X-ray fluorescence analyzer

Abstract

The partition film is stretched so that measurements can be made even if there is a pressure difference between the spaces separated by the partition film, and the partition film is stretched so as not to easily cause bending or wrinkling. An X-ray fluorescence analyzer having an irradiation chamber whose inside is a vacuum and a sample chamber whose inside is at atmospheric pressure, the apparatus comprising: a window frame holding member which forms part of the partition between the irradiation chamber and the sample chamber and has an opening through which X-rays pass, and a window frame member which holds the partition film which is part of the partition and is formed of a material which transmits X-rays, and is placed in the opening of the window frame holding member, the window frame member having a peripheral wall extending from a base end which is placed on the sample chamber side to a tip end which is placed on the irradiation chamber side, the tip forming an opening which is closed by a part of the partition film, and an annular inner film holding member which is inserted from the tip of the inner film holding member and attached to the base end of the inner film holding member, thereby fixing the periphery of a part of the partition film to the inner film holding member.

Description

[Technical field]

[0001] The present invention relates to an X-ray fluorescence analyzer. [Background technology]

[0002] X-ray fluorescence analyzers are known as devices for analyzing elements contained in a sample (see Patent Document 1). X-ray fluorescence analyzers irradiate a sample with primary X-rays and perform analysis based on the intensity and energy of fluorescent X-rays emitted from the sample. A simple X-ray fluorescence analyzer having a structure in which a sample chamber and an irradiation chamber are separated by a partition membrane so that samples can be easily replaced is also known (see Patent Document 2). Another known X-ray fluorescence analyzer has a sample cell stand that includes an X-ray transparent sheet that is sandwiched between an outer table frame and an inner table frame and closes one end side of the inner table frame (see Patent Document 3). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2005-024407 [Patent Document 2] International Publication No. 2004-088296 [Patent Document 3] Japanese Patent Application Publication No. 9-127028 Summary of the Invention [Problem to be solved by the invention]

[0004] The fluorescent X-ray analyzer of Patent Document 1 includes a sample chamber in which a sample is stored, an irradiation chamber in which an X-ray source for irradiating the sample with primary X-rays is stored and which communicates with the sample chamber, an irradiation chamber in which a detection means for dispersing and detecting secondary X-rays generated from the sample is stored, and a partition wall arranged to separate the irradiation chamber and allow X-rays to pass through. The partition wall film is made of polyimide or the like and deteriorates due to irradiation with X-rays. Therefore, the partition wall film needs to be replaced at regular intervals, but the fluorescent X-ray analyzer of Patent Document 1 does not allow the partition wall film to be easily replaced due to its structure.

[0005] In the X-ray fluorescence analyzer of Patent Document 2, a first frame and a second frame sandwiching a partition membrane are disposed between the sample chamber and the irradiation chamber, thereby separating the sample chamber and the irradiation chamber. The partition membrane can be easily replaced by forming the first frame from a permanent magnet and the second frame from a material that is attracted to the permanent magnet. However, the partition membrane is merely sandwiched between the magnets and is not fixed. Therefore, it is not possible to perform measurements in an environment where there is a pressure difference between the sample chamber and the irradiation chamber. In addition, when the partition membrane is sandwiched between the first frame and the second frame, the partition membrane may be bent or wrinkled.

[0006] The X-ray fluorescence analyzer of Patent Document 3 does not assume that the X-ray tube will be placed in a vacuum environment and the sample will be placed in an atmospheric pressure environment. Therefore, it is not possible to perform measurements in an environment where there is a pressure difference between the area where the sample is placed and the area where the X-ray tube is placed.

[0007] The present disclosure has been made in consideration of the above-mentioned problems, and has an object to provide an X-ray fluorescence analysis device that can perform measurements even when there is a pressure difference in a space separated by a partition film, and that can easily stretch the partition film so as to prevent bending or wrinkling. [Means for solving the problem]

