Film Peeling Device

Abstract

To provide a film peeling device which achieves peeling of a film at high speed.SOLUTION: A film peeling device 1 includes: a robot arm 40 having a tip 38 which can move to a desired position relative to a base 20; and a suction pad 19 attached to a frame 15 fixed to the tip 38. The suction pad 19 capable of suctioning a film 7 is connected to suction means 18 which applies a suction force. A chuck body 4 rotatably attached to the frame 15 includes a claw 12 which may mechanically hold the film with the suction pad 19. With the structure, the suction pad 19 is placed in contact with the film 7 applied to the substrate 9 to peel a part of the film 7 by suctioning and lifting. Then, the claw 12 is inserted into an area below a lower surface of a portion of the film 7 to hold the film 7 with the claw 12 and the suction pad 19 and mechanically peel the film 7 from the substrate 9.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a film peeling device. [Background technology]

[0002] When constructing a system for cameras for autonomous driving, there is a process of peeling off the film that protects the imager from the imager. The robot that peels off the film from the imager adsorbs the film to an operating suction pad and peels off the film from the imager by moving in an arc. The time required to peel off the entire surface of the film is, for example, 12 seconds.

[0003] On the other hand, the release paper peeling device shown in Patent Document 1 is equipped with an adsorption mechanism that adsorbs the end of the release paper affixed to the adhesive surface of the film, an end winding mechanism that moves the adsorption mechanism in a curved line that almost draws an arc to a predetermined position and partially winds up the release paper from the end of the film, a gripping mechanism that grips both the front and back sides of the release paper wound up from the film by the end winding mechanism, and a horizontal movement mechanism that moves the release paper in a straight line in a direction to completely separate it from the film. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 8-259098 Summary of the Invention [Problem to be solved by the invention]

[0005] In Patent Document 1, the release paper is adsorbed by an adsorption pad using the suction force of a vacuum pump, and in the next stage after the release paper peeled off from the film is rolled up, a pair of gripping claws grip the release paper from both the front and back sides of the rolled up release paper, and after gripping, the suction action of the vacuum pump is released and the release paper is released from the suction head, and then the arm is moved to move the release paper away from the film. Patent Document 1 discloses a peeling device that peels off a release paper from a film. On the other hand, in comparison with Patent Document 1, the present invention differs in that a film is peeled off from a substrate, but is common in that a film is present on one side of the substrate that is to be peeled off. According to Patent Document 1, in the process in which an adsorption pad sucks and peels off the release paper from a film, it takes a long time from when one end of the release paper, which corresponds to the adsorption part, begins to peel off from the film until the entire release paper up to the other end of the release paper is peeled off. In Patent Document 1, if the rotation speed of the link lever and the extension speed of the cylinder rod are increased to increase the peeling speed, the suction by the suction pad is interrupted and the peeling of the release paper cannot be completed. If the release paper is peeled off at high speed, an impact load acts locally, making the release paper prone to damage.

[0006] The present invention has been made in consideration of the above-mentioned problems, and has an object to provide a film peeling device that realizes high-speed peeling of a film. [Means for solving the problem]

[0007] The film peeling device of the present invention is A film peeling device that peels off a film (7) attached to a substrate from the substrate, comprising: A base (20); a robot arm (40) whose tip (38) is movable to a desired position relative to the base; A frame (15) fixed to the tip; A filter is attached to the frame. M A suction pad (19) that can be sucked; suction means (18) for applying suction force to the suction pad; a claw (12) rotatably attached to the frame and capable of mechanically gripping the film with the suction pad; a rotating body (35) that is rotatable around a horizontal fulcrum (33) at the tip of the robot arm and that fixes the frame; The robot arm has a support (22) that is rotatable around the axis of the base with respect to the base, and an arm (23, 24) having one end that is rotatable on the upper end (29) of the support and the other end that is connected to the frame via the rotating body. Adopt the configuration.

[0008] According to the first aspect of the present invention, the film is rapidly peeled off by simultaneously using the suction force of the suction pad to adsorb the film and mechanically gripping the film between the suction pad and a claw that is inserted into the side of the film opposite the suction pad that has been partially peeled off by the suction pad.

[0009] The film attached to the imager is peeled off by simultaneously using the suction action of the vacuum pump and the mechanical gripping action of the mechanical chuck, so the film can be peeled off from the substrate at high speed. Therefore, in combination with the reciprocating motion of the robot arm, the film can be peeled off at high speed every time a workpiece made of a film to be attached to a substrate is repeatedly brought in, improving productivity.

