Grinding wheel mounting mechanism

Abstract

To provide an attachment mechanism of a grinding wheel which can reduce difficulty of work for attaching a grinding wheel.SOLUTION: A grinding wheel 21 includes: an abrasive grind stone 25; and a wheel base 24 to which the abrasive grind stone 25 is fixed. In an attachment mechanism 50 of the grinding wheel, a wheel mount 26 and the wheel base 24 fixed to a spindle 22 are provided with: magnetic force fixing parts 51 which fix the wheel base 24 to the wheel mount 26 by magnetic force; and engagement parts 52 which restrict displacement of the grinding wheel 21 in a rotation direction relative to the wheel mount 26. Each engagement part 52 has: an engagement projection 56 provided at the wheel base 24; and an engagement long hole 57 provided at the wheel mount 26. When the engagement projection 56 is positioned at an end of the engagement long hole 57, the magnetic force fixing part 51 acts to fix the wheel base 24 to the wheel mount 26.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a mounting mechanism for a grinding wheel in a grinding machine. [Background technology]

[0002] Grinding devices are known that use a grinding wheel to grind and thin various plate-shaped workpieces such as semiconductor wafers, ceramic substrates, and resin substrates (see, for example, Patent Documents 1 and 2). In the grinding device, a grinding wheel with a grinding wheel fixed to the free end of a wheel base is attached to a wheel mount at the lower end of a spindle rotated by a motor, and the grinding wheel is rotated while approaching the workpiece fixed to a chuck table, and the workpiece is ground to the desired thickness with the grinding wheel. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2003-181767 A [Patent Document 2] JP 2006-055963 A Summary of the Invention [Problem to be solved by the invention]

[0004] Typically, the grinding wheel is attached by pressing the mounting surface of the wheelbase opposite the grinding wheel against the mounting surface of the wheel mount, and the wheelbase is fixed to the wheel mount with a number of screws.

[0005] As the diameter of the workpieces increases, the grinding wheels also exceed 300 mm in diameter and are heavy. The installation and removal of the grinding wheels is a difficult task as the heavy grinding wheel must be supported while the screws are tightened.

[0006] The present invention has been made in consideration of these points, and its object is to provide a grinding wheel mounting mechanism that can reduce the difficulty of the task of mounting a grinding wheel. [Means for solving the problem]

[0007] In order to solve the above-mentioned problems and achieve the object, the grinding wheel mounting mechanism of the present invention is a grinding wheel mounting mechanism that detachably mounts a grinding wheel to a wheel mount fixed to the spindle of a grinding device, the grinding wheel comprising a grinding stone and a wheel base having a free end to which the grinding stone is fixed and a mounting surface to be mounted on the wheel mount, the wheel mount and the wheel base are formed with a magnetic fixing portion that fixes the wheel base to the wheel mount by magnetic force, and an engagement portion that restricts the grinding wheel from shifting in the rotational direction relative to the wheel mount, the engagement portion having an engagement protrusion provided on one side of the wheel mount and the wheel base, and an engagement long hole provided on the other side, and when the engagement protrusion is positioned at a predetermined position in the engagement long hole due to relative rotation between the wheel mount and the wheel base, the magnetic fixing portion acts to fix the wheel base to the wheel mount.

[0008] In the grinding wheel mounting mechanism, the engagement projection of the engagement portion may abut against a side wall of the engagement slot when the grinding wheel rotates to grind a workpiece. Effect of the Invention

[0009] The present invention has an effect of reducing the difficulty of the work of mounting a grinding wheel. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a perspective view showing an example of the configuration of a grinding wheel mounting mechanism according to the first embodiment, viewed from below. [Diagram 2]FIG. 2 is a perspective view showing an example of the configuration of a grinding device including the grinding wheel mounting mechanism shown in FIG. [Diagram 3] FIG. 3 is a perspective view showing an example of the configuration of the grinding wheel mounting mechanism according to the first embodiment, as viewed from above. [Figure 4] 4 is a cross-sectional view showing a state in which the inner edge of the wheel base of the grinding wheel is locked to the locking portion of the anti-fall-off engaging protrusion of the attachment mechanism of the grinding wheel shown in FIG. [Diagram 5] FIG. 5 is a cross-sectional view showing a state in which the grinding wheel mounting mechanism shown in FIG. 1 has mounted the grinding wheel on the wheel mount. [Figure 6] FIG. 6 is a side view, partially in cross section, showing a grinding wheel mounting mechanism according to a modified example of the first embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0012] [Embodiment 1] The grinding wheel mounting mechanism according to the first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a configuration example of the grinding wheel mounting mechanism according to the first embodiment from below. Fig. 2 is a perspective view showing a configuration example of a grinding device including the grinding wheel mounting mechanism shown in Fig. 1. Fig. 3 is a perspective view showing the configuration example of the grinding wheel mounting mechanism according to the first embodiment from above.

