FESEM and LDI-TOF-MS integrated analysis system

Abstract

The present invention relates to an FESEM and LDI-TOF-MS integrated analysis system, and provides an FESEM and LDI-TOF-MS integrated analysis system that is capable of FESEM analysis and LDI-TOF-MS analysis while maintaining a state where a single analysis target sample is not exposed to the atmosphere.

Description

[Technical field]

[0001] This application claims the benefit of priority based on Korean Patent Application No. 10-2022-0054691, dated May 3, 2022, and all contents disclosed in the documents of the Korean Patent Application are incorporated herein by reference.

[0002] The present invention relates to an FESEM and LDI-TOF-MS integrated analysis system, and more particularly to an FESEM and LDI-TOF-MS integrated analysis system capable of performing FESEM analysis and LDI-TOF-MS analysis on a single analysis target sample while maintaining a state where the sample is not exposed to the atmosphere. [Background technology]

[0003] Instruments for analyzing sample surfaces include FESEM and LDI-TOF-MS.

[0004] Unlike a general scanning electron microscope, FESEM (field-emission scanning electron microscope) is a device that scans an electron beam accelerated by an FE (field emission) electron gun instead of a thermal electron gun, detects signals such as secondary electrons, backscattered electrons, and X-rays generated on the sample surface, and displays or records an enlarged image on a cathode ray tube. It scans the sample surface in two dimensions (xy) with a fine electron beam in a high vacuum environment to observe the morphology and microstructure of the sample. In particular, it has more than twice the focal depth and more than twice the resolution of an optical microscope. In addition, it is possible to observe the surface morphology and microstructure of a sample, and perform qualitative, quantitative, and elemental distribution analysis, as well as confirm the microcrystalline structure of a sample using EBSD, and analyze the grain boundaries and crystal orientation. It is also possible to observe the surface without coating a non-conductive sample using a low vacuum detector or low voltage.

[0005] In LDI-TOF-MS (laser desorption / ionization-time of flight-mass spectrometry), a laser is irradiated onto a sample to ionize it, and the ionized sample is then moved to a flight tube. At this time, the ionized sample material is separated by its mass according to its flight time, and the time it takes to reach the detector changes.

[0006] However, FESEM can formally confirm the shape and element distribution of the sample surface, while LDI-TOF-MS can formally confirm the distribution of molecular compounds within the sample surface, and the analytical data provided by the two systems are different. In particular, FESEM is limited in observing Li element, so there is a limit to confirming the distribution of trace Li within the electrode sample surface.

[0007] The FESEM and LDI-TOF-MS are independent analytical systems, and conventionally, analysis using these two systems was performed while a single sample was transferred between the two systems.

[0008] When the same sample is analyzed while moving between the two systems, the sample must be moved to the sample plate of the LDI-TOF-MS after the FESEM analysis, which can cause damage to the sample. For example, for FESEM analysis, the sample is fixed to the FESEM-dedicated sample plate with an adhesive such as double-sided tape. In this case, to perform additional analysis on the same sample with the LDI-TOF-MS, the sample fixed with the adhesive is detached from the FESEM-dedicated sample plate and then reattached to a separate LDI-TOF-MS-dedicated sample plate. In this process, the sample is damaged, which adversely affects the analysis results. In particular, in the case of a sample that needs to be kept unexposed to the atmosphere, it is difficult to keep the sample unexposed to the atmosphere during the process of loading the sample into the LDI-TOF-MS system after the FESEM analysis.

[0009] Furthermore, since the FESEM analysis system and the LDI-TOF-MS each measure the sample using separate measuring means (electron, laser, etc.) and the sample is realigned during the sample movement, a method or device for measuring the same position or area on the sample is required to perform analysis under the same conditions in the two analysis systems.

[0010] Therefore, a system is required that can prevent sample damage during transfer between the two systems and enable analysis to be performed under the same conditions (maintaining atmospheric or non-atmospheric conditions, matching the analysis area, etc.). Summary of the Invention [Problem to be solved by the invention]

[0011] The present invention relates to an FESEM and LDI-TOF-MS integrated analytical system, and aims to provide an FESEM and LDI-TOF-MS integrated analytical system that is capable of performing FESEM analysis and LDI-TOF-MS analysis on a single sample to be analyzed while maintaining a state where the sample is not exposed to the atmosphere.

