Gate valve and driving method

Abstract

To provide a gate valve and a driving method capable of reducing gas leakage.SOLUTION: A gate valve for opening and closing a first opening in a vacuum treatment device having a first chamber equipped with the first opening includes a valve element for opening and closing the first opening, a driving unit for moving the valve element so that the valve element takes at least a close position at which the valve element closes the first opening and an open position at which the valve element opens the first opening, a first gas line and a second gas line, and a first selector valve for connecting one of the first gas line and the second gas line to the driving unit. The driving unit moves the valve element from the open position to the close position by pressure of gas supplied from the first gas line or the second gas line, and holds the valve element at the close position by the pressure of the gas supplied from the second gas line.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] SUMMARY OF THE DISCLOSURE Exemplary embodiments of the present disclosure relate to a gate valve and an actuation method. [Background technology]

[0002] 2. Description of the Related Art Patent Document 1 describes a gate valve in which a valve element moves between a closed position and an open position. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2018-10986 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a gate valve and a driving method capable of reducing gas leakage. [Means for solving the problem]

[0005] In one exemplary embodiment of the present disclosure, a gate valve for opening and closing a first opening in a vacuum processing apparatus having a first chamber with the first opening is provided. The gate valve includes a valve body for opening and closing the first opening, a drive unit for moving the valve body so that the valve body takes at least a closed position where the valve body closes the first opening and an open position where the valve body opens the first opening, a first gas line connected to the drive unit, and a second gas line connected to the drive unit, and the drive unit moves the valve body from the open position to the closed position by the pressure of gas supplied from the first gas line or the second gas line, and holds the valve body in the closed position by the pressure of gas supplied from the second gas line. Effect of the Invention

[0006] According to one exemplary embodiment of the present disclosure, it is possible to provide a gate valve and a driving method capable of reducing gas leakage. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a diagram illustrating an example of a substrate processing system PS. [Diagram 2] 1 is a diagram illustrating an example of the configuration of a gate valve GV. FIG. [Diagram 3] 1A and 1B are diagrams each showing an example of a state of a gate valve GV. [Figure 4] 1A and 1B are diagrams each showing an example of a state of a gate valve GV. [Diagram 5] 1A and 1B are diagrams each showing an example of a state of a gate valve GV. [Figure 6] 1 is a diagram illustrating an example of the configuration of a gate valve GV. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Each embodiment of the present disclosure will be described below.

[0009] In one exemplary embodiment, a gate valve for opening and closing a first opening in a vacuum processing apparatus having a first chamber with the first opening is provided. The gate valve includes a valve body for opening and closing the first opening, a drive unit for moving the valve body so that the valve body takes at least a closed position where the valve body closes the first opening and an open position where the valve body opens the first opening, a first gas line and a second gas line, and a first switching valve connecting one of the first gas line and the second gas line to the drive unit, and the drive unit moves the valve body from the open position to the closed position by the pressure of gas supplied from the first gas line or the second gas line, and holds the valve body in the closed position by the pressure of gas supplied from the second gas line.

[0010] In one exemplary embodiment, the first switching valve has a normally closed valve that switches whether or not gas is supplied from the first gas line to the drive unit, and a normally open valve that switches whether or not gas is supplied from the second gas line to the drive unit.

[0011] In one exemplary embodiment, the actuator includes an air cylinder that moves a valve body, and the first switching valve switches between connecting the first gas line to the air cylinder and connecting the second gas line to the air cylinder.

[0012] In one exemplary embodiment, the valve further includes a third gas line connected to the actuator, the actuator holding the valve body in an open position by the pressure of gas supplied from the third gas line.

[0013] In one exemplary embodiment, a second switching valve is provided to switch between supplying gas to the first gas line and supplying gas to the third gas line.

[0014] In one exemplary embodiment, the gas supplied to the first gas line, the gas supplied to the second gas line, and the gas supplied to the third gas line are compressed air.

