Luminous envelope and light source device

Abstract

To provide a light-emitting encapsulation body and a light source device with an improved lifetime.SOLUTION: The light-emitting encapsulation body includes an enclosure and a sealing tube 17. The enclosure accommodates a light-emitting gas in an inner space. A laser beam for maintaining a plasma generated in the light-emitting gas enters the enclosure. The sealing tube 17 has a first end portion and a second end portion 17b. The sealing tube 17 is connected to the inner space at the first end portion. The second end portion 17b of the sealing tube 17 is sealed by being collapsed. The second end portion 17b of the sealing tube 17 is covered by a covering member 91 made of an inorganic material. The covering member 91 is covered by a cap member 92 made of a metallic material.SELECTED DRAWING: Figure 28

Description

[Technical field]

[0001] The present invention relates to a light emitting envelope and a light source device. [Background technology]

[0002] Patent Document 1 describes a laser excitation light source that includes a housing that contains a light emitting gas, in which plasma generated in the light emitting gas is maintained by irradiation with laser light, and light from the plasma is output as output light. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] U.S. Pat. No. 1,056,1008 Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-mentioned laser excitation light source, the emission gas is introduced into the housing through a sealed tube connected to the housing, and then the end of the sealed tube is crushed and sealed. On the other hand, in the laser excitation light source, the emission gas may be sealed at high pressure to increase efficiency and power output, and the temperature rises due to irradiation with laser light and radiant heat from plasma during operation. Therefore, if the laser excitation light source is operated for a long time, the end of the sealed sealed tube may open, causing the emission gas to leak. In order to improve the life of the laser excitation light source, it is necessary to suppress such leakage of the emission gas.

[0005] SUMMARY OF THE PRESENT EMBODIMENT An object of the present invention is to provide a light emitting envelope and a light source device having an improved life span. [Means for solving the problem]

[0006] The luminous enclosure of the present invention comprises a housing that contains a luminous gas in its internal space and into which laser light is incident to maintain plasma generated in the luminous gas, and an enclosed tube having a first end and a second end and connected to the internal space at the first end, the second end of the enclosed tube being sealed by being crushed, and the second end of the enclosed tube being covered by a covering member made of an inorganic material, and the covering member being covered by a cap member made of a metallic material.

[0007] In this luminous envelope, the second end of the sealed tube is covered with a covering member made of an inorganic material. This makes it possible to prevent the second end from opening, and even if leakage occurs from the second end, it is possible to prevent the sealing pressure of the luminous gas in the housing from decreasing. In addition, since the covering member is made of an inorganic material, the second end can be stably covered even in a high-temperature environment. In addition, in this luminous envelope, the covering member is covered with a cap member made of a metal material. This makes it possible to protect the second end and the covering member. Therefore, according to this luminous envelope, it is possible to prevent leakage of the discharge gas caused by the second end of the sealed tube opening, and the life of the luminous envelope can be improved.

[0008] The thermal expansion coefficient of the covering member may be greater than that of the sealing tube, in which case the covering member can effectively hold down the second end of the sealing tube when the temperature rises, further preventing the second end from opening.

[0009] The hardness of the cap member may be greater than the hardness of the sealing tube, in which case the covering member can be more easily deformed toward the second end side rather than toward the cap member side when the temperature rises, further preventing the second end from opening.

[0010] The covering member may be made of a thermoplastic material or solder. In these cases, the above-mentioned effects can be preferably achieved, such as preventing the second end from opening, preventing a decrease in the pressure of the discharge gas enclosed in the housing even if leakage occurs from the second end, and stably covering the second end even in a high-temperature environment.

[0011] The cap member may be made of brass. In this case, the above-mentioned advantageous effects can be preferably achieved, that is, the second end and the covering member can be protected, and the second end can be further prevented from opening by pressing the second end with the covering member.

[0012] The pressure of the luminous gas enclosed in the housing may be 3 MPa or more. In this case, the intensity of the plasma generated in the luminous gas can be increased, but the second end of the sealing tube is likely to open. However, this luminous sealing body can prevent the second end from opening even in such a case.

[0013] The light source device of the present invention includes the light emitting envelope and a light introducing portion that allows laser light to enter the housing. With this light source device, the life span can be improved for the reasons described above. Effect of the Invention

[0014] According to the present invention, it is possible to provide a light emitting envelope and a light source device having an improved life span. [Brief description of the drawings]

[0015] [Figure 1] FIG. 2 is a perspective view of the luminous envelope according to the first embodiment. [Diagram 2] FIG. 2 is a cross-sectional view taken along line II-II in FIG. [Diagram 3] FIG. 2 is a cross-sectional view taken along line III-III in FIG. [Figure 4] 4 is an enlarged view of a second window member and a second frame member. FIG. [Diagram 5]FIG. 2 is a cross-sectional view showing the configuration of a protective layer. [Figure 6] (a) is a photograph showing the first sample immediately after the start of operation, and (b) is a photograph showing the first sample after 327 hours have passed. [Figure 7] Photographs (a) and (b) show the second sample immediately after the start of operation. [Figure 8] Photographs (a) and (b) show the second sample after 168 hours. [Figure 9] Photographs (a) and (b) show the second sample after 500 hours. [Figure 10] Photographs (a) and (b) show the second sample after 1051 hours. [Figure 11] Photograph (a) is a photograph showing the second sample immediately after the start of operation, and photograph (b) is a photograph showing the second sample after 670 hours have elapsed. [Figure 12] FIG. 1A is a cross-sectional view showing an example of a protective layer made of one ALD layer, and FIG. 1B is a cross-sectional view showing an example of a protective layer made of a first ALD layer and a second ALD layer. [Figure 13] Photographs (a) and (b) show the third sample immediately after the start of operation. [Figure 14] Photographs (a) and (b) show the third sample after 168 hours. [Figure 15] Photographs (a) and (b) show the third sample after 500 hours. [Figure 16] Photographs (a) and (b) show the third sample after 1000 hours. [Figure 17] FIG. 4 is an enlarged view of the vicinity of the first window member. [Figure 18] 6(a) and 6(b) are photographs showing an example of foreign matter occurring on a window member. [Figure 19] Photographs (a) and (b) show another example of foreign matter occurring on a window member, where (a) shows the state immediately after the start of operation and (b) shows the state after 46 hours have passed. [Figure 20](a) is a photograph of the fourth sample immediately after operation began, (b) is a photograph of the fourth sample after 147 hours, and (c) is a photograph of the fourth sample after 712 hours. [Figure 21] (a) is a photograph of the fifth sample immediately after the start of operation, (b) is a photograph of the fifth sample after 147 hours, and (c) is a photograph of the fifth sample after 712 hours. [Figure 22] Photograph (a) is a photograph showing the sixth sample immediately after the start of operation, and photograph (b) is a photograph showing the sixth sample after 168 hours have passed. [Figure 23] (a) is a photograph showing the sixth sample after 504 hours, and (b) is a photograph showing the sixth sample after 1051 hours. [Figure 24] (a) is a photograph showing the seventh sample immediately after the start of operation, and (b) is a photograph showing the seventh sample after 168 hours have passed. [Diagram 25] (a) is a photograph showing the seventh sample after 504 hours, and (b) is a photograph showing the seventh sample after 1051 hours. [Figure 26] Photograph (a) is a photograph showing the eighth sample immediately after the start of operation, and photograph (b) is a photograph showing the eighth sample after 168 hours have passed. [Figure 27] (a) is a photograph showing the eighth sample after 504 hours, and (b) is a photograph showing the eighth sample after 1051 hours. [Figure 28] 4 is a cross-sectional view of the vicinity of a second end of the sealing tube. FIG. [Figure 29] FIG. 11 is a cross-sectional view of a luminous enclosure according to a second embodiment. [Diagram 30] FIG. [Diagram 31] 1A is a front view of the getter section, and FIG. 1B is a side view of the getter section. [Diagram 32] 11 is another cross-sectional view of the luminous envelope according to the second embodiment. FIG. [Diagram 33] Photographs (a) and (b) show examples of foreign matter occurring on an electrode. [Diagram 34] (a) is a photograph showing the 9th sample immediately after the start of operation, (b) is a photograph showing the 9th sample after 260 hours, and (c) is a photograph showing the 9th sample after 670 hours. [Diagram 35] (a), (b), and (c) are photographs showing the tenth sample just before the start of operation. [Diagram 36] (a), (b), and (c) are photographs showing the 10th sample immediately after the start of operation. [Figure 37] Photographs (a), (b), and (c) show sample No. 10 after 165 hours. [Figure 38] (a) and (b) are photographs showing the 11th sample just before the start of operation. [Figure 39] (a) and (b) are photographs showing the 11th sample immediately after the start of operation. [Diagram 40] Photographs (a) and (b) show sample No. 11 after 165 hours. [Diagram 41] (a) and (b) are photographs showing the 12th sample immediately before the start of operation. [Diagram 42] (a) and (b) are photographs showing the 12th sample immediately after the start of operation. [Diagram 43] Photographs (a) and (b) show sample No. 12 after 165 hours. [Diagram 44] Photograph (a) is a photograph showing the 13th sample immediately after the start of operation, and photograph (b) is a photograph showing the 13th sample after 262 hours have passed. [Diagram 45] FIG. 13 is a cross-sectional view of a luminous envelope according to a fifth modified example. [Diagram 46] FIG. 13 is a cross-sectional view of a luminous envelope according to a sixth modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, the same or corresponding elements are designated by the same reference numerals, and duplicated descriptions will be omitted. [First embodiment] [Laser excitation light source]

[0017] As shown in FIG. 1 to FIG. 3, the light-emitting envelope 1 includes a housing 10. The housing 10 is filled with a light-emitting gas GS. The light-emitting gas GS is, for example, xenon, and is a discharge gas in this example. The light-emitting envelope 1 constitutes a laser excitation light source (light source device) together with a laser light source that outputs a first light L1 that is, for example, a laser beam. In the laser excitation light source, plasma is generated in the light-emitting gas GS. The first light L1 that is a laser beam for maintaining the plasma is incident on the light-emitting envelope 1, and the second light L2 that is light from the plasma is emitted from the light-emitting envelope 1 as output light. The first light is, for example, light in the near-infrared region, and has a wavelength of, for example, about 800 nm to 1100 nm. The second light L2 is, for example, light in the ultraviolet region to mid-infrared region, and has a wavelength of, for example, about 220 nm to 20 μm.

