Sensor modules, battery packs

Abstract

To provide a sensor module capable of accurately detecting a state of a battery.SOLUTION: A sensor module includes: a metal strain generating body adhered to an outer surface of a housing for housing a battery; and a strain gauge provided on one surface of the strain generating body and having a Cr mixed phase film as a resistor. A plurality of adhesion areas which are adhered to the housing and are spaced from each other are defined on the other surface of the strain generating body. The strain gauge is arranged in a region which does not face the adhesion area of the one surface of the strain generating body.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a sensor module and a battery pack. [Background technology]

[0002] In battery packs used in mobile devices and the like, the batteries in the battery pack may expand due to a decrease in the battery life, etc., which may cause leakage, etc. Therefore, it is important to detect battery expansion in the battery pack, and various devices for detecting battery expansion have been proposed.

[0003] One example is a device that detects the internal pressure using a strain gauge placed in the inner space of a lithium secondary battery and displays the detected internal pressure on a display. This device can determine whether the lithium secondary battery is normal or abnormal by monitoring the displayed internal pressure (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2002-289265 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, since the distortion caused by battery expansion is small, it has been difficult to detect it accurately using previously proposed devices.

[0006] The present invention has been made in consideration of the above-mentioned points, and has an object to provide a sensor module that is capable of detecting the state of a battery with high accuracy. [Means for solving the problem]

[0007] This sensor module has a metallic elastic body that is bonded to the outer surface of a housing that contains a battery, and a strain gauge that is provided on one side of the elastic body and uses a Cr mixed phase film as a resistor.The other side of the elastic body has a plurality of spaced-apart adhesive areas that are bonded to the housing, and the strain gauge is positioned in an area of ​​the one side of the elastic body that does not face the adhesive areas. Effect of the Invention

[0008] According to the disclosed technique, it is possible to provide a sensor module capable of detecting the state of a battery with high accuracy. [Brief description of the drawings]

[0009] [Figure 1] 1 is a plan view illustrating a battery pack according to a first embodiment. [Diagram 2] 1 is a cross-sectional view illustrating a battery pack according to a first embodiment. [Diagram 3] FIG. 13 is a cross-sectional view (part 1) illustrating a state in which a housing is deformed due to expansion of a battery. [Figure 4] FIG. 2 is a plan view illustrating the strain gauge according to the first embodiment. [Diagram 5] 1 is a cross-sectional view illustrating a strain gauge according to a first embodiment. [Figure 6] FIG. 11 is a plan view illustrating a battery pack according to a second embodiment. [Figure 7] 6 is a cross-sectional view illustrating a battery pack according to a second embodiment. FIG. [Figure 8] 13 is a cross-sectional view (part 2) illustrating a state in which the housing is deformed due to battery expansion. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and duplicated explanations may be omitted.

[0011] In the following embodiments and modifications, examples of detecting battery expansion are mainly shown, but the present invention is not limited thereto, and the sensor module according to each embodiment can detect various battery states. Examples of various battery states include battery contraction, the presence or absence of protrusions or recesses, shape distribution, temperature, etc., in addition to battery expansion.

[0012] First Embodiment Fig. 1 is a plan view illustrating a battery pack according to the first embodiment. Fig. 2 is a cross-sectional view illustrating the battery pack according to the first embodiment, showing a cross section along the line AA in Fig. 1.

[0013] 1 and 2, the battery pack 1 has a housing 10, a sensor module 20, and adhesive layers 31 and 32. The battery pack 1 is a battery pack in which the sensor module 20 is adhered to the outer surface of the housing 10 that houses a battery, and can be widely used in various electronic devices such as personal computers and smartphones, mobile terminals, and the like.

[0014] The housing 10 is a case that houses a battery, and is made of, for example, metal or resin. Components other than the battery, such as a circuit board and an external output terminal, may be housed inside the housing 10. The battery housed in the housing 10 is, for example, a secondary battery such as a lithium ion battery, and a plurality of batteries are housed and appropriately connected in parallel and / or series.

[0015] The sensor module 20 is a sensor that detects deformation of the housing 10 due to expansion of the battery. The sensor module 20 has a flexure body 50 and a strain gauge 100 disposed on one surface of the flexure body 50 via an adhesive layer 70.

[0016] The flexure body 50 has a rectangular shape in a plan view and is bent into an L-shape in a cross-sectional view. The strain gauge 100 is provided on the upper surface of the long side of the L-shape of the flexure body 50, near the bent portion where the long side and short side of the L-shape are connected, via an adhesive layer 70. In other words, the strain gauge 100 is disposed above the corner where the upper surface and side of the housing 10 are connected.

[0017] The material of the adhesive layer 70 is not particularly limited and can be appropriately selected depending on the purpose, and for example, epoxy resin, modified epoxy resin, silicone resin, modified silicone resin, urethane resin, modified urethane resin, etc. can be used. Double-sided tape may also be used as the adhesive layer 70. The thickness of the adhesive layer 70 is not particularly limited and can be appropriately selected depending on the purpose, and can be, for example, about 0.1 μm to 50 μm.

