SUBSTRATE PROCESSING APPARATUS, TEACHING INFORMATION GENERATION METHOD, AND TEACHING SET

Abstract

To simplify a generation processing of teaching information.SOLUTION: In a substrate processing apparatus, a circle peripheral like rotation track of a mark preset onto a substrate holding part is formed by rotating a substrate holding part by a substrate rotation mechanism in a state where a substrate type fixture 7 in which three photo sensors 72 arranged in a non-liner shape are provided to a lower surface 71 by a hand 226 positioned to an upper direction of the substrate holding part. A teaching part calculates a relative position in a plan surface view against the substrate holding part of the hand 226 on the basis of the relative position against the rotation track obtained by each of the three photo sensors 72, and generates horizontal teaching information indicating an appropriate relative position relation in the plan surface view of the hand 226 and the substrate holding part. Thus, a generation processing of the teaching information can be simplified.SELECTED DRAWING: Figure 9

Description

[Technical field]

[0001] The present invention relates to a technique for generating teaching information for teaching a substrate transport position of a transport robot in a substrate processing apparatus. [Background technology]

[0002] Conventionally, in substrate processing apparatuses for processing substrates, substrates accommodated in a FOUP or the like are removed by an indexer robot, handed over to a center robot, and then transported to a processing unit for various processes. In such substrate processing apparatuses, the transport path of the substrate by a transport robot such as the center robot is preset, but detailed transport positions, such as the loading and unloading of substrates into and from the processing unit, need to be taught while actually moving the transport robot. Such teaching processing is performed, for example, when starting up the substrate processing apparatus or before resuming use after disassembly and maintenance.

[0003] For example, in the teaching process described in Patent Documents 1 and 2, a teaching target jig is held on a substrate holding part of a processing unit, and a protrusion (i.e., a detection part) protruding upward from the center of the target jig is detected by an optical sensor held by a transfer robot to detect the relative position between the substrate holding part and the transfer robot. Then, the transfer robot is repeatedly moved so that the relative position becomes a set value, and the relative position of the transfer robot with respect to the substrate holding part is adjusted. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2001-156153 A [Patent Document 2] JP 2006-332543 A Summary of the Invention [Problem to be solved by the invention]

[0005] In the teaching processes described in Patent Documents 1 and 2, it is necessary to adjust the relative position of the target jig with respect to the substrate holder with high accuracy before driving the transfer robot, and then to have the target jig held by the substrate holder. jig Furthermore, in the substrate processing apparatus, since it is necessary to adjust the position of the target jig in each of the multiple processing units, the above-mentioned teaching process requires a great deal of time and effort.

[0006] The present invention has been made in consideration of the above-mentioned problems, and has an object to simplify the generation process of teaching information. [Means for solving the problem]

[0007] The invention described in claim 1 is a substrate processing apparatus comprising: a processing section which performs a predetermined process on a substrate; a transport robot which transports the substrate to the processing section; and a teaching section which teaches the transport robot a substrate transport position in the processing section, the processing section comprising: a substrate holding section which holds the substrate in a horizontal state; and a substrate rotation mechanism which rotates the substrate holding section around a rotation axis which faces in the vertical direction; the transport robot comprising a hand which transfers the substrate between the substrate holding section and the substrate holding section; the hand located above the substrate holding section holds a substrate-shaped jig having three optical sensors arranged in a non-linear manner on its underside, and the substrate holding section is rotated by the substrate rotation mechanism to form a circular rotation locus of a mark which is provided in advance on the substrate holding section; and the teaching section calculates the relative position of the hand to the substrate holding section in a planar view based on the relative positions of the hand to the rotation locus obtained from each of the three optical sensors, and generates horizontal teaching information which indicates an appropriate relative positional relationship between the hand and the substrate holding section in a planar view.

[0008] The invention described in claim 2 is a substrate processing apparatus described in claim 1, wherein the substrate holding part is a mechanical chuck that mechanically holds the outer periphery of the substrate using a plurality of chuck pins arranged circumferentially, and the mark is one or more of the plurality of chuck pins.

[0009] The invention described in claim 3 is the substrate processing apparatus described in claim 1, wherein the substrate holding part is a vacuum chuck having a plurality of suction ports on its upper surface which adsorbs and holds the substrate, and the mark is one or more of the plurality of suction ports.

[0010] The invention described in claim 4 is a substrate processing apparatus described in any one of claims 1 to 3, wherein the hand is moved so that the center of the substrate-type jig and the rotation axis overlap in a planar view based on the relative position of the hand in relation to the substrate holding part in a planar view calculated by the teaching unit, and the rotation trajectory of the mark is formed again by rotating the substrate holding part using the substrate rotation mechanism, and after the rotation trajectory is reformed, the teaching unit recalculates the relative position of the hand in relation to the substrate holding part in a planar view based on the relative positions of the hand in relation to the rotation trajectory obtained respectively from the three optical sensors, and generates the horizontal teaching information.

[0011] The invention described in claim 5 is a substrate processing apparatus described in any one of claims 1 to 4, wherein the transport robot further includes another hand located below the hand and transferring the substrate between the hand and the substrate holding part, and the teaching part generates other horizontal teaching information regarding the other hand in the same manner as the horizontal teaching information regarding the hand.

[0012] The invention described in claim 6 is a substrate processing apparatus described in any one of claims 1 to 5, wherein a contact sensor is provided on the underside of the substrate-type jig to detect contact with the substrate holding part, and the transport robot brings the hand closer to the substrate holding part in the vertical direction, and the teaching unit generates up-down teaching information indicating the appropriate relative positional relationship between the hand and the substrate holding part in the vertical direction based on the output from the contact sensor.

[0013] The invention according to claim 7 is the substrate processing apparatus according to claim 6. ,before The contact sensor includes a plurality of sensor elements arranged circumferentially on the outer periphery of the lower surface of the substrate-type jig.

[0014] The invention described in claim 8 is a substrate processing apparatus described in any one of claims 1 to 7, wherein the processing section further includes a housing that accommodates the substrate holding section therein and has an opening for loading the substrate, and when the hand is inserted into the opening of the housing, an image showing the relative positions of the hand and the opening is obtained, and the teaching section generates loading teaching information showing the appropriate relative positional relationship between the hand and the opening based on the image.

[0015] A ninth aspect of the present invention provides the substrate processing apparatus according to the eighth aspect, wherein the captured image is an image of the opening captured by a camera provided on the hand or the substrate jig.

[0016] The invention described in claim 10 is a substrate processing apparatus comprising: a processing section which performs a predetermined process on a substrate; a transport robot which transports the substrate to the processing section; and an instruction section which instructs the transport robot of a substrate transport position in the processing section, the processing section comprising: a substrate holding section which holds the substrate in a horizontal state; and a substrate rotation mechanism which rotates the substrate holding section about a rotation axis which faces in a vertical direction, the transport robot comprising a hand which transfers the substrate between the substrate holding section and the processing section, The rotating part is also rotated, and while the hand located above the substrate holding part holds a substrate-type jig having three optical sensors arranged in a non-linear manner, the rotating part is rotated to form a circular rotational trajectory of a mark that has been pre-installed on the rotating part, and the teaching unit calculates the relative position of the hand in a planar view with respect to the rotation axis based on the relative positions of the hand in a planar view with respect to the rotational trajectory obtained from each of the three optical sensors, and generates horizontal teaching information that indicates the appropriate relative positional relationship between the hand and the substrate holding part in a planar view.

[0017] The invention described in claim 11 is a method for generating teaching information for a substrate processing apparatus including a processing section for performing a predetermined process on a substrate and a transport robot for transporting the substrate to the processing section, the teaching information generating method generating teaching information for instructing a substrate transport position of the transport robot in the processing section, the processing section including a substrate holding section for holding the substrate in a horizontal state and a substrate rotation mechanism for rotating the substrate holding section about a rotation axis facing in a vertical direction, the transport robot including a hand for transferring the substrate between the substrate holding section and the transport robot, the teaching information generating method comprising: a) generating teaching information for instructing a substrate transport position of the transport robot in the processing section by using three optical axes arranged in a non-linear manner; The method includes the steps of: b) holding a substrate-type jig having a sensor provided on its underside with the hand; b) forming a circular rotational trajectory of a mark pre-provided on the substrate holding part by rotating the substrate holding part with the substrate rotation mechanism; and c) calculating a relative position of the hand to the substrate holding part in a planar view based on the relative positions of the substrate-type jig located above the substrate holding part with respect to the rotational trajectories obtained from each of the three optical sensors, and generating horizontal teaching information indicating an appropriate relative positional relationship between the hand and the substrate holding part in a planar view.