[0008] (1) An X-ray fluorescence spectrometer according to one aspect of the present disclosure is an X-ray fluorescence spectrometer having an irradiation chamber in a vacuum environment in which an X-ray source that emits X-rays is disposed, and a sample chamber in an atmospheric pressure environment in which a sample cell is disposed, the X-ray fluorescence spectrometer having a window frame holding member that constitutes a part of a partition between the irradiation chamber and the sample chamber and has an opening through which the X-rays pass from the irradiation chamber to the sample chamber, and a window frame member that holds a partition film that constitutes another part of the partition and is made of a material that transmits the X-rays and is disposed in the opening of the window frame holding member, the window frame holding member having a plurality of through holes that pass the X-rays, The present invention is characterized in that the window frame member has a film support member arranged adjacent to the irradiation chamber side of the wall film and supporting the partition film from the irradiation chamber side, and the window frame member has a peripheral wall extending from a base end arranged on the sample chamber side to a tip end arranged on the irradiation chamber side, the tip forming an opening that is blocked by a part of the partition film, and an annular inner film holding member that is inserted from the tip of the inner film holding member and attached to the base end of the inner film holding member, thereby fixing the periphery of the part of the partition film to the inner film holding member.

[0009] (2) The inner film holding member is characterized by having a flange portion at the base end for fixing the positional relationship with the window frame holding member.

[0010] (3) In another aspect of the present disclosure, the fluorescent X-ray analysis apparatus is characterized in that the flange portion has a first flange portion provided at the tip side and clamping the partition film together with the outer film holding member, and a second flange portion provided at the base end side, having an outer diameter larger than that of the first flange portion, and fixed to the window frame holding member.

[0011] (4) In a fluorescent X-ray analyzer according to another aspect of the present disclosure, the first flange portion and the second flange portion are integrally formed.

[0012] (5) In another aspect of the present disclosure, the fluorescent X-ray analysis apparatus is characterized in that the peripheral wall has a vertical portion extending vertically from the flange portion toward the tip, and a curved portion curved from the vertical portion to the tip.

[0013] (6) In another aspect of the present disclosure, the fluorescent X-ray analysis apparatus is characterized in that the peripheral wall has a vertical portion extending vertically from the flange portion toward the tip, and an inclined portion inclined from the vertical portion to the tip.

[0014] (7) In another aspect of the present disclosure, in the fluorescent X-ray analysis apparatus, the peripheral wall has a flat portion at the tip that is parallel to a plane of an opening that is blocked by a portion of the partition film.

[0015] (8) In a fluorescent X-ray analysis apparatus according to another aspect of the present disclosure, the outer film holding member and / or the film support member are formed of resin.

[0016] (9) In a fluorescent X-ray analysis apparatus according to another aspect of the present disclosure, the inner film holding member and / or the window frame holding member are formed of metal.

[0017] (10) In a fluorescent X-ray analyzer according to another aspect of the present disclosure, the window frame holding member has a first gas inlet hole passing through from an outer side surface to an inner side surface facing the window frame member, The flange portion has a second gas inlet hole penetrating the upper surface and the lower surface. It is characterized by:

[0018] (11) In another aspect of the present disclosure, in a fluorescent X-ray analysis apparatus, the window frame holding member has a gas supply port on the outside of the first gas inlet hole, which supplies gas to be flowed between the sample cell and the partition film via the first gas inlet hole and the second gas inlet hole. Effect of the Invention

[0019] According to the present disclosure, it is possible to measure even if there is a pressure difference in a space separated by a partition film, and the partition film can be easily stretched so as not to cause bending or wrinkling. [Brief description of the drawings]

[0020] [Figure 1] FIG. 1 is a diagram showing an outline of an X-ray fluorescence analyzer. [Diagram 2] FIG. [Diagram 3] FIG. [Figure 4] 2A to 2C are top, side and bottom views of a window frame holding member. [Diagram 5] 3A to 3C are top, side and bottom views of a film support member. [Figure 6] 4A to 4C are top, side and bottom views of an inner film holding member. [Figure 7] 3A to 3C are top, side and bottom views of an outer film holding member. [Figure 8] FIG. [Figure 9] 11A and 11B are diagrams showing how a partition film is attached to a window frame member. [Figure 10] FIG. 13 is a cross-sectional view of a window frame member according to a modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] A preferred embodiment (hereinafter referred to as an embodiment) for carrying out the present invention will be described below with reference to the drawings. Fig. 1 is a schematic diagram of an X-ray fluorescence analysis apparatus 100. As shown in Fig. 1, the X-ray fluorescence analysis apparatus 100 has a sample chamber 102 under atmospheric pressure and an irradiation chamber 106 under a vacuum environment. The sample chamber 102 and the irradiation chamber 106 are separated by a partition wall including a partition wall 108 so that gas does not move between them. The partition wall 108 has an opening that allows X-rays to pass from the irradiation chamber 106 to the sample chamber 102.

