Display panel floating stage

Abstract

The present invention relates to a display panel levitation stage, which comprises: a top plate in which a number of air supply holes and vacuum holes are alternately formed in order to stably levitate a display panel; a number of overlapping pressure holding plates in which a number of pressure holding holes communicating with the air supply holes and vacuum holes are formed so that the supply air pressure sprayed from the air supply holes of the top plate and the vacuum pressure sucked from the vacuum holes can be kept constant; a first bottom plate fixed to a bottom surface of the pressure holding plate in order to supply vacuum pressure to the vacuum holes; a second bottom plate fixed to a bottom surface of the first bottom plate in order to supply supply air pressure to the air supply holes; and a number of manifolds fixed to the bottom surface of the second bottom plate in which a vacuum supply path communicating with the first bottom plate and an air supply supply path communicating with the second bottom plate are formed in parallel.

Description

Technical Field

[0001] The present invention relates to a display panel floating stage. More specifically, regardless of whether the part of the floating display panel has resistance or not, the vacuum pressure and the air supply pressure remain unchanged, and not only can the display panel be stably floated without shaking, but also only the air supply pressure is jetted to both sides of the display panel where sag occurs without vacuum pressure, so that the flatness of the display panel can be stably maintained. The present invention relates to a display panel floating stage.

Background Art

[0002] Generally, according to the configuration of a flat panel display used in a television, a monitor, a mobile phone, etc., a grid pattern is formed on a transparent glass panel, a backlight is arranged behind it, a liquid crystal is arranged between them, and a color filter is arranged in front of the glass panel.

[0003] By the electric signal applied to the grid pattern, the liquid crystal can block or pass the light at a specific position. A display device of such a method is called "LCD". Although an organic substance may be used instead of the liquid crystal, since this organic substance emits light itself when receiving an electric signal, it does not require a backlight. A display device of such a method is called "OLED".

[0004] Before the above-mentioned flat panel display (FPD) is manufactured, many processes are required. In this process, the glass panel is repeatedly moved and inspected. The method of moving the glass panel varies depending on the process characteristics. For simple transfer, a roller, an index, or a robot arm may be used, but in the inspection process, precise conveyance is required, so it is common to perform conveyance in a non-contact manner. The non-contact conveyance device includes a pneumatic pressure and a floating stage.

[0005] Looking at some of the characteristics that the levitation stage should have, a small amount of air must flow out constantly as much as possible under the appropriate pressure, and the air that has flowed out must be sucked in without stagnation.

[0006] In recent years, the size of displays has increased and the accuracy has also increased, and thus a high level of panel transfer accuracy is required.

[0007] When the glass panel shakes when it moves, the image that enters the camera is not good, which deteriorates the quality of defect inspection.

[0008] That is, when vertical shaking of the glass panel occurs, the glass panel as the subject moves out of the focus of the lens, so a satisfactory inspection image cannot be obtained, which causes a decrease in inspection ability.

[0009] Here, the levitation stage is most closely related to the degree of vertical shaking when the glass panel moves. If the amount of air coming out through the levitation stage is not constant or the flow is not smooth, the glass panel will shake.

[0010] The reason is considered to be due to the change in pressure and volume between the levitation stage and the glass panel.

[0011] Therefore, in the levitation stage, it is most important to minimize the amount of air while maintaining the appropriate pressure so that the air can escape easily.

[0012] The aforementioned appropriate pressure is a pressure that has a resistance force to the extent that the glass panel does not contact the levitation stage. If the pressure is low, the transfer accuracy will be good, but the possibility of contacting the levitation stage is high. If the pressure is high, the possibility of contact is low, but the levitation stability is poor.

[0013] In addition, if the pressure is too high, depending on the design, it may cause deformation of the floating stage in the long term. Therefore, it is important to accurately analyze the glass panel, inspection accuracy, and process to maintain the appropriate pressure.

