Substrate storage container

Abstract

To provide a substrate storage container for improving sealability among various components.SOLUTION: A substrate storage container includes: a container body having an opening at a front face and capable of storing a plurality of substrates; a lid body for closing the opening; and a gas replacement unit capable of supplying a gas from outside of the container body to an internal space. At least one seal member 7 provided between various components 90, 95 is annular and has an almost triangular shape in a cross section extending in three directions toward each apexes 71A, 71B, 71C. Further, in the sealing member 7, a pressure receiving portion that receives pressure of the gas is a portion 71A to 71B having the longest distance along an outer shape of a cross-section among the apexes 71A, 71B, 71C.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a substrate storage container capable of storing a plurality of substrates. [Background technology]

[0002] Substrates such as semiconductor wafers are stored in the internal space of a substrate storage container and are used for storage in a warehouse, transportation between semiconductor processing devices, shipping between factories, etc. Known examples of such substrate storage containers include a container body having an opening on the front and capable of storing a plurality of substrates, a lid for closing the opening, and a gas replacement unit capable of supplying gas from outside the container body to the internal space (see Patent Documents 1 and 2).

[0003] In order to prevent the substrates stored in the internal space from being oxidized or contaminated, the internal space of the substrate storage container may be replaced with an inert gas such as nitrogen gas or dry air. Therefore, O-rings are provided between the various components that make up the substrate storage container to prevent gas leakage (see Figure 8). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] International Publication No. 2018 / 179964 [Patent Document 2] JP 2016-004949 A Summary of the Invention [Problem to be solved by the invention]

[0005] Circuit board storage containers require high sealing performance, but in the case of O-rings, the amount of squeezing of the O-ring needs to be increased to improve sealing performance, but increasing the amount of squeezing also increases the repulsive force due to the elasticity of the O-ring itself. As a result, when assembling parts that use O-rings, excessive force (squeezing force) is required from the worker, which can worsen the assembly workability, so there is a demand for circuit board storage containers that can ensure high sealing performance with a small amount of squeezing (squeezing force).

[0006] Therefore, the present invention has been made in consideration of the above problems, and an object of the present invention is to provide a substrate storage container that improves the sealing performance between various components. [Means for solving the problem]

[0007] (1) One aspect of the present invention is a substrate storage container comprising a container body having an opening on the front and capable of storing multiple substrates, a lid that closes the opening, and a gas replacement unit that can supply gas from outside the container body to an internal space, wherein at least one sealing member provided between various components is annular and has a cross section that is approximately triangular extending in three directions toward each vertex. (2) In the above aspect (1), the sealing member may be in contact with various components at least near three vertices. (3) In the above aspect (2), the sealing member may have an increased number of contact points with various components when gas pressure is applied thereto. (4) In any one of the above aspects (1) to (3), the pressure-receiving portion of the sealing member that receives the gas pressure may be the portion between the vertices that has the longest distance along the outer shape of the cross section. (5) In any one of the above aspects (1) to (4), the gas replacement unit may be a valve unit including a check valve that allows or blocks the flow of the gas. (6) In any one of the above aspects (1) to (4), the gas replacement unit may be a tower nozzle type having a plurality of blowing holes for blowing out the gas arranged in the vertical direction. (7) In any one of the above aspects (1) to (6), the gas may be nitrogen gas, dry air, or clean dry air. (8) Another aspect of the present invention is a substrate storage container comprising a container body having an opening on the front and capable of storing a plurality of substrates, a lid for closing the opening, a gas replacement unit capable of supplying gas from outside the container body to an internal space, and an offset member for mounting the gas replacement unit, wherein the offset member includes an offset plate holder, an offset plate, and a sealing member provided between the offset plate holder and the offset plate, and the sealing member is annular and has a cross section that is approximately triangular extending in three directions toward each vertex. Effect of the Invention

[0008] According to the present invention, it is possible to provide a substrate storage container that improves the sealing performance between various components. [Brief description of the drawings]