[0012] The technical problems that the present invention aims to solve are not limited to the above-mentioned technical problems, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description. [Means for solving the problem]

[0013] The integrated analytical system of the present invention includes a first sample holder having a first sealed space formed therein; a second sample holder having a second sealed space formed therein; a first analytical unit to which the first sample holder is attached and which performs a first analysis on a sample to be analyzed; a second analytical unit to which the second sample holder is attached and which performs a second analysis on the sample to be analyzed; a sample plate which is attached to the first sealed space of the first sample holder or the second sealed space of the second sample holder and has a sample to be analyzed placed on its upper surface; and a glove box unit in which a sample to be analyzed movement space is formed; wherein the sample plate is contained in one of the first sealed space, the sample to be analyzed movement space, and the second sealed space and maintained in a state not exposed to the atmosphere, and is separated from one of the first sample holder and the second sample holder within the sample to be analyzed movement space and attached to the other one. Effect of the Invention

[0014] The FESEM and LDI-TOF-MS integrated analysis system of the present invention is capable of maintaining the analysis position on the sample, preventing damage to the sample during movement, and maintaining a state where the sample is not exposed to the atmosphere when performing FESEM and LDI-TOF-MS analysis on a single sample.

[0015] The FESEM and LDI-TOF-MS integrated analysis system of the present invention is capable of analyzing, by LDI-TOF-MS, the same area on a sample that was analyzed by FESEM, by utilizing position confirmation markings.

[0016] The FESEM and LDI-TOF-MS integrated analysis system of the present invention is one in which the sample state can be easily maintained, such as being kept in a state where it is not exposed to the atmosphere, when being transferred between the two systems. [Brief description of the drawings]

[0017] [Figure 1A] FIG. 1 is a block diagram showing an FESEM and LDI-TOF-MS integrated analysis system of the present invention. [Figure 1B]FIG. 1 is a block diagram showing an FESEM and LDI-TOF-MS integrated analysis system of the present invention. [Figure 1C] FIG. 1 is a block diagram showing an FESEM and LDI-TOF-MS integrated analysis system of the present invention. [Diagram 2] FIG. 2 is a plan view showing a sample plate. [Diagram 3] FIG. 4 is an exploded perspective view showing a first holder. [Figure 4] FIG. [Figure 5A] FIG. [Figure 5B] FIG. [Figure 6] FIG. [Figure 7] 4 is a cross-sectional view showing the plug portion and the knob portion in an assembled state. FIG. [Figure 8A] 11 is a cross-sectional view showing the stationary plate and the plug portion in an assembled state. FIG. [Figure 8B] 11 is a cross-sectional view showing the stationary plate and the plug portion in an assembled state. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0018] The integrated analytical system of the present invention includes a first sample holder having a first sealed space formed therein; a second sample holder having a second sealed space formed therein; a first analytical unit to which the first sample holder is attached and which performs a first analysis on a sample to be analyzed; a second analytical unit to which the second sample holder is attached and which performs a second analysis on the sample to be analyzed; a sample plate which is attached to the first sealed space of the first sample holder or the second sealed space of the second sample holder and has a sample to be analyzed placed on its upper surface; and a glove box unit in which a sample to be analyzed movement space is formed; wherein the sample plate is contained in one of the first sealed space, the sample to be analyzed movement space, and the second sealed space and maintained in a state not exposed to the atmosphere, and is separated from one of the first sample holder and the second sample holder within the sample to be analyzed movement space and attached to the other one.

[0019] In the integrated analysis system of the present invention, the sample plate is disk-shaped, a fixing hole through which a fastening means passes is formed at the center of the sample plate, an alignment hole for aligning the sample plate is formed at a position spaced a certain distance from the fixing hole in the sample plate, and a position confirmation marker for recognizing coordinate conversion between the first analysis unit and the second analysis unit is formed on the upper surface of the sample plate at a position spaced a certain distance from the fixing hole.

[0020] In the integrated analytical system of the present invention, a plurality of scale lines that intersect perpendicularly to one another are formed on the upper surface of the sample plate.

