Ultrasonic Inspection Equipment

Abstract

To reduce a diffracted wave reaching a reception part regardless of a mode of conveyance of an analyte between a transmission part and the reception part in an ultrasonic inspection device.SOLUTION: An ultrasonic inspection device 1 includes: a transmission part 10 for transmitting an ultrasonic wave W; a reception part 20 which is positioned at an interval relative to the transmission part 10 and receives the ultrasonic wave W; and an attenuation member 30 which attenuates the ultrasonic wave W. The attenuation member 30 is located between the transmission part 10 and the reception part 20, and has a contact part 31 which is in contact with an edge part 103 of an analyte 100 passing through the transmission part 10 and the reception part 20. The contact part 31 is formed so as to wrap around the edge part 103 of the analyte 100 passing between the transmission part 10 and the reception part 20 at an arbitrary position in an arrangement direction of the transmission part 10 and the reception part 20.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to an ultrasonic inspection device. [Background technology]

[0002] Conventionally, there is an ultrasonic inspection device that has a transmitting section that transmits ultrasonic waves toward an object to be inspected and a receiving section that receives ultrasonic waves that have passed through the object, and detects defects inside the object by analyzing the reception status of the ultrasonic waves at the receiving section. In such an ultrasonic inspection device, when ultrasonic waves are transmitted from the transmitting section toward a portion of the object close to the edge (the edge of the object), diffracted waves may occur in which the ultrasonic waves wrap around the outside of the edge of the object and reach the receiving section. When the receiving section receives diffracted waves that do not pass through the object, defects inside the object may not be detected correctly.

[0003] In response to this, Patent Document 1 discloses an ultrasonic inspection device in which a shielding member (regulating section) for shielding diffracted waves is provided between an object (object to be inspected) and a transmitting section, or between the object and a receiving section. In the ultrasonic inspection device of Patent Document 1, the shielding member is used to reduce the diffracted waves that reach the receiving section. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2020-027011 A Summary of the Invention [Problem to be solved by the invention]

[0005] In such an ultrasonic inspection device, defects inside the object may be detected while the object is transported between the transmitting unit and the receiving unit in a direction intersecting the direction in which the transmitting unit and the receiving unit are arranged (arrangement direction). Depending on the method of transporting the object, the trajectory of the object transported between the transmitting unit and the receiving unit may be curved rather than linear, or may be inclined rather than perpendicular to the arrangement direction of the transmitting unit and the receiving unit. Therefore, when the object passes between the transmitting unit and the receiving unit, the position of the object in the arrangement direction of the transmitting unit and the receiving unit changes. When the position of the object changes in this way, even if the shielding member of Patent Document 1 is provided, the relative position between the shielding member and the object in the arrangement direction of the transmitting unit and the receiving unit changes, so that the diffracted wave is more likely to reach the receiving unit.

[0006] The present invention has been made in consideration of the above-mentioned circumstances, and aims to provide an ultrasonic inspection device that can reduce diffracted waves that reach the receiving unit, regardless of the manner in which the subject is transported between the transmitting unit and the receiving unit. [Means for solving the problem]

[0007] A first aspect of the present invention is an ultrasound inspection device comprising a transmitting unit that transmits ultrasound, a receiving unit positioned at a distance from the transmitting unit and receiving the ultrasound, and an attenuation member that attenuates the ultrasound, wherein the attenuation member is positioned between the transmitting unit and the receiving unit and has a contact portion that contacts an edge of a subject passing between the transmitting unit and the receiving unit, and the contact portion is formed so as to embrace the edge of the subject passing between the transmitting unit and the receiving unit at any position in the arrangement direction of the transmitting unit and the receiving unit. Effect of the Invention

[0008] According to the present invention, it is possible to reduce diffracted waves that reach the receiving section, regardless of the manner in which the subject is transported between the transmitting section and the receiving section. [Brief description of the drawings]

