Sensors

Abstract

To provide a sensor capable of improving characteristics.SOLUTION: According to an embodiment, a sensor includes: a substrate; a first fixed part; a movable part; a first fixed electrode; and a second fixed electrode. The first fixed part is fixed to the substrate. The movable part is supported by the first fixed part. The movable part includes: multiple annular parts; and multiple connection parts. The multiple annular parts are concentric with the first fixed part as a center within a first plane crossing a first direction to the first fixed part from the substrate. The multiple annular parts include first to third annular parts. The second annular part is between the first fixed part and the first annular part. The third annular part is between the first fixed part and the second annular part. The second annular part includes a first movable part electrode. The first fixed part is fixed to the substrate and opposes one portion of the first annular part. The second fixed electrode is fixed to the substrate and opposes the first movable part electrode. The second fixed electrode is one of first comb-tooth electrode pairs. The first movable part electrode is the other of the first comb-tooth electrode pairs.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] SUMMARY OF THE DISCLOSURE The present invention relates to a sensor. [Background technology]

[0002] There are sensors such as gyro sensors, and it is desirable to improve the characteristics of sensors. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] U.S. Patent No. 7,040,163 Summary of the Invention [Problem to be solved by the invention]

[0004] Embodiments of the present invention provide sensors that can have improved performance. [Means for solving the problem]

[0005] According to an embodiment of the present invention, the sensor includes a base, a first fixed portion, a movable portion, a first fixed electrode, and a second fixed electrode. The first fixed portion is fixed to the base. The movable portion is supported by the first fixed portion. A first gap is provided between the base and the movable portion. The movable portion includes a plurality of annular portions and a plurality of connecting portions. The plurality of annular portions are concentric with the first fixed portion in a first plane intersecting a first direction from the base to the first fixed portion. One of the plurality of connecting portions connects one of the plurality of annular portions to another one of the plurality of annular portions. The plurality of annular portions include a first annular portion, a second annular portion, and a third annular portion. The second annular portion is between the first fixed portion and the first annular portion. The third annular portion is between the first fixed portion and the second annular portion. The second annular portion includes a first movable portion electrode. The first fixed electrode is fixed to the base and faces a part of the first annular portion. The second fixed electrode is fixed to the base and faces the first movable portion electrode. The second fixed electrode is one of a first comb-tooth electrode pair. The first movable portion electrode is the other of the first comb-tooth electrode pair. [Brief description of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. [Diagram 2] FIG. 2 is a schematic plan view illustrating the sensor according to the first embodiment. [Diagram 3] FIG. 3 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 4] 4A and 4B are schematic cross-sectional views illustrating the sensor according to the first embodiment. [Diagram 5] FIG. 5 is a schematic perspective view illustrating the sensor according to the first embodiment. [Figure 6] FIG. 6 is a schematic perspective view illustrating the sensor according to the first embodiment. [Figure 7] 7(a) and 7(b) are graphs illustrating the characteristics of the sensor. [Figure 8]FIG. 8 is a graph illustrating the characteristics of the sensor. [Figure 9] 9A to 9C are schematic plan views illustrating the operation of the sensor. [Figure 10] 10A to 10C are schematic plan views illustrating the operation of the sensor. [Figure 11] FIG. 11 is a schematic plan view illustrating the operation of the sensor. [Figure 12] 12A to 12C are schematic plan views illustrating the operation of the sensor. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios of each part may be different depending on the drawing. In this specification and each drawing, elements similar to those described above with reference to the previous drawings are given the same reference numerals and detailed descriptions thereof will be omitted as appropriate.

[0008] (First embodiment) 1 to 3 are schematic plan views illustrating the sensor according to the first embodiment. Fig. 2 shows an enlarged view of portions P1 and P2 of Fig. 1. Fig. 3 shows an enlarged view of portions P3 and P4 of Fig. 1. 4A and 4B are schematic cross-sectional views illustrating the sensor according to the first embodiment. Fig. 4(a) is a cross-sectional view taken along the line A1-A2 in Fig. 1. Fig. 4(b) is a cross-sectional view taken along the line B1-B2 in Fig. 1.

[0009] The sensor according to the embodiment shown in Figures 1, 4(a) and 4(b) includes a base 20, a first fixed portion 21, a movable portion 10, a first fixed electrode 41 and a second fixed electrode 42.

[0010] The base 20 may include, for example, a silicon substrate. The first fixing portion 21 is fixed to the base 20. A first direction D1 from the base 20 to the first fixing portion 21 is defined as a Z-axis direction. A direction perpendicular to the Z-axis direction is defined as an X-axis direction. A direction perpendicular to the Z-axis direction and the X-axis direction is defined as a Y-axis direction.

[0011] The movable part 10 is supported by a first fixed part. As shown in Figures 4(a) and 4(b), a first gap g1 is provided between the base body 20 and the movable part 10.

[0012] For example, the first fixed portion 21 and the movable portion 10 are conductive. The movable portion 10 is electrically connected to the first fixed portion 21.