[0021] In the integrated analysis system of the present invention, the first sample holder includes a body portion on whose upper surface a sample plate is attached; a lower housing into which a lower end portion of the body portion is received so that an upper end portion of the body portion protrudes upward; and an upper housing that covers an upper surface of the body portion and is coupled to an upper portion of the lower housing to form the first sealed space.

[0022] In the integrated analysis system of the present invention, a fixing groove into which the fastening means is inserted is formed at a position facing the fixing hole on the upper surface of the body portion, and a first alignment protrusion into which the fastening means is inserted is formed at a position facing the alignment hole on the upper surface of the body portion.

[0023] In the integrated analysis system of the present invention, the fastening means comprises a bolt, and a screw thread is formed on the inner surface of the fixing groove, and the fastening means and the fixing groove are screwed together to fix the sample plate to the upper surface of the body portion.

[0024] In the integrated analysis system of the present invention, the second sample holder includes a mounting plate on whose upper surface the sample plate is placed; a stopper portion that is attached to the upper surface of the mounting plate to form the second sealed space; and a knob portion that is detachably attached to the upper end of the stopper portion.

[0025] In the integrated analysis system of the present invention, a sample placement area on which the sample plate is placed is formed on the upper surface of the placement plate, and a plug insertion groove into which the lower end of the plug portion is inserted is formed on the upper surface of the placement plate, and the plug insertion groove is formed in a closed loop shape surrounding the sample placement area.

[0026] In the integrated analysis system of the present invention, the sample placement area is also formed with a second alignment protrusion that is inserted into the alignment hole at a position facing the alignment hole.

[0027] In the integrated analysis system of the present invention, the sample plate is made of a ferromagnetic material, and the sample placement area is provided with a magnetic fixing means for fixing the sample plate by magnetic force.

[0028] In the integrated analysis system of the present invention, a sealing member insertion groove into which a sealing member made of an elastic material is inserted is formed on an outer peripheral surface of the plug, and the sealing member is in close contact with an inner wall of the plug insertion groove.

[0029] In the integrated analysis system of the present invention, an identification step is formed on the outer circumferential surface of the plug portion above the sealing member insertion groove.

[0030] In the integrated analysis system of the present invention, a fastening bolt for connecting with the plug is formed at a lower end of the knob, and a fastening groove into which the fastening bolt is inserted is formed at an upper surface of the plug, and the fastening bolt and the fastening groove are screwed together.

[0031] In the integrated analysis system of the present invention, a vacuum vent hole for releasing the vacuum formed in the second sealed space is provided on an upper surface of the plug.

[0032] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In this process, the size and shape of components shown in the drawings may be exaggerated for clarity and convenience of explanation. Furthermore, terms specifically defined in consideration of the configuration and operation of the present invention may vary depending on the intention or practice of a user or operator. The definition of such terms should be based on the overall content of this specification.

[0033] In describing the present invention, it should be noted that the orientations or positional relationships indicated by the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," "one side," "other side," and the like are based on the orientations or positional relationships shown in the drawings or the orientations or positional relationships usually arranged when the product of the present invention is used, and are merely for the purpose of explaining and briefly describing the present invention, and do not present or imply that the displayed devices or elements must necessarily be configured or operated in a specific orientation, and should not be understood as limiting the present invention.

[0034] 1A to 1C are block diagrams showing the FESEM and LDI-TOF-MS integrated analysis system of the present invention. FIG. 2 is a plan view showing the sample plate 100. FIG. 3 is an exploded perspective view showing the first holder. FIG. 4 is a plan view showing the stationary plate 310. FIG. 5A is a front view showing the plug portion 320. FIG. 5B is a cross-sectional view showing the plug portion 320. FIG. 6 is a front view showing the knob portion 330. FIG. 7 is a cross-sectional view showing the plug portion 320 and the knob portion 330 in an assembled state. FIGS. 8A and 8B are cross-sectional views showing the stationary plate 310 and the plug portion 320 in an assembled state.

[0035] The FESEM and LDI-TOF-MS integrated analysis system of the present invention will be described in detail below with reference to FIGS. 1A to 8B.

[0036] The FESEM and LDI-TOF-MS integrated analysis system of the present invention prevents deterioration of the sample being analyzed during the sequential FESEM and LDI-TOF-MS analyses, and enables the two analyses to be performed under the same conditions.

