Semiconductor laser

Abstract

To provide a semiconductor laser which is efficiently operable.SOLUTION: A semiconductor laser (20) comprises: a support (21); an edge-emitting laser diode (22) which is arranged on the support (21) and has an active zone for generating laser radiation; a facet (23) having a radiation outlet region (24); an optical element (25) which covers the facet (23); a connection material (26) which is arranged between the optical element (25) and the facet (23); and a molded body (27) which at least partly covers the laser diode (22) and the optical element (25). The optical element (25) is at least partially transparent to the laser radiation emitted during operation by the laser diode (22), and the optical element (25) is designed to modify the main direction of propagation of the laser radiation entering the optical element (25) during operation.SELECTED DRAWING: Figure 1

Description

[Background technology]

[0001] A semiconductor laser is identified. Summary of the Invention [Problem to be solved by the invention]

[0002] An object of this disclosure is to identify semiconductor lasers that can be operated efficiently. [Means for solving the problem]

[0003] According to at least one embodiment of the semiconductor laser of the present invention, the semiconductor laser comprises a carrier. The carrier can be a so-called submount. The carrier can be a three-dimensional body, for example having the shape of a cylinder, a disk or a cube. The carrier can have a main extension plane. For example, the main extension plane of the carrier is parallel to a surface such as the top surface of the carrier. The carrier can comprise a semiconductor material.

[0004] The carrier may include a driver capable of controlling the semiconductor laser, or it may represent an electronically passive component and serve only as a packaging level.

[0005] According to at least one embodiment of the semiconductor laser of the invention, the semiconductor laser consists of an edge-emitting laser diode arranged on a carrier and having an active region for generating laser radiation and a facet with an emission exit region. The edge-emitting laser diode is designed, during operation, to emit laser radiation in a direction at least partially parallel to the main extension plane of the carrier. The active region has a main extension plane parallel to the main extension plane of the carrier. The laser diode is therefore not a surface emitter.

[0006] The laser diodes may comprise different semiconductor materials, for example based on the III-V semiconductor material system. The laser diodes may be arranged on the top surface of the carrier. The laser diodes may be connected to the carrier via electrical contacts, so that the laser diodes can be controlled via the carrier. For example, the laser diodes have electrical contacts on the side facing the top surface of the carrier, said contacts being electrically connected to the carrier. Alternatively, the laser diodes may be electrically connected to the carrier via bonding wires. The laser diodes may be mechanically attached to the carrier on the top surface.

[0007] The facets are oriented laterally, preferably orthogonally to the main extension plane of the active region. Furthermore, the facets are oriented laterally, preferably orthogonally to the main propagation direction of the laser radiation emitted during operation. In the radiation exit area, the laser radiation generated during operation leaves the laser diode. The radiation exit area is in particular a partial area of ​​the facet and is therefore limited to the facet.

[0008] According to at least one embodiment of the semiconductor laser of the invention, the semiconductor laser consists of an optical element covering the facet. The optical element can be designed to shape the emitted laser radiation. The optical element can completely cover the facet. For this purpose, the optical element can be attached to the facet. Also, the optical element can completely cover the radiation exit area.

[0009] According to at least one embodiment of the semiconductor laser of the invention, the semiconductor laser comprises a connecting member arranged between the optical element and the facet. The connecting member can at least partially cover the facet. For example, the facet is free from the connecting member in the radiation exit area. It is also possible for the connecting member to completely cover the facet. The optical element is mechanically attached to the laser diode via the connecting member.

[0010] In particular, the connecting member is arranged between the optical element and the facet in such a way that the radiation exit area is as enclosed as possible. This means, for example, that the connecting member is arranged around the radiation exit area. Alternatively, the connecting member can completely cover the facet and encapsulate it. Encapsulating the radiation exit area can mean that the radiation exit area is hermetically encapsulated with respect to the environment of the semiconductor laser. The encapsulation of the radiation exit area protects the radiation exit area from environmental influences, for example mechanical or chemical influences from the environment of the semiconductor laser. For example, the water vapor transmission rate through the connecting member is at most 1×10 -3 g / m 2 / day, preferably at most 3 × 10 -4 g / m 2 / day.

[0011] The connecting member may also include inorganic materials such as glass or metal. Additionally, the connecting member may include plastics such as silicone, silicone derivatives, silazanes, siloxanes, polysiloxanes, polysilazanes, or silicone hybrid materials. Alternatively, the connecting member may include epoxies or polymers of carbon-containing structural units.

