Rotating Devices, Motors, and Pumps

Abstract

Provided is a novel technique that utilizes a vibrator and is applicable to various uses. This rotating apparatus comprises a vibrator having a vibrating surface that is perpendicular to a direction of vibration, and an opposing element that has an opposing surface facing the vibrating surface and rotates about the vibration direction of the vibrator. The vibrating surface and the opposing surface have parallel regions that face each other in parallel, and an impeller region formed in a three-dimensional manner on at least one of the surfaces.

Description

[Technical field]

[0001] The present invention relates to a rotating device, a motor, and a pump. [Background technology]

[0002] In recent years, vibration waves such as ultrasound have been used for various purposes. Patent Document 1 discloses a technology that uses ultrasound with a simple structure to obtain a pump effect. Non-Patent Document 1 discloses a phenomenon in which an object is attracted to a vibrator when the object is brought close to the vibrator. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2013-068136 A [Non-patent literature]

[0004] [Non-Patent Document 1] T. Hatanaka, Y. Koike, K. Nakamura, S. Ueha, Y. Hashimoto, “Characteristics of Underwater Near-Field Acoustic Radiation Force Acting on a Planar Object”, Japanese Journal of Applied Physics, Vol. 38 (1999), No. 11A, pp. L1284-L1285 Summary of the Invention [Problem to be solved by the invention]

[0005] It is expected that new technologies using oscillators will be developed that can be applied to a variety of applications.

[0006] An object of the present invention is to provide a novel technique that utilizes an oscillator and can be applied to various applications. [Means for solving the problem]

[0007] A rotation device according to one embodiment of the present invention comprises a vibrator having a vibration surface perpendicular to a vibration direction, and an opposing element having an opposing surface facing the vibration surface and rotating around an axis along the vibration direction of the vibrator, the vibration surface and the opposing surface each having parallel regions that face each other in parallel, and an impeller region formed three-dimensionally on at least one of them. Effect of the Invention

[0008] According to the present invention, it is possible to provide a novel technique that utilizes an oscillator and is applicable to various uses. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a conceptual diagram illustrating an example of a configuration of a rotation device according to an embodiment. [Figure 2A] FIG. 2 is a conceptual diagram illustrating an example of a configuration of a transducer according to an embodiment. [Figure 2B] FIG. 2 is a conceptual diagram illustrating an example of a configuration of a transducer according to an embodiment. [Diagram 3] 5A and 5B are diagrams illustrating an example of vibration characteristics of a vibrator according to an embodiment. [Figure 4A] FIG. 2 is a diagram illustrating an example of a shape of a vibrator according to an embodiment. [Figure 4B] FIG. 2 is a diagram illustrating an example of a shape of a vibrator according to an embodiment. [Figure 4C] FIG. 2 is a diagram illustrating an example of a shape of a vibrator according to an embodiment. [Figure 4D] FIG. 2 is a diagram illustrating an example of a shape of a vibrator according to an embodiment. [Figure 4E] FIG. 2 is a diagram illustrating an example of a shape of a vibrator according to an embodiment. [Figure 5A] FIG. 13 is a diagram showing the relationship between the vibration amplitude of the vibration device and the measurement results of the rotation speed for an opposing element according to an embodiment. [Figure 5B]FIG. 13 is a diagram showing the relationship between the vibration amplitude of the vibration device and the measurement results of the rotation speed for an opposing element according to an embodiment. [Figure 5C] FIG. 13 is a diagram showing the relationship between the vibration amplitude of the vibration device and the measurement results of the rotation speed for an opposing element according to an embodiment. [Figure 5D] FIG. 13 is a diagram showing the relationship between the vibration amplitude of the vibration device and the measurement results of the rotation speed for an opposing element according to an embodiment. [Figure 5E] FIG. 13 is a diagram showing the relationship between the vibration amplitude of the vibration device and the measurement results of the rotation speed for an opposing element according to an embodiment. [Figure 6] FIG. 11 is a conceptual diagram for explaining a rotation direction of an opposing element according to an embodiment. [Figure 7A] FIG. 13 is a conceptual diagram for explaining a modified example of a rotation device according to an embodiment. [Figure 7B] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 8A] FIG. 13 is a conceptual diagram for explaining a modified example of a rotation device according to an embodiment. [Figure 8B] FIG. 13 is a conceptual diagram for explaining a modified example of a rotation device according to an embodiment. [Figure 9A] FIG. 13 is a conceptual diagram for explaining a modified example of a rotation device according to an embodiment. [Figure 9B] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 9C] FIG. 13 is a conceptual diagram for explaining a modified example of a rotation device according to an embodiment. [Figure 9D] FIG. 13 is a conceptual diagram for explaining a modified example of a rotation device according to an embodiment. [Figure 9E] FIG. 13 is a conceptual diagram for explaining a modified example of a rotation device according to an embodiment. [Figure 10A] FIG. 13 is a conceptual diagram for explaining a modified example of the vibration device according to the embodiment. [Figure 10B] FIG. 13 is a conceptual diagram for explaining a modified example of the vibration device according to the embodiment. [Figure 11]FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 12] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 13] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 14] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 15] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 16] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 17] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 18] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 19] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 20] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 21] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 22] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Diagram 23] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 24] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Diagram 25] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 26] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 27] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 28] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Figure 29] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Diagram 30] FIG. 13 is a conceptual diagram for explaining a modified example of an opposing element according to an embodiment. [Diagram 31] 11 is a table for explaining modified examples of an opposing element according to an embodiment. [Diagram 32] 11 is a table for explaining modified examples of an opposing element according to an embodiment. [Diagram 33] 13 is a graph for explaining a modified example of an opposing element according to an embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the description of the drawings, the same or similar parts are given the same or similar reference numerals. The drawings are schematic, and the relationship between thickness and planar dimensions, the thickness ratio of each layer, etc. may differ from the actual ones. Furthermore, the drawings may include parts whose dimensional relationships and ratios differ from each other.

[0011] <Device configuration> An example of a rotation device according to this embodiment will be described with reference to Fig. 1. As shown in Fig. 1, the rotation device 1 includes a vibration device 10 and an opposing element 20. The vibration device 10 includes a vibrator 11 and a horn 12. In this embodiment, the vibration device 10 may also be referred to as a vibrator.

[0012] The vibration device 10 is fixed by a fixing device 30 so that the longitudinal direction of the vibration device 10, which is the vibration direction of the vibration device 10, is the direction of gravity. The vibration device 10 has a flat, circular vibration surface perpendicular to the vibration direction at one end of the longitudinal direction of the vibration device 10 (the lower end in the example of FIG. 1). The vibration device 10 is connected to a power source (not shown) and obtains driving power. The vibration device 10 has a circuit (not shown) as a control unit for generating and controlling vibration.