[0018] The laser excitation light source further includes, for example, a mirror and an optical system in addition to the light emitting envelope 1 and the above-mentioned laser light source, and these elements are housed in a case. The laser light source is, for example, a laser diode. The mirror reflects the first light L1 from the laser light source toward the optical system. The optical system includes one or more lenses. The optical system guides the first light L1 from the mirror to the light emitting envelope 1 while collecting the first light L1. The laser light source, the mirror, and the optical system constitute a light introduction section that allows the first light L1 to enter the housing 10 from a first window portion 20 described later. Alternatively, the laser excitation light source itself may not include a laser light source. For example, the laser excitation light source may include an optical fiber that guides light from an externally disposed laser light source to a mirror instead of its own laser light source. In this case, the optical fiber, the mirror, and the optical system constitute a light introduction section that allows the first light L1 to enter the housing 10 from the first window portion 20. [Luminous envelope]

[0019] In addition to the housing 10, the luminous envelope 1 further includes a first window 20, two second windows 30, a first electrode 40, and a second electrode 50.

[0020] The housing 10 has a housing body 11. The housing body 11 is formed of a metal material in a substantially box-like shape and contains a light emitting gas GS. More specifically, a sealed internal space S1 is formed in the housing body 11, and the internal space S1 is filled with the light emitting gas GS. An example of a metal material constituting the housing body 11 is stainless steel. In this case, the housing body 11 has a light blocking property against the first light L1 and the second light L2. That is, the housing body 11 is formed of a light blocking material that does not transmit the first light L1 and the second light L2.

[0021] The housing body 11 is formed with a first opening 12 and two second openings 13. The first light L1 is incident on the first opening 12 along the first optical axis A1. The first opening 12 is formed in a circular shape, for example, when viewed from a direction parallel to the first optical axis A1 (hereinafter also referred to as the Z direction). In this example, the first optical axis A1 passes through the center of the first opening 12 when viewed from the Z direction. The first opening 12 includes an inner portion 12a, a middle portion 12b, and an outer portion 12c. The inner portion 12a opens to the internal space S1. The outer portion 12c opens to the outside of the housing body 11. The middle portion 12b is connected to the inner portion 12a and the outer portion 12c. Each of the inner portion 12a, the middle portion 12b, and the outer portion 12c has, for example, a cylindrical shape. When viewed in the axial direction, the outer diameter of intermediate portion 12b is larger than the outer diameter of inner portion 12a, and the outer diameter of outer portion 12c is larger than the outer diameter of intermediate portion 12b. The "outer diameter" of an element when viewed in the axial direction means the diameter if the element is circular, and means the maximum length if the element is non-circular.

[0022] From each second opening 13, the second light L2 is emitted along the second optical axis A2. Each second opening 13 is formed in a circular shape, for example, when viewed from a direction parallel to the second optical axis A2 (hereinafter also referred to as the Y direction). In this example, the second optical axis A2 passes through the center of the second opening 13 when viewed from the Y direction. Each second opening 13 includes an inner part 13a, a middle part 13b, and an outer part 13c. The inner part 13a opens into the internal space S1. The outer part 13c opens to the outside of the housing main body 11. The middle part 13b is connected to the inner part 13a and the outer part 13c. Each of the inner part 13a, the middle part 13b, and the outer part 13c has, for example, a cylindrical shape. When viewed from the axial direction, the outer shape of the middle part 13b is larger than the outer shape of the inner part 13a, and the outer part 13c is larger than the outer shape of the middle part 13b.

[0023] The first optical axis A1 intersects with the second optical axis A2 in the internal space S1. That is, the first opening 12 and the second opening 13 are arranged so that the first optical axis A1 and the second optical axis A2 intersect with each other. An intersection C of the first optical axis A1 and the second optical axis A2 is located in the internal space S1. In this example, the first optical axis A1 intersects with the second optical axis A2 perpendicularly, but the first optical axis A1 may intersect with the second optical axis A2 at an angle other than a right angle. The first optical axis A1 is not parallel to the second optical axis A2. The first optical axis A1 does not pass through the second opening 13, and the second optical axis A2 does not pass through the first opening 12.

[0024] The first window portion 20 hermetically seals the first opening 12. The first window portion 20 has a first window member 21. The first window member 21 is formed in a circular flat plate shape, for example, from a light-transmitting material that transmits the first light L1. In this example, the first window member 21 is formed from sapphire and transmits light with a wavelength of 5 μm or less. The first window member 21 transmits the first light L1 at the first opening 12.

[0025] The first window member 21 is fixed to a first frame member 61, and is fixed to the housing body 11 via the first frame member 61. In the following description, the first frame member 61 is considered to be part of the housing 10. In this case, the housing 10 has the first frame member 61 in addition to the above-mentioned housing body 11. However, the first frame member 61 can also be considered to be part of the first window portion 20. In this case, the housing 10 consists of only the housing body 11.

[0026] The first frame member 61 is formed in a frame shape from a metal material such as Kovar metal. The first frame member 61 is formed in a generally cylindrical shape. The first frame member 61 has a cylindrical first portion 62 and a cylindrical second portion 63 formed integrally with the first portion 62. The outer shape of the second portion 63 is larger than the outer shape of the first portion 62. The first window member 21 is disposed in the first portion 62 and fixed to the first frame member 61. Details of the manner in which the first window member 21 is fixed to the first frame member 61 will be described later.

[0027] A circular ring-shaped flange portion 63a protruding radially outward is formed on the outer surface of the second portion 63. The first frame member 61 is fixed to the housing body 11 with the flange portion 63a disposed within the intermediate portion 12b of the first opening 12. In this state, a part of the first portion 62 of the first frame member 61 protrudes from the first opening 12. The first window member 21 is disposed to face the intersection point C of the first optical axis A1 and the second optical axis A2. The first frame member 61 is hermetically fixed to the housing body 11 at the flange portion 63a by, for example, laser welding.

[0028] Each second window portion 30 hermetically seals the second opening 13. Each second window portion 30 has a second window member 31. The second window member 31 is formed, for example, in a circular flat plate shape from a translucent material that transmits the second light L2. In this example, the second window member 31 is formed from diamond and transmits light with a wavelength of 20 μm or less. The second window member 31 transmits the second light L2 at the second opening 13.

[0029] The second window member 31 is fixed to the second frame member 71, and is fixed to the housing body 11 via the second frame member 71. In the following description, the second frame member 71 will be considered to be part of the housing 10. In this case, the housing 10 has the second frame member 71 in addition to the housing body 11 and first frame member 61 described above. However, the second frame member 71 can also be considered to be part of the second window portion 30. In this case, the housing 10 consists of only the housing body 11.

[0030] The second frame member 71 is formed in a frame shape from a metal material such as Kovar metal. The second frame member 71 is formed in a generally cylindrical shape. The second frame member 71 has a cylindrical first portion 72 and a cylindrical second portion 73 formed integrally with the first portion 72. The outer shape of the second portion 73 is larger than the outer shape of the first portion 72. The second window member 31 is disposed within the first portion 72 and fixed to the second frame member 71. Details of the manner in which the second window member 31 is fixed to the second frame member 71 will be described later.

[0031] A circular ring-shaped flange portion 73a protruding radially outward is formed on the outer surface of the second portion 73. The second frame member 71 is fixed to the housing 10 with the flange portion 73a disposed within the intermediate portion 13b of the second opening 13. In this state, a part of the first portion 72 of the second frame member 71 protrudes from the second opening 13. The second window member 31 is disposed to face the intersection point C of the first optical axis A1 and the second optical axis A2. The second frame member 71 is hermetically fixed to the housing body 11 at the flange portion 73a by, for example, laser welding.

[0032] The first electrode 40 extends along the X direction perpendicular to both the Y direction and the Z direction. The first electrode 40 faces the second electrode 50 across an intersection C between the first optical axis A1 and the second optical axis A2. In the X direction, the distance between the intersection C and the tip of the first electrode 40 is equal to the distance between the intersection C and the tip of the second electrode 50. The first electrode 40 is formed of a metal material such as tungsten. The first electrode 40 is generally formed in a substantially rod-like shape. The first electrode 40 has a first support portion 41 on the base end side and a first discharge portion 42 located on the tip side closer to the second electrode 50 than the first support portion 41. The first electrode 40 is fixed to the housing main body 11 via an insulating member 3 at the first support portion 41 and is electrically isolated from the housing 10. The first discharge portion 42 has a smaller diameter than the first support portion 41 and has a pointed shape. The first discharge unit 42 is disposed inside the housing 10 (inside the internal space S1).

[0033] The insulating member 3 has a main body 3a and a cylindrical portion 3b. The insulating member 3 is made of an insulating material such as alumina (aluminum oxide) or ceramic. The main body 3a is formed, for example, in a cylindrical shape and holds a first support portion 41 of the first electrode 40. The cylindrical portion 3b is formed in a cylindrical shape so as to extend from the main body 3a along the X direction and surrounds a part of the first support portion 41 side (base end side) of the first discharge portion 42. A third opening 14 is formed in the housing main body 11, and the cylindrical portion 3b is disposed within the third opening 14. The insulating member 3 is fixed airtightly to the housing main body 11 via a metal connection member 4.

[0034] The second electrode 50 extends along the X direction. The second electrode 50 faces the first electrode 40 across an intersection C between the first optical axis A1 and the second optical axis A2. The second electrode 50 is formed of a metal material such as tungsten. The second electrode 50 is generally formed in a rod shape having a larger diameter than the first electrode 40. The second electrode 50 has a second support portion 51 on the base end side and a second discharge portion 52 located on the tip side closer to the first electrode 40 than the second support portion 51. The second electrode 50 is fixed to the housing body 11 at the second support portion 51 and is electrically connected to the housing 10. More specifically, a fourth opening 15 is formed in the housing body 11, and the second support portion 51 is disposed in the fourth opening 15. The second discharge portion 52 has a smaller diameter than the second support portion 51 and has a pointed shape. The second discharge portion 52 is disposed inside the housing 10 (inside the internal space S1).

[0035] The housing body 11 is formed with an inlet hole 16. The inlet hole 16 is used to inject a luminous gas GS into the internal space S1 when the luminous envelope 1 is manufactured. The inlet hole 16 also functions as an exhaust hole for discharging gas (such as remaining air and impure gas released from the constituent materials) from the internal space S1 to the outside when the luminous envelope 1 is manufactured. The inlet hole 16 is connected to an inlet tube 17. The inlet tube 17 is formed in a cylindrical shape from a metal material such as copper, and has a first end 17a and a second end 17b. The first end 17a is disposed in the inlet hole 16, and the inlet tube 17 is connected to the internal space S1 at the first end 17a. The second end 17b is sealed by being crushed. Details of the sealed portion will be described later.