[0022] In the irradiation chamber 106, an X-ray source 110 that emits X-rays, a spectroscopic element 111 that disperses fluorescent X-rays, a detector 112 that detects fluorescent X-rays, and the like are arranged. The X-ray source 110 irradiates X-rays onto the sample cell 116 through the opening. Fluorescent X-rays are emitted from the sample irradiated with X-rays. The spectroscopic element 111 disperses the fluorescent X-rays of a predetermined wavelength emitted from the sample. The detector 112 is arranged at a position where the fluorescent X-rays dispersed by the spectroscopic element 111 are incident. The detector 112 is, for example, a proportional counter. The detector 112 measures the fluorescent X-rays and outputs a pulse signal. A counter (not shown) counts the pulse signal output from the detector 112 to obtain the intensity of the fluorescent X-rays. The sample is analyzed based on the intensity of the fluorescent X-rays.

[0023] The spectroscopic element 111 and the detector 112 may be provided for each element to be analyzed, or a pair of the spectroscopic element 111 and the detector 112 may be configured to rotate. When a pair of the spectroscopic element 111 and the detector 112 is rotated, a mechanism (goniometer) for rotating the spectroscopic element 111 and the detector 112 is disposed in the irradiation chamber 106. The present disclosure is particularly effective when analyzing light elements in a wavelength-dispersive X-ray fluorescence analyzer 100 in which the distance from the sample to the detector 112 is long as shown in FIG. 1, but the X-ray fluorescence analyzer 100 may be an energy-dispersive device that does not have the spectroscopic element 111.

[0024] The sample chamber 102 is provided with a sample stage 104, and a sample cell 116 is placed on the sample stage 104. The inside of the sample chamber 102 may be filled with helium or air. According to the present disclosure, measurement can be performed whether the sample is in a helium environment or an air environment. In the following, a case where the sample is placed in an air environment, which is a case where it is not necessary to procure helium gas and measurement can be performed at low cost, will be described. In addition, the sample may be either a liquid or a solid (including powder), but the following will describe a case where the sample is a liquid. The liquid sample is placed in the sample cell 116. The sample cell 116 is cylindrical, and a sample holding film is stretched to cover the bottom surface. The liquid sample is placed on the sample holding film. In addition, the top surface of the sample cell 116 is sealed with another film to prevent the sample from spilling. The sample stage 104 includes a window frame member 300, a window frame holding member 400, and a cover member 118. The specific configuration of the sample stage 104 will be described with reference to FIGS.

[0025] 2 and 3 are overhead views of the sample stage 104 (excluding the cover member 118) and the partition wall 108 between the sample chamber 102 and the irradiation chamber 106. FIG. 2 shows a state in which the window frame holding member 400 and the window frame member 300 are arranged on the partition wall 108, and FIG. 3 shows a state in which the window frame member 300 and the film support member 500 have been removed. FIGS. 4 to 7 show top views (upper side), side views (center), and bottom views (lower side) of each member. FIG. 8 is a diagram showing a cross section of the sample stage 104 and the partition wall 108 in a state in which the sample cell 116 is arranged.

[0026] The window frame holding member 400 constitutes a part of the partition between the irradiation chamber 106 and the sample chamber 102, and has an opening that allows X-rays to pass from the irradiation chamber 106 to the sample chamber 102. Specifically, the window frame holding member 400, together with the partition wall 108, constitutes a part of the partition that separates the sample chamber 102 from the irradiation chamber 106. The window frame holding member 400 has an upper holding member 402 and a lower holding member 404 shown in FIG. 4, and a film support member 500 shown in FIG. 5. The upper holding member 402 and the lower holding member 404 have openings that allow X-rays to pass from the irradiation chamber 106 to the sample chamber 102. Note that when the opening of the partition wall 108 is closed only by the film support member 500 and the partition film 800, the window frame holding member 400 does not need to constitute a part of the partition.

