Working equipment and loading / unloading equipment

Abstract

To achieve highly accurate loading and unloading with a relatively simple configuration. [Solution] A working device according to the present invention is a working device comprising an loading / unloading mechanism for loading and unloading a substrate, and one or more moving mechanisms for moving the loading / unloading mechanism, wherein the loading / unloading mechanism comprises a substrate support member extended in one direction capable of supporting the substrate, an advancing / retracting mechanism for moving the substrate support member forward and backward in the one direction, a substrate transport mechanism capable of transporting the substrate in the one direction, and a lifting mechanism for raising and lowering the substrate transport mechanism, wherein the advancing / retracting mechanism comprises a base end support member for supporting a base end of the substrate support member, and a power source for generating power to move the base end support member in the one direction, and the lifting mechanism raises and lowers the substrate transport mechanism, thereby transferring the substrate between the substrate support member and the substrate transport mechanism.

Description

[Technical field]

[0001] The present invention relates to a working device and a loading / unloading device. [Background technology]

[0002] Patent Document 1 describes a transport mechanism capable of transporting an object in a desired direction. In this mechanism, a fork forward / backward movement mechanism (3) is disposed on a carrier plate forward / backward transport mechanism (4), a fork lifting mechanism (2) dedicated to forks is disposed on the fork forward / backward movement mechanism, and a fork assembly (1) that supports the object to be transported with multiple rod-shaped support members is disposed on the fork lifting mechanism. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] China Patent Application Publication No. 115285894 Summary of the Invention [Problem to be solved by the invention]

[0004] In general, a conveying mechanism carries in an object from a predetermined position and carries out the object to a different predetermined position (hereinafter referred to as "carrying-in / out operation"). According to the structure of Patent Document 1, the conveying mechanism can selectively carry out carrying-in / out operation using the fork or the conveyor, and also allows the transfer of the object between the fork and the conveyor by raising and lowering only the fork. Here, in the structure of Patent Document 1, a fork forward / backward movement mechanism moves a plurality of rod-shaped forks and a fork lifting mechanism for raising and lowering the fork back and forth. Therefore, deflection is likely to occur at the tip side of the rod-shaped fork, and an error occurs in the stopping position of the raised fork. In addition, vibrations (especially vibrations of the fork tip when supporting the object) generated when the fork is raised and stopped tend to become large, and the next carrying-in / out operation cannot be performed until the magnitude of the vibration falls within a predetermined range, which may reduce the efficiency of the carrying-in / out operation.

[0005] An exemplary object of the present invention is to improve the efficiency of loading and unloading operations. [Means for solving the problem]

[0006] One aspect of the present invention relates to a working device, comprising: A working apparatus including a loading / unloading mechanism for loading and unloading a substrate, and a moving mechanism for moving the loading / unloading mechanism, The loading / unloading mechanism includes: The substrate can be supported. Loading / unloading direction a substrate support member extending from the substrate support member; The substrate support member Loading / unloading direction a reciprocating mechanism for reciprocating the The substrate is Loading / unloading direction a substrate transport mechanism capable of transporting the substrate to a substrate; a lifting mechanism for lifting and lowering the substrate transport mechanism; Equipped with The advance / retract mechanism includes: a base end support member for supporting a base end of the substrate support member; The base end support member Loading / unloading direction a drive unit for moving the Equipped with The base end of the substrate support member One side in the loading / unloading direction At the end of the side, The lifting mechanism lifts and lowers the substrate transport mechanism, thereby transferring the substrate between the substrate support member and the substrate transport mechanism. It is characterized by: Effect of the Invention

[0007] According to the present invention, it is possible to improve the efficiency of loading and unloading operations. [Brief description of the drawings]

[0008] [Figure 1] 1 is a perspective view illustrating an example of the appearance of a working device according to an embodiment; [Diagram 2] FIG. 13 is a perspective view showing an example of an internal structure of a storage container supply mechanism. [Diagram 3] FIG. 2 is a perspective side view of a portion of the structure of the storage container supply mechanism. [Figure 4] FIG. 2 is a perspective view showing an example of the structure of a storage container. [Diagram 5] FIG. 13 is a perspective view showing an example of an internal structure of a storage container supply mechanism. [Figure 6] 11A and 11B are schematic side views for explaining the opening and closing operations of the storage container. [Figure 7] FIG. 2 is a perspective view showing an example of the structure of a transport operation unit. [Figure 8] 11 is a perspective view showing an example of an internal structure of a support table that supports a carry-in / out mechanism; FIG. [Figure 9] FIG. 9 is a perspective view including a carry-in / out mechanism with a portion of FIG. 8 not shown. [Figure 10] 11A and 11B are perspective views showing examples of a driving mode of a loading / unloading mechanism. [Figure 11] FIG. 4 is a perspective view showing an example of a detailed structure of a loading / unloading mechanism. [Figure 12] 13 is a side view showing an example of a detailed structure of a loading / unloading mechanism. FIG. [Figure 13] 1A to 1C are schematic top views showing some examples of how a substrate is loaded / unloaded or transported. [Figure 14] FIG. 13 is a perspective view showing another example of the structure of the transport operation unit. [Figure 15] FIG. 4 is a perspective view showing an example of a detailed structure of a loading / unloading mechanism. [Figure 16] FIG. 4 is a perspective view showing a detailed structure of a fork advancement / retraction mechanism. [Figure 17] FIG. 4 is a side view showing a detailed structure of the conveyor lifting mechanism. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, the embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the invention according to the claims, and not all combinations of features described in the embodiments are essential to the invention. Two or more features among the multiple features described in the embodiments may be arbitrarily combined. In addition, the same reference numbers are used for the same or similar configurations, and duplicated descriptions are omitted.

[0010] First Embodiment <An example of the overall configuration of the work device> 1 is a perspective view showing the appearance of a working device 1 according to the first embodiment. The working device 1 is configured to be able to perform a predetermined task on a workpiece to be worked on, and in this embodiment, includes a storage container supply mechanism 2, a transport work unit 3, a control unit 9, and an exterior panel 10. In this embodiment, the work to be operated is a substrate such as a glass substrate, a mounting substrate, a semiconductor substrate, etc. (substrate SB in Figs. 4, 10, etc.), which is stored in a predetermined storage container 7 and can be carried in and out between the storage container 7 and the operating device 1. In this specification, transfer into the operating device 1 is referred to as "carrying in," and transfer out of the operating device 1 is referred to as "carrying out."

[0011] Here, as with other drawings described later, in order to facilitate understanding of the structure, the left-right direction or width direction of the working device 1 is illustrated as the X direction, the front-rear direction or depth direction is illustrated as the Y direction, and the up-down direction or height direction is illustrated as the Z direction. The X, Y, and Z directions intersect with each other (substantially perpendicular), and the X and Y directions form a horizontal plane.

[0012] In this specification, the relative positional relationship between elements can be described based on the X, Y, and Z directions. One direction, which is an arbitrary direction, can be represented by "+" and the opposite direction can be represented by "-". For example, the -X direction corresponds to the left direction, and the +X direction corresponds to the right direction, and when there is no distinction between the left and right directions, it is simply expressed as the X direction. As an example, moving in the X direction indicates that it is possible to move (reciprocate) in both the +X and -X directions. Similarly, the -Y direction side (or the -Y side) corresponds to the front side or near side, and the +Y direction side (or the +Y side) corresponds to the back side or far side, and when there is no distinction between the front and rear directions, it is simply expressed as the Y direction. As an example, being located on the front side of a specific element indicates being located on the -Y direction side. Similarly, the -Z direction corresponds to the downward direction, and the +Z direction corresponds to the upward direction, and when there is no need to distinguish between the upward and downward directions, it is simply expressed as the Z direction. As an example, being located above a specific element indicates being located on the +Z direction side (or the +Z side).