[0013] As shown in FIG. 1, the movable part 10 includes a plurality of annular parts 10A and a plurality of connecting parts 10B. A plane intersecting a first direction D1 from the base 20 to the first fixed part 21 is defined as a first plane. The first plane is, for example, an XY plane. The plurality of annular parts 10A are concentric with the first fixed part 21 as a center within the first plane. One of the plurality of connecting parts 10B connects one of the plurality of annular parts 10A to another one of the plurality of annular parts 10A. As shown in FIG. 1, the plurality of connecting parts 10B extend along an axial direction that passes through the first fixed part 21 and follows the first plane. The axial direction is, for example, a radial direction.

[0014] For example, the multiple annular portions 10A are aligned along the XY plane. The multiple annular portions 10A may be substantially circular.

[0015] The multiple annular portions 10A include a first annular portion 11, a second annular portion 12, and a third annular portion 13. The second annular portion 12 is located between the first fixed portion 21 and the first annular portion 11. The third annular portion 13 is located between the first fixed portion 21 and the second annular portion 12.

[0016] As shown in FIG. 1, the movable part 10 includes an inner edge portion 10i and an outer edge portion 10o. For example, the first annular part 11 includes the outer edge portion 10o. The third annular part 13 includes the inner edge portion 10i. The first annular part 11 is the outermost of the multiple annular parts 10A. The third annular part 13 is the innermost of the multiple annular parts 10A. As shown in FIG. 2, the second annular part 12 includes a first movable part electrode 12A.

[0017] 5 and 6 are schematic perspective views illustrating the sensor according to the first embodiment. In Fig. 5 and Fig. 6, the movable part 10 is illustrated. In Fig. 5, the fixed electrode 40 is illustrated in a cross section taken along line A1-A2 in Fig. 1. In Fig. 6, the fixed electrode 40 is illustrated in a cross section taken along line B1-B2 in Fig. 1. In these figures, portions of the fixed electrode 40 other than these cross sections are omitted.

[0018] 4(a) and 5, the first fixed electrode 41 is fixed to the base 20. As shown in Figures 1 and 2, the first fixed electrode 41 faces a part of the first annular portion 11. The first fixed electrode 41 is one of the multiple fixed electrodes 40.

[0019] As shown in FIG. 4(a) and FIG. 5, the second fixed electrode 42 is fixed to the base 20. The second fixed electrode 42 is one of the multiple fixed electrodes 40. As shown in FIG. 2, the second fixed electrode 42 faces the first movable part electrode 12A. 2 The first movable part electrode 12A is one of the first comb tooth electrode pair 31T. The first movable part electrode 12A is the other of the first comb tooth electrode pair 31T.

[0020] 2, the first movable electrode 12A includes a first movable base 12Ab and a plurality of first movable protrusions 12Ap. The plurality of first movable protrusions 12Ap are connected to the first movable base 12Ab.

[0021] 2, the second fixed electrode 42 includes a second fixed base 42b and a plurality of second fixed protrusions 42p. The plurality of second fixed protrusions 42p are connected to the second fixed base 42b.

[0022] At least a portion of one of the plurality of first movable protrusions 12Ap is between one of the plurality of second fixed protrusions 42p and another one of the plurality of second fixed protrusions 42p. At least a portion of one of the plurality of second fixed protrusions 42p is between one of the plurality of first movable protrusions 12Ap and another one of the plurality of first movable protrusions 12Ap.

[0023] As shown in FIG. 2, the first fixed electrode 41 includes a first fixed electrode surface 41f. The first fixed electrode surface 41f faces a part of the first annular portion 11. The first fixed electrode surface 41f is arc-shaped with the first fixed portion 21 as the center. A part of the first annular portion 11 includes a first annular surface 11f. The first annular surface 11f faces the first fixed electrode 41. The first annular surface 11f is arc-shaped with the first fixed portion 21 as the center. The first fixed electrode surface 41f is, for example, substantially parallel to the first annular surface 11f. The first fixed electrode 41 and the first annular portion 11 are, for example, a parallel plate electrode pair.

[0024] In this manner, the outer first fixed electrode 41 and the first annular portion 11 are, for example, a parallel plate electrode pair. The second fixed electrode 42 and the first movable portion electrode 12A (second annular portion 12) located inside these electrodes are a comb-teeth electrode pair.

[0025] As shown in FIG. 1, a control unit 70 may be provided. The control unit 70 may be included in the sensor 110. The control unit 70 may be provided separately from the sensor 110. The control unit 70 is electrically connected to the first fixed portion 21. This electrically connects the control unit 70 to the movable portion 10. The control unit 70 is electrically connected to the first fixed electrode 41 and the second fixed electrode 42. The control unit 70 applies a signal (voltage) between the movable portion 10 and the first fixed electrode 41. The control unit 70 applies a signal (voltage) between the movable portion 10 and the second fixed electrode 42. The applied signal displaces the movable portion 10.

[0026] For example, when a signal is applied between the movable part 10 and the first fixed electrode 41, the movable part 10 vibrates. For example, when a force (angular velocity) is applied from the outside, the vibration state of the movable part 10 changes. For example, vibration occurs in a direction intersecting the direction of vibration based on the application of the signal. By detecting the change in the vibration state, the force (angular velocity) can be detected. For example, the angle can be detected by the sensor 110. The first fixed electrode 41 can function as, for example, a driving electrode or a detection electrode.

