Laser processing device, wafer processing system, and method for controlling laser processing device

Abstract

To provide a laser processing device, a wafer processing system, and a control method of the laser processing device that can monitor a processing state of a processing groove in real time.SOLUTION: In a laser processing device 10 which forms a processing groove along a street CH by radiating laser light L from a laser optical system 25 to the street, a control device 22 includes an observed image acquisition unit that, while forming a processing groove 9, repeatedly acquires an observed image of a processing point SP of laser light L radiated from the laser optical system 25 to the street CH, a luminance detection unit that, each time the observed image acquisition unit acquires an observed image 36, detects luminance of plasma generated at the processing point by radiating the laser light L on the basis of the observed image 36, a corresponding information acquisition unit that acquires corresponding information indicating correspondence among the luminance, the laser light energy, and the processing state of the processing groove, and a processing state detection unit that, each time the luminance detection unit detects luminance, refers to the corresponding information on the basis of the luminance and the known laser light energy and determines the processing state.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a laser processing apparatus for performing laser processing on a wafer, a wafer processing system, and a method for controlling the laser processing apparatus. [Background technology]

[0002] In recent years, in the field of semiconductor device manufacturing, wafers (semiconductor wafers) are known in which multiple devices are formed by laminating a low dielectric constant insulating film (Low-k film) made of a glassy material and a functional film that forms a circuit on the surface of a substrate such as silicon. In such wafers, multiple devices are partitioned in a lattice pattern by lattice-like streets, and individual devices are manufactured by dividing the wafer along the streets.

[0003] Known methods for dividing a wafer into multiple devices (chips) include using a high-speed rotating blade and forming a laser-processed area along the street inside the wafer and applying an external force along the street whose strength has been reduced by the formation of this laser-processed area. However, in the case of a wafer to which a low-k film is applied, since the material of the low-k film is different from that of the wafer, it is difficult to simultaneously cut the low-k film and the substrate with a blade in the former method. Also, in the latter method, it is difficult to divide the wafer into individual devices with good quality when a low-k film exists on the street.

[0004] In view of this, Patent Documents 1 and 2 disclose a laser processing device that irradiates a laser beam from a laser optical system onto a street while moving the laser optical system relative to the wafer in a processing feed direction along the street, thereby forming a processed groove along the street. With this laser processing device, a low-k film or the like can be removed from above the street by forming a processed groove along the street. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2009-182019 A [Patent Document 2] JP 2006-140311 A Summary of the Invention [Problem to be solved by the invention]

[0006] Incidentally, when performing laser processing (ablation groove processing) for forming a processed groove along a street using the laser processing device described in the above Patent Document 1 or the like, it is desirable to check the processed state of the processed groove in real time. In this case, it is considered to observe the processing point of the laser light using a microscope (camera) provided in the laser processing device, but the information of the processed groove obtained by surface observation using a microscope is limited. For this reason, in the past, it was not possible to check the processed state of the processed groove in real time, and it was necessary to break the wafer after laser processing to check the processed state of the wafer.

[0007] The present invention has been made in consideration of the above circumstances, and has an object to provide a laser processing apparatus, a wafer processing system, and a control method for a laser processing apparatus that enable checking the processing state of a processed groove in real time. [Means for solving the problem]

[0008] A laser processing apparatus for achieving the object of the present invention forms processed grooves along streets by irradiating the streets with laser light from the laser optical system while moving the laser optical system relative to the wafer in a processing feed direction along the streets of the wafer, and the laser processing apparatus includes an observation image acquisition unit that repeatedly acquires observation images of the processing point of the laser light irradiated onto the street from the laser optical system while the processed groove is being formed, a brightness detection unit that detects the brightness of plasma generated at the processing point by the irradiation of the laser light based on the observation image each time the observation image acquisition unit acquires an observation image, a correspondence information acquisition unit that acquires correspondence information showing the correspondence relationship between the brightness, the energy of the laser light, and the processing state of the processed groove, and a processing state discrimination unit that discriminates the processing state by referring to the correspondence information based on the brightness and the known energy of the laser light each time the brightness detection unit detects the brightness.

[0009] According to this laser processing device, the processing state of the laser processing at each processing point can be determined in real time based on the detection result of the plasma brightness at each processing point.

[0010] In the laser processing device according to another aspect of the present invention, the observation image acquisition unit includes an optical element that blocks light in the wavelength range of the laser light, and an observation optical system that captures an image of the processing point through the optical element. This makes it possible to suppress the influence (noise) of scattered light of the laser light included in the detection result of the brightness of the plasma, and therefore makes it possible to more accurately determine the processing state of the processing groove for each processing point.

[0011] In the laser processing device according to another aspect of the present invention, the correspondence information acquisition unit acquires correspondence information indicating the correspondence relationship between the luminance, the energy of the laser light, and the processing state including the depth of the processed groove and the temperature of the processing point. This makes it possible to determine the processing state of the laser processing for each processing point (the depth of the processed groove and the temperature of the processing point) in real time.

[0012] In a laser processing device according to another aspect of the present invention, the laser optical system is capable of selectively forming a processed groove under a plurality of processing conditions that differ in at least one of the depth position of the processing point from the surface of the wafer and the amount of removal of the removed material generated by forming the processed groove, and is provided with a processing condition selection unit that selects the processing condition, and a corresponding information acquisition unit acquires corresponding information corresponding to the processing condition selected by the processing condition selection unit from a plurality of corresponding information corresponding to the plurality of processing conditions. This makes it possible to determine the processing state of the processed groove for each processing condition, and therefore to more accurately determine the processing state of the processed groove.

[0013] In the laser processing device according to another aspect of the present invention, when there are multiple regions along the street whose materials are different from each other, the correspondence information acquisition unit acquires multiple pieces of correspondence information corresponding to the materials of each region, and includes a position information acquisition unit that acquires position information of the processing point, and the processing state determination unit determines the processing state using the correspondence information corresponding to the material at the position of the processing point based on the position information acquired by the position information acquisition unit and known design information of the wafer. This makes it possible to accurately determine the processing state of the processed groove even when there are multiple regions whose materials are different on the surface of the street.

[0014] In the laser processing device according to another aspect of the present invention, a laser processing control unit is provided that controls the energy of the laser light emitted from the laser optical system based on the discrimination result of the processing state discrimination unit while the processing groove is being formed, thereby improving the processing quality of the processing groove.

[0015] A wafer processing system for achieving the object of the present invention includes the above-mentioned laser processing device, and a server having a memory unit that stores corresponding information, and a corresponding information acquisition unit acquires the corresponding information from the memory unit.

[0016] In a wafer processing system according to another aspect of the present invention, at least one laser processing device includes a groove shape acquisition unit that acquires a groove shape including at least a depth of a processed groove formed at each processing point along the street, and an actual measurement information output unit that outputs actual measurement information of the brightness and groove shape at each processing point to a server based on the detection result of the brightness detection unit and the acquisition result of the groove shape acquisition unit, and the server includes a corresponding information generation unit that generates corresponding information based on the actual measurement information output from the actual measurement information output unit and stores it in a storage unit. This makes it possible to easily handle laser processing (monitoring of the processing state) of a new wafer W.

[0017] A control method for a laser processing apparatus for achieving the object of the present invention is a control method for a laser processing apparatus that forms processed grooves along streets by irradiating the streets with laser light from the laser optical system while moving the laser optical system relative to the wafer in a processing feed direction along the streets of the wafer, the control method including: an observation image acquisition step of repeatedly acquiring an observation image of a processing point of the laser light irradiated onto the street from the laser optical system during the formation of the processed groove; a brightness detection step of detecting, based on the observation image each time an observation image is acquired in the observation image acquisition step, the brightness of plasma generated at the processing point by the irradiation of the laser light, a correspondence information acquisition step of acquiring correspondence information showing the correspondence between the brightness, the energy of the laser light, and the processing state of the processed groove; and a processing state determination step of determining the processing state by referring to the correspondence information based on the brightness and the known energy of the laser light each time the brightness is detected in the brightness detection step. Effect of the Invention

[0018] The present invention makes it possible to check the machining state of the machined groove in real time. [Brief description of the drawings]

