Displacement Detection Device

Abstract

A displacement detection device (10) comprises: a first plate member (20-1) and a second plate member (20-2) that extend in a predetermined direction; and a sensor (22) that detects displacement. Opposite ends of the first plate member are respectively connected to opposite ends of the second plate member. Each of the first and second plate members has a first end portion (24) and a second end portion (26), and also has a middle portion (28) located between these two end portions. A gap (G) is formed between the middle portion of the first plate member and the middle portion of the second plate member. The sensor detects variation in the gap. When a second member (14) is displaced in the predetermined direction, the amount of variation in the gap is greater than the amount of displacement of the second member.

Description

[Technical field]

[0001] The present invention relates to a displacement detection device that detects the displacement of a second member relative to a first member in a predetermined direction. [Background technology]

[0002] A torque sensor that detects torque is provided on the movable shaft of the collaborative robot. By providing the torque sensor, the collaborative robot has a contact stop function. Also, by providing the torque sensor, the collaborative robot can be operated by direct teach (also called lead-through).

[0003] Some torque sensors use a displacement detection device (displacement sensor). For example, JP 2019-174477 A discloses a torque sensor using a displacement detection device. This displacement detection device detects the displacement of a second member relative to a first member. Summary of the Invention

[0004] In order to accurately control a collaborative robot, etc., it is preferable that the displacement detection device has high sensitivity. For this reason, techniques for increasing the sensitivity of the displacement detection device have been studied.

[0005] The present invention aims to solve the above-mentioned problems.

[0006] An aspect of the present invention is a displacement detection device that detects displacement of a second member in a predetermined direction relative to a first member, comprising a first plate member extending in the predetermined direction, a second plate member extending in the predetermined direction, and a sensor that detects displacement, wherein both ends of the first plate member and both ends of the second plate member are connected to each other, and each of the first plate member and the second plate member has, as both ends, a first end attached to the first member and a second end attached to the second member, and an intermediate portion interposed between the both ends, wherein a gap is formed between the intermediate portion of the first plate member and the intermediate portion of the second plate member, and the sensor detects a fluctuation in the gap, and when the second member is displaced in the predetermined direction, the amount of fluctuation in the gap is greater than the amount of displacement of the second member.

[0007] According to the present invention, the sensitivity of the displacement detection device can be increased. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a configuration diagram of a displacement detection device according to the first embodiment. [Diagram 2] FIG. 2 is a configuration diagram of the displacement detection device of the first embodiment. [Diagram 3] FIG. 3 is a top view of the detection unit according to the second embodiment. [Figure 4] FIG. 4 is a top view of a detection unit according to a modified example of the second embodiment. [Diagram 5] FIG. 5 is a front view of a detection unit according to the third embodiment. [Figure 6] FIG. 6 is a top view of the detection unit according to the third embodiment. [Figure 7] FIG. 7 is a left side view of the detection unit according to the third embodiment. [Figure 8] FIG. 8 is a top view of the detection unit according to the fourth embodiment. [Figure 9] FIG. 9 is a front view of the detection unit according to the fifth embodiment. [Figure 10] FIG. 10 is a front view of a detection section according to a modified example of the fifth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] [1 First embodiment] [1-1 Configuration of the displacement detection device 10] A displacement detection device 10 according to a first embodiment will be described with reference to Figs. 1 and 2. Figs. 1 and 2 are configuration diagrams of the displacement detection device 10 according to the first embodiment. Fig. 1 shows the displacement detection device 10 in a state where no external force is acting on the first member 12 and the second member 14. Fig. 2 shows the displacement detection device 10 in a state where an external force is acting on the second member 14 in a predetermined direction. The displacement detection device 10 is attached to the first member 12 and the second member 14. The displacement detection device 10 detects the displacement of the second member 14 in a predetermined direction relative to the first member 12. In this specification, the configuration, operation, etc. of the displacement detection device 10 will be described using expressions such as up / down and left / right for convenience. However, the configuration, operation, etc. of the displacement detection device 10 are not limited to a specific direction.