[0018] The invention described in claim 12 relates to a substrate processing apparatus including a processing section which performs a predetermined process on a substrate, and a transport robot which transports the substrate to the processing section, and a teaching set used to teach the transport robot a substrate transport position in the processing section, the processing section including a substrate holding section which holds the substrate in a horizontal position, and a substrate rotation mechanism which rotates the substrate holding section about a rotation axis which faces in a vertical direction, the transport robot including a hand which transfers the substrate between the substrate holding section and the transport robot, the teaching set including a substrate-shaped jig having three optical sensors arranged in a non-linear manner on its underside, and a substrate rotation mechanism which rotates the substrate holding section around a rotation axis which faces in a vertical direction, the substrate rotation mechanism including a substrate rotation mechanism which rotates the substrate holding section around a rotation axis which faces in a vertical direction, the transport robot including a hand which transfers the substrate between the substrate holding section and the substrate holding section, the teaching set including a substrate-shaped jig having three optical sensors arranged in a non-linear manner on its underside, and a substrate rotation mechanism which rotates the substrate holding section around a rotation axis which faces in a vertical direction, the substrate rotation mechanism including ... and a storage medium storing a program for generating horizontal teaching information indicating an appropriate relative positional relationship in a planar view of the substrate holding part, wherein while the substrate-type jig is held by the hand positioned above the substrate holding part, the substrate holding part is rotated by the substrate rotation mechanism to form a circular rotation locus of a mark that is pre-installed on the substrate holding part, and when the program is executed by a computer, the relative position of the hand to the substrate holding part in a planar view is calculated based on the relative positions with respect to the rotation locus obtained respectively from the three optical sensors, and the horizontal teaching information is generated. Effect of the Invention

[0021] According to the present invention, the process of generating teaching information can be simplified. [Brief description of the drawings]

[0022] [Figure 1] 1 is a plan view of a substrate processing apparatus according to an embodiment; [Diagram 2] FIG. 2 is a front view showing the inside of the substrate processing apparatus. [Diagram 3] 2 is an enlarged plan view showing the vicinity of a hand of the transport arm. FIG. [Figure 4] FIG. 2 illustrates an example of a processing unit. [Diagram 5] FIG. [Figure 6] FIG. 1 illustrates a configuration of a computer. [Figure 7] FIG. 2 is a block diagram showing functions realized by a computer. [Figure 8] FIG. 11 is a diagram showing a flow of generating teaching information. [Figure 9] FIG. [Figure 10] FIG. [Figure 11] 10A and 10B are diagrams for explaining an example of a method for determining horizontal teaching information. [Figure 12] 10A and 10B are diagrams for explaining an example of a method for determining horizontal teaching information. [Figure 13] FIG. 13 is a bottom view of another substrate-type jig. [Figure 14] FIG. 13 is a plan view of another substrate holding portion. [Figure 15] FIG. 13 is a plan view of another substrate holding portion. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0023] Fig. 1 is a plan view of a substrate processing apparatus 1 according to an embodiment of the present invention. Fig. 2 is a view of the substrate processing apparatus 1 as viewed from line II-II in Fig. 1. In addition, in each of the drawings referred to below, an XYZ orthogonal coordinate system in which the Z axis direction is the vertical direction (i.e., the up-down direction) and the XY plane is the horizontal plane is appropriately added. Also, in Fig. 2, a part of the (+X) side of the substrate processing apparatus 1 is not shown.

[0024] The substrate processing apparatus 1 is an apparatus for continuously processing a plurality of substantially disk-shaped semiconductor substrates 9 (hereinafter simply referred to as "substrates 9"). In the substrate processing apparatus 1, for example, liquid processing is performed in which a processing liquid is supplied to the substrates 9.

[0025] The substrate processing apparatus 1 includes a plurality of carrier stages 11, an indexer block 10, a processing block 20, a placement unit 40, and a computer 8. The indexer block 10 and the processing block 20 are also called an indexer cell and a processing cell, respectively. The indexer block 10 is also called an Equipment Front End Module (EFEM) unit, etc. In the example shown in Fig. 1, a plurality of (e.g., three) carrier stages 11, indexer blocks 10, and processing blocks 20 are arranged adjacent to each other in this order from the (-X) side to the (+X) side.

[0026] The multiple carrier stages 11 are arranged in the Y direction along the side wall on the (-X) side of the indexer block 10. Each of the multiple carrier stages 11 is a mounting table on which a carrier 95 is placed. The carrier 95 is capable of storing multiple disk-shaped substrates 9. An opening is provided in the side wall on the (-X) side of the indexer block 10 at a position corresponding to the carrier 95 on each carrier stage 11. A carrier shutter is provided in the opening, and the carrier shutter is opened and closed when the substrate 9 is loaded or unloaded from the carrier 95.

[0027] A carrier 95 storing a plurality of unprocessed substrates 9 is carried in from outside the substrate processing apparatus 1 by an overhead hoist transport (OHT) or the like and placed on each carrier stage 11. In addition, the processed substrates 9 that have been processed in the processing block 20 are stored again in the carrier 95 placed on the carrier stage 11. The carrier 95 storing the processed substrates 9 is carried out to the outside of the substrate processing apparatus 1 by an OHT or the like. That is, the carrier stage 11 functions as a substrate accumulation section that accumulates unprocessed substrates 9 and processed substrates 9.

[0028] The carrier 95 is, for example, a front opening unified pod (FOUP) that stores the substrates 9 in a sealed space. The carrier 95 is not limited to a FOUP, and may be, for example, a standard mechanical interface (SMIF) pod or an open cassette (OC) that exposes the stored substrates 9 to the outside air. The number of carrier stages 11 may be one, or two or more.

[0029] The indexer block 10 receives unprocessed substrates 9 from the carrier 95 and passes them to the processing block 20. The indexer block 10 also receives processed substrates 9 unloaded from the processing block 20 and loads them into the carrier 95. An indexer robot 12 that loads and unloads substrates 9 into and from the carrier 95 is disposed in the internal space 100 of the indexer block 10.

[0030] The indexer robot 12 includes two transport arms 121a and 121b, an arm stage 122, and a movable base 123. The two transport arms 121a and 121b are mounted on the arm stage 122. The movable base 123 is screwed into a ball screw 124 extending parallel to the arrangement direction of the multiple carrier stages 11 (i.e., along the Y direction), and is provided so as to be slidable relative to two guide rails 125. When the ball screw 124 is rotated by a rotary motor (not shown), the entire indexer robot 12 including the movable base 123 moves horizontally along the Y direction.

[0031] The arm stage 122 is mounted on a movable base 123. A motor (not shown) that rotates the arm stage 122 around a rotation axis facing the vertical direction (i.e., the Z direction) and a motor (not shown) that moves the arm stage 122 along the vertical direction are built into the movable base 123. Transport arms 121a and 121b are arranged on the arm stage 122 at a distance from each other above and below.

[0032] A hand 126 having a substantially U-shape in plan view is provided at the tip of each of the transport arms 121a and 121b. The hand 126 includes, for example, a base portion extending in the width direction and two claw portions extending substantially parallel to the longitudinal direction perpendicular to the width direction from both ends of the base portion in the width direction. Each of the transport arms 121a and 121b supports the lower surface of one substrate 9 with the hand 126. The hand 126 is provided with a movement limiting mechanism (not shown), and the relative position of the substrate 9 with respect to the hand 126 is fixed with high positional accuracy. The movement limiting mechanism may be, for example, a plurality of protrusions that contact the side edges of the substrate 9 to mechanically limit the position of the substrate 9, or a plurality of suction ports that suck the lower surface of the substrate 9.

[0033] The transport arms 121a and 121b move independently of each other in the horizontal direction (i.e., in the radial direction centered on the rotation axis of the arm stage 122) by bending and extending the multi-joint mechanism by a drive mechanism (not shown) built into the arm stage 122. In other words, the hand 126 is provided on the indexer robot 12 so as to be capable of moving forward and backward, ascending and descending, and rotating freely. The number of transport arms in the indexer robot 12 may be one, or three or more.

[0034] The indexer robot 12 transports the substrate 9 between the carrier 95 and the placement unit 40 by individually accessing the transport arms 121a and 121b, which hold the substrate 9 by the hand 126, to the carrier 95 placed on the carrier stage 11 and the placement unit 40, respectively. The above-mentioned moving mechanism in the indexer robot 12 is not limited to the above example, and may be another mechanism. For example, a belt feed mechanism using a pulley and a timing belt may be adopted as a mechanism for moving the transport arms 121a and 121b in the vertical direction.

[0035] The processing block 20 is provided with a transport path 23 used for transporting the substrate 9, and a plurality of processing units 21 arranged around the transport path 23. In the example shown in Fig. 1, the transport path 23 extends in the X direction at the center of the processing block 20 in the Y direction. A center robot 22 that transports the substrate 9 to and from each processing unit 21 is arranged in an internal space 230 of the transport path 23.

[0036] The center robot 22 includes two transfer arms 221a and 221b, an arm stage 222, and a base 223. The two transfer arms 221a and 221b are mounted on the arm stage 222. The base 223 is fixed to the frame of the processing block 20. Therefore, the base 223 of the center robot 22 does not move in the horizontal direction or the up-down direction. Note that the base 223 of the center robot 22 may be movable, for example, in the horizontal direction.

[0037] The arm stage 222 is mounted on a base 223. A motor (not shown) that rotates the arm stage 222 around a rotation axis facing in the vertical direction, and a motor (not shown) that moves the arm stage 222 in the vertical direction are built into the base 223. Transport arms 221a and 221b are arranged on the arm stage 222, spaced apart from each other in the vertical direction.

[0038] The tips of the transport arms 221a and 221b are provided with hands 226 that are substantially U-shaped in plan view. FIG. 3 is an enlarged plan view showing the vicinity of the hand 226 of the transport arm 221a. The hand 226 of the transport arm 221b has a structure similar to that shown in FIG. 3. The hand 226 shown in FIG. 3 includes a base 227 that extends in the width direction, and two claws 228 that extend substantially parallel to the longitudinal direction perpendicular to the width direction from both ends of the base 227 in the width direction. The hand 226 is provided with a movement limiting mechanism (not shown), and the relative position of the substrate 9 with respect to the hand 226 is fixed with high positional accuracy. The movement limiting mechanism may be, for example, a plurality of protrusions that contact the side edges of the substrate 9 to mechanically limit the position of the substrate 9, or a plurality of suction ports that adsorb the lower surface of the substrate 9.

[0039] Each of the transport arms 221a and 221b holds one substrate 9 by a hand 226. The position indicated by an x ​​in Fig. 3 is a hand center position 220 which is the center position of the hand 226. The hand center position 220 is an imaginary point located between two claw portions 228. The hand center position 220 is the position where the center of the substrate 9 is located in a plan view when the substrate 9 is held by the hand 226 at the design position (i.e., the position indicated by the two-dot chain line in Fig. 3).