[0013] Although details will be described later, the storage container 7 is configured to be capable of storing one or more substrates SB, and a user can transport the storage container 7 to the front of the working device 1, for example, using a dolly 8. The storage container supply mechanism 2 enables the substrate SB to be loaded and unloaded from the storage container 7 via a loading / unloading port 201 formed in the housing.

[0014] The transport operation unit 3 performs transport operations for the substrate SB. For example, the transport operation unit 3 transports the substrate SB that has been taken out / loaded from the storage container 7, and transfers (transfers) the substrate SB to another subsequent operation unit. The transport operation unit 3 can also transport the substrate SB received from the other operation unit and store / unload it from the storage container 7. The other operation units are capable of performing predetermined operations on the substrate SB, and examples of the operations include processing operations performed on the substrate, such as heating, cleaning, polishing, and injection.

[0015] The control unit 9 controls the entire system of the working apparatus 1, and controls the drive of the storage container supply mechanism 2 and the transport work unit 3. In this embodiment, the control unit 9 is located on the left side of the front side of the working apparatus 1 together with an operation input unit (e.g., a touch panel display, etc.). A user can input setting information related to the work content via this operation input unit, and the control unit 9 controls the drive of the storage container supply mechanism 2 and the transport work unit 3 based on the setting information.

[0016] In this embodiment, the control unit 9 includes a CPU (Central Processing Unit) and a memory, and the CPU and memory execute a program for controlling the drive of the storage container supply mechanism 2 and the transport operation unit 3. In another embodiment, the control unit 9 may be configured with a semiconductor device such as an ASIC (application specific integrated circuit). In other words, each function of the operation apparatus 1 may be realized by either hardware or software.

[0017] The exterior panel 10 forms an outer wall of the working apparatus 1, and separates an area including the space into which the substrate SB is carried in as a working chamber from the external space. The exterior panel 10 may be expressed as an apparatus housing, additionally including a frame member that forms a framework for the working apparatus 1. Some of the elements of the storage container supply mechanism 2 and the control unit 9 form part of the outer wall of the working apparatus 1, or are attached to the exterior panel 10.

[0018] In this embodiment, two storage container supply mechanisms 2 are illustrated arranged side by side in the X direction, however, the number is not limited to this example, and a single storage container supply mechanism 2 may be arranged, or three or more storage container supply mechanisms 2 may be arranged.

[0019] <An example of the configuration of a loading / unloading operation unit> Fig. 2 is a perspective view showing the internal structure of the storage container supply mechanism 2. Fig. 3 is a schematic left side view and right side view, in a see-through view, of a portion of the structure of the storage container supply mechanism 2. A load / unload port 201 leading to a work chamber is provided in the center of the front side of a wall material 200 constituting the housing of the storage container supply mechanism 2, and although details will be described later, the substrate SB is loaded and unloaded through the load / unload port 201.

[0020] The storage container supply mechanism 2 includes a storage container support table 211, a support table lifting mechanism 213, and a support table advancement mechanism 212 below the loading / unloading port 201. The storage container support table 211 is configured to be able to support the storage container 7, and the storage container 7 can be placed on the upper surface of the storage container support table 211, and is provided with a lower positioning unit 2111 described below. The support table lifting mechanism 213 is able to move the storage container support table 211 in the Z direction, and by lifting the storage container support table 211, the lower positioning unit 2111 engages with an engagement unit 703 on the bottom surface of the container main body 700 described below, and the storage container support table 211 supports the storage container 7. The support table advancement mechanism 212 is able to move the storage container support table 211 in the Y direction, thereby allowing the storage container support table 211 and the storage container 7 thereon to advance and retreat. That is, the storage container 7 , while supported by the storage container support stand 211 , can be raised and lowered by the support stand lifting mechanism 213 , and can be advanced and retreated by the support stand advancing and retreating mechanism 212 .

[0021] The storage container supply mechanism 2 further includes a shielding door 221 and a shielding door moving mechanism 231 . The shielding door 221 shields the loading / unloading opening 201 formed in the wall material 200 from the inside of the work room. As will be described in detail later, the shielding door 221 moves away from the loading / unloading opening 201 to release the shielding, and the shielding door 221 rises to open the loading / unloading opening 201 to an open state. In addition, the shielding door 221 descends to a position facing the loading / unloading opening 201, and the shielding door 221 approaches the loading / unloading opening 201 to shield the loading / unloading opening 201, and the loading / unloading opening 201 is closed. Here, when the loading / unloading opening 201 is in an open state, the shielding door 221 is in an open state, and when the loading / unloading opening 201 is in a closed state, the shielding door 221 is in a closed state. In this embodiment, the shielding door 221 is made of a member larger than the loading / unloading opening 201, and covers and shields the loading / unloading opening 201 by abutting against the wall material 200 surrounding the loading / unloading opening 201. Here, a seal member that abuts against the shielding door 221 may be provided on the workroom side of the loading / unloading opening 201 or the wall material 200. Also, the shielding door 221 may be made of a member of approximately the same size as the loading / unloading opening 201, and the shielding door 221 may be fitted into the loading / unloading opening 201 to shield the loading / unloading opening 201. In this case, the seal member may be provided on the edge of the loading / unloading opening 201.

[0022] The shielding door moving mechanism 231 is configured to be movable so that the shielding door 221 can be changed from one of an open state and a closed state to the other, and in this embodiment, includes a shielding door retracting mechanism 232 and a shielding door lifting mechanism 233 . The shielding door retraction mechanism 232 includes a guide member 2321 and a drive unit 2322 (first movement mechanism). The guide member 2321 holds the shielding door 221 and guides it movably in the Y direction. In this embodiment, the guide member 2321 is a guide rail extending in the Y direction. The drive unit 2322 includes a power source that generates power, and a drive mechanism that moves the shielding door 221 in the Y direction by the power of the power source.

[0023] The shielding door lifting / lowering mechanism 233 includes a guide member 2331 and a drive unit 2332 (second movement mechanism). The guide member 2331 holds the shielding door 221 and the shielding door retracting mechanism 232 and guides them movably in the Z direction. In this embodiment, the guide member 2331 is a guide rail extending in the Z direction. The drive unit 2332 includes a power source that generates power, and a drive mechanism that moves the shielding door 221 and the shielding door retracting mechanism 232 in the Z direction by the power of the power source.

[0024] For example, when the shielding door 221 is changed from a closed state to an open state, the shielding door retracting mechanism 232 moves the shielding door 221 in the +Y direction to retract it, and the shielding door lifting mechanism 233 moves the shielding door 221 and the shielding door retracting mechanism 232, which are thereby separated from the loading / unloading opening 201, in the +Z direction to lift them. On the other hand, when the shielding door 221 is changed from an open state to a closed state, the shielding door lifting mechanism 233 moves the shielding door 221 and the shielding door retracting mechanism 232 in the -Z direction to lower them, and the shielding door retracting mechanism 232 moves the lowered shielding door 221 in the -Y direction to shield the loading / unloading opening 201. The shielding door moving mechanism 231 may be expressed as a shielding door opening and closing mechanism.