[0009] [Figure 1] 1 is an exploded perspective view showing a substrate storage container according to an embodiment of the present invention. [Diagram 2] FIG. 13 is a sectional perspective view showing the upper part of the gas replacement unit in a fixed state. [Diagram 3] FIG. 13 is a sectional perspective view showing a state in which a lower part of the gas replacement unit is fixed. [Figure 4] FIG. 4 is an enlarged cross-sectional view showing a state in which part A in FIG. 3 is enlarged. [Diagram 5] 5 is a cross-sectional view showing in simplified form the attached state of the seal member in FIG. 4. [Figure 6] 6 is a schematic diagram showing an attached state of the seal member in FIG. 5. FIG. [Figure 7A] 11 is a cross-sectional view showing another mounting state A of the seal member. FIG. [Figure 7B] 13 is a cross-sectional view showing another mounting state B of the seal member. FIG. [Figure 7C] 13 is a cross-sectional view showing another mounting state C of the seal member. FIG. [Figure 7D] 13 is a cross-sectional view showing another mounting state D of the seal member. FIG. [Figure 8] 5 is an enlarged cross-sectional view showing a portion similar to that shown in FIG. 4 in a conventional substrate storage container. [Figure 9] 9 is a cross-sectional view showing in simplified form the attached state of the seal member in FIG. 8.

[0023] FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In the embodiments of this specification, the same members are given the same reference numerals throughout. In the drawings, the direction of the front face F and the direction of the rear (rear wall 2b) B are indicated by solid arrows. The left and right refer to the state as seen from the front face F.

[0011] FIG. 1 is an exploded perspective view showing a substrate storage container 1 according to an embodiment of the present invention. A substrate storage container 1 shown in FIG. 1 has an opening on a front surface F, and is provided with a container body 2 for storing a plurality of substrates, and a lid 4 for closing the opening of the container body 2.

[0012] The container body 2 is of a so-called front-open box type, which is formed by a front opening frame 2a, a rear wall 2b, a right side wall 2c, a left side wall 2d, a top surface 2e, and a bottom surface 2f.

[0013] The rear wall 2b of the container body 2 has protrusions formed on both the left and right sides that protrude further rearward B. These protrusions function as feet when the container body 2 is placed with the opening of the front face F facing upward. Also, a scale or the like is displayed on the outer center of the rear wall 2b of the container body 2 to help indicate the number of substrates stored (see FIG. 1).

[0014] Handles 23 that function as gripping operations are attached to the right side wall 2c and the left side wall 2d of the container body 2 near the center of the outer side of each wall.

[0015] In addition, a pair of left and right support pieces 21 that horizontally support the stored substrate are provided on the inside of the right side wall 2c and the left side wall 2d of the container body 2, and a position regulating portion 22 that regulates the insertion position of the substrate when the substrate is inserted toward the rear B is provided on the inside of the right side wall 2c and the left side wall 2d.

[0016] The pair of left and right support pieces 21 are arranged at a predetermined pitch in the vertical direction connecting the top surface 2e and the bottom surface 2f, and each support piece 21 is formed in a long and narrow plate shape that supports the periphery of the substrate. In the embodiment, the support pieces 21 are provided so that 25 substrates can be supported, but the maximum number of substrates that can be stored is not limited to 25. Examples of substrates stored in the substrate storage container 1 include semiconductor wafers and mask glasses with diameters of 300 mm or 450 mm.

[0017] At this time, the substrates may be stored in the container body 2 in a fully loaded state as required, or a smaller number than the fully loaded state may be stored, or the storage position may be changed, so the number and storage state of the substrates stored in the container body 2 will vary depending on the usage mode of the substrate storage container 1. For example, multiple substrates may be stored with a bias toward the upper or lower side, or may be stored alternately.

[0018] A top flange 25 such as a robotic flange is attached to the outside of the top surface 2e of the container body 2. This top flange 25 is, for example, held by an overhead transport vehicle in a semiconductor manufacturing factory and transported between processes, or is used for positioning in a lid opening / closing device of a semiconductor processing device or the like.

[0019] A bottom plate 26 for positioning and placing the container body 2 is attached to the outside of the bottom surface 2f of the container body 2.

[0020] On the other hand, the lid 4 is removably attached to the opening of the front opening frame 2a of the container body 2, and a seal gasket (not shown) is attached so as to face the front opening frame 2a of the container body 2. The seal gasket is configured to adhere to the peripheral portion between the container body 2 and the lid 4 when the lid 4 is attached to the container body 2, and to maintain the airtightness of the internal space of the substrate storage container 1. Note that the air in the internal space of the substrate storage container 1 that has been maintained airtight is replaced with gas by the gas replacement unit 3, which will be described later.

