Three-way valve for flow control and temperature control device

Abstract

To provide a three-way valve for flow control and a temperature control device improved in sealability at a sealing portion for rotatably sealing a valve element to a fluid of a low temperature about -85°C, in comparison with a case when not including sealing means as means for rotatably sealing a driving means-side end portion of the valve element to a valve main body, energized in a direction to be opened by a metallic spring member, and composed of a substantially U-shaped synthetic resin.SOLUTION: A three-way valve for flow control includes: a cylindrical valve element rotatably disposed in a valve seat of a valve main body 6, and provided with an opening portion for simultaneously switching a first valve port from a close state to an open state, and switching a second valve port from an open state to a close state; driving means for rotating and driving the valve element; and sealing means as means for rotatably sealing a driving means-side end portion of the valve element to the valve main body, energized in a direction to be opened by a metallic spring, and composed of a synthetic resin having a substantially U-shaped cross section.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a three-way valve for flow control and a temperature control device. [Background technology]

[0002] Conventionally, the applicant has already proposed a technique relating to a three-way valve for flow control, as disclosed in Patent Document 1 and the like.

[0003] Patent Document 1 discloses a valve body having a valve seat consisting of a cylindrical cavity in which a first valve port having a rectangular cross section through which a first fluid flows and a second valve port having a rectangular cross section through which a second fluid flows; a valve element which is rotatably disposed within the valve seat of the valve body so as to switch the first valve port from a closed state to an open state and at the same time switch the second valve port from an open state to a closed state, the valve element being formed in a semicylindrical shape having a predetermined central angle and having both end faces along the circumferential direction formed in a curved shape; and a drive means for rotationally driving the valve element. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 6104443 Summary of the Invention [Problem to be solved by the invention]

[0005] The present invention aims to provide a three-way flow control valve and a temperature control device which have improved sealing performance in a sealing portion that rotatably seals the valve body against low-temperature fluids of about -85°C, compared to a device that does not have a sealing means made of synthetic resin with a roughly U-shaped cross section biased in an opening direction by a metal spring member, which is a means for rotatably sealing the end of the valve body on the drive means side relative to the valve body. [Means for solving the problem]

[0006] The invention described in claim 1 provides a valve body having a valve seat formed of a cylindrical cavity in which a first valve port having a rectangular cross section through which a fluid flows out and a second valve port having a rectangular cross section through which the fluid flows out are formed, and in which a first outlet port and a second outlet port are formed to respectively connect the first valve port and the second valve port with the outside; a cylindrical valve body that is rotatably disposed within a valve seat of the valve body and has an opening that switches the first valve port from a closed state to an open state and simultaneously switches the second valve port from an open state to a closed state; A driving means for rotationally driving the valve body; a sealing means for rotatably sealing the end of the valve body on the drive means side relative to the valve body, the sealing means being disposed in a cylindrical support recess provided in the valve body for rotatably supporting the end of the valve body on the drive means side, the sealing means being made of synthetic resin and having a substantially U-shaped cross section and biased in an opening direction by a metal spring member; Equipped with picture, The sealing means is disposed in a plurality of portions along the axial direction at the end of the valve body on the side of the drive means, and a bearing member that rotatably supports the end of the valve body on the side of the drive means is disposed between the plurality of sealing means. The present invention relates to a three-way valve for flow control.

[0007] The invention described in claim 2 provides a valve body having a valve seat formed of a cylindrical cavity in which a first valve port having a rectangular cross section through which a first fluid flows in and a second valve port having a rectangular cross section through which a second fluid flows in, and in which first and second inlets that respectively connect the first and second valve ports to the outside, are formed; a cylindrical valve body that is rotatably disposed within a valve seat of the valve body and has an opening that switches the first valve port from a closed state to an open state and simultaneously switches the second valve port from an open state to a closed state; A driving means for rotationally driving the valve body; a sealing means for rotatably sealing the end of the valve body on the drive means side relative to the valve body, the sealing means being disposed in a cylindrical support recess provided in the valve body for rotatably supporting the end of the valve body on the drive means side, the sealing means being made of synthetic resin and having a substantially U-shaped cross section and biased in an opening direction by a metal spring member; Equipped with picture, The sealing means is disposed in a plurality of portions along the axial direction at the end of the valve body on the side of the drive means, and a bearing member that rotatably supports the end of the valve body on the side of the drive means is disposed between the plurality of sealing means. The present invention relates to a three-way valve for flow control.

[0011] Claim 3 The invention described in The above The bearing member is disposed in intimate contact with the plurality of sealing means. Claim 1 or 2 2 is a three-way flow rate control valve according to the first embodiment.

[0012] Claim 4 The invention described in the above relates to a temperature control means having a temperature control flow path through which a temperature control fluid consisting of a low-temperature side fluid and a high-temperature side fluid whose mixing ratio is adjusted flows; A first supply means for supplying the low-temperature side fluid adjusted to a predetermined first temperature on the low-temperature side; A second supply means for supplying the high-temperature side fluid adjusted to a second predetermined temperature on the high-temperature side; a mixing means connected to the first supply means and the second supply means, for mixing the low-temperature side fluid supplied from the first supply means and the high-temperature side fluid supplied from the second supply means and supplying the mixed fluid to the temperature control flow path; a flow control valve that distributes the temperature control fluid that has flowed through the temperature control flow path to the first supply means and the second supply means while controlling the flow rate; Equipped with As the flow control valve Claim 1 or 3 2 is a flow rate control three-way valve according to the present invention;

[0013] Claim 5 The invention described in the above relates to a temperature control means having a temperature control flow path through which a temperature control fluid consisting of a low-temperature side fluid and a high-temperature side fluid whose mixing ratio is adjusted flows; A first supply means for supplying the low-temperature side fluid adjusted to a predetermined first temperature on the low-temperature side; A second supply means for supplying the high-temperature side fluid adjusted to a second predetermined temperature on the high-temperature side; a flow control valve connected to the first supply means and the second supply means, for adjusting a mixing ratio of the low-temperature side fluid supplied from the first supply means and the high-temperature side fluid supplied from the second supply means and flowing the fluid into the temperature control flow path; Equipped with As the flow control valve Claim 2 or 3 2 is a flow rate control three-way valve according to the present invention; Effect of the Invention

[0014] According to the present invention, it is possible to provide a flow rate control three-way valve and a temperature control device which have improved sealing performance in the sealing portion that rotatably seals the valve body against low-temperature fluids of about -85°C, compared to a case in which the sealing means is not provided, the sealing means being made of synthetic resin with a roughly U-shaped cross section and biased in the opening direction by a metal spring member, and which rotatably seals the valve body against low-temperature fluids of about -85°C. [Brief description of the drawings]

[0015] [Figure 1] 1A and 1B are a front view, a right side view, and a bottom view of an actuator portion of a three-way valve type motor valve as an example of a flow rate controlling three-way valve according to a first embodiment of the present invention. [Diagram 2] FIG. 2 is a cross-sectional view taken along line AA in FIG. 1(b) showing a three-way valve type motor valve as an example of a flow rate controlling three-way valve according to the first embodiment of the present invention. [Diagram 3] 1(a) is a cross-sectional view taken along line BB in FIG. 1(a) showing a three-way valve type motor valve as an example of a flow rate controlling three-way valve according to the first embodiment of the present invention. FIG. [Figure 4] FIG. 1 is a cross-sectional perspective view of a main portion of a three-way valve type motor valve as an example of a flow rate controlling three-way valve according to a first embodiment of the present invention. [Diagram 5] FIG. 2 is a diagram showing the configuration of a valve seat. [Figure 6] FIG. 2 is a diagram showing the relationship between a valve seat and a valve stem. [Figure 7] FIG. 2 is a diagram showing the configuration of a wave washer. [Figure 8] FIG. 2 is a perspective view showing an adjustment ring. [Figure 9] FIG. [Figure 10] FIG. 4 is a configuration diagram showing the operation of a valve shaft. [Figure 11]FIG. 2 is a diagram showing the structure of an omniseal. [Figure 12] FIG. 4 is a cross-sectional view showing the omni seal in an installed state. [Figure 13] FIG. 13 is a diagram showing a modified example of an omniseal; [Figure 14] FIG. 4 is a configuration diagram showing the operation of a valve shaft. [Figure 15] FIG. 2 is a cross-sectional configuration diagram showing the operation of a three-way valve type motor valve as an example of a flow rate controlling three-way valve according to the first embodiment of the present invention. [Figure 16] FIG. 11 is a cross-sectional configuration diagram showing a three-way valve type motor valve as an example of a flow rate controlling three-way valve according to a second embodiment of the present invention. [Figure 17] FIG. 11 is a cross-sectional configuration diagram showing a three-way valve type motor valve as an example of a flow rate controlling three-way valve according to a third embodiment of the present invention. [Figure 18] FIG. 1 is a conceptual diagram showing a constant temperature controller (chiller device) to which a three-way valve type motor valve is applied as an example of a flow rate controlling three-way valve according to a first embodiment of the present invention. [Figure 19] FIG. 11 is a conceptual diagram showing a constant temperature controller (chiller device) to which a three-way valve type motor valve is applied as an example of a flow rate controlling three-way valve according to a second embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0017] [Embodiment 1] Figures 1(a), (b), and (c) are a front view, a left side view, and a bottom view of a three-way valve type motor valve as an example of a flow control three-way valve in accordance with embodiment 1 of the present invention, Figure 2 is a cross-sectional view taken along line AA in Figure 1(b), Figure 3 is a cross-sectional view taken along line BB in Figure 1(a), and Figure 4 is a cross-sectional oblique view showing the main parts of the three-way valve type motor valve.

[0018] The three-way valve type motor valve 1 is configured as a rotary three-way valve. As shown in Figure 1, the three-way valve type motor valve 1 is roughly composed of a valve section 2 arranged at the bottom, an actuator section 3 arranged at the top, and a seal section 4 and a coupling section 5 arranged between the valve section 2 and the actuator section 3.

