A liquid metal bearing vacuum potting equipment

Abstract

The present invention relates to a liquid metal bearing vacuum potting equipment applied to the field of bearing vacuum potting technology, comprising a vacuum chamber, an airtight container, a vacuum pump and a gas cylinder assembly, wherein an electric control valve 1 and an electric control valve 2 are respectively installed on the vacuum chamber; an electric control valve 3 and an electric control valve 4 are respectively arranged on the top of the airtight container, and a weight sensor 1 is arranged on the bottom of the airtight container; the output ends of the vacuum pump and the gas cylinder assembly are both connected with the electric control valve 4 through a pipeline, and the above structure is adopted, so that the potting process is also carried out in a vacuum environment, thereby improving the potting quality of the liquid metal, and the equipment can automatically judge whether the filling channel is filled with liquid metal, timely control the airtight container to stop the potting of the liquid, and use negative pressure to inject the liquid metal into the filling channel of the bearing body, thereby further ensuring that the gas is not easy to enter the pipeline and the bearing body, thereby improving the quality of the liquid metal bearing.

Description

Technical Field

[0001] The invention relates to a sealing device, in particular to a liquid metal bearing vacuum sealing device applied in the technical field of bearing vacuum sealing. Background Art

[0002] The X-ray tube is the core component for generating X-rays in industrial CT. Its main working principle is that the cathode emits electrons to bombard the anode surface. The energy of the electron bombardment causes the electron energy level outside the nucleus of the anode target material to transition to produce X-rays. About 1% of the energy of the electrons emitted by the cathode will be converted into ray energy, and the remaining 99% will be converted into heat. Therefore, in order to avoid the anode material melting due to the long-term bombardment of electrons at the same position, a motor is usually used to drive the bearing to keep the anode rotating so that the electron bombardment position changes continuously. Liquid metal bearings are a type of anode rotating bearing commonly used in the industry, with the advantages of long life and low vibration. Liquid metal is filled between the stator and the rotor as a lubricant to play a role in heat dissipation, lubrication and support.

[0003] The bearing is inside the X-ray tube, and the working environment is vacuum. In order to fully exhaust and obtain a vacuum environment, the X-ray tube will heat the ambient temperature and use a vacuum pump to extract gas to obtain a high vacuum during production. Usually, the heating temperature will reach above 450°C, and the vacuum degree can reach 10 -7 Pa / m 3 Magnitude.

[0004] In the prior art, Figure 1 As shown, the liquid metal bearing structure is that the bearing rotor is arranged on the outer ring of the bearing stator, the output end of the bearing rotor is installed with a target plate, and a long channel for filling liquid metal, namely, a filling channel, is arranged at the gap between the bearing rotor and the bearing stator. Liquid metal is injected through the filling port at the end of the filling channel, and an anti-overflow port is arranged at the other end of the filling channel, which can store a certain amount of liquid metal to prevent liquid metal from overflowing from the gap between the stator and the rotor; due to the slender filling channel, it is very easy for air to be retained in the slender filling channel of the bearing due to the liquid pressure obstruction during the exhaust process. When the bearing rotates at high speed, the rotor drives the liquid metal to flow. If there is residual air inside, the liquid metal will leak from the bearing under the combined action of the internal and external pressure difference and the movement of the rotor, reducing the bearing performance and even causing the bearing to fail. Summary of the invention

[0005] In view of the above-mentioned prior art, the technical problem to be solved by the present invention is that when liquid metal is injected into the bearing, it is very easy for air to be retained in the slender filling channel of the bearing due to the liquid pressure obstruction during the exhaust process. When the bearing rotates at high speed, the rotor drives the liquid metal to flow. If there is residual air inside, the liquid metal will leak from the bearing under the combined action of the internal and external air pressure difference and the rotor movement, thereby reducing the bearing performance and even causing the bearing to fail.

[0006] In order to solve the above problems, the present invention provides a liquid metal bearing vacuum potting device, comprising:

[0007] The vacuum chamber is used to place the bearing body. The vacuum chamber is respectively installed with an electric control valve 1 and an electric control valve 2. The other end of the electric control valve 1 is connected to a mechanical pump through a pipeline.