[0027] For example, a voltage is applied between the first movable part electrode 12A (second annular part 12) and the second fixed electrode 42. By controlling the impedance of the current path to the first movable part electrode 12A and the second fixed electrode 42, for example, the damping characteristics of the vibration of the movable part 10 can be controlled. The second fixed electrode 42 can function as, for example, an adjustment electrode.

[0028] When a voltage is applied to the parallel plate electrode pair, the movable part 10 is displaced efficiently. A large displacement can be obtained. For example, in the parallel plate electrode pair, a large signal can be obtained even with a small displacement. By providing the parallel plate electrode pair on the outside, a larger amount of displacement can be obtained. By providing the parallel plate electrode pair on the outside, a signal with higher sensitivity can be obtained. However, when the parallel plate electrode pair is vibrated with a large amplitude, the linearity of the displacement with respect to the applied voltage is likely to decrease.

[0029] On the other hand, when a signal is applied to the comb-tooth electrode pair, the movable part 10 can be displaced with high linearity in response to the applied signal. The comb-tooth electrode pair has a wide range of displacement with high linearity. For example, the linearity of the displacement in the comb-tooth electrode pair is higher than that in the parallel plate electrode pair.

[0030] In the embodiment, a pair of parallel plate electrodes is provided on the outside, and a pair of comb-tooth electrodes is provided on the inside. This allows a large amount of displacement and a highly linear displacement to be obtained. This allows, for example, angle detection with low noise.

[0031] In the embodiment, the highly linear comb electrode pair can control vibration with higher accuracy, for example. The desired vibration can be easily obtained. This allows stable angle detection. The embodiment can provide a sensor with improved characteristics.

[0032] 1, the sensor 110 may include a detection electrode 41B. The detection electrode 41B may be included in a plurality of fixed electrodes 40. The detection electrode 41B is fixed to the base 20. The control unit 70 can acquire a detection signal Sd1 from the detection electrode 41B. The detection signal Sd1 corresponds to an external force. The detection signal Sd1 corresponds to, for example, a change in vibration of the movable part 10 in response to the external force.

[0033] 1, a second direction D2 from the first fixed portion 21 to the first fixed electrode 41 intersects with the first direction D1. The second direction D2 is along a first plane (e.g., an XY plane). The second direction D2 is, for example, the X-axis direction. The second fixed electrode 42 is between the first fixed portion 21 and the first fixed electrode 41 in the second direction D2.

[0034] As shown in FIG. 1, the sensor 110 may include a third fixed electrode 43. As shown in FIG. 4(b) and FIG. 6, the third fixed electrode 43 is fixed to the base 20. The third fixed electrode 43 is also one of the multiple fixed electrodes 40. The third fixed electrode 43 faces another part of the first annular portion 11. A third direction D3 from the first fixed portion 21 to the third fixed electrode 43 intersects with the first direction D1. The third direction D3 is along the first plane (e.g., the XY plane). The third direction D3 is inclined with respect to the second direction D2.

[0035] As shown in FIG. 3, the third fixed electrode 43 includes a third fixed electrode surface 43f. The third fixed electrode surface 43f faces another part of the first annular portion 11. The third fixed electrode surface 43f is arc-shaped with the first fixed portion 21 as the center. The other part of the first annular portion 11 includes a surface 11fa facing the third fixed electrode 43. The surface 11fa facing the third fixed electrode 43 is arc-shaped with the first fixed portion 21 as the center. The third fixed electrode 43 and the first annular portion 11 are a parallel plate electrode pair. For example, a parallel plate electrode pair is provided on the outermost circumference.

[0036] In this example, the angle between the second direction D2 and the third direction D3 is 22.5 degrees. This angle may be, for example, greater than 0 degrees and less than or equal to 22 degrees. This angle may be, for example, greater than or equal to 12 degrees and less than or equal to 33 degrees. This angle may be, for example, greater than or equal to 57 degrees and less than or equal to 78 degrees. 。

[0037] 1, the third fixed electrode 43 is adjacent to the first fixed electrode 41 on a circle centered on the first fixed portion 21. No other fixed electrodes are provided between the first fixed electrode 41 and the third fixed electrode 43.

[0038] As shown in Figures 1, 3, 4(b) and 6, the sensor 110 may include a fourth fixed electrode 44. The fourth fixed electrode 44 is fixed to the base 20. The fourth fixed electrode 44 is one of the plurality of fixed electrodes 40. As shown in Figure 3, the second annular portion 12 is Department The fourth fixed electrode 44 faces the second movable part electrode 12B. The fourth fixed electrode 44 is one of the second comb tooth electrode pair 32T. The second movable part electrode 12B is the other of the second comb tooth electrode pair 32T.

[0039] 3, the second movable part electrode 12B includes a second movable base 12Bb and a plurality of second movable protrusions 12Bp. The plurality of second movable protrusions 12Bp are connected to the second movable base 12Bb.

[0040] 3, the fourth fixed electrode 44 includes a fourth fixed base 44b and a plurality of fourth fixed protrusions 44p. The plurality of fourth fixed protrusions 44p are connected to the fourth fixed base 44b.