[0015] In one exemplary embodiment, a method for driving a gate valve for opening and closing a first opening in a vacuum processing apparatus having a first chamber in which the first opening is provided is provided. The gate valve includes a valve body for opening and closing the first opening, a driving unit for moving the valve body so that the valve body takes at least a closed position where the valve body closes the first opening and an open position where the valve body opens the first opening, a first gas line and a second gas line, a first switching valve connecting one of the first gas line and the second gas line to the driving unit, and a control unit. The driving method includes a step of moving the valve body from the open position to the closed position by the driving unit using the pressure of gas supplied from the first gas line or the second gas line, and a step of holding the valve body in the closed position by the pressure of gas supplied from the second gas line.

[0016] Hereinafter, each embodiment of the present disclosure will be described in detail with reference to the drawings. In each drawing, the same or similar elements are given the same reference numerals, and duplicated explanations will be omitted. Unless otherwise specified, the positional relationship such as up, down, left, right, etc. will be described based on the positional relationship shown in the drawing. The dimensional ratio of the drawings does not indicate the actual ratio, and the actual ratio is not limited to the illustrated ratio.

[0017] <Configuration of the Substrate Processing System PS> 1 is a schematic diagram of a substrate processing system PS according to an exemplary embodiment. The substrate processing system PS includes substrate processing modules PM1 to PM6 (hereinafter also collectively referred to as "substrate processing modules PM"), a transfer module TM, load lock modules LLM1 and LLM2 (hereinafter also collectively referred to as "load lock modules LLM"), a loader module LM, and load ports LP1 to LP3 (hereinafter also collectively referred to as "load ports LP"). A controller CT controls each component of the substrate processing system PS to perform a predetermined process on a substrate W.

[0018] The substrate processing module PM performs processes such as etching, trimming, film formation, annealing, doping, lithography, cleaning, and ashing on the substrate W. A part of the substrate processing module PM may be a measurement module, which may measure the thickness of a layer formed on the substrate W, the dimensions of a pattern formed on the substrate W, and the like.

[0019] The transfer module TM includes a transfer device 22 for transferring the substrate W. The transfer module TM transfers the substrate W between the substrate processing modules PM or between the substrate processing module PM and the load lock module LLM. The substrate processing module PM and the load lock module LLM are disposed adjacent to the transfer module TM. The transfer module TM, the substrate processing module PM, and the load lock module LLM are spatially isolated or connected by an openable and closable gate valve GV. In this embodiment, the transfer device 22 (see FIG. 2) included in the transfer module TM transfers the substrate W from the internal space 20s (see FIG. 2) of the chamber 20 of the transfer module TM to the internal space 10s of the chamber 10 (see FIG. 2) of the substrate processing module PM and places the substrate W on the substrate support 11. The transfer device 22 transfers the substrate W from the internal space 10s of the substrate processing module PM to the internal space 20s of the transfer module TM. The transfer device 22 moves the substrate W between the transfer module TM and the substrate processing module PM through an opening 12 formed in the chamber 10 of the substrate processing module PM. As an example, the transport device 22 may be a handler that transports substrates such as silicon wafers.

[0020] The load lock modules LLM1 and LLM2 are provided between the transfer module TM and the loader module LM. The load lock module LLM can switch its internal pressure between atmospheric pressure and vacuum. The load lock module LLM transfers the substrate W from the loader module LM, which is at atmospheric pressure, to the transfer module TM, which is at vacuum, and also transfers the substrate W from the transfer module TM, which is at vacuum, to the loader module LM, which is at atmospheric pressure.

[0021] The loader module LM has a transport device for transporting the substrate W, and transports the substrate W between the load lock module LLM and the load port LP. Inside the load port LP, for example, a FOUP (Front Opening Unified Pod) capable of storing 25 substrates W or an empty FOUP can be placed. The loader module LM removes the substrate W from the FOUP in the load port LP and transports it to the load lock module LLM. The loader module LM also removes the substrate W from the load lock module LLM and transports it to the FOUP in the load port LP.

[0022] The controller CT controls each component of the substrate processing system PS to perform a predetermined process on the substrate W. The controller CT stores a recipe in which the process procedure, process conditions, transport conditions, etc. are set. The controller CT controls each component of the substrate processing system PS to perform a predetermined process on the substrate W according to the recipe. The controller CT may directly or indirectly control each component shown in Figure 2. The controller CT may also electrically or mechanically control each component shown in Figure 2. Mechanical control includes controlling each component shown in Figure 2 using gas.