[0040] The transport arms 221a and 221b move independently of each other in the horizontal direction (i.e., in the radial direction centered on the rotation axis of the arm stage 222) by bending and extending the multi-joint mechanism by a drive mechanism (not shown) built into the arm stage 222. In other words, the hand 226 is provided on the center robot 22 so as to be movable forward and backward, vertically movable, and rotatable. The number of transport arms in the center robot 22 may be one, or three or more.

[0041] The center robot 22 is a transport robot that transports the substrate 9 between the placement unit 40 and the processing units 21 by making the transport arms 221a and 221b, which hold the substrate 9 by the hand 226, access the placement unit 40 and the processing units 21 individually. The moving mechanism in the center robot 22 is not limited to the above example, and may be another mechanism. For example, a belt feed mechanism using a pulley and a timing belt may be adopted as a mechanism for moving the transport arms 221a and 221b in the vertical direction.

[0042] Each processing unit 21 is a processing section that performs a predetermined process on the substrate 9. In the example shown in Figures 1 and 2, 12 processing units 21 are provided in the processing block 20. Specifically, four groups of three processing units 21 stacked in the Z direction are arranged around the center robot 22 in a plan view. The number of processing units 21 provided in the processing block 20 may be changed in various ways within a range of one or more.

[0043] The placement unit 40 is provided at the connection between the indexer block 10 and the processing block 20. As described above, the indexer robot 12 and the center robot 22 are accessible to the placement unit 40. The placement unit 40 is connected to the multiple processing units 21 via the transport path 23 on which the center robot 22 is disposed.

[0044] The indexer robot 12 places the unprocessed substrate 9 removed from the carrier 95 on the placement unit 40. The center robot 22 removes the unprocessed substrate 9 from the placement unit 40 and carries it into the processing unit 21. The center robot 22 also places the processed substrate 9 removed from the processing unit 21 on the placement unit 40. The indexer robot 12 removes the processed substrate 9 from the placement unit 40 and carries it into the carrier 95. In other words, the placement unit 40 holds the unprocessed substrate 9 passed from the indexer robot 12 to the center robot 22, and the processed substrate 9 passed from the center robot 22 to the indexer robot 12.

[0045] 4 is a diagram showing an example of the processing unit 21. The processing unit 21 includes a housing 31, a substrate holding section 32, a substrate rotating mechanism 33, a cup section 34, and a processing nozzle 35. The substrate holding section 32, the substrate rotating mechanism 33, the cup section 34, and the processing nozzle 35 are accommodated inside the housing 31. An opening 311 is provided on a side wall of the housing 31 for carrying the substrate 9 inside by the center robot 22 (see FIGS. 1 and 2). The opening 311 is openable and closable, and is opened when the substrate 9 is carried in and out, and is closed when the substrate 9 is processed. In the processing unit 21, for example, a liquid process such as a cleaning process is performed on the substrate 9.

[0046] In the example shown in FIG. 4, the substrate holding unit 32 is a mechanical chuck that holds the substrate 9 in a horizontal state. The substrate holding unit 32 includes a base 321, a shaft 322, and a plurality of chuck pins 323. The base 321 is a substantially disk-shaped member centered on a rotation axis J1 that faces the up-down direction. In the following description, the up-down direction in FIG. 4 is described as coinciding with the Z direction described above, but this does not necessarily have to be the case. The shaft 322 is a substantially cylindrical or columnar member centered on the rotation axis J1. The shaft 322 extends downward from the lower surface of the base 321 and is connected to the substrate rotation mechanism 33.

[0047] FIG. 5 is a plan view showing the substrate holding unit 32. As shown in FIG. 4 and FIG. 5, a plurality of (for example, six) chuck pins 323 are erected on the upper surface of the base 321. The plurality of chuck pins 323 are arranged circumferentially on the outer periphery of the upper surface of the base 321. In detail, the plurality of chuck pins 323 are arranged on the same circumference centered on the rotation axis J1. The plurality of chuck pins 323 are arranged, for example, at approximately equal angular intervals in the circumferential direction centered on the rotation axis J1 (hereinafter, also simply referred to as the "circumferential direction"). The plurality of chuck pins 323 directly contact the outer periphery of the substrate 9 and mechanically hold the outer periphery of the substrate 9. In a state in which the substrate 9 is held by the plurality of chuck pins 323, the upper surface of the base 321 faces the lower surface of the substrate 9 in the up-down direction while being spaced downward from the lower surface of the substrate 9.

[0048] The substrate rotating mechanism 33 rotates the substrate holding part 32 about a rotation axis J1, thereby rotating the substrate 9 held by the substrate holding part 32. The substrate rotating mechanism 33 is, for example, an electric motor connected to a shaft 322 of the substrate holding part 32. The substrate rotating mechanism 33 may be a rotating mechanism other than an electric motor. The substrate rotating mechanism 33 is housed inside a cover 331 arranged below the substrate holding part 32.

[0049] The processing nozzle 35 discharges the processing liquid from above the substrate 9 toward the upper surface of the substrate 9. In FIG. 4, the configuration for supporting the processing nozzle 35 above the substrate 9 is omitted. The cup portion 34 is a substantially cylindrical member that surrounds the entire circumference of the substrate holding portion 32. The cup portion 34 is a liquid receiver that receives the processing liquid and the like that splashes from the rotating substrate 9 to the surroundings. The cup portion 34 can be moved up and down by a cup lifting mechanism (not shown). When the substrate 9 is processed, the cup portion 34 is disposed at a position facing the side edge of the substrate 9 in a radial direction (hereinafter, simply referred to as the "radial direction") centered on the rotation axis J1 as shown in FIG. 4. When the substrate 9 is transferred between the hand 226 of the center robot 22 and the substrate holding portion 32, the cup portion 34 moves downward from the position shown in FIG. 4. In the example shown in FIG. 4, the cup portion 34 does not rotate, but may be configured to be rotatable about the rotation axis J1.

[0050] FIG. 6 is a diagram showing the configuration of the computer 8. The computer 8 is a normal computer including a processor 81, a memory 82, an input / output unit 83, and a bus 84. The bus 84 is a signal circuit that connects the processor 81, the memory 82, and the input / output unit 83. The memory 82 stores various information. For example, the memory 82 reads and stores a program 89 for generating teaching information that is stored in advance in the storage medium 80. The generation of teaching information will be described later. The processor 81 executes various processes (for example, numerical calculations) while using the memory 82 and the like in accordance with the program 89 and the like stored in the memory 82. The input / output unit 83 includes a keyboard 85 and a mouse 86 that accept input from an operator, a display 87 that displays an output from the processor 81, and a transmission unit 88 that transmits an output from the processor 81, and the like.

[0051] 7 is a block diagram showing functions realized by the computer 8 executing the program 89. The substrate processing apparatus 1 includes a storage unit 61, a drive control unit 62, and an instruction unit 63 as functions realized by the computer 8. The storage unit 61 is mainly realized by the memory 82, and stores various information such as an output from a camera 75 described later. The drive control unit 62 is mainly realized by the processor 81 and a transmission unit 88, and sends control signals to each component such as the center robot 22 and the processing unit 21 to drive and control each component.

[0052] The teaching unit 63 teaches the center robot 22 an appropriate position (i.e., substrate transport position) to which the substrate 9 should be transported by the center robot 22 when the center robot 22 transports the substrate 9 into and out of the processing unit 21. The teaching unit 63 generates teaching information indicating the substrate transport position in the processing unit 21 to which the center robot 22 transports the substrate.

[0053] The teaching information includes horizontal teaching information indicating the proper relative positional relationship in a plan view between the hand 226 of the center robot 22 and the substrate holding part 32 of the processing unit 21. The teaching information also includes vertical teaching information indicating the proper relative positional relationship in the vertical direction between the hand 226 of the center robot 22 and the substrate holding part 32 of the processing unit 21. Furthermore, the teaching information includes carry-in teaching information indicating the proper relative positional relationship between the hand 226 of the center robot 22 and the opening 311 of the housing 31 of the processing unit 21.

[0054] The horizontal teaching information is used to position the hand 226 at a proper relative position in a plan view with respect to the substrate holding unit 32 when the substrate 9 is handed over from the hand 226 of the center robot 22 to the substrate holding unit 32 and when the hand 226 receives the substrate 9 from the substrate holding unit 32. The up-down teaching information is used to position the hand 226 at a proper relative position in the up-down direction with respect to the substrate holding unit 32 when the substrate 9 is handed over from the hand 226 of the center robot 22 to the substrate holding unit 32 and when the hand 226 receives the substrate 9 from the substrate holding unit 32. The carry-in teaching information is used to position the hand 226 at a proper relative position with respect to the opening 311 (i.e., a position where the substrate 9 held by the hand 226 does not collide with the housing 31, etc.) when the hand 226 of the center robot 22 is inserted into the opening 311 of the housing 31 and when it is separated from the opening 311. In other words, the carry-in instruction information is information for preventing the substrate 9 from colliding with the substrate 9 when the substrate 9 is carried in and out of the housing 31 by the hand 226 of the center robot 22.

[0055] Next, a flow of generating teaching information will be described with reference to Fig. 8. The teaching information is automatically generated when the substrate 9 is not being processed by the substrate processing apparatus 1 (for example, at night). The teaching information is generated sequentially for the multiple processing units 21 of the substrate processing apparatus 1. The teaching information is also generated sequentially for the multiple hands 226 of the center robot 22. The generation of teaching information for the hand 226 of the upper transport arm 221a of the center robot 22 will be described below. As will be described later, teaching information for the hand 226 of the transport arm 221b is also generated in a similar procedure.

[0056] In generating the teaching information, first, the substrate-type jig 7 shown in Fig. 9 is held by the hand 226 of the center robot 22 shown in Fig. 1 and Fig. 2 (step S11). Specifically, the drive control unit 62 (see Fig. 7) controls the center robot 22 to drive the transport arm 221a and insert the hand 226 into the stocker 700 arranged near the placement unit 40. One or more substrate-type jig 7 are stored in advance in the stocker 700. The hand 226 holds one substrate-type jig 7 and takes it out of the stocker 700. An operator or the like may place the substrate-type jig 7 on the hand 226.

