Electronic component package and method of manufacturing the electronic component package

Abstract

To solve a problem in which the number of man-hours required to manufacture a base body as the volume of an electronic component package increases.SOLUTION: An electronic component package 10 includes a base body 20, a lid body 30, and a bonding layer portion 40. The lid body 30 has a first recess 32. Further, the lid body 30 is bonded to the base body 20 via the bonding layer portion 40. The base body 20 closes the first recess 32 of the lid body 30. Further, the base body 20 and the lid body 30 define an internal space S of the electronic component package 10, and are located in the internal space S of the electronic component package 10. Further, the electronic component 50 is mounted on the base body 20.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to an electronic component package and a method for manufacturing an electronic component package. [Background technology]

[0002] The electronic component package described in Patent Document 1 has a ceramic base and a generally plate-shaped lid. The base has a structure in which multiple sheets are laminated. Some of the sheets have holes. The sheets are laminated so that the positions of the holes are aligned with each other. This gives the base a recess. A metallized plating layer is laminated on the outer periphery of the opening edge of the recess in the base. The lid is joined to the metallized plating layer of the base by laser irradiation. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2002-246493 A Summary of the Invention [Problem to be solved by the invention]

[0004] In an electronic component package such as that described in Patent Document 1, the thickness of an electronic component that can be housed in the electronic component package is limited to the depth of the recess in the base. On the other hand, when trying to increase the depth of the recess, it is necessary to increase the number of layers of each sheet in the base. This increases the number of steps required to manufacture the base. In addition, forming a deep recess in a base used in an electronic component package, not limited to a base formed by laminating multiple sheets, is undesirable because it increases the number of steps required to manufacture the base and complicates the manufacturing process. [Means for solving the problem]

[0005] In order to solve the above problems, the present invention provides an electronic component package comprising a ceramic base, a metallized layer which is a metal film formed on a specific plane of the outer surface of the base when the specific plane is set as the specific surface, a metallic lid, a plating layer located between the metallized layer and the lid, and an electronic component mounted on the base, wherein the lid has a lid main body having a recess, and a ring-shaped flange along the opening edge of the recess, the flange protruding outward from the recess in a direction horizontal to the specific surface and joined to the metallized layer via the plating layer, the metallized layer is ring-shaped facing the flange, the base blocks the opening of the recess, and the electronic component is located in a space partitioned by the base and the lid.

[0006] In addition, in order to solve the above-mentioned problems, the present invention provides a method for manufacturing an electronic component package, comprising: a lid preparation step of preparing a lid body having a recess, and a flange that extends outward from the recess in a direction horizontal to a virtual plane surrounded by the opening edge of the recess; a metallization step of forming a metallization layer in a ring shape on a specific plane corresponding to the flange, when a specific plane among the outer surface of a ceramic base on which an electronic component is mounted is set as a specific plane; a plating step of laminating a plating layer on the metallization layer on the opposite side to the base; and a joining step of positioning the flange on the plating layer so that the electronic component is located inside the recess, and joining the flange to the metallization layer via the plating layer by irradiating the flange with a laser.

[0007] According to the above-mentioned configuration, the metal lid has a recess. Therefore, when it is desired to increase the internal volume of the electronic component package, it is only necessary to form the lid so that the recess is enlarged. Therefore, even if the internal volume of the electronic component package is increased, the manufacturing steps for the base body do not increase and the manufacturing process does not become complicated. Effect of the Invention

[0008] The internal volume of the electronic component package can be increased without increasing the number of steps required to manufacture the substrate or complicating the manufacturing process. [Brief description of the drawings]

[0009] [Figure 1] FIG. 2 is a perspective view of an electronic component package. [Diagram 2] FIG. 2 is a cross-sectional view taken along line 2-2 in FIG. [Diagram 3] FIG. 3 is an enlarged view of the electronic component package in FIG. [Figure 4] FIG. [Diagram 5] FIG. 11 is a cross-sectional view of the lid after a lid preparation step. [Figure 6] FIG. 4 is a cross-sectional view of the base body and the bonding layer portion after a plating process. [Figure 7] FIG. 11 is a cross-sectional view of an electronic component package according to a modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] <One embodiment of electronic component package> Hereinafter, an embodiment of an electronic component package will be described with reference to the drawings. Note that the drawings may show components enlarged for ease of understanding. The dimensional ratios of the components may differ from those in the actual drawings or from those in other drawings.