[0008] An airtight container, the airtight container is filled with liquid metal, an electric control valve 3 and an electric control valve 4 are respectively arranged on the top of the airtight container, the electric control valve 3 is connected with the electric control valve 2 through a connecting pipe, the output end of the electric control valve 2 is extended to the tank sealing end on the bearing body through a degassing pipe, and the input end of the electric control valve 3 is extended to the bottom of the airtight container through a pipe, and a weight sensor 1 is arranged at the bottom of the airtight container;

[0009] The vacuum pump and the gas cylinder assembly, the output ends of the vacuum pump and the gas cylinder assembly are connected to the four-phase electric control valve through pipelines.

[0010] In the above-mentioned liquid metal bearing vacuum filling equipment, the filling process is also carried out in a vacuum environment, which improves the filling quality of the liquid metal. It can automatically determine whether the filling channel is full of liquid metal, and promptly control the airtight container to stop filling the liquid. The liquid metal is injected into the filling channel of the bearing body using negative pressure, further ensuring that the gas is not easy to enter the pipeline and the bearing body, thereby improving the quality of the liquid metal bearing.

[0011] As a further improvement of the present application, an intelligent sealer is provided on the vacuum chamber, and the intelligent sealer is arranged on the vacuum chamber. The intelligent sealer is provided with a vacuum control module, a perfusion module and a perfusion detection module. The vacuum control module is electrically connected to the perfusion module, the mechanical pump, the electronically controlled valve one, the electronically controlled valve two, the electronically controlled valve three, the electronically controlled valve four and the vacuum pump respectively, the perfusion module is electrically connected to the perfusion detection module, the electronically controlled valve two, the electronically controlled valve three, the gas cylinder assembly and the electronically controlled valve four respectively, and the perfusion detection module is electrically connected to the weight sensor one.

[0012] As a further improvement of the present application, a receiving cavity is provided in the middle of the degassing pipe, and the end of the degassing pipe is sealed and connected to the tank seal on the bearing body.

[0013] As a further improvement of the present application, an air pressure sensor 1 is installed in the inner cavity of the airtight container, an air pressure sensor 2 is installed in the inner cavity of the vacuum chamber, and the vacuum control module is electrically connected to the air pressure sensor 1 and the air pressure sensor 2 respectively.

[0014] As another improvement of the present application, a second weight sensor is provided at the bottom of the bearing body, and the filling detection module is electrically connected to the second weight sensor.

[0015] As another improved supplement of the present application, it also includes an overflow detection head, which includes a detection shell connected to the top of the vacuum chamber through a rope, an electromagnetic sensor installed inside the detection shell, and a detection probe arranged corresponding to the sealing port on the bearing body. The top of the detection probe passes through the detection shell and is installed with the electromagnetic sensor, and the electromagnetic sensor is electrically connected to the perfusion detection module.

[0016] As another improvement supplement of the present application, a baffle plate is arranged on the upper surface of the liquid metal in the inner cavity of the airtight container, a distance sensor facing the baffle plate is installed on the top of the inner cavity of the airtight container, a pipeline located at the three input ends of the electric control valve passes through the baffle plate, and a container detection module is also arranged on the intelligent filler, and the container detection module is electrically connected to the filling module and the distance sensor respectively.

[0017] As another improvement of the present application, a connecting pipe is installed on the blocking plate, an electrically controlled valve five is installed on the connecting pipe, and the electrically controlled valve five is electrically connected to the container detection module.

[0018] In summary, by placing the bearing body in a vacuum environment, the gas mixing into the liquid metal during the liquid metal infusion process is reduced, the quality of the bearing is improved, and the filling channel of the bearing body and the airtight container are evacuated. The air in the filling channel of the bearing body, the degassing pipe and the connecting pipe will also be discharged during the vacuum, reducing the gas residue in the liquid metal injection mechanism, so that the infusion process is also carried out in a vacuum environment, thereby improving the infusion quality of the liquid metal. By measuring the overall weight of the airtight container before and after the infusion through a weight sensor, the amount of liquid metal injected into the filling channel of the bearing body can be determined, thereby determining whether there is liquid metal in the filling channel. Whether it is filled with liquid metal, the airtight container is promptly controlled to stop filling the liquid. During filling, the nitrogen in the gas cylinder assembly is filled into the inner cavity of the airtight container through the electric control valve four. Due to the increase in the air pressure in the inner cavity of the airtight container, the liquid metal will be squeezed to the electric control valve three through the pipeline, and injected into the filling channel of the bearing body through the connecting pipeline and the degassing pipe, so that the gas is not easy to enter the pipeline and the bearing body during the filling process, and when the weight sensor 1 detects that the injected liquid metal reaches the preset value, the airtight container is controlled to be vacuumed again to better preserve the liquid metal, and the inner cavity of the vacuum chamber is filled with air, and the bearing body after filling is taken out. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of a liquid metal bearing structure;