[0037] 1A to 1C, the integrated analysis system of the present invention includes a first sample holder 200 having a first sealed space 290 formed therein; a second sample holder 300 having a second sealed space 390 formed therein; a first analysis unit 500 to which the first sample holder 200 is attached and which performs a first analysis on a sample to be analyzed; a second analysis unit 600 to which the second sample holder 300 is attached and which performs a second analysis on the sample to be analyzed; The sample plate 100 is mounted in the first sealed space 390 and has a sample to be analyzed placed on its upper surface; and a glove box unit 400 in which a sample to be analyzed movement space 410 is formed. The sample plate 100 is accommodated in one of the first sealed space 290, the sample to be analyzed movement space 410, and the second sealed space 390 to be kept in a state not exposed to the atmosphere, and is separated from one of the first sample holder 200 and the second sample holder 300 inside the sample to be analyzed movement space 410 and mounted in the other one.

[0038] The first analysis unit 500 is an apparatus for non-destructive analysis without damaging the sample during analysis. The first analysis unit 500 is an apparatus for FESEM analysis, FT-IR analysis, XPS analysis, etc. For example, when the first analysis unit 500 is provided as an FESEM analysis apparatus, the first analysis unit 500 is a JEOL JSM-7200F FESEM apparatus.

[0039] The second analysis unit 600 can be either a non-destructive or destructive analysis device, regardless of the damage to the sample during analysis. The second analysis unit 600 is a device for destructive analysis, including LDI-TOF-MS analysis, GD-MS analysis, LIBS analysis, and TOF-SIMS analysis, or a non-destructive analysis, such as FESEM analysis, FT-IR analysis, and XPS analysis. For example, when the second analysis unit 600 is an LDI-TOF-MS analysis device, it is an IDSys Premier device by ASTA.

[0040] As shown in Figures 1A and 1B, the first sample holder 200 has a first sealed space 290 formed therein, and is loaded or unloaded into the first analysis unit 500 with the sample plate 100 accommodated in the first sealed space 290.

[0041] As shown in Figures 1B and 1C, the second sample holder 300 has a second sealed space 390 formed therein, and is loaded or unloaded into the second analysis unit 600 with the sample plate 100 accommodated in the second sealed space 390.

[0042] As shown in FIG. 1B, the process of mounting or detaching the sample plate 100 to or from the first sample holder 200 or the second sample holder 300 is performed in the analysis sample transfer space 410 of the glove box unit 400, which is maintained in a vacuum state, so that in the FESEM and LDI-TOF-MS integrated analysis system of the present invention, the analysis sample can be transferred between the two systems while maintaining a non-exposed state to the atmosphere.

[0043] As shown in FIG. 2, the sample plate 100 is disk-shaped, and a fixing hole 110 through which a fastening means 240 passes is formed at the center of the sample plate 100. An alignment hole 120 for aligning the sample plate 100 is formed at a position spaced a certain distance from the fixing hole 110 on the sample plate 100. A position confirmation marker for coordinate conversion recognition between the first analysis unit 500 and the second analysis unit 600 is also formed at a position spaced a certain distance from the fixing hole 110 on the upper surface of the sample plate 100.

[0044] The sample to be analyzed is fixed at a fixed position on the upper surface of the sample plate 100 using adhesive tape or the like.

[0045] A plurality of alignment holes 120 are provided, and more specifically, the alignment holes 120 are arranged at a distance from each other with the fixing hole 110 therebetween. For example, two alignment holes are provided and arranged at a distance from each other on an imaginary line passing through the center of the sample plate 100 with the fixing hole 110 therebetween.

[0046] The position confirmation marker may be formed of a material that can be recognized by an optical sensor, an image sensor, a camera, etc. The first analysis unit 500 and the second analysis unit 600 may be provided with an optical sensor, an image sensor, or a camera that can recognize the coordinates between the position of the position confirmation marker and the position of the fixing hole 110 on a two-dimensional plane formed on the upper surface of the sample plate 100.

[0047] Therefore, after the first analysis unit 500 analyzes the sample, it passes coordinate information between the two points mentioned above and the point where the measurement was performed to the second analysis unit 600. The second analysis unit 600 can then detect the position of the marker and the position of the fixing hole 110 and calculate the position where the measurement was performed in the first analysis unit 500 based on the coordinate information input from the first analysis unit 500.