[0027] The lower holding member 404 is a member disposed on the partition wall 108 in contact therewith. The lower holding member 404 has a substantially circular outer edge when viewed from the top and bottom, and has a circular opening at a position corresponding to the opening provided in the partition wall 108. The lower holding member 404 is formed so that the outer periphery is the thickest in cross-sectional view, and the inner side is formed so that the inner side is thin. For example, the lower holding member 404 has a step (first step) at the position of the outer edge of the window frame member 300 (a position corresponding to a peripheral wall 606 of the inner film holding member 600 described later) when the window frame member 300 is disposed. The lower holding member 404 has an O-ring that contacts the curved portion 610 of the inner film holding member 600 at the position where the step is provided. This allows the irradiation chamber 106 to be kept in a vacuum with the sample chamber 102 in a state of air or gas replacement (for example, filled with helium gas). Furthermore, the lower holding member 404 has a step (second step) inside the step (first step). When the film support member 500 is placed, the outer edge of the film support member 500 is located at the step (second step).

[0028] The upper holding member 402 is a member disposed on and in contact with the lower holding member 404. When viewed from the top and bottom, the upper holding member 402 has a substantially circular outer edge and a circular opening with a larger diameter and centered at the same position as the opening provided in the lower holding member 404. The upper holding member 402 has an O-ring at a position where it contacts the lower holding member 404.

[0029] Moreover, the upper holding member 402 has a first gas inlet 408 penetrating from the outer side surface to the inner side surface facing the window frame member 300. The upper holding member 402 has a gas supply port 406 that supplies gas to be flowed between the sample cell 116 and the partition film 800 via the first gas inlet 408 and a second gas inlet 614 (described later). A hose or the like that serves as a gas flow path is attached to the gas supply port 406, and gas supplied from an external gas supply device flows from the outer side surface to the inner side surface.

[0030] The upper holding member 402 and the lower holding member 404 are preferably made of metal. Metal materials are less susceptible to deterioration by X-rays than resin materials, and can be used repeatedly. The upper holding member 402 and the lower holding member 404 may also be formed integrally.

[0031] The film support member 500 has a plurality of through holes 502 for passing X-rays, and is disposed adjacent to the partition film 800 on the irradiation chamber 106 side to support the partition film 800 from the irradiation chamber 106 side. Specifically, as shown in FIG. 5, the film support member 500 has an approximately circular outer edge when viewed from the top and bottom. The film support member 500 is formed so that the vicinity of the outer periphery is thin and the inner side is thicker than the vicinity of the outer periphery. The thick portion of the film support member 500 has a shape corresponding to the shape of the opening of the lower holding member 404. The film support member 500 is disposed on the lower holding member 404 so that the thick portion is located at the opening of the lower holding member 404. At this time, the outer edge of the film support member 500 is located at the location where the step (second step) provided in the lower holding member 404 is provided. The plurality of through holes 502 for passing X-rays are provided in the thick portion of the film support member 500.

[0032] In this embodiment, the film support member 500 has five through holes 502. Each through hole 502 has an elongated shape. Each through hole 502 has the same width, but is formed so that it is longer toward the center. However, the shape of the through holes 502 is not limited to the shape shown in FIG. 5. For example, the multiple through holes 502 may be hexagonal and arranged to form a honeycomb structure. In addition, the film support member 500 is preferably formed of a thermoplastic resin such as polyether ether ketone that is less deteriorated by X-rays. According to the present disclosure, the partition film 800 is supported by the portion between the adjacent through holes 502. This makes it possible to prevent the partition film 800 from being damaged due to the pressure difference between the sample chamber 102 and the irradiation chamber 106.

[0033] The window frame member 300 holds a partition film 800 formed from a material that transmits X-rays and constitutes another part of the partition, and is placed within the opening of the window frame holding member 400. Specifically, the window frame member 300 has an inner film holding member 600 shown in Fig. 6 and an outer film holding member 700 shown in Fig. 7. The window frame member 300 is placed within the opening of the window frame holding member 400 with the partition film 800 sandwiched between the inner film holding member 600 and the outer film holding member 700. The partition film 800 in the opening constitutes part of the partition.

[0034] The inner film holding member 600 has an annular shape, and has a flange portion at a base end arranged on the sample chamber 102 side, and a peripheral wall 606 extending from the base end toward a tip arranged on the irradiation chamber 106 side. Specifically, the flange portion is provided at the base end, has a circular outer edge, and has a circular opening on the inside. The flange portion has a first flange portion 602 on the tip side, and a second flange portion 604 on the base end side. The peripheral wall 606 extends from the first flange portion 602 toward the tip, and the first flange portion 602 and the peripheral wall 606, together with the outer film holding member 700, hold the partition film 800.

