of magnetic stator substrates 201, and the permanent magnets 202 and the magnetizers 203 are installed alternately. Note that in FIG. 4, the N pole of the permanent magnet 202 is on the top and the S pole is on the bottom, but the embodiment of the present disclosure is not limited to this, and the N pole of the permanent magnet 202 may be on the bottom and the S pole on the top.

[0060] FIG. 5 is a perspective schematic diagram 2 of a magnetic levitation device according to an embodiment of the present disclosure, FIG. 6 is an exploded schematic diagram of the magnetic levitation device shown in FIG. 5, FIG. 7 is a schematic diagram of the interaction between the protrusion of the magnetic stator substrate and the flange of the rotor in the magnetic levitation device shown in FIG. 5, and FIG. 8 is a schematic diagram 1 of the magnetic field lines of the magnetic levitation device shown in FIG. 5. For example, FIG. 8 is a cross-sectional view of the rotor 10, the magnetic stator substrate 201, the permanent magnet 202, and the magnetizer 203 cut along the line AA in FIG. 5. As shown in FIG. 5 to FIG. 8, the magnetic levitation device includes four magnetic stator substrates 201, the four magnetic stator substrates 201 define three gaps 201', the permanent magnets 202 and the magnetizers 203 are alternately installed in the gaps 201', and three of the four magnetic stator substrates 201 are first magnetic stator substrates 201a.

[0061] As shown in Figures 5 to 8, three of the four magnetic stator substrates 201 are first magnetic stator substrates 201a, but the embodiments of the present disclosure are not limited to this, and all four magnetic stator substrates 201 may be first magnetic stator substrates 201a, or two of the four magnetic stator substrates 201 may be first magnetic stator substrates 201a, and in both of these two cases, the ratio of the number of first magnetic stator substrates 201a to the total number of at least three magnetic stator substrates 201 is 50% or more.

[0062] As shown in Figures 5 to 8, the top two magnetic stator substrates 201 and the bottom magnetic stator substrate 201 are first magnetic stator substrates 201a, but the embodiments of the present disclosure are not limited to this, and any three or any two of the four magnetic stator substrates 201 may be the first magnetic stator substrates 201a.

[0063] 1 to 8, in a magnetic levitation device according to an embodiment of the present disclosure, permanent magnets 202 are installed in the odd-numbered gaps 201' from the top of at least two gaps 201' in the axial direction Z of the stator 20, and magnetizers 203 are installed in the even-numbered gaps 201' from the top. In this way, the number of permanent magnets 202 is equal to or greater than the number of magnetizers 203, thereby increasing the acting force of the stator 20 on the rotor 10.

[0064] For example, as shown in FIG. 1 to FIG. 8, in the magnetic levitation device according to the embodiment of the present disclosure, the permanent magnet 202 is in direct contact with the magnetic stator substrate 201 adjacent thereto. However, the embodiment of the present disclosure is not limited thereto. FIG. 18 is a schematic diagram 2 of the magnetic field lines of the magnetic levitation device shown in FIG. 5. As shown in FIG. 18, the permanent magnet 202 has a gap with the magnetic stator substrate 201 adjacent thereto, or a magnetized sheet 204 is inserted between the permanent magnet 202 and the magnetic stator substrate 201 adjacent thereto. In these two cases, the size of the permanent magnet 202 and the size of the gap 201' do not need to be strictly consistent, thereby greatly reducing the requirements for the processing accuracy of the magnetic levitation device according to the embodiment of the present disclosure. When the permanent magnet 202 is not in direct contact with the magnetic stator substrate 201 adjacent thereto and there is a gap therebetween, the magnetized sheet 204 may be inserted into the gap, or the magnetized sheet 204 may not be inserted into the gap without affecting the closed magnetic field, and it can be flexibly adapted according to the actual situation.

[0065] For example, as shown in FIG. 1 to FIG. 8, in the magnetic levitation device according to the embodiment of the present disclosure, the magnetizer 203 is in direct contact with the adjacent magnetic stator substrate 201. However, the embodiment of the present disclosure is not limited thereto. As shown in FIG. 18, the magnetizer 203 has a gap with the adjacent magnetic stator substrate 201, or a magnetized sheet 204 is inserted between the magnetizer 203 and the adjacent magnetic stator substrate 201. In these two cases, the size of the magnetizer 203 and the size of the gap 201' do not need to be strictly consistent, thereby greatly reducing the requirements for the processing accuracy of the magnetic levitation device according to the embodiment of the present disclosure. When the magnetizer 203 is not in direct contact with the adjacent magnetic stator substrate 201 and there is a gap between them, the magnetized sheet 204 may be inserted into the gap, or the magnetized sheet 204 may not be inserted into the gap without affecting the closed magnetic field, and it can be flexibly adapted according to the actual situation.

