Cutting device and method for modifying mounting flange

Abstract

To provide a new technique for reducing a step and labor required for correcting a contact surface against a cutting blade of a mount flange.SOLUTION: In a cutting device having a blade detection unit for detecting a state of a cutting blade, the blade detection unit has a cover for selectively covering a detection part having a light-emitting part and a light-receiving part arranged so as to face each other at an interval at which the cutting blade is inserted, and an open / close driving unit for positioning the cover at an open position where the detection part is exposed and a close position where the detection part is covered, the cutting device includes a correction tool 80 which is attached to the cover, and corrects a mount flange 24 in a state where the cutting blade is removed and the mount flange 24 is fixed to the tip of a spindle 23, the correction tool 80 is positioned at a correction position for correcting the mount flange 24 by positioning the cover at the open position, and the correction tool 80 is positioned at a retreat position by positioning the cover at the close position.SELECTED DRAWING: Figure 9

Description

[Technical field]

[0001] The present invention relates to a cutting device having a cutting blade and a method for modifying a mounting flange for fixing the cutting blade. [Background technology]

[0002] A cutting blade, which is made of a grindstone made of abrasive grains such as diamonds bonded together with a bonding material, wears out as the workpiece is cut. The blade is detachably attached to the tip of the spindle of the cutting device so that the worn cutting blade can be replaced with a new cutting blade.

[0003] There are two types of cutting blades. One is a hub blade, which consists of a hub base and a grinding wheel formed on the outer periphery of the hub base. The hub blade is fixed to the spindle while being clamped between a mounting flange and a fixing nut, which is a fixture. The other is a washer blade, which consists of a ring-shaped grinding wheel. The washer blade is fixed to the spindle while being clamped between a mounting flange and a fixture consisting of a front flange and a fixing nut.

[0004] If the cutting blade is fixed at an angle to the axis of the spindle, the grinding wheel will flutter during rotation, making it impossible to perform high-precision machining. For this reason, the contact surfaces of the mount flange against the cutting blade, front flange, etc. are flattened.

[0005] However, if the cutting blade spins freely or is broken during cutting, this contact surface may be damaged when the cutting blade is attached, and may no longer be a flat surface.

[0006] In view of such problems, a technique is known for flattening an annular end surface, which is a contact surface of a mount flange, by using an end surface correction jig, as disclosed in, for example, Patent Document 1. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Japanese Patent Application Publication No. 8-339977 Summary of the Invention [Problem to be solved by the invention]

[0008] In the prior art disclosed in Patent Document 1, the holding table for holding the workpiece in the cutting device is replaced with a table for holding a jig, and the end face correction jig is held by the table, thereby correcting the contact surface of the mount flange. After the contact surface is corrected, the table for holding the jig is replaced and returned to the holding table, and the cutting blade is attached to resume processing of the workpiece.

[0009] However, the conventional repair method described above requires many steps and labor to repair the annular end surface that serves as the contact surface for the mount flange, and improvements are eagerly needed.

[0010] In view of the above problems, the present invention provides a novel technique that makes it possible to reduce the steps and labor required to modify the contact surface of a mount flange with a cutting blade or the like. [Means for solving the problem]

[0011] The problem to be solved by the present invention has been described above, and the means for solving this problem will now be described.

[0012] According to one aspect of the present invention, A cutting device comprising: a holding unit for holding a workpiece; a cutting unit in which a cutting blade for cutting the workpiece held by the holding unit is detachably fixed to a spindle; and a blade detection unit for detecting a state of the cutting blade, The cutting blade is fixed between a mount flange fixed to the tip of the spindle and a fixture, The blade detection unit includes: a detection unit having a light emitting unit and a light receiving unit disposed opposite each other with a gap allowing the cutting blade to be inserted; a cover that selectively covers the detection unit; an opening / closing drive unit that positions the cover at an open position that exposes the detection unit and a closed position that covers the detection unit, The cutting device is a correction tool attached to the cover for correcting the mount flange in a state where the mount flange is fixed to the tip of the spindle after the fixing tool and the cutting blade are removed, The cutting device is configured such that, when the cover is positioned in the open position, the correction tool is positioned in a correction position for correcting the mount flange, and, when the cover is positioned in the closed position, the correction tool is positioned in a retracted position.