[0011] (Overall structure) As shown in FIG. 1, the electronic component package 10 has an overall appearance of a substantially rectangular parallelepiped. The electronic component package 10 includes a base 20, a lid 30, and a bonding layer 40. The lid 30 is bonded to the base 20 via the bonding layer 40. As shown in FIG. 2, the lid 30 has a first recess 32. Similarly, the base 20 has a second recess 22. The second recess 22 of the base 20 faces the first recess 32 of the lid 30. Therefore, the base 20 closes the first recess 32 of the lid 30. The base 20 and the lid 30 define an internal space S of the electronic component package 10. The internal space S is filled with, for example, an inert gas.

[0012] As shown in Fig. 2, the electronic component package 10 includes an electronic component 50. The electronic component 50 is located in the internal space S of the electronic component package 10. The electronic component 50 is mounted on the base 20. In this embodiment, the electronic component 50 is mounted on the bottom surface of the second recess 22. Note that the term "mounting" here refers not only to a case where an electrode of the electronic component 50 is connected to wiring or the like of the base 20, but also to a case where the electronic component 50 is simply fixed to the base 20. The electronic component 50 is, for example, a quartz crystal resonator.

[0013] (About the base) As shown in Figs. 1 and 2, the shape of the base 20 is a substantially rectangular box shape having a second recess 22 having a substantially rectangular parallelepiped shape. A specific flat surface of the outer surface of the base 20 is defined as a specific surface 21. In this case, the specific surface 21 of the base 20 is a surface having an opening of the second recess 22. The specific surface 21 is in a rectangular ring shape so as to surround the second recess 22. In the following description, the opening edge of the second recess 22 is the edge on the inner periphery side of the rectangular ring-shaped specific surface 21.

[0014] The base 20 is made of ceramic. Specifically, the material of the base 20 is alumina ceramics made of aluminum oxide. Although not shown, the base 20 has a structure in which a plurality of sheet-like ceramics are laminated. Holes are formed in some of the sheets constituting the base 20. The sheets are laminated so that the holes of each sheet match. This forms a second recess 22 in the base 20. Note that, in the base 20 after the sheets are laminated and fired, the sheets are integrated, and therefore the boundaries between the sheets may not be distinguishable.

[0015] (About the bonding layer) 3, the bonding layer portion 40 includes a metallized layer 41, a brazing material layer 42, a seal ring 43, and a plating layer 44. The above layers are laminated in the order of the metallized layer 41, the brazing material layer 42, the seal ring 43, and the plating layer 44 from the specific surface 21 side of the base body 20. Therefore, the brazing material layer 42 is located between the metallized layer 41 and the plating layer 44. The seal ring 43 is located between the brazing material layer 42 and the plating layer 44. Furthermore, the plating layer 44 is located between the metallized layer 41 and the lid body 30.

[0016] The metallized layer 41 is a metal film formed on the specific surface 21 of the substrate 20. The metallized layer 41 is in a quadrangular ring shape, reflecting the shape of the specific surface 21 in a plan view. The material of the metallized layer 41 is a metal that has high connectivity with ceramics. For example, the material of the metallized layer 41 includes tungsten, molybdenum, manganese, etc. The material of the metallized layer 41 also includes glass.

[0017] The brazing material layer 42 is laminated on the surface of the metallized layer 41. The brazing material layer 42 extends over substantially the entire surface of the metallized layer 41. In other words, the brazing material layer 42 has a quadrangular ring shape. The brazing material layer 42 is a metal layer for brazing the metallized layer 41 and the seal ring 43. The material of the brazing material layer 42 contains one or more metals selected from gold, silver, and copper.

[0018] 3, the electronic component package 10 is viewed in cross section along a plane perpendicular to the specific surface 21. In this cross section, the dimension of the brazing material layer 42 in the direction along the specific surface 21 is defined as the width WB of the brazing material layer 42. In addition, in the same cross section, the dimension of the metallized layer 41 in the direction along the specific surface 21 is defined as the width WM of the metallized layer 41. In this case, the dimension of the width WB of the brazing material layer 42 is approximately the same as the dimension of the width WM of the metallized layer 41 on the same cross section.

[0019] 3, the seal ring 43 is laminated on the surface of the brazing material layer 42. The seal ring 43 covers substantially the entire surface of the brazing material layer 42. That is, the seal ring 43 has a rectangular ring shape, similar to the metallized layer 41 and the brazing material layer 42. The seal ring 43 is made of a material such as Kovar.

[0020] Here, as shown in FIG. 3, the electronic component package 10 is viewed in cross section on a plane perpendicular to the specific surface 21. In this cross section, the width of the seal ring 43 in the direction along the specific surface 21 is defined as the seal ring width WS. In addition, in the same cross section, the dimension from the opening edge of the second recess 22 on the specific surface 21 to the outer edge of the specific surface 21 is defined as the edge width WE of the base 20. At this time, in the same cross section, the dimension of the seal ring width WS is smaller than the dimension of the edge width WE of the base 20. In addition, the size of the opening of the seal ring 43 is equal to or larger than the size of the opening of the second recess 22 of the base 20. In this embodiment, when the electronic component package 10 is viewed in a direction perpendicular to the specific surface 21, the opening edge of the seal ring 43 approximately coincides with the opening edge of the second recess 22. In addition, in the same cross section, the dimension of the seal ring width WS is approximately the same as the dimension of the width WB of the brazing material layer 42 and the dimension of the width WM of the metallization layer 41.