[0066] 1 to 8, in the magnetic levitation device according to the embodiment of the present disclosure, at least three magnetic stator substrates 201 are disposed at equal intervals in the axial direction Z of the stator 20, thus simplifying the manufacturing process of the magnetic levitation device according to the embodiment of the present disclosure and simplifying the control operation of the magnetic levitation device according to the embodiment of the present disclosure. However, the embodiment of the present disclosure is not limited thereto, and at least three magnetic stator substrates 201 may be disposed at unequal intervals in the axial direction Z of the stator 20.

[0067] 1 to 8, in the magnetic levitation device according to the embodiment of the present disclosure, the thickness of the permanent magnet 202 is equal to the thickness of the magnetizer 203 in the axial direction Z of the stator 20, and thus, the manufacturing process of the magnetic levitation device according to the embodiment of the present disclosure can be simplified, and the control operation of the magnetic levitation device according to the embodiment of the present disclosure can be simplified. However, the embodiment of the present disclosure is not limited thereto, and the thickness of the permanent magnet 202 does not have to be equal to the thickness of the magnetizer 203 in the axial direction Z of the stator 20.

[0068] 1 to 8, in the magnetic levitation device according to the embodiment of the present disclosure, the thicknesses of at least three magnetic stator substrates 201 are the same in the axial direction Z of the stator 20, and thus, the manufacturing process of the magnetic levitation device according to the embodiment of the present disclosure can be simplified, and the control operation of the magnetic levitation device according to the embodiment of the present disclosure can be simplified. However, the embodiment of the present disclosure is not limited to this, and the thicknesses of the at least three magnetic stator substrates 201 in the axial direction Z of the stator 20 may be different from each other.

[0069] 1 to 8, in the magnetic levitation device according to the embodiment of the present disclosure, the at least three magnetic stator substrates 201 further include a second magnetic stator substrate 201b, and the protruding portion 2012 of the second magnetic stator substrate 201b and the magnetic levitation coil 2012c wound thereon apply a downward force in the axial direction Z of the stator 20 to the rotor 10, and the number of the first magnetic stator substrates 201a is equal to or greater than the number of the second magnetic stator substrates 201b. The second magnetic stator substrate 201b is installed, and the protruding portion 2012 of the second magnetic stator substrate 201b and the magnetic levitation coil 2012c wound thereon apply a downward force in the axial direction Z of the stator 20 to the rotor 10, so that the position of the rotor 10 can be adjusted in the axial direction Z of the stator 20 under the action of the resultant force of the upward force and the downward force, thereby enhancing the flexibility of the magnetic levitation device according to the embodiment of the present disclosure. By making the number of first magnetic stator substrates 201a equal to or greater than the number of second magnetic stator substrates 201b, it is possible to ensure that the ratio of the number of first magnetic stator substrates 201a to the total number of the three magnetic stator substrates 201 is greater than 50%, thereby ensuring that the magnetic levitation device can provide sufficient axial supporting force to balance the gravity of the rotor 10 and the gravity of the article supported or pulled by the rotor 10, and even when the rotor 10 itself has a large mass and / or when the rotor 10 supports or pulls an article with a large mass, the rotor 10 can rotate and levitate stably without becoming unstable due to the action of its own gravity and the gravity of the article it supports or pulls.

[0070] For example, the magnitude of the current in the magnetic levitation coil 2012c wound around the protruding portion 2012 of the second magnetic stator substrate 201b is adjustable, thereby adjusting the magnitude of the downward force in the axial direction Z of the stator 20 that the protruding portion 2012 of the second magnetic stator substrate 201b and the magnetic levitation coil 2012c apply to the rotor 10. In this way, the position of the rotor can be adjusted in real time in the axial direction Z of the stator 20 according to the actual situation, improving the flexibility of operation of the magnetic levitation device according to the embodiment of the present disclosure.

[0071] For example, in the embodiment of the present disclosure, the number of the first magnetic stator substrates 201a is at least two, and the number of the second magnetic stator substrates 201b is at least one, ensuring that the number of the first magnetic stator substrates 201a is greater than the number of the second magnetic stator substrates 201b, thereby ensuring the adjustability of the position of the rotor 10 in the axial direction Z of the stator 20, and ensuring that the magnetic levitation device can provide sufficient axial supporting force to balance the gravity of the rotor 10 and the gravity of the item that the rotor 10 supports or pulls.

[0072] For example, in the embodiment of the present disclosure, the number of second magnetic stator substrates 201b is 1. In this case, one magnetic stator substrate functions as the second magnetic stator substrate 201b, and the remaining magnetic stator substrates all function as the first magnetic stator substrates 201a, so that the magnetic levitation device can provide a more sufficient axial supporting force to balance the gravity of the rotor 10 with a larger mass and the gravity of the object with a larger mass that the rotor 10 supports or pulls.

[0073] It should be noted that in the embodiment of the present disclosure, the at least three magnetic stator substrates 201 further include a magnetic stator substrate that not only does not function as the first magnetic stator substrate 201a but also does not function as the second magnetic stator substrate 201b, that is, such a magnetic stator substrate not only does not apply an upward force in the axial direction Z of the stator 20 to the rotor 10, but also does not apply a downward force in the axial direction Z of the stator 20 to the rotor 10. For example, a magnetic rotating coil is installed on such a magnetic stator substrate.

