Integral seal for containers

Abstract

The article includes a substrate container for holding one or more substrates or reticles. The substrate container has a housing including one or more sidewalls, a closed end, an open end, and an interior space defined by the one or more sidewalls and the closed end. The container further has a door configured to close the open end of the housing. The door includes a door body having a seal joint. The door body is formed from a door body polymer. The door further includes a seal member integrally formed with the seal joint of the door body.

Description

[Technical field]

[0001] The present disclosure relates generally to containers for semiconductor substrates. More particularly, the present disclosure relates to doors and door frame interfaces for such containers. [Background technology]

[0002] Semiconductor substrates are commonly used during semiconductor manufacturing. Semiconductor substrates undergo a series of manufacturing steps, such as deposition of layers of material, doping, etching, etc. One or more semiconductor substrates may be held, carried, stored, or transported in a container before, during, or after semiconductor manufacturing.

[0003] A variety of containers are used to hold semiconductor substrates, and the substrate containers are desirably sealed when closed and locked into place to keep the substrates clean, uncontaminated, and undamaged. Summary of the Invention

[0004] Some embodiments of the article include a substrate container for holding one or more substrates or reticles. The substrate container has a housing including one or more sidewalls, a closed end, an open end, and an interior space defined by the one or more sidewalls and the closed end. The container further includes a door configured to close the open end of the housing. The door includes a door body having a seal joint. The door body is formed from a door body polymer. The door further includes a seal member integrally formed with the seal joint of the door body.

[0005] Another embodiment can include a method of making a door for closing an open end of a substrate or reticle container housing, the method including insert molding a polymeric seal member onto a periphery of a door body such that the polymeric seal member is integrally formed with the door body.

[0006] The details of one or more embodiments of the disclosure are set forth in the accompanying drawings and description, as well as the claims. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a front perspective view of a container for holding one or more semiconductor substrates. [Diagram 2] FIG. 2 is a front view of the container of FIG. 1 when the container is in an open position. [Diagram 3] FIG. 2 is a top view of the inside surface of the door of the container of FIG. 1. [Figure 4] FIG. 4 is a partial cross-sectional view of the container of FIG. 1 taken along line IV-IV. [Diagram 5] 11 is a partial cross-sectional view of a further embodiment of a container for holding one or more semiconductor substrates. [Figure 6] FIG. 6 is an exploded view of the seal member shown in FIG. 5. [Figure 7] 13 is a partial cross-sectional view of yet a further embodiment of a container for holding one or more semiconductor substrates. [Figure 8] 13 is a partial cross-sectional view of yet another embodiment of a container for holding one or more semiconductor substrates. [Figure 9] 1 is a flow chart illustrating a method of making a container door including an integrally formed seal member. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Like numbers refer to like features.

[0009] As used herein, the term "integral" or "integrally" means that the container door is manufactured such that the seal member or door body is formed in or around an opposing component as a component of the door. The term "integral" or "integrally" does not require that the material of both the door body and the seal member be the same. As used herein, the term "interlock", "interlocked" or "interlocking" refers to a mechanical joining of two structural members that prevents the two structural members from being separated without deforming at least one of the two structural members. As used herein, the term "bond", "bonded" or "bonding" means that the seal member and the door body are in contact with each other when at least one of the two members is formed. As used herein, the term "enlarged" means that the thickness of the edge is greater by substantially the same magnification factor relative to the corresponding dimension of the portion of the object located away from the free end of the edge.

[0010] 1-3, a substrate container 1 can be configured to hold, carry, store, or transport semiconductor substrates during semiconductor manufacturing or other processes. The container 1 can include a housing 10 and a door 30 that can be secured to the housing 10. The door 30 is formed with a seal member 40. Compared to a seal member that is inserted or otherwise assembled into a door groove, such as by a snap or press fit, which can be a source of particle generation, a door formed with an integral seal member can help prevent contamination caused by particles generated during this assembly process. In some embodiments, the integral seal concept can avoid undesirable fluids, such as lubricating fluids used to reduce friction during insertion of the seal member, which can introduce contamination into the container. Additionally, the formation of a seal according to the present disclosure reduces or eliminates particle generation during physical insertion of the seal into the door.