[0019] The valve section 2 includes a valve body 6 formed into a substantially rectangular parallelepiped shape from a metal such as SUS, as shown in Figure 2 to Figure 4. The valve body 6 is provided with a first outlet 7 through which the fluid flows out on one side surface (the left side surface in the illustrated example) as shown in Figure 3, and a first valve port 9 with a rectangular cross section which is an example of a flow port that communicates with a valve seat 8 consisting of a cylindrical cavity.

[0020] In this embodiment 1, the first outlet 7 and the first valve port 9 are not provided directly in the valve body 6, but rather the first outlet 7 and the first valve port 9 are provided by attaching a first valve sheet 70, which is an example of a first valve port forming member that forms the first valve port 9, and a first flow path forming member 15 that forms the first outlet 7, to the valve body 6.

[0021] 5, the first valve seat 70 is integrally provided with a cylindrical portion 71 formed in a cylindrical shape and disposed on the outside of the valve body 6, and a tapered portion 72 formed in a tapered shape such that the outer diameter of the tip becomes smaller toward the inside of the valve body 6. A first valve port 9 in the shape of a prism having a rectangular cross section (square in the first embodiment) is formed inside the tapered portion 72 of the first valve seat 70. In addition, as described later, the first valve seat 70 is configured so that one end of a first flow path forming member 15 forming a first outlet 7 is inserted in a sealed (sealed) state inside the cylindrical portion 71 of the first valve seat 70.

[0022] The material of the first valve seat 70 is, for example, polyimide (PI) resin. Also, the material of the first valve seat 70 can be, for example, so-called "super engineering plastics". Super engineering plastics have heat resistance and mechanical strength at high temperatures that exceed those of normal engineering plastics. Examples of super engineering plastics include polyetheretherketone (PEEK), polyphenylene sulfide (PPS), polyethersulfone (PES), polyamideimide (PAI), liquid crystal polymer (LCP), polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene (PCTFE), polyvinylidene fluoride (PVDF), or composite materials thereof. Also, the material of the first valve seat 70 can be, for example, "TECAPEEK" (registered trademark), a PEEK resin material for cutting made by Ensinger Japan Co., Ltd., particularly "TECAPEEK TF 10 blue" (product name) which contains 10% PTFE and has excellent sliding properties.

[0023] As shown in Fig. 3, the valve body 6 is formed with a recess 75 having a shape similar to that of the first valve seat 70 by cutting or the like. The recess 75 has a cylindrical portion 75a corresponding to the cylindrical portion 71 of the first valve seat 70, and a tapered portion 75b corresponding to the tapered portion 72. The cylindrical portion 75a of the valve body 6 is set to be longer than the cylindrical portion 71 of the first valve seat 70. The cylindrical portion 75a of the valve body 6 forms a part of a first pressure acting portion 94, as described later. The first valve seat 70 is attached to the recess 75 of the valve body 6 so as to be movable in a direction toward and away from the valve stem 34 serving as a valve body.

[0024] When the first valve seat 70 is attached to the recess 75 of the valve body 6, a small gap is formed between the outer peripheral surface of the first valve seat 70 and the inner peripheral surface of the recess 75 of the valve body 6. The fluid that has flowed into the inside of the valve seat 8 can leak into the outer peripheral region of the first valve seat 70 through the small gap. The fluid that has leaked into the outer peripheral region of the first valve seat 70 is introduced into a first pressure application portion 94 consisting of a space located outside the cylindrical portion 71 of the first valve seat 70. The first pressure application portion 94 applies the pressure of the fluid to the surface 70a of the first valve seat 70 opposite to the valve shaft 34. The fluid that flows into the inside of the valve seat 8 is not only the fluid that flows out through the first valve port 9, but also the fluid that flows out through the second valve port 18, as described later. The first pressure action portion 94 is defined between the first outlet port 7 and the first pressure action portion 94 by a first flow path forming member 15 in a sealed state.

[0025] The pressure of the fluid acting on the valve stem 34 disposed inside the valve seat 8 depends on the flow rate of the fluid, which is determined by the opening and closing of the valve stem 34. The fluid flowing into the valve seat 8 also flows (leaks) into the minute gap formed between the valve seat 8 and the outer circumferential surface of the valve stem 34 via the first valve port 9 and the second valve port 18. Therefore, in addition to the fluid flowing out from the first valve port 9, the fluid flowing out from the second valve port 18 that has flowed into the minute gap formed between the valve seat 8 and the outer circumferential surface of the valve stem 34 also flows (leaks) into the first pressure application portion 94 corresponding to the first valve seat 70.

[0026] At the tip of the tapered portion 72 of the first valve seat 70, as shown in FIG. 5(b), there is provided a concave portion 74 as an example of a plane arc-shaped gap reduction portion that forms a part of a cylindrical curved surface corresponding to the cylindrical valve seat 8 formed in the valve body 6. The radius of curvature R of the concave portion 74 is set to a value substantially equal to the radius of curvature of the valve seat 8 or the radius of curvature of the valve shaft 34. The valve seat 8 of the valve body 6 forms a slight gap with the outer peripheral surface of the valve shaft 34 in order to prevent the biting of the valve shaft 34 that rotates inside the valve seat 8. As shown in FIG. 6, the concave portion 74 of the first valve seat 70 is mounted so as to protrude toward the valve shaft 34 side from the valve seat 8 of the valve body 6 in a state where the first valve seat 70 is mounted on the valve body 6, or is mounted so as to contact the outer peripheral surface of the valve shaft 34. As a result, the gap G between the valve shaft 34 and the inner surface of the valve seat 8 of the valve body 6 as a member facing the valve shaft 34 is partially reduced compared to the other portions of the valve seat 8 by the amount by which the concave portion 74 of the first valve seat 70 protrudes. Thus, the gap G1 between the concave portion 74 of the first valve seat 70 and the valve shaft 34 is set to a required value (G1 < G2) that is narrower (smaller) than the gap G2 between the valve shaft 34 and the inner surface of the valve seat 8. Note that the gap G1 between the concave portion 74 of the first valve seat 70 and the valve shaft 34 may be in a state where the concave portion 74 of the valve seat 70 is in contact with the valve shaft 34, that is, a state without a gap (gap G1 = 0).

[0027] However, when the concave portion 74 of the first valve seat 70 comes into contact with the valve shaft 34, there is a risk that the driving torque of the valve shaft 34 will increase due to the contact resistance of the concave portion 74 when the valve shaft 34 is rotationally driven. Therefore, the degree to which the concave portion 74 of the first valve seat 70 contacts the valve shaft 34 is adjusted in consideration of the rotational torque of the valve shaft 34. That is, it is adjusted so that the driving torque of the valve shaft 34 does not increase, or if it does increase, the increase amount is small and there is no hindrance to the rotation of the valve shaft 34.

[0028] As shown in Figs. 3 and 4, the first flow passage forming member 15 is formed in a cylindrical shape from metal such as SUS or synthetic resin such as polyimide (PI) resin. The first flow passage forming member 15 forms a first outlet 7 communicating with the first valve port 9 inside, regardless of the positional fluctuation of the first valve seat 70. About half of the first flow passage forming member 15 located on the first valve seat 70 side is formed as a thin-walled cylindrical portion 15a having a relatively thin cylindrical shape. Also, about half of the first flow passage forming member 15 located on the opposite side to the first valve seat 70 is formed as a thick-walled cylindrical portion 15b having a cylindrical shape thicker than the thin-walled cylindrical portion. The inner surface of the first flow passage forming member 15 is penetrated in a cylindrical shape. On the outer periphery of the first flow passage forming member 15, an annular flange portion 15c formed to be relatively thick toward the radially outward direction is provided between the thin-walled cylindrical portion 15a and the thick-walled cylindrical portion 15b. The outer peripheral end of the flange portion 15c is disposed so as to be in movable contact with the inner peripheral surface of the recess 75.

[0029] A first wave washer (wavy washer) 16 is provided on the outer side along the axial direction of the cylindrical portion 71 of the first valve seat 70. The first wave washer 16 is an example of an elastic member that allows the first valve seat 70 to be displaced in the direction of approaching and separating from the valve shaft 34, while elastically deforming the first valve seat 70 in the direction of approaching and separating from the valve shaft 34. As shown in FIG. 7, the first wave washer 16 is made of stainless steel, iron, phosphor bronze, or the like, and is formed into a circular ring shape having a required width when projected on the front side. The first wave washer 16 has a side shape formed in a wave shape (wave shape), and is elastically deformable along its thickness direction. The elastic modulus of the first wave washer 16 is determined by the thickness, material, number of waves, etc. The first wave washer 16 is housed in the first pressure application portion 94.

[0030] Further, a first adjustment ring 77, which is an example of an annular adjustment member that adjusts the gap G1 between the valve stem 34 and the recess 74 of the first valve seat 70 via the first wave washer 16, is disposed on the outside of the first wave washer 16. The first adjustment ring 77 is a relatively short cylindrical member having a male thread 77a formed on its outer circumferential surface, and made of a metal such as SUS or a heat-resistant synthetic resin such as polyimide (PI) resin, as shown in Fig. 8. The outer end surface of the first adjustment ring 77 has grooves 77b at positions facing each other by 180 degrees, for engaging a jig (not shown) for adjusting the amount of tightening and rotating the first adjustment ring 77 when the first adjustment ring 77 is tightened and attached to a female thread portion 78 provided on the valve body 6.

[0031] The valve body 6 is 4 1, a first female thread portion 78 for mounting a first adjusting ring 77 is provided. A short cylindrical portion 79 having an outer diameter substantially equal to the outer diameter of the first adjusting ring 77 is provided at the open end of the valve body 6. In addition, a short machining cylindrical portion 75d having an inner diameter larger than that of the first female thread portion 78 is provided between the first female thread portion 78 and the cylindrical portion 75c of the valve body 6 so that the first female thread portion 78 can be machined over a required length.