[0036] In the luminous envelope 1, an internal space S1 is defined by the housing 10, the first window 20, and the second window 30. In the luminous envelope 1, the internal space S1 is also defined by the first electrode 40, the second electrode 50, the insulating member 3, the connecting member 4, and the sealing tube 17. The entire internal space S1 is filled with the luminous gas GS. That is, the internal space S1 is filled with the luminous gas GS. The sealing pressure (maximum sealing pressure) of the luminous gas GS is, for example, 3 MPa (30 atmospheres) or more, but may be 5 MPa (50 atmospheres) or more. The luminous envelope 1 can withstand an internal pressure of 16 MPa or more. [Example]

[0037] In the laser excitation light source, a negative voltage pulse is applied to the first electrode 40 by a voltage application circuit arranged in the case, with the second electrode 50 at ground potential. This causes electrons to be emitted from the first electrode 40 toward the second electrode 50. As a result, an arc discharge occurs, and plasma is generated between the first electrode 40 and the second electrode 50 (at the intersection C). This plasma is irradiated with the first light L1 from the laser light source (light introduction section) through the first window member 21. This maintains the generated plasma. The second light L2, which is light from the plasma, is emitted to the outside as output light through the second window member 31. In the laser excitation light source, the second light L2 is emitted from the two second window members 31 toward both sides in the Y direction. A positive voltage pulse may be applied to the first electrode 40 as a trigger voltage for generating plasma. In this case, electrons are emitted from the second electrode 50 toward the first electrode 40. [Fixing manner of second window member]

[0038] As shown in Fig. 4, the second window member 31 of the second window portion 30 is formed in a circular flat plate shape, and has a first main surface 31a, a second main surface 31b, and a side surface 31c. The first main surface 31a is a light incident surface into which the second light L2 is incident, and is a surface on the internal space S1 side (upper side in Fig. 4). The second main surface 31b is a surface opposite to the first main surface 31a, and is a light exit surface from which the second light L2 exits. In this example, the first main surface 31a and the second main surface 31b are flat surfaces perpendicular to the Y direction, and the side surface 31c is a cylindrical surface connected to the first main surface 31a and the second main surface 31b.

[0039] The second window member 31 is disposed in a first portion 72 of the second frame member 71. Specifically, the space within the second frame member 71 has an arrangement portion 74 formed in the first portion 72, an intermediate portion 75 formed from within the first portion 72 to within the second portion 73, and an outer portion 76 formed in the second portion 73. The intermediate portion 75 has a truncated cone shape whose outer shape becomes larger toward the outside in the Y direction (the side opposite to the internal space S1) (the lower side in FIG. 4). The outer portion 76 is formed in a cylindrical shape having an outer shape larger than that of the intermediate portion 75.

[0040] The arrangement portion 74 has a cylindrical large diameter portion 74a and a cylindrical small diameter portion 74b arranged between the large diameter portion 74a and the intermediate portion 75. The outer shape of the large diameter portion 74a is larger than the outer shape of the small diameter portion 74b. The second window member 31 is arranged across the large diameter portion 74a and the small diameter portion 74b. A part of the second main surface 31b of the second window member 31 is in contact with a bottom surface 74b1 of the small diameter portion 74b, and a part of the side surface 31c of the second window member 31 is in contact with an inner surface 74b2 of the small diameter portion 74b.

[0041] The second window member 31 is fixed to the second frame member 71 by the bonding material 35. Specifically, the bonding material 35 bonds the side surface 31c of the second window member 31 and the first portion 72 of the second frame member 71 to each other over the entire circumference. In this example, the bonding material 35 is disposed on the large diameter portion 74a and contacts the side surface 31c, as well as the bottom surface 74a1 and the inner surface 74a2 of the large diameter portion 74a. The bonding material 35 is, for example, a metal brazing material, more specifically, a silver brazing material doped with titanium. The silver brazing material doped with titanium is, for example, a brazing material composed of 70% silver, 28% copper, and 2% Ti, and is, for example, TB-608T by Tokyo Blaze Co., Ltd.

[0042] A protective layer 80 is formed on the first main surface 31a of the second window member 31. In this example, the protective layer 80 is integrally formed so as to cover the entire surfaces of the second window member 31, the second frame member 71, and the bonding material 35 that are exposed to the outside. In FIG. 4, the region where the protective layer 80 is formed is indicated by a two-dot chain line. That is, the protective layer 80 is formed so as to extend from above the second window member 31 to above the second frame member 71, and covers the bonding material 35. The protective layer 80 is formed so as to cover the entire surface of the second frame member 71 except for the contact portions with the second window member 31 and the bonding material 35.

[0043] 5, the protective layer 80 includes a plurality of (two in this example) first layers 81 and a plurality of (two in this example) second layers 82. The plurality of first layers 81 and the plurality of second layers 82 are alternately stacked on the first main surface 31a of the second window member 31. In this example, the first layers 81 are in contact with the first main surface 31a, and the second layers 82 are exposed to the outside.

[0044] The protective layer 80 is made of an inorganic material and transmits at least a part of the second light L2. As an example, the first layer 81 is an ALD layer (first ALD layer) made of Al2O3 (first material), and the second layer 82 is an ALD layer (second ALD layer) made of TiO2 (second material). The ALD layer is a layer formed by atomic layer deposition (ALD). The transmittance of Al2O3 to ultraviolet light is higher than that of diamond. The transmittance of TiO2 to ultraviolet light is lower than that of diamond. Therefore, in this example, most of the ultraviolet light contained in the second light L2 is absorbed by the second layer 82. The protective layer 80 has a thickness of, for example, about 0.1 μm.

[0045] 6 to 10, suppression of the opacification phenomenon by the protective layer 80 will be described. In the case where the window member is made of diamond, if the laser excitation light source is continuously driven, depending on the driving conditions, a phenomenon in which the window member becomes opaque (opacification phenomenon) may occur.

[0046] FIG. 6(a) is a photograph showing the first sample immediately after the start of operation, and FIG. 6(b) is a photograph showing the first sample after 327 hours have passed. The first sample corresponds to a configuration in which the protective layer 80 is not formed on the luminous envelope 1. The photographs on the left side of FIG. 6(a) and FIG. 6(b) are focused on the second window member 31, and the photographs on the right side of FIG. 6(a) and FIG. 6(b) are focused on the first electrode 40 and the second electrode 50. In FIG. 6(a) and FIG. 6(b), the first electrode 40 and the second electrode 50 are photographed through the second window member 31. This point is the same for the photographs on the right side of FIG. 7(b), FIG. 8(b), FIG. 9(b), FIG. 10(b), FIG. 11(a) and FIG. 11(b), FIG. 13(b), FIG. 14(b), FIG. 15(b), and FIG. 16(b) described later.

[0047] 6(a) and 6(b), immediately after the start of operation, the first electrode 40 and the second electrode 50 were visible through the second window member 31, but after 327 hours had passed, the visible light transmittance of the second window member 31 decreased, and the first electrode 40 and the second electrode 50 could not be seen through the second window member 31. After 327 hours had passed, the color of the second window member 31 had changed to white, and the second window member 31 had become opaque.

[0048] It is believed that such an opacity phenomenon may occur due to at least one of the following factors. First, it is believed that the second window member 31 is scraped into a crater shape by impurity gas (gas other than the luminous gas GS, such as oxygen) present in the internal space S1 inside the housing 10. Another possible factor is the influence of ultraviolet light contained in the second light L2, which is light from the plasma. Still another possible factor is the rise in temperature of the luminous envelope 1 during operation. During operation, the temperature of the luminous envelope 1 rises due to irradiation with laser light and radiant heat from the plasma.

[0049] 7 to 10 are photographs showing the second sample immediately after the start of operation, after 168 hours, after 500 hours, and after 1051 hours, respectively. The second sample corresponds to the luminous envelope 1. In FIG. 7(a), the focus is on the second window member 31, and in FIG. 7(b), the focus is on the first electrode 40 and the second electrode 50. This is also true for FIGS. 8 to 10. FIG. 11(a) is a photograph showing the second sample immediately after the start of operation, and FIG. 11(b) is a photograph showing the second sample after 670 hours. In the photographs on the left side of FIG. 11(a) and FIG. 11(b), the focus is on the second window member 31, and in the photographs on the right side of FIG. 11(a) and FIG. 11(b), the focus is on the first electrode 40 and the second electrode 50.

[0050] 7 to 11, in the second sample, the opacification phenomenon did not occur even after 1051 hours had passed since the start of driving. These results show that the formation of the protective layer 80 can suppress the occurrence of the opacification phenomenon.

[0051] As described above, in the luminous envelope 1, the second window member 31 of the second window portion 30 through which the second light L2 is emitted is made of a material containing diamond. In this case, the above-mentioned phenomenon that the second window member 31 becomes opaque (opacification phenomenon) may occur. In this regard, in the luminous envelope 1, a protective layer 80 made of an inorganic material and transmitting at least a part of the second light L2 is formed on the first main surface 31a (surface on the internal space S1 side) of the second window member 31. This makes it possible to suppress, for example, the contact of impurity gas present in the internal space S1 in the housing 10 with the second window member 31. As a result, the occurrence of the opacification phenomenon can be suppressed, and the life of the luminous envelope 1 can be improved.

[0052] The protective layer 80 includes a plurality of layers, which makes it possible to more reliably prevent the occurrence of the opacification phenomenon.

[0053] The protective layer 80 contains a material (TiO2) whose transmittance to ultraviolet light is lower than that of diamond. This makes it possible to prevent the second window member 31 from becoming opaque due to the influence of ultraviolet light, and more reliably prevents the occurrence of the opacification phenomenon.

[0054] The protective layer 80 includes an ALD layer. Since the ALD layer is a uniform and dense layer, the occurrence of the opacification phenomenon can be more reliably suppressed.

[0055] The protective layer 80 includes a first ALD layer (first layer 81) made of a first material and a second ALD layer (second layer 82) made of a second material different from the first material. As a result, the protective layer 80 includes a plurality of layers, and thus the occurrence of the opacification phenomenon can be more reliably suppressed. In addition, the ALD layer is a uniform and dense layer, and thus the occurrence of the opacification phenomenon can be more reliably suppressed. In addition, holes may be formed in the ALD layer with a certain probability when the layer is formed, but the first ALD layer and the second ALD layer made of different materials are included, and thus the positions of the holes can be made different between the first ALD layer and the second ALD layer. As a result, the occurrence of a situation in which impurity gas present in the internal space S1 in the housing 10 comes into contact with the second window member 31 through the holes can be suppressed.

