Storage Cassette

Abstract

To provide a housing cassette that allows easy confirmation of the processing history of a housed workpiece.SOLUTION: A housing cassette 1 for loading and unloading a plurality of workpieces 200 into and out of a processing device includes a housing unit 10, and a recording device 20. The housing unit 10 includes a pair of side walls 11 and 12 in which a plurality of paired guide rails 18 are formed inside, and accommodates the plurality of plate-shaped workpieces 200. The recording device 20 includes a recording unit in which the processing history of the workpiece 200 processed by the processing device is recorded in association with ID information of the housed workpiece 200 or the number of steps of the guide rail 18 housing the workpiece 200, and a transmission unit that transmits the recorded information to a terminal device 400.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a storage cassette. [Background technology]

[0002] Various device chips used in electronic components are manufactured by forming devices on various semiconductor wafers such as silicon, SiC, sapphire, and gallium arsenide, grinding the wafer thinly, and dividing it into individual device chips with a cutting blade or laser beam. In each manufacturing process such as grinding, cutting, and laser processing, a technique is known in which multiple wafers are stored in a cassette, and each cassette is carried into each processing device and processed in each process (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6029271 Summary of the Invention [Problem to be solved by the invention]

[0004] In the production process, before being put into a processing device or after passing through multiple processing devices, an operator may inspect each workpiece in each cassette visually or with a measuring device. In this case, if an abnormality is found in a processed workpiece, the operator must check the processing history of the processing device used to process the workpiece in order to identify the cause of the abnormality and find out whether there was an abnormality in the history of when the workpiece was processed, which can be a problem as it requires a lot of man-hours.

[0005] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a storage cassette that allows easy confirmation of the processing history of the stored workpieces. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, the storage cassette of the present invention is a storage cassette for carrying a plurality of workpieces into and out of a processing device, the storage cassette having a pair of side walls with a plurality of paired guide rails formed on the inside thereof, and a storage section for storing a plurality of plate-shaped workpieces; Information on the type of processing device that processed the workpiece, processing conditions of the workpiece, operation history of the workpiece, and processing results of the workpiece. a recording section for recording the ID information of the workpiece accommodated in the workpiece or the number of stages of the guide rail in which the workpiece is accommodated, and a section for transmitting the recorded information to a terminal device. Send and a recording device having a receiving unit.

[0007] The recording device may include a rechargeable battery as a power source, and when the storage cassette is placed on the cassette support section of the processing apparatus, the battery may be connected to a power supply source and charged.

[0008] The recording device may include a display screen for displaying the information recorded by the recording section. Effect of the Invention

[0009] According to the present invention, the machining history of the workpieces stored in the storage cassette can be easily confirmed. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a perspective view showing a configuration example of a processing device in which a storage cassette according to a first embodiment is used. [Diagram 2] FIG. 2 is a perspective view showing a configuration example of the storage cassette according to the first embodiment. [Diagram 3] FIG. 3 is a cross-sectional view of the storage cassette of FIG. [Figure 4] FIG. 4 is a block diagram showing the configuration of the storage cassette of FIG. [Diagram 5] FIG. 5 is a diagram showing an example of processing history data recorded by the recording unit in FIG. [Figure 6] FIG. 6 is a cross-sectional view showing an example of the operation of the storage cassette according to the first embodiment. [Figure 7]FIG. 7 is a perspective view showing a configuration example of a storage cassette according to the second embodiment. [Figure 8] FIG. 8 is a cross-sectional view of the storage cassette of FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0012] [Embodiment 1] A storage cassette 1 according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of a processing device 100 in which the storage cassette 1 according to the first embodiment is used. FIG. 2 is a perspective view showing a configuration example of the storage cassette 1 according to the first embodiment. FIG. 3 is a cross-sectional view showing the storage cassette 1 of FIG. 2. FIG. 4 is a block diagram showing the configuration of the storage cassette 1 of FIG. 2. The storage cassette 1 according to the first embodiment, as shown in FIGS. 1 and 2, is used by being placed on, for example, a cassette support part 110 of the processing device 100, and is a container for storing a plurality of workpieces 200 to be carried in and out of the processing device 100 used.

[0013] In the first embodiment, the workpiece 200, which is accommodated in the accommodation cassette 1 and is an object to be processed by the processing device 100, is, for example, a disk-shaped semiconductor wafer or an optical device wafer made of silicon, sapphire, silicon carbide (SiC), gallium arsenide, glass, or the like. As shown in Figs. 1 and 2, the workpiece 200 has a chip-sized device (device chip) 203 formed in an area partitioned by a plurality of planned division lines 202 formed in a lattice pattern on a flat surface 201. In the first embodiment, the workpiece 200 has an ID mark 210 that can read ID (IDentifier) ​​information for identifying the workpiece 200 formed in an area on the outer periphery side of the area on the surface 201 where the device 203 is formed, as shown in Fig. 2. In the first embodiment, the workpiece 200 has an adhesive tape 205 attached to a back surface 204 on the back side of the front surface 201, and an annular frame 206 attached to the outer edge of the adhesive tape 205. It should be noted that the present invention is not limited to this, and the workpiece 200 may not have the planned dividing lines 202 or devices 203 formed thereon, may not have the ID mark 210 formed thereon, and may not have the annular frame 206 attached via the adhesive tape 205. Furthermore, in the present invention, the workpiece 200 may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

[0014] 1, the processing device 100 in which the storage cassette 1 is used includes a cassette support section 110 on which the storage cassette 1 is placed, a holding table 120, a processing section 130, an imaging unit 140, and a control unit 150. In addition, a workpiece management system 1000 that enables an operator 300 to easily manage the processing history of the workpiece 200 is configured to include the storage cassette 1 and the processing device 100.

