Sheath heater and substrate support device having same

Abstract

To provide a sheath heater with improved reliability, and alternatively, a substrate support device having the sheath heater with improved reliability.SOLUTION: A sheath heater according to the present invention includes a first metal wire, a first terminal connected to the first end of the first metal wire, a first conductive flexible member connected to the first terminal and connected to a second metal wire, a second terminal that is connected to the second end of the first metal wire, and a second conductive flexible member that is connected to the second terminal and connected to a third metal wire, and the first conductive flexible member and the second conductive flexible member are positioned adjacent to each other.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a sheathed heater, or to a substrate support apparatus having a sheathed heater. [Background technology]

[0002] A sheathed heater is a heater that holds a heating wire inside a metal tubular sheath and fills the gap between the metal sheath and the heating wire with an insulating material with high thermal conductivity. Since the surface of the heating element of a sheathed heater is electrically insulated, it can directly heat gases, liquids, metals, etc. In addition, sheathed heaters can be laid out in any shape, and due to their convenience, they are used for a variety of purposes. For this reason, there is an increasing demand for sheathed heaters with smaller diameters so that they can be laid out in more complex shapes to meet various needs. On the other hand, since sheathed heaters heat by passing electricity through the heating wire, it is also necessary to devise a way to prevent short circuits and damage to the heating wire.

[0003] For example, Patent Document 1 describes a sheath heater that includes a metal sheath, a heating wire that is arranged with a gap within the metal sheath, is band-shaped, and is rotated about the axial direction of the metal sheath, an insulating material that is arranged in the gap, and connection terminals that are arranged at one end of the metal sheath and electrically connect to both ends of the heating wire, in order to prevent breakage of the heating wire.

[0004] Furthermore, Patent Document 2 describes a lead wire connection terminal for a sheath heater that connects the end of the heating wire of the sheath heater to the end of the lead wire via a connecting conductor having spring properties, for the purpose of alleviating thermal distortion associated with thermal stress generated at the connection between the sheath and the lead wire. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2018-181586 A [Patent Document 2] JP 2011-253691 A Summary of the Invention [Problem to be solved by the invention]

[0006] An object of one embodiment of the present invention is to provide a sheathed heater with improved reliability. Alternatively, an object of one embodiment of the present invention is to provide a substrate support device having a sheathed heater with improved reliability. [Means for solving the problem]

[0007] According to one embodiment of the present invention, a sheath heater is provided, comprising a first metal wire, a first terminal connected to a first end of the first metal wire, a first conductive flexible member connected to the first terminal and to a second metal wire, a second terminal connected to a second end of the first metal wire, and a second conductive flexible member connected to the second terminal and to a third metal wire, wherein the first conductive flexible member and the second conductive flexible member are arranged adjacent to each other.

[0008] The first conductive flexible member and the second conductive flexible member may be selected from a metal coil, a twisted wire, and a flat braid.

[0009] The sheath heater has a shape having a bent portion, and the first conductive flexible member and the second conductive flexible member are disposed at the bent portion.

[0010] The conductive flexible member may be a metal coil, and at the bend, the pitch of the second metal coil may be greater than the pitch of the first metal coil.

[0011] The sheath heater may have two or more bent portions.

[0012] The sheath heater may further include a metal sheath covering the first metal wire, the first terminal, the second metal wire, the first conductive flexible member, the second terminal, the third metal wire, and the second conductive flexible member, and the radius of curvature of the bent portion may be two or more times the diameter of the metal sheath.

[0013] The device may further include insulating particles filled in the metal sheath, the insulating particles being disposed between the first conductive flexible member and the second conductive flexible member, and the distance between the first conductive flexible member and the second conductive flexible member may be 0.14 mm or more.