[0041] At least a portion of one of the plurality of second movable protrusions 12Bp is between one of the plurality of fourth fixed protrusions 44p and another one of the plurality of fourth fixed protrusions 44p. At least a portion of one of the plurality of fourth fixed protrusions 44p is between one of the plurality of second movable protrusions 12Bp and another one of the plurality of second movable protrusions 12Bp.

[0042] 1, the fourth fixed electrode 44 is located between the first fixed portion 21 and the third fixed electrode 43. A comb-tooth electrode pair is provided in an inner portion away from the outermost periphery.

[0043] For example, the vibration characteristics (or vibration state) of the movable part 10 may be adjusted by applying a signal (voltage) between the third fixed electrode 43 and the first annular part 11. On the other hand, a signal does not have to be applied between the fourth fixed electrode 44 of the second comb-tooth electrode pair 32T and the second movable part electrode 12B. For example, the second comb-tooth electrode pair 32T does not have to be used for operations such as driving, damping, or adjustment. By providing a comb-tooth electrode pair that is not used for operation, good symmetry can be obtained in the vibration characteristics of the movable part 10. High-precision control becomes easier. The characteristics can be more easily improved.

[0044] For example, the control unit 70 may be capable of performing a first operation and a second operation described below. FIG. 2 illustrates the first operation OP1. As shown in FIG. 2, the control unit 70 applies a first signal Sg1 between the first fixed unit 21 and the first fixed electrode 41 in the first operation OP1. The control unit 70 applies a second signal Sg2 between the first fixed unit 21 and the second fixed electrode 42 in the first operation OP1. Sg2 For example, the first signal Sg1 causes the movable part 10 to vibrate. The second signal Sg2 controls the vibration characteristics of the movable part 10. For example, the damping characteristics of the vibration are controlled.

[0045] FIG. 3 illustrates the second operation OP2. In the second operation OP2, the control unit 70 applies a third signal Sg3 between the first fixed portion 21 and the third fixed electrode 43. In the second operation OP2, the control unit 70 does not apply a signal between the first fixed portion 21 and the fourth fixed electrode 44. By applying the configuration of the comb-tooth electrode pair to the fourth fixed electrode 44 to which no signal is applied, a good pair is obtained. symmetry is obtained.

[0046] In the embodiment, the movable part 10 includes a plurality of concentric ring parts 10A. The displacement amount of each of the plurality of movable parts 10 is larger toward the outside. It is preferable that a vibration driving electrode (for example, the first fixed electrode 41, etc.), an adjustment electrode (for example, the third fixed electrode 43), or a detection electrode 41B is provided in the outermost peripheral part where the displacement is large. For example, it is preferable that a comb-tooth electrode pair that can obtain good linearity and make the damping characteristics variable is provided inside the outermost circumference. If the comb-tooth electrode pair is provided too far inside, the controllability of the damping characteristics may be reduced. Therefore, it is preferable that the comb-tooth electrode pair is provided inside the outermost circumference and not too far inside. For example, it is preferable that the comb-tooth electrode pair is provided in the middle between the inside and the outside, or between the middle and the outermost circumference.

[0047] 1, for example, the first annular portion 11 includes an outer edge portion 10o. The third annular portion 13 includes an inner edge portion 10i, and it is preferable that the number of annular portions 10A provided between the first annular portion 11 and the second annular portion 12 is equal to or less than the number of annular portions 10A provided between the second annular portion 12 and the third annular portion 13. Alternatively, it is preferable that some of the multiple annular portions 10A are provided between the second annular portion 12 and the third annular portion 13, and no annular portion 10A is provided between the first annular portion 11 and the second annular portion 12.

[0048] By providing the comb-tooth electrode pair in such a position, the vibration driving electrode (for example, the first fixed electrode 41), the adjustment electrode (for example, the third fixed electrode 43), or the detection electrode 41B is provided on the outermost circumference. The comb-tooth electrode pair is not provided excessively inside. High controllability of the damping characteristics can be obtained.

[0049] An example of a simulation result of the sensor characteristics will be described below. In the simulation, the number of the multiple annular portions 10A is 9. The number of the multiple annular portions 10A is numbered as N1. The number N1 of the annular portion 10A closest to the center (first fixed portion 21) is 1. The number N1 of the annular portion 10A farthest from the center (first fixed portion 21) is 9. In the simulation, the width of one of the multiple annular portions 10A is larger than the other widths of the multiple annular portions 10A. The width is, for example, a length along a radial direction (for example, it may be the X-axis direction). In the simulation, the position of the annular portion 10A whose width is different from the others is changed within a range of 1 to 9, where the number N1 is 1 to 9. The annular portions 10A whose widths are different correspond to the annular portions 10A on which the comb-tooth electrode pairs are provided.

[0050] 7(a) and 7(b) are graphs illustrating the characteristics of the sensor. The horizontal axis of these figures corresponds to the number N1 of the multiple annular portions 10A. The vertical axis is the resonance frequency f1. Fig. 7(a) corresponds to vibration along the X-axis direction. Fig. 7(b) corresponds to vibration along a direction inclined by 45 degrees with respect to the X-axis direction.

[0051] As shown in Figures 7(a) and 7(b), as the number N1 increases, the resonant frequency f1 decreases. These figures show the resonant frequency f0 when all of the multiple annular portions 10A have the same width. As shown in Figures 7(a) and 7(b), in the embodiment, it is preferable that the number N1 is 7 or less. This can suppress a decrease in the resonant frequency f1.

