Cutting device and method for cutting workpiece

Abstract

To provide a cutting device and a cutting method of a workpiece, capable of further reducing vibrations of a cutting blade than before.SOLUTION: A cutting device has a chuck table that holds a workpiece, a cutting unit 20 that cuts the workpiece held by the chuck table with a cutting blade 21 fixed at a tip end of a spindle 22 through a mount 24, and a nozzle 30 that supplies cutting water to the cutting blade 21. The cutting blade 21 has a thickness of 0.2 mm or less and an aspect ratio of 30 or more indicated by cutting edge takeout amount / blade thickness, is fixed to the mount 24, and is equipped with a nozzle 31 supplying a cutting water from an outer peripheral to an outer peripheral surface of the cutting blade 21 in parallel with a side surface 21-3 of the cutting blade 21. The nozzle 31 is equipped with a partitioning plate 38 straightening a flow of the cutting water inside.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a cutting device and a method for cutting a workpiece. [Background technology]

[0002] A cutting device and a method for cutting a workpiece in which a cutting blade is fixed to the tip of a spindle rotating at high speed are known for dividing various plate-shaped workpieces, such as wafers on which semiconductor devices are formed, resin package substrates, ceramic substrates, and glass substrates, into chips or for forming grooves therein (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2015-023222 A Summary of the Invention [Problem to be solved by the invention]

[0004] The higher the aspect ratio of the cutting blade, which is indicated by the blade tip exposure amount / blade thickness, the more likely the blade is to vibrate, causing the cutting groove to meander and saw marks to appear on the side of the cut chip, so it was necessary to moderately adjust the aspect ratio according to the rigidity of the cutting blade. However, by narrowing the groove width of the cutting groove, the planned division line (street) can also be made narrower, and the number of chips that can be harvested increases, so processing with a high aspect ratio has always been desired. Furthermore, so-called vacuum flanges, which fix the cutting blade to the mount with vacuum force (negative pressure), may be more likely to cause vibration of the cutting blade than mechanically fixing the cutting blade to the mount with a nut, etc., and there was a problem that the blade may vibrate even more under high aspect ratio conditions.

[0005] The present invention has been made in consideration of the above problems, and an object of the present invention is to provide a cutting device and a cutting method for a workpiece that can reduce vibration of the cutting blade more than ever before. [Means for solving the problem]

[0006] In order to solve the above problems and achieve the object, the cutting device of the present invention has a chuck table for holding a workpiece, a cutting unit for cutting the workpiece held on the chuck table with a cutting blade fixed to the tip of a spindle via a mount, and a nozzle for supplying cutting water to the cutting blade, the cutting blade being 0.2 mm or less in thickness and having an aspect ratio, expressed by cutting edge exposure / blade thickness, of 30 or more and fixed to the mount, the cutting device has a nozzle for supplying cutting water from the outer periphery toward the outer periphery of the cutting blade in parallel with a side surface of the cutting blade, the nozzle having an internal partition plate for rectifying the flow of cutting water, the mount includes a support mount that fits onto the tip of the spindle and supports the cutting blade, and a fixed mount that fixes the cutting blade supported by the support mount to the support mount, the support mount has an internal suction passage that penetrates from the rear side, which is the side of a spindle housing that rotatably supports the spindle, to a support surface facing the fixed mount, Negative pressure from a rotary joint provided in front of the spindle housing is applied to the fixed mount through the suction passage of the support mount, and the fixed mount is fixed to the support surface of the support mount by suction, thereby sandwiching the cutting blade between the support mount and the fixed mount. At the same time, the partition plate is provided at the tip of the nozzle. It is characterized by:

[0007] The nozzle is cylindrical, and the partition plate is seven cylindrical members provided inside the nozzle and extending along the cutting water supply direction, one of the seven cylindrical members is provided in the center of the nozzle and the rest are provided around the one. Good too.