[0012] According to at least one embodiment of the semiconductor laser of the invention, the semiconductor laser comprises a molding that at least partially covers the laser diode and the optical element. The molding may be an encapsulant. The molding is designed to protect the laser diode from environmental influences. The molding can be constructed by an injection molding method, a so-called Dam&Fill process, or a spraying method. For example, the molding comprises an epoxy resin, a thermoplastic resin, a silicone or a silicone derivative.

[0013] According to at least one embodiment of the semiconductor laser of the invention, the optical element is at least partially transparent to the laser radiation emitted by the laser diode during operation. This means that the laser radiation generated during operation can at least partially pass through the optical element. At the radiation inlet side of the optical element facing the radiation outlet area, at least a part of the laser radiation emitted by the laser diode can enter the optical element. At the radiation outlet side of the optical element, at least a part of the laser radiation can exit the optical element. The optical element can comprise sapphire, diamond, SiC or organosilicon compounds. In particular, the optical element exhibits low absorption of the laser radiation emitted by the laser diode during operation. Furthermore, the optical element may have a high thermal conductivity.

[0014] According to at least one embodiment of the semiconductor laser of the invention, the optical element is designed to change the main propagation direction of the laser radiation incident on the optical element during operation. The laser radiation emitted by the laser diode can have a main propagation direction parallel to the main extension plane of the carrier, for example. The main propagation direction can be the beam direction of the laser radiation. The laser radiation emitted by the semiconductor laser has a main propagation direction different from the main propagation direction of the laser radiation emitted by the laser diode. By passing through the optical element, the main propagation direction of the laser radiation is changed. For example, the main propagation direction of the laser radiation emitted by the laser diode is transverse or perpendicular to the main extension plane of the carrier.

[0015] For this purpose, the optical element can have the shape of a section of a sphere or an ellipsoid, for example the optical element has the shape of a quarter sphere, i.e. the shape of the optical element corresponds to a quarter of a sphere.

[0016] According to at least one embodiment of the semiconductor laser of the present invention, the semiconductor laser comprises a carrier, an edge-emitting laser diode arranged on the carrier and comprising a facet having an active region for generating laser radiation and a radiation exit region, an optical element covering the facet, a connecting member arranged between the optical element and the facet, and a molding at least partially covering the laser diode and the optical element, wherein the optical element is at least partially transparent to the laser radiation emitted by the laser diode during operation, and the optical element is designed to change the main propagation direction of the laser radiation incident on the optical element during operation.

[0017] The semiconductor laser described herein is based in particular on the idea that it can be operated under normal atmosphere without additional hermetic sealing. This means that the encapsulation and protection of the facet, in particular the radiation exit area, is achieved by the connecting member together with the optical element. Furthermore, the laser diode is encapsulated by the molding. This means that the semiconductor laser does not require a hermetically sealed housing. Due to the optical element and the molding arranged on the facet, the laser diode and the facet are already protected from environmental influences. Therefore, it is not necessary to arrange the laser diode in a larger housing in the cavity and encapsulate the housing. Therefore, less installation space is required for the semiconductor laser.

[0018] By sealing the facets, the facets are protected against particle deposition from the environment of the laser diode. Particle deposition or accumulation on the facets, especially in the radiation exit area, can cause interaction with the emitted laser radiation and cause heating in the area of ​​the facets. This can lead to the destruction of the laser diode. Deposits on the facets can be decomposed and burned out, especially by shortwave radiation. Such changes in the area of ​​the facets can reduce the decoupling efficiency of the semiconductor laser and can, for example, damage the facet coating by light absorption in the deposits, which can then lead to overheating. Sealing the facets by means of the connecting members therefore proves to be particularly advantageous. Furthermore, semiconductor lasers can be manufactured more cost-effectively and installed with reduced installation space requirements.

[0019] By using optical elements, it is possible to reduce the beam divergence of the laser radiation emitted by the laser diode. Otherwise, the electric field strength of the divergent beam can suck in any contaminants that may be in the vicinity of the facet and deposit them on the facet, like optical tweezers. Thus, a reduction in the beam divergence directly translates into a reduction in the deposition.

[0020] Furthermore, the use of optical elements allows the interface with the atmosphere to be increased, which reduces the possible deposition volume per unit area, and further reduces the energy density at this interface compared to the energy density at the direct facet.