[0009] [Figure 1]1 is a front view showing a schematic view of a main part of an ultrasonic inspection device according to a first embodiment. FIG. [Diagram 2] FIG. 2 is a cross-sectional view taken along the line II-II of FIG. [Diagram 3] FIG. 3 is a diagram showing the pitch of bristles in the damping member of FIGS. [Figure 4] 1 is a diagram showing an example of a trajectory of a subject being transported between a transmitting unit and a receiving unit; FIG. [Diagram 5] 13 is a diagram showing another example of the trajectory of the transport of the subject passing between the transmitting unit and the receiving unit. FIG. [Figure 6] FIG. 11 is a perspective view showing a schematic view of a main part of an ultrasonic inspection device according to a second embodiment. [Figure 7] FIG. 13 is a front view showing a schematic view of a main part of an ultrasonic inspection device according to a third embodiment. [Figure 8] FIG. 13 is a front view showing a schematic view of a main part of an ultrasonic inspection device according to a fourth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] First Embodiment Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. 1 and 2, an ultrasonic inspection device 1 of this embodiment inspects a test object 100 for defects by using ultrasonic waves W. The test object 100 of this embodiment is formed by overlapping and bonding two members 101, and constitutes, for example, a packaging container. The defect in the test object 100 is, for example, a peeled portion of the two bonded members 101.

[0011] The ultrasonic inspection device 1 includes a transmitting unit 10, a receiving unit 20, and an attenuation member 30. The transmitting unit 10 and the receiving unit 20 are positioned at a distance from each other. The transmitting unit 10 and the receiving unit 20 are fixed to a base unit 5. This maintains the distance between the transmitting unit 10 and the receiving unit 20. The transmitting unit 10 transmits ultrasonic waves W toward the receiving unit 20. The ultrasonic waves W are transmitted from the transmitting surface 10a of the transmitting unit 10. In this embodiment, the transmitting surface 10a is a flat surface. Therefore, the ultrasonic waves W transmitted from the transmitting surface 10a of the transmitting unit 10 propagate toward the subject 100 without converging. The receiving unit 20 is positioned at a distance from the transmitting unit 10, and receives the ultrasonic waves W transmitted from the transmitting unit 10. The receiving unit 20 faces the transmitting surface 10a of the transmitting unit 10, and has a receiving surface 20a that receives the ultrasonic waves W. In this embodiment, the receiving surface 20a is a flat surface.

[0012] In the drawings, the arrangement direction of the transmitting units 10 and the receiving units 20 is indicated in the X-axis direction. The positive direction of the X-axis indicates the main transmission direction of the ultrasonic waves W. The Y-axis direction indicates the main direction in which the subject 100 passes between the transmitting units 10 and the receiving units 20, which is perpendicular to the arrangement direction of the transmitting units 10 and the receiving units 20. The Z-axis direction indicates the direction perpendicular to the X-axis and Y-axis directions.

[0013] When the subject 100 passes between the transmitting unit 10 and the receiving unit 20, the two members 101 constituting the subject 100 are aligned mainly in the arrangement direction (X-axis direction) of the transmitting unit 10 and the receiving unit 20. The subject 100 passing between the transmitting unit 10 and the receiving unit 20 extends in the positive direction of the Z-axis. In the following description, the tip portion of the subject 100 in the extension direction (positive direction of the Z-axis) is referred to as the edge 103 of the subject 100.

[0014] The attenuation member 30 is a member for attenuating the ultrasonic wave W transmitted from the transmitting unit 10 so as not to reach the receiving unit 20. The attenuation member 30 has a contact portion 31 located between the transmitting unit 10 and the receiving unit 20. The contact portion 31 contacts an edge portion 103 of the subject 100 passing between the transmitting unit 10 and the receiving unit 20. The contact portion 31 is formed so as to enclose the edge portion 103 of the subject 100 passing between the transmitting unit 10 and the receiving unit 20 at an arbitrary position in the arrangement direction of the transmitting unit 10 and the receiving unit 20. The contact portion 31 of this embodiment is formed so that the edge portion 103 of the subject 100 passing between the transmitting unit 10 and the receiving unit 20 enters inside the contact portion 31. The attenuation member 30 of this embodiment will be specifically described below.