[0015] The cassette support part 110 is a mounting table on which the storage cassette 1 is placed, supports the placed storage cassette 1, and raises and lowers it in the Z-axis direction parallel to the vertical direction. The cassette support part 110 outputs the position of the storage cassette 1 in the Z-axis direction to the control unit 150. The cassette support part 110 includes an information communication part 111 and a power supply part 112 on the surface (upper surface) on which the storage cassette 1 is placed, as shown in Figs. 1 and 3.

[0016] The information communication unit 111 electrically connects the recording device 20 of the storage cassette 1 placed on the cassette support unit 110 to the control unit 150 of the processing apparatus 100 so as to be able to communicate information with each other. The information communication unit 111 may connect the recording device 20 and the control unit 150 by wire, or may connect the recording device 20 and the control unit 150 by wireless. Note that in the present invention, the information communication unit 111 is not limited to being provided in the cassette support unit 110, and may be provided at any position in the processing apparatus 100.

[0017] The power supply unit 112 is electrically connected to the battery 23 built in the recording device 20 of the storage cassette 1 placed on the cassette support unit 110, and supplies power to the battery 23 to charge it. The power supply unit 112 may be of a type that connects to the battery 23 via a wire and charges it, or may be of a type that connects to the battery 23 wirelessly and charges it. The power supply unit 112 is charged by receiving power from the commercial power source 160 (see FIG. 3) when power is being supplied from the commercial power source 160 to the main power source of the processing apparatus 100.

[0018] 1, the processing device 100 includes a workpiece detection sensor 113 installed on the side of the cassette support part 110. When the storage cassette 1 is placed on the cassette support part 110, the processing device 100 detects the position in the Z-axis direction by raising and lowering the storage cassette 1 in the Z-axis direction using the cassette support part 110, while detecting, with respect to the entire storage cassette 1, which pair of guide rails 18 of the storage cassette 1 contains the workpieces 200 or not using the workpiece detection sensor 113, and outputs information on the number of storage stages of the workpieces 200, which is the detection result, to the control unit 150. Here, the information on the number of storage stages of the workpieces 200 is information indicating the number of stages of a pair of guide rails 18 containing the workpieces 200 among a plurality of pairs of guide rails 18 arranged in the vertical direction of the storage cassette 1.

[0019] The holding table 120 holds the workpiece 200 on a holding surface 121. The holding table 120 is in communication with a suction source (not shown), and holds the workpiece 200 from the back surface 204 side by suction via an adhesive tape 205 using negative pressure supplied from the suction source. The holding table 120 is provided so as to be movable along the X-axis direction parallel to the horizontal direction by an X-axis moving unit (not shown), and is provided so as to be rotatable about the Z-axis by a rotary drive source (not shown).

[0020] The processing unit 130 functions as a processing unit that processes the workpiece 200 held on the holding table 120. The processing unit 130 is, for example, a pair of cutting units 131, each having a cutting blade 132. The cutting blades 132 of the pair of cutting units 131 face each other in a Y-axis direction that is parallel to the horizontal direction and perpendicular to the X-axis direction, and both rotate around the Y-axis. The processing unit 130 performs cutting on the workpiece 200 by the rotating cutting blades 132. The processing unit 130 is provided so as to be movable along the Y-axis direction by a Y-axis moving unit (not shown), and is provided so as to be movable along the Z-axis direction by a Z-axis moving unit (not shown).

[0021] The processing device 100 cuts the workpiece 200 along the planned division line 202 by rotating the cutting blade 132 of the processing section 130 and moving the processing section 130 and the holding table 120, which suction-holds the workpiece 200, relatively along the planned division line 202 using the X-axis moving unit, Y-axis moving unit, and Z-axis moving unit.

[0022] The processing unit 130 of the processing device 100 is not limited to the cutting unit 131 that cuts the workpiece 200 with the cutting blade 132. Alternatively, the processing unit 130 may be, for example, a grinding unit that grinds the similar workpiece 200 with a grinding wheel or the like, a polishing unit that polishes the similar workpiece 200 with a polishing pad or the like, a laser processing unit that irradiates a laser beam to the similar workpiece 200 to perform laser processing, or a cleaning unit that cleans the processed surface of the workpiece 200 or cleans and removes a resin film formed on one surface. The processing unit 130 may also be a tape mounter unit that attaches an adhesive tape 205 to the back surface 204 of the workpiece 200 and attaches an annular frame 206 to the outer edge of the adhesive tape 205.

[0023] The imaging unit 140 includes an imaging element for imaging a surface 201 including a planned division line 202 of the workpiece 200 before processing, and processing marks (cut grooves in cutting, grinding marks in grinding, polishing marks in polishing, and laser grooves in laser processing) formed on the workpiece 200 after processing. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. In the first embodiment, the imaging unit 140 is fixed to the processing section 130 so as to move integrally with the processing section 130.