[0021] Optical elements also offer the possibility to shape and redirect the laser radiation emerging from the laser diode. Thus, edge-emitting laser diodes can be used in surface-emitting semiconductor lasers.

[0022] The optical element may comprise a material with high thermal conductivity, allowing heat to be dissipated through the optical element, thereby preventing overheating of the facet.

[0023] Because the semiconductor laser already constitutes an optical element, the downstream optics can be made smaller and simpler. Overall, the integration of optics, logic, and sensor technologies near the semiconductor laser is simplified due to the reduced installation space.

[0024] Advantageously, the semiconductor lasers can be manufactured in composites and separated into individual semiconductor lasers later in the manufacturing process.

[0025] According to at least one embodiment of the semiconductor laser of the invention, the molding completely covers the laser diode at least on one side. The molding can completely cover the laser diode on the side opposite the carrier. It is also possible for the molding to completely cover the laser diode on the side facing laterally or orthogonally to the main extension plane of the carrier. In particular, the molding can completely cover the laser diode on at least one side, such that the molding encapsulates the laser diode. The molding can serve to protect the laser diode from environmental influences from the environment of the semiconductor laser. Due to the molding and other elements surrounding the laser diode, such as the carrier, the laser diode is not in direct contact with the environment of the semiconductor laser. The molding can be at least partially in direct contact with the laser diode. In this way, the molding can be molded directly on the laser diode. The use of the molding also eliminates the need for a surrounding housing with a cavity for accommodating the laser diode to protect the laser diode from environmental influences from the environment of the semiconductor laser.

[0026] According to at least one embodiment of the semiconductor laser of the invention, the main emission direction of the laser diode is transverse or orthogonal to the main emission direction of the semiconductor laser. The main emission direction of the laser diode corresponds to the main propagation direction of the laser radiation emitted by the laser diode during operation. The main emission direction of the semiconductor laser also corresponds to the main propagation direction of the laser radiation emitted by the semiconductor laser during operation. This means that the main propagation direction of the laser radiation emitted by the semiconductor laser during operation is changed by passing the laser radiation emitted by the semiconductor laser diode through an optical element transversely or orthogonally to the main propagation direction of the semiconductor laser. For example, the main emission direction of the semiconductor laser extends in the opposite direction to the carrier. In this way, edge-emitting laser diodes can be advantageously used in surface-emitting semiconductor lasers.

[0027] Furthermore, the main emission direction of the semiconductor laser can be parallel to the lateral direction parallel to the main extension plane of the carrier, and not parallel to the main emission direction of the laser diode. In this way, the laser emission can be coupled out laterally of the semiconductor laser.

[0028] To change the main propagation direction of the laser radiation, the optical element may have a diffractive optical structure, for example, the diffractive optical element is arranged on the radiation inlet side and / or on the radiation outlet side of the optical element, and the diffractive optical element may be designed to match the shape of the laser radiation.

[0029] According to at least one embodiment of the semiconductor laser of the invention, the carrier is at least partially surrounded laterally by the molding, the lateral direction being parallel to the main extension plane of the carrier. This can mean that the side surface of the carrier that is lateral or perpendicular to the main extension plane of the carrier is at least partially covered by the molding. The molding may be partially in direct contact with the carrier. It is also possible that the carrier is completely surrounded by the molding in the lateral direction. In this way, the carrier and the laser diode can be encapsulated by the molding and protected from environmental influences from the environment of the semiconductor laser.

[0030] According to at least one embodiment of the semiconductor laser of the invention, the molded body is formed by a casting and / or injection molding process. These processes include all manufacturing processes in which a molding compound is introduced into a given mold and in particular subsequently cured. In particular, the term casting process includes casting, injection molding, transfer molding and compression molding. The molded body can thus be molded into a laser diode. The molded body can have a molding compound. The molded body formed by a casting and / or injection molding process can hermetically seal the laser diode against environmental influences.

[0031] According to at least one embodiment of the semiconductor laser of the invention, the semiconductor laser has an emission exit surface that is open from the shaping. The emission exit surface can be arranged on the side of the semiconductor laser opposite the carrier. The emission exit surface can have a main extension surface that is parallel to the main extension surface of the carrier. The emission exit surface can also be curved or non-planar. The emission exit surface of the semiconductor laser can be the emission exit surface of an optical element. Alternatively, the emission exit surface of the semiconductor laser can be the emission exit surface of a component of the semiconductor laser downstream of the optical element. The shaping therefore does not have to be transparent for the laser radiation emitted by the semiconductor laser.