[0015] The damping member 30 of this embodiment is a brush including a base 33 and a large number of bristles 34 extending from the base 33 to form the contact portion 31. In this embodiment, the base 33 of the damping member 30 is integrally formed with the base portion 5 to which the transmitting portion 10 and the receiving portion 20 are fixed. The base 33 may be formed separately from the base portion 5, for example. The large number of bristles 34 are made of nylon resin or the like, and are formed to be elastically deformable. The large number of bristles 34 extend from a surface 33a (hereinafter referred to as the base surface 33a) of the base 33 facing the area between the transmitting surface 10a and the receiving surface 20a, toward the area in a direction intersecting the X-axis direction.

[0016] The base surface 33a is located outside the region between the transmitting surface 10a and the receiving surface 20a. The numerous bristles 34 extend from the base surface 33a mainly in the negative Z-axis direction (i.e., the direction opposite to the extension direction of the subject 100) and enter the region between the transmitting surface 10a and the receiving surface 20a. The length of the numerous bristles 34 in the Z-axis direction is sufficiently smaller than the dimensions of the transmitting surface 10a and the receiving surface 20a in the Z-axis direction. Therefore, the numerous bristles 34 are arranged only in the region between the transmitting surface 10a and the receiving surface 20a on the base surface 33a side in the Z-axis direction. In this embodiment, the pitch P of the numerous bristles 34 shown in FIG.

[0017] The contact portion 31 of the attenuation member 30 may protrude outward from both ends of the transmitting portion 10 and the receiving portion 20 in the Y-axis direction, as shown in, for example, FIGS.

[0018] 1 and 2, in the ultrasonic inspection device 1 of this embodiment configured as above, the subject 100 is transported between the transmitting unit 10 and the receiving unit 20 so as to pass mainly in the positive direction of the Y axis. At this time, ultrasonic waves W1 (i.e., transmitted waves) transmitted from the transmitting unit 10 and transmitted through the subject 100 are received by the receiving unit 20 and analyzed, so that defects in the subject 100 can be inspected.

[0019] When the subject 100 passes between the transmitting unit 10 and the receiving unit 20, the edge 103 of the subject 100 enters the inside of the contact unit 31, and the edge 103 of the subject 100 is enveloped by the contact unit 31. Specifically, the edge 103 of the subject 100 enters between the many hairs 34. At this time, the hairs 34 that come into contact with the subject 100 are pushed by the subject 100 and elastically bend and deform. That is, the hairs 34 that come into contact with the subject 100 are deformed from a reference state in which no external force is acting on these hairs 34. On the other hand, after the subject 100 passes between the transmitting unit 10 and the receiving unit 20, the many hairs 34 elastically return to the reference state.

[0020] As described above, according to the ultrasonic inspection device 1 of the first embodiment, when the subject 100 passes between the transmitting unit 10 and the receiving unit 20, the edge 103 of the subject 100 is enveloped by the contact portion 31 of the attenuating member 30 provided between the transmitting unit 10 and the receiving unit 20. Therefore, as shown in FIG. 1, ultrasonic waves W2 (i.e., diffracted waves) that try to go around the outside are attenuated by the attenuating member 30, and can be prevented from reaching the receiving unit 20.

[0021] In addition, in the ultrasonic inspection device 1 of the first embodiment, the contact portion 31 of the attenuation member 30 is formed to enclose the edge portion 103 of the subject 100 passing between the transmitting unit 10 and the receiving unit 20 at any position in the arrangement direction of the transmitting unit 10 and the receiving unit 20. Specifically, the contact portion 31 is formed so that the edge portion 103 of the subject 100 enters the inside of the contact portion 31, so that the edge portion 103 of the subject 100 can be enclosed at any position in the arrangement direction of the transmitting unit 10 and the receiving unit 20. Therefore, even if the position of the subject 100 in the arrangement direction of the transmitting unit 10 and the receiving unit 20 changes when the subject 100 passes between the transmitting unit 10 and the receiving unit 20, the edge portion 103 of the subject 100 can be enclosed by the contact portion 31 of the attenuation member 30. Therefore, regardless of the manner of transportation of the subject 100 between the transmitting unit 10 and the receiving unit 20, the diffracted waves reaching the receiving unit 20 can be reduced.