[0014] Moreover, according to one embodiment of the present invention, there is provided a substrate support apparatus comprising any one of the sheath heaters described above. Effect of the Invention

[0015] According to an embodiment of the present invention, a sheathed heater having improved reliability can be provided. Alternatively, according to an embodiment of the present invention, a substrate support apparatus having a sheathed heater having improved reliability can be provided. [Brief description of the drawings]

[0016] [Figure 1] FIG. 1 is a schematic diagram of a sheath heater 100 according to one embodiment of the present invention. [Diagram 2] 1 is a schematic diagram showing a cross-sectional structure of a sheath heater 100 according to an embodiment of the present invention. [Diagram 3] 1 shows a cross-sectional end view of a flexure 191 according to one embodiment of the present invention. [Figure 4] FIG. 1 is a perspective view of a substrate support apparatus 1000 according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] A sheathed heater and a substrate support device according to an embodiment of the present invention will be described below with reference to the drawings. Note that the following embodiment is an example of the sheathed heater and the substrate support device of the present invention, and the sheathed heater and the substrate support device of the present invention are not limited to the following embodiment.

[0018] In addition, in order to clarify the description, the drawings may show the width, thickness, shape, etc. of each part in a schematic manner compared to the actual embodiment, but these are merely examples and do not limit the interpretation of the present invention. In this specification and each drawing, elements having the same functions as those explained in the previous drawings may be given the same reference numerals, and duplicated explanations may be omitted.

[0019] FIG. 1 is a schematic diagram of a sheath heater 100 according to an embodiment of the present invention. The sheath heater 100 has a structure in which two non-heating wires 111 are drawn out from one end of a metal sheath 101. As an example, the sheath heater 100 has a spiral arrangement in a plan view seen from the non-heating wire 111 side, but is not limited to this. The sheath heater 100 also has at least one bent portion. Alternatively, the sheath heater 100 may have two or more bent portions. In FIG. 1, an example in which the sheath heater 100 has a bent portion 191 and a bent portion 193 is shown, but the sheath heater 100 may have three or more bent portions, without being limited to this.

[0020] FIG. 2 is a schematic diagram showing a cross-sectional structure of a sheath heater 100 according to an embodiment of the present invention. FIG. 2 shows a structure in which the sheath heater 100 is arranged in a straight line. The sheath heater 100 includes a heating wire (also referred to as a first metal wire) 121, a first terminal 115a connected to one end of the heating wire 121, and a first conductive flexible member 113a connected to the first terminal 115a and connected to a first non-heating wire (also referred to as a second metal wire) 111a. The sheath heater 100 also includes a second terminal 115b connected to the other end of the heating wire 121, and a second conductive flexible member 113b connected to the second terminal 115b and connected to a second non-heating wire (also referred to as a third metal wire) 111b. In the sheath heater 100, the first conductive flexible member 113a and the second conductive flexible member 113b are disposed adjacent to each other. The first terminal 115a and the second terminal 115b are disposed adjacent to each other. The first non-heating wire 111a and the second non-heating wire 111b are disposed adjacent to each other.

[0021] 2, the dashed lines indicate a line passing through the centers of the heating wire 121, the first terminal 115a, the first conductive flexible member 113a, and the first non-heating wire 111a, and a line passing through the centers of the heating wire 121, the second terminal 115b, the second conductive flexible member 113b, and the second non-heating wire 111b. The heating wire 121 is arranged to be folded back at the tip of the sheath heater 100. The first terminal 115a is a terminal for connecting the heating wire 121 and the first non-heating wire 111a, but in this embodiment, the first terminal 115a and the first non-heating wire 111a are connected via the first conductive flexible member 113a. In addition, the second terminal 115b is a terminal for connecting the heating wire 121 and the second non-heating wire 111b, but in this embodiment, the second terminal 115b and the second non-heating wire 111b are connected via the second conductive flexible member 113b. The first non-heating wire 111a, the first conductive flexible member 113a, the first terminal 115a, the heating wire 121, the second terminal 115b, the second conductive flexible member 113b, and the second non-heating wire 111b are electrically connected.