[0032] According to at least one embodiment of the semiconductor laser of the invention, the optical element completely covers the facet. This means that the side of the optical element facing the facet is at least as large as the surface of the facet. The optical element completely covers the facet in the lateral direction. The optical element and the facet are connected to each other via a connecting member. The optical element thereby encapsulates the facet against environmental influences from the environment of the semiconductor laser.

[0033] According to at least one embodiment of the semiconductor laser of the invention, an anti-reflection layer is applied on the optical element on the side facing the radiation exit area. The optical element may have a radiation entrance side facing the radiation exit area. The radiation entrance side of the optical element may have a reflectivity of 0.5% or more, or 0.1% or more for the laser radiation emitted by the laser diode. This makes it possible to prevent or reduce feedback of reflected laser radiation to the laser diode. Furthermore, the efficiency of the semiconductor laser may be improved.

[0034] According to at least one embodiment of the semiconductor laser of the invention, the optical element has a radiation exit side to which an anti-reflection layer is further applied. The laser radiation incident on the optical element can be deflected in the optical element such that the laser radiation leaves the optical element at the radiation exit side. The radiation exit side of the optical element can have a reflectivity of at most 0.5% or at most 0.1% for the laser radiation emitted by the laser diode. Thus, losses of the semiconductor laser can be minimized and the efficiency of the semiconductor laser can be increased.

[0035] According to at least one embodiment of the semiconductor laser of the invention, a photocatalytic layer is applied to the radiation outlet side of the optical element in order to support the decomposition reaction at the radiation outlet side. The photocatalytic layer is configured to remove and / or decompose the deposits at the radiation outlet side by laser irradiation. In this way, the photocatalytic layer influences the reaction equilibrium between the removal of the deposits and cleaning by decomposition. The photocatalytic layer is formed in particular by a metal oxide such as titanium dioxide or zirconium oxide. Alternatively, the photocatalytic layer comprises platinum, palladium or rhodium. If the photocatalytic layer comprises a metal, it preferably has a thickness of 10 nm or less or 5 nm or less or 3 nm or less so that the laser radiation can pass through the photocatalytic layer without significant losses. In this way, the application of a photocatalytic layer to the radiation outlet side of the optical element can reduce or prevent the accumulation of undesired materials.

[0036] According to at least one embodiment of the semiconductor laser of the invention, the optical element is designed to shape the laser radiation incident on it during operation. This may mean that the optical element is designed to change the main propagation direction of the laser radiation. It may also be that the optical element is designed to change other parameters of the laser radiation, for example the beam divergence. To shape the incident laser radiation, the optical element may have at least one diffractive optical element. In particular, the optical element may have a mirror layer constructed from at least one metallic or dielectric mirror layer or a combination of metallic and dielectric mirrors. The one or more mirror layers may be arranged on the surface of the optical element. Furthermore, the optical element may have one or more masks for shaping the laser radiation. The use of optical elements designed to shape the laser radiation allows the downstream optics to be more compact and simpler.

[0037] According to at least one embodiment of the semiconductor laser of the present invention, the semiconductor laser consists of two further edge-emitting laser diodes, each arranged on a carrier. The laser diode and the two further laser diodes can be arranged side by side in the lateral direction. Each of the further laser diodes is arranged on a carrier. Each of the further laser diodes can have the same structure as the laser diode. Each optical element can cover a facet of one further laser diode. The laser diode and the two further laser diodes can be designed to generate laser radiation in different wavelength ranges during operation. This can mean that the laser diode is designed to generate laser radiation in a first wavelength range. One of the further laser diodes can be designed to generate laser radiation in a second wavelength range and the other of the further laser diodes can be designed to generate laser radiation in a third wavelength range.

[0038] For example, the first wavelength range can be in the red range of the electromagnetic spectrum, e.g., between 600 nm and 780 nm. The second wavelength range can be in the green range of the electromagnetic spectrum, e.g., between 490 nm and 570 nm. The third wavelength range can be in the blue range of the electromagnetic spectrum, e.g., between 430 nm and 490 nm.