[0052] FIG. 8 is a graph illustrating the characteristics of the sensor. The horizontal axis of FIG. 8 corresponds to the number N1 of the multiple annular portions 10A. The vertical axis of FIG. 8 is the displacement ratio DP1 for each number N1. The displacement ratio DP1 is the ratio of the displacement amount in vibration of each annular portion 10A with number N1 to the displacement amount in vibration of an annular portion 10A with number N1 of 9. As shown in FIG. 8, when number N1 is 7 or less, the smaller number N1 is, the smaller the displacement ratio DP1 is. In the embodiment, it is preferable that the displacement ratio DP1 is 0.7 or more. This allows a practically large displacement ratio DP1 to be obtained in the comb-tooth electrode pair. From the results of FIG. 8, it is preferable that number N1 is 5 or more.

[0053] From the results of Figs. 7(a), 7(b) and 8, it is preferable that the number N1 is 5 or more and 7 or less. In the embodiment, the number of the multiple annular portions 10A is defined as NM1. It is preferable that the number of the annular portions 10A on which the comb-tooth electrode pairs are provided is a first integer or more and a second integer or less. The first integer is the smallest integer that is 1 / 2 or more of NM1. The second integer is the largest integer that is 7 / 10 or less of NM1.

[0054] As shown in FIG. 1, in the embodiment, the variable resistor Rc1 may be electrically connected to the second fixed electrode 42. The variable resistor Rc1 may be included in the control unit 70. The variable resistor Rc1 may be included in an element unit including the movable part 10 and the first fixed electrode 41. A switch 42s may be provided between the variable resistor Rc1 and the second fixed electrode 42. The control unit 70 can apply a voltage between the first movable part electrode 12A (the second annular part 12) and the second fixed electrode 42 via the variable resistor Rc1. By changing the resistance of the variable resistor Rc1, the first movable part electrode 12A and the second fixed electrode 42 function as a variable damper. The damping characteristics (e.g., damping coefficient) of the vibration of the movable part 10 can be controlled.

[0055] For example, by appropriately controlling the damping coefficient, it is possible to suppress the asymmetry of the vibration characteristics of the movable part 10. This makes it possible to suppress the angle drift, and thus obtain higher accuracy.

[0056] 1, another fixed electrode of the parallel plate electrode pair may be provided at a position point-symmetrical to first fixed electrode 41 with first fixed portion 21 as the center. Another fixed electrode of the parallel plate electrode pair may be provided in a direction perpendicular to the direction from first fixed portion 21 to first fixed electrode 41. Another fixed electrode of the parallel plate electrode pair may be provided in a direction at an angle of 45 degrees to the direction from first fixed portion 21 to first fixed electrode 41. The other fixed electrode of the parallel plate electrode pair may operate in the same manner as first fixed electrode 41.

[0057] 1, another fixed electrode of the comb-shaped electrode pair may be provided at a position point-symmetrical to the second fixed electrode 42 with the first fixed portion 21 as the center. The other fixed electrode of the comb-shaped electrode pair may be provided in a direction perpendicular to the direction from the first fixed portion 21 to the second fixed electrode 42. The other fixed electrode of the comb-shaped electrode pair may be provided in a direction at an angle of 45 degrees to the direction from the first fixed portion 21 to the second fixed electrode 42. The other fixed electrode of the comb-shaped electrode pair may operate in the same manner as the second fixed electrode 42.

[0058] 1, another fixed electrode of the parallel plate electrode pair may be provided at a position point-symmetrical to third fixed electrode 43 with first fixed portion 21 as the center. Another fixed electrode of the parallel plate electrode pair may be provided in a direction perpendicular to the direction from first fixed portion 21 to third fixed electrode 43. Another fixed electrode of the parallel plate electrode pair may be provided in a direction at an angle of 45 degrees to the direction from first fixed portion 21 to third fixed electrode 43. The other fixed electrode of the parallel plate electrode pair may operate in the same manner as third fixed electrode 43.

[0059] 1, another fixed electrode of the comb-shaped electrode pair may be provided at a position point-symmetrical to the fourth fixed electrode 44 with first fixed portion 21 as the center. Another fixed electrode of the comb-shaped electrode pair may be provided in a direction perpendicular to the direction from first fixed portion 21 to fourth fixed electrode 44. Another fixed electrode of the comb-shaped electrode pair may be provided in a direction at an angle of 45 degrees to the direction from first fixed portion 21 to fourth fixed electrode 44.

[0060] Some example operations performed by the sensor 110 are described below. 9 to 12 are schematic plan views illustrating the operation of the sensor. In operation PP1 illustrated in FIG. 9, an excitation signal is supplied from the control unit 70 to the first fixed electrode 41 and the other fixed electrode 41A. In this example, the angle between the direction from the first fixed portion 21 to the first fixed electrode 41 and the direction from the first fixed portion 21 to the other fixed electrode 41A is substantially 45 degrees. Operation PP1 is, for example, an excitation operation. For example, in operation PP1, a signal is applied to the second fixed electrode 42 via a variable resistor Rc (see FIG. 1). For example, the attenuation characteristics are adjusted.