[0014] Moreover, even if the appropriate pressure is achieved, if the air flow rate is high, the influence of turbulent flow during air ejection becomes large, and the glass panel may shake. Also, since a large amount of air does not escape quickly, partial air stagnation occurs, resulting in a change in the distance between the glass panel and the floating stage. Such a phenomenon also reduces the floating stability, making it difficult to obtain a good inspection image.

[0015] A resistor is required to reduce the air flow. The resistor forms the pressure and simultaneously performs the function of adjusting the air volume. Therefore, it can be said that the resistor is the most important technical element in the floating stage.

[0016] Furthermore, even if the appropriate pressure is formed and the air flow rate is small, it is difficult to stably convey the glass panel without intake air.

[0017] The "intake part" is a generally overlooked part in designing the floating stage. Intake air is as important as the resistor.

[0018] Even if a small amount of air comes out, over time, it accumulates on the floating stage. Without intake air, the glass panel moves while being bent in an umbrella shape, making it difficult to obtain a high-quality inspection image. Therefore, it is essential to ensure a flow path that can quickly intake the air flowing out from the bottom of the floating stage. Summary of the Invention Problems to be Solved by the Invention

[0019] The present invention has been made in view of such problems, and a first object thereof is to provide a display panel floating stage capable of stably floating a display panel without shaking, because the vacuum pressure and the air supply pressure do not change whether at a resistant part or a non-resistant part of the floating display panel.

[0020] A second object of the present invention is to provide a display panel floating stage in which pressure holding holes formed in a pressure holding plate are separated into a pressure holding chamber and a passage having a smaller inner diameter than the pressure holding chamber, and the passage communicates eccentrically with the pressure holding chamber, so that the air supply pressure and the vacuum pressure due to vortex or volume increase generated in the pressure holding chamber can be kept constant.

[0021] A third object of the present invention is to provide a display panel floating stage capable of stably maintaining the flatness of a display panel by injecting only the air supply pressure without the vacuum pressure to both sides of the display panel where sagging occurs.

Means for Solving the Problems

[0022] According to the features for achieving the above object, a first invention is a display panel floating stage, including: a top plate in which a large number of air supply holes and vacuum holes are alternately formed in large numbers to stably float a display panel; a pressure holding plate in a state of being superposed in large numbers with a large number of pressure holding holes formed to communicate with each of the air supply holes and the vacuum holes so that the air supply pressure injected from the air supply holes of the top plate and the vacuum pressure sucked from the vacuum holes can be kept constant; a first bottom plate fixed to the bottom surface of the pressure holding plate to supply a vacuum pressure to each of the vacuum holes; a second bottom plate fixed to the bottom surface of the first bottom plate to supply an air supply pressure to each of the air supply holes; and a large number of manifolds fixed to the bottom surface of the second bottom plate and having a vacuum supply path communicating with the first bottom plate and an air supply path communicating with the second bottom plate formed in parallel.

[0023] In the second invention, based on the first invention, the first bottom plate is characterized in that vacuum paths are formed in parallel at regular intervals, and first branch paths are formed on both sides in the longitudinal direction of each vacuum path, branching in a tree-like manner and communicating with the vacuum holes.

[0024] In the third invention, based on the first invention, the second bottom plate is fixed to the bottom surface of the first bottom plate to supply an air supply pressure to the air supply holes, and is characterized in that air supply paths are formed in parallel at regular intervals, and second branch paths are formed on both sides in the longitudinal direction of each air supply path, branching in a tree-like manner and communicating with the air supply holes.

[0025] In the fourth invention, based on the first invention, the pressure holding hole is composed of a pressure holding chamber formed at the lower part and a passage eccentrically communicating with the upper part of the pressure holding chamber, and the passage is formed to have a relatively smaller inner diameter than the pressure holding chamber.

[0026] In the fifth invention, based on the fourth invention, the passages formed in the pressure holding holes of the respective pressure holding plates are eccentrically formed to the left or right so that the eccentric positions are arranged in a zigzag manner with respect to the passages of the overlapping pressure holding plates.

[0027] In the sixth invention, based on the fourth invention, any one of the respective pressure holding plates is characterized in that the form of the pressure holding hole communicating with the vacuum hole is composed of only a single pressure holding chamber without a passage.