[0018] A plurality of mutually spaced adhesive regions are defined on the underside of the flexure body 50, which are adhered to the housing 10. In the example of Fig. 2, one adhesive region is defined at each of the long side end and short side end of the L-shape, with adhesive layer 31 provided in the adhesive region on the long side and adhesive layer 32 provided in the adhesive region on the short side. In the flexure body 50, the bent portion of the L-shape is a non-adhesive region that is not adhered to the housing 10.

[0019] The long side of the L-shape of the flexure body 50 is adhered to the upper surface of the housing 10 via an adhesive layer 31, and the short side of the L-shape of the flexure body 50 is adhered to the side surface of the housing 10 via an adhesive layer 32. The adhesive layers 31 and 32 may be the same as the adhesive layer 70, for example.

[0020] On the side (housing 10 side) opposite the area of ​​the flexure body 50 where the strain gauge 100 is arranged, no adhesive layer is arranged, and a space S is provided. In other words, the strain gauge 100 is arranged in an area that does not face the adhesive area on the upper surface of the flexure body 50. The provision of the space S allows the flexure body 50 to easily expand and contract in accordance with deformation of the housing 10 due to expansion of the battery, resulting in a large change in the resistance value of the strain gauge 100, and enabling deformation of the housing 10 to be detected with high sensitivity.

[0021] The flexure body 50 is made of metal. For example, SUS (stainless steel), Al, Fe, etc. can be used as the material of the flexure body 50. Of these, it is preferable to use SUS in terms of reducing the height and facilitating correction of the strain gauge for the flexure body. The thickness of the flexure body 50 can be, for example, about 0.05 mm or more and 0.2 mm or less. By making the thickness of the flexure body 50 0.05 mm or more, the necessary rigidity can be obtained and the space S can be secured. By making the thickness of the flexure body 50 0.2 mm or less, the flexure body 50 can expand and contract sufficiently.

[0022] Fig. 3 is a cross-sectional view (part 1) illustrating the state in which the housing is deformed due to the expansion of the battery. As shown in Fig. 3, for example, when gas is generated inside a battery placed in housing 10, the battery expands, causing the center of the upper and lower surfaces of housing 10 to swell and the corners to deform. As a result, distortion occurs in the center and corners of housing 10.

[0023] 3, it can be seen that the strain body 50 is also deformed in accordance with the deformation of the housing 10 due to the expansion of the battery. This causes a change in the resistance value of the strain gauge 100, making it possible to detect the deformation of the housing 10. In other words, it is possible to detect the expansion of the battery housed inside the housing 10.

[0024] In this way, when the flexure body 50 is bonded to the housing 10, a space S is provided between the underside of the flexure body 50 and the housing 10, and the strain gauge 100 is placed in the space S, which is an area that does not face the bonding area on the upper surface of the flexure body 50, so that deformation of the housing 10 due to expansion of the battery can be detected with high sensitivity.

[0025] Here, the strain gauge 100 will be described.

[0026] Fig. 4 is a plan view illustrating the strain gauge according to the first embodiment. Fig. 5 is a cross-sectional view illustrating the strain gauge according to the first embodiment, showing a cross section along line BB in Fig. 4. Referring to Figs. 4 and 5, the strain gauge 100 has a substrate 110, a resistor 130, wiring 140, electrodes 150, and a cover layer 160. For convenience, only the outer edge of the cover layer 160 is shown by a dashed line in Fig. 4. The cover layer 160 may be provided as necessary.

[0027] The substrate 110 is a flexible member that serves as a base layer for forming the resistor 130 and the like. The thickness of the substrate 110 is not particularly limited and can be appropriately selected depending on the purpose, and can be, for example, about 5 μm to 500 μm. In particular, a thickness of 5 μm to 200 μm is preferable in terms of the transferability of strain from the surface of the strain generator bonded to the lower surface of the substrate 110 via an adhesive layer or the like and dimensional stability against the environment, and a thickness of 10 μm or more is even more preferable in terms of insulation.

[0028] The substrate 110 can be formed from an insulating resin film such as PI (polyimide) resin, epoxy resin, PEEK (polyether ether ketone) resin, PEN (polyethylene naphthalate) resin, PET (polyethylene terephthalate) resin, PPS (polyphenylene sulfide) resin, LCP (liquid crystal polymer) resin, polyolefin resin, etc. The film refers to a flexible member having a thickness of about 500 μm or less.

[0029] Here, "formed from an insulating resin film" does not prevent the base material 110 from containing fillers, impurities, etc. in the insulating resin film. The base material 110 may be formed from an insulating resin film containing fillers such as silica or alumina.

[0030] Examples of materials other than resin for the base material 110 include crystalline materials such as SiO2, ZrO2 (including YSZ), Si, Si2N3, Al2O3 (including sapphire), ZnO, perovskite ceramics (CaTiO3, BaTiO3), and amorphous glass. Metals such as aluminum, aluminum alloys (duralumin), and titanium may also be used as the material for the base material 110. In this case, for example, an insulating film is formed on the metal base material 110.