[0057] 9 is a bottom view showing the lower surface 71 of the substrate-type jig 7 (i.e., the lower surface when held by the hand 226). The substrate-type jig 7 is, for example, a substantially disk-shaped member. The substrate-type jig 7 is, for example, substantially circular in shape, substantially the same as the substrate 9 in plan view. The thickness of the substrate-type jig 7 is preferably thinner than the height of the gap (hereinafter also referred to as the "hand gap") in the vertical direction between the hand 226 of the transport arm 221a and the hand 226 of the transport arm 221b. This allows the substrate-type jig 7 to be easily held by the hand 226 of the lower transport arm 221b when generating teaching information for the hand 226.

[0058] The substrate-type jig 7 includes a substantially disk-shaped jig body 76 and three optical sensors 72 provided on a lower surface 71 of the jig body 76. The optical sensor 72 is a sensor in which an optical lens system and an optical sensor are combined. The optical sensor 72 may be, for example, a photosensor or a CMOS sensor. or CCD sensor Sa Various sensors can be used, such as a camera having a sensor. In this embodiment, a photosensor is used as the optical sensor 72. In the following description, the component with reference numeral 72 will also be referred to as the "photosensor 72".

[0059] The three photosensors 72 are not arranged on a straight line, but are arranged at three vertices of a triangle in a plan view. In other words, the three photosensors 72 are arranged in a non-linear manner. The three photosensors 72 are arranged so that the center of gravity of a virtual triangle 73 formed by the three photosensors 72 overlaps with the center 70 of the substrate-type jig 7 in a plan view. The triangle 73 formed by the three photosensors 72 may be any of an equilateral triangle, an isosceles triangle, and a right-angled triangle, and may not be any of an equilateral triangle, an isosceles triangle, and a right-angled triangle. In this embodiment, the triangle 73 is an equilateral triangle. In addition, four or more photosensors 72 may be provided on the lower surface 71 of the substrate-type jig 7. At least three photosensors 72 out of the four or more photosensors 72 are arranged in a non-linear manner as described above.

[0060] 9, the hand 226 that contacts the lower surface 71 of the substrate-type jig 7 and holds the substrate-type jig 7 from below is indicated by a two-dot chain line. When the substrate-type jig 7 is held by the hand 226, the relative position of the substrate-type jig 7 with respect to the hand 226 is fixed with high positional accuracy by the movement limiting mechanism described above. When the substrate-type jig 7 is held by the hand 226, the center 70 of the substrate-type jig 7 overlaps with the hand center position 220 of the hand 226 in a plan view. Furthermore, the three photosensors 72 are arranged to avoid the two claws 228 of the hand 226 in a plan view and do not overlap with the hand 226. Each photosensor 72 is capable of detecting a detection target that is located below the hand 226.

[0061] Each photosensor 72 is a reflective photosensor (i.e., a photoreflector). As described later, in this embodiment, the object to be detected by the photosensor 72 is a chuck pin 323 (see FIGS. 4 and 5) protruding upward from the base 321 of the substrate holder 32. The photosensor 72 is preferably a limited reflection type photosensor capable of detecting only objects within a predetermined distance range. Note that the photosensor 72 may be a type of photosensor other than the limited reflection type.

[0062] As described later, the substrate-type jig 7 is carried into the processing unit 21, and then transferred from the hand 226 to the substrate holding part 32 and held by the substrate holding part 32. A contact sensor 74 for detecting contact with the substrate holding part 32 is provided on the lower surface 71 of the substrate-type jig 7. The contact sensor 74 is provided circumferentially on the outer periphery of the lower surface 71 of the substrate 9. The contact sensor 74 is located radially outside the three photosensors 72 and surrounds the three photosensors 72. In the example shown in FIG. 9, the contact sensor 74 includes a plurality of (for example, 16) sensor elements 741. The plurality of sensor elements 741 are arranged circumferentially around the center 70 of the substrate-type jig 7 on the outer periphery of the lower surface 71 of the substrate-type jig 7. The plurality of sensor elements 741 are arranged, for example, at approximately equal angular intervals in the circumferential direction. For example, a pressure sensor, a piezoelectric sensor, or a capacitance sensor can be used as the sensor element 741.

[0063] The power supply to the above-mentioned photosensor 72 and contact sensor 74 is performed, for example, by a thin battery built into the substrate-type jig 7. Alternatively, power may be supplied to the photosensor 72 and contact sensor 74 in a wired or wireless manner from an external power source disposed outside the substrate-type jig 7. Outputs from the photosensor 72 and contact sensor 74 are sent to the computer 8.

[0064] The hand 226 that holds the substrate-type jig 7 is provided with a camera 75. The camera 75 may be detachably attached to a predetermined position on the hand 226 by, for example, a fastener or the like, or may be fixed non-detachably to a predetermined position on the hand 226. In the example shown in FIG. 9, the camera 75 is provided on the upper surface of the base 227 of the hand 226 and captures an image of the front of the hand 226 (i.e., the direction in which the claws 228 extend from the base 227). The camera 75 may also capture an image of the substrate-type jig 7 on the hand 226. The captured image captured by the camera 75 is sent to the computer 8 and stored in the storage unit 61. For example, a CMOS sensor or a CCD sensor can be used as the camera 75. The camera 75 may be provided on, for example, the upper surface of the substrate-type jig 7.

[0065] When the substrate-type jig 7 is held by the hand 226 in step S11, the drive control unit 62 (see FIG. 7) controls the center robot 22 to drive the transport arm 221a and move the hand 226 toward the opening 311 (see FIG. 4) of one of the processing units 21. When the hand 226 approaches the opening 311, the camera 75 captures an image of the opening 311 and the area around the opening 311 in the housing 31. The captured image is sent to the computer 8.

[0066] In the computer 8, the teaching unit 63 determines the relative position of the hand 226 with respect to the opening 311 based on the captured image (i.e., the image of the opening 311) and the fixed position of the camera 75 on the hand 226 stored in advance in the storage unit 61. That is, the captured image is an image showing the relative positions of the hand 226 and the opening 311. Based on the relative position of the hand 226 with respect to the opening 311, the teaching unit 63 determines whether the board 9 to be held by the hand 226 can be inserted into the opening 311 without colliding with the housing 31.

[0067] Then, if it is determined that the substrate 9 will not collide with the housing 31 when the hand 226 is inserted into the opening 311, the current position of the hand 226 is acquired. On the other hand, if it is determined that the substrate 9 may collide with the housing 31, the relative position of the hand 226 with respect to the opening 311 is adjusted so that the substrate 9 will not collide with the housing 31, and the adjusted position of the hand 226 is acquired. Thereafter, the hand 226 is moved closer to the opening 311 until the hand 226 is inserted into the opening 311, and the position of the hand 226 is adjusted as necessary to acquire the position of the hand 226. Then, based on the acquired multiple positions of the hand 226, the above-mentioned carry-in teaching information is generated (step S12). Specifically, the movement path of the hand 226 passing through the multiple positions of the hand 226 is set as the carry-in teaching information. The carry-in teaching information is stored in the computer 8 and is used when the substrate 9 is processed in the substrate processing apparatus 1. This prevents the substrate 9 from colliding with the housing 31 when the substrate 9 is carried into the processing unit 21.

[0068] The loading instruction information generated in step S12 may include a movement path of the hand 226 when passing through the opening 311, as well as a movement path to the innermost position in the housing 31 (i.e., the position that the hand 226 can reach that is the furthest from the opening 311). In this case, after the hand 226 is inserted into the opening 311, the movement of the hand 226, the acquisition of a captured image showing the relative positions of the hand 226 and the chuck pins 323, and the adjustment of the position of the hand 226 as necessary are repeated in a manner substantially similar to that described above, and when the hand 226 reaches the innermost position, the loading instruction information is generated. This prevents the substrate 9 from colliding with the chuck pins 323 when the substrate 9 is loaded into the processing unit 21.

[0069] The loading teaching information generated in step S12 is also used when the substrate 9 is carried out from the housing 31, and the substrate 9 moves in the opposite direction to the path taken when carried in, thereby preventing the substrate 9 from colliding with the chuck pins 323 and the housing 31. When the substrate 9 is carried out, the loading teaching information may be generated by repeating the movement of the hand 226, the acquisition of a captured image showing the relative position between the hand 226 and the chuck pins 323 or the housing 31, and the adjustment of the position of the hand 226 as necessary, in a manner substantially similar to that described above.

[0070] When the carry-in teaching information is generated, the drive control unit 62 controls the center robot 22 to horizontally move the substrate-type jig 7 held by the hand 226 to a position approximately vertically above the substrate holding unit 32. At this time, the center 70 of the substrate-type jig 7 is located near the rotation axis J1 of the substrate holding unit 32 in a plan view (i.e., a position that should overlap with the rotation axis J1 in terms of design), as shown in Fig. 10. Note that the substrate holding unit 32 does not hold a substrate 9 or other objects (for example, a teaching target jig, etc.).

[0071] FIG. 10 is a plan view showing the substrate holding part 32. In FIG. 10, in order to facilitate understanding of the figure, the deviation between the center 70 of the substrate-type jig 7 and the rotation axis J1 of the substrate holding part 32 is drawn larger than in reality. In addition, in FIG. 10, the substrate-type jig 7 located above the substrate holding part 32, the three photosensors 72, and the imaginary triangle 73 formed by the three photosensors 72 are also shown by two-dot chain lines. As described above, the center of gravity of the triangle 73 overlaps with the center 70 of the substrate-type jig 7 and the hand center position 220 (see FIG. 9) in a plan view. In the example shown in FIG. 10, the center 70 of the substrate-type jig 7 is slightly deviated diagonally downward to the left from the rotation axis J1. However, the deviation of the center 70 of the substrate-type jig 7 from the rotation axis J1 is unknown at this time. In the following description, the position of the substrate-type jig 7 shown in FIG. 10 is also called the "initial position."