[0010] The film peeling device of the present invention employs a configuration in which a suction pad and a mechanical chuck of a link mechanism are attached to the robot hand of a robot arm. A small amount of film is peeled off by suction, and the claws of the mechanical chuck are inserted into the part of the film that was peeled off from the substrate. The film is then clamped between the claws of the mechanical chuck and the suction pad, and the film is peeled off in a direction away from the substrate.

[0011] According to the film peeling device of the present invention, the suction pad is brought into contact with the film to be attached to the substrate, a portion of the film is peeled off by suction and lifting, the claw is inserted under the underside of the peeled film portion, the film is clamped between the claw and the suction pad, the film is mechanically peeled off from the substrate, and the film is peeled off from the substrate while being mechanically held.

[0012] According to the film peeling device of the present invention, the peeling time, which previously required, for example, 12 seconds, can be reduced to, for example, 4 seconds, thereby significantly shortening the peeling time and improving productivity. The film peeling method according to the second aspect of the present invention includes the steps of contacting an upper surface of a film (7) attached to an upper surface of a substrate (9), sucking the film, and lifting a portion of the film, peeling a portion of the film from the substrate, mechanically holding the portion of the peeled film with a claw (12) and a suction pad (19), mechanically holding the portion of the peeled film and lifting it in a non-perpendicular direction from the substrate, and peeling the film from the substrate in a direction inclined relative to the upper surface. [Brief description of the drawings]

[0013] [Figure 1] FIG. 1 is a perspective view of a film peeling device according to a first embodiment. [Diagram 2] FIG. 2 is a partially enlarged perspective view showing a mechanical chuck portion of the film peeling device according to the first embodiment. [Diagram 3] (A) is a plan view of the film attached to the substrate before it is peeled off, and (B) is a plan view of the film after it has been peeled off. [Figure 4] FIG. 2 is a partially enlarged perspective view showing a mechanical chuck portion according to the first embodiment. [Diagram 5] 5 is a cross-sectional view showing the relationship between the film peeling device and the ejector taken along a V plane in FIG. 4. [Figure 6] 5A to 5C are explanatory diagrams showing the operation of the film peeling device according to the first embodiment. [Figure 7] FIG. 2 is a diagram showing a film peeling direction of the film peeling device according to the first embodiment. [Figure 8] FIG. 11 is a partially enlarged perspective view of a film peeling device according to a second embodiment. [Figure 9] FIG. 11 is an explanatory diagram showing the operation of a film peeling device of a comparative example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A film peeling device according to an embodiment of the present invention will now be described with reference to the drawings. In the following, the same components in the various embodiments are designated by the same reference numerals, and the description thereof will be omitted.

[0015] First embodiment A first embodiment of the present invention will be described with reference to FIGS. (composition)

[0016] The film peeling device 1 comprises a base 20, a mechanical gripping means 25, and a robot arm 40 that moves the mechanical gripping means 25 to any position in three dimensions relative to the base 20.

[0017] Robot arm 40 is provided with a support 22 that is rotatable, for example, 360 degrees in the direction of arrow 28 relative to a fixed part 21 fixed to a base 20. A first arm 23 is provided with an upper end 29 of support 22 that is rotatable, for example, 180 degrees in the direction of arrow 31. A second arm 24 is provided on a fulcrum 27 at the tip of first arm 23 so as to be rotatable, for example, 180 degrees in the direction of arrow 32. A rotating body 35 is provided at the tip of second arm 24 that is rotatable, for example, 180 degrees in the direction of arrow 34 around fulcrum 33, and a base 26 is fixed to rotating body 35.

[0018] The base 26 fixed to the tip of the robot arm 40 has an image sensor that reads the film. The tip of the robot arm can be moved to any three-dimensional position by the operation of a control system that outputs an operation signal to a drive system based on a sensor signal, etc., of a sensor system including this image sensor, and the drive system that receives a signal from the control system and drives the drive system.

[0019] A base 26 of a mechanical gripping means 25 corresponding to a mechanical chuck can be moved to any position in three dimensions relative to the base 20 .