[0031] The resistor 130 is a thin film formed in a predetermined pattern on the substrate 110, and is a sensing part that generates a resistance change when strained. The resistor 130 may be formed directly on the upper surface 110a of the substrate 110, or may be formed on the upper surface 110a of the substrate 110 via another layer. For convenience, the resistor 130 is shown in FIG. 4 with a dark matte pattern.

[0032] The resistor 130 has a structure in which multiple elongated parts are arranged at regular intervals with their longitudinal direction in the same direction (the direction of line BB in FIG. 4), and the ends of adjacent elongated parts are alternately connected, folding back in a zigzag pattern as a whole. The longitudinal direction of the multiple elongated parts is the grid direction, and the direction perpendicular to the grid direction is the grid width direction (the direction perpendicular to line BB in FIG. 4).

[0033] One end in the longitudinal direction of the two elongated portions located at the outermost sides in the grid width direction is bent in the grid width direction to form terminal ends 130e1 and 130e2 of the resistor 130 in the grid width direction. The terminal ends 130e1 and 130e2 of the resistor 130 in the grid width direction are electrically connected to the electrode 150 via the wiring 140. In other words, the wiring 140 electrically connects the terminal ends 130e1 and 130e2 of the resistor 130 in the grid width direction to the electrodes 150.

[0034] The resistor 130 can be formed, for example, from a material containing Cr (chromium), a material containing Ni (nickel), or a material containing both Cr and Ni. That is, the resistor 130 can be formed from a material containing at least one of Cr and Ni. An example of a material containing Cr is a Cr mixed phase film. An example of a material containing Ni is Cu-Ni (copper nickel). An example of a material containing both Cr and Ni is Ni-Cr (nickel chromium).

[0035] Here, the Cr mixed phase film is a film in which Cr, CrN, Cr2N, etc. are mixed. The Cr mixed phase film may contain inevitable impurities such as chromium oxide.

[0036] The thickness of the resistor 130 is not particularly limited and can be appropriately selected depending on the purpose, and can be, for example, about 0.05 μm to 2 μm. In particular, it is preferable that the thickness of the resistor 130 is 0.1 μm or more in order to improve the crystallinity of the crystals constituting the resistor 130 (for example, the crystallinity of α-Cr). It is further preferable that the thickness of the resistor 130 is 1 μm or less in order to reduce cracks in the film and warping from the substrate 110 caused by internal stress of the film constituting the resistor 130. The width of the resistor 130 can be optimized for required specifications such as resistance value and lateral sensitivity, and can be, for example, about 10 μm to 100 μm in consideration of measures against disconnection.

[0037] For example, when the resistor 130 is a Cr mixed phase film, the stability of the gauge characteristics can be improved by using α-Cr (alpha chromium) which is a stable crystal phase as the main component. In addition, by using α-Cr as the main component of the resistor 130, the gauge factor of the strain gauge 100 can be set to 10 or more, and the gauge factor temperature coefficient TCS and the resistance temperature coefficient TCR can be set within the range of -1000 ppm / °C to +1000 ppm / °C. Here, the main component means that the target substance accounts for 50% by weight or more of the total substance constituting the resistor, but from the viewpoint of improving the gauge characteristics, the resistor 130 preferably contains α-Cr at 80% by weight or more, and more preferably contains 90% by weight or more. Note that α-Cr is Cr with a bcc structure (body-centered cubic lattice structure).

[0038] Furthermore, when the resistor 130 is a Cr mixed-phase film, the Cr mixed-phase film preferably contains 20% by weight or less of CrN and Cr2N. By containing 20% ​​by weight or less of CrN and Cr2N in the Cr mixed-phase film, a decrease in the gauge factor can be suppressed.

[0039] In addition, the ratio of Cr2N in CrN and Cr2N is preferably 80% by weight or more and less than 90% by weight, and more preferably 90% by weight or more and less than 95% by weight. When the ratio of Cr2N in CrN and Cr2N is 90% by weight or more and less than 95% by weight, the decrease in TCR (negative TCR) becomes more significant due to the Cr2N having semiconductor properties. Furthermore, by reducing the formation of ceramics, brittle fracture is reduced.

[0040] On the other hand, if a small amount of N2 or atomic N is mixed into the film, it will escape from the film due to the external environment (for example, a high temperature environment), causing a change in the film stress.By creating chemically stable CrN, it is possible to obtain a stable strain gauge without generating the unstable N mentioned above.

[0041] The wiring 140 is formed on the base material 110 and is electrically connected to the resistor 130 and the electrode 150. The wiring 140 has a first metal layer 141 and a second metal layer 142 laminated on the upper surface of the first metal layer 141. The wiring 140 is not limited to a straight line and can have any pattern. The wiring 140 can have any width and any length. For convenience, the wiring 140 and the electrode 150 are shown in FIG. 4 with a matte finish that is thinner than the resistor 130.