[0025] The shielding door retracting mechanism 232 and the shielding door lifting mechanism 233 can be disposed at least partially on the side of the loading / unloading opening 201 and outward (-Y direction) from the wall material 200. In this embodiment, the guide members 2321 and 2331 and the drive unit 2322 are provided outward (-Y direction) from the wall material 200 and on one side (+X direction) and the other side (-X direction) from the loading / unloading opening 201, respectively, and the drive unit 2332 is provided outward (-Y direction) from the wall material 200 and on the other side (-X direction) from the loading / unloading opening 201. This makes it possible to reduce the number of components of the shielding door retracting mechanism 232 and the shielding door lifting mechanism 233 located in the working chamber, sufficiently secure the area of ​​the working chamber, and reduce the influence on the transport operation of the substrate SB in the working chamber described later.

[0026] <An example of the configuration of the storage container> 4 is a perspective view showing the structure of the storage container 7. The storage container 7 includes a container body 700 and a lid 701. An opening OP7 is provided on the side of the container body 700, and one or more substrates SB are supported in a horizontal position along a support member provided on the inner wall of the container body 700 and can be individually inserted and removed horizontally through the opening OP7.

[0027] The lid part 701 is detachably attached to the container body 700 so as to cover the opening OP7. In this embodiment, the lid part 701 and the edge part 704 around the opening OP7 of the container body 700 are both detachable by pins and pin holes, not shown, and / or magnets. With this configuration, the lid part 701 can be removed by applying a force in a direction away from the container body 700 (the +Y direction in the figure).

[0028] Although details will be described later, a protrusion 702 that protrudes or extends horizontally is provided on the outer surface of the lid portion 701 (the surface on the +Y side in the figure). In this embodiment, the protrusion 702 has a shape including a rod portion extending like a bar and legs whose both ends are connected to the lid portion 701, and for convenience, this shape is taken to be a horizontal U-shape. One or more protrusions 702 may be provided, but it is preferable to provide multiple protrusions (four in this embodiment). The protrusions 702 may also be expressed as extensions.

[0029] Further, although details will be described later, an engagement portion 703 is provided on each of the upper and lower parts of the container body 700. In this embodiment, the container body 700 is provided with the engagement portion 703 on each of its upper surface and bottom surface. 3 again, the storage container supply mechanism 2 further includes an upper positioning part 2411 and an upper positioning part moving mechanism 2412 above the load / unload port 201. The upper positioning part moving mechanism 2412 is capable of moving the upper positioning part 2411 in the Z direction by a known configuration.

[0030] With this configuration, the upper positioning portion 2411 can engage with the engaging portion 703 on the top surface of the container body 700, and the lower positioning portion 2111 can engage with the engaging portion 703 on the bottom surface of the container body 700, thereby enabling positioning of the container body 700. That is, the upper positioning portion 2411, the upper positioning portion moving mechanism 2412, the lower positioning portion 2111, the support platform advancing and retracting mechanism 212, and the support platform lifting and lowering mechanism 213 cooperate to function as a positioning mechanism 241 that positions the container body 700 (storage container 7). As a result, the top and bottom surfaces of the container body 700 are each positioned, and even if there is twisting or bending in the container body 700, this is eliminated.

[0031] In this embodiment, a pair of engagement portions 703 are provided on the left and right sides of the top and bottom surfaces of the container body 700, and the positioning portions 2111 and 2411 are provided corresponding to the pair of engagement portions 703 on the left and right sides, but the number of them is not limited to this example.

[0032] <An example of a shielding door configuration> 5(a) and 5(b) are perspective views showing the internal structure of the storage container supply mechanism 2, showing the shielding door 221 as viewed from the work chamber side (the side opposite to the side where the storage containers 7 are arranged). The shielding door 221 includes a door main body 221B, a protrusion holding mechanism 222, and a cover member 223. The door main body 221B is provided with one or more holes OP2 into which the protrusions 702 can be inserted (four in this embodiment) in accordance with the number and positions of the protrusions 702.

[0033] The protrusion holding mechanism 222 includes a protrusion holding part 2221 and an actuator 2222. One or more protrusion holding parts 2221 (four in this embodiment) are provided corresponding to the number of holes OP2. The protrusion holding mechanism 222 may have a shape that can engage with the protrusion 702 having the above-mentioned horizontal U-shape. In this embodiment, the protrusion holding mechanism 222 has a U-shape that is open at the top, and for convenience, this shape is assumed to be a vertical U-shape. Each protrusion holding portion 2221 is connected to an actuator 2222 via a connecting member, and can be raised and lowered based on the power from the actuator 2222. That is, as shown in Fig. 5(a), when the actuator 2222 rises as shown by an arrow A51, each protrusion holding portion 2221 rises as shown by an arrow A52.

[0034] The cover member 223 is provided on the working chamber side so as to cover the hole OP2 and the protrusion holding mechanism 222, and has a predetermined opening through which wires such as signal lines and power lines connected to the actuator 2222 are inserted.

[0035] When the protrusion 702 of the lid 701 of the storage container 7 is inserted into the hole OP2, the corresponding protrusion holding part 2221 rises based on the power of the actuator 2222. At this time, the protrusion holding part 2221 having a vertical U-shape supports the protrusion 702 having a horizontal U-shape from below. With this configuration, the protrusion holding mechanism 222 can hold the protrusion 702 as shown in Fig. 5(b).

[0036] <About opening and closing the storage container for loading and unloading> 6(a) to 6(g) are schematic side views for explaining the opening and closing operation of the storage container 7 for carrying in and out according to this embodiment. For ease of understanding, dashed arrows are shown in the drawings to indicate the direction of the operation with respect to the elements in which the operation occurs. First, the user places the storage container 7 in front of the storage container supply mechanism 2 using the dolly 8 (see FIG. 6(a)).

[0037] Next, based on the setting information input by the user, the control unit 9 causes the support platform elevating mechanism 213 to raise the storage container support platform 211, and the storage container support platform 211 supports the storage container 7. This transfers the storage container 7 from the dolly 8 to the storage container support platform 211 (see FIG. 6(b)). Prior to this, the control unit 9 may cause the storage container support platform 211 to advance and retreat using the support platform advancing and retreating mechanism 212, so that the lower positioning portion 2111 on the upper surface of the storage container support platform 211 engages with the engaging portion 703 on the bottom surface of the container main body 700.

[0038] After raising the storage container support stand 211 until the lower positioning portion 2111 reaches a predetermined height, the control unit 9 advances and retreats the storage container support stand 211 using the support stand advance / retract mechanism 212, and brings the storage container 7 close to the shielding door 221 (see FIG. 6(c)). As a result, the protrusion 702 of the lid 701 is inserted into the hole OP2, and the engagement portion 703 on the top surface of the container body 700 and the upper positioning portion 2411 are overlapped in the Z direction (the engagement portion 703 is positioned so as to be able to engage with the upper positioning portion 2411). Incidentally, the user can remove the dolly 8 from in front of the storage container supply mechanism 2 as necessary.

[0039] The control unit 9 further lowers the upper positioning part 2411 by the upper positioning part moving mechanism 2412, and engages it with the engagement part 703 on the upper surface of the container body 700 (see FIG. 6(d)). In this manner, the positioning of the storage container 7 (container body 700) is performed, and the position of the storage container 7 with respect to the storage container supply mechanism 2 is determined.

[0040] Thereafter, the control unit 9 drives the protrusion holding mechanism 222 of the shielding door 221, and raises the protrusion holding portion 2221 based on the power of the actuator 2222, thereby holding the protrusion 702 inserted into the hole OP2 (see Figures 6(e) and 5(b)).