[0023] <Configuration of GV Gate Valve> 2 is a diagram illustrating a schematic configuration of a gate valve GV according to an exemplary embodiment. The gate valve GV includes a valve body 30, a drive unit 40, switching valves 50, 52, and 56, and gas lines 60, 62, 64, 66, and 68. The switching valve 50 is an example of a second switching valve. The switching valve 52 is an example of a first switching valve. The gas lines 62, 64, and 66 are examples of a first gas line, a second gas line, and a third gas line, respectively.

[0024] The valve body 30 is configured to spatially isolate or connect the internal space 10s of the substrate processing module PM and the internal space 20s of the transfer module TM. As an example, the valve body 30 is accommodated in a chamber 34 connected to the chamber 10 of the substrate processing module PM and the chamber 20 of the transfer module TM. The opening 12 is provided so as to communicate from the chamber 10 to the chamber 34. The cross-sectional views of the chambers 10, 20, and 34 in FIG. 2 are schematic views of parts of the AA' cross section in FIG. 1.

[0025] The valve body 30 is provided with an O-ring 32. When the valve body 30 presses the O-ring 32 against the inner wall of the chamber 34 around the opening 12, the internal space 10s of the substrate processing module PM and the internal space 20s of the transfer module TM are spatially isolated from each other. When the O-ring 32 moves away from the inner wall of the chamber 34, the internal space 10s of the substrate processing module PM and the internal space 20s of the transfer module TM are spatially connected to each other.

[0026] The drive unit 40 is configured to move the valve body 30. As an example, the drive unit 40 moves the valve body 30 in the internal space of the chamber 34 in the x1 and x2 directions and the z1 and z2 directions in Fig. 2 (hereinafter, the x1 and x2 directions are collectively referred to as the "x direction", and the z1 and z2 directions are collectively referred to as the "z direction").

[0027] The driving unit 40 has cylinders 41 and 45. The driving unit 40 has a piston 42 inside the cylinder 41. The piston 42 is provided with a gasket 43. The driving unit 40 also has a shaft 44. The piston 42 is connected to one end of the shaft 44, and the valve body 30 is connected to the other end of the shaft 44. When the piston 42 moves in the z direction inside the cylinder 41, the valve body 30 moves in the z direction inside the chamber 34.

[0028] The driving unit 40 also has a piston 46 inside the cylinder 45. The piston 46 is provided with a gasket 47. The driving unit 40 also has a shaft 48. The piston 46 is connected to one end of the shaft 48, and the shaft 44 is connected to the other end of the shaft 48. When the piston 46 moves in the x direction inside the cylinder 45, the shaft 44 moves in the x direction, and the valve body 30 moves in the x direction inside the chamber 34.

[0029] The switching valve 50 has an intake port and an exhaust port. A gas line 60 is connected to the intake port of the switching valve 50. Gas is supplied from a gas supply source 70 to the intake port of the switching valve 50 through a valve 80 and the gas line 60. The switching valve 50 connects one of the gas lines 62 and 66 to the intake port to supply gas from the gas supply source 70 to the one, and connects the other to the exhaust port to exhaust the gas flowing through the other. As an example, the switching valve 50 may be a solenoid valve. As an example, the gas supplied from the gas supply source 70 may be compressed air.

[0030] The switching valve 52 is a valve that connects one of the gas lines 62 and 64 to a gas line 68. The gas line 62 is connected to an intake port or an exhaust port of the switching valve 50 depending on the state of the switching valve 50. Furthermore, gas is supplied to the gas line 64 from a gas supply source 72 via a valve 82. The valve 82 may be controlled so that gas is constantly supplied from the gas supply source 72 to the gas line 64 when the switching valve 52 is connecting the gas line 64 to the gas line 68.