[0042] The electrodes 150 are formed on the substrate 110 and are electrically connected to the resistor 130 via the wiring 140, and are formed, for example, in a substantially rectangular shape wider than the wiring 140. The electrodes 150 are a pair of electrodes for outputting a change in the resistance value of the resistor 130 caused by strain to the outside, and are connected, for example, to a lead wire or a flexible board for external connection. The substrate 110 and the wiring 140 may be extended so that the electrodes 150 are located at the ends of the strain generating body 50. This facilitates electrical connection between the electrodes 150 and the outside.

[0043] The electrode 150 has a pair of first metal layers 151 and a second metal layer 152 laminated on the upper surface of each of the first metal layers 151. The first metal layers 151 are electrically connected to the ends 130e1 and 130e2 of the resistor 130 via the first metal layers 141 of the wiring 140. The first metal layers 151 are formed in a substantially rectangular shape in a plan view. The first metal layers 151 may be formed to have the same width as the wiring 140.

[0044] Although the resistor 130, the first metal layer 141, and the first metal layer 151 are given different reference numbers for convenience, they can be integrally formed from the same material in the same process. Therefore, the resistor 130, the first metal layer 141, and the first metal layer 151 have approximately the same thickness. Moreover, the second metal layer 142 and the second metal layer 152 are given different reference numbers for convenience, but they can be integrally formed from the same material in the same process. Therefore, the second metal layer 142 and the second metal layer 152 have approximately the same thickness.

[0045] The second metal layers 142 and 152 are formed of a material having a lower resistance than the resistor 130 (the first metal layers 141 and 151). The material of the second metal layers 142 and 152 is not particularly limited as long as it is a material having a lower resistance than the resistor 130, and can be appropriately selected according to the purpose. For example, when the resistor 130 is a Cr mixed phase film, the material of the second metal layers 142 and 152 can be Cu, Ni, Al, Ag, Au, Pt, etc., or an alloy of any of these metals, a compound of any of these metals, or a laminated film in which any of these metals, alloys, and compounds are appropriately laminated. The thickness of the second metal layers 142 and 152 is not particularly limited and can be appropriately selected according to the purpose, and can be, for example, about 3 μm to 5 μm.

[0046] The second metal layers 142 and 152 may be formed on a part of the upper surface of the first metal layers 141 and 151, or may be formed on the entire upper surface of the first metal layers 141 and 151. One or more other metal layers may be laminated on the upper surface of the second metal layer 152. For example, the second metal layer 152 may be a copper layer, and a gold layer may be laminated on the upper surface of the copper layer. Alternatively, the second metal layer 152 may be a copper layer, and a palladium layer and a gold layer may be sequentially laminated on the upper surface of the copper layer. By forming the top layer of the electrode 150 as a gold layer, the solder wettability of the electrode 150 can be improved.

[0047] In this way, the wiring 140 has a structure in which the second metal layer 142 is laminated on the first metal layer 141 made of the same material as the resistor 130. Therefore, the resistance of the wiring 140 is lower than that of the resistor 130, and it is possible to prevent the wiring 140 from functioning as a resistor. As a result, it is possible to improve the accuracy of strain detection by the resistor 130.

[0048] In other words, by providing the wiring 140 having a lower resistance than the resistor 130, the actual sensing portion of the strain gauge 100 can be limited to the local region where the resistor 130 is formed. Therefore, the accuracy of strain detection by the resistor 130 can be improved.

[0049] In particular, in a highly sensitive strain gauge with a gauge factor of 10 or more that uses a Cr mixed phase film as the resistor 130, making the wiring 140 lower in resistance than the resistor 130 and limiting the actual sensing part to the local region where the resistor 130 is formed has a significant effect on improving the strain detection accuracy. Making the wiring 140 lower in resistance than the resistor 130 also has the effect of reducing the lateral sensitivity.

[0050] The cover layer 160 is formed on the base material 110, covers the resistor 130 and the wiring 140, and exposes the electrodes 150. A part of the wiring 140 may be exposed from the cover layer 160. By providing the cover layer 160 that covers the resistor 130 and the wiring 140, it is possible to prevent mechanical damage and the like from occurring to the resistor 130 and the wiring 140. Furthermore, by providing the cover layer 160, it is possible to protect the resistor 130 and the wiring 140 from moisture and the like. Note that the cover layer 160 may be provided so as to cover the entire portion except for the electrodes 150.

[0051] The cover layer 160 can be formed from an insulating resin such as PI resin, epoxy resin, PEEK resin, PEN resin, PET resin, PPS resin, or composite resin (e.g., silicone resin, polyolefin resin). The cover layer 160 may contain a filler or a pigment. There is no particular limit to the thickness of the cover layer 160 and it can be appropriately selected depending on the purpose, but it can be, for example, about 2 μm to 30 μm.

[0052] To manufacture the strain gauge 100, first, a base material 110 is prepared, and a metal layer (for convenience, referred to as metal layer A) is formed on an upper surface 110a of the base material 110. Metal layer A is a layer that is finally patterned to become resistor 130, first metal layer 141, and first metal layer 151. Therefore, the material and thickness of metal layer A are similar to the material and thickness of resistor 130, first metal layer 141, and first metal layer 151 described above.