[0041] In this state, the control unit 9 drives the shielding door retracting mechanism 232 to move the shielding door 221 in the +Y direction and retract it away from the loading / unloading opening 201 (see FIG. 6(f)). As a result, the lid 701 is removed from the container body 700.

[0042] Then, the control unit 9 drives the shielding door lifting mechanism 233 to move the shielding door 221, which has been retracted and separated from the loading / unloading opening 201, in the +Z direction and lift it (see FIG. 6(g)). As a result, the cover 701, whose protrusion 702 is held by the protrusion holding mechanism 222 of the shielding door 221, is lifted together with the shielding door 221.

[0043] In this way, the storage container supply mechanism 2 opens the storage container 7 and communicates the opening OP7 with the loading / unloading opening 201. This allows the substrate SB to be loaded and unloaded. When closing the storage container 7, the above-mentioned procedures can be carried out in reverse order. In this embodiment, the opening and closing of the loading / unloading opening 201, the opening and closing of the shielding door 221, the opening and closing of the storage container 7, the opening OP7, and the opening and closing of the lid 701 correspond to each other. For example, opening the loading / unloading opening 201 may be rephrased as opening the shielding door 221, the storage container 7, the opening OP7, or the lid 701.

[0044] Furthermore, the cart 8 is configured so that it can transfer the storage container 7 to the storage container support stand 211 by raising the storage container support stand 211, and so that it can receive the storage container 7 from the storage container support stand 211 by lowering the storage container support stand 211.

[0045] In addition, in this embodiment, the user transports the storage container 7 using a cart 8, but this is not limited to this, and the storage container 7 may be transported, for example, by an AGV (Automatic Guided Vehicle) or an AMR (Autonomous Mobile Robot), etc.

[0046] According to such a configuration, when the loading / unloading opening 201 and the opening OP7 are opened to allow the substrate SB to be loaded and unloaded, the container body 700 can be kept close to the loading / unloading opening 201, which prevents foreign matter from entering the inside of the container body 700 and the working chamber of the working device 1, and is therefore advantageous for improving product quality. In addition, the user does not need to move the container body 700 back and forth when loading and unloading the substrate SB, and therefore appropriate loading and unloading of the substrate SB can be relatively easily achieved. The same applies when the loading / unloading opening 201 and the opening OP7 are closed.

[0047] <An example of the configuration of the transport operation unit> 7 is a perspective view of the transport operation unit 3. The transport operation unit 3 includes a loading / unloading mechanism 31, a left / right movement mechanism 321, and a support table 329. The carry-in / out mechanism 31 includes a fork 311 and a conveyor 312. The fork 311 is a plate-shaped substrate support member capable of supporting the substrate SB from below, and in this embodiment, the forks 311 are a pair of plate-shaped members each extending in one direction and arranged at a predetermined distance from each other. The conveyor 312 is a substrate transport mechanism capable of transporting the substrate SB. In this embodiment, the conveyor 312 is a roller conveyor having three transport roller rows made up of a plurality of transport rollers, and each of the pair of forks 311 is provided between the transport roller rows. Further details will be described later.

[0048] Here, in this embodiment, fork 311 is a plate-shaped member, but it may be a rod-shaped member extending in one direction, and three or more may be arranged. Also, the upper surface of fork 311 may be provided with a plurality of convex support parts that abut against and support the substrate. Also, conveyor 312 may be a belt conveyor, and transport operation unit 3 may be expressed as a working device.

[0049] The support base 329, which will be described in detail later, supports the loading / unloading mechanism 31 so as to be movable in each of the Y and Z directions and rotatable about the Z direction as a central axis. The support base 329 may be expressed as a rotating support base.

[0050] The left-right movement mechanism 321 supports the support base 329 and the loading / unloading mechanism 31 thereon so as to be movable in the X direction, and in this embodiment includes a support plate 3210, a pair of guide rails 3211, and a drive unit 3212. The support base 329 and various mechanisms at least partially built into it, which will be described later, are mounted on the support plate 3210. The pair of guide rails 3211 are arranged spaced apart in the Y direction and extending in the X direction, and support the support plate 3210 so as to be movable in the X direction. The drive unit 3212 includes a power source that generates power, and a drive mechanism that moves the support plate 3210 in the X direction by the power of the power source. With this configuration, the left-right movement mechanism 321 forms a slider that can move (reciprocate) in the X direction.

[0051] 8 is a perspective view showing the internal structure of the support base 329. In the support base 329, the front-rear movement mechanism 322, the up-down movement mechanism 323, and the rotation mechanism 324 are at least partially built in.

[0052] The front-rear movement mechanism 322 includes a support plate 3220, a pair of guide rails 3221, and a drive unit 3222. A vertical movement mechanism 323 is mounted on the support plate 3220. The pair of guide rails 3221 are arranged spaced apart in the X direction and extending in the Y direction, and support the support plate 3220 so that it can move in the Y direction. The drive unit 3222 includes a power source that generates power, and a drive mechanism that moves the support plate 3220 in the Y direction by the power of the power source. With this configuration, the front-rear movement mechanism 322 forms a slider that can move (advance and retreat) in the Y direction.

[0053] The vertical movement mechanism 323 includes a support plate 3230, a ball screw shaft 3231, a power source 3232, and a pair of guide rails 3233. A rotation mechanism 324 is mounted on the support plate 3230. The ball screw shaft 3231 extends in the Z direction, and rotates about the Z direction by the power of the power source 3232. The pair of guide rails 3233 are arranged to be spaced apart in the Y direction and extend in the Z direction, and support the support plate 3230 so that it can move in the Z direction. The support plate 3230 is screwed into the ball screw shaft 3231 extending in the Z direction, and when the ball screw shaft 3231 rotates based on the power of the power source 3232, it moves in the Z direction along the guide rails 3233 accordingly. With this configuration, the vertical movement mechanism 323 forms a slider that can move (rise and fall) in the Z direction.

[0054] The rotation mechanism 324 includes a support part 3241 and a drive part 3242. The support part 3241 is configured to be rotatable around the Z direction as a rotation axis based on the power of the drive part 3242, and the loading / unloading mechanism 31 is mounted on the support part 3241.

[0055] 9 is a perspective view showing an overall structure including the carry-in / out mechanism 31, with a portion of FIG. 8 not shown. The carry-in / out mechanism 31 is rotatably supported by a rotation mechanism 324, which is supported by a vertical movement mechanism 323 so as to be able to ascend and descend, which is mounted on a front-rear movement mechanism 322 so as to be able to advance and retreat, and which is mounted on a left-right movement mechanism 321 so as to be able to reciprocate. With this configuration, the carry-in / out mechanism 31 is movable in any of the X, Y, and Z directions, and is capable of changing its attitude / direction in any direction (horizontal direction) in the XY plane.

[0056] The order in which the mechanisms 321 to 324 are arranged is not limited to that in this example.

[0057] For example, in this embodiment, the rotation mechanism 324 is mounted on the vertical movement mechanism 323 so that it can be raised and lowered, the vertical movement mechanism 323 is mounted on the front-rear movement mechanism 322 so that it can move forward and backward, and the front-rear movement mechanism 322 is mounted on the left-right movement mechanism 321 so that it can reciprocate, but in other embodiments, the rotation mechanism 324 may be mounted on the front-rear movement mechanism 322 so that it can move forward and backward, the front-rear movement mechanism 322 is mounted on the vertical movement mechanism 323 so that it can be raised and lowered, and the vertical movement mechanism 323 is mounted on the left-right movement mechanism 321 so that it can reciprocate.