[0039] By using a laser diode and two further laser diodes, mixed light can be generated, and the semiconductor laser requires only a small installation space, since it is possible to laser emit in three different colors, e.g. red, green and blue.

[0040] According to at least one embodiment of the semiconductor laser of the invention, the semiconductor laser comprises a beam combiner. The beam combiner is arranged downstream of the three optical elements of the laser diode and the two further laser diodes. The beam combiner is designed to mix the laser radiation emitted by the laser diode and the two further laser diodes and generate mixed light. For example, the beam combiner has a radiation inlet side, where the laser radiation leaving the optical element during operation enters the beam combiner. The beam combiner may also have a radiation outlet side, where the mixed light leaves the beam combiner. For example, the beam combiner is connected to the optical element by a connecting element, for example silicone. The radiation outlet surface of the beam combiner can form the radiation outlet surface of the semiconductor laser. Advantageously, in this way, the semiconductor laser can emit mixed light, for example white mixed light.

[0041] According to at least one embodiment of the semiconductor laser of the present invention, the optical element is followed by a conversion element designed to convert the wavelength of the radiation emitted by the laser diode during operation. In particular, the conversion element can be designed to convert the wavelength of at least a part of the radiation emitted by the laser diode during operation. By converting the wavelength of the radiation emitted by the laser diode during operation, for example, white mixed light with a high color rendering index can be generated.

[0042] The semiconductor laser described herein will be explained in more detail below in conjunction with exemplary embodiments and corresponding figures. [Brief description of the drawings]

[0043] [Figure 1] FIG. 1 is a schematic cross-sectional view through a semiconductor laser in accordance with an exemplary embodiment. [Diagram 2] FIG. 2 is a top view of a semiconductor laser according to an example embodiment. [Diagram 3] FIG. 3 is a schematic cross-sectional view through a semiconductor laser according to an example embodiment. [Figure 4] FIG. 4 is a schematic cross-sectional view through a semiconductor laser according to an example embodiment. [Figure 5A] FIG. 5A is a diagram of a semiconductor laser in accordance with an example embodiment. [Figure 5B] FIG. 5B is a diagram of a semiconductor laser according to an example embodiment. [Figure 5C] FIG. 5C is a diagram of a semiconductor laser in accordance with an example embodiment. [Figure 6] FIG. 6 illustrates an energy distribution of laser radiation emerging at the radiation exit side of a semiconductor laser according to an exemplary embodiment.

[0044] In the figures, identical, similar or equivalent elements are provided with the same reference numerals. The figures and the proportions of the elements therein are not to be considered as true scale relative to one another. Rather, the size of individual elements may be increased for easier representation and / or understanding. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0045] FIG. 1 shows a semiconductor laser 20 according to an exemplary embodiment. The semiconductor laser 20 consists of a carrier 21 having an extending main surface. An edge-emitting laser diode 22 is arranged on the carrier 21. The laser diode 22 has an active region for generating laser radiation and a facet 23 with a radiation exit area 24. The laser radiation generated by the laser diode 22 during operation has a main propagation direction parallel to the main extension surface of the carrier 21. The semiconductor laser 20 further comprises an optical element 25. The optical element 25 completely covers the facet 23 and the radiation exit area 24. The optical element 25 is arranged adjacent to the laser diode 22 in a lateral direction x, which is parallel to the main extension surface of the carrier 21. The optical element 25 has the shape of a quarter sphere. One of the flat outer surfaces of the quarter sphere faces the facet 23. The other flat outer surface of the quarter sphere faces away from the carrier 21.

[0046] Between the optical element 25 and the facet 23, a connecting member 26 is arranged. The optical element 25 is mechanically connected to the facet 23 via the connecting member 26. The optical element 25 is partially transparent for the laser radiation emitted by the laser diode 22 during operation. The optical element 25 has a radiation inlet side 35 assigned to the facet 23. Furthermore, the optical element 25 has a radiation outlet side 36 facing away from the carrier 21. The optical element 25 is thus configured to change the main propagation direction of the laser radiation incident on the optical element 25 during operation. This means that the main propagation direction of the laser diode 22 is perpendicular to the main radiation direction of the semiconductor laser 20. Furthermore, the main propagation direction of the laser radiation emitting at the radiation outlet side 36 is perpendicular to the main radiation direction of the laser diode 22.