[0035] The second flange portion 604 has an outer diameter larger than that of the first flange portion 602, and is fixed to the window frame holding member 400. The second flange portion 604 is provided with a screw hole 616, and is fixed to the upper holding member 402 by a screw 200 inserted into the screw hole 616. The window frame member 300 is disposed on the window frame holding member 400 so that the outer edge of the peripheral wall 606 is located at a step (first step) of the lower holding member 404. In this embodiment, the first flange portion 602 and the second flange portion 604 are integrally formed, but the first flange portion 602 and the second flange portion 604 may be formed separably. The flange portion also has a second gas inlet hole 614 penetrating the upper surface on the base end side and the lower surface on the tip end side.

[0036] The peripheral wall 606 extends from the first flange portion 602 toward the tip, and the tip forms an opening that is closed by a part of the partition film 800. Specifically, the peripheral wall 606 has a vertical portion 608 that extends perpendicularly from the flange portion toward the tip, a curved portion 610 that curves from the vertical portion 608 toward the inside of the tip, and a flat portion 612 at the tip that is parallel to the plane of the opening. The peripheral wall 606 and the first flange portion 602 are integrally formed from metal. Note that the peripheral wall 606 may have the vertical portion 608 and the curved portion 610, but may not have the flat portion 612.

[0037] The outer film holding member 700 is an annular member, and holds the partition film 800 together with the inner film holding member 600. Specifically, the outer film holding member 700 is an annular member inserted from the tip of the inner film holding member 600. The inner diameter of the outer film holding member 700 corresponds to the outer diameter of the peripheral wall 606. The outer film holding member 700 is attached to the base end of the inner film holding member 600, thereby fixing the periphery of a part of the partition film 800 (the part that closes the opening of the peripheral wall 606) to the inner film holding member 600. In Figs. 7 and 8, the outer diameter of the base end side of the outer film holding member 700 is larger than the outer diameter of the tip end side, but the outer film holding member 700 may have any shape as long as it can hold the partition film 800 together with the inner film holding member 600. In addition, it is preferable that the outer film holding member 700 is formed of a thermoplastic resin such as polyether ether ketone that is less deteriorated by X-rays so that it can be easily attached to the peripheral wall 606.

[0038] The lid member 118 seals the space in which the sample cell 116 is disposed. Specifically, as shown in Fig. 8, the lid member 118 has a shape that covers the space in which the sample cell 116 is disposed, and is disposed in contact with the upper holding member 402 of the window frame holding member 400. The lid member 118 has an O-ring at a position where it contacts the upper holding member 402, and partitions the inside and outside of the lid member 118 so that gas does not move between them except for the paths of the first gas inlet hole 408 and the second gas inlet hole 614.

[0039] According to the present disclosure, the partition film 800, which needs to be replaced periodically, can be easily attached to the window frame member 300 without bending or wrinkling. FIG. 9 is a diagram showing how the partition film 800 is attached to the window frame member 300. First, the inner film holding member 600 is placed on a flat surface with the base end facing down (the tip facing up). The partition film 800, which is sufficiently larger than the opening, is placed so as to cover the opening at the tip. In this state, the outer film holding member 700 is fitted from the tip to the base end of the peripheral wall 606. At this time, a force pulling the partition film 800 in the direction of the arrow in FIG. 9 acts on the partition film 800. Therefore, the partition film 800 can be easily stretched without bending or wrinkling. In addition, since the peripheral wall 606 is provided with the curved portion 610 and the flat portion 612, the force applied to the partition film 800 in the stretched state can be dispersed. Therefore, since no force is applied to one point on the partition film 800, the possibility of the partition film 800 being torn when being pinched can be reduced.

[0040] Further, according to the present disclosure, the sample can be replaced or the gas in the sample chamber 102 can be replaced while the irradiation chamber 106 is kept in a vacuum. Specifically, the lower holding member 404 has an O-ring at a position where a step (first step) is provided. When the window frame member 300 is placed on the lower holding member 404, the O-ring comes into contact with both the curved portion 610 of the inner film holding member 600 and the lower holding member 404. This allows the gap between the window frame member 300 and the window frame holding member 400 to be airtightly sealed. In addition, the opening of the window frame holding member 400 is closed by the partition film 800 held by the window frame member 300. Therefore, even when the sample cell 116 is removed (see FIG. 2), the sample chamber 102 and the irradiation chamber 106 are isolated from each other. Therefore, the sample can be replaced or the gas in the sample chamber 102 can be replaced while the irradiation chamber 106 is kept in a vacuum. Moreover, the sample can be easily replaced by simply opening the cover member 118 and replacing the sample cell 116 without using tools or the like.