[0021] The plating layer 44 is laminated on the surface of the seal ring 43. The plating layer 44 covers almost the entire surface of the seal ring 43. That is, the plating layer 44 is in a quadrangular ring shape, similar to the metallization layer 41, the brazing material layer 42, and the seal ring 43. The material of the plating layer 44 is a metal containing one or more selected from gold, silver, and copper. The plating layer 44 is a metal layer for joining the seal ring 43 and the lid 30. Here, as shown in FIG. 3, the electronic component package 10 is viewed in cross section on a plane perpendicular to the specific surface 21. Then, in this cross section, the dimension of the plating layer 44 in the direction along the specific surface 21 is defined as the width WP of the plating layer 44. The dimension of the width WP of the plating layer 44 is approximately the same as the seal ring width WS.

[0022] The wavelength range of 0.9 μm or more and 1.1 μm or less is defined as the specific wavelength range. In the specific wavelength range, the absorbance of the plating layer 44 is lower than the absorbance of the seal ring 43. This difference in absorbance is due to the difference in the material of the plating layer 44 and the material of the seal ring 43.

[0023] (About the lid) As shown in FIG. 1 and FIG. 2, the shape of the lid body 30 is a substantially rectangular box shape having a first recess 32 having a substantially rectangular parallelepiped shape. The lid body 30 is made of metal. Specifically, the material of the lid body 30 is the same as the material of the seal ring 43. That is, the material of the lid body 30 is Kovar or the like. The lid body 30 has a lid body main body 31 and a flange 33. The lid body main body 31 has the above-mentioned first recess 32. That is, the lid body main body 31 is substantially rectangular box-shaped. The flange 33 protrudes outward from the opening edge of the first recess 32 in the lid body main body 31 in a direction horizontal to the specific surface 21. The flange 33 extends over the entire opening edge of the first recess 32. Therefore, the flange 33 is a rectangular ring shape. The lid body 30 is an integrally molded product of the lid body main body 31 and the flange 33. Therefore, the lid body 30 also has a recess. The opening edge of the lid 30 is the edge on the internal space S side of the joining surface 34 of the flange 33 with respect to the plating layer 44.

[0024] 3, the electronic component package 10 is viewed in cross section along a plane perpendicular to the specific surface 21 of the base 20. In this cross section, the width in the direction along the specific surface 21 from the opening edge of the first recess 32 of the lid 30 to the tip of the flange 33 is defined as the flange width WF. In this case, on the same cross section, the dimension of the flange width WF is smaller than the dimension of the edge width WE of the specific surface 21. The dimension of the flange width WF is also smaller than the dimension of the seal ring width WS.

[0025] In addition, in the above cross section, the maximum dimension TF2 of the flange 33 in a direction perpendicular to the specific surface 21 is smaller than the maximum dimension TS2 of the seal ring 43 in a direction perpendicular to the specific surface 21. A portion of the flange 33 including the joint surface 34 facing the plating layer 44 is defined as a joint 35. The joint 35 has a so-called fillet shape. That is, when viewed in cross section on a plane perpendicular to the specific surface 21, the dimension of the joint 35 in the direction along the specific surface 21 increases as the joint 35 approaches the plating layer 44. The joint 35 has a fillet shape not only on the tip side of the flange 33 but also in the vicinity of the opening edge of the first recess 32.

[0026] In addition, in a specific wavelength range, the absorbance of the plating layer 44 is lower than that of the flange 33. In addition, the absorbance of the flange 33 is substantially the same as that of the seal ring 43. The difference in absorbance is due to the differences in the materials of the flange 33, the plating layer 44, and the seal ring 43.

[0027] (About the manufacturing method of electronic component packages) Next, an embodiment of a method for manufacturing the electronic component package 10 will be described with reference to the drawings. It is assumed that the base 20 is previously formed into the above-mentioned shape.

[0028] As shown in FIG. 4, the method for manufacturing the electronic component package 10 includes a lid preparation step S101, a metallization step S102, a brazing step S103, a seal ring bonding step S104, a plating step S105, a mounting step S106, and a bonding step S107.