[0008] In order to solve the above-mentioned problems and achieve the object, the method for cutting a workpiece of the present invention is a method for cutting a workpiece using any of the cutting devices described above, characterized in that the cutting water from the nozzle is supplied from the outer periphery toward the outer peripheral surface of the cutting blade parallel to the side of the cutting blade, while cutting the workpiece held on the chuck table with the cutting blade, and cutting the workpiece while suppressing vibration of the cutting blade caused by the cutting water supplied from the nozzle. Effect of the Invention

[0009] The present invention can reduce vibration of the cutting blade more than ever before. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a perspective view showing an example of the configuration of a cutting device according to an embodiment. [Diagram 2] FIG. 2 is a cross-sectional view showing the cutting unit of FIG. [Diagram 3] FIG. 3 is a front view showing the cutting unit of FIG. [Figure 4] FIG. 4 is a partial cross-sectional view of the nozzle of FIG. [Diagram 5] FIG. 5 is a cross-sectional view of the nozzle of FIG. [Figure 6] FIG. 6 is a diagram for explaining the positional relationship between the supply port of the nozzle and the cutting blade in FIG. [Figure 7] FIG. 7 is a cross-sectional view showing an example of a method for cutting a workpiece according to the embodiment. [Figure 8] FIG. 8 is a diagram for explaining the effects of the cutting device and the method for cutting a workpiece according to the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0012] [Embodiment] A cutting device 1 according to an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a configuration example of the cutting device 1 according to the embodiment. As shown in Fig. 1, the cutting device 1 according to the embodiment has a chuck table 10, a cutting unit 20, a nozzle 30, and a control unit 40.

[0013] In this embodiment, the workpiece 100 to be processed by the cutting device 1 is, as shown in FIG. 1, a disk-shaped semiconductor wafer or an optical device wafer made of a base material such as silicon, sapphire, silicon carbide (SiC), or gallium arsenide. The workpiece 100 has a flat surface 101 on which a chip-sized device 103 is formed in an area partitioned by a plurality of planned division lines (streets) 102 formed in a lattice pattern. In this embodiment, the workpiece 100 has an adhesive tape 105 attached to a back surface 104 on the back side of the front surface 101, and an annular frame 106 attached to the outer edge of the adhesive tape 105, but the present invention is not limited to this. In addition, the workpiece 100 may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

[0014] The chuck table 10 includes a disk-shaped frame body with a recess formed therein and a disk-shaped suction part fitted into the recess. The suction part of the chuck table 10 is made of porous ceramics or the like with a large number of porous holes, and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the suction part of the chuck table 10 is a holding surface 11 on which a workpiece 100 is placed and which suction-holds the placed workpiece 100. The holding surface 11 and the upper surface of the frame body of the chuck table 10 are arranged on the same plane and are formed parallel to the XY plane, which is a horizontal plane. The chuck table 10 is movable in the X-axis direction, which is one horizontal direction, by an X-axis moving unit (not shown), and is rotatable around the Z-axis, which is a vertical direction and perpendicular to the XY plane, by a rotary drive source (not shown).

[0015] The cutting unit 20 cuts the workpiece 100 held on the chuck table 10 with a cutting blade 21. As shown in Fig. 1, the cutting unit 20 is provided so as to be movable in the Y-axis direction by a Y-axis moving unit with respect to the workpiece 100 held on the chuck table 10, and is provided so as to be movable in the Z-axis direction by a Z-axis moving unit. The cutting device 1 cuts the workpiece 100 and forms a cut groove 200 (see Fig. 7) along the planned dividing line 102 by moving the cutting blade 21 of the cutting unit 20 relatively along the planned dividing line 102 with respect to the workpiece 100 held on the chuck table 10 by the X-axis moving unit, the Y-axis moving unit, and the Z-axis moving unit while rotating the cutting blade 21 of the cutting unit 20.

[0016] As shown in FIG. 1, the cutting device 1 further includes a cassette mounting table 91, a cleaning unit 92, and a transport unit (not shown). The cassette mounting table 91 is a mounting table on which a cassette 95, which is a container for accommodating a plurality of workpieces 100, is mounted, and the cassette 95 mounted thereon is raised and lowered in the Z-axis direction. The cleaning unit 92 cleans the workpiece 100 after cutting, and removes foreign matter such as cutting chips attached to the workpiece 100. The transport unit (not shown) transports the workpiece 100 before cutting from inside the cassette 95 onto the chuck table 10, transports the workpiece 100 after cutting from the chuck table 10 to the cleaning unit 92, and transports the cleaned workpiece 100 from the cleaning unit 92 into the cassette 95.

[0017] Fig. 2 is a cross-sectional view showing a configuration example of the cutting unit 20 in Fig. 1. Fig. 3 is a front view showing the cutting unit 20 in Fig. 1. As shown in Figs. 2 and 3, the cutting unit 20 includes a cutting blade 21, a spindle 22, a spindle housing 23, a mount 24, a rotary joint 25, and a blade cover 26.