[0011] With reference to FIG. 1, a container 1 can be used to hold one or more semiconductor substrates. The container 1 shown in FIGS. 1-3 is one embodiment of a front opening unified pod (FOUP). In some embodiments, the container can be a semiconductor substrate shipping container. In other embodiments, the container can be a reticle pod. It should be understood that the integrated seal concepts of the present disclosure can be used with other types of containers.

[0012] 1 and 2, the housing 10 has one or more sidewalls 12, a closed end 14, an open end 16 opposite the closed end 14, and an interior space 5 defined by the sidewalls 12 and the closed end 14. The door 30 is configured to couple to the housing 10 and close the open end 16.

[0013] In the embodiment shown in FIGS. 1-3, the door 30 can engage with the open end 16 of the housing 10 to seal the interior space 5. This can prevent the semiconductor substrates held in the container from being contaminated by moisture, dust, and the like from the external environment. The one or more side walls 12 of the housing 10 can be any number, and the arrangement of the side walls forms a continuous wall. The interior space 5 is defined by the one or more side walls 12 and the closed end 14. The housing 10 further comprises a shelf 18 configured to hold the semiconductor substrate. In some embodiments, the container 1 can include one or more ports for selectively supplying one or more fluids to the interior space 5 of the housing 10 or for draining fluids.

[0014] 1, the door 30 is shown in a closed position with a seal formed between the housing 10 and the door 30 by a seal member 40. In the front view of the housing 10 shown in FIG. 2, the door 30 has been removed and the container 1 is in an open position allowing access to the interior space 5 of the housing 10.

[0015] 3 shows a top perspective view of the door 30. The door 30 has a door body 32, an inner surface 22, a seal member 40 that seals the open end 16 of the housing 10, and a latch mechanism 31 that secures the door 30 to the housing 10. When the door 30 is in the closed position shown in FIG. 1, the inner surface 22 of the door 30 is positioned to face the interior space 5.

[0016] 3, the door body 32 has a seal joint 34 at the periphery 21 of the door body 32. The seal joint 34 is integrally formed with the seal member 40, thereby connecting the seal member 40 and the door body 32. It should be understood that the seal joint 34 may be located at other locations on the door body 32 instead of the periphery 21. In some embodiments, the door body 32 may be formed by injection molding.

[0017] In one embodiment, the door body 32 is made from a door body polymer. In one example, the door body polymer comprises a thermoplastic polymer. In a further embodiment, the door body polymer comprises one or more of polycarbonate, cyclic olefin, liquid crystal polymer, polypropylene, polyphenylene sulfide (PPS), polyphenylene sulfone (PPSU), polyetherimide, polyimide, polyamideimide, polyketone, polyethersulfone (PES), polybutylene terephthalate, and polysulfone (PSU, PSF). In an alternative embodiment, the door body polymer may comprise one or more of the polyaryletherketone family of polymers, such as polyaryletherketone (PAEK), polyetheretherketone (PEEK), polyetherketoneketone (PEKK), and polyetherketoneetherketoneketone (PEKEKK).

[0018] 3 and 4, the door body 32 also includes a seal joint 34 of the door body 32. In some embodiments, the seal joint 34 extends along the entire periphery of the door body 32.

[0019] 4, there is shown a partial cross-sectional view of the container 1 taken along line IV-IV of FIG. A A cross section of the housing 10 taken along line IV in FIG. B 4, a cross section of the door 30 taken along a line 34 is shown. Referring to FIG. 4, the seal joint 34 shown in this embodiment includes a gap 36 and a channel 35. When viewed in cross section in this embodiment, the width of the seal joint gap 36 is less than the width of the channel 35.

[0020] 3 and 4, the seal member 40 is integrally formed with the seal joint 34 of the door body 32. It should be appreciated that in an alternative embodiment, the seal member may be integrally formed with an edge of the open end 16 of the housing 10 instead of being integrally formed with the door body. In this case, a seal member formed on the housing 10 may be engaged with the door 30 to seal the interior space 5.