[0013] According to another aspect of the present invention, The correction tool is a first polishing surface for polishing a first surface of the mounting flange perpendicular to the rotation axis; a second polishing surface for polishing a second surface of the mounting flange parallel to the rotation axis; The cutting device has a

[0014] According to another aspect of the present invention, a blade replacement unit for replacing the cutting blade fixed to the tip of the spindle; A controller that controls at least the blade replacement unit and the opening / closing drive unit, The controller controls the opening / closing drive unit at a predetermined timing to position the correction tool at the correction position and perform correction of the mount flange. It is a cutting device.

[0015] According to another aspect of the present invention, A method for correcting the mount flange using the cutting device, comprising the steps of: a positioning step of positioning the correction tool at the correction position for correcting the mounting flange; a spindle rotating step of rotating the spindle to which the mount flange is fixed; and a correcting step of correcting the mount flange by bringing the correcting tool into contact with the rotating mount flange.

[0016] According to another aspect of the present invention, The mounting flange is a first surface perpendicular to the axis of rotation of the mounting flange, a rear surface of a hub base when the cutting blade is a hub blade; Or, a rear surface of the cutting blade when the cutting blade is a washer blade; and an annular end surface that serves as a first surface for contacting the The correcting step includes abutting the correcting tool against the annular end surface. This is a method for modifying the mounting flange.

[0017] According to another aspect of the present invention, The mounting flange is a second surface parallel to the axis of rotation of the mounting flange, an inner periphery of a fitting hole of a hub base when the cutting blade is a hub blade; Or, an inner periphery of a fitting hole in a front flange portion of the fixing device when the cutting blade is a washer blade; a boss outer circumferential surface which serves as a second surface for fitting with the boss; The correction step includes contacting the correction tool with the boss outer peripheral surface. This is a method for modifying the mounting flange. Effect of the Invention

[0018] According to the present invention, by providing a correction tool and an opening / closing drive unit that moves the correction tool to a correction position for correcting the mount flange and a retreat position, it is possible to flatten the required portion of the mount flange as required. Therefore, unlike the conventional method, it is not necessary to replace the table for holding the jig, and the required portion of the mount flange can be flattened in a short time. In addition, since the operator does not need to put his / her hands into the processing chamber in which the cutting unit is located in the cutting device, high safety can be ensured and dirt in the processing chamber can be prevented from going out of the processing chamber. [Brief description of the drawings]

[0019] [Figure 1] FIG. 2 is a diagram showing a cutting device including a cutting unit. [Diagram 2] FIG. 1 is a diagram illustrating an example of a workpiece. [Diagram 3] 1 is a diagram showing a blade replacement unit for automatically replacing a cutting blade, etc. FIG. [Figure 4] FIG. 2 is a diagram showing the configuration of a cutting blade configured as a hub blade. [Diagram 5] 1A and 1B are diagrams showing the configuration of a cutting blade configured as a washer blade. [Figure 6] 1A is a diagram showing the blade detection unit with the cover open, and FIG. 1B is a diagram showing the blade detection unit with the cover closed. [Figure 7] FIG. 13 is a flowchart showing a correction method. [Figure 8] FIG. 1A is a diagram showing a state in which the correction tool is positioned at a correction position; FIG. 1B is a diagram showing a state in which the correction tool is positioned at a retracted position; [Figure 9] 1A is a view from one direction showing how the annular end surface of the mount flange is being repaired, and FIG. 1B is a view from another direction showing how the annular end surface of the mount flange is being repaired. [Figure 10]1A is a view from one direction showing how the outer peripheral surface of a boss of a mounting flange is modified, and FIG. 1B is a view from another direction showing how the outer peripheral surface of a boss of a mounting flange is modified. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment for carrying out the present invention will be described in detail with reference to the drawings. FIG. 1 shows an example of the configuration of a cutting device 1 equipped with a blade replacement unit 3 for automatically replacing a cutting blade.

[0021] As shown in FIG. 1, the cutting device 1 has a device base 6, and various mechanisms provided on the device base 6 are controlled by a controller 4, and the cutting device 1 is configured as a device that cuts a workpiece W shown in FIG.

[0022] 2, the workpiece W is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, whose base material is silicon, sapphire, gallium, etc. The workpiece W has devices D formed in areas partitioned in a lattice pattern by a plurality of planned division lines S set in a lattice pattern on the surface Wa. Note that the workpiece W is not limited to the above example.

