Mirror and Heater Lamp with Mirror

Abstract

To provide a reflector suitable in both of vacuum environment and high temperature environment, and a heater lamp having the same.SOLUTION: A reflector includes a filmy or tabular light reflection member and a glass member composed of heat resistant glass, and the light reflection member is hermetically sealed inside the glass member.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a reflector and a heater lamp with a reflector.

Background Art

[0002] A reflector that reflects light emitted from a light source and directs it in a desired direction is widely used.

[0003] As such a reflector, one formed by molding a metal is known. Also, a reflector in which an inorganic material is coated on the surface of glass, ceramics, or metal is known.

[0004] Furthermore, Patent Document 1 and Patent Document 2 disclose a reflector having a structure in which a reflective film is disposed in an airtight space of a glass package composed of a first and a second glass substrate and a sealing glass layer.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0006] A reflector made of metal may have its metal oxidized or deformed by heat in a high-temperature environment. Therefore, the reflector has a short effective usage time or cannot be used at all in a high-temperature environment.

[0007] Also, by cooling the reflector, it can be made usable even in a high-temperature environment, but in that case, the structure of the reflector becomes complicated.

[0008] A mirror with an inorganic material coated on the surface of glass, ceramics, or metal may generate particles or impurity gases from the inorganic material in a vacuum environment. Therefore, such a mirror is not suitable for use in a vacuum atmosphere and under conditions where a clean environment is required (for example, in a semiconductor manufacturing process).

[0009] In addition, since the mirrors described in Patent Document 1 and Patent Document 2 use low-melting-point glass for the sealing glass layer, they are not suitable for use in a high-temperature environment.

[0010] The present invention has been made in view of the above problems, and an object thereof is to provide a mirror and a heater lamp with a mirror that are suitable for both a vacuum environment and a high-temperature environment.

Means for Solving the Problems

[0011] The mirror according to the present invention has a film-shaped or plate-shaped light reflecting member and a glass member made of heat-resistant glass, The light reflecting member is hermetically sealed inside the glass member.

[0012] In the mirror according to the present invention, the light reflecting member may be a film formed on the inner surface of the glass member.

[0013] In the mirror according to the present invention, the film may be a diffuse reflection film.

[0014] In the mirror according to the present invention, the main component of the diffuse reflection film may be any one of silica (SiO 2 ), alumina (Al 2 O 3 ), and titania (TiO 2 ).

[0015] In the mirror according to the present invention, the film may be a thin metal film.

[0016] In the mirror according to the present invention, the metal constituting the thin film may be any one of aluminum, silver, gold, and alloys containing these metals.

[0017] In the mirror according to the present invention, the light reflecting member may be a plate material of metal or ceramics.

[0018] In the mirror according to the present invention, the metal constituting the plate material may be any one of aluminum, silver, gold, and alloys containing these metals.

[0019] In the mirror according to the present invention, a chip portion may be formed on the outer surface of the glass member, and a gap in which the light reflecting member is not provided may be provided inside the glass member.

[0020] In the mirror according to the present invention, the gap may be a vacuum or an inert gas may be introduced.

[0021] In the mirror according to the present invention, the gap may be provided on the side opposite to the reflecting surface of the light reflecting member.

[0022] In the mirror according to the present invention, the heat-resistant glass may be quartz glass.

[0023] In the mirror according to the present invention, it may have a protrusion portion connectable to other members.

[0024] The heater lamp with a mirror according to the present invention has any one of the above mirrors, a heater lamp, and a base. The heater lamp and the mirror are held by the base.

[0025] According to the present invention, since the light reflecting member is sealed by being surrounded by a glass member, particles or impurity gases generated from the light reflecting member do not scatter outside the mirror and can be used even in a vacuum environment. Further, since the glass member surrounding the light reflecting member is made of heat-resistant glass, it can be used even in a high-temperature environment.

Brief Description of the Drawings

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Embodiments for Carrying Out the Invention

[0027] Embodiments of the mirror and the heater lamp with a mirror according to the present invention will be described with reference to the drawings. It should be noted that the following drawings are schematically illustrated, and the dimensional ratios on the drawings do not necessarily match the actual dimensional ratios, nor do the dimensional ratios necessarily match between the drawings.

[0028] [First Embodiment] The first embodiment of the mirror according to the present invention will be described.