[0021] The container body 2, the lid 4, and accessories such as the handle 23, the top flange 25, and the bottom plate 26 are injection molded from a molding material containing a required resin, or are formed by combining a plurality of injection molded parts. Examples of the resin contained in the molding material include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, and liquid crystal polymer, and alloys thereof.

[0022] In addition, conductive substances such as carbon fibers, carbon powder, carbon nanotubes, conductive polymers, etc., and various antistatic agents such as anionic, cationic, and nonionic are added to the resins of these molding materials as needed. Furthermore, ultraviolet absorbers and reinforcing fibers for improving rigidity are added as needed. The container body 2, the lid 4, the handle 23, the top flange 25, the bottom plate 26, etc. may be transparent, opaque, or translucent.

[0023] Meanwhile, three intake valves 50 (see FIG. 3) and one exhaust valve (not shown) are provided on the bottom surface 2f of the container body 2. These intake valves 50 and exhaust valve function to prevent deterioration of the surfaces of the stored substrates and to eliminate the pressure difference between the internal space of the substrate storage container 1 and the outside by circulating gas from the outside to the internal space of the substrate storage container 1 or from the internal space to the outside. However, the number and arrangement of the intake valves 50 and exhaust valves are not limited to this embodiment, and may be two intake valves 50 and two exhaust valves, or may be other numbers and arrangements.

[0024] Of these, two intake valves 50 are provided on both the left and right sides of the rear B of the bottom surface 2f. These two intake valves 50 are connected to a gas replacement unit 3, which will be described later, so that gas can flow through them. In addition, one intake valve 50 and one exhaust valve are provided on the left or right side near the front surface F of the bottom surface 2f. The intake valve 50 has a check valve (not shown), and is fitted with a breathable filter member 51 (not shown).

[0025] On the other hand, the exhaust valve has a check valve (not shown) and, for example, by attaching a humidity (or concentration) sensor, it is possible to measure the humidity (or concentration) in the internal space of the substrate storage container 1 after replacing the internal space with gas, and to manage whether the replacement of gas into the internal space of the substrate storage container 1 is being performed normally. Examples of the gas to be blown out include inert gas, dry air, and clean dry air. Examples of inert gas include nitrogen gas and argon gas, with nitrogen gas being preferred from the standpoint of cost. The pressure in the internal space can be as high as about 0.4 MPa.

[0026] Next, the gas replacement unit 3 will be described. Fig. 2 is a cross-sectional perspective view showing the upper fixed state of the gas replacement unit 3. Fig. 3 is a cross-sectional perspective view showing the lower fixed state of the gas replacement unit 3. Fig. 4 is an enlarged cross-sectional view showing the state in which part A in Fig. 3 is enlarged.

[0027] The gas replacement unit 3 replaces the internal space with gas by blowing gas into the internal space of the container body 2. The gas replacement units 3 are provided on both the left and right sides of the rear B (near the rear wall 2b or protruding portion) of the container body 2 with their longitudinal directions in the up-down direction (vertical direction) so as not to interfere with the substrate even when the substrate is inserted (see FIG. 1). Note that a left gas replacement unit 3 (not shown) is provided in a position symmetrical to the right gas replacement unit 3.

[0028] The gas replacement unit 3 includes a housing member 31 and a cover member 32 (see FIG. 3) and is formed in a substantially pentagonal columnar shape, but the shape is not limited to this. In addition, the gas replacement unit 3 may be formed from the same resin as the container body 2, etc., or from a different resin.

[0029] The housing member 31 is formed in a box shape with one side open so as to store gas, and the cover member 32 is attached to cover the open side by a locking means (engagement means) such as a claw. The housing member 31 and the cover member 32 form a space for storing gas.

[0030] Here, the housing member 31 has two faces of different sizes that intersect at a specific angle, and the interior angle of the intersecting faces is in the range of 120° to 170°.

[0031] A cylindrical connector 311 into which gas flows from the air supply valve 50 protrudes from the lower surface of the housing member 31. A rotation stopper protrusion (not shown) is formed near the connector 311 to stop left-right rotation of the gas replacement unit 3 and to position it in the rotational direction.

[0032] On the other hand, a cylindrical positioning protrusion 313 for positioning and fixing to the container body 2 is formed on the upper surface of the housing member 31.