[0010] The displacement detection device 10 has a detection section 16 and a detection circuit 18. The detection section 16 has two plate members 20 (a first plate member 20-1 and a second plate member 20-2) and a sensor 22. In the following description, the configuration marked with the reference symbol "x-1" (x is a number) is the configuration of the first plate member 20-1. Similarly, the configuration marked with the reference symbol "x-2" (x is a number) is the configuration of the second plate member 20-2. In addition, of the surfaces of each plate member 20, the surface facing the direction in which the intermediate portion 28 protrudes is defined as a first surface, and the surface opposite to the first surface is defined as a second surface.

[0011] Each plate member 20 is formed by pressing a metal flat plate that is long in the left-right direction. Each plate member 20 has a first end 24, a second end 26, and an intermediate portion 28. The shape of the first plate member 20-1 and the shape of the second plate member 20-2 are identical to each other. Each plate member 20 extends in the left-right direction. In the first plate member 20-1, the first end 24-1 and the second end 26-1 extend in the left-right direction, and the intermediate portion 28-1 protrudes in an upward direction perpendicular to the left-right direction. In the second plate member 20-2, the first end 24-2 and the second end 26-2 extend in the left-right direction, and the intermediate portion 28-2 protrudes in a downward direction perpendicular to the left-right direction.

[0012] The first end 24 (24-1, 24-2) includes the left end of the plate member 20. The second end 26 (26-1, 26-2) includes the right end of the plate member 20. The first end 24 and the second end 26 are parallel to each other in the left-right direction. The first end 24-1 and the second end 26-1 are located at the lowest position in the first plate member 20-1. The first end 24-2 and the second end 26-2 are located at the highest position in the second plate member 20-2. The second surface (lower surface) of the first end 24-1 and the second surface (upper surface) of the first end 24-2 are connected to each other by adhesive, welding, or the like. Similarly, the second surface (lower surface) of the second end 26-1 and the second surface (upper surface) of the second end 26-2 are connected to each other by adhesive, welding, or the like. At least one of the first end 24-1 and the first end 24-2 is attached to the first member 12. At least one of the second end portion 26-1 and the second end portion 26-2 is attached to the second member 14.

[0013] The intermediate portion 28 (28-1, 28-2) is located between the first end portion 24 and the second end portion 26. The intermediate portion 28 is connected to the first end portion 24 and the second end portion 26. Furthermore, each intermediate portion 28 has a holding portion 30, a first inclined portion 32, and a second inclined portion 34. Each holding portion 30 holds a sensor 22. Each holding portion 30 is parallel to the left-right direction. The holding portion 30-1 is located at the uppermost position of the first plate member 20-1. The holding portion 30-2 is located at the lowermost position of the second plate member 20-2. The holding portion 30-1 is located above the holding portion 30-2. The holding portion 30-1 and the holding portion 30-2 are spaced apart from each other. The first inclined portion 32 is located between the holding portion 30 and the first end portion 24, and is connected to the holding portion 30 and the first end portion 24. The second inclined portion 34 is located between the holding portion 30 and the second end 26, and is connected to the holding portion 30 and the second end 26. The first inclined portion 32 and the second inclined portion 34 are inclined by an inclination angle θ with respect to the left-right direction. The inclination direction of the first inclined portion 32 and the inclination direction of the second inclined portion 34 are opposite to each other. The initial value of the inclination angle θ is less than 45 degrees. The initial value of the inclination angle θ is the angle when no external force is acting on the first member 12 and the second member 14.

[0014] The plate member 20 protrudes in the up-down direction by bending at four points. That is, the plate member 20 bends at the boundary between the first end 24 and the first inclined portion 32 and the boundary between the second end 26 and the second inclined portion 34. The plate member 20 also bends at the boundary between the first inclined portion 32 and the holding portion 30 and the boundary between the second inclined portion 34 and the holding portion 30. The plate member 20 may protrude in the up-down direction by curving.

[0015] The sensor 22 is a capacitance sensor whose capacitance value changes according to a change in the distance between a pair of opposing electrodes 22a, 22b. One opposing electrode 22a is attached to the second surface (lower surface) of the holding part 30-1. The opposing electrode 22a is insulated from the holding part 30-1. The other opposing electrode 22b is attached to the second surface (upper surface) of the holding part 30-2. The opposing electrode 22b is insulated from the holding part 30-2. A gap G is formed between the opposing electrodes 22a and 22b. The gap G can expand and contract in the vertical direction in accordance with the left-right displacement of the second member 14 relative to the first member 12.

[0016] The sensor 22 does not have to be a capacitance sensor. For example, the sensor 22 may include a strain gauge. The sensor 22 may also include a piezoelectric element.

[0017] The detection circuit 18 is connected to each of the opposing electrodes 22a, 22b by conductors (not shown). The detection circuit 18 applies a predetermined voltage between the pair of opposing electrodes 22a, 22b and detects the capacitance value of the pair of opposing electrodes 22a, 22b. The detection value of the detection circuit 18 is output to a calculation device (not shown) such as a computer. The calculation device stores a table or a calculation formula in advance. The table or the calculation formula corresponds the amount of change in the capacitance value to the amount of displacement in a predetermined direction (left-right direction) of the second member 14 relative to the first member 12. The table or the calculation formula also corresponds the amount of change in the capacitance value to an external force acting in a predetermined direction (left-right direction).

[0018] [1-2 Operation of the displacement detection device 10] When an external force that pulls the second member 14 to the right acts, the displacement detection device 10 changes from the state shown in FIG. 1 to the state shown in FIG. 2. When the second member 14 is displaced to the right, each of the second ends 26 is displaced to the right. With the displacement of each of the second ends 26 to the right, each of the plate members 20 is elastically deformed, and the inclination angle θ of the first inclined portion 32 and the inclination angle θ of the second inclined portion 34 become smaller. When the inclination angle θ of the first inclined portion 32-1 and the inclination angle θ of the second inclined portion 34-1 each become smaller, the holding portion 30-1 is displaced downward. When the inclination angle θ of the first inclined portion 32-2 and the inclination angle θ of the second inclined portion 34-2 each become smaller, the holding portion 30-2 is displaced upward. Then, the holding portion 30-1 and the holding portion 30-2 approach each other, and the counter electrodes 22a and 22b approach each other. As a result, the gap G becomes smaller.

[0019] On the other hand, when the second member 14 is displaced to the left, each of the second ends 26 is displaced to the left. With the displacement of the second ends 26 to the left, each of the plate members 20 is elastically deformed, and the inclination angle θ of the first inclined portion 32 and the inclination angle θ of the second inclined portion 34 increase. When the inclination angle θ of the first inclined portion 32-1 and the inclination angle θ of the second inclined portion 34-1 increase, the holding portion 30-1 is displaced upward. When the inclination angle θ of the first inclined portion 32-2 and the inclination angle θ of the second inclined portion 34-2 increase, the holding portion 30-2 is displaced downward. Then, the holding portion 30-1 and the holding portion 30-2 move away from each other, and the counter electrodes 22a and 22b move away from each other. As a result, the gap G increases.

[0020] It should be noted that the first member 12 may be displaced in the left-right direction relative to the second member 14, rather than the second member 14 being displaced in the left-right direction relative to the first member 12.

[0021] The calculation device calculates the amount of displacement of the second member 14 relative to the first member 12 and the external force acting in the direction of the displacement, based on the capacitance value detected by the detection circuit 18 and a table or the like stored in advance.

[0022] [1-3 Function and effect of the displacement detection device 10] In the first embodiment, the movement of the second member 14 in the left-right direction relative to the first member 12 is converted into a movement that varies the gap G. The direction in which the gap G varies (up-down direction) is perpendicular to the direction in which the second member 14 is displaced (left-right direction). Each plate member 20 amplifies the amount of displacement of the second member 14 and transmits it to the sensor 22.

[0023] In the first embodiment, the initial value of the inclination angle θ of the first inclined portion 32 and the initial value of the inclination angle θ of the second inclined portion 34 are less than 45 degrees. Therefore, the amount of change in the gap G when the second member 14 is displaced left and right is greater than the amount of displacement of the second member 14. In addition, in the first embodiment, both the counter electrodes 22a and 22b are displaced with the displacement of the second member 14. Therefore, the amount of change in the gap G becomes even greater. The fact that the amount of change in the gap G is greater than the amount of displacement of the second member 14 means that the sensitivity to detect the displacement is increased. In other words, according to the first embodiment, the sensitivity to detect the displacement of the second member 14 can be increased.

[0024] In the first embodiment, the second surfaces of the two plate members 20 are connected to each other. This allows the initial value of the gap G to be small. A small initial value of the gap G means that the sensitivity of the displacement detection is high. According to the first embodiment, in this respect as well, the sensitivity of detecting the displacement of the second member 14 can be increased.

[0025] [2 Second embodiment] A displacement detection device 10 of a second embodiment will be described with reference to Figs. 3 and 4. Fig. 3 is a top view of a detection unit 16 of the second embodiment. Fig. 4 is a top view of a detection unit 16 of a modified example of the second embodiment. The displacement detection device 10 of the second embodiment is an improved example of the displacement detection device 10 of the first embodiment. The displacement detection device 10 of the second embodiment includes all of the configurations of the displacement detection device 10 of the first embodiment. Furthermore, the operation of the displacement detection device 10 of the second embodiment is basically the same as the operation of the displacement detection device 10 of the first embodiment. In the description of the second embodiment, the same configurations as those of the first embodiment are denoted by the same reference numerals, and description of those configurations will be omitted.

[0026] The second members 14 shown in Fig. 1 and the like can be displaced in the width direction of each plate member 20. The width direction is perpendicular to the left-right direction and the up-down direction. If the amount of displacement of the second members 14 in the width direction becomes large, there is a risk that the gap G will fluctuate. The second embodiment prevents the displacement of the second members 14 in the width direction from being converted into a fluctuation in the gap G.

[0027] [2-1 Configuration of the displacement detection device 10] In the second embodiment, a first hole 36 is formed in the first inclined portion 32, penetrating vertically. The shape of the first hole 36 is not particularly limited. The shape of the first hole 36 may be, for example, a perfect circle, an ellipse, a polygon, an elongated hole, or the like. As shown in FIG. 4, the shape of the first hole 36 may be irregular. The position of the first hole 36 is also not particularly limited. There may be one first hole 36, or there may be multiple first holes 36. The first hole 36 may be disposed near the first end 24, or may be disposed near the holding portion 30. The first hole 36 may be formed from the first end 24 to the holding portion 30.

[0028] Similar to the first inclined portion 32, second holes 38 are formed in the second inclined portion 34 penetrating vertically. The shape, number, position, etc. of the second holes 38 are the same as the shape, number, position, etc. of the first holes 36.

[0029] Although FIG. 3 shows the configuration of the first plate member 20-1, the configuration of the second plate member 20-2 is the same as the configuration of the first plate member 20-1.

[0030] [2-2 Effects of the displacement detection device 10] The first inclined portion 32 and the second inclined portion 34 having holes are more easily deformed in the width direction than the first inclined portion 32 and the second inclined portion 34 having no holes. That is, in the second embodiment, the first inclined portion 32 and the second inclined portion 34 have flexibility. According to the second embodiment, even if the amount of displacement of the second member 14 in the width direction increases, the first inclined portion 32 and the second inclined portion 34 can flexibly deform in the width direction. Therefore, the fluctuation of the gap G caused by the displacement of the second member 14 in the width direction is suppressed. That is, erroneous detection by the displacement detection device 10 caused by the displacement of the second member 14 in the width direction is suppressed.

[0031] [3 Third embodiment] A displacement detection device 10 according to a third embodiment will be described with reference to Figs. 5 to 7. Fig. 5 is a front view of the detection unit 16 according to the third embodiment. Fig. 6 is a top view of the detection unit 16 according to the third embodiment. Fig. 7 is a left side view of the detection unit 16 according to the third embodiment. The displacement detection device 10 according to the third embodiment is an improved example of the displacement detection device 10 according to the first embodiment. The displacement detection device 10 according to the third embodiment includes all of the configurations of the displacement detection device 10 according to the first embodiment. Furthermore, the operation of the displacement detection device 10 according to the third embodiment is basically the same as the operation of the displacement detection device 10 according to the first embodiment. In the description of the third embodiment, the same configurations as those in the first embodiment are denoted by the same reference numerals, and the description of those configurations will be omitted.

[0032] In the first embodiment, when the inclination angle θ of the first inclined portion 32-1 becomes larger than the initial value, a force acts to displace the first end portion 24-1 upward. On the other hand, when the inclination angle θ of the first inclined portion 32-2 becomes larger than the initial value, a force acts to displace the first end portion 24-2 downward. In this way, a force acts on the two first end portions 24 to separate the connection portions. The same applies to the second end portion 26-1 and the second end portion 26-2. The third embodiment prevents the two first end portions 24 from being separated and the two second end portions 26 from being separated.

[0033] [3-1 Configuration of the displacement detection device 10] In the third embodiment, the detection unit 16 has two fixing parts 40. One fixing part 40 prevents the two first ends 24 from peeling off. The other fixing part 40 prevents the two second ends 26 from peeling off. The two fixing parts 40 have the same structure and function. The fixing part 40 that prevents the two first ends 24 from peeling off will be described below.

[0034] The fixing portion 40 has a first fixing member 42, a second fixing member 44, and a plurality of fastening members 46. The first fixing member 42 and the second fixing member 44 are, for example, metal. Preferably, the first fixing member 42 and the second fixing member 44 are metals harder than the plate member 20. The first fixing member 42 is larger than the first end 24-1. The first fixing member 42 is located above the first end 24-1 and contacts the first surface (upper surface) of the first end 24-1. The second fixing member 44 is larger than the first end 24-2. The second fixing member 44 is located below the first end 24-2 and contacts the first surface (lower surface) of the first end 24-2. The fastening members 46 are bolts, nuts, screws, etc. The plurality of fastening members 46 fix the four corners of the first fixing member 42 and the second fixing member 44. In this manner, the fixing portion 40 clamps the two first ends 24 and presses them against each other, thereby fixing the two first ends 24 to each other.

[0035] It is not necessary for the first fixing member 42 and the second fixing member 44 to sandwich the entire two first end portions 24. It is sufficient for the first fixing member 42 and the second fixing member 44 to sandwich the portions of the two first end portions 24 that are adjacent to the two first inclined portions 32.

[0036] Furthermore, the first fixing member 42 has a first positioning portion 48. The first positioning portion 48 protrudes in the left direction. Furthermore, the second fixing member 44 has two second positioning portions 50a, 50b. The two second positioning portions 50a, 50b protrude in the left direction and further extend upward. The second positioning portion 50a abuts one end of the first positioning portion 48 in the width direction. The second positioning portion 50b abuts the other end of the first positioning portion 48 in the width direction. In this way, the second positioning portion 50a and the second positioning portion 50b sandwich the first positioning portion 48. As a result, the second fixing member 44 positions the first fixing member 42.

[0037] The first positioning portion 48 may protrude in the width direction of the first fixing member 42. In this case, the two second positioning portions 50a, 50b also protrude in the same direction as the protruding direction of the first positioning portion 48. Also, instead of the two second positioning portions 50a, 50b extending upward, the first positioning portion 48 may extend downward. Also, two first positioning portions 48 may be provided. In short, it is only necessary that a portion of the first fixing member 42 parallel to the vertical direction and a portion of the second fixing member 44 parallel to the vertical direction come into contact with each other, and as a result, the first fixing member 42 is positioned relative to the second fixing member 44.

[0038] [3-2 Effects of the displacement detection device 10] In the third embodiment, the fixing portion 40 fixes the first end 24-1 and the first end 24-2 by pressing them against each other. Therefore, according to the third embodiment, it is possible to prevent the first end 24-1 from being peeled off from the first end 24-2. Similarly, according to the third embodiment, it is possible to prevent the second end 26-1 from being peeled off from the second end 26-2.

[0039] Furthermore, when the first fixing member 42 is screwed to the second fixing member 44, a force is applied to the first fixing member 42 to rotate it about an axis extending in the vertical direction. For this reason, the first fixing member 42 may become misaligned with respect to the first end portion 24. In contrast, in the third embodiment, the first fixing member 42 is positioned with respect to the second fixing member 44. In other words, according to the third embodiment, it is possible to prevent the first fixing member 42 from becoming misaligned with respect to the first end portion 24.

[0040] [4 Fourth embodiment] The displacement detection device 10 of the fourth embodiment will be described with reference to FIG. 8. FIG. 8 is a top view of the detection unit 16 of the fourth embodiment. The displacement detection device 10 of the fourth embodiment is an improved example of the displacement detection device 10 of the first embodiment. The displacement detection device 10 of the fourth embodiment includes all of the configurations of the displacement detection device 10 of the first embodiment. Moreover, the operation of the displacement detection device 10 of the fourth embodiment is basically the same as the operation of the displacement detection device 10 of the first embodiment. In the description of the fourth embodiment, the same configurations as those of the first embodiment are denoted by the same reference numerals, and the description of those configurations will be omitted.

[0041] [4-1 Configuration of the displacement detection device 10] In the fourth embodiment, the width direction length of the holding portion 30 is longer than the width direction lengths of the first end portion 24, the first inclined portion 32, the second inclined portion 34, and the second end portion 26. The width direction length of the pair of opposing electrodes 22a, 22b is also longer than the width direction lengths of the first end portion 24, the first inclined portion 32, the second inclined portion 34, and the second end portion 26. The width direction length of each of the holding portions 30 is equal to or longer than the width direction length of each of the opposing electrodes 22a, 22b.

[0042] [4-2 Effects of the displacement detection device 10] When the width direction length of the holding portion 30 is longer than the width direction length of other parts of the plate member 20 as in the fourth embodiment, it becomes possible to elongate the pair of opposing electrodes 22a, 22b in the width direction. Therefore, according to the fourth embodiment, the area of ​​the pair of opposing electrodes 22a, 22b can be increased without changing the left-right length of the detection portion 16. In other words, according to the fourth embodiment, the sensitivity for detecting the displacement of the second member 14 can be increased.

[0043] [5 Fifth embodiment] A displacement detection device 10 of a fifth embodiment will be described with reference to FIG. 9. FIG. 9 is a front view of a detection unit 16 of the fifth embodiment. The displacement detection device 10 of the fifth embodiment is an improved example of the displacement detection device 10 of the first embodiment. The displacement detection device 10 of the fifth embodiment includes the configuration of the displacement detection device 10 of the first embodiment. Moreover, the operation of the displacement detection device 10 of the fifth embodiment is basically the same as the operation of the displacement detection device 10 of the first embodiment. In the description of the fifth embodiment, the same components as those of the first embodiment are denoted by the same reference numerals, and description of those components will be omitted.

[0044] External forces act on the displacement detection device 10 from various directions. The holding portion 30-1 is deformed by an unintended external force. For example, an external force in a torsional direction may act on the holding portion 30-1 and the holding portion 30-2, causing deformation. When the holding portion 30-1 and the holding portion 30-2 are deformed, the pair of opposing electrodes 22a, 22b are also deformed. Then, the gap G between the opposing electrodes 22a, 22b becomes non-uniform, and the accuracy of the sensor 22 decreases. The fifth embodiment prevents deformation of the pair of opposing electrodes 22a, 22b.

[0045] [5-1 Configuration of the displacement detection device 10] In the fifth embodiment, the holding portion 30 (30-1, 30-2) is reinforced by a reinforcing plate 52 (52a, 52b). The reinforcing plate 52 is, for example, a metal. Preferably, the reinforcing plate 52 is a metal harder than the plate member 20. The reinforcing plate 52a is attached to the second surface (lower surface) of the holding portion 30-1. The counter electrode 22a is attached to the reinforcing plate 52a. The reinforcing plate 52a contacts the entire upper surface of the counter electrode 22a. The counter electrode 22a and the reinforcing plate 52a are insulated from each other. In this way, the reinforcing plate 52a is interposed between the holding portion 30-1 and the counter electrode 22a. Similarly, the reinforcing plate 52b is interposed between the holding portion 30-2 and the counter electrode 22b.

[0046] [5-2 Effects of the displacement detection device 10] Each reinforcing plate 52 prevents deformation of the pair of counter electrodes 22a, 22b by preventing deformation of each holding portion 30. That is, according to the fifth embodiment, the gap G between the counter electrodes 22a and 22b can be made uniform. Therefore, it is possible to prevent the accuracy of the sensor 22 from decreasing.

[0047] [5-3 Modification of the fifth embodiment] Fig. 10 is a front view of the detection unit 16 of a modified example of the fifth embodiment. As shown in Fig. 10, the reinforcing plate 52 may be attached to the first surface (upper surface) of the holding unit 30. In other words, the reinforcing plate 52a may be attached to the surface (upper surface) opposite to the surface (lower surface) of the holding unit 30-1 on which the counter electrode 22a is attached. In this case, the reinforcing plate 52a covers the area behind the area on the holding unit 30-1 on which the counter electrode 22a is attached. The same applies to the reinforcing plate 52b.

[0048] [6 Other embodiments] It is also possible to combine one or more of the second to fifth embodiments.

[0049] [7 Inventions Obtained from the Embodiments] The invention that can be understood from the above embodiment will be described below.

[0050] An aspect of the present invention is a displacement detection device (10) that detects displacement of a second member (14) relative to a first member (12) in a predetermined direction, the device comprising: a first plate member (20-1) extending in the predetermined direction; a second plate member (20-2) extending in the predetermined direction; and a sensor (22) that detects displacement, wherein both ends of the first plate member and both ends of the second plate member are connected to each other, and each of the first plate member and the second plate member has, as both ends, a first end (24) attached to the first member and a second end (26) attached to the second member, and an intermediate portion (28) interposed between the both ends, a gap (G) is formed between the intermediate portion of the first plate member and the intermediate portion of the second plate member, the sensor detects a fluctuation in the gap, and when the second member is displaced in the predetermined direction, the amount of fluctuation in the gap is greater than the amount of displacement of the second member.

[0051] In an embodiment of the present invention, the intermediate portion of the first plate member and the intermediate portion of the second plate member may each have a holding portion (30) that holds the sensor, a first inclined portion (32) located between the holding portion and the first end portion and inclined with respect to the specified direction, and a second inclined portion (34) located between the holding portion and the second end portion and inclined with respect to the specified direction.

[0052] In an aspect of the invention, each of the first and second sloped portions may have one or more holes (36, 38).

[0053] In an aspect of the present invention, the intermediate portion of the first plate member and the intermediate portion of the second plate member may each have a holding portion for holding the sensor and one or more holes formed in a portion other than the holding portion.

[0054] In an aspect of the present invention, a fixing portion (40) may be provided that fixes the first end portion of the first plate member and the first end portion of the second plate member to each other.

[0055] In an embodiment of the present invention, the fixing portion may have a first fixing member (42) and a second fixing member (44) that sandwich the two first ends and press them against each other, and the second fixing member may position the first fixing member by contacting the first fixing member.

[0056] In an aspect of the present invention, the intermediate portion of the first plate member and the intermediate portion of the second plate member each have a holding portion that holds the sensor, a first inclined portion located between the holding portion and the first end portion and inclined with respect to the specified direction, and a second inclined portion located between the holding portion and the second end portion and inclined with respect to the specified direction, and the sensor is a capacitance sensor whose capacitance value changes in accordance with a change in the distance between a pair of opposing electrodes (22a, 22b), and the length of each of the opposing electrodes in a width direction perpendicular to the specified direction may be longer than the length of the first inclined portion and the length of the second inclined portion in the width direction.

[0057] In an aspect of the present invention, the intermediate portion of the first plate member and the intermediate portion of the second plate member each have a holding portion for holding the sensor, the sensor being a capacitance sensor whose capacitance value changes in response to a change in the distance between a pair of opposing electrodes, and the holding portion may be reinforced by a reinforcing plate (52).

[0058] In an aspect of the present invention, the reinforcing plate may be interposed between the holding portion and the counter electrode.

[0059] In an aspect of the present invention, the reinforcing plate may be attached to a surface of the holding portion opposite to a surface to which the counter electrode is attached. [Explanation of symbols]

[0060] 10: Displacement detection device 12: First member 14: Second member 20-1: First plate member 20-2: Second plate member 22: Sensor 22a, 22b...counter electrodes 24, 24-1, 24-2...first end 26, 26-1, 26-2…Second end 28, 28-1, 28-2...middle section 30, 30-1, 30-2...holding part 32, 32-1, 32-2...first slope 34, 34-1, 34-2...Second slope part 36...First hole (hole) 38...Second hole (hole) 40...Fixing part 42...First fixing member 44...Second fixing member

Claims

1. A displacement detection device (10) that detects a displacement of a second member (14) relative to a first member (12) in a predetermined direction, A first plate member (20-1) extending in the predetermined direction; A second plate member (20-2) extending in the predetermined direction; A sensor (22) for detecting a displacement; Equipped with Both ends of the first plate member and both ends of the second plate member are connected to each other, Each of the first plate member and the second plate member has, as both end portions, a first end portion (24) attached to the first member and a second end portion (26) attached to the second member, and has an intermediate portion (28) interposed between the both end portions; A gap (G) is formed between the intermediate portion of the first plate member and the intermediate portion of the second plate member, The sensor detects a variation in the gap; A displacement detection device, wherein when the second member is displaced in the predetermined direction, an amount of change in the gap is greater than an amount of displacement of the second member.

2. The displacement detection device according to claim 1 , Each of the intermediate portion of the first plate member and the intermediate portion of the second plate member is A holder (30) for holding the sensor; a first inclined portion (32) located between the holding portion and the first end portion and inclined with respect to the predetermined direction; a second inclined portion (34) located between the holding portion and the second end portion and inclined with respect to the predetermined direction.

3. The displacement detection device according to claim 2, The first and second ramps each have one or more holes (36, 38).

4. The displacement detection device according to claim 1 , Each of the intermediate portion of the first plate member and the intermediate portion of the second plate member is A holder for holding the sensor; One or more holes formed in a portion other than the holding portion; A displacement detection device comprising:

5. The displacement detection device according to claim 1 , A displacement detection device comprising a fixing portion (40) that fixes the first end of the first plate member and the first end of the second plate member to each other.

6. The displacement detection device according to claim 5, The fixing portion has a first fixing member (42) and a second fixing member (44) that sandwich the two first ends and press them against each other, A displacement detection device, wherein the second fixed member positions the first fixed member by contacting the first fixed member.

7. The displacement detection device according to claim 1 , Each of the intermediate portion of the first plate member and the intermediate portion of the second plate member is A holder for holding the sensor; a first inclined portion located between the holding portion and the first end portion and inclined with respect to the predetermined direction; a second inclined portion located between the holding portion and the second end portion and inclined with respect to the predetermined direction, The sensor is a capacitance sensor whose capacitance value changes in response to a change in the distance between a pair of opposing electrodes (22a, 22b), a length of each of the opposing electrodes in a width direction perpendicular to the predetermined direction is longer than a length of the first inclined portion and a length of the second inclined portion in the width direction.

8. The displacement detection device according to claim 1 , the intermediate portion of the first plate member and the intermediate portion of the second plate member each have a holding portion that holds the sensor, the sensor is a capacitance sensor whose capacitance value changes in response to a change in the distance between a pair of opposing electrodes; The displacement detection device, wherein the holding portion is reinforced by a reinforcing plate (52).

9. The displacement detection device according to claim 8, The reinforcing plate is interposed between the holding portion and the counter electrode.

10. The displacement detection device according to claim 8, The reinforcing plate is attached to a surface of the holding portion opposite to a surface on which the counter electrode is attached.

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