[0056] This point will be further explained with reference to FIG. 12. FIG. 12(a) is a cross-sectional view showing an example (first modified example) of a protective layer 80 consisting of only one ALD layer 83. The ALD layer 83 is made of, for example, Al2O3. The first modified example can also suppress the occurrence of the opacification phenomenon as in the first embodiment, and can improve the life of the light-emitting envelope 1. Furthermore, since the transmittance of Al2O3 to ultraviolet light is higher than that of diamond, the second light L2 containing ultraviolet light can be emitted from the second window portion 30. Furthermore, the layer made of Al2O3 can be stably formed on the second window member 31 made of diamond.

[0057] On the other hand, as shown in FIG. 12(a), holes (pinholes) HL ​​may be formed in the ALD layer 83 with a certain probability during layer formation. In this case, there is a risk that the impurity gas GR present in the internal space S1 in the housing 10 may contact the second window member 31 through the holes HL. In contrast, in the light-emitting envelope 1 of the first embodiment, the protective layer 80 includes two ALD layers (a first layer 81 and a second layer 82) made of different materials. This allows the position of the hole HL1 formed in the first layer 81 to be different from the position of the hole HL2 formed in the second layer 82, as shown in FIG. 12(b). As a result, the impurity gas GR is less likely to reach the second window member 31 through the holes HL1 and HL2, and the occurrence of a situation in which the impurity gas GR contacts the second window member 31 can be suppressed.

[0058] The protective layer 80 includes a layer (second layer 82) made of, for example, TiO2. Since TiO2 has a lower transmittance for ultraviolet light than diamond, the second window member 31 can be prevented from becoming opaque due to the influence of ultraviolet light, and the occurrence of the opacification phenomenon can be more reliably prevented.

[0059] The protective layer 80 includes a first layer 81 made of Al2O3 and a second layer 82 made of TiO2. Since the protective layer 80 includes a plurality of layers, the occurrence of the opacification phenomenon can be more reliably suppressed. In addition, the second window member 31 can be prevented from becoming opaque due to the influence of ultraviolet light, and the occurrence of the opacification phenomenon can be more reliably suppressed.

[0060] The housing 10 is formed of a metal material. In this case, the sealing pressure of the luminous gas GS can be increased, and the intensity of the second light L2 emitted from the second window portion 30 can be increased. In addition, in this case, impurity gas is likely to exist in the internal space S1, and the opacification phenomenon is likely to occur. That is, the luminous gas GS is sealed in the housing 10 in a high vacuum state by vacuum baking, but if the temperature rises or light is irradiated during operation, the impurity gas may be released from the housing 10. For example, the impurity gas adsorbed to the unevenness present on the surface of the housing 10 may be released during operation. When the housing 10 is formed by cutting, large unevenness is likely to be formed. In addition, the impurity gas occluded in the housing 10 may also be released. In this regard, according to the luminous envelope 1, even if impurity gas is likely to exist in the internal space S1, the occurrence of the opacification phenomenon can be suppressed.

[0061] The protective layer 80 is formed so as to extend from above the second window member 31 to above the second frame member 71. This makes it possible to suppress the release of impurity gases from the second frame member 71, and more reliably suppress the occurrence of the opacification phenomenon.

[0062] The protective layer 80 covers the bonding material that bonds the second window member 31 and the second frame member 71. This makes it possible to prevent foreign matter from being released from the bonding material .

[0063] The pressure of the light emitting gas GS in the housing 10 is 3 MPa or more. In this case, the brightness of the plasma generated in the light emitting gas GS can be increased, and the intensity of the second light L2 emitted from the second window portion 30 can be increased accordingly. For example, when the filling pressure is 3 MPa, the intensity of the second light L2 increases by about 5 times or more compared to when the filling pressure is 1 MPa. When the filling pressure is 5 MPa, the intensity of the second light L2 increases by about 8 times compared to when the filling pressure is 1 MPa. On the other hand, the increase in the intensity of the second light L2 makes the opacity phenomenon more likely to occur. In addition, the increase in the light output increases the temperature of the light emitting envelope 1 during operation, so that the opacity phenomenon is more likely to occur. In addition, when the filling pressure increases, the impure gas is more likely to exist in the internal space S1, so that the opacity phenomenon is more likely to occur. In this regard, according to the light emitting envelope 1, the occurrence of the opacity phenomenon can be suppressed even in such a case.

[0064] As a second modification, in the first embodiment, the second layer 82 may be an ALD layer (second ALD layer) made of SiO2 (second material). The transmittance of SiO2 to ultraviolet light is higher than that of diamond, and lower than that of Al2O3 to ultraviolet light. The second modification can also suppress the occurrence of the opacification phenomenon, as in the first embodiment, and can improve the life of the luminous envelope 1.

[0065] This point will be described with reference to Figs. 13 to 16. Figs. 13 to 16 are photographs showing the third sample immediately after the start of operation, after 168 hours, after 500 hours, and after 1000 hours, respectively. The third sample corresponds to the second modified example. In Fig. 13(a), the focus is on the second window member 31, and in Fig. 13(b), the focus is on the first electrode 40 and the second electrode 50. This also applies to Figs. 14 to 16. As shown in Figs. 13 to 16, in the third sample, the opacification phenomenon did not occur even after 1000 hours had passed since the start of operation.

[0066] In the second modification, the protective layer 80 is made only of a material having a higher transmittance for ultraviolet light than diamond. This allows the second light L2 containing ultraviolet light to be emitted from the second window 30.

[0067] In the first embodiment, the protective layer 80 may cover at least a part of the first main surface 31a of the second window member 31, and may be formed only on the first main surface 31a, for example. Alternatively, the protective layer 80 may be formed to cover only the surfaces of the second window member 31, the second frame member 71, and the bonding material 35 exposed to the internal space S1. The protective layer 80 may transmit at least a part of the second light L2, and may transmit a part of the second light L2 as in the first embodiment, or may transmit the entire second light L2. In the first embodiment, the protective layer 80 is an ALD layer, but the protective layer 80 may be a layer formed by deposition. For example, the protective layer 80 may be a layer formed by sputtering, chemical vapor deposition (CVD), ion plating, vacuum deposition, resistance heating deposition, or the like. When the protective layer 80 is formed by deposition, the protective layer 80 can be formed in any position (area). In the first embodiment, the second window member 31 of the second window portion 30 is made of a material containing diamond, and the protective layer 80 made of an inorganic material is formed on the first main surface 31a (surface on the internal space S1 side) of the second window member 31, but instead of or in addition to this, the first window member 21 of the first window portion 20 may be made of a material containing diamond, and the protective layer 80 made of an inorganic material may be formed at least on the surface (second main surface 21b described later) of the first window member 21 on the internal space S1 side. In this case, the occurrence of the opacification phenomenon in the first window member 21 can be suppressed, and the life of the luminous envelope 1 can be further improved. [Fixing mode of first window member]

[0068] As shown in Fig. 17, the first window member 21 of the first window portion 20 is formed in a circular flat plate shape, and has a first main surface 21a, a second main surface 21b, and a side surface 21c. The first main surface 21a is a light incident surface into which the first light L1 is incident, and is a surface on the opposite side to the internal space S1 (the lower side in Fig. 17). The second main surface 21b is a surface on the opposite side to the first main surface 21a, and is a light exit surface from which the first light L1 exits. In this example, the first main surface 21a and the second main surface 21b are flat surfaces perpendicular to the Z direction, and the side surface 21c is a cylindrical surface connected to the first main surface 21a and the second main surface 21b.

[0069] The first window member 21 is disposed in the first portion 62 of the first frame member 61. The first portion 62 has a cylindrical wall portion 65 facing the side surface 21c of the first window member 21. A circular ring-shaped flange portion 66 protruding radially inward is formed on the inner surface 65a of the wall portion 65. The first window member 21 is disposed in the first portion 62 of the first frame member 61 so that the first main surface 21a faces the first surface 66a of the flange portion 66 and the side surface 21c faces the inner surface 65a of the wall portion 65. An end surface 65b of the wall portion 65 in the Z direction (direction perpendicular to the first main surface 21a) is located closer to the internal space S1 side (upper side in FIG. 17) than the first window member 21 (second main surface 21b).

[0070] A metallized layer 26 is formed over the entire surface of the side surface 21c of the first window member 21. The metallized layer 26 is made of, for example, molybdenum manganese (Mo-Mn) and has a thickness of about several hundred μm. A plating layer 27 is formed on the metallized layer 26. The plating layer 27 is made of, for example, nickel and has a thickness of about several μm. The plating layer 27 covers the entire surface of the metallized layer 26 except for the contact portion with the first window member 21 so that the metallized layer 26 is not exposed. The plating layer 27 functions as an oxidation prevention layer that prevents oxidation of the metallized layer 26.

[0071] The first window member 21 is joined to the first frame member 61 by the bonding material 25. Specifically, the bonding material 25 is bonded to the plating layer 27, thereby bonding the first window member 21 to the first frame member 61. The bonding material 25 bonds the side surface 21c of the first window member 21 and the wall portion 65 of the first frame member 61 to each other around the entire periphery.

[0072] The bonding material 25 penetrates between the first main surface 21a of the first window member 21 and the first surface 66a of the flange portion 66 of the first frame member 61. The bonding material 25 does not fit into the first main surface 21a, and although it is in local contact with the first main surface 21a, it is not bonded to it. That is, the bonding material 25 penetrates between the first main surface 21a and the flange portion 66 without being bonded to the first main surface 21a. In this example, the bonding material 25 is formed so as to wrap around the flange portion 66 and cover a part of the second surface 66b of the flange portion 66. The second surface 66b is the surface of the flange portion 66 on the opposite side to the first window member 21.

[0073] The bonding material 25 covers the metallized layer 26 and the plating layer 27 on the side opposite to the internal space S1 (the lower side in FIG. 17) so as not to expose the metallized layer 26 and the plating layer 27. In other words, the edges of the metallized layer 26 and the plating layer 27 on the side opposite to the internal space S1 are covered by the bonding material 25 and are not exposed to the outside.