[0022] Here, an example of how the subject 100 is transported between the transmitting section 10 and the receiving section 20 will be described with reference to FIGS. The subject 100 may be transported such that a trajectory T1 of the subject 100 passing between the transmitter 10 and the receiver 20 is arc-shaped as viewed from the Z-axis direction, as shown in FIG. 4, for example. When the subject 100 is transported by a transport device (rotary transport device) that rotates around the Z-axis direction as a central axis, the trajectory T1 of the subject 100 may be arc-shaped as shown in FIG. 4. In addition, the subject 100 may be transported such that a trajectory T2 of the subject 100 passing between the transmitter 10 and the receiver 20 is inclined with respect to the Y-axis direction, as shown in FIG. 5, for example. When the trajectories T1 and T2 of the subject 100 passing between the transmitter 10 and the receiver 20 are arc-shaped or inclined with respect to the Y-axis direction, the position of the subject 100 in the arrangement direction of the transmitter 10 and the receiver 20 changes during the process of the subject 100 passing.

[0023] Furthermore, as illustrated in FIG. 5, even if the trajectory T3 of the transport of the subject 100 passing between the transmitting unit 10 and the receiving unit 20 is parallel to the Y-axis direction, if the accuracy of the transport device transporting the subject 100 is low, there may be variation in the passing position of the subject 100 in the arrangement direction of the transmitting unit 10 and the receiving unit 20. In the ultrasonic inspection device 1 of this embodiment, even when the subject 100 is transported in the various ways described above, the edge 103 of the subject 100 can be wrapped by the contact portion 31 of the attenuation member 30, thereby reducing the diffracted waves reaching the receiving unit 20.

[0024] In the ultrasonic inspection device 1 of the first embodiment, the contact portion 31 of the attenuation member 30 is composed of a large number of bristles 34. The edge portion 103 of the subject 100 passing between the transmitting unit 10 and the receiving unit 20 can enter between the large number of bristles 34 at any position in the arrangement direction of the transmitting unit 10 and the receiving unit 20. This allows the edge portion 103 of the subject 100 to reliably enter inside the contact portion 31 regardless of the position of the subject 100 in the arrangement direction of the transmitting unit 10 and the receiving unit 20. In other words, the contact portion 31 can reliably wrap around the edge portion 103 of the subject 100. In addition, the ultrasonic waves W2 that try to go around the outside of the edge 103 of the subject 100 can be scattered by the numerous hairs 34 that make up the contact portion 31. Therefore, the ultrasonic waves W2 can be attenuated, and the diffracted waves that reach the receiving portion 20 can be reduced.

[0025] Furthermore, in the ultrasonic inspection device 1 of the first embodiment, the pitch P of the many hairs 34 is equal to or less than the wavelength of the ultrasonic waves W. This makes it possible to more reliably scatter the ultrasonic waves W2 that have entered between the many hairs 34 and are trying to go around the outside of the edge 103 of the subject 100 by the many hairs 34. This makes it possible to more effectively attenuate the ultrasonic waves W2 and further reduce the diffracted waves that reach the receiving unit 20.

[0026] Second Embodiment Next, a second embodiment of the present invention will be described with reference to Fig. 6. In the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

[0027] 6, an ultrasonic inspection device 1D of the second embodiment includes a transmitting unit 10, a receiving unit 20, and an attenuation member 30D, similar to the first embodiment. The attenuation member 30D of the present embodiment is a member for attenuating ultrasonic waves W (see FIG. 1) transmitted from the transmitting unit 10 so as not to reach the receiving unit 20, similar to the first embodiment. Also, the attenuation member 30D has a contact portion 31D formed so that an edge portion 103 of a subject 100 passing between the transmitting unit 10 and the receiving unit 20 can enter inside, similar to the first embodiment.

[0028] However, the attenuation member 30D of this embodiment has a base 33 and a plurality of sheet members 35D extending from the base 33 to form the contact portion 31D. The sheet member 35D is a flexible sheet-like member such as a cloth or a film. The plurality of sheet members 35D extend in the negative direction of the Z axis from the base surface 33a of the base 33 toward the area between the transmission surface 10a and the reception surface 20a. Specifically, the ultrasonic inspection device 1D of this embodiment is arranged so that the base surface 33a of the base 33 faces downward. As a result, the plurality of sheet members 35D are suspended so as to extend downward (in the negative direction of the Z axis) from the base surface 33a by their own weight. As a result, the plurality of sheet members 35D enter the area between the transmission surface 10a and the reception surface 20a. 6, the sheet members 35D are attached to the base 33 so as to extend in the Y-axis direction. The sheet members 35D are also arranged at intervals in the X-axis direction.