[0041] In addition, although the film support member 500 is formed of a material that is less susceptible to deterioration by X-rays, it is desirable to replace it at regular intervals. According to the present disclosure, the film support member 500 is disposed on the window frame holding member 400 and is not fixed by screws or the like. Therefore, the film support member 500 can be easily replaced by simply disposing the window frame member 300 to which the partition film 800 is attached as described above in the opening of the window frame holding member 400. Also, according to the present disclosure, the second flange portion 604 is provided with a screw hole 616, and the window frame member 300 is fixed to the upper holding member 402 by the screw 200 inserted into the screw hole 616. The screw fastening operation can be performed from the upper side where it is easy to work, so the user can easily fix the window frame member 300 to the upper holding member 402.

[0042] In addition, according to the present disclosure, the partition film 800 can be prevented from being deteriorated by ozone generated during measurement. Specifically, as shown in FIG. 1 and FIG. 8, the sample holding film that covers the bottom surface of the sample cell 116 and the partition film 800 are arranged close to each other, but there is a gap between them. Therefore, when the sample chamber 102 is air, air exists between the sample holding film and the partition film 800. In addition, as shown in FIG. 1, X-rays are irradiated to the partition film 800 during measurement. Since the air contains oxygen, ozone is generated when the oxygen is exposed to X-rays, and the ozone promotes deterioration of the partition film 800. In the present disclosure, gas is supplied to the gas supply port 406 from an external gas supply device. The supplied gas is preferably nitrogen, but may be air. The dashed arrow in FIG. 8 indicates the path through which the supplied gas flows. The gas supplied from the gas supply port 406 reaches the space between the window frame member 300 and the window frame holding member 400 (the space near the outer film holding member 700 in FIG. 8) through the first gas inlet 408. This space exists in a ring shape along the outer film holding member 700. In addition, since this space is connected to the second gas inlet 614, the supplied gas reaches the space between the sample cell 116 and the cover member 118 through the second gas inlet 614. Furthermore, a part of the supplied gas passes between the sample cell 116 and the inner film holding member 600 and reaches the gap between the sample holding film and the partition film 800. Note that the spaces between the sample cell 116 and the inner film holding member 600 and between the sample holding film and the partition film 800 are actually very small, but are exaggerated in FIG. 8 for ease of understanding. If ozone is generated between the sample holding film and the partition film 800, the ozone is discharged together with the supplied gas into the space between the sample cell 116 and the cover member 118. Then, the ozone is discharged from the gas supply port 406 on the opposite side to the gas supply port 406 to which the gas is supplied from the gas supply device. As described above, by supplying gas from the gas supply port 406, ozone does not remain between the sample holding film and the partition film 800, so that the partition film 800 can be prevented from being deteriorated by ozone generated during measurement.

[0043] The present invention is not limited to the above-mentioned embodiment, and various modifications are possible. The configuration of the fluorescent X-ray analysis device 100 is an example, and is not limited to this. The configuration shown in the above-mentioned embodiment may be replaced with a configuration that is substantially the same as the configuration, has the same effect, or achieves the same purpose. For example, although the outer edges of the window frame member 300 and the window frame holding member 400 are circular in the above description, they may be polygonal or have other shapes.

[0044] 10 is a diagram showing a cross section of a window frame member 300 according to a modified example. In the inner film holding member 600 according to the modified example, the first flange portion 602 and the peripheral wall 606 are integrally formed, but the first flange portion 602 and the second flange portion 604 are separable. In this modified example, the peripheral wall 606 has an inclined portion 1002 inclined inwardly from the vertical portion 608 to the tip, instead of the curved portion 610. Even with this shape, the partition film 800 can be easily attached to the window frame member 300. As in the above, the flat portion 612 may be omitted in the modified example.