[0023] 2, a workpiece W is attached to an adhesive tape T, and an annular frame F is attached to the adhesive tape T so as to surround the workpiece W, thereby forming a wafer unit U in which the workpiece W and the annular frame F are integrated together. This wafer unit U is stored in a wafer cassette 42 (FIG. 1).

[0024] 1, the cutting device 1 includes an X-axis moving unit (not shown) that feeds the holding unit 10 in the X-axis direction for processing, a Y-axis moving unit Uy that indexes and feeds the cutting unit 20 in the Y-axis direction, and a Z-axis moving unit Uz that feeds the cutting unit 20 in the Z-axis direction for cutting. The holding unit 10 is made up of a holding table that forms a suction holding surface, and is provided so as to be rotatable about an axis parallel to the Z-axis direction by a rotation drive source (not shown).

[0025] As shown in Fig. 1, the cutting device 1 includes a cutting unit 20 that cuts a workpiece W (Fig. 2) and a blade replacement unit 3 that automatically replaces a cutting blade 21. The configuration in Fig. 1 includes two cutting units 20, and is configured as a so-called facing dual type cutting device.

[0026] As shown in FIG. 1, an imaging unit 30 for capturing an image of a workpiece is provided so as to move integrally with each cutting unit 20.

[0027] As shown in FIG. 1, the two cutting units 20 are configured to be movable relative to the holding unit 10 in the Y-axis direction and the Z-axis direction by a Y-axis moving unit Uy and a Z-axis moving unit Uz, respectively, which are provided on a gate-shaped support frame 5.

[0028] As shown in FIG. 1, the cutting device 1 includes a cassette elevator 41 that supports a wafer cassette 42 that contains the workpiece before and after cutting so that the wafer cassette 42 can be raised and lowered, a cleaning unit 44 that cleans the workpiece after cutting, and a transport unit 46 that is a transport means for loading and unloading the workpiece into and from the wafer cassette 42 and transporting the workpiece.

[0029] 1 and 3, the cutting device 1 includes a blade replacement unit 3 for automatically replacing the cutting blade. As shown in Fig. 3, the blade replacement unit 3 includes a nut holder 32 that moves to a position opposite the cutting blade 21 and rotates the blade fixing nut 26 to fasten / remove the blade, and a blade holder 34 for attaching and detaching the cutting blade 21.

[0030] As shown in Figure 4, the cutting unit 20 comprises a spindle housing 22 fixed to the lower part of the Z-axis moving plate 19 (Figure 1) of the Z-axis moving unit Uz, a spindle 23 protruding from the spindle housing 22 and driven to rotate by a motor not shown, and a mounting flange 24 attached to the tip of the spindle 23.

[0031] The cutting unit 20 comprises a mount fixing bolt 25 that fixes the mount flange 24 to the tip of the spindle 23, a cutting blade 21 that is attached to the mount flange 24, and a blade fixing nut 26 which is a fixing device for clamping and fixing the cutting blade 21 between the mount flange 24.

[0032] The mount flange 24 includes a cylindrical boss portion 241 and a flange portion 242 provided at one end of the boss portion 241 on the spindle housing 22 side. The flange portion 242 is formed in an annular shape with a diameter larger than the outer diameter of the boss portion 241, and is formed with an annular end surface 244 for abutting against the rear surface of the hub base 212 of the cutting blade 21. A male thread 243 is formed on the outer periphery of the other end of the boss portion 241 of the mount flange 24.

[0033] The cutting blade 21 shown in Fig. 4 is configured as a so-called hub blade, and includes an annular hub base 212 made of a metal such as an aluminum alloy, and an annular cutting blade 213 formed to surround the outer periphery of the hub base 212. A fitting hole 214 for mounting to a boss portion 241 of the mount flange 24 is provided in the center of the hub base 212. The boss portion 241 of the mount flange 24 is inserted into the fitting hole 214. The cutting blade 213 is made of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bond material such as a metal or resin, and is formed to a predetermined thickness.

[0034] The cutting blade 21 is fixed to the mount flange 24 by fitting the fitting hole 214 of the hub base 212 into the boss outer peripheral surface 246 of the cylindrical boss portion 241 of the mount flange 24 and fastening the blade fixing nut 26 to the male thread 243 of the boss portion 241. In this state, the cutting blade 21 is sandwiched between the blade fixing nut 26 and the mount flange 24, and the rear surface of the hub base 212 is supported by abutting against the annular end surface 244 formed on the mount flange 24.