[0074] The bonding material 25 covers the metallized layer 26 and the plating layer 27 so that the metallized layer 26 and the plating layer 27 are not exposed even on the internal space S1 side (upper side in FIG. 17). That is, the edges of the metallized layer 26 and the plating layer 27 on the internal space S1 side are covered by the bonding material 25 and are not exposed to the outside (internal space S1). The bonding material 25 is provided so as to reach the end face 65b of the wall portion 65 in the Z direction, and covers the entire surface of the end face 65b. In this example, the bonding material 25 reaches the outer surface 65c of the wall portion 65 beyond the end face 65b and covers a part of the outer surface 65c.

[0075] The bonding material 25 is, for example, a metal brazing material, more specifically, a gold-copper brazing material. The bonding material 25 has a thickness of, for example, about several hundred μm. The bonding material 25 is formed, for example, by placing a wire made of a metal brazing material at the boundary between the first window member 21 and the first frame member 61 and baking the wire at about 1000° C. to melt it.

[0076] 18 to 23, the suppression of foreign matter occurring on the window member will be described. For example, in the case where the window member is joined to the housing by a joining material made of silver solder, foreign matter may become visible on the window member when the laser excitation light source is continuously driven. Foreign matter on the window member may become dirt on the window member and may hinder the transmission of laser light or emitted light, so it is necessary to suppress such foreign matter.

[0077] Fig. 18 is a photograph showing an example of foreign matter occurring on the first window member 21. Fig. 19 is a photograph showing another example of foreign matter occurring on the first window member 21, where Fig. 19(a) shows the state immediately after the start of operation and Fig. 19(b) shows the state after 46 hours have passed. The samples shown in Figs. 18 and 19 correspond to a configuration in which silver solder is used as the bonding material 25 in the luminous envelope 1 instead of gold-copper solder.

[0078] In Fig. 18, the location where the foreign matter has occurred is indicated by the symbol P. Foreign matter such as that shown in Fig. 18 occurs a relatively long time after drive begins. It is believed that this foreign matter occurs when the silver solder contained in the bonding material moves on the surface of the first window member 21 when the temperature rises due to drive (seepage phenomenon). It is believed that the seepage phenomenon occurs when the movement of atoms at the bonding surface of the silver solder becomes more intense due to the light output, and the atoms are pushed by internal pressure and gradually move on the surface of the first window member 21.

[0079] As shown in FIG. 19(a) and FIG. 19(b), no foreign matter was generated on the first window member 21 immediately after the start of operation, but after 46 hours had passed, foreign matter was generated on the first window member 21. Foreign matter such as that shown in FIG. 19(b) is generated in a relatively short time after the start of operation. It is considered that this foreign matter can be generated due to at least one of the following factors. First, the influence of ultraviolet light contained in the second light L2, which is light from the plasma, is considered. For example, oxygen in the air is ozonized by ultraviolet light, which can oxidize the silver solder contained in the bonding material in a short time. Another factor is that the temperature of the light-emitting envelope 1 increases during operation. During operation, the temperature of the light-emitting envelope 1 increases due to irradiation with the laser light and radiant heat from the plasma.

[0080] 20(a) to 20(c) are photographs showing the fourth sample immediately after the start of operation, after 147 hours, and after 712 hours, respectively. FIG. 21(a) to 21(c) are photographs showing the fifth sample immediately after the start of operation, after 147 hours, and after 712 hours, respectively. FIG. 22(a), FIG. 22(b), FIG. 23(a), and FIG. 23(b) are photographs showing the sixth sample immediately after the start of operation, after 168 hours, after 504 hours, and after 1051 hours, respectively. The fourth sample, the fifth sample, and the sixth sample correspond to the luminous envelope 1. As described above, the luminous envelope 1 uses gold-copper solder as the bonding material 25.

[0081] 20 and 21, in the fourth and fifth samples, no foreign matter was generated on the first window member 21 even after 712 hours had passed since the start of driving. As shown in Figs. 22 and 23, in the sixth sample, no foreign matter was generated on the first window member 21 even after 1051 hours had passed since the start of driving. These results show that by using a material containing gold as the material for the bonding material 25, it is possible to suppress the generation of foreign matter on the first window member 21.

[0082] As described above, in the luminous envelope 1, the first window member 21 is joined to the housing 10 by the bonding material 25 made of a material containing gold. This makes it possible to suppress the occurrence of foreign matter caused by the bonding material 25 on the first window member 21, compared to when the bonding material 25 is made of silver solder. This is believed to be because, by using gold, which has a higher melting point than silver solder, as the constituent material of the bonding material 25, even when the temperature rises due to driving, the constituent material of the bonding material 25 can be suppressed from moving on the first window member 21, and as a result, the occurrence of the seepage phenomenon can be suppressed. In addition, since gold is less likely to be oxidized than silver, it is believed to be possible to suppress the constituent material of the bonding material 25 from being oxidized. Therefore, according to the luminous envelope 1, it is possible to suppress the occurrence of foreign matter on the first window member 21, and the life of the luminous envelope 1 can be improved. The knowledge that foreign matter can be generated on the first window member 21 due to the constituent material of the bonding material 25 was found by the present inventors.

[0083] The housing 10 (first frame member 61) has a wall portion 65 facing the side surface 21c of the first window member 21, and the bonding material 25 bonds the side surface 21c and the wall portion 65 to each other. This allows the first window member 21 to be reliably bonded to the housing 10. Also, compared to the case where the first window member 21 is bonded to the housing 10 at the first main surface 21a, for example, a wider area in the first window member 21 through which light passes can be ensured.

[0084] The housing 10 has a flange portion 66 protruding from a wall portion 65, and the first window member 21 is disposed so that the first main surface 21a faces the flange portion 66. This allows the first window member 21 to be reliably fixed to the housing 10. It also prevents impurity gases from coming into contact with the joint (metallized layer 26) between the first window member 21 and the housing 10, and prevents the joint from being altered (e.g., oxidized) by the impurity gases.

[0085] The bonding material 25 penetrates between the first main surface 21a of the first window member 21 and the flange portion 66. This makes it possible to suppress contact of impurity gases with the bonding portion between the first window member 21 and the housing 10, and to suppress deterioration of the bonding portion due to the impurity gases.

[0086] The bonding material 25, while not bonded to the first main surface 21a of the first window member 21, enters between the first main surface 21a of the first window member 21 and the flange portion 66. As a result, since the bonding material 25 is not bonded to the first main surface 21a of the first window member 21, it is possible to alleviate distortion caused by a difference in the thermal expansion coefficient between the first window member 21 and the flange portion 66.

[0087] The bonding material 25 covers a portion of the second surface 66b (the surface opposite to the first window member 21) of the flange portion 66. This makes it possible to suppress the release of impurity gases from the second surface 66b of the flange portion 66.

[0088] The bonding material 25 is provided so as to reach the end face 65b of the wall portion 65 in the Z direction (the direction perpendicular to the first main surface 21a). This makes it possible to suppress the release of impurity gas from the end face 65b of the wall portion 65. That is, for example, when the end face 65b is a metal processed surface, large irregularities are likely to be formed on the end face 65b, and the impurity gas adsorbed to the irregularities is likely to be released. In this regard, by covering at least a part of the end face 65b with the bonding material 25, it is possible to suppress the release of such impurity gas.

[0089] A metallized layer 26 is formed on the first window member 21, a plated layer 27 is formed on the metallized layer 26, and the first window member 21 is joined to the housing 10 by bonding the bonding material 25 to the plated layer 27. This allows the first window member 21 to be reliably bonded to the housing 10. In addition, although the metallized layer 26 has high reactivity, the formation of the plated layer 27 on the metallized layer 26 makes it possible to suppress deterioration of the metallized layer 26 (for example, oxidation).

[0090] The plating layer 27 covers the metallized layer 26 so as to prevent the metallized layer 26 from being exposed. As a result, the metallized layer 26 has high reactivity, but since the plating layer 27 is formed on the metallized layer 26, deterioration of the metallized layer 26 can be suppressed.

[0091] The bonding material 25 covers the metallized layer 26 and the plated layer 27 on the side of the internal space S1 so that the metallized layer 26 and the plated layer 27 are not exposed. This makes it possible to further suppress deterioration of the metallized layer 26.

[0092] The bonding material 25 covers the metallized layer 26 and the plated layer 27 on the side opposite to the internal space S1 so as to prevent the metallized layer 26 and the plated layer 27 from being exposed. This makes it possible to further suppress deterioration of the metallized layer 26.

[0093] The metallized layer 26 is made of molybdenum manganese. Since molybdenum manganese has a higher melting point than the gold contained in the bonding material 25, it is possible to prevent the constituent material of the metallized layer 26 from diffusing into the bonding material 25 during manufacturing (e.g., during baking of the bonding material 25).

[0094] The first window member 21 is made of sapphire. In this case, since the transmittance of sapphire to ultraviolet light is relatively high, light including ultraviolet light can be made to enter the first window member 21. On the other hand, as described above, when light including ultraviolet light enters the first window member 21, foreign matter is likely to be generated on the first window member 21 due to oxidation of the constituent material of the bonding material 25. In this regard, according to the luminous envelope 1, even in such a case, it is possible to suppress the generation of foreign matter on the first window member 21.

[0095] The bonding material 25 is made of gold-copper solder, which can reliably prevent foreign matter from being generated on the first window member 21.

[0096] The housing 10 has a first frame member 61 fixed to the housing body 11 at the first opening 12, and the first window member 21 is joined to the first frame member 61 by the joining material 25. This allows the first window member 21 to be fixed to the housing 10 in a good condition.

[0097] The housing 10 is made of a metal material. In this case, while it is possible to increase the intensity of the second light L2 emitted from the second window portion 30 by increasing the sealing pressure of the luminous gas GS, foreign matter is likely to be generated on the first window member 21. This is because, as the intensity of the second light L2 increases, the amount of ultraviolet light contained in the second light L2 also increases. In this regard, according to the luminous envelope 1, it is possible to suppress the generation of foreign matter on the first window member 21 even in such a case.

[0098] The pressure of the luminous gas GS enclosed in the housing 10 is 3 MPa or more. In this case, the brightness of the plasma generated in the luminous gas GS can be increased, and the intensity of the second light L2 emitted from the second window portion 30 can be increased accordingly. On the other hand, the increase in the light output increases the temperature of the luminous envelope 1 during operation, so that foreign matter is more likely to be generated on the first window member 21. In this regard, according to the luminous envelope 1, even in such a case, the generation of foreign matter on the first window member 21 can be suppressed.