[0020] Figure 2 This is an overall schematic diagram of the first and second implementation modes of the present application;

[0021] Figure 3 This is an overall schematic diagram of the first and second embodiments of the present application. Figure 2 ;

[0022] Figure 4 This is a schematic diagram of the connection between the airtight container and the gas cylinder assembly of the first and second embodiments of the present application;

[0023] Figure 5 This is a control principle diagram of the intelligent potting device according to the first embodiment of the present application;

[0024] Figure 6 This is a schematic diagram of an overflow detection head according to a second embodiment of the present application;

[0025] Figure 7 This is a schematic diagram of the interior of an airtight container according to a second embodiment of the present application;

[0026] Figure 8 This is a control schematic diagram of the intelligent potting device according to the second embodiment of the present application.

[0027] Description of the numbers in the figure:

[0028] 1. Bearing body; 2. Filling channel; 3. Vacuum chamber; 4. Electric control valve 1; 5. Electric control valve 2; 6. Mechanical pump; 7. Airtight container; 8. Weight sensor 1; 9. Electric control valve 3; 10. Electric control valve 4; 11. Vacuum pump; 12. Gas cylinder assembly; 13. Connecting pipe; 14. Degassing pipe; 15. Overflow detection head; 16. Air pressure sensor 1; 17. Air pressure sensor 2; 18. Weight sensor 2; 19. Connecting pipe; 20. Electric control valve 5; 21. Blocking plate; 22. Distance sensor; 23. Detection shell; 24. Detection probe; 25. Electromagnetic sensor. DETAILED DESCRIPTION

[0029] Two implementation modes of the present application are described in detail below with reference to the accompanying drawings.

[0030] The first implementation method:

[0031] Figure 2-Figure 5A liquid metal bearing vacuum filling equipment is shown, including a vacuum chamber 3, an airtight container 7, a vacuum pump 11 and a gas cylinder assembly 12. The vacuum chamber 3 is used to place a bearing body 1. An electric control valve 1 4 and an electric control valve 2 5 are respectively installed on the vacuum chamber 3. The other end of the electric control valve 1 4 is connected to a mechanical pump 6 through a pipeline. The bearing body 1 to be filled with liquid metal is placed in the vacuum chamber 3. The mechanical pump 6 works to evacuate the inner cavity of the vacuum chamber 3 into a vacuum state, and the bearing body 1 is placed in a vacuum environment, thereby reducing the mixing of gas into the liquid metal during the liquid metal filling process and improving the quality of the bearing. The inner cavity of the vacuum chamber 3 is evacuated into a vacuum state by controlling the electric control valve 1 4 to open and the mechanical pump 6 to work. The gas cylinder assembly 12 can be filled with nitrogen and other gases that are not easy to react with liquid metal.

[0032] In addition, the airtight container 7 is filled with liquid metal, and an electric-controlled valve three 9 and an electric-controlled valve four 10 are respectively arranged on the top of the airtight container 7. The electric-controlled valve three 9 is connected with the electric-controlled valve two 5 through a connecting pipe 13, and the output end of the electric-controlled valve two 5 is extended to the tank seal on the bearing body 1 through a degassing pipe 14, so as to facilitate the extraction of gas in the filling channel 2 of the bearing body 1, so that the inner cavity forms a vacuum state, and reduces the mixing of gas when injecting liquid metal, thereby improving the injection quality. The input end of the electric-controlled valve three 9 is extended to the bottom of the airtight container 7 through a pipe, and a weight sensor one 8 is arranged at the bottom of the airtight container 7. The output ends of the vacuum pump 11 and the gas cylinder assembly 12 are connected with the electric-controlled valve four 10 through a pipe. Before injecting liquid metal, the bearing body also needs to be cleaned. The filling channel 2 and the airtight container 7 of the bearing body 1 are evacuated, and the airtight container 7 is evacuated by opening the electric control valve 2 5, the electric control valve 3 9 and the electric control valve 4 10, and controlling the vacuum pump 11 to operate. At the same time, the air in the filling channel 2 of the bearing body 1 and the degassing pipe 14 and the connecting pipe 13 will be discharged during the evacuation, thereby reducing the gas residue in the injection mechanism of the liquid metal, so that the filling process is also carried out in a vacuum environment, thereby improving the filling quality of the liquid metal. The overall weight of the airtight container 7 before and after the filling is measured by the weight sensor 8, so as to judge the amount of liquid metal injected into the filling channel 2 of the bearing body 1, thereby judging whether the filling channel 2 is full of liquid metal, and timely controlling the airtight container 7 to stop the filling of the liquid metal.