[0033] On one surface of the housing member 31, 26 horizontally elongated, approximately rectangular blow-out holes are formed in the vertical direction (longitudinal direction) from top to bottom, namely, first blow-out holes 31a, 31b, 31c..., 31x, 31y, 31z (hereinafter referred to as "first blow-out hole group 31a-z" as necessary), which are equally spaced (for example, with a pitch of 10 mm between the centers of the openings).

[0034] In addition, on the other surface portion of the housing member 31, 26 similarly elongated, approximately rectangular blow-out holes are formed at equal intervals (for example, with a pitch of 10 mm between the centers of the openings) in the vertical direction (longitudinal direction) from top to bottom as third blow-out holes 33a, 33b, 33c..., 33x, 33y, 33z (hereinafter referred to as the "third blow-out hole group 33a-z" as necessary).

[0035] The first blowing hole group 31a-z and the third blowing hole group 33a-z are formed on respective surfaces that intersect at a predetermined angle, so that the blowing directions of the gas can be made to differ.

[0036] The cover member 32 has six approximately rectangular or square-shaped blow-out holes formed in the vertical direction (longitudinal direction) in order from top to bottom, as second blow-out holes 32a, 32b, . . . 32e, 32f (hereinafter referred to as the "second blow-out hole group 32a-f" as necessary).

[0037] In this way, the gas replacement unit 3 is configured as a tower nozzle type in which the first blowing hole group 31a-z, the third blowing hole group 33a-z, and the second blowing hole group 32a-f for blowing out gas are arranged in multiple groups in the vertical direction.

[0038] A breathable filter member 34 is provided inside the housing member 31, and a breathable filter member 35 is provided inside the cover member 32. Examples of the filter members 34 and 35 include a nonwoven fabric filter and a porous body.

[0039] Here, a method for attaching and fixing the gas replacement unit 3 to the container body 2 will be described.

[0040] The gas replacement unit 3 is attached to the container body 2 by a positioning and fixing member 8 and an offset member 9. Specifically, the upper part of the gas replacement unit 3 is attached to the positioning and fixing member 8, and the lower part of the gas replacement unit 3 is attached to the offset member 9.

[0041] For this reason, circular through-holes 27 are formed on both the left and right sides of the rear wall 2b of the container body 2 in order to fix the positioning fixing member 8, and stoppers 28 are formed at the upper portions of the through-holes 27. Meanwhile, mounting holes 29 are formed on both the left and right sides of the bottom surface 2f of the container body 2 in order to fix the offset member 9. These mounting holes 29 are not circular but are formed in a substantially elliptical shape formed by connecting a larger circle and a smaller circle.

[0042] 2, the positioning fixing member 8 has an elongated shape with one end being substantially plate-shaped and the other end being formed as a rectangular shaft. Three disk-shaped flanges 81, 82, and 83 are formed around the shaft toward the other end.

[0043] The shaft end flange 83 and the intermediate flange 82 are formed to have a diameter smaller than the diameter of the through hole 27 in the rear wall 2b, and are inserted into the through hole 27. A small-diameter step is formed in the intermediate flange 82, into which an O-ring 84A is fitted, and a small-diameter step is also formed in the inner flange 81, into which an O-ring 84B is fitted.

[0044] Furthermore, the inner flange 81 and O-ring 84B are formed larger than the diameter of the through hole 27, and when the other end of the positioning fixing member 8 is inserted into the through hole 27, the O-ring 84B is sandwiched between the container body 2 and the flange 81, so that no gas leaks.

[0045] After the positioning fixing member 8 is inserted into the through hole 27, a C-ring 85, which has a rectangular inner surface and an outer diameter larger than the through hole 27, is sandwiched between the rectangular shaft located between the flange 83 at the shaft end and the container body 2, thereby fixing the positioning fixing member 8 to the container body 2 via the through hole 27.

[0046] One end of the positioning fixing member 8 is in the shape of a plate bent upward, and is formed with a long and narrow slit 86. The positioning protrusion 313 and the stopper 28 of the housing member 31 fit into this slit 86. The end 87 is curved further upward, and a U-shaped notch 88 is formed at the tip of the end.

[0047] On the other hand, as shown in FIG. 3, the offset member 9 is assembled via a sealing member 7 so that a gap through which gas can flow is formed between the offset plate holder 90 located on the inside of the bottom surface 2f and the offset plate 95 located on the outside of the bottom surface 2f.