[0021] The seal member 40 includes a connection portion 54 and a contact portion 56, and the connection portion 54 may be formed with the seal mating portion 34 of the door body 32 such that the two are interconnected to hold the seal member 40 to the door body 32. In some embodiments, the connection portion 54 of the seal member 40 is integrally formed with the seal mating portion 34 of the door body 32. Referring to FIG. 4, in the illustrated embodiment, the connection between the seal member 40 and the door body 32 is an interlocking connection that strengthens the integral connection between the seal member 40 and the door body 32. In this example, the connection portion 54 has an enlarged edge 52 secured in the channel 35 of the seal mating portion 34 to form an interlocking connection, thereby preventing the enlarged edge 52 from pulling out of the seal mating portion 34 of the door body 32. In one embodiment, the enlarged edge 52 takes the form of a protrusion as shown in FIG. 4.

[0022] In some embodiments, the connection 54 is made from a first polymer. The first polymer may be a different polymer than the door body polymer. In one example, the first polymer has a hardness and stiffness greater than the hardness and stiffness of the material of the contact 56, i.e., the second polymer as described in detail below. In another example, the first polymer can withstand any temperature suitable for the second polymer. In one embodiment, the first polymer can withstand higher temperatures compared to the polymer for the door body polymer. In one example, the first polymer can include one or both of polyetheretherketone and liquid crystal polymer.

[0023] In some embodiments, the first polymer has compressibility configured to prevent the enlarged edge 52 of the seal member 40 from compressing to a size equal to or less than the width of the gap 36 of the seal joint 34 of the door body 32 to form an interlocking connection.

[0024] The seal member 40 and the door body 32 can be connected in a variety of ways, as desired. In some embodiments, the seal member 40 or the door body 32 can be integrally formed in or around the opposing component by various molding processes. In one embodiment, the seal member 40 can be formed into a portion of the door body 32, such as the seal joint 34 of the door body 32. In another embodiment, the seal member 40 can be formed around a portion of the door body 32. For example, the seal member 40 can be formed around the seal joint 34 of the door body 32.

[0025] In some embodiments, the seal member 40 is integrally formed with the door body 32 by injection molding. In one embodiment, the process includes insert molding the seal member 40 with the door body 32. Insert molding may include placing a portion of the connection portion 54 of the seal member 40 into a mold cavity, selectively covering the mold cavity with a cover, and injecting a polymer into the mold cavity through an injection channel such that the door body polymer forms around the portion of the connection portion 54 to form an integral connection, thereby preventing disengagement of the connection portion 54 from the seal coupling portion 34 of the door body 32.

[0026] Referring to FIG. 4, after insert molding, the connection portion 54 of the seal member 40 is formed around and joined to a portion of the door body 32, and the seal joint 34 is formed and integrally connected to the connection portion 54 of the seal member 40. In the embodiment shown in FIG. 4, the connection portion 54 of the seal member 40 has an enlarged edge 52. The enlarged edge 52 is held to the seal joint 34 of the door body 32 to form an interlocking connection, thereby further strengthening the integral connection between the seal member 40 and the door body 32. This allows the seal member 40 to be formed in the door body 32 without physically inserting the seal member into the channel 35 of the seal joint 34. As a result, this helps to minimize the possibility of particle generation, solution contamination, or leak paths.

[0027] 4, in the illustrated embodiment, when viewed in cross section, the enlarged edge 52 includes at least two sides 58A, 58B, and a distal end 58C. The distal end 58C is located furthest from the contact portion 56. In one example, the channel 35 of the seal coupling portion 34 fits around both sides 58A, 58B and the end 58C of the enlarged edge 52. In the illustrated embodiment, the enlarged edge 52 has a tapered shape as it extends from the distal end 58C toward the contact portion 56. It should be understood that the particular shape of the enlarged edge 52 of the connection portion 54 may vary. Indeed, the enlarged edge 52 may take any form as long as it is capable of cooperating with the channel 35 of the seal coupling portion 34 to form an interlocking connection to hold the seal member 40 in place.

[0028] It should be understood that the connection formed between the seal member 40 and the door body 32 can take forms other than cooperation of a seal joint and an enlarged edge.