[0020] 2 and 4, the mechanical gripping means 25 has a frame 15 on the underside of a disk-shaped base 26. A lever 4, which corresponds to a chuck body and can rotate around a fulcrum 14 with respect to the frame 15, has a front leg 11 and a rear leg 10.

[0021] The tip of the front leg 11 of the chuck body 4 has a U-shaped claw 12 for gripping a film, which will be described later. The tip of the rear leg 10 supports the tip of a cylinder rod 161 so as to be rotatable.

[0022] The jaws 12 are attached rotatably to a frame 15. The jaws 12 are part of a mechanical chuck that is rotatable with respect to the frame 15, and move in an arc direction around a fulcrum 14.

[0023] A cylinder 16 is fixed to the frame 15 by a cylinder support 17 . 6, the rear leg 10 of the chuck body 4 is provided at the tip of a cylinder rod 161 which is extendable relative to the cylinder 16 and is rotatable around a fulcrum 13. In FIG. 4, when the cylinder rod 161 is extended, the front leg 11 of the chuck body 4 rotates in the direction of an arrow 39.

[0024] 1, 2, 4, and 5, the suction pad 19 is formed at the lower end of the frame 15. The suction pad has a suction port 191 that opens downward, a passage 41 that communicates with this suction port is formed inside the frame 15, and a pipe that communicates with the passage is connected to an ejector 42 that corresponds to a suction device. When air is sucked in by driving a vacuum pump (not shown), the air pressure is reduced by the ejector 42, and the air is sucked in from the suction port of the suction pad 19 via the passage.

[0025] When chuck body 4 is rotated in the direction of arrow 39 from the position shown in FIG. 4 by claws 12 and suction pad 19 of the mechanical chuck, film 7 is gripped by suction pad 19 and claws 12 .

[0026] Next, the operation will be described.

[0027] In the film peeling device 1, the support 22 and arms 23 and 24 rotate relative to the base 20, and the base 26 at the tip of the arm 24 is moved to a desired position above the upper surface of the film 7 to be attached to the substrate 9, which corresponds to a square-shaped imager.

[0028] The film 7 used in this embodiment has a basic rectangular shape, with a protruding tab 8 formed in the center of the long side.

[0029] If a line perpendicular to the upper surface of film 7 attached to substrate 9 is taken as an axis, the axis of frame 15, which corresponds to the central axis of suction pad 19, can be inclined at any angle relative to this axis. In addition, the rotation angle of chuck body 4 relative to the axis of frame 15 can be changed in the direction of arrow 39 shown in Figure 4. By rotating chuck body 4, film 7 can be clamped between suction pad 19 and claws 12.

[0030] By tilting the frame 15 while the suction pad 19 is applying suction, a part of the surface of the flexible film 7 is tilted, and this part of the inclined surface can be clamped between the suction pad 19 and the claws 12.

[0031] The opening of suction pad 19 is brought into contact with the upper surface of film 7 to be attached to substrate 9. At this time, suction pad 19 is brought into contact with film 7 so that the opening of suction pad 19 fits into the region of tab 8 of film 7 and the film closes the opening of suction pad 19.

[0032] When the suction pad 19 contacts, the suction of the ejector 42 and the lifting of the frame 15, or the operation of tilting the frame 15 as necessary, peels off the tab 8 of the film 7, the claw 12 is inserted under the underside of the tab 8 of the peeled film 7, the film 7 is gripped by the claw 12 and the suction pad 19, the film 7 is mechanically peeled off from the substrate 9, and the entire surface of the film 7 is peeled off from the substrate 9 while mechanically holding the film 7.

[0033] Next, the mechanical gripping means 25 is operated in sequence based on FIGS. 6(A), (B), (C) and (D).

[0034] The robot arm 40 is operated, and the base 26 of the tip 38 of the robot arm 40 is lowered to a predetermined position as shown in FIG. 6(A). Then, the suction pad 19 is abutted against a predetermined position of the film 7 on the substrate 9. Then, suction of the film 7 is started. From the position shown in FIG. 6(A), a part of the film 7 is lifted by suction and partly peeled off, and from the position shown in FIG. 6(B), the cylinder rod 161 is extended and the chuck body 4 is rotated in the direction of the arrow 44. Then, as shown in FIG. 6(C), the claws 12 of the chuck body 4 are inserted between the peeled part of the film and the substrate, the claws are abutted against the underside of the part of the film that has been peeled off, and the film is gripped by the suction pad 19 and the claws 12.