[0074] For example, as shown in FIG. 5 to FIG. 8, in the embodiment of the present disclosure, the number of the at least three magnetic stator substrates 201 is four or more, and in the axial direction Z of the stator 20, the magnetic properties of the surfaces of the adjacent two permanent magnets 202 facing each other are the same, and thus, a closed magnetic circuit acting on the rotor 10 can be formed in any two adjacent magnetic stator substrates 201, whereby each of the at least three magnetic stator substrates 201 can apply an acting force to the rotor 10, ensuring the controllability of the number of the first magnetic stator substrates 201a and the controllability of the ratio between the first magnetic stator substrates 201a and the total number of the at least three magnetic stator substrates 201. As an example, FIG. 5 shows that the magnetic properties of the surfaces of the adjacent two permanent magnets 202 facing each other are the same, and both are N poles. However, the embodiment of the present disclosure is not limited thereto, and the magnetic properties of the surfaces of the adjacent two permanent magnets 202 facing each other are the same, and both are S poles. Note that "two adjacent permanent magnets 202" means that there are no other permanent magnets 202 between the two permanent magnets 202, but other components than the permanent magnets 202, such as a magnetic stator substrate 201 and a magnetizer 203, may be placed between the two permanent magnets 202.

[0075] For example, as shown in Figures 5 to 8, in an embodiment of the present disclosure, the stator 20 includes at least two permanent magnets 202, and the magnetic field strengths of the at least two permanent magnets 202 are equal to each other, thus simplifying the processing process of the magnetic levitation device according to the embodiment of the present disclosure and simplifying the control operation of the magnetic levitation device according to the embodiment of the present disclosure.

[0076] For example, as shown in Figures 1 to 8 and 9A, in an embodiment of the present disclosure, the rotor 10 includes a rotor body 100 and at least three flanges 101 protruding from the rotor body 100 to the stator 20, the at least three magnetic stator substrates 201 and the at least three flanges 101 are the same in number and correspond one-to-one to each other, the at least three flanges 101 include a first flange 101a corresponding to the first magnetic stator substrate 201a, and the midline of the protrusion 2012 of the first magnetic stator substrate 201a in the axial direction Z of the stator 20 is higher than the midline of the first flange 101a in the axial direction Z of the stator 20. The midline of the protruding portion 2012 of the first magnetic stator substrate 201a in the axial direction Z of the stator 20 is higher than the midline of the first flange 101a in the axial direction Z of the stator 20, thereby ensuring that the protruding portion 2012 of the first magnetic stator substrate 201a and the magnetic levitation coil 2012c apply a force upward in the axial direction Z of the stator 20 to the rotor 10. For example, by adjusting the current in the magnetic levitation coil 2012c wound around the protruding portion 2012 of the first magnetic stator substrate 201a and / or adjusting the current in the magnetic levitation coil 2012c wound around the protruding portion 2012 of the second magnetic stator substrate 201b, the relative relationship between the midline of the protruding portion 2012 of the first magnetic stator substrate 201a in the axial direction Z of the stator 20 and the midline of the first flange 101a in the axial direction Z of the stator 20 can be adjusted.

[0077] For example, in the magnetic levitation device according to the embodiment of the present disclosure, the thickness of each of the at least three magnetic stator substrates 201 in the axial direction Z of the stator 20 may be equal to the thickness of each of the at least three flanges 101 in the axial direction Z of the stator 20, thus simplifying the processing process of the magnetic levitation device according to the embodiment of the present disclosure and simplifying the control operation of the magnetic levitation device according to the embodiment of the present disclosure. However, the embodiment of the present disclosure is not limited thereto, and the thickness of each of the at least three magnetic stator substrates 201 in the axial direction Z of the stator 20 may not be equal to the thickness of each of the at least three flanges 101 in the axial direction Z of the stator 20.

[0078] Figures 10A-10B, 11A-11B, 12A-12B and 13A-13B each show the positional relationship between the protrusion 2012 of the first magnetic stator substrate 201a and the first flange 101a of the rotor 10 in a magnetic levitation device according to an embodiment of the present disclosure, and in these figures, the midline of the protrusion 2012 of the first magnetic stator substrate 201a in the axial direction Z of the stator 20 and the midline of the first flange 101a of the rotor 10 in the axial direction Z of the stator 20 are indicated by dotted lines.