[0018] The cutting blade 21 is fixed to the tip of the spindle 22 via a mount 24, and rotates around an axis parallel to the Y-axis direction, which is another horizontal direction and perpendicular to the X-axis direction, as the spindle 22 rotates. The cutting blade 21 is a so-called hubless blade in this embodiment, and has a disk-shaped (annular) cutting blade 21-1. The cutting blade 21 has a mounting hole 21-2 in the center, which is a hole for fixing the cutting blade 21 to the mount 24. The outer peripheral surface of the cutting blade 21-1 has a predetermined thickness in the axial length, and becomes a cutting surface when cutting with the cutting blade 21. Side surfaces 21-3 on both sides of the cutting blade 21-1 are formed parallel to each other, and both are perpendicular to the outer peripheral surface of the cutting blade 21-1. The cutting blade 21-1 is made of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bond material (binding material) such as metal or resin, and is formed to a predetermined thickness.

[0019] The spindle 22 is supported by the spindle housing 23 so as to be rotatable about an axis parallel to the Y-axis direction, with the tip end exposed to the outside from the spindle housing 23, and is accommodated within the spindle housing 23. As shown in Fig. 2, the tip end of the spindle 22 is tapered so that the outer diameter gradually decreases partially toward the tip end. A motor (not shown) for rotating the spindle 22 is connected to the base end of the spindle 22.

[0020] As shown in FIG. 2, the mount 24 includes a support mount 50 and a fixed mount 60. The support mount 50 fits onto the tip of the spindle 22 and supports the cutting blade 21 from the rear side (+Y direction side) of the spindle housing 23. The support mount 50 includes a boss portion 51, a support flange portion 52, and a cylindrical portion 53. The boss portion 51 is formed in a cylindrical shape extending in the Y-axis direction, which is the direction of the rotation axis of the spindle 22. The support flange portion 52 is formed in a disk shape (annular shape) extending radially outward from the rear side of the boss portion 51. The cylindrical portion 53 is formed to protrude from the rear side of the support flange portion 52. The boss portion 51, the support flange portion 52, and the cylindrical portion 53 are integrally formed, and their respective central axes overlap with each other and are arranged along the Y-axis direction.

[0021] The support mount 50 has a mounting hole 54 formed on the inside. The mounting hole 54 is formed in a tapered shape such that the inner diameter gradually decreases partially toward the tip, and is fitted without any gap onto the outer periphery of the tip of the spindle 22. The support mount 50 is fixed to the tip of the spindle 22 by inserting the tip of the spindle 22 into the mounting hole 54 and screwing a tightening nut 27, which has a threaded groove formed on its inner periphery, into a threaded groove 22-1 formed on the tip of the spindle 22 from the front side (-Y direction side), which is the tip side of the spindle 22, and tightening it.

[0022] The boss portion 51 is inserted into an attachment hole 61 of the fixed mount 60, and its outer circumferential side supports the fixed mount 60 from the inner circumferential side of the attachment hole 61. The cylindrical portion 53 is fitted tightly into the accommodation hole 25-1 of the rotary joint 25 so as to be rotatable around the Y axis.

[0023] The support flange portion 52 has a support surface 52-1 facing the front side and an annular recessed portion 52-2. The support surface 52-1 surrounds the annular recessed portion 52-2, is formed in an annular shape on the radially outer side of the surface facing the front side of the support flange portion 52, and supports the rear side surface of the cutting blade 21. The annular recessed portion 52-2 surrounds the boss portion 51, and is formed recessed rearward from the support surface 52-1, into which the annular protrusion portion 63 of the fixed mount 60 is fitted.

[0024] Support mount 50 has suction passage 55 formed therein, spanning from support flange portion 52 to cylindrical portion 53. The front side of suction passage 55 communicates with bottom surface 52-3 of annular recess 52-2 and communicates with support surface 52-1. The rear side of suction passage 55 communicates with suction passage 25-2 of rotary joint 25 when cylindrical portion 53 of support mount 50 is fitted into accommodation hole 25-1 of rotary joint 25.

[0025] The fixed mount 60 is fitted from the front side over the cutting blade 21 supported on the support surface 52-1 of the support mount 50 and attached to the outer periphery of the boss portion 51, thereby fixing the cutting blade 21 to the support mount 50. The fixed mount 60 has a mounting hole 61 formed on the inside. The mounting hole 61 fits snugly into the outer periphery of the boss portion 51 of the support mount 50.