[0032] The first adjusting ring 77 adjusts the amount (distance) by which the first adjusting ring 77 presses the first valve seat 70 inward via the first wave washer 16 by adjusting the amount of tightening of the first adjusting ring 77 relative to the female thread portion 78 of the valve body 6. When the amount of tightening of the first adjusting ring 70 is increased, the first valve seat 70 is pressed by the first adjusting ring 77 via the first wave washer 16 and the first pressure plate 76, as shown in FIG. 6, so that the recess 74 protrudes from the inner circumferential surface of the valve seat 8 and is displaced in a direction approaching the valve shaft 34, and the gap G1 between the recess 74 and the valve shaft 34 decreases. When the amount of tightening of the first adjusting ring 77 is set to a small amount in advance, the distance by which the first valve seat 70 is pressed by the first adjusting ring 77 decreases, and the first valve seat 70 is positioned at a position away from the valve shaft 34, and the gap G1 between the recess 74 of the first valve seat 70 and the valve shaft 34 increases relatively. The male thread 77a of the first adjustment ring 77 and the female thread portion 78 of the valve body 6 are set to have a small pitch, so that the amount of protrusion of the first valve seat 70 can be finely adjusted.

[0033] 2, a first flange member 10 as an example of a connecting member is attached to one side (left side) of the valve body 6 by four hexagon socket bolts 11 to connect a pipe or the like (not shown) for discharging a fluid. In FIG. 1(b), reference numeral 11a denotes a screw hole to which the hexagon socket bolt 11 is fastened. The first flange member 10 is made of a metal such as SUS, similar to the valve body 6. The first flange member 10 has a flange portion 12 formed in a rectangular shape on the side surface of the valve body 6, an insertion portion 13 shortly protruding in a cylindrical shape on the inner side surface of the flange portion 12, and a pipe connection portion 14 protruding in a thick, approximately cylindrical shape on the outer side surface of the flange portion 12 to which a pipe (not shown) is connected. The gap between the flange portion 12 of the first flange member 10 and the valve body 6 is sealed by an O-seal 13a, as shown in FIG. 2. A groove 13b for accommodating the O-seal 13a is provided on the inner peripheral surface of the flange portion 12 of the first flange member 10. The inner circumference of the pipe connection part 14 is set to, for example, an Rc1 / 2 tapered female thread with a diameter of about 21 mm or a female thread with a diameter of about 0.58 inches. The shape of the pipe connection part 14 is not limited to a tapered female thread or a female thread, and may be a tube fitting for attaching a tube, or the like, as long as it is possible for the fluid to flow out from the first outlet 7.

[0034] Here, the O-seal 13a is an O-ring-shaped seal member made of a spring member made of a metal such as stainless steel formed in a spiral shape with a circular or elliptical cross section, and an elastically deformable synthetic resin made of FEP (a copolymer of tetrafluoroethylene and hexafluoropropylene) or PFA (a copolymer of tetrafluoroethylene and perfluoroalkoxyethylene) that coats the outer periphery of the spring member. The O-seal 13a is capable of maintaining its sealing performance even in the cryogenic temperature range.

[0035] As shown in FIG. 2, the valve body 6 is provided with a second outlet port 17 through which the fluid flows out on the other side surface (the right side surface in the figure), and a second valve port 18 having a rectangular cross section and which is an example of a flow port that communicates with the valve seat 8 which is a cylindrical cavity.

[0036] In this embodiment 1, the second outlet 17 and the second valve port 18 are not provided directly in the valve body 6, but rather the second outlet 17 and the second valve port 18 are provided by attaching to the valve body 6 a second valve sheet 80 as an example of a valve port forming member in which the second valve port 18 is formed, and a second flow path forming member 25 in which the second outlet 17 is formed.

[0037] The second valve seat 80 is configured in the same manner as the first valve seat 70, as indicated by the reference numerals in parentheses in Fig. 5. That is, the second valve seat 80 integrally comprises a cylindrical portion 81 formed in a cylindrical shape and disposed on the outside of the valve body 6, and a tapered portion 82 formed so that the outer diameter becomes smaller toward the inside of the valve body 6. Inside the tapered portion 82 of the second valve seat 80, a prismatic second valve port 18 having a rectangular (square in the first embodiment) cross section is formed. Inside the cylindrical portion 81 of the second valve seat 80, one end of a second flow passage forming member 25 forming a second outlet port 17 is disposed so as to be inserted in a sealed state.

[0038] 3, a recess 85 corresponding to the outer shape of the second valve seat 80 and having a shape similar to that of the valve seat 80 is formed in the valve body 6 by cutting or the like. The recess 85 has a cylindrical portion 85a corresponding to the cylindrical portion 81 of the second valve seat 80, and a tapered portion 85b corresponding to the tapered portion 82. The cylindrical portion 85a of the valve body 6 is set to be longer than the cylindrical portion 81 of the second valve seat 80. The cylindrical portion 85a of the valve body 6 forms a second pressure acting portion 96, as will be described later. The second valve seat 80 is attached to the recess 85 of the valve body 6 so as to be movable in a direction toward and away from the valve stem 34 serving as a valve body.

[0039] When the second valve seat 80 is attached to the recess 85 of the valve body 6, a small gap is formed between the second valve seat 80 and the recess 85 of the valve body 6. The fluid that has flowed into the inside of the valve seat 8 can flow into the outer peripheral region of the second valve seat 80 through the small gap. The fluid that has flowed into the outer peripheral region of the second valve seat 80 is introduced into a second pressure action portion 96 that is a space located outside the cylindrical portion 81 of the second valve seat 80. The second pressure action portion 96 applies the pressure of the fluid to a surface 80a of the second valve seat 80 on the opposite side to the valve shaft 34. The fluid that flows into the inside of the valve seat 8 includes the fluid that flows out through the second valve port 18 and the fluid that flows out through the first valve port 9. Second pressure action portion 96 The second outlet 17 is partitioned by a second flow path forming member 25 in a sealed state between the first outlet 17 and the second flow path forming member 25 .

[0040] The pressure of the fluid acting on the valve stem 34 disposed inside the valve seat 8 depends on the flow rate of the fluid, which is determined by the opening and closing of the valve stem 34. The fluid flowing into the inside of the valve seat 8 also flows (leaks into) a minute gap formed between the valve seat 8 and the outer circumferential surface of the valve stem 34 via the first valve port 9 and the second valve port 18. Therefore, in addition to the fluid flowing out from the second valve port 18, the fluid flowing out from the first valve port 9 that has flowed into the minute gap formed between the valve seat 8 and the outer circumferential surface of the valve stem 34 also flows into the second pressure acting portion 96 corresponding to the second valve seat 80. The second valve seat 80 is made of the same material as the first valve seat 70.

[0041] At the tip of the tapered portion 82 of the second valve seat 80, as shown in FIG. 5(b), a concave portion 84 is provided as an example of a gap-reducing portion having a flat arc shape that forms a part of a cylindrical curved surface corresponding to the cylindrical valve seat 8 formed in the valve body 6. The radius of curvature R of the concave portion 84 is set to a value substantially equal to the radius of curvature of the valve seat 8 or the radius of curvature of the valve shaft 34. The valve seat 8 of the valve body 6 forms a slight gap with the outer peripheral surface of the valve shaft 34 in order to prevent the biting of the valve shaft 34 that rotates inside the valve seat 8, as will be described later. The concave portion 84 of the second valve seat 80 is mounted so as to protrude toward the valve shaft 34 side from the valve seat 8 of the valve body 6 in a state where the second valve seat 80 is mounted on the valve body 6, or is mounted so as to contact the outer peripheral surface of the valve shaft 34. As a result, the gap G between the valve shaft 34 and the inner surface of the valve seat 8 of the valve body 6 as a member facing the valve shaft 34 is set to a value that is partially reduced compared to other portions of the valve seat 8 by the amount by which the concave portion 84 of the second valve seat 80 protrudes. Thus, the gap G3 between the concave portion 84 of the second valve seat 80 and the valve shaft 34 is set to a required value (G3 < G2) that is narrower (smaller) than the gap G2 between the valve shaft 34 and the inner surface of the valve seat 8. Note that the gap G3 between the concave portion 84 of the second valve seat 80 and the valve shaft 34 may be in a state where the concave portion 84 of the valve seat 8 is in contact with the valve shaft 34, that is, a state without a gap (gap G3 = 0).

[0042] However, when the concave portion 84 of the second valve seat 80 contacts the valve shaft 34, there is a risk that the driving torque of the valve shaft 34 will increase due to the contact resistance of the concave portion 84 when the valve shaft 34 is rotationally driven. Therefore, the degree to which the concave portion 84 of the second valve seat 70 contacts the valve shaft 34 is initially adjusted in consideration of the rotational torque of the valve shaft 34. That is, it is adjusted so that the driving torque of the valve shaft 34 does not increase, or if it does increase, the increase amount is small and there is no hindrance to the rotation of the valve shaft 34.

[0043] As shown in Figs. 3 and 4, the second flow passage forming member 25 is formed in a cylindrical shape from metal such as SUS or synthetic resin such as polyimide (PI) resin. The second flow passage forming member 25 forms a second outlet 17 communicating with the second valve port 18 inside, regardless of the positional fluctuation of the second valve seat 80. About 1 / 2 of the second flow passage forming member 25 located on the second valve seat 80 side is formed as a thin-walled cylindrical portion 25a having a relatively thin cylindrical shape. Also, about 1 / 2 of the second flow passage forming member 25 located on the opposite side to the second valve seat 80 is formed as a thick-walled cylindrical portion 25b having a thicker cylindrical shape than the thin-walled cylindrical portion. The inner surface of the second flow passage forming member 25 is penetrated in a cylindrical shape. On the outer periphery of the second flow passage forming member 25, an annular flange portion 25c formed to be relatively thick toward the radially outward direction is provided between the thin-walled cylindrical portion 25a and the thick-walled cylindrical portion 25b. The outer peripheral end of the flange portion 25c is disposed so as to be in movable contact with the inner peripheral surface of the recess 85.

