High Voltage Power Supply

Abstract

The present invention reduces propagation of spatial noise, which occurs in a high-voltage generation circuit, to an output terminal, and reduces the size of a high-voltage power supply.　The high-voltage power supply 1 comprises: a high-voltage generation circuit 101; a filter circuit 102 connected to the high-voltage generation circuit 101; an output resistor 103 connected to the filter circuit 102 via a first connection conductor 106; an output terminal 104 connected to the output resistor 103 via a second connection conductor 107; and a conductor 105 for blocking spatial noise, the conductor being connected to the first connection conductor 106 and having at least a portion thereof disposed between the high-voltage generation circuit 101 and the second connection conductor 107.

Description

[Technical field]

[0001] The present invention relates to a high-voltage power supply, and more particularly to a high-voltage power supply having a conductor for shielding spatial noise. [Background technology]

[0002] Regarding technology for shielding spatial noise generated by a high-voltage power supply, Patent Document 1 (paragraph 0004) states that "a shield plate S is arranged between the accelerating voltage generating circuit 1 and the power transmission circuit 7 to reduce the effect of transmission noise on the transmitted high voltage." [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2006-156155 A Summary of the Invention [Problem to be solved by the invention]

[0004] In Patent Document 1, a shield plate 6 for reducing spatial noise is arranged to reduce the propagation of spatial noise generated in the acceleration voltage generating circuit to the output terminal. This shield plate 6 is connected to GND as shown in Figures 1 and 2. In order to use the shield plate 6 connected to GND in a high-voltage generator, it is necessary to ensure an insulation distance between the shield plate 6 and parts that are at high voltage, such as the acceleration voltage generating circuit, which results in an increase in the size of the high-voltage generator.

[0005] The present invention provides a technique that can reduce the propagation of spatial noise generated in a high-voltage generating circuit to an output terminal and can also reduce the size of a high-voltage power supply. [Means for solving the problem]

[0006] In order to solve the above problems, the high-voltage power supply of the present invention has a high-voltage generation circuit, a filter circuit connected to the high-voltage generation circuit, an output resistor connected to the filter circuit via a first connecting conductor, an output terminal connected to the output resistor via a second connecting conductor, and a spatial noise shielding conductor connected to the first connecting conductor and at least a portion of which is disposed between the high-voltage generation circuit and the second connecting conductor. Effect of the Invention

[0007] According to the present invention, it is possible to reduce the propagation of spatial noise generated in a high-voltage generating circuit to an output terminal, and to reduce the size of a high-voltage power supply.

[0008] Problems, configurations and effects other than those described above will become apparent from the following description of the embodiments. [Brief description of the drawings]

[0009] [Figure 1] FIG. 2 is a diagram showing a configuration of a high-voltage power supply according to the first embodiment. [Diagram 2] FIG. 1 is a perspective view of a high-voltage power supply according to a first embodiment. [Diagram 3] FIG. 11 is a perspective view of a high-voltage power supply according to a second embodiment. [Figure 4] FIG. 11 is a diagram showing the configuration of a high-voltage power supply according to a third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] The embodiments of the present disclosure will be described in detail with reference to the drawings. In the following embodiments, the components are not necessarily essential unless otherwise specified or considered to be obviously essential in principle. Preferred examples of the present disclosure will be described below with reference to the drawings.

[0011] Example 1 FIG. 1 is a diagram showing the configuration of a high-voltage power supply according to the first embodiment. FIG. 2 is a perspective view of the high-voltage power supply according to the first embodiment shown in FIG. 1. Note that (a) of FIG. 2 is a diagram in which the spatial noise shielding conductor 105 is omitted from (b) of FIG. The high-voltage power supply 1 according to the first embodiment is a power supply used in an electron microscope, and can be used as an electron gun power supply used in the electron microscope or a power supply for applying voltage to a stage structure. Note that the high-voltage power supply 1 according to the first embodiment may be used in devices other than an electron microscope. Note that "high voltage" refers to a voltage of, for example, 100V or more.