[0029] As shown in FIG. 4, first, in the lid preparation step S101, a formed lid 30 is prepared. The lid 30 is formed as follows. First, a metal plate made of Kovar or the like is prepared. Then, the metal plate is formed into a substantially rectangular box shape by pressing or the like to form the lid body 31. At this time, the flange 33 is also formed at the same time as the lid body 31. That is, a bend is formed from the opening edge of the first recess 32 toward the outside by pressing or the like. Here, the angle between the bottom surface of the first recess 32 provided in the lid body 31 and the side surface of the lid body 31 is formed to be 45 degrees or more and 90 degrees or less.

[0030] Next, as shown in Fig. 4, a metallization step S102 is performed. In the metallization step S102, first, a metallization paste is applied in a rectangular ring shape over substantially the entire area of ​​the specific surface 21 of the base 20 in correspondence with the flange 33. The metallization paste is made of tungsten, molybdenum, manganese, etc. Next, the metallization paste is fired. As a result, a metallization layer 41 is formed on the specific surface 21 of the base 20.

[0031] Next, as shown in Fig. 4, a brazing step S103 is performed. In the brazing step S103, first, a brazing material is applied in a rectangular ring shape over substantially the entire surface of the metallized layer 41. The brazing material is one or more metals selected from gold, silver, and copper. As a result, a brazing material layer 42 is formed on the surface of the metallized layer 41.

[0032] Next, as shown in Fig. 4, a seal ring bonding step S104 is performed. In the seal ring bonding step S104, first, the seal ring 43 is placed on the surface of the brazing material. The seal ring 43 is a rectangular ring-shaped metal made of Kovar or the like. Next, the seal ring 43 and the brazing material are heated. As a result, the seal ring 43 is bonded to the metallized layer 41 via the brazing material layer 42.

[0033] Next, as shown in FIG. 4, a plating step S105 is performed. In the plating step S105, a plating layer 44 is laminated on the metallized layer 41 on the side opposite to the base body 20 by electroplating or the like. Specifically, the surface of the seal ring 43 joined to the base body 20 is immersed in a plating solution, and a predetermined current is passed through it. As a result, the plating layer 44 is laminated on the surface of the seal ring 43. The components of the plating solution are selected so that the absorbance of the plating layer 44 is lower than the absorbance of the flange 33. Specifically, the plating solution is a solution containing one or more metals selected from gold, silver, and copper.

[0034] Next, a mounting step S106 is performed as shown in Fig. 4. In this mounting step S106, an electronic component 50 is mounted on the bottom surface of the second recess 22 of the base 20 by any method. Next, as shown in FIG. 4, a bonding step S107 is performed. Here, before performing the bonding step S107, a virtual plane P is assumed to be a plane surrounded by the opening edge of the first recess 32 for the lid body 30 formed in the lid body preparation step S101. Then, as shown in FIG. 5, a cross-section is taken along a plane perpendicular to the virtual plane P. At that time, the dimension of the flange 33 in a direction perpendicular to the virtual plane P is defined as a flange thickness TF1. Also, as shown in FIG. 6, before performing the bonding step S107 and after performing the seal ring bonding step S104, a dimension of the seal ring 43 in a direction perpendicular to the specific surface 21 of the base body 20 when viewed in cross-section along a plane perpendicular to the specific surface 21 is defined as a seal ring thickness TS1. At this time, the flange thickness TF1 is equal to or less than the seal ring thickness TS1.

[0035] In the bonding process S107, in the internal space S under an inert atmosphere, the flange 33 is placed on the plating layer 44 so that the electronic component 50 is located inside the first recess 32. At this time, the flange 33 is in contact with the plating layer 44 over its entire area. Then, pulsed irradiation of a laser having a wavelength band in a specific wavelength range is performed over substantially the entire area of ​​the flange 33. This causes the flange 33 to melt and be bonded to the surface of the plating layer 44.

[0036] (Effects of the embodiment) (1) According to the above embodiment, the metal lid 30 has the first recess 32. Therefore, when it is desired to increase the internal volume of the electronic component package 10, it is sufficient to mold the lid 30 so that the first recess 32 is increased. Therefore, even if the internal volume of the electronic component package 10 is increased, the manufacturing man-hours for the base 20 do not increase, and the manufacturing process does not become complicated. Furthermore, even when the electronic component package 10 is made smaller, it is sufficient to mold the volume of the first recess 32 to be smaller. That is, it is easy to make the electronic component package 10 smaller while maintaining high airtightness. Therefore, it is possible to store a fine electronic component 50 inside the small base 20 and lid 30 without unnecessarily increasing the size of the electronic component package 10. This effect can be obtained not only when the base 20 is formed by laminating sheets.