[0029] [Structure of the Mirror] FIG. 1 is a perspective view showing an example of a mirror. The mirror 1 has a shape with a longitudinal direction and a lateral direction. In the following description, as shown in FIG. 1, the longitudinal direction of the mirror 1 is the X direction, the lateral direction is the Y direction, and the direction orthogonal to the X direction and the Y direction is the Z direction. When expressing a direction, when distinguishing between positive and negative directions, it is described with positive and negative signs such as "+X direction" and "-X direction", and when expressing a direction without distinguishing between positive and negative directions, it is simply described as "X direction".

[0030] The reflecting mirror 1 has a shape in which a rectangular plate is curved in the short side direction (Y direction). FIG. 2 is a cross-sectional view along the short side direction of the reflecting mirror 1 shown in FIG. 1. As shown in FIG. 2, the shape of the reflecting mirror 1 in the short side direction is a curved shape in cross-sectional view. The outer surface on the +Z side of the reflecting mirror 1 becomes the reflecting surface 1a. By adopting such a curved shape, when a long lamp is arranged at a predetermined position, the light radiated from the lamp can be directed in a desired direction and condensed in the short side direction of the reflecting mirror 1.

[0031] The reflecting mirror 1 has a light reflecting member 2 and a glass member 3. The film-like or plate-like light reflecting member 2 is hermetically sealed inside the glass member 3. Although in FIG. 1 the light reflecting member 2 appears to be formed on the outer surface of the glass member 3, the actual light reflecting member 2 is formed inside the sealed glass member 3 as shown in FIG. 2.

[0032] The light reflecting member 2 is a diffusion reflection film, which is a film formed by aggregating granular materials mainly composed of silica (SiO 2 ). Here, the "main component" refers to the component with the highest content among the components constituting the granular materials contained in the material of the diffusion reflection film. The main component of the diffusion reflection film may be alumina (Al 2 O 3 ), titania (TiO 2 ).

[0033] Also, metal oxides may be included as components constituting the diffusion reflection film. Examples of the metal oxides contained in the diffusion reflection film include alumina (Al 2 O 3 ), titania (TiO 2 ), boron oxide (B 2 O 3 ), magnesium oxide (MgO), zirconia (ZrO 2 ).

[0034] The glass member 3 is made of heat-resistant glass. Here, the "heat-resistant glass" in the present invention refers to glass having a softening point of 700°C or higher. Examples of such glass include quartz glass, borosilicate glass, and soda-lime glass. In this embodiment, the material of the glass member is quartz glass. Further, the "low melting point glass" in this specification refers to glass having a softening point of 600°C or lower. Note that the softening point in this specification was measured by a method conforming to JIS R3103-1.

[0035] Figure 3 is an enlarged view of part A in Figure 2. As shown in Figure 3, the glass member 3 includes a first glass member 31 disposed on the +Z side of the light reflection member 2, that is, on the side that is curved in a concave shape, and a second glass member 32 disposed on the -Z side of the light reflection member 2, that is, on the side that is curved in a convex shape. The outer peripheral portions of the first glass member 31 and the second glass member 32 are welded to each other, whereby the light reflection member 2 is hermetically sealed inside the glass member 3.

[0036] In this embodiment, a diffuse reflection film as the light reflection member 2 is formed on a part of the inner surface of the glass member 3. Specifically, the diffuse reflection film is formed on the inner surface of the first glass member 31 on the side opposite to the reflection surface 1a.

[0037] In this embodiment, a gap 4 in which the light reflection member 2 is not provided is provided inside the glass member 3. The space between the inner surface of the second glass member 32 and the light reflection member 2 becomes the gap 4.

[0038] The light reflection member 2 may be formed on the inner surface of the second glass member 32 instead of the inner surface of the first glass member 31. At this time, the space between the inner surface of the first glass member 31 and the light reflection member 2 becomes the gap 4. Further, the light reflection member 2 may be formed on the inner surfaces of the first glass member 31 and the second glass member 32, respectively. At this time, the space between the opposing light reflection members 2 becomes the gap 4. However, it is preferable to provide the light reflection member 2 on the inner surface of the first glass member 31 on the reflection surface 1a side because there are fewer interfaces of different media in the optical path through which light passes and the light reflection efficiency is good.

[0039] Note that the gap 4 does not necessarily have to be provided, and it may not have the gap 4. By the way, the mirror 1 can become hot during use, but there is a large difference in the coefficient of thermal expansion between the material of the light reflecting member 2 (such as metal, etc.) and the material of the glass member 3, and in a high temperature environment, the glass member 3 may be damaged due to the thermal expansion difference. Therefore, in order to suppress the breakage of the glass member 3 due to the thermal expansion difference between the light reflecting member 2 and the glass member 3, it is preferable to provide the gap 4.