[0012] 1, the high-voltage power supply 1 includes a high-voltage generating circuit 101, a filter circuit 102, an output resistor 103, an output terminal 104, and a spatial noise shielding conductor 105. This high-voltage power supply 1 is an assembly in which the high-voltage generating circuit 101, the filter circuit 102, the output resistor 103, the output terminal 104, and the spatial noise shielding conductor 105 are mounted on a single board.

[0013] The high voltage generating circuit 101 is, for example, a Cockcroft-Walton circuit. The high voltage generating circuit 101 includes an AC power supply 111, a plurality of capacitors 112a-112f (hereinafter, the plurality of capacitors 112a-112f are collectively referred to as capacitors 112 as appropriate), and a plurality of diodes 113a-113f (hereinafter, the plurality of diodes 113a-113f are collectively referred to as diodes 113 as appropriate). The capacitor 112 includes a final-stage capacitor 112f that outputs the output voltage of the high voltage generating circuit 101, and capacitors 112a-112e that output a voltage lower than the output voltage. The diode 113 includes a final-stage diode 113f that outputs the output voltage of the high voltage generating circuit 101, and diodes 113a-113e that output a voltage lower than the output voltage. The output terminal 104, the output resistor 103 and the spatial noise shielding conductor 105 are arranged closer to the final stage capacitor 112f than the capacitors 112a to 112e, and closer to the final stage diode 113f than the diodes 113a to 113e.

[0014] The filter circuit 102 is, for example, an RC filter circuit. The filter circuit 102 includes a resistor 121 and a capacitor 122. The filter circuit 102 is electrically connected to the high voltage generating circuit 101. The output of the high voltage generating circuit 101 is output to the output resistor 103 via the filter circuit 102.

[0015] The output resistor 103 is electrically connected to the filter circuit 102 via a wiring pattern (first connecting conductor) 106 formed on a substrate on which the filter circuit 102 and the output resistor 103 are mounted. As shown in FIG. 2, one end of the wiring pattern 106 is connected to an output pin 121b of the resistor 121 of the filter circuit 102, and the other end is connected to an input pin 103a of the output resistor 103.

[0016] 2(a), the output terminal 104 is electrically connected to the output resistor 103 via a wiring pattern (second connecting conductor) 107 formed on the substrate. One end of the wiring pattern 107 is connected to an output pin 103b of the output resistor 103, and the other end is connected to an input pin 104a of the output terminal 104.

[0017] The spatial noise shielding conductor 105 is a conductor for shielding spatial noise, and is a plate-shaped metal. The spatial noise shielding conductor 105 is electrically connected to the wiring pattern 106. The resistor 121 of the filter circuit 102 is connected between the wiring pattern 106 and the high voltage generating circuit 101, and the voltage drop at the resistor 121 is smaller than the output voltage of the high voltage generating circuit 101, so the voltage of the wiring pattern 106 is almost equal to the output voltage of the high voltage generating circuit 101. As shown in FIG. 1, at least a part of the spatial noise shielding conductor 105 is disposed between the high voltage generating circuit 101 and the wiring pattern 107. Furthermore, at least a part of the spatial noise shielding conductor 105 is disposed between the high voltage generating circuit 101 and the output terminal 104. Furthermore, at least a part of the spatial noise shielding conductor 105 is disposed between the high voltage generating circuit 101 and the output resistor 103.

[0018] At least a part of the spatial noise shielding conductor 105 in the first embodiment is disposed on the straight lines L1 and L2 passing through the output resistor 103, the wiring pattern 107, or any one of the output terminal 104, and the high voltage generating circuit 101. For example, in the example of Fig. 1, at least a part of the spatial noise shielding conductor 105 is disposed on the straight line L1 passing through the high voltage generating circuit 101 (the left end of the capacitor 112e) and the output terminal 104 (the left end of the output terminal 104). In addition, at least a part of the spatial noise shielding conductor 105 is disposed on the straight line L2 passing through the high voltage generating circuit 101 (the right end of the AC power supply 111) and the output resistor 103 (the right end of the output resistor 103).