[0019] [Figure 1] 1 is a schematic diagram of a laser processing device according to a first embodiment. [Diagram 2] 2 is a plan view of a wafer to be processed by the laser processing device. FIG. [Diagram 3]FIG. 2 is a functional block diagram of a control device according to the first embodiment. [Figure 4] FIG. 11 is an explanatory diagram for explaining the formation of a machined groove along a street. [Diagram 5] FIG. 11 is an explanatory diagram for explaining the formation of a machined groove along a street. [Figure 6] FIG. 11 is an explanatory diagram for explaining the relationship between plasma brightness and processed groove depth. [Figure 7] 4 is a flowchart showing a flow of laser processing for each street of a wafer by the laser processing apparatus of the first embodiment. [Figure 8] FIG. 4 is a schematic diagram of a laser processing apparatus according to a second embodiment. [Figure 9] FIG. 11 is an explanatory diagram showing an example of processing conditions for laser processing of each street. [Figure 10] FIG. 11 is a functional block diagram of a control device of a laser processing device according to a third embodiment. [Figure 11] 13 is an enlarged view of a street on which laser processing is performed by the laser processing device of the fourth embodiment. FIG. [Figure 12] FIG. 13 is a functional block diagram of a control device of a laser processing apparatus according to a fourth embodiment. [Figure 13] 13 is a flowchart showing a flow of laser processing for each street of a wafer by a laser processing apparatus of a fourth embodiment. [Figure 14] 13 is a flowchart showing the flow of laser processing for each street of a wafer by a laser processing apparatus of a fifth embodiment. [Figure 15] 13 is an explanatory diagram for explaining an effect of the laser processing apparatus according to the fifth embodiment. FIG. [Figure 16] FIG. 13 is a block diagram showing a configuration of a wafer processing system according to a sixth embodiment. [Figure 17] FIG. 13 is an explanatory diagram for explaining the formation of two edge-cut grooves and a hollow groove along a street by a laser processing device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] [Configuration of the laser processing device of the first embodiment] Fig. 1 is a schematic diagram of a laser processing apparatus 10 of a first embodiment. As shown in Fig. 1, the laser processing apparatus 10 performs laser processing (ablation groove processing) on ​​a wafer W (e.g., a silicon wafer) as a pre-process of a cleaving process for dividing the wafer W into a plurality of chips 4 (see Fig. 2). Note that the XYZ directions in the figure are mutually orthogonal, and among these, the X direction and the Y direction are horizontal directions, and the Z direction is a vertical direction (thickness direction of the wafer W). The θ direction is a rotation direction with the Z direction as the rotation axis.

[0021] Fig. 2 is a plan view of a wafer W to be processed by the laser processing device 10. As shown in Fig. 2, the wafer W is a laminate in which a low-k film and a functional film forming a circuit are laminated on the surface of a substrate such as silicon. The wafer W is partitioned into a plurality of regions by a plurality of streets CH (also called planned division lines) arranged in a lattice pattern. A chip 4 (device) is provided in each of the partitioned regions. The laser processing device 10 performs laser processing along the streets CH for each street CH to remove the low-k film and the like on the streets CH to form processing grooves 9 (also called ablation grooves or laser grooves).

[0022] Returning to FIG. 1, the laser processing apparatus 10 includes a base 12, an XYZθ stage 14, a suction stage 16, a processing unit 18, a monitor 20, and a control device 22.

[0023] An XYZθ stage 14 is provided on the base 12. The XYZθ stage 14 is provided on the base 12 so as to be movable in the XYZ directions and rotatable in the θ direction. The XYZθ stage 14 is moved in the XYZ directions and rotated in the θ direction by a moving mechanism 24 (see FIG. 3) composed of an actuator, a motor, etc.

[0024] The suction stage 16 is provided on the XYZθ stage 14. This suction stage 16 suction-holds the back surface of the wafer W. As a result, the wafer W is held on the XYZθ stage 14 so that the surface on which the above-mentioned low-k film and the like are formed faces a processing unit 18 (described below). By moving the XYZθ stage 14 in the XYZθ directions by the movement mechanism 24, the processing unit 18 is moved in the XYZθ directions relative to the wafer W on the suction stage 16.

[0025] The processing unit 18 includes a laser optical system 25 and an observation optical system 30. The processing unit 18 is disposed at a position above the suction stage 16 in the Z direction (a position facing the wafer W), and is controlled by a control device 22 described later.

[0026] The laser optical system 25 irradiates a laser beam L onto a street CH of the wafer W. The laser optical system 25 includes a laser light source 26 (laser oscillator), a collimator lens 27, a half mirror 28, and a condenser lens 29 (condenser lens).

[0027] The laser light source 26 emits laser light L (e.g., pulsed laser light) toward the collimator lens 27. The conditions of the laser light L are, for example, a light source: UV (ultraviolet)-pulsed laser, a wavelength: 400 nm or less, a repetition frequency: 1 to 100 kHz, and an average output: 0.5 to 10 watts, but are not particularly limited to these conditions.

[0028] The collimator lens 27 converts the laser light L incident from the laser light source 26 into a parallel light beam, and then emits the laser light L toward a half mirror 28.

[0029] The half mirror 28 is disposed on the optical axis of the condenser lens 29, and reflects a portion of the laser light L incident from the collimator lens 27 toward the condenser lens 29. The half mirror 28 also transmits a portion of illumination light IL incident from a half mirror 33 (described later) and outputs the portion toward the condenser lens 29, and transmits a portion of the reflected light of the illumination light IL incident from the condenser lens 29 and outputs the portion toward the half mirror 33.

[0030] The condenser lens 29 condenses the laser light L and the illumination light IL incident from the half mirror 28 onto the street CH of the wafer W.

[0031] The observation optical system 30 is provided coaxially with the laser optical system 25, and before laser processing of the wafer W, it photographs an alignment reference (described later) formed on the wafer W. In addition, the observation optical system 30 photographs a processing point SP during laser processing of the street CH of the wafer W.

[0032] The observation optical system 30 shares a half mirror 28 and a condenser lens 29 with the laser optical system 25, and also includes an illumination light source 31, a collimator lens 32, a half mirror 33, a condenser lens 34, a microscope 35, and the like.

[0033] The illumination light source 31 emits illumination light IL, for example, in the wavelength range of visible light (or the wavelength range of infrared light or near-infrared light), toward the collimator lens 32.

[0034] The collimator lens 32 converts the illumination light IL incident from the illumination light source 31 into a parallel beam, and then emits the illumination light IL toward the half mirror 33 .

[0035] The half mirror 33 is disposed on the optical axis of the condenser lens 29, and reflects a portion of the illumination light IL incident from the collimator lens 32 toward the half mirror 28. As a result, the illumination light IL is condensed on the surface of the wafer W via the half mirror 28 and the condenser lens 29. The half mirror 33 also transmits a portion of the reflected light of the illumination light IL incident from the wafer W via the condenser lens 29 and the half mirror 28, and outputs the reflected light toward the condenser lens 34.

[0036] The condenser lens 34 condenses the reflected light of the illumination light IL incident on the half mirror 33 onto the microscope 35 .

[0037] The microscope 35 is a so-called digital camera, and is equipped with an image sensor (not shown) having sensitivity to the entire wavelength range of the illumination light IL and the plasma 60 (see FIG. 4) described later. The microscope 35 captures the reflected light of the illumination light IL collected by the condenser lens 34, and outputs an observation image 36 (captured image data) of each part of the wafer W to the control device 22. The state of the laser processing of the wafer W can be confirmed based on the observation image 36 taken by the microscope 35 with the condenser lens 29 focused on the processing point SP (focus point, spot) of the laser light L collected on the street CH. Furthermore, in this embodiment, the processing state of the processing groove 9, including the depth of the processing groove 9 and the temperature of the processing point SP, is determined based on the observation image 36 of the processing point SP, which will be described in detail later. Furthermore, before the laser processing of the wafer W, alignment detection can be performed based on the observation image 36 taken by the microscope 35 with the condenser lens 29 focused on an alignment reference on the surface of the wafer W.

[0038] The control device 22 comprehensively controls the operation of each part of the laser processing device 10, such as the moving mechanism 24, the laser optical system 25, and the observation optical system 30, and performs alignment of the processing unit 18, laser processing for each street CH, obtaining an observation image 36 of the processing point SP, and determining the processing state of the processing groove 9.

[0039] [Control device configuration] Fig. 3 is a functional block diagram of the control device 22 of the first embodiment. As shown in Fig. 3, in addition to the monitor 20, the moving mechanism 24, the laser optical system 25, and the observation optical system 30, an operation unit 38 and a storage unit 39 are connected to the control device 22.

[0040] The operation unit 38 uses a known keyboard, mouse, operation buttons, etc., and accepts input of various operations by an operator.