[0058] The left-right movement mechanism 321 may be expressed as a reciprocating mechanism, or, to distinguish it from other mechanisms, may be expressed as a loading / unloading mechanism left-right movement mechanism, a loading / unloading mechanism reciprocating mechanism, or the like. The forward / backward movement mechanism 322 may be expressed as an advancing / retreating mechanism, or, to distinguish it from other mechanisms, it may be expressed as a loading / unloading mechanism forward / backward movement mechanism, a loading / unloading mechanism advancing / retreating mechanism, etc. (Note that the expressions reciprocating and advancing / retreating are used for the sake of distinction and are interchangeable). The vertical movement mechanism 323 may be expressed as a lifting mechanism, or, to distinguish it from other mechanisms, may be expressed as a loading / unloading mechanism vertical movement mechanism, a loading / unloading mechanism lifting mechanism, or the like. In addition, since the rotation mechanism 324 changes the attitude / orientation of the loading / unloading mechanism 31, it may be expressed as an attitude changing mechanism, or, to distinguish it from other mechanisms, it may be expressed as an loading / unloading mechanism rotation mechanism, a loading / unloading mechanism attitude changing mechanism, etc. All of the above-mentioned operations are included in the broad definition of movement, and the above-mentioned mechanisms 321-324 may simply be referred to as movement mechanisms. In that case, they may be given expressions such as "first" and "second" to distinguish them, and for example, the mechanisms 321-324 may be expressed as the first to fourth movement mechanisms, respectively. Alternatively, the above-mentioned mechanisms 321-324 may be expressed as carry-in / out mechanism movement mechanisms to distinguish them from other mechanisms, and even in that case, they may be given expressions such as "first" and "second".

[0059] 10(a) and 10(b) are perspective views showing a driving mode of the loading / unloading mechanism 31. In the loading / unloading mechanism 31 in this embodiment, the fork 311 can advance and retreat in one direction, Fig. 10(a) shows the fork 311 in an advanced state, and Fig. 10(b) shows the fork 311 in a retreated state. As described above, the conveyor 312 has three rows of conveying rollers, and a pair of forks 311 is provided between each of the rows of conveying rollers. In other words, the conveyor 312 has three rows of conveying rollers spaced apart in a planar direction perpendicular to the conveying direction, and a fork 311 is provided between each of the multiple roller rows.

[0060] In this embodiment, a conveying roller row consisting of a plurality of conveying rollers 312a, a conveying roller row consisting of a plurality of conveying rollers 312c, and a conveying roller row consisting of a plurality of conveying rollers 312b are arranged in this order in a plane direction perpendicular to the conveying direction. One of the pair of forks 311 is arranged between the conveying roller row consisting of the plurality of conveying rollers 312a and the conveying roller row consisting of the plurality of conveying rollers 312c. The other of the pair of forks 311 is arranged between the conveying roller row consisting of the plurality of conveying rollers 312c and the conveying roller row consisting of the plurality of conveying rollers 312b. Here, the carry-in / out mechanism 31 may be expressed as a carry-in / out device.

[0061] The multiple transport rollers 312a, 312b, and 312c each include a roller section that supports and transports the substrate SB, and a sprocket section that rotates integrally with the roller section. The sprocket sections of the multiple transport rollers 312a, 312b, and 312c are connected by a belt (not shown) so that their rotations are interlocked. Each of the plurality of conveying rollers 312 a , 312 b , and 312 c is connected to one another by a shaft 3121 . A power source 3122 is connected to the shaft 3121, and the shaft 3121 is rotated by the power of the power source 3122. With the rotation of the shaft 3121, one of the transport rollers 312a rotates, and the other transport roller 312a rotates via the belt. The same applies to the transport rollers 312b and 312c. The substrate SB is transported by the rotation of the transport rollers 312a, 312b, and 312c.

[0062] 11 is a perspective view showing a detailed structure of the loading / unloading mechanism 31. In addition to comprising fork 311 and conveyor 312, loading / unloading mechanism 31 further comprises a support plate 3130, a fork advancement / retraction mechanism 313, and a conveyor lifting mechanism 314. Fork advancement / retraction mechanism 313 comprises a fork support member 3131, a guide mechanism 3132, a belt 3133, and a power source 3134. Conveyor lifting mechanism 314 comprises a connecting plate 3140, a drive unit 3141, support plates 3142a-3142c, and a guide member 3143. Fork advancement / retraction mechanism 313 and conveyor lifting mechanism 314 are provided on support plate 3130.

[0063] 16 is a perspective view showing a detailed structure of the fork advancing and retracting mechanism 313. The following will be described with reference to FIGS.

[0064] In this embodiment, a pair of guide mechanisms 3132 are provided on the support plate 3130 so as to extend in one direction. The belt 3133 is an endless traveling belt that is provided between the pair of guide mechanisms 3132 in parallel with the guide mechanisms 3132, and can rotate based on the power of the power source 3134. The fork support member 3131 has a pair of support parts 3131a that support the base end (one end) of the plate-shaped fork 311 so that the plate-shaped fork 311 is in a horizontal position, a holding part 3131b that is held by the guide mechanism 3132 so as to be able to reciprocate along the pair of guide mechanisms 3132, a plate part 3131c that connects the support parts 3131a and the holding part 3131b, and a connecting part 3131d that is connected to the belt 3133. Therefore, the fork support member 3131 is supported so as to be able to reciprocate along the guide mechanism 3132, and moves along the guide mechanism 3132 by the rotation of the belt 3133. The pair of forks 311 also move along the guide mechanism 3132 along with the fork support member 3131. Here, the fork support member 3131 may be expressed as a base end support member because it supports the base ends of the forks 311. In this embodiment, the support portion 3131a is a plate-like member having a predetermined width in one direction, and supports the forks 311 from below so as to overlap with the base ends (one ends) of the forks 311 when viewed vertically.

[0065] As mentioned above, since the loading / unloading mechanism 31 can be rotated by the rotation mechanism 324, the fork 311 can be moved in any horizontal direction, and the forward and backward movement of the fork 311 here corresponds to the withdrawal and storage of the fork 311 (see Figures 10(a) to 10(b)).

[0066] Figures 17(a) and 17(b) are side views showing the detailed structure of the conveyor lifting mechanism 314. Figure 17(a) shows the state when the conveyor 312 is lowered, and Figure 17(b) shows the state when the conveyor 312 is raised. The following description will be made with reference to Figures 11 and 17.

[0067] The guide member 3143 is provided on the support plate 3130. The support plates 3142a and 3142b are supported by a plurality of guide members 3143 that respectively guide the support plates 3142a and 3142b so that they can move up and down. The support plate 3142c is disposed between the support plates 3142a and 3142b, and the support plates 3142a to 3142c are connected to the connecting plate 3140. That is, the support plates 3142a to 3142c and the connecting plate 3140 are supported so that they can move up and down relative to the support plate 3130. In this embodiment, the connecting member 3140 forms a horizontal plane together with the support member 3130, but is not limited thereto, and may be in any position and shape that does not interfere with the forward and backward movement of the fork 311 by the fork forward and backward movement mechanism 313 described above. A pair of drive parts 3141 are provided, each of which is connected (engaged) with the support plates 3142a and 3142b.

[0068] The driving unit 3141 has a rotating shaft, a power source 3141a that generates power, a cam member 3141b provided on the rotating shaft, and a cam groove member 3141c that is provided on each of the support plate members 3142a and 3142b and engages with the cam member 3141b. In this embodiment, the cam member 3141b is provided eccentrically from the center CL of the rotating shaft, and the cam groove member 3141c engages with the cam member 3141b and has a cam groove extending in the horizontal direction. Therefore, when the cam member 3141b is rotated by the driving unit 3141, the cam groove member 3141c rises and falls, and the support plate members 3142a and 3142b in which the cam groove member 3141c is installed rise and fall accordingly. In addition, as the support plate members 3142a and 3142b rise and fall, the support plate member 3142c connected by the connecting member 3140 also rises and falls.