[0047] The semiconductor laser 20 also has a molding 27 which at least partially covers the laser diode 22 and the optical element 25. The molding 27 surrounds the laser diode 22, the carrier 21 and the optical element 25 in the lateral direction x. The molding 27 thus completely covers the laser diode 22 with its side faces 39. The side faces 39 of the laser diode 22 extend transversely or perpendicularly to the main extension plane of the carrier 21. The top face 37 of the laser diode 22 facing away from the carrier 21 is free from the molding 27. The radiation exit side 36 of the optical element 25 facing away from the carrier 21 is also free from the molding 27. The radiation exit side 36 has a planar, i.e. non-curved shape. The molding 27 is formed by a casting and / or injection molding process.

[0048] The carrier 21 and the shaped body 27 are arranged on a substrate 32, where the shaped body 27 is directly on the substrate 32. The substrate 32 comprises a semiconductor material, such as aluminum nitride. The substrate 32 is arranged on a connection carrier 31. Between the substrate 32 and the connection carrier 31, electrical contacts 38 are arranged. Via the electrical contacts 38, the laser diode 22 can be controlled. The connection carrier 31 can be a printed circuit board.

[0049] 2 is a top view of a semiconductor laser 20 according to another exemplary embodiment. The molding 27 is not shown in this view. Electrical contacts 38 are disposed on the substrate 32. The electrical contacts 38 are electrically connected to the laser diode 22 and the carrier 21 via bonding wires 33. An optional ESD (electrostatic discharge) element 34 is also disposed on the carrier 21.

[0050] The optical element 25 is designed to shape the laser radiation incident on the optical element 25 during operation. To this end, the optical element 25 may have diffractive elements. Furthermore, a mirror layer 40 is applied to the curved outer surface of the optical element 25. The mirror layer 40 may be metallic or dielectric, or a combination of both.

[0051] An anti-reflective layer may also be applied to the radiation inlet side 35 of the optical element 25. An anti-reflective layer may also be applied to the radiation outlet side 36 of the optical element 25. A photocatalytic layer may also be applied to the radiation outlet side 36 of the optical element 25 to assist in the decomposition reaction at the radiation outlet side 36.

[0052] FIG. 3 is a schematic cross-section through a semiconductor laser 20 according to another exemplary embodiment. In contrast to the exemplary embodiment of FIG. 1, the molding 27 covers the laser diode 22 on the top side 37 opposite the carrier 21. The laser diode 22 is thus completely encapsulated and protected from environmental influences from the environment of the semiconductor laser 20. No additional housing or cavity is required in which the laser diode 22 is arranged. A feedthrough 41 is arranged in the substrate 32. The feedthrough 41 is filled with an electrically conductive material. The feedthrough 41 runs from the side of the substrate 32 opposite the carrier 21 towards the carrier 21. On the side of the substrate 32 opposite the carrier 21, an electrical contact 38 is arranged, via which the carrier 21 is electrically connected to the connection carrier 31. The connection carrier 31 is not shown.

[0053] Furthermore, a conversion element 30 is provided behind the optical element 25 for converting the wavelength of the radiation emitted by the laser diode 22 during operation. The conversion element 30 has a radiation inlet side 35 facing the radiation outlet side 36 of the optical element 25. The conversion element 30 also has a radiation outlet side 36 on the top side 37 of the semiconductor laser 20, facing away from the substrate 32. In this way, the main propagation direction of the laser radiation leaving the optical element 25 is not significantly changed by passing through the conversion element 30. The conversion element 30 can also have a cylindrical shape. Furthermore, the conversion element 30 can have a matrix material in which the conversion particles are incorporated. In the transverse direction x, the conversion element 30 is completely surrounded by the molding 27.

[0054] 4 is a schematic cross-sectional view through a semiconductor laser 20 according to another exemplary embodiment. Only the laser diode 22, the carrier 21 and the optical element 25 are shown. The other components of the semiconductor laser 20 are not shown. The optical element 25 shows the beam path of the laser radiation emitted by the laser diode 22 during operation. The main propagation direction of the laser radiation leaving the facet 23 of the laser diode 22 is shown to be parallel to the main extension plane of the carrier 21. The optical element 25 is shown to shape and deflect the laser radiation such that the main propagation direction of the laser radiation leaving the optical element 25 is perpendicular to the main extension plane of the carrier 21.