[0044] A second wave washer 26 is provided on the outside of the cylindrical portion 81 of the second valve seat 80 as an example of an elastic member that presses the second valve seat 80 in a direction to contact the valve shaft 34 while allowing the second valve seat 80 to be displaced in a direction to approach and separate from the valve shaft 34. As shown in FIG. 7, the second wave washer 26 is made of stainless steel, iron, phosphor bronze, or the like, and is formed into a circular ring shape having a required width when projected on the front. The second wave washer 26 has a wave-like side shape, and is elastically deformable along its thickness direction. The elastic modulus of the second wave washer 26 is determined by the thickness, material, number of waves, etc. The second wave washer 26 is the same as the first wave washer 16.

[0045] Further, a second adjustment ring 87 is disposed on the outside of the second wave washer 26 as an example of an adjustment member for adjusting the gap G3 between the valve stem 34 and the recess 84 of the second valve seat 80 via the second wave washer 26. As shown in Fig. 8, the second adjustment ring 87 is a relatively short cylindrical member made of heat-resistant synthetic resin or metal and having a male thread 87a formed on its outer circumferential surface. The outer end surface of the second adjustment ring 87 is provided with grooves 87b at positions facing each other by 180 degrees, for engaging a jig (not shown) for adjusting the amount of tightening and rotating the second adjustment ring 87 when the second adjustment ring 87 is tightened and attached to a female thread portion 88 provided on the valve body 6.

[0046] 3, the valve body 6 is provided with a second female thread portion 88 for mounting a second adjusting ring 87. A short cylindrical portion 89 having an outer diameter substantially equal to the outer diameter of the second adjusting ring 87 is provided at the open end of the valve body 6. In addition, a short machining cylindrical portion 85d having an inner diameter larger than that of the second female thread portion 88 is provided between the second female thread portion 88 and the cylindrical portion 85c of the valve body 6 so that the second female thread portion 88 can be machined over the required length.

[0047] The second adjustment ring 87 is adjusted by adjusting the amount of tightening of the second adjustment ring 87 relative to the female screw portion 88 of the valve body 6. 87This adjusts the amount (distance) by which the second adjusting ring 87 presses the second valve seat 80 inward via the second wave washer 26. When the tightening amount of the second adjusting ring 87 is increased, the second valve seat 80 is pressed by the second adjusting ring 87 via the second wave washer 26 as shown in Fig. 6, and the recess 84 protrudes from the inner circumferential surface of the valve seat 8 and is displaced in a direction approaching the valve stem 34, thereby reducing the gap G3 between the recess 84 and the valve stem 34. When the tightening amount of the second adjusting ring 87 is set to a small amount in advance, the distance by which the second valve seat 80 is pressed by the second adjusting ring 87 decreases and the second valve seat 80 is positioned at a position away from the valve stem 34, and the gap G3 between the recess 84 of the second valve seat 80 and the valve stem 34 relatively increases. The male thread 87a of the second adjustment ring 87 and the female thread portion 88 of the valve body 6 are set to have a small pitch, so that the amount of protrusion of the second valve seat 80 can be finely adjusted.

[0048] As shown in FIG. 2, a second flange member 19 is attached to the other side of the valve body 6 by four hexagon socket bolts 20 as an example of a connecting member for connecting a pipe (not shown) for discharging a fluid. The second flange member 19 is made of metal such as SUS, similar to the first flange member 10. The second flange member 19 has a flange portion 21 formed in a rectangular shape on the side surface of the valve body 6, an insertion portion 22 protruding in a cylindrical shape on the inner surface of the flange portion 21, and a pipe connection portion 23 protruding in a thick, approximately cylindrical shape on the outer surface of the flange portion 21 to which a pipe (not shown) is connected. The gap between the flange portion 21 of the second flange member 19 and the valve body 6 is sealed by an O-seal 21a, as shown in FIG. 2. An annular recessed groove 21b for accommodating the O-seal 21a is provided on the inner peripheral surface of the flange portion 21 of the second flange member 19. The inner circumference of the pipe connection part 23 is set to, for example, an Rc1 / 2 tapered female thread with a diameter of about 21 mm, or a female thread with a diameter of about 0.58 inches. The shape of the pipe connection part 23, like the pipe connection part 14, is not limited to a tapered female thread or a female thread, and may be a tube fitting for attaching a tube, or the like, as long as it is capable of allowing the fluid to flow out from the second outlet 17. The O-seal 21a is the same as the O-seal 13a.

[0049] Here, as the fluid (brine), for example, a fluorine-based inert liquid such as Opteon (registered trademark) (manufactured by Mitsui-Chemours Fluoroproducts) or Novec (registered trademark) (manufactured by 3M) that is applicable in the pressure range of 0 to 1 MPa and the temperature range of approximately -85 to +120°C is used.

[0050] As shown in FIG. 2, the valve body 6 has an inlet 26 having a circular cross section, which serves as a third valve port through which the fluid flows, at its lower end surface. A third flange member 27, which is an example of a connecting member, is attached to the lower end surface of the valve body 6 by four hexagon socket head bolts 28 to connect a pipe (not shown) through which the fluid flows. A cylindrical portion 26a having an inner diameter larger than that of the inlet 26 is opened at the lower end of the inlet 26 to mount the third flange member 27. The third flange member 27 has a flange portion 29 having a rectangular bottom surface, an insertion portion 30 (see FIG. 2) which protrudes in a short cylindrical shape from the inner surface of the flange portion 29, and a pipe connection portion 31 which protrudes in a thick, approximately cylindrical shape from the outer surface of the flange portion 29 and to which a pipe (not shown) is connected. The gap between the flange portion 29 of the third flange member 27 and the valve body 6 is sealed by an O-seal 29a. The inner circumferential surface of the flange portion 29 of the third flange member 27 is provided with a recessed groove 29b for accommodating the O-seal 29a. The inner circumferential surface of the pipe connection portion 31 is set to, for example, an Rc1 / 2 tapered female thread with a diameter of about 21 mm or a female thread with a diameter of about 0.58 inches. The shape of the pipe connection portion 31 is not limited to a tapered female thread or a female thread, and may be a tube fitting for attaching a tube, or the like, as long as it allows the fluid to flow in from the inlet 26. The O-seal 29a is the same as the O-seal 13a.

[0051] As shown in FIG. 3, the center of the valve body 6 is provided with a valve seat 8 in which a first valve port 9 having a rectangular cross section and a second valve port 18 having a rectangular cross section are provided by mounting first and second valve seats 70, 80. The valve seat 8 is a hollow space formed in a cylindrical shape corresponding to the outer shape of the valve body described later. A part of the valve seat 8 is formed by the first and second valve seats 70, 80. The cylindrical valve seat 8 is provided in a state penetrating the upper end surface of the valve body 6. The first valve port 9 and the second valve port 18 provided in the valve body 6 are arranged symmetrically with respect to the central axis (rotation axis) C of the cylindrical valve seat 8 as shown in FIG. 9. More specifically, the first valve port 9 and the second valve port 18 are arranged perpendicular to the cylindrical valve seat 8, and one edge of the first valve port 9 is opened at a position (a position 180 degrees different) facing the other edge of the second valve port 18 via the central axis C. The other edge of the first valve port 9 is opened at a position facing one edge of the second valve port 18 (a position 180 degrees apart) across the central axis C. For convenience, the gap between the valve seat 8 and the valve shaft 34 is omitted from FIG.

[0052] 2, the first valve port 9 and the second valve port 18 are formed as openings having a rectangular cross section, such as a square cross section, which are formed by mounting the first and second valve seats 70, 80 to the valve body 6 as described above. The first valve port 9 and the second valve port 18 have a side length set to be smaller than the diameters of the first outflow port 7 and the second outflow port 17, and are formed in the shape of a rectangular tube inscribed in the first outflow port 7 and the second outflow port 17.

[0053] A valve stem 34, as an example of a valve body, is made of metal such as SUS and has a generally cylindrical outer shape as shown in Fig. 9. The valve stem 34 is roughly divided into a valve body portion 35 that functions as a valve body, upper and lower support portions 36, 37 that are provided above and below the valve body portion 35 and support the valve stem 34 rotatably, a seal portion 38 that is composed of the same parts as the upper support portion 36, and a coupling portion 39 that is provided above the seal portion 38.

[0054] The upper and lower journal portions 36, 37 are each formed in a cylindrical shape with an outer diameter smaller than that of the valve body portion 35. The upper and lower journal portions 36, 37 are set to have the same or different outer diameters. As shown in FIG. 2, the lower journal portion 37 is rotatably supported at the lower end of the valve seat 8 provided in the valve body 6 via a bearing 41 as a bearing member. An annular support portion 42 that supports the bearing 41 is provided below the valve seat 8. The bearing 41, the support portion 42, and the inlet 26 are set to approximately the same inner diameter, and are configured so that the temperature control fluid flows into the inside of the valve body portion 35 with almost no resistance.

[0055] As shown in Fig. 2 and Fig. 9(b), the valve body 35 is formed in a cylindrical shape with an approximately semi-cylindrical opening 44 having an opening height H2 lower than the opening height H1 of the first and second valve ports 9, 18. The valve action part 45 with the opening 44 of the valve body 35 is formed in a semi-cylindrical shape (approximately a semi-cylindrical shape excluding the opening 44 from the cylindrical part) with a predetermined central angle α (for example, 180 degrees). The valve action part 45 is rotatably arranged within the valve seat 8 and on the inner peripheral surface of the valve seat 8 via a minute gap to prevent metal from galling each other, so as to switch the first valve port 9 including the valve body parts 35 located above and below the opening 44 from a closed state to an open state, and at the same time, switch the second valve port 18 from an open state in the opposite direction to a closed state. 9, the upper and lower valve shafts 46, 47 arranged above and below the valve operating part 45 are formed in a cylindrical shape having the same outer diameter as the valve operating part 45, and are rotatable via a small gap on the inner circumferential surface of the valve seat 8. A cylindrical cavity 48 is provided inside the valve operating part 45 and the upper and lower valve shafts 46, 47, penetrating toward the lower end.