[0035] Four pin engagement holes 261 are provided at 90 degree intervals on the end face of the blade fixing nut 26, which serves as a fixing device for the cutting blade 21, for engaging with engagement portions (not shown) of the nut holder 32 (FIG. 3) of the blade replacement unit 3. The blade fixing nut 26 is formed in an annular shape, and an annular engagement groove 262 is formed on the outer circumferential surface.

[0036] With the cutting blade 21 attached, the axes of the spindle 23, the mount flange 24, and the cutting blade 21 are coaxially arranged and parallel to the Y-axis direction.

[0037] In addition, in the above configuration, the mounting flange 24 is configured to have a first surface perpendicular to the rotation axis of the mounting flange 24 and has an annular end surface 244 that serves as the first surface for abutting against the rear surface of the hub base 212 of the cutting blade 21.

[0038] In addition, the mounting flange 24 is configured to have a boss outer peripheral surface 246 which is a second surface parallel to the rotation axis of the mounting flange 24 and serves as the second surface for engaging with the inner peripheral portion of the engaging hole 214 of the hub base 212 of the cutting blade 21.

[0039] 5 shows an example of the configuration of a cutting unit 20A equipped with a cutting blade 21A configured as a washer blade made of a ring-shaped grindstone. The cutting blade 21A is clamped between a mounting flange 24 and a fixture consisting of a blade fixing nut 26 and a front flange 27. The other configurations are the same as those in FIG.

[0040] As shown in FIG. 5, when the cutting blade 21A is configured as a washer blade, the rear surface of the cutting blade 21A abuts against the annular end surface 244 of the mount flange 24, and the fitting hole 274 of the front flange 27 fits into the outer peripheral surface 246 of the boss.

[0041] As shown in Fig. 1, a blade detection unit 60 is disposed at a position where the cutting blade 21 of the cutting unit 20 can be positioned. As shown in Fig. 3, the blade detection unit 60 detects the state of the cutting blade 21, specifically, the position of the cutting edge 213 in the Z direction and the wear state.

[0042] 6(A), the blade detection unit 60 has a rectangular parallelepiped detection base 61, and a detection section 62 having a light-emitting section 63 and a light-receiving section 64 arranged opposite each other with a gap for inserting the cutting blade 21 is provided on the upper surface of the detection base 61. In this embodiment, a blade insertion groove 66 is formed, and the light-emitting section 63 and the light-receiving section 64 are provided on the opposing surfaces of wall sections 66a, 66b on both sides of the blade insertion groove 66, respectively.

[0043] The detection unit 62 is provided with cleaning nozzles 65 a and 65 b for supplying cleaning water and air toward the light emitter 63 and the light receiver 64 .

[0044] On the detection stand 61, on the side opposite to the side where the blade insertion groove 66 is formed, there is provided a cover 67 that is opened and closed by an opening / closing drive unit 68 (cover opening / closing unit) and selectively covers the detection unit 62. When blade detection is performed, the opening / closing drive unit 68 positions the cover 67 in an open position that exposes the detection unit 62 as shown in Fig. 6(A), and when blade detection is not performed, the opening / closing drive unit 68 positions the cover 67 in a closed position that covers the detection unit 62 as shown in Fig. 6(B).

[0045] In the blade detection unit 60 configured as described above, as shown in FIG. 3, the cutting blade 21 is inserted into the blade insertion groove 66, and light emitted by the light-emitting unit 63 (FIG. 6(A)) is received by the light-receiving unit 64 (FIG. 6(A)). The position of the cutting blade 21 in the vertical direction (Z-axis direction) is detected based on the amount of light received.

[0046] 3, when a new cutting blade 21 is attached, the cutting blade 21 is inserted into the blade insertion groove 66 from above, and the Z-direction position of the cutting blade 21 is detected when the tip of the cutting edge 213 of the cutting blade 21 blocks the light and the amount of received light starts to decrease, and this Z-direction position is stored as the reference position. This operation is called a non-contact setup operation.

[0047] Thereafter, after the cutting blade 21 has worn down, the non-contact setup work is performed again, and the amount of wear is detected by detecting the Z direction position of the cutting blade 21 when the amount of received light starts to decrease. Also, based on the Z direction position of the cutting blade 21 detected at this time, the cutting height position (Z direction position) of the cutting blade 21 can be detected and controlled.