[0024] The imaging unit 140 images the workpiece 200 before processing held on the holding table 120, obtains an image for performing alignment for aligning the workpiece 200 with the processing section 130 (such as the cutting blade 132), and outputs the obtained image to the control unit 150. The imaging unit 140 also images the workpiece 200 after processing held on the holding table 120, obtains an image for performing an automatic confirmation process of the quality of the processing marks (for example, a kerf check in the case of a cut groove or a laser processed groove), and outputs the obtained image to the control unit 150. The imaging unit 140 also functions as a reading section that reads the ID mark 210 formed on the workpiece 200 to obtain ID information, and outputs the obtained ID information to the control unit 150.

[0025] In addition to the imaging unit 140, the processing apparatus 100 may be provided with a separate ID mark reading device that reads the ID mark 210 formed on the workpiece 200 to obtain ID information. This separate ID mark reading device is, for example, a barcode reader.

[0026] The control unit 150 controls the operation of various components of the processing device 100 to cause the processing device 100 to perform processing (cutting processing) of the workpiece 200. When the storage cassette 1 is placed on the cassette support part 110, the control unit 150 controls the cassette support part 110 to raise and lower the storage cassette 1 in the Z-axis direction by the cassette support part 110 to detect the position in the Z-axis direction, while controlling the workpiece detection sensor 113 to obtain and register information on the number of storage stages of the workpiece 200 by the workpiece detection sensor 113. Based on the information on the number of storage stages of the workpiece 200 registered for the storage cassette 1, the control unit 150 controls a transport unit (not shown) sequentially in the order of the number of stages of the pair of guide rails 18 in which the workpiece 200 is stored, for example, and the transport unit (not shown) transports the workpiece 200 one by one into the processing device 100. The control unit 150 accommodates the workpiece 200 after being carried into the processing device 100 and processed in a pair of guide rails 18 with the same number of stages as when the workpiece 200 was accommodated in the storage cassette 1 before being carried into the processing device 100. In this way, the number of stages of the pair of guide rails 18 on which each workpiece 200 is accommodated in the storage cassette 1 is stage number identification information that identifies each workpiece 200 accommodated in the storage cassette 1 and is linked to each workpiece 200. Every time the control unit 150 carries the workpiece 200 into the processing device 100, it generates stage number identification information for each workpiece 200 to be carried into the processing device 100 based on information on the number of stages of the workpiece 200 registered for the storage cassette 1, the position in the Z-axis direction when the workpiece 200 was carried into the processing device 100, and the order in which the workpiece 200 was carried into the processing device 100.

[0027] The control unit 150 controls the imaging unit 140 to read the ID mark 210 of the workpiece 200 being processed by the processing section 130 using the imaging unit 140, thereby acquiring ID information of the workpiece 200 read during processing by the processing section 130. Note that if an ID mark reading device is provided separately from the imaging unit 140, the control unit 150 may control this ID mark reading device to read the ID mark 210 of the workpiece 200 using this ID mark reading device, thereby acquiring the ID information of the workpiece 200.

[0028] The control unit 150 acquires information on the workpiece 200 and processing conditions for the workpiece 200 input and set by the operator 300 of the processing apparatus 100 via an input unit or the like in the processing apparatus 100. The control unit 150 acquires the operation history of each component of the processing apparatus 100 when processing the workpiece 200 (operation history of the workpiece 200) from each component of the processing apparatus 100. The control unit 150 controls the imaging unit 140 to acquire an image (image of the processing mark on the workpiece 200) of the processing mark after processing of the workpiece 200 captured by the imaging unit 140, and acquires information on the result of an automatic confirmation process of the quality of the processing mark based on this image (confirmation result information on the workpiece 200).

[0029] As shown in Fig. 1, the control unit 150 includes a processing result storage unit 151 and an information transmission unit 152. The control unit 150 stores the step number identification information of the workpiece 200, the ID information of the workpiece 200 read during processing, the information of the workpiece 200, the processing conditions of the workpiece 200, the operation history of the workpiece 200, the processing mark image of the workpiece 200, and the confirmation result information of the workpiece 200, which are acquired as described above, in the processing result storage unit 151 of the control unit 150, in a manner that correlates the information for each workpiece 200. The information transmission unit 152 of the control unit 150 transmits the information, which is correlated for each workpiece 200 and stored in the processing result storage unit 151, to the recording device 20 of the storage cassette 1 via the information communication unit 111.

[0030] Here, in embodiment 1, the information on the workpiece 200 includes, for example, the type, shape and size of the base material of the workpiece 200, the number of planned division lines 202 and devices 203 formed on the workpiece 200 and their respective positions and sizes, the type of adhesive tape 205 applied, the type, shape and size of the annular frame 206, etc.

[0031] In the first embodiment, the processing conditions of the workpiece 200 include setting information of each component of the processing apparatus 100 and setting conditions for the operation of each component when the processing apparatus 100 executes processing of the workpiece 200. The setting information of each component of the processing apparatus 100 specifically includes identification information of the processing apparatus 100, the type (properties such as shape, material, size, etc.) and identification information of the holding table 120 used, information on the axis used by the cutting unit 131 in the processing section 130, the type (presence or absence of a hub, properties such as material, size, etc.) and identification information of the cutting blade 132, the type (properties, magnification, illuminance) and identification information of the microscope, lighting, etc. of the imaging unit 140, etc. The setting conditions for the operation of each component of the processing apparatus 100 are, specifically, the setting conditions for each operation, such as the alignment performed between the workpiece 200 on the holding table 120 and the cutting blade 132 of the processing section 130, the magnification of the microscope, the type of lighting (oblique lighting or direct lighting) and illuminance when capturing an image for alignment by the imaging unit 140, the blade height indicating the height of the lower end of the cutting blade 132 based on the holding surface 121 of the holding table 120, the Y index indicating the reference position of the cutting blade 132 in the Y-axis direction (axial direction), the spindle rotation speed indicating the number of rotations (rotational speed) of the cutting blade 132 around the axis, the feed speed indicating the speed at which the holding table 120 is moved relative to the rotating cutting blade 132 in the X-axis direction, the cutting order of the planned division lines 202 by the cutting blade 132, and the amount of cutting fluid.