[0072] Next, a process is performed to match the center 70 of the substrate-type jig 7 with the rotation axis J1 with high accuracy in a plan view. First, the substrate rotation mechanism 33 is driven under the control of the drive control unit 62, and the substrate holding unit 32 continuously rotates around the rotation axis J1 at a predetermined rotation speed. As a result, a virtual circular rotation trajectory 324 is formed by the multiple chuck pins 323, which are marks provided in advance on the substrate holding unit 32 (step S13). As described above, the multiple chuck pins 323 are arranged on the same circumference centered on the rotation axis J1, so the rotation trajectory 324 is a trajectory formed by the rotation of the multiple chuck pins 323. Note that the rotation trajectory 324 is, for example, the rotation trajectory of the pin portion at the upper end of the chuck pin 323 (i.e., the portion that directly contacts the outer edge portion of the substrate 9 when the substrate 9 is processed). If the pin portion is movable in the radial direction, the rotation trajectory 324 is, for example, the rotation trajectory of the pin portion in a state where it is positioned at the outermost radial direction. The rotation trajectory 324 may be the rotation trajectory of a portion other than the pin portion of the chuck pin 323. In addition, the distance between the rotation axis J1 and the chuck pin 323 (i.e., the radius of the rotation trajectory 324) is known in terms of design, but is treated as being unknown in the strict sense.

[0073] The mark forming the rotation trajectory 324 is not limited to the chuck pin 323 as long as it is a configuration provided in advance on the substrate holding unit 32. For example, a screw head or the like present on the substrate holding unit 32 may also be used as the mark. The mark may be one, or may be a plurality of configurations arranged on the same circumference centered on the rotation axis J1. It is preferable that the mark is not a dedicated mark for generating teaching information, but a configuration used for processing the substrate 9 in the substrate processing apparatus 1, such as the chuck pin 323, is also used as the mark. This simplifies the structure of the substrate holding unit 32 compared to the case where a dedicated mark is provided.

[0074] Next, while the rotation of the substrate holding part 32 is continued, the substrate jig 7 is moved horizontally together with the hand 226 above the substrate holding part 32. The horizontal movement is performed until one of the three photosensors 72 detects the rotating chuck pin 323 (i.e., until the photosensor 72 overlaps with the rotation trajectory 324 in a plan view). Then, the position of the hand 226 is changed little by little to obtain a position where the photosensor 72 overlaps with the rotation trajectory 324 in a plan view and the movement distance from the initial position of the substrate jig 7 is the smallest (hereinafter referred to as the "minimum movement position"). In addition, the distance between the center 70 of the substrate jig 7 at the initial position and the center 70 at the minimum movement position (hereinafter also referred to as the "minimum movement distance") is also obtained. Thereafter, the minimum movement position and the minimum movement distance of the substrate jig 7 are obtained for the other two photosensors 72 by the same procedure.

[0075] A straight line passing through the center 70 of the substrate-type jig 7 in its initial position and the center 70 of the substrate-type jig 7 in its minimum movement position acquired for each photosensor 72 passes through the rotation axis J1 which is the center of the rotation trajectory 324. Therefore, based on the minimum movement distances for the three photosensors 72 and the known relative positions of the three photosensors 72, it is possible to calculate the position of the rotation axis J1 which is the center of the rotation trajectory 324 in a plan view.

[0076] 11, first, from the coordinate Se10 (i.e., X-coordinate and Y-coordinate, hereinafter also simply referred to as "coordinate") of one photosensor 72 in the initial position of the substrate-type jig 7 and the minimum movement distance d1 for the photosensor 72, the coordinate Se11 (i.e., the coordinate of one point on the rotation trajectory 324) of the photosensor 72 when the substrate-type jig 7 is located at the minimum movement position for the photosensor 72 is calculated. Similarly, for the other two photosensors 72, from the coordinates Se20 and Se30 of the photosensor 72 in the initial position of the substrate-type jig 7 and the minimum movement distances d2 and d3, the coordinates Se21 and Se31 (i.e., the coordinate of one point on the rotation trajectory 324) of the photosensor 72 when the substrate-type jig 7 is located at the minimum movement position are calculated.

[0077] 12, an inscribed triangle T1 of the rotation trajectory 324 is obtained from the coordinates Se11, Se21, and Se31 of the three points on the calculated rotation trajectory 324. Then, the coordinates of the intersection of the perpendicular bisectors of each side of the inscribed triangle T1 are calculated as the coordinates of the rotation axis J1, which is the center of the rotation trajectory 324. In addition, a radius Rtp of the rotation trajectory 324 is calculated from the lengths of the three sides of the inscribed triangle T1 by the sine theorem.

[0078] Next, the radius Rtp is changed little by little, and the coordinates Se10a, Se20a, and Se30a of the three photosensors 72 in the substrate jig 7 located at the initial position are calculated back based on the coordinates of the rotation axis J1 described above, the radius Rtp of the rotation trajectory 324, and the minimum movement distances d1, d2, and d3 described above. Next, the length of each side of the triangle 73 formed by the three photosensors 72 is calculated based on the back-calculated coordinates Se10a, Se20a, and Se30a. Then, the radius Rtp at which the calculated length of each side of the triangle 73 is closest to the length (known) of each side of the triangle 73 in the actual substrate jig 7 is set as the radius Rt of the rotation trajectory 324. This allows the radius Rt of the rotation trajectory 324 to be calculated with high accuracy. For example, the radius Rt of the rotation trajectory 324 is determined so that the sum of squares of the difference between the calculated value of each side of the triangle 73 and the actual value is minimized. After that, from the coordinates Se10a, Se20a, and Se30a of the three photosensors 72 obtained using the radius Rt of the rotation trajectory 324, the hand center position 220 overlapping with the center of gravity of the triangle 73 is obtained.

[0079] In the teaching unit 63, the position of the rotation axis J1 obtained as described above is compared with the hand center position 220, and if the position of the rotation axis J1 and the hand center position 220 overlap in a planar view, information indicating the current position of the hand 226 is generated as horizontal teaching information indicating a proper relative positional relationship in a planar view between the hand 226 and the substrate holding unit 32 (i.e., a proper relative positional relationship in the horizontal direction). On the other hand, if the position of the rotation axis J1 and the hand center position 220 do not overlap in a planar view and are misaligned, the horizontal position of the hand 226 is adjusted so that the rotation axis J1 and the hand center position 220 overlap in a planar view, and information indicating the position of the hand 226 after the adjustment is generated as horizontal teaching information (step S14).

[0080] In step S14, so long as the relative position of the hand 226 in a planar view with respect to the substrate holding portion 32 is calculated based on the relative positions with respect to the rotational trajectory 324 obtained from each of the three photosensors 72 and horizontal teaching information is generated, the method of calculating the relative position, etc. is not limited to the above example and may be modified in various ways.

[0081] In step S14, the calculation of the relative position between the hand 226 and the substrate holding unit 32 and the above-mentioned position adjustment of the hand 226 may be repeated, and then the horizontal teaching information may be generated. In other words, the calculation of the relative position between the hand 226 and the substrate holding unit 32 and the above-mentioned position adjustment of the hand 226 may be repeated before the horizontal teaching information is generated. Specifically, after the above-mentioned position adjustment of the hand 226 in the horizontal direction is completed, the substrate holding unit 32 is rotated to form the rotation trajectory 324 again, and the relative position of the hand 226 to the substrate holding unit 32 in a planar view is calculated based on the relative positions of the hand 226 to the re-formed rotation trajectory 324 obtained from the three photosensors 72. Then, when the hand center position 220 and the position of the rotation axis J1 overlap, information indicating the current position of the hand 226 is generated as the horizontal teaching information. When the hand center position 220 is deviated from the rotation axis J1, the position of the hand 226 is adjusted so as to eliminate the deviation. The calculation of the relative position between the hand 226 and the substrate holding part 32 and the position adjustment of the hand 226 are repeated, for example, a predetermined number of times. After that, information indicating the position of the hand 226 after the adjustment is generated as horizontal teaching information. This makes it possible to improve the accuracy of the horizontal teaching information.

[0082] When the horizontal teaching information is generated, the center robot 22 is controlled by the drive control unit 62, so that the substrate-type jig 7 held by the hand 226 shown in FIG. 9 is moved downward and approaches the substrate holding unit 32 in the vertical direction. At this time, the center 70 of the substrate-type jig 7 overlaps with the rotation axis J1 of the substrate holding unit 32 in a plan view. Then, when the contact sensor 74 of the substrate-type jig 7 detects that the substrate holding unit 32 has come into contact with the lower surface 71 of the substrate-type jig 7, only the hand 226 moves further downward by a predetermined distance, and then the movement of the hand 226 is stopped. In the teaching unit 63, information indicating the vertical position of the stopped hand 226 is generated as vertical teaching information indicating the appropriate relative positional relationship between the hand 226 and the substrate holding unit 32 in the vertical direction (step S15). In other words, the teaching unit 63 generates the vertical teaching information based on the output from the contact sensor 74.

[0083] Specifically, contact detection between the substrate-type jig 7 and the substrate holding portion 32 in step S15 is performed by detecting contact with the chuck pin 323 by sensor elements 741 of the contact sensor 74 other than the sensor elements 741 in contact with the two claw portions 228 of the hand 226.