[0028] In the seventh invention, based on the first invention, the top plate is characterized in that only air supply holes are arranged at regular intervals along a single row on both sides of the sides without vacuum holes.

Advantages of the Invention

[0029] According to the display panel floating stage of the present invention, whether it is a part with resistance or a part without resistance of the floating display panel, the vacuum pressure and the air supply pressure do not change, and there is an effect that the display panel can be stably floated without shaking.

[0030] In addition, on both sides of the display panel where sag occurs, there is an effect that the flatness of the display panel can be stably maintained by injecting only the air supply pressure without the vacuum pressure.

[0031] In addition, the pressure holding holes formed in the pressure holding plate are separated into a pressure holding chamber and a passage having a smaller inner diameter than the pressure holding chamber, and the passage communicates eccentrically with the pressure holding chamber, so that there is an effect that the air supply pressure and the vacuum pressure due to the vortex or volume increase generated in the pressure holding chamber can be kept constant.

Brief Description of the Drawings

[0032]

Figure 1

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Figure 10

Best Mode for Carrying Out the Invention

[0033] Hereinafter, the display panel floating stage according to the present invention will be described in detail together with the accompanying drawings.

[0034] FIG. 1 is a perspective view of a display panel floating stage according to the present invention, FIG. 2 is a bottom perspective view of FIG. 1, FIG. 3 is an exploded perspective view of FIG. 1, FIG. 4 is a cross-sectional view showing a pressure holding plate extracted from FIG. 3, FIG. 5 is a plan view showing a first bottom plate extracted from FIG. 3, FIG. 6 is a plan view showing a second bottom plate extracted from FIG. 3, FIG. 7 is a perspective view showing a manifold extracted from FIG. 3, FIG. 8 is a projection view showing the bottom surface of the display panel floating stage according to the present invention, and FIG. 9 is a cross-sectional view showing a cross-section of the display panel floating stage according to the present invention.

[0035] As shown in FIGS. 1 to 9, the present invention relates to a display panel floating stage 100 that can stably float a display panel without shaking, whether it is a part with resistance or a part without resistance of the floating display panel, and can stably maintain the flatness of the display panel 200 by injecting only the supply air pressure without the vacuum pressure on both sides of the display panel where sag occurs.

[0036] Such a display panel floating stage 100 of the present invention is mainly composed of five parts, which are formed by bolted connection of a top plate 10, a pressure holding plate 20, a first bottom plate 30, a second bottom plate 40, and a manifold 50 integrally with each other.

[0037] As shown in FIG. 1, the top plate 10 has a structure in which a large number of air supply holes 11 and vacuum holes 12 are alternately formed in order to stably float the display panel 200.

[0038] Here, although the air supply holes 11 and the vacuum holes 12 are arranged in a lattice pattern as an embodiment, they may also be arranged and configured in a certain pattern.

[0039] At this time, since the air supply pressure generated from the air supply hole 11 is relatively larger than the vacuum pressure generated in the vacuum hole 12, it should be preceded to enable the display panel 200 to float.

[0040] The pressure holding plate 20 is fixed to the bottom surface of the top plate 10 by bolting.

[0041] As shown in FIG. 4, such a pressure holding plate 20 has a structure in which a number of pressure holding holes 21 communicating with the respective air supply holes 11 and vacuum holes 12 are formed so that the air supply pressure jetted from the air supply hole 11 of the top plate 10 and the vacuum pressure sucked from the vacuum hole 12 can be maintained constant.

[0042] The pressure holding hole 21 of the pressure holding plate 20 is composed of a pressure holding chamber 211 formed at the lower part and a passage 212 eccentrically communicating with the upper part of the pressure holding chamber 211. At this time, the passage 212 is formed to have a relatively smaller inner diameter than the pressure holding chamber 211.

[0043] In the above, the pressure holding hole 21 connected to the air supply hole 11 functions as a so-called resistor that generates a vortex in the air supplied through the pressure holding chamber 211 to lower the pressure.

[0044] And the passage 212 formed eccentrically in the pressure holding chamber 211 functions to reduce the flow rate of the air with reduced pressure.

[0045] The inner diameters of such a pressure holding chamber 211 and the passage 212 may vary depending on the size and weight of the display panel 200.

[0046] In addition, the pressure-holding hole 21 connected to the vacuum hole 12 can prevent the vacuum pressure from increasing through the pressure-holding chamber, and the passage 212 can adjust the intake air volume by only the supply air volume.

[0047] As shown in FIGS. 4 and 9, such a pressure-holding plate 20 is configured by overlapping at least two in order to maintain a stable supply air pressure and vacuum pressure. In the present invention, three pressure-holding plates 20 are overlapped.

[0048] It goes without saying that the number of overlaps of such a pressure-holding plate 20 varies depending on the required vacuum pressure and supply air pressure.

[0049] In addition, the passage 212 formed in the pressure-holding hole 21 of each pressure-holding plate 20 is formed eccentrically to the left or right so that the eccentric positions are arranged in a zigzag manner with respect to the passage 212 of the overlapping pressure-holding plates 20.

[0050] Therefore, the supply air volume and supply air pressure of the air discharged through the supply air hole 11 can be maintained constant through the pressure-holding hole 21 in multiple stages.

[0051] In addition, the vacuum pressure and intake air volume inhaled through the vacuum hole 12 can also be maintained constant through the pressure-holding hole 21 in multiple stages.

[0052] On the other hand, as shown in FIG. 4, any one of the pressure-holding plates 20 can be configured with only a single pressure-holding chamber 211 without the passage 212 in the form of the pressure-holding hole 21 communicating with the vacuum hole 12. Such a structure is for increasing the volume of the air inhaled by the vacuum in order to balance the supply air volume and the inhaled volume because the resistance of the vacuum pressure is further increased.

[0053] Here, the passage 212 of the pressure holding hole 21 communicating with the vacuum hole 12 can be configured to have a relatively larger inner diameter than the passage 212 of the pressure holding hole 21 communicating with the air supply hole 11 in order to increase the amount of air sucked in (shown in FIG. 4).

[0054] Therefore, regardless of whether it is a part with resistance or a part without resistance of the display panel, the top plate 10 can keep the vacuum pressure and the air supply pressure unchanged, and can stably lift the display panel 200 without shaking.

[0055] Also, the pressure holding hole 21 of the pressure holding plate 20 disposed on the bottom surface of the top plate 10 has a structure in which the passage 212 is connected to the air supply hole 11 or the vacuum hole 12 for air supply or suction, and the pressure holding chamber 211 has a structure that overlaps the lower part or communicates with the passage 212 of the pressure holding plate 20.

[0056] Also, the pressure holding hole 21 of the pressure holding plate 20 disposed in the lowermost layer is configured to communicate with the first bottom plate 30 and the second bottom plate 40 so as to individually receive the supply of the air supply pressure for air supply and the vacuum pressure for suction.

[0057] Here, as shown in FIG. 5, the first bottom plate 30 is fixed to the bottom surface of the pressure holding plate 20 to suck air by negative pressure through the vacuum hole 12, and a vacuum path 31 formed in parallel at regular intervals and a first branch path 311 that branches in a tree shape on both sides in the length direction of the vacuum path 31 are formed.

[0058] Here, each of the first branch paths 311 is configured to communicate individually with the pressure holding chamber 211 of the pressure holding plate 20 communicating with the vacuum hole 12 so that air can be sucked by negative pressure.

[0059] In each of the vacuum paths 31 of the first bottom plate 30 as described above, a plurality of first connection paths 312 are formed separately from the first branch path 311. In such a first connection path 312, a first through hole 313 for receiving the supply of the vacuum pressure is further formed.

[0060] At this time, as shown in FIG. 6, the first through hole 313 extends to the second bottom plate 40 and is configured to supply an intake pressure for intake without interference with the second bottom plate 40.

[0061] Moreover, as shown in FIG. 6, the second bottom plate 40 is fixed to the bottom surface of the first bottom plate 30 to supply air to the air supply hole 11, and includes an air supply path 41 formed in parallel at regular intervals and a second branch path 411 that branches in a tree shape on both sides in the longitudinal direction of the air supply path 41.

[0062] Here, each of the second branch paths 411 communicates individually with a pressure holding chamber 211 that communicates with the air supply hole 11 and is configured to supply air for air supply.

[0063] More specifically, in each of the air supply paths 41 of the second bottom plate 40, a plurality of second connection paths 412 are formed separately from the second branch path 411. In such a second connection path 412, a second through hole 413 for receiving the supply of the air supply pressure is further formed.

[0064] One or a plurality of the manifolds 50 can be coupled. As shown in FIG. 7, it is fixed to the bottom surface of the second bottom plate 40, and has a structure in which an air supply path 41 of the first bottom plate 30, an air supply path 51 that communicates individually with the vacuum path 31 of the second bottom plate 40, and a vacuum supply path 52 are formed in parallel.

[0065] Here, as shown in FIG. 8, the air supply path 51 functions to supply the air supply pressure to each of the air supply paths 41 by communicating with the second through holes 413 formed in each of the second connection paths 412 of the second bottom plate 40.

[0066] The vacuum supply passage 52 functions to supply a vacuum pressure to each vacuum passage 31 by communicating with a first through hole 313 formed in each first connection passage 312 of the first bottom plate 30.

[0067] Further, the bottom surface of the manifold 50 further includes an air supply terminal hole 511 communicating with the air supply passage 51 and a vacuum terminal hole 521 communicating with the vacuum supply passage 52.

[0068] At this time, the manifold 50 can be configured by coupling a socket block 60 for connecting a vacuum hose 61 and an air supply hose 62 to the vacuum terminal hole 521 and the air supply terminal hole 511.

[0069] On the other hand, the display panel lifting stage 100 of the present invention is configured to maintain the flatness of the display panel 200 by generating only an air supply pressure without a vacuum pressure on both side edges of the display panel 200 where sagging occurs.

[0070] For this purpose, as shown in FIG. 1, only the air supply holes 11 are arranged at regular intervals along a single row on both side edges of the top plate 10 without the vacuum holes 12.

[0071] Among the air supply passages 41 of the second bottom plate 40, the air supply passages 41 arranged on both side edges are configured such that auxiliary air supply passages 42 without second branch passages 411 communicate with the respective air supply holes 11.

[0072] A third through hole 421 for receiving air supply can be formed in the auxiliary air supply passage 42 of the second bottom plate 40 configured as described above.

[0073] The manifold 50 can further be formed with auxiliary supply passages 53 for individually supplying air to the two auxiliary air supply passages 42.

[0074] Also, on the upper surface of the manifold 60, two auxiliary terminal holes 531 communicating with the auxiliary supply path 53 are formed, and auxiliary socket blocks 70 capable of individually supplying an air supply pressure are coupled to the two auxiliary terminal holes 531, respectively, to form a structure.

[0075] As a result, the air supply holes 11 arranged in a single row on both sides of the top plate 10 can individually provide separate air supply pressures, so that, together with the flatness of the display panel 200, it can also serve as an air fence function to move the display panel 200 straight ahead according to the size of the display panel 200.

[0076] The air supply path and the air intake path of the display panel floating stage of the present invention described above are as follows.

[0077] Referring to FIGS. 8 and 9, it is as follows.

[0078] Air intake: Vacuum tank (not shown) → Socket block → Manifold (Vacuum terminal hole → Vacuum supply path) → First bottom plate (First connection path → First through hole → First branch path - Vacuum path) → Pressure holding plate (Pressure holding hole (Pressure holding chamber → Passage) → Top plate (Vacuum hole)

[0079] Air supply: Compression tank (not shown) → Socket block → Manifold (Air supply terminal hole → Air supply path) → Second bottom plate (Second connection path → Second through hole → Second branch path - Air supply path) → Pressure holding plate (Pressure holding hole (Pressure holding chamber → Passage) → Top plate (Air supply hole)

[0080] Air supply at the outer edge of the top plate: Compression tank (not shown) → Auxiliary socket block → Manifold (Auxiliary terminal hole → Auxiliary supply path) → Second bottom plate (Third through hole → Auxiliary air supply path) → Pressure holding plate (Pressure holding chamber → Passage) → Top plate (Air supply hole)

[0081] On the other hand, FIG. 10 is a photograph showing the top plate of another embodiment.

[0082] As shown in FIG. 10, each vacuum hole 12 of the top plate 10 can be further configured with a groove 121 extending in the advancing direction of the display panel 200 formed therein.

[0083] When each such groove 121 is bent at the end of the display panel 200, there is a possibility that scratches may occur on the display panel 200 or the top plate 10 due to friction with the surface of the top plate 10 at the position of the vacuum hole 12. Therefore, in order to prevent this, it functions to delay the formation of the vacuum pressure.

[0084] As described above, the display panel floating stage of the present invention can also be used in inspection machines, logistics, special process equipment, coaters (chemical liquid coating machines), and length measuring machines according to the application.

[0085] In addition, as the gas used in the present invention, in addition to air, nitrogen can also be used, and other liquids such as distilled water can also be used.

[0086] Also, although only air supply holes are formed in a row on both sides of the side of the top plate, in addition, it may be configured to supply a vacuum pressure to perform the function of the vacuum hole. Further, an auxiliary socket can be configured by connecting a vacuum hose and an air supply hose so that the air supply pressure and the vacuum pressure can be selectively supplied to the air supply hole.

[0087] The embodiments described in this specification and the configurations shown in the drawings are only the most preferred embodiments of the present invention and do not represent all of the technical ideas of the present invention. Therefore, it should be understood that there may be various equivalents and modifications that can replace these at the time of this application.

Claims

1. A top plate in which a large number of air supply holes and vacuum holes are alternately formed in large numbers to stably lift a display panel; A pressure holding plate in which a large number of pressure holding holes communicating with each of the air supply holes and the vacuum holes are formed so that the air supply pressure jetted from the air supply holes of the top plate and the vacuum pressure sucked from the vacuum holes can be kept constant, and the pressure holding plates are stacked in large numbers; A first bottom plate fixed to the bottom surface of the pressure holding plate to supply a vacuum pressure to each of the vacuum holes; A second bottom plate fixed to the bottom surface of the first bottom plate to supply an air supply pressure to each of the air supply holes; and A plurality of manifolds fixed to the bottom surface of the second bottom plate, in which a vacuum supply path communicating with the first bottom plate and an air supply path communicating with the second bottom plate are formed in parallel; including The pressure holding hole consists of a pressure holding chamber formed at the lower part and a passage eccentrically communicating with the upper part of the pressure holding chamber; The display panel lifting stage, characterized in that the passage is formed with a relatively smaller inner diameter than the pressure holding chamber.

2. The display panel lifting stage according to Claim 1, characterized in that the first bottom plate is formed with vacuum paths formed in parallel at regular intervals, and first branch paths that are branched in a tree shape on both sides in the length direction of each vacuum path and communicate with the vacuum holes.

3. The display panel lifting stage according to Claim 1, characterized in that the second bottom plate is fixed to the bottom surface of the first bottom plate to supply an air supply pressure to the air supply holes, and is formed with air supply paths formed in parallel at regular intervals, and second branch paths that are branched in a tree shape on both sides in the length direction of each air supply path and communicate with the air supply holes.

4. The display panel lifting stage according to Claim 1, characterized in that the passages formed in the pressure holding holes of each pressure holding plate are eccentrically formed to the left or right so that the eccentric positions are arranged in a zigzag manner with respect to the passages of the stacked pressure holding plates.

5. The display panel lifting stage according to Claim 1, characterized in that any one of the pressure holding plates is configured with only a single pressure holding chamber without a passage in the form of a pressure holding hole communicating with a vacuum hole.

6. The display panel lifting stage according to claim 1, wherein each vacuum hole of the top plate is further formed with a groove extending in the advancing direction of the display.

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