[0035] Next, frame 15 is lifted in the direction of arrow 45 from the position shown in FIG. 6(C), and the entire surface of film 7 is peeled off from substrate 9 as shown in FIG. 6(D).

[0036] The method for peeling the film includes the steps of adsorbing the film, peeling off a portion of the film, gripping the peeled off portion of the film with a claw and an adsorption pad, mechanically clamping and holding the film gripping portion to lift it non-perpendicularly from the substrate, and peeling off the film from the film tab toward the center and upward (diagonally) of the film body.

[0037] The peeling of the film will now be described.

[0038] The film on the substrate is peeled off, for example, as shown in Figures 3(A) and (B). There is a tab 8 that corresponds to the grip of the film 7, and when peeling off the film 7, the grip is pulled up in the upper left direction as shown in Figure 6(C). The reason why force is applied to the gripping area in the upper left or upper right direction, and not directly upward, is because applying force directly upward creates resistance and may take time to peel off the film. Peeling off the gripping area in an oblique direction makes it less likely to break.

[0039] When the film is peeled off, the corners of the film provide resistance, so that the peeling trajectory of the film is made to move in an arc when peeling off the film. Alternatively, the peeling trajectory can be changed to a circular movement and a twisting movement.

[0040] Generally, when a film is gripped only by a mechanical chuck for film peeling, the position of the gripping portion varies widely, so it is necessary to recognize and correct the tab position using a visual device. In contrast, in this embodiment, by increasing the area of ​​the film tab when suction peeling, it is possible to insert the claws of the mechanical chuck into the film without the need for visual device correction.

[0041] In the film peeling device 1 of this embodiment, the film can be peeled in an oblique direction by circular arc motion and twisting motion. The film can also be peeled by circular arc motion and twisting motion. This allows the film to be peeled continuously at high speed.

[0042] (Comparative form) As shown in FIG. 9, the film peeling device of the comparative embodiment has a suction pad 52 at the lower end of a frame 51, and has no gripping means with claws.

[0043] FIG. 9(A) is a front view of the comparative embodiment immediately before the film is peeled off, and FIG. 9(B) is a front view of the comparative embodiment showing the state in which the film is being removed from the suction pad.

[0044] As shown in Fig. 9(A), when frame 51 is lowered, suction pad 52 is brought into contact with film 7, suction pad 52 is used to suck film 7, and the peeling speed caused by lifting suction pad 52 in the direction of arrow 53 is increased, film 7 comes off suction pad 52 as shown in Fig. 9(B). Therefore, the time required for peeling is long in a film peeling device using a suction pad. The comparative film peeling device cannot peel a film from a substrate at high speed.

[0045] Second Embodiment The second embodiment of the present invention shows an example of the direction in which the gripped portion is peeled off from the substrate after being gripped by the suction pad and the claw.

[0046] In the example shown in FIG. 7(A), a suction pad is brought into contact with a film 7 attached to a substrate, and the gripping portion is separated in an inclined direction indicated by an arrow 57.

[0047] The example shown in Figure 7(B) is an example in which a suction pad is abutted against the film 7 to be attached to the substrate, and the gripping portion is twisted in the rotational direction indicated by arrow 58 from the direction forming an initial inclination angle θ with respect to the upper surface of the substrate, thereby isolating it.

[0048] In this second embodiment, as shown in Fig. 8, the shape of the claw 121 formed at the tip of the front leg 11 of the chuck body 4 is I-shaped, which is different from the shape of the claw 12 in the first embodiment. Other basic configurations of this second embodiment are similar to those of the first embodiment.

[0049] (Other embodiments) The basic structure of the robot arm of the present invention is a combination of links and joints. The structure of the robot arm of the present invention is not limited to this. The drive system includes a servo motor. The output signal of the sensor system is input, and the drive system operates according to the command of the control system. This allows the tip of the robot arm to move to any position in three dimensions.

[0050] For example, if the film has a tab, the position of the tab is detected by a signal read by an image sensor at the tip of the robot arm, and the target position of the suction pad is determined. Even if the film does not have a tab, the film peeling device of the present invention can move the suction pad to the target position.

[0051] If the robot arm has multiple axes, the first axis, second axis and so on can be of any type.

[0052] The movements of the links and joints combine rotation, forward / backward, rotation, up / down, bending, twisting, etc., and the tip of the robot arm can be moved to any three-dimensional position by operating the sensor system, control system, and drive system, which includes an image sensor that reads workpieces such as film.

[0053] The shape of the claws of the present invention is not limited to the shape shown in the drawings, and the tip of the mechanical chuck may have any shape that allows the film to be peeled off.

[0054] Although the embodiment in which the film of the present invention has a rectangular shape and has tabs has been described, the film of the present invention may have any shape.

[0055] Although the title of the invention refers to a film peeling device and the object to be peeled is a film, the object to be peeled in this invention is not limited to film, and it goes without saying that the invention can be applied to thin, flexible sheet-like objects other than objects equivalent to film.

[0056] As described above, the present invention is not limited to the above-described embodiment, and can be embodied in various forms without departing from the spirit and scope of the present invention.

[0057] The film peeling device of the present invention may include a rotatable rotating body (35) at the tip of the robot arm, and the frame may be fixed to the rotating body.

[0058] The film peeling device of the present invention may comprise a chuck body (4) rotatably supported on the frame and having the claws, a cylinder rod (161) connected to one end of the chuck body and driving the chuck body to rotate, and a cylinder (16) fixed to the frame and reciprocating the cylinder rod.

[0059] The robot arm of the present invention may have a support (22) that is rotatable around the axis of the base relative to the base, and an arm (23, 24) having one end that is rotatable about the support and the other end that is connected to the frame.

[0060] In the film peeling device of the present invention, the frame may be positioned midway between the suction inlet (191) of the suction pad and the suction means, and may have a passage (41) for sucking in air when the suction pad comes into contact with the film. [Explanation of symbols]

[0061] 1 film peeling device, 4 Chuck body (lever), 6 Work, 7 Film, 8 tabs, 9 board (imager), 10 hind legs, 11 front legs, 12 claws, 13 fulcrum, 14 fulcrum, 15 frames, 16 cylinders, 17 Cylinder support, 18 adsorption means; 19 suction pads, 20 foundations, 21 Fixed part, 35 Rotating bodies, 161 cylinder rod, 191 Intake port.

Claims

1. A film peeling device for peeling a film (7) attached to a substrate from the substrate, comprising: A base (20); a robot arm (40) whose tip (38) is movable to a desired position relative to the base; A frame (15) fixed to the tip; A suction pad (19) attached to the frame and capable of suctioning the film; A suction means (18) for applying a suction force to the suction pad; a claw (12) rotatably attached to the frame and capable of mechanically gripping the film with the suction pad; A rotating body (35) is provided at the tip of the robot arm, the rotating body (35) being rotatable around a horizontal fulcrum (33) and fixing the frame, The robot arm has a support (22) that is rotatable around the axis of the base relative to the base, and an arm (23, 24) having one end that is rotatable about the upper end (29) of the support and the other end that is connected to the frame via the rotating body, in this film peeling device.

2. A film peeling device as described in claim 1, wherein the arms are a first arm (23) and a second arm (24) rotatably connected at a fulcrum (27).

3. A film peeling device as described in claim 1, which abuts the suction pad against the area of ​​the tab of the film to be attached to the substrate, peels the tab that is attracted by the suction pad from the substrate, inserts the claw onto the substrate with the underside of the peeled tab, grips the film with the claw and the suction pad, lifts the gripped portion of the film in a non-perpendicular direction from the substrate, and peels off the entire surface of the film without damaging it.

4. A chuck body (4) that is rotatably supported on the frame and has the jaws; A cylinder rod (161) connected to one end of the chuck body and rotating the chuck body; The film peeling device according to claim 1 or 2, further comprising: a cylinder (16) fixed to the frame and reciprocating the cylinder rod.

5. 2. A film peeling device according to claim 1, wherein said frame has a passage (41) positioned midway between the suction port (191) of said suction pad and said suction means, for sucking in air when said suction pad comes into contact with the film.

6. A film peeling method for peeling a film attached to a substrate from the substrate, comprising: a step of contacting an upper surface of a film (7) attached to an upper surface of a substrate (9), sucking the film, and lifting a part of the film; peeling a portion of the film from the substrate; a step of mechanically holding the part of the peeled film with a claw (12) and a suction pad (19); mechanically holding the portion of the peeled film and lifting it non-perpendicularly away from the substrate; and peeling the film from the substrate in a rotatable and twistable manner in a direction inclined with respect to the upper surface of the substrate.

Images