[0048] The upper surface of the sample plate 100 is also provided with a plurality of scale lines that intersect perpendicularly to one another.

[0049] As shown in FIG. 3, the first sample holder 200 includes a body portion 210 on whose upper surface the sample plate 100 is attached; a lower housing 230 in which the lower end of the body portion 210 is received so that the upper end of the body portion 210 protrudes upward; and an upper housing 220 which covers the upper surface of the body portion 210 and is coupled to the upper portion of the lower housing 230 to form the first sealed space 290.

[0050] A fixing groove 211 into which the fastening means 240 is inserted is formed at a position facing the fixing hole 110 on the upper surface of the body portion 210, and a first alignment protrusion 212 into which the fastening means 240 is inserted is also formed at a position facing the alignment hole 120 on the upper surface of the body portion 210.

[0051] For example, the body 210 may be cylindrical, and the fixing groove 211 may be located at the center of the upper surface of the body 210 which is circular.

[0052] The fastening means 240 is made of a bolt, and a screw thread is formed on the inner circumferential surface of the fixing groove 211, and the fastening means 240 and the fixing groove 211 are screwed together to fix the sample plate 100 to the upper surface of the body part 210. Since the first alignment protrusion 212 is inserted into the alignment hole 120, the sample plate 100 can be prevented from rotating together with the fastening means 240 during the process of bolting the fastening means 240 to the fixing groove 211.

[0053] The lower housing 230 is a cylindrical container with an open top. The outer circumferential surface of the body 210 is in close contact with the inner circumferential surface of the lower housing 230.

[0054] A groove 231 into which an O-ring for sealing is inserted may be formed on an outer circumferential surface of the lower housing 230. The O-ring is brought into close contact with the outer circumferential surface of the lower housing 230 and the inner circumferential surface of the upper housing 220, and may increase the airtightness of the first sealed space 290 formed by combining the lower housing 230 and the upper housing 220.

[0055] The upper housing 220 is also a cylindrical container with an open bottom. The inner diameter of the upper housing 220 is larger than the outer diameter of the lower housing 230, and the upper housing 220 covers the upper part of the lower housing 230 to form a first sealed space 290.

[0056] An air vent hole 221 may be formed on the top surface of the upper housing 220 to relieve the vacuum in the first sealed space 290 when the upper housing 220 and the lower housing 230 are separated.

[0057] As shown in Figures 4 to 8B, the second sample holder 300 includes a mounting plate 310 on whose upper surface the sample plate 100 is mounted; a stopper portion 320 that is coupled to the upper surface of the mounting plate 310 to form the second sealed space 390; and a knob portion 330 that is detachably coupled to the upper end of the stopper portion 320.

[0058] As shown in Figure 4, a sample mounting area 311 on which the sample plate 100 is mounted is formed on the upper surface of the mounting plate 310, and a plug insertion groove 312 into which the lower end of the plug portion 320 is inserted is formed on the upper surface of the mounting plate 310, and the plug insertion groove 312 is formed in a closed loop shape surrounding the sample mounting area 311.

[0059] An entrance provided in the second analysis unit 600 may be formed in a slit shape so that the second sample holder 300 can enter the measurement space formed inside the second analysis unit 600. Therefore, the second sample holder 300 may be provided in a form thinner than the width of the slit-shaped entrance provided in the second analysis unit 600. Specifically, the mounting plate 310 serving as the body of the second sample holder 300 may be formed in a flat plate shape.

[0060] The sample holding area 311 may be provided in a shape corresponding to the sample plate 100. That is, since the sample plate 100 is provided in a disk shape, the sample holding area 311 may be provided in a circular shape.

[0061] The sample mounting area 311 is also formed with second alignment protrusions 311a that are inserted into the alignment holes 120 at positions facing the alignment holes 120. The sample plate 100 is mounted in a fixed position on the sample mounting area 311 by the second alignment protrusions 311a. The second alignment protrusions 311a may be provided to correspond to the positions and number of the alignment holes 120. For example, if two alignment holes 120 are provided, two second alignment protrusions 311a may also be provided, and each of the two second alignment protrusions 311a may be positioned to face the respective positions of the two alignment holes 120.