[0013] The grinding wheel mounting mechanism 50 according to the first embodiment shown in Fig. 1 constitutes a grinding device 1 shown in Fig. 2. The grinding device 1 shown in Fig. 2 is a device that grinds a workpiece 200, which is an object to be processed, to reduce the thickness of the workpiece 200 to a predetermined finishing thickness.

[0014] 2 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, with silicon, sapphire, gallium arsenide, or the like, serving as a substrate 201. The workpiece 200 has devices formed in each of a plurality of regions partitioned by a plurality of intersecting (orthogonal in the first embodiment) planned dividing lines on a surface 202 of the substrate 201.

[0015] The device may be, for example, an integrated circuit such as an IC (Integrated Circuit) or an LSI (Large Scale Integration), an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor), or a MEMS (Micro Electro Mechanical Systems). A protective member 210 is attached to a surface 202 side of a substrate 201 of the workpiece 200, and the surface 202 side is sucked and held by a holding surface 11 of the grinding device 1 via the protective member 210, and a back surface 203 behind the surface 202 is ground. In the present invention, the workpiece 200 is not limited to the above-mentioned wafer, and may be various plate-shaped objects such as a ceramic substrate or a resin substrate. Next, the grinding device 1 will be described.

[0016] (Grinding Equipment) The grinding apparatus 1 is a processing apparatus that grinds the back surface 203 side of the substrate 201 of the workpiece 200 to thin the workpiece 200 to a predetermined finish thickness. As shown in FIG. 1, the grinding apparatus 1 includes an apparatus main body 2, a holding table 10, a grinding unit 20, a horizontal movement unit 30, a grinding feed unit 40, a grinding wheel mounting mechanism 50, and a control unit 100.

[0017] The holding table 10 has a holding surface 11 that holds the front surface 202 side of the workpiece 200, and is rotatable around an axis passing through the center of the holding surface 11. In the first embodiment, the holding table 10 has the holding surface 11 made of porous ceramics or the like, and the holding surface 11 is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The front surface 202 side of the workpiece 200 is placed on the holding surface 11 of the holding table 10 via a protective member 210, and the holding surface 11 is sucked by the vacuum suction source, thereby sucking and holding the workpiece 200 placed on the holding surface 11.

[0018] Moreover, in the first embodiment, the holding table 10 is moved in the X-axis direction parallel to the horizontal direction by the horizontal movement unit 30. The holding table 10 is rotated about its axis by a table base which is moved in the X-axis direction by the horizontal movement unit 30. The holding table 10 is moved together with the table base in the X-axis direction by the horizontal movement unit 30 between a carry-in / out position where the workpiece 200 is carried in to the holding surface 11 or carried out from the holding table 10, and a processing position where the workpiece 200 held by suction on the holding surface 11 is ground by the grinding unit 20.

[0019] The grinding unit 20 has a spindle 22 with a grinding wheel 21 attached to its lower end by a grinding wheel attachment mechanism 50 and rotatable about an axis perpendicular to the X-axis direction and parallel to the vertical direction, and grinds the back surface 203 side of a substrate 201 of a workpiece 200 held on a holding table 10 with a grinding stone 25 of the grinding wheel 21. The grinding unit 20 is supported by the apparatus body 2 via a grinding feed unit 40.

[0020] 1, 2, and 3, the grinding unit 20 includes a grinding wheel 21, a spindle 22, and a spindle motor 23 (shown only in FIG. 2). Note that FIG. 3 shows only a wheel base 24 of the grinding wheel 21 and a lower half of a wheel mount 26 in the thickness direction, and the rest is omitted.