[0031] As an example, the switching valve 52 has a pilot port 54. The switching valve 52 switches the state of the switching valve 52 depending on whether gas is supplied to the pilot port 54 or not. As an example, the switching valve 52 connects the gas line 62 to the gas line 68 when gas is supplied to the pilot port 54, and connects the gas line 64 to the gas line 68 when gas is not supplied to the pilot port 54. Also, as an example, the pilot port 54 may be connected to the gas line 66. That is, the switching valve 52 may connect the gas line 62 to the gas line 68 when gas is supplied from the gas supply source 70 to the gas line 66, and connect the gas line 64 to the gas line 68 when the gas line 66 is connected to the exhaust port of the switching valve 50.

[0032] As an example, the gas supply source 70 may be a gas used for the operation of the transfer module TM. When the gas supply source 70 is a gas used for the operation of the transfer module TM, the valve 80 may be closed during maintenance of the transfer module TM. That is, during maintenance of the transfer module TM, the gas is not supplied to the transfer module TM and the pilot port 54. Therefore, the switching valve 52 connects the gas line 64 to the gas line 68. As a result, the gas is supplied from the gas supply source 72 to the drive unit 40.

[0033] The gas line 68 is connected to a branching section 76 via a valve 88. The branching section 76 branches the gas line 68 and connects it to the cylinders 41 and 45. When gas is supplied to the gas line 68, the branching section 76 branches the gas supplied to the gas line 68 and supplies it to the cylinders 41 and 45. The branching section 76 adjusts the pressure and / or flow rate of the gas supplied to the gas line 68 and supplies the gas to the cylinder 41. In addition, the branching section 76 adjusts the pressure and / or flow rate of the gas supplied to the gas line 68 and supplies the gas to the cylinder 45.

[0034] The switching valve 56 is a valve that switches whether or not the gas line 66 is connected to the driving unit 40. The switching valve 56 has a pilot port 58. The switching valve 56 is configured to connect the gas line 66 to the driving unit 40 when gas is supplied to the pilot port 58, and not to connect the gas line 66 to the driving unit 40 when gas is not supplied to the pilot port 58.

[0035] A gas may be supplied to the pilot port 58 from a gas supply source 74 via a valve 84. As an example, the gas supply source 74 may be a gas used for the operation of the substrate processing module PM. When the gas supply source 74 is a gas used for the operation of the substrate processing module PM, the valve 84 may be closed during maintenance of the substrate processing module PM. That is, during maintenance of the substrate processing module PM, the gas is not supplied to the substrate processing module PM and the switching valve 56. Therefore, the switching valve 56 is closed, and the gas line 66 is not connected to the drive unit 40.

[0036] The gas line 66 is connected to the drive unit 40 via a branch unit 78. The branch unit 78 branches the gas line 66 and connects it to the cylinders 41 and 45. When gas is supplied to the gas line 66, the branch unit 78 branches the gas supplied to the gas line 66 and supplies it to the cylinders 41 and 45. The branch unit 78 adjusts the pressure and / or flow rate of the gas supplied to the gas line 66 and supplies the gas to the cylinder 41. In addition, the branch unit 78 adjusts the pressure and / or flow rate of the gas supplied to the gas line 66 and supplies the gas to the cylinder 45.

[0037] Next, an example of the operation of the gate valve GV according to this embodiment will be described with reference to FIGS.

[0038] <Maintaining the valve body 30 in the open position> 2 is a diagram showing an example of a state of the gate valve GV when the valve body 30 is in the open position. When the valve body 30 is held in the open position as shown in FIG. 2, in the switching valve 50, the gas line 66 is connected to the inlet port of the switching valve 50, and the gas line 62 is connected to the exhaust port. As a result, when gas is supplied from the gas supply source 70 to the gas line 66, gas is supplied from the gas line 66 to the pilot port 54, and the gas line 62 is connected to the gas line 68 by the switching valve 52. As a result, the space in the internal space of the cylinder 41 that is on the z2 direction side of the piston 42, and the space in the internal space of the cylinder 45 that is on the x2 direction side of the piston 46 are connected to the exhaust port of the switching valve 50.

[0039] On the other hand, gas is supplied from the gas supply source 70 via the gas line 66 and the branching portion 78 to a space in the internal space of the cylinder 41 that is closer to the z1 direction than the piston 42, and to a space in the internal space of the cylinder 45 that is closer to the x1 direction than the piston 46. As a result, the piston 42 is pressed in the z2 direction, and the piston 46 is pressed in the x2 direction. Therefore, the valve body 30 is held in the open position shown in FIG. 2.