[0061] 10, a signal generated in detection electrode 41B and a signal generated in another fixed electrode 41D are detected by control unit 70. The angle between the direction from first fixed portion 21 to detection electrode 41B and the direction from first fixed portion 21 to another fixed electrode 41D is substantially 90 degrees. In this example, the angle between the direction from first fixed portion 21 to detection electrode 41B and the direction from first fixed portion 21 to first fixed electrode 41 is substantially 90 degrees.

[0062] In operation PP2, for example, a signal occurring at another fixed electrode 41C and a signal occurring at another fixed electrode 41E may be detected by control unit 70. The angle between the direction from first fixed portion 21 to another fixed electrode 41C and the direction from first fixed portion 21 to another fixed electrode 41E is substantially 90 degrees.

[0063] In operation PP2, for example, a signal occurring at another fixed electrode 41G and a signal occurring at another fixed electrode 41E may be detected by control unit 70. The angle between the direction from first fixed portion 21 to another fixed electrode 41G and the direction from first fixed portion 21 to another fixed electrode 41E is substantially 90 degrees.

[0064] 11, a signal for adjusting the frequency is supplied from the control unit 70 to at least one of the other fixed electrode 41E and the other fixed electrode 41F. The angle between the direction from the first fixed unit 21 to the other fixed electrode 41E and the direction from the first fixed unit 21 to the other fixed electrode 41F is substantially 45 In this example, the angle between the direction from the first fixed portion 21 to the first fixed electrode 41 and the direction from the first fixed portion 21 to the other fixed electrode 41F is substantially 90 The operation PP1 is, for example, a frequency adjustment operation.

[0065] In one example of operation PP4 illustrated in FIG. 12, the control unit 70 supplies a vibration adjustment signal to the third fixed electrode 43, the other fixed electrode 43B, the other fixed electrode 43D, and the other fixed electrode 43F. In another example of operation PP4, the control unit 70 supplies a vibration adjustment signal to the other fixed electrode 43A, the other fixed electrode 43C, the other fixed electrode 43E, and the other fixed electrode 43F. E A signal for vibration adjustment is supplied to the. The angle between the direction from the first fixed portion 21 to the third fixed electrode 43 and the direction from the first fixed portion 21 to the other fixed electrode 43B is substantially 90 degrees. The angle from the direction from the first fixed portion 21 to the third fixed electrode 43 to the direction from the first fixed portion 21 to the other fixed electrode 43D is substantially 180 degrees. The angle from the direction from the first fixed portion 21 to the third fixed electrode 43 to the direction from the first fixed portion 21 to the other fixed electrode 43F is substantially 270 degrees. The angle from the direction from the first fixed portion 21 to the third fixed electrode 43 to the direction from the first fixed portion 21 to the other fixed electrode 43A is substantially 45 degrees. The angle from the direction from the first fixed portion 21 to the other fixed electrode 43A to the direction from the first fixed portion 21 to the other fixed electrode 43C is substantially 90 degrees. The angle from the direction from first fixed portion 21 to another fixed electrode 43A to the direction from first fixed portion 21 to another fixed electrode 43E is substantially 27 0 degrees. The angle from the direction from first fixed portion 21 to another fixed electrode 43A to the direction from first fixed portion 21 to another fixed electrode 43G is substantially 180 degrees. Operation PP4 is, for example, a quadrature control operation.

[0066] The embodiment may include the following configurations (e.g., technical solutions). (Configuration 1) A substrate; A first fixing portion fixed to the base body; a movable part supported by the first fixed part, a first gap being provided between the base and the movable part, the movable part including a plurality of annular parts and a plurality of connecting parts, the plurality of annular parts being concentric with the first fixed part in a first plane intersecting a first direction from the base to the first fixed part, one of the plurality of connecting parts connecting one of the plurality of annular parts to another of the plurality of annular parts, the plurality of annular parts including a first annular part, a second annular part, and a third annular part, the second annular part being between the first fixed part and the first annular part, the third annular part being between the first fixed part and the second annular part, and the second annular part including a first movable part electrode; a first fixed electrode fixed to the base and facing a portion of the first annular portion; a second fixed electrode fixed to the base and facing the first movable portion electrode, the second fixed electrode being one of a first comb-teeth electrode pair, and the first movable portion electrode being the other of the first comb-teeth electrode pair; A sensor equipped with

[0067] (Configuration 2) the movable portion includes an inner edge portion and an outer edge portion; the first annular portion includes the outer edge portion, the third annular portion includes the inner edge portion, 2. The sensor of claim 1, wherein the number of annular portions provided between the first annular portion and the second annular portion is less than or equal to the number of annular portions provided between the second annular portion and the third annular portion.

[0068] (Configuration 3) the movable portion includes an inner edge portion and an outer edge portion; the first annular portion includes the outer edge portion, the third annular portion includes the inner edge portion, A portion of the plurality of annular portions is provided between the second annular portion and the third annular portion, 2. The sensor of claim 1, wherein no portion of the plurality of annular portions is provided between the first annular portion and the second annular portion.

[0069] (Configuration 4) The sensor of any one of configurations 1 to 3, wherein the plurality of annular portions are substantially circular.