[0021] The grinding wheel 21 grinds the workpiece 200 held on the holding table 10. The grinding wheel 21 includes an annular wheel base 24 and a grinding stone 25 arranged annularly on the outer edge of one surface 241 of the wheel base 24.

[0022] The wheel base 24 has one surface 241 and the other surface 242 which are flat and parallel to each other. The one surface 241 of the wheel base 24 is a free end to which the grinding wheel 25 is fixed. The other surface 242 of the wheel base 24 is a mounting surface which is attached to the wheel mount 26 fixed to the lower end of the spindle 22. The wheel base 24 is made of a non-magnetic metal.

[0023] The grinding wheels 25 are arranged at equal intervals in the circumferential direction on one surface 241 of the wheel base 24 facing the holding table 10. In the first embodiment, the grinding wheel 25 is configured as a so-called segment grinding wheel formed into a single lump by mixing abrasive grains such as diamond or CBN (Cubic Boron Nitride) with a bonding material (also called a bond material) made of metal, ceramics, resin, or the like.

[0024] The grinding wheel 21 is configured such that the spindle 22 is rotated about its axis by the spindle motor 23, and the grinding stone 25 grinds the back surface 203 of the workpiece 200 held on the holding table 10.

[0025] The grinding wheel 21 is attached to the lower end of the spindle 22. A disk-shaped wheel mount 26 for mounting the grinding wheel 21 is fixed to the lower end of the spindle 22. The grinding wheel 21 is mounted to a lower surface 261 of the wheel mount 26. The outer diameter of the wheel mount 26 is equal to the outer diameter of the wheel base 24 of the grinding wheel 21. The wheel mount 26 is made of a non-magnetic metal.

[0026] The spindle 22 is rotatably housed in a spindle housing 27 supported by the grinding feed unit 40 for movement along the Z-axis direction parallel to the vertical direction. The axis of the spindle 22 of the grinding unit 20 is parallel to the Z-axis direction. The spindle motor 23 rotates the spindle 22 about its axis. In the first embodiment, the spindle motor 23 rotates the spindle 22, i.e., the grinding wheel 21 mounted on the wheel mount 26, about its axis in the direction of arrow 300 (shown in FIG. 3, hereinafter referred to as the rotation direction).

[0027] In embodiment 1, the axis of the grinding unit 20 is horizontally separated from the axis of the holding table 10 positioned at the processing position, and the rotational trajectory of the grinding stone 25 of the grinding wheel 21 when the spindle 22 rotates is located on the center of the holding table 10.

[0028] The horizontal movement unit 30 moves the holding table 10 and the grinding unit 20 relatively along the X-axis direction. The horizontal movement unit 30 is installed on the apparatus body 2, and moves a table base supporting the holding table 10 in the X-axis direction, thereby moving the holding table 10 in the X-axis direction. The horizontal movement unit 30 includes a well-known ball screw arranged parallel to the X-axis direction and rotatable about its axis, a motor that rotates the ball screw about its axis to move the table base in the X-axis direction, and a well-known guide rail that supports the table base movably in the X-axis direction.

[0029] The grinding feed unit 40 is installed on the device body 2 and moves the spindle 22 of the grinding unit 20 in the Z-axis direction to move the grinding unit 20 closer to or away from the holding surface 11 of the holding table 10 at the processing position. The grinding feed unit 40 lowers the spindle 22 of the grinding unit 20 to move the grinding unit 20 closer to the holding table 10 at the processing position. The grinding feed unit 40 raises the spindle 22 of the grinding unit 20 to move the grinding unit 20 away from the holding table 10 at the processing position.

[0030] The grinding feed unit 40 includes a well-known ball screw 41 arranged parallel to the Z-axis direction and rotatable around its axis, a motor 42 which rotates the ball screw 41 around its axis to move the spindle 22 in the Z-axis direction via the spindle housing 27, and a well-known guide rail 43 which supports the grinding unit 20 so that it can move in the Z-axis direction.

[0031] The grinding wheel mounting mechanism 50 detachably mounts the grinding wheel 21 to the wheel mount 26 fixed to the spindle 22 of the grinding device 1. As shown in Fig. 1 and Fig. 3, the grinding wheel mounting mechanism 50 includes a magnetic fixing portion 51, an engaging portion 52, and an engaging protrusion 53 for preventing the grinding wheel from falling off.