[0040] It should be noted that when the valve body 30 is in the open position, the position at which the valve body 30 is held is not limited to the position shown in the figure. The valve body 30 may be located at a position where the internal space 10s of the substrate processing module PM and the internal space 20s of the transfer module TM are spatially connected. The valve body 30 may also be located at a position where the transfer device 22 can transfer the substrate W to the substrate support 11 through the opening 12.

[0041] <Moving the valve body 30 from the open position to the closed position> 3 is a diagram showing an example of the state of the gate valve GV when the valve body 30 is moved from the open position to the closed position. When the valve body 30 is moved from the open position to the closed position, in the switching valve 50, the gas line 66 is connected to the exhaust port of the switching valve 50, and the gas line 62 is connected to the intake port. As a result, gas is not supplied from the gas supply source 70 to the pilot port 54, and therefore the gas line 64 is connected to the gas line 68 by the switching valve 52. As a result, gas is supplied from the gas supply source 72 to a space in the internal space of the cylinder 41 that is located on the z2 direction side of the piston 42, and to a space in the internal space of the cylinder 45 that is located on the x2 direction side of the piston 46.

[0042] On the other hand, a space in the internal space of the cylinder 41 that is closer to the z1 direction than the piston 42, and a space in the internal space of the cylinder 45 that is closer to the x1 direction than the piston 46 are connected to the exhaust port via a gas line 66. As a result, the piston 42 is pressed in the z1 direction, and the piston 46 is pressed in the x1 direction. As a result, the valve body 30 moves in the z1 direction and the x1 direction in FIG. 3.

[0043] <Maintaining the valve body 30 in the closed position> FIG. 4 is a diagram showing an example of the state of the gate valve GV when the valve body 30 is in the closed position. After the valve body 30 moves from the open position in the z1 direction and the x1 direction to close the opening 12 as shown in FIG. 4, the switching valves 50 and 52 may continue to take the same state as in FIG. 3. That is, in the switching valve 50, the gas line 66 may be connected to the exhaust port. Also, in the switching valve 52, the gas line 64 may be connected to the gas line 68. As a result, even after the valve body 30 moves to the closed position, gas is supplied from the gas supply source 72 to the cylinders 41 and 45. Therefore, after the valve body 30 moves to the closed position, that is, when the valve body 30 is held in the closed position, the gas supplied from the gas supply source 72 can apply sufficient pressure to the pistons 42 and 46 in the z1 direction and the x1 direction in the cylinders 41 and 45. As a result, the valve body 30 is pressed against the inner wall of the chamber 34, so that the internal space 10s of the substrate processing module PM and the internal space 20s of the transfer module TM can be spatially isolated from each other.

[0044] According to the present embodiment, when the valve element 30 is held in the closed position, the valve element 30 is pressed against the inner wall of the chamber 34 while maintaining a predetermined pressure by the gas supplied from the gas supply source 72. This makes it possible to reduce gas leakage from the internal space 10s to the internal space 20s even if the pressure in the internal space 10s of the substrate processing module PM is higher than the pressure in the internal space 20s of the transfer module TM.

[0045] <Moving the valve body 30 from the closed position to the open position> 5 is a diagram showing an example of the state of the gate valve GV when the valve body 30 is moved from the closed position to the open position. When the valve body 30 is moved from the closed position to the open position, in the switching valve 50, the gas line 66 is connected to the inlet port of the switching valve 50, and the gas line 62 is connected to the exhaust port. As a result, when gas is supplied from the gas supply source 70 to the gas line 66, gas is supplied from the gas line 66 to the pilot port 54, and the gas line 62 is connected to the gas line 68 by the switching valve 52. As a result, the space on the z2 direction side of the piston 42 in the internal space of the cylinder 41 and the space on the x2 direction side of the piston 46 in the internal space of the cylinder 45 are connected to the exhaust port of the switching valve 50.