[0055] 5A is a top view of a semiconductor laser 20 according to another exemplary embodiment. The semiconductor laser 20 consists of a laser diode 22 and two further edge-emitting laser diodes 28. Each of the further laser diodes 28 is arranged on the carrier 21. Furthermore, one optical element 25 covers the facet 23 of each of the further laser diodes 28. The laser diode 22 and the further laser diodes 28 are designed to emit laser radiation of different colors during operation. For example, the laser diode 22 can be designed to emit red laser radiation during operation. One of the further laser diodes 28 can be designed to emit blue laser radiation during operation. The other of the further laser diodes 28 can be designed to emit green laser radiation during operation.

[0056] The three optical elements 25 are followed by a beam combiner 29. The beam combiner 29 is for mixing the laser radiation emitted by the laser diode 22 and the further laser diode 28 to generate a mixed light. For this purpose, the beam combiner 29 has a radiation inlet side 35 facing a radiation outlet side 36 of the optical element 25. Furthermore, the beam combiner 29 has a radiation outlet side 36 through which the mixed light leaves the beam combiner 29. The beam combiner 29 may be connected to the optical element 25 via a connecting member, such as silicone.

[0057] Furthermore, the semiconductor laser 20 has three monitoring diodes 42, each of which is assigned to one of the laser diodes 22, 28. The monitoring diodes 42 are arranged on the side of the laser diodes 22, 28 opposite the facet 23. The monitoring diodes 42 are arranged to detect the laser radiation emitted on the side opposite the facet 23. Thus, the intensity of the laser radiation emitted by the laser diodes 22, 28 can be approximately determined. This is advantageous, for example, when the semiconductor laser 20 is used in applications for human use. Too high an intensity, which is harmful to the eye, can be avoided.

[0058] An additional heat sink having a high thermal conductivity and capable of dissipating heat from the laser diode 22 and the further laser diode 28 can be arranged on the side of the laser diode 22 and the further laser diode 28 opposite the facet 23. The heat sink is not shown.

[0059] 5B is a cross-sectional view through the semiconductor laser 20 along the line AA in FIG. 5A. The laser diode 22 and the two further laser diodes 28 are arranged next to each other in the lateral direction x. The optical element 25 has the shape of a quarter sphere. A beam combiner 29 covers the three optical elements 25. The molding 27 completely surrounds the laser diode 22, the further laser diode 28, the carrier 21 and the beam combiner 29 in the lateral direction x. The side of the beam combiner 29 opposite the substrate 32 is free from the molding 27.

[0060] The beam combiner 29 has an emission exit surface 43. The emission exit surface 43 of the beam combiner 29 is arranged next to the laser diode 22 and the two further laser diodes 28 in the lateral direction x. The emission exit surface 43 of the beam combiner 29 is smaller than the lateral extension of the beam combiner 29. The beam combiner 29 is open from the molding 27 on its side facing away from the substrate 32, so that the emission exit surface 43 of the beam combiner 29 forms the emission exit surface 43 of the semiconductor laser 20. The semiconductor laser 20 is configured to emit mixed light, in particular white mixed light, via the emission exit surface 43.

[0061] Figure 5C is a cross-section through the semiconductor laser 20 along the line BB in Figure 5A. The further laser diode 28 with the carrier 21 and the optical element 25 has the structure of the laser diode 22 shown in Figures 1 and 2. The monitoring diode 42 is arranged on the opposite side to the facet 23. The further laser diode 28, the optical element 25, the carrier 21, the beam combiner 29 and the monitoring diode 42 are completely surrounded by the molding 27 in the lateral direction x.

[0062] Through the shaped body 27, a through-connection 41 extends from the upper surface 37 of the shaped body 27 opposite the substrate 32 towards the substrate 32. The connection carrier 31 is not shown. The through-connection 41 extends further through the substrate 32 from the side facing the shaped body 27 to the underside 44 of the substrate 32 opposite the shaped body 27. The through-connection 41 comprises an electrically conductive material. An electrical contact 38 is arranged on the upper surface 37 of the shaped body 27, which contact is electrically connected to the through-connection 41. Via the through-connection 41, the electrical contact 38 arranged on the upper surface 37 of the shaped body 27 is electrically connected to the electrical contact 38 arranged on the underside 44 of the substrate 32. Furthermore, the through-connection 41 is electrically connected to the carrier 21 and thus to the laser diodes 22, 28 via the substrate 32. If multiple electrical contacts 38 are required, for example to contact the laser diodes 22, 28 and the monitoring diode 42, it is advantageous to arrange the electrical contacts 38 on both the upper surface 37 of the molding 27 and the underside 44 of the substrate 32. However, it is also possible to arrange the electrical contacts 38 only on the upper surface 37 of the molding 27 or only on the underside 44 of the substrate 32.