[0048] The offset plate holder 90 is formed with a recess 92 into which the anti-rotation protrusion of the housing member 31 fits, and the direction and position of the rotating gas replacement unit 3 are determined by the anti-rotation protrusion fitting into the recess 92.

[0049] Further, the offset plate holder 90 has a hole formed therein into which the connector 311 of the gas replacement unit 3 is inserted, and the connector 311 is inserted via a packing 93. The offset plate holder 90 is fitted into the mounting hole 29 of the container body 2 via an O-ring 91.

[0050] Next, offset plate 95 has a recess formed therein for fitting air intake valve 50 so that the center of air intake valve 50 is located at a position offset from the center position of packing 93 in plan view.

[0051] With this configuration, the gas replacement unit 3 is fixed to the container body 2 by first attaching the lower connector 311 to the offset member 9 , and then attaching the upper positioning protrusion 313 to the positioning and fixing member 8 .

[0052] Here, the seal member 7 provided between the offset plate holder 90 and the offset plate 95 will be described. Fig. 5 is a cross-sectional view showing, in a simplified manner, the attached state of the seal member 7 in Fig. 4. Fig. 6 is a schematic diagram showing, in a simplified manner, the attached state of the seal member 7 in Fig. 5. In Figs. 5-6, solid arrows indicate the assembly direction of the parts, and hollow arrows indicate the direction of gas pressure application. Also, hollow circles indicate the contact points between the seal member 7 and various parts.

[0053] The seal member 7 is entirely annular, and its cross section is generally triangular (or generally Y-shaped) extending in three directions toward each of vertices 71A, 71B, and 71C (see FIG. 4). Due to this shape, the seal member 7 has contact points (seal points) 72A, 72B, 72C, and 72D near at least three vertices 71A, 71B, and 71C that can come into contact with various members.

[0054] In addition, the distance along the cross-sectional outline between each of the vertices 71A, 71B, and 71C in the sealing member 7 is such that the distance between vertices 71A and 71B is the longest, followed by the distance between vertices 71A and 71C, and the distance between vertices 71B and 71C is the shortest.

[0055] The portion between vertices 71A and 71B is provided in the gap between the components so as to face the gas pressurized space. The portion between vertices 71A and 71B is concave (arcuate) toward vertex 71C. Therefore, when gas pressure is applied, the portion between vertices 71A and 71B of the seal member 7 is first pressed, and is deformed (or displaced) toward vertex 71C.

[0056] Furthermore, since the portions between vertices 71B and 71C are concave (arcuate) toward vertex 71A, when gas pressure is applied, sealing member 7 deforms (or bends) so that the space formed between these portions and the parts is reduced.

[0057] When the shape of the seal member 7 is simplified, it can be expressed as a simple triangle having three vertices 71A, 71B, and 71C as shown in Fig. 6. In this case, the vertex 71C may be in contact with any of the components, and the gas flow path may taper toward the vertex 71C.

[0058] Here, if a conventional O-ring as shown in Figure 8 is used, when it is subjected to gas pressure, it becomes convex (arcuate) toward the pressurized space, so a load is applied in the normal direction to the surface of the O-ring, and it tries to deform in the direction away from the contact point on the pressurized space side (away from the upper and left sides of the gap) (see Figure 9), resulting in a decrease in sealing performance.

[0059] However, when the sealing member 7 of this embodiment is used, when it is subjected to gas pressure, a load is applied to the portion between vertices 71A and 71B, and the portion attempts to deform in a direction displacing toward the right side along the upper and lower edges of the gap, rather than in a direction away from the contact point on the pressurized space side (direction away from the upper and left edges of the gap), thereby maintaining the sealing performance.

[0060] Furthermore, before the internal space of the substrate storage container 1 is pressurized, contact point 72D is not actually in contact, and sealing is essentially ensured at three points. Then, when the internal space is pressurized, sealing member 7 is deformed by the gas pressurization, and contact point 72D also comes into contact with an additional point (see FIG. 5), making it possible to maintain sealing at four or more points.

[0061] Finally, other mounting states of the seal member 7 will be described. Fig. 7A is a cross-sectional view showing another mounting state A of the seal member 7. Fig. 7B is a cross-sectional view showing another mounting state B of the seal member 7. Fig. 7C is a cross-sectional view showing another mounting state C of the seal member 7. Fig. 7D is a cross-sectional view showing another mounting state D of the seal member 7.