[0032] In the present invention, the processing conditions of the workpiece 200 are appropriately changed depending on the type of the processing unit 130 (cutting unit, grinding unit, polishing unit, laser processing unit, etc.). For example, when the processing unit 130 is changed to a grinding unit or a polishing unit, the setting information of each component of the workpiece 200 is changed from the type and identification information of the cutting blade 132 to the type and identification information of the grinding stone and grinding wheel (shape, material, size, etc. of the grinding stone and grinding wheel), and the type and identification information of the polishing pad and polishing liquid (shape, material, size, etc. of the polishing pad, properties such as components and supply amount of the polishing liquid), and the setting conditions of the operation of each component of the processing device are changed from the setting conditions of the operation of the cutting blade 132 to the setting conditions of each operation such as the positional relationship between the rotation axis of the holding table and the rotation axis of the grinding wheel or polishing pad, the spindle rotation speed indicating the rotation speed (rotation speed) around the axis of the grinding wheel or polishing pad, the grinding feed speed, the polishing feed speed, etc. Furthermore, for example, when the processing section 130 is changed to a laser processing section, the setting information for each component of the workpiece 200 is changed from the type and identification information of the cutting blade 132 to the type (laser oscillation material, laser wavelength, properties of the optical system material, etc.) and identification information and positional relationship of each component of the laser beam irradiator and optical system, and the setting conditions for the operation of each component of the processing device are changed from the setting conditions for the operation of the cutting blade 132 to the setting conditions for each operation of optical characteristics such as the phase, polarization plane, amplitude, power, propagation direction, etc. of the laser beam, the presence or absence of pulses in the laser beam and the pulse interval, the focusing position of the laser beam in the Z-axis direction, the feed speed of the holding table, etc.

[0033] In the first embodiment, the operation history of the workpiece 200 is a record of the results of the operation of each component of the processing apparatus 100 when the processing apparatus 100 processes the workpiece 200, linked to the date and time when the processing apparatus 100 processes each workpiece 200. The results of the operation of each component of the processing apparatus 100 are specifically the results of each operation of each component of the processing apparatus 100 described in the explanation of the setting conditions, and include numerical values ​​(detected values ​​such as the load current value of the spindle motor) and information on errors (operation errors) of each operation of each component of the processing apparatus 100. In the first embodiment, the information on the operation errors of each component of the processing apparatus 100 is, for example, damage to the cutting blade 132, deviation from the setting conditions of each operation by a large amount exceeding a predetermined threshold, etc.

[0034] In the present invention, the operation history of the workpiece 200 is appropriately changed depending on the type of the processing unit 130, similarly to the above-mentioned processing conditions of the workpiece 200. Specifically, when the type of the processing unit 130 is changed, the operation history of the workpiece 200 is changed to a record in which the results including the numerical values ​​(detection values) and error (operation error) information of each operation of each component of the processing device, which have been changed similarly to the processing conditions of the workpiece 200, are linked to the date and time when the processing device performed the processing of each workpiece 200. The information on the operation error of each component of the processing device is appropriately changed depending on the type of the processing unit 130, similarly to the above.

[0035] In the first embodiment, the confirmation result information of the workpiece 200 is the result of the kerf check on the cutting groove based on the processing mark image of the workpiece 200, specifically, the detection values ​​(maximum value, minimum value, average value, etc.) for each check item such as off-center, kerf width, chipping width from the kerf center, and Max chipping width from the kerf end, and the pass / fail judgment. The off-center is the value of the deviation in the width direction of the kerf center, which is the center line representing the center position of the cutting groove in the width direction, from the center line of the division line 202. The kerf widths are the distances (intervals) between both ends of the cutting groove in the area confirmed by the kerf check. The chipping width from the kerf center is the distance between the end of the largest chipping in the width direction in the area confirmed by the kerf check and the center of the cutting groove in the width direction. The Max chipping width from the kerf end is the distance between the end of the largest chipping in the width direction in the area confirmed by the kerf check and the end of the cutting groove. The pass / fail judgment is a judgment result in which if it is within a range of a tolerance previously set for each check item, it is passed, and if it is outside the range of the tolerance, it is failed (result error).

[0036] In the present invention, the check result information of the workpiece 200 is appropriately changed depending on the type of the processing unit 130, similar to the above-mentioned processing conditions of the workpiece 200 and the operation history of the workpiece 200. For example, when the processing unit 130 is changed to a laser processing unit, the check result information of the workpiece 200 is the result of a kerf check on the laser processed groove, which is generally similar to when the processing unit 130 is the cutting unit 131. For example, when the processing unit 130 is changed to a grinding unit or a polishing unit, the check result information of the workpiece 200 is changed to detection values ​​and pass / fail judgments for each check item, such as the amount of grinding or polishing, the surface roughness of the grinding surface or polishing surface, and the inclination of the grinding surface or polishing surface, when the processing unit 130 is changed to a grinding unit or a polishing unit.