[0046] On the other hand, gas is supplied from the gas supply source 70 via the gas line 66 and the branching portion 78 to a space in the internal space of the cylinder 41 that is closer to the z1 direction than the piston 42, and to a space in the internal space of the cylinder 45 that is closer to the x1 direction than the piston 46. As a result, the piston 42 is pressed in the z2 direction, and the piston 46 is pressed in the x2 direction. As a result, the valve body 30 moves in the z2 direction and the x2 direction in Fig. 5. When the valve body 30 moves from the closed position in the z2 direction and the x2 direction to reach the open position, the valve body 30 is held in the open position as shown in Fig. 2.

[0047] Fig. 6 is a diagram showing a schematic configuration of a gate valve GV according to another exemplary embodiment. Fig. 6 also shows an example of a state of the gate valve GV when the valve body 30 is in an open position. The gate valve GV shown in Fig. 6 has switching valves 52-1 and 52-2 instead of the switching valve 50 in the gate valve GV shown in Figs. 2 to 5.

[0048] The switching valve 52-1 is a valve that switches whether the gas line 62 is connected to the gas line 68. The switching valve 52-2 is a valve that switches whether the gas line 64 is connected to the gas line 68. The switching valve 52-1 has a pilot port 54-1. The switching valve 52-2 has a pilot port 54-2. Both of the pilot ports 54-1 and 54-2 are connected to the gas line 66.

[0049] The switching valve 52-1 is a normally closed valve. On the other hand, the switching valve 52-2 is a normally open valve. That is, as shown in FIG. 6, when gas is supplied from the gas supply source 70 to the pilot ports 54-1 and 54-2 through the gas line 66, the switching valve 52-1 connects the gas line 62 to the gas line 68, while the switching valve 52-2 does not connect the gas line 64 to the gas line 68. On the other hand, when gas is not supplied from the gas supply source 70 to the pilot ports 54-1 and 54-2 through the gas line 66, the switching valve 52-1 does not connect the gas line 62 to the gas line 68, while the switching valve 52-2 connects the gas line 64 to the gas line 68. That is, the switching valves 52-1 and 52-2 are configured to connect one of the gas lines 62 and 64 to the gas line 68.

[0050] As a result, the gate valve GV shown in Figure 6, like the gate valve GV shown in Figures 2 to 5, can move the valve body 30 from an open position to a closed position and hold the valve body 30 in the closed position, and can also move the valve body 30 from a closed position to an open position and hold the valve body 30 in the open position.

[0051] According to the embodiment described above, the gate valve GV can hold the valve body 30 in the closed position by using a gas (for example, a gas supplied from the gas supply source 72) that can be controlled independently of the gas used in the operation of the substrate processing module PM and / or the gas used in the operation of the transfer module TM. This makes it possible to provide a gate valve that reduces leakage between the substrate processing module PM and the transfer module TM even during maintenance of the substrate processing module PM and / or the transfer module TM.

[0052] The above embodiments have been described for purposes of illustration and various modifications may be made without departing from the scope and spirit of the disclosure. [Explanation of symbols]

[0053] 10...chamber, 10s...internal space, 12...opening, 20...chamber, 20s...internal space, 22...transfer device, 30...valve body, 32...O-ring, 34...chamber, 40...drive unit, 41, 45...cylinder, 42, 46...piston, 43, 47...gasket, 44, 48...shaft, 50, 52, 52-1, 52-2...switching valve, 54, 54-1, 54-2...pilot port, 56...switching valve, 58...pilot port, 60, 62, 64, 66, 68...gas line, 70, 72, 74...gas supply source, 76, 78...branching unit, 80, 82, 84, 88...valve, CT...control unit, GV...gate valve, PM...substrate processing module, PS...substrate processing system, TM...transfer module

Claims

1. A gate valve for opening and closing a first opening in a vacuum processing apparatus having a first chamber provided with the first opening, a valve body for opening and closing the first opening; a drive unit that moves the valve body so that the valve body takes at least a closed position where the valve body closes the first opening and an open position where the valve body opens the first opening; a first gas line, a second gas line and a third gas line; a first switching valve that connects one of the first gas line and the second gas line to the driving unit; Equipped with The drive unit is the valve body is moved from the open position to the closed position by the pressure of the gas supplied from the second gas line; holding the valve body in the closed position by the pressure of the gas supplied from the second gas line; The gate valve holds the valve body in the open position by the pressure of the gas supplied from the third gas line.

