Valve device

Abstract

The obturator (5) obturates the valve housing openings (6) and (7) in the closed position and opens the valve housing openings (6) and (7) in the open position. The attachment housing (9) and the thrust pipe (10) together enclose a conduit hollow space (11) of the attachment (8) for passing a fluid through the attachment (8). The attachment housing (9) is fixed to the outside of the valve housing (2). With the obturator (5) in the open position, the thrust pipe (10) of the attachment (8) can be introduced into the internal space (3) of the valve housing (2).

Description

[Technical field]

[0001] The present invention relates to a valve arrangement comprising a valve, in particular a vacuum valve, comprising a valve housing and a closing member arranged in an interior space of the valve housing such that it can be driven back and forth by a valve actuator of the valve between a closed position and an open position, in which two coaxial valve housing openings are arranged, the closing member being adapted to close the valve housing openings in the closed position and to open the valve housing openings in the open position. [Background technology]

[0002] Various configurations of valves of said type, in particular vacuum valves, are known, and in particular in vacuum technology, problems always arise with regard to the contamination of the inner space of the valve housing when the corresponding contaminants or contaminated fluids pass through the valve and thus through the inner space of the valve housing (see, for example, US Pat. No. 5,399,323).

[0003] In order to avoid contamination of the inner space of the valve housing, EP 1 269 636 A1 proposes a tubular extension in the closure, in which a tube is connected to the valve housing opening, so that when the closure is in the open position, the fluid transported through the open valve does not penetrate into the inner space of the valve housing. For this purpose, EP 1 269 636 A1 proposes a special, relatively complex closure, in which the means for preventing contamination of the inner space of the valve housing are permanently arranged. For this purpose, the valve housing must be designed to be specially adapted and relatively large. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] International Publication WO2011 / 105737A2 Summary of the Invention [Problem to be solved by the invention]

[0005] The object of the present invention is to provide an alternative means for solving said problems. [Means for solving the problem]

[0006] To solve this problem, the invention proposes the solution according to claim 1.

[0007] According to the invention, the valve device comprises an attachment having an attachment housing and a thrust pipe displaceably arranged in the attachment housing, the attachment housing and the thrust pipe together enclose a conduit hollow space of the attachment for passing a fluid through the attachment, and the thrust pipe of the attachment is guideable with respect to the internal space of the valve housing when the attachment housing is fixed to the outside of the valve housing and the obturator is in an open position.

[0008] Thus, in contrast to the prior art, the means for preventing contamination of the interior space of the valve housing are no longer part of the valve itself, but are configured in the form of an attachment, which is fixed to the valve housing either permanently or non-destructively and removably. The thrust pipe, which is displaceably attached to the attachment housing, can be led into the interior space of the valve housing, so that the contaminated fluid can pass through the valve housing via the conduit hollow space of the attachment housing and the thrust pipe without penetrating into the area of ​​the interior space of the valve housing surrounded by the thrust pipe. This allows the fluid to flow through the valve housing only via the conduit hollow space of the attachment and the thrust pipe, leaving the rest of the interior of the valve housing, in particular the obturation member, uncontaminated.

[0009] Since the attachment is at least initially separate from the valve, it can be retrofitted to existing valves in any area in order to specially adapt the valve to operation with dirty or contaminated fluids, in which the attachment is arranged on the valve according to the invention. According to the invention, the attachment housing is fixed to the outside of the valve housing. The attachment housing is arranged outside the interior space of the valve housing. As mentioned above, in principle the attachment housing can be permanently or integrally attached to the valve housing, for example by welding, soldering, etc. Preferably, the attachment housing is fixed to the valve housing in a non-destructively removable manner. This can be, for example, a screw connection, a clamp connection or another mechanical connection.

[0010] The open position of the obturator, in which the thrust pipe of the attachment can be led into the interior space of the valve housing, is preferably the maximum open position of the obturator. In the maximum open position, the obturator preferably completely opens the valve housing opening, which is an opening of the valve housing through which fluid can flow into and out of the interior space of the valve housing in the absence of the thrust pipe. The valve housing openings are arranged in mutual alignment such that the thrust pipe is led into both valve housing openings. The valve device according to the invention can be constructed by employing various known valves. The various configurations also apply in particular to the obturator of the valve. A wide variety of designs are possible depending on the shape and size of the opening of the valve housing. The obturator can be an obturator plate or an obturator disk, as well as a needle or other obturator.