[0029] A slit 351D is formed in each sheet member 35D. The slit 351D is formed in the tip portion in the extension direction (negative direction of the Z axis) of each sheet member 35D and divides the tip portion of the sheet member 35D into multiple portions. This allows the multiple tip portions of each sheet member 35D to move and flex independently of each other. 6, a plurality of slits 351D are formed in each sheet member 35D. As a result, a plurality of tip portions of the same sheet member 35D that can move independently of each other due to the slits 351D are aligned in the Y-axis direction.

[0030] In the ultrasonic inspection apparatus 1D of this embodiment, as in the first embodiment, when the subject 100 is transported between the transmitting unit 10 and the receiving unit 20 mainly in the positive direction of the Y axis, the ultrasonic waves W transmitted from the transmitting unit 10 pass through the subject 100 and are received by the receiving unit 20, thereby enabling defects in the subject 100 to be inspected.

[0031] When the subject 100 passes between the transmitting unit 10 and the receiving unit 20, the edge 103 of the subject 100 enters the inside of the contact portion 31D, so that the edge 103 of the subject 100 is enveloped by the contact portion 31D. Specifically, the edge 103 of the subject 100 enters between the plurality of sheet members 35D or between the adjacent tip portions of the sheet members 35D. At this time, the sheet member 35D (particularly the tip portion) that comes into contact with the subject 100 is, for example, pushed by the subject 100 and deformed by bending. That is, the sheet member 35D that comes into contact with the subject 100 is deformed from a reference state in which no external force is acting on the sheet member 35D. On the other hand, after the subject 100 comes out from between the transmitting unit 10 and the receiving unit 20, the sheet member 35D returns to the reference state by its own weight.

[0032] As described above, the ultrasonic inspection device 1D of the second embodiment provides the same effects as the first embodiment. In the ultrasonic inspection device 1D of the second embodiment, the contact portion 31D of the attenuation member 30D is composed of a plurality of sheet members 35D suspended from the base 33. The plurality of sheet members 35D are arranged at intervals in the arrangement direction of the transmitting unit 10 and the receiving unit 20. This allows the edge portion 103 of the subject 100 passing between the transmitting unit 10 and the receiving unit 20 to enter between the plurality of sheet members 35D at any position in the arrangement direction of the transmitting unit 10 and the receiving unit 20. Therefore, regardless of the position of the subject 100 in the arrangement direction of the transmitting unit 10 and the receiving unit 20, the edge portion 103 of the subject 100 can be reliably inserted into the contact portion 31D. That is, the contact portion 31D can reliably wrap the edge portion 103 of the subject 100. Furthermore, the ultrasonic waves W2 (see FIG. 1) that try to go around the outside of the edge 103 of the subject 100 can be reflected or scattered by the multiple sheet members 35D that make up the contact portion 31D. Therefore, the ultrasonic waves W can be attenuated, and the diffracted waves that reach the receiving portion 20 can be reduced.

[0033] In the second embodiment, the multiple sheet members 35D may be attached to the base 33 so as to extend in the X-axis direction, for example, and may be spaced apart in the Y-axis direction.

[0034] Third Embodiment Next, a third embodiment of the present invention will be described with reference to Fig. 7. In the third embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

[0035] 7, an ultrasonic inspection device 1E of the second embodiment includes a transmitting unit 10, a receiving unit 20, and an attenuation member 30E, similar to the first embodiment. The attenuation member 30E of the present embodiment is a member for attenuating ultrasonic waves W (see FIG. 1) transmitted from the transmitting unit 10 so as not to reach the receiving unit 20, similar to the first embodiment. Also, the attenuation member 30E has a contact portion 31E formed so as to wrap around an edge portion 103 of the subject 100 passing between the transmitting unit 10 and the receiving unit 20 at an arbitrary position in the arrangement direction (X-axis direction) of the transmitting unit 10 and the receiving unit 20, similar to the first embodiment.