[0032] The magnetic fixing portion 51 and the engagement portion 52 are formed in the wheel mount 26 and the wheel base 24. That is, the magnetic fixing portion 51 and the engagement portion 52 are formed in the wheel mount 26 and the wheel base 24.

[0033] The magnetic force fixing unit 51 fixes the wheel base 24 to the wheel mount 26 by magnetic force. The magnetic force fixing unit 51 includes a mount side magnet 54 and a base side magnet 55. In the first embodiment, the mount side magnet 54 and the base side magnet 55 are each permanent magnets. In the first embodiment, a plurality of the mount side magnets 54 and a plurality of the base side magnets 55 are provided (the same number in the first embodiment). In the first embodiment, four mount side magnets 54 and four base side magnets 55 are provided.

[0034] The mount-side magnets 54 are disposed at equal intervals in the circumferential direction of the wheel mount 26 in the wheel mount 26 at positions overlapping the wheel base 24 attached to the wheel mount 26. In the first embodiment, one surface 541 of the mount-side magnet 54 is disposed on the same plane as the lower surface 261 of the wheel mount 26, and one of the N pole and S pole is formed on one surface 541.

[0035] The base-side magnets 55 are disposed at equal intervals in the circumferential direction of the wheel mount 26 within the wheel base 24. In the first embodiment, one surface 551 of the base-side magnet 55 is disposed on the same plane as the other surface 242 of the wheel base 24, and the other of the N pole and S pole is formed on the one surface 551.

[0036] The magnetic fixing portion 51 fixes the wheel base 24 to the wheel mount 26 by magnetic force as one surfaces 541, 551 of the magnets 54, 55 overlap with each other and the magnetic poles formed on one surfaces 541, 551 are attracted to each other.

[0037] The engaging portion 52 prevents the grinding wheel 21 from shifting relative to the wheel mount 26 in the rotational direction 300. The engaging portion 52 has an engaging protrusion 56 and an engaging elongated hole 57. In the first embodiment, a plurality of the engaging elongated holes 57 and a plurality of the engaging protrusions 56 are provided (the same number in the first embodiment). In the first embodiment, four of the engaging portions 52 and four of the engaging protrusions 56 are provided.

[0038] The engagement protrusions 56 are provided on one of the wheel mount 26 and the wheel base 24, and protrude from one to the other. In the first embodiment, the engagement protrusions 56 are provided on the wheel base 24 at equal intervals in the circumferential direction, and protrude from the other surface 242 of the wheel base 24 towards the wheel mount 26. In the first embodiment, the engagement protrusions 56 are formed in a cylindrical shape.

[0039] The engagement elongated holes 57 are provided on the other of the wheel mount 26 and the wheel base 24, are recessed from a surface facing the other, and extend in the circumferential direction of the other. In the first embodiment, the engagement elongated holes 57 are provided at equal intervals in the circumferential direction at a position where the lower surface 261, which is the surface of the wheel mount 26 facing the wheel base 24, overlaps with the wheel base 24, are recessed from the lower surface 261 of the wheel mount 26, and extend in the circumferential direction of the wheel mount 26. The engagement elongated holes 57 allow the engagement protrusion 56 to enter inside. When the engagement protrusion 56 enters the engagement elongated hole 57, the other surface 242 of the wheel base 24 overlaps with the lower surface 261 of the wheel mount 26. The engagement part 52 allows the engagement protrusion 56 that has entered the engagement elongated hole 57 to move within the engagement elongated hole 57 over its entire length.

[0040] In addition, the radial width of the wheel mount 26 at a front end 571 (shown in FIG. 3) of the engagement elongated hole 57 in the rotational direction 300 is wider than the radial width of the wheel base 24 of the engagement protrusion 56. The radial width of the wheel mount 26 at a rear end 572 (shown in FIG. 3) of the engagement elongated hole 57 in the rotational direction 300 is equal to the radial width of the wheel base 24 of the engagement protrusion 56.

[0041] Furthermore, the engagement portion 52, i.e., the engagement slot 57 and the engagement protrusion 56, are disposed at a position where one surfaces 541, 551 of the magnets 54, 55 overlap when the engagement protrusion 56 enters an end 572 of the engagement slot 57. The end 572 is a predetermined position of the engagement slot 57.