[0037] (2) According to the above embodiment, the bonding between the base 20 and the lid 30 can be strengthened by the seal ring 43 and the brazing material layer 42. The absorbance of the plating layer 44 is lower than the absorbance of the seal ring 43 located between the flange 33 and the plating layer 44. As a result, when the flange 33 is bonded by irradiating a laser in a specific wavelength range, the plating layer 44 dissipates heat while suppressing laser absorption, thereby preventing the seal ring 43, the brazing material layer 42, the metallized layer 41, and the base 20 from becoming too hot and melting excessively.

[0038] (3) According to the above embodiment, the maximum dimension TF2 of the flange 33 of the lid 30 is relatively small. Therefore, even if the intensity of the irradiated laser is reduced or the irradiation time of the laser is shortened, the lid 30 can be sufficiently joined.

[0039] (4) According to the above embodiment, the flange width WF of the flange 33 is smaller than the edge width WE of the base body 20. Therefore, during the joining step S107, the molten flange 33 can be prevented from protruding from the base body 20.

[0040] (5) According to the above embodiment, the plating layer 44 is one or more metals selected from gold, silver, and copper. Gold, silver, and copper all have a relatively low absorptance of light in the wavelength range of 0.9 μm or more and 1.1 μm or less, and are therefore suitable materials for the plating layer 44. Furthermore, gold, silver, and copper have high thermal conductivity. Therefore, when the flange 33 is joined to the metallized layer 41 by laser light in the above wavelength range, heat is easily dissipated by the plating layer 44. Therefore, the electronic component package 10 is less likely to become hot.

[0041] (6) According to the above embodiment, the absorbance of the plating layer 44 is lower than that of the flange 33 in the specific wavelength range. Therefore, when the flange 33 is joined to the metallized layer 41 by irradiating a laser in the specific wavelength range, the flange 33 is likely to melt, while the plating layer 44 is unlikely to melt. Therefore, the plating layer 44 is likely to dissipate heat from the molten flange 33 while suppressing laser absorption. This makes it easier to prevent the seal ring 43, the brazing material layer 42, the metallized layer 41, and the base 20 from becoming too hot and melting excessively.

[0042] (7) According to the above embodiment, the joint 35, which is the joint portion of the lid 30 with the plating layer 44, has a so-called fillet shape on the inside and outside of the internal space S. This fillet shape ensures a wide joint area between the lid 30 and the plating layer 44. Therefore, when the lid 30 is molded, even if the flange 33 is molded small, high joint strength and high airtightness can be obtained.

[0043] (8) According to the above embodiment, the flange width WF is smaller than the edge width WE. Therefore, even if the lid 30 is slightly misaligned with respect to the base 20 during the joining step S107, the first recess 32 of the lid 30 can be sealed by the base 20.

[0044] (9) According to the above embodiment, the base 20 and the lid 30 are joined by laser irradiation. Therefore, even if the flange width WF is narrow when the lid 30 is molded, the joining can be performed relatively accurately. As a result, even if the internal volume of the first recess 32 is increased, the size of the electronic component package 10 can be prevented from becoming unnecessarily large.

[0045] (10) According to the above embodiment, the absorbance of the plating layer 44 in the specific wavelength range is lower than the absorbance of the flange 33. Then, in the joining step S107, a laser in the specific wavelength range is irradiated to the flange 33. As a result, the flange 33 is easily melted, while the plating layer 44 is not easily melted. Therefore, the plating layer 44 is easily able to dissipate heat from the molten flange 33 while suppressing laser absorption. As a result, the plating layer 44 and the flange 33 can be joined by laser irradiation while preventing the seal ring 43, the brazing material layer 42, the metallized layer 41, and the base 20 from becoming too hot and being excessively melted.

[0046] (11) According to the above embodiment, the flange thickness TF1 of the lid 30 is relatively small before the bonding step S107. Therefore, even if the intensity of the irradiated laser is reduced or the irradiation time of the laser is shortened, the lid 30 can be sufficiently bonded.

[0047] <Other embodiments> The shapes of the specific surface 21 of the base 20, the members constituting the bonding layer portion 40, and the opening edge of the second recess 22 are not limited to a rectangular ring shape. For example, these members may be ring shapes of polygons other than a rectangle, or may be ring shapes of circles. In other words, the above members may have any shape that surrounds the first recess 32.

[0048] The electronic component 50 mounted inside the electronic component package 10 is not limited to a quartz crystal resonator, etc. For example, it may be a MEMS element, a battery, etc. The shape and size of the base 20 are not limited to the example of this embodiment as long as it is possible to mount the electronic component 50. The same applies to the lid 30.

[0049] 7, the base 20 does not have to have the second recess 22. That is, the base 20 may be flat. In this example, the electronic component 50 is placed on the specific surface 21. The position and shape of the bonding layer portion 40 relative to the specific surface 21 are not important.