[0019] <Effects of Example 1> The high voltage generating circuit 101 is a main noise source of spatial noise. The output resistor 103 and the output terminal 104 are easily affected by spatial noise because they have high impedance due to the resistance component of the output resistor 103. Therefore, the spatial noise shielding conductor 105 of the first embodiment is electrically connected to the wiring pattern 106, and at least a part of the spatial noise shielding conductor 105 is arranged between the high voltage generating circuit 101 and the wiring pattern 107. By connecting the spatial noise shielding conductor 105 immediately after the filter circuit 102, the spatial noise shielding conductor 105 itself can be prevented from becoming a noise source. In addition, by arranging at least a part of the spatial noise shielding conductor 105 between the high voltage generating circuit 101 and the wiring pattern 107, the propagation of spatial noise to the output terminal 104 via the wiring pattern 107 can be reduced. Furthermore, by electrically connecting the spatial noise shielding conductor 105 to the wiring pattern 106 that is not GND, it is not necessary to ensure an insulation distance, and therefore the high voltage power supply 1 can be made smaller.

[0020] The output terminal 104, output resistor 103, and spatial noise shielding conductor 105 are arranged closer to the first element (capacitor 112f, diode 113f) than to the second element (capacitors 112a-112e, diodes 113a-113e). With this configuration, the insulation distance between the spatial noise shielding conductor 105 and the high voltage generating circuit 101 becomes shorter, so that the high voltage power supply 1 can be further miniaturized.

[0021] Since the spatial noise shielding conductor 105 is a conductor for shielding spatial noise, the spatial noise generated in the high voltage generating circuit 101 can be effectively shielded.

[0022] By mounting the filter circuit 102, the output resistor 103, the output terminal 104, and the spatial noise shielding conductor 105 on a single board, it is possible to obtain a high-voltage power supply board that reduces the propagation of spatial noise and is compact.

[0023] By electrically connecting the spatial noise shielding conductor 105 to the wiring pattern 106 formed on the substrate, the manufacturing cost and number of steps do not increase, and the propagation of spatial noise generated in the high-voltage generating circuit 101 to the output terminal 104 is reduced, thereby enabling the high-voltage power supply 1 to be made smaller.

[0024] By making the spatial noise shielding conductor 105 a plate-shaped conductor, it is possible to shield spatial noise with a simple configuration.

[0025] By arranging at least a portion of the spatial noise shielding conductor 105 on the straight lines L1 and L2, the spatial noise traveling from the high voltage generating circuit 101 to the output terminal 104, the output resistor 103, and the wiring pattern 107 can be effectively reduced.

[0026] In a high-voltage power supply 1 that employs a high-voltage generating circuit 101 including a plurality of capacitors 112a-112f, a plurality of diodes 113a-113f, and an AC power supply 111, it is possible to reduce the propagation of spatial noise generated in the high-voltage generating circuit 101 to the output terminal 104, and to achieve miniaturization.

[0027] The spatial noise shielding conductor 105 can shield the area from the output pin 103 b of the output resistor 103 to the input pin 104 a of the output terminal 104 from the spatial noise generated by the high voltage generating circuit 101 .

[0028] Furthermore, by arranging at least a part of the spatial noise shielding conductor 105 between the high voltage generating circuit 101 and the output terminal 104, the propagation of spatial noise to the output terminal 104 can be reduced.

[0029] Furthermore, by arranging at least a part of the spatial noise shielding conductor 105 between the high voltage generating circuit 101 and the output resistor 103, the propagation of spatial noise to the output resistor 103 can be reduced.