[0036] However, the contact portion 31E of this embodiment is formed so as to deform from the reference state so as to enclose the edge portion 103 of the subject 100 passing between the transmitting portion 10 and the receiving portion 20, and to return to the reference state after the edge portion 103 of the subject 100 moves out from between the transmitting portion 10 and the receiving portion 20. The reference state of the contact portion 31E means a state in which no external force is acting on the contact portion 31E. The damping member 30E of this embodiment will be specifically described below.

[0037] The attenuation member 30E of this embodiment has a base 33 and a sheet member 35E attached to the base 33 to form a contact portion 31E. The sheet member 35E is a flexible sheet-like member such as a cloth or a film. Both ends 35E1 of the sheet member 35E are fixed to the base surface 33a of the base 33. In FIG. 7, both ends 35E1 of the sheet member 35E are arranged at intervals in the X-axis direction. The interval between both ends 35E1 of the sheet member 35E fixed to the base surface 33a is smaller than the length of the sheet member 35E in the X-axis direction. Therefore, a portion 35E2 between both ends 35E1 of the sheet member 35E (hereinafter, referred to as the intermediate portion 35E2) is in a loose state. Here, the ultrasonic inspection device 1E of this embodiment is arranged so that the base surface 33a of the base 33 faces downward (Z-axis negative direction) as in the second embodiment. As a result, the intermediate portion 35E2 of the sheet member 35E extends in the X-axis direction while hanging down from the base surface 33a due to its own weight, and enters the region between the transmitting surface 10a and the receiving surface 20a.

[0038] In the ultrasonic inspection apparatus 1E of this embodiment, as in the first embodiment, when the subject 100 is transported between the transmitting unit 10 and the receiving unit 20 mainly in the positive direction of the Y axis, the ultrasonic waves W transmitted from the transmitting unit 10 pass through the subject 100 and are received by the receiving unit 20, thereby enabling defects in the subject 100 to be inspected.

[0039] When the subject 100 passes between the transmitting unit 10 and the receiving unit 20, the contact portion 31E is deformed from the reference state, so that the edge portion 103 of the subject 100 is wrapped by the contact portion 31E. Specifically, when the subject 100 passes between the transmitting unit 10 and the receiving unit 20, the edge portion 103 of the subject 100 pushes up a part of the middle portion 35E2 of the sheet member 35E, where the edge portion 103 of the subject 100 is loose, upward (Z-axis positive direction), so that the part of the middle portion 35E2 is deformed from the reference state. In a state in which the part of the middle portion 35E2 is deformed, the part of the middle portion 35E2 surrounding the edge portion 103 of the subject 100 hangs down (Z-axis negative direction) from the upper end of the subject 100 so as to surround the edge portion 103 of the subject 100 by its own weight. As a result, the edge portion 103 of the subject 100 is wrapped by the sheet member 35E. On the other hand, after the subject 100 moves out from between the transmitting section 10 and the receiving section 20 (i.e., after it leaves the intermediate portion 35E2), a portion of the intermediate portion 35E2 that had been pushed up will move downward due to its own weight, returning to the reference state.

[0040] As described above, according to the ultrasonic inspection device 1E of the third embodiment, the contact portion 31E of the attenuation member 30E is formed so as to enclose the edge portion 103 of the subject 100 passing between the transmitting unit 10 and the receiving unit 20 at any position in the arrangement direction of the transmitting unit 10 and the receiving unit 20. Specifically, the contact portion 31E is formed so as to deform from a reference state so as to enclose the edge portion 103 of the subject 100, and to return to the reference state when the edge portion 103 of the subject 100 is separated from the contact portion 31E. As a result, even if the position of the subject 100 in the arrangement direction of the transmitting unit 10 and the receiving unit 20 changes when the subject 100 passes between the transmitting unit 10 and the receiving unit 20, the edge portion 103 of the subject 100 can be enclose by the contact portion 31E of the attenuation member 30E. Therefore, regardless of the manner of transportation of the subject 100 between the transmitting unit 10 and the receiving unit 20, the diffracted waves reaching the receiving unit 20 can be reduced.

