Substrate Processing Equipment

Abstract

To provide a piece of substrate processing apparatus that is able to effectively acquire images of a plurality of screens to be switched and displayed.SOLUTION: A pieces of substrate processing apparatus 1 includes: a holding unit 10 that holds a substrate; a processing unit 20 that performs processing on the substrate held by the holding unit 10; a display unit 31 that displays information on the substrate processing apparatus 1; and a control unit 40. The control unit 40 has a screen information storage unit 411 that stores a plurality of screens switched and displayed on the display unit 31; a list storage unit 412 that stores a favorite list showing an arbitrary screen selected from the plurality of screens; and an image acquisition unit 422 that collectively acquires an image of the screen stored in the favorite list.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a substrate processing apparatus. [Background technology]

[0002] The processing device accepts operations from an operator using multiple screens and allows the operator to input processing conditions for the processing device. For example, Patent Document 1 discloses a processing device that selects and displays a desired video from videos for explaining an operation method or a user maintenance method of the processing device, thereby allowing the user to understand the desired operation method or user maintenance method. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2010-49466 A Summary of the Invention [Problem to be solved by the invention]

[0004] In a conventional processing apparatus, when processing conditions are set by switching between multiple screens, images of the multiple screens may be acquired in order to confirm the processing conditions. However, in the conventional processing apparatus, when there are multiple screens that an operator wants to acquire, the images of the screens are acquired by switching between the multiple screens, which increases the operator's workload. This type of problem occurs in all substrate processing apparatuses that process substrates.

[0005] The present invention has been made in view of the above, and an object of the present invention is to provide a substrate processing apparatus capable of efficiently acquiring images of a plurality of screens which are switched and displayed. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, the substrate processing apparatus of the present invention is a substrate processing apparatus for performing any processing on a substrate, and includes a holding unit for holding a substrate, a processing unit for performing processing on the substrate held by the holding unit, a display unit for displaying information about the substrate processing apparatus, and a control unit. The control unit includes a screen information storage unit for storing a plurality of screens to be switched and displayed on the display unit, a list storage unit for storing a favorites list indicating an arbitrary screen selected from the plurality of screens, and an image of the screen stored in the favorites list. All or part of acquisition and storing image information indicating the acquired image in the image information storage unit. and an image acquisition unit for acquiring the image.

[0007] In the substrate processing apparatus, the control unit may further include a display control unit that displays a favorite button on each of the plurality of screens to register the screen in the favorites list, and a registration unit that registers the screen for which the favorite button is selected in the favorites list.

[0008] In the substrate processing apparatus, the control unit may further include a generation unit that generates a thumbnail screen that displays a plurality of thumbnails of the screen on the display unit, and a registration unit that registers the screen of the thumbnail selected on the thumbnail screen to the favorites list. Effect of the Invention

[0009] The processing device of the present invention has an effect of efficiently acquiring images of a plurality of screens which are switched and displayed. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a perspective view showing an example of the configuration of a substrate processing apparatus according to an embodiment. [Diagram 2] FIG. 2 is a diagram illustrating an example of a functional configuration of the substrate processing apparatus according to the embodiment. [Diagram 3] FIG. 3 is a diagram showing an example of a screen used by the substrate processing apparatus according to the embodiment. [Figure 4] FIG. 4 is a flowchart showing an example of a processing procedure related to registration of a screen of the substrate processing apparatus according to the embodiment. [Diagram 5] FIG. 5 is a diagram showing an example of a device data screen based on the screen information. [Figure 6] FIG. 6 is a diagram showing an example of a target data screen based on the screen information. [Figure 7] FIG. 7 is a diagram for explaining an example of screen transition related to screen registration of the substrate processing apparatus according to the embodiment. [Figure 8] FIG. 8 is a flowchart showing an example of a processing procedure related to another registration of the screen of the substrate processing apparatus according to the embodiment. [Figure 9] FIG. 9 is a flowchart illustrating an example of a processing procedure of the screen registration processing illustrated in FIG. [Figure 10] FIG. 10 is a flowchart illustrating an example of a processing procedure of the image checking processing shown in FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Hereinafter, the embodiments of the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configuration can be made without departing from the gist of the present invention. In each of the following embodiments, the same parts are given the same reference numerals to avoid redundant explanations.

[0012] In the embodiment described below, an XYZ Cartesian coordinate system is set, and the positional relationship of each part is described with reference to this XYZ Cartesian coordinate system. One direction in a horizontal plane is the X-axis direction, a direction perpendicular to the X-axis direction in the horizontal plane is the Y-axis direction, and a direction perpendicular to both the X-axis direction and the Y-axis direction is the Z-axis direction. The XY plane including the X-axis and Y-axis is parallel to the horizontal plane. The Z-axis direction perpendicular to the XY plane is the vertical direction.

[0013] [Embodiment] A substrate processing apparatus according to an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a configuration example of the substrate processing apparatus according to an embodiment. Fig. 2 is a diagram showing a schematic diagram of an example of a functional configuration of the substrate processing apparatus according to an embodiment.

[0014] As shown in Fig. 1, the substrate processing apparatus 1 according to the embodiment is an apparatus for performing any processing on a workpiece 100 (substrate) that is to be processed. In other words, the substrate processing apparatus 1 is, for example, a processing apparatus for processing the workpiece 100. The workpiece 100 is an example of a substrate. The workpiece 100 is, for example, a disk-shaped semiconductor wafer or an optical device wafer having a substrate 101 made of silicon, sapphire, gallium arsenide, or the like. The workpiece 100 is configured by supporting the substrate 101 in an opening of an annular frame 102 via an adhesive tape 103.

[0015] The substrate processing apparatus 1 includes a main body 2 which is a box-shaped housing. The substrate processing apparatus 1 includes a holding unit 10, a processing unit 20, a touch panel 30, and a control unit 40. The control unit 40 is electrically connected to the holding unit 10, the processing unit 20, and the touch panel 30.

[0016] The holding unit 10 holds the workpiece 100 on a holding surface. The holding unit 10 is in communication with a suction source (not shown) and holds the workpiece 100 by suction using negative pressure supplied from the suction source. The holding unit 10 can be moved along the X-axis direction by an X-axis moving means 22 (described later) and can be rotated around the Z-axis by a rotation drive source (not shown). The holding unit 10 is, for example, a chuck table.

[0017] 2, the substrate processing apparatus 1 further includes an imaging unit 12, a driving means 14, and a Z-axis moving means 15. The control unit 40 is electrically connected to the imaging unit 12, the driving means 14, and the Z-axis moving means 15.

[0018] 1 and 2, the imaging unit 12 is an electron microscope equipped with an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor). The imaging unit 12 images the surface of the workpiece 100 held on the holding surface of the holding unit 10. The imaging unit 12 is integrated by being attached to and supported by a part of a housing for the processing unit 20, and is provided so as to be movable in the Z-axis direction by Z-axis moving means 15 such as a ball screw, a nut, a pulse motor, etc. The imaging unit 12 may include, for example, a light source that irradiates illumination light onto the surface of the workpiece 100 held on the holding surface of the holding unit 10.

[0019] The processing unit 20 processes the workpiece 100 held by the holding unit 10. That is, the processing unit 20 is an example of a processing unit that processes the substrate held by the holding unit 10. The processing unit 20 is, for example, a pair of cutting means, each having a cutting blade. The cutting blades of the pair of cutting means face each other in the Y-axis direction, and both rotate around the Y-axis. The processing unit 20 performs cutting processing on the workpiece 100 by the rotating cutting blade. The processing unit 20 can be moved along the Y-axis direction by the Y-axis moving means 27, and can be moved along the Z-axis direction by the Z-axis moving means 15. The Y-axis moving means 27 that moves the imaging unit 12 and the processing unit 20 in the Y-axis direction relative to the holding surface of the holding unit 10 is composed of a ball screw, a nut, a pulse motor, etc., and constitutes the driving means 14 together with the X-axis moving means 22.

[0020] The substrate processing apparatus 1 processes the workpiece 100 held by the holding unit 10 by moving the holding unit 10 and the processing unit 20 relative to each other using the X-axis movement means 22, the Y-axis movement means 27, and the Z-axis movement means 15.

[0021] The processing unit 20 included in the substrate processing apparatus 1 is not limited to a cutting unit that cuts the workpiece 100 with a cutting blade. Alternatively, the processing unit 20 may be, for example, a grinding unit that grinds the similar workpiece 100 with a grinding wheel or the like, a polishing unit that polishes the similar workpiece 100 with a polishing pad or the like, or a laser processing unit that irradiates a laser beam onto the similar workpiece 100 to perform laser processing.

[0022] 1, the touch panel 30 is installed on the main body 2 with the display surface facing outward. The touch panel 30 is disposed in a position on the main body 2 of the substrate processing apparatus 1 that is easy to see and operate. Under the control of the control unit 40, the touch panel 30 displays an image of the surface of the workpiece 100 captured by the imaging unit 12 and various information required for processing, and also receives input operations and the like required for processing from the operator. In this embodiment, the touch panel 30 is an example of a display unit.

[0023] 2, the touch panel 30 has a display unit 31 that displays various information related to the substrate processing apparatus 1, and an input unit 32 that accepts various operation inputs related to the substrate processing apparatus 1, such as input of processing condition settings, from an operator. The display unit 31 has a display device such as a liquid crystal display or an organic EL display. The input unit 32 has, for example, a touch screen that specifies the contact position or coordinates of an object on the display surface of the display device.

[0024] In this embodiment, the touch panel 30 is an example of an output unit that outputs various information, but is not limited to this. For example, the output unit of the substrate processing apparatus 1 may be realized by an electronic device such as a speaker or a communication device.

[0025] The control unit 40 includes a storage unit 41 and a control unit 42. In this embodiment, the control unit 40 is described as a unit including the storage unit 41 and the control unit 42, but is not limited to this. For example, the control unit 40 may be configured to include only the control unit 42 and not include the storage unit 41. In this case, the control unit 40 may be configured to be electrically connected to a storage device equivalent to the storage unit 41. The storage device includes, for example, a computer and electronic device external to the substrate processing apparatus 1, a storage device accessible by the substrate processing apparatus 1, other substrate processing apparatuses 1, etc.

[0026] The storage unit 41 stores programs for implementing functions such as various processes executed by the control unit 40, and data used in the processes according to such programs. The storage unit 41 is electrically connected to the control unit 40. The storage unit 41 can be implemented by a hard disk drive (HDD) or a semiconductor memory. The storage unit 41 may also be used as a temporary work area when a control unit 42 included in the control unit 40 executes commands written in a control program. The storage unit 41 may be a storage device accessible by computers and electronic devices external to the substrate processing apparatus 1, other substrate processing apparatuses 1, and the like.

[0027] The storage unit 41 has a screen information storage unit 411, a list storage unit 412, and an image information storage unit 413. The screen information storage unit 411 stores a plurality of screens to be switched and displayed on the display unit 31. Storing a screen means, for example, storing screen information for displaying the screen or screen information that can identify the screen in the storage unit 41. An example of a plurality of screens will be described later. The list storage unit 412 stores a favorites list indicating an arbitrary screen selected from the plurality of screens. The favorites list is, for example, a list for acquiring an image of a screen without displaying the screen. The list includes, for example, information indicating a list of screens stored (registered) as favorites. The list storage unit 412 can store, for example, a plurality of favorites lists linked to registered names such as operators, types of boards, processing steps, and types of products. The image information storage unit 413 stores image information indicating an image of a screen. The image information includes, for example, information indicating an image of a screen stored in the favorites list, an image of a screen obtained by a function such as a screenshot or a screen capture, and the like.

[0028] The control unit 42 controls each mechanism (X-axis moving means 22, Y-axis moving means 27, Z-axis moving means 15) that drives the substrate processing apparatus 1. The control unit 42 controls each part of the substrate processing apparatus 1 to realize processing by the substrate processing apparatus 1. The control unit 42 controls each part of the substrate processing apparatus 1 including the holding unit 10 and the processing unit 20 according to processing conditions input and set by an operator, for example, to realize processing of the workpiece 100.

[0029] The control unit 42 includes an arithmetic processing device such as a CPU (Central Processing Unit), a storage device such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The control unit 42 is a computer capable of executing a control program for controlling each of the above-mentioned components in accordance with a series of processing steps performed by the substrate processing apparatus 1 using such devices.

[0030] The control unit 42 controls the overall operation of the substrate processing apparatus 1 in accordance with processing conditions set by an operator via the input unit 32 of the touch panel 30. The control unit 42 displays an operable screen on the touch panel 30, and controls the operation of the processing unit 20 in response to operations performed on operation buttons on the operation screen.

[0031] The control unit 42 has the functions of a display control unit 421, an image acquisition unit 422, a registration unit 423, and a generation unit 424. The control unit 42 executes a program to realize the functions, actions, etc. of each unit.

[0032] The display control unit 421 displays screens corresponding to various processes of the substrate processing apparatus 1 on the display unit 31 of the touch panel 30. The screens include, for example, screens used for operation, maintenance, and the like of the substrate processing apparatus 1. The screens are, for example, screens (objects) displayed on the touch panel 30 based on HTML tags included in information in HTML (Hyper Text Markup Language) format. The screens have, for example, operation buttons, input fields, images captured by the imaging unit 12, and the like. The screens are configured according to the operation contents of the substrate processing apparatus 1. The display control unit 421 displays an image acquisition button for acquiring the screen displayed on the display unit 31 as an image at a desired position on the display unit 31. For example, the display control unit 421 displays the image acquisition button on the task bar of the display unit 31, or displays the image acquisition button superimposed on the operation screen. In addition, the display control unit 421 displays a favorite button for registering the screen in a favorite list on each of the multiple screens. Display control section 421 displays a favorites button for registering the screen displayed on display section 31 in a favorites list at a desired position on the screen.

[0033] The image acquisition unit 422 acquires images of the screens stored in the favorites list all at once. Acquiring images of the screens all at once means, for example, acquiring images of all or some of the screens stored in the favorites list. When a plurality of screens are stored in the favorites list, the image acquisition unit 422 acquires images of the plurality of screens all at once. The image acquisition unit 422 acquires images of the screens stored in the favorites list all at once, for example, at a preset timing. The timing includes, for example, the timing of detecting a predetermined operation, the timing of completing a preset process, processing, or the like, and the like. Furthermore, when the image acquisition button is operated, the image acquisition unit 422 acquires images of only the screens displayed on the display unit 31. The image acquisition unit 422 stores image information indicating the acquired images in the image information storage unit 413.

[0034] The registration unit 423 registers the screen for which the favorite button is selected in the favorites list. Registering in the favorites list means storing the screen in the favorites list. The registration unit 423 stores (registers) the screen in the favorites list, for example, by storing screen information of the selected screen, information that allows the selected screen to be identified, etc. in the list storage unit 412 of the storage unit 41. The registration unit 423 has a function of linking related information such as the registration name and label in the favorites list to the favorites list.

[0035] The generating unit 424 generates a thumbnail screen that displays thumbnails of a plurality of screens on the display unit 31. The generating unit 424 generates a thumbnail screen that displays thumbnails of reduced images of a plurality of screens in a list. For example, the generating unit 424 generates a thumbnail screen that displays thumbnails of screens in a list based on the image information in the screen information storage unit 411. The thumbnail screen is displayed on the display unit 31 under the control of the display control unit 421. The thumbnail screen further has a setting item for setting a registration name in a favorites list, for example. An example of the thumbnail screen will be described later. The generating unit 424 may generate, for example, a thumbnail screen that displays thumbnails of screens registered in a favorites list in a list, a thumbnail screen for editing thumbnails of screens registered in a favorites list, and the like.

[0036] The display control unit 421 controls the display unit 31 to display a thumbnail screen. The display control unit 421 controls the display unit 31 to switch between a selected state and a non-selected state of the thumbnails on the thumbnail screen in response to an operation by an operator, for example.

[0037] The registration unit 423 registers the screen of a thumbnail selected on the thumbnail screen in a favorites list. The registration unit 423 specifies the screen corresponding to the selected thumbnail, and stores the screen information of the screen, information that allows the screen to be identified, and the like in the list storage unit 412. The registration unit 423 registers the favorites list by linking information indicating the registration name to the favorites list.

[0038] An example of the configuration of the substrate processing apparatus 1 according to the present embodiment has been described above. Note that the above configuration described with reference to Fig. 1 and Fig. 2 is merely an example, and the configuration of the substrate processing apparatus 1 according to the present embodiment is not limited to this example. The functional configuration of the substrate processing apparatus 1 according to the present embodiment can be flexibly modified according to the specifications and operation.

[0039] (Multiple screen example) Fig. 3 is a diagram showing an example of a screen used by the substrate processing apparatus 1 according to the embodiment. As shown in Fig. 3, the substrate processing apparatus 1 stores screen information 500 of a plurality of screens in a screen information storage unit 411. The plurality of pieces of screen information 500 are stored in the storage unit 41. A display control unit 421 of the substrate processing apparatus 1 controls the display unit 31 to switch and display screens indicated by the plurality of pieces of screen information 500. The plurality of pieces of screen information 500 include information such as HTML for displaying each screen.

[0040] The plurality of screen information 500 includes information corresponding to, for example, a device data screen, an alignment data screen, a target data screen, a cleaning data screen, a precut spec screen, a kerf check data screen, and the like.

[0041] The device data screen is a screen for various data related to device data. The device data includes data indicating basic conditions related to cutting. The device data is data that can be set, changed, and confirmed. The alignment data screen is a screen related to the alignment operation of the substrate processing apparatus 1. The target data screen is a screen related to the target of the workpiece 100. The target includes, for example, a key pattern, a device, etc. The cleaning data screen is a screen for setting data related to spinner cleaning, transport operation, cutting water, etc. The pre-cut spec screen is a screen for setting an operation for adjusting the blade to a state suitable for product processing. The kerf check data screen is a screen for setting and confirming the kerf check operation. The kerf check is an operation in which the dicer automatically checks the cutting status of the cut line during cutting.

[0042] For example, when an operator creates processing condition data based on a design drawing or the like of the workpiece 100 to be processed by the substrate processing apparatus 1, the created processing conditions are checked by a third party. In this case, the substrate processing apparatus 1 switches between screens indicated by a plurality of screen information 500 and displays them on the display unit 31, thereby allowing the operator to create the processing condition data. The substrate processing apparatus 1 can provide the operator with a function of collectively acquiring images of screens used to create the processing condition data, among the plurality of screens that are switched and displayed.

[0043] (Example of screen registration in substrate processing equipment) Next, an example of screen registration executed by the substrate processing apparatus 1 according to the embodiment will be described. Fig. 4 is a flow chart showing an example of a processing procedure related to screen registration of the substrate processing apparatus 1 according to the embodiment. The processing procedure shown in Fig. 4 is realized by the control unit 42 of the substrate processing apparatus 1 executing a program. The processing procedure shown in Fig. 4 is executed by the control unit 42 of the substrate processing apparatus 1 when, for example, one screen out of a plurality of screens is switched in a preset order and displayed on the display unit 31.

[0044] 4, the control unit 42 of the substrate processing apparatus 1 switches the screen to be displayed on the display unit 31 (step 1101). For example, the control unit 42 acquires screen information 500 of the screen to be switched to and displayed from the screen information storage unit 411, and controls the display unit 31 to display the screen information 500. For example, the control unit 42 switches the display of the screen 510 by controlling the display unit 31 to transition the display from the screen 510 being displayed on the display unit 31 to the screen 510 to be switched to.

[0045] Fig. 5 is a diagram showing an example of a device data screen based on the screen information 500. Fig. 6 is a diagram showing an example of a target data screen based on the screen information 500. The screen 510 shown in Fig. 5 is an example of a device data screen shown by the screen information 500, and has a plurality of input fields corresponding to a plurality of setting items of device data. The screen 510 shown in Fig. 6 is an example of a target data screen shown by the screen information 500, and has a display area for images of a plurality of channels of the substrate processing apparatus 1.

[0046] The screen 510 shown in FIG. 5 and FIG. 6 has an ENTER button 511 and an EXIT button 512. The ENTER button 511 is a button for registering data set on the screen 510. The EXIT button 512 is a button for switching the screen 510 without registering changes to the screen 510. The screen 510 further has an image acquisition button 513 and a favorite button 514. The image acquisition button 513 and the favorite button 514 are displayed near the upper right corner of the screen 510, but the display position is not limited thereto. The image acquisition button 513 is a button for instructing an operator, etc. to acquire an image of the screen. The favorite button 514 is a button for allowing an operator, etc. to select a screen to be registered in a favorite list. The favorite button 514 is displayed in different display modes so that, for example, a selected state and a non-selected state can be distinguished. The favorite button 514 is displayed in a first display mode when in a selected state, and in a second display mode different from the first display mode when in a non-selected state. When the operator presses and holds the image acquisition button 513, it functions as a button for acquiring images of all the screens registered in the favorites list at once.

[0047] Returning to FIG. 4, when control unit 42 causes screen 510 to be displayed on display unit 31, control unit 42 advances the process to step 1102. Control unit 42 determines whether image acquisition button 513 has been operated (step 1102). For example, when control unit 42 detects an operation on image acquisition button 513 via input unit 32, control unit 42 determines that image acquisition button 513 has been operated. When control unit 42 determines that image acquisition button 513 has been operated (Yes in step 1102), control unit 42 advances the process to step 1103.

[0048] The control unit 42 acquires image information of the screen 510 displayed on the display unit 31 (step 1103). For example, the control unit 42 changes the favorite button 514 of the screen 510 to the first display mode, and acquires image information from the screen information in the screen information storage unit 411 corresponding to the screen 510. For example, the control unit 42 may acquire image information of the display contents of the display unit 31 by a screenshot function. The control unit 42 stores the acquired image information in the storage unit 41 (step 1104). For example, the control unit 42 associates related information with the acquired image information and stores it in the image information storage unit 413 of the storage unit 41. The related information includes, for example, information that can identify the operator who operated the image acquisition button 513, the workpiece 100, etc. When the process of step 1104 is completed, the control unit 42 advances the process to step 1107 described later.

[0049] Furthermore, if the control unit 42 determines that the image acquisition button 513 has not been operated (No in step 1102), the control unit 42 advances the process to step 1105. The control unit 42 determines whether or not the favorite button 514 has been operated (step 1105). For example, if the control unit 42 detects an operation on the favorite button 514 via the input unit 32, the control unit 42 determines that the favorite button 514 has been operated. If the control unit 42 determines that the favorite button 514 has not been operated (No in step 1105), the control unit 42 advances the process to step 1107, which will be described later.

[0050] Furthermore, when the control unit 42 determines that the favorites button 514 has been operated (Yes in step 1105), the control unit 42 advances the process to step 1106. The control unit 42 registers the selected screen in a favorites list (step 1106). For example, the control unit 42 identifies a favorites list to be registered in the list storage unit 412, and registers information indicating the selected screen in the favorites list. For example, when there is no favorites list to be registered in the list storage unit 412, the control unit 42 creates a new favorites list in the list storage unit 412, and registers information indicating the selected screen in the favorites list. When the process of step 1106 ends, the control unit 42 advances the process to step 1107.

[0051] The control unit 42 determines whether or not to switch the display of the screen 510 (step 1107). For example, when the control unit 42 detects an operation of the ENTER button 511, the EXIT button 512, or the like via the input unit 32, the control unit 42 determines that the display of the screen 510 is to be switched. When the control unit 42 determines that the display of the screen 510 is not to be switched (No in step 1107), the process returns to step 1102 already described, and the process continues. When the control unit 42 determines that the display of the screen 510 is to be ended (Yes in step 1107), the process proceeds to step 1108.

[0052] The control unit 42 executes a process according to the operation on the screen 510 (step 1108). For example, if the operation is an operation to select the ENTER button 511, the control unit 42 executes a process to reflect the setting contents of the screen in the data. For example, if the operation is an operation to select the EXIT button 512, the control unit 42 executes a process to invalidate the changes to the screen. When the process of step 1108 ends, the control unit 42 advances the process to step 1109.

[0053] The control unit 42 judges whether or not to acquire images collectively (step 1109). For example, the control unit 42 judges to acquire images collectively when it is the timing to acquire images collectively set in advance. The timing to acquire images collectively includes, for example, the timing when a predetermined operation of an operator is detected, the timing when a setting for a predetermined screen is completed, the timing when processing condition data is created, and the like. For example, by setting the timing to acquire images collectively to the timing when alignment teach of the substrate processing apparatus 1 is completed, the control unit 42 can also store images of the taught targets. When the control unit 42 judges not to acquire images collectively (No in step 1109), it ends the processing procedure shown in FIG. 4. When the control unit 42 judges to acquire images collectively (Yes in step 1109), it advances the processing to step 1110.

[0054] The control unit 42 acquires images of the screens 510 registered in the favorites list all at once (step 1110). For example, the control unit 42 acquires the target favorites list from the list storage unit 412, identifies the screen information 500 corresponding to all of the screens 510 registered in the favorites list from the screen information storage unit 411, and acquires images of the screens 510 based on the screen information 500. When the process of step 1110 ends, the control unit 42 advances the process to step 1111.

[0055] The control unit 42 executes processing on the acquired image (step 1111). The processing on the image includes at least one of the following processes: storing image information indicating the acquired image in the image information storage unit 413, displaying the image information on the display unit 31, supporting creation of processing condition data based on the image information, labeling the image information and registering it in a database, and transmitting the image information to a set destination. When the processing of step 1112 ends, the control unit 42 ends the processing procedure shown in FIG. 4.

[0056] As described above, when the substrate processing apparatus 1 stores the screen 510 displayed on the display unit 31 in the favorites list, it can acquire images of all the screens stored in the favorites list all at once. For example, assume that the operator registers the screen 510 shown in Fig. 5 in the favorites list, but does not register the screen 510 shown in Fig. 6 in the favorites list. In this case, the substrate processing apparatus 1 acquires images such as the screen 510 shown in Fig. 5 at the timing of acquiring images all at once, but does not acquire the image of the screen 510 shown in Fig. 6.

[0057] This eliminates the need for the substrate processing apparatus 1 to perform a process of acquiring an image on each of the multiple screens 510 when switching between the multiple screens 510. Furthermore, the substrate processing apparatus 1 can eliminate the need for the operator to return the display of the screen 510 to acquire an image of the screen 510 to be saved after the display of the screen 510 is switched. As a result, the substrate processing apparatus 1 can efficiently acquire images of the multiple screens 510 based on the favorite list of the screen 510.

[0058] The substrate processing apparatus 1 can display the favorite button 514 on each of the plurality of screens 510, and can register the screen 510 for which the favorite button 514 is selected in a favorites list. This allows the substrate processing apparatus 1 to facilitate an operator's operation of registering the plurality of screens 510, which are switched and displayed, in the favorites list. As a result, the substrate processing apparatus 1 can efficiently acquire images of the plurality of screens 510 based on the favorites list of the screens 510.

[0059] (Another registration example of a screen in a substrate processing apparatus) Next, another registration example of the screen 510 executed by the substrate processing apparatus 1 according to the embodiment will be described. Fig. 7 is a diagram for explaining a screen transition example related to screen registration of the substrate processing apparatus 1 according to the embodiment.

[0060] 7, the control unit 42 of the substrate processing apparatus 1 executes a program to cause the display unit 31 of the touch panel 30 to display a top screen 600 based on top screen information. The top screen 600 has, for example, a plurality of buttons 610 for instructing various processes of the substrate processing apparatus 1, a favorites edit button 620 for editing the favorites screen 510, and an image confirmation button 630 for confirming an image. Although not shown, the plurality of buttons 610 have, for example, buttons for instructing "manual operation", "full auto", "teach", "measure", "wheel exchange", "machine data", and "processing conditions".

[0061] The favorites edit button 620 is operated by an operator or the like, for example, when checking a plurality of screens 510. When the substrate processing apparatus 1 detects an operation on the favorites edit button 620 while the top screen 600 is displayed on the display unit 31, the substrate processing apparatus 1 displays a thumbnail screen 700 on the display unit 31. The thumbnail screen 700 is a screen that displays a list of thumbnails 710 of the plurality of screens 510.

[0062] In the scene 3002, the substrate processing apparatus 1 displays a thumbnail screen 700 of a plurality of screens 510 related to the operator on the display unit 31. The thumbnail screen 700 has a plurality of thumbnails 710, a setting item 720, and a button 730. The plurality of thumbnails 710 are displayed on the thumbnail screen 700 so that the operator can select them. The substrate processing apparatus 1 displays the thumbnails 710 on the thumbnail screen 700 in a selected state or a non-selected state. The selected state and the non-selected state are different display modes. The setting item 720 is an item in which a registration name of a registered favorite list can be set. The setting item 720 is configured to be able to select a plurality of registration names such as the name of the operator and the type of the workpiece 100. The button 730 is a button for returning to the top screen 600. The button 730 functions as a button for registering the screen of the thumbnail 710 selected on the thumbnail screen 700 to the favorite list.

[0063] In the example shown in scene 3002, the operator selects four thumbnails 710 out of nine thumbnails 710. In this case, the substrate processing apparatus 1 registers the screens 510 of the four thumbnails 710 selected on the thumbnail screen 700 in the favorites list. In this manner, the substrate processing apparatus 1 can display a list of the thumbnails 710 of the multiple screens 510 on the thumbnail screen 700 and register the screen 510 of the selected thumbnail 710 in the favorites list. The substrate processing apparatus 1 can reuse an already registered favorites list to register a new favorites list.

[0064] (Processing procedure for other screen registration examples) Next, an example of a processing procedure for another registration example of the screen 510 executed by the substrate processing apparatus 1 will be described. Fig. 8 is a flowchart showing an example of a processing procedure for another registration of the screen 510 of the substrate processing apparatus 1 according to the embodiment. Fig. 9 is a flowchart showing an example of a processing procedure for the screen registration processing shown in Fig. 8. Fig. 10 is a flowchart showing an example of the processing procedure for the image confirmation processing shown in Fig. 8.

[0065] 8 to 10 are realized by executing a program by the control unit 42 of the substrate processing apparatus 1. The process procedure shown in Fig. 8 is executed by the control unit 42 of the substrate processing apparatus 1, for example, when registering a screen using the thumbnail screen 700.

[0066] In the processing procedure shown in Fig. 8, the control unit 42 of the substrate processing apparatus 1 performs authentication of the operator (step 2101). The control unit 42 performs personal authentication of the operator, for example, by inputting identification information. When the control unit 42 authenticates the operator, the control unit 42 advances the processing to step 2102. Note that when the control unit 42 cannot authenticate the operator, the control unit 42 may end the processing procedure shown in Fig. 8.

[0067] The control unit 42 causes the display unit 31 to display the top screen 600 (step 2102). For example, the control unit 42 controls the display unit 31 to display the top screen 600 based on the top screen information. When the display unit 31 displays the top screen 600, the control unit 42 advances the process to step 2103.

[0068] The control unit 42 determines whether or not the edit button has been selected (step 2103). For example, when the control unit 42 detects a selection operation on the favorites edit button 620 on the top screen 600 via the input unit 32, the control unit 42 determines that the edit button has been selected. When the control unit 42 determines that the edit button has been selected (Yes in step 2103), the control unit 42 advances the process to step 2104.

[0069] The control unit 42 executes a screen registration process using the list of thumbnails 710 (step 2104). The screen registration process is a process of registering a screen in a favorites list using the thumbnail screen 700, for example.

[0070] 9, the control unit 42 collects the screen 510 to be displayed (step 2401). For example, the control unit 42 collects the screen 510 related to the authenticated operator, the screen 510 related to the processing conditions, etc. When the process of step 2401 ends, the control unit 42 advances the process to step 2402.

[0071] The control unit 42 generates a thumbnail screen 700 that displays a list of thumbnails 710 of the collected screens 510 (step 2402). For example, the control unit 42 creates thumbnails 710 of the screens 510 collected in step 2401, and generates screen information for the thumbnail screen 700 that displays a list of the created thumbnails 710. When the process of step 2402 ends, the control unit 42 advances the process to step 2403.

[0072] The control unit 42 executes a display control process to display the thumbnail screen 700 on the display unit 31 (step 2403). The display control process includes, for example, a process of switching from the top screen 600 displayed on the display unit 31 to the thumbnail screen 700. For example, the control unit 42 executes the display control process to switch the display content of the display unit 31 from the top screen 600 to the thumbnail screen 700. When the process of step 2403 ends, the control unit 42 advances the process to step 2404.

[0073] The control unit 42 determines whether or not to end the display of the thumbnail screen 700 (step 2404). For example, when the control unit 42 detects an operation on the button 730 on the top screen 600 via the input unit 32, the control unit 42 determines to end the display of the thumbnail screen 700. When the control unit 42 determines to end the display of the thumbnail screen 700 (Yes in step 2404), the control unit 42 advances the process to step 2405.

[0074] The control unit 42 stores in the storage unit 41 a favorites list indicating the screen 510 of the thumbnail 710 selected on the thumbnail screen 700 (step 2405). For example, the control unit 42 identifies the screen 510 of the thumbnail 710 selected on the thumbnail screen 700, and creates a favorites list indicating the identified screen 510. Then, when the control unit 42 creates a favorites list of the registered name set in the setting item 720 of the thumbnail screen 700, the control unit 42 stores the favorites list in the list storage unit 412. When the process of step 2405 ends, the control unit 42 ends the processing procedure shown in Fig. 9, and returns to the process of step 2104 shown in Fig. 8.

[0075] Furthermore, if the control unit 42 determines not to end the display of the thumbnail screen 700 (No in step 2404), the control unit 42 advances the process to step 2406. The control unit 42 determines whether or not the thumbnail 710 has been selected (step 2406). For example, the control unit 42 determines that the thumbnail 710 has been selected when detecting an operation on the thumbnail 710 via the input unit 32. If the control unit 42 determines that the thumbnail 710 has not been selected (No in step 2406), the control unit 42 returns the process to step 2404 already described, and continues the process.

[0076] Furthermore, when the control unit 42 determines that the thumbnail 710 has been selected (Yes in step 2406), the control unit 42 advances the process to step 2407. The control unit 42 changes the display mode of the thumbnail 710 selected on the thumbnail screen 700 (step 2407). For example, when a non-selected thumbnail 710 is selected, the control unit 42 changes the display content of the thumbnail screen 700 so that the selected thumbnail 710 has a display mode of a selected state. For example, when a selected thumbnail 710 is selected, the control unit 42 changes the display content of the thumbnail screen 700 so that the selected thumbnail 710 has a display mode of a non-selected state. When the process of step 2407 ends, the control unit 42 returns the process to step 2404 already described, and continues the process.

[0077] Returning to FIG. 8, when the image registration process of step 2104 is completed, the control unit 42 advances the process to step 2105. The control unit 42 executes a process of returning to the top screen 600 (step 2105). The return process includes, for example, a process of switching from the screen 510 displayed on the display unit 31 to the top screen 600. By executing the return process, the control unit 42 causes the display unit 31 to switch the display content from the screen 510 to the top screen 600. That is, the display unit 31 goes into a state of displaying the top screen 600. When the process of step 2105 is completed, the control unit 42 advances the process to step 2106.

[0078] The control unit 42 determines whether or not to terminate (step 2106). For example, the control unit 42 determines to terminate when it receives a termination operation from the operator, when it receives an instruction to transition to another screen, etc. If the control unit 42 determines not to terminate (No in step 2106), it returns the process to step 2103 already described and continues the process. If the control unit 42 determines to terminate (Yes in step 2106), it terminates the processing procedure shown in FIG. 8.

[0079] Furthermore, when the control unit 42 determines that the edit button has not been selected (No in step 2103), it advances the process to step 2107. The control unit 42 determines whether or not image confirmation has been selected on the top screen 600 (step 2107). For example, when the control unit 42 detects a selection operation on the image confirmation button 630 on the top screen 600 via the input unit 32, it determines that image confirmation has been selected on the top screen 600. When the control unit 42 determines that image confirmation has not been selected on the top screen 600 (No in step 2107), it advances the process to step 2106 already described, and executes the process of step 2106.

[0080] Furthermore, when the control unit 42 determines that image confirmation has been selected on the top screen 600 (Yes in step 2107), the control unit 42 advances the process to step 2108. The control unit 42 executes image confirmation processing (step 2108). The image confirmation processing is, for example, processing in which the operator confirms the image of the acquired screen 510.

[0081] 10, the control unit 42 acquires images of the screens 510 registered in the favorites list all at once (step 2801). For example, the control unit 42 acquires the target favorites list from the list storage unit 412, acquires images of the screens 510 in the favorites list, and stores them in the storage unit 41. When the process of step 2801 ends, the control unit 42 advances the process to step 2802.

[0082] The control unit 42 generates a confirmation screen on which the acquired image can be confirmed (step 2802). For example, the control unit 42 generates a confirmation screen for displaying a list of the acquired images, a confirmation screen for displaying the acquired images in association with a favorites list, etc. When the process of step 2802 ends, the control unit 42 advances the process to step 2803.

[0083] The control unit 42 causes the display unit 31 to display the generated confirmation screen (step 2803). For example, the control unit 42 controls the display of the display unit 31 so as to display the confirmation screen generated in step 2802. When the process of step 2803 ends, the control unit 42 advances the process to step 2804.

[0084] The control unit 42 determines whether or not a process for the image has been instructed (step 2804). For example, the control unit 42 determines that a process for the image has been instructed when detecting an operation for instructing a process for the image of the confirmation screen via the input unit 32. When the control unit 42 determines that a process for the image has been instructed (Yes in step 2804), the control unit 42 advances the process to step 2805.

[0085] The control unit 42 executes processing on the specified image (step 2805). The processing on the specified image includes, for example, processing to display the specified image on the display unit 31, processing to edit and save the specified image, processing to transmit the specified image to an external communication device, etc. When the processing of step 2805 ends, the control unit 42 ends the processing procedure shown in Fig. 10, and returns to the processing of step 2108 shown in Fig. 8.

[0086] Furthermore, when the control unit 42 determines that processing on the image has not been instructed (No in step 2804), the control unit 42 advances the process to step 2806. The control unit 42 determines whether or not to end the display of the confirmation screen (step 2806). For example, when the control unit 42 detects an operation to return to the top screen 600 via the input unit 32, the control unit 42 determines that the display of the confirmation screen is to be ended. When the control unit 42 determines that the display of the confirmation screen is not to be ended (No in step 2806), the control unit 42 returns the process to step 2804 already described, and continues the process. When the control unit 42 determines that the display of the confirmation screen is to be ended (Yes in step 2806), the control unit 42 ends the processing procedure shown in FIG. 10, and returns to the process of step 2108 shown in FIG. 8.

[0087] Returning to Fig. 8, when the process of step 2108 ends, the control unit 42 advances the process to step 2105 already described. The control unit 42 executes a process of returning to the top screen 600 (step 2105). Then, when the process of step 2105 ends, the control unit 42 advances the process to step 2106 already described. If the control unit 42 determines not to end (No in step 2106), it continues the processing procedure shown in Fig. 8, and if it determines to end (Yes in step 2106), it ends the processing procedure shown in Fig. 8.

[0088] As described above, the substrate processing apparatus 1 displays the thumbnail screen 700 displaying thumbnails 710 of a plurality of screens 510 on the display unit 31, and can register the screen 510 of the thumbnail 710 selected from the thumbnail screen 700 in the favorites list. This allows the substrate processing apparatus 1 to easily store in the favorites list the screen 510 from which an image is to be acquired, among the plurality of screens 510 that are switched and displayed. As a result, the substrate processing apparatus 1 can efficiently acquire images of the plurality of screens 510 based on the favorites list of the screen 510. If the substrate processing apparatus 1 registers the screen 510 in the favorites list, the images of the plurality of screens 510 can be acquired at once, so that the operator does not need to acquire images on each screen 510 while transitioning between the screens 510 a plurality of times, and the number of operations of the substrate processing apparatus 1 can be reduced.

[0089] Furthermore, the substrate processing apparatus 1 can acquire images of the screens 510 registered in the favorites list all at once, and display a confirmation screen for the acquired images on the display unit 31. This allows the substrate processing apparatus 1 to allow the operator to confirm the images of the screens 510 acquired based on the favorites list. As a result, the substrate processing apparatus 1 can improve the accuracy of the images of the screens 510 acquired all at once using the favorites list.

[0090] For example, when an operator creates a processing report or shares error information, if the purpose of storing the image of the screen 510 is the same, the screen from which the image is to be acquired will be the same. In this case, in the conventional processing apparatus, the operator must switch between multiple screens 510 to acquire the images, which is inefficient. In the substrate processing apparatus 1 according to the present invention, the image of the required screen 510 can be easily acquired by registering the screen 510 in a favorites list, thereby improving work efficiency.

[0091] [Other embodiments] In the above embodiment, the substrate processing apparatus 1 according to the present invention has been described as a processing apparatus, but the present invention is not limited thereto and can be modified in various ways without departing from the gist of the present invention. The substrate processing apparatus can be realized, for example, as an apparatus for processing a semiconductor substrate. The apparatus for processing a semiconductor substrate includes, for example, a cutting apparatus, a grinding apparatus, a laser processing apparatus, a plasma processing apparatus, a cutting tool apparatus, a polishing apparatus, a resin coating apparatus, an adhesive tape application apparatus, and the like. The substrate processing apparatus can also be realized as an apparatus for inspecting a semiconductor substrate. The apparatus for inspecting a semiconductor substrate includes, for example, an appearance inspection apparatus, a split inspection apparatus, a flexural strength measuring apparatus, and the like. The substrate processing apparatus can also be realized as an apparatus for cleaning a semiconductor substrate. The apparatus for cleaning a semiconductor substrate includes, for example, a cleaning apparatus, a drying apparatus, and the like.

[0092] Moreover, each component of the substrate processing apparatus 1 described in the above embodiment is a functional concept, and does not necessarily have to be physically configured as shown in the drawings. That is, the specific form of distribution / integration of the substrate processing apparatus 1 is not limited to that shown in the drawings, and all or a part of it can be functionally or physically distributed / integrated in any unit according to various loads, usage conditions, etc. For example, in the substrate processing apparatus 1, the display control unit 421, the image acquisition unit 422, the registration unit 423, and the generation unit 424 may be functionally integrated or combined. [Explanation of symbols]

[0093] 1. Substrate Processing Equipment 10 Holding Unit 12 Imaging unit 20 Processing unit (processing unit) 30 Touch Panel 31 Display section 32 Input section 40 Control Unit 41 Storage section 42 Control section 100 Workpiece 411 Screen information storage section 412 List storage unit 413 Image information storage unit 421 Display control unit 422 Image Acquisition Unit 423 Registration Department 424 Generation part 500 Screen Information 510 screens 513 Image acquisition button 514 Favorites button 600 Top screen 700 thumbnail screens 710 Thumbnails

Claims

1. A substrate processing apparatus for performing any processing on a substrate, A holding unit for holding the substrate; a processing unit for performing processing on the substrate held by the holding unit; a display unit that displays information regarding the substrate processing apparatus; A control unit, The control unit a screen information storage unit that stores a plurality of screens to be switched and displayed on the display unit; a list storage unit for storing a favorites list indicating an arbitrary screen selected from among the plurality of screens; an image acquisition unit that acquires all or a part of the image of the screen stored in the favorites list and stores image information indicating the acquired image in an image information storage unit; A substrate processing apparatus comprising:

2. The control unit a display control unit that displays a favorite button on each of the plurality of screens for registering the screen in the favorites list; a registration unit that registers the screen on which the favorite button is selected in the favorite list; The substrate processing apparatus according to claim 1 , further comprising:

3. The control unit a generating unit that generates a thumbnail screen for displaying thumbnails of a plurality of said screens on said display unit; a registration unit for registering the screen of the thumbnail selected on the thumbnail screen in the favorites list; 3. The substrate processing apparatus according to claim 1, further comprising:

Images