[0041] Although not shown in the figure, the storage unit 39 stores a control program for the laser processing device 10, and the results of the determination of the processing state of the processed groove 9 by the control device 22. The storage unit 39 also stores in advance correspondence information 62 used for determining the processing state of the processed groove 9 by the control device 22, which will be described in detail later.

[0042] The control device 22 is configured by a calculation device such as a personal computer, and includes a calculation circuit configured by various processors and memories, etc. The various processors include a central processing unit (CPU), a graphics processing unit (GPU), an application specific integrated circuit (ASIC), and a programmable logic device (e.g., simple programmable logic devices (SPLD), complex programmable logic devices (CPLD), and field programmable gate arrays (FPGA)). The various functions of the control device 22 may be realized by one processor, or may be realized by multiple processors of the same type or different types.

[0043] The control device 22 executes a control program (not shown) read from the storage unit 39, thereby functioning as a detection control unit 40, a laser processing control unit 42, an imaging control unit 44, an observation image acquisition unit 46, a brightness detection unit 48, a processing state determination unit 50, and a display control unit 52. Hereinafter, what is described as a "unit" in this embodiment may be a "circuit", a "device", or a "equipment". In other words, what is described as a "unit" may be composed of firmware, software, hardware, or a combination of these.

[0044] The detection control unit 40 controls each part of the laser processing apparatus 10 to perform alignment detection for detecting the position of each street CH of the wafer W held on the suction stage 16 (including the orientation in the XY plane).

[0045] First, the detection control unit 40 controls the moving mechanism 24 and the observation optical system 30 to obtain (photograph) an observation image 36 of the alignment reference of the wafer W. The alignment reference here is a reference for the laser processing device 10 to recognize the position of the street CH of the wafer W, and known references such as the street CH and alignment marks (not shown) are used. Note that the alignment reference may be provided at any position inside, on the front side, or on the back side of the wafer W, as long as it can be photographed by the microscope 35.

[0046] When acquiring an observation image 36 of the alignment reference, the detection control unit 40 drives the moving mechanism 24 to relatively move the optical axis of the condenser lens 29 to a position where the alignment reference of the wafer W can be photographed by the observation optical system 30. After this movement, the detection control unit 40 causes the microscope 35 to photograph the wafer W including the alignment reference. As a result, the microscope 35 acquires an observation image 36 of the alignment reference of the wafer W, and the observation image 36 is output from the microscope 35 to the detection control unit 40.

[0047] Based on the observation image 36 of the alignment reference input from the microscope 35, the detection control unit 40 detects the position of each street CH of the wafer W by detecting the alignment reference in this observation image using a known image recognition method.

[0048] The laser processing control unit 42 controls the moving mechanism 24 and the laser optical system 25 to perform laser processing for each street CH to form a processed groove 9 along the street CH.

[0049] Specifically, the laser processing control unit 42 makes the street CH to be processed parallel to the X direction (processing feed direction) by driving the moving mechanism 24 to rotate the XYZθ stage 14 in the θ direction based on the alignment detection result by the detection control unit 40. Next, the laser processing control unit 42 drives the moving mechanism 24 to adjust the position of the XYZθ stage 14 based on the alignment detection result by the detection control unit 40, thereby performing alignment to align the optical axis of the condenser lens 29 with one end of the street CH to be processed.

[0050] 4 and 5 are explanatory diagrams for explaining the formation of a processed groove 9 along a street CH. As shown in Fig. 4 and 5, after the above-mentioned alignment is completed, the laser processing control unit 42 controls the laser optical system 25 to focus the laser light L on the street CH to be processed of the wafer W, thereby forming a processed groove 9 at the processing point SP of the laser light L.

[0051] Next, the laser processing control unit 42 drives the moving mechanism 24 to move the XYZθ stage 14 in the X direction. As a result, with the laser light L focused on the street CH, the laser optical system 25 is moved in the X direction relative to the wafer W, that is, the laser optical system 25 is moved in the X direction relative to the wafer W along the first street CH. As a result, a processed groove 9 is formed along the street CH to be processed.

[0052] At this time, at the processing point SP of the laser light L, the surface layer (such as the low-k film) of the street CH is melted and vaporized by the heat of the laser light L, and then ionized into a so-called plasma state, generating plasma 60. The brightness of this plasma 60 changes according to the amount of material removed (depth of the processed groove 9) such as the low-k film that is removed (plasmonized) from the street CH per shot of the laser light L, which is a pulse laser. The amount of material removed per shot is correlated with the energy (J) of the laser light L. Therefore, there is a correlation between the brightness of the plasma 60 at each processing point SP, the amount of material removed (depth of the processed groove 9), and the energy of the laser light L.

[0053] In addition to the energy of the laser light L, the spot diameter of the laser light L (processing point SP), the depth position (Z-direction position) of the processing point SP from the surface of the wafer W, and the material of the street CH also have an effect, but in the first embodiment, in order to avoid complicating the explanation, these will be described as being constant.

[0054] FIG. 6 is an explanatory diagram for explaining the relationship between the brightness of the plasma 60 (plasma brightness) and the depth of the processed groove 9. As shown by reference symbol 6A in FIG. 6, the brightness of the plasma 60 generated at the processed point SP increases as the amount of removed material from the processed point SP on the street CH increases. Conversely, the brightness of the plasma 60 generated at the processed point SP decreases as the amount of removed material from the processed point SP on the street CH decreases. Furthermore, when the energy of the laser light L is increased or decreased, the brightness of the plasma 60 and the amount of removed material change for each processed point SP. Therefore, the brightness of the plasma 60 and the energy of the laser light L for each processed point SP are indexes indicating the amount of removed material from each processed point SP, i.e., the depth of the processed groove 9.

[0055] Therefore, in this embodiment, correspondence information 62 (see FIG. 3) described later showing the correspondence relationship between the brightness of the plasma 60, the energy of the laser light L, and the amount of removed material (depth of the machined groove 9) is obtained in advance. As a result, in this embodiment, as shown by reference numeral 6B in FIG. 6, the depth of the machined groove 9 for each machining point SP along the street CH (X direction) is obtained by referring to the correspondence information 62 based on the brightness of the plasma 60 for each machining point SP along the street CH (X direction) and the known energy of the laser light L. In addition, based on the depth of the machined groove 9 for each machining point SP along the street CH, the overall bottom shape of the machined groove 9 formed along the street CH can also be obtained.

[0056] Furthermore, the brightness of the plasma 60 is also correlated with the temperature of the processing point SP. Therefore, by obtaining the correspondence relationship between the brightness of the plasma 60, the energy of the laser light L, and the temperature of the processing point SP as the above-mentioned correspondence information 62, the depth of the processing groove 9 and the processing temperature for each processing point SP can be obtained based on the brightness of the plasma 60 for each processing point SP along the street CH and the known energy of the laser light L.

[0057] Returning to Fig. 3, while the laser optical system 25 is performing laser processing of the street CH (forming the processing groove 9), the photography control unit 44 controls the observation optical system 30 to repeatedly perform photography of the processing point SP of the laser light L by the microscope 35 and output of the observation image 36. Since the laser light L in this embodiment is a pulsed laser, it is preferable that the photography control unit 44 performs photography of the processing point SP and output of the observation image 36 in synchronization with the emission trigger of the laser light L. This allows a real-time observation image 36 of the processing point SP to be obtained for each processing point SP along the street CH.

[0058] The observation image acquisition unit 46 functions as an interface that connects to the microscope 35 while the laser processing of the street CH (the formation of the processing groove 9) is being performed by the laser optical system 25. This observation image acquisition unit 46 repeatedly acquires the observation image 36 of the processing point SP from the microscope 35 and outputs it to the brightness detection unit 48 every time the microscope 35 captures an image of the processing point SP.

[0059] The brightness detection section 48 detects the brightness of the plasma 60 generated at the processing point SP based on the observation image 36 every time the observation image 36 of the processing point SP is input from the observation image acquisition section 46 .

[0060] First, the brightness detection unit 48 determines an image region of the plasma 60 contained in the observation image 36 based on the brightness value of each pixel of the observation image 36. Since the brightness value of the image region of the plasma 60 is higher than the brightness values ​​of other regions in the observation image 36, the brightness detection unit 48 determines, for example, a region in the observation image 36 whose brightness value is equal to or greater than a predetermined threshold value as the image region of the plasma 60.

[0061] Next, brightness detection unit 48 detects, for example, the integrated value of the brightness values ​​of pixels in the image area of ​​plasma 60 as the "brightness of plasma 60." As described above, the image sensor of microscope 35 has sensitivity to the entire wavelength range of plasma 60, so brightness detection unit 48 can detect the brightness of plasma 60 based on the result of converting the light of the entire wavelength range of plasma 60 into brightness.