[0099] As a third modification, the bonding material 25 may be gold-nickel solder. As in the first embodiment, the third modification can also suppress the generation of foreign matter on the first window member 21, and can improve the life of the luminous envelope 1.

[0100] This point will be described with reference to Figures 24 and 25. Figures 24(a), 24(b), 25(a), and 25(b) are photographs showing the seventh sample immediately after the start of operation, after 168 hours, after 504 hours, and after 1051 hours, respectively. The seventh sample corresponds to the third modified example. As shown in Figures 24 and 25, in the seventh sample, no foreign matter was generated on the first window member 21 even after 1051 hours had passed since the start of operation.

[0101] As a fourth modification, the metallization layer 26 may be a titanium-doped silver solder. As in the first embodiment, the fourth modification can also suppress the generation of foreign matter on the first window member 21, and can improve the life of the luminous envelope 1.

[0102] This point will be described with reference to Figures 26 and 27. Figures 26(a), 26(b), 27(a), and 27(b) are photographs showing the eighth sample immediately after the start of operation, after 168 hours, after 504 hours, and after 1051 hours, respectively. The eighth sample corresponds to the third modified example. As shown in Figures 26 and 27, in the eighth sample, no foreign matter was generated on the first window member 21 even after 1051 hours had passed since the start of operation.

[0103] As another modification, although the first window member 21 in the first embodiment is made of sapphire, the first window member 21 may be made of a material other than sapphire, for example, diamond. When the first window member 21 is made of diamond, the metallization layer 26 is preferably made of a material other than molybdenum manganese, and may be, for example, titanium-doped silver solder as in the fourth modification. This is because it is difficult to form the metallization layer 26 made of molybdenum manganese on a window member made of diamond.

[0104] In the first embodiment, the bonding material 25 that bonds the first window member 21 to the housing 10 is made of a material containing gold. In addition to or instead of this, the bonding material 35 that bonds the second window member 31 to the housing 10 (the second frame member 71) may be made of a material containing gold. In this case, it is possible to suppress the generation of foreign matter on the second window member 31, and the life of the light-emitting envelope 1 can be improved. That is, at least one of the bonding material 25 and the bonding material 35 may be made of a material containing gold. As with the second window member 31, a protective layer 80 may be formed on at least the surface (second main surface 21b) of the first window member 21 on the side of the internal space S1. In the first embodiment, the first light L1 enters the first opening 12 and the second light L2 exits from the second opening 13. However, one opening may be formed in the housing 10, and the first light L1 enters the opening and the second light L2 exits from the opening. That is, the opening of the housing 10 may be one through which the first light L1 enters and through which the second light L2 exits. In this case, a window member that transmits the first light L1 and the second light L2 is disposed in the opening. In such a configuration, the window member may be bonded to the housing 10 by a bonding material made of a material containing gold.

[0105] It is only necessary that the first window member 21 and the first frame member 61 (housing 10) are joined by the joining material 25. For example, the joining material 25 may be disposed only between the side surface 21c of the first window member 21 and the wall portion 65 of the first frame member 61. In the first embodiment, the first window member 21 is fixed to the housing body 11 via the first frame member 61. However, the first frame member 61 may be omitted, and the first window member 21 may be directly fixed to the housing body 11. In this case, for example, the first window member 21 may be disposed in the inner portion 12a of the first opening 12, and a portion constituting the inner portion 12a of the housing body 11 may constitute a wall portion facing the side surface 21c of the first window member 21, and the side surface 21c and the wall portion may be joined by the joining material 25. [Sealing part of the sealing tube]

[0106] 1, 3 and 28, the second end 17b of the sealing tube 17 is sealed by being crushed. When the luminous gas GS is sealed in the housing 10, the luminous gas GS is introduced into the housing 10 through the sealing tube 17, and then the second end 17b of the sealing tube 17 is pressed and crushed by using a tool or the like on the second end 17b side, and the second end 17b is sealed (sealed off). As a result, the second end 17b of the sealing tube 17 is closed by the sealing tube 17 itself, as the tube materials 17b1 constituting the second end 17b come into contact with each other.

[0107] The second end 17b of the sealing tube 17 is covered by a covering member 91. The covering member 91 covers a portion of the sealing tube 17 on the second end 17b side, and covers the entire second end 17b. The covering member 91 is formed in a substantially cylindrical shape, and has a tapered surface 91a on the outer surface of the bottom. The tapered surface 91a is formed so that the diameter becomes smaller the further away from the second end 17b. The covering member 91 functions as a leak prevention member that prevents leakage of the luminous gas GS from the second end 17b.

[0108] The covering member 91 is covered by a cap member 92. The cap member 92 covers the entire surface of the covering member 91 except for a top surface 91b. The top surface 91b is the surface of the covering member 91 opposite to the tapered surface 91a, and faces the housing 10. The cap member 92 is formed in a substantially cylindrical shape, and has a tapered surface 92a on the inner surface of the bottom. The tapered surface 92a is in contact with the tapered surface 91a, and is formed so that the diameter becomes smaller as it moves away from the second end 17b. The cap member 92 functions as a protective member that protects the second end 17b and the covering member 91.

[0109] The covering member 91 is made of an inorganic material, and the cap member 92 is made of a metal material. In this example, the sealing tube 17 is made of copper, the covering member 91 is made of solder, and the cap member 92 is made of brass. In this case, the thermal expansion coefficient of the sealing tube 17 is 17.7×10 -6 (1 / K), and the thermal expansion coefficient of the covering member 91 is 20.2×10-6 (1 / K), and the thermal expansion coefficient of the cap member 92 is 18.0×10 -6 (1 / K). That is, in this example, the thermal expansion coefficient is greatest in the order of covering member 91, cap member 92, and sealing tube 17. The hardness (Vickers hardness) of the sealing tube 17 is 70 to 80 HV, the hardness of the covering member 91 is about 20, and the hardness of the cap member 92 is about 180 to 230 HV. That is, in this example, the hardness is greatest in the order of cap member 92, sealing tube 17, and covering member 91.

[0110] As described above, in the luminous envelope 1, the second end 17b of the sealed tube 17 that is crushed and sealed is covered with the covering member 91 made of an inorganic material. This makes it possible to prevent the second end 17b from opening, and even if leakage occurs from the second end 17b, it is possible to prevent the sealing pressure of the luminous gas GS in the housing 10 from decreasing. In addition, since the covering member 91 is made of an inorganic material, it is possible to stably cover the second end 17b even in a high-temperature environment. In addition, in the luminous envelope 1, the covering member 91 is covered with the cap member 92 made of a metal material. This makes it possible to protect the second end 17b and the covering member 91. In addition, when the temperature rises, it is possible to make the covering member 91 easily deform toward the second end 17b side, not the cap member 92 side. As a result, the covering member 91 can hold down the second end 17b, and it is possible to further prevent the second end 17b from opening. Therefore, according to the light-emitting envelope 1, the leakage of the light-emitting gas GS caused by the opening of the second end 17b of the sealing tube 17 can be suppressed, and the life of the light-emitting envelope 1 can be improved. In addition, in the laser excitation light source, the light-emitting gas may be sealed at high pressure in order to increase efficiency and power output, and the temperature rises due to the irradiation of the laser light and the radiant heat from the plasma during operation. Therefore, if the laser excitation light source is continuously driven for a long time, the end of the sealed sealing tube may be pushed open and the light-emitting gas may leak. In contrast, according to the light-emitting envelope 1, as described above, the leakage of the light-emitting gas GS caused by the opening of the second end 17b of the sealing tube 17 can be suppressed, and the life of the light-emitting envelope 1 can be improved.

[0111] The thermal expansion coefficient of the covering member 91 is larger than that of the sealing tube 17. This allows the covering member 91 to effectively hold down the second end 17b of the sealing tube 17 when the temperature rises, and further prevents the second end 17b from opening.

[0112] The hardness of cap member 92 is greater than the hardness of sealing tube 17. This makes it easier for covering member 91 to deform toward second end 17b rather than toward cap member 92 when the temperature rises, and further prevents second end 17b from opening.

[0113] The covering member 91 is made of a thermoplastic material (solder in the above example), which can preferably provide the above-mentioned advantageous effects that the second end 17b can be prevented from opening, that the pressure of the light emitting gas GS enclosed in the housing 10 can be prevented from decreasing even if leakage occurs from the second end 17b, and that the second end 17b can be stably covered even in a high-temperature environment.

[0114] The cap member 92 is made of brass, which can provide the above-mentioned advantageous effects of protecting the second end 17b and the covering member 91, and further preventing the second end 17b from opening by pressing down the second end 17b with the covering member 91.

[0115] The pressure of the luminous gas GS enclosed in the housing 10 is 3 MPa or more. In this case, the intensity of the plasma generated in the luminous gas GS can be increased, while the second end 17b of the enclosed tube 17 is likely to open. However, according to the luminous envelope 1, even in such a case, the second end 17b can be prevented from opening.

[0116] The materials of the sealing tube 17, the covering member 91 and the cap member 92 are not limited to the above examples, and may be made of any material. [Second embodiment]

[0117] As shown in FIG. 29 to FIG. 32, the light-emitting envelope 1A according to the second embodiment further includes a getter portion 101. In FIG. 29, the getter portion 101 is shown in schematic form. In the light-emitting envelope 1A, the protective layer 80 is not formed on the second window member 31. The getter portion 101 includes a getter material 110 and a support member 120 that supports the getter material 110. The getter material 110 is heated and activated, and adsorbs impurity gases present in the internal space S1. The getter material 110 is formed of a material containing, for example, nichrome, and is configured to be of a non-evaporation type. That is, in this example, the getter material 110 does not evaporate when it is heated and activated. The getter material 110 is heated to, for example, 250° C. or higher to be activated. The getter material 110 is formed, for example, in a rectangular plate shape.

[0118] The support member 120 is formed, for example, from a metal material into a rectangular plate shape having an outer shape larger than that of the getter material 110. Examples of the metal material constituting the support member 120 include high-melting point metals such as tungsten and molybdenum.

[0119] The getter material 110 is disposed on a support member 120, and is fixed to the support member 120 by three fixing members 121. The fixing members 121 are formed in a band (ribbon) shape, for example, from nickel. The fixing members 121 are disposed so as to press the getter material 110 at the middle portion, and are fixed to the support member 120 at both ends by, for example, welding. In this way, the getter material 110 is fixed to the support member 120. In FIG. 30, the getter material 110 is hatched to facilitate understanding.