[0026] The fixed mount 60 has a support surface 62 facing the rear side and an annular protrusion 63. The support surface 62 surrounds the annular protrusion 63, is formed in an annular shape radially outward of the rearward surface of the fixed mount 60, and supports the front surface of the cutting blade 21. The annular protrusion 63 is formed to protrude rearward beyond the support surface 62, and surrounds the boss portion 51 when the fixed mount 60 is attached to the support mount 50, and is fitted into the attachment hole 21-2 of the cutting blade 21 and the annular recess 52-2 of the support mount 50.

[0027] When the fixed mount 60 is attached to the support mount 50 with the cutting blade 21 sandwiched therebetween, the support surface 52-1 of the support mount 50 and the support surface 62 of the fixed mount 60 face each other in the Y-axis direction via the cutting blade 21. Similarly, when the fixed mount 60 is attached to the support mount 50, the bottom surface 52-3 of the annular recess 52-2 of the support mount 50 and the convex surface 64 of the annular protrusion 63 of the fixed mount 60 face each other in the Y-axis direction, forming an enclosed space 75.

[0028] The rotary joint 25 is provided in front of the spindle housing 23. The rotary joint 25 has an accommodation hole 25-1 formed on the inside. The cylindrical portion 53 of the support mount 50 is fitted into the accommodation hole 25-1 from the front side. The rotary joint 25 extends radially outward and has a suction passage 25-2 formed therein. The outer circumferential side of the suction passage 25-2 is connected to a suction source 79 that introduces negative pressure into the suction passage 25-2. The inner circumferential side of the suction passage 25-2 communicates with the suction passage 55 of the support mount 50 when the cylindrical portion 53 of the support mount 50 is fitted into the accommodation hole 25-1 of the rotary joint 25.

[0029] The mount 24 applies negative pressure from the rotary joint 25 to the fixed mount 60 through the suction path 55 and the sealed space 75 of the support mount 50, and fixes the fixed mount 60 by suction toward the support mount 50 side (rear side), thereby clamping the cutting blade 21 between the support surface 52-1 of the support mount 50 and the support surface 62 of the fixed mount 60.

[0030] In the present invention, the mount 24 is not limited to the above-mentioned form. In the present invention, the mount 24 may be, for example, in a form in which the fixed mount 60 covers the tightening nut 27 and the boss portion 51 of the support mount 50 from the front side. In addition, in the present invention, the mount 24 may be in a form in which a base portion of a so-called hub blade having the cutting blade 21-1 and a base provided on the inner circumference of the cutting blade 21-1 is sandwiched between the support mount 50 and the fixed mount 60 having the same shape as above. In addition, in the present invention, the mount 24 is not limited to a so-called vacuum flange structure in which the cutting blade 21 is fixed to the tip of the spindle 22 by negative pressure from the rotary joint 25, but may be in a form in which the cutting blade 21 is fixed to the tip of the spindle 22 only by tightening a nut screwed into a male screw provided at the tip of the boss portion 51.

[0031] The cutting edge 21-1 of the cutting blade 21 is fixed to the mount 24 with an aspect ratio (dimensionless quantity) of 30 or more, which is indicated by a value obtained by dividing the cutting edge exposure amount 71 by the blade thickness 72. Here, the cutting edge exposure amount 71 is the radial length of the cutting edge 21-1 of the cutting blade 21 protruding from the outer periphery of the member supporting the cutting edge 21-1. When the cutting blade 21 is a hubless blade as in this embodiment, the cutting edge exposure amount 71 is the radial length from the outer periphery of the mount 24 to the outer periphery of the cutting edge 21-1, as shown in FIG. 2. Note that the outer periphery of the mount 24 refers to the outer periphery located on the outer periphery side of the outer periphery of the support surface 52-1 and the outer periphery of the support surface 62 that sandwich the cutting blade 21. Also, when the cutting blade 21 is a hub blade, the cutting edge exposure amount 71 is the radial length from the outer periphery of the base to the outer periphery of the cutting edge 21-1. 2, the blade thickness 72 is the thickness of the exposed portion of the cutting edge 21-1 of the cutting blade 21. In this embodiment, the blade thickness 72 is 0.2 mm or less. The aspect ratio is calculated by dividing the numerical value of the blade exposure amount 71 by the numerical value of the blade thickness 72 after the units of the blade exposure amount 71 and the blade thickness 72 are aligned.