[0062] Then, the brightness detection section 48 outputs the detection result to the machining state determination section 50 every time the brightness of the plasma 60 at each machining point SP is detected.

[0063] In addition, instead of detecting the integrated value of the brightness values ​​of pixels within the image area of ​​the plasma 60 as the "brightness of the plasma 60," the brightness detection unit 48 may detect the maximum or average brightness value as the "brightness of the plasma 60."

[0064] The machining state discrimination unit 50 discriminates the machining state (depth and temperature of the machining groove 9) of each machining point SP based on the brightness detection result of the plasma 60 for each machining point SP input from the brightness detection unit 48 and the known energy of the laser light L.

[0065] First, the processing state determination unit 50 acquires the corresponding information 62 from the storage unit 39. In this case, the processing state determination unit 50 functions as a corresponding information acquisition unit of the present invention. Note that, instead of acquiring the corresponding information 62 from the storage unit 39 of the laser processing apparatus 10, the processing state determination unit 50 may acquire the corresponding information 62 from outside the laser processing apparatus 10 via the Internet or the like.

[0066] The correspondence information 62 is information indicating the correspondence relationship between the brightness of the plasma 60, the energy of the laser light L, and the depth and temperature of the machining groove 9 at the machining point SP, and is generated in advance based on an experiment or a simulation and stored in the storage unit 39. This correspondence information 62 includes a removal amount calculation formula 62A, a groove depth calculation formula 62B, and a temperature calculation formula 62C. Note that although the correspondence information 62 in this embodiment is composed of calculation formulas (mathematical expressions), a data table or the like indicating the above-mentioned correspondence relationship may be used.

[0067] The removal amount calculation formula 62A is a calculation formula showing the correspondence relationship between the brightness of the plasma 60, the energy of the laser light L, and the removal amount of the material at the processing point SP. This removal amount calculation formula 62A is expressed, for example, by the formula [αA+a=βB+b=γC+c], where the removal amount is "A", the energy is "B", and the brightness of the plasma 60 is "C". Here, α, β, and γ are coefficients multiplied by A, B, and C, respectively, and a, b, and c are intercepts, respectively. Since the energy "B" is known and the brightness "C" of the plasma 60 is detected by the brightness detection unit 48, the removal amount "A" of the material at the processing point SP can be obtained by inputting "B" and "C" into the above-mentioned removal amount calculation formula 62A.

[0068] The groove depth calculation formula 62B is a calculation formula that shows the correspondence relationship between the removal amount "A" of the removed material at the processing point SP and the depth of the processing groove 9. As the groove depth calculation formula 62B, for example, a formula that can derive the depth of the processing groove 9 using the removal amount "A" and the area of ​​the processing point SP (spot diameter) as variables is used. Note that instead of preparing the removal amount calculation formula 62A and the groove depth calculation formula 62B, a formula that can directly calculate the depth of the processing groove 9 from the energy "B", the brightness "C" of the plasma 60, the area of ​​the processing point SP, etc. may be used.

[0069] The temperature calculation formula 62C is a calculation formula that shows the correspondence relationship between the brightness of the plasma 60, the energy of the laser light L, and the temperature of the processing point SP. As with the above-mentioned removal amount calculation formula 62A, this temperature calculation formula 62C uses an equation that can derive the temperature of the processing point SP using the energy "B" and the brightness "C" of the plasma 60 as variables.

[0070] The machining state determination unit 50 calculates the removal amount "A" of the material at the machining point SP using a removal amount calculation formula 62A based on the brightness "C" of the plasma 60 input from the brightness detection unit 48 and the known energy "B" of the laser light L. Next, the machining state determination unit 50 calculates the depth of the machined groove 9 at the machining point SP using a groove depth calculation formula 62B based on the calculation result of the removal amount "A" of the material at the machining point SP and the known area of ​​the machining point SP.

[0071] Further, the machining state determination unit 50 calculates the temperature of the machining point SP based on the luminance "C" of the plasma 60 input from the luminance detection unit 48 and the known energy "B" of the laser light L using a temperature calculation formula 62C.

[0072] Thereafter, the machining state determination unit 50 repeatedly executes the calculation of the depth and temperature of the machining groove 9 at the machining point SP every time the luminance "C" of the plasma 60 at a new machining point SP is input from the luminance detection unit 48. In this way, the depth and temperature of the machining groove 9 for each machining point SP along the street CH are obtained. In addition, based on the calculation result of the depth of the machining groove 9 for each machining point SP, the stability of the bottom shape of the machining groove 9 along the street CH can be evaluated.

[0073] In addition, since there is a correlation between the brightness of the plasma 60 at the processing point SP and the depth and temperature of the processing groove 9 at the processing point SP, the stability of the depth and temperature of the processing groove 9 at each processing point SP can also be evaluated from the variance value of the brightness of the plasma 60 for each processing point SP along the street CH.

[0074] The display control unit 52 controls the display on the monitor 20. The display control unit 52 causes the monitor 20 to display the observation image 36 output from the microscope 35 and the discrimination result of the machining state of the machined groove 9 for each machining point SP by the machining state discrimination unit 50.

[0075] [Operation of the first embodiment] FIG. 7 is a flowchart showing the flow of laser processing for each street CH of a wafer W by the laser processing apparatus 10 according to the first embodiment of the control method of the present invention.

[0076] 7, when the wafer W to be processed is sucked and held on the suction stage 16, the detection control unit 40 of the control device 22 is operated. The detection control unit 40 controls the moving mechanism 24 and the observation optical system 30 to obtain an observation image 36 of an alignment reference of the wafer W. Then, the detection control unit 40 analyzes the observation image 36 to perform alignment detection to detect the position of each street CH of the wafer W (step S1).

[0077] When the alignment detection is completed, the laser processing control unit 42 operates. Then, based on the alignment detection result by the detection control unit 40, the laser processing control unit 42 drives the moving mechanism 24 to perform alignment for aligning the optical axis of the condenser lens 29 with one end of the first street CH (step S2).

[0078] Next, the laser processing control unit 42 forms the processing groove 9 by irradiating (concentrating) the laser light L from the laser optical system 25 onto one end of the first street CH (step S3). At this time, at the processing point SP of the laser light L, the heat of the laser light L turns the surface layer (low-k film, etc.) of the street CH into plasma, generating plasma 60.

[0079] Next, the laser processing control unit 42 drives the moving mechanism 24 to move the XYZθ stage 14 in the X direction, thereby moving the laser optical system 25 in the X direction relative to the wafer W (step S4). This starts laser processing along the first street CH, i.e., forming the processed groove 9.

[0080] In addition, in synchronization with the start of laser processing, the photography control unit 44 and the observation image acquisition unit 46 are operated. As a result, the photography control unit 44 controls the microscope 35 of the observation optical system 30 in synchronization with, for example, the emission trigger of the laser light L to capture the processing point SP of the laser light L, and the observation image acquisition unit 46 acquires the observation image 36 of the processing point SP from the microscope 35 and outputs it to the brightness detection unit 48 (step S5, which corresponds to the observation image acquisition step of the present invention).

[0081] The brightness detection unit 48, which has received the observation image 36 of the processing point SP, distinguishes the image area of ​​the plasma 60 from this observation image 36, and detects the brightness of the plasma 60 based on the brightness values ​​of the pixels in this image area, for example (step S6, which corresponds to the brightness detection step of the present invention). Then, the brightness detection unit 48 outputs the brightness detection result of the plasma 60 to the processing state determination unit 50.

[0082] The machining state determination unit 50, which has received the input of the luminance detection result of the plasma 60, first acquires the corresponding information 62 from the storage unit 39 (step S7, which corresponds to the corresponding information acquisition step of the present invention). Then, the machining state determination unit 50 uses the corresponding information 62 based on the luminance detection result of the plasma 60 and the known energy of the laser light L to determine the machining state (depth and temperature of the machining groove 9) of the machining point SP (step S8, which corresponds to the machining state determination step of the present invention).

[0083] Furthermore, the machining state determination unit 50 causes the monitor 20 to display the determination result of the machining state via the display control unit 52.