[0120] The support member 120 is fixed to the housing main body 11 (housing 10) by four fixing members 122. The fixing members 122 are formed in a band (ribbon) shape from, for example, nickel. The fixing members 122 have extension portions 122a extending perpendicularly to the support member 120 from the corners of the support member 120. The extension portions 122a are fixed to the housing main body 11 by, for example, welding. The fixing members 122 are also fixed to the support member 120 by, for example, welding. In this way, the support member 120 is fixed to the housing main body 11.

[0121] The getter section 101 is disposed within an irradiation region RG of the first light L1 within the housing 10. FIG. 29 shows the irradiation region RG of the first light L1. As shown in FIG. 29, the first light L1 transmitted through the first window section 20 converges so that the focal point is located on, for example, an intersection C (the generation position of the second light L2) between the first optical axis A1 and the second optical axis A2. The first light L1 that passes through the intersection C advances toward the opposite side of the first window section 20 (upper side in FIG. 29) while expanding. In this example, the getter section 101 (the getter material 110 and the support member 120) is disposed on the first optical axis A1 of the first light L1.

[0122] The getter section 101 is disposed so that the getter material 110 faces the opposite side to the first window section 20 (upper side in FIG. 29). As a result, the support member 120 is disposed so as to face the first window section 20 side, and the first light L1 is irradiated onto the support member 120. In the light-emitting envelope 1A, the support member 120 is heated by irradiation with the first light L1, and the getter material 110 is indirectly heated by the averaged heat transferred from the support member 120.

[0123] The getter section 101 is disposed so that the getter material 110 faces the inner surface 10a of the housing 10. The inner surface 10a is the surface facing the first window section 20 in the housing 10. Here, the inner surface 10a facing the first window section 20 means that the inner surface 10a and the first window section 20 overlap in the Z direction (direction parallel to the first optical axis A1), and other members may be disposed between the inner surface 10a and the first window section 20. In this example, the inner surface 10a has a tapered shape whose diameter becomes smaller as it moves away from the getter section 101.

[0124] The getter section 101 is disposed so as to define a space S2 between itself and the inner surface 10a. The space S2 is a part of the internal space S1. In this example, the space S2 is a substantially conical space whose diameter decreases with increasing distance from the getter section 101. The space S2 is not completely separated by the getter section 101, and is connected to the part of the internal space S1 other than the space S2 via a minute gap.

[0125] The getter portion 101 is disposed in the internal space S1 between the generation position of the second light L2 (intersection C of the first optical axis A1 and the second optical axis A2) and the sealing hole 16. As described above, the sealing hole 16 also functions as an exhaust hole for discharging gas (impurity gas) from the internal space S1 to the outside during the manufacture of the luminous envelope 1. The distance D1 from the getter material 110 to the generation position of the second light is longer than the distance D2 from the generation position of the second light L2 to the first window portion 20.

[0126] The melting point of the support member 120 is higher than that of the getter material 110. As an example, the getter material 110, the support member 120, the housing body 11, and the first frame member 61 (the second frame member 71) are made of nichrome, tungsten, SUS304, and kovar metal, respectively. The melting points of nichrome, tungsten, SUS304, and kovar metal are 1400°C, 3387°C, 1400 to 1450°C, and 1450°C, respectively. That is, in this example, the melting point of the support member 120 is higher than that of the getter material 110, the housing body 11, and the first frame member 61. Even when the support member 120 is made of molybdenum, the melting point of molybdenum is 2623°C, so that the melting point of the support member 120 is higher than that of the getter material 110, the housing body 11, and the first frame member 61.

[0127] The thermal conductivity of the support member 120 is higher than that of the getter material 110. The thermal conductivities of nichrome, tungsten, SUS304, and Kovar metal are 14 (W / m·K), 168 (W / m·K), 16.7 (W / m·K), and 17 (W / m·K), respectively. That is, in an example in which the getter material 110, the support member 120, the housing body 11, and the first frame member 61 (second frame member 71) are formed of nichrome, tungsten, SUS304, and Kovar metal, respectively, the thermal conductivity of the support member 120 is higher than that of the getter material 110, the housing body 11, and the first frame member 61. Even when the support member 120 is made of molybdenum, the thermal conductivity of molybdenum is 142 (W / m·K), so the thermal conductivity of the support member 120 is higher than the thermal conductivity of the getter material 110, the housing main body 11, and the first frame member 61.

[0128] When the luminous envelope 1A is driven, in the first step, the getter material 110 is heated and activated by irradiation with the first light L1 through the first window 20. Then, in the second step, while the getter material 110 is in an activated state, plasma is generated in the luminous gas GS and the second light L2 is emitted from the second window 30. This allows the activated getter material 110 to adsorb impurity gases present in the internal space S1. The first and second steps may be performed sequentially as in this example, or may be performed simultaneously.

[0129] Next, the suppression of defects by the getter section 101 will be described. In a laser excitation light source, if impurity gas exists in the internal space of the housing, various defects may occur in the housing depending on the driving conditions. In order to improve the life of the laser excitation light source, it is necessary to suppress the occurrence of such defects.

[0130] One of the problems caused by impure gases is the phenomenon in which the window material becomes opaque (opacification phenomenon) described above (Figure 6).

[0131] Another problem caused by impure gas is the generation of foreign matter in the housing 10. FIG. 33(a) and FIG. 33(b) are photographs showing an example of foreign matter generated on the first electrode 40 and / or the second electrode 50. In the photograph shown in FIG. 33(a), foreign matter is attached to the tip of the first electrode 40 and the second electrode 50 as indicated by the arrow AR. This foreign matter is mainly composed of carbon, for example. In the photograph shown in FIG. 33(b), foreign matter is attached to the side surface of the second electrode 50 as indicated by the arrow AR. This foreign matter is composed of tungsten oxide, for example. These foreign matters are considered to be generated due to impure gas present in the internal space S1 in the housing 10. These foreign matters may hinder the operation of the light-emitting envelope 1A, so it is necessary to suppress them.

[0132] 34(a) to 34(c) are photographs showing the ninth sample immediately after the start of operation, after 260 hours, and after 670 hours, respectively. The ninth sample corresponds to a configuration in which the getter section 101 is not provided in the light-emitting envelope 1A. As shown in FIG. 34(a), no foreign matter was attached to the first electrode 40 and the second electrode 50 immediately after the start of operation. As shown by the arrows AR in FIG. 34(b) and FIG. 34(c), foreign matter was attached to the first electrode 40 and the second electrode 50 after 260 hours and 670 hours had passed.

[0133] 35 to 37 are photographs showing the tenth sample immediately before the start of operation, immediately after the start of operation, and after 165 hours have passed, respectively. In FIG. 35 to FIG. 37, the first window portion 20 is shown. In FIG. 35(a), the focus is on the first window member 21, in FIG. 35(b), the focus is on the first electrode 40 and the second electrode 50, and in FIG. 35(c), the focus is on the support member 120. This is the same for FIG. 36 and FIG. 37. The tenth sample corresponds to the luminous envelope 1A. As shown in FIG. 35 to FIG. 37, even after 165 hours have passed since the start of operation, the opacification phenomenon did not occur in the first window member 21, and no foreign matter was attached to the first electrode 40 and the second electrode 50.

[0134] 38 to 40 are photographs showing the 11th sample immediately before the start of operation, immediately after the start of operation, and after 165 hours have passed, respectively. FIG. 41 to FIG. 43 are photographs showing the 12th sample immediately before the start of operation, immediately after the start of operation, and after 165 hours have passed, respectively. FIG. 38 to FIG. 43 show the second window portion 30. In FIG. 38(a), the focus is on the second window member 31. In FIG. 38(b), the first electrode 40 and the second electrode 50 are photographed through the second window member 31, and the focus is on the first electrode 40 and the second electrode 50. These points are the same for FIG. 39 to FIG. 44. The 11th sample and the 12th sample correspond to the luminous envelope 1A. As shown in FIG. 38 to FIG. 43, in both the 11th sample and the 12th sample, even after 165 hours have passed since the start of operation, the opacification phenomenon did not occur in the second window member 31, and no foreign matter was attached to the first electrode 40 and the second electrode 50.

[0135] Fig. 44(a) is a photograph showing the 13th sample immediately after the start of operation, and Fig. 44(b) is a photograph showing the 13th sample after 262 hours have passed. The 13th sample corresponds to the luminous envelope 1A. As shown in Fig. 44, even after 165 hours had passed since the start of operation, no foreign matter was found to be attached to the first electrode 40 and the second electrode 50.

[0136] From the above results, it is understood that the provision of getter section 101 makes it possible to suppress the occurrence of the opacifying phenomenon and the occurrence of foreign matter within housing 10.

[0137] As described above, in the luminous envelope 1A, the getter section 101 having the getter material 110 is disposed in the irradiation region RG of the first light L1 in the case 10. Thereby, the getter material 110 can be heated and activated by irradiation with the first light L1, and the activated getter material 110 can adsorb the impurity gas present in the internal space S1. As a result, the occurrence of defects caused by the impurity gas can be suppressed. In addition, since the getter material 110 is heated and activated by irradiation with the first light L1, it is possible to suppress the heating of members other than the getter section 101, for example, the case 10. As a result, for example, the occurrence of defects caused by a rise in temperature of the case 10 (for example, leakage of the luminous gas GS, etc.) can be suppressed. Therefore, the luminous envelope 1A can improve the lifespan.

[0138] The getter section 101 has a support member 120 that supports the getter material 110. This makes it possible to indirectly heat the getter material 110 via the support member 120, for example, and to prevent the getter material 110 from being excessively heated.

[0139] Getter portion 101 is arranged so that getter material 110 faces the opposite side to first window portion 20. This allows support member 120 to function as an adhesion prevention plate, and makes it possible to prevent scattered (sputtered) getter material 110 from moving toward first window portion 20 and adhering to first window portion 20, etc.

[0140] The getter section 101 is disposed so that the first light L1 is irradiated onto the support member 120. This allows the getter material 110 to be indirectly heated via the support member 120, and makes it possible to prevent the getter material 110 from being excessively heated.

[0141] The melting point of the support member 120 is higher than the melting point of the getter material 110. This makes it possible to prevent the support member 120 from being damaged by heating caused by the irradiation of the first light L1.

[0142] The thermal conductivity of the support member 120 is higher than the thermal conductivity of the getter material 110. This allows the getter portion 101 to be heated efficiently via the support member 120.