[0069] The support plates 3142a, 3142b, and 3142c rotatably support the plurality of conveying rollers 312a, 312b, and 312c, respectively. In this embodiment, a cam mechanism is used for the drive unit, but this is not limited thereto, and for example, a cylinder or the like may be used for the drive unit.

[0070] 12 is a side view showing a detailed structure of the loading / unloading mechanism 31. As described above, the support plate members 3142a, 3142b, and 3142c supporting the plurality of transport rollers 312a, 312b, and 312c can be raised and lowered with respect to the support plate member 3130 based on the power of the drive unit 3141. That is, the conveyor 312 can be raised and lowered with respect to the support plate member 3130 based on the power of the drive unit 3141. Here, the fork advancement / retraction mechanism 313 only advances and retracts the fork 311, and the fork 311 does not ascend or descend with respect to the support plate member 3130. Therefore, the transport surface of the conveyor 312 can move between a first position P1 below the position P0 of the upper surface (support surface supporting the substrate SB) of the fork 311 and a second position P2 above the position P0. For example, the substrate SB on the fork 311 is transferred from the fork 311 to the conveyor 312 when the conveyor 312 rises from position P1 to position P2. Also, the substrate SB on the conveyor 312 at position P2 is transferred from the conveyor 312 to the fork 311 when the conveyor 312 descends from position P2 to position P1. That is, the conveyor lifting mechanism 314 raises and lowers the conveyor 312, thereby transferring the substrate SB between the fork 311 and the conveyor 312. The conveyor lifting mechanism 314 may simply be referred to as a lifting mechanism.

[0071] According to this configuration, the transfer of the substrate SB between the fork 311 and the conveyor 312 is performed by raising and lowering the conveyor 312 relative to the fork 311, and the fork 311 only moves forward and backward by the fork advancement and retreat mechanism 313. When the substrate SB is transferred between the fork 311 and the conveyor 312, particularly when the substrate SB is transferred from the conveyor 312 to the fork 311, the conveyor 312 moves down to cause the fork 311 to support the substrate SB, so the fork 311 is stopped. This makes it possible to reduce the magnitude of vibrations generated in the fork 311 when transferring the substrate SB, shortening the waiting time until the vibrations that affect the start of the forward movement of the fork 311 subside, and thus making it possible to improve the efficiency of loading and unloading and the efficiency of transporting the substrate SB.

[0072] In addition, the power lines and signal lines (not shown) connected to each power source exemplified in this embodiment only need to be arranged in a manner that allows the corresponding elements to move back and forth, forward and backward, etc., and are arranged by being held, for example, by a cable carrier or the like.

[0073] <About how to carry in and out the board> The loading / unloading mechanism 31 loads / unloads the substrate SB by moving the fork 311 forward and backward by the fork advance / retract mechanism 313 (see Figures 10(a) to 10(b)), and at that time, the substrate SB may be moved forward and backward by the forward / backward movement mechanism 322 to bring the substrate SB even closer to the container body 700.

[0074] The substrate SB can also be carried in and out by transport by the conveyor 312, and in that case, forward and backward movement by the front-rear movement mechanism 322 may be involved. For example, although not shown in the present embodiment, the carry-in / out mechanism 31 may transfer the substrate SB to another working unit equipped with a specified substrate receiving portion. In such a case, the carry-in / out mechanism 31 can move the fork 311 and the conveyor 312 by the front-rear movement mechanism 322 close to the substrate receiving portion of the other working unit, and carry the substrate SB out to the other working unit by transport by the conveyor 312.

[0075] 13(a) to 13(d) are schematic top views showing several examples of how the substrate SB is loaded / unloaded or transported.

[0076] 13(a), an operating unit 4 that performs a predetermined operation (e.g., a cleaning operation) on a substrate SB is disposed as the other operating unit on the rear side of the operating apparatus 1. In this example, another loading / unloading port may be provided on the rear side of the operating apparatus 1, and another storage container supply mechanism 2 may be added as necessary. According to the configuration of the transport operation unit 3 of this embodiment, as described above, the loading / unloading mechanism 31 can move in any of the X, Y, and Z directions, and can change its posture by rotation. Therefore, the substrate SB taken out from the container body 700A via the working device 1 is carried out to another working unit 4 via the path of arrow A131, and after the work is performed in the working unit 4, it can be stored in another container body 700B from the working unit 4 via the working device 1 via a path different from the arrow A131 (see arrow A132). Therefore, according to this embodiment, the substrate SB can be managed separately before and after the work by the working unit 4. Furthermore, the removal of the substrate SB during this example (transport to the working unit 4 and transport to the container body 700B) may be performed by the advancement and retreat of the forks 311, or by transport by the conveyor 312, or by a combination of these.

[0077] 13(b), the substrate SB is unloaded from and loaded into the working unit 4 at the same position. According to the configuration of this embodiment, the substrate SB taken out from the container body 700A and unloaded into the working unit 4 (see arrow A133) can be stored in another container body 700B (see arrow A134) after work is performed by the working unit 4. 13(c), the working unit 4 is disposed on the side of the working apparatus 1. In this example, another loading / unloading opening may be provided on the side of the working apparatus 1, and another storage container supply mechanism 2 may be added as necessary. According to the configuration of this embodiment, the substrate SB taken out of the container body 700A and carried out to the working unit 4 (see arrow A135) can be stored in another container body 700B (see arrow A136) after work is performed by the working unit 4.

[0078] 13(d), the substrate SB is simply transferred from the container body 700A to the container body 700B without any operation by the operating unit 4. According to the configuration of this embodiment, the substrate SB taken out from the container body 700A can be stored as it is in the other container body 700B (see arrow A137).

[0079] Incidentally, in any of the cases of Figures 13(b) to 13(d), similarly to Figure 13(a), the substrate SB may be removed by the advancement and retreat of forks 311, or by transport by a conveyor 312, or by a combination of these.

[0080] In this way, according to the configuration of this embodiment, it is possible to load / unload or transport the substrate SB in various ways, and it is possible to diversify the arrangement of the working unit 4. Therefore, according to this embodiment, it can be said that it is advantageous in diversifying the work content.

[0081] Second Embodiment In the above-described first embodiment, an example of the configuration of the transport work unit 3 is shown in which the loading / unloading mechanism 31 can be moved in any of the X, Y, and Z directions and its posture can be changed by rotation, but the configuration is not limited to this.

[0082] 14 is a perspective view of the transport operation unit 3 according to the second embodiment, without showing the exterior panel 10. In this embodiment, the transport operation unit 3 is equipped with a left-right movement mechanism 321R, a front-back movement mechanism 322R, a up-down movement mechanism 323R, and a rotation mechanism 324R, in addition to the load / unload mechanism 31. The mechanisms 321R-324R are configured to be able to achieve the same functions as the previously described mechanisms 321-324, respectively, and are distinguished here by adding an "R" to the end of the reference numerals (the same applies to the individual elements of the mechanisms 321R-324R, such as the support plate material 3230R).

[0083] FIG. 15 shows a structure in which the loading / unloading mechanism 31 is separated from the front-rear movement mechanism 322R and the rotation mechanism 324R.