[0053] The metal layer A can be formed by, for example, a magnetron sputtering method using a target made of a raw material capable of forming the metal layer A. The metal layer A may be formed by a reactive sputtering method, a vapor deposition method, an arc ion plating method, a pulsed laser deposition method, or the like instead of the magnetron sputtering method.

[0054] From the viewpoint of stabilizing the gauge characteristics, it is preferable to vacuum-deposit a functional layer of a predetermined thickness as a base layer on the upper surface 110a of the base material 110 by, for example, conventional sputtering, before depositing the metal layer A.

[0055] In the present application, the functional layer refers to a layer having a function of promoting the crystal growth of at least the upper layer, metal layer A (resistor 130). The functional layer preferably further has a function of preventing oxidation of metal layer A due to oxygen and moisture contained in the base material 110, and a function of improving adhesion between the base material 110 and metal layer A. The functional layer may further have other functions.

[0056] Since the insulating resin film that constitutes the substrate 110 contains oxygen and moisture, and since Cr forms a self-oxidized film, particularly when the metal layer A contains Cr, it is effective for the functional layer to have the function of preventing oxidation of the metal layer A.

[0057] The material of the functional layer is not particularly limited as long as it has the function of promoting the crystal growth of at least the upper layer, the metal layer A (resistor 130), and can be appropriately selected depending on the purpose. For example, Cr (chromium), Ti (titanium), V (vanadium), Nb (niobium), Ta (tantalum), Ni (nickel), Y (yttrium), Zr (zirconium), Hf (hafnium), Si (silicon), C (carbon), Zn (zinc), Cu (copper), Bi (bismuth), etc. Examples of the metals that can be used include one or more metals selected from the group consisting of copper (II), iron (Fe), molybdenum (Mo), tungsten (W), ruthenium (Ru), Rh (Rhodium), Re (Rhenium), Os (Osmium), Ir (Iridium), Pt (Platinum), Pd (Palladium), Ag (Silver), Au (Gold), Co (Cobalt), Mn (Manganese), and aluminum (Aluminum), an alloy of any of the metals in this group, or a compound of any of the metals in this group.

[0058] Examples of the alloy include FeCr, TiAl, FeNi, NiCr, CrCu, etc. Examples of the compound include TiN, TaN, Si3N4, TiO2, Ta2O5, SiO2, etc.

[0059] When the functional layer is made of a conductive material such as a metal or alloy, the thickness of the functional layer is preferably 1 / 20 or less of the thickness of the resistor. In this range, the crystal growth of α-Cr can be promoted, and a part of the current flowing through the resistor can be prevented from flowing through the functional layer, which reduces the detection sensitivity of strain.

[0060] When the functional layer is made of a conductive material such as a metal or alloy, the thickness of the functional layer is preferably 1 / 50 or less of the thickness of the resistor. In this range, the crystal growth of α-Cr can be promoted, and the strain detection sensitivity can be further prevented from being reduced due to a part of the current flowing through the resistor flowing through the functional layer.

[0061] When the functional layer is made of a conductive material such as a metal or alloy, the thickness of the functional layer is more preferably 1 / 100 or less of the thickness of the resistor, which can further prevent a part of the current flowing through the resistor from flowing through the functional layer, thereby preventing a decrease in the strain detection sensitivity.

[0062] When the functional layer is made of an insulating material such as an oxide or a nitride, the thickness of the functional layer is preferably 1 nm to 1 μm, which can promote the crystal growth of α-Cr and can be easily formed without cracking the functional layer.

[0063] When the functional layer is made of an insulating material such as an oxide or nitride, the thickness of the functional layer is preferably 1 nm to 0.8 μm, which can promote the crystal growth of α-Cr and can be easily formed without cracking the functional layer.

[0064] When the functional layer is made of an insulating material such as an oxide or nitride, the thickness of the functional layer is more preferably 1 nm to 0.5 μm, which can promote the crystal growth of α-Cr and can be more easily formed without cracking the functional layer.

[0065] The planar shape of the functional layer is patterned to be substantially the same as the planar shape of the resistor shown in FIG. 4, for example. However, the planar shape of the functional layer is not limited to being substantially the same as the planar shape of the resistor. When the functional layer is made of an insulating material, it does not have to be patterned to be the same as the planar shape of the resistor. In this case, the functional layer may be formed in a solid shape at least in the region where the resistor is formed. Alternatively, the functional layer may be formed in a solid shape over the entire upper surface of the substrate 110.

[0066] Furthermore, when the functional layer is made of an insulating material, the functional layer is formed relatively thick, at a thickness of 50 nm to 1 μm, and formed in a solid shape, so that the thickness and surface area of ​​the functional layer are increased, and the heat generated by the resistor can be dissipated to the substrate 110. As a result, in the strain gauge 100, a decrease in measurement accuracy due to self-heating of the resistor can be suppressed.

[0067] The functional layer can be formed in vacuum by conventional sputtering, for example, using a raw material capable of forming the functional layer as a target and introducing Ar (argon) gas into a chamber. By using conventional sputtering, the functional layer is formed while etching the upper surface 110a of the substrate 110 with Ar, so that the amount of the functional layer formed can be minimized and the effect of improving adhesion can be obtained.