[0079] For example, in the embodiment of the present disclosure, the midline of the protrusion 2012 of the first magnetic stator substrate 201a in the axial direction Z of the stator 20 being higher than the midline of the first flange 101a of the rotor 10 in the axial direction Z of the stator 20 includes any one of the following cases. Case (1): In the axial direction Z of the stator 20, the upper surface of the protrusion 2012 of the first magnetic stator substrate 201a is higher than the upper surface of the first flange 101a, and the lower surface of the protrusion 2012 of the first magnetic stator substrate 201a is higher than the upper surface of the first flange 101a (see FIG. 10A) or the lower surface of the protrusion 2012 of the first magnetic stator substrate 201a is at the same height as the upper surface of the first flange 101a (see FIG. 10B). Case (2): In the axial direction Z of the stator 20, the upper surface of the protrusion 2012 of the first magnetic stator substrate 201a is higher than the upper surface of the first flange 101a (see Figure 11A) or is at the same height as the upper surface of the first flange 101a (see Figure 11B), the lower surface of the first flange 101a is lower than the lower surface of the protrusion 2012 of the first magnetic stator substrate 201a, and the upper surface of the first flange 101a is higher than the lower surface of the protrusion 2012 of the first magnetic stator substrate 201a. Case (3): In the axial direction Z of the stator 20, the upper surface of the protruding portion 2012 of the first magnetic stator substrate 201a is higher than the upper surface of the first flange 101a, and the lower surface of the first flange 101a is higher than the lower surface of the protruding portion 2012 of the first magnetic stator substrate 201a (see FIG. 12A) or is at the same height as the lower surface of the protruding portion 2012 of the first magnetic stator substrate 201a (see FIG. 12B). Case (4): In the axial direction Z of the stator 20, the upper surface of the protruding portion 2012 of the first magnetic stator substrate 201a is at the same height as the upper surface of the first flange 101a (see FIG. 13A) or is lower than the upper surface of the first flange 101a (see FIG. 13B), and the lower surface of the protruding portion 2012 of the first magnetic stator substrate 201a is higher than the lower surface of the first flange 101a.

[0080] For example, in an embodiment of the present disclosure, as shown in FIG. 11A, in the above case (2), the distance between the upper surface of the protrusion 2012 of the first magnetic stator substrate 201a and the upper surface of the first flange 101a is H, where H≦4 / 5Ha, and Ha is the size of the first flange 101a in the axial direction Z of the stator 20. In this case, the stator 20 can stably control the rotor 10, stably ensuring that the protrusion 2012 of the first magnetic stator substrate 201a and the magnetic levitation coil 2012c apply an upward force in the axial direction Z of the stator 20 to the rotor 10, and ensuring that the rotor 10 rotates and levitates stably. Furthermore, H≦1 / 5Ha, which ensures that the protrusion 2012 of the first magnetic stator substrate 201a and the magnetic levitation coil 2012c apply a force to the rotor 10 in the axial direction Z of the stator 20 more stably, and also ensures that the rotor 10 rotates and levitates stably.

[0081] 1 to 8 and 9A, in the embodiment of the present disclosure, the at least three flanges 101 include a second flange 101b corresponding to the second magnetic stator substrate 201b, and the midline of the second flange 101b in the axial direction Z of the stator 20 is higher than the midline of the protruding portion 2012 of the second magnetic stator substrate 201b in the axial direction Z of the stator 20. In this way, it can be ensured that the protruding portion 2012 of the second magnetic stator substrate 201b and the magnetic levitation coil 2012c apply a force downward in the axial direction Z of the stator 20 to the rotor 10. For example, by adjusting the current in the magnetic levitation coil 2012c wound around the protrusion 2012 of the first magnetic stator substrate 201a and / or by adjusting the current in the magnetic levitation coil 2012c wound around the protrusion 2012 of the second magnetic stator substrate 201b, the relative relationship between the midline of the protrusion 2012 of the second magnetic stator substrate 201b in the axial direction Z of the stator 20 and the midline of the second flange 101b in the axial direction Z of the stator 20 can be adjusted.

[0082] Figures 14A-14B, 15A-15B, 16A-16B and 17A-17B each show the positional relationship between the second flange 101b of the rotor 10 and the protrusion 2012 of the second magnetic stator substrate 201b in a magnetic levitation device according to an embodiment of the present disclosure, and in these figures, the midline of the protrusion 2012 of the second magnetic stator substrate 201b in the axial direction Z of the stator 20 and the midline of the second flange 101b of the rotor 10 in the axial direction Z of the stator 20 are indicated by dotted lines.