[0084] In the structure of this embodiment, the loading / unloading mechanism 31 is rotatably supported by a rotation mechanism 324R, the rotation mechanism 324R is mounted on a front-rear movement mechanism 322R so as to be able to move forward and backward, the front-rear movement mechanism 322R is supported on a vertical movement mechanism 323R so as to be able to rise and fall, and the vertical movement mechanism 323R is mounted on a left-right movement mechanism 321R so as to be able to reciprocate.

[0085] The structure of this embodiment differs from that of the first embodiment described above in that the rotation mechanism 324R is mounted on a front-rear movement mechanism 322R so as to be able to move back and forth, the front-rear movement mechanism 322R is supported on a vertical movement mechanism 323R so as to be able to rise and fall, and the vertical movement mechanism 323R is mounted on a left-right movement mechanism 321R so as to be able to reciprocate.

[0086] In this embodiment, the configuration of the vertical movement mechanism 323R is different from that of the first embodiment. In this embodiment, in the vertical movement mechanism 323R, the support plate material 3230R is provided movably along the lift guide member 3233R extending in the Z direction alongside the ball screw shaft 3231R, thereby enabling the loading / unloading mechanism 31 to be lifted and lowered. The vertical movement mechanism 323R is configured and arranged in a columnar shape on the -X side of the loading / unloading mechanism 31, that is, it is not arranged on the +X side of the loading / unloading mechanism 31. Therefore, the loading / unloading mechanism 31 can load and unload the substrate SB on the opposite side to the vertical movement mechanism 323R (i.e., the +X side). With this configuration, loading and unloading of the substrate SB can be realized even in the example of FIG. 13(c). With the configuration of this embodiment, loading and unloading work to a lower position is possible compared to the first embodiment.

[0087] <Program> As described above, the program executed by the control unit 9 with the CPU when controlling the entire system of the working apparatus 1 may be stored as a computer program in a computer-readable storage medium. Alternatively, a computer program product that realizes the same function when the program is executed by a processor may be installed in the working apparatus 1.

[0088] <Other> In the above explanation, in order to facilitate understanding, each element is given a name related to its function, but each element is not limited to having the content described in the embodiment as its main function, and may have it as an auxiliary function.

[0089] In the above description, for ease of understanding, each element is indicated by a name related to its function, but each element is not limited to having the content described in the embodiment as its main function, and may have it as an auxiliary function. Therefore, each element is not strictly limited to the expression, and the expression can be replaced with another equivalent expression. In the same vein, expressions such as "apparatus," "unit," "mechanism," "member," "portion," "component, piece," "structure," "assembly," "means," etc. may be interchangeable or omitted.

[0090] In addition, two or more elements having similar functions may be distinguished by using expressions such as "first" and "second", but these expressions are not intended to set priorities, and their order may be interchangeable. For example, the X direction may be the first direction and the Y direction may be the second direction, or the Y direction may be the first direction and the X direction may be the second direction (the same applies to the Z direction).

[0091] In addition, two or more elements exemplified as selectable in the embodiments are not strictly limited to the examples, and may be arbitrarily combined, for example, each of the two or more exemplified elements may be additionally or alternatively selected. As an example, when two elements A and B can be arbitrarily combined, it may be expressed as "A and / or B" or "at least one of A and B" to indicate that it is either A only, B only, or both A and B.

[0092] Summary of the embodiment Some features exemplified in the embodiments are as follows: [1] A working apparatus including a loading / unloading mechanism for loading and unloading a substrate, and a moving mechanism for moving the loading / unloading mechanism, The loading / unloading mechanism includes: a substrate support member extending in one direction so as to be able to support the substrate; a reciprocating mechanism for moving the substrate support member in the one direction; a substrate transport mechanism capable of transporting the substrate in the one direction; a lifting mechanism for lifting and lowering the substrate transport mechanism; Equipped with The advance / retract mechanism includes: a base end support member for supporting a base end of the substrate support member; A drive unit that moves the base end support member in the one direction; Equipped with the base end is provided at an end portion on the other side of the substrate support member, The lifting mechanism lifts and lowers the substrate transport mechanism, thereby transferring the substrate between the substrate support member and the substrate transport mechanism. A working device characterized by: [2] The lifting mechanism includes: a first position where a transport surface of the substrate by the substrate transport mechanism is lower than a support surface of the substrate by the substrate support member; a second position in which the conveying surface is above the support surface; The substrate transport mechanism is raised and lowered between The working device according to [1], [3] The lifting mechanism includes: transferring the substrate from the substrate support member to the substrate transport mechanism by lifting the substrate transport mechanism from the first position to the second position; transferring the substrate from the substrate transport mechanism to the substrate support member by lowering the substrate transport mechanism from the second position to the first position; Do The working device according to [2] is characterized in that [4] The moving mechanism includes: a first moving mechanism that moves the loading / unloading mechanism in a first direction perpendicular to the loading / unloading direction; a loading / unloading mechanism lifting mechanism for lifting and lowering the loading / unloading mechanism; Includes The working device according to [1], [5] The moving mechanism further includes a second moving mechanism that moves the loading / unloading mechanism in a second direction perpendicular to the first direction. The working device according to [4], [6] The moving mechanism moves the loading / unloading mechanism so that one end of the substrate transport mechanism approaches or moves away from a predetermined substrate receiving portion capable of receiving the substrate. The working device according to [4], [7] The moving mechanism further includes a loading / unloading mechanism rotating mechanism that rotates the loading / unloading mechanism about a central axis in the up-down direction. The working device according to [4], [8] The moving mechanism includes: a first moving mechanism that moves the loading / unloading mechanism in a first direction perpendicular to the loading / unloading direction; a second moving mechanism that moves the loading / unloading mechanism in a second direction perpendicular to the first direction; a loading / unloading mechanism lifting mechanism for lifting and lowering the loading / unloading mechanism; a carry-in / out mechanism rotating mechanism that rotates the carry-in / out mechanism about a central axis in the vertical direction; Including, the second moving mechanism and the carry-in / out mechanism rotating mechanism are installed on the carry-in / out mechanism lifting mechanism; The loading / unloading mechanism lifting mechanism is installed on the first moving mechanism. The working device according to [1], [9] The loading / unloading mechanism lifting mechanism is a support column extending in a vertical direction and supporting the loading / unloading mechanism from below; A second drive unit that raises and lowers the support unit; Equipped The working device according to [4],

[10] The loading / unloading mechanism lifting mechanism is A lift guide member extending in the vertical direction; a lift support part provided on one side of the lift guide part in the first direction so as to be liftable along the lift guide part and supporting the loading / unloading mechanism; A third drive unit that raises and lowers the lift support unit; Equipped with The loading / unloading mechanism performs the loading / unloading on the side opposite to the lift guide member. The working device according to [4],

[11] the substrate transport mechanism includes a first transport roller unit, a second transport roller unit, and a third transport roller unit that are spaced apart from each other and arranged in parallel in a direction perpendicular to the one direction; the third conveying roller unit is disposed between the first conveying roller unit and the second conveying roller unit, The substrate support member includes: a first plate-shaped member disposed between the first conveying roller unit and the third conveying roller unit; a second plate-shaped member disposed between the second conveying roller unit and the third conveying roller unit; Including, The base end support member is a first support member that supports a base end portion of the first plate-shaped member; a second support member that supports a base end portion of the second plate-like member; Including, The driving unit generates power for moving the first support member and the second support member in the one direction. 2. The working device according to claim 1,