[0032] 3, the blade cover 26 is attached to the front side of the spindle housing 23 and covers at least a portion of the front side of the cutting blade 21 and the spindle 22. The blade cover 26 has a plurality of water passages 26-1, 26-2 formed therein.

[0033] As shown in FIG. 3, the nozzle 30 includes a nozzle 31 and a nozzle 32. The nozzle 31 is generally cylindrical, and has a generally circular supply port 31-1 formed at the tip thereof for supplying cutting water. The nozzle 31 is provided at the lower end of the water passage 26-1 via a rotating portion 36 and a rotating portion 37, and supplies cutting water supplied from a cutting water supply source 39 via a cutting water supply portion 33 from the upper end of the water passage 26-1 from the outer periphery toward the outer circumferential surface of the cutting blade 21 in parallel with the side surface 21-3 of the cutting blade 21. The nozzle 32 is provided at the lower end of the water passage 26-2, and supplies cutting water supplied from the cutting water supply source 39 via a cutting water supply portion 34 from the upper end of the water passage 26-2 to the side of the cutting edge 21-1 of the cutting blade 21. The cutting water is, for example, pure water.

[0034] Here, the nozzle 31 supplies cutting water from the outer periphery toward the outer peripheral surface of the cutting blade 21 in parallel with the side surface 21-3 of the cutting blade 21 means that the nozzle 31 supplies cutting water toward the outer peripheral surface of the cutting blade 21-1 along a radial component 81 from the outer periphery of the cutting blade 21 toward the center of the cutting blade 21 as shown in FIG. 3, or supplies cutting water toward the outer peripheral surface of the cutting blade 21-1 of the cutting blade 21 along a circumferential component 82 along the circumferential direction of the cutting blade 21. Here, the supply direction 80 of cutting water is perpendicular to the plane of the supply port 31-1 of the nozzle 31. In addition, the supply direction 80 of cutting water intersects with the outer peripheral surface of the cutting blade 21-1 of the cutting blade 21. The nozzle 31 can change the supply direction 80 of cutting water within a predetermined plane parallel to the side surface 21-3 of the cutting blade 21-1 of the cutting blade 21 by the rotating parts 36 and 37.

[0035] FIG. 4 is a partial cross-sectional view showing the nozzle 31 of FIG. 3. FIG. 4 shows a cross-section of the tip region of the nozzle 31 near the supply port 31-1 of FIG. 3 in a plane that passes through the center of the supply port 31-1 and includes the supply direction 80. FIG. 5 is a cross-sectional view showing the nozzle 31 of FIG. 3. FIG. 5 is a cross-sectional view of the tip region of the nozzle 31 of FIG. 3 in a plane parallel to the supply port 31-1, and is a cross-sectional view along the line VV of FIG. 4. As shown in FIG. 4 and FIG. 5, the nozzle 31 includes a partition plate 38. The partition plate 38 is provided in the tip region near the supply port 31-1 inside the nozzle 31 where the cutting water flows, and rectifies the flow of the cutting water immediately before it is supplied from the supply port 31-1 in the supply direction 80. The partition plate 38 is one or more thin plate-like members extending along the cutting water supply direction 80, and in the example shown in FIG. 5, it is seven cylindrical members that are inserted into the inside of the nozzle 31 and extend along the cutting water supply direction 80.

[0036] 6 is a diagram for explaining the positional relationship between the supply port 31-1 of the nozzle 31 and the cutting blade 21 in FIG. 3. FIG. 6 is a diagram showing the supply port 31-1 of the nozzle 31 seen from the opposite direction to the supply direction 80 through the cutting edge 21-1 of the cutting blade 21. As shown in FIG. 6, the supply port 31-1 of the nozzle 31 is positioned so as to straddle the outer peripheral surface of the cutting edge 21-1 of the cutting blade 21 in the thickness direction when viewed from the supply direction 80, and is directed to the outer peripheral surface of the cutting edge 21-1 of the cutting blade 21. In the example shown in FIG. 6, the supply port 31-1 of the nozzle 31 is arranged so that the supply direction 80 intersects with the central portion in the thickness direction of the outer peripheral surface of the cutting edge 21-1 of the cutting blade 21.