[0041] In the ultrasonic inspection device 1E of the third embodiment, the contact portion 31E of the attenuation member 30E is configured by a sheet member 35E having both ends 35E1 fixed to the base 33 so that the intermediate portion 35E2 hangs downward. Therefore, the edge portion 103 of the subject 100 passing between the transmitting unit 10 and the receiving unit 20 can push up a part of the intermediate portion 35E2 of the sheet member 35E at any position in the arrangement direction of the transmitting unit 10 and the receiving unit 20. This allows the edge portion 103 of the subject 100 to be reliably wrapped by the contact portion 31E. Moreover, the sheet member 35E constituting the contact portion 31E can reflect or scatter the ultrasonic waves W2 (see FIG. 1) that try to go around the outside of the edge portion 103 of the subject 100. Therefore, the ultrasonic waves W2 can be attenuated, and the diffracted waves that reach the receiving portion 20 can be reduced.

[0042] In the third embodiment, both ends 35E1 of the sheet member 35E fixed to the base surface 33a of the base 33 need only be spaced apart in at least the direction along the base surface 33a, and may be spaced apart in the Y-axis direction, for example.

[0043] In the third embodiment, the contact portion 31E of the damping member 30E may include a plurality of sheet members 35E, both ends 35E1 of which are fixed to the base 33.

[0044] Fourth Embodiment Next, a fourth embodiment of the present invention will be described with reference to Fig. 8. In the fourth embodiment, the same components as those in the third embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

[0045] As shown in Fig. 8, an ultrasonic inspection device 1F of the fourth embodiment includes a transmitting unit 10, a receiving unit 20, and an attenuation member 30F, similar to the third embodiment. The attenuation member 30F of this embodiment is a member for attenuating the ultrasonic waves W (see Fig. 1) transmitted from the transmitting unit 10 so as not to reach the receiving unit 20, similar to the third embodiment. Also, the attenuation member 30F has a contact portion 31F formed to deform from a reference state so as to envelop an edge portion 103 of the subject 100 passing between the transmitting unit 10 and the receiving unit 20, and to return to the reference state after the edge portion 103 of the subject 100 comes out from between the transmitting unit 10 and the receiving unit 20, similar to the third embodiment.

[0046] However, the attenuation member 30F of this embodiment has a base 33 and an elastic body 36F attached to the base 33 to form a contact portion 31F. The elastic body 36F is a block-shaped member that is elastically deformable, such as rubber or sponge. The elastic modulus of the elastic body 36F is preferably smaller than the elastic modulus of the subject 100. The elastic body 36F is fixed to a base surface 33a of the base 33. In this state, the elastic body 36F extends from the base surface 33a in the negative direction of the Z axis and enters the area between the transmitting surface 10a and the receiving surface 20a. The elastic body 36F has a contact surface 36Fa that comes into contact with an edge 103 of the subject 100 that passes between the transmitting unit 10 and the receiving unit 20. The contact surface 36Fa is oriented in the negative Z-axis direction (i.e., the direction opposite to the extension direction of the subject 100). In Fig. 8, the contact surface 36Fa is formed on a flat surface perpendicular to the Z-axis direction, but is not limited thereto, and may be inclined with respect to the Z-axis direction or may be formed on a curved surface.

[0047] In the ultrasonic inspection apparatus 1F of this embodiment, as in the first embodiment, when the subject 100 is transported between the transmitting unit 10 and the receiving unit 20 mainly in the positive direction of the Y axis, the ultrasonic waves W transmitted from the transmitting unit 10 pass through the subject 100 and are received by the receiving unit 20, thereby enabling defects in the subject 100 to be inspected.

[0048] When the subject 100 passes between the transmitting unit 10 and the receiving unit 20, the contact portion 31F is deformed from the reference state, so that the edge portion 103 of the subject 100 is enveloped by the contact portion 31F. Specifically, when the subject 100 passes between the transmitting unit 10 and the receiving unit 20, the edge portion 103 of the subject 100 is pressed against a partial region of the contact surface 36Fa of the elastic body 36F, so that the pressed portion of the elastic body 36F is elastically compressed and deformed from the reference state. In a state in which the corresponding portion of the elastic body 36F is compressed and deformed, a portion of the elastic body 36F located around the edge portion 103 of the subject 100 surrounds the edge portion 103 of the subject 100. As a result, the edge portion 103 of the subject 100 is enveloped by the elastic body 36F. On the other hand, after the subject 100 escapes from between the transmitting section 10 and the receiving section 20 (i.e., after it leaves the elastic body 36F), the portion of the elastic body 36F that was compressively deformed returns to its reference state due to the elastic force of the elastic body 36F.