[0143] The getter section 101 is disposed so that the getter material 110 faces the inner surface 10a of the housing 10, which faces the first window section 20. This allows the scattered getter material 110 to adhere to the inner surface 10a. The getter material 110 adhered to the inner surface 10a can be heated and activated again by the first light L1. As a result, the impurity gas can also be adsorbed by the getter material 110 adhered to the inner surface 10a.

[0144] The getter section 101 is disposed so as to define a space S2 between itself and the inner surface 10a of the housing 10. This allows the scattered getter material 110 to be contained within the space S2, and prevents the getter material 110 from adhering to other members.

[0145] The getter portion 101 is disposed in the internal space S1 between the generation position of the second light L2 (intersection C of the first optical axis A1 and the second optical axis A2) and the sealing hole 16 (exhaust hole). During the manufacture of the luminescent envelope 1A, gas may be generated from the getter material 110, but according to the luminescent envelope 1A, the gas can be easily exhausted to the outside through the sealing hole 16.

[0146] A distance D1 from the getter material 110 to the generation position of the second light L2 is longer than a distance D2 from the generation position of the second light L2 to the first window portion 20. This makes it possible to prevent the getter material 110 from being excessively heated.

[0147] The getter material 110 is configured as a non-evaporable type. In this case, it is possible to suppress the occurrence of problems caused by impurity gases and to improve the life of the light-emitting envelope 1A. The amount of the non-evaporable getter material 110 may be determined in consideration of the degree of vacuum, life, etc. of the light-emitting envelope 1A.

[0148] The second window portion 30 has a second window member 31 made of a material containing diamond. In this case, light in a wide wavelength range including ultraviolet light can pass through. In addition, foreign matter containing carbon is likely to be generated as a defect caused by impure gas, but the luminous envelope 1A can suppress the generation of foreign matter even in such a case.

[0149] The housing 10 is made of a metal material. In this case, the pressure of the luminous gas GS can be increased, and the intensity of the second light L2 emitted from the second window 30 can be increased. As described above, impure gas is likely to be present in the internal space S1, but the luminous envelope 1A can suppress the occurrence of problems caused by impure gas even in such a case.

[0150] The luminous envelope 1A includes a first electrode 40 and a second electrode 50 that face each other across the generation position of the second light L2. In this case, plasma can be generated more reliably. Furthermore, although foreign matter caused by impure gas is likely to be generated on the first electrode 40 and the second electrode 50, the luminous envelope 1A can suppress the generation of foreign matter on the first electrode 40 and the second electrode 50.

[0151] The pressure of the luminous gas GS enclosed in the housing 10 is 3 MPa or more. In this case, as described above, the brightness of the plasma generated in the luminous gas GS can be increased, and the intensity of the second light L2 emitted from the second window portion 30 can be increased. On the other hand, impurity gas is likely to be present in the housing 10. In this regard, according to the luminous envelope 1A, even in such a case, the occurrence of problems caused by impurity gas can be suppressed.

[0152] The driving method of the luminous envelope 1A according to the second embodiment includes a step of activating the getter material 110 by irradiation with the first light L1, and a step of generating plasma in the luminous gas GS and emitting the second light L2. In this driving method, the getter material 110 can be heated and activated by irradiation with the first light L1, and the activated getter material 110 can adsorb the impurity gas present in the internal space S1. As a result, the occurrence of defects caused by the impurity gas can be suppressed, and the life of the luminous envelope 1A can be improved.

[0153] As in the fifth modified example shown in FIG. 45, the getter material 110 may be fixed on the inner surface of the housing 10. In FIG. 45, the getter material 110 is hatched for ease of understanding. In the fifth modified example, the getter section 101 has only the getter material 110 and does not have a support member 120 or the like. The inner surface of the housing 10 has a cylindrical inner circumferential surface 10b extending with a straight line parallel to the first optical axis A1 of the first light L1 as the center line. The getter material 110 is fixed on the inner circumferential surface 10b. The getter material 110 extends along the circumferential direction so as to form a cylindrical shape (annular belt shape) as a whole, but may have a gap (a gap) in a part in the circumferential direction. In the fifth modified example, the getter material 110 is also arranged in the irradiation region RG of the first light L1. More specifically, the getter material 110 is disposed so that the skirt of the first light L1, which is a laser beam, is incident on the getter material 110, and is directly heated by irradiation with the first light L1.

[0154] In the fifth modified example, as in the second embodiment, the occurrence of defects caused by impure gases can be suppressed, and the life of the light-emitting envelope 1A can be improved. In addition, the getter material 110 can be heated using the tail of the first light L1, which is a laser beam. Therefore, the occurrence of defects caused by impure gases can be suppressed while suppressing the getter material 110 from being excessively heated.

[0155] In the sixth modified example shown in FIG. 46, the getter material 110 is configured as an evaporation type (deposition type). The evaporation type getter material 110 is formed of a material containing barium, for example. When the evaporation type getter material 110 is heated and activated, at least a part of it evaporates (barium is ejected). The evaporated getter material 110 is deposited on the inner surface 10a of the housing 10. The deposited getter material 110 constitutes an adsorption surface for impurity gases. When the light-emitting envelope 1A starts to be driven, the getter material 110 is heated by irradiation with the first light L1 and deposited on the inner surface 10a. Thereafter, plasma is generated and a part of the first light L1 is absorbed by the plasma, thereby mitigating the heating of the getter material 110 and stopping the deposition. Since the getter material 110 is heated and a new adsorption surface is formed every time the light-emitting envelope 1A is driven, the adsorption surface can be kept in a good condition every time the light-emitting envelope 1A is driven. In the sixth modified example, as in the second embodiment, the occurrence of defects caused by impure gas can be suppressed, and the life of the light-emitting envelope 1A can be improved. The amount of the evaporative getter material 110 can be determined in consideration of the degree of vacuum and life of the light-emitting envelope 1A, and it is not necessary to set the amount so that the getter material 110 is heated and a new adsorption surface is formed every time the envelope 1A is driven. For example, the getter material 110 may be heated and a new adsorption surface is formed only during the first drive and several drives thereafter, when the amount of release of the impure gas is thought to be particularly large. In this case, the support member 120 without the getter material 110 has the effect of shielding and protecting the getter material 110 evaporated on the inner surface 10a of the housing 10 from the first light L1.

[0156] As another modification, in the second embodiment, the getter material 110 may be disposed in any position other than the above-mentioned position as long as it is disposed within the irradiation region RG of the first light L1. At least a part of the getter material 110 may be disposed within the irradiation region RG. For example, the support member 120 may be disposed within the irradiation region RG, while the getter material 110 may be disposed outside the irradiation region RG. The getter material 110 may be disposed so as to face the first window portion 20. In this case, the getter material 110 is directly heated by the irradiation of the first light L1. The distance D1 from the getter material 110 to the generation position of the second light L2 may be shorter than the distance D2 from the generation position of the second light L2 to the first window portion 20. In this case, the getter material 110 can be efficiently heated by the irradiation of the first light L1. In the luminous envelope 1A of the second embodiment, a protective layer 80 may be formed on the second window member 31. In this case, the occurrence of the opacification phenomenon can be further suppressed. The materials of the getter material 110 and the support member 120 are not limited to the above examples, and may be made of any material.

[0157] The present invention is not limited to the above-mentioned embodiment and modified examples. For example, the material and shape of each component are not limited to the above-mentioned material and shape, and various materials and shapes can be adopted. The shapes of the first opening 12, the second opening 13, the first window member 21, and the second window member 31 are not limited to a circular plate shape, and may be various shapes. In the above-mentioned example, two second openings 13 are formed, but only one second opening 13 may be formed, or three or more second openings 13 may be formed. As described above, the first light L1 may enter and the second light L2 may exit through one opening formed in the housing 10. The material constituting the housing 10 does not necessarily have to be a metal material, and may be an insulating material, such as ceramic. The first electrode 40 and the second electrode 50 may be omitted. Even in this case, plasma can be generated at the focus by irradiating the condensed first light L1 to the light emitting gas GS.

[0158] The first window member 21 may be made of diamond, and the second window member 31 may be made of sapphire. Alternatively, both the first window member 21 and the second window member 31 may be made of sapphire or diamond. When ultraviolet light is used, the first window member 21 and / or the second window member 31 may be made of magnesium fluoride or quartz. The first window member 21 and / or the second window member 31 may be made of Kovar glass. The first window member and the second window member may be configured to be the same window member. That is, the first light L1 and the second light L2 may be configured to pass through the same window member. The first window member, the second window member, and the housing 10 may be integrally formed of a light-transmitting material. In this case, the region of the light-transmitting region of the housing 10 through which the first light L1 passes can be regarded as the first window member (first window portion), and the region through which the second light L2 passes can be regarded as the second window member (second window portion). When the first window member 21 is made of diamond, a protective layer 80 may be formed on the surface (second main surface 21b) of the first window member 21 on the side of the internal space S1. The protective layer 80 may not be formed on the second window member 31. The bonding material 25 may be titanium-doped silver solder. The second end 17b of the sealing tube 17 may not be covered by the covering member 91 and the capping member 92. That is, at least one of the covering member 91 and the capping member 92 may be omitted. In this specification, "A and / or B" means "at least one of A and B." [Explanation of symbols]

[0159] 1, 1A... luminous envelope, 10... housing, 17... sealing tube, 17a... first end, 17b... second end, 91... covering member, 92... cap member, GS... luminous gas, S1... internal space.

Claims

1. a housing that contains a light-emitting gas in an internal space and into which a laser beam is incident to maintain plasma generated in the light-emitting gas; an enclosure tube having a first end and a second end, the first end being connected to the interior space; the second end of the sealing tube is sealed by being crushed; the second end of the sealing tube is covered with a coating member made of an inorganic material, The covering member is covered with a cap member made of a metallic material.

2. The luminous envelope of claim 1 , wherein the thermal expansion coefficient of the covering member is greater than the thermal expansion coefficient of the sealing tube.

3. The luminescent envelope according to claim 1 or 2, wherein the hardness of the cap member is greater than the hardness of the sealing tube.

4. The luminescent envelope according to any one of claims 1 to 3, wherein the covering member is made of a thermoplastic material.

5. The luminous envelope according to any one of claims 1 to 4, wherein the covering member is made of solder.

6. The luminous envelope according to any one of claims 1 to 5, wherein the cap member is made of brass.

7. 7. The luminescent envelope according to claim 1, wherein the pressure of the luminescent gas sealed in the case is 3 MPa or more.

8. A luminescent envelope according to any one of claims 1 to 7; a light introducing portion that introduces the laser light into the housing.

Images