[0068] However, this is just one example of a method for forming the functional layer, and the functional layer may be formed by other methods. For example, a method may be used in which the upper surface 110a of the substrate 110 is activated by a plasma treatment using Ar or the like before the formation of the functional layer, thereby improving adhesion, and then the functional layer is vacuum-formed by magnetron sputtering.

[0069] There are no particular restrictions on the combination of the material of the functional layer and the material of the metal layer A and can be selected appropriately depending on the purpose. For example, it is possible to use Ti for the functional layer and form a Cr mixed phase film with α-Cr (alpha chromium) as the main component for the metal layer A.

[0070] In this case, for example, the metal layer A can be formed by magnetron sputtering using a raw material capable of forming a Cr mixed phase film as a target and introducing Ar gas into a chamber. Alternatively, the metal layer A can be formed by reactive sputtering using pure Cr as a target and introducing an appropriate amount of nitrogen gas together with Ar gas into a chamber. In this case, the ratio of CrN and Cr2N contained in the Cr mixed phase film, and the ratio of Cr2N in CrN and Cr2N can be adjusted by changing the amount and pressure of the nitrogen gas introduced (nitrogen partial pressure) or by adjusting the heating temperature by providing a heating process.

[0071] In these methods, the growth surface of the Cr mixed-phase film is determined by the functional layer made of Ti, and a Cr mixed-phase film containing α-Cr, which has a stable crystal structure, as a main component, can be formed. Furthermore, the Ti constituting the functional layer is diffused into the Cr mixed-phase film, thereby improving the gauge characteristics. For example, the gauge factor of the strain gauge 100 can be set to 10 or more, and the gauge factor temperature coefficient TCS and the resistance temperature coefficient TCR can be set within the range of −1000 ppm / ° C. to +1000 ppm / ° C. In addition, when the functional layer is formed of Ti, the Cr mixed-phase film may contain Ti and TiN (titanium nitride).

[0072] When the metal layer A is a Cr mixed phase film, the functional layer made of Ti has all of the following functions: promoting the crystal growth of the metal layer A, preventing oxidation of the metal layer A due to oxygen and moisture contained in the base material 110, and improving the adhesion between the base material 110 and the metal layer A. The same applies when Ta, Si, Al, or Fe is used as the functional layer instead of Ti.

[0073] In this way, by providing a functional layer below the metal layer A, it is possible to promote crystal growth of the metal layer A, and to produce a metal layer A consisting of a stable crystal phase. As a result, it is possible to improve the stability of the gauge characteristics of the strain gauge 100. In addition, the material constituting the functional layer diffuses into the metal layer A, thereby improving the gauge characteristics of the strain gauge 100.

[0074] Next, the second metal layer 142 and the second metal layer 152 are formed on the upper surface of the metal layer A. The second metal layer 142 and the second metal layer 152 can be formed by, for example, a photolithography method.

[0075] Specifically, first, a seed layer is formed by, for example, sputtering or electroless plating so as to cover the upper surface of metal layer A. Next, a photosensitive resist is formed on the entire upper surface of the seed layer, and is exposed and developed to form openings that expose the regions in which second metal layer 142 and second metal layer 152 are to be formed. At this time, the pattern of second metal layer 142 can be formed into any shape by adjusting the shape of the openings in the resist. For example, a dry film resist can be used as the resist.

[0076] Next, for example, the second metal layer 142 and the second metal layer 152 are formed on the seed layer exposed in the opening by electrolytic plating using the seed layer as a power supply path. The electrolytic plating method is preferable in that it has high tact and can form low-stress electrolytic plating layers as the second metal layer 142 and the second metal layer 152. By making the electrolytic plating layer thick and low-stress, it is possible to prevent warping of the strain gauge 100. The second metal layer 142 and the second metal layer 152 may be formed by electroless plating.

[0077] Next, the resist is removed. For example, the resist can be removed by immersing the resist in a solution that can dissolve the resist material.

[0078] Next, a photosensitive resist is formed on the entire upper surface of the seed layer, and is exposed and developed to be patterned into a planar shape similar to that of the resistor 130, the wiring 140, and the electrode 150 in Fig. 4. For example, a dry film resist or the like can be used as the resist. Then, the resist is used as an etching mask to remove the metal layer A and the seed layer exposed from the resist, thereby forming the resistor 130, the wiring 140, and the electrode 150 in the planar shape of Fig. 4.

[0079] For example, unnecessary portions of the metal layer A and the seed layer can be removed by wet etching. If a functional layer is formed below the metal layer A, the functional layer is patterned by etching into the planar shape shown in Fig. 4, similar to the resistor 130, the wiring 140, and the electrode 150. At this point, the seed layer is formed on the resistor 130, the first metal layer 141, and the first metal layer 151.