[0037] In the first embodiment, the control unit 150 includes a computer system. The computer system included in the control unit 150 includes an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. In the first embodiment, the function of the control unit 150 is realized by the arithmetic processing device of the computer system included in the control unit 150 executing a computer program stored in the storage device of the computer system included in the control unit 150. The arithmetic processing device of the control unit 150 performs arithmetic processing according to the computer program stored in the storage device of the control unit 150, and outputs a control signal for controlling the processing device 100 to each component of the processing device 100 via the input / output interface device of the control unit 150. The function of the processing result storage unit 151 is realized by the storage device of the control unit 150. The function of the information transmission unit 152 is realized by the input / output interface device of the control unit 150.

[0038] 1 and 2, the storage cassette 1 according to the first embodiment includes a storage section 10 that stores a plurality of plate-shaped workpieces 200 therein, and a recording device 20. As shown in Fig. 2, the storage section 10 has a pair of side walls 11, 12 facing each other, a bottom plate 13, a top plate 14, and a rear plate 15. The pair of side walls 11, 12, the bottom plate 13, the top plate 14, and the rear plate 15 are all formed in a flat plate shape.

[0039] The pair of side walls 11, 12 face each other along the Y-axis direction in FIG. 1 when the storage cassette 1 is placed on the cassette support part 110. The bottom plate 13 connects the lower ends of the pair of side walls 11, 12, and faces the cassette support part 110 side, which is the lower side in the Z-axis direction, when the storage cassette 1 is placed on the cassette support part 110. The top plate 14 connects the upper ends of the pair of side walls 11, 12, and faces the upper side in the Z-axis direction when the storage cassette 1 is placed on the cassette support part 110. As shown in FIG. 2, the top plate 14 is provided with a handle 17 that is used by operators of various processing devices to grasp and transport the storage cassette 1. The handle 17 is omitted in FIG. 3.

[0040] The back plate 15 connects the rear ends of the pair of side walls 11, 12, the bottom plate 13, and the top plate 14 of the storage unit 10 in FIG. 2, and faces the opposite side to the side where the holding table 120 is provided as seen from the cassette support unit 110 when the storage cassette 1 is placed on the cassette support unit 110. The storage unit 10 is surrounded by the front ends of the pair of side walls 11, 12, the bottom plate 13, and the top plate 14 of the storage unit 10 in FIG. 2 on the opposite side facing the back plate 15, forming an opening 16. The opening 16 communicates the inside and outside of the storage unit 10 so that the workpiece 200 can pass through. The workpiece 200 is carried from the storage unit 10 to the processing device 100 through the opening 16, or is carried out from the processing device 100 and stored in the storage unit 10. When the storage cassette 1 is placed on the cassette support portion 110, the opening 16 faces the side on which the holding table 120 is provided as viewed from the cassette support portion 110.

[0041] As shown in Figs. 2 and 3, the pair of side walls 11, 12 form a pair with each other, and a plurality of guide rails 18 extending along the direction in which the rear plate 15 and the opening 16 face each other (X-axis direction) are formed on the inside. The pair of guide rails 18 (pair of guide rails 18) are formed such that one side is formed convexly from the side wall 11 toward the side wall 12, and the other side is formed convexly from the side wall 12 toward the side wall 11, and are formed at positions with the same height in the Z-axis direction. The pairs of guide rails 18 are arranged at equal intervals in the Z-axis direction at predetermined intervals that are sufficiently larger than the thickness of the workpiece 200 and the thickness of the annular frame 206. The storage unit 10 stores the workpiece 200 by placing a portion of the annular frame 206 attached to one plate-like workpiece 200 on the pair of guide rails 18. The storage unit 10 stores a number of workpieces 200 equal to the number of pairs of guide rails 18. Each pair of guide rails 18 that accommodates the workpiece 200 is identified by the step number, for example, counted from the side closest to the bottom plate 13.

[0042] 4, the recording device 20 includes a recording unit 21, a transmitting unit 22, and a battery 23. The recording device 20 is disposed on the bottom plate 13 of the storage unit 10, and faces the information communication unit 111 and power supply unit 112 of the cassette support unit 110 when the storage cassette 1 is placed on the cassette support unit 110. In the case where the information communication unit 111 of the recording device 20 is connected to the control unit 150 by a wire and the power supply unit 112 is connected by a wire for charging, the recording device 20 is disposed exposed on the lower side of the bottom plate 13 of the storage unit 10 so as to come into contact with the information communication unit 111 and the power supply unit 112 of the cassette support unit 110 when the storage cassette 1 is placed on the cassette support unit 110. In addition, if the recording device 20 is of a type in which the information communication unit 111 is wirelessly connected to the control unit 150 and the power supply unit 112 is wirelessly connected for charging, the recording device 20 is disposed on the lower side of the bottom plate 13 of the storage unit 10 so as to be sufficiently close to the information communication unit 111 and power supply unit 112 of the cassette support unit 110 so as to be connectable thereto when the storage cassette 1 is placed on the cassette support unit 110.

