Vacuum pump

Abstract

To provide a vacuum pump in which, even in the event of breakage of a rotor blade, broken pieces of the rotor blade are hardly scattered from an exhaust port.SOLUTION: A vacuum pump (100) comprises a rotor blade (103) to be rotated around a vertical axis (CL), and a casing (127) housing the rotor blade, and exhausts sucked gas in the radial direction of the rotor blade in association with rotation of the rotor blade. An exhaust port (133) is provided at a position offset in the direction of the vertical axis from the position of a gas outlet part (130) of the rotor blade.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a vacuum pump. [Background technology]

[0002] As a background art of this technical field, for example, a vacuum pump described in Patent Document 1 is known. The vacuum pump described in Patent Document 1 is a vertical type, and is configured by storing multiple stages of rotors inside a substantially cylindrical upper housing. An intake port is formed at the top of the upper housing, and an exhaust port is formed on the side of the bottom. As the multiple stages of rotors rotate, gas is sucked in vertically downward from the intake port, and the gas is exhausted horizontally from the exhaust port. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2005-307859 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the vacuum pump described in Patent Document 1, the exhaust port is provided at the same height as the gas outlet of the rotor in the final stage, so that if the rotor is damaged, its fragments may fly out of the exhaust port. If the fragments of the rotor fly out of the exhaust port, it may damage the piping and equipment installed downstream of the pump, which is undesirable. In addition, in Patent Document 1, the gas is exhausted horizontally from the exhaust port, so that depending on the direction of the gas velocity vector and the opening condition and position of the exhaust port, pressure loss (described later) may occur, and the exhaust performance may be reduced.

[0005] Therefore, an object of the present invention is to provide a vacuum pump in which, even if the rotor is damaged, fragments of the rotor are less likely to scatter from the exhaust port. Another object of the present invention is to provide a vacuum pump capable of improving the exhaust performance. [Means for solving the problem]

[0006] In order to achieve the above object, the present invention provides a rotor that rotates around a vertical axis, a magnetic bearing that magnetically levitates a rotation shaft of the rotor blade; and a stator column that covers an outer periphery of the magnetic bearing; a casing that houses the rotor; an intake port provided in an upper portion of the casing; and an exhaust port provided in a side portion of the casing on an opposite side of the rotor to the intake port in the direction of the vertical axis, the vacuum pump redirecting sucked gas in a radial direction of the rotor by rotation of the rotor and exhausting the gas from the exhaust port, an annular flow passage formed between a periphery of the rotor and an inner circumferential wall of the casing, for causing gas discharged radially outward from a gas outlet portion of the rotor to collide with an inner wall surface of the casing; and an annular space formed between the stator column and the inner circumferential wall of the casing, the annular space communicating with the annular flow passage, The rotor blade The above A position offset downward from the position of the gas outlet in the direction of the vertical axis. 、 and At a position facing the annular space The exhaust port is provided, and the gas is While rotating within the annular flow path, the particles collide with the inner wall surface. After changing the orientation downward in the direction of the vertical axis, Passing through the annular space The air is exhausted from the exhaust port.

[0008] In the above configuration, it is preferable that the exhaust port is disposed at a position where the gas outlet portion of the rotor cannot be seen when looking into the inside of the casing through the exhaust port.

[0010] In the above configuration, it is preferable that an upper end position of the exhaust port in the direction of the vertical axis and a lower end position of the gas outlet portion of the rotor in the direction of the vertical axis are spaced a predetermined distance apart.

[0012] In the above configuration, the exhaust port is preferably provided so as to protrude in a tangential direction of the outer circumferential surface of the casing.