[0042] The anti-fall-off engaging protrusions 53 are intended to prevent the grinding wheel 21, i.e., the wheel base 24, from falling off from the wheel mount 26 when the grinding wheel 21, i.e., the wheel base 24, is mounted on the wheel mount 26. In the first embodiment, a plurality of anti-fall-off engaging protrusions 53 are provided at intervals in the circumferential direction on the lower surface 261 of the wheel mount 26 at positions on the inner circumferential side of the grinding wheel 21 to be mounted.

[0043] In the first embodiment, the anti-fall-off engagement protrusion 53 includes a pillar portion 531 that protrudes from a position on the inner periphery side of the grinding wheel 21 to be mounted on the underside 261 of the wheel mount 26, and a locking portion 532 that protrudes from the lower end of the pillar portion 531 toward the outer periphery and can be locked to the inner edge of the wheel base 24 of the grinding wheel 21 when the grinding wheel 21, i.e., the wheel base 24, is mounted on the wheel mount 26. The distance between the underside 261 of the locking portion 532 is equal to or greater than the amount of protrusion of the engagement projection 56 from the aforementioned one surface 242 of the wheel base 24, i.e., the other surface 242 in the first embodiment.

[0044] The control unit 100 processes a plurality of types of signals from each of the above-mentioned mechanisms constituting the grinding apparatus 1, and controls each of the mechanisms. That is, the control unit 100 causes the grinding apparatus 1 to execute a machining operation on the workpiece 200. The control unit 100 is a computer that has an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device, and is capable of executing a computer program.

[0045] The arithmetic processing device of the control unit 100 executes a computer program stored in the ROM on the RAM to generate control signals for controlling the grinding device 1. The arithmetic processing device of the control unit 100 outputs the generated control signals to each component of the grinding device 1 via the input / output interface device.

[0046] The control unit 100 is also connected to a display means (not shown) configured with a liquid crystal display device or the like for displaying the status and images of the machining operation, and an input means used by the operator to register machining content information, etc. The input means is configured with at least one of a touch panel provided on the display means, a keyboard, etc.

[0047] Next, a method for attaching and detaching the grinding wheel 21 to the wheel mount 26 of the grinding wheel attachment mechanism 50 will be described with reference to the drawings. Fig. 4 is a cross-sectional view showing a state in which the inner edge of the wheel base of the grinding wheel is locked to the locking portion of the engagement protrusion for preventing falling off of the grinding wheel attachment mechanism shown in Fig. 1. Fig. 5 is a cross-sectional view showing a state in which the grinding wheel attachment mechanism shown in Fig. 1 has attached the grinding wheel to the wheel mount.

[0048] First, when mounting the grinding wheel 21 on the wheel mount 26, as shown in Fig. 4, the inner edge of the wheel base 24 of the grinding wheel 21 is engaged with the engaging portion 532 of the fall-off prevention engaging protrusion 53, and the grinding wheel 21 is positioned at a position where the outer edge of the wheel mount 26 and the outer edge of the wheel base 24 overlap in the vertical direction. Note that, although Fig. 5 shows a state where the engaging protrusion 56 faces the end 571 of the engaging slot 57, it is not necessary for the engaging protrusion 56 to face the end 571 of the engaging slot 57 when the inner edge of the wheel base 24 of the grinding wheel 21 is engaged with the engaging portion 532 of the fall-off prevention engaging protrusion 53.

[0049] Thereafter, the grinding wheel 21 is rotated around the axis in the opposite direction to the rotation direction 300 relative to the wheel mount 26. Then, a magnetic force acts on one surfaces 541, 551 of the magnets 54, 55 attracting each other, and when the magnetic force acts on one surfaces 541, 551 of the magnets 54, 55 attracting each other, the engagement protrusion 56 enters the engagement long hole 57 and moves within the engagement long hole 57 toward the end 572 of the engagement long hole 57.

[0050] When the engaging projection 56 is positioned at the end 572 of the engaging elongated hole 57, the surfaces 541, 551 of the magnets 54, 55 of the magnetic force fixing portion 51 attract each other, so that the surfaces 541, 551 of the magnets 54, 55 come into close contact with each other, and the grinding wheel 21 is fixed and mounted to the wheel mount 26. In this way, when the engaging projection 56 is positioned at the end 572 of the engaging elongated hole 57 due to the relative rotation of the wheel mount 26 and the wheel base 24, the magnetic force of the magnetic force fixing portion 51 acts to fix the wheel base 24 to the wheel mount 26.