[0056] Moreover, the valve operating portion 45 has both end faces 45a, 45b along the circumferential direction (rotation direction) formed in a flat cross section along a direction intersecting (perpendicular to) the central axis C. To explain further, as shown in Fig. 9, the valve operating portion 45 has both end parts 45a, 45b along the circumferential direction formed in a flat cross section intersecting the rotation axis C toward the opening 44. The thickness of both end parts 45a, 45b is set to a value equal to the thickness T of the valve operating portion 45, for example.

[0057] The cross-sectional shape of the valve operating portion 45 that intersects with the rotation axis C of both circumferential end portions 45a, 45b is not limited to a flat shape, and both end faces 45a, 45b along the circumferential direction (rotation direction) may be formed into a curved shape.

[0058] 10, when the valve stem 34 is rotationally driven to open and close the first and second valve ports 9, 18, the circumferential ends 45a, 45b of the valve operating part 45 move (rotate) to protrude or retract from the circumferential ends of the first and second valve ports 9, 18 in the flow of fluid, thereby transitioning the first and second valve ports 9, 18 from an open state to a closed state or from a closed state to an open state. At this time, the circumferential ends 45a, 45b of the valve operating part 45 desirably have a planar cross-sectional shape in order to linearly change the opening areas of the first and second valve ports 9, 18 with respect to the rotation angle of the valve stem 34.

[0059] 2, the seal unit 4 liquid-tightly seals the valve shaft 34 so that it can rotate relative to the valve body 6. The seal unit 4 includes the valve body 6, the valve shaft 34, omni-seals 160, 170 as an example of sealing means made of synthetic resin and having a generally U-shaped cross section and biased in an opening direction by a metal spring member that is disposed between the valve body 6 and the valve shaft 34 and seals the gap liquid-tightly, and a bearing member 180 that supports the valve shaft 34 rotatably relative to the valve body 6.

[0060] 2, a cylindrical support recess 51 is provided at the upper end of the valve body 6 to rotatably support the upper end of the valve shaft 34. A cylindrical portion 51b having a large inner diameter is formed at the upper end of the support recess 51 via a tapered portion 51a. As described above, the upper upper shaft support portion 36 and the seal portion 38 of the valve shaft 34 are rotatably and liquid-tightly supported in the support recess 51 via the bearing 180 and omni seals 160, 170 as an example of a bearing member.

[0061] To explain further, in this embodiment 1, as shown in FIG. 2, a bearing 180 and first and second omni seals 160, 170 are arranged in the gap formed between the upper support portion 36 and seal portion 38 of the valve shaft 34 and the support recess 51.

[0062] The first and second omni-seals 160, 170 have the same configuration. Here, the first omni-seal 160 will be described as an example.

[0063] 11, the first omni-seal 160 is an annular (ring-shaped) member arranged around the entire circumference of a cylindrical gap formed between the upper shaft support portion 36 and the seal portion 38 of the valve shaft 34 and the support recess 51. The omni-seal 160 has a substantially circular cross section or omittedThe seal member 162 is composed of an elliptical spring member 161 made of a metal such as stainless steel, and a seal member 162 made of a synthetic resin such as polytetrafluoroethylene (PTFE) having a substantially U-shaped cross section, which is biased in an opening direction by the spring member 161. The spring member 161 is formed of a metal such as stainless steel formed in a spiral shape and has a substantially circular or elliptical cross section. The elastic modulus of the spring member 161 is adjusted by appropriately setting its width, thickness, and the like. As shown in FIG. 12, the seal member 162 has a base end portion 162a that is arranged along the sealing direction so as to be located between the upper shaft support portion 36 and the seal portion 38 of the valve shaft 34 and the support recess 51, and two lip portions 162b, 162c that are arranged in parallel to face each other from both ends of the base end portion 162a toward the same direction (outside along the axial direction of the first valve seat 70) along the circumferential surfaces of the two members that are sealed. The opening of the omni-seal 160 is opened toward the inside of the valve seat 8, and is subjected to the pressure of the fluid present in the valve seat 8. The intermediate portions 162b', 162c' of the lip portions 162b, 162c are curved in such a way that the outer circumferential surfaces thereof are curved in an arc shape that protrudes radially outward from the middle to the tip. The intermediate portions 162b', 162c' of the lip portions 162b, 162c are in close contact with the outer circumferential surfaces of the upper shaft support portion 36 and the seal portion 38 of the valve shaft 34 and the inner circumferential surface of the support recess 51, thereby improving the degree of sealing.

[0064] In addition, the spring member 161 of the omniseal 160 is not limited to being formed in a substantially circular or elliptical cross section. 13 However, the spring member 161 of the omni-seal 160 is preferably formed to have a substantially circular or elliptical cross section because the repulsive force generated when the spring member 161 is compressed and deformed is greater when the spring member 161 is formed to have a substantially circular or elliptical cross section, which results in a higher sealing effect.

[0065] When no fluid pressure is applied or when the fluid pressure is relatively low, the omni-seal 160 seals the gap between the upper support portion 36 and the seal portion 38 of the valve shaft 34 and the support recess 51 by the elastic restoring force of the spring member 161. On the other hand, when the fluid pressure is relatively high, the omni-seal 160 seals the gap between the upper support portion 36 and the seal portion 38 of the valve shaft 34 and the support recess 51 by the elastic restoring force of the spring member 161. 161 The elastic restoring force of the omni-seal 160 and the pressure of the fluid seal the gap between the upper support portion 36 and seal portion 38 of the valve shaft 34, and the support recess 51. Therefore, even if fluid flows in from the gap between the upper support portion 36 and seal portion 38 of the valve shaft 34, and the support recess 51, the fluid is sealed off by the omni-seal 160 and will not leak out from the gap between the upper support portion 36 and seal portion 38 of the valve shaft 34, and the support recess 51 to the outside.

[0066] The omniseal 160 is made up of a combination of a metal spring member 161 and a synthetic resin seal member 162. Not only the metal spring member 161 but also polytetrafluoroethylene (PTFE), the synthetic resin that constitutes the seal member 162, have excellent heat resistance and can withstand long periods of use in extremely low temperature ranges.

[0067] In the first embodiment, the omni seal that seals the gap between the upper support portion 36 and the seal portion 38 of the valve shaft 34 and the support recess 51 is composed of the first and second omni seals 160, 170 arranged in double with the bearing member in between. Therefore, even if the first omni seal 160 located at the bottom wears over time, it can be reliably sealed by the second omni seal 170 located at the top, and it is possible to reliably prevent the fluid from leaking to the outside.

[0068] The bearing member 180 is made of a synthetic resin such as polyimide (PI) resin formed into an elliptical or rectangular cross section. A bearing member made of a synthetic resin such as polyimide (PI) resin can exhibit good sliding properties even at low temperatures of about -60°C.

[0069] The bearing member 180 is not limited to being disposed between the first and second omni-seals 160, 170, but may be disposed on the outside of the second omni-seal 170 in the axial direction.

[0070] In addition, in FIG. 2, reference numeral 181 denotes a thrust washer made of synthetic resin such as polyimide (PI).

[0071] 2 and 3, the gaps between the first and second valve seats 70, 80 and the first and second flow path forming members 15, 25, and the gaps between the first and second flow path forming members 15, 25 and the valve body 6 are all sealed by omni-seals 110-150. Note that the omni-seals 110-150 are spring members formed into a substantially U-shaped cross section. The first and second valve seats 70, 80 are provided with stepped portions 73, 83 for accommodating the omni-seals. The stepped portions 73, 83 of the first and second valve seats 70, 80 are closed by the first and second pressure-receiving plates 76, 86.

[0072] 1, the coupling part 5 is disposed between the valve body 6, in which the seal part 4 is built-in, and the actuator part 3. The coupling part 5 is for connecting the valve shaft 34 to a rotating shaft (not shown) that rotates the valve shaft 34 integrally with the valve shaft 34.

[0073] As shown in FIG. 1, the coupling section 5 is composed of a spacer member 59 arranged between the seal section 4 and the actuator section 3, an adaptor plate 60 fixed to the upper part of the spacer member 59, and a coupling member 62 housed in a cylindrical space 61 formed in a penetrating state inside the spacer member 59 and the adaptor plate 60, and connecting the valve shaft 34 and a rotating shaft (not shown). The spacer member 59 is made of a synthetic resin such as polyimide (PI) resin and has a relatively high rectangular tube shape having a planar shape substantially the same as a part of the valve body 6. The spacer member 59 has a flange portion 59a provided at its lower end fixed to both the valve body 6 and the adaptor plate 60 by means of a screw 59b or the like. The adaptor plate 60 is made of a metal such as SUS and has a planar polygonal plate shape as shown in FIG. 1(c). The adaptor plate 60 is attached in a fixed state to a base 64 of the actuator section 3 by a hexagonal socket bolt 63.

[0074] As shown in Fig. 9(a), a groove 65 is provided at the upper end of the valve shaft 34 so as to penetrate the valve shaft 34 in the horizontal direction. The valve shaft 34 is connected and fixed to the coupling member 62 by fitting a protrusion 66 provided on the coupling member 62 into the groove 65. Meanwhile, a groove 67 is provided at the upper end of the coupling member 62 so as to penetrate the valve shaft 34 in the horizontal direction. The rotating shaft (not shown) is connected and fixed to the coupling member 62 by fitting a protrusion (not shown) into the groove 67 provided on the coupling member 62. The spacer member 59 has an O-seal 190 at its upper end, which prevents liquid from reaching the actuator unit 3 when liquid leaks from the seal unit 4.