[0013] In addition, in the above configuration, it is preferable that the rotors are provided in multiple stages in the direction of the vertical axis, and that all of the rotors are centrifugal type rotors that exhaust the gas in the radial direction of the rotors, or that the rotors are a combination of the centrifugal type rotors and axial flow type rotors that exhaust the gas in the direction of the vertical axis. Effect of the Invention

[0015] According to the present invention, it is possible to provide a vacuum pump in which, even if the rotor is damaged, fragments of the rotor are less likely to scatter from the exhaust port. Also, according to the present invention, it is possible to improve the exhaust performance of the vacuum pump. Note that problems, configurations, and effects other than those described above will become apparent from the description of the embodiments below. [Brief description of the drawings]

[0016] [Figure 1] 1 is a vertical sectional view of a vacuum pump according to a first embodiment of the present invention. [Diagram 2] 2 is a circuit diagram of an amplifier circuit of the vacuum pump shown in FIG. 1. [Diagram 3] 6 is a time chart showing the control of the amplifier control circuit when a current command value is larger than a detection value. [Figure 4] 6 is a time chart showing the control of the amplifier control circuit when a current command value is smaller than a detection value. [Diagram 5] FIG. 4 is an explanatory diagram showing the flow of gas around an exhaust port. [Figure 6] FIG. 13 is a diagram showing a configuration of an exhaust port according to a first modified example. [Figure 7] 13 is a diagram showing a configuration of an exhaust port according to a second modified example. FIG. [Figure 8] FIG. 5 is a vertical sectional view of a vacuum pump according to a second embodiment of the present invention. [Figure 9] FIG. 11 is a vertical sectional view of a vacuum pump according to a third embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a vacuum pump according to the present invention will be described with reference to the drawings.

[0018] (First embodiment) A longitudinal cross-sectional view of the vacuum pump 100 is shown in FIG. 1. As shown in FIG. 1, the vacuum pump 100 according to this embodiment is a single-stage centrifugal pump. In FIG. 1, the vacuum pump 100 has an intake port 101 formed at the upper end of a cylindrical outer cylinder 127 (127a, 127b) that can be divided into upper and lower two stages. An impeller (rotating blade) 103 for sucking and exhausting gas is provided in a single stage inside the outer cylinder (casing) 127. A rotor shaft (rotating shaft) 113 is attached to the center of the impeller 103, and the rotor shaft 113 is levitated in the air and positionally controlled by, for example, a five-axis controlled magnetic bearing 102. The impeller 103 is generally made of a metal such as aluminum or an aluminum alloy. Of course, the metal used for the impeller 103 is not limited to these. For example, the impeller 103 may be made of a metal such as stainless steel, titanium alloy, or nickel alloy.

[0019] The upper radial electromagnets 104 are arranged in pairs on the X-axis and the Y-axis. Four upper radial sensors 107 are provided adjacent to the upper radial electromagnets 104 and corresponding to each of the upper radial electromagnets 104. The upper radial sensors 107 are, for example, inductance sensors or eddy current sensors having conductive windings, and detect the position of the rotor shaft 113 based on the change in inductance of the conductive windings that changes according to the position of the rotor shaft 113. The upper radial sensors 107 are configured to detect the radial displacement of the rotor shaft 113, i.e., the impeller 103 fixed thereto, and send the detected displacement to the control device 195.

[0020] In this control device 195, for example, a compensation circuit having a PID adjustment function generates an excitation control command signal for the upper radial electromagnet 104 based on a position signal detected by the upper radial sensor 107, and an amplifier circuit 150 (described later) shown in Figure 2 controls the excitation of the upper radial electromagnet 104 based on this excitation control command signal, thereby adjusting the upper radial position of the rotor shaft 113.

[0021] The rotor shaft 113 is made of a material with high magnetic permeability (iron, stainless steel, etc.) and is attracted by the magnetic force of the upper radial electromagnet 104. Such adjustment is performed independently in the X-axis direction and the Y-axis direction. The lower radial electromagnet 105 and the lower radial sensor 108 are arranged in the same manner as the upper radial electromagnet 104 and the upper radial sensor 107, and adjust the lower radial position of the rotor shaft 113 in the same manner as the upper radial position.

[0022] Furthermore, axial electromagnets 106A and 106B are arranged above and below a circular metal disk 111 provided at the bottom of rotor shaft 113. Metal disk 111 is made of a high magnetic permeability material such as iron. An axial sensor 109 is provided to detect the axial displacement of rotor shaft 113, and an axial position signal is sent to control device 195.

[0023] In the control device 195, a compensation circuit having, for example, a PID adjustment function generates an excitation control command signal for each of the axial electromagnets 106A and 106B based on the axial position signal detected by the axial sensor 109, and the amplifier circuit 150 controls the excitation of the axial electromagnets 106A and 106B based on these excitation control command signals, so that the axial electromagnet 106A attracts the metal disk 111 upward by magnetic force and the axial electromagnet 106B attracts the metal disk 111 downward, thereby adjusting the axial position of the rotor shaft 113.

[0024] In this way, the control device 195 appropriately adjusts the magnetic force that the axial electromagnets 106A, 106B exert on the metal disk 111, magnetically levitating the rotor shaft 113 in the axial direction and holding it in a non-contact manner in space. The amplifier circuit 150 that controls the excitation of the upper radial electromagnets 104, the lower radial electromagnets 105, and the axial electromagnets 106A, 106B will be described later.

[0025] Meanwhile, motor 121 has a plurality of magnetic poles arranged circumferentially so as to surround rotor shaft 113. Each magnetic pole is controlled by control device 195 so as to rotate rotor shaft 113 via electromagnetic force acting between the magnetic pole and rotor shaft 113. Also, motor 121 incorporates a rotation speed sensor such as a Hall element, resolver, or encoder (not shown), and the rotation speed of rotor shaft 113 is detected by a detection signal from this rotation speed sensor.

[0026] Furthermore, for example, a phase sensor (not shown) is attached near the lower radial sensor 108 to detect the phase of rotation of the rotor shaft 113. The control device 195 uses the detection signals of both this phase sensor and the rotation speed sensor to detect the position of the magnetic pole.

[0027] Impeller 103 rotates in a predetermined direction around central axis (vertical axis) CL. Gas sucked in from intake port 101 is discharged in a radial direction (left and right direction in FIG. 1) through gas outlet section 130. As will be described in detail later, gas discharged from gas outlet section 130 swirls in annular buffer space 131 (see FIG. 5) as indicated by the arrow in FIG. 1, and then passes through internal space 132 and is discharged from exhaust port 133. Internal space 132 is an annular space formed between outer cylinder 127 and stator column 122 and continuous with buffer space 131.

[0028] A base portion 129 is disposed at the bottom of the outer cylinder 127. An exhaust port 133 is disposed between the upper outer cylinder 127a and the base portion 129, i.e., on the side of the lower outer cylinder 127b, and is connected to the outside. Gas sucked downward along the central axis CL from the intake port 101 is redirected in the radial direction of the impeller 103 by the rotation of the impeller 103, and is sent out to the exhaust port 133.

[0029] The exhaust port 133 is disposed at a height position offset downward from the position of the gas outlet section 130 along the direction of the central axis CL (the vertical direction in FIG. 1). Specifically, the upper end position H2 of the exhaust port 133, which is located above the central position H1 of the exhaust port 133 by a radius R, is offset downward by a distance L from the lower end position H3 of the gas outlet section 130. In other words, the exhaust port 133 is disposed at a predetermined distance radially outward and axially downward from the impeller 103. When a user looks into the exhaust port 133 from the direction A in FIG. 1, the internal space 132 can be seen, but the gas outlet section 130 cannot be seen because it is located above the exhaust port 133. The exhaust port 133 is disposed on the opposite side of the intake port 101 across the impeller 103 in the direction of the central axis CL.

[0030] Base 129 is a disk-shaped member that constitutes the base of vacuum pump 100, and is generally made of metal such as iron, aluminum, stainless steel, etc. Since base 129 physically holds vacuum pump 100 and also functions as a heat conduction path, it is desirable to use a metal that has rigidity and high thermal conductivity, such as iron, aluminum, or copper.

[0031] In this configuration, when the impeller 103 is rotated together with the rotor shaft 113 by the motor 121 , gas is sucked in through the intake port 101 by the action of the impeller 103 .

[0032] Depending on the application of the vacuum pump 100, in order to prevent the gas sucked in from the intake port 101 from entering the electrical equipment section, which is composed of the upper radial electromagnet 104, the upper radial sensor 107, the motor 121, the lower radial electromagnet 105, the lower radial sensor 108, the axial electromagnets 106A and 106B, the axial sensor 109, etc., the electrical equipment section is surrounded by a stator column 122, and the inside of the stator column 122 may be kept at a predetermined pressure by a purge gas.

[0033] In this case, piping (not shown) is provided in the base portion 129, and the purge gas is introduced through this piping. The introduced purge gas is sent to the exhaust port 133 through gaps between the protective bearing 120 and the rotor shaft 113, between the rotor and stator of the motor 121, and between the stator column 122 and the inner cylindrical portion of the impeller 103. Note that a heater, a water-cooled pipe, or the like may be provided on the outer periphery of the base portion 129 depending on the temperature and type of gas to be sucked in. In this case, it is preferable to provide a temperature sensor in the base portion 129 and control the temperature using the control device 195.

[0034] Here, the vacuum pump 100 requires control based on the identification of the model and on individual adjusted unique parameters (for example, various characteristics corresponding to the model). In order to store these control parameters, the vacuum pump 100 has an electronic circuit section 141 in its main body. The electronic circuit section 141 is composed of a semiconductor memory such as an EEPROM, electronic components such as semiconductor elements for accessing the memory, and a substrate 143 for mounting these components. The electronic circuit section 141 is housed below a rotational speed sensor (not shown) near the center of a base section 129 constituting the lower part of the vacuum pump 100, and is closed by an airtight bottom cover 145.

[0035] Next, a description will be given of an amplifier circuit 150 that controls excitation of the upper radial electromagnets 104, the lower radial electromagnets 105, and the axial electromagnets 106A and 106B in the vacuum pump 100 configured as described above. A circuit diagram of this amplifier circuit 150 is shown in FIG.

[0036] 2, one end of an electromagnet winding 151 constituting the upper radial electromagnet 104 etc. is connected to a positive electrode 171a of a power source 171 via a transistor 161, and the other end is connected to a negative electrode 171b of the power source 171 via a current detection circuit 181 and a transistor 162. The transistors 161 and 162 are so-called power MOSFETs, and have a structure in which a diode is connected between the source and drain.

[0037] At this time, the transistor 161 has a cathode terminal 161a of the diode connected to the positive electrode 171a, and an anode terminal 161b connected to one end of the electromagnet winding 151. The transistor 162 has a cathode terminal 162a of the diode connected to the current detection circuit 181, and an anode terminal 162b connected to the negative electrode 171b.

[0038] On the other hand, the current regeneration diode 165 has its cathode terminal 165a connected to one end of the electromagnet winding 151 and its anode terminal 165b connected to the negative electrode 171b. Similarly, the current regeneration diode 166 has its cathode terminal 166a connected to the positive electrode 171a and its anode terminal 166b connected to the other end of the electromagnet winding 151 via a current detection circuit 181. The current detection circuit 181 is composed of, for example, a Hall sensor type current sensor or an electric resistance element.

[0039] The amplifier circuit 150 configured as above corresponds to one electromagnet. Therefore, when the magnetic bearing 102 is a five-axis control type and there are a total of ten electromagnets 104, 105, 106A, and 106B, a similar amplifier circuit 150 is configured for each of the electromagnets, and the ten amplifier circuits 150 are connected in parallel to the power supply 171.

[0040] Furthermore, the amplifier control circuit 191 is configured, for example, by a digital signal processor section (hereinafter referred to as a DSP section) (not shown) of the control device 195, and this amplifier control circuit 191 switches the transistors 161 and 162 on / off.

[0041] The amplifier control circuit 191 is adapted to compare the current value detected by the current detection circuit 181 (a signal reflecting this current value is called a current detection signal 191c) with a predetermined current command value. Then, based on the result of this comparison, the magnitude of the pulse width (pulse width times Tp1, Tp2) to be generated within a control cycle Ts, which is one period of PWM control, is determined. As a result, gate drive signals 191a, 191b having this pulse width are output from the amplifier control circuit 191 to the gate terminals of the transistors 161, 162.

[0042] In addition, when the impeller 103 passes through a resonance point during an accelerating operation of the rotation speed, or when a disturbance occurs during a constant speed operation, it is necessary to control the position of the impeller 103 at high speed and with strong force. For this reason, a high voltage of, for example, about 50 V is used as the power supply 171 so that the current flowing through the electromagnet winding 151 can be rapidly increased (or decreased). In addition, a capacitor (not shown) is usually connected between the positive pole 171a and the negative pole 171b of the power supply 171 to stabilize the power supply 171.

[0043] In this configuration, when both transistors 161, 162 are turned on, the current flowing through the electromagnet winding 151 (hereinafter referred to as electromagnet current iL) increases, and when both are turned off, the electromagnet current iL decreases.

[0044] Moreover, when one of the transistors 161, 162 is turned on and the other is turned off, a so-called flywheel current is maintained. By passing a flywheel current through the amplifier circuit 150 in this manner, the hysteresis loss in the amplifier circuit 150 can be reduced, and the power consumption of the entire circuit can be kept low. Also, by controlling the transistors 161, 162 in this manner, high-frequency noise such as harmonics generated in the vacuum pump 100 can be reduced. Furthermore, by measuring this flywheel current with the current detection circuit 181, the electromagnet current iL flowing through the electromagnet winding 151 can be detected.

[0045] That is, when the detected current value is smaller than the current command value, both of the transistors 161 and 162 are turned on for a time period corresponding to the pulse width time Tp1 only once in a control cycle Ts (e.g., 100 μs) as shown in Fig. 3. Therefore, the electromagnet current iL during this period increases toward a current value iLmax (not shown) that can flow from the positive electrode 171a to the negative electrode 171b via the transistors 161 and 162.

[0046] On the other hand, when the detected current value is larger than the current command value, both of the transistors 161 and 162 are turned off for a time period corresponding to the pulse width time Tp2 only once during the control cycle Ts, as shown in Fig. 4. Therefore, the electromagnet current iL during this period decreases toward a current value iLmin (not shown) that can be regenerated from the negative pole 171b to the positive pole 171a via the diodes 165 and 166.

[0047] In either case, after the pulse width times Tp1 and Tp2 have elapsed, one of the transistors 161 and 162 is turned on. Therefore, a flywheel current is maintained in the amplifier circuit 150 during this period.

[0048] Next, a description will be given of the gas flow around the exhaust port 133. Fig. 5 is an explanatory diagram showing the gas flow around the exhaust port 133. Fig. 5 is a schematic diagram showing a state in which the vacuum pump 100 is cut along a plane perpendicular to the central axis CL at a height position (near H3) of the gas outlet portion 130.

[0049] 5, when the impeller 103 rotates clockwise around the central axis CL, the gas is discharged in the direction of a velocity vector Vc which is a combination of a velocity vector Va at the gas outlet 130 and a velocity vector Vb generated by being dragged by the impeller 103. The gas then swirls in a buffer space (flow path) 131 formed in an annular shape, and is then discharged from an exhaust port 133.

[0050] Here, the width W of the buffer space 131 is slightly smaller than the radius R of the exhaust port 133, but since the exhaust port 133 is offset in the direction of the central axis CL, the buffer space 131 exists as a sufficient space not only in the radial direction but also in the axial direction. Therefore, the gas discharged from the gas outlet portion 130 in the radial direction of the impeller 103 is smoothly guided through the buffer space 131 to the exhaust port 133 and is discharged from the exhaust port 133 to the outside.

[0051] According to the first embodiment configured as above, the following advantageous effects are achieved.

[0052] Since the height position of the exhaust port 133 is offset downward from the gas outlet portion 130, even if the impeller 103 is damaged, fragments of the impeller 103 are unlikely to scatter from the exhaust port 133. If the impeller 103 is damaged, the fragments of the impeller 103 will fly out from the gas outlet portion 130 in the radial direction of the impeller 103, but since they collide with the inner peripheral wall of the buffer space 131, it is unlikely that the fragments will scatter directly to the outside from the exhaust port 133. Therefore, it is possible to avoid major trouble in a system in which the vacuum pump 100 is installed, and to realize a highly reliable vacuum pump 100.

[0053] Furthermore, since a sufficient buffer space 131 is provided between the gas outlet portion 130 and the exhaust port 133, pressure loss is reduced by this buffer space 131. More specifically, the circumferential velocity component of the gas discharged from the impeller 103 is decelerated while circulating (swirls) in this buffer space 131, so that the amount of gas circulating and remaining in the vacuum pump 100 is reduced, thereby reducing pressure loss. As a result, the gas is smoothly discharged from the exhaust port 133, and the exhaust performance of the vacuum pump 100 is improved.

[0054] In addition, since exhaust port 133 is provided on the side of outer cylinder 127, it is easy to connect piping to exhaust port 133. Furthermore, by providing exhaust port 133 at a position facing internal space 132, the radial position of exhaust port 133 can be made on the inner periphery side (inner in the radial direction) compared to providing a buffer space only in the radial direction, so exhaust port 133 can be made compact in the radial direction. Furthermore, since impeller 103 is magnetically levitated by magnetic bearings 102, it goes without saying that impeller 103 can be rotated at high speed.

[0055] <Variation 1> Fig. 6 is a diagram showing a configuration of an exhaust port according to Modification 1. As shown in Fig. 6, exhaust port 133-1 according to Modification 1 has a shape wider than exhaust port 133 (shown by a two-dot chain line in Fig. 6) shown in Fig. 5. Specifically, the opening of exhaust port 133-1 is approximately twice as large as exhaust port 133.

[0056] According to this configuration, the gas pressure loss is further reduced, and the exhaust performance of the vacuum pump 100 is further improved.

[0057] <Variation 2> Fig. 7 is a diagram showing a configuration of an exhaust port according to Modification 2. The exhaust port 133 (shown by a two-dot chain line in Fig. 7) shown in Fig. 5 and the exhaust port 133-1 shown in Fig. 6 are provided so as to protrude in a direction perpendicular to the central axis CL, whereas the exhaust port 133-2 according to Modification 2 is different in that it protrudes in a tangential direction of the outer cylinder 127.

[0058] According to this configuration, since the exhaust port 133-2 is provided along the exhaust direction of the gas, the gas can smoothly flow toward the exhaust port 133-2 after swirling in the buffer space 131. This further reduces the pressure loss of the gas, thereby further improving the exhaust performance.

[0059] Second embodiment Next, a vacuum pump 200 according to a second embodiment will be described. The same components as those in the first embodiment are denoted by the same reference numerals and will not be described. Fig. 8 is a vertical cross-sectional view of the vacuum pump 200 according to the second embodiment of the present invention.

[0060] As shown in Fig. 8, a vacuum pump 200 according to the second embodiment includes a multi-stage impeller. That is, the vacuum pump shown in Fig. 8 is a multi-stage centrifugal pump. Specifically, an impeller 103 and an impeller 203 are arranged side by side on a central axis CL. The impellers 103 and 203 may have the same structure (specifications) or different structures (specifications). In the second embodiment, an outer cylinder 127c is provided between an outer cylinder 127a and an outer cylinder 127b to accommodate the impellers 103 and 203.

[0061] In the second embodiment, as indicated by the arrow in the figure, gas sucked downward from intake port 101 along central axis CL is redirected radially by impeller 203 and then guided to impeller 103. Thereafter, similar to the first embodiment, the gas is discharged from gas outlet portion 130 of impeller 103, swirls in buffer space 131, and then discharged from exhaust port 133.

[0062] As described above, according to the second embodiment, it is possible to achieve the same effects as those of the first embodiment. In addition, since the impellers are provided in multiple stages, it is suitable for cases where a large-capacity vacuum pump is required.

[0063] Third embodiment Next, a vacuum pump 300 according to a third embodiment will be described. The same components as those in the first embodiment are denoted by the same reference numerals and will not be described. Fig. 9 is a vertical sectional view of the vacuum pump 300 according to the third embodiment of the present invention.

[0064] 9, a vacuum pump 300 according to the third embodiment is a multi-stage vacuum pump consisting of a combination of an axial flow rotor 303 and a centrifugal impeller 103. Specifically, the rotor 303 and the impeller 103 are arranged side by side on a central axis CL in this order from the upstream side of the gas flow. In the third embodiment, an outer cylinder 127c is provided between the outer cylinders 127a and 127b to house the rotor 303 and the impeller 103.

[0065] In the third embodiment, as indicated by the arrow in the figure, gas sucked downward along the central axis CL from the intake port 101 is sent out in the same direction by the rotor 303 and guided to the impeller 103. Thereafter, similar to the first embodiment, the gas is discharged from the gas outlet portion 130 of the impeller 103, swirls in the buffer space 131, and then discharged from the exhaust port 133.

[0066] As described above, according to the third embodiment, it is possible to obtain the same operational effects as those of the first embodiment. In addition, since the axial flow type rotor blades and the centrifugal type impeller are provided in multiple stages, it is suitable for cases where a large-capacity vacuum pump is required.

[0067] The present invention is not limited to the above-described embodiment, and various modifications are possible without departing from the gist of the present invention, and all technical matters included in the technical ideas described in the claims are the subject of the present invention. The above-described embodiment shows a preferred example, but a person skilled in the art can realize various alternatives, modifications, variations, combinations, or improvements from the contents disclosed in this specification, and these are included in the technical scope described in the attached claims.

[0068] For example, if there is space above the outer cylinder 127, the exhaust port 133 may be provided at a position offset upward along the central axis CL from the gas outlet portion 130. Even in this case, debris does not scatter directly from the gas outlet portion 130 toward the exhaust port 133, so a highly reliable vacuum pump can be provided similarly to the above-described embodiment. [Explanation of symbols]

[0069] 100,200,300 Vacuum Pump 101 Air intake 102 Magnetic bearings 103 Impeller (rotor) 113 Rotor shaft (rotating shaft) 127 Casing 130 Gas outlet 131 Buffer space (annular flow path) 132 Space 133, 133-1, 133-2 Exhaust port 203 Impeller (rotor) 303 Rotor

Claims

1. A rotor that rotates around a vertical axis; a magnetic bearing for magnetically levitating a rotation shaft of the rotor; a stator column covering an outer periphery of the magnetic bearing; A casing that houses the rotor; an intake port provided at an upper portion of the casing; an exhaust port provided in a side portion of the casing, on an opposite side to the intake port across the rotor in the direction of the vertical axis, A vacuum pump in which the intake gas is redirected in a radial direction of the rotor by rotation of the rotor, and exhausted from the exhaust port, an annular flow passage formed between a periphery of the rotor and an inner peripheral wall of the casing, for causing gas discharged radially outward from a gas outlet portion of the rotor to collide with an inner wall surface of the casing; an annular space formed between the stator column and an inner circumferential wall of the casing and communicating with the annular flow passage; the exhaust port is provided at a position offset downward in the vertical axis direction from a position of the gas outlet portion of the rotor and at a position facing the annular space, the gas swirls within the annular flow path, collides with the inner wall surface, changes its direction downward in the direction of the vertical axis, and then passes through the annular space to be exhausted from the exhaust port.

2. 2. The vacuum pump according to claim 1, 13. A vacuum pump comprising: a casing having a casing ...

3. 2. The vacuum pump according to claim 1, a lower end position of the gas outlet portion of the rotor in the direction of the vertical axis being spaced a predetermined distance from an upper end position of the exhaust port in the direction of the vertical axis;

4. 2. The vacuum pump according to claim 1, The vacuum pump according to claim 1, wherein the exhaust port is provided so as to protrude in a tangential direction of an outer peripheral surface of the casing.

5. The vacuum pump according to any one of claims 1 to 4, The rotor blades are provided in multiple stages in the direction of the vertical axis, a plurality of rotors, each of which is a centrifugal type rotor that exhausts the gas in a radial direction of the rotor, or a combination of the centrifugal type rotor and an axial flow type rotor that exhausts the gas in the direction of the vertical axis.

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