[0033] During the infusion, the mechanical pump 6 and the vacuum pump 11 are stopped and the electric control valve 4 is closed. At this time, the nitrogen in the gas cylinder assembly 12 is filled into the inner cavity of the airtight container 7 through the electric control valve 4 10. As the air pressure in the inner cavity of the airtight container 7 increases, the liquid metal will be squeezed through the pipeline to the electric control valve 3 9, and injected into the filling channel 2 of the bearing body 1 through the connecting pipeline 13 and the degassing pipe 14, so that the gas is not easy to enter the pipeline and the bearing body 1 during the infusion process, and when the weight sensor 8 detects that the injected liquid metal reaches the preset value, the airtight container 7 is controlled to be evacuated again to facilitate the better preservation of the liquid metal, and the inner cavity of the vacuum chamber 3 is filled with air, and the bearing body 1 after the infusion is taken out.

[0034] It is worth mentioning that the vacuum chamber 3 is provided with an intelligent filler, which is arranged on the vacuum chamber 3. The intelligent filler is provided with a vacuum control module, a filling module and a filling detection module. The vacuum control module is electrically connected to the filling module, the mechanical pump 6, the electric control valve 1 4, the electric control valve 2 5, the electric control valve 3 9, the electric control valve 4 10 and the vacuum pump 11 respectively. The filling module is electrically connected to the filling detection module, the electric control valve 2 5, the electric control valve 3 9, the gas cylinder assembly 12 and the electric control valve 4 10 respectively. The filling detection module is electrically connected to the weight sensor 1 8. When filling, When the vacuum chamber 3 is evacuated, the vacuum control module controls the electric control valve 1 4 to open and the mechanical pump 6 to operate, and the vacuum chamber 3 is evacuated. At the same time, the vacuum pump 11 is operated and the electric control valve 2 5, the electric control valve 3 9 and the vacuum pump 11 are opened to evacuate the airtight container 7, the degassing pipe 14, the connecting pipe 13 and the filling channel 2 of the bearing body 1 to reduce the residual gas. The weight sensor 1 8 sends the weight data of the airtight container 7 to the filling detection module, and the filling detection module records the initial value of the airtight container 7. After the vacuum operation is completed, the vacuum control module controls the mechanical pump 6 and the vacuum pump 11 to operate and the electric control valve 2 5, the electric control valve 3 9 and the vacuum pump 11 are opened to evacuate the airtight container 7, the degassing pipe 14, the connecting pipe 13 and the filling channel 2 of the bearing body 1 to reduce the residual gas. The pump 11 stops working and controls the electric control valve 4 to close. At the same time, the vacuum control module sends a filling signal to the filling module. The filling module controls the gas cylinder assembly 12 to open and introduce the gas into the inner cavity of the airtight container 7. The liquid metal is gradually injected into the filling channel 2 of the bearing body 1. The filling detection module compares the weight data fed back by the weight sensor 8 with the initial value of the airtight container 7. When the injected liquid metal reaches the preset value (the filling detection module is preset with the corresponding liquid metal value in the filling channel 2 in the bearing body 1), the filling detection module sends an injection amount reaching signal to the filling module. The filling module controls the gas cylinder assembly 12 to stop filling gas and controls the electric control valve 2 5, the electric control valve 3 9 and the electric control valve 4 10 to be closed. At the same time, the filling module sends a liquid metal preservation signal to the vacuum control module. At this time, the vacuum control module controls the electric control valve 3 9 and the electric control valve 4 10 to open, evacuate the airtight container 7 and allow the liquid metal in the connecting pipe 13 to flow back into the airtight container 7. After the vacuuming is completed, the vacuum pump 11 is controlled to stop working and the electric control valve 3 9 and the electric control valve 4 10 are closed, so as to achieve the purpose of automatic filling and automatically preserve the unused liquid metal.

[0035] In this implementation, see Figure 2 A accommodating cavity is provided in the middle of the degassing pipe 14, and the end of the degassing pipe 14 is sealed and connected to the tank seal on the bearing body 1. By providing the accommodating cavity in the middle of the degassing pipe 14, the degassing pipe 14 can be used to store trace amounts of undischarged bubbles and better discharge the gas from the filling channel 2.