[0043] When the storage cassette 1 is placed on the cassette support section 110 and connected to the control unit 150 via the information communication section 111 so as to be capable of communicating information, the recording device 20 acquires, from the information transmission section 152 of the control unit 150 via the information communication section 111, information on the type of processing apparatus 100 (such as the type and identification information of the processing section 130), as well as information stored in the processing result memory section 151 of the control unit 150, i.e., the stage number identification information of the workpiece 200, which are matched up with each other for each workpiece 200, the ID information of the workpiece 200 read during processing, information on the workpiece 200, the processing conditions of the workpiece 200, the operation history of the workpiece 200, images of processing marks on the workpiece 200, and confirmation result information of the workpiece 200, and records the information in the recording section 21 as processing history data 500 (see Figure 5).

[0044] 5 is a diagram showing an example of processing history data 500 recorded by the recording unit 21 of FIG. 4. The recording unit 21 records, for each workpiece 200 accommodated in the accommodation unit 10 of the accommodation cassette 1, the processing history (processing history of the workpiece 200) of the workpiece 200 processed by the processing unit 130 in the processing device 100, as shown in FIG. 5, based on the information acquired by the recording device 20 from the information transmission unit 152 of the control unit 150 via the information communication unit 111. The processing history of the workpiece 200 is data in which, for each workpiece 200, information on the type of the processing device 100 that processed the workpiece 200, the processing conditions of the workpiece 200, the operation history of the workpiece 200, and the processing result of the workpiece 200 are compared with each other, as shown in the processing history column of the processing history data 500 of FIG. 5. The identification information of the workpiece 200 is data obtained by comparing the ID information of the workpiece 200 read during processing and the tier identification information of the workpiece 200 (the tier number column in FIG. 5) for each workpiece 200, as shown in the workpiece column of the processing history data 500 in FIG. 5. The processing history data 500 recorded by the recording unit 21 is not limited to the example shown in FIG. 5 in the present invention, and the identification information of the workpiece 200 may be data obtained by further comparing the information of the workpiece 200 for each workpiece 200, or the identification information of the workpiece 200 may be only one of the ID information of the workpiece 200 read during processing and the tier identification information of the workpiece 200. For example, when the ID mark 210 is not formed on the workpiece 200, the ID information of the workpiece 200 read from the ID mark 210 during processing may be omitted.

[0045] The transmitting unit 22 transmits part or all of the processing history data 500 recorded in the recording unit 21 to the terminal device 400 connected to be able to communicate with the recording unit 21. In the first embodiment, the transmitting unit 22 is a wireless transmitter that is connected to be able to communicate with the terminal device 400 when the terminal device 400 approaches within a predetermined range from the transmitting unit 22 of the recording device 20 and transmits information to the terminal device 400 wirelessly, but the present invention is not limited to this and may be a wired transmitter that transmits information to the terminal device 400 connected to be able to communicate with the terminal device 400 via a wire.

[0046] The battery 23 is a power source that supplies the power necessary for the operation of the recording device 20. The battery 23 is rechargeable, and when the storage cassette 1 is placed on the cassette support part 110 and connected to the power supply part 112, the battery 23 receives power from the power supply part 112 and is charged.

[0047] In the first embodiment, the recording device 20 includes a computer system similar to the control unit 150, and has an arithmetic processing unit having a microprocessor such as a CPU, a storage device having a memory such as a ROM or RAM, and an input / output interface device. In the first embodiment, the functions of the recording device 20 are realized by the arithmetic processing unit of the computer system included in the recording device 20 executing a computer program stored in the storage device of the computer system included in the recording device 20. The functions of the recording unit 21 are realized by the storage device of the recording device 20. The functions of the transmission unit 22 are realized by the input / output interface device of the recording device 20.

[0048] 4, the terminal device 400 to which information is transmitted from the transmission unit 22 of the recording device 20 includes a recording unit 401, a receiving unit 402, a display screen 403, and an operation unit 404. The recording unit 401 records part or all of the information of the processing history data 500 recorded in the recording unit 21 based on the information acquired by the terminal device 400 from the recording device 20 via the transmission unit 22. The receiving unit 402 receives the information transmitted from the recording device 20 via the transmission unit 22.

[0049] Examples of the terminal device 400 include mobile phones including high-function mobile phones (so-called smartphones), tablet terminals, notebook or desktop PCs (Personal Computers), PDAs (Personal Digital Assistants) that are portable information terminals, glasses-type or watch-type wearable devices, wireless earphones, wireless headphones, and the like. The terminal device 400 includes a computer system similar to the control unit 150 or the recording device 20, and includes an arithmetic processing unit having a microprocessor such as a CPU, a storage device having a memory such as a ROM or RAM, and an input / output interface device. In the first embodiment, the functions of the terminal device 400 are realized by the arithmetic processing unit of the computer system included in the terminal device 400 executing a computer program stored in the storage device of the computer system included in the terminal device 400. The functions of the recording unit 401 are realized by the storage device of the terminal device 400. The functions of the receiving unit 402 are realized by the input / output interface device of the terminal device 400.

[0050] The display screen 403 displays a screen related to part or all of the processing history data 500 generated by the terminal device 400 based on the information recorded by the recording unit 401 and the information received by the receiving unit 402, to the operator 300 who is using the terminal device 400. In the first embodiment, the display screen 403 is configured with a liquid crystal display device or the like. The operation unit 404 accepts inputs from the operator 300, such as a command to the receiving unit 402 to receive information from the recording device 20, and a command to the terminal device 400 to enlarge / reduce, scroll, change, etc. the screen displayed on the display screen 403. In the first embodiment, the operation unit 404 is configured with at least one of a touch panel provided on the display screen 403 and a keyboard or the like.