[0083] For example, in the embodiment of the present disclosure, the midline of the second flange 101b of the rotor 10 in the axial direction Z of the stator 20 being higher than the midline of the protruding portion 2012 of the second magnetic stator substrate 201b in the axial direction Z of the stator 20 includes any one of the following cases. Case (1): In the axial direction Z of the stator 20, the upper surface of the second flange 101b is higher than the upper surface of the protruding portion 2012 of the second magnetic stator substrate 201b, and the lower surface of the second flange 101b is higher than the upper surface of the protruding portion 2012 of the second magnetic stator substrate 201b (see FIG. 14A) or is at the same height as the upper surface of the protruding portion 2012 of the second magnetic stator substrate 201b (see FIG. 14B). Case (2): In the axial direction Z of the stator 20, the upper surface of the second flange 101b is higher than the upper surface of the protrusion 2012 of the second magnetic stator substrate 201b (see Figure 15A) or is at the same height as the upper surface of the protrusion 2012 of the second magnetic stator substrate 201b (see Figure 15B), the lower surface of the protrusion 2012 of the second magnetic stator substrate 201b is lower than the lower surface of the second flange 101b, and the lower surface of the second flange 101b is lower than the upper surface of the protrusion 2012 of the second magnetic stator substrate 201b. Case (3): In the axial direction Z of the stator 20, the upper surface of the second flange 101b is higher than the upper surface of the protruding portion 2012 of the second magnetic stator substrate 201b, and the lower surface of the protruding portion 2012 of the second magnetic stator substrate 201b is higher than the lower surface of the second flange 101b (see FIG. 16A) or is at the same height as the lower surface of the second flange 101b (see FIG. 16B). Case (4): In the axial direction Z of the stator 20, the upper surface of the second flange 101b is at the same height as the upper surface of the protruding portion 2012 of the second magnetic stator substrate 201b (see FIG. 17A) or is lower than the upper surface of the protruding portion 2012 of the second magnetic stator substrate 201b (see FIG. 17B), and the lower surface of the second flange 101b is higher than the lower surface of the protruding portion 2012 of the second magnetic stator substrate 201b.

[0084] For example, in the embodiment of the present disclosure, as shown in Fig. 15A, in the above case (2), the distance between the upper surface of the second flange 101b and the upper surface of the protruding portion 2012 of the second magnetic stator substrate 201b is H, H≦4 / 5Ha, where Ha is the size of the second flange 101b in the axial direction Z of the stator, in this case, the stator 20 can stably control the rotor 10, and the protruding portion 2012 of the second magnetic stator substrate 201b and the magnetic levitation coil 2012c can stably ensure that the rotor 10 applies a downward force in the axial direction Z of the stator 20 to the rotor 10, and the rotor 10 can stably rotate and levitate. Furthermore, H≦1 / 5Ha, and the protruding portion 2012 of the second magnetic stator substrate 201b and the magnetic levitation coil 2012c can more stably ensure that the protruding portion 2012 of the second magnetic stator substrate 201b and the magnetic levitation coil 2012c can more stably ensure that the rotor 10 applies a downward force in the axial direction Z of the stator 20 to the rotor 10, and the rotor 10 can stably rotate and levitate.

[0085] For example, in the embodiment of the present disclosure, as shown in Figures 11A and 15A, the radial distance of the stator 20 between each of the at least three magnetic stator substrates 201 and the corresponding flange 101 is L, and the size of each of the at least two gaps 201' in the axial direction Z of the stator 20 is at least three times L, so that the stator 20 can more stably control the rotor 10. For example, more preferably, the size of each of the at least two gaps 201' in the axial direction Z of the stator 20 is at least five times L. For example, more preferably, the size of each of the at least two gaps 201' in the axial direction Z of the stator 20 is at least ten times L. For example, the radial direction of the stator 20 is perpendicular to the axial direction Z of the stator 20.

[0086] For example, in an embodiment of the present disclosure, as shown in Figures 11A and 15A, the radial distance of the stator 20 between each of the at least three magnetic stator substrates 201 and the corresponding flange 101 is L, where L < Ha, and Ha is the size of the flange 101 in the axial direction Z of the stator 20, so that the stator 20 can control the rotor 10 more stably. Even more, for example, L < 1 / 2Ha.

[0087] 9E is a perspective schematic diagram 2 of a magnetic stator substrate of a magnetic levitation device according to an embodiment of the present disclosure, and FIG. 9F is a perspective schematic diagram 1 of a magnetic rotating coil of a magnetic levitation device according to an embodiment of the present disclosure. For example, as shown in FIG. 2, FIG. 6, and FIG. 9E-FIG. 9F, in a magnetic levitation device according to an embodiment of the present disclosure, at least one magnetic stator substrate 201 of at least three magnetic stator substrates 201 includes a plurality of teeth 2013, the plurality of teeth 2013 is connected to a substrate body 2011, the plurality of teeth 2013 protrude from a permanent magnet 202 and a magnetizer 203 toward the rotor 10, and a magnetic rotating coil 2013c is wound around each tooth 2013. For example, a current flows through the magnetic rotating coil 2013c. The rotor 10 rotates under the action of the teeth 2013 and the magnetic rotating coil 2013c wound therearound. For example, the magnitude of the current in the magnetic rotating coil 2013c can be adjusted, so that the number of rotations of the rotor 10 can be adjusted, which enhances the flexibility of the operation of the magnetic levitation device according to the embodiment of the present disclosure. The at least one magnetic stator substrate 201 including the teeth 2013 and the magnetic rotating coil 2013c has both the functions of magnetic rotation and magnetic levitation. For example, the magnetic levitation coil 2012c is farther from the rotor 10 than the magnetic rotating coil 2013c. The circumferential pitch of the magnetic levitation coil 2012c is larger than the circumferential pitch of the magnetic rotating coil 2012c, so that the magnetic levitation coil 2012c is placed farther from the rotor 10 than the magnetic rotating coil 2013c, thereby avoiding the influence of the magnetic rotating coil 2013c on the magnetic field distribution of the magnetic levitation coil 2012c. For example, the teeth 2013 are placed on the end of the protrusion 2012 facing the rotor 10.