[0084] Thereafter, while the laser processing of the first street CH along the X direction is being performed, for each processing point SP along this street CH, the acquisition of the observation image 36, the detection of the luminance of the plasma 60, the discrimination of the processing state of the processing groove 9 using the correspondence information 62, and the display of the discrimination result of the processing state are repeatedly executed (NO in step S9). This allows the operator to evaluate the depth of the processing groove 9 for each processing point SP in real time without breaking the wafer W, and further, to evaluate the bottom shape of the processing groove 9 in real time based on the depth of the processing groove 9 for each processing point SP. In addition, the operator can evaluate the damage caused by temperature in real time based on the discrimination result of the temperature for each processing point SP.

[0085] When the laser processing of the first street CH is completed (YES in step S9), the laser processing control unit 42 stops the relative movement of the laser optical system 25 by the moving mechanism 24 and the irradiation of the laser light L from the laser optical system 25, and the photography control unit 44 stops photography by the observation optical system 30 (step S10).

[0086] Next, laser processing of the second street CH is started (NO in step S11). Similarly, the processes from step S2 to step S10 are repeatedly executed for the second and subsequent streets CH (YES in step S11). As a result, for each processing point SP along each street CH, acquisition of the observation image 36, detection of the luminance of the plasma 60, determination of the processing state of the processed groove 9, and display of the determination result of the processing state are repeatedly executed.

[0087] [Effects of the first embodiment] As described above, in the laser processing device 10 of the first embodiment, the processing state (depth and temperature of the processing groove 9) of the laser processing for each processing point SP can be determined (monitored) in real time based on the detection result of the brightness of the plasma 60 for each processing point SP moving along the street CH during laser processing for each street CH. As a result, the depth of the processing groove 9 for each processing point SP, the stability of the bottom shape of the processing groove 9, and damage due to temperature can be evaluated in real time.

[0088] [Second embodiment] 8 is a schematic diagram of the laser processing apparatus 10 of the second embodiment. In the first embodiment, the luminance of the plasma 60 is detected from the observation image 36 of the processing point SP captured by the microscope 35. At this time, since the wavelength range of the plasma 60 is broad, the wavelength range of the plasma 60 includes the wavelength range of the laser light L, and the detection result of the luminance of the plasma 60 by the luminance detection unit 48 of the first embodiment also includes the influence of the scattered light of the laser light L at the processing point SP. Therefore, the laser processing apparatus 10 of the second embodiment suppresses the influence of the scattered light of the laser light L included in the detection result of the luminance of the plasma 60.

[0089] The laser processing apparatus 10 of the second embodiment has basically the same configuration as the laser processing apparatus 10 of the first embodiment, except for the provision of a filter 65. For this reason, the same reference numerals are used for components that are the same in function or configuration as those of the first embodiment, and the description thereof will be omitted.

[0090] The filter 65 corresponds to the optical element of the present invention, and is provided on the optical path between the condenser lens 34 and the microscope 35. The location of the filter 65 is not particularly limited as long as it is on the optical path from the wafer W to the microscope 35 and excludes the optical path of the laser light L from the laser light source 26 to the wafer W. The filter 65 may also be provided in the microscope 35.

[0091] The filter 65 blocks light in the wavelength range of the laser light L, i.e., prevents light in the wavelength range of the laser light L from entering the microscope 35. As the filter 65, various known filters (two or more types may be combined) that transmit or block light in a specific wavelength range, such as a high-pass filter, a low-pass filter, and a band-pass filter, are used. Also, instead of the filter 65, a dichroic mirror, a dichroic prism, or the like may be used.

[0092] The microscope 35 of the second embodiment captures an image of the processing point SP through the filter 65 while the laser processing of each street CH is being performed. This prevents the imaging element of the microscope 35 from capturing an image of the light in the wavelength range of the laser light L. As a result, the brightness detection unit 48 of the second embodiment can detect the brightness of the plasma 60 based on the light in the wavelength range excluding the wavelength range of the laser light L from the entire wavelength range of the plasma 60.

[0093] As described above, in the second embodiment, the filter 65 blocks light in the wavelength range of the laser light L incident on the microscope 35, thereby suppressing the influence (noise) of the scattered light of the laser light L included in the detection result of the brightness of the plasma 60. As a result, it is possible to more accurately determine the processing state of the processing groove 9 for each processing point SP.

[0094] Incidentally, instead of constantly disposing the filter 65 on the optical path between the condenser lens 34 and the microscope 35, the filter 65 may be provided so as to be freely inserted into and removed from the optical path between the condenser lens 34 and the microscope 35 by an actuator (not shown). This allows the filter 65 to be retracted from the optical path when performing operations other than laser processing of each street CH, such as alignment detection, for example.

[0095] [Third embodiment] Next, a laser processing apparatus 10 according to a third embodiment of the present invention will be described. In each of the above embodiments, the laser processing of each street CH is performed under the same processing conditions other than the energy of the laser light L, but the laser processing apparatus 10 according to the third embodiment selectively performs laser processing of each street CH under a plurality of processing conditions.

[0096] Fig. 9 is an explanatory diagram showing examples of processing conditions for laser processing of each street CH. As shown in Fig. 9, the laser processing device 10 of the third embodiment selectively performs laser processing of each street CH under three first to third processing conditions that differ in at least one of the depth position (Z direction position) of the processing point SP from the surface of the wafer W and the amount of removal of the removed material generated by forming the processing groove 9.

[0097] 9, in the first processing condition, the depth position of the processing point SP is set near the surface of the wafer W, and the amount of removed material is increased (i.e., the depth of the processed groove 9 is increased). In the first processing condition, the luminance of the plasma 60 is increased more than in the other processing conditions.

[0098] 9, under the second processing conditions, the depth position of the processing point SP is set to a deeper position (inside the wafer W) than under the first processing conditions, and the amount of removed material is set to be greater. Under the second processing conditions, the plasma 60 penetrates deeper into the wafer W than under the first processing conditions, and therefore the luminance of the plasma 60 observed by the observation optical system 30 is reduced compared to the first processing conditions.

[0099] 9, under the third processing condition, the depth position of the processing point SP is set near the surface of the wafer W, and the amount of removed material is set to be small (i.e., the depth of the processed groove 9 is shallow). Under the third processing condition, the luminance of the plasma 60 is reduced compared to the other processing conditions.

[0100] The number of processing conditions may be increased to four or more by including the spot diameter of the laser light L (processing point SP) and the material of the street CH (wafer W) in the processing conditions.

[0101] In this way, even when the processing conditions other than the energy of the laser light L are different, the brightness of the plasma 60 observed by the observation optical system 30 changes. For this reason, even if the energy of the laser light L and the brightness of the plasma 60 are the same under each processing condition, the depth of the processed groove 9 formed at the processing point SP and the temperature of the processing point SP differ from each other for each processing condition. Therefore, in the laser processing device 10 of the third embodiment, the processing state of the processed groove 9 for each processing point SP is determined using the correspondence information 62 that differs for each processing condition.

[0102] Fig. 10 is a functional block diagram of the control device 22 of the laser processing device 10 of the third embodiment. As shown in Fig. 10, the laser processing device 10 of the third embodiment has basically the same configuration as the laser processing device 10 of each of the above embodiments, except that a plurality of pieces of correspondence information 62 corresponding to a plurality of processing conditions (first to third processing conditions) are stored in the storage unit 39. Therefore, the same reference numerals are used for the same functions or configurations as those of the above embodiments, and the description thereof will be omitted.

[0103] Each piece of correspondence information 62 is information indicating the correspondence between the “brightness of the plasma 60”, the “energy of the laser light L”, and the “depth and temperature of the machining groove 9 at the machining point SP” for each machining condition, and is generated in advance for each machining condition based on experiments, simulations, etc., and stored in the memory unit 39.

[0104] The operation unit 38 of the third embodiment accepts a selection operation for selecting processing conditions. In this case, the operation unit 38 functions as a processing condition selection unit of the present invention.

[0105] The laser processing control unit 42 of the third embodiment controls the moving mechanism 24 and the laser optical system 25 according to the processing conditions (such as the depth position of the processing point SP) selected by the operation unit 38, to form a processing groove 9 along the street CH of the processing object.

[0106] The machining state determination unit 50 of the third embodiment acquires the correspondence information 62 corresponding to the machining conditions selected by the operation unit 38 from the storage unit 39. Thereafter, like the above-mentioned embodiments, every time a luminance detection result of the plasma 60 at the machining point SP is input from the luminance detection unit 48, the machining state determination unit 50 determines the machining state of the machining groove 9 at the machining point SP based on the luminance detection result and the known energy of the laser light L, using the previously acquired correspondence information 62.

[0107] As described above, in the third embodiment, since the machining state of the machined groove 9 can be determined using the correspondence information 62 that differs for each machining condition, the machining state of the machined groove 9 can be determined more accurately.