[0048] As shown in Figures 6(A) and (B), a cover 67 covering the detection section 62 of the blade detection unit 60 is provided with a correction tool 80 for correcting the mounting flange 24 (Figure 8(A)) when the cutting blade has been removed and the mounting flange 24 is fixed to the tip of the spindle 23 (Figure 8(A)).

[0049] The correction tool 80 of this embodiment is configured with a polishing member 84 at the tip of a substantially L-shaped arm 82. The rear end of the arm 82 is attached to the side of the cover 67, and rotates with the opening and closing of the cover 67. By configuring it to be attached to the cover 67, it is not necessary to provide another device for moving the correction tool 80, and the device configuration is simplified.

[0050] The polishing member 84 is, for example, a block-shaped grindstone containing abrasive grains of 5 microns or less and metal, and has a conductive configuration. The polishing member 84 may be a block-shaped grindstone or may be configured by covering the surface with a conductive polishing sheet.

[0051] 9(A)(B) and 10(A)(B), the polishing member 84 is conductive, and thus it is possible to detect contact with the mount flange 24 through electrical continuity. Note that the polishing member 84 may not be conductive. In that case, for example, a configuration can be used in which contact is detected by utilizing a change in the number of rotations of the spindle or a change in the load current value when the polishing member 84 comes into contact with the mount flange 24.

[0052] As shown in Figures 9(A)(B) and 10(A)(B), the polishing member 84 has a first polishing surface 84a for polishing the annular end face 244 which is a first surface perpendicular to the rotation axis of the mount flange 24, and a second polishing surface 84b for polishing the boss outer peripheral surface 246 which is a second surface parallel to the rotation axis of the mount flange 24, and is configured so that two different locations of the mount flange 24 can be polished and corrected (flattened) depending on the height of the mount flange 24.

[0053] As shown in Figures 6(A) and 8(A), when the cover 67 is opened and positioned in the open position, the correction tool 80 is positioned in the correction position for correcting the mounting flange 24, and the polishing member 84 is positioned on the upper side.

[0054] As shown in FIG. 6(B) and FIG. 8(B), when the cover 67 is closed and positioned at the closed position, the correcting tool 80 is positioned at the retracted position, and the polishing member 84 is positioned below.

[0055] Next, an example of a correction method using the above configuration will be described in the order of the flowchart shown in Fig. 7. The correction method described below can be carried out, for example, when replacing the cutting blade with a new one.

[0056] <Cutting blade removal step> As shown in FIG. 8(A), this is a step in which the cutting blade is removed from the mounting flange 24.

[0057] In this embodiment, as shown in Fig. 3, a blade replacement unit 3 is provided for replacing the cutting blade 21 fixed to the tip of the spindle 23, and the cutting blade 21 is removed at a predetermined timing by a controller 4 (Fig. 1) to adjust the mount flange 24. When the cutting blade 21 is removed, the mount flange 24 is exposed.

[0058] In a configuration that does not include the blade replacement unit 3, the cutting blade 21 is manually removed by an operator. The predetermined tightening may be determined when the number of cutting blades replaced by the blade replacement unit reaches a predetermined number, or based on the load (rotational torque) applied to the blade replacement unit during blade replacement, the adhesion of foreign matter to the boss outer peripheral surface 246 (FIG. 4) may be automatically detected and the need for adjustment of the mount flange 24 may be determined.

[0059] <Positioning Step> As shown in Fig. 8(A), this is a step of positioning the correction tool 80 at a correction position for correcting the mount flange 24. In this embodiment, the polishing member 84 of the correction tool 80 is positioned at the correction position by opening the cover 67 with the opening / closing drive unit 68 (Fig. 6(A)) under the control of the controller 4.

[0060] <Spindle rotation step> As shown in FIG. 8(A), this is a step in which the spindle 23 to which the mounting flange 24 is fixed is rotated.

[0061] The controller 4 rotates the spindle 23 at a low speed at a preset rotation speed, which is set to a rotation speed suitable for polishing.

[0062] <Correction steps> As shown in FIG. 9(A), this is a step in which a correcting tool 80 is brought into contact with the rotating mount flange 24 to correct the mount flange 24.