[0080] Next, the second metal layer 142 and the second metal layer 152 are used as an etching mask to remove unnecessary seed layer exposed from the second metal layer 142 and the second metal layer 152, thereby forming the second metal layer 142 and the second metal layer 152. Note that the seed layer directly below the second metal layer 142 and the second metal layer 152 remains. For example, the unnecessary seed layer can be removed by wet etching using an etching solution that etches the seed layer but does not etch the functional layer, the resistor 130, the wiring 140, and the electrode 150.

[0081] Thereafter, as necessary, a cover layer 160 that covers the resistor 130 and the wiring 140 and exposes the electrodes 150 is provided on the upper surface 110a of the base material 110, thereby completing the strain gauge 100. The cover layer 160 can be produced, for example, by laminating a semi-cured thermosetting insulating resin film on the upper surface 110a of the base material 110 so as to cover the resistor 130 and the wiring 140 and expose the electrodes 150, and then heating and curing the film. The cover layer 160 may also be produced by applying a liquid or paste-like thermosetting insulating resin to the upper surface 110a of the base material 110 so as to cover the resistor 130 and the wiring 140 and expose the electrodes 150, and then heating and curing the resin.

[0082] Thus, the Cr mixed phase film has high sensitivity. Therefore, by using the strain gauge 100 in which the Cr mixed phase film is used as the resistor 130 in the sensor module 20, the sensitivity of the resistance value to the expansion of the battery is significantly improved compared to the case where the resistor 130 is made of Cu-Ni or Ni-Cr. When the resistor 130 is made of the Cr mixed phase film, the sensitivity of the resistance value to the expansion of the battery is approximately 5 to 10 times higher compared to the case where the resistor 130 is made of Cu-Ni or Ni-Cr. Therefore, by forming the resistor 130 from the Cr mixed phase film, it becomes possible to detect the expansion of the battery with high accuracy.

[0083] Second Embodiment In the second embodiment, an example of a sensor module having a different shape of the strain body and a battery pack to which the sensor module is applied will be described. Note that in the second embodiment, the description of the same components as those in the embodiments already described may be omitted.

[0084] Fig. 6 is a plan view illustrating a battery pack according to the second embodiment. Fig. 7 is a cross-sectional view illustrating the battery pack according to the second embodiment, showing a cross section along line CC in Fig. 6.

[0085] 6 and 7, battery pack 1A differs from battery pack 1 (see FIGS. 1 to 3, etc.) in that sensor module 20 is replaced with a sensor module 20A.

[0086] The sensor module 20A is a sensor that detects deformation of the housing 10 due to expansion of the battery. The sensor module 20A has a flexure body 50A and a strain gauge 100 disposed on one surface of the flexure body 50A via an adhesive layer 70.

[0087] The flexure body 50A is a long and narrow flat plate, and is not bent like the flexure body 50. The flexure body 50A is roughly rectangular in a plan view, but partially has a stress concentration portion 51. The stress concentration portion 51 is a region formed so that the cross-sectional area of ​​the flexure body 50A in the short side direction is smaller than other regions. The strain gauge 100 is disposed in the stress concentration portion 51.

[0088] The stress concentration portion 51 has two constrictions that face each other with the strain gauge 100 in between in a plan view. In the example of Fig. 6, the stress concentration portion 51 is formed by providing two trapezoidal constrictions on the two long sides of a rectangle so as to face each other with the strain gauge 100 in between, but is not limited to this shape. In addition, the position of the constrictions is not necessarily limited to near the center in the longitudinal direction of the strain body 50A, and may be provided at a position offset from the center. For example, the constrictions may be provided at a position close to the bonded region in the non-bonded region.

[0089] A plurality of adhesion regions are defined on the underside of the flexure body 50A, which are bonded to the housing 10. In the example of Fig. 7, one adhesion region is defined on each end of the longitudinal direction of the flexure body 50A, with an adhesive layer 31 provided in the adhesion region on one end side and an adhesive layer 32 provided in the adhesion region on the other end side. The rest of the flexure body 50A except for the ends is a non-adhesive region that is not bonded to the housing 10. The stress concentrating portion 51 is provided in the non-adhesive region.

[0090] In a longitudinal cross-sectional view of the flexure body 50A, the length of the region between the two bonded regions (i.e., the length of the non-bonded region) is preferably longer than the total length of the bonded regions. Since the strain gauge 100 can detect strain in the non-bonded region, by making the non-bonded region longer, deformation of the housing 10 due to battery expansion can be detected in a longer region of the flexure body 50A.

[0091] For example, if the housing 10 is made of metal, and the strain gauge 100 is attached directly to the top surface of the housing 10 without using the strain gauge 50A, it will be possible to detect strain only in the area where the strain gauge 100 is attached. In contrast, by attaching the elongated strain gauge 50A having the strain gauge 100 to the top surface of the housing 10 with both ends supported, it will be possible to detect strain over a wide range between the two supported points.