[0062] In mounting state A in FIG. 7A, the gap (gas passage) extends in a direction perpendicular to the vertical assembly between the parts, and the portion between vertices 71A and 71B of sealing member 7 faces the pressurized space on the left. In mounting state B in FIG. 7B, the gap on the pressurized side extends in a direction perpendicular to the horizontal direction between the parts with respect to assembly, while the gap on the non-pressurized side is offset and extends in the vertical direction, and the portion of sealing member 7 between vertices 71A and 71B faces the pressurized space above.

[0063] In mounting state C in FIG. 7C, the gap on the pressurized side extends horizontally between the parts in a direction perpendicular to the assembly direction, while the gap on the non-pressurized side extends horizontally, and the portion of sealing member 7 between vertices 71A and 71B faces the pressurized space above. In mounting state D in Figure 7D, the gap on the pressurized side extends in a direction perpendicular to the horizontal assembly between the parts, and the gap on the non-pressurized side extends horizontally, and the gap connecting these tapers towards the non-pressurized side, and the portion of sealing member 7 between apexes 71A and 71B faces the pressurized space above.

[0064] In this manner, the seal member 7 of the present embodiment can be used in various assembly forms between various components (members). The components can be assembled together by any means such as fitting, locking, engagement, screw fastening, etc.

[0065] The above-mentioned sealing member 7 is preferably made of a material similar to that used in general O-rings, such as fluororubber or elastomer (but excluding silicone rubber).

[0066] As described above, the substrate storage container 1 of an embodiment of the present invention is a substrate storage container 1 comprising a container body 2 having an opening on the front and capable of storing multiple substrates, a lid body 4 that closes the opening, and a gas replacement unit 3 that can supply gas from the outside of the container body 2 to the internal space, and the sealing member 7 provided between various components is annular and has a cross section that is approximately triangular extending in three directions toward each of the vertices 71A, 71B, and 71C.

[0067] Furthermore, the substrate storage container 1 of the embodiment of the present invention is a substrate storage container 1 comprising a container body 2 having an opening on the front and capable of storing a plurality of substrates, a lid body 4 that closes the opening, a gas replacement unit 3 that can supply gas from the outside of the container body 2 to the internal space, and an offset member 9 to which the gas replacement unit 3 is attached, the offset member 9 including an offset presser 90, an offset plate 95, and a sealing member 7 provided between the offset plate presser 90 and the offset plate 95, the sealing member 7 being annular and having a cross section that is approximately triangular extending in three directions toward each of the vertices 71A, 71B, and 71C.

[0068] This makes it possible to provide a substrate storage container 1 that improves the sealing performance between various components provided with the seal member 7. Also, in the assembly work of sandwiching the seal member 7 between various components, the crushing force can be reduced compared to an O-ring, and further, the amount of crushing can be reduced by half, improving workability.

[0069] The seal member 7 of the embodiment comes into contact with at least various components near the three vertices. As a result, the seal member 7 can exhibit sealing properties by coming into contact with various components near the three vertices.

[0070] In the sealing member 7 of the embodiment, when gas pressure is applied, the number of contact points (sealing points) that come into contact with various components increases. As a result, even if the sealing member 7 deteriorates over time, for example, by being left in a crushed state for a long period of time or by being subjected to heat, the sealing member 7 can maintain its sealing performance by deforming when gas pressure is applied so that the number of contact points that come into contact with various components increases.

[0071] In the seal member 7 of the embodiment, the pressure-receiving portion that receives the gas pressure is the portion 71A-71B between the vertices 71A, 71B, and 71C that has the longest distance along the cross-sectional outline. As a result, the pressure-receiving portion between the vertices 71A-71B will bend, but the contact points will not bend in the direction of moving apart, so that the sealability can be maintained. In other words, when the seal member 7 receives gas pressure, the pressure is dispersed and a further crushing force is applied to the contact points 72A and 72B. In particular, if the installation location of the seal member 7 has a tapered shape, the sealability is further improved.

[0072] In the embodiment, the gas is nitrogen gas, dry air, or clean dry air, which keeps the internal space of the substrate storage container 1 inert or at low humidity, preventing deterioration of the substrate surfaces.

[0073] Although the preferred embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications and changes are possible within the scope of the gist of the present invention described in the claims.