[0011] In a preferred embodiment of the invention, when the obturator is in the open position, the thrust pipe of the attachment can be led to the valve housing opening of the valve housing, in which in the led end position the thrust pipe passes through both valve housing openings simultaneously.

[0012] It is particularly preferred that the conduit hollow space of the attachment is sealed against the inner space of the valve housing at the end of the thrust pipe which is led to the valve housing opening of the valve housing. This effectively prevents contaminated fluids transported through the conduit hollow space of the attachment from penetrating into the remaining part of the inner space of the valve housing. The degree of sealing or sealing can be adapted to the individual pressure conditions and other circumstances of the respective embodiment. In each case, the sealing must be designed so that no fluid can penetrate from the conduit hollow space into the inner space of the valve housing. For this purpose, known sealing rings may be provided between the valve housing and the outer surface of the thrust pipe. The thrust pipe may be arranged in such a way that a seal is achieved in the region of the valve housing surrounding the valve housing opening. With regard to the sealing, it is preferred that the thrust pipe and / or the attachment housing are designed to be closed in the circumferential direction.

[0013] In order to avoid as much as possible the deposition of contaminants, it is preferred that the valve arrangement according to the invention comprises a temperature regulating device for regulating the temperature of the thrust pipe and / or the attachment housing. The temperature regulating device may be a heating device or a cooling device or both. The role of the temperature regulating device is to regulate the temperature of the thrust pipe and / or the attachment housing, i.e. to a temperature such that the deposition of contaminants by the fluid passing therethrough is avoided or reduced.

[0014] The thrust pipe is preferably sealed off relative to the valve housing at its start or at its end where it leads into the valve housing opening in the area of ​​the respective valve housing opening.

[0015] In order for the obturator to be introduced into the interior space of the valve housing in the open state, in a preferred variant of the invention, the thrust pipe preferably protrudes from the attachment housing at a start position or at an end position leading to the interior space of the valve housing, preferably to a valve housing opening in the valve housing, whereas at the opposite start position, the thrust pipe may be located completely inside the attachment housing or may protrude less from the attachment housing.

[0016] In a preferred variant of the invention, the valve housing may have a valve housing flange at each valve housing opening. Preferably, a respective valve housing flange surrounds a respective valve housing opening. The attachment housing preferably has a valve-side flange so that it can be fixed to the valve housing, preferably to the corresponding valve housing flange. Furthermore, the attachment housing preferably has a conduit-side flange so that the attachment can be attached to the inlet and / or outlet conduits or to another component.

[0017] The attachment housing preferably comprises a valve-side flange for preferably non-destructively removable attachment of the attachment to the valve housing, preferably to a valve housing flange of the valve housing, and the thrust pipe is preferably led through the valve-side flange through a valve housing opening of the valve housing. It is preferred that the attachment housing has a conduit-side flange for preferably non-destructively removable attachment of the attachment to the inlet / outlet conduit or to another component. Thus, in a preferred embodiment, the attachment is arranged between the valve housing and the inlet / outlet conduit or one of the inlet / outlet conduits.

[0018] In principle, the attachment may also be designed in such a way that the thrust pipe can be displaced relative to the attachment housing by hand. According to a preferred variant of the invention, the attachment comprises at least one electric actuator for displacing the thrust pipe relative to the attachment housing. The term "electric actuator" is known in the prior art and includes all actuators suitable for realizing a displacement without the need for manual action. The electric actuator may for example be a pneumatic or hydraulic, electric or other known actuator of the drive type, in particular a linear actuator.

[0019] The electric actuator may be designed in various forms and arranged in various ways in the attachment, for example the electric actuator may be arranged outside the conduit hollow space of the attachment, the invention may likewise be implemented in various forms and the electric actuator may be arranged inside the conduit hollow space of the attachment.

[0020] Preferably, the electric actuator for moving the thrust pipe relative to the attachment housing and the valve actuator are synchronized with each other so that the obturator and the thrust pipe do not collide or interfere with each other and / or so that the thrust pipe is always fully introduced into the inner space of the valve housing with the obturator in the open position, preferably in the maximally open position. The synchronization of the electric actuator and the valve actuation can be performed, for example, by a control device which controls the valve actuator on the one hand and the electric actuator of the attachment on the other hand, so that the thrust pipe is conducted through the inner space of the valve housing with the obturator in the open position. To synchronize the two actuators, the electric actuator and the valve actuator can be mechanically, hydraulically or pneumatically connected.

[0021] The valves of the valve device according to the invention are so-called vacuum valves, which are applicable to vacuum technology. In principle, operating conditions at pressures below 0.001 mbar (millibar) or 0.1 Pascal are referred to as vacuum technology. Vacuum valves are valves designed for these pressure ranges and / or the corresponding pressure differentials relative to the environment. Valves designed for pressures below normal pressures, i.e. below 1 bar, are generally called vacuum valves.

[0022] Further features and details of the preferred variants of the invention are described below according to embodiments of the invention. [Brief description of the drawings]

[0023] [Figure 1] FIG. 1 is an explanatory diagram of a valve device according to a first embodiment of the present invention. [Diagram 2] FIG. 1 is an explanatory diagram of a valve device according to a first embodiment of the present invention. [Diagram 3] FIG. 1 is an explanatory diagram of a valve device according to a first embodiment of the present invention. [Figure 4] FIG. 6 is an explanatory diagram of a valve device according to a second embodiment of the present invention. [Diagram 5] FIG. 6 is an explanatory diagram of a valve device according to a second embodiment of the present invention. [Figure 6] FIG. 6 is an explanatory diagram of a valve device according to a second embodiment of the present invention. [Figure 7] FIG. 6 is an explanatory diagram of a valve device according to a second embodiment of the present invention. [Figure 8] FIG. 6 is an explanatory diagram of a valve device according to a second embodiment of the present invention. [Figure 9] FIG. 7 is an explanatory diagram of a valve device according to a third embodiment of the present invention. [Figure 10] FIG. 7 is an explanatory diagram of a valve device according to a third embodiment of the present invention. [Figure 11] FIG. 11 is a vertical sectional view of a valve device according to a fourth embodiment of the present invention. [Figure 12] FIG. 11 is a vertical sectional view of a valve device according to a fourth embodiment of the present invention. [Figure 13] FIG. 11 is a vertical sectional view of a valve device according to a fifth embodiment of the present invention. [Figure 14] FIG. 11 is a vertical sectional view of a valve device according to a fifth embodiment of the present invention. [Figure 15] FIG. 13 is a vertical sectional view of a valve device according to a sixth embodiment of the present invention. [Figure 16] FIG. 13 is a vertical sectional view of a valve device according to a sixth embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0024] FIG. 1 shows a perspective view of a valve device according to a first embodiment of the present invention. FIG. 2 and FIG. 3 show longitudinal cross-sectional views of the valve device according to the present invention. In FIG. 2 and FIG. 3, inflow and outflow conduits 15 are shown by dashed lines, through which fluids flow into and out of the valve device according to the present invention. One of the inflow and outflow conduits 15 is disposed in the conduit side flange 14 of the attachment housing 9. The other inflow and outflow conduit 15 is disposed in the valve housing flange 13 of the valve housing 2 facing the attachment 8. In the longitudinal cross-sectional view shown in FIG. 2, the blocking member 5 is in a closed position, and the blocking member 5 blocks the valve housing openings 6 and 7 of the valve housing 2. In the longitudinal cross-sectional view shown in FIG. 3, the blocking member 5 is in an open or maximum open position, and in this embodiment, the blocking member 5 completely opens the valve housing openings 6 and 7.

[0025] The valve 1 is a known so-called gate valve or wedge valve (Keil-Vat), in which the valve actuator 4 drives the obstruction member 5 back and forth between the open and closed positions exclusively in a linear direction, i.e. parallel to the valve rod 20. The valve actuator 4 may be designed as a linear actuator, for example constituted by a hydraulic or pneumatic actuator, as shown here, or an electric actuator or actuator of other construction. Correspondingly, valves in the form of so-called monovalves (Mono-Vat), in which the valve actuator 4 drives the obstruction member 5 exclusively linearly back and forth between the open and closed positions, can also be part of the valve arrangement according to the invention. The hydraulic or pneumatic actuator may be a known piston-cylinder arrangement or an actuator in which at least one bellows is used. As will be explained with respect to the other embodiments, a magnetic device or a magnetic driver 32 or a bellows guide may be used to move the thrust pipe 10 by an actuator arranged outside the attachment housing 9.

[0026] However, the valve arrangement according to the invention may also be constructed in the same way with other known types of valves 1. For example, so-called L-valves may be employed, in which the obturating member is driven back and forth between the open and closed positions by one or more valve actuators, not in a single direction, but in two mutually angular, preferably perpendicular, directions. The invention may also be realized with the use of so-called pivot valves, in which the respective obturating member 5 of the valve 1 is not moved linearly, but is swung about a pivot axis between the open and closed positions. The fact that the valve arrangement according to the invention may in principle be constructed with any type of valve 1 applies in particular also with regard to the variants of this embodiment.

[0027] The attachment 8 and the valve 1 may be initially manufactured as separate components and then fixed to each other as shown in FIG. 1. In this embodiment, the attachment housing 9 has a valve-side flange 12 for this purpose. The valve-side flange 12 can be removably fixed, preferably non-destructively, to a corresponding valve housing flange 13 of the valve housing 2 of the valve 1. The attachment housing 9 in this embodiment has a conduit-side flange 14 at the end opposite the valve-side flange 12. Inlet and outlet conduits 15, which are shown diagrammatically in FIGS. 2 and 3, can be fixed to the conduit-side flange 14. The valve housing 2 has a valve housing flange 13 on the side opposite the attachment 8. As shown in FIGS. 2 and 3, the inlet and outlet conduits 15 can be arranged in the valve housing flange 13. However, the valve housing flange 13 can also be used to fix the valve 1 directly to a process chamber or the like.

[0028] In Fig. 2 the obturating member 5 is in its closed position. The thrust pipe 10 of the attachment 8, which is displaceably mounted with respect to the attachment housing 9, is led out of the inner space 3 of the valve housing 2 so as not to interfere with the obturating member 5. For this purpose the valve actuator 4 and the electric actuator 16 of the attachment 8 are synchronized with each other, for example by a control device not shown, so that the positions and displacements of the obturating member 5 and the thrust pipe 10 can be controlled so as not to interfere with each other.

[0029] The attachment housing 9 and the thrust pipe 10 together define a conduit hollow space 11 of the attachment 8. Through the conduit hollow space 11, fluid passes through the attachment 8 and can be conducted through the valve housing 2 in the appropriate extended position of the thrust pipe 10 shown in FIG.

[0030] The attachment housing 9 may be made up of several parts, as shown here, but may also be made up of one piece. As shown here, the attachment housing 9 preferably comprises both a valve side flange 12 and a conduit side flange 14. The thrust pipe 10 is led through the valve side flange 12 to the valve housing openings 6 and 7 of the valve housing 2. For this purpose, the attachment 8 comprises an electric actuator 16 for displacing the thrust pipe 10 relative to the attachment housing 9. In a first embodiment, the electric actuator 16 is arranged outside the conduit hollow space 11 of the attachment 8. The electric actuator 16 of the first embodiment comprises an annular cylinder 17 surrounding the thrust pipe 10 in the attachment housing 9. In this embodiment, the cylinder 17 is divided into two working or pressure spaces by a piston ring 18, which is made up of one piece with the thrust pipe 10 or is otherwise attached to it. The working space of the cylinder 17 is alternately pressurized or supplied with pressure medium in a manner known per se in order to pneumatically or hydraulically move the thrust pipe 10 relative to the attachment housing 9 via a pressure line 19. Of course, the hydraulic or pneumatic actuators of the type implemented here may also be replaced by linear actuators with other drive types.

[0031] In FIG. 3, the obturator 5 is shown in its open or maximum open position. The thrust pipe 10 of the attachment 8 is shown in FIG. 3 leading to the inner space 3 of the valve housing 2. More precisely, in FIG. 3, the thrust pipe 10 of the attachment 8 is shown leading to the two valve housing openings 6 and 7 of the valve housing 2. The conduit hollow space 11 of the attachment 8 is sealed off from the rest of the inner space 3 of the valve housing 2 at the end of the thrust pipe 10 shown in FIG. 3 leading to the valve housing openings 6, 7 of the valve housing 2. Thus, the fluid flowing in one inlet / outlet conduit 15 is guided through the conduit hollow space 11 of the attachment housing 9 and the thrust pipe 10, through the attachment 8 and through the valve housing 2 to reach the other inlet / outlet conduit 15 on the opposite side. The thrust pipe 10 is suitably arranged in the end position shown in FIG. 3 to prevent the fluid flowing in the area outside the conduit hollow space 11 from penetrating into the inner space 3 of the valve housing 2. This prevents the inner space 3 of the valve housing 2, and in particular the blocking member 5, from becoming contaminated or being contaminated by contaminating deposits, even when a highly contaminated fluid is being transported. For this purpose, the thrust pipe 10, in its end position leading to the valve housing openings 6 and 7 of the valve housing 2, is sealed against the valve housing 2 in the area of ​​the valve housing openings 6 and 7. In the present embodiment, this is achieved by a tight fit between the valve housing 2 and the outer surface of the thrust pipe 10. If necessary, suitable seals may be provided to seal the outer surface of the thrust pipe 10 against the valve housing 2.

[0032] The second embodiment shown in Figures 4 to 8 will be described below. Here, only the configurations different from the first embodiment will be described. For all other configurations and characteristics of the second embodiment, the description of the first embodiment is to be referred to.

[0033] In Fig. 4, a perspective view of the valve device according to the invention is shown. In Fig. 5 and Fig. 6, longitudinal sections are shown, where in Fig. 5 the obturator 5 is in its closed position and in Fig. 6 the obturator 5 is retracted to its maximum open position and the thrust pipe 10 is connected to the valve housing openings 6 and 7 and to the inner space 3 of the valve housing 2. The concept of "connection" is generally understood as meaning that the thrust pipe 10 is connected to one of the valve housing openings 6, 7 and the inner space 3 and to the other valve housing opening 6, 7 and terminates in the area of ​​the valve housing 2 surrounding the other valve housing opening 6, 7. In Fig. 7 and Fig. 8, the external view of the second embodiment is shown.

[0034] A substantial difference with respect to the first embodiment is that in the second embodiment the electric actuator 16 is arranged inside the conduit hollow space 11 of the attachment 8. This is clear in the cross-sectional views shown in Figs. 5 and 6. The electric actuator 16 can be either pneumatic or hydraulic. The working spaces of the cylinders 17 are separated from one another by pistons 21 and can be pressurized via corresponding pressure conduits 19. The pistons 21 are connected to the thrust pipe 10 via piston rods 22 and fixing ribs 23. On the other hand, the housing of the cylinders 17 is fixed to the attachment housing 9 of the attachment 8 by the pressure conduits 19. The thrust pipe 10 is driven back and forth relative to the attachment housing 9 between a start position shown in Fig. 5 and an end position shown in Fig. 6 by pressurizing the corresponding working spaces in the cylinders 17 of the electric actuator 16. The pressure conduits 19 therefore have a double function in this embodiment. On the one hand, they supply the working spaces of the cylinders 17 with a suitable pressure medium. On the other hand, the pressure conduit 19 fixes the housing of the cylinder 17 to the attachment housing 9 of the attachment 8. In Fig. 7 a side view of the attachment 8 with the conduit flange 14 is shown. In the opposite side view in Fig. 8 the fixing rib 23 which fixes the piston rod 22 and thus the piston 21 to the thrust pipe 10 is shown.

[0035] The embodiments of the invention described below are variants of the first embodiment shown in Figures 1 to 3. All of the embodiments of the invention have in common that the respective actuators 16 are arranged outside the conduit hollow space 11. In the embodiment illustrated in Figures 9 to 12, each of the actuators 16 is arranged inside the respective attachment housing 9 of the attachment 8. In the embodiment illustrated in Figures 13 to 16, the linear actuator 30 of the actuator 16 is arranged outside the attachment housing 9.

[0036] Figures 9, 11, 13 and 15 each show a longitudinal section corresponding to Figure 2 with the obturator 5 in its closed position. Figures 10, 12, 14 and 16 each show a longitudinal section corresponding to Figure 3 with the obturator 5 in the open or maximum open position and the thrust pipe 10 passing through the valve housing 2 and the two valve housing openings 6 and 7.

[0037] The following description will be given only regarding configurations that are different from the first embodiment shown in Figures 1 to 3. For all other configurations, reference is made to the description of the first embodiment.

[0038] In a third embodiment of the invention shown in Fig. 9-10, the actuator 16 for moving the thrust pipe 10 inside the attachment housing 9 comprises an annularly extending bellows 24 which, together with the substantially cylindrical or substantially mantle-like outer wall 27 of the attachment housing 9, surrounds an annular space 26. By introducing a suitable pressure medium in liquid or gaseous state via the pressure conduit 19, the annular space 26 is pressurized, so that the piston ring 18 together with the thrust pipe 10 to which it is fixed is moved from the contracted position shown in Fig. 9 to the end position shown in Fig. 10. The seal 25 seals the piston ring 18 against the outer wall 27. When the retraction from Fig. 10 to the state shown in Fig. 9 is realized, the pressure medium is discharged from the annular space 26 via the pressure conduit 19 and the bellows 24 contracts by its elastic restoring force to the state shown in Fig. 9, whereby the piston ring 18 and the thrust pipe 10 move together. Alternatively, in addition to the elastic restoring force of the bellows 24 itself, the pressure medium may be actively sucked from the annular space 26 via the pressure conduit 19. As a result, the thrust pipe 10 is driven backward from the position shown in FIG. 10 to the position shown in FIG.

[0039] In a fourth embodiment of the invention shown in Fig. 11 and Fig. 12, a bellows release mechanism is provided to configure the actuator 16 inside the attachment housing 9. In the embodiment shown in Fig. 11 and Fig. 12, the bellows 24 divides the inside of the attachment housing 9 into two annular spaces 26 and 29. The first annular space 26 is formed between the outer wall 27 of the attachment housing 9 on the one side and the bellows 24 on the other side. The second annular space 29 is defined on the one side by the bellows 24 and on the other side by the inner wall 28 or the thrust pipe 10. When the thrust pipe 10 is moved from the position shown in Fig. 11 to the position shown in Fig. 12, the second annular space 29 is pressurized by the pressure conduit 19 facing the conduit flange 14. When the thrust pipe 10 is retracted from the position shown in Fig. 12 to the position shown in Fig. 11, the first annular space 26 is pressurized via the pressure conduit 19 of the valve side flange 12.

[0040] In the fifth embodiment shown in Figs. 13 and 14, the linear actuator 30 of the actuator 16 is arranged outside the attachment housing 9. Any linear actuator 30 known in the prior art may be employed. In Figs. 13 and 14, the linear actuator 30 is shown in a simplified form as a piston-cylinder arrangement. The piston-cylinder arrangement may be either pneumatic or hydraulic. As mentioned above, other linear actuators 30 known per se may be employed. In the fifth embodiment shown in Figs. 13 and 14, the movement of the connecting rod 31 is transmitted to the thrust pipe 10 via the linear actuator 30 by a so-called magnetic driver 32. The magnetic driver 32 is constituted by two pairs of interacting magnet arrays 33 and 34. Each of the magnet arrays 34 is arranged on the respective connecting rod 31 outside the outer wall 27 and thus outside the attachment housing 9. The magnet array 33 interacting with the magnet array 34 is disposed inside the piston ring 18 and thus inside the outer wall 27 of the attachment housing 9. The magnet array 33 is fixedly connected to the thrust pipe 10 via the piston ring 18. The magnet arrays 33 and 34 preferably comprise a series of permanent magnets disposed adjacent to each other and each having alternating poles. The magnet arrays 33 and 34 are disposed such that two mutually opposing magnets attract each other via the outer wall 27. Such magnetic coupling allows the piston ring 18 and thus the thrust pipe 10 to be moved or followed by the connecting rod 31 by the linear actuator 30, such that the thrust pipe 10 can be reciprocated between the positions shown in FIG. 13 and the positions shown in FIG. 14 by the operation of a suitable linear actuator 30.

[0041] In the sixth embodiment shown in Fig. 15 and Fig. 16, the connecting rod 31 of the linear actuator 30 is mechanically fixed to the thrust pipe 10 by a driver web 35. In this embodiment, the driver web 35 passes through a bellows 24 designed in an annular shape and a corresponding longitudinal slit 36 ​​in the outer wall 27. The bellows 24 ensures that the interior of the attachment housing 9 is properly sealed from the outside. Through this type of bellows passage, the linear actuator 30, through the connecting rod 31 and the driver web 35, can displace the thrust pipe 10 back and forth between the position shown in Fig. 15 and the position shown in Fig. 16. As in the previous embodiment, the seal member 25 seals the outer surface of the thrust pipe 10 to the attachment housing 9. [Explanation of symbols]

[0042] 1. Valve 2. Valve housing 3. Interior space 4. Valve actuator 5. Closing member 6. Valve housing opening 7. Valve housing opening 8. Attachment 9. Attachment housing 10. Thrust pipe 11‥Conduit hollow space 12. Valve side flange 13. Valve housing flange 14. Pipe side flange 15‥Inflow / outflow conduit 16. Actuator 17. Cylinder 18. Piston ring 19. Pressure pipe 20. Valve rod 21. Piston 22. Piston rod 23. Fixed rib 24. Bellows 25. Sealing material 26. Annular space 27. Exterior wall 28‥Inner wall 29. Annular space 30. Linear actuator 31. Connecting rod 32. Magnetic driver 33. Magnet array 34. Magnet array 35. Driver Web 36...Vertical slit.

Claims

1. A valve device having a valve (1) or a vacuum valve, the valve (1) comprises a valve housing (2) and a closing member (5) arranged in an internal space (3) of the valve housing (2) so as to be driven back and forth by a valve actuator (4) of the valve (1) between a closed position and an open position, the valve housing (2) has two coaxial valve housing openings (6)(7) arranged therein, the closing member (5) being configured to close the valve housing openings (6)(7) in the closed position and to open the valve housing openings (6)(7) in the open position, the valve device comprises an attachment (8) having an attachment housing (9) and a thrust pipe (10) displaceably mounted in the attachment housing (9), the attachment housing (9) and the thrust pipe (10) together enclose a conduit hollow space (11) of the attachment (8) for passing a fluid through the attachment (8), the attachment housing (9) is fixed to the outside of the valve housing (2) and the thrust pipe (10) of the attachment (8) can be introduced into the internal space (3) of the valve housing (2) when the obturator (5) is in an open position, The attachment (8) has at least one electric actuator (16) for displacing the thrust pipe (10) relative to the attachment housing (9); The electric actuator (16) is disposed inside the conduit hollow space (11) of the attachment (8). Valve device. Valve device.

2. 2. The valve device according to claim 1, The conduit hollow space (11) of the attachment (8) is sealed against the internal space (3) of the valve housing (2) at an end position of the thrust pipe (10) which is connected to the valve housing openings (6) and (7) of the valve housing (2). Valve device.

3. The valve device according to claim 1 or 2, The thrust pipe (10) is sealed against the valve housing (2) in the region of the valve housing openings (6) (7) at the start position or at the end position where the thrust pipe (10) is connected to the valve housing openings (6) (7) of the valve housing (2). Valve device.

4. The valve device according to any one of claims 1 to 3, The thrust pipe (10) passes through the internal space (3) of the valve housing (2) or protrudes beyond the attachment housing (9) at an end position where the thrust pipe (10) is connected to the valve housing openings (6) and (7) of the valve housing (2). Valve device.

5. The valve device according to any one of claims 1 to 4, The attachment housing (9) includes a valve-side flange (12) for non-destructively and removably mounting the attachment (8) to the valve housing (2) or to a valve housing flange (13) of the valve housing (2), and the thrust pipe (10) can be conducted through the valve housing openings (6) and (7) of the valve housing (2) by the valve-side flange (12). Valve device.

6. The valve device according to any one of claims 1 to 5, The attachment housing (9) has a conduit flange (14) or attachment mechanism for mounting or non-destructively removably mounting the attachment (8) to the inlet and outlet conduits (15). Valve device.

7. The valve device according to any one of claims 1 to 6, The electric actuator (16) for displacing the thrust pipe (10) relative to the attachment housing (9) and the valve actuator (4) are synchronized with each other. Valve device.

Images