[0050] The material of the base 20 is not limited to alumina ceramics. The material of the base 20 is preferably a non-magnetic material that does not interfere with the operation of the electronic component 50 mounted inside the space of the electronic component package 10. For example, aluminum nitride.

[0051] The bonding layer portion 40 may include at least the metallized layer 41 and the plating layer 44. In other words, as long as the first recess 32 of the lid 30 can be sealed with the base 20, the bonding layer portion 40 does not need to include one or both of the brazing material layer 42 and the seal ring 43. The bonding layer portion 40 may also include layers or members other than the metallized layer 41, the brazing material layer 42, the seal ring 43, and the plating layer 44.

[0052] When the bonding layer 40 does not have either or both of the brazing material layer 42 and the seal ring 43, it is desirable that the thickness of the bonding layer 40 from the specific surface 21 to the bonding surface 34 with the flange 33 is ⅓ or more of the plate thickness of the lid 30. This allows heat to be absorbed in the bonding layer 40, and the transfer of excess heat to the base 20 can be suppressed.

[0053] The materials of the metallized layer 41, the brazing material layer 42, the seal ring 43, and the plating layer 44 are not limited to those mentioned in this embodiment. In particular, the plating layer 44 does not have to contain one or more metals selected from gold, silver, and copper. In addition, the material of the seal ring 43 is preferably a metal with a linear expansion coefficient close to that of ceramic. This makes it less likely that poor bonding will occur.

[0054] The metallization layer 41 does not have to contain glass. The width WB of the brazing material layer 42, the width WM of the metallization layer 41, the seal ring width WS, and the width WP of the plating layer 44 may be different from one another.

[0055] The seal ring 43 and the flange 33 do not have to be made of the same material. The material of the seal ring 43 and the cover 30 is not limited to Kovar, but may be, for example, an alloy of iron and nickel.

[0056] The absorbance of the plating layer 44 may be equal to or greater than the absorbance of the seal ring 43 in a specific wavelength range. The width WM of the plating layer 44 may be equal to or greater than the width of the metallized layer 41. The plating layer 44 may cover one or more side surfaces selected from the seal ring 43, the brazing material, and the metallized layer 41.

[0057] The materials of the lid 30 and the flange 33 are not limited to those in this embodiment. The materials of the lid body 31 and the flange 33 may be different. That is, the flange 33 may be formed by joining a member made of a different material to the lid body 31 to the opening edge of the box-shaped lid body 31.

[0058] · The flange width WF may be greater than or equal to the edge width WE. · The flange width WF may be greater than or equal to the seal ring width WS. The maximum dimension TF2 of the flange 33 may be equal to or greater than the maximum dimension TS2 of the seal ring 43 in a direction perpendicular to the specific surface 21.

[0059] The joint 35 of the lid 30 does not have to be in a fillet shape. The absorbance of the plating layer 44 may be equal to or greater than the absorbance of the flange 33 in a specific wavelength range.

[0060] The manufacturing method of the electronic component package 10 may include at least the lid preparation step S101, the metallization step S102, the plating step S105, and the bonding step S107. That is, both or one of the brazing step S103 and the seal ring bonding step S104 may be omitted. Also, there may be steps not listed in this embodiment. For example, there may be a step of bonding layers or members other than the metallization layer 41, the brazing material layer 42, the seal ring 43, and the plating layer 44.

[0061] In the method for manufacturing the electronic component package 10, the lid preparation step S101 may be performed at any time before the bonding step S107. In the lid preparation step S101, the method for forming the lid body 31 and the flange 33 is not limited to press processing.

[0062] In the lid preparation step S101, the angle between the bottom surface of the first recess 32 and the side surface of the lid main body 31 may be less than 45 degrees or greater than 90 degrees. By increasing the angle between the bottom surface and the side surface of the lid 30, the external size of the electronic component package 10 and the volume of the internal space S can be adjusted.

[0063] In the metallization step S102, the material of the metallization paste is not limited to the example of this embodiment as long as it can form a metal film on the specific surface 21 of the base 20. In the brazing step S103, the material of the brazing material is not limited to the example of this embodiment as long as it can braze two layers.

[0064] In the plating step S105, as long as the joining layer portion 40 excluding the plating layer 44 and the flange 33 can be joined, the components of the plating solution are not limited to those in the example of this embodiment. In the joining step S107, the wavelength band of the laser used may be outside the specific wavelength range as long as it can join the flange 33 and the joining layer portion 40. In other words, the wavelength range of the laser may be less than 0.9 μm or greater than 1.1 μm.

[0065] Prior to the joining process, the flange thickness TF1 may be greater than the seal ring thickness TS1. <Additional Notes> The technical ideas that can be understood from the above-described embodiment and modified examples are described below.