[0045] In addition, the second flange portion 604 has a second peripheral wall 1004 extending vertically toward the tip. As shown in Fig. 10, the partition film 800 is sandwiched not only between the outer film holding member 700 and the first flange portion 602, but also between the second peripheral wall 1004 and the outer film holding member 700. That is, the partition film 800 is folded twice in cross-sectional view and fixed. Therefore, in this modified example, the partition film 800 can be fixed more firmly. [Explanation of symbols]

[0046] 100 X-ray fluorescence analyzer, 102 sample chamber, 104 sample stage, 106 irradiation chamber, 108 partition wall, 110 X-ray source, 111 spectroscopic element, 112 detector, 116 sample cell, 118 cover member, 200 screw, 300 window frame member, 400 window frame holding member, 402 upper holding member, 404 lower holding member, 406 gas supply port, 408 first gas inlet hole, 500 film support member, 502 through hole, 600 inner film holding member, 602 first flange portion, 604 second flange portion, 606 peripheral wall, 608 vertical portion, 610 curved portion, 612 flat portion, 614 second gas inlet hole, 616 screw hole, 700 outer film holding member, 800 partition film, 1002 inclined portion, 1004 The second surrounding wall.

Claims

1. An X-ray fluorescence analysis apparatus having an irradiation chamber in a vacuum environment in which an X-ray source that emits X-rays is disposed, and a sample chamber in an atmospheric pressure environment in which a sample cell is disposed, a window frame holding member forming a part of a partition between the irradiation chamber and the sample chamber, the window frame holding member having an opening through which the X-rays pass from the irradiation chamber to the sample chamber; a window frame member that holds a partition film that is formed of a material that transmits X-rays and that constitutes another part of the partition and is placed in the opening of the window frame holding member; having the window frame holding member has a plurality of through holes through which the X-rays pass, and a film support member arranged adjacent to the irradiation chamber side of the partition film to support the partition film from the irradiation chamber side, The window frame member is an annular inner film holding member having a peripheral wall extending from a base end located on the sample chamber side to a tip end located on the irradiation chamber side, the tip end forming an opening that is closed by a part of the partition film; an annular outer film holding member that is inserted into the tip end of the inner film holding member and attached to the base end of the inner film holding member to fix a periphery of the portion of the partition film to the inner film holding member; 1. An X-ray fluorescence analysis apparatus comprising:

2. 2. The X-ray fluorescence analysis apparatus according to claim 1, wherein the inner film holding member has a flange portion at the base end for fixing a positional relationship with the window frame holding member.

3. The flange portion is a first flange portion provided on the tip side and configured to sandwich the partition wall film together with the outer film holding member; a second flange portion provided on the base end side, the second flange portion having an outer diameter larger than that of the first flange portion and fixed to the window frame holding member; 3. The X-ray fluorescence analysis apparatus according to claim 2, further comprising:

4. 4. The X-ray fluorescence analysis apparatus according to claim 3, wherein the first flange portion and the second flange portion are integrally formed.

5. 3. The X-ray fluorescence analysis apparatus according to claim 2, wherein the peripheral wall has a vertical portion that extends perpendicularly from the flange portion toward the tip, and a curved portion that curves from the vertical portion to the tip.

6. 3. The X-ray fluorescence analysis apparatus according to claim 2, wherein the peripheral wall has a vertical portion that extends perpendicularly from the flange portion toward the tip, and an inclined portion that is inclined from the vertical portion toward the tip.

7. 2. The X-ray fluorescence analysis apparatus according to claim 1, wherein the peripheral wall has a flat portion at the tip that is parallel to a plane of the opening that is closed by a part of the partition film.

8. 2. The X-ray fluorescence analysis apparatus according to claim 1, wherein the outer film holding member and / or the film support member are made of resin.

9. 2. The X-ray fluorescence analysis apparatus according to claim 1, wherein the inner film holding member and / or the window frame holding member are made of metal.

10. the window frame holding member has a first gas inlet hole passing through from an outer side surface to an inner side surface facing the window frame member, The flange portion has a second gas inlet hole penetrating the upper surface and the lower surface.

3. The X-ray fluorescence analysis apparatus according to claim 2.

11. 11. The X-ray fluorescence analysis apparatus according to claim 10, wherein the window frame holding member has a gas supply port on the outside of the first gas inlet hole, which supplies gas to be flowed between the sample cell and the partition film via the first gas inlet hole and the second gas inlet hole.

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