[0022] In the sheath heater 100, the metal sheath 101 covers the heating wire 121, the first terminal 115a, the first conductive flexible member 113a, the first non-heating wire 111a, the second terminal 115b, the second conductive flexible member 113b, and the second non-heating wire 111b. The metal sheath 101 is filled with insulating particles 131. The insulating particles 131 are disposed between the heating wire 121 folded back at the tip of the sheath heater 100, between the first terminal 115a and the second terminal 115b, between the first conductive flexible member 113a and the second conductive flexible member 113b, and between the first non-heating wire 111a and the second non-heating wire 111b. Furthermore, insulating particles 131 are arranged between the metal sheath 101 and the heating wire 121, the first terminal 115a, the first conductive flexible member 113a, the first non-heating wire 111a, the second terminal 115b, the second conductive flexible member 113b, and the second non-heating wire 111b.

[0023] In one embodiment, one type of particle selected from magnesium oxide particles, aluminum oxide particles, boron nitride particles, silicon nitride particles, aluminum nitride particles, and aluminum nitride ceramic particles can be used as the insulating particles 131. In one embodiment, it is preferable to use magnesium oxide particles as the insulating particles 131.

[0024] In one embodiment, the heating wire 121 can use a conductor that generates Joule heat when electricity is applied. Specifically, the heating wire 121 can contain a metal selected from tungsten, tantalum, molybdenum, platinum, nickel, chromium, cobalt, and zirconium. The metal may be an alloy containing these metals, for example, an alloy of nickel and chromium, an alloy containing nickel, chromium, and cobalt, or a zirconium alloy. In FIG. 2, the heating wire 121 is illustrated as an example in which a linear conductor has a coiled structure, but is not limited thereto, and a strip-shaped conductor may also have a coiled structure.

[0025] In one embodiment, the first terminal 115a, the first conductive flexible member 113a, the first non-heating wire 111a, the second terminal 115b, the second conductive flexible member 113b, and the second non-heating wire 111b constitute a non-heating region. For these members arranged in the non-heating region, a conductor that does not generate Joule heat or does not generate Joule heat easily when current is applied can be used. In one embodiment, for these members arranged in the non-heating region, a metal selected from pure iron, cast iron, iron alloy, pure nickel, nickel alloy, pure copper, and copper alloy can be used. In FIG. 2, the first conductive flexible member 113a and the second conductive flexible member 113b are shown as an example of a metal coil in which a linear conductor is coiled, but the conductive flexible member is not limited to this. For the first conductive flexible member 113a and the second conductive flexible member 113b, an elastic conductive wire can be used. For example, first conductive flexible member 113a and second conductive flexible member 113b may be a metal coil having a band-shaped conductor in a coiled structure, or a twisted wire or flat braided wire may be used.

[0026] The metal sheath 101 is a cover for protecting the heating wire 121, and is also a member for efficiently transmitting the thermal energy generated by the heating wire 121 to an object to be heated. The thermal conductivity of the heating wire 121 is preferably 200 W / mK or more. In one embodiment, the metal sheath 101 can be made of pure aluminum, an aluminum alloy, stainless steel, pure nickel, a nickel alloy, pure copper, a copper alloy, pure titanium, a titanium alloy, or ceramics.

[0027] FIG. 3 shows a cross-sectional end view of the bent portion 191. The first conductive flexible member 113a and the second conductive flexible member 113b are disposed in the bent portion 191. Although not shown, the first conductive flexible member 113a and the second conductive flexible member 113b are also disposed in the bent portion 193. In FIG. 3, the dashed line indicates the center line of the sheath heater 100. In the bent portion 191, the first conductive flexible member 113a and the second conductive flexible member 113b are disposed adjacent to each other, but the distance between the first conductive flexible member 113a and the second conductive flexible member 113b does not change significantly, and preferably does not change very much, in comparison with the bent portion 191 and the non-bent portion.

[0028] In a conventional sheathed heater having a so-called two-core structure in which the heating wire is bent inside a metal sheath and two non-heating wires connected to the heating wire are pulled out as in this embodiment, when the sheathed heater is bent, the nickel rod used for the non-heating wire does not expand or contract in the axial direction, so that the outer non-heating wire is pulled due to the difference in the path between the inside and outside of the bend, and a force acts to move it to the inside of the bend. This causes the heating wires or the non-heating wires to come close to each other, causing a short circuit or damage.