[0051] When removing the grinding wheel 21 from the wheel mount 26, the grinding wheel 21 is rotated around the axis in the rotational direction 300 relative to the wheel mount 26 against the magnetic force between the magnets 54, 55. Then, one surfaces 541, 551 of the magnets 54, 55 of the magnetic force fixing part 51 move away from each other and no longer attract each other, so that the engaging projection 56 comes out of the engaging elongated hole 57, and the grinding wheel 21 is removed from the wheel mount 26.

[0052] The grinding device 1 having the above-mentioned configuration holds the front surface 202 side of the workpiece 200 by suction on the holding surface 11 of the holding table 10 via the protective member 210, positions the holding table 10 at the processing position, and rotates the grinding wheel 21 around its axis in the rotation direction 300 by the spindle 22 and rotates the holding table 10 around its axis while supplying grinding fluid to the workpiece 200. The grinding device 1 brings the grinding stone 25 of the grinding wheel 21 into contact with the back surface 203 of the substrate 201 of the workpiece 200, moves the grinding unit 20 closer to the holding table 10 by the grinding feed unit 40 at a predetermined grinding feed speed, and grinds the back surface 203 of the workpiece 200 held by suction on the holding surface 11 of the holding table 10 by the grinding stone 25, thereby thinning the workpiece 200 to the finishing thickness.

[0053] In addition, when the grinding device 1 performs the processing operation of grinding the workpiece 200, i.e., when the grinding wheel 21 that grinds the workpiece 200 rotates, the engagement protrusion 56 of the engagement portion 52 of the grinding wheel mounting mechanism 50 abuts against the end portion 572 (corresponding to the side wall) of the engagement long hole 57, and the grinding wheel 21 rotates in the rotational direction 300 together with the spindle 22.

[0054] As described above, the grinding wheel mounting mechanism 50 according to the first embodiment utilizes positioning by the engagement protrusion 56 and the engagement long hole 57 and fixing by the magnets 54, 55 of the magnetic force fixing part 51, thereby making it possible to freely attach and detach the grinding wheel 21 to the wheel mount 26 without the need for fastening with screws. As a result, the grinding wheel mounting mechanism 50 according to the first embodiment has the effect of making it possible to reduce the difficulty of the work of mounting the grinding wheel 21.

[0055] In addition, in the grinding wheel mounting mechanism 50 according to the first embodiment, the engagement portion 52 regulates the deviation of the grinding wheel 21 relative to the wheel mount 26 in the rotational direction 300, and the magnetic fixing portion 51 regulates the grinding wheel 21 from falling off.

[0056] [Modifications] A grinding wheel mounting mechanism 50 according to a modified example of the first embodiment of the present invention will be described with reference to the drawings. Fig. 6 is a side view, partially in cross section, showing the grinding wheel mounting mechanism according to a modified example of the first embodiment. In Fig. 6, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

[0057] 6, the grinding wheel mounting mechanism 50 according to the modified example of the first embodiment is the same as that of the first embodiment, except that it does not include the engagement protrusion 53 for preventing falling off. When mounting the grinding wheel 21 to the wheel mount 26, the grinding wheel mounting mechanism 50 according to the modified example places a mounting jig 60 on the holding table 10 of the grinding device 1.

[0058] 6, the mounting jig 60 includes a jig body 61 and a wheel support portion 62. The jig body 61 is integrally provided with a cylindrical portion 63 that houses the holding table 10 therein and has an inner diameter equal to the outer diameter of the wheel base 24 of the grinding wheel 21, and a closing portion 64 that closes the inside of the cylindrical portion 63.

[0059] The wheel support part 62 includes a cylindrical support plate 65 whose outer diameter is equal to that of the wheel base 24 of the grinding wheel 21 and which is disposed above the closing part 64 and within the cylindrical part 63, and a spring 66 disposed between the support plate 65 and the closing part 64. The support plate 65 includes a grinding wheel recess 67 on its upper surface for accommodating the grinding wheel 25.