[0092] One end side in the longitudinal direction of the flexure body 50A is adhered to the upper surface of the housing 10 via an adhesive layer 31, and the other end side in the longitudinal direction of the flexure body 50A is adhered to the upper surface of the housing 10 via an adhesive layer 32. The strain gauge 100 is preferably disposed on the upper surface of the flexure body 50A near the center of the stress concentration portion 51. In other words, the strain gauge 100 is preferably disposed on the upper surface of the flexure body 50A in a region of the stress concentration portion 51 where the cross-sectional area in the short side direction is the smallest.

[0093] In the battery pack 1A, similarly to the battery pack 1, a space S is provided on the side (housing 10 side) opposite the area of ​​the strain gauge 100 of the flexure body 50A. In other words, the strain gauge 100 is provided in an area not facing the adhesive area on the upper surface of the flexure body 50A. The provision of the space S allows the flexure body 50A to easily expand and contract in accordance with deformation of the housing 10 due to expansion of the battery, resulting in a large change in the resistance value of the strain gauge 100, enabling deformation of the housing 10 to be detected with high sensitivity. The material and thickness of the flexure body 50A can be the same as those of the flexure body 50.

[0094] It is preferable that the length of the flexure body 50A in the longitudinal direction coincides with the length of the housing 10. This makes it possible to reduce misalignment when attaching the flexure body 50A to the housing 10.

[0095] Fig. 8 is a cross-sectional view (part 2) illustrating the state in which the housing is deformed due to the expansion of the battery. As shown in Fig. 8, for example, when gas is generated inside a battery placed in the housing 10, the battery expands, causing the center of the upper and lower surfaces of the housing 10 to swell and the corners to deform. As a result, distortion occurs in the center and corners of the housing 10.

[0096] 8, it can be seen that the strain body 50A is also deformed in accordance with the deformation of the housing 10 due to the expansion of the battery. This causes the resistance value of the strain gauge 100 to change, making it possible to detect the deformation of the housing 10. In other words, it is possible to detect the expansion of the battery housed inside the housing 10.

[0097] In this way, when bonding the flexure body 50A to the housing 10, a space S is provided between the lower surface of the flexure body 50A and the housing 10, and the strain gauge 100 is disposed in the space S, which is an area not facing the bonding area of ​​the upper surface of the flexure body 50A, so that the deformation of the housing 10 due to the expansion of the battery can be detected with good sensitivity. In particular, by disposing the strain gauge 100 in the stress concentration portion 51, the detection sensitivity of the deformation of the housing 10 due to the expansion of the battery can be improved. As in the first embodiment, it is preferable to use the strain gauge 100 having a Cr mixed phase film as the resistor 130 in the sensor module 20A.

[0098] Although the preferred embodiments have been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications and substitutions can be made to the above-described embodiments without departing from the scope of the claims.

[0099] For example, a stress concentration portion may be provided on the strain element 50 that is L-shaped in cross section, and the strain gauge 100 may be disposed at the stress concentration portion. This can further improve the detection sensitivity of the deformation of the housing 10 due to the expansion of the battery.

[0100] In addition, multiple sensor modules may be attached to one housing. In addition, one sensor module may have multiple strain gauges. For example, one sensor module may have four strain gauges, which are connected in a full bridge configuration. [Explanation of symbols]

[0101] 1,1A battery pack, 10 housing, 20,20A sensor module, 31,32 adhesive layer, 50,50A strain generating body, 51 stress concentration portion, 70 adhesive layer, 100 strain gauge, 110 substrate, 110a upper surface, 130 resistor, 140 wiring, 141,151 first metal layer, 142,152 second metal layer, 150 electrode, 160 cover layer

Claims

1. a metallic strain element bonded to an outer surface of a housing that houses the battery; A strain gauge having a Cr mixed phase film as a resistor, the strain gauge being provided on one surface of the strain generating body, A plurality of mutually spaced adhesive regions are defined on the other surface of the strain body and are adhered to the housing, The strain gauge is disposed on one surface of the strain element in a region not facing the adhesive region.

2. The sensor module according to claim 1 , wherein the strain element is L-shaped in cross section.

3. The sensor module according to claim 2 , wherein the adhesive regions are defined on each of the long side and the short side of the L-shape.

4. The sensor module according to claim 2 , wherein the L-shaped bent portion is a non-adhesive region that is not adhered to the housing.

5. The strain generating body is an elongated flat plate, The sensor module according to claim 1 , wherein the adhesive regions are defined on both ends of the strain body in a longitudinal direction.

6. The sensor module according to claim 5 , wherein in a cross-sectional view of the strain body in a longitudinal direction, a length of a region between two of the adhesive regions is longer than a total length of the adhesive regions.

7. The sensor module according to claim 5 , wherein a length of the strain generating element in a longitudinal direction coincides with a length of the housing.

8. The strain generating element has a stress concentration portion, The sensor module according to claim 1 , wherein the strain gauge is disposed in the stress concentration portion.

9. The sensor module according to claim 8 , wherein the stress concentrating portion has two constrictions that face each other across the strain gauge in a plan view.

10. The sensor module according to claim 1 , wherein the adhesive region is provided with an adhesive layer.

11. A battery pack comprising the sensor module according to claim 1 adhered to an outer surface of a housing that houses a battery.

Images