[0029] In the sheath heater 100 of this embodiment, when the first conductive flexible member 113a and the second conductive flexible member 113b arranged in the non-heat generating region are bent at the bent portion 191 or the bent portion 193, they expand and contract in the center line direction of the sheath heater 100 or in the axial direction in which the first conductive flexible member 113a and the second conductive flexible member 113b are arranged. For this reason, when the first conductive flexible member 113a and the second conductive flexible member 113b are metal coils, in the bent portion 191, the pitch P2 of the second metal coil 113b is larger than the pitch P1 of the first metal coil 113a.

[0030] In the sheath heater 100 of this embodiment, even if the second conductive flexible member 113b located on the outside of the bent portion 191 is pulled, the second conductive flexible member 113b stretches, thereby suppressing the force that tends to move toward the inside of the bent portion. Therefore, when the sheath heater 100 is bent, it is possible to suppress the approach of the folded heating wires 121 to each other, the approach of the first terminal 115a and the second terminal 115b, the approach of the first conductive flexible member 113a and the second conductive flexible member 113b, and / or the approach of the first non-heating wire 111a and the second non-heating wire 111b. This makes it possible to ensure a stable insulation distance between the folded heating wires 121, between the first terminal 115a and the second terminal 115b, between the first conductive flexible member 113a and the second conductive flexible member 113b, and / or between the first non-heating wire 111a and the second non-heating wire 111b, thereby preventing short circuits in the sheath heater 100.

[0031] For this reason, in one embodiment, the sheath heater 100 can have a distance between the first conductive flexible member 113a and the second conductive flexible member 113b of 0.14 mm or more. In the sheath heater 100 of this embodiment, which uses a type of particle selected from magnesium oxide particles, aluminum oxide particles, boron nitride particles, silicon nitride particles, aluminum nitride particles, and aluminum nitride ceramic particles as the insulating material particles 131, the distance between the first conductive flexible member 113a and the second conductive flexible member 113b is set to 0.14 mm or more, and the distances between the folded heating wires 121, the first terminal 115a and the second terminal 115b, and the first non-heating wire 111a and the second non-heating wire 111b are maintained to 0.14 mm or more, thereby preventing disconnection due to a short circuit at an AC rated voltage of 208 V.

[0032] In one embodiment, the outer diameters of the first conductive flexible member 113a, the second conductive flexible member 113b and the heating wire 121 are preferably 4.2 mm or less.

[0033] In one embodiment, the shortest insulation distance between the heating wire 121, the first terminal 115a, the first conductive flexible member 113a, the first non-heating wire 111a, the second terminal 115b, the second conductive flexible member 113b, and the second non-heating wire 111b and the inner diameter of the metal sheath 101 can be 0.33 mm to 0.99 mm when the leakage current when applying 500 VAC to 1500 VAC is 1 mA or less. Therefore, in this embodiment, the outer diameter φ of the metal sheath 101 can be 3 mm to 10 mm.

[0034] Furthermore, in one embodiment, the sheath heater 100 can have a radius of curvature R of the bent portions 191 and 193 that is at least twice the diameter of the metal sheath 101. That is, even if the bent portions 191 and 193 are bent to have a radius of curvature R that is twice the diameter of the metal sheath 101, a stable insulation distance can be ensured due to the elasticity of the first conductive flexible member 113a and the second conductive flexible member 113b, so that a short circuit in the sheath heater 100 can be prevented.

[0035] The first conductive flexible member 113a and the second conductive flexible member 113b can obtain the effects of the present application by applying them to a range that rises vertically from the heater plate surface of a substrate support device described later or that is suddenly folded back within the surface. In addition, when the sheath heater 100 is bent, the displacement of the folded heating wires 121, the first terminal 115a and the second terminal 115b, the first conductive flexible member 113a and the second conductive flexible member 113b, and / or the first non-heating wire 111a and the second non-heating wire 111b can be suppressed, thereby improving the degree of freedom in the layout of the sheath heater 100.

[0036] [Substrate support device] An example in which the above-mentioned sheath heater 100 is applied to a substrate supporting device 1000 will be described. FIG. 4 is a perspective view of the substrate supporting device 1000 according to an embodiment of the present invention. The substrate supporting device 1000 includes a heater plate section 1100 and a shaft section 1200, and the sheath heater 100 is disposed inside the heater plate section 1100. The shaft section 1200 is connected to the center of the heater plate section 1100 on the opposite side to the upper surface of the heater plate section 1100. The shaft section 1200 has a hollow structure 1210. The hollow structure 1210 of the shaft section 1200 is provided with wiring 1230 that is connected to the sheath heater 100 and is connected to an external control device (not shown). In the substrate supporting device 1000, an insulating film 1110 is formed on the heater plate section 1100.

[0037] As described above, in the sheath heater 100, the effects of the present application can be obtained by applying the first conductive flexible member 113a and the second conductive flexible member 113b to a range that rises vertically from the heater plate portion 1100 of the substrate support device 1000 or that suddenly folds back within the plane of the heater plate portion 1100.

[0038] The substrate support apparatus 1000 is disposed in a semiconductor manufacturing apparatus used for processes such as chemical vapor deposition (CVD) and surface modification in the manufacture of semiconductor devices. For this reason, the substrate support apparatus 1000 is used in a high-temperature environment of about 500° C. By arranging the first conductive flexible member 113a and the second conductive flexible member 113b on the sheath heater 100, the substrate support apparatus 1000 ensures a stable insulation distance, thereby preventing short circuits from occurring in environments from room temperature to high temperatures. [Explanation of symbols]

[0039] 100 sheath heater, 101 metal sheath, 111 non-heating wire, 111a non-heating wire, 111b non-heating wire, 113a conductive flexible member, 113b conductive flexible member, 115a first terminal, 115b second terminal, 121 heating wire, 131 insulating particles, 191 bending portion, 193 bending portion, 1000 substrate support device, 1100 heater plate portion, 1110 insulating film, 1200 shaft portion, 1210 hollow structure, 1230 wiring

Claims

1. a first metal line; a first terminal connected to a first end of the first metal wire; and a first conductive flexible member connected to the first terminal and to a second metal wire; a second terminal connected to a second end of the first metal wire; and a second conductive flexible member connected to the second terminal and connected to a third metal wire. a metal sheath that covers the first metal wire, the first terminal, the first conductive flexible member, a portion of the second metal wire connected to the first conductive flexible member, the second terminal, the second conductive flexible member, and a portion of the third metal wire connected to the second conductive flexible member; the first metal wire is a heating wire, and the second metal wire and the third metal wire are non-heating wires; the first conductive flexible member and the second conductive flexible member are disposed adjacent to each other; A sheath heater, wherein a portion of the second metal wire on the opposite side to the side connected to the first conductive flexible member and a portion of the third metal wire on the opposite side to the side connected to the second conductive flexible member are pulled out from one end of the metal sheath.

2. The sheath heater according to claim 1 , wherein the first conductive flexible member and the second conductive flexible member are selected from a metal coil, a twisted wire, and a flat braided wire.

3. The sheath heater has a shape having a bent portion, The sheath heater according to claim 1 , wherein the first conductive flexible member and the second conductive flexible member are disposed at the bent portion.

4. the first conductive flexible member and the second conductive flexible member are metal coils; The sheath heater according to claim 3 , wherein the pitch of the second metal coil is larger than the pitch of the first metal coil in the bent portion.

5. The sheath heater according to claim 3 , wherein the sheath heater has two or more bent portions.

6. The sheath heater according to claim 3 , wherein the radius of curvature of the bent portion is at least twice the diameter of the metal sheath.

7. Further comprising insulating particles filled in the metal sheath; the insulating particles are disposed between the first conductive flexible member and the second conductive flexible member; 7. The sheath heater according to claim 6, wherein the distance between the first conductive flexible member and the second conductive flexible member is 0.14 mm or more.

8. A substrate supporting device comprising the sheath heater according to any one of claims 1 to 7.

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