[0084] At this time, rather than simply detecting contact with the chuck pin 323, it may be confirmed whether or not contact with the chuck pin 323 is detected in all of the multiple sensor elements 741 corresponding to the positions of the multiple chuck pins 323, and it may be determined whether or not the substrate-type jig 7 is properly held by the substrate holding part 32. Alternatively, a pressure sensor capable of measuring a load may be used as the sensor element 741, and it may be confirmed whether or not the loads measured are uniform in the multiple sensor elements 741 that are in contact with the multiple chuck pins 323, respectively, and it may be determined whether or not the substrate-type jig 7 is properly held by the substrate holding part 32. In either case, the accuracy of the upper and lower teaching information can be improved.

[0085] 13, the sensor elements 741 may be arranged on the outer periphery of the lower surface 71 of the substrate-type jig 7 (i.e., the lower surface 71 of the jig body 76) in a substantially circumferential manner around the center 70 of the substrate-type jig 7, avoiding positions that contact the hand 226. In the example shown in FIG. 13, the sensor elements 741 are arranged in four arcs, avoiding positions that contact the two claws 228 of the hand 226. In detail, the sensor elements 741 are provided on the outer periphery of the lower surface 71 of the jig body 76, substantially all around the circumference, excluding four contact portions with the claws 228. When the substrate-type jig 7 is held by the hand 226, the orientation of the substrate-type jig 7 is determined so that the sensor elements 741 do not come into contact with the claws 228. In this way, the contact sensor 74 includes a plurality of sensor elements 741 arranged on the outer periphery of the lower surface 71 of the jig body 76, avoiding contact with the hand 226. This prevents the contact sensor 74 from detecting contact with the hand 226, and therefore allows accurate detection of contact between the contact sensor 74 and the chuck pin 323. As a result, the accuracy of the up-down teaching information can be improved.

[0086] In the substrate processing apparatus 1, the above-mentioned loading instruction information, horizontal instruction information, and up-down instruction information generated by the instruction unit 63 are stored in the storage unit 61 as instruction information related to the processing unit 21 and the transport arm 221a. The instruction information is used when the hand 226 of the transport arm 221a loads and unloads the substrate 9 relative to the processing unit 21, and the teaching unit 63 teaches the center robot 22 the substrate transport position by the hand 226. This prevents the substrate 9 from colliding with the housing 31 and the chuck pin 323 when the substrate 9 is loaded into and unloaded from the housing 31. Furthermore, when the substrate 9 is transferred from the hand 226 to the substrate holder 32, the substrate 9 is accurately positioned at an appropriate position.

[0087] In the substrate processing apparatus 1, the substrate-type jig 7 is transported to another processing unit 21 by the transport arm 221a (see FIG. 2), and instruction information (i.e., carry-in instruction information, horizontal instruction information, and up-down instruction information) for the other processing unit 21 and the hand 226 of the transport arm 221a is generated in the same procedure (steps S12 to S15) as described above. Then, when the instruction information for the hand 226 of the transport arm 221a is generated for each processing unit 21 in the processing block 20, the substrate-type jig 7 is moved from the hand 226 of the transport arm 221a to the hand 226 of the transport arm 221b (see FIG. 2) and held there. As described above, the thickness of the substrate-type jig 7 is thinner than the height of the gap (i.e., the hand gap) between the hands 226 of the transport arms 221a and 221b, so that the substrate-type jig 7 can be easily held by the hand 226 of the transport arm 221b without interfering with the hand 226 of the transport arm 221a, etc.

[0088] Thereafter, in the same manner as in the generation of the teaching information for the hand 226 of the transport arm 221a, teaching information for the hand 226 of the transport arm 221b (i.e., carry-in teaching information, horizontal teaching information, and up-down teaching information) is generated for each processing unit 21. The transfer of the substrate-type jig 7 from the transport arm 221a to the transport arm 221b is performed via the above-mentioned stocker 700. Specifically, the substrate-type jig 7 held by the hand 226 of the transport arm 221a is carried into the stocker 700, and after the transport arm 221a retreats from the stocker 700, the hand 226 of the transport arm 221b is inserted into the stocker 700 to hold the substrate-type jig 7. Note that in the case where three or more transport arms are provided in the center robot 22, teaching information for the hand 226 of each transport arm is generated for each processing unit 21 in the same manner.

[0089] As described above, the substrate processing apparatus 1 includes a processing section (i.e., processing unit 21), a transport robot (i.e., center robot 22), and an instruction section 63. The processing unit 21 performs a predetermined process on the substrate 9. The center robot 22 transports the substrate 9 to the processing unit 21. The processing unit 21 includes a substrate holding section 32 and a substrate rotation mechanism 33. The substrate holding section 32 holds the substrate 9 in a horizontal state. The substrate rotation mechanism 33 rotates the substrate holding section 32 around a rotation axis J1 that faces in the vertical direction. The center robot 22 includes a hand 226 that transfers the substrate 9 to and from the substrate holding section 32.

[0090] In the substrate processing apparatus 1, the hand 226 positioned above the substrate holding unit 32 holds the substrate-shaped jig 7 having three optical sensors (photosensor 72 in the above example) arranged in a non-linear manner on its underside 71, and the substrate holding unit 32 is rotated by the substrate rotation mechanism 33 to form a circular rotation trajectory 324 of a mark (chuck pin 323 in the above example) previously provided on the substrate holding unit 32. The teaching unit 63 calculates the relative position of the hand 226 to the substrate holding unit 32 in a plan view based on the relative positions to the rotation trajectory 324 obtained from the three photosensors 72, and generates horizontal teaching information indicating an appropriate relative positional relationship between the hand 226 and the substrate holding unit 32 in a plan view. The teaching unit 63 teaches the center robot 22 the substrate transport position of the center robot 22 in the processing unit 21.

[0091] This simplifies the generation process of the teaching information compared to the case where a teaching target jig is installed in the substrate holding unit 32. As a result, it is possible to obtain highly accurate horizontal teaching information while shortening the time required for the generation process. Therefore, when the substrate 9 is transferred from the hand 226 to the substrate holding unit 32, it is possible to realize highly accurate movement control of the hand 226.

[0092] As described above, the substrate holding unit 32 is a mechanical chuck that mechanically holds the outer periphery of the substrate 9 by a plurality of chuck pins 323 arranged circumferentially, and the mark is preferably one or more of the plurality of chuck pins 323. In this way, by using a configuration required for holding the substrate 9 in the substrate holding unit 32 as the mark, highly accurate horizontal teaching information can be obtained without complicating the structure of the substrate holding unit 32.

[0093] As described above, preferably, based on the relative position of the hand 226 to the substrate holding unit 32 in a plan view calculated by the teaching unit 63, the hand 226 is moved so that the center 70 of the substrate-type jig 7 and the rotation axis J1 overlap in a plan view, and the substrate holding unit 32 is rotated by the substrate rotation mechanism 33, thereby forming the rotation trajectory 324 of the mark again. Then, after reforming the rotation trajectory 324, it is preferable that the teaching unit 63 again calculates the relative position of the hand 226 to the substrate holding unit 32 in a plan view based on the relative positions to the rotation trajectory 324 obtained from the three photosensors 72, and generates horizontal teaching information. This can improve the accuracy of the relative positional relationship between the hand 226 and the substrate holding unit 32 indicated by the horizontal teaching information.

[0094] As described above, it is preferable that the center robot 22 further includes another hand 226 that is located below the hand 226 and transfers the substrate 9 between the hand 226 and the substrate holder 32, and the teaching unit 63 generates other horizontal teaching information for the other hand 226 in the same manner as the horizontal teaching information for the hand 226. This makes it possible to realize highly accurate movement control of the hands 226 according to the characteristics of each of the multiple hands 226 in the center robot 22 equipped with the multiple hands 226, compared to a case in which the horizontal teaching information of the uppermost hand 226 offset in the vertical direction is used as the horizontal teaching information of the other hands 226.

[0095] As described above, it is preferable that the lower surface 71 of the substrate-type jig 7 is provided with a contact sensor 74 for detecting contact with the substrate holding part 32. Then, it is preferable that the center robot 22 brings the hand 226 closer to the substrate holding part 32 in the vertical direction, and the teaching part 63 generates vertical teaching information indicating an appropriate relative positional relationship between the hand 226 and the substrate holding part 32 in the vertical direction based on the output from the contact sensor 74. This makes it possible to easily generate the vertical teaching information with a simple configuration. As a result, it is possible to realize more accurate movement control of the hand 226 when the substrate 9 is transferred from the hand 226 to the substrate holding part 32.

[0096] As described above, the substrate holding unit 32 is a mechanical chuck that mechanically holds the outer periphery of the substrate 9 by a plurality of chuck pins 323 arranged circumferentially, and it is more preferable that the contact sensor 74 includes a plurality of sensor elements 741 arranged circumferentially on the outer periphery of the lower surface 71 of the substrate-type jig 7. This makes it possible to accurately detect the holding state of the substrate-type jig 7 by the plurality of chuck pins 323, and improve the accuracy of the relative positional relationship between the hand 226 and the substrate holding unit 32 indicated by the up-down teaching information.

[0097] As described above, the processing unit 21 further includes a housing 31 that accommodates the substrate holding part 32 therein and has an opening 311 for carrying in the substrate 9. Preferably, when the hand 226 is inserted into the opening 311 of the housing 31, a captured image showing the relative positions of the hand 226 and the opening 311 is acquired, and the teaching part 63 generates carrying-in teaching information showing the appropriate relative positional relationship between the hand 226 and the opening 311 based on the captured image. This makes it possible to easily generate the carrying-in teaching information. As a result, it is possible to realize highly accurate movement control of the hand 226 when carrying the substrate 9 in and out of the housing 31.

[0098] More preferably, the captured image is an image of the opening 311 captured by the camera 75 provided on the hand 226 or the substrate-type jig 7. This makes it possible to generate carry-in teaching information for a plurality of processing units 21 without using a plurality of cameras. That is, the configuration required to generate the carry-in teaching information can be simplified.