[12] an apparatus housing that houses the loading / unloading mechanism and the moving mechanism; the device housing is provided with a first loading / unloading opening and a second loading / unloading opening for carrying in and out the device, The loading / unloading mechanism includes: performing one of the loading and unloading operations at the first loading / unloading port using the substrate support member and the advancing / retracting mechanism; At the second loading / unloading port, the other of the loading and unloading is performed using the substrate transport mechanism and the lifting mechanism. A working device according to any one of claims [1] to

[11] , characterized in that

[13] A loading / unloading device that transfers a substrate from one loading / unloading direction to another loading / unloading direction, a substrate support member extending in the one direction so as to be able to support the substrate; a reciprocating mechanism for moving the substrate support member in the one direction; a substrate transport mechanism capable of transporting the substrate in the other direction; a lifting mechanism for lifting and lowering the substrate transport mechanism; Equipped with The advance / retract mechanism includes: a base end support member for supporting a base end of the substrate support member; A drive unit that moves the base end support member in the one direction; Equipped with The base end portion is provided at an end portion on the other side of the base end portion support member, The lifting mechanism includes: a first position where a transport surface of the substrate by the substrate transport mechanism is lower than a support surface of the substrate by the substrate support member; a second position in which the conveying surface is above the support surface; The substrate transport mechanism is raised and lowered between A loading / unloading device characterized by the above.

[0093] The invention is not limited to the above-described embodiment, and various modifications and variations are possible within the scope of the gist of the invention. [Explanation of symbols]

[0094] 1: working device, 2: storage container supply mechanism, 3: transport work unit, 7: storage container, 9: control unit, 201: loading / unloading opening, 221: shielding door, 221B: door body, 222: protrusion holding mechanism, 223: cover member, 231: shielding door moving mechanism, 31: loading / unloading mechanism, 311: fork (substrate support member), 312: conveyor (substrate transport mechanism), 313: fork advance / retract mechanism, 314: conveyor lifting mechanism.

Claims

1. A working apparatus including a loading / unloading mechanism for loading and unloading a substrate, and a moving mechanism for moving the loading / unloading mechanism, The loading / unloading mechanism includes: a substrate support member extending in a loading / unloading direction so as to be able to support the substrate; a reciprocating mechanism for moving the substrate support member in the loading / unloading direction; a substrate transport mechanism capable of transporting the substrate in the loading / unloading direction; a lifting mechanism for lifting and lowering the substrate transport mechanism; Equipped with The advance / retract mechanism includes: a base end support member for supporting a base end of the substrate support member; A drive unit that moves the base end support member in the carry-in / out direction; Equipped with the base end portion is provided at one end portion of the substrate support member in the loading / unloading direction, The lifting mechanism lifts and lowers the substrate transport mechanism, thereby transferring the substrate between the substrate support member and the substrate transport mechanism. A working device characterized by:

2. The lifting mechanism includes: a first position where a transport surface of the substrate by the substrate transport mechanism is lower than a support surface of the substrate by the substrate support member; a second position in which the conveying surface is above the support surface; and The substrate transport mechanism is raised and lowered between 2. The working device according to claim 1.

3. The lifting mechanism includes: transferring the substrate from the substrate support member to the substrate transport mechanism by lifting the substrate transport mechanism from the first position to the second position; transferring the substrate from the substrate transport mechanism to the substrate support member by lowering the substrate transport mechanism from the second position to the first position; Do 3. The working device according to claim 2, wherein

4. The moving mechanism includes: a first moving mechanism that moves the loading / unloading mechanism in a first direction perpendicular to the loading / unloading direction; a loading / unloading mechanism lifting mechanism for lifting and lowering the loading / unloading mechanism; Includes 2. The working device according to claim 1.

5. The moving mechanism further includes a second moving mechanism that moves the loading / unloading mechanism in a second direction perpendicular to the first direction.

5. The working device according to claim 4.

6. The moving mechanism moves the loading / unloading mechanism so that one end of the substrate transport mechanism approaches or moves away from a predetermined substrate receiving portion capable of receiving the substrate.

6. The working device according to claim 5.

7. The moving mechanism further includes a loading / unloading mechanism rotating mechanism that rotates the loading / unloading mechanism about a central axis in the up-down direction.

5. The working device according to claim 4.

8. The moving mechanism includes: a first moving mechanism that moves the loading / unloading mechanism in a first direction perpendicular to the loading / unloading direction; a second moving mechanism that moves the loading / unloading mechanism in a second direction perpendicular to the first direction; a loading / unloading mechanism lifting mechanism for lifting and lowering the loading / unloading mechanism; a carry-in / out mechanism rotating mechanism that rotates the carry-in / out mechanism about a central axis in the vertical direction; Including, the second moving mechanism and the carry-in / out mechanism rotating mechanism are installed on the carry-in / out mechanism lifting mechanism, The loading / unloading mechanism lifting mechanism is installed on the first moving mechanism.

2. The working device according to claim 1.

9. The loading / unloading mechanism lifting mechanism is a support column extending in a vertical direction and supporting the loading / unloading mechanism from below; A second drive unit that raises and lowers the support unit; Equipped 5. The working device according to claim 4.

10. The loading / unloading mechanism lifting mechanism is A lift guide member extending in the vertical direction; a lift support part provided on one side of the lift guide part in the first direction so as to be liftable along the lift guide part and supporting the loading / unloading mechanism; A third drive unit that raises and lowers the lift support unit; Equipped with The loading / unloading mechanism performs the loading / unloading on the side opposite to the lift guide member.

5. The working device according to claim 4.

11. the substrate transport mechanism includes a first transport roller unit, a second transport roller unit, and a third transport roller unit that are spaced apart from each other and arranged in parallel in a direction perpendicular to the carry-in / out direction; the third conveying roller unit is disposed between the first conveying roller unit and the second conveying roller unit, The substrate support member includes: a first plate-shaped member disposed between the first transport roller unit and the third transport roller unit; a second plate-shaped member disposed between the second transport roller unit and the third transport roller unit; Including, The base end support member is a first support member that supports a base end portion of the first plate-like member; a second support member that supports a base end portion of the second plate-like member; Including, The drive unit generates power for moving the first support member and the second support member in the loading / unloading direction.

2. The working device according to claim 1.

12. an apparatus housing that houses the loading / unloading mechanism and the moving mechanism; the device housing is provided with a first loading / unloading opening and a second loading / unloading opening for carrying in and out the device, The loading / unloading mechanism includes: performing one of the loading and unloading operations at the first loading / unloading port using the substrate support member and the advancing / retracting mechanism; At the second loading / unloading port, the other of the loading and unloading is performed using the substrate transport mechanism and the lifting mechanism. The working device according to any one of claims 1 to 11.

13. A loading / unloading device that transfers a substrate from one side to another side in a loading / unloading direction in which the substrate is loaded and unloaded, a substrate support member extending in the loading / unloading direction so as to be able to support the substrate; a reciprocating mechanism for moving the substrate support member in the loading / unloading direction; a substrate transport mechanism capable of transporting the substrate to the other side in the carry-in / out direction; a lifting mechanism for lifting and lowering the substrate transport mechanism; Equipped with The advance / retract mechanism includes: a base end support member for supporting a base end of the substrate support member; A drive unit that moves the base end support member in the carry-in / out direction; Equipped with The base end portion is provided at the other end portion of the base end portion support member in the carry-in / out direction, The lifting mechanism includes: a first position where a transport surface of the substrate by the substrate transport mechanism is lower than a support surface of the substrate by the substrate support member; a second position in which the conveying surface is above the support surface; and The substrate transport mechanism is raised and lowered between A loading / unloading device characterized by the above.

Images