[0070] (Configuration 5) The sensor according to any one of configurations 1 to 6, wherein the plurality of connection portions pass through the first fixed portion and extend along an axial direction along the first plane.

[0071] (Configuration 6) the first movable portion electrode includes a first movable base portion and a plurality of first movable protrusion portions; The plurality of first movable protrusions are connected to the first movable base, the second fixed electrode includes a second fixed base and a plurality of second fixed protrusions; the second fixing protrusions are connected to the second fixing base; At least a portion of one of the plurality of second annular projections is between one of the plurality of second fixing projections and another one of the plurality of second fixing projections; A sensor described in any one of configurations 1 to 5, wherein at least a portion of the one of the plurality of second fixed protrusions is between the one of the plurality of first movable protrusions and another one of the plurality of first movable protrusions.

[0072] (Configuration 7) the first fixed electrode includes a first fixed electrode surface facing the part of the first annular portion, the first fixed electrode surface having an arc shape centered on the first fixed portion, The sensor of any one of configurations 1 to 6, wherein the portion of the first annular portion includes a first annular portion surface that faces the first fixed electrode, and the first annular portion surface is arc-shaped with the first fixed portion as the center.

[0073] (Configuration 8) a second direction from the first fixed portion to the first fixed electrode intersects with the first direction and is aligned along the first plane; The sensor according to any one of configurations 1 to 7, wherein the second fixed electrode is located between the first fixed portion and the first fixed electrode in the second direction.

[0074] (Configuration 9) Further comprising a third fixed electrode fixed to the base, the third fixed electrode faces another part of the first annular portion, a third direction from the first fixed portion to the third fixed electrode intersects with the first direction and is aligned along the first plane; 9. The sensor of claim 8, wherein the third direction is inclined relative to the second direction.

[0075] (Configuration 10) the third fixed electrode includes a third fixed electrode surface facing the other part of the first annular portion, the third fixed electrode surface having an arc shape centered on the first fixed portion, The sensor of configuration 9, wherein the other part of the first annular portion includes a surface facing the third fixed electrode, and the surface facing the third fixed electrode is arc-shaped centered on the first fixed portion.

[0076] (Configuration 11) 11. The sensor of claim 9 or 10, wherein an angle between the second direction and the third direction is greater than or equal to 12 degrees and less than or equal to 33 degrees, or greater than or equal to 57 degrees and less than or equal to 78 degrees.

[0077] (Configuration 12) The sensor of configuration 9 or 10, wherein the third fixed electrode is adjacent to the first fixed electrode on a circle centered on the first fixed portion.

[0078] (Configuration 13) Further comprising a fourth fixed electrode fixed to the base, The second annular portion is a second movable Department An electrode is included. the fourth fixed electrode faces the second movable electrode, The sensor according to configuration 9 or 10, wherein the fourth fixed electrode is one of a second comb-teeth electrode pair, and the second movable part electrode is the other of the second comb-teeth electrode pair.

[0079] (Configuration 14) 14. The sensor of claim 13, wherein the fourth fixed electrode is between the first fixed portion and the third fixed electrode.

[0080] (Configuration 15) 14. The sensor of claim 13, wherein an angle between the second direction and the third direction is greater than 0 degrees and less than or equal to 22 degrees.

[0081] (Configuration 16) the first fixed portion and the movable portion are conductive, 16. The sensor according to any one of configurations 13 to 15, wherein the movable portion is electrically connected to the first fixed portion.

[0082] (Configuration 17) A control unit is further provided. The control unit is capable of performing a first operation, The sensor of configuration 16, wherein the control unit, in the first operation, applies a first signal between the first fixed portion and the first fixed electrode, and applies a second signal between the first fixed portion and the second fixed electrode.

[0083] (Configuration 18) 18. The sensor of claim 17, wherein the second signal controls a characteristic of the vibration of the movable part.

[0084] (Configuration 19) The control unit is capable of performing a second operation; The sensor of configuration 17 or 18, wherein, in the second operation, the control unit applies a third signal between the first fixed portion and the third fixed electrode, and does not apply a signal between the first fixed portion and the fourth fixed electrode.

[0085] (Configuration 20) further comprising a detection electrode fixed to the substrate; 20. The sensor according to any one of configurations 17 to 19, wherein the control unit is capable of acquiring a detection signal corresponding to an external force from the detection electrode.

[0086] According to the embodiment, a sensor capable of stable detection can be provided.

[0087] In this specification, "vertical" and "parallel" do not only mean strictly vertical and strictly parallel, but also include, for example, variations in the manufacturing process, and may mean substantially vertical and substantially parallel.

[0088] The above describes the embodiments of the present invention with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of each element included in the sensor, such as the base, fixed part, movable part, and control part, are included in the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from the known range.

[0089] Furthermore, any combination of two or more elements of each of the specific examples, within the scope of technical feasibility, is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0090] In addition, all sensors that can be implemented by a person skilled in the art by appropriately modifying the design based on the sensor described above as an embodiment of the present invention also belong to the scope of the present invention as long as they include the gist of the present invention.