[0029] When the door 30 is in the closed position, the seal member 40 is configured to form a seal between the door body 32 and the housing 10 to seal the interior space 5. For example, in the embodiment shown in Figures 3-4, the seal member 40 contacts each of the side walls 12 of the housing 10 such that a seal is formed between each of the side walls 12 and the door body 32. In the illustrated embodiment, the seal member 40 is a continuous seal member formed around the periphery of the door body 32. It should be understood that the seal member may include multiple structural members as desired.

[0030] 4, the contact portion 56 of the seal member 40 is configured to seal against the open end 16 of the housing 10 when the door 30 is in the closed position. In this situation, the contact portion 56 has an outer surface that is configured to directly contact the housing 10.

[0031] It should be appreciated that in some embodiments, the seal member 40 may be integrally formed about the seal joint 34 of the door body 32. For example, instead of being formed in the door body 32, the connection 54 of the seal member 40 may be formed about the exterior surface of the seal joint 34 of the door body 32 such that the seal member 40 and the door body 32 are integrally connected.

[0032] In some embodiments, the contact portion 56 includes a second polymer that is different from the door body polymer. In one embodiment, the second polymer includes an elastomeric polymer. In another embodiment, the second polymer includes a thermoplastic elastomer. In a further embodiment, the second polymer includes a thermoset elastomer, such as a fluoropolymer.

[0033] In some embodiments, the second polymer comprises a polymer having a Shore durometer of 30 Shore or greater. In other embodiments, the second polymer can withstand a temperature of 130° C. In one embodiment, the second polymer comprises polypropylene. In some embodiments, the second polymer comprises at least one of a fluoropolymer, a fluoroelastomer (FKM), a perfluoroelastomer (FFKM), a styrenic block copolymer (SBC), a polyetherester block copolymer (COPE), a thermoplastic olefin (TPO), a thermoplastic vulcanizate (TPV), a thermoplastic polyurethane (TPU), and a copolyamide elastomer (COPA).

[0034] In some embodiments, the contact portion 56 is made from a different material than the material of the connecting portion 54. In one embodiment, the first polymer of the connecting portion 54 has a higher stiffness than the second polymer of the contact portion 56. In one embodiment, at least 50% by weight of the second polymer is an elastomeric polymer, such as a fluoropolymer or polyetheretherketone.

[0035] Referring to FIG. 5, a partial cross-sectional view of a further embodiment shows a container 101 similar to the embodiment described above with respect to FIGS. 1-4, but with a differently configured seal member. The cross-sectional view of FIG. 5 is taken along a plane of the container 101 similar to that described with respect to the cross-sectional view of FIG. 4. The container 101 has a housing 110 having an interior space 105 and a door 130 having an integral seal member 140. The door 130 has a door body 132. The door body 132 has a seal coupling portion 134 at a peripheral edge 121 of the door body 132. The seal member 140 is integrally formed with the seal coupling portion 134. In the illustrated embodiment, the seal member 140 has a contact portion 156 that extends through the connection portion 154 in cross-section, and the connection portion 154 has an enlarged edge 152 formed at the seal coupling portion 134 of the door body 132.

[0036] FIG. 6 is an exploded view of the seal member 140 of FIG. 5. As shown in FIGS. 5 and 6, the connecting portion 154 is a rectangular structural member corresponding to the shape of the peripheral portion 121 of the door body 132. The connecting portion 154 has an opening 160. The contact portion 156 has a shape corresponding to the shape of the connecting portion 154, and the contact portion 156 includes a tab 158. To assemble the connecting portion 154 and the contact portion 156 together, the tab 158 of the contact portion 156 extends through the respective opening 160 of the connecting portion 154. In this situation, the connecting portion 154 and the contact portion 156 are fixed relative to each other. It should be understood that the specific shape of the connecting portion and the specific shape of the contact portion can vary, as long as the seal member formed by the connecting portion and the contact portion can seal the substrate container.