[0051] Next, this specification describes the operation of the storage cassette 1 according to the first embodiment with reference to the drawings. Fig. 6 is a cross-sectional view showing an example of the operation of the storage cassette 1 according to the first embodiment. First, when the storage cassette 1 is placed on the cassette support part 110 of the processing device 100, the recording device 20 becomes capable of communicating with the control unit 150 via the information communication part 111, and the battery 23 of the recording device 20 receives power from the power supply part 112 and is charged.

[0052] Next, the control unit 150 of the processing device 100 including the cassette support part 110 on which the storage cassette 1 is placed controls the cassette support part 110 to raise and lower the storage cassette 1 in the Z-axis direction by the cassette support part 110, while controlling the workpiece detection sensor 113 to obtain and register information on the number of storage stages of the workpieces 200 by the workpiece detection sensor 113. Then, every time the transport unit carries in one workpiece 200 from the storage part 10 of the storage cassette 1, the control unit 150 generates number-of-stage identification information for each workpiece 200 to be carried into the processing device 100 based on the information on the number of storage stages of the workpieces 200 registered for the storage cassette 1, the position in the Z-axis direction when the workpieces 200 were carried in to the processing device 100, and the order in which the workpieces 200 were carried in to the processing device 100, and places the carried-in workpieces 200 on the holding surface 121 of the holding table 120.

[0053] The control unit 150 then cuts the workpiece 200 along the division line 202 and forms a cutting mark (cut groove) by moving the cutting blade 132 of the processing section 130 on the holding surface 121 of the holding table 120 relative to the workpiece 200 along the division line 202 while rotating the cutting blade 132 according to the processing conditions for the workpiece 200 set by the operator 300, as shown in FIG. 6, for each workpiece 200 carried into the processing device 100. The control unit 150 also acquires the operation history of each component of the processing device 100 during the cutting process (operation history of the workpiece 200). The control unit 150 also acquires the ID information of the workpiece 200 being processed by reading the ID mark 210 of the workpiece 200 by the imaging unit 140 before, after, or in parallel with the cutting process. If the ID mark 210 is not formed on the workpiece 200, the control unit 150 omits the process of reading the ID mark 210 during processing to obtain the ID information of the workpiece 200. Thereafter, for each workpiece 200 carried into the processing device 100, the control unit 150 captures an image of the processing mark (cut groove) formed on the workpiece 200 by the imaging unit 140 to obtain an image of the processing mark on the workpiece 200, performs a kerf check based on the obtained image of the processing mark on the workpiece 200 to evaluate the processing result, and obtains confirmation result information for the workpiece 200.

[0054] The control unit 150 stores the step number identification information of the workpiece 200 thus carried into the processing device 100, the ID information of the workpiece 200 read during processing, the information of the workpiece 200, the processing conditions of the workpiece 200, the operation history of the workpiece 200, the processing mark image of the workpiece 200, and the confirmation result information of the workpiece 200 in the processing result storage unit 151 in a manner that is correlated for each workpiece 200. The information transmission unit 152 of the control unit 150 transmits the information correlated for each workpiece 200 stored in the processing result storage unit 151 to the recording device 20 of the storage cassette 1 via the information communication unit 111 in association with the information of the type of the processing device 100. The recording device 20 of the storage cassette 1 acquires the information transmitted from the control unit 150 and records it in the recording unit 21 of the storage cassette 1 as processing history data 500 as shown in FIG. 5.

[0055] When the operator 300 brings the terminal device 400 close to the recording device 20 of the storage cassette 1 and the transmission unit 22 is connected to the terminal device 400 so as to be capable of communicating information, the transmission unit 22 transmits part or all of the information of the processing history data 500 recorded in the recording unit 21. The terminal device 400 receives part or all of the information of the processing history data 500 transmitted from the transmission unit 22 by the reception unit 402, and records this information by the recording unit 401. The terminal device 400 displays part or all of the information of the processing history data 500 on the display screen 403 so that the operator 300 can visually confirm it in response to an operation input from the operator 300 to the operation unit 404, etc.

[0056] When the workpiece 200 accommodated in the accommodation section 10 of the accommodation cassette 1 is processed by a plurality of processing devices, the recording device 20 of the accommodation cassette 1 acquires various information from the control units of the plurality of processing devices, records processing history data including the processing history by the plurality of processing devices in the recording section 21 of the accommodation cassette 1, and transmits part or all of the information of the processing history data including the processing history by the plurality of processing devices by the transmission section 22. The terminal device 400 receives part or all of the information of the processing history data including the processing history by the plurality of processing devices transmitted from the transmission section 22 by the reception section 402, records this information by the recording section 401, and displays part or all of the information of the processing history data including the processing history by the plurality of processing devices on the display screen 403 so that the operator 300 can visually confirm it in response to an input of an operation to the operation section 404 from the operator 300.

[0057] The storage cassette 1 of embodiment 1 having the above-mentioned configuration has a recording device 20 that stores the processing history generated by the processing device 100 that processed the workpiece 200 stored in the storage section 10 in a corresponding manner for each workpiece 200, thereby achieving the advantageous effect of making it possible to easily check the processing history for each workpiece 200 stored in the storage section 10 from the information output from the recording device 20 to the terminal device 400 without investigating the processing history on the processing device 100 side.