[0088] For example, the at least one magnetic stator substrate 201 including the teeth 2013 and the magnetic rotation coil 2013c may be the first magnetic stator substrate 201a, the second magnetic stator substrate 201b, or may not be the first magnetic stator substrate 201a or the second magnetic stator substrate 201b, and the embodiment of the present disclosure is not limited thereto. For example, the magnetic levitation device according to the embodiment of the present disclosure includes another magnetic stator substrate in addition to the at least three magnetic stator substrates, and the other magnetic stator substrate does not include the protrusion 2012 and the magnetic levitation coil 2012c, but only includes the teeth 2013 and the magnetic rotation coil 2013c, so that the other magnetic stator substrate only has a magnetic rotation function.

[0089] For example, in an embodiment of the present disclosure, there is one magnetic stator substrate 201 including a tooth portion 2013 and a magnetic rotating coil 2013c, and the magnetic stator substrate 201 is located in the topmost or bottommost layer in the axial direction Z of the stator 20 among the at least three magnetic stator substrates 201, in which case processing of the stator 20 is facilitated.

[0090] For example, in an embodiment of the present disclosure, there is one magnetic stator substrate 201 including a tooth portion 2013 and a magnetic rotating coil 2013c, and among the at least three magnetic stator substrates 201, the magnetic stator substrate 201 is located in an intermediate layer in the axial direction Z of the stator 20. In this case, the rotational force applied by the stator 20 to the rotor 10 is located approximately in the middle of the rotor 10 in the axial direction Z of the stator 20, thereby making the rotation of the rotor 10 more stable.

[0091] For example, in an embodiment of the present disclosure, at least one magnetic stator substrate 201 including teeth 2013 and magnetic rotating coils 2013c is an even number and is arranged symmetrically with respect to the midline of the stator 20 in the axial direction Z of the stator 20, in which case the even number of magnetic stator substrates 201 including teeth 2013 and magnetic rotating coils 2013c are arranged symmetrically with respect to the midline of the stator 20 in the axial direction Z of the stator 20, thereby making the rotation of the rotor 10 more stable. For example, in an embodiment of the present disclosure, at least one magnetic stator substrate 201 including the teeth portion 2013 and the magnetic rotating coil 2013c is an odd number greater than 1, one magnetic stator substrate 201 including the teeth portion 2013 and the magnetic rotating coil 2013c is a magnetic stator substrate 201 located in the middle layer in the axial direction Z of the stator 20 among the at least three magnetic stator substrates 201, and the remaining magnetic stator substrates 201 including the teeth portion 2013 and the magnetic rotating coil 2013c are installed symmetrically with respect to the midline of the stator 20 in the axial direction Z of the stator 20, thereby making the rotation of the rotor 10 more stable.

[0092] For example, as shown in Figures 2, 6 and 9A, in an embodiment of the present disclosure, the rotor 10 includes a rotor body 100 and at least three flanges 101 protruding from the rotor body 100 to the stator 20, the at least three magnetic stator substrates 201 and the at least three flanges 101 are equal in number and correspond one-to-one to each other, and the flanges 101 corresponding to the at least one magnetic stator substrate 201 have a plurality of teeth 103 at the end facing the at least one magnetic stator substrate 201, in this case, the teeth 2013 and the magnetic rotating coil 2013c can better apply a rotational force to the rotor 10 to rotate the rotor 10 efficiently.

[0093] An embodiment of the present disclosure further provides a semiconductor processing device including the magnetic levitation device described above.

[0094] In the field of semiconductor processing, semiconductor wafers or other semiconductor components undergo semiconductor processes such as rapid thermal processing (RTP), vapor deposition (e.g., metal organic chemical vapor deposition (MOCVD)), sputtering, cleaning, photoresist coating, etching, metrology, etc. In these semiconductor processes, fragile silicon wafers or other semiconductor material wafers or other semiconductor components need to be processed under a controlled ultra-clean atmosphere, such as vacuum, inert gas, or process gas. Micro-contaminants in the air are a serious problem because they can be deposited directly on the semiconductor wafers or other semiconductor components being processed or deposited on the wafers or other semiconductor components with the process gas. Micro-particles on the wafers or other semiconductor components cause contamination of the wafers or other semiconductor components, and semiconductor products made of the contaminated wafers or other semiconductor components are defective. Therefore, the cleanliness of the wafers or other semiconductor components being processed is directly related to the yield, which in turn affects the cost of the final product. For example, during semiconductor processing, a vacuum or inert gas-filled channel is used to connect multiple chambers, which may be vacuum chambers or inert gas-filled chambers, and are dedicated to a specific semiconductor process. The magnetic levitation device according to the embodiment of the present disclosure is highly suitable for semiconductor processing equipment because there is no contact or mechanical friction between the rotor and the stator. For example, the magnetic levitation device according to the embodiment of the present disclosure is used as a support device for semiconductor processing equipment. For example, the rotor of the magnetic levitation device according to the embodiment of the present disclosure supports a rotatable platform, which in turn supports a semiconductor wafer or other semiconductor member to be processed. As described above, the magnetic levitation device according to the embodiment of the present disclosure can provide sufficient axial support force, in which case the magnetic levitation device according to the embodiment of the present disclosure can support a rotating platform with a large mass, ensuring stable and uniform rotation of the rotating platform, thereby effectively ensuring the yield of semiconductor processing.