[0063] 6 shows the energy distribution of the laser radiation emitting from the radiation exit side 36 of the semiconductor laser 20 according to the exemplary embodiment. On the x-axis the lateral extension in millimeters in the lateral direction x is plotted. On the y-axis the further lateral extension orthogonal to the lateral direction x is plotted in millimeters. The colored z-component shows the intensity of the laser radiation emitting from the semiconductor laser 20 at the radiation exit side 36. The intensity of the laser radiation is highest in the center of the radiation exit face 43. The semiconductor laser 20 is the exemplary embodiment shown in FIG. 4.

[0064] This patent application claims priority from German patent application 102018117518.3, the disclosure of which is incorporated herein by reference.

[0065] The invention is not limited to the exemplary embodiments by the detailed description in the detailed description, but rather includes features and any combination thereof, particularly any combination of features recited in the claims, even if the novel feature or combination of features is not itself explicitly recited in the claims or in the exemplary embodiments. [Explanation of symbols]

[0066] 20 Semiconductor laser 21 Career 22 Laser Diode 23 Facet 24 Radiation exit area 25 Optical Elements 26 Connection parts 27 Molded body 28 More Laser Diodes 29 Beam Combiner 30 Conversion element 31 Connection Carrier 32 Substrate 33 Bonding Wire 34 ESD elements 35 Radiation inlet side 36 Radiation outlet side 37 Top 38 Electrical Contacts 39 Side 40 Mirror Layer 41 Through-connection 42 Monitoring Diode 43 Radiation exit surface 44 Lower side x Horizontal

Claims

1. Career (21) and an edge-emitting laser diode (22) disposed on said carrier (21) and having a facet (23) with an active region for generating laser radiation and a radiation exit region (24); an optical element (25) covering said facet (23); a connecting member (26) disposed between the optical element (25) and the facet (23); a molding (27) at least partially covering the laser diode (22) and the optical element (25); A semiconductor laser (20) comprising: the optical element (25) being at least partially transmissive to laser radiation emitted by the laser diode (22) during operation; The optical element (25) is configured to change a main propagation direction of laser radiation incident on the optical element (25) during operation; The semiconductor laser (20) two further edge-emitting laser diodes (28), each disposed on a carrier (21); A beam combiner (29); and Further comprising: A semiconductor laser (20).

2. 2. The semiconductor laser (20) according to claim 1, wherein the molding (27) completely covers the laser diode (22) at least on one side.

3. 3. The semiconductor laser (20) of claim 1 or 2, wherein a main emission direction of the laser diode (22) is transverse or perpendicular to the main emission direction of the semiconductor laser (20).

4. 4. The semiconductor laser (20) according to claim 1, wherein the carrier (21) is at least partially surrounded by the shaped body (27) in a lateral direction (x), the lateral direction (x) being parallel to a main extension plane of the carrier (21).

5. 5. The semiconductor laser (20) according to claim 1, having a radiation exit surface (43) open from the shaped body (27).

6. The semiconductor laser (20) according to any one of claims 1 to 5, wherein the optical element (25) completely covers the facet (23).

7. 7. The semiconductor laser (20) according to claim 1, wherein an anti-reflection layer is applied to the side of the optical element (25) facing the radiation exit area (24).

8. The semiconductor laser (20) according to any one of the preceding claims, wherein the optical element (25) has a radiation exit side (36) to which an anti-reflection layer is further applied.

9. The semiconductor laser (20) according to any one of the preceding claims, wherein the optical element (25) is designed to shape the laser radiation incident on the optical element (25) during operation.

10. 10. The semiconductor laser (20) according to any one of claims 1 to 9, wherein the optical element (25) is followed by a conversion element (30) designed to convert the wavelength of the radiation emitted by the laser diode (22) during operation.

11. The semiconductor laser (20) according to any one of the preceding claims, wherein the laser diode (22) and two further laser diodes (28) are configured to generate laser radiation in different wavelength ranges during operation.

12. 12. The semiconductor laser (20) according to any one of the preceding claims, wherein the facet (23) is free from the connecting element (26) in the radiation exit area (24).

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