[0099] The above-mentioned teaching information generating method is a method for generating teaching information for instructing the substrate transport position of the center robot 22 in the processing unit 21 in a substrate processing apparatus 1 including a processing section (i.e., processing unit 21) that performs a predetermined process on a substrate 9 and a transport robot (i.e., center robot 22) that transports the substrate 9 to the processing unit 21. The processing unit 21 includes a substrate holding section 32 that holds the substrate 9 in a horizontal state and a substrate rotation mechanism 33 that rotates the substrate holding section 32 about a rotation axis J1 that faces the up-down direction, and the center robot 22 includes a hand 226 that transfers the substrate 9 between the processing unit 21 and the center robot 22.

[0100] The teaching information generating method includes a step (step S11) of holding the substrate-type jig 7, on whose underside 71 three optical sensors (in the above example, the photosensor 72) arranged in a non-linear manner, by the hand 226, a step (step S13) of rotating the substrate-holding part 32 by the substrate rotation mechanism 33 to form a circular rotation track 324 of a mark (in the above example, the chuck pin 323) previously provided on the substrate-holding part 32, and a step (step S14) of calculating the relative position of the hand 226 to the substrate-holding part 32 in a plan view based on the relative positions of the substrate-type jig 7 to the rotation track 324 obtained from the three photosensors 72 of the substrate-type jig 7 located above the substrate-holding part 32, and generating horizontal teaching information indicating an appropriate relative positional relationship between the hand 226 and the substrate-holding part 32 in a plan view. This simplifies the generation process of the teaching information as described above. As a result, it is possible to obtain highly accurate horizontal teaching information while shortening the time required for the generation process.

[0101] The above-mentioned substrate-type jig 7 does not necessarily have to be prepared in the substrate processing apparatus 1 from the start-up of the substrate processing apparatus 1. For example, a substrate-type jig 7 including a substantially disk-shaped jig body 76 and three optical sensors 72 arranged in a non-linear manner on a lower surface 71 of the jig body 76 may be introduced (i.e., retrofitted) into a substrate processing apparatus 1 that is already in use and used to generate teaching information. Even in this case, the generation process of the teaching information can be simplified in the same way as above. As a result, highly accurate horizontal teaching information can be obtained while shortening the time required for the generation process.

[0102] Moreover, the above-mentioned program 89 (i.e., a program for generating teaching information) does not necessarily need to be stored in the computer 8 from the start of the substrate processing apparatus 1. For example, a teaching set including a storage medium 80 storing the program 89 for generating horizontal teaching information indicating an appropriate relative positional relationship between the hand 226 and the substrate holding unit 32 in a plan view, and a substrate-type jig 7 having three optical sensors (photosensor 72 in the above example) arranged in a non-linear manner on its underside 71 may be introduced (i.e., retrofitted) into a substrate processing apparatus 1 that is already in use. In this case, the program 89 is executed by the computer 8, and based on the relative positions of the hand 226 with respect to the substrate holding unit 32 in a plan view obtained from the three photosensors 72, the relative positions of the hand 226 with respect to the substrate holding unit 32 in a plan view are calculated, and the horizontal teaching information is generated. This simplifies the generation process of the teaching information in the same manner as above. As a result, it is possible to obtain highly accurate horizontal teaching information while shortening the time required for the generation process.

[0103] In the substrate processing apparatus 1, the substrate holding portion 32 of the processing unit 21 does not necessarily have to be a mechanical chuck, and the mark used to generate the horizontal teaching information does not necessarily have to be a chuck pin 323. For example, as shown in FIG. 14, a vacuum chuck having a plurality of suction ports 325 on its upper surface for suctioning and holding the substrate 9 may be provided in the processing unit 21 (see FIG. 4) as the substrate holding portion 32a. In this case, one or more of the plurality of suction ports 325 are used as the mark. As a result, as in the above, high-precision horizontal teaching information can be obtained without complicating the structure of the substrate holding portion 32a. The mark used to generate the horizontal teaching information is, for example, one of the plurality of suction ports 325 located on the outermost side in the radial direction centered on the rotation axis J1, or two or more suction ports 325 arranged on the same circumference located on the outermost side in the radial direction.

[0104] In the substrate processing apparatus 1, as shown in FIG. 15, a plurality of support pins 326 for transferring the substrate 9 between the hand 226 may be provided on the substrate holder 32. In the example shown in FIG. 15, three support pins 326 are arranged on the same circumference centered on the rotation axis J1. The support pins 326 are inserted into holes 327 provided in the base 321 of the substrate holder 32, and can protrude upward from the upper surface of the base 321. The support pins 326 receive the substrate 9 from the hand 226 above the chuck pins 323, and move downward to transfer the substrate 9 to the chuck pins 323. The support pins 326 receive the substrate 9 from the chuck pins 323, move upward, and transfer the substrate 9 to the hand 226 above the chuck pins 323.

[0105] The multiple support pins 326 may or may not rotate together with the base portion 321 and the multiple chuck pins 323. When the multiple support pins 326 rotate, one or more of the multiple support pins 326 may be the above-mentioned mark. When the multiple support pins 326 do not rotate, one or more of the multiple holes 327 of the base 321 into which the multiple support pins 326 are inserted may be the above-mentioned mark. In either case, as in the above, highly accurate horizontal teaching information can be obtained without complicating the structure of the substrate holding portion 32. When the multiple support pins 326 are provided on the substrate holding portion 32, the contact sensor 74 is provided on the lower surface 71 of the substrate-type jig 7 at a position corresponding to the multiple support pins 326.

[0106] In the substrate processing apparatus 1, the mark used for generating the horizontal teaching information does not necessarily have to be provided on the substrate holding part 32. For example, in the case where the processing unit 21 is provided with a configuration (hereinafter also referred to as a "rotating part") that rotates around the rotation axis J1 other than the substrate holding part 32, the mark may be provided on a rotating part other than the substrate holding part 32. In addition, the photosensor 72 provided on the substrate-type jig 7 may be disposed at a position other than the lower surface 71 of the substrate-type jig 7 in accordance with the positional relationship between the rotating part and the substrate-type jig 7. The shape of the substrate-type jig 7 in a plan view does not have to be the same shape as the substrate 9.

[0107] In this case as well, the substrate processing apparatus 1 includes a processing section (i.e., processing unit 21), a transport robot (i.e., center robot 22), and an instruction section 63. The processing unit 21 performs a predetermined process on the substrate 9. The center robot 22 transports the substrate 9 to the processing unit 21. The instruction section 63 instructs the center robot 22 of the substrate transport position of the center robot 22 in the processing unit 21. The processing unit 21 includes a substrate holding section 32 and a substrate rotating mechanism 33. The substrate holding section 32 holds the substrate 9 in a horizontal state. The substrate rotating mechanism 33 rotates the substrate holding section 32 about a rotation axis J1 that faces the up-down direction. The center robot 22 includes a hand 226 that transfers the substrate 9 between the substrate holding section 32 and the center robot 22. In the processing unit 21, the rotating sections other than the substrate holding section 32 are also rotated about the rotation axis J1.

[0108] In the substrate processing apparatus 1, a hand 226 positioned above the substrate holding unit 32 holds a substrate jig 7 having three non-linearly arranged photosensors 72, and the rotating unit is rotated to form a circular rotation locus 324 of a mark provided in advance on the rotating unit. The teaching unit 63 calculates the relative position of the hand 226 to the rotation axis J1 in a plan view based on the relative positions of the hand 226 to the rotation locus 324 obtained from the three photosensors 72, and generates horizontal teaching information indicating an appropriate relative positional relationship between the hand 226 and the substrate holding unit 32 in a plan view.

[0109] This simplifies the generation process of the teaching information in the same manner as described above. As a result, it is possible to obtain highly accurate horizontal teaching information while shortening the time required for the generation process. Note that, as the rotating part, for example, a cup part 34 configured to be rotatable around a rotation axis J1 is given. In this case, the mark may be, for example, a configuration provided on the upper edge of the rotatable cup part 34, or may be the entire upper edge.

[0110] The above-described substrate processing apparatus 1, teaching information generating method, and teaching set can be modified in various ways.

[0111] For example, the camera 75 used to generate the carry-in teaching information does not necessarily need to be provided on the hand 226 or the substrate-type jig 7, and may be fixed at an appropriate position on the processing block 20. In this case, if necessary to capture images of the openings 311 of the multiple processing units 21, two or more cameras 75 may be provided.

[0112] The shape of the substrate-type jig 7 in a plan view may be a shape other than a substantially circular shape. The thickness of the substrate-type jig 7 may be equal to or greater than the height of the hand gap. In this case, if the hand 226 of the lower transport arm 221b cannot hold the substrate-type jig 7, the teaching information acquired for the hand 226 of the upper transport arm 221a (i.e., the carry-in teaching information, the horizontal teaching information, and the up-down teaching information) offset in the up-down direction can be used as teaching information for the hand 226 of the lower transport arm 221b.

[0113] As described above, the substrate-type jig 7 may be provided with another optical sensor, such as a camera having a CMOS sensor or a CCD sensor, instead of the photosensor 72. Even in this case, the use of the substrate-type jig 7 can simplify the generation process of the teaching information in the same manner as described above. When a camera having a CMOS sensor is used as the optical sensor, the detection of the marks such as the chuck pins 323 may be performed by pattern matching between an image acquired by the camera and a reference image of the chuck pins 323. By using the photosensor 72 as the optical sensor, the structure of the substrate-type jig 7 can be simplified, and the processing of information from the optical sensor in generating the teaching information can also be simplified.