[0091] In addition, within the scope of the concept of the present invention, a person skilled in the art may think of various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0092] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, and are included in the scope of the invention and its equivalents described in the claims. [Explanation of symbols]

[0093] 10...movable portion, 10A...annular portion, 10B...connection portion, 10i...inner edge portion, 10o...outer edge portion, 11-13...first to third annular portions, 11f...first annular surface, 11fa...surface, 12A, 12B...first and second movable portion electrodes, 12Ab, 12Bb...first and second movable base portions, 12Ap, 12Bp...first and second movable protrusion portions, 20...base, 21...first fixed portion, 31T, 32T...first and second comb-tooth electrode pairs, 40...fixed electrode, 41-44...first to fourth fixed electrodes, 41A-41D, 41F, 41G...fixed electrodes, 41E...detection electrode, 41f...first fixed electrode surface, 42b...second fixed base portion, 42p...second fixed protrusion, 42s...switch, 43f...third fixed electrode surface, 43A to 43G...fixed electrodes, 44b...fourth fixed base, 44p...fourth fixed protrusion, 70...control section, 110...sensor, D1 to D3...first to third directions, OP1, OP2...first and second operations, P1 to P4...portion, Rc1...variable resistor, Sd1...detection signal, Sg1 to Sg3...first to third signals, g1...first gap

Claims

1. A substrate; A first fixing portion fixed to the base body; a movable part supported by the first fixed part, a first gap being provided between the base and the movable part, the movable part including a plurality of annular parts and a plurality of connecting parts, the plurality of annular parts being concentric with the first fixed part in a first plane intersecting a first direction from the base to the first fixed part, one of the plurality of connecting parts connecting one of the plurality of annular parts to another of the plurality of annular parts, the plurality of annular parts including a first annular part, a second annular part, and a third annular part, the second annular part being between the first fixed part and the first annular part, the third annular part being between the first fixed part and the second annular part, and the second annular part including a first movable part electrode; a first fixed electrode fixed to the base and facing a portion of the first annular portion; a second fixed electrode fixed to the base and facing the first movable portion electrode, the second fixed electrode being one of a first comb-teeth electrode pair and the first movable portion electrode being the other of the first comb-teeth electrode pair; Equipped with the first fixed electrode and the first annular portion are a parallel plate electrode pair; The first fixed electrode functions as a driving electrode or a detection electrode, The second fixed electrode functions as an adjustment electrode.

2. the movable portion includes an inner edge portion and an outer edge portion; the first annular portion includes the outer edge portion, the third annular portion includes the inner edge portion, 2. The sensor according to claim 1, wherein the number of the annular portions provided between the first annular portion and the second annular portion is equal to or less than the number of the annular portions provided between the second annular portion and the third annular portion.

3. the movable portion includes an inner edge portion and an outer edge portion; the first annular portion includes the outer edge portion, the third annular portion includes the inner edge portion, A portion of the plurality of annular portions is provided between the second annular portion and the third annular portion, The sensor of claim 1 , wherein a portion of the plurality of annular portions is not provided between the first annular portion and the second annular portion.

4. the first fixed electrode includes a first fixed electrode surface facing the part of the first annular portion, the first fixed electrode surface having an arc shape centered on the first fixed portion, A sensor as described in any one of claims 1 to 3, wherein the portion of the first annular portion includes a first annular portion surface facing the first fixed electrode, and the first annular portion surface is arc-shaped with the first fixed portion as its center.

5. a second direction from the first fixed portion to the first fixed electrode intersects with the first direction and is along the first plane; The sensor according to claim 1 , wherein the second fixed electrode is located between the first fixed portion and the first fixed electrode in the second direction.

6. Further comprising a third fixed electrode fixed to the base, the third fixed electrode faces another part of the first annular portion, a third direction from the first fixed portion to the third fixed electrode intersects with the first direction and is aligned along the first plane; The sensor of claim 5 , wherein the third direction is oblique with respect to the second direction.

7. the third fixed electrode includes a third fixed electrode surface facing the other part of the first annular portion, the third fixed electrode surface having an arc shape centered on the first fixed portion, The sensor according to claim 6 , wherein the other part of the first annular portion includes a surface facing the third fixed electrode, and the surface facing the third fixed electrode is arc-shaped with the first fixed portion as a center.

8. Further comprising a fourth fixed electrode fixed to the base, the second annular portion includes a second movable portion electrode, the fourth fixed electrode faces the second movable electrode, 8. The sensor according to claim 6, wherein the fourth fixed electrode is one of a second pair of comb-teeth electrodes, and the second movable portion electrode is the other of the second pair of comb-teeth electrodes.

9. The sensor of claim 8 , wherein the fourth fixed electrode is between the first fixed portion and the third fixed electrode.

10. the first fixed portion and the movable portion are conductive, The sensor according to claim 8 , wherein the movable portion is electrically connected to the first fixed portion.

11. A control unit is further provided. The control unit is capable of performing a first operation, The sensor according to claim 10 , wherein, in the first operation, the control unit applies a first signal between the first fixed portion and the first fixed electrode, and applies a second signal between the first fixed portion and the second fixed electrode.

12. The control unit is capable of performing a second operation, The sensor according to claim 11 , wherein, in the second operation, the control unit applies a third signal between the first fixed portion and the third fixed electrode, and does not apply a signal between the first fixed portion and the fourth fixed electrode.

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