[0049] As described above, the ultrasonic inspection apparatus 1F of the fourth embodiment provides the same effects as the third embodiment. In the ultrasonic inspection device 1F of the fourth embodiment, the contact portion 31F of the attenuation member 30F is configured by an elastic body 36F. Therefore, the edge portion 103 of the subject 100 passing between the transmitting unit 10 and the receiving unit 20 can be pressed against a part of the elastic body 36F at an arbitrary position in the arrangement direction of the transmitting unit 10 and the receiving unit 20, thereby elastically compressing and deforming the part of the elastic body 36F. This allows the edge portion 103 of the subject 100 to be reliably wrapped by the contact portion 31F. Moreover, the elastic body 36F constituting the contact portion 31F can reflect or scatter the ultrasonic wave W2 (see FIG. 1) that tries to go around the outside of the edge portion 103 of the subject 100. Therefore, the ultrasonic wave W2 can be attenuated, and the diffracted wave that reaches the receiving portion 20 can be reduced.

[0050] Although the present invention has been described in detail above, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

[0051] In the present invention, the contact portions 31, 31D, 31E, and 31F may be located at least between the transmitting surface 10a and the receiving surface 20a in the arrangement direction of the transmitting unit 10 and the receiving unit 20. Therefore, the contact portions 31, 31D, 31E, and 31F are not limited to being located in the region between the transmitting surface 10a and the receiving surface 20a, and may be located outside the region in the Z-axis direction, for example.

[0052] In the present invention, the transmitting unit 10 may be formed, for example, so as to converge the ultrasonic waves W transmitted from the transmitting surface 10a of the transmitting unit 10 into a point-like or linear shape. In this case, the receiving unit 20 may receive, for example, the converged point-like or linear ultrasonic waves W, or may receive the ultrasonic waves W that have spread out into a fan-like or spherical shape after being converged.

[0053] In the present invention, the transmitting section 10 may transmit ultrasonic waves W so that the ultrasonic waves W spread out in a fan-like or spherical shape as the distance from the transmitting surface 10a of the transmitting section 10 increases. [Explanation of symbols]

[0054] 1, 1D, 1E, 1F...ultrasonic inspection device, 10...transmitting unit, 20...receiving unit, 30, 30D, 30E, 30F...attenuating member, 31, 31D, 31E, 31F...contact portion, 33...base, 34...hair, 100...subject, 103...edge, P...pitch of hair 34, W...ultrasonic wave

Claims

1. The ultrasonic transducer includes a transmitting section that transmits ultrasonic waves, a receiving section that is spaced apart from the transmitting section and receives the ultrasonic waves, and an attenuation member that attenuates the ultrasonic waves, the attenuation member is located between the transmitting section and the receiving section and has a contact section that comes into contact with an edge of a subject passing between the transmitting section and the receiving section; An ultrasonic inspection device, wherein the contact portion is formed so as to envelop an edge of the subject passing between the transmitting portion and the receiving portion at any position in the arrangement direction of the transmitting portion and the receiving portion.

2. 2. The ultrasonic inspection device according to claim 1, wherein the contact portion is formed so that an edge of the subject passing between the transmitting portion and the receiving portion enters inside the contact portion.

3. The damping member is a brush having a base and a large number of bristles extending from the base to form the contact portion, The ultrasonic inspection apparatus according to claim 2 , wherein the edge of the subject enters between the plurality of hairs.

4. 4. The ultrasonic inspection device according to claim 3, wherein the pitch of the numerous bristles is equal to or less than the wavelength of the ultrasonic waves.

5. 2. The ultrasonic inspection device of claim 1, wherein the contact portion deforms from a reference state to wrap around an edge of the subject passing between the transmitting portion and the receiving portion, and returns to the reference state after the edge of the subject moves out from between the transmitting portion and the receiving portion.

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