[0037] Referring to FIG. 7, a partial cross-sectional view of yet a further embodiment shows a container 201 similar to the embodiment described above with respect to FIGS. 5-6, but with a different seal member. The cross-sectional view of FIG. 7 is taken along a plane of the container 201 similar to that described with respect to the cross-sectional view of FIG. 4. The container 201 has a housing 210 having an interior space 205 and a door 230 having an integral seal member 240. The door 230 has a door body 232. The door body 232 has a seal coupling portion 234 at a peripheral portion 221 of the door body 232. The seal member 240 is integrally formed with the seal coupling portion 234. In the illustrated embodiment, the seal member 240 has a contact portion 256 that extends through the connection portion 254 in cross-section, and the connection portion 254 has an enlarged edge 252 formed at the seal coupling portion 234 of the door body 232. 5 and 6, the connecting portion 254 includes an opening 260 and the contact portion 256 includes a tab 258 that extends through the respective opening 260 in the connecting portion 254. In this situation, the connecting portion 254 and the contact portion 256 are fixed relative to one another.

[0038] Further referring to FIG. 7, in this embodiment, the contact portion 256 of the seal member 240 further includes a wiper-type gasket 262 that protrudes outward from the contact portion 256 of the seal member 240 and extends along the surface of the housing 210 to seal the contact surface between the door 230 and the housing 210 and to shield and protect the interior space of the housing 210.

[0039] Referring to FIG. 8, a partial cross-sectional view of yet another embodiment shows a container 301 similar to the embodiment described above with respect to FIGS. 1-4, but with a different seal member. The cross-sectional view of FIG. 8 is taken along a plane of the container 301 similar to that described with respect to the cross-sectional view of FIG. 4. The container 301 includes a housing 310 having an interior space 305 and a door 330 having an integral seal member 340. The door 330 includes a door body 332. The door body 332 includes a seal coupling 334 at a periphery 321 of the door body 332. The seal member 340 is integrally formed with the seal coupling 334. In the illustrated embodiment, the seal member 340 includes an enlarged edge 352 formed at the seal coupling 334 of the door body 332.

[0040] 8, in this embodiment, the seal member 340 includes a connecting portion 354 and a contact portion 356, but these two portions 354, 356 are part of one uniform body made from the same material. For example, the seal member 340 can be made from the same material including one or more polymers, additives, etc. In some embodiments, the seal member 340 is made from one or more gasket materials, such as a fluoroelastomer (FKM).

[0041] Various methods can be used to fabricate a substrate container door having a door body and an integral seal member. In some embodiments, the seal member can be formed in or around a portion of the door body by various molding processes. In one embodiment, the seal member can be formed at the seal joint of the door body. In another embodiment, the seal member can be formed around the exterior surface of the seal joint of the door body.

[0042] Referring to Figure 9, a flow diagram of a method 1000 for forming a container door integral with a polymeric seal member is shown. For example, the method 1000 may be used to form the door 30 of Figures 1-4, the door 130 of Figure 5, the door 230 of Figure 7, or the door 330 of Figure 8. Starting at S1100, the polymeric seal member of the container door is formed. In some embodiments, the polymeric seal member has one structural member that includes the connection portion and the contact portion as part of the same uniform body.

[0043] In other embodiments, the polymer seal member includes a connecting portion and a contact portion that are distinct from one another. In such a situation, forming the polymer seal member includes forming the connecting portion in S1110 and forming the contact portion in S1120. In one example, the connecting portion is made from a first polymer and the contact portion is made from a second polymer. In S1130, the connecting portion and the contact portion are combined with one another.

[0044] At S1200, a polymer seal member is insert molded with a container door, which includes placing a connection portion of the seal member in a mold cavity, selectively covering the mold cavity with a cover, and injecting a polymer into the mold cavity through an injection channel such that the door body polymer is at least partially formed around the connection portion of the polymer seal member. In this situation, the polymer seal member is integrally formed with the container door.

[0045] In some embodiments, the polymer seal member can be treated with various surface treatments to impart different surface properties as needed. For example, the polymer seal member can be prepared by a desired surface treatment, such as plasma or corona treatment, before insert molding the polymer seal member with the container door. In other embodiments, the polymer seal member can be pre-treated with a bonding agent to improve the bond strength between the polymer seal member and the door body.