[0114] In the substrate type jig 7, the contact sensor 74 used to generate the upper and lower teaching information does not necessarily have to include a plurality of sensor elements 741. For example, one contact sensor 74 may be provided on the outer periphery of the lower surface 71 of the substrate type jig 7 at a position that avoids contact with the claw portion 228 of the hand 226, and the contact sensor 74 may detect contact between the substrate type jig 7 and one chuck pin 323. In this case, too, since the contact sensor 74 does not detect contact with the hand 226, the contact between the contact sensor 74 and the chuck pin 323 can be detected with high accuracy. As a result, the accuracy of the upper and lower teaching information can be improved.

[0115] The teaching information generated by the teaching unit 63 may not include carry-in teaching information and / or up-down teaching information as long as it includes at least horizontal teaching information. That is, the carry-in teaching information may be generated by a method different from the above-mentioned generation method by the teaching unit 63 using the camera 75. Furthermore, the up-down teaching information may be generated by a method different from the above-mentioned generation method by the teaching unit 63 using the board-type jig 7. In this case, the contact sensor 74 may be omitted from the board-type jig 7.

[0116] The above teaching set may include a plurality of substrate-type jigs 7 .

[0117] In the substrate processing apparatus 1, the structure of the center robot 22 may be modified in various ways. Furthermore, the shape and structure of the hand 226 of the center robot 22 may be modified in various ways. For example, the shape of the hand 226 in a plan view may be a substantially circular shape that contacts the outer periphery of the substrate 9 and the substrate jig 7 over substantially the entire circumference. Furthermore, the structure of the indexer robot 12 may also be modified in various ways.

[0118] The processing block 20 of the substrate processing apparatus 1 may be provided with processing units having various structures other than the processing unit 21. Furthermore, various processes on the substrate 9 may be performed in the processing units.

[0119] The above-mentioned substrate processing apparatus 1 may be used to process glass substrates used in flat panel displays such as liquid crystal displays or organic EL (Electro Luminescence) displays, or glass substrates used in other displays, in addition to semiconductor substrates. The above-mentioned substrate processing apparatus 1 may also be used to process substrates for optical disks, substrates for magnetic disks, substrates for magneto-optical disks, substrates for photomasks, ceramic substrates, and substrates for solar cells.

[0120] The configurations in the above-described embodiment and each of the modified examples may be combined as appropriate as long as they are not mutually inconsistent. [Explanation of symbols]

[0121] 1. Substrate Processing Equipment 7. Circuit board jig 8. Computers 9 Substrate 21 Processing Unit 22 Center Robot 31 Housing 32,32a Board holding part 33 Substrate rotation mechanism 34 Cup section 63 Teaching Department 70 (Center of board type jig) 71 (Bottom surface of board type jig) 72 Photo sensor 74 Contact Sensor 75 Camera 80 Storage medium 89 Programs 226 Hands 311 Aperture 323 Chuck Pin 324 Rotation Trajectory 325 Suction port 741 Sensor Element J1 Rotational Axis S11~S15 steps

Claims

1. A substrate processing apparatus, comprising: A processing section that performs a predetermined process on the substrate; a transfer robot that transfers the substrate to the processing section; an instruction unit that instructs the transport robot on a substrate transport position of the transport robot in the processing unit; Equipped with The processing unit includes: a substrate holder that holds the substrate in a horizontal position; a substrate rotation mechanism that rotates the substrate holder around a rotation axis that faces in a vertical direction; Equipped with the transport robot includes a hand that transfers the substrate between the transport robot and the substrate holder, a substrate-shaped jig having three optical sensors arranged in a non-linear manner on its underside, the substrate holding part is rotated by the substrate rotation mechanism while the hand located above the substrate holding part holds the substrate-shaped jig, whereby a circular rotation locus of a mark previously provided on the substrate holding part is formed; The substrate processing apparatus is characterized in that the teaching unit calculates the relative position of the hand to the substrate holding part in a planar view based on the relative positions with respect to the rotation trajectory obtained from each of the three optical sensors, and generates horizontal teaching information that indicates the appropriate relative positional relationship between the hand and the substrate holding part in a planar view.

2. The substrate processing apparatus according to claim 1 , the substrate holding unit is a mechanical chuck that mechanically holds an outer periphery of the substrate by a plurality of chuck pins arranged in a circumferential direction, The substrate processing apparatus according to claim 1, wherein the mark is one or more of the plurality of chuck pins.

3. The substrate processing apparatus according to claim 1 , the substrate holder is a vacuum chuck having a plurality of suction ports on an upper surface thereof for suctioning and holding the substrate; The substrate processing apparatus according to claim 1, wherein the mark is one or more of the plurality of suction ports.

4. 4. The substrate processing apparatus according to claim 1, the hand is moved so that a center of the substrate-type jig and the rotation axis overlap in a planar view based on a relative position of the hand with respect to the substrate holding part calculated by the teaching unit; The substrate rotation mechanism rotates the substrate holder, thereby forming the rotation locus of the mark again; The substrate processing apparatus is characterized in that after the rotational trajectory is re-formed, the teaching unit re-calculates the relative position of the hand to the substrate holding unit in a planar view based on the relative positions to the rotational trajectory obtained from each of the three optical sensors, and generates the horizontal teaching information.

5. 5. The substrate processing apparatus according to claim 1, the transport robot further includes another hand located below the hand and configured to transfer the substrate between the hand and the substrate holder; The substrate processing apparatus according to claim 1, wherein the teaching unit generates other horizontal teaching information for the other hands in the same manner as the horizontal teaching information for the hand.

6. 6. The substrate processing apparatus according to claim 1, a contact sensor is provided on the lower surface of the substrate-type jig to detect contact with the substrate holding portion; the transport robot brings the hand closer to the substrate holding unit in a vertical direction; The substrate processing apparatus according to claim 1, wherein the teaching unit generates vertical teaching information that indicates an appropriate relative positional relationship between the hand and the substrate holding unit in the vertical direction based on an output from the contact sensor.

7. 7. The substrate processing apparatus according to claim 6, The substrate processing apparatus according to claim 1, wherein the contact sensor includes a plurality of sensor elements arranged circumferentially on the outer periphery of the lower surface of the substrate-shaped jig.

8. 8. The substrate processing apparatus according to claim 1, the processing section further includes a housing that accommodates the substrate holding section therein and has an opening for carrying in the substrate, When the hand is inserted into the opening of the housing, an image is acquired that indicates a relative position of the hand and the opening; The substrate processing apparatus according to claim 1, wherein the teaching unit generates loading teaching information indicating an appropriate relative positional relationship between the hand and the opening based on the captured image.

9. The substrate processing apparatus according to claim 8, The substrate processing apparatus according to claim 1, wherein the captured image is an image of the opening captured by a camera provided on the hand or the substrate-shaped jig.

10. A substrate processing apparatus, comprising: A processing section that performs a predetermined process on the substrate; a transfer robot that transfers the substrate to the processing section; an instruction unit that instructs the transport robot on a substrate transport position of the transport robot in the processing unit; Equipped with The processing unit includes: a substrate holder that holds the substrate in a horizontal position; a substrate rotation mechanism that rotates the substrate holder around a rotation axis that faces in a vertical direction; Equipped with the transport robot includes a hand that transfers the substrate between the transport robot and the substrate holder, In the processing section, a rotating section other than the substrate holding section is also rotated around the rotation axis, a substrate-type jig having three optical sensors arranged in a non-linear manner is held by the hand located above the substrate holding part, and the rotating part is rotated to form a circular rotation locus of a mark provided in advance on the rotating part; The teaching unit calculates the relative position of the hand with respect to the rotation axis in a planar view based on the relative positions with respect to the rotation trajectory obtained from each of the three optical sensors, and generates horizontal teaching information indicating the appropriate relative positional relationship between the hand and the substrate holding unit in a planar view.

11. 1. A method for generating teaching information for teaching a substrate transport position of the transport robot in a substrate processing apparatus including a processing section that performs a predetermined process on a substrate and a transport robot that transports the substrate to the processing section, the method comprising: The processing unit includes: a substrate holder that holds the substrate in a horizontal position; a substrate rotation mechanism that rotates the substrate holder around a rotation axis that faces in a vertical direction; Equipped with the transport robot includes a hand that transfers the substrate between the transport robot and the substrate holder, The teaching information generating method includes: a) holding, by the hand, a substrate-type jig having three optical sensors arranged in a non-linear manner on its underside; b) forming a circular rotation locus of a mark provided in advance on the substrate holding part by rotating the substrate holding part using the substrate rotating mechanism; c) calculating a relative position of the hand with respect to the substrate holding part in a plan view based on the relative positions with respect to the rotation trajectory obtained from the three optical sensors of the substrate-type jig located above the substrate holding part, and generating horizontal teaching information indicating an appropriate relative positional relationship between the hand and the substrate holding part in a plan view; A teaching information generating method comprising:

12. 1. A substrate processing apparatus including a processing section that performs a predetermined process on a substrate and a transport robot that transports the substrate to the processing section, comprising: a teaching set used when teaching the transport robot a substrate transport position of the transport robot in the processing section, the teaching set comprising: The processing unit includes: a substrate holder that holds the substrate in a horizontal position; a substrate rotation mechanism that rotates the substrate holder around a rotation axis that faces in a vertical direction; Equipped with the transport robot includes a hand that transfers the substrate between the transport robot and the substrate holder, The teaching set includes: a substrate-type jig having three optical sensors arranged in a non-linear manner on its underside; a storage medium that stores a program for generating horizontal teaching information that indicates an appropriate relative positional relationship between the hand and the substrate holding unit in a plan view; Equipped with In a state where the substrate-shaped jig is held by the hand located above the substrate holding part, the substrate holding part is rotated by the substrate rotation mechanism, thereby forming a circular rotation locus of a mark provided in advance on the substrate holding part, A teaching set characterized in that, when the program is executed by a computer, the relative position of the hand in a planar view with respect to the substrate holding part is calculated based on the relative positions with respect to the rotation trajectory obtained from each of the three optical sensors, and the horizontal teaching information is generated.

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