[0036] Also, see Figure 3-Figure 5The inner cavity of the airtight container 7 is installed with an air pressure sensor 16, and the inner cavity of the vacuum chamber 3 is installed with an air pressure sensor 2 17. The vacuum control module is electrically connected to the air pressure sensor 16 and the air pressure sensor 2 17 respectively. The air pressure values ​​of the corresponding airtight container 7 and the inner cavity of the vacuum chamber 3 can be detected in real time through the air pressure sensor 16 and the air pressure sensor 2 17, and fed back to the vacuum control module. The vacuum control module more accurately controls the vacuum chamber 3 and the airtight container 7. The bottom of the bearing body 1 is provided with a weight sensor 2 18, and the perfusion detection module is electrically connected to the weight sensor 2 18. The weight of the bearing body 1 before and after the liquid metal is poured can be measured by the weight sensor 18, and the weight of the liquid metal injected into the bearing body 1 can be obtained by comparing the weight difference before and after, so that the measurement result is more accurate, and the pouring detection module compares the weight difference before and after the pouring of the airtight container 7 detected by the weight sensor 1 8 with the weight difference before and after the pouring detected by the weight sensor 2 18. When the difference between the two exceeds the weight threshold (the maximum value of the difference between the two is preset in the pouring detection module), the pouring detection module determines that liquid metal leakage has occurred, and reminds the operator to deal with the equipment problem in time.

[0037] The second implementation method:

[0038] Figure 6-Figure 8 A liquid metal bearing vacuum potting device is shown. Different from the first embodiment, the vacuum potting device also includes an overflow detection head 15. The overflow detection head 15 includes a detection shell 23 connected to the top of the vacuum chamber 3 through a rope, an electromagnetic sensor 25 installed inside the detection shell 23, and a detection probe 24 arranged corresponding to the potting port on the bearing body 1. The top of the detection probe 24 passes through the detection shell 23 and is installed with the electromagnetic sensor 25. The electromagnetic sensor 25 is electrically connected to the filling detection module. When liquid metal is injected into the filling channel 2 of the inner cavity of the bearing body 1, in order to be more intuitive In order to understand whether the liquid metal completely fills the filling channel 2, an overflow detection head 15 is set at the filling port of the filling channel 2. When the liquid metal fills the filling channel 2, it will contact the overflow detection head 15, and the lower end of the detection probe 24 is inserted into the filling port. At this time, after the detection probe 24 contacts the liquid metal, the electromagnetic sensor 25 detects the metal signal and feeds it back to the filling detection module. The filling detection module can determine that the filling is completed, and can determine the filling status in combination with the weight data fed back by the weight sensor 8, so that the liquid metal solution filling operation is more accurate and the quality of the produced liquid metal bearings is improved.

[0039] It is worth mentioning that see Figure 7 and Figure 8The inner cavity of the airtight container 7 is located on the upper surface of the liquid metal, and a baffle plate 21 is arranged. A distance sensor 22 facing the baffle plate 21 is installed on the top of the inner cavity of the airtight container 7. The pipeline located at the input end of the electric control valve 3 9 penetrates the baffle plate 21. The intelligent filler is also provided with a container detection module, which is electrically connected to the filling module and the distance sensor 22 respectively. When the liquid metal in the airtight container 7 is gradually injected into the bearing body 1, the liquid metal capacity in the airtight container 7 is gradually reduced, and the baffle plate 21 is gradually pressed down. The distance sensor 22 detects the downward movement distance of the baffle plate 21 and feeds back to the container detection module. The container detection module determines the liquid metal in the airtight container 7. The usage amount can be adjusted, and an early warning can be given in time when the usage amount reaches the minimum value, so as to avoid the gas in the gas cylinder assembly 12 from being injected into the bearing body 1, causing bearing damage and reducing production losses. By setting the baffle plate 21, the reaction between the gas in the gas cylinder assembly 12 and the liquid metal can be reduced, so that the liquid metal is not easy to deteriorate. A connecting pipe 19 is installed on the baffle plate 21, and an electric control valve 5 20 is installed on the connecting pipe 19. The electric control valve 5 20 is electrically connected to the container detection module. When new liquid metal needs to be added, the electric control valve 5 20 is opened to allow new liquid metal to be injected through the connecting pipe 19, and the changes in the liquid metal caused by the reaction with air during storage can be reduced, so that it can be better preserved.