[0074] (Modification) In the above embodiment, the sealing member 7 was provided between the offset plate holder 90 and the offset plate 95, but it may also be provided between various other components, such as between the positioning fixing member 8 and the container body 2 as in O-rings 84A, 84B, or between the offset plate holder 90 and the container body 2 as in O-ring 91, and may also be applied to a gasket provided between the container body 2 and the lid body 4.

[0075] In the above embodiment, in addition to the gas replacement unit 3, a plurality of other gas replacement units may be provided, or conversely, only one of the right or left gas replacement units 3 may be provided. In addition, the other gas replacement unit may be, for example, a valve unit including a check valve that allows or blocks the flow of gas. [Explanation of symbols]

[0076] 1. Substrate storage container 2 container body, 2a front opening frame, 2b rear wall, 2c right side wall, 2d left side wall, 2e top surface, 2f bottom surface, 21 support piece, 22 position control portion, 23 handle, 25 top flange, 26 bottom plate, 27 through hole, 28 stopper, 29 mounting hole 3 Gas replacement unit (air supply member), 31 Housing member, 31A, 31B Surface portion, 311 Connector, 313 Positioning protrusion, 31a...31z First blowing hole, 32a...32f Second blowing hole, 33a...33z Third blowing hole, 32 Cover member, 34, 35 Filter member 4 Lid 50 Air intake valve, 51 Filter member 6 Exhaust valve 7 sealing member, 71A, 71B, 71C apex, 72A, 72B, 72C, 72C contact point, 8 Positioning and fixing member, 81, 82, 83 flange, 84A, 84B O-ring, 85 C-ring, 86 slit, 87 end, 88 notch 9 offset member, 90 offset plate holder, 91 O-ring, 92 recess, 93 packing, 94 O-ring, 95 offset plate F front, B rear

Claims

1. A container body having an opening on the front surface and capable of storing a plurality of substrates; A lid that closes the opening; A substrate storage container comprising: a gas replacement unit capable of supplying gas from the outside of the container body to an internal space, At least one seal member provided between various components is annular, has a cross section of a substantially triangular shape extending in three directions toward each apex, and a pressure-receiving portion that receives gas pressure is a portion between the apexes that has the longest distance along the outer shape of the cross section. A substrate storage container comprising:

2. A container body having an opening on the front surface and capable of storing a plurality of substrates; A lid that closes the opening; A substrate storage container comprising: a gas replacement unit capable of supplying gas from the outside of the container body to an internal space, At least one seal member provided between various components is annular, has a cross section of a substantially triangular shape extending in three directions toward each apex, and a pressure-receiving portion that receives gas pressure is concave toward the pressurized space side. A substrate storage container comprising:

3. The sealing member is in contact with at least various components near three vertices.

3. The substrate storage container according to claim 1 or 2.

4. When the gas pressure is applied to the sealing member, the number of contact points with various components increases.

4. The substrate storage container according to claim 3.

5. The gas replacement unit is a valve unit including a check valve that allows or blocks the flow of the gas. The substrate storage container according to any one of claims 1 to 4.

6. The gas replacement unit is a tower nozzle type having a plurality of blowing holes for blowing the gas arranged in the vertical direction. The substrate storage container according to any one of claims 1 to 4.

7. A container body having an opening on the front surface and capable of storing a plurality of substrates; A lid that closes the opening; a gas replacement unit capable of supplying gas from the outside of the container body to the internal space; An offset member to which the gas replacement unit is attached, the offset member includes an offset plate holder, an offset plate, and a seal member provided between the offset plate holder and the offset plate, The sealing member is annular, has a cross section of a substantially triangular shape extending in three directions toward each apex, and a pressure-receiving portion that receives gas pressure is a portion between the apexes that has the longest distance along the outer shape of the cross section. A substrate storage container comprising:

8. A container body having an opening on the front and capable of storing a plurality of substrates; A lid that closes the opening; a gas replacement unit capable of supplying gas from the outside of the container body to the internal space; An offset member to which the gas replacement unit is attached, the offset member includes an offset plate holder, an offset plate, and a seal member provided between the offset plate holder and the offset plate, The sealing member is annular, has a cross section of a substantially triangular shape extending in three directions toward each apex, and a pressure-receiving portion that receives gas pressure is concave toward the pressurized space side. A substrate storage container comprising:

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