[0066] (1) The electronic component is provided with a ceramic base, a metallized layer which is a metal film formed on a specific surface of an outer surface of the base when the specific surface is a specific surface, a metal lid, a plating layer located between the metallized layer and the lid, and an electronic component mounted on the base; The lid body has a lid body main body having a recess and an annular flange along an opening edge of the recess, the flange extends outward from the recess in a direction parallel to the specific surface and is joined to the metallized layer via the plating layer, The metallization layer is annular so as to face the flange, the base closes an opening of the recess, The electronic component is located in a space defined by the base and the lid.

[0067] (2) a brazing material layer located between the metallization layer and the plating layer; a metal seal ring located between the brazing material layer and the plating layer. The electronic component package according to (1), wherein the plating layer has a lower absorbance than the seal ring in a wavelength range of 0.9 μm or more and 1.1 μm or less.

[0068] (3) When viewed in cross section on a plane perpendicular to the specific plane, The electronic component package according to (2), wherein the maximum dimension of the flange in a direction perpendicular to the specific surface is smaller than the maximum dimension of the seal ring in the direction perpendicular to the specific surface.

[0069] (4) When viewed in cross section on a plane perpendicular to the specific plane, An electronic component package according to (2) or (3), wherein a dimension in a direction along the specific surface from the opening edge of the recess to the tip of the flange is smaller than a dimension in a direction along the specific surface of the seal ring.

[0070] (5) The electronic component package according to any one of (1) to (4), wherein the plating layer contains one or more metals selected from gold, silver, and copper.

[0071] (6) The electronic component package according to any one of (1) to (5), wherein the plating layer has a lower absorbance than the flange in a wavelength range of 0.9 μm or more and 1.1 μm or less.

[0072] (7) a portion of the lid body including a bonding surface with respect to the plating layer is defined as a bonding portion; When viewed in cross section on a plane perpendicular to the specific plane, The electronic component package according to any one of (1) to (6), wherein the bonding portion has a dimension in a direction along the specific surface that increases toward the plating layer.

[0073] (8) When the recess is a first recess, the base has a second recess recessed relative to the specific surface, When viewed in cross section on a plane perpendicular to the specific plane, The electronic component package according to any one of (1) to (7), wherein a dimension in a direction along the specific surface from an opening edge of the first recess to a tip of the flange is smaller than a dimension from an opening edge of the second recess on the specific surface to an outer edge of the specific surface.

[0074] (9) a lid preparation step of preparing a lid body having a lid body main body having a recess and a flange extending outward from the recess in a direction horizontal to the imaginary plane, the imaginary plane being surrounded by an opening edge of the recess; a metallization step of forming a metallization layer in an annular shape on a specific surface of a ceramic base on which an electronic component is mounted, the specific surface corresponding to the flange; a plating step of laminating a plating layer on the metallized layer on the side opposite to the substrate; a bonding process for placing the flange on the plating layer so that the electronic component is located inside the recess, and bonding the flange to the metallized layer via the plating layer by irradiating the flange with a laser.

[0075] (10) the plating layer has a lower absorbance than the flange in a wavelength range of 0.9 μm or more and 1.1 μm or less; The method for manufacturing an electronic component package according to (9), wherein the flange is irradiated with a laser having a wavelength in the range of 0.9 μm to 1.1 μm in the bonding step.

[0076] (11) The method further includes a seal ring bonding step of bonding a metal seal ring between the metallized layer and the plating layer, A dimension of the seal ring in a direction perpendicular to the specific surface when viewed in cross section on a surface perpendicular to the specific surface is defined as a seal ring thickness; When viewed in cross section on a plane perpendicular to the imaginary plane, the dimension of the flange in a direction perpendicular to the imaginary plane is defined as a flange thickness. The method for manufacturing an electronic component package according to (9) or (10), wherein the flange has a thickness equal to or smaller than the seal ring thickness before the joining step. [Explanation of symbols]

[0077] 10...Electronic component packages 20...Base 21…Specific aspect 22…Second recess 30…Lid body 32…First recess 33…Flange 34…Joint surface 35…Joint part 41...Metallized layer 42…Brazing layer 43…Seal ring 44…Plating layer 50…Electronic components P…Virtual plane S101…Lid preparation process S102: Metallization process S103…Brazing process S104…Seal ring joining process S105: Plating process S106…Mounting process S107…Joining process TF1…Flange thickness TF2…Maximum dimensions TS1…Seal ring thickness TS2…Maximum dimensions WE…Edge width WF: Flange width WS…Seal ring width

Claims

1. The electronic component is provided with a ceramic base, a metallized layer which is a metal film formed on a specific surface of an outer surface of the base when the specific surface is a specific surface, a metal lid, a plating layer located between the metallized layer and the lid, and an electronic component mounted on the base; The lid body has a lid body main body having a recess and an annular flange along an opening edge of the recess, the flange extends outward from the recess in a direction parallel to the specific surface and is joined to the metallized layer via the plating layer, The metallization layer is annular so as to face the flange, the base closes an opening of the recess, the electronic component is located in a space defined by the base and the lid, a brazing material layer located between the metallization layer and the plating layer; a metal seal ring located between the brazing material layer and the plating layer. In the wavelength range of 0.9 μm or more and 1.1 μm or less, the absorbance of the plating layer is lower than the absorbance of the seal ring. Electronic component package.