[0063] 9(A) and 9(B), the cutting unit 20 is lowered in the Z-axis direction and moved in the Y-axis direction until the annular end face 244 of the mount flange 24 comes into contact with the first polishing surface 84a of the polishing member 84. For example, based on the outer diameter size of the annular end face 244, the cutting unit 20 is lowered in the Z-axis direction to a position where the annular end face 244 faces the first polishing surface 84a of the polishing member 84, and the cutting unit 20 is moved in the Y-axis direction until the annular end face 224 comes into contact with the first polishing surface 84a of the polishing member 84. At this time, since the polishing member 84 is conductive, the contact between the polishing member 84 and the annular end face 244 is detected by the controller 4 (FIG. 1) due to the conduction.

[0064] The controller 4 continues to rotate the spindle 23 for a predetermined time, thereby polishing and flattening the annular end surface 244 with the first polishing surface 84a of the polishing member 84. At this time, the spindle 23 (mount flange 24) may be moved a small distance in the Y-axis direction at a predetermined timing to change the contact pressure of the annular end surface 224 against the first polishing surface 84a of the polishing member 84.

[0065] In addition, the annular end surface 224 is the surface facing the rear surface of the hub base 212 of the cutting blade 21 in the hub blade configuration of FIG. 4, and is the surface facing the cutting blade 21A in the washer blade configuration of FIG.

[0066] 10(A)(B), the cutting unit 20 is lowered in the Z-axis direction and moved in the Y-axis direction until the boss outer peripheral surface 246 of the mount flange 24 comes into contact with the second polishing surface 84b of the polishing member 84. For example, based on the outer diameter size of the boss outer peripheral surface 246, the cutting unit 20 is lowered in the Z-axis direction to a position where the boss portion 241 faces the second polishing surface 84b of the polishing member 84, and the cutting unit 20 is moved in the Y direction so that the boss outer peripheral surface 246 comes into contact with the second polishing surface 84b. At this time, since the polishing member 84 is conductive, contact between the polishing member 84 and the boss outer peripheral surface 246 is detected by the controller 4 (FIG. 1) due to the conduction.

[0067] In addition, in the hub blade configuration of Figure 4, the boss outer surface 246 is a surface that fits into the inner surface of the fitting hole 214 of the hub base 212 of the cutting blade 21, and in the washer blade configuration of Figure 5, it is a surface that fits into the inner surface of the fitting hole 274 of the front flange 27.

[0068] The controller 4 (FIG. 1) continues rotating the spindle 23 for a predetermined time, thereby polishing and flattening the boss outer peripheral surface 246 with the second polishing surface 84b of the polishing member 84. At this time, the spindle 23 (mount flange 24) may be moved a small distance in the Z-axis direction at a predetermined timing to change the contact pressure of the boss outer peripheral surface 246 against the second polishing surface 84b of the polishing member 84.

[0069] In the manner described above, the annular end face 244 and the boss outer peripheral surface 246 of the mounting flange 24 can be polished and flattened. It is also possible to polish only one of the annular end face 244 and the boss outer peripheral surface 246.

[0070] As described above, according to the present invention, as shown in Figs. 6(A)(B) and 8(A)(B), by providing the correction tool 80 and the opening / closing drive unit 68 that moves the correction tool 80 to a correction position for correcting the mount flange 24 and to a retreat position, it is possible to flatten the required portion of the mount flange 24 as necessary. Therefore, unlike the conventional method, it is not necessary to replace the table for holding the jig, and the required portion of the mount flange 24 can be flattened in a short time. In addition, since the operator does not need to put his / her hands into the processing chamber in which the cutting unit in the cutting device is arranged, high safety can be ensured and dirt in the processing chamber can be prevented from going out of the processing chamber.

[0071] Furthermore, as shown in Figures 9(A)(B) and 10(A)(B), the correction tool 80 has different polishing surfaces, the first polishing surface 84a and the second polishing surface 84b, so that the two different annular end surfaces 244 and the boss portion 241 (boss outer peripheral surface 246) of the mount flange 24 can be polished and flattened without replacing the correction tool 80, thereby making it possible to shorten the overall time required for flattening.

[0072] The present invention can be particularly suitably carried out when the cutting blade is a hub blade. As shown in Fig. 4, when replacing the cutting blade 21, the inner peripheral surface of the fitting hole 214 of the hub base 212 rubs against the boss outer peripheral surface 246 of the mount flange 24, and the metal of the hub base 212 adheres to the boss outer peripheral surface 246, and it is considered that the metal becomes a foreign matter and accumulates when multiple cutting blades 21 are replaced. The presence of this foreign matter may make it difficult to attach and detach the cutting blade 21, so it is effective to remove this foreign matter.