[0062] The sample plate 100 is made of a ferromagnetic material, and the sample placement area 311 is provided with a magnetic force fixing means 313 for fixing the sample plate 100 by magnetic force. The magnetic force fixing means 313 may be provided in a state where it is completely embedded in the upper surface of the placement plate 310 so as not to protrude above the sample placement area 311.

[0063] A plurality of magnetic force fixing means 313 may be provided. For example, the number of magnetic force fixing means 313 may be twice the number of second aligned protrusions 311a, and a pair of magnetic force fixing means 313 may be disposed spaced apart from each other with the second aligned protrusions 311a therebetween. For example, four magnetic force fixing means 313 may be provided.

[0064] 5A and 5B, a sealing member insertion groove 321 into which an elastic sealing member 325 is inserted is formed on the outer circumferential surface of the plug 320, and the sealing member 325 is also in close contact with the inner wall of the plug insertion groove 312. Specifically, the sealing member 325 is in close contact with the inner wall of the plug insertion groove 312 while being inserted into the sealing member insertion groove 321. That is, as shown in FIGS. 8A and 8B, the outer circumferential surface of the plug 320 and the inner wall of the plug insertion groove 312 face each other, and the sealing member 325 may be positioned therebetween.

[0065] The outer circumferential surface of the plug 320 is also formed with an identification step 322 above the sealing member insertion groove 321. The identification step 322 is for enabling the connection state of the plug 320 to be identified with the naked eye. As shown in FIG. 8B, if the plug 320 is not inserted to the end of the plug insertion groove 312, the identification step 322 is visible with the naked eye, and it is understood that the plug 320 is not completely connected to the mounting plate 310. As shown in FIG. 8A, if the plug 320 is completely connected to the mounting plate 310, the identification step 322 disappears from view, and it is possible to recognize that the connection is complete. As described above, since the entrance of the second analysis unit 600 is formed in a slit shape, incomplete connection of the plug 320 may cause a problem when the second sample holder 300 is loaded into the second analysis unit 600. The identification step 322 can prevent this.

[0066] A vacuum vent hole 324 for releasing the vacuum formed in the second sealed space 390 is also provided on the upper surface of the plug 320 .

[0067] 6, a fastening bolt 331 for coupling with the plug 320 is formed at the lower end of the knob 330, and a fastening groove 323 into which the fastening bolt 331 is inserted is formed at the upper surface of the plug 320, and the fastening bolt 331 and the fastening groove 323 are screwed together. As described above, the plug 320 has a limited height, which is a difficulty in separating the plug 320. Therefore, when separating the plug 320 from the mounting plate 310, the knob 330 is attached to the plug 320, and the plug 320 can be easily separated from the mounting plate 310.

[0068] Although the embodiment of the present invention has been described above, it is merely an example, and a person skilled in the art will understand that various modifications and equivalent embodiments are possible. Therefore, the true technical scope of the present invention should be determined by the claims. [Industrial Applicability]

[0069] The FESEM and LDI-TOF-MS integrated analysis system of the present invention is capable of maintaining the analysis position on the sample, preventing damage to the sample during movement, and maintaining a state where the sample is not exposed to the atmosphere when performing FESEM and LDI-TOF-MS analysis on a single sample.

[0070] The FESEM and LDI-TOF-MS integrated analysis system of the present invention is capable of analyzing, by LDI-TOF-MS, the same area on a sample that was analyzed by FESEM, by utilizing position confirmation markings.

[0071] The FESEM and LDI-TOF-MS integrated analysis system of the present invention is one in which the sample state can be easily maintained, such as being kept in a state where it is not exposed to the atmosphere, when being transferred between the two systems. [Explanation of symbols]

[0072] 100: Sample plate 110: Fixed hole 120: Alignment Hall 130: Position confirmation marker 140: Scale lines 200: First sample holder 210: Body 211: Fixed groove 212: First alignment protrusion 220: Upper housing 230: Lower housing 240: Fastening means 290: 1st closed space 300: Second sample holder 310: Standing plate 311: Sample storage area 311a: Second alignment protrusion 312: Plug insertion groove 313:Magnetic force fixing means 320: Plug part 321: Sealing material insertion groove 322: Identification step 323: Fastening groove 324: Vacuum vent hole 325: Sealing materials 330: Knob section 331: Fastening bolt 390:Second closed space 400: Glove box unit 410: Sample transfer space 500: First analysis unit 600: Second analysis unit