2. When viewed in cross section on a plane perpendicular to the specific plane, The maximum dimension of the flange in a direction perpendicular to the specific surface is smaller than the maximum dimension of the seal ring in a direction perpendicular to the specific surface.

2. The electronic component package of claim 1.

3. When viewed in cross section on a plane perpendicular to the specific plane, A dimension from an opening edge of the recess to a tip end of the flange in a direction along the specific surface is smaller than a dimension of the seal ring in the direction along the specific surface.

2. The electronic component package of claim 1.

4. The electronic component is provided with a ceramic base, a metallized layer which is a metal film formed on a specific surface of an outer surface of the base when the specific surface is a specific surface, a metal lid, a plating layer located between the metallized layer and the lid, and an electronic component mounted on the base; The lid body has a lid body main body having a recess and an annular flange along an opening edge of the recess, the flange extends outward from the recess in a direction parallel to the specific surface and is joined to the metallized layer via the plating layer, The metallization layer is annular so as to face the flange, the base closes an opening of the recess, the electronic component is located in a space defined by the base and the lid, a portion of the lid body including a bonding surface with respect to the plating layer is defined as a bonding portion; When viewed in cross section on a plane perpendicular to the specific plane, The closer the joint is to the plating layer, the larger the dimension of the joint in the direction along the specific surface becomes. Electronic component package.

5. The electronic component is provided with a ceramic base, a metallized layer which is a metal film formed on a specific surface of an outer surface of the base when the specific surface is a specific surface, a metal lid, a plating layer located between the metallized layer and the lid, and an electronic component mounted on the base; The lid body has a lid body main body having a recess and an annular flange along an opening edge of the recess, the flange extends outward from the recess in a direction parallel to the specific surface and is joined to the metallized layer via the plating layer, The metallization layer is annular so as to face the flange, the base closes an opening of the recess, the electronic component is located in a space defined by the base and the lid, When the recess is a first recess, the base has a second recess recessed relative to the specific surface, When viewed in cross section on a plane perpendicular to the specific plane, A dimension from an opening edge of the first recess to a tip end of the flange in a direction along the specific surface is smaller than a dimension from an opening edge of the second recess to an outer edge of the specific surface. Electronic component package.

6. The plating layer contains one or more metals selected from gold, silver, and copper.

6. The electronic component package according to claim 1, 4 or 5.

7. In the wavelength range of 0.9 μm or more and 1.1 μm or less, the absorbance of the plating layer is lower than the absorbance of the flange.

6. The electronic component package according to claim 1, 4 or 5.

8. a lid preparation step of preparing a lid body having a lid body main body having a recess and a flange extending outward from the recess in a direction horizontal to the imaginary plane, the imaginary plane being surrounded by an opening edge of the recess; a metallization step of forming a metallization layer in an annular shape on a specific surface of a ceramic base on which an electronic component is mounted, the specific surface corresponding to the flange; a plating step of laminating a plating layer on the metallized layer on the side opposite to the substrate; and a joining step of placing the flange on the plating layer so that the electronic component is located inside the recess, and joining the flange to the metallized layer via the plating layer by irradiating the flange with a laser. A method for manufacturing electronic component packages.

9. the flange has a higher absorbance than the plating layer in a wavelength range of 0.9 μm or more and 1.1 μm or less; In the joining step, a laser having a wavelength in the range of 0.9 μm to 1.1 μm is irradiated onto the flange. The method for manufacturing an electronic component package according to claim 8 .

10. The method further includes a seal ring bonding step of bonding a metal seal ring between the metallized layer and the plating layer, A dimension of the seal ring in a direction perpendicular to the specific surface when viewed in cross section on a surface perpendicular to the specific surface is defined as a seal ring thickness; When viewed in cross section on a plane perpendicular to the imaginary plane, the dimension of the flange in a direction perpendicular to the imaginary plane is defined as a flange thickness. Before the joining step, the flange thickness is equal to or less than the seal ring thickness. The method for manufacturing an electronic component package according to claim 8 or 9.

Images