[0030] Example 2 3 is a perspective view of a high-voltage power supply of Example 2. The high-voltage power supply 2 of Example 2 has a conductor pattern 205 formed on a substrate instead of the spatial noise shielding conductor 105 of Example 1. Except for the conductor pattern 205 being a wiring pattern formed on a substrate, it is the same as the spatial noise shielding conductor 105 of Example 1, so a duplicated description will be omitted.

[0031] <Effects of Example 2> It is possible to shield spatial noise even if the conductor is not plate-shaped like the spatial noise shielding conductor 105 of the first embodiment. In the second embodiment, the conductor pattern 205 formed on the substrate serves as the spatial noise shielding conductor. This prevents an increase in manufacturing cost or the number of steps, reduces the propagation of spatial noise generated in the high voltage generating circuit 101 to the output terminal 104, and enables the high voltage power supply 2 to be miniaturized. Other effects are the same as those of the first embodiment.

[0032] Example 3 4 is a diagram showing the configuration of a high-voltage power supply of Example 3. The high-voltage power supply 3 of Example 3 has a plurality of filter circuits 301, 302, and 303 connected in series, and spatial noise shielding conductors 304, 305, and 306 electrically connected to the outputs of the filter circuits 301, 302, and 303, respectively.

[0033] 4, the high voltage power supply 3 of the third embodiment includes a high voltage generating circuit 101, a plurality of filter circuits 301-303 connected to the high voltage generating circuit 101, and a plurality of wiring patterns (connecting conductors) 307 connecting the plurality of filter circuits 301-303. The high voltage power supply 3 also includes an output resistor 103 connected to the plurality of final stage filter circuits 301 via a wiring pattern (first connecting conductor) 308, and an output terminal 104 connected to the output resistor 103 via a wiring pattern (second connecting conductor) 309. The high voltage power supply 3 of the third embodiment also includes a spatial noise shielding conductor (first spatial noise shielding conductor) 304 connected to the wiring pattern 308 and at least a part of which is disposed between the high voltage generating circuit 101 and the wiring pattern 309. In addition, the high-voltage power supply 3 of the third embodiment has spatial noise shielding conductors (second spatial noise shielding conductors) 305 and 306 that are connected to any one of the multiple wiring patterns 307 and at least a portion of which is disposed between the high-voltage generating circuit 101 and the wiring pattern 309.

[0034] In the third embodiment, the number of filter circuits 301-303 and the number of spatial noise shielding conductors 304-306 are three, but the number of filter circuits and the number of spatial noise shielding conductors may be two, or four or more. The number of filter circuits and the number of spatial noise shielding conductors may not be the same. The spatial noise shielding conductors 304-306 may be a plate-shaped conductor, a wiring pattern formed on a substrate, or a combination of a plate-shaped conductor and a wiring pattern. Except for the fact that the spatial noise shielding conductors 304-306 are multiple, the spatial noise shielding conductors 105 in the first embodiment are the same as those in the first embodiment, so a duplicated description will be omitted.

[0035] <Effects of Example 3> In the third embodiment, the spatial noise shielding conductors 304-306 are provided for each output of the filter circuits 301-303, so that the spatial noise generated in the high voltage generation circuit 101 can be reduced stepwise. As a result, the spatial noise generated in the high voltage generation circuit 101 can be further reduced compared to the case where there is one set of filter circuit and spatial noise shielding conductor. Other effects are the same as those of the first embodiment.