Claims

1. a first sample holder having a first sealed space formed therein; a second sample holder having a second sealed space formed therein; a first analysis unit to which the first sample holder is attached and which performs a first analysis on a sample to be analyzed; a second analysis unit to which the second sample holder is attached and which performs a second analysis on the analysis target sample; a sample plate that is attached to the first sealed space of the first sample holder or the second sealed space of the second sample holder and has an analysis target sample placed on an upper surface thereof; a glove box unit in which a space for moving a sample to be analyzed is formed; an integrated analysis system, wherein the sample plate is accommodated in one of the first sealed space, the analysis target sample movement space, and the second sealed space to maintain a non-exposed state to the atmosphere, and is separated from one of the first sample holder and the second sample holder within the analysis target sample movement space and attached to the other one of the first sample holder and the second sample holder.

2. The sample plate is disk-shaped, A fixing hole through which a fastening means passes is formed at the center of the sample plate, The sample plate has an alignment hole at a position spaced a predetermined distance from the fixing hole for aligning the sample plate, 2. The integrated analysis system of claim 1, wherein a position confirmation marker for recognizing coordinate transformation between the first analysis unit and the second analysis unit is formed on the upper surface of the sample plate at a position spaced a certain distance from the fixing hole.

3. The integrated analytical system according to claim 2 , wherein a plurality of scale lines that intersect perpendicularly to each other are formed on the upper surface of the sample plate.

4. The first sample holder comprises: a body portion on whose upper surface a sample plate is attached; a lower housing in which a lower end of the body portion is received so that an upper end of the body portion protrudes upward; an upper housing covering an upper surface of the body and coupled to an upper portion of the lower housing to form the first sealed space; The integrated analysis system of claim 2 .

5. a fixing groove into which the fastening means is inserted is formed at a position facing the fixing hole on the upper surface of the body; The integrated analysis system according to claim 4 , wherein a first alignment protrusion is formed on the upper surface of the body at a position facing the alignment hole and adapted to be inserted into the alignment hole.

6. The fastening means is a bolt, A screw thread is formed on the inner peripheral surface of the fixing groove, The integrated analytical system according to claim 5 , wherein the fastening means and the fixing groove are screwed together to fix the sample plate to the upper surface of the body portion.

7. The second sample holder is A mounting plate on which the sample plate is mounted; a plug portion coupled to an upper surface of the mounting plate to form the second sealed space; A knob portion detachably connected to an upper end portion of the plug portion; The integrated analysis system according to claim 2 , comprising:

8. A sample placement area on which the sample plate is placed is formed on the upper surface of the placement plate, A plug insertion groove into which the lower end of the plug portion is inserted is formed on the upper surface of the mounting plate, The integrated analytical system according to claim 7 , wherein the plug insertion groove is formed in a closed loop shape surrounding the sample placement area.

9. The integrated analytical system according to claim 8 , wherein the sample mounting area is formed with a second alignment protrusion at a position facing the alignment hole, the second alignment protrusion being inserted into the alignment hole.

10. The sample plate is made of a ferromagnetic material, The integrated analysis system according to claim 8 , wherein the sample placement area is provided with a magnetic fixing means for fixing the sample plate by magnetic force.

11. The plug has an outer circumferential surface formed with a sealing member insertion groove into which a sealing member made of an elastic material is inserted, The integrated analytical system according to claim 8 , wherein the sealing member is tightly attached to an inner wall of the plug insertion groove.

12. The integrated analytical system according to claim 11 , wherein an identification step is formed on an outer circumferential surface of the plug portion above the sealing member insertion groove.

13. A fastening bolt is formed at a lower end of the knob for connecting with the plug. A fastening groove into which the fastening bolt is inserted is formed on an upper surface of the plug portion, The integrated analytical system of claim 7 , wherein the fastening bolt and the fastening groove are threadedly engaged with each other.

14. The integrated analytical system according to claim 7 , wherein a vacuum vent hole for releasing the vacuum formed in the second sealed space is provided on an upper surface of the plug.

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