[0075] As shown in Fig. 1, the actuator unit 3 includes a base 64 formed in a rectangular shape when viewed from above. A casing 90 formed as a rectangular parallelepiped box incorporating a driving means including a stepping motor and an encoder is attached to the top of the base 64 with screws 91. The driving means of the actuator unit 3 may be any means capable of rotating a rotating shaft (not shown) in a desired direction with a predetermined accuracy based on a control signal, and the configuration is not limited. The driving means includes a stepping motor, a driving force transmission mechanism that transmits the rotational driving force of the stepping motor to the rotating shaft via a driving force transmission means such as a gear, and an angle sensor such as an encoder that detects the rotation angle of the rotating shaft.

[0076] 1, reference numeral 92 denotes a stepping motor side cable, and 93 denotes an angle sensor side cable. The stepping motor side cable 92 and the angle sensor side cable 93 are each connected to a control device (not shown) that controls the three-way valve type motor valve 1.

[0077] <Environmental conditions> As described above, the three-way valve motor valve 1 according to the first embodiment is configured so as to be usable for fluids at temperatures of, for example, about -85 to +120°C, particularly at a significantly low temperature of about -85°C. Therefore, it is desirable that the surrounding environmental conditions in which the three-way valve motor valve 1 is used correspond to a temperature range of about -85 to +120°C. In other words, when a fluid at about -85°C flows through the three-way valve motor valve 1, the valve body 6 The temperature of the three-way motor valve 1 itself becomes equal to the temperature of the fluid, about -85° C. As a result, when the conditions for using the three-way motor valve 1 are in an environment that includes humidity, which is the moisture in the air, the moisture in the air adheres to the three-way motor valve 1 and freezes, which is thought to be a factor in causing the three-way motor valve 1 to malfunction.

[0078] Therefore, in the first embodiment, the three-way valve type motor valve 1 is used under the following environmental conditions: 2- In an environment replaced with 100% air, the ambient humidity (relative humidity) is desirably 0.10% or less, and preferably about 0.01%.

[0079] <Operation of three-way motor valve> In the three-way motor valve 1 according to the first embodiment, when a low-temperature fluid of about -85°C is circulated, the flow rate of the fluid is controlled as follows.

[0080] As shown in Fig. 4, when the three-way valve type motor valve 1 is assembled or adjusted for use, the first and second flange members 10, 19 are temporarily removed from the valve body 6, and the adjusting rings 77, 87 are exposed to the outside. In this state, the amount of fastening of the adjusting rings 77, 87 to the valve body 6 is adjusted using a jig (not shown), thereby changing the amount of protrusion of the first and second valve seats 70, 80 from the valve seat 8 of the valve body 6, as shown in Fig. 6. When the amount of fastening of the adjusting rings 77, 87 to the valve body 6 is increased, the recesses 74, 84 of the first and second valve seats 70, 80 protrude from the inner peripheral surface of the valve seat 8 of the valve body 6, and the gap G1 between the recesses 74, 84 of the first and second valve seats 70, 80 and the outer peripheral surface of the valve shaft 34 decreases, and the recesses 74, 84 of the first and second valve seats 70, 80 and the outer peripheral surface of the valve shaft 34 come into contact with each other. On the other hand, when the amount of tightening of the adjustment rings 77, 87 relative to the valve body 6 is reduced, the length by which the recesses 74, 84 of the first and second valve seats 70, 80 protrude from the inner surface of the valve seat 8 of the valve body 6 decreases, and the gap G1 between the recesses 74, 84 of the first and second valve seats 70, 80 and the outer surface of the valve shaft 34 increases.

[0081] In the first embodiment, for example, the gap G1 between the recesses 74, 84 of the first and second valve seats 70, 80 and the outer circumferential surface of the valve shaft 34 is set to less than 10 μm. However, the gap G1 between the recesses 74, 84 of the first and second valve seats 70, 80 and the outer circumferential surface of the valve shaft 34 is not limited to this value, and may be a value smaller than this value, for example, the gap G1 = 0 μm (contact state), or may be set to 10 μm or more.

[0082] As shown in Fig. 1, in the three-way valve type motor valve 1, fluid flows in through a piping (not shown) via the third flange member 27, and fluid flows out through a piping (not shown) via the first flange member 10 and the second flange member 19. In addition, as shown in Fig. 10(a), for example, in the initial state before starting operation, the three-way valve type motor valve 1 is in a state in which the valve operating portion 45 of the valve shaft 34 closes (fully closes) the first valve port 9 and simultaneously opens (fully opens) the second valve port 18.

[0083] As shown in Fig. 2, when a stepping motor (not shown) provided in the actuator unit 3 is rotated by a predetermined amount, a rotating shaft (not shown) is rotated in accordance with the amount of rotation of the stepping motor. When the rotating shaft of the three-way valve motor valve 1 is rotated, the valve shaft 34 connected and fixed to the rotating shaft rotates by the same angle as the amount of rotation (rotation angle) of the rotating shaft. As the valve shaft 34 rotates, the valve operating part 45 rotates inside the valve seat 8, and as shown in Fig. 14(a), one end 45a along the circumferential direction of the valve operating part 45 gradually opens the first valve port 9, and the fluid that has flowed in from the inlet 26 flows into the inside of the valve seat 8 and flows out from the first housing member 10 through the first outlet 7.

[0084] At this time, the other end 45b along the circumferential direction of the valve operating portion 45 opens the second valve port 18 as shown in FIG. 14(a), so that the fluid flowing in from the inlet 27 flows into the inside of the valve seat 8. The oil flows in and is distributed in accordance with the amount of rotation of the valve shaft 34 , and flows out from the second housing member 19 through the second outlet port 17 to the outside.

[0085] As shown in Figure 14(a), in the three-way valve type motor valve 1, when the valve shaft 34 is rotationally driven and one end 45a along the circumferential direction of the valve operating part 45 gradually opens the first valve port 9, the fluid passes through the valve seat 8 and the inside of the valve shaft 34, through the first and second valve ports 9, 18, and is supplied to the outside via the first and second outlet ports 9, 18.

[0086] Furthermore, in the three-way valve type motor valve 1, both ends 45a, 45b along the circumferential direction of the valve operating part 45 are formed to have a curved or planar cross-sectional shape, so that it is possible to change the opening areas of the first and second valve ports 9, 18 linearly (straight-line) with respect to the rotation angle of the valve shaft 34. Furthermore, it is considered that the fluid whose flow rate is regulated by both ends 45a, 45b of the valve operating part 45 flows in a state close to laminar flow, and the distribution ratio (flow rate) of the fluid can be precisely controlled according to the opening areas of the first valve port 9 and the second valve port 18.

[0087] As described above, in the three-way valve type motor valve 1 of this embodiment, initially, the valve operating portion 45 of the valve shaft 34 blocks (fully closes) the first valve port 9 and simultaneously opens (fully opens) the second valve port 18.

[0088] At this time, in the three-way valve type motor valve 1, when the valve operating portion 45 of the valve shaft 34 closes (fully closes) the first valve port 9, ideally the flow rate of the fluid should become zero.

[0089] However, as shown in Fig. 6, the three-way valve type motor valve 1 is rotatably arranged so that the valve shaft 34 is in a non-contact state with a minute gap between the outer circumferential surface of the valve shaft 34 and the inner circumferential surface of the valve seat 8 in order to prevent metal-to-metal galling between the valve shaft 34 and the inner circumferential surface of the valve seat 8. As a result, a minute gap G2 is formed between the outer circumferential surface of the valve shaft 34 and the inner circumferential surface of the valve seat 8. Therefore, in the three-way valve type motor valve 1, even when the valve operating part 45 of the valve shaft 34 closes (fully closes) the first valve port 9, the flow rate of the fluid does not become zero, and a small amount of fluid tries to flow into the second valve port 18 through the minute gap G2 existing between the outer circumferential surface of the valve shaft 34 and the inner circumferential surface of the valve seat 8.

[0090] In the three-way valve type motor valve 1 of this embodiment, as shown in Figure 6, the first and second valve seats 70, 80 are provided with recesses 74, 84, which protrude from the inner surface of the valve seat 8 toward the valve shaft 34, thereby partially reducing the gap G1 between the outer surface of the valve shaft 34 and the inner surface of the valve seat 8.

[0091] Therefore, even though the three-way valve type motor valve 1 is arranged to be freely rotatable so that the outer surface of the valve shaft 34 and the inner surface of the valve seat 8 are in a non-contact state with a small gap between them in order to prevent metal-to-metal scraping against the inner surface of the valve seat 8, the flow of fluid from the first valve port 9 into the small gap G2 that exists between the outer surface of the valve shaft 34 and the inner surface of the valve seat 8 is greatly restricted and suppressed by gap G1, which is an area where the gap between the outer surface of the valve shaft 34 and the inner surface of the valve seat 8 is partially reduced.

[0092] Therefore, in the three-way valve type motor valve 1, it is possible to significantly reduce fluid leakage when the three-way valve type motor valve 1 is fully closed, compared to a three-way valve type motor valve that does not have recesses 74, 84 provided to partially reduce the gap between the valve shaft 34 and the first and second valve seats 70, 80 facing the valve shaft 34.

[0093] Desirably, the three-way valve type motor valve 1 of this embodiment can significantly reduce the gaps G1, G2 by bringing the recesses 74, 84 of the first and second valve seats 70, 80 into contact with the outer peripheral surface of the valve shaft 34, thereby significantly suppressing fluid leakage when the three-way valve type motor valve 1 is fully closed.

[0094] Similarly, the three-way valve type motor valve 1 can significantly prevent fluid from leaking out through the second valve port 18 to the other first valve port 9, even when the valve operating portion 45 of the valve shaft 34 blocks (fully closes) the second valve port 18.