[0108] [Fourth embodiment] FIG. 11 is an enlarged view of a street CH to which laser processing is performed by the laser processing device 10 of the fourth embodiment. In each of the above embodiments, the surface of the street CH is formed of the same material (e.g., silicon dioxide, etc.) by a Low-K film or the like, but as shown in FIG. 11, a pattern 66 such as a TEG (Test Element Group) may be formed of a metal such as aluminum on a part of the surface of the street CH. In this case, the surface of the street CH has a plurality of regions of different materials including a region where the Low-K film or the like (silicon dioxide, etc.) is exposed and a region where the pattern 66 (aluminum, etc.) is formed. The relationship between the energy of the laser light L, the brightness of the plasma 60, and the processing state of the processing groove 9 at the processing point SP (the depth of the processing groove 9 and the temperature of the processing point SP) differs for each of these materials.

[0109] Therefore, the laser processing device 10 of the fourth embodiment determines the processing state of the processed groove 9 for each processing point SP by using the correspondence information 62 that differs for each material of the surface of the street CH.

[0110] Fig. 12 is a functional block diagram of the control device 22 of the laser processing device 10 of the fourth embodiment. As shown in Fig. 12, the laser processing device 10 of the fourth embodiment has basically the same configuration as the laser processing device 10 of each of the above-mentioned embodiments, except that a position detection sensor 70 is connected to the control device 22, the control device 22 functions as a position information acquisition unit 72 in addition to the above-mentioned units, and design information 74 and multiple pieces of correspondence information 63 are stored in the storage unit 39. For this reason, the same reference numerals are used for components that are the same in function or configuration as those of the above-mentioned embodiments, and their description will be omitted.

[0111] As shown in FIG. 12, the position detection sensor 70 is provided on, for example, the XYZθ stage 14 , detects the position of the XYZθ stage 14 in the XYZθ directions, and outputs the position detection result to a position information acquisition unit 72 .

[0112] While the laser processing of the street CH is being performed by the laser optical system 25, the position information acquisition unit 72 repeatedly detects the X-direction position indicating the relative position of the processing point SP on the street CH based on the position detection result of the XYZθ stage 14 input from the position detection sensor 70, and repeatedly outputs the X-direction position of the processing point SP to the processing state determination unit 50. Note that it is preferable that the detection of the X-direction position of the processing point SP by the position information acquisition unit 72 is performed in synchronization with the emission trigger of the laser light L, that is, in synchronization with the above-mentioned photographing of the processing point SP.

[0113] The design information 74 is information indicating the material for each X-direction position (each region) of each street CH of the wafer W. By comparing the detection result of the X-direction position of the processing point SP by the position information acquisition unit 72 with the design information 74, it is possible to determine the material of the surface of the street CH at the position of the processing point SP.

[0114] Each piece of correspondence information 63 is information indicating the correspondence relationship between the “brightness of the plasma 60”, the “energy of the laser light L”, and the “depth and temperature of the machining groove 9 at the machining point SP” for each material of the street CH, and is generated in advance for each machining condition based on experiments, simulations, etc., and stored in the memory unit 39.

[0115] While the laser processing of the street CH is being performed by the laser optical system 25, the processing state determination unit 50 of the fourth embodiment determines the material of the surface of the street CH at the position of the processing point SP by referring to the design information 74 based on the detection result of the X-direction position of the processing point SP input from the position information acquisition unit 72, and acquires the correspondence information 63 corresponding to this material from the storage unit 39. Then, based on the luminance detection result of the plasma 60 input from the luminance detection unit 48 and the known energy of the laser light L, the processing state determination unit 50 determines the processing state of the processing groove 9 at the processing point SP by using the previously acquired correspondence information 63.

[0116] Thereafter, the machining state determination unit 50 repeatedly performs the following steps for each machining point SP: detecting the X-direction position of the machining point SP, determining the surface material of the street CH, acquiring the correspondence information 63, and determining the machining state of the machining groove 9 of the machining point SP.

[0117] 13 is a flowchart showing the flow of laser processing for each street CH of a wafer W by the laser processing apparatus 10 of the fourth embodiment. Note that the processes from step S1 to step S6 are the same as those in the first embodiment (see FIG. 7), and therefore a detailed description thereof will be omitted here.

[0118] As shown in FIG. 13, when laser processing is started along the street CH of the processing object, in parallel with the above-mentioned steps S5 and S6, the position information acquisition unit 72 detects the X-direction position of the processing point SP in synchronization with the emission trigger of the laser light L based on the position detection result of the position detection sensor 70, and outputs the X-direction position of the processing point SP to the processing state determination unit 50 (step S6A).

[0119] Next, the machining state discrimination unit 50 discriminates the material of the surface of the street CH at the position of the machining point SP by referring to the design information 74 based on the detection result of the X-direction position of the machining point SP input from the position information acquisition unit 72 (step S6B), and acquires the correspondence information 63 corresponding to the material of the machining point SP from the storage unit 39 (step S7A). Then, the machining state discrimination unit 50 discriminates the machining state of the machining groove 9 at the machining point SP by using the correspondence information 63 based on the luminance detection result of the plasma 60 in step S6 and the known energy of the laser light L (step S8).

[0120] Thereafter, the processes from step S5 to step S8 are repeatedly executed for each machining point SP along the street CH. As a result, the machining state of the machining groove 9 is determined by the machining state determination unit 50 based on the correspondence information 63 corresponding to the material of each machining point SP. The subsequent processes are basically the same as those in the first embodiment, so a detailed description will be omitted here.

[0121] As described above, in the fourth embodiment, the material of the machining point SP is determined for each position of the machining point SP, and the machining state of the machining groove 9 is determined using the correspondence information 63 corresponding to the material of the machining point SP, so that the machining state of the machining groove 9 can be accurately determined even if there are multiple areas of different materials on the surface of the street CH.

[0122] [Fifth embodiment] Next, a laser processing device 10 according to a fifth embodiment of the present invention will be described. The laser processing device 10 according to each of the above embodiments distinguishes the processing state of the processing groove 9 for each processing point SP, but the laser processing device 10 according to the fifth embodiment performs feedback control of the laser processing so that the processing state is maintained constant based on the distinguished result of the processing state of the processing groove 9 for each processing point SP.

[0123] Since the laser processing apparatus 10 of the fifth embodiment has basically the same configuration as the laser processing apparatus 10 of each of the above embodiments, parts that are the same in function or configuration as those of the above embodiments are given the same reference numerals and their description is omitted.

[0124] 14 is a flowchart showing the flow of laser processing for each street CH of a wafer W by the laser processing apparatus 10 of the fifth embodiment. Note that the processes from step S1 to step S6 are the same as those in the above embodiments (see FIGS. 7 and 13), and therefore detailed explanations thereof will be omitted here.

[0125] 14, when the machining state determination unit 50 determines the machining state of the machining groove 9 at the machining point SP in step S8, the laser machining control unit 42 performs feedback control to control the energy of the laser light L emitted from the laser optical system 25 so that the machining state of the machining groove 9, for example, the depth of the machining groove 9, is maintained constant (step S8A). Note that the control of the energy of the laser light L means increasing or decreasing the energy (J) of the laser light L by increasing or decreasing at least one of the output (watts) and time (sec) of the laser light L.

[0126] For example, when the depth of the processed groove 9 is less than a predetermined design value, the laser processing control unit 42 increases the energy (J) of the laser light L emitted from the laser optical system 25. Conversely, when the depth of the processed groove 9 is greater than the design value, the laser processing control unit 42 decreases the energy (J) of the laser light L emitted from the laser optical system 25.

[0127] Thereafter, the laser processing control unit 42 repeatedly executes the above-mentioned feedback control each time the processing state determination unit 50 determines the depth of the processing groove 9 at the processing point SP until the laser processing of the street CH to be processed is completed (step S9). Note that the subsequent processing is basically the same as in the above-mentioned embodiments, so a detailed description will be omitted here.

[0128] Fig. 15 is an explanatory diagram for explaining the effect of the laser processing device 10 of the fifth embodiment. In Fig. 15, the symbol XVA is an example of the processing groove 9 for each processing point SP when the above-mentioned feedback control is not performed, and the symbol XVB is an example of the processing groove 9 for each processing point SP when the above-mentioned feedback control is performed.

[0129] 15, in the laser processing device 10 of the fifth embodiment, the depth of the processed groove 9 for each processing point SP is determined in real time based on the detection result of the brightness of the plasma 60 for each processing point SP, and the energy of the laser light L is controlled to maintain the depth of the processed groove 9 constant. As a result, the depth of the processed groove 9 along the street CH can be maintained constant. This improves the processing quality of the processed groove 9.