[0040] In view of current practical needs, the above-mentioned implementation mode adopted in this application is not limited to the scope of protection. Various changes made within the knowledge scope of technical personnel in this field without departing from the concept of this application still fall within the scope of protection of the present invention.

Claims

1. A liquid metal bearing vacuum potting equipment, characterized in that: include: A vacuum chamber (3) is used to place the bearing body (1), and an electric control valve 1 (4) and an electric control valve 2 (5) are respectively installed on the vacuum chamber (3), and the other end of the electric control valve 1 (4) is connected to a mechanical pump (6) through a pipeline; An airtight container (7), wherein the airtight container (7) is filled with liquid metal, and an electric control valve three (9) and an electric control valve four (10) are respectively arranged on the top of the airtight container (7), wherein the electric control valve three (9) is connected to the electric control valve two (5) through a connecting pipe (13), and the output end of the electric control valve two (5) extends to the tank seal on the bearing body (1) through a degassing pipe (14), and the input end of the electric control valve three (9) extends to the bottom of the airtight container (7) through a pipe, and a weight sensor one (8) is arranged at the bottom of the airtight container (7); A vacuum pump (11) and a gas cylinder assembly (12), wherein the output ends of the vacuum pump (11) and the gas cylinder assembly (12) are both connected to an electric control valve four (10) through a pipeline.

2. The liquid metal bearing vacuum potting equipment according to claim 1, characterized in that: The vacuum chamber (3) is provided with an intelligent filler, and the intelligent filler is arranged on the vacuum chamber (3). The intelligent filler is provided with a vacuum control module, a filling module and a filling detection module. The vacuum control module is electrically connected to the filling module, the mechanical pump (6), the electric control valve 1 (4), the electric control valve 2 (5), the electric control valve 3 (9), the electric control valve 4 (10) and the vacuum pump (11) respectively. The filling module is electrically connected to the filling detection module, the electric control valve 2 (5), the electric control valve 3 (9), the gas cylinder assembly (12) and the electric control valve 4 (10) respectively. The filling detection module is electrically connected to the weight sensor 1 (8).

3. The liquid metal bearing vacuum potting equipment according to claim 1, characterized in that: The middle part of the degassing pipe (14) is provided with a receiving cavity, and the end of the degassing pipe (14) is sealedly connected to the tank seal on the bearing body (1).

4. The liquid metal bearing vacuum potting equipment according to claim 2, characterized in that: The inner cavity of the airtight container (7) is installed with an air pressure sensor 1 (16), the inner cavity of the vacuum chamber (3) is installed with an air pressure sensor 2 (17), and the vacuum control module is electrically connected to the air pressure sensor 1 (16) and the air pressure sensor 2 (17) respectively.

5. The liquid metal bearing vacuum potting equipment according to claim 4, characterized in that: A second weight sensor (18) is provided at the bottom of the bearing body (1), and the perfusion detection module is electrically connected to the second weight sensor (18).

6. The liquid metal bearing vacuum potting equipment according to claim 2, characterized in that: The invention also comprises an overflow detection head (15), wherein the overflow detection head (15) comprises a detection shell (23) connected to the top of the vacuum chamber (3) via a rope, an electromagnetic sensor (25) installed inside the detection shell (23), and a detection probe (24) arranged corresponding to the potting port on the bearing body (1), wherein the top of the detection probe (24) passes through the detection shell (23) and is installed with the electromagnetic sensor (25), and the electromagnetic sensor (25) is electrically connected to the perfusion detection module.

7. The liquid metal bearing vacuum potting equipment according to claim 2, characterized in that: The inner cavity of the airtight container (7) is located on the upper surface of the liquid metal and a baffle plate (21) is arranged. A distance sensor (22) facing the baffle plate (21) is installed at the top of the inner cavity of the airtight container (7). A pipeline located at the input end of the electric control valve three (9) passes through the baffle plate (21). The intelligent filler is also provided with a container detection module, and the container detection module is electrically connected to the filling module and the distance sensor (22) respectively.

8. The liquid metal bearing vacuum potting equipment according to claim 7, characterized in that: A connecting pipe (19) is installed on the blocking plate (21), an electrically controlled valve five (20) is installed on the connecting pipe (19), and the electrically controlled valve five (20) is electrically connected to the container detection module.

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