[0095] Furthermore, in the first embodiment, as shown in Fig. 3, first and second pressure application portions 94, 96 that apply the pressure of the fluid through a minute gap between the outer peripheral surface of the valve shaft 34 and the inner peripheral surface of the valve seat 8 are provided on the surfaces 70a, 80a of the first and second valve seats 70, 80 opposite the valve shaft 34. Therefore, in the three-way valve type motor valve 1, as shown in Fig. 10(a), when the first and second valve ports 9, 18 approach full closure at an opening degree of 0%, i.e., near the full closure of the first valve port 9, and at an opening degree of 100%, i.e., near the full opening of the first valve port 9, the amount of fluid flowing out of the first and second valve ports 9, 18 is significantly reduced. Accordingly, in the three-way valve type motor valve 1, the pressure of the flowing out fluid is reduced at the valve ports approaching the full closure state. Therefore, for example, when the opening degree is 0%, that is, when the first valve orifice 9 is fully closed, a fluid with a pressure of about 700 KPa flows in from the inlet 26 and flows out from the second valve orifice 18 at about 700 KPa. At this time, the pressure on the outlet side of the first valve orifice 9, which is close to being fully closed, drops to, for example, about 100 KPa. As a result, a pressure difference of about 600 KPa occurs between the second valve orifice 18 and the first valve orifice 9.

[0096] Therefore, in a three-way valve type motor valve 1 in which no countermeasure is taken, the pressure difference between the second valve port 18 and the first valve port 9 causes the valve shaft 34 to move (displace) toward the first valve port 9 where the pressure is relatively lower, resulting in the valve shaft 34 coming into partial contact with the bearing 41. This increases the drive torque when the valve shaft 34 is rotationally driven in the closing direction, which may result in malfunction.

[0097] In contrast, in the three-way valve motor valve 1 according to the present embodiment, as shown in Fig. 15, first and second pressure action parts 94, 96 are provided on the surfaces of the first and second valve seats 70, 80 opposite the valve shaft 34, which act on the first and second valve seats 70, 80 with the pressure of the fluid leaking through a minute gap between the outer circumferential surface of the valve shaft 34 and the inner circumferential surface of the valve seat 8. Therefore, in the three-way valve motor valve 1 according to the present embodiment, even if a pressure difference occurs between the second valve port 18 and the first valve port 9, the pressure of the fluid on the relatively higher pressure side acts on the first and second pressure action parts 94, 96 through a minute gap between the outer circumferential surface of the valve shaft 34 and the inner circumferential surface of the valve seat 8. As a result, the first valve seat 70 on the side with a relatively lower pressure of about 100 KPa acts to return the valve shaft 34 to an appropriate position by the pressure of the fluid on the relatively higher pressure side of about 100 KPa acting on the first pressure action part 94. Therefore, in the three-way valve type motor valve 1 of this embodiment, the pressure difference between the second valve port 18 and the first valve port 9 can be prevented or suppressed from causing the valve shaft 34 to move (displace) toward the first valve port 9, where the pressure is relatively lower, and the valve shaft 34 can be maintained in a state in which it is smoothly supported by the bearing 41, thereby preventing or suppressing an increase in the driving torque when the valve shaft 34 is rotationally driven in the closing direction.

[0098] In addition, the three-way valve type motor valve 1 of this embodiment also operates in the same manner when the first valve port 9 is close to being fully open, that is, when the second valve port 18 is close to being fully closed, and it is possible to prevent or suppress an increase in the driving torque when driving the valve shaft 34 to rotate.

[0099] The three-way valve type motor valve 1 according to the first embodiment uses as the fluid (brine) an inert fluorine-based liquid such as Opteon (registered trademark) (manufactured by Mitsui-Chemours Fluoroproducts) or Novec (registered trademark) (manufactured by 3M) that is suitable for a pressure range of 0 to 1 MPa and a temperature range of approximately -85 to +120°C.

[0100] When the three-way motor valve 1 switches the outflow rate of a fluid at about -85°C, the valve body 6 itself, through which the fluid flows, becomes at a temperature of about -85°C.

[0101] The three-way valve type motor valve 1 uses the first and second omni seals 160, 170 to seal the gap between the upper shaft support portion 36 and the seal portion 38 of the valve shaft 34 and the support recess 51. The first and second omni seals 160, 170 are arranged so as to open toward the inside of the valve seat 8. The first omni seal 160 is made of a combination of a metal spring member 161 and a synthetic resin seal member 162. The metal spring member 161 and the synthetic resin polytetrafluoroethylene (PTFE) that constitutes the seal member 162 are excellent in heat resistance and can withstand long-term use in an extremely low temperature range. The same is true for the other second omni seal 170.

[0102] Therefore, the three-way valve type motor valve 1 according to the first embodiment uses first and second omni-seals 160, 170 as sealing means made of synthetic resin and having a substantially U-shaped cross section and biased in an opening direction by a metal spring member, in order to seal (seal) the gap between the upper support part 36 and seal part 38 of the valve shaft 34 and the support recess 51. This makes it possible to improve the sealing performance against low-temperature fluids of about -85°C, compared to when the gap between the upper support part 36 and seal part 38 of the valve shaft 34 and the support recess 51 is sealed by an O-ring.

[0103] That is, by sealing the gap between the upper support portion 36 and seal portion 38 of the valve shaft 34 and the support recess 51 with the first and second omni-seals 160, 170, it is possible to exhibit high sealing performance even against low-temperature fluids of about -85° C. In addition, the first and second omni-seals 160, 170 have a relatively large contact area in the gap between the upper support portion 36 and seal portion 38 of the valve shaft 34 and the support recess 51, which also makes it possible to exhibit high sealing performance.

[0104] [Embodiment 2] FIG. 16 shows a three-way motor valve as an example of a flow control valve according to the second embodiment of the present invention.

[0105] The three-way valve type motor valve 1 according to the second embodiment is configured as a three-way valve type motor valve 1 for mixing, not for distributing the same fluid into two, but for mixing two different types of fluid.

[0106] 16, the three-way valve type motor valve 1 is provided on one side of a valve body 6 with a first inlet 7 through which a low-temperature fluid as a first fluid flows in, and a first valve port 9 with a rectangular cross section that communicates with a valve seat 8 consisting of a cylindrical cavity. In this embodiment, the first outlet 7 and first valve port 9 are not provided directly in the valve body 6, but rather the first inlet 17 and first valve port 9 are provided by attaching to the valve body 6 a first valve seat 70 as an example of a valve port forming member in which the first valve port 9 is formed, and a first flow path forming member 15 in which the first inlet 7 is formed.

[0107] The three-way valve type motor valve 1 is provided on the other side surface of the valve body 6 with a second inlet 17 through which a high temperature fluid as a second fluid flows in, and a second valve port 18 having a rectangular cross section that communicates with a valve seat 8 consisting of a cylindrical cavity. In this embodiment, the second outlet 17 and the second valve port 18 are not provided directly in the valve body 6, but are provided by mounting a second valve seat 80 as an example of a valve port forming member in which the second valve port 18 is formed, and a second flow path forming member 25 in which the second outlet 17 is formed, to the valve body 6.

[0108] In addition, the three-way valve type motor valve 1 has an outlet 26 opened on the bottom surface of the valve body 6 through which the temperature control fluid, which is a mixed fluid formed by mixing the first and second fluids inside the valve body 6, flows out.

[0109] Here, the low-temperature fluid as the first fluid and the high-temperature fluid as the second fluid are fluids used for temperature control, and a fluid with a relatively low temperature is called the low-temperature fluid, and a fluid with a relatively high temperature is called the high-temperature fluid. Therefore, the low-temperature fluid and the high-temperature fluid are relative terms, and do not mean a low-temperature fluid with an absolutely low temperature and a high-temperature fluid with an absolutely high temperature. As the low-temperature fluid and the high-temperature fluid, for example, a fluorine-based inert liquid such as Opteon (registered trademark) (manufactured by Mitsui-Chemours Fluoroproducts) or Novec (registered trademark) (manufactured by 3M) is used in a pressure range of 0 to 1 MPa and a temperature range of about -85 to +120°C.

[0110] The other configurations and operations are the same as those of the first embodiment, and therefore the description thereof will be omitted.

[0111] [Embodiment 3] FIG. 17 shows a three-way motor valve as an example of a flow control valve according to the third embodiment of the present invention.

[0112] As shown in FIG. 17, the three-way valve type motor valve 1 of this embodiment 3 is configured so that, in the gap between the upper support portion 36 and seal portion 38 of the valve shaft 34 and the support recess 51, the bearing member 180 is not disposed between the first and second omni-seals 160, 170, but rather the bearing member 180 is disposed at the top along the axial direction of the first and second omni-seals 160, 170.

[0113] The three-way motor valve 1 according to the third embodiment has the first and second omni-seals 160, 170 connected in series, and therefore is able to provide an even higher sealing effect.

[0114] The other configurations and operations are the same as those of the first embodiment, and therefore the description thereof will be omitted.

[0115] [Example 1] FIG. 18 is a conceptual diagram showing a constant temperature controller (chiller device) to which the flow rate controlling three-way valve according to the first embodiment of the present invention is applied.

[0116] This chiller device 100 is used, for example, in a semiconductor manufacturing device that performs a plasma etching process or the like, and maintains a constant temperature of a semiconductor wafer or the like, which is an example of a temperature-controlled object W. When a temperature-controlled object W such as a semiconductor wafer is subjected to a plasma etching process or the like, the temperature of the object may rise due to plasma generation, discharge, or the like.

[0117] The chiller device 100 includes a temperature control unit 101 configured in a table shape as an example of a temperature control means arranged so as to come into contact with a temperature-controlled object W. The temperature control unit 101 includes a temperature control flow control section through which a temperature control fluid consisting of a low-temperature fluid and a high-temperature fluid whose mixture ratio has been adjusted flows. The nozzle has a passage 102 therein.

[0118] A mixing means 111 is connected to the temperature control flow path 102 of the temperature control unit 101 via an on-off valve 103. A low-temperature side thermostatic chamber 104 storing a low-temperature fluid adjusted to a predetermined low-temperature set temperature is connected to one side of the mixing means 111. A first pump 105 supplies a low-temperature side fluid from the low-temperature side thermostatic chamber 104 to the three-way valve type motor valve 1. A high-temperature side thermostatic chamber 106 storing a high-temperature side fluid adjusted to a predetermined high-temperature set temperature is connected to the other side of the mixing means 111. A second pump 107 supplies a high-temperature side fluid from the high-temperature side thermostatic chamber 106 to the three-way valve type motor valve 1. The mixing means 111 is connected to the temperature control flow path 102 of the temperature control unit 101 via an on-off valve 103.