2. A gate valve as described in claim 1, wherein a gas supply source supplying gas to the second gas line is different from a gas supply source supplying gas to the third gas line.

3. The first switching valve is a normally closed valve that switches between supplying and not supplying gas from the first gas line to the driving unit; a normally open valve that switches whether or not gas is supplied from the second gas line to the driving unit; The gate valve of claim 1 , comprising:

4. the driving unit has an air cylinder that moves the valve body, 4. The gate valve according to claim 3, wherein the first switching valve switches between connecting the first gas line to the air cylinder and connecting the second gas line to the air cylinder.

5. 2. The gate valve according to claim 1, further comprising a second switching valve that switches between supplying gas to the first gas line and supplying gas to the third gas line.

6. 6. The gate valve according to claim 1, wherein the gas supplied to the first gas line, the gas supplied to the second gas line, and the gas supplied to the third gas line are compressed air.

7. A gate valve for opening and closing a first opening in a vacuum processing apparatus having a first chamber with the first opening, a valve body for opening and closing the first opening; a drive unit that moves the valve body so that the valve body takes at least a closed position where the valve body closes the first opening and an open position where the valve body opens the first opening; a first gas line and a second gas line; a first switching valve that connects one of the first gas line and the second gas line to the driving unit; Equipped with The first switching valve is a normally closed valve that switches between supplying and not supplying gas from the first gas line to the driving unit; a normally open valve that switches whether or not gas is supplied from the second gas line to the driving unit, The drive unit is the valve body is moved from the open position to the closed position by the pressure of the gas supplied from the second gas line; The gate valve holds the valve body in the closed position by the pressure of the gas supplied from the second gas line.

8. The drive unit has an air cylinder that moves the valve body, the first switching valve connects the first gas line to the air cylinder; The gate valve according to claim 7 , which switches whether the second gas line is connected to the air cylinder.

9. Further comprising a third gas line connected to the drive unit, 9. The gate valve according to claim 7, wherein the drive unit holds the valve body in the open position by a pressure of gas supplied from a third gas line.

10. The gate valve of claim 9, further comprising a second switching valve that switches between supplying gas to the first gas line and supplying gas to the third gas line.

11. The gate valve of claim 9, wherein a gas supply source supplying gas to the second gas line is different from a gas supply source supplying gas to the third gas line.

12. A gate valve as described in any one of claims 9-11, wherein the gas supplied to the first gas line, the gas supplied to the second gas line, and the gas supplied to the third gas line are compressed air.

13. 1. A method for driving a gate valve that opens and closes a first opening in a vacuum processing apparatus having a first chamber in which the first opening is provided, comprising the steps of: The gate valve is a valve body for opening and closing the first opening; a drive unit that moves the valve body so that the valve body takes at least a closed position where the valve body closes the first opening and an open position where the valve body opens the first opening; a first gas line, a second gas line and a third gas line; a first switching valve that connects one of the first gas line and the second gas line to the driving unit; Equipped with The driving method includes: a step of the actuator moving the valve element from the open position to the closed position by a pressure of the gas supplied from the second gas line; maintaining the valve body in the closed position by pressure of gas supplied from the second gas line; holding the valve body in the open position by pressure of gas supplied from the third gas line; A driving method comprising:

14. A method for driving a gate valve that opens and closes a first opening in a vacuum processing apparatus having a first chamber in which the first opening is provided, comprising: The gate valve is a valve body for opening and closing the first opening; a drive unit that moves the valve body so that the valve body takes at least a closed position where the valve body closes the first opening and an open position where the valve body opens the first opening; a first gas line and a second gas line; a first switching valve that connects one of the first gas line and the second gas line to the driving unit; Equipped with The first switching valve is a normally closed valve that switches between supplying and not supplying gas from the first gas line to the driving unit; a normally open valve that switches whether or not gas is supplied from the second gas line to the driving unit, The driving method includes: a step of the actuator moving the valve element from the open position to the closed position by a pressure of the gas supplied from the second gas line; maintaining the valve body in the closed position by the pressure of gas supplied from the second gas line; A driving method comprising:

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