[0013] The lower end of the vibration device 10 and the opposing element 20 are immersed in water filled in a water tank 50. The position of the water tank 50 in the Z-axis direction is adjusted by a Z-axis stage 40. A temperature probe 60 is fixed by a fixture 30 so that the water temperature in the water tank 50 can be measured.

[0014] The opposing element 20 is, for example, in the shape of a plate such as a disk. The opposing element 20 has two circular surfaces. At least one of the two circular surfaces of the opposing element 20 has a planar region and an impeller region. When the surface of the opposing element 20 and the vibration surface of the vibration device 10 are in a position where they face each other in parallel, the planar region of the surface (opposing surface) of the opposing element 20 is parallel to the vibration surface of the vibration device 10, and is therefore also referred to as a parallel region in the following description. The impeller region is a region in which a three-dimensional impeller shape is formed. The impeller region may have a point-symmetric three-dimensional pattern that is not an impeller shape.

[0015] The diameter of the face of the opposing element 20 and the diameter of the vibration surface of the vibration device 10 are the same. Here, the same diameter does not necessarily mean that they are completely the same diameter. For example, there may be a difference of 1% to 5% between the diameter of the face of the opposing element 20 and the diameter of the vibration surface of the vibration device 10.

[0016] With the lower end of the vibration device 10 submerged in the water of the water tank 50, the vibration device 10 is vibrated, and the surface portion (opposing surface) of the opposing element 20 having the parallel region and the impeller region is brought close to the vibration surface of the vibration device 10, whereby the opposing surface of the opposing element 20 is kept attracted to the vibration surface of the vibration device 10. The rotation device 1 does not have a member supporting the opposing element 20. The vibration caused by the vibration device 10 is, but is not limited to, ultrasonic vibration, for example, with a frequency of 20 kHz or more. The vibration caused by the vibration device 10 is, but is not limited to, simple harmonic motion, for example. Although the detailed principle of the phenomenon in which an object is attracted to the vibration surface of a vibrator in this way has not been elucidated, the phenomenon is reported in Non-Patent Document 1.

[0017] When the vibration device 10 vibrates and the opposing element 20 is attracted, a self-centering effect occurs between the vibration surface of the vibration device 10 and the surface of the opposing element 20, so that the center position of the vibration surface of the vibration device 10 and the center position of the surface of the opposing element 20 are in close proximity to each other. Also, as described above, the diameter of the surface of the opposing element 20 and the diameter of the vibration surface of the vibration device 10 are the same. As a result, when the vibration device 10 vibrates and the vibration surface of the vibration device 10 faces the surface of the opposing element 20, an end portion on the vibration surface of the vibration device 10 faces an end portion on the surface of the opposing element 20.

[0018] At this time, the opposing element 20 rotates around an axis in the vibration direction of the vibration device 10. The principle behind this rotation is not clear, but it is possible that the rotation of the opposing element 20 occurs when a water flow caused by pressure generated by vibration of the vibration surface of the vibration device 10 and flowing through the gap between the vibration device 10 and the opposing element 20, and an acoustic flow caused by vibration of the vibration surface hit the surface of the opposing element 20. Details of the rotation of the opposing element 20 will be described later.

[0019] In this embodiment, the surface of the opposing element 20 has a parallel region and an impeller region, but is not limited to this. As a modified example, the vibration surface of the vibration device 10 may have a parallel region and an impeller region, instead of the surface of the opposing element 20. The same applies to the embodiments described below.

[0020] As described above, according to this embodiment, the rotation device 1 includes the vibration device 10 (vibrator) and the opposing element 20. The vibration device 10 has a vibration surface perpendicular to the vibration direction. The opposing element 20 has an opposing surface facing the vibration surface of the vibration device 10, and rotates around the vibration direction of the vibration device 10. The vibration surface of the vibration device 10 and the opposing surface of the opposing element 20 each have parallel regions that face each other in parallel, and an impeller region formed three-dimensionally on at least one side.

[0021] The rotating device 1 has the above-mentioned configuration, and thus it is possible to realize a novel rotating device using the vibration device 10. In particular, since the opposing element 20 rotates without contacting the vibration device 10, it is unlikely to suffer wear or damage due to contact with the vibration device 10. As a result, it is possible to realize a rotating device 1 with high durability.

[0022] An example of the vibration device 10 and the opposing element 20 in this embodiment will be described in detail below.

[0023] <Vibration device> An exemplary configuration of the vibration device 10 in this embodiment will be described with reference to FIG. 2A and FIG. 2B. The vibration device 10 may be configured to generate vibration, and the specific configuration is not limited to the configuration described below. The vibrator 11 of the vibration device 10 is configured by alternately sandwiching doughnut-shaped piezoelectric ceramics and electrode plates, further sandwiching both ends of the plates with metal blocks, and fastening them with through-bolts. A voltage is applied to the electrode plates of the vibrator 11 so that the vibrator 11 is polarized in its axial direction. By applying an AC voltage from a circuit to the electrode plates, expansion and contraction occurs due to the inverse piezoelectric effect, and the vibrator 11 vibrates in a unidirectional vibration mode. Since the vibrator 11 is configured by fastening them with a through-bolt, it can withstand vibration amplitude even with piezoelectric ceramics that are weak against tensile force, and operates as a high-output vibrator.

[0024] Horn 12 is connected to one end of vibrator 11 in the axial direction. Horn 12 is a member connected to vibrator 11 so that the vibration surface of vibration device 10 satisfies desired conditions, such as shape, pattern, presence or absence of holes, and material. In the example shown in FIG. 2A, horn 12 is configured in a cylindrical shape. The bottom surface of horn 12, which becomes the vibration surface of vibration device 10, is configured in a circular shape. Horn 12 is connected to vibrator 11 so that its axis is coaxial with the axis of vibrator 11. Horn 12 may be configured from any member, but may be configured from a metal member such as stainless steel, for example.

[0025] With reference to FIG. 3, an example of the vibration characteristics of an exemplary vibrator 11 used in the vibration device 10 in this embodiment will be described, but the vibration characteristics are not limited thereto. FIG. 3 shows the measurement results when the vibration characteristics of the vibration device 10 in a state fixed by a fixture 30 are measured by an impedance analyzer. FIG. 3 shows the relationship between the frequency of the AC voltage of the circuit of the vibration device 10 and the conductance (real part G) and susceptance (imaginary part B) of the admittance. FIG. 3(1) shows the result of measuring the vibration characteristics of the vibration device 10 in air. FIG. 3(2) shows the result of measuring the vibration characteristics of the vibration device 10 in water. The frequency at which the real part G takes a maximum value (unit [S]) is the resonance frequency of the vibration device 10. According to FIG. 3, the vibration device 10 resonates at a frequency of 26.5 to 26.6 kHz in air and water. Using the phase measurement of the admittance, it is possible to track the resonance frequency of the vibration device 10. According to Fig. 3, the maximum value of the real part G in water is about half of the maximum value of the real part G in air. Therefore, Fig. 3 shows that in order to obtain the same vibration amplitude in water and in air, it is necessary to apply about twice the voltage in water as in air.

[0026] <opposite> With reference to FIG. 4A to FIG. 4E, several examples of the shape of the opposing element 20 in this embodiment will be described. In the example shown in FIG. 4A, the opposing element 20a is disk-shaped. At least one of the two opposing circular surface portions of the opposing element 20a has an impeller area and a flat area 203 surrounding the impeller area. The impeller area has a plurality of inclined surfaces 201 and a plurality of vertical surfaces 202. The inclined surface 201 is a fan-shaped surface inclined with respect to the flat area 203. The inclined surface 201 has a vertex at the contact point between the flat area 203 and the radial line, and is inclined toward the other radial line of the inclined surface 201. The angle of inclination is, for example, 10° with respect to the flat area 203, but is not limited thereto. The vertical surface 202 is a surface perpendicular to the flat area 203, and is a plane extending between the ends of the two inclined surfaces 201. In the impeller region, a plurality of tangent lines (hereinafter also referred to as “radial lines”) where the inclined surface 201 and the vertical surface 202 meet extend radially from the center of the impeller region to the flat region 203.

[0027] 4A, the opposing element 20a has a convex portion formed on the surface along the edge of the surface, with the flat area 203 as the upper surface. Since the convex portion has an area higher than the impeller area, in this embodiment, the convex portion of the opposing element 20a is also called an edge, and the portion in the impeller area that is recessed from the flat area 203 is also called a recess.

[0028] Since the vibration surface of the vibration device 10 faces the surface (opposing surface) of the opposing element 20a having a convex portion and a concave portion, a space is formed between the vibration surface of the vibration device 10 and the opposing surface of the opposing element 20a. In this case, the vibration surface of the vibration device 10 is not in contact with the convex portion of the opposing element 20a, and a predetermined distance exists between the vibration surface of the vibration device 10 and the convex portion of the opposing element 20a.

[0029] 4A, the diameter of the circular surface of the opposing element 20a is 40 mm, and the width of the upper surface of the flat area 203 in the short direction is 1.5 mm, though this is not a limitation. The thickness of the opposing element 20a is 2.5 mm.

[0030] As described above, the surface of the opposing element 20a and the vibration surface of the vibration device 10 are circular, and the diameter of the surface of the opposing element 20a is the same as the diameter of the vibration surface of the vibration device 10. As a result, when the vibration device 10 vibrates and the vibration surface of the vibration device 10 faces the surface of the opposing element 20a, the end of the vibration surface of the vibration device 10 faces the end of the surface of the opposing element 20a.

[0031] The examples of the opposing element 20 shown in FIGS. 4B to 4E will be described focusing on the differences from the opposing element 20a shown in FIG. 4A or other examples of the opposing element 20.

[0032] 4B, the inclined surface 201 of the opposing element 20b is inclined in a different manner from the opposing element 20a. The inclined surface 201 of the opposing element 20b has a maximum position at one radial line of the inclined surface 201 and is inclined toward the contact point between the other radial line and the flat area 203.

[0033] The opposing element 20c shown in Fig. 4C differs from the opposing element 20b in that it has a through hole 204c in the center of the surface. In detail, the opposing element 20c has a through hole 204c formed from the center of one of two surfaces facing the opposing element 20c in parallel to the opposing element 20c toward the other surface (the back surface of the opposing element 20c). The diameter of the through hole 204c is 3 mm, but is not limited thereto. As described later, by having the through hole 204c in the center of the impeller region, the rotation of the opposing element 20c becomes more stable.

[0034] A counter element 20d shown in FIG. 4D differs from the counter element 20c in that it has a through hole 204c at the contact point between the radial line and the flat area 203, rather than at the center of the surface.

[0035] The vertical surface 202e of the opposing element 20e shown in Fig. 4E is curved, unlike the vertical surface 202 of the opposing element 20a, which is flat. In the example shown in Fig. 4E, the vertical surface 202e is curved to form a recess when viewed from above. In addition, the opposing element 20e differs from the opposing element 20a in that it has a through hole 204e in the center of the surface.

[0036] <Measurement results> The following describes the measurement results of the rotation characteristics of the opposing element 20 when the rotating device 1 shown in Figure 1 is configured and opposing elements 20a to 20e shown in Figures 4A to 4E are used as the opposing element 20 of the rotating device 1.

[0037] To measure the rotation characteristics of the counter element 20, an AC voltage was generated by a function generator, and the voltage was amplified by a high-speed amplifier and applied to the vibrator 11 of the vibration device 10 to excite the vibrator 11. The frequency of the applied AC voltage was 26.5 kHz, which was the resonance frequency of the vibrator 11. The temperature of the water in the water tank 50 in which the lower end of the vibration device 10 and the counter element 20 were immersed was kept in the range of 20°C to 30°C. The rotation speed of the counter element 20 was measured with the naked eye using a stopwatch during low-speed rotation, and was measured from a video recorded on video during high-speed rotation.

[0038] 5A to 5E show the measurement results of the rotational speed of the opposing element 20a to opposing element 20e relative to the vibration amplitude of the vibration device 10. The measurement results are shown for each atmospheric pressure condition.

[0039] As shown in Fig. 6, the counterclockwise direction in the top view of the impeller region of the opposing element 20 is defined as the positive rotation direction of the opposing element 20, and the rotation speed is shown as a positive value in Fig. 5A to Fig. 5E. On the other hand, the clockwise direction is defined as the negative rotation direction of the opposing element 20, and the rotation speed is shown as a negative value in Fig. 5A to Fig. 5E.

[0040] It can be seen from Figures 5A to 5E that the opposing elements 20 each exhibit different rotation characteristics depending on their shape. For example, the opposing elements 20b, 20c, and 20e tend to have a higher rotation speed as the vibration amplitude of the vibration device 10 increases. In addition, the opposing elements 20c and 20e having a through hole in the center of the surface (impeller area) have smaller variations in measurement results compared to the other opposing elements 20. Therefore, it can be seen that the rotation of the opposing element 20c is more stable by having a through hole in the center of the surface.

[0041] Modifications of the present embodiment will be described. The contents of each of the multiple modifications described below can be appropriately applied to the above embodiment and other modifications. In the following description of the modifications, the same reference numerals will be used to designate the same components as those in the above embodiment, and the description thereof will be omitted or simplified.

[0042] <Variation 1> In the above embodiment, the rotation device 1 has one vibration device, but in the first modification, the rotation device 1 has two vibration devices.

[0043] 7A and 7B, a schematic configuration of the rotation device 1 in Modification 1 will be described. The rotation device 1 includes a vibration device 101, a vibration device 102, and an opposing element 211. The vibration device 101 and the vibration device 102 are configured similarly to the vibration device 10.

[0044] The vibration device 101 has a first vibration surface perpendicular to the vibration direction. The vibration device 102 has a second vibration surface perpendicular to the vibration direction. In the rotation device 1 in the first modification, the vibration device 101 and the vibration device 102 are installed so that the first vibration surface and the second vibration surface face each other. The opposing element 211 is placed between the first vibration surface and the second vibration surface. The opposing element 211 is, for example, in the shape of a plate such as a disk. The opposing element 211 has two circular surfaces.

[0045] As shown in FIG. 7A, the first vibration surface, the second vibration surface, and the opposing element 211 are immersed in water that is filled in a water tank 501.

[0046] As shown in FIG. 7B, the first surface portion 211a and the second surface portion 211b of the opposing element 211 each have a flat area and an impeller area similar to those of the above embodiment. When the opposing element 211 is placed between the first vibration surface and the second vibration surface, the first surface portion 211a becomes the surface facing the first vibration surface, and the second surface portion 211b becomes the surface facing the second vibration surface. The diameters of the first surface portion 211a and the second surface portion 211b are the same as the diameters of the first vibration surface and the second vibration surface. The impeller area may be formed on the first vibration surface and the second vibration surface, instead of the first surface portion 211a and the second surface portion 211b.

[0047] When the vibration devices 101 and 102 are vibrating, a self-centering effect occurs between the first and second vibration surfaces and the first and second surfaces 211a and 211b, so that the central positions of the first and second vibration surfaces and the central positions of the first and second surfaces 211a and 211b become close to each other. At this time, the opposing element 211 rotates around the axis of the vibration direction of the vibration devices 101 and 102.

[0048] The impeller regions of the first surface portion 211a and the second surface portion 211b are formed in a shape such that the rotational force generated when the water flow, acoustic streaming, etc. hit the first surface portion 211a and the rotational force generated when the water flow, acoustic streaming, etc. hit the second surface portion 211b do not repel each other.

[0049] According to the rotating device 1 of the first modification, the vibration device 101 has a first vibration surface perpendicular to the vibration direction. The vibration device 102 has a second vibration surface perpendicular to the vibration direction. The opposing element 211 has a first surface portion 211a facing the first vibration surface and a second surface portion 211b facing the second vibration surface. The first vibration surface and the first surface portion 211a (first opposing surface) have first parallel regions that face each other in parallel, and a first impeller region that is three-dimensionally formed on at least one side. The second vibration surface and the second surface portion 211b (second opposing surface) have second parallel regions that face each other in parallel, and a second impeller region that is three-dimensionally formed on at least one side. The opposing element 211 rotates around the vibration direction of the vibration device 101 and the vibration device 102.

[0050] In the first modification, since a rotational force of the opposing element 211 is generated by the vibration of the two vibration devices, it is possible to increase the rotational torque of the opposing element 211.

[0051] <Variation 2> In the second modification, a through hole is provided on the vibration surface of the vibration device of the rotation device 1, the through hole being formed toward the outside through the inside of the vibration device, and the fluid is sucked up from the through hole.

[0052] 8A, in the second modification, the rotation device 1 includes a vibration device 103. In the vibration device 103, a through hole 121 is provided in a vibration surface perpendicular to the vibration direction, the through hole 121 being formed toward the outside of the vibration device 103 through the inside of the vibration device 103. The rotation device 1 is configured similarly to the rotation device 1 of the above embodiment, except that the vibration device 103 is provided with the through hole 121.

[0053] When the vibration device 103 is vibrated with the lower end including the vibration surface submerged in the water of the water tank 50, and the surface portion (opposing surface) having the parallel region and the impeller region of the opposing element 20 is brought close to the vibration surface of the vibration device 103, the opposing surface of the opposing element 20 is kept in a state of being attracted to the vibration surface of the vibration device 10. At this time, a water flow is generated through the gap between the vibration device 103 and the opposing element 20 due to pressure generated by the vibration of the vibration surface of the vibration device 103. In addition, acoustic streaming is generated by the vibration of the vibration surface. The water flow and acoustic streaming hit the surface of the opposing element 20, causing the opposing element 20 to rotate. In addition, negative pressure is generated in the space formed between the vibration surface of the vibration device 103 and the surface of the opposing element 20 due to the water flow, acoustic streaming, and rotation of the opposing element 20, and the fluid (water) is sucked into the space. As a result, a pump effect occurs, and the fluid that has flowed into the space is sucked into the through holes 121 of the vibration surface, passes through the inside of the vibration device 103, and is expelled to the outside world.

[0054] In the second modification, the rotation device 1 may have two vibration devices similar to the first modification, and a through hole may be provided in each of the two vibration devices.

[0055] 8B, a schematic configuration of the rotation device 1 having two vibration devices in Modification 2 will be described. The rotation device 1 has vibration devices 103 and 104. Vibration device 104 is configured similarly to vibration device 103, and has a through hole 122 formed toward the outside of vibration device 104 through the inside of vibration device 104 on a vibration surface perpendicular to the vibration direction.

[0056] The rotating device 1 shown in Fig. 8B is configured similarly to the rotating device 1 of Modification 1, except that it is provided with through holes 121 and 122. In the rotating device 1 shown in Fig. 8B, a pump effect occurs in each space formed by the vibration surfaces of vibration devices 103 and 104 and the two surfaces of opposing element 211, and fluid that has flowed into the space is sucked into through holes 121 and 122 of the vibration surfaces, passes through the insides of vibration devices 103 and 104, and is discharged to the outside world.

[0057] <Modification 3> In the above embodiment and modified examples, the vibration surface and opposing element of the vibration device are operated in water, but in modified example 3, these are operated in air.

[0058] 9A, the rotation device 1 includes a vibration device 102 and an opposing element 212. The vibration device 102 has a vibration surface perpendicular to the vibration direction, and the vibration device 102 is installed so that the vibration surface faces vertically upward.

[0059] As shown in FIG. 9B, the surface 212a of the counter 212 facing the vibration surface of the vibration device 102 has a flat area 2122 that is a plane parallel to the vibration surface of the vibration device 102, and an impeller area 2121 in which a three-dimensional impeller shape is formed surrounding the flat area 2122. When the counter is rotated in water as in the above embodiment, it is preferable that the flat area is an edge (provided on the outer periphery of the surface) like the flat area 203. On the other hand, when rotating in the air, as shown in FIG. 9B, the flat area 2122 may be provided in the center of the surface 212a of the counter 212, or may be provided on the outer periphery of the surface 212a of the counter 212 as an edge of the surface 212a of the counter 212.

[0060] The counter element 212 is placed on the vibration surface of the vibration device 102, and the vibration device 102 is vibrated by high-frequency vibration such as ultrasonic vibration, whereby a squeeze film effect occurs on the vibration surface of the vibration device 102, causing the counter element 212 to float. A rotational force is generated by applying a positive pressure generated by the squeeze film effect to the impeller region 2121, and the counter element 212 rotates around the axis of the vibration direction of the vibration device 102. At this time, a self-centering effect occurs between the vibration surface of the vibration device 102 and the surface 212a of the counter element 212, so that the center position of the vibration surface of the vibration device 102 and the center position of the surface 212a of the counter element 20 become adjacent positions.

[0061] As shown in FIG. 9C, the rotation device 1 in the third modification may have two vibration devices as in the first modification. In the example shown in FIG. 9C, the rotation device 1 includes a vibration device 101, a vibration device 102, and an opposing element 213. The vibration device 101 has a first vibration surface perpendicular to the vibration direction. The vibration device 102 has a second vibration surface perpendicular to the vibration direction. The vibration devices 101 and 102 are installed so that the first vibration surface and the second vibration surface face each other. The opposing element 213 is placed between the first vibration surface and the second vibration surface. The opposing element 213 is, for example, a plate shape such as a disk shape. The opposing element 211 has two circular surfaces. Each of the two surfaces is formed in the same shape as the surface 212a shown in FIG. 9B.

[0062] The impeller regions on each of the two surfaces of the opposing element 213 are formed in such a shape that the rotational forces generated by the pressure applied to each of the two surfaces of the opposing element 213 do not repel each other.

[0063] In the third modification, a rotational force of the opposing element 213 can be generated by the vibration of the two vibration devices, and the rotational torque of the opposing element 213 can be increased.

[0064] Furthermore, as shown in Figures 9D and 9E, in variant example 3, similar to variant example 2, a through hole may be provided on the vibration surface of the vibration device of the rotating device, which is formed toward the outside world through the inside of the vibration device, and a fluid may be sucked up from the through hole.

[0065] 9D and 9E show the through hole 121 provided in the vibration device 103 and the through hole 122 provided in the vibration device 104. A positive pressure is generated by the squeeze film effect generated between the vibration surface of the vibration device 103 and the vibration device 104 and the counter element 212 or the counter element 213, and by the rotation of the counter element 212 or the counter element 213. As a result, a pump effect is generated, and the fluid (air) that has flowed into the vicinity of the counter element 212 or the counter element 213 is sucked into the through hole 121 or the through hole 122 of the vibration surface, passes through the inside of the vibration device 103 and the vibration device 104, and is discharged to the outside world.

[0066] <Modification 4> In the fourth modification, an impeller region, which is a region in which a three-dimensional impeller shape is formed, is provided on the vibration surface of the vibration device. The impeller region on the vibration surface may be provided instead of the impeller region on the surface of the opposing element described in the above embodiment and the above modification, or may be provided together with the impeller region on the surface of the opposing element.

[0067] With reference to FIG. 10A and FIG. 10B, the impeller region provided on the vibration surface of the vibration device will be described. FIG. 10A is a front view of the vibration surface 105a of the vibration device 105. FIG. 10B is a side view of the vibration device 105. The vibration surface 105a of the vibration device 105 is circular, and the diameter is formed to be the same as that of the opposing element, for example, 30 mm. A plurality of cuts are formed from the circumference of the vibration surface 105a of the vibration device 105 toward the center, so that a three-dimensional impeller shape is formed on the vibration surface 105a. The base of the cut is inclined with respect to the planar direction of the vibration surface 105a, and the angle of the inclination is, for example, 2°. In addition, a conical recess with the center of the vibration surface 105a as the apex is formed on the vibration surface 105a, and the inclination of the side of the cone is, for example, 5° with respect to the planar direction of the vibration surface 105a.

[0068] By bringing the opposing element close to the vibration surface 105a and vibrating the vibration device 105, the opposing element rotates as in the above embodiment and modified example.

[0069] <Variation 5> In the above-mentioned embodiment and modified examples, an impeller shape is formed on the surface of the opposing element as a three-dimensional shape. An impeller shape is generally an impeller shape that rotates a rotor by receiving pressure from a fluid, but the applicant's verification has revealed that even if the opposing element has a three-dimensional shape other than a shape that is generally widely recognized as an impeller, the opposing element can function as a rotor depending on the three-dimensional shape. Modified example 5 is an example in which a three-dimensional shape that is generally difficult to recognize as an impeller shape is formed on the surface of the opposing element. In modified example 5, the configurations other than the opposing element may be the configurations described in the above-mentioned embodiment and modified examples.

[0070] In the fifth modification, for example, the opposing element has an opposing surface facing the vibration surface of the vibrator, and the opposing surface has a parallel region facing parallel to the vibration surface of the vibrator and a plurality of three-dimensional shapes formed to extend toward the end of the opposing surface. That is, the vibration surface and the opposing surface may each have parallel regions facing each other in parallel. Also, the parallel region may be a plane. The starting point of the formation of the three-dimensional shape formed to extend toward the end of the opposing surface may be the inside of the opposing surface, particularly the center of the opposing surface. That is, the three-dimensional shape may be formed from the inside of the opposing surface or the center of the inside of the opposing surface toward the end of the opposing surface. Also, the three-dimensional shape may be formed with the same width. The parallel region is a region that is considered to generate an adhesive force between the vibration surface of the vibrator in water, and a levitation force of the opposing element due to the above-mentioned squeeze film effect (i.e., a repulsive force between the opposing surface and the vibration surface) in air. The three-dimensional shape is a region that is considered to generate a rotational force of the opposing element under the action of a fluid.

[0071] The three-dimensional shape formed to extend toward the end of the opposing surface may be formed, for example, with one or more grooves or holes. The groove may be referred to as a recess. The hole may be referred to as a through hole. The three-dimensional shape formed on the opposing surface may be formed with a protrusion.

[0072] The number of three-dimensional shapes formed on the opposing surface is not limited, but is preferably 4 or more from the viewpoint of the rotation speed of the opposing element. Furthermore, the number of three-dimensional shapes formed on the opposing surface is not limited, but is preferably 4 or more and 10 or less from the viewpoint of the rotation speed of the opposing element.

[0073] 11 to 28 show examples of the shape of the opposing element applied in the fifth modification. Also, FIGS. 11 to 22 show the measurement results of the rotational speed of the opposing element with respect to the vibration amplitude of the vibration device 10 when the opposing element shown in FIGS. 11 to 22 is applied to the rotation device 1 described with reference to FIGS. 1 to 3. Regarding the symbols shown in the drawings described below, the symbol of the opposing element with "a" added thereto is the symbol of the parallel region, and the symbol of the three-dimensional shape is the symbol with "b" added thereto. For example, a parallel region 601a and a three-dimensional shape 601b are formed on the opposing surface of the opposing element 601.

[0074] Although there is no particular limitation for realizing the opposing element of the modified example 5, the opposing element used in the measurement shown in the description of the modified example 5 below is made of aluminum, unless otherwise noted, and the diameter of the opposing surface is 40 mm and the thickness is 2.5 mm. Also, when a groove is provided on the opposing surface, the depth of the groove is 1.5 mm.

[0075] The outer peripheral shape of the opposing surface of the opposing element 601 shown in Fig. 11 is circular, similar to the vibration surface of the vibrator described above. The opposing surface is formed so that its end faces the end of the vibration surface. For example, the outer peripheral circle of the opposing surface and the outer peripheral circle of the vibration surface are formed to have the same shape and size.

[0076] The opposing surface of the opposing element 601 has a parallel region 601a and a plurality of three-dimensional shapes 601b. The opposing element 601 has a hole of three-dimensional shape 601b formed at an end of the opposing surface. The opposing element 601 has an open end due to the hole of three-dimensional shape 601b formed at an end of the opposing surface. In other words, the three-dimensional shape 601b formed in the opposing element 601 forms a slit on the opposing surface.

[0077] In addition, in the opposing element 601, the three-dimensional shape 601b formed on the opposing surface is formed along a plurality of radial curves extending from the center to the end of the opposing surface. The distance from the outer periphery of the radial curve to the center of the circle of curvature of the radial curve is, for example, 21 mm, but is not limited thereto. The width in the short-side direction of the three-dimensional shape 601b is, for example, 2 mm. In the opposing element described later in the modified example 5, the distance from the outer periphery of the radial curve to the center of the circle of curvature of the radial curve and the width in the short-side direction of the three-dimensional shape may be the same as the example shown in FIG. 11, unless otherwise described.

[0078] In the opposing element 601, the parallel region is formed in the center of the opposing surface. The outer periphery of the parallel region is formed so as to define a circle concentric with the outer periphery circle of the opposing surface. In other words, the three-dimensional shape 601b (or the end of the three-dimensional shape 601b) formed on the opposing surface of the opposing element 601 is formed along a concentric circle concentric with the outer periphery circle of the opposing surface. In the example shown in FIG. 11, although not limited thereto, the radius of the outer periphery circle of the parallel region is 27 mm.

[0079] The radius of the outer circumferential circle of the parallel region formed in the center of the opposing surface may be 60% to 80% of the radius of the outer circumferential circle of the opposing surface, and more preferably, the radius of the outer circumferential circle of the parallel region may be 70% to 80% of the radius of the outer circumferential circle of the opposing surface.

[0080] As described above, in the opposing element 601, the three-dimensional shape 601b is formed along a plurality of radial curves extending from the center to the end of the opposing surface. As a result, the adjacent three-dimensional shapes 601b are not symmetrical with respect to the radial direction of the opposing surface. In other words, the multiple three-dimensional shapes 601b formed on the opposing surface include multiple adjacent three-dimensional shapes 601b that are not symmetrical with respect to the radial direction of the opposing surface.

[0081] As in an example described later, a hole may be formed in the center of the opposing surface instead of the parallel region.

[0082] In the graph of the measurement results of the rotation speed of the opposing element 601 shown in Fig. 11, the result when the surface of the opposing element shown in the figure was made to face the vibration surface of the vibrator (i.e., facing up) is shown as "front", and the result when the reverse surface of the opposing element shown in the figure was made to face the vibration surface of the vibrator is shown as "reverse". In addition, the rotation speed was measured multiple times, and the first, second, and third times are shown as "1st time", "2nd time", and "3rd time", respectively. The same applies to the graphs shown in Figs. 12 to 22.

[0083] As shown in the graph of FIG. 11, when the opposing element 601 was applied to the rotation device 1 described with reference to FIGS. 1 to 3, rotation of the opposing element 601 was confirmed.

[0084] The opposing surface of the opposing element 602 shown in Fig. 12 has a parallel region 602a and a plurality of three-dimensional shapes 602b. In the opposing element 602, similar to the opposing element 601 shown in Fig. 11, the three-dimensional shapes 602b formed on the opposing surface are formed along a plurality of radial curves extending from the center to the end of the opposing surface. In the opposing element 602, the distance from the outer periphery of the radial curve to the center of the circle of curvature of the radial curve is, for example, 16 mm, although this is not limited thereto. The other configurations of the opposing element 602 are the same as those of the opposing element 601.

[0085] As shown in the graph of Fig. 12, when the opposing element 602 was applied to the rotating device 1, the rotation of the opposing element 602 was confirmed. As can be seen from the graphs of Fig. 11 and Fig. 12, at high vibration amplitudes, the opposing element 601 was confirmed to have a higher rotation speed than the opposing element 602.

[0086] The opposing surface of the opposing element 603 shown in FIG. 13 has a parallel region 603a and a plurality of three-dimensional shapes 603b. The three-dimensional shape 603b is formed with holes and grooves. The three-dimensional shape 603b is formed by holes along a plurality of radial curves from the center to the end of the opposing surface, but the three-dimensional shape 603b is formed by grooves at the outer peripheral end of the opposing surface. As a result, unlike the opposing element 601, no slits are formed on the opposing surface of the opposing element 603. In the parallel region 603a, a circular parallel region is formed in the center of the opposing surface. The diameter of the circle is 6.5 mm, although not limited thereto.

[0087] The three-dimensional shape 603b is formed along a plurality of radial curves extending from the center to the end of the opposing surface. The distance (radius of curvature) from the outer periphery of the radial curve to the center of the circle of curvature of the radial curve is, for example, 20 mm, but is not limited thereto. The radius of curvature may be the same in the opposing element described with reference to Figs. 14 to 22.

[0088] As shown in the graph of FIG. 13, when the opposing element 603 was applied to the rotation device 1, the rotation of the opposing element 603 was confirmed.

[0089] Regarding the opposing elements shown in FIG. 14 to FIG. 22, when the opposing element 603 was applied to the rotation device 1, rotation of the opposing element was confirmed.

[0090] 14, the three-dimensional shape 604b is formed by grooves. The three-dimensional shape 604b is formed along a plurality of radial curves extending from the center of the opposing surface to the ends.

[0091] 15, the three-dimensional shape 605b is formed by holes. The three-dimensional shape 605b is formed along a plurality of radial curves extending from the center of the opposing surface to the end, but the three-dimensional shape 605b is not formed at the outer peripheral end of the opposing surface.

[0092] 16, the three-dimensional shape 606b is formed by a groove. The three-dimensional shape is formed along a plurality of radial curves extending from the center of the opposing surface to the end, but the three-dimensional shape is not formed at the outer peripheral end of the opposing surface.

[0093] In the opposing element 607 shown in Fig. 17, the three-dimensional shape 607b is formed by grooves and holes. The three-dimensional shape 607b is formed by grooves along multiple radial curves from the center to the end of the opposing surface, but the three-dimensional shape 607b is not formed at the outer circumferential end of the opposing surface. In the center of the opposing surface, the three-dimensional shape 607b is formed in a circular shape by holes.

[0094] In the opposing element 608 shown in Fig. 18, the three-dimensional shape 608b is formed with holes and grooves. The three-dimensional shape 608b is formed with holes along multiple radial curves from the center to the end of the opposing surface, but the three-dimensional shape 608b is formed with grooves at the outer peripheral end of the opposing surface. Unlike the opposing element 603, the opposing element 608 does not have a parallel region in the center of the opposing surface.

[0095] 19, a three-dimensional shape 609b is formed having grooves. The three-dimensional shape 609b is formed by grooves along a plurality of radial curves extending from the center of the opposing surface to the ends.

[0096] In the opposing element 610 shown in Fig. 20, the three-dimensional shape 610b is formed with holes and grooves. The three-dimensional shape 610b is formed by grooves along multiple radial curves from the center of the opposing surface to the end. In addition, the three-dimensional shape 610b is formed in a circular shape with holes in the center of the opposing surface.

[0097] In the opposing element 611 shown in Fig. 21, the three-dimensional shape 611b is formed by holes. The three-dimensional shape 611b is formed by holes along a plurality of radial curves extending from the center of the opposing surface to the end. The three-dimensional shape 611b is not formed at the outer peripheral end of the opposing surface. In addition, a circular parallel region is provided at the center of the opposing surface.

[0098] In the opposing element 612 shown in Fig. 22, the three-dimensional shape 612b is formed by grooves. The three-dimensional shape 612b is formed by grooves along multiple radial curves from the center to the end of the opposing surface. The three-dimensional shape 612b is not formed at the outer circumferential end of the opposing surface. In addition, a parallel region 612a is provided in a circular shape at the center of the opposing surface.

[0099] Although the measurement results are not shown for opposing elements 613 to 634 shown in Figures 23 to 28, the presence or absence of rotation of the opposing elements was confirmed when opposing elements were applied to the rotating device 1 described with reference to Figures 1 to 3. No clear rotation was observed for opposing elements 614, 617, and 633, but rotation was confirmed for the other opposing elements. Furthermore, rotation was slight from opposing element 618 to opposing element 620. It is believed that the opposing elements that rotated slightly would rotate more if an initial torque for rotation was separately applied to the opposing elements.

[0100] The shapes of the opposing elements 613 to 634 that are particularly noteworthy will be described below. In Fig. 23 to Fig. 28, the left side is a photograph of the opposing element, and the right side is a schematic diagram. The black three-dimensional shapes shown in the photographs are holes, and the other three-dimensional shapes are grooves.

[0101] On the opposing surfaces of the opposing elements 613 and 614, adjacent three-dimensional shapes are formed symmetrically to each other with respect to the radial direction of the opposing surfaces.

[0102] The difference between the opposing element 615 and the opposing element 624 is that the three-dimensional shape of the opposing element 615 is formed by holes, whereas the three-dimensional shape 624b of the opposing element 624 is formed by grooves.

[0103] The opposing surface of the opposing element 626 has a parallel region 626a and a plurality of three-dimensional shapes 626b. The three-dimensional shape 626b formed by the groove is formed with a larger area than other opposing elements such as the opposing element 601 to the opposing element 612. Of the parallel region 626a, the center of the opposing surface of the opposing element 626 is formed in a substantially circular shape. The opposing surface of the opposing element 627 also has a three-dimensional shape 627b formed with a larger area, similar to the opposing element 626. The opposing surface of the opposing element 627 differs from the opposing element 626 in that the center is a three-dimensional shape formed by a hole.

[0104] The opposing surface of the opposing element 628 has a parallel region 628a and a plurality of three-dimensional shapes 628b. The three-dimensional shapes 628b are formed by protrusions.

[0105] The opposing surface of the opposing element 629 has a parallel region 629a and a plurality of three-dimensional shapes 629b. The three-dimensional shapes 629b are formed by a plurality of holes. The three-dimensional shapes 629b may be formed by a plurality of grooves or a combination of holes and grooves.

[0106] The opposing element 631 is also used in the later-described modified example 6. In the modified example 5, the rotation of the opposing element 631 was confirmed.

[0107] The outer peripheral shape of the opposing surface of the opposing element 633 is rectangular. The outer peripheral shape of the opposing surface of the opposing element 633 is different from the outer peripheral shape of the vibration surface of the vibrator. Therefore, the opposing surface of the opposing element 633 is not formed so that its end faces the end of the vibration surface. As described above, no clear rotation of the opposing element 633 was confirmed.

[0108] The opposing surface of the opposing element 634 has a parallel region 634a and a three-dimensional shape 634b. The three-dimensional shape 634b is formed along a spiral curve from the center to the end of the opposing surface of the opposing element 634. The three-dimensional shape 634b may be an Archimedes spiral shape. In this case, the width of the three-dimensional shape 634b in the short direction may be 5 mm, although this is not limited thereto. There is one three-dimensional shape formed on the opposing surface of the opposing element 634. As described above, the rotation of the opposing element 634 was confirmed.

[0109] <Variation 6> In variant 5, an example is described in which an opposing element having a three-dimensional shape other than an impeller shape is applied to the rotating device 1 described with reference to Figures 1 to 3 and rotated (i.e., an example in which an opposing element is rotated underwater). In variant 6, an example is described in which an opposing element having a three-dimensional shape other than an impeller shape is rotated in the air. Variation 6 is similar to variant 3 except that an opposing element different from the opposing element in variant 3 is used. In particular, as the rotating device, the rotating device 1 described with reference to Figure 9A is used.

[0110] In the sixth modification, for example, the opposing element has an opposing surface facing the vibration surface of the vibrator, and the opposing surface has a parallel region facing parallel to the vibration surface of the vibrator and a plurality of three-dimensional shapes formed to extend toward the end of the opposing surface. That is, the vibration surface and the opposing surface may each have parallel regions facing each other in parallel. The parallel region may be a plane. The starting point of the formation of the three-dimensional shape formed to extend toward the end of the opposing surface may be the inside of the opposing surface, particularly the center of the opposing surface. That is, the three-dimensional shape may be formed from the inside of the opposing surface or the center of the inside of the opposing surface toward the end of the opposing surface. The parallel region is a region between the vibration surface of the vibrator and the opposing element, where a levitation force of the opposing element due to the above-mentioned squeeze film effect (i.e., a repulsive force between the opposing surface and the vibration surface) is considered to occur in the air. The three-dimensional shape is a region where a rotational force of the opposing element is considered to occur due to the action of a fluid.

[0111] 29 and 30 show counters 701 to 708 as examples of the shape of the counters applied in modified example 6. Although the manufacturing method of the counters in modified example 6 is not limited, the counters shown in Figs. 29 and 30 are made of ABS resin and manufactured using a 3D printer. Regarding the symbols shown in the drawings described below, the symbol of the counter with "a" added thereto is the symbol of the parallel region, and the symbol of the three-dimensional shape is the symbol with "b" added thereto. For example, the opposing surface of counter 701 is formed with parallel region 701a and three-dimensional shape 701b.

[0112] The opposing surface of the opposing element 701 has a parallel region 701a and a three-dimensional shape 702b. The parallel region 701a has a central portion 701a1, a beam 701a2, and an outer peripheral portion 701a3. The central portion 701a1 is a region in the central portion of the opposing surface. The outer peripheral portion 701a3 is a region in the outer peripheral portion of the opposing surface. The beam 701a2 is a region connecting the central portion 701a1 and the outer peripheral portion 701a3. The three-dimensional shape 702b is formed by a hole. The opposing elements 702 to 708 also have a parallel region and a three-dimensional shape. In addition, the parallel region has a central portion, a beam, and an outer peripheral portion. The opposing elements 701 to 708 have different numbers of beams, and the number of beams ranges from 2 to 9.

[0113] In the beam, the two side surfaces connecting the center and the outer periphery of the opposing surface may be parallel to each other or not. When they are not parallel, for example, the angle formed by the intersection of the longitudinal direction of the two side surfaces in the beam 704a2 of the opposing element 704 is 10°. The diameter of the center 704a1 of the opposing element 704 is 10.5 mm. The diameter of the outer periphery circle of the outer periphery part 704a3 of the opposing element 704 is 40 mm, and the diameter of the inner periphery circle is 30 mm.

[0114] FIG. 31 shows the relationship between the number of beams of the opposing element shown in FIG. 29, the mass, the area of ​​the holes, and the ratio of the area of ​​the holes to the entire area.

[0115] FIG. 32 shows the relationship between the number of beams of the opposing element shown in FIG. 29, the ratio of the hole area to the whole area, the rotation speed of the opposing element, and the rear end amplitude of the transducer.

[0116] Fig. 33 shows the relationship between the number of beams of the opposing element shown in Fig. 29 and the rotation speed. According to Fig. 32 and Fig. 33, the rotation speed of the opposing element having six beams (i.e., opposing element 708) is faster than the other opposing elements.

[0117] <Other Modifications> A motor may be configured having the rotating device 1 according to the above embodiment and the above modified example. In this case, the motor may be driven by rotating the opposing element.

[0118] A pump may be configured with the rotating device 1 in the above embodiment and the above modified example, and the pump may be driven by rotating the opposing element. In this case, the rotating device 1 may provide a pump function by sucking in a fluid through the through hole provided in the vibration device of the rotating device 1 and sending the fluid out of the vibration device.

[0119] The opposing element 20 of the rotating device 1 in the above embodiment is configured to rotate around the axis of the vibration direction of the vibration device 10. However, as a modified example, the opposing element 20 may be fixed so as not to rotate. For example, as a modified example of the rotating device 1 having the vibration device 10 (vibrator) and the opposing element 20 shown in FIG. 1, the opposing element 20 may have an opposing surface facing the vibration surface, and may be fixed so that the vibration surface and the opposing surface are spaced apart from each other. Here, fixing may mean that the opposing element 20 does not rotate at a predetermined position and is immobile. The opposing element 20 may be fixed, for example, via a support member or by being integrally formed with a fixed member. The opposing element 20 may be provided so that the center position of the vibration surface and the center position of the surface of the opposing element 20 are in close proximity to each other by being fixed. The opposing element 20 may be provided so that the distance between the vibration surface and the opposing surface is not limited, but is 10 to 500 microns by being fixed. The vibration surface and the opposing surface may have the same shape (for example, a circle). In addition, in the rotating device 1 in this modification, the vibration surface and the opposing surface may have a parallel region in which they face each other in parallel, and an impeller region formed three-dimensionally on at least one of them, as in the example shown in FIG. 1. Also, a pump may be configured that has the rotating device in this modification. The pump may be formed by providing a through hole in the vibration device, for example, as in the example of FIG. 8A. In this modification, since the opposing element is fixed, it is possible to suppress a reduction in pressure caused by a pump effect occurring in the space formed between the vibration surface and the surface of the opposing element 20, compared to the case where the opposing element rotates.

[0120] Although the embodiment and the modified examples have been described, a person skilled in the art can further modify and correct the embodiment and the modified examples, and these modifications and corrections are included in the embodiment. The functions included in each means, etc. can be rearranged so as not to cause logical inconsistencies, and multiple means, steps, etc. can be combined into one or divided. [Explanation of symbols]

[0121] 1 Rotating device 10 Vibration device 11 Transducer 12 Horn 20,211,212,213 Opposite 30 Fixtures 40 Z-axis stage 50 Aquarium 60 Temperature Probe 101,102,103,104,105 Vibration device

Claims

1. A vibrator having a vibration surface perpendicular to a vibration direction; a counter element having a facing surface facing the vibration surface and rotating about an axis in the vibration direction of the vibrator; Equipped with No member supporting the opposing element is provided, A rotating device in which the vibration surface and the opposing surface each have a parallel region that faces parallel to each other and an impeller region that is three-dimensionally formed on at least one of them, and the opposing element rotates without contacting the vibrator.

2. The rotating device according to claim 1 , wherein the opposing piece has a protrusion formed on the opposing surface along an edge of the opposing surface.

3. The rotating device according to claim 2 , wherein a space is formed by the vibration surface and the opposing surface.

4. The rotating device according to claim 1 , wherein the vibration surface and the opposing surface are each circular, and an end of the vibration surface faces an end of the opposing surface.

5. The rotating device according to claim 1 , wherein the opposing surface has a first through hole formed toward a rear surface of the opposing element.

6. The rotating device according to claim 5 , wherein the first through hole is formed in a central portion of the opposing surface.

7. The rotating device according to claim 1 , wherein the vibration of the vibrator is a simple harmonic motion.

8. The rotation device according to claim 1 , wherein the vibration surface is provided with a second through hole that is formed toward an outside of the vibrator through an inside of the vibrator.

9. A motor comprising a rotating device according to any one of claims 1 to 8.

10. A pump comprising a rotating device according to any one of claims 1 to 8.

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