[0036] The present disclosure is not limited to the above-mentioned embodiments, and includes various modified examples. The above-mentioned embodiments have been described in detail to clearly explain the present disclosure, and are not necessarily limited to those having all of the configurations described. In addition, it is also possible to replace a part of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. In addition, it is also possible to add, delete, or replace a part of the configuration of each embodiment with another configuration. [Explanation of symbols]

[0037] 1...High voltage power supply, 2...High voltage power supply, 3...High voltage power supply, 101...High voltage generation circuit, 102...Filter circuit, 103...Output resistor, 104...Output terminal, 105...Spatial noise shielding conductor, 106...Wiring pattern (first connecting conductor), 107...Wiring pattern (second connecting conductor), 205...Conductor pattern (spatial noise shielding conductor), 301 to 303...Filter circuit, 304...Spatial noise shielding conductor (first spatial noise shielding conductor), 305, 306...Spatial noise shielding conductor (second spatial noise shielding conductor), 307...Wiring pattern (connecting conductor), 308...Wiring pattern (first connecting conductor), 309...Wiring pattern (second connecting conductor)

Claims

1. A high voltage generating circuit; a filter circuit connected to the high voltage generating circuit; an output resistor connected to the filter circuit via a first connecting conductor; an output terminal connected to the output resistor via a second connecting conductor; a spatial noise shielding conductor connected to the first connecting conductor and at least a portion of which is disposed between the high voltage generating circuit and the second connecting conductor; Having a high voltage power supply.

2. 2. The high voltage power supply according to claim 1, the high voltage generation circuit includes a first element that outputs an output voltage of the high voltage generation circuit, and a second element that outputs a voltage lower than the output voltage; The output terminal, the output resistor, and the spatial noise shielding conductor are disposed closer to the first element than to the second element. High voltage power supply.

3. 2. The high voltage power supply according to claim 1, The spatial noise shielding conductor is a conductor for shielding spatial noise. High voltage power supply.

4. 2. The high voltage power supply according to claim 1, the filter circuit, the output resistor, the output terminal, and the spatial noise shielding conductor are mounted on a single substrate. High voltage power supply.

5. 2. The high voltage power supply according to claim 1, the first connection conductor is a wiring pattern formed on a substrate on which the filter circuit and the output resistor are mounted, the wiring pattern connecting the output resistor and the filter circuit, The spatial noise shielding conductor is connected to the wiring pattern. High voltage power supply.

6. 2. The high voltage power supply according to claim 1, The spatial noise shielding conductor is a plate-shaped conductor. High voltage power supply.

7. 2. The high voltage power supply according to claim 1, the spatial noise shielding conductor is a wiring pattern formed on a substrate on which the filter circuit and the output resistor are mounted; High voltage power supply.

8. 2. The high voltage power supply according to claim 1, At least a part of the spatial noise shielding conductor is disposed on a straight line passing through the output resistor, any one of the second connecting conductor and the output terminal, and the high voltage generating circuit. High voltage power supply.

9. 2. The high voltage power supply according to claim 1, The high voltage generating circuit includes a plurality of capacitors, a plurality of diodes, and an AC power supply. High voltage power supply.

10. 2. The high voltage power supply according to claim 1, the second connection conductor is connected to an output pin of the output resistor and to an input pin of the output terminal; High voltage power supply.

11. 2. The high voltage power supply according to claim 1, At least a part of the spatial noise shielding conductor is disposed between the high voltage generating circuit and the output terminal. High voltage power supply.

12. 2. The high voltage power supply according to claim 1, At least a part of the spatial noise shielding conductor is disposed between the high voltage generating circuit and the output resistor. High voltage power supply.

13. A high voltage generating circuit; a plurality of filter circuits connected in series to the high voltage generating circuit; one or more connection conductors connecting the plurality of series-connected filter circuits; an output resistor connected to a final stage filter circuit of the plurality of series-connected filter circuits via a first connecting conductor; an output terminal connected to the output resistor via a second connecting conductor; a first spatial noise shielding conductor connected to the first connecting conductor and at least a portion of which is disposed between the high voltage generating circuit and the second connecting conductor; a second spatial noise shielding conductor connected to any one of the one or more connecting conductors and at least a portion of which is disposed between the high voltage generating circuit and the second connecting conductor; Having a high voltage power supply.

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