[0119] In addition, a return pipe is provided on the outlet side of the temperature control flow path 102 of the temperature control unit 101, and is connected to the low-temperature side thermostatic bath 104 and the high-temperature side thermostatic bath 106 via a distribution flow rate control three-way valve 1.

[0120] This chiller device 100 uses a three-way valve type motor valve 1 to distribute the control fluid that has flowed through a temperature control flow path 102 of a temperature control unit 101 to a low-temperature constant temperature bath 104 and a high-temperature constant temperature bath 106. The three-way valve type motor valve 1 controls the flow rate of the control fluid to be distributed to the low-temperature constant temperature bath 104 and the high-temperature constant temperature bath 106 by driving a valve shaft 34 to rotate using a stepping motor 110.

[0121] As the low-temperature fluid and the high-temperature fluid, for example, a fluorine-based inert liquid such as Opteon (registered trademark) (manufactured by Mitsui-Chemours Fluoroproducts) or Novec (registered trademark) (manufactured by 3M) is used in the pressure range of 0 to 1 MPa and the temperature range of approximately -85 to +120°C.

[0122] A mixing means is used in mixing section 111 for mixing the low-temperature side fluid supplied from low-temperature side thermostatic bath 104 by first pump 105 and the high-temperature side fluid supplied from high-temperature side thermostatic bath 106 by second pump 107, which controls the flow rate of each of the low-temperature side fluid and the high-temperature side fluid and then mixes them appropriately. As the mixing means, as mentioned above, a three-way mixing valve type motor valve 1 may be used.

[0123] [Example 2] FIG. 19 is a conceptual diagram showing a constant temperature controller (chiller device) to which a flow rate controlling three-way valve according to the second embodiment of the present invention is applied.

[0124] The three-way valve type motor valve 1 is connected to the temperature control flow path 102 of the temperature control unit 101 via an on-off valve 103. A low-temperature side thermostatic chamber 104 storing a low-temperature fluid adjusted to a predetermined low-temperature set temperature is connected to the first flange portion 10 of the three-way valve type motor valve 1. The low-temperature side thermostatic chamber 104 supplies the low-temperature side fluid to the three-way valve type motor valve 1 by a first pump 105. A high-temperature side thermostatic chamber 106 storing a high-temperature fluid adjusted to a predetermined high-temperature set temperature is connected to the second flange portion 19 of the three-way valve type motor valve 1. The high-temperature side thermostatic chamber 106 supplies the high-temperature side fluid to the three-way valve type motor valve 1 by a second pump 107. The third flange portion 27 of the three-way valve type motor valve 1 is connected to the temperature control flow path 102 of the temperature control unit 101 via an on-off valve 103.

[0125] Furthermore, a return pipe is provided on the outlet side of the temperature control channel 102 of the temperature control section 101, and is connected to a low-temperature constant temperature bath 104 and a high-temperature constant temperature bath 106, respectively.

[0126] The three-way valve type motor valve 1 is equipped with a stepping motor 108 that rotates the valve shaft 34. The temperature control unit 101 is also provided with a temperature sensor 109 that detects the temperature of the temperature control unit 101. The temperature sensor 109 is connected to a control device (not shown), and the control device controls the driving of the stepping motor 108 of the three-way valve type motor valve 1.

[0127] As shown in FIG. 19, the chiller device 100 detects the temperature of the temperature-controlled object W using a temperature sensor 109, and controls the rotation of the stepping motor 108 of the three-way valve type motor valve 1 using a control device based on the detection result of the temperature sensor 109, thereby controlling the temperature of the temperature-controlled object W to be equal to a predetermined set temperature.

[0128] The three-way valve type motor valve 1 controls the mixing ratio of the low-temperature side fluid supplied by the first pump 105 from the low-temperature side thermostatic bath 104 and the high-temperature side fluid supplied by the second pump 107 from the high-temperature side thermostatic bath 106 by rotating the valve shaft 34 using the stepping motor 108, and controls the temperature of the temperature control fluid, which is a mixture of the low-temperature side fluid and the high-temperature side fluid and is supplied from the three-way valve type motor valve 1 to the temperature control flow path 102 of the temperature control unit 101 via the on-off valve 103.

[0129] At this time, the three-way valve motor valve 1 can control the mixing ratio of the low-temperature fluid and the high-temperature fluid with high precision in accordance with the rotation angle of the valve shaft 34, making it possible to finely adjust the temperature of the temperature-control fluid. Therefore, the chiller device 100 using the three-way valve motor valve 1 according to this embodiment can control the temperature of the temperature-control object W that comes into contact with the temperature control unit 101 to a desired temperature by flowing a temperature-control fluid, the temperature of which has been adjusted to a predetermined temperature by controlling the mixing ratio of the low-temperature fluid and the high-temperature fluid, through the temperature-control flow path 102 of the temperature control unit 101.

[0130] As the low-temperature fluid and the high-temperature fluid, for example, a fluorine-based inert liquid such as Opteon (registered trademark) (manufactured by Mitsui-Chemours Fluoroproducts) or Novec (registered trademark) (manufactured by 3M) is used in the pressure range of 0 to 1 MPa and the temperature range of approximately -85 to +120°C. [Industrial Applicability]

[0131] It is possible to provide a three-way flow control valve and a temperature control device that have improved sealing performance against low-temperature fluids of approximately -85°C. [Explanation of symbols]

[0132] 1...Three-way motor valve 2. Valve section 3...Actuator section 4…Sealing section 5...Coupling part 6…Valve body 7…First inlet 8...Valve seat 9…First valve opening 10...First flange member 11...Hexagon socket head bolt 12...Flange section 13…Insertion section 14…Pipe connection 15...First flow passage forming member 16… First Wave Washer 17…Second inlet 18...Second valve 19...Second flange member 20...Hexagon socket head bolt 21...Flange section 22…Insertion part 23…Pipe connection 25...Second flow path forming member 34...Valve stem 35…Valve body 45…Valve operating section 45a, 45b...both ends 70, 80...First and second valve seats 74,84…Concave 160,170…Omniseal

Claims

1. a valve body having a valve seat formed of a cylindrical cavity in which a first valve port having a rectangular cross section through which a fluid flows out and a second valve port having a rectangular cross section through which the fluid flows out are formed, and in which first and second outlets for connecting the first and second valve ports to the outside, respectively, are formed; a cylindrical valve body that is rotatably disposed within a valve seat of the valve body and has an opening that switches the first valve port from a closed state to an open state and simultaneously switches the second valve port from an open state to a closed state; A driving means for rotationally driving the valve body; a sealing means for rotatably sealing the end of the valve element on the drive means side relative to the valve body, the sealing means being disposed in a cylindrical support recess provided on the valve body for rotatably supporting the end of the valve element on the drive means side, the sealing means being made of synthetic resin and having a substantially U-shaped cross section and biased in an opening direction by a metal spring member; Equipped with a valve body having a valve casing and a valve casing arranged in a casing for axial movement of the valve body; a valve member arranged between the valve body and the valve casing for axial movement of the valve body;

2. a valve body having a valve seat formed of a cylindrical cavity in which a first valve port having a rectangular cross section through which a first fluid flows and a second valve port having a rectangular cross section through which a second fluid flows, and in which first and second inlets are formed to respectively connect the first and second valve ports with the outside; a cylindrical valve body that is rotatably disposed within a valve seat of the valve body and has an opening that switches the first valve port from a closed state to an open state and simultaneously switches the second valve port from an open state to a closed state; A driving means for rotationally driving the valve body; a sealing means for rotatably sealing the end of the valve element on the drive means side relative to the valve body, the sealing means being disposed in a cylindrical support recess provided on the valve body for rotatably supporting the end of the valve element on the drive means side, the sealing means being made of synthetic resin and having a substantially U-shaped cross section and biased in an opening direction by a metal spring member; Equipped with a valve body having a valve casing and a valve casing arranged in a casing for axial movement of the valve body; a valve member arranged between the valve body and the valve casing for axial movement of the valve body;

3. A three-way valve for flow control as described in claim 1 or 2, wherein the bearing member is arranged to be in close contact with the multiple sealing means.

4. a temperature control means having a temperature control flow path through which a temperature control fluid, which is made of a low-temperature side fluid and a high-temperature side fluid whose mixing ratio has been adjusted, flows; a first supply means for supplying the low-temperature fluid adjusted to a predetermined first temperature on the low-temperature side; a second supply means for supplying the high-temperature side fluid adjusted to a second predetermined temperature on the high-temperature side; a mixing means connected to the first supply means and the second supply means, for mixing the low-temperature side fluid supplied from the first supply means and the high-temperature side fluid supplied from the second supply means and supplying the mixed fluid to the temperature control flow path; a flow control valve that distributes the temperature control fluid that has flowed through the temperature control flow path to the first supply means and the second supply means while controlling the flow rate; Equipped with 4. A temperature control device, comprising a flow rate control three-way valve according to claim 1 or 3 as said flow rate control valve.

5. a temperature control means having a temperature control flow path through which a temperature control fluid, which is made of a low-temperature side fluid and a high-temperature side fluid whose mixing ratio has been adjusted, flows; a first supply means for supplying the low-temperature fluid adjusted to a predetermined first temperature on the low-temperature side; a second supply means for supplying the high-temperature side fluid adjusted to a second predetermined temperature on the high-temperature side; a flow control valve connected to the first supply means and the second supply means, for adjusting a mixing ratio of the low-temperature side fluid supplied from the first supply means and the high-temperature side fluid supplied from the second supply means and flowing the fluid into the temperature control flow path; Equipped with 4. A temperature control device, comprising a flow rate control three-way valve according to claim 2 or 3 as said flow rate control valve.

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