[0046] In some embodiments, the door is made by inserting the seal member into a channel in the seal joint formed in the periphery of the door body. In alternative embodiments, the seal member is formed in the door body without physically inserting the seal member into a channel in the seal joint of the door body. Instead, the seal member is integrally formed in or around the seal joint of the door body, for example by a molding process.

[0047] It should be appreciated that in an alternative embodiment, the polymeric seal member may be integrally formed to the door body by forming a connection of the polymeric seal member around the periphery of the door body.

[0048] Aspects: Any of the embodiments 1 to 25 can be combined with any of the embodiments 26 to 29.

[0049] Aspect 1. A substrate container for holding one or more substrates or reticles, comprising: a housing including one or more side walls, a closed end, an open end, and an interior space defined by the one or more side walls and the closed end; A door, configured to close an open end of the housing; a door body having a seal joint and formed from a door body polymer; A seal member formed integrally with the seal joint of the door body Including doors and a substrate container for holding one or more substrates or reticles, An article comprising:

[0050] Aspect 2. The container of claim 1, wherein the seal member includes a connection portion and a contact portion, the connection portion being formed with the seal joint portion of the door body such that the connection portion and the seal joint portion of the door body are connected to each other, and the contact portion being configured to seal the open end when the door is in a closed position.

[0051] Embodiment 3. The container of any one of embodiments 1-2, wherein the door body polymer comprises a thermoplastic resin.

[0052] Aspect 4. The container of any of Aspects 1-3, wherein the door body polymer comprises at least one material selected from the group consisting of polycarbonate, cyclic olefin, liquid crystal polymer, polypropylene, polyphenylene sulfide (PPS), polyphenylene sulfone (PPSU), polyetherimide, polyimide, polyamideimide, polyketone, polyethersulfone (PES), polybutylene terephthalate, polysulfone (PSU, PSF), polyaryletherketone (PAEK), polyetheretherketone (PEEK), polyetherketone (PEKK), and polyetherketoneetherketoneketone (PEKEKK).

[0053] Aspect 5. The container according to any one of aspects 1 to 4, wherein the sealing member is integrally formed with the door body by injection molding.

[0054] Aspect 6. The container according to any one of Aspects 2 to 4, wherein the connection portion interlocks with the seal coupling portion of the door body.

[0055] Aspect 7. The container of aspect 6, wherein the connection portion of the seal member has an enlarged edge, the enlarged edge being configured to be retained by the seal connection portion of the door body to form an interlocking connection, thereby preventing withdrawal of the connection from the seal connection portion of the door body.

[0056] Aspect 8. The container of aspect 7, wherein the seal joint includes a gap and a channel, and when viewed in cross-section, a width of the gap of the seal joint is less than a width of the channel.

[0057] Aspect 9. The container of aspect 8, wherein the connection portion comprises a first polymer, the first polymer having a compressibility configured to prevent an enlarged edge of the connection portion from being compressed to a size equal to or smaller than the gap of the seal bond formed in the door body to form the interlocking connection.

[0058] Aspect 10. A container according to any of aspects 7 to 9, wherein an enlarged edge of the connection portion of the seal member is joined to and formed around the seal joint of the door body.

[0059] Embodiment 11. The container according to any one of embodiments 2 to 11, wherein the contact portion includes a wiper-type gasket.

[0060] Embodiment 12. The container of any of embodiments 2-11, wherein the connection portion is made from a first polymer that is different from the door body polymer.

[0061] Aspect 13. The container of aspect 12, wherein the first polymer comprises polyetheretherketone, a liquid crystal polymer, or a combination thereof.

[0062] Embodiment 14. The container of any of embodiments 12-13, wherein the contact portion is made from a second polymer different from the first polymer and the door body polymer.

[0063] Embodiment 15 The container of embodiment 14, wherein the second polymer comprises an elastomeric polymer.

[0064] Embodiment 16. The container of any one of embodiments 14-15, wherein the second polymer comprises a thermoset or thermoplastic elastomer.

[0065] Embodiment 17. The container of any of embodiments 14-16, wherein the second polymer comprises a polymer having a Shore durometer of 30 Shore or greater.