[0095] The above describes exemplary embodiments of the present invention, but does not limit the protection scope of the present invention, which is defined in the appended claims.

Claims

1. A magnetic levitation device, comprising: A rotor; a stator disposed around the rotor or the rotor disposed around the stator; the stator includes at least three magnetic stator substrates, permanent magnets, and magnetizers, the at least three magnetic stator substrates being spaced apart from one another in an axial direction of the stator to define at least two gaps in the axial direction of the stator, the permanent magnets and the magnetizers being alternately arranged within the at least two gaps in the axial direction of the stator; Each of the at least three magnetic stator substrates includes a substrate body and a protruding portion connected to the substrate body, the protruding portion protruding from the permanent magnet and the magnetizer toward the rotor, and a magnetic levitation coil is wound around the protruding portion; A magnetic levitation device, wherein the at least three magnetic stator substrates include a first magnetic stator substrate, a protrusion and a magnetic levitation coil of the first magnetic stator substrate apply an upward force to the rotor in the axial direction of the stator, and a ratio of the number of the first magnetic stator substrates to the total number of the at least three magnetic stator substrates is 50% or more.

2. 2. The magnetic levitation device of claim 1, wherein the at least three magnetic stator substrates further include a second magnetic stator substrate, a protrusion and a magnetic levitation coil of the second magnetic stator substrate apply a downward force to the rotor in the axial direction of the stator, and the number of the first magnetic stator substrates is equal to or greater than the number of the second magnetic stator substrates.

3. The number of the at least three magnetic stator substrates is four or more; 2. The magnetic levitation device according to claim 1, wherein the magnetic properties of the surfaces of two adjacent permanent magnets facing each other in the axial direction of the stator are the same.

4. the rotor includes a rotor body and at least three flanges projecting from the rotor body toward the stator; The at least three magnetic stator substrates and the at least three flanges are equal in number and correspond one-to-one to each other; 3. The magnetic levitation device of claim 2, wherein the at least three flanges include a first flange corresponding to the first magnetic stator substrate, and a midline of the protrusion of the first magnetic stator substrate in the axial direction of the stator is higher than a midline of the first flange in the axial direction of the stator.

5. The axial center line of the protruding portion of the first magnetic stator substrate is higher than the axial center line of the first flange, (1) In the axial direction of the stator, an upper surface of the protruding portion of the first magnetic stator substrate is higher than an upper surface of the first flange, and a lower surface of the protruding portion of the first magnetic stator substrate is higher than an upper surface of the first flange or is at the same height as the upper surface of the first flange. (2) In the axial direction of the stator, an upper surface of the protruding portion of the first magnetic stator substrate is higher than an upper surface of the first flange or is at the same height as the upper surface of the first flange, a lower surface of the first flange is lower than the lower surface of the protruding portion of the first magnetic stator substrate, and the upper surface of the first flange is higher than the lower surface of the protruding portion of the first magnetic stator substrate. (3) In the axial direction of the stator, an upper surface of the protruding portion of the first magnetic stator substrate is higher than an upper surface of the first flange, and a lower surface of the first flange is higher than a lower surface of the protruding portion of the first magnetic stator substrate or is at the same height as the lower surface of the protruding portion of the first magnetic stator substrate; and (4) A magnetic levitation device as described in claim 4, including any one of the following cases: in the axial direction of the stator, the upper surface of the protrusion of the first magnetic stator substrate is at the same height as the upper surface of the first flange or lower than the upper surface of the first flange, and the lower surface of the protrusion of the first magnetic stator substrate is higher than the lower surface of the first flange.

6. 6. The magnetic levitation device of claim 5, wherein in the case (2), the distance between the upper surface of the protrusion of the first magnetic stator substrate and the upper surface of the first flange is H, H≦4 / 5Ha, and Ha is the size of the first flange in the axial direction of the stator.

7. 5. The magnetic levitation device of claim 4, wherein the at least three flanges include a second flange corresponding to the second magnetic stator substrate, and a midline of the second flange in the axial direction of the stator is higher than a midline of the protrusion of the second magnetic stator substrate in the axial direction of the stator.