[0060] The mounting jig 60 accommodates the holding table 10 in the cylindrical portion 63 of the jig body 61, and is installed on the holding table 10 of the grinding device 1 with the closing portion 64 and the support plate 65 positioned above the holding surface 11 of the holding table 10. The mounting jig 60 accommodates the grinding wheel 25 in the grinding wheel recess 67, and the grinding wheel 21 to be attached to the wheel mount 26 is placed on the support plate 65.

[0061] In the grinding wheel mounting mechanism 50 according to the modified example, the operator operates the input means to position the holding table 10 below the wheel mount 26 of the grinding unit 20, and rotates the wheel mount 26 about its axis in the rotation direction 300 at a low speed (slower than the speed when grinding the workpiece 200) while lowering the grinding unit 20. Then, the grinding wheel mounting mechanism 50 according to the modified example fixes the wheel base 24 to the wheel mount 26 and mounts the grinding wheel 21 to the wheel mount 26, as in the first embodiment. Note that in the present invention, the grinding wheel mounting mechanism 50 may rotate the holding table 10 in the opposite direction to the rotation direction 300 to mount the grinding wheel 21 to the wheel mount 26.

[0062] As in embodiment 1, the grinding wheel mounting mechanism 50 of the modified example utilizes positioning by the engagement protrusion 56 and the engagement long hole 57 and fixation by the magnets 54, 55 of the magnetic fixing portion 51, thereby making it possible to easily attach and detach the grinding wheel 21 to the wheel mount 26 without requiring fastening screws, thereby reducing the difficulty of the work of mounting the grinding wheel 21.

[0063] The present invention is not limited to the above embodiment. In other words, various modifications can be made without departing from the gist of the present invention. In the present invention, the engagement portion 52 may have the engagement projection 56 protruding from the lower surface of the wheel mount 26 and the engagement slot 57 recessed from the other surface 242 of the wheel base 24.

[0064] In this case, it is desirable that the radial width of the wheel mount 26 at the front end 571 of the engagement long hole 57 in the rotation direction 300 is equal to the radial width of the engagement protrusion 56 in the wheel base 24, and the radial width of the wheel mount 26 at the rear end 572 of the engagement long hole 57 in the rotation direction 300 is wider than the radial width of the engagement protrusion 56 in the wheel base 24. Also, in this case, the engagement portion 52, i.e., the engagement long hole 57 and the engagement protrusion 56 are arranged at a position where one surfaces 541, 551 of the magnets 54, 55 overlap each other when the engagement protrusion 56 enters the end 571 of the engagement long hole 57. Note that in this case, the end 571 is a predetermined position of the engagement long hole 57 and also a side wall of the engagement long hole 57. [Explanation of symbols]

[0065] 1 Grinding equipment 21 Grinding Wheel 22 Spindle 24 Wheelbase 25 Grinding Wheel 26 Wheel mount 50 Grinding wheel mounting mechanism 51 Magnetic force fixing part 52 Engagement part 56 Engagement protrusion 57 Engagement slot 200 Workpiece 241 One surface (free end) 242 Other surface (mounting surface) 300 Rotation Direction 571 End (specified position, side wall) 572 End (specified position, side wall)

Claims

1. A grinding wheel mounting mechanism for removably mounting a grinding wheel to a wheel mount fixed to a spindle of a grinding device, comprising: The grinding wheel comprises: a wheel base having a free end to which the grinding wheel is fixed and a mounting surface to be mounted on the wheel mount; The wheel mount and the wheel base include: a magnetic fixing portion that fixes the wheel base to the wheel mount by magnetic force, and an engagement portion that restricts the grinding wheel from shifting in a rotational direction relative to the wheel mount; The engagement portion is an engagement projection provided on one side of the wheel mount and the wheel base, and an engagement slot provided on the other side; A grinding wheel mounting mechanism in which, when the engagement protrusion is positioned at a predetermined position in the engagement long hole through relative rotation between the wheel mount and the wheel base, the magnetic fixing portion acts to fix the wheel base to the wheel mount.

2. 2. The grinding wheel mounting mechanism according to claim 1, wherein the engaging portion has an engaging projection that abuts against a side wall of the engaging slot when the grinding wheel is rotated to grind a workpiece.

Images