[0073] Furthermore, in a configuration including a blade replacement unit 3 (FIG. 3), it is preferable to execute the above-mentioned correction steps periodically at a predetermined timing. When the cutting blade is replaced manually, the operator can sense when it has become difficult to insert the cutting blade and decide to carry out corrective work, but when the cutting blade is attached by the blade replacement unit, it is not possible to sense when it has become difficult to insert the cutting blade, which can result in a longer correction time or the situation may worsen to the point where correction is impossible. This is important from the perspective of full automation and continuous operation of the device, and leads to maximizing the benefits of automatic replacement of the cutting blade 21 by the blade replacement unit 3 (Figure 3). [Explanation of symbols]

[0074] 1 Cutting equipment 3 Blade Replacement Unit 4. Controller 10 Holding Unit 19 Z-axis moving plate 20 Cutting unit 21 Cutting blade 22 Spindle housing 23 Spindle 24 Mounting flange 25 Mount fixing bolt 26 Blade fixing nut 27 Front flange 32 Nut holder 34 Blade holder 60 Blade Detection Unit 62 Detection unit 66 Blade insertion groove 67 Cover 68 Opening and closing drive unit 80 Correction tool 82 Arm 84 Abrasive materials 84a First polished surface 84b Second polished surface 212 Hub Base 213 Cutting blade 214 Fitting hole 241 Boss 242 Flange 243 Male thread 244 Annular end face 246 Boss outer surface 261 Pin engagement hole 262 Engagement groove D Device F Annular frame S Division line T adhesive tape U Wafer Unit Uy Y-axis moving unit Uz Z-axis movement unit W Workpiece Wa Surface

Claims

1. A cutting device comprising: a holding unit for holding a workpiece; a cutting unit in which a cutting blade for cutting the workpiece held by the holding unit is detachably fixed to a spindle; and a blade detection unit for detecting a state of the cutting blade, The cutting blade is fixed between a mount flange fixed to the tip of the spindle and a fixture, The blade detection unit includes: a detection unit having a light emitting unit and a light receiving unit disposed opposite each other with a gap allowing the cutting blade to be inserted; a cover that selectively covers the detection unit; an opening / closing drive unit that positions the cover at an open position that exposes the detection unit and a closed position that covers the detection unit, The cutting device is a correction tool attached to the cover for grinding and correcting the mount flange in a state where the mounting tool and the cutting blade are removed and the mount flange is fixed to the tip of the spindle; A cutting device in which, when the cover is positioned in the open position, the correction tool is positioned in a correction position for correcting the mounting flange, and, when the cover is positioned in the closed position, the correction tool is positioned in a retracted position.

2. The correction tool is a first polishing surface for polishing a first surface of the mounting flange perpendicular to the rotation axis; a second polishing surface for polishing a second surface of the mounting flange parallel to the axis of rotation; The cutting device according to claim 1 , further comprising:

3. a blade replacement unit for replacing the cutting blade fixed to the tip of the spindle; A controller that controls at least the blade replacement unit and the opening / closing drive unit, The controller controls the opening / closing drive unit at a predetermined timing to position the correction tool at the correction position and perform correction of the mount flange.

2. The cutting device according to claim 1 .

4. A method for correcting a mount flange using the cutting device according to any one of claims 1 to 3, comprising the steps of: a positioning step of positioning the correction tool at the correction position for correcting the mounting flange; a spindle rotating step of rotating the spindle to which the mount flange is fixed; and a correcting step of correcting the mounting flange by abutting the correcting tool against the rotating mounting flange.

5. The mounting flange is a first surface perpendicular to the axis of rotation of the mounting flange, a rear surface of a hub base when the cutting blade is a hub blade; Or, a rear surface of the cutting blade when the cutting blade is a washer blade; and an annular end surface that serves as a first surface for contacting the The correcting step includes abutting the correcting tool against the annular end surface.

5. The method for modifying a mounting flange according to claim 4.

6. The mounting flange is a second surface parallel to the axis of rotation of the mounting flange, an inner periphery of a fitting hole of a hub base when the cutting blade is a hub blade; Or, an inner periphery of a fitting hole in a front flange portion of the fixing device when the cutting blade is a washer blade; a boss outer circumferential surface which serves as a second surface for fitting with the boss; The correction step includes contacting the correction tool with the boss outer peripheral surface.

6. The method for correcting a mount flange according to claim 4 or 5.

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