Blade changing device, cutting device, and method for manufacturing cut products

Abstract

To provide a cutting device capable of keeping a blade suction surface in a clean state.SOLUTION: A blade replacement device includes: a blade replacement mechanism including at least a first suction part configured to suction a blade; a cover body which may house the blade replacement mechanism therein; a closing part which may move integrally with the blade replacement mechanism and close an opening of the cover body in a state that the blade replacement mechanism is housed in the cover body; and a gas spray part configured to spray a gas to a blade suction surface of the first suction part when the blade replacement mechanism is housed in the cover body.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a blade changing device, a cutting device, and a method for manufacturing a cut product. [Background technology]

[0002] Patent Document 1 discloses a technique for suppressing adhesion of water, water droplets, mist, etc. to a blade replacement mechanism. Specifically, Patent Document 1 discloses a waterproof cover that covers the suction unit of the blade replacement mechanism when cutting an object to be cut. The waterproof cover has an opening and closing door, and the blade suction surface of the suction unit is stored in the waterproof cover with the blade suction surface facing in the opposite direction to the opening and closing door. This configuration suppresses adhesion of cutting water, water droplets, mist, etc. to the blade suction surface, and thus reduces malfunctions of the blade replacement mechanism. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-65981 Summary of the Invention [Problem to be solved by the invention]

[0004] In a blade replacement mechanism such as that described in Patent Document 1, it is desirable to maintain the blade attraction surface in a cleaner state in order to prevent malfunctions and the like of the blade replacement mechanism.

[0005] The present invention has been made in consideration of the above-mentioned circumstances, and the problem it aims to solve is to provide a blade changing device, a cutting device, and a method for manufacturing cut products that are capable of maintaining the blade suction surface in a clean state. [Means for solving the problem]

[0006] The problem to be solved by the present invention is as described above. In order to solve this problem, the blade changing device according to the present invention comprises: A blade changing device for changing a blade used in a cutting mechanism for cutting an object to be cut by a blade, comprising: The cover body includes a blade changing mechanism having at least a first suction portion configured to adsorb a blade, a cover body capable of storing the blade changing mechanism therein, a closing portion capable of moving integrally with the blade changing mechanism and capable of closing the opening of the cover body when the blade changing mechanism is stored inside the cover body, and a gas blowing portion configured to blow gas against the blade adsorption surface of the first suction portion when the blade changing mechanism is stored in the cover body.

[0007] A cutting device according to the present invention includes the blade changing device, and a cutting mechanism that cuts an object to be cut with the blade changed by the blade changing device.

[0008] In addition, the method for manufacturing a cut product according to the present invention is a method for manufacturing a cut product using the cutting device, and includes a blade changing process for changing the blade of the cutting device using the blade changing device, and a cutting process for cutting the object to be cut using the cutting device to which the blade replaced in the blade changing process is attached. Effect of the Invention

[0009] According to the present invention, the blade suction surface can be kept clean. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a schematic plan view showing an overall configuration of a cutting device according to an embodiment. [Diagram 2] FIG. [Diagram 3] FIG. [Figure 4] FIG. 4 is an enlarged sectional perspective view showing the configuration of a spindle portion. [Diagram 5] FIG. [Figure 6] 13 is a perspective view showing a state in which the moving plate closes the opening of the cover body. FIG. [Figure 7] 1A is a perspective view showing the shape of a first cleaning sponge, and FIG. 1B is a perspective view showing a modified example of the first cleaning sponge. [Figure 8] 1A is a partially sectional plan view of the cutting device, and FIG. [Figure 9] 4 is a flowchart showing a method for manufacturing a cut product. [Figure 10] (a) A schematic diagram showing how the blade is cleaned with air from the air nozzle, (b) A schematic diagram showing how the second flange and the blade are removed from the spindle, and (c) A schematic diagram showing how the used blade is stored. [Figure 11] (a) A schematic diagram showing the second flange being cleaned by the second cleaning sponge, (b) A schematic diagram showing the holder holding an unused blade, and (c) A schematic diagram showing the first flange being cleaned by air from the air nozzle. [Figure 12] (a) A schematic diagram showing the first flange being cleaned with the first cleaning sponge, (b) A schematic diagram showing the second flange and the blade being attached to the spindle, and (c) A schematic diagram showing the air being blown against the blade adsorption surface when storing in the cover body. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] <Configuration of cutting device 1> First, the configuration of the cutting device 1 according to the present embodiment will be described. In this embodiment, the configuration of the cutting device 1 will be described in the case where, for example, a sealed substrate W in which a substrate on which a semiconductor chip is mounted is sealed with resin is used as an object to be cut by the cutting device 1.

[0012] For example, a BGA (Ball grid array) package substrate, a CSP (Chip size package) package substrate, an LED (Light emitting diode) package substrate, etc. are used as the encapsulated substrate W. In addition to the encapsulated substrate W, an encapsulated lead frame in which a lead frame on which a semiconductor chip is mounted is encapsulated with resin may also be used as the cutting target.

[0013] The cutting device 1 shown in Fig. 1 is a processing device that cuts a sealed substrate W, which is an object to be cut, to separate the substrate into a plurality of cut products (products P). The cutting device 1 includes, as components, a substrate supply module A, a cutting module B, and a storage module C. Each component is detachable and replaceable with respect to the other components.

[0014] <Substrate supply module A> The substrate supply module A is mainly provided with a substrate supply mechanism 11 and a control unit CTL.

[0015] The sealed substrate W, which is the object to be cut, is carried out from the substrate supply mechanism 11 and transferred to the cutting module B by a transfer mechanism (not shown). The control unit CTL controls the operation of each part of the cutting device 1. The control unit CTL controls each part of the cutting device 1, thereby making it possible to carry out the loading of the sealed substrate W, cutting of the sealed substrate W, inspection of the product P, and unloading of the product P. The control unit CTL can also be provided in a module other than the substrate supply module A. The control unit CTL can also be divided into multiple parts. For example, a control unit CTL can be provided in each module, and the control units CTL can be linked together to control each part.

[0016] <Cutting Module B> The cutting module B shown in FIG. 1 is mainly provided with a cutting table 21, a cutting jig 22, a moving mechanism 23, a rotating mechanism 24, a spindle unit 25, and a blade changing device 26.

[0017] In this embodiment, a twin-cut table type cutting device 1 having two cutting tables 21 is illustrated. A cutting jig 22 is provided on the cutting table 21. The cutting table 21 can be moved in the Y direction by a moving mechanism 23, and can be rotated in the θ direction by a rotating mechanism 24.

[0018] In this embodiment, the cutting device 1 has a twin spindle configuration including two spindle units 25. The two spindle units 25 are movable in the X direction and the Z direction independently of each other. The spindle unit 25 is one embodiment of the cutting mechanism according to the present invention.

[0019] The blade changing device 26 is for changing the blade 25a used in the spindle unit 25. The blade changing device 26 is disposed behind (upper side in the figure) the spindle unit 25. The blade changing device 26 mainly includes a blade changing mechanism 100, a cover 200, a cleaning mechanism 300, a blade changing stand 400, an air nozzle 500, and a camera 600. The detailed configuration of the blade changing device 26 will be described later.

[0020] In the cutting module B, the sealed substrate W is held on the cutting table 21, and the cutting table 21 and the two spindle units 25 are moved relatively to each other to cut and separate the sealed substrate W. The blade 25a of the spindle units 25 cuts the sealed substrate W held on the cutting table 21 by rotating in a plane including the Y direction and the Z direction. At this time, the sealed substrate W can be cut while spraying cutting water toward the blade 25a. Furthermore, the blade 25a used in the spindle units 25 can be replaced by the blade replacement device 26 at an appropriate timing.

[0021] <Storage Module C> The storage module C is mainly provided with an inspection table 31 and a tray 32.

[0022] An assembly of a plurality of products P obtained by cutting the sealed substrate W into individual pieces is placed on the inspection table 31. The plurality of products P are inspected by an inspection camera (not shown) and sorted into non-defective and defective products. The selected non-defective products are stored in a tray 32. The selected defective products are stored in a separately prepared tray (not shown) and are excluded from the products P. Note that it is not necessarily necessary to inspect the products P in the storage module C.

[0023] <Detailed Configuration of Blade Changing Device 26> Next, the configuration of the blade changing device 26 (blade changing mechanism 100, cover 200, cleaning mechanism 300, blade changing stand 400, air nozzle 500, and camera 600) will be described. Note that since the detailed structure and shape of each part of the blade changing device 26 are not particularly limited, the shape of each part is appropriately simplified in the drawings in this embodiment.

[0024] <Blade replacement mechanism 100> As shown in FIGS. 2 and 3, the blade replacement mechanism 100 mainly includes a support portion 110, a holding portion 120, and a moving portion .

[0025] The support part 110 supports the holding part 120 and a first cleaning mechanism 310 described later. The support part 110 can be formed by combining appropriate members (rod-shaped members, plate-shaped members, etc.). In this embodiment, the support part 110 is formed in a longitudinal shape that is long in one direction (the X direction in Figs. 2 and 3).

[0026] The holding portion 120 is capable of holding the blade 25a provided on the spindle portion 25 and a second flange 25d for fixing the blade 25a to the spindle portion 25. The holding portion 120 is provided at one end of the support portion 110 in the longitudinal direction.

[0027] Here, the configuration of the spindle portion 25 (particularly, the portion related to the fixing of the blade 25a) will be described with reference to Fig. 4. Fig. 4 shows a cross section of a portion of one of the two spindle portions 25 (the spindle portion 25 on the left side of the paper in Fig. 2).

[0028] A substantially annular first flange 25c is fixed to the rotating shaft 25b of the spindle portion 25. Furthermore, a substantially annular second flange 25d is provided so as to face the first flange 25c. The second flange 25d is one embodiment of the flange according to the present invention.

[0029] The second flange 25d is pressed against the first flange 25c by fastening a detachable member 25e such as a nut to a boss portion of the first flange 25c. A first contact surface 25f and a second contact surface 25g protruding in a direction facing each other are formed on the outer periphery of the first flange 25c and the second flange 25d. A substantially annular blade 25a is sandwiched and fixed between the first contact surface 25f and the second contact surface 25g. A plurality of through holes 25h are formed in the detachable member 25e.

[0030] The holding portion 120 shown in FIG. 5 mainly includes a blade suction portion 121, a flange suction portion 122, and a detachable member rotating portion 123.

[0031] The blade suction part 121 is for suctioning the blade 25a. The blade suction part 121 is formed in a substantially cylindrical shape. An end face of the blade suction part 121 (hereinafter referred to as the blade suction surface 121a) is appropriately formed with a suction port and a suction groove (not shown) for suctioning the blade 25a. The blade suction surface 121a can be suctioned and held by suctioning the air through the suction port of the blade suction part 121 by an external suction device. The blade suction part 121 is one embodiment of a first suction part according to the present invention.

[0032] The flange suction portion 122 is for suctioning the second flange 25d. The flange suction portion 122 is formed in a substantially cylindrical shape. The flange suction portion 122 is disposed inside the blade suction portion 121. An end face of the flange suction portion 122 (hereinafter referred to as the flange suction surface 122a) is appropriately formed with a suction port and a suction groove (not shown) for suctioning the second flange 25d. The second flange 25d can be suctioned and held on the flange suction surface 122a by sucking air from the suction port of the flange suction portion 122 using an external suction device. The flange suction portion 122 is one embodiment of the second suction portion according to the present invention.

[0033] The detachable member rotation part 123 is for rotating the detachable member 25e to attach and detach it to the boss portion of the first flange 25c. The detachable member rotation part 123 is formed in an annular shape. The detachable member rotation part 123 is disposed inside the flange adsorption part 122. An end face of the detachable member rotation part 123 is provided with a plurality of protruding parts 123a so as to protrude in the X direction. The protruding parts 123a are disposed at positions corresponding to the through holes 25h (see FIG. 4) of the detachable member 25e. The detachable member rotation part 123 can be rotated by the power of a rotation mechanism (not shown).

[0034] The holding portion 120 can attach and detach the detachable member 25e by rotating the detachable member rotation portion 123 with the protruding portion 123a inserted into the through hole 25h of the detachable member 25e. The holding portion 120 can also hold the blade 25a and the second flange 25d independently by the blade suction portion 121 and the flange suction portion 122.

[0035] In this manner, by appropriately operating the blade suction portion 121, the flange suction portion 122, and the detachment member rotation portion 123, the holding portion 120 can detach the blade 25a and the second flange 25d attached to the spindle portion 25 from the spindle portion 25. The holding portion 120 can also attach the held blade 25a and the second flange 25d to the spindle portion 25.

[0036] The method by which the holding portion 120 holds the blade 25a and the second flange 25d is not limited to the method of holding the blade 25a etc. by suction, but may be, for example, a method of hooking a claw-shaped member onto the blade 25a etc. to mechanically hold them.

[0037] 2 and 3 moves the support unit 110 in any direction. The movement unit 130 mainly includes a rotation unit 131, a first linear movement unit 132, a second linear movement unit 133, and a third linear movement unit 134.

[0038] The rotating unit 131 rotates the support unit 110. The rotating unit 131 supports the support unit 110 and can rotate the support unit 110 using a driving force of a driving source such as a motor. The rotating unit 131 can rotate the support unit 110 around an axis parallel to the Y direction.

[0039] The first linear movement unit 132 linearly moves the rotating unit 131. The first linear movement unit 132 supports the rotating unit 131 and can move the rotating unit 131 using a driving force of a driving source such as a motor. The first linear movement unit 132 can linearly move the rotating unit 131 along the Y direction.

[0040] The second linear movement unit 133 linearly moves the first linear movement unit 132. The second linear movement unit 133 supports the first linear movement unit 132 and can move the first linear movement unit 132 using a driving force of a driving source such as a motor. The second linear movement unit 133 can linearly move the first linear movement unit 132 along the Z direction.

[0041] 2 linearly moves the second linear movement unit 133. The third linear movement unit 134 supports the second linear movement unit 133 and can move the second linear movement unit 133 using a driving force of a driving source such as a motor. The third linear movement unit 134 linearly moves the second linear movement unit 133 along the X direction.

[0042] By combining the movements of the various parts of the moving section 130 configured as described above, the support section 110 can be moved to an arbitrary position and can be rotated arbitrarily around an axis along the Y direction.

[0043] <Cover 200> 1, 2 and 6 is intended to prevent water droplets, cutting chips, and the like from adhering to the blade replacement mechanism 100. The cover 200 mainly includes a cover body 210, a moving plate 220, and a seal member 230.

[0044] The cover body 210 is capable of housing the blade replacement mechanism 100 therein. The cover body 210 is formed in a hollow, generally rectangular parallelepiped shape that surrounds the blade replacement table 400 (described later) from the sides and above. This allows the cover body 210 to separate a space in which the spindle portion 25 is disposed from a space in which the blade replacement table 400 is disposed. For ease of explanation, FIG. 2 shows only one side surface of the cover body 210 (the right side surface on the paper in FIG. 1). An opening 211 and a leak portion 212 are formed in the cover body 210.

[0045] The opening 211 is formed so as to penetrate one side surface of the cover body 210 (the right side surface in the drawing of FIG. 1 in this embodiment). The opening 211 is formed in a shape that allows the blade replacement mechanism 100 to pass through. In this embodiment, an example in which the opening 211 is formed in a rectangular shape is illustrated.

[0046] 2 and 6 is a portion that connects the internal space of the cover body 210 to the external space when the moving plate 220 described later closes the opening 211. The leak portion 212 is formed by cutting out the cover body 210 along the X direction from one side surface (the side surface on which the opening 211 is formed) to the upper surface of the cover body 210. An end of the leak portion 212 is connected to the upper end surface of the opening 211. In this embodiment, by forming the leak portion 212, interference between the cover body 210 and the moving portion 130 when the blade replacement mechanism 100 moves between the inside and outside of the cover body 210 is avoided.

[0047] The moving plate 220 shown in FIG. 1, FIG. 2, and FIG. 6 is capable of closing the opening 211 of the cover body 210. The moving plate 220 is formed in a shape corresponding to the opening 211. Specifically, the moving plate 220 is formed in a substantially rectangular plate shape that is slightly larger than the opening 211. The moving plate 220 is disposed on one side of the support part 110 in the X direction (the right side of the paper in FIG. 2). The moving plate 220 is provided on the moving part 130 with the plate surface facing the X direction. Specifically, the moving plate 220 is provided on the second linear moving part 133, and can be moved in the X direction integrally with the blade replacement mechanism 100 (particularly, the support part 110) by the third linear moving part 134. The moving plate 220 is one embodiment of the closing part according to the present invention.

[0048] The seal member 230 seals the contact portion between the cover body 210 and the moving plate 220. The seal member 230 is formed of a flexible material (e.g., rubber, etc.). The seal member 230 is provided on the side of the moving plate 220 that faces the cover body 210. The seal member 230 is provided along the outer periphery of the moving plate 220.

[0049] <Cleaning mechanism 300> 1 is for cleaning flanges (first flange 25c and second flange 25d) for fixing blade 25a to spindle portion 25. Cleaning mechanism 300 mainly includes first cleaning mechanism 310 and second cleaning mechanism 320.

[0050] 3 is for cleaning the first flange 25c in a state where it is attached to the spindle portion 25. The first cleaning mechanism 310 is mainly equipped with a first cleaning sponge 311 and an air nozzle 312.

[0051] The first cleaning sponge 311 shown in FIG. 3 and FIG. 7(a) is a cleaning member for cleaning the first flange 25c. The first cleaning sponge 311 is formed in a cylindrical shape having a planar shape larger than the outer shape of the first flange 25c. The first cleaning sponge 311 is attached to one end in the longitudinal direction of the support part 110 via a disk-shaped attachment member 311a. The first cleaning sponge 311 is provided on the opposite side of the support part 110 from the holding part 120 in the longitudinal direction. In other words, the first cleaning sponge 311 is provided at a position 180 degrees inverted from the holding part 120 around the rotation axis of the rotating part 131.

[0052] The first cleaning sponge 311 is not limited to the cylindrical shape shown in Fig. 7(a) and may have any shape. For example, as shown in Fig. 7(b) as a modified example, the first cleaning sponge 311 may have a shape divided into multiple cylinders. This allows the corners of the sponge to clean the first flange 25c, improving the cleaning ability of the first cleaning sponge 311.

[0053] 3 can blow out compressed air supplied from a compressor (not shown). The air nozzle 312 is provided at one end (the same side as the first cleaning sponge 311) in the longitudinal direction of the support part 110. The air nozzle 312 is arranged with the air blowing direction facing the first cleaning sponge 311 side.

[0054] 2 and 8 cleans the second flange 25d in a state where it is detached from the spindle portion 25 (held by the holder 120). The second cleaning mechanism 320 is one embodiment of the flange cleaning mechanism according to the present invention. The second cleaning mechanism 320 mainly includes a second cleaning sponge 321 and a drive unit 322.

[0055] The second cleaning sponge 321 is a cleaning member for cleaning the second flange 25d. The second cleaning sponge 321 is formed in a cylindrical shape having a diameter equal to that of the second flange 25d. The second cleaning sponge 321 is formed in a shape similar to that of the first cleaning sponge 311 shown in FIG. 7. The second cleaning sponge 321 is provided on the upper surface of the blade replacement base 400 described later with the axis of the cylinder facing in the Z direction. The second cleaning sponge 321 is one embodiment of a flange cleaning member according to the present invention.

[0056] The driving unit 322 rotates the second cleaning sponge 321. The driving unit 322 has a driving source such as a motor. The output shaft of the driving unit 322 is connected to the second cleaning sponge 321. The driving force of the driving unit 322 can rotate the second cleaning sponge 321 around an axis parallel to the Z direction.

[0057] <Blade exchange stand 400> The blade exchange stand 400 is for storing unused blades 25a and used blades 25a. The blade exchange stand 400 mainly includes a used blade storage section 410 and an unused blade storage section 420.

[0058] The used blade storage section 410 is a section for storing the blades 25a that have been used in the spindle section 25. The used blade storage section 410 is formed in a box shape with an open top. The used blade storage section 410 can store the blades 25a therein. The used blade storage section 410 can store a plurality of blades 25a.

[0059] The unused blade storage section 420 is a section in which unused blades 25a for replacement are stored. The unused blade storage section 420 is formed in a prism shape extending in the vertical direction (up and down direction). The unused blade storage section 420 can hold the blades 25a by being inserted into the center of the blades 25a. The unused blade storage section 420 can store a plurality of blades 25a stacked in the vertical direction. The unused blade storage section 420 can be configured to blow air outward (toward the blades 25a) from the side surface of the prism-shaped unused blade storage section 420, making it easier to separate the plurality of blades 25a from one another. The unused blade storage section 420 is one embodiment of a replacement blade storage section according to the present invention.

[0060] On the upper surface of the blade replacement stand 400, the used blade storage section 410, the unused blade storage section 420, and the second cleaning mechanism 320 are arranged to be aligned along the X direction. Specifically, from the side closer to the opening 211 of the cover body 210, the unused blade storage section 420, the used blade storage section 410, and the second cleaning mechanism 320 are arranged to be aligned in this order.

[0061] The configurations of the used blade storage section 410 and the unused blade storage section 420 are not limited to those in this embodiment and can be changed as desired. As an example, the used blade storage section 410 can be formed into a rectangular column extending in the vertical direction (up and down direction) like the unused blade storage section 420.

[0062] <Air nozzle 500> The air nozzle 500 is for blowing gas (air in this embodiment) to the blade suction portion 121 of the blade replacement mechanism 100. The air nozzle 500 can blow out compressed air supplied from a compressor (not shown). The air nozzle 500 is disposed near the blade replacement table 400. The air nozzle 500 is disposed so as to blow out air in a horizontal direction. The air nozzle 500 is disposed with its tip (air blowing direction) facing the upper end surface of the second cleaning sponge 321. In addition, the air nozzle 500 can increase the internal pressure (pressure in the internal space) of the cover body 210 to prevent cutting chips and water droplets from entering the inside of the cover body 210, as described later. The air nozzle 500 is one embodiment of the gas blowing portion according to the present invention.

[0063] <Camera 600> The camera 600 is for capturing an image of the inside of the cover body 210. The camera 600 is disposed inside the cover body 210. The camera 600 is disposed with the lens facing the blade exchange stand 400. In this embodiment, two cameras 600 are disposed inside the cover body 210 to capture an image of the entire blade exchange stand 400 (the second cleaning mechanism 320, the used blade storage section 410, and the unused blade storage section 420 provided in the blade exchange stand 400). Note that the arrangement and number of the cameras 600 in this embodiment are merely an example and can be changed as desired. The image captured by the camera 600 is displayed on a display device such as a monitor provided outside the cutting device 1. A user of the cutting device 1 can check the state of the inside of the cover body 210 by checking the image displayed on the display device.

[0064] <Manufacturing method of cut products> Next, a method for producing cut products using the cutting device 1 configured as above (a method for producing cut products) will be outlined with reference to Figs.

[0065] The method for manufacturing a cut product according to this embodiment mainly includes a blade replacement step S10 and a cutting step S20. These steps will be described in order below.

[0066] The blade replacement step S10 is a step in which the blade replacement device 26 replaces the blade 25a of the cutting device 1.

[0067] Specifically, in the blade changing step S10, the blade changing mechanism 100 removes the used blade 25a attached to the spindle portion 25, and instead attaches an unused blade 25a to the spindle portion 25. Note that in the blade changing step S10, the blade changing device 26 can also clean the flanges (first flange 25c and second flange 25d) for fixing the blade 25a.

[0068] After the replacement of the blade 25a is completed, the process proceeds from the blade replacement step S10 to the cutting step S20.

[0069] The cutting step S20 is a step of cutting the sealed substrate W by the spindle portion 25 to which the blade 25a replaced in the blade replacement step S10 is attached.

[0070] Specifically, in the cutting step S20, the sealed substrate W is transferred from the substrate supply module A to the cutting module B. The sealed substrate W held on the cutting table 21 of the cutting module B is cut by the spindle unit 25 and singulated into a plurality of products P. The singulated products P are sorted into non-defective and defective products in the storage module C. In this manner, the sealed substrate W is cut to manufacture the products P.

[0071] 9 shows a simplified method for manufacturing the cut product, but the timing, number of times, order, etc. of performing each step can be changed as desired. For example, it is possible to detect the amount of wear of the blade 25a with an appropriate sensor while repeatedly performing the cutting step S20, and perform the blade replacement step S10 when the amount of wear exceeds a certain amount. It is also possible to perform the blade replacement step S10 when the operating time of the cutting device 1, the production number of products P, etc. exceed a predetermined value.

[0072] <Operation of the blade changing device 26> Next, the operation of the blade changing device 26 in the manufacturing process of the cut product (blade changing step S10 and cutting step S20) will be specifically described.

[0073] When replacing the blade 25a in the blade replacement step S10, first, as shown in Fig. 10(a), the support part 110 is moved by the moving part 130, and the tip of the air nozzle 312 is directed toward the blade 25a attached to the spindle part 25. In this state, air is blown out from the air nozzle 312 to remove cutting chips and water droplets adhering to the blade 25a. At this time, by moving the support part 110 back and forth slightly while blowing air onto the blade 25a, the direction and range of the air blown onto the blade 25a can be changed, and cutting chips and the like can be removed more effectively.

[0074] 10(b), the support portion 110 is inverted by the moving portion 130, and the holding portion 120 is moved to a position facing the blade 25a of the spindle portion 25. Then, the second flange 25d and the blade 25a are removed from the spindle portion 25 by the holding portion 120.

[0075] 10(c), the moving unit 130 moves the holding unit 120 to a position facing from above a used blade storage unit 410 provided on the blade replacement table 400. Then, the holding of the blade 25a by the holding unit 120 is released, and the used blade 25a is stored in the used blade storage unit 410.

[0076] Next, as shown in FIG. 11(a), the second flange 25d is moved by the moving unit 130 to a position where it contacts the upper surface of the second cleaning sponge 321 while the axis of the holding unit 120 (second flange 25d) and the axis of the second cleaning sponge 321 of the second cleaning mechanism 320 are aligned. In this state, the second cleaning sponge 321 is rotated by the driving unit 322, so that the surface of the second flange 25d (particularly, the second contact surface 25g shown in FIG. 4) is cleaned. Furthermore, air is blown from the air nozzle 500 toward the second flange 25d and the second cleaning sponge 321. This makes it possible to remove cutting chips and the like attached to the second flange 25d.

[0077] 11(b), the moving unit 130 moves the holding unit 120 to a position facing from above an unused blade storage unit 420 provided in the blade replacement table 400. Then, the unused blade 25a stored in the unused blade storage unit 420 is held by the holding unit 120.

[0078] As in this embodiment, by providing the used blade storage section 410, the unused blade storage section 420, and the second cleaning mechanism 320 on the same blade exchange table 400, it is possible to shorten the moving distance when the holder 120 moves between the used blade storage section 410, the unused blade storage section 420, and the second cleaning mechanism 320. In addition, by arranging the second cleaning mechanism 320 and the unused blade storage section 420 on either side of the used blade storage section 410, it is possible to prevent water droplets and the like scattered when the second flange 25d is cleaned by the second cleaning mechanism 320 from adhering to the unused blade 25a stored in the unused blade storage section 420. In addition, in order to prevent water droplets and the like scattered when the second flange 25d is cleaned by the second cleaning mechanism 320 from adhering to the unused blade 25a, an air nozzle 500 may be arranged to blow air on the opposite side to the unused blade storage section 420.

[0079] 11(c), the support part 110 is moved by the moving part 130, and the tip of the air nozzle 312 is directed toward the first flange 25c attached to the spindle part 25. In this state, air is blown out of the air nozzle 312 to remove cutting chips and water droplets adhering to the first flange 25c.

[0080] 12(a), the moving part 130 moves the first cleaning sponge 311 of the first cleaning mechanism 310 to a position where it contacts the first flange 25c attached to the spindle part 25. In this state, the spindle part 25 rotates to clean the surface of the first flange 25c (particularly, the first contact surface 25f shown in FIG. 4). This makes it possible to remove cutting chips and the like attached to the first flange 25c.

[0081] 12(b), the support portion 110 is inverted by the moving portion 130, and the holding portion 120 is moved to a position facing the first flange 25c of the spindle portion 25. Then, the second flange 25d and the blade 25a held by the holding portion 120 are attached to the spindle portion 25.

[0082] In the above example, the operation of replacing the blade 25a of one spindle portion 25 was described, but the operation of replacing the blade 25a of the other spindle portion 25 is generally similar, so the explanation will be omitted.

[0083] When the sealed substrate W is cut in the cutting process S20, the blade replacement mechanism 100 (particularly, the support portion 110 on which the holding portion 120 is provided) is stored inside the cover body 210 through the opening 211, as shown by the dotted line in Figure 2.

[0084] Specifically, as shown in FIG. 12(c), the blade suction surface 121a of the holder 120 is moved by the moving part 130 to a position facing the second cleaning sponge 321 of the second cleaning mechanism 320 in the vertical direction while the blade suction surface 121a of the holder 120 is facing downward. At this time, the opening 211 is closed by the moving plate 220, so that the internal space of the cover body 210 in which the blade exchange table 400 is arranged and the external space of the cover body 210 in which the spindle part 25 is arranged can be partitioned. At this time, the moving part 130 moves the holder 120 slightly further back (left side of the paper in FIG. 12(c)) than when the second flange 25d is cleaned (see FIG. 11(a)). Accordingly, the moving plate 220 is pressed against the cover body 210, and the seal member 230 is elastically deformed so as to be crushed. As a result, the gap between the cover body 210 and the moving plate 220 can be sealed regardless of some dimensional errors or assembly errors of each member.

[0085] Furthermore, when the sealed substrate W is cut in the cutting step S20, air is blown from the air nozzle 500 toward the blade suction surface 121a of the holder 120.

[0086] In this way, in the cutting step S20, the internal space and the external space of the cover body 210 are partitioned, so that cutting chips and water droplets generated when cutting the sealed substrate W can be prevented from adhering to the blade exchange table 400 (especially the unused blade storage section 420 in which the replacement blade 25a is stored) and the holding section 120. Furthermore, the air blown from the air nozzle 500 can keep the blade adsorption surface 121a of the holding section 120 clean.

[0087] In addition, by blowing air from the air nozzle 500 while the opening 211 of the cover body 210 is closed by the moving plate 220, the internal pressure (pressure in the internal space) of the cover body 210 can be increased. This makes it possible to prevent cutting chips and water droplets from entering the inside of the cover body 210.

[0088] 6, the air inside the cover body 210 can be discharged to the outside through the leak portion 212. This makes it possible to prevent an excessive increase in the internal pressure of the cover body 210. In addition, since the leak portion 212 is formed in the upper part of the cover body 210, the air discharged to the outside of the cover body 210 through the leak portion 212 does not stir up cutting chips or water droplets that have fallen to the floor surface, and it is possible to more effectively prevent cutting chips and water droplets from entering the inside of the cover body 210.

[0089] From the viewpoint of preventing the air discharged from the leak portion 212 from stirring up cutting chips and the like, it is desirable that the leak portion 212 is formed at least above the lowest end of the moving plate 220. From the same viewpoint, it is desirable that the leak portion 212 is formed at a relatively high position. For example, it is desirable that the leak portion 212 is formed at a position higher than the vertical center of the moving plate 220, a position higher than the vertical center of the opening 211, a position higher than the air nozzle 500, or the like. From the same viewpoint, it is desirable that the leak portion 212 is formed so as not to open at least downward. In other words, it is desirable that the leak portion 212 is formed so as to open upward as in this embodiment, or to open sideways.

[0090] In this embodiment, the leak portion 212 is formed in the cover body 210, but it is also possible to form the leak portion 212 in the moving plate 220, or in both the cover body 210 and the moving plate 220, for example.

[0091] Although an embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and appropriate modifications are possible within the scope of the technical idea of ​​the invention described in the claims.

[0092] For example, the configurations (shapes, numbers, etc.) of the members exemplified in the above embodiments are not particularly limited and can be changed as desired. As an example, the shapes of the cover body 210 and the moving plate 220 can be changed as desired depending on the shape, size, etc. of the blade replacement mechanism 100.

[0093] Further, the configuration of the moving part 130 in this embodiment (see FIG. 3, etc.) is one example, and the specific configuration is not limited as long as the configuration can move the holder 120 and the first cleaning mechanism 310 to the required positions. Further, although the moving plate 220 is provided on the second linear moving part 133, the present invention is not limited to this. That is, the moving plate 220 may be configured to move integrally with the blade replacement mechanism 100 to close the opening 211, and may be configured to be provided on the third linear moving part 134, for example, independent of the second linear moving part 133.

[0094] In this embodiment, an example has been shown in which the spindle portion 25 is rotated when cleaning the first flange 25c (see FIG. 12(a)), but it is also possible to configure it so that, for example, the first cleaning sponge 311 is rotated.

[0095] Further, the cleaning mechanism 300 according to this embodiment is configured to perform cleaning using sponges (first cleaning sponge 311 and second cleaning sponge 321) as cleaning members, however, the present invention is not limited to this, and any cleaning member (e.g., a rag, etc.) may be used.

[0096] Furthermore, the cleaning mechanism 300 according to this embodiment cleans the flange using a sponge and air nozzle 312, but the method for cleaning the flange is not limited to this, and any cleaning method can be used to clean the flange. For example, it is also possible to clean the flange by spraying cleaning water onto the flange, or by suctioning cutting chips and the like adhering to the flange. The cleaning mechanism 300 can also clean the flange by combining a plurality of cleaning methods.

[0097] In the present embodiment, an example is shown in which the first flange 25c is cleaned while attached to the spindle portion 25 (see Figs. 11(c) and 12(a)), but the present invention is not limited to this. For example, it is also possible to configure the first flange 25c to be cleaned while removed from the spindle portion 25. In this case, a separate mechanism for attaching and detaching the first flange 25c may be provided to automatically attach and detach the first flange 25c.

[0098] In the present embodiment, the holding unit 120 and the first cleaning mechanism 310 are both provided on the support unit 110 and moved together, but the present invention is not limited to this. For example, the holding unit 120 and the first cleaning mechanism 310 may be provided on separate members and moved independently of each other.

[0099] In the present embodiment, the blade 25a attached to the spindle portion 25 is removed and another blade 25a is attached in the blade replacement step S10, but the present invention is not limited to this. For example, in the blade replacement step S10, it is also possible to attach the blade 25a to a spindle portion 25 to which no blade 25a has yet been attached. Also, in the blade replacement step S10, which is performed after the cutting step S20 is completed, it is also possible to perform only the task of removing the blade 25a attached to the spindle portion 25 (without attaching another blade 25a).

[0100] Further, in the present embodiment, the blade changing device 26 equipped with the cleaning mechanism 300 has been exemplified, but the present invention is not limited to this, and the blade changing device 26 does not necessarily need to be equipped with the cleaning mechanism 300.

[0101] The operations of the cutting device 1 illustrated in this embodiment are merely examples, and the present invention is not limited to these. That is, the order and manner of operation of each part of the cutting device 1 can be changed as desired.

[0102] <Additional Notes> The blade changing apparatus 26 according to the first aspect of the present disclosure comprises: a blade replacement mechanism 100 including at least a blade suction portion 121 (first suction portion) configured to suction the blade 25a; A cover body 210 capable of housing the blade replacement mechanism 100 therein; a movable plate 220 (closing portion) that is movable integrally with the blade replacement mechanism 100 and that is capable of closing the opening 211 of the cover body 210 in a state in which the blade replacement mechanism 100 is housed inside the cover body 210; an air nozzle 500 (gas blowing unit) configured to blow gas against the blade suction surface 121a of the blade suction unit 121 when the blade replacement mechanism 100 is housed in the cover body 210; Equipped with. According to the blade changing device 26 of the first aspect of the present disclosure, cutting chips and water droplets adhering to the blade adsorption surface 121a can be removed, and the blade adsorption surface 121a can be maintained in a clean state. This can reduce the occurrence of malfunctions of the blade changing mechanism 100. In addition, since the blade adsorption surface 121a can be maintained in a clean state, the frequency of maintenance and the workload can be reduced, and maintainability can be improved.

[0103] The blade changing device 26 of the second side according to the first side is The cover further includes an unused blade storage section 420 (replacement blade storage section) that is disposed inside the cover body 210 and is capable of storing a plurality of replacement blades 25a stacked vertically. According to the blade changing device 26 of the second aspect of the present disclosure, a plurality of blades 25a can be stored in a stacked manner, eliminating the need for a holding mechanism to prevent the blades 25a from falling. This makes it possible to prevent malfunctions caused by cutting chips or water droplets getting into the movable part or drive part of the holding mechanism.

[0104] In a blade changing device 26 of a third aspect according to the first or second aspect, The air nozzle 500 is configured to blow gas onto the blade suction portion 121 with the blade suction surface 121a facing downward. According to the blade replacing device 26 of the third aspect of the present disclosure, cutting chips and water droplets adhering to the blade attracting surface 121a can be effectively removed.

[0105] The blade changing device 26 of the fourth aspect according to any one of the first to third aspects is The cover further includes a seal member that seals a contact portion between the cover body and the movable plate when the movable plate closes the opening. At least one of the cover body 210 and the moving plate 220 is provided with a leak portion 212 above the lowermost end of the moving plate 220, which is capable of releasing air inside the cover body 210 to the outside. According to the blade replacing device 26 of the fourth aspect of the present disclosure, it is possible to increase the internal pressure of the cover body 210 and suppress the intrusion of cutting chips and the like into the inside of the cover body 210. Moreover, by releasing the air inside the cover body 210 through the leak portion 212, it is possible to prevent the internal pressure of the cover body 210 from increasing excessively. Moreover, by forming the leak portion 212 above the lowest end of the moving plate 220, it is possible to prevent cutting chips and the like from being stirred up by the air released from the cover body 210.

[0106] The blade changing device 26 of the fifth aspect according to any one of the first to fourth aspects includes: The cover further includes a used blade storage section 410 that is disposed inside the cover body 210 and is capable of storing a used blade 25a. According to the blade replacement device 26 of the fifth aspect of the present disclosure, inside the cover body 210, a storage operation of the used blade 25a can be performed.

[0107] A blade changing device 26 according to any one of the first to fifth aspects of the sixth aspect, The blade replacement mechanism 100 includes: a flange suction portion 122 (second suction portion) configured to suction a second flange 25d (flange) independently of the blade suction portion 121; a detachable member rotating portion 123 configured to be capable of rotating a detachable member 25e that enables the blade 25a to be detached from the spindle portion 25; It further comprises: According to the blade replacement device 26 of the sixth aspect of the present disclosure, the work of attaching and detaching the blade 25a can be performed efficiently.

[0108] The blade changing device 26 of the seventh aspect according to the sixth aspect is The apparatus further includes a second cleaning mechanism 320 (flange cleaning mechanism) that cleans at least the second flange 25d that is sucked by the flange sucking portion 122. According to the blade replacement device 26 of the seventh aspect of the present disclosure, cutting chips and water droplets adhering to the second flange 25d can be removed, and the second flange 25d can be kept clean. This can reduce the occurrence of malfunctions of the cutting device 1.

[0109] In an eighth aspect of the blade changing device 26 according to the seventh aspect, The second cleaning mechanism 320 is disposed inside the cover body 210, the blade suction portion 121 is disposed so as to face a second cleaning sponge 321 (flange cleaning member) of the second cleaning mechanism 320 when the blade replacement mechanism 100 is housed in the cover body 210; The air nozzle 500 is configured to blow gas onto the blade suction surface 121 a and the second cleaning sponge 321 . According to the blade replacing device 26 of the eighth aspect of the present disclosure, the second cleaning sponge 321 as well as the blade attracting surface 121a can be kept clean.

[0110] The blade changing device 26 of the ninth aspect according to any one of the first to eighth aspects is The cover further includes a camera 600 capable of capturing an image of the inside of the cover body 210 . According to the blade replacement device 26 of the ninth aspect of the present disclosure, it is possible to check the state of the inside of the cover body 210, which is difficult to see from the outside.

[0111] The cutting device 1 according to a tenth aspect of the present disclosure comprises: The blade changing device 26 of any one of the first to ninth sides; a spindle unit 25 (cutting mechanism) for cutting the sealed substrate W (object to be cut) with the blade 25a replaced by the blade replacement device 26; Includes. According to the cutting device 1 of the tenth aspect of the present disclosure, cutting chips and water droplets adhering to the blade adsorption surface 121a can be removed, and the blade adsorption surface 121a can be kept clean. This can reduce malfunctions of the blade replacement mechanism 100, and therefore reduce malfunctions of the cutting device 1.

[0112] A method for producing a cut product according to an eleventh aspect of the present disclosure includes: A method for producing a cut product using the cutting device 1 according to a tenth aspect, comprising: a blade changing process S10 in which the blade changing device 26 changes the blade 25a of the cutting device 1; a cutting step S20 of cutting the sealed substrate W by the cutting device 1 to which the blade 25a replaced in the blade replacement step S10 is attached; Includes. According to the manufacturing method of the cut product of the eleventh aspect of the present disclosure, cutting chips and water droplets adhering to the blade adsorption surface 121a can be removed, and the blade adsorption surface 121a can be maintained in a clean state. This can reduce the occurrence of malfunctions of the blade replacement mechanism 100, and therefore the occurrence of malfunctions of the cutting device 1. [Explanation of symbols]

[0113] 1 cutting device 25 Spindle section 25a blade 26 Blade change device 25d Second flange 25e Detachable parts 100 Blade replacement mechanism 121 Blade suction part 121a Blade suction surface 122 Flange suction part 123 Detachable member rotating part 210 Cover body 211 Opening 212 Leak section 220 Moving Plate 230 Sealing material 320 Second Cleaning Mechanism 321 Second Cleaning Sponge 410 Used blade storage area 420 Unused blade storage area 500 Air Nozzle 600 Camera

Claims

1. A blade changing device for changing a blade used in a cutting mechanism that cuts an object to be cut with a blade, comprising: a blade replacement mechanism including at least a first suction portion configured to suction the blade; a cover body capable of accommodating the blade replacement mechanism therein; a closing portion that is movable integrally with the blade replacement mechanism and that is capable of closing the opening of the cover body in a state in which the blade replacement mechanism is stored inside the cover body; a gas blowing unit configured to blow gas against the blade suction surface of the first suction unit when the blade replacement mechanism is stored in the cover body; A blade changing device comprising:

2. The blade changing device according to claim 1 , further comprising a replacement blade storage section arranged inside the cover body and capable of storing a plurality of replacement blades stacked vertically.

3. The blade changing device according to claim 1 , wherein the gas blowing unit is configured to blow gas onto the first suction unit when the blade suction surface faces downward.

4. a seal member that seals a contact portion between the cover body and the closing portion when the closing portion closes the opening, The blade replacing device according to claim 1 , wherein at least one of the cover body and the blocking portion is provided with a leak portion above a lowermost end of the blocking portion, the leak portion being capable of releasing air inside the cover body to the outside.

5. The blade changing device according to claim 1 , further comprising a used blade storage section arranged inside the cover body and capable of storing a used blade.

6. The blade changing mechanism includes: A second suction portion configured to suction the flange independently of the first suction portion; a detachable member rotating unit configured to be able to rotate a detachable member that enables the blade to be attached to and detached from the spindle unit; The blade changing apparatus of claim 1 further comprising:

7. The blade replacing device according to claim 6 , further comprising a flange cleaning mechanism that cleans at least the flange sucked by the second suction portion.

8. The flange cleaning mechanism is disposed inside the cover body, the first suction portion is disposed to face a flange cleaning member of the flange cleaning mechanism when the blade replacing mechanism is housed in the cover body, The blade changing device according to claim 7 , wherein the gas blowing unit is configured to blow gas against the blade suction surface and the flange cleaning member.

9. The blade changing device according to claim 1 , further comprising a camera capable of capturing an image of the inside of the cover body.

10. The blade changing device according to any one of claims 1 to 9; a cutting mechanism that cuts an object to be cut with the blade replaced by the blade replacement device; A cutting device including:

11. A method for producing cut products using the cutting device according to claim 10, comprising the steps of: a blade changing step of changing the blade of the cutting device by the blade changing device; a cutting step of cutting the object by the cutting device to which the blade replaced by the blade replacement step is attached; A method for manufacturing a cut product comprising the steps of:

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