[0130] As the machining state of the machined groove 9, instead of maintaining the depth of the machined groove 9 constant, or in addition to maintaining the depth of the machined groove 9 constant, the machining temperature of the machining point SP may be maintained constant.

[0131] [Sixth embodiment] 16 is a block diagram showing the configuration of a wafer processing system 100 according to a sixth embodiment of the present invention. In the above-mentioned embodiments, the laser processing apparatus 10 is used alone, but in the sixth embodiment, a plurality of laser processing apparatuses 10 (or one) are connected to a server 200, and the server 200 generates correspondence information 62 (including correspondence information 63) and distributes the correspondence information 62 to each laser processing apparatus 10.

[0132] The wafer processing system 100 includes a plurality of laser processing devices 10 and a server 200. Components that are the same in function or configuration as those in the above-described embodiments are given the same reference numerals and descriptions thereof will be omitted.

[0133] At least one of the laser processing apparatuses 10 has a function of generating actual measurement information 84 used to generate the correspondence information 62. The actual measurement information 84 includes the X-direction position of each processing point SP along the street CH, the detected value of plasma brightness, the energy of the laser light L, and the shape (actual measurement value) of the processed groove 9. This laser processing apparatus 10 has basically the same configuration as the laser processing apparatus 10 of each of the above-mentioned embodiments, except that it includes a white light interferometer 55 in addition to the above-mentioned parts and the control device 22 functions as a position information acquisition unit 72, a groove shape acquisition unit 80, and an actual measurement information output unit 82.

[0134] A known type such as a Michelson type is used as the white interferometer 55. While the laser processing of the street CH to be processed is being performed, the white interferometer 55 acquires an interference image (interference fringe image) of the processed groove 9 through, for example, a condenser lens 29 each time a processed groove 9 is formed at each processing point SP along the street CH (see, for example, JP 2018-146391 A). Based on this interference image, the groove shape [height information (depth information) of each part of the bottom surface of the processed groove 9)] of the processed groove 9 formed at the processing point SP is obtained.

[0135] While the laser processing of the street CH to be processed is being performed, the groove shape acquisition unit 80 calculates the groove shape of the processed groove 9 for each processing point SP along the street CH based on the interference image acquired from the white interferometer 55, and outputs the calculation results to the actual measurement information output unit 58. Similarly, the groove shape acquisition unit 80 calculates the groove shape of the processed groove 9 at each processing point SP along the street CH each time laser processing of all the streets CH is performed, and outputs the calculation results to the actual measurement information output unit 58.

[0136] While laser processing of the street CH to be processed is being performed, the actual measurement information output unit 82 acquires, for each processing point SP, the X-direction position of the processing point SP from the position information acquisition unit 72, the luminance detection result of the plasma 60 from the luminance detection unit 48, energy information of the laser light L from the laser optical system 25, and the groove shape calculation result of the processed groove 9 from the groove shape acquisition unit 80. Then, the actual measurement information output unit 82 generates actual measurement information 84 based on these acquired results. As a result, the relationship between the X-direction position, plasma luminance, energy of the laser light L, and groove shape (actual measurement value) of the processed groove 9 for each processing point SP along the street CH is obtained.

[0137] Similarly, the actual measurement information output unit 82 generates actual measurement information 84 each time laser processing is performed on all the streets CH. Then, the actual measurement information output unit 82 outputs the actual measurement information 84 for each street CH of the wafer W to the server 200.

[0138] The server 200 is configured with an arithmetic circuit including various processors, memories, and the like, and functions as a correspondence information generating unit 202 and a storage unit 204 .

[0139] The correspondence information generating unit 202 generates correspondence information 62 corresponding to the type of the wafer W based on the actual measurement information 84 for each street CH of the wafer W input from the actual measurement information output unit 82. Note that, here, it is assumed that the relationship between the luminance of the plasma 60, the energy of the laser light L, and the temperature of the processing point SP corresponding to the type of the wafer W has been measured separately. Then, the correspondence information generating unit 202 stores the generated correspondence information 62 in the storage unit 204 in a state associated with the type of the wafer W.

[0140] The memory unit 204 stores the correspondence information 62 generated by the correspondence information generating unit 202 for each type of wafer W. This allows the processing state determining unit 50 of each laser processing device 10 to determine the processing state of the processing groove 9 for each processing point SP using the correspondence information 62 stored in the memory unit 204 of the server 200. Although not shown in the figure, the above-mentioned design information 74 may be stored in the memory unit 204 for each type of wafer W.

[0141] As described above, in the sixth embodiment, the correspondence information 62 can be generated by providing the laser processing apparatus 10 with a function for acquiring the shape of the processed groove 9 (white interferometer 55). This makes it possible to easily handle laser processing (monitoring of the processing state) of a new wafer W. Also, in the sixth embodiment, the correspondence information 62 can be shared among a plurality of laser processing apparatuses 10 by storing the correspondence information 62 in the memory unit 204 of the server 200.

[0142] In the sixth embodiment, the groove shape of the processed groove 9 is acquired using the white light interferometer 55, but the groove shape of the processed groove 9 may be acquired using various shape measuring devices such as various interferometers, distance measuring devices, laser scanners, or stereo cameras. In addition, a temperature sensor (such as a radiation thermometer) for measuring the temperature of the processing point SP may be provided in the laser processing device 10 to measure the temperature of each processing point SP. This makes it possible to obtain a relationship between the brightness of the plasma 60 and the energy of the laser light L corresponding to the type of wafer W, and the temperature of the processing point SP, and to generate correspondence information 62 indicating this relationship.

[0143] In the sixth embodiment, the server 200 is provided with the correspondence information generating unit 202, but the correspondence information generating unit 202 may be provided in the control device 22 of the laser processing device 10.

[0144] [others] FIG. 17 is an explanatory diagram for explaining the formation of two edge-cut grooves 9A and a center-cut groove 9B along the street CH by the laser processing device 10. The laser processing device 10 in each of the above embodiments forms one processing groove 9 along the street CH, but the present invention is not limited to this. For example, as shown in FIG. 17, the present invention can also be applied to a laser processing device 10 that performs edge-cutting processing to form two edge-cut grooves 9A (cutting grooves) along the street CH using two laser beams L1 and center-cutting processing to form a center-cut groove 9B (division groove) between the two edge-cut grooves 9A using one laser beam L2 (see Patent Document 1 above). In this case, too, the processing state of the two edge-cut grooves 9A and the center-cut groove 9B can be determined in real time for each processing point SP of each laser beam L1, L2.

[0145] In the above embodiment, the XYZθ stage 14 and the moving mechanism 24 are taken as examples of the moving mechanism of the present invention, but the configuration is not particularly limited as long as it can move the processing unit 18 and the wafer W relatively.

[0146] In each of the above embodiments, the illumination optical axis of the laser optical system 25 and the observation optical axis of the observation optical system 30 are coaxial, but the illumination optical axis and the observation optical axis may be different as long as the processing point SP is included in the observation field of the observation optical system 30. In other words, the laser optical system 25 and the observation optical system 30 may be provided separately.

[0147] In each of the above embodiments, the control device 22 may be provided separately from the laser processing device 10. In this case, the control device 22 corresponds to the laser processing device of the present invention.