[0066] Embodiment 18. The container of any of embodiments 14-17, wherein the second polymer can withstand a temperature of 130° C.

[0067] Aspect 19. A container according to any of aspects 14 to 18, wherein the second polymer comprises at least one material selected from the group consisting of fluoropolymers, fluoroelastomers (FKM), perfluoroelastomers (FKKM), styrenic block copolymers (SBC), polyetherester block copolymers (COPE), thermoplastic olefins (TPO), thermoplastic vulcanizates (TPV), thermoplastic polyurethanes (TPU), and copolyamide elastomers (COPA).

[0068] Embodiment 20. The container of any of embodiments 14-19, wherein the first polymer has a hardness and stiffness greater than a hardness and stiffness of the second polymer.

[0069] Embodiment 21. The container of any of embodiments 14-20, wherein the first polymer can withstand any temperature associated with the second polymer.

[0070] Embodiment 22. A container according to any one of embodiments 2 to 21, wherein the connection portion and the contact portion are made from the same polymer.

[0071] Aspect 23. The container according to any one of aspects 1 to 22, which is one of a front-opening integrated pod, a reticle pod, and a semiconductor substrate shipping container.

[0072] Aspect 24. A container according to any one of aspects 1 to 23, wherein the seal joint is located at the peripheral edge of the door body.

[0073] Aspect 25. The container of any one of aspects 1 to 24, wherein the seal joint extends along the entire periphery of the peripheral portion of the door body.

[0074] Aspect 26: Insert molding a polymer seal member into the seal joint of the door body so that the polymer seal member is integrally formed with the door body. 23. A method of making a door for closing an open end of a housing for a substrate or reticle container, comprising:

[0075] Aspect 27. The method of aspect 26, wherein the polymeric seal member is formed bonded to the seal joint of the door body of the door such that the polymeric seal member and the peripheral edge of the door body are connected to each other.

[0076] 28. Forming a connection of a polymeric seal member from a first polymer different from a door body polymer, the connection including an enlarged edge dimensioned to form in a seal joint of the door body; and forming an interface portion of a polymeric seal member from the door body polymer and a second polymer different from the first polymer, the interface portion being configured to seal the open end of the container housing when the door is in a closed position; forming a seal member comprising: 28. The method according to any one of aspects 26 to 27, further comprising:

[0077] Embodiment 29. A method according to any of embodiments 26 to 28, wherein insert molding a polymer seal member into the seal joint of the door body includes forming a door body polymer around the connection portion of the polymer seal member within the insert mold.

[0078] The examples disclosed in this application should be considered in all respects as illustrative and not restrictive. The scope of the present invention is indicated by the appended claims, rather than the above description, and all modifications that come within the meaning and scope of the claims are intended to be embraced therein.

Claims

1. 1. An article comprising a substrate container for holding one or more substrates or reticles, the substrate container comprising: a housing including one or more sidewalls, a closed end, an open end, and an interior space defined by the one or more sidewalls and the closed end; a door configured to close the open end of the housing; and and the door has a door body having a seal joint and formed from a door body polymer; A seal member formed integrally with the seal joint of the door body. Including, the seal member has a connection portion formed from a first polymer; The seal member has a contact portion formed from a second polymer, the second polymer being different from the door body polymer and the first polymer, the contact portion being configured to seal the open end of the housing of the substrate container when the door is in a closed position.

2. The article of claim 1, wherein the connection portion is formed together with the seal joint portion of the door body such that the connection portion and the seal joint portion of the door body are connected to each other.

3. The article of claim 1 , wherein the seal joint extends around an entire periphery of the door body.

4. A method of making a door to close an open end of a housing for a substrate or reticle container, comprising: insert molding a polymer seal member into a seal joint of the door body such that the polymer seal member is integrally formed with the door body; forming the polymer seal member; Including, forming the polymer seal member forming a connection of the polymer seal member from a first polymer different from a door body polymer, the connection including an enlarged edge dimensioned to form within the seal joint of the door body; forming a contact portion having a second polymer, the second polymer being different from the door body polymer and the first polymer, the contact portion being configured to seal an open end of a housing of the substrate container or reticle container when the door is in a closed position.

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