[0058] Furthermore, the storage cassette 1 of embodiment 1 is equipped with a battery 23 that is charged by receiving power from the power supply unit 112 simply by placing it on the cassette support unit 110 of the processing apparatus 100, thereby eliminating the need to bother with charging the battery 23.

[0059] [Embodiment 2] A storage cassette 1-2 according to a second embodiment of the present invention will be described with reference to the drawings. Fig. 7 is a perspective view showing a configuration example of the storage cassette 1-2 according to the second embodiment. Fig. 8 is a cross-sectional view showing the storage cassette 1-2 of Fig. 7. In the second embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

[0060] 7 and 8, a storage cassette 1-2 according to the second embodiment is obtained by changing the recording device 20 in the storage cassette 1 according to the first embodiment to a recording device 20-2 further including a display screen 25, an operation unit 26, and a connection line 27. In the second embodiment, the recording device 20-2 is disposed on the top plate 14 of the storage unit 10 with the display screen 25 and the operation unit 26 facing outward, as shown in FIGS.

[0061] The display screen 25 displays a screen relating to a part or all of the information of the processing history data 500 recorded in the recording unit 21 to the operator 300. In the second embodiment, the display screen 25 is configured with a liquid crystal display device or the like. The operation unit 26 accepts input of commands from the operator 300 to the recording device 20-2, such as enlarging / reducing, scrolling, changing, etc. the screen displayed on the display screen 25. In the second embodiment, the operation unit 26 is configured with at least one of a touch panel provided on the display screen 25, a keyboard, etc.

[0062] The connection line 27 is disposed so as to extend from the recording device 20-2 to the outside of the bottom plate 13 that faces the information communication unit 111 and power supply unit 112 of the cassette support unit 110 when the storage cassette 1-2 is placed on the cassette support unit 110, penetrating through the inside of the top plate 14, the inside of the pair of side walls 11, 12 or the back plate 15, and the inside of the bottom plate 13. When the storage cassette 1-2 is placed on the cassette support unit 110, the outer end of the connection line 27 on the bottom plate 13 comes into contact with the information communication unit 111 and the power supply unit 112 of the cassette support unit 110, so that the recording device 20-2 is electrically connected to the control unit 150 via the information communication unit 111 so as to be able to communicate information, and the battery 23 is charged by receiving power from the power supply unit 112.

[0063] The storage cassette 1-2 of embodiment 2 having the above-mentioned configuration is the storage cassette 1 of embodiment 1, in which the recording device 20-2 further includes a display screen 25 and an operation unit 26, and therefore in addition to the advantageous effects of the storage cassette 1 of embodiment 1, it has the advantageous effect of being able to easily check the processing history of the workpiece 200 stored in the storage unit 10 from the display screen 25 without outputting from the recording device 20-2 to the terminal device 400.

[0064] According to the storage cassettes according to the first and second embodiments, the following workpiece management system can be obtained. (Appendix 1) a storage cassette having a storage section for storing a plurality of plate-shaped workpieces and a recording device for recording the processing history of the workpieces; a processing device for processing the workpieces accommodated in the accommodation cassette; A workpiece management system comprising: the processing device comprises a cassette support section that supports the storage cassette, a processing section that processes the workpiece, a reading section that reads an ID mark attached to the workpiece, a processing result storage section that stores the processing results of the workpiece for each workpiece, and an information transmission section that transmits the processing results for each workpiece to the recording device of the storage cassette supported by the cassette support section; The recording device of the storage cassette includes a recording unit that records information from the information transmitting unit, and a transmitting unit that transmits the information recorded in the recording unit to a terminal device.

[0065] In the above-mentioned processing device, similarly to the storage cassettes of embodiments 1 and 2, the recording device stores the processing history generated by the processing device that processed the workpieces stored in the storage section, comparing them with each other for each workpiece, thereby achieving the advantageous effect that the processing history for each workpiece stored in the storage section can be easily confirmed from the information output from the recording device to the terminal device or from the display screen of the recording device, without having to investigate the processing history on the processing device side.

[0066] It should be noted that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention. [Explanation of symbols]

[0067] 1,1-2 Storage Cassette 10 Storage section 11,12 A pair of side walls 18 Guide rail 20,20-2 Recording devices 21 Recording Section 22 Transmitter 23 Batteries 25 Display screen 100 Processing equipment 110 Cassette support 130 Processing Department 140 Imaging unit (reading unit) 150 Control Unit 151 Machining result storage section 152 Information Transmission Department 200 Workpiece 210 ID mark 400 Terminal Equipment 500 Processing history data 1000 Workpiece Management System

Claims

1. A storage cassette for loading and unloading a plurality of workpieces into and from a processing device, a storage section having a pair of side walls with a plurality of paired guide rails formed on the inside thereof, the storage section storing a plurality of plate-shaped workpieces; a recording device including a recording section for recording information on the type of the processing device that processed the workpiece, the processing conditions of the workpiece, the operation history of the workpiece, and the processing results of the workpiece in association with ID information of the accommodated workpiece or the number of stages of the guide rail in which the workpiece is accommodated, and a transmitting section for transmitting the recorded information to a terminal device; A storage cassette comprising:

2. The recording device is provided with a rechargeable battery as a power source, 2. The storage cassette according to claim 1, wherein when the storage cassette is placed on a cassette support of the processing device, the battery is connected to a power supply source and the battery is charged.

3. 3. The storage cassette according to claim 1, wherein the recording device includes a display screen for displaying the information recorded by the recording section.

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