8. The axial centerline of the second flange is higher than the axial centerline of the protruding portion of the second magnetic stator substrate, (1) In the axial direction of the stator, an upper surface of the second flange is higher than an upper surface of the protruding portion of the second magnetic stator substrate, and a lower surface of the second flange is higher than the upper surface of the protruding portion of the second magnetic stator substrate or is at the same height as the upper surface of the protruding portion of the second magnetic stator substrate, (2) In the axial direction of the stator, an upper surface of the second flange is higher than an upper surface of the protruding portion of the second magnetic stator substrate or is at the same height as the upper surface of the protruding portion of the second magnetic stator substrate, a lower surface of the protruding portion of the second magnetic stator substrate is lower than a lower surface of the second flange, and a lower surface of the second flange is lower than an upper surface of the protruding portion of the second magnetic stator substrate. (3) In the axial direction of the stator, an upper surface of the second flange is higher than an upper surface of the protruding portion of the second magnetic stator substrate, and a lower surface of the protruding portion of the second magnetic stator substrate is higher than a lower surface of the second flange or is at the same height as the lower surface of the second flange; and (4) A magnetic levitation device as described in claim 7, including any one of the following cases: in the axial direction of the stator, the upper surface of the second flange is at the same height as the upper surface of the protruding portion of the second magnetic stator substrate or is lower than the upper surface of the protruding portion of the second magnetic stator substrate, and the lower surface of the second flange is higher than the lower surface of the protruding portion of the second magnetic stator substrate.

9. 9. The magnetic levitation device of claim 8, wherein in the case (2), the distance between the upper surface of the second flange and the upper surface of the protrusion of the second magnetic stator substrate is H, H≦4 / 5Ha, and Ha is the size of the second flange in the axial direction of the stator.

10. a radial distance between each of the at least three magnetic stator substrates and its corresponding flange is L; 5. The magnetic levitation apparatus of claim 4, wherein the size of each of the at least two gaps in the axial direction of the stator is at least three times the L.

11. The magnetic levitation device of claim 4, wherein the radial distance between each of the at least three magnetic stator substrates and its corresponding flange is L, L≦Ha, and Ha is the size of the flange in the axial direction of the stator.

12. At least one of the at least three magnetic stator substrates includes a plurality of teeth, the plurality of teeth being connected to the substrate body, the plurality of teeth protruding from the permanent magnet and the magnetizer toward the rotor, and a magnetic rotating coil being wound around each of the teeth; the magnetic levitation coil is spaced apart from the rotor than the magnetic rotating coil, The magnetic levitation device according to claim 1 , wherein the teeth are disposed on an end of the protrusion facing the rotor.

13. the at least one magnetic stator substrate is one, and is a magnetic stator substrate located in an uppermost layer or a lowermost layer in an axial direction of the stator among the at least three magnetic stator substrates; 13. The magnetic levitation device according to claim 12, wherein the at least one magnetic stator substrate is one, and is a magnetic stator substrate located in an intermediate layer in the axial direction of the stator among the at least three magnetic stator substrates.

14. the at least one magnetic stator substrate is an even number and is symmetrically disposed about a midline of the stator in an axial direction of the stator; or 13. The magnetic levitation device of claim 12, wherein the at least one magnetic stator substrate is an odd number greater than one, one magnetic stator substrate is a magnetic stator substrate located in an intermediate layer in the axial direction of the stator among the at least three magnetic stator substrates, and the remaining magnetic stator substrates are installed symmetrically with respect to a midline of the stator in the axial direction of the stator.

15. the rotor includes a rotor body and at least three flanges projecting from the rotor body toward the stator; The at least three magnetic stator substrates and the at least three flanges are equal in number and correspond one-to-one to each other; 13. The magnetic levitation device according to claim 12, wherein an end of a flange corresponding to the at least one magnetic stator substrate facing the at least one magnetic stator substrate has a plurality of teeth.

16. 3. The magnetic levitation device according to claim 2, wherein the number of the first magnetic stator substrates is at least two, and the number of the second magnetic stator substrates is at least one.

17. The magnetic levitation device according to claim 1 , wherein the permanent magnet is installed in the odd-numbered gap from the top of at least two gaps in the axial direction of the stator, and the magnetizer is installed in the even-numbered gap from the top.

18. 2. The magnetic levitation device of claim 1, wherein the permanent magnet is in direct contact with the adjacent magnetic stator substrate, or the permanent magnet is spaced apart from the adjacent magnetic stator substrate, or a magnetized sheet is inserted between the permanent magnet and the adjacent magnetic stator substrate.

19. 2. The magnetic levitation device of claim 1, wherein the magnetizer is in direct contact with the adjacent magnetic stator substrate, or the magnetizer is spaced apart from the adjacent magnetic stator substrate, or a magnetized sheet is inserted between the magnetizer and the adjacent magnetic stator substrate.

20. 13. A semiconductor processing device comprising the magnetic levitation device according to claim 1.

Images