[0148] In each of the above embodiments, the depth of the processed groove 9 and the temperature of the processed point SP are determined as the processing state of the processed groove 9 for each processed point SP, but the type of the processing state is not particularly limited. [Explanation of symbols]

[0149] 4 Chips 9 Machining groove 9A Edge cutting groove 9B Hollow groove 10 Laser processing equipment 12 Base 14 XYZθ stage 16 Adsorption stage 18 Processing Unit 20 Monitor 22 Control device 24 Moving mechanism 25 Laser Optical System 26 Laser light source 27 Collimating Lens 28 Half Mirror 29 Condenser Lens 30 Observation Optical System 31 Light source 32 Collimating Lens 33 Half Mirror 34 Condenser Lens 35 Microscope 36 Observation image 38 Control section 39 Memory section 40 Detection control section 42 Laser processing control unit 44 Shooting control section 46 Observation image acquisition unit 48 Luminance detection section 50 Processing state determination unit 52 Display control unit 55 White light interferometer 58 Actual measurement information output section 60 Plasma 62 Supported Information 62A Removal amount calculation formula 62B Groove depth calculation formula 62C temperature calculation formula 63 Supported Information 65 Filters 66 Patterns 70 Position detection sensor 72 Location information acquisition unit 74 Design information 80 Groove shape acquisition part 82 Actual measurement information output section 84 Actual measurement information 100 Wafer Processing System 200 Servers 202 Correspondence information generation unit 204 Storage section CH Street IL illumination light L, L1, L2 laser light SP processing point W wafer

Claims

1. 1. A laser processing apparatus for forming a processed groove along a street by irradiating a laser beam from a laser optical system onto the street while moving the laser optical system relative to a wafer in a processing feed direction along the street, the apparatus comprising: an observation image acquisition unit that repeatedly acquires an observation image of a processing point of the laser light irradiated from the laser optical system onto the street during the formation of the processing groove; a brightness detection unit that detects brightness of plasma generated at the processing point by irradiation with the laser light based on the observation image each time the observation image acquisition unit acquires the observation image; a correspondence information acquiring unit that acquires correspondence information indicating a correspondence relationship between the luminance, the energy of the laser light, and the processing state of the processed groove; a processing state determination unit that determines the processing state by referring to the correspondence information based on the luminance and the known energy of the laser light every time the luminance detection unit detects the luminance; Equipped with A laser processing apparatus in which the correspondence information acquisition unit acquires the correspondence information indicating the correspondence relationship between the brightness, the energy of the laser light, and the processing state including the depth of the processed groove and the temperature of the processing point.

2. the laser optical system is capable of selectively forming the processed groove under a plurality of processing conditions in which at least one of a depth position of the processed point from the surface of the wafer and a removal amount of a removed material generated by forming the processed groove is different; A processing condition selection unit for selecting the processing conditions is provided, The laser processing apparatus according to claim 1 , wherein the corresponding information acquisition unit acquires the corresponding information corresponding to the processing condition selected by the processing condition selection unit from a plurality of pieces of corresponding information corresponding to the plurality of processing conditions.

3. A laser processing apparatus for forming a processed groove along a street by irradiating a laser beam from a laser optical system onto the street while moving the laser optical system relative to a wafer in a processing feed direction along the street, comprising: an observation image acquisition unit that repeatedly acquires an observation image of a processing point of the laser light irradiated from the laser optical system onto the street during the formation of the processing groove; a brightness detection unit that detects brightness of plasma generated at the processing point by irradiation with the laser light based on the observation image each time the observation image acquisition unit acquires the observation image; a correspondence information acquiring unit that acquires correspondence information indicating a correspondence relationship between the luminance, the energy of the laser light, and the processing state of the processed groove; a processing state determination unit that determines the processing state by referring to the correspondence information based on the luminance and the known energy of the laser light every time the luminance detection unit detects the luminance; Equipped with the laser optical system is capable of selectively forming the processed groove under a plurality of processing conditions in which at least one of a depth position of the processed point from the surface of the wafer and a removal amount of a removed material generated by forming the processed groove is different; A processing condition selection unit for selecting the processing conditions is provided, A laser processing apparatus in which the corresponding information acquisition unit acquires the corresponding information corresponding to the processing condition selected by the processing condition selection unit from a plurality of pieces of corresponding information corresponding to the plurality of processing conditions.

4. when a plurality of areas having different materials exist along the street, the correspondence information acquisition unit acquires a plurality of pieces of correspondence information corresponding to the materials of the respective areas; A position information acquisition unit that acquires position information of the processing point, 4. A laser processing apparatus according to claim 1, wherein the processing state discrimination unit discriminates the processing state using the correspondence information corresponding to the material at the position of the processing point based on the position information acquired by the position information acquisition unit and known design information of the wafer.

5. A laser processing apparatus for forming a processed groove along a street by irradiating a laser beam from a laser optical system onto the street while moving the laser optical system relative to a wafer in a processing feed direction along the street, comprising: an observation image acquisition unit that repeatedly acquires an observation image of a processing point of the laser light irradiated from the laser optical system onto the street during the formation of the processing groove; a brightness detection unit that detects brightness of plasma generated at the processing point by irradiation with the laser light based on the observation image each time the observation image acquisition unit acquires the observation image; a correspondence information acquiring unit that acquires correspondence information indicating a correspondence relationship between the luminance, the energy of the laser light, and the processing state of the processed groove; a processing state determination unit that determines the processing state by referring to the correspondence information based on the luminance and the known energy of the laser light every time the luminance detection unit detects the luminance; Equipped with when a plurality of areas having different materials exist along the street, the correspondence information acquisition unit acquires a plurality of pieces of correspondence information corresponding to the materials of the respective areas; A position information acquisition unit that acquires position information of the processing point, A laser processing apparatus in which the processing state discrimination unit discriminates the processing state using the correspondence information corresponding to the material at the position of the processing point based on the position information acquired by the position information acquisition unit and known design information of the wafer.

6. One or more laser processing devices according to any one of claims 1 to 5; A server having a storage unit that stores the correspondence information; Equipped with A wafer processing system, wherein the correspondence information acquisition unit acquires the correspondence information from the storage unit.

7. 1. A control method for a laser processing apparatus for forming a processed groove along a street of a wafer by irradiating a laser beam from a laser optical system onto the street while moving the laser optical system relative to a wafer in a processing feed direction along the street, the method comprising: an observation image acquiring step of repeatedly acquiring an observation image of a processing point of the laser light irradiated from the laser optical system onto the street during the formation of the processing groove; a brightness detection step of detecting brightness of plasma generated at the processing point by irradiation with the laser light based on the observation image each time the observation image is acquired in the observation image acquisition step; a correspondence information acquisition step of acquiring correspondence information indicating a correspondence relationship between the luminance, the energy of the laser light, and the processing state of the processed groove; a processing state determination step of determining the processing state by referring to the correspondence information based on the luminance and the known energy of the laser light every time the luminance is detected in the luminance detection step; having A control method for a laser processing apparatus, in which the correspondence information acquisition step acquires the correspondence information indicating the correspondence relationship between the brightness, the energy of the laser light, and the processing state including the depth of the processing groove and the temperature of the processing point.

8. A method for controlling a laser processing apparatus for forming a processing groove along a street of a wafer by irradiating a laser beam from the laser optical system onto the street while moving the laser optical system relative to the wafer in a processing feed direction along the street, comprising: an observation image acquiring step of repeatedly acquiring an observation image of a processing point of the laser light irradiated from the laser optical system onto the street during the formation of the processing groove; a brightness detection step of detecting brightness of plasma generated at the processing point by irradiation with the laser light based on the observation image each time the observation image is acquired in the observation image acquisition step; a correspondence information acquisition step of acquiring correspondence information indicating a correspondence relationship between the luminance, the energy of the laser light, and the processing state of the processed groove; a processing state determination step of determining the processing state by referring to the correspondence information based on the luminance and the known energy of the laser light every time the luminance is detected in the luminance detection step; having the laser optical system is capable of selectively forming the processed groove under a plurality of processing conditions in which at least one of a depth position of the processed point from the surface of the wafer and a removal amount of a removed material generated by forming the processed groove is different; A processing condition selection step for selecting the processing condition, A control method for a laser processing apparatus, in which the corresponding information acquisition step acquires the corresponding information corresponding to the processing condition selected in the processing condition selection step from among a plurality of pieces of corresponding information corresponding to the plurality of processing conditions.

9. A method for controlling a laser processing apparatus for forming a processing groove along a street of a wafer by irradiating a laser beam from the laser optical system onto the street while moving the laser optical system relative to the wafer in a processing feed direction along the street, comprising: an observation image acquiring step of repeatedly acquiring an observation image of a processing point of the laser light irradiated from the laser optical system onto the street during the formation of the processing groove; a brightness detection step of detecting brightness of plasma generated at the processing point by irradiation with the laser light based on the observation image each time the observation image is acquired in the observation image acquisition step; a correspondence information acquisition step of acquiring correspondence information indicating a correspondence relationship between the luminance, the energy of the laser light, and the processing state of the processed groove; a processing state determination step of determining the processing state by referring to the correspondence information based on the luminance and the known energy of the laser light every time the luminance is detected in the luminance detection step; having When a plurality of areas having different materials are present along the street, the corresponding information acquisition step acquires a plurality of pieces of corresponding information corresponding to the materials of the respective areas, A position information acquiring step of acquiring position information of the processing point, A method for controlling a laser processing apparatus, in which the processing state discrimination step discriminates the processing state using the correspondence information corresponding to the material at the position of the processing point based on the position information acquired in the position information acquisition step and known design information of the wafer.

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