[0040] <Method for manufacturing a mirror> An example of the method for manufacturing a mirror will be described based on FIGS. 4 to 11.

[0041] 1) First glass member First, a first glass member 31 that will be on the reflection surface 1a side of the mirror 1 is prepared. As shown in FIG. 4, the first glass member 31 is formed by shaping a flat plate-shaped quartz glass into a curved shape. As a method for shaping the flat plate-shaped quartz glass into a curved shape, for example, a method of fitting the flat plate-shaped quartz glass heated to a high temperature into a curved mold and applying pressure can be mentioned. The thickness of the first glass member 31 is, for example, 1 to 3 mm.

[0042] Next, as shown in FIG. 5, a reflective film material is applied to the surface of the first glass member 31 opposite to the reflection surface 1a to form a reflective film as the light reflecting member 2.

[0043] The reflective film material is a colloidal solution in which primary particles mainly composed of silica are dispersed in butyl acetate as a solvent. These primary particles contain silica at a ratio of 80%, alumina at 10%, and the rest at 10%, and are dispersed in butyl acetate as a solvent.

[0044] When applying the reflective film material, as shown in FIG. 6, the outer peripheral portion 31a of the surface of the first glass member 31 (the surface opposite to the reflection surface 1a) is masked, and the reflective film material is applied by spray coating. Since it is not necessary to apply the reflective film material to the joint portion with the second glass member 32, the outer peripheral portion 31a is masked.

[0045] Note that the method of applying the reflective film material does not have to be spray coating, and for example, brush coating may be used. Also, the outer peripheral portion 31a was masked so as not to apply the reflective film material, but the reflective film material on the outer peripheral portion 31a may be wiped off and removed after applying the reflective film material over the entire surface.

[0046] After applying the reflective film material, the reflective film material is dried and fired, thereby forming a reflective film on the surface of the first glass member 31. The drying of the reflective film material is performed, for example, in an environment where the temperature is 25°C. Also, the firing of the reflective film material is performed in an environment where the temperature is 100°C to 300°C. Note that the above drying conditions and firing conditions are examples, and are adjusted according to the composition of the reflective film material or the thickness of the reflective film to be formed.

[0047] 2) Second glass member FIG. 7 shows the second glass member 32. The second glass member 32 is, like the first glass member 31, a flat quartz glass formed into a curved shape. Also, an exhaust pipe 320 is connected to the second glass member 32. FIG. 8 is an enlarged cross-sectional view of the connection portion between the second glass member 32 and the exhaust pipe 320. The exhaust pipe 320 is connected so as to protrude on the side opposite to the reflective surface 1a (the side opposite to the side where it is combined with the first glass member 31). As a method of connecting the exhaust pipe 320 to the second glass member 32, for example, a hole is made in a part of the second glass member 32, the exhaust pipe 320 is aligned with the hole, and it is heated with a burner and welded. The thickness of the second glass member 32 is, for example, 1 to 3 mm.

[0048] 3) Welding of the first glass member and the second glass member As shown in FIG. 9, the first glass member 31 and the second glass member 32 are overlapped. At this time, the first glass member 31 and the second glass member 32 are arranged with a gap therebetween. This gap becomes the gap 4 of the completed mirror 1. Next, as shown in FIG. 10, each end of the first glass member 31 and the second glass member 32 (the left and right ends shown in FIG. 9 and both ends in the depth direction of the paper surface of FIG. 9) is heated and welded, for example, with a hydrogen-oxygen burner. During heating, processing is carried out in an inert gas atmosphere so that the reflective film is not oxidized. As available burners, in addition to the hydrogen-oxygen burner, a mixed burner of methane gas and oxygen or a mixed burner of propane gas and oxygen can be mentioned.

[0049] After welding the first glass member 31 and the second glass member 32, a pump is connected to the exhaust pipe 320 to evacuate the gap 4 of the mirror 1. With the gap evacuated, the base of the exhaust pipe 320 is heated and cut off with a hydrogen-oxygen burner to seal the mirror 1. After evacuating the gap 4, an inert gas (for example, nitrogen) may be enclosed and the exhaust pipe 320 may be removed. By enclosing an inert gas in the gap 4, the effect of preventing the mirror 1 from being oxidized can be obtained in the same manner as when the gap 4 is evacuated.

[0050] As shown in FIG. 11, a chip portion 321, which is a trace of the removal of the exhaust pipe 320, is formed on the mirror 1. FIG. 12 is an enlarged cross-sectional view of the chip portion 321.

[0051] