Vibration device and imaging device
By inserting a metal body with a small Young modulus between the transparent body and the vibration support body to form a compressed state, the problems of liquid ticking entry and vibration impedance in the prior art are solved, and better waterproof and vibration-proof effects are achieved.
Patent Information
- Application Number
- JP2023580070
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2022-02-10
- Filing Date
- 2022-10-05
- Publication Date
- 2025-04-22
- Estimated Expiration
- 2042-10-05
AI Technical Summary
The prior art has shortcomings in suppressing liquid ticking into the device and reducing vibration impedance.
A transparent body and a vibrating support are used, combined with electrode material to vibrate on the vibrating support, and a metal body with a smaller Young modulus is placed between the transparent body and the support to form a compressed state, preventing the liquid from entering and reducing vibration impedance.
Effectively inhibit liquid ticking from entering the equipment, reduce vibration impedance, and improve the waterproof and vibration-proof performance of the equipment.
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Abstract
Description
[Technical field]
[0001] The present disclosure relates to a vibration device and an imaging device. [Background technology]
[0002] 2. Description of the Related Art There is known a device that removes droplets and the like that are attached to a light-transmitting body that covers an imaging element.
[0003] For example, Patent Document 1 discloses a droplet removal device that is provided with a drip-proof seal that prevents droplets from entering the inside of the device. [Prior art documents] [Patent documents]
[0004] [Patent Document 1] JP 2017-170303 A Summary of the Invention [Problem to be solved by the invention]
[0005] However, the device described in Patent Document 1 still has room for improvement in terms of suppressing the intrusion of droplets into the device and suppressing vibration damping.
[0006] In view of the above, an object of the present disclosure is to provide a vibration device and an imaging device that can suppress the intrusion of droplets into the device and suppress vibration damping. [Means for solving the problem]
[0007] The vibration device according to the present disclosure comprises: A transparent body; A vibrator supporting the light-transmitting body; A piezoelectric element is disposed on the vibrating body and vibrates the vibrating body; a first metal body that is disposed in a compressed state between the light-transmitting body and a member that supports the light-transmitting body, and has a Young's modulus smaller than those of the light-transmitting body and the member that supports the light-transmitting body; Equipped with.
[0008] The imaging device according to the present disclosure comprises: A vibration device according to the present disclosure; An imaging element disposed inside the vibration device; Equipped with. Effect of the Invention
[0009] According to the vibration device according to the present disclosure, it is possible to suppress the intrusion of liquid droplets into the device and to suppress vibration damping.
[0010] According to the imaging device according to the present disclosure, it is possible to suppress the intrusion of liquid droplets into the device and to suppress vibration damping. [Brief description of the drawings]
[0011] [Figure 1] FIG. 1 is a perspective view of a vibration device according to a first embodiment; [Diagram 2] FIG. 2 is an exploded perspective view showing the components of the vibration device of FIG. 1; [Figure 3A] A cross-sectional view of the vibration device of FIG. 1 taken along line AA. [Figure 3B] FIG. 3B is an enlarged partial cross-sectional view of region R1 of FIG. [Figure 4] FIG. 2 is a cross-sectional view showing an imaging device including the vibration device of FIG. 1; [Figure 5A] FIG. 11 is a partial cross-sectional view showing a modified example of the vibration device according to the first embodiment. [Figure 5B] FIG. 11 is a partial cross-sectional view showing a modified example of the vibration device according to the first embodiment. [Figure 5C] FIG. 13 is an exploded perspective view showing a modified example of the vibration device according to the first embodiment. [Figure 5D] FIG. 11 is a partial cross-sectional view showing a modified example of the vibration device according to the first embodiment. [Figure 5E] FIG. 11 is a partial cross-sectional view showing a modified example of the vibration device according to the first embodiment. [Figure 5F] FIG. 11 is a cross-sectional view showing a modified example of the vibration device according to the first embodiment. [Figure 6] FIG. 11 is a partial cross-sectional view showing a vibration device according to a second embodiment. [Figure 7A]FIG. 11 is a partial cross-sectional view showing a modified example of the vibration device according to the second embodiment. [Figure 7B] FIG. 11 is a partial cross-sectional view showing a modified example of the vibration device according to the second embodiment. [Figure 7C] FIG. 11 is a partial cross-sectional view showing a modified example of the vibration device according to the second embodiment. [Figure 7D] FIG. 11 is a partial cross-sectional view showing a modified example of the vibration device according to the second embodiment. [Figure 7E] FIG. 11 is a partial cross-sectional view showing a modified example of the vibration device according to the second embodiment. [Figure 7F] FIG. 11 is a partial cross-sectional view showing a modified example of the vibration device according to the second embodiment. [Figure 8] FIG. 11 is a partial cross-sectional view showing a vibration device according to a third embodiment. [Figure 9] FIG. 11 is a partial cross-sectional view showing a modified example of the vibration device according to the third embodiment. [Figure 10] FIG. 13 is a partial cross-sectional view showing a vibration device according to a fourth embodiment. [Figure 11] FIG. 13 is a partial cross-sectional view showing a modified example of the vibration device according to the fourth embodiment. [Figure 12] FIG. 13 is a partial cross-sectional view showing a vibration device according to a fifth embodiment. [Figure 13] FIG. 13 is a partial cross-sectional view showing a modified example of the vibration device according to the fifth embodiment. [Figure 14] FIG. 13 is a partial cross-sectional view showing a vibration device according to a sixth embodiment. [Figure 15] FIG. 13 is a partial cross-sectional view showing a modified example of the vibration device according to the sixth embodiment. [Figure 16] FIG. 13 is a partial cross-sectional view showing a vibration device according to a seventh embodiment. [Figure 17A] Graph showing the amount of displacement in Example 1 and the amount of displacement in Comparative Example 1 [Figure 17B] Graph showing the amount of displacement in Example 2 and the amount of displacement in Comparative Example 2 [Figure 17C] Graph showing the amount of displacement in Example 3 and the amounts of displacement in Comparative Examples 3 to 5 [Figure 17D] FIG. 1 is a diagram illustrating the amount of displacement in an embodiment and a comparative example. [Figure 17E] FIG. 1 is a diagram illustrating the amount of displacement in an embodiment and a comparative example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0012] (Background to this disclosure) Cameras used outdoors, such as in-vehicle cameras, surveillance cameras, or cameras mounted on drones, are exposed to the elements and therefore have covers made of glass, transparent plastic, etc. If foreign matter such as mud or oil adheres to the cover, the foreign matter may appear in the image captured by the camera, blocking the camera's field of vision and preventing a clear image from being obtained.
[0013] Therefore, devices such as the droplet removal device described in Patent Document 1 are being considered that arrange a piezoelectric body on a drip-proof cover to cause the drip-proof cover to vibrate in a bending manner, thereby reducing the size of droplets and the like adhering to the drip-proof cover and removing them.
[0014] The droplet removal device described in Patent Document 1 has a flange portion of a drip-proof cover and a piezoelectric body bonded and fixed thereto, and a drip-proof seal formed in a ring shape is tightly fitted around the entire outer periphery of the flange portion.
[0015] However, in the device described in Patent Document 1, the drip-proof seal is made of a rubber material and has vibration absorbing properties, so there is an issue that the drip-proof seal causes vibration loss when the vibration of the piezoelectric element is transmitted to the drip-proof cover.
[0016] In order to solve these problems, the inventors have devised the configurations of a vibration device and an imaging device according to the present disclosure.
[0017] The vibration device according to the first aspect of the present disclosure comprises: A transparent body; A vibrator supporting the light-transmitting body; A piezoelectric element is disposed on the vibrating body and vibrates the vibrating body; a first metal body that is disposed in a compressed state between the light-transmitting body and a member that supports the light-transmitting body, and has a Young's modulus smaller than those of the light-transmitting body and the member that supports the light-transmitting body; Equipped with.
[0018] With this configuration, it is possible to prevent droplets from entering the device and to suppress vibration damping.
[0019] In the vibration device according to the second aspect of the present disclosure, the member supporting the light-transmitting body includes the vibration body, The first metal body may be disposed between the light-transmitting body and the vibrating body.
[0020] With this configuration, it is possible to prevent droplets from entering the device and to suppress vibration damping.
[0021] In the vibration device according to the third aspect of the present disclosure, The light-transmitting body has a first surface and a second surface opposite to the first surface, The vibrating body has a cylindrical main body and a support portion provided at one end of the main body and having a support surface that supports the second surface of the light-transmitting body, The first metal body may be disposed between the second surface of the translucent body and the supporting surface of the supporting portion.
[0022] With this configuration, it is possible to prevent droplets from entering the device and to suppress vibration damping.
[0023] In the vibration device according to the fourth aspect of the present disclosure, the light-transmitting body has a first surface, a second surface opposite to the first surface, and a third surface connecting the first surface and the second surface, The vibrating body has a cylindrical main body, a support portion provided at one end of the main body, and a rib protruding from the support portion in a direction in which the light-transmitting body is disposed, the rib has an inner peripheral surface facing the third surface of the light-transmitting body, The first metal body may be disposed between the third surface of the light-transmitting body and an inner peripheral surface of the rib.
[0024] With this configuration, it is possible to prevent droplets from entering the device and to suppress vibration damping.
[0025] The vibration device according to the fifth aspect of the present disclosure may further include a pressing member attached to the vibration body and pressing the light-transmitting body toward the vibration body.
[0026] With this configuration, the metal body can be maintained in a compressed state, preventing liquid droplets from entering the device and suppressing vibration damping.
[0027] In the vibration device according to the sixth aspect of the present disclosure, The member supporting the light-transmitting body includes the pressing member, The first metal body may be disposed between the light-transmitting body and the pressing member.
[0028] With this configuration, it is possible to prevent droplets from entering the device and to suppress vibration damping.
[0029] In the vibration device according to the seventh aspect of the present disclosure, The light-transmitting body has a first surface and a second surface opposite to the first surface, The vibrating body has a cylindrical main body and a support portion provided at one end of the main body and having a support surface that supports the second surface of the light-transmitting body, the pressing member has a pressing surface that supports the first surface of the light-transmitting body, The first metal body may be disposed between the first surface of the light-transmitting body and the pressing surface of the pressing member.
[0030] With this configuration, it is possible to prevent droplets from entering the device and to suppress vibration damping.
[0031] In the vibration device according to the eighth aspect of the present disclosure, the light-transmitting body has a first surface, a second surface opposite to the first surface, and a third surface connecting the first surface and the second surface, the pressing member has a pressing surface that supports the first surface of the light-transmitting body and an inner surface that faces the third surface of the light-transmitting body, The first metal body may be disposed between the third surface of the light-transmitting body and the inner surface of the pressing member.
[0032] With this configuration, it is possible to prevent droplets from entering the device and to suppress vibration damping.
[0033] In the vibration device according to the ninth aspect of the present disclosure, the first metal body may have an inclined surface on a side where the third surface of the light-transmitting body is disposed.
[0034] With this configuration, it is possible to prevent droplets from entering the device and to suppress vibration damping.
[0035] The vibration device of the tenth aspect of the present disclosure may further include a second metal body arranged in a compressed state between the vibrating body and the pressing member, and having a Young's modulus smaller than those of the vibrating body and the pressing member.
[0036] With this configuration, it is possible to prevent droplets from entering the device.
[0037] In the vibration device of the eleventh aspect of the present disclosure, an adhesive member may be arranged between the translucent body and a member supporting the translucent body, except for the portion where the first metal body is arranged.
[0038] With this configuration, it is possible to prevent droplets from entering the device and to suppress vibration damping.
[0039] In the vibration device of the twelfth aspect of the present disclosure, the member supporting the translucent body may be provided with at least one of a convex portion or a concave portion between the adhesive member and the first metal body, separating the adhesive member and the first metal body.
[0040] With this configuration, it is possible to prevent droplets from entering the device and to suppress vibration damping.
[0041] In the vibration device according to the thirteenth aspect of the present disclosure, the adhesive member may be an epoxy resin.
[0042] With this configuration, the vibration efficiency of the light-transmitting body can be improved, and as a result, vibration damping can be suppressed.
[0043] In the vibration device according to a fourteenth aspect of the present disclosure, the first metal body may be a metal film provided on a portion of the vibration body that supports the light-transmitting body.
[0044] With this configuration, the manufacturing cost can be reduced, and the adhesion between the member supporting the light-transmitting body and the first metal body can be improved, thereby suppressing vibration damping.
[0045] An imaging device according to a fifteenth aspect of the present disclosure includes a vibration device according to any one of the first to fourteenth aspects of the present disclosure, and an imaging element disposed inside the vibration device.
[0046] With this configuration, it is possible to prevent droplets from entering the device and to suppress vibration damping. Furthermore, in an imaging device used under conditions exposed to wind and rain, the field of view of the imaging element is prevented from being blocked by foreign matter.
[0047] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. In each drawing, each element is shown exaggerated for ease of explanation.
[0048] In this specification, terms such as "first", "second", etc. are used for descriptive purposes only and should not be understood as expressing or implying the relative importance or ranking of technical features. Features qualified as "first" and "second" expressly or imply the inclusion of one or more of the feature. Also, in the accompanying drawings, the X, Y, and Z directions in the drawings indicate the horizontal, vertical, and thickness directions of the vibration device and the imaging device, respectively.
[0049] (Embodiment 1) [Overall configuration] FIG. 1 is a perspective view of a vibration device according to a first embodiment. FIG. 2 is an exploded perspective view showing each component of the vibration device of FIG. 1. FIG. 3A is a cross-sectional view of the vibration device of FIG. 1. FIG. 3B is a partial cross-sectional view in which a region R1 of FIG. 3A is enlarged. FIG. 4 is a cross-sectional view showing an imaging device including the vibration device of FIG. 1.
[0050] As shown in FIG. 1 and FIG. 2, the vibration device 2 includes a light-transmitting body 10, a vibrating body 20, a metal body 30, and a piezoelectric element 40. In this embodiment, the vibration device 2 is a device that transmits the vibration of the piezoelectric element 40 arranged in the vibrating body 20 to the light-transmitting body 10 by the vibrating body 20 to vibrate the light-transmitting body 10, thereby removing water droplets and the like attached to the light-transmitting body 10. Between the light-transmitting body 10 and a member supporting the light-transmitting body 10, a metal body 30 is compressed and arranged, which suppresses the intrusion of droplets into the vibration device 2 and suppresses the absorption of vibration transmitted from the vibrating body 20 to the light-transmitting body 10. In this embodiment, the member supporting the light-transmitting body 10 is the vibrating body 20. In addition, in this embodiment, a conductor (not shown) for applying a potential to the piezoelectric element 40 is arranged in the vibration device 2.
[0051] The vibration device 2 is used in, for example, an imaging device. As shown in Fig. 4, the imaging device 1 includes the vibration device 2 and an imaging unit 3. The imaging unit 3 is disposed inside the vibration device 2. The imaging unit 3 includes, for example, an optical element, an imaging element, a sensor component, and the like, and includes a case component that houses these components. The imaging unit 3 captures an image of an imaging target outside the vibration device 2 through a light-transmitting body 10 of the vibration device 2.
[0052] Each of the components constituting the vibration device 2 according to the first embodiment will be described in detail below.
[0053] <Translucent body> 4, the light-transmitting body 10 is a cover for preventing foreign matter from adhering to the lens of the imaging unit 3 when the imaging unit 3 is disposed inside the vibration device 2. The light-transmitting body 10 has a light-transmitting property that allows the energy ray or light of a wavelength detected by the imaging unit 3 to pass through. The light-transmitting body 10 may also be a lens having a light-collecting property.
[0054] As shown in FIGS. 3A and 3B, the light-transmitting body 10 has a first surface 10a, a second surface 10b opposite the first surface 10a, and a third surface 10c connecting the first surface 10a and the second surface 10b.
[0055] The first surface 10a is, for example, a surface that is curved in a convex shape from the inside to the outside of the light-transmitting body 10. In the present embodiment, the first surface 10a is curved in a circular shape.
[0056] The second surface 10b is, for example, a surface in which the outer peripheral portion continuing to the third surface 10c is flat and the central portion is curved in a convex shape from the outside to the inside of the light-transmitting body 10. In other words, the second surface 10b is a curved surface that is recessed in the thickness direction Z of the light-transmitting body 10.
[0057] The third surface 10c may be a flat surface extending in the thickness direction Z of the light-transmitting body 10, or may be a surface having a step.
[0058] In this embodiment, the light-transmitting body 10 has a dome shape as shown in Fig. 2. Specifically, the light-transmitting body 10 is formed in a circular shape when viewed from the thickness direction Z.
[0059] The first surface 10a, the second surface 10b, and the third surface 10c of the light-transmitting body 10 may be coated with an AR coating, a water-repellent coating, an impact-resistant coating, or the like, if necessary.
[0060] 3B, the light-transmitting body 10 is supported by the vibrating body 20. In the present embodiment, the second surface 10b and the third surface 10c of the light-transmitting body 10 are supported by the vibrating body 20.
[0061] Examples of the material for the light-transmitting body 10 include glass such as soda glass, borosilicate glass, aluminosilicate glass, or quartz glass, light-transmitting plastic, light-transmitting ceramics, or synthetic resin. The strength of the light-transmitting body 10 can be increased by forming the light-transmitting body 10 from reinforced glass whose strength has been improved by, for example, chemical strengthening.
[0062] <Vibration body> 3A, the vibrating body 20 is a member that supports the light-transmitting body 10. The vibrating body 20 is disposed on the second surface 10b side of the light-transmitting body 10.
[0063] The vibrating body 20 includes a cylindrical main body 21, a support 22 provided at one end 21a of the main body 21, and a rib 23 protruding from the support 22 in a direction in which the light-transmitting body 10 is disposed. Furthermore, the vibrating body 20 includes a fixing portion 25 to which the main body 21 is fixed.
[0064] As shown in FIG. 2, the main body 21 has one end 21a on the side where the light-transmitting body 10 is disposed, and the other end 21b located opposite to the one end 21a.
[0065] As shown in FIG. 3B, the support portion 22 is a plate-like member provided at one end 21a of the main body portion 21. The support portion 22 is disposed continuously with the one end 21a of the main body portion 21. That is, the support portion 22 is formed integrally with the main body portion 21. For example, the support portion 22 has an annular shape along the one end 21a of the main body portion 21 when viewed from the thickness direction Z. For example, the support portion 22 has an annular shape when viewed from the thickness direction Z. Specifically, the support portion 22 is a flange that protrudes to the inside and outside of the main body portion 21 when viewed from the thickness direction Z. Note that the flange may protrude to the outside without protruding to the inside of the main body portion 21, or may protrude to the inside without protruding to the outside of the main body portion 21.
[0066] The support portion 22 has a support surface 22a that supports the second surface 10b of the light-transmitting body 10. The support surface 22a is, for example, a flat surface.
[0067] 3B, the rib 23 protrudes from the support portion 22 toward the side where the light-transmitting body 10 is disposed. The rib 23 is disposed along the thickness direction Z. When viewed from the thickness direction Z, the rib 23 has an annular shape along the third surface 10c of the light-transmitting body 10. When viewed from the thickness direction Z, the rib 23 has, for example, a circular ring shape. The rib 23 has a rib inner circumferential surface 23a facing the third surface 10c of the light-transmitting body 10.
[0068] 3B, the light-transmitting body 10 is supported by the support portion 22 and the rib 23. Specifically, the support surface 22a of the support portion 22 supports the second surface 10b of the light-transmitting body 10, and the rib inner surface 23a of the rib 23 supports the third surface 10c of the light-transmitting body 10.
[0069] The vibrating body 20 vibrates the light-transmitting body 10 upon receiving vibration from a piezoelectric element 40, which will be described later.
[0070] The material of the vibrating body 20 may be ceramic, stainless steel, aluminum, iron, titanium, duralumin, or other metal. In order to reduce the loss of vibration transmitted from the piezoelectric element 40 to the translucent body 10, it is desirable that the vibrating body 20 be made of a material with high rigidity.
[0071] <Metal body> The metal body 30 is disposed in a compressed state between the light-transmitting body 10 and a member supporting the light-transmitting body 10. In this embodiment, as shown in FIG. 3B, the metal body 30 is disposed between the light-transmitting body 10 and the vibration body 20. That is, the member supporting the light-transmitting body 10 refers to the vibration body 20. The metal body 30 is disposed in a compressed state by the light-transmitting body 10 and the vibration body 20. The metal body 30 is disposed in a compressed state between, for example, the rib inner peripheral surface 23a of the rib 23 and the third surface 10c of the light-transmitting body 10. The compressed state includes, for example, a state in which the metal body 30 is sandwiched between the light-transmitting body 10 and the vibration body 20. In addition, the compressed state means a state in which the metal body 30 is deformed and crushed by being sandwiched by pressure between the light-transmitting body 10 and the rib 23 of the vibration body 20. As a result, the metal body 30 is in intimate contact with the third surface 10c of the light-transmitting body 10 and the rib inner peripheral surface 23a of the rib 23. As a result, the gap between the third surface 10c of the light-transmitting body 10 and the rib inner peripheral surface 23a of the rib 23 is sealed.
[0072] The metal body 30 is an annular member when viewed from the thickness direction Z. As shown in Fig. 2, the metal body 30 is disposed along the entire circumference of the rib inner circumferential surface 23a and the entire circumference of the third surface 10c. The metal body 30 is, for example, an annular member when viewed from the thickness direction Z. The distance between the inner circumference and the outer circumference of the metal body 30, i.e., the thickness of the metal body 30, is, for example, 5 µm or more and 2 mm or less. Preferably, it is 10 µm or more and 1 mm or less.
[0073] The metal body 30 has a Young's modulus smaller than that of the light-transmitting body 10 and that of the vibrating body 20. The Young's modulus of the metal body 30 is, for example, 30 MPa or more and 170 MPa or less. Moreover, the Young's modulus of the metal body 30 is preferably 50 MPa or more and 150 MPa or less.
[0074] The material of the metal body 30 is, for example, copper (Young's modulus: 123 MPa).
[0075] <Piezoelectric body> 3B, the piezoelectric element 40 is fixed to the vibrating body 20. The piezoelectric element 40 is adhered and fixed to the vibrating body 20 by, for example, an adhesive. The piezoelectric element 40 vibrates when, for example, a voltage is applied thereto.
[0076] 3B, the piezoelectric element 40 is disposed apart from the support portion 22 of the vibrating body 20, but the piezoelectric element 40 may be disposed on the support portion 22. Specifically, the piezoelectric element 40 may be disposed on, for example, a surface 22b located opposite to the support surface 22a of the support portion 22.
[0077] In this embodiment, the piezoelectric element 40 has a circular plate shape when viewed in the thickness direction Z. The shape of the piezoelectric element 40 is not limited to a circular plate shape, and may be any shape that can vibrate the vibrating body 20.
[0078] Examples of materials for forming the piezoelectric element 40 include barium titanate (BaTiO3), lead zirconate titanate (PZT: PbTiO3·PbZrO3), lead titanate (PbTiO3), lead metaniobate (PbNb2O6), and bismuth titanate (Bi4Ti3O12 For example, suitable piezoelectric ceramics such as (K,Na)NbO3, or suitable piezoelectric single crystals such as LiTaO3, LiNbO3, etc. can be used.
[0079] In order to apply a voltage to the piezoelectric element 40, a conductor is disposed on the piezoelectric element 40. The conductor is disposed, for example, by deposition on the surface of the piezoelectric element 40. The material of the conductor may be, for example, a metal with high conductivity such as stainless steel, silver, or copper. Alternatively, the conductor may be wiring formed on a flexible printed circuit board (FPC). The FPC may be a polyimide board with copper foil wiring. When the conductor is an FPC, the conductor has flexibility, so that a voltage can be applied to the piezoelectric element 40 without impeding vibration.
[0080] [effect] In the vibration device 2 having the above configuration, the metal body 30 having a Young's modulus smaller than that of the light-transmitting body 10 and the vibration body 20 supporting the light-transmitting body 10 is compressed and arranged between the light-transmitting body 10 and the vibration body 20. This allows the metal body 30 to be arranged to seal between the light-transmitting body 10 and the vibration body 20 without damaging the light-transmitting body 10 and the vibration body 20, and prevents liquid droplets from penetrating into the vibration device 2. Furthermore, the vibration device 2 having the above configuration can prevent the vibration transmitted to the light-transmitting body 10 through the vibration body 20 from being absorbed by the metal body 30, compared to a case in which a drip-proof seal such as silicone is arranged between the light-transmitting body and the vibration body. This allows vibration damping to be suppressed.
[0081] Moreover, with such a configuration, deformation and damage to the light-transmitting body 10 and the supporting member are prevented, and the durability of the vibration device 2 can be improved.
[0082] (Modification 1 of the First Embodiment) The metal body 30 may be disposed in a compressed state between the support surface 22a of the support portion 22 and the second surface 10b of the light-transmitting body 10, as shown in FIG. 5A.
[0083] Such a configuration can suppress the intrusion of liquid droplets into the vibration device 2. Also, such a configuration can suppress the attenuation of the vibration transmitted to the light-transmitting body 10 via the vibration body 20. This can suppress the vibration attenuation.
[0084] (Modification 2 of the First Embodiment) 5B, the metal body 30 may be disposed in a compressed state between the rib inner circumferential surface 23a of the rib 23 and the third surface 10c of the light-transmitting body 10, and between the support surface 22a of the support portion 22 and the second surface 10b of the light-transmitting body 10. In the metal body 30, the portion disposed between the rib inner circumferential surface 23a and the third surface 10c and the portion disposed between the support surface 22a and the second surface 10b may be continuous or may be formed of different members.
[0085] Such a configuration can suppress the intrusion of liquid droplets into the vibration device 2. Also, such a configuration can suppress the attenuation of the vibration transmitted to the light-transmitting body 10 via the vibration body 20.
[0086] (Third Modification of First Embodiment) 5C, the metal body 30 may be a metal film provided on a portion supporting the light-transmitting body. That is, the metal body 30 may be a metal film provided between the rib inner peripheral surface 23a of the rib 23 of the vibration body 20 and the third surface 10c of the light-transmitting body 10. The metal film is provided on the portion supporting the light-transmitting body 10 by, for example, sputtering.
[0087] As described in variant example 1 of embodiment 1, when the metal body 30 is disposed between the support surface 22a of the support portion 22 and the second surface 10b of the translucent body 10, the metal body 30 may be a metal film provided on the support surface 22a.
[0088] Furthermore, as described in variant example 2 of embodiment 1, when the metal body 30 is disposed between the support surface 22a of the support portion 22 and the second surface 10b of the translucent body 10, and between the rib inner surface 23a of the rib 23 and the third surface 10c of the translucent body 10, the metal body 30 may be a metal film provided on the support surface 22a and the rib inner surface 23a.
[0089] With this configuration, the metal body 30 and the vibrating body 20 can be prepared as one member, so that material costs and assembly processing costs can be reduced, and manufacturing costs can be kept down. In addition, with this configuration, the adhesion between the member supporting the light-transmitting body 10 and the metal body 30 can be improved. As a result, vibration damping can be suppressed.
[0090] (Fourth Modification of the First Embodiment) 5D, the metal body 30 is disposed between the rib inner peripheral surface 23a of the rib 23 and the third surface 10c of the light-transmitting body 10, but may not be disposed between the support surface 22a of the support portion 22 and the second surface 10b of the light-transmitting body 10. Since the light-transmitting body 10 is supported by the rib 23 via the metal body 30, the second surface 10b of the light-transmitting body 10 does not have to be supported by the support surface 22a of the support portion 22. That is, the second surface 10b of the light-transmitting body 10 and the support surface 22a of the support portion 22 may be separated from each other.
[0091] This configuration makes it possible to suppress the attenuation of the vibration transmitted to the light-transmitting body 10 via the vibrating body 20. As a result, the vibration attenuation can be suppressed.
[0092] (Fifth Modification of the First Embodiment) 5E, an adhesive member 70 may be disposed between the translucent body 10 and the vibration body 20, except for the portion where the metal body 30 is disposed. Specifically, the metal body 30 may be disposed between the rib inner peripheral surface 23a of the rib 23 and the third surface 10c of the translucent body 10, and the adhesive member 70 may be disposed between the support surface 22a of the support portion 22 and the second surface 10b of the translucent body 10.
[0093] The adhesive member 70 is, for example, an epoxy resin, an acrylic resin, or the like.
[0094] By disposing the adhesive member 70 in this manner, the vibration of the transparent body 10 is prevented. Body 2 0. As a result, the vibration transmission rate from the vibrating body 20 to the light-transmitting body 10 is improved, and the vibration efficiency of the vibration device can be improved.
[0095] Furthermore, by disposing the adhesive member 70 as described above, vibration damping can be suppressed, infiltration of droplets into the vibration device can be suppressed, and further, separation of the light-transmitting body 10 from the vibration body 20 can be prevented.
[0096] (Sixth Modification of the First Embodiment) 5F, the metal body 30 may have an inclined surface 30a on the inner periphery side. This makes it easier to fit the light-transmitting body 10 into the rib 23 of the vibration body 20.
[0097] (Embodiment 2) A vibration device according to a second embodiment of the present disclosure will be described. Note that in the second embodiment, differences from the first embodiment will be mainly described. In the second embodiment, configurations that are the same as or equivalent to those in the first embodiment will be described with the same reference numerals. Also, in the second embodiment, descriptions that overlap with those in the first embodiment will be omitted.
[0098] 6, the vibration device 102 according to the second embodiment differs from the vibration device 2 according to the first embodiment in that it further includes a pressing member 50 that is attached to the vibration body 120 and presses the light-transmitting body 10 toward the vibration body 120. In addition, the vibration device 102 according to the second embodiment differs from the vibration device 2 according to the first embodiment in that the vibration body 120 does not include a rib.
[0099] <Vibration body> As shown in FIG. 6, the vibrating body 120 includes a main body portion 121 and a support portion 122 that protrudes inward from the main body portion 121.
[0100] The main body 121 has a cylindrical shape. The main body 121 has one end 121a on the side where the light-transmitting body 10 is disposed, and an outer surface 121d. The outer surface 121d is provided with a first screw portion 24. The first screw portion 24 is connected to a second screw portion 53 of the pressing member 50, which will be described later. In this embodiment, the first screw portion 24 is, for example, a female screw.
[0101] The support portion 122 is a plate-like member that extends continuously from one end 121a of the main body portion 121 and protrudes inward from the one end 121a of the main body portion 121. The support portion 122 is, for example, a flange, similar to the support portion 122 of the vibration body 120 in the first embodiment. The support portion 122 is, for example, in a circular ring shape when viewed from the thickness direction Z. The support portion 122 has a support surface 122a on the side where the light-transmitting body 10 is arranged.
[0102] <Pressing member> The pressing member 50 is a member that supports the light-transmitting body 10. The pressing member 50 supports the light-transmitting body 10 by pressing the light-transmitting body 10 toward the vibration body 120 from the first surface 10a side of the light-transmitting body 10.
[0103] As shown in FIG. 6, the pressing member 50 includes a cylindrical side wall 52 and a pressing portion 51 that protrudes inward from the side wall 52.
[0104] The side wall 52 surrounds the third surface 10c of the light-transmitting body 10. The side wall 52 has an inner surface 52a facing the third surface 10c of the light-transmitting body 10. The side wall 52 has an annular shape along the third surface 10c when viewed from the thickness direction Z. The side wall 52 has, for example, a circular ring shape when viewed from the thickness direction Z.
[0105] The side wall 52 is fixed to the vibrating body 120. Specifically, an inner surface 52a of the side wall 52 is fixed to an outer surface 121d of the vibrating body 120.
[0106] A second screw portion 53 is provided on the inner surface 52a. The second screw portion 53 is connected to a first screw portion 24 formed on the vibrating body 120. That is, the pressing member 50 is fixed to the vibrating body 120 by the connection between the first screw portion 24 and the second screw portion 53. In this embodiment, the second screw portion 53 is, for example, a male screw, and the second screw portion 53 screws into the first screw portion 24, which is a female screw.
[0107] The pressing portion 51 extends from the side wall 52 to the inside of the side wall 52. The pressing portion 51 is located on the first surface 10a side of the light-transmitting body 10, and has a pressing surface 51a that presses the first surface 10a of the light-transmitting body 10. The pressing portion 51 has, for example, an annular shape that matches the shape of the first surface 10a of the light-transmitting body 10 when viewed from the thickness direction Z. The pressing portion 51 has, for example, an annular shape when viewed from the thickness direction Z.
[0108] The pressing member 50 may be made of a material such as ceramic, stainless steel, aluminum, iron, titanium, or metal such as duralumin. The surface of the pressing member 50 may be subjected to oxidation treatment or anodizing treatment, similar to the vibrating body 120.
[0109] <Metal body> The metal body 30 is disposed in a compressed state between the support surface 122a of the support portion 122 and the second surface 10b of the light-transmitting body 10. The compressed state includes, for example, a state in which the metal body 30 is sandwiched between the light-transmitting body 10 and a member that supports the light-transmitting body 10, i.e., the vibrating body 120. The compressed state also includes a state in which the second surface 10b of the light-transmitting body 10 and the support surface 122a of the support portion 122 are in close contact with each other.
[0110] The metal body 30 is compressed between the support surface 122a of the support portion 122 and the second surface 10b of the light-transmitting body 10 by screwing the first screw portion 24 of the vibrating body 120 into the second screw portion 53 of the pressing member 50.
[0111] [effect] The vibration device 102 having the above-mentioned configuration can support the light-transmitting body 10 by the pressing member 50 and the vibrating body 120. This makes it possible to maintain the metal body 30 in a compressed state, and to suppress attenuation of vibration transmitted from the vibrating body 120 to the light-transmitting body 10 via the metal body 30.
[0112] Moreover, the vibration device 102 having the above-mentioned configuration is disposed in a state in which the metal body 30 is compressed between the light-transmitting body 10 and the vibration body 120 by the pressing member 50 and the vibration body 120. This seals the gap between the light-transmitting body 10 and the vibration body 120, thereby suppressing the intrusion of liquid droplets into the vibration device 102.
[0113] Moreover, such a configuration prevents the light-transmitting body 10 from peeling off or falling off from the vibrating body 120, and the durability of the vibration device 102 can be improved.
[0114] (First modification of the second embodiment) In the vibration device 102 of embodiment 2, the pressing member 50 presses the translucent body 10 by screwing the second screw portion 53 into the first screw portion 24 of the vibration body 120, but as shown in FIG. 7A, the pressing member 150 may be, for example, a leaf spring.
[0115] The pressing member 150 is a leaf spring constituted by a pressing portion 151 and a side wall 152, and the pressing portion 151 may press the first surface 10a of the light-transmitting body 10 by the restoring force of the leaf spring. The light-transmitting body 10 is pressed by the restoring force of the leaf spring, whereby the metal body 30 is compressed.
[0116] Furthermore, the side wall 152 of the pressing member 150 presses the outer surface 121 d of the main body 121 of the vibrating body 120 due to the restoring force of the leaf spring, and the pressing member 150 is fixed to the vibrating body 120 .
[0117] With this configuration, the pressing member 150 can be easily fixed to the vibrating body 120, and the light-transmitting body 10 can be prevented from peeling off or becoming detached from the vibrating body 120. As a result, vibration damping can be suppressed.
[0118] (Modification 2 of the second embodiment) As described in the modified example of embodiment 1, an adhesive member may be disposed between the light-transmitting body 10 and the member supporting the light-transmitting body 10, except for the portion where the metal body 30 is disposed.
[0119] 7B, an adhesive member 70 may be disposed between a pressing surface 151a of the pressing member 150 and the first surface 10a of the light-transmitting body 10. The adhesive member 70 is disposed, for example, around the entire periphery of the first surface 10a of the light-transmitting body 10.
[0120] By arranging the adhesive member 70 in this manner, the adhesion between the light-transmitting body 10 and the vibrating body 120 is improved. As a result, the vibration transmission rate from the vibrating body 120 to the light-transmitting body 10 is improved, and the vibration efficiency of the vibration device 102 can be improved.
[0121] Furthermore, by arranging the adhesive member 70 as described above, vibration damping can be suppressed, infiltration of droplets into the vibration device 102 can be suppressed, and further, separation of the light-transmitting body 10 from the vibration body 120 can be prevented.
[0122] (Third Modification of the Second Embodiment) 7C, an adhesive member 70 may be disposed between the inner surface 152a of the side wall 152 of the pressing member 150 and the third surface 10c of the light-transmitting body 10. The adhesive member 70 is disposed, for example, around the entire periphery of the third surface 10c of the light-transmitting body 10.
[0123] 7C, the light-transmitting body 10 may have a flat plate shape in which the first surface 10a and the second surface 10b are flat surfaces. The light-transmitting body 10 has a disk shape when viewed from the thickness direction Z, for example.
[0124] By arranging the adhesive member 70 in this manner, the adhesion between the light-transmitting body 10 and the vibrating body 120 is improved. As a result, the vibration transmission rate from the vibrating body 120 to the light-transmitting body 10 is improved, and the vibration efficiency of the vibration device can be improved.
[0125] Furthermore, by arranging the adhesive member 70 as described above, vibration damping can be suppressed, infiltration of droplets into the vibration device 102 can be suppressed, and further, separation of the light-transmitting body 10 from the vibration body 120 can be prevented.
[0126] (Fourth Modification of the Second Embodiment) Furthermore, the member supporting the light-transmitting body 10 may be provided with at least one of a convex portion 81 and a concave portion 80 between the adhesive member 70 and the metal body 30, which separates the adhesive member 70 and the metal body 30.
[0127] 7D, the recess 80 is provided on the support surface 122a of the support portion 122. The recess 80 is provided, for example, in an annular shape. The recess 80 is provided, for example, in an annular shape to match the shape of the light-transmitting body 10.
[0128] The metal body 30 is disposed on the support surface 122a in a portion located inside the recess 80.
[0129] With this configuration, when the adhesive member 70 is arranged with its application range expanded due to its wettability or the pressure of the pressing member 150, the adhesive member 70 is prevented from flowing into the recess 80 and coming into contact with the metal body 30. That is, the adhesive member 70 is prevented from flowing between the metal body 30 and the light-transmitting body 10 and / or between the metal body 30 and the vibrating body 120. As a result, the liquid droplet intrusion suppression function and vibration absorption suppression function of the metal body 30 are maintained, and the intrusion of liquid droplets into the device and vibration damping can be suppressed. In addition, the vibration efficiency of the vibrating device 102 can be maintained.
[0130] (Fifth Modification of the Second Embodiment) 7E, the protrusion 81 may be provided on the support surface 122a of the support portion 122. The protrusion 81 is provided, for example, in an annular shape. The protrusion 81 is provided, for example, in an annular shape to match the shape of the light-transmitting body 10.
[0131] The protrusion 81 is disposed at a position not overlapping with the light-transmitting body 10 when viewed from the thickness direction Z. The protrusion 81 is disposed, for example, along the third surface 10c of the light-transmitting body 10. The metal body 30 is disposed in a portion of the support surface 122a that is more inward than the protrusion 81.
[0132] It should be noted that both the recessed portion 80 and the protruding portion 81 may be provided on the support surface 122a.
[0133] With this configuration, when the adhesive member 70 is arranged spreading beyond the application range due to its wettability or the pressure from the pressing member 150, the adhesive member 70 is blocked by the protrusions 81 and is prevented from coming into contact with the metal body 30. That is, the adhesive member 70 is prevented from flowing between the metal body 30 and the light-transmitting body 10 and / or between the metal body 30 and the vibrating body 120. As a result, the liquid droplet intrusion suppression function and vibration absorption suppression function of the metal body 30 are maintained, and the intrusion of liquid droplets into the device and vibration damping can be suppressed.
[0134] (Sixth Modification of the Second Embodiment) 7F, the protrusion 81 may be provided on the pressing member 150. For example, the protrusion 81 may be provided on the pressing surface 151a of the pressing portion 151 of the pressing member 150.
[0135] The protrusion 81 is disposed at a position not overlapping with the light-transmitting body 10 when viewed from the thickness direction Z. The protrusion 81 is provided, for example, in an annular shape along the third surface 10c of the light-transmitting body 10. The adhesive member 70 is disposed, for example, by applying it to a portion of the pressing surface 151a that is closer to the one end 150a than the protrusion 81 is.
[0136] With this configuration, when the adhesive member 70 is arranged spreading beyond the application range due to its wettability or the pressure from the pressing member 150, the adhesive member 70 is blocked by the protrusions 81 and is prevented from coming into contact with the metal body 30. That is, the adhesive member 70 is prevented from flowing between the metal body 30 and the light-transmitting body 10 and / or between the metal body 30 and the vibrating body 120. As a result, the liquid droplet intrusion suppression function and vibration absorption suppression function of the metal body 30 are maintained, and the intrusion of liquid droplets into the device and vibration damping can be suppressed.
[0137] Note that the pressing surface 151a may be provided with a recess 80. The pressing surface 151a may be provided with both a recess 80 and a protrusion 81. Furthermore, the recess 80 and / or the protrusion 81 may be provided on both the support surface 122a of the support portion 122 of the vibrating body 120 and the pressing surface 151a of the pressing portion 151 of the holding member 150.
[0138] As explained in the modified example of the first embodiment, in the vibration device 102 of the second embodiment, the metal body 30 may be a metal film provided on a portion of the vibration body 120 that supports the light-transmitting body 10. Details are described in the modified example 3 of the first embodiment, and therefore will not be explained here.
[0139] (Embodiment 3) A vibration device according to a third embodiment of the present disclosure will be described. Note that in the third embodiment, differences from the second embodiment will be mainly described. In the third embodiment, configurations that are the same as or equivalent to those in the second embodiment will be described with the same reference numerals. Also, in the third embodiment, descriptions that overlap with those in the second embodiment will be omitted.
[0140] 8, vibration device 202 according to embodiment 3 differs from vibration device 102 according to embodiment 2 in that a metal body 60 different from metal body 30 is provided between pressing member 150 and vibrating body 120. Hereinafter, the metal body 30 described in embodiments 1 and 2 will be referred to as a first metal body 30, and the metal body 60 different from metal body 30, which is disposed between the pressing member and vibrating body, will be referred to as a second metal body 60.
[0141] (Second metal body) The second metal body 60 is disposed in a compressed state between the inner surface 152a of the side wall 152 of the pressing member 150 and the outer surface 121d of the main body 121 of the vibrating body 120. The compressed state includes, for example, a state in which the second metal body 60 is sandwiched between the side wall 152 of the pressing member 150 and the vibrating body 120. The compressed state also includes, 2nd metal body 60 is deformed and crushed by being pressed between the side wall 152 of the pressing member 150 and the vibrating body 120. 2nd metal body 60 is in contact with the side wall 152 of the pressing member 150 and the vibrating body 120 without any gap.
[0142] The second metal body 60 has a cylindrical shape, and is, for example, annular when viewed from the thickness direction Z. The second metal body 60 is, for example, annular when viewed from the thickness direction Z. The distance between the inner circumference and the outer circumference of the second metal body 60, i.e., the thickness of the second metal body 60, is, for example, 5 μm or more and 2 mm or less. It is preferably 10 μm or more and 1 mm or less. The second metal body 60 is a metal body having a Young's modulus smaller than that of the pressing member 150 and smaller than that of the vibrating body 120. The Young's modulus of the second metal body 60 is, for example, 30 MPa or more and 170 MPa or less. Also, for example, it is 50 MPa or more and 150 MPa or less.
[0143] The material of the second metal body 60 is, for example, copper (Young's modulus: 123 MPa).
[0144] With this configuration, the first metal body 30 and the second metal body 60 can prevent liquid droplets from entering the inside of the vibration body 120.
[0145] Moreover, such a configuration prevents the light-transmitting body 10 from peeling off or falling off from the vibrating body 120, and the durability of the vibration device 202 can be improved.
[0146] The second metal body 60 can be disposed between the pressing member 150 and the vibrating body 120 regardless of the connection form between the pressing member 150 and the vibrating body 120. That is, the second metal body 60 can be disposed between the pressing member 150 and the vibrating body 120 whether the pressing member 150 and the vibrating body 120 are connected by a screw mechanism as described above or by the restoring force of the leaf spring of the pressing member 150.
[0147] (Modification of the third embodiment) As shown in FIG. 9, in the vibration device according to the third embodiment, the vibrating body 220 may include a main body portion 221, a support portion 222, and a rib 223, as described in the first embodiment.
[0148] The main body 221 has a cylindrical shape and has one end 221a on the side where the light-transmitting body 10 is disposed.
[0149] The support portion 222 is a plate-like member that is continuous with one end 221a of the main body portion 221 and protrudes inward from the one end 221a of the main body portion 221. The support portion 222 is, for example, a flange, similar to the support portion 22 of the vibration body 20 in the first embodiment. The support portion 222 is, for example, in a ring shape when viewed from the thickness direction Z. The support portion 222 has a support surface 222a on the side where the light-transmitting body 10 is arranged.
[0150] The rib 223 protrudes from the support portion 222 toward the side where the light-transmitting body 10 is disposed. The rib 223 is disposed along the thickness direction Z. When viewed from the thickness direction Z, the rib 223 has an annular shape along the third surface 10c of the light-transmitting body 10. When viewed from the thickness direction Z, the rib 223 has, for example, a circular ring shape. The rib 223 has a rib inner peripheral surface 223a facing the third surface 10c of the light-transmitting body 10, and a rib outer peripheral surface 223b located opposite the rib inner peripheral surface 223a.
[0151] 9, in the case of the vibrating body 220 having the above-mentioned configuration, the second metal body 60 is disposed, for example, between the rib 23 of the vibrating body 220 and the pressing member 150. Specifically, the second metal body 60 is disposed between the rib outer peripheral surface 223b of the rib 23 of the vibrating body 220 and the inner surface 152a of the side wall 152 of the pressing member 150.
[0152] By using the vibrating body 220 including the rib 23 in this manner, the light-transmitting body 10 is fixed by two members, the pressing member 150 and the vibrating body 220. This makes it possible to prevent the light-transmitting body 10 from being separated from the vibrating body 220. As a result, it is possible to suppress attenuation of vibration.
[0153] (Embodiment 4) A vibration device according to a fourth embodiment of the present disclosure will be described. Note that in the fourth embodiment, differences from the second embodiment will be mainly described. In the fourth embodiment, configurations that are the same as or equivalent to those in the second embodiment will be described with the same reference numerals. Also, in the fourth embodiment, descriptions that overlap with those in the second embodiment will be omitted.
[0154] As shown in Fig. 10, a vibration device 302 according to the fourth embodiment differs from the vibration device 102 according to the second embodiment in that a first metal body 30 is compressed and disposed between a pressing member 150 and a light-transmitting body 10. Note that, although Fig. 10 shows a vibration device in which the pressing member is a leaf spring, the pressing member may have the first screw portion 24 described in the second embodiment. In this case, the vibration body is provided with a second screw portion 53.
[0155] <First metal body> As shown in FIG. 10, the first metal body 30 is disposed, for example, in a compressed state between a pressing surface 151a of the pressing member 150 and the first surface 10a of the light-transmitting body 10.
[0156] With this configuration, it is possible to prevent droplets from entering the vibration device 302 and to prevent vibration damping.
[0157] (Modification of the fourth embodiment) As shown in FIG. 11, a vibration device 302 according to the fourth embodiment may also include an adhesive member 70, a protrusion 81 that separates the adhesive member 70 from the first metal body 30, and a second metal body 60.
[0158] The adhesive member 70 is disposed between the light-transmitting body 10 and a member supporting the light-transmitting body 10, except for the portion where the first metal body 30 is disposed. In this modification, the member supporting the light-transmitting body 10 is the vibrating body 120 and the pressing member 150. The adhesive member 70 is disposed between the second surface 10b of the light-transmitting body 10 and the supporting surface 122a of the supporting portion 122, and between the third surface 10c of the light-transmitting body 10 and the side wall 152 of the pressing member 150. Details of the adhesive member 70 are described in Modification 2 of the second embodiment, and therefore will not be described here.
[0159] The protrusion 81 is provided, for example, on the pressing surface 151a of the pressing portion 151 of the pressing member 150. Details of the protrusion 81 are described in the sixth modification of the second embodiment, and therefore will not be described here. Note that the protrusion 81 may be provided on the support surface 122a of the support portion 122 of the vibrating body 120.
[0160] The second metal body 60 is disposed in a compressed state between the vibrating body 120 and the pressing member 150. Details of the second metal body 60 have been described in the third embodiment, and therefore will not be described here.
[0161] By arranging the adhesive member 70 in this manner, the adhesion between the light-transmitting body 10 and the vibrating body 120 is improved. As a result, the vibration transmission rate from the vibrating body 120 to the light-transmitting body 10 is improved, and the vibration efficiency of the vibration device 302 can be improved.
[0162] Furthermore, by arranging the adhesive member 70 as described above, vibration damping can be suppressed, infiltration of droplets into the vibration device 302 can be suppressed, and separation of the light-transmitting body 10 from the vibration body 120 can be prevented.
[0163] Furthermore, with the above-described configuration, when the adhesive member 70 is arranged to extend beyond the application range due to its wettability or the pressure of the pressing member 150, the adhesive member 70 is blocked by the protrusions 81, and is prevented from coming into contact with the first metal body 30. That is, the adhesive member 70 is prevented from flowing between the first metal body 30 and the translucent body 10 and / or between the first metal body 30 and the vibrating body 120. As a result, the droplet intrusion suppression function and vibration absorption suppression function of the first metal body 30 are maintained, and the intrusion of droplets into the device and vibration damping can be suppressed.
[0164] Moreover, with the above-mentioned configuration, the first metal body 30 and the second metal body 60 can prevent liquid droplets from entering the inside of the vibration body 120.
[0165] In the vibration device 302 according to the embodiment 4, the vibrating body may also include ribs 223 as described in the modified example of the embodiment 3. Details are described in the modified example of the embodiment 3, and therefore will not be described here.
[0166] By using the vibrating body 220 including the ribs 223 in this manner, the light-transmitting body 10 is fixed by two members, the pressing member 150 and the vibrating body 220. This makes it possible to prevent the light-transmitting body 10 from coming off the vibrating body 220. As a result, vibration damping can be suppressed.
[0167] (Embodiment 5) A vibration device according to a fifth embodiment of the present disclosure will be described. Note that in the fifth embodiment, differences from the fourth embodiment will be mainly described. In the fifth embodiment, configurations that are the same as or equivalent to those in the fourth embodiment will be described with the same reference numerals. Also, in the fifth embodiment, descriptions that overlap with those in the fourth embodiment will be omitted.
[0168] 12 , the metal body 30 is disposed, for example, in a compressed state between an inner surface 152a of a side wall 152 of the pressing member 150 and the third surface 10c of the light-transmitting body 10. In this case, by disposing the metal body 30 having a thickness larger than the dimension of the third surface 10c in the thickness direction Z between the inner surface 152a of the side wall 152 and the third surface 10c of the light-transmitting body 10, the metal body 30 is compressed by the pressing member 150 and the light-transmitting body 10.
[0169] In the present embodiment, the light-transmitting body 10 may have a flat plate shape in which the first surface 10a and the second surface 10b are flat surfaces. The light-transmitting body 10 has a disk shape when viewed from the thickness direction Z, for example.
[0170] In the vibration device 402 configured in this manner, it is possible to suppress the intrusion of droplets into the vibration device 402 and to suppress vibration damping.
[0171] (Modification of the fifth embodiment) As shown in FIG. 13, the metal body 30 may have an inclined surface 31 on the side facing the third surface 10c.
[0172] In the vibration device 502 configured in this manner, the light-transmitting body 10 comes into contact with the inclined surface 31, compressing the metal body 30. Specifically, the compressed metal body 30 comes into contact with the second surface 10b and the third surface 10c of the light-transmitting body 10. This makes it easier to bring the light-transmitting body 10 and the metal body 30 into close contact with each other, and makes it easier to eliminate gaps between the light-transmitting body 10 and the metal body 30. As a result, it is possible to suppress the intrusion of liquid droplets into the vibration device 502, and further suppress vibration damping.
[0173] (Embodiment 6) A vibration device according to a sixth embodiment of the present disclosure will be described. Note that in the sixth embodiment, differences from the fourth embodiment will be mainly described. In the sixth embodiment, configurations that are the same as or equivalent to those in the fourth embodiment will be described with the same reference numerals. Also, in the sixth embodiment, descriptions that overlap with those in the fourth embodiment will be omitted.
[0174] 14, the vibration device 602 according to the sixth embodiment differs from the vibration device of the fourth embodiment in that an adhesive member 70 is disposed between the light-transmitting body 10 and the vibration body 120 except for the portion where the metal body 30 is disposed. Furthermore, the vibration device 602 according to the sixth embodiment differs from the vibration device of the fourth embodiment in that a protrusion 81 that separates the metal body 30 and the adhesive member 70 is provided.
[0175] The adhesive member 70 is disposed between the light-transmitting body 10 and a member supporting the light-transmitting body 10, except for the portion where the metal body 30 is disposed. In the present embodiment, the member supporting the light-transmitting body 10 is the vibrating body 120 and the pressing member 150. In the present embodiment, the adhesive member 70 is disposed between the supporting surface 122a of the supporting portion 122 of the vibrating body 120 and the second surface 10b of the light-transmitting body 10. Details of the adhesive member 70 are described in Modification 2 of the second embodiment, and therefore will not be described here.
[0176] The protrusion 81 is provided, for example, on the support surface 122a of the support portion 122 of the vibrating body 120. Details of the protrusion 81 are described in Modification 6 of the second embodiment, and therefore will not be described again. Note that a recess that separates the adhesive member 70 and the first metal body 30 may be provided on the support surface 122a of the support portion 122 of the vibrating body 120.
[0177] By disposing the adhesive member 70 as described above, the adhesion between the light-transmitting body 10 and the vibrating body 120 is improved. As a result, the vibration transmission rate from the vibrating body 120 to the light-transmitting body 10 is improved, and the vibration efficiency of the vibration device 602 can be improved.
[0178] Furthermore, by disposing the adhesive member 70 as described above, it is possible to suppress the intrusion of liquid droplets into the vibration device 602 and further to prevent the light-transmitting body 10 from being separated from the vibration body 120.
[0179] Furthermore, with the above-described configuration, when the adhesive member 70 is arranged spreading beyond the application range due to its wettability or the pressure from the pressing member 150, the adhesive member 70 is blocked by the protrusions 81 and is prevented from coming into contact with the metal body 30. That is, the adhesive member 70 is prevented from flowing between the first metal body 30 and the light-transmitting body 10 and / or between the metal body 30 and the pressing member 150. As a result, the droplet intrusion suppression function and vibration absorption suppression function of the first metal body 30 are maintained, and the intrusion of droplets into the device and vibration damping can be suppressed.
[0180] (Modification of the sixth embodiment) 15, the protrusion 81 may be provided on the pressing member 150. For example, the protrusion 81 may be provided on the pressing surface 151a of the pressing portion 151 of the pressing member 150. The details are described in the sixth modification of the second embodiment, and therefore will not be described here.
[0181] With this configuration, when the adhesive member 70 is arranged spreading beyond the application range due to its wettability or the pressure from the pressing member 150, the adhesive member 70 is blocked by the protrusions 81 and is prevented from coming into contact with the first metal body 30. That is, the adhesive member 70 is prevented from flowing between the metal body 30 and the light-transmitting body 10 and / or between the metal body 30 and the pressing member 150. As a result, the liquid droplet intrusion suppression function and vibration absorption suppression function of the metal body 30 are maintained, and the intrusion of liquid droplets into the device can be suppressed, and vibration damping can be suppressed.
[0182] (Embodiment 7) A vibration device according to a seventh embodiment of the present disclosure will be described. Note that in the seventh embodiment, differences from the second embodiment will be mainly described. In the seventh embodiment, configurations that are the same as or similar to those in the second embodiment will be described with the same reference numerals. Also, in the seventh embodiment, descriptions that overlap with those in the second embodiment will be omitted.
[0183] The vibration device 702 of embodiment 7 differs from the vibration device 102 of embodiment 2 in that, as shown in FIG. 16, the first metal body 30 is arranged in a compressed state between the pressing member 150 and the translucent body 10 in addition to being between the vibration body 120 and the translucent body 10.
[0184] The first metal body 30 that is compressed and disposed between the pressing member 150 and the light-transmitting body 10 is disposed, for example, along the entire circumference of the light-transmitting body 10.
[0185] Also in this embodiment, the second metal body 60 may be disposed in a compressed state between the vibrating body 120 and the pressing member 150. Details of the second metal body 60 have been described in the third embodiment, and therefore will not be described here.
[0186] With this configuration, the first metal body 30 is compressed and disposed in two places: between the light-transmitting body 10 and the pressing member 150, and between the light-transmitting body 10 and the vibrating body 120. This makes it possible to suppress the intrusion of liquid droplets into the vibrating device 302, and also to suppress vibration attenuation.
[0187] In the vibration device 702 according to the seventh embodiment, the vibration body 120 may include a rib 223. Details are described in the modification of the third embodiment, and therefore the description is omitted. In the vibration device 702 according to the seventh embodiment, an adhesive member 70 may be disposed between the light-transmitting body 10 and a member supporting the light-transmitting body 10. Details are described in the modification of the second embodiment, and therefore the description is omitted. In the vibration device 702 according to the seventh embodiment, a recess 80 and / or a protrusion 81 that separates the adhesive member 70 and the first metal body 30 may be provided on the member supporting the light-transmitting body 10. Details are described in the modification of the fourth embodiment to the modification of the second embodiment, and therefore the description is omitted.
[0188] Example 1 In Example 1, a simulation was performed to calculate the amount of displacement of the light-transmitting body 10 in the vibration device according to Modification 4 of Embodiment 1. The simulation was performed using Femtet (Murata Software Co., Ltd.). The vibration condition in the simulation was a voltage of 60 Vpp applied to the piezoelectric element.
[0189] Hereinafter, the space between the support surface of the support part of the vibrating body and the second surface of the light-transmitting body is also referred to as an α layer, and the space between the inner circumferential surface of the rib of the vibrating body and the third surface of the light-transmitting body is also referred to as a β layer.
[0190] 17D and 17E, the amount of displacement is between phase 0° and phase 180° in vibration in the thickness direction Z of the light-transmitting body 10. In Fig. 17D and 17E, the solid line indicates a state in which the vibration device is not vibrating, and the dashed line indicates a state in which the vibration device is vibrating.
[0191] In the following, the thickness of the α layer means the distance between the support surface of the support part of the vibrating body and the second surface of the translucent body, and the thickness of the β layer means the distance between the inner rib surface of the rib of the vibrating body and the third surface of the translucent body.
[0192] The physical properties of the light-transmitting body, the vibrating body, and the first metal body used in Example 1 are shown in Table 1 below.
[0193] [Table 1]
[0194] In Example 1, the thickness of the α layer was 50 μm, and the thickness of the β layer was 50 μm.
[0195] Comparative Example 1 Comparative Example 1 was the same as Example 1 except that a resin packing was placed in the β layer. The physical properties of the resin packing are shown in Table 2 below.
[0196] [Table 2]
[0197] Fig. 17A shows the results of Example 1 and Comparative Example 1. In the graph shown in Fig. 17A, the amount of displacement of Example 1 is set to 100, and the amount of displacement of Comparative Example 1 is shown as a relative amount of displacement to the amount of displacement of the examples.
[0198] 17A, it is clear that the displacement of the light-transmitting body in Example 1 in which the first metal body is arranged in the β-layer is about 10 times larger than that in Comparative Example 1 in which a resin packing is arranged in the β-layer, and the vibration efficiency of the light-transmitting body is increased. Therefore, it is clear that the absorption of vibration transmitted to the light-transmitting body is suppressed more in Example 1 than in Comparative Example 1.
[0199] Example 2 Example 2 was the same as Example 1, except that the first metal body was disposed on the α layer and the adhesive member was disposed on the β layer. The physical properties of the adhesive member are shown in Table 3 below.
[0200] [Table 3]
[0201] Comparative Example 2 comparison Example 2 was the same as Example 2, except that air was placed in the β layer.
[0202] 17B shows the results of Example 2 and Comparative Example 2. In the graph shown in FIG. 17B, the displacement amount of Comparative Example 2 is set to 100, and the displacement amount of Example 2 is set to 100. Comparative Example 2 The displacement is shown as a relative displacement of the displacement of the
[0203] 17B, it is clear that the displacement of the light-transmitting body in Example 2, in which an adhesive member is disposed in the β-layer, is increased by about 20% compared to Comparative Example 2, in which the β-layer is an air layer, and the vibration efficiency of the light-transmitting body is increased. Therefore, it is clear that the absorption of vibration transmitted to the light-transmitting body is suppressed more in Example 2 than in Comparative Example 2.
[0204] Example 3 Example 3 was the same as Example 1 except that an adhesive member was disposed on the α layer. The adhesive member was the same as the adhesive member in Example 2.
[0205] Comparative Example 3 Comparative Example 3 was the same as Example 3 except that an adhesive member was disposed on the β layer. The adhesive member was the same as the adhesive member in Example 2.
[0206] Comparative Example 4 Comparative Example 4 was the same as Example 3 except that a resin packing was disposed in the β layer. The resin packing was disposed in the same manner as in Comparative Example 1.
[0207] Comparative Example 5 Comparative Example 5 was the same as Example 3, except that air was placed in the β layer.
[0208] 17C shows the results of Example 3 and Comparative Examples 3 to 5. In the graph shown in FIG. 17C, the amount of displacement in Comparative Example 3 is set to 100, and the amounts of displacement in Comparative Examples 4, 5, and Example 3 are Comparative Example 3 The displacement is shown as a relative displacement of the displacement of the
[0209] From the graph shown in FIG. 17C, the displacement of the light-transmitting body in Example 3 in which the first metal body was arranged on the β layer was increased by about 20% compared to Comparative Example 3 in which the adhesive member was arranged on the β layer. Moreover, the displacement of the light-transmitting body in Example 3 in which the first metal body was arranged on the β layer was increased compared to Comparative Example 4 in which the resin packing was arranged on the β layer. Moreover, the displacement of the light-transmitting body in Example 3 in which the first metal body was arranged on the β layer was increased compared to Comparative Example 5 in which the β layer was an air layer. From the above, it was revealed that the vibration efficiency of the light-transmitting body was increased in Example 3 compared to any of Comparative Examples 3 to 5. Therefore, it was revealed that the absorption of vibration transmitted to the light-transmitting body was suppressed in Example 3 compared to Comparative Examples 3 to 5.
[0210] Although the present disclosure has been fully described in connection with the preferred embodiments with reference to the accompanying drawings, various changes and modifications will be apparent to those skilled in the art, and such changes and modifications should be understood to be included within the scope of the present disclosure as defined by the appended claims unless they depart therefrom. [Industrial Applicability]
[0211] The vibration device and imaging device of the present disclosure can be applied to vehicle-mounted cameras used outdoors, surveillance cameras, or optical sensors such as LiDAR. [Explanation of symbols]
[0212] 1. Imaging device 2, 102, 202, 302, 402, 502, 602, 702 Vibration device 3. Imaging unit 10 Translucent body 10a 1st page 10b 2nd side 10c 3rd page 20, 120, 220 Vibration body 21, 121, 221 Main body 21a, 121a, 221a one end 21b Other end 121d, 221d outer surface 22, 122, 222 Support part 22a, 122a, 222a Support surface 22b side 23, 223 Ribs 23a, 223a Rib inner surface 223b Rib outer surface 24 First screw part 25 Fixed part 30 Metal body, first metal body 30a Slope 31 Slope 40 Piezoelectric element 50, 150 Holding member 50a, 150a one end 50b, 150b other end 51, 151 Pressing part 51a, 151a Pressing surface 52, 152 side wall 52a, 152a inner surface 53 Second screw part 60 Second metal body 70 Adhesive Materials 80 Recess 81 Convex
Claims
1. A transparent body; A vibrator supporting the light-transmitting body; A piezoelectric element is disposed on the vibrating body and vibrates the vibrating body; a first metal body disposed in a compressed state between the light-transmitting body and a member supporting the light-transmitting body, the first metal body having a Young's modulus smaller than those of the light-transmitting body and the member supporting the light-transmitting body; A vibration device comprising:
2. the member supporting the light-transmitting body includes the vibration body, The vibration device according to claim 1 , wherein the first metal body is disposed between the light-transmitting body and the vibration body.
3. The light-transmitting body has a first surface and a second surface opposite to the first surface, The vibrating body has a cylindrical main body and a support portion provided at one end of the main body and having a support surface that supports the second surface of the light-transmitting body, The vibration device according to claim 2 , wherein the first metal body is disposed between the second surface of the translucent body and the support surface of the support portion.
4. The light-transmitting body has a first surface, a second surface opposite to the first surface, and a third surface connecting the first surface and the second surface, The vibrating body has a cylindrical main body, a support portion provided at one end of the main body, and a rib protruding from the support portion in a direction in which the light-transmitting body is disposed, the rib has an inner peripheral surface facing the third surface of the light-transmitting body, The vibration device according to claim 2 , wherein the first metal body is disposed between the third surface of the light-transmitting body and an inner peripheral surface of the rib.
5. The vibration device according to claim 1 , further comprising a pressing member attached to the vibration body and pressing the light-transmitting body toward the vibration body.
6. The member supporting the light-transmitting body includes the pressing member, The vibration device according to claim 5 , wherein the first metal body is disposed between the light-transmitting body and the pressing member.
7. The light-transmitting body has a first surface and a second surface opposite to the first surface, The vibrating body has a cylindrical main body and a support portion provided at one end of the main body and having a support surface that supports the second surface of the light-transmitting body, the pressing member has a pressing surface that supports the first surface of the light-transmitting body, The vibration device according to claim 6 , wherein the first metal body is disposed between the first surface of the translucent body and the pressing surface of the pressing member.
8. The light-transmitting body has a first surface, a second surface opposite to the first surface, and a third surface connecting the first surface and the second surface, the pressing member has a pressing surface that supports the first surface of the light-transmitting body and an inner surface that faces the third surface of the light-transmitting body, The vibration device according to claim 6 , wherein the first metal body is disposed between the third surface of the light-transmitting body and the inner surface of the pressing member.
9. The vibration device according to claim 8 , wherein the first metal body has an inclined surface on a side where the third surface of the light-transmitting body is disposed.
10. The vibration device according to claim 5 , further comprising a second metal body disposed in a compressed state between the vibrating body and the pressing member, the second metal body having a Young's modulus smaller than those of the vibrating body and the pressing member.
11. The vibration device according to claim 1 , wherein an adhesive member is disposed between the light-transmitting body and a member supporting the light-transmitting body, except for a portion where the first metal body is disposed.
12. The vibration device according to claim 11 , wherein the member supporting the translucent body has at least one of a convex portion or a concave portion between the adhesive member and the first metal body, the convex portion or the concave portion separating the adhesive member and the first metal body.
13. The vibration device according to claim 11 , wherein the adhesive member is an epoxy resin.
14. The vibration device according to claim 1 , wherein the first metal body is a metal film provided on a portion of the vibration body that supports the light-transmitting body.
15. The vibration device according to any one of claims 1 to 14, An imaging element disposed inside the vibration device; An imaging device comprising:
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