[0037] The control unit 40 controls the operation of various components of the cutting device 1 to cause the cutting device 1 to perform cutting processing of the workpiece 100. The control unit 40 controls the rotating parts 36, 37 to control the direction of the supply port 31-1 of the nozzle 31, i.e., the supply direction 80 of cutting water by the nozzle 31. The control unit 40 controls the supply amount and supply pressure of cutting water from the nozzles 31, 32 by controlling the supply amount and supply pressure of cutting water from the cutting water supply source 39.

[0038] In this embodiment, the control unit 40 includes a computer system. The computer system included in the control unit 40 includes an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The arithmetic processing device of the control unit 40 performs arithmetic processing according to a computer program stored in the storage device of the control unit 40, and outputs a control signal for controlling the cutting device 1 to each component of the cutting device 1 via the input / output interface device of the control unit 40.

[0039] Next, this specification will explain a method for cutting a workpiece according to an embodiment based on the drawings. The method for cutting a workpiece according to the embodiment is carried out using a cutting device 1 according to the embodiment. Figure 7 is a cross-sectional view showing an example of the method for cutting a workpiece according to the embodiment.

[0040] 7, the cutting method of the workpiece according to the embodiment cuts the workpiece 100 to form a cutting groove 200 along the dividing line 102 by moving the rotating cutting blade 21 relative to the workpiece 100 held by the holding surface 11 of the chuck table 10 along the dividing line 102 (along the X-axis direction in FIG. 7) while supplying cutting water from the nozzle 31 from the outer periphery toward the outer circumferential surface of the cutting blade 21 in parallel with the side surface 21-3 of the cutting blade 21. In the cutting method of the workpiece according to the embodiment, a partition plate 38 is provided inside the nozzle 31 to straighten the cutting water supplied from the nozzle 31, so that fluctuations occurring in the cutting water supplied from the nozzle 31 to the outer circumferential surface of the cutting edge 21-1 of the cutting blade 21 can be suppressed, and the workpiece 100 can be cut while suppressing vibration of the cutting blade 21 caused by the cutting water supplied from the nozzle 31.

[0041] The cutting device 1 according to the embodiment having the above configuration provides an effect of reducing the vibration of the cutting blade 21 caused by the cutting water supplied from the nozzle 31, even under conditions where the cutting blade 21 is conventionally prone to vibration, such as a thickness of 0.2 mm or less and an aspect ratio of 30 or more, by providing a partition plate 38 inside the nozzle 31 that supplies cutting water parallel to the side surface 21-3 of the cutting blade 21 from the outer periphery toward the outer periphery of the cutting blade 21 to straighten the cutting water supplied from the nozzle 31. As a result, the cutting device 1 according to the embodiment provides an effect of reducing the meandering of the cutting groove 200 and suppressing saw marks from being formed on the side surface of the cut tip.

[0042] In addition, the cutting device 1 of the embodiment has a so-called vacuum flange structure in which the mount 24 applies negative pressure from the rotary joint 25 to the fixed mount 60 to clamp the cutting blade 21 between the support surface 52-1 of the support mount 50 and the support surface 62 of the fixed mount 60, thereby achieving the effect of reducing vibration of the cutting blade 21 caused by the cutting water supplied from the nozzle 31 even under conditions in which the cutting blade 21 was conventionally more prone to vibration.

[0043] Next, the inventors of the present invention confirmed the effects of the cutting device 1 and the cutting method of the workpiece according to the embodiment. Figure 8 is a diagram for explaining the effects of the cutting device 1 and the cutting method of the workpiece according to the embodiment. Figure 8 shows a summary of the results obtained when confirming the effects.

[0044] FIG. 8 shows the results of meandering evaluation of the cutting groove 200 formed by the cutting blade 21 in the cutting device 1 according to the embodiment or a substantially conventional cutting device in which the partition plate 38 inside the nozzle 31 is removed from the cutting device 1 according to the embodiment, a metal blade having a thickness of 50 μm is used as the cutting blade 21, a resin-bonded dress board is used as the workpiece 100, the processing feed speed, which is the relative speed of the rotating cutting blade 21 to the workpiece 100, is 10 mm / s, and the aspect ratio, which is indicated by the cutting blade 21 cutting edge exposure amount 71 / blade thickness 72, is 25, 30, 40, and 45, respectively. The metal blade used as the cutting blade 21 is as easy to vibrate as an abrasive grain-containing blade used to cut general wafers, etc. Also, the cutting ability of the metal blade of the resin-bonded dress board used as the workpiece 100 is equivalent to the cutting ability of the abrasive grain-containing blade of a general base material wafer.

[0045] The column "Nozzle with partition" in FIG. 8 shows the results when using the cutting device 1 according to the embodiment equipped with the nozzle 31 provided with the partition 38, and the column "Nozzle without partition" in FIG. 8 shows the results when using a conventional cutting device in which the partition 38 inside the nozzle 31 is removed. "○" in FIG. 8 indicates the result that the meandering of the cut groove 200 is equal to or less than a predetermined threshold, and "×" in FIG. 8 indicates the result that the meandering of the cut groove 200 is greater than the predetermined threshold. Here, the predetermined threshold used in the meandering evaluation of the cut groove 200 was determined based on the current evaluation standard for evaluating whether the cut surface is acceptable or unacceptable as a product when a chip obtained by cutting the resin bond dress board used as the workpiece 100 is treated as a product.

[0046] 8, when the cutting device 1 according to the embodiment was used, the meandering of the cut groove 200 was below the predetermined threshold when the aspect ratio was 25, 30, or 40, but was greater than the predetermined threshold when the aspect ratio was 45. On the other hand, when a conventional cutting device was used, the meandering of the cut groove 200 was below the predetermined threshold when the aspect ratio was 25, but was greater than the predetermined threshold when the aspect ratio was 30, 40, or 45.

[0047] 8, when the aspect ratio is 30 or more and 40 or less, it is clear that by using the cutting device 1 according to the embodiment equipped with the nozzle 31 provided with the partition plate 38, the meandering of the cut groove 200 can be sufficiently suppressed to a desired level compared to the case where a conventional cutting device is used. In addition, it is also clear that by using the cutting device 1 according to the embodiment equipped with the nozzle 31 provided with the partition plate 38, when the aspect ratio is 30 or more and 40 or less, it is clear that by using the cutting device 1 according to the embodiment equipped with the nozzle 31 provided with the partition plate 38, the vibration of the cutting blade 21 can be sufficiently suppressed compared to the case where a conventional cutting device is used.

[0048] It should be noted that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention. [Explanation of symbols]

[0049] 1 Cutting equipment 10 Chuck table 20 Cutting unit 21 Cutting blade 21-3 Side 22 Spindle 23 Spindle housing 24 Mount 25 Rotary joint 30,31,32 Nozzle 38 Partition 50 Support Mount 52-1,62 Support surface 55 Suction path 60 Fixed Mount 71 The blade comes out first 72 blade thickness 100 Workpiece

Claims

1. a cutting device comprising: a chuck table for holding a workpiece; a cutting unit for cutting the workpiece held on the chuck table with a cutting blade fixed to a tip of a spindle via a mount; and a nozzle for supplying cutting water to the cutting blade, the cutting blade having a thickness of 0.2 mm or less and an aspect ratio, expressed by cutting edge exposure amount / blade thickness, of 30 or more and fixed to the mount; a nozzle for supplying cutting water from an outer periphery toward an outer periphery of the cutting blade in parallel with a side surface of the cutting blade; The nozzle has a partition plate therein for rectifying the flow of cutting water, The mount includes a support mount that fits onto a tip of the spindle and supports the cutting blade, and a fixing mount that fixes the cutting blade supported by the support mount to the support mount; the support mount has a suction passage therein, the suction passage passing from a rear side, which is a spindle housing side that rotatably supports the spindle, to a support surface facing the fixed mount; A negative pressure from a rotary joint provided in front of the spindle housing is applied to the fixed mount through the suction passage of the support mount, and the fixed mount is sucked and fixed to the support surface of the support mount, thereby sandwiching the cutting blade between the support mount and the fixed mount, The partition plate is a cutting device provided at the tip of the nozzle.

2. The nozzle is cylindrical; The cutting device described in claim 1, wherein the partition plate is seven cylindrical members provided inside the nozzle and extending along the direction in which the cutting water is supplied, one of the seven cylindrical members being provided in the center of the nozzle and the rest being provided around the one.

3. A method for cutting a workpiece using the cutting device according to claim 1 or 2, comprising the steps of: A method for cutting a workpiece, comprising the steps of: supplying cutting water from the nozzle parallel to the side of the cutting blade from the outer periphery toward the outer peripheral surface of the cutting blade; cutting the workpiece held on the chuck table with the cutting blade; and cutting the workpiece while suppressing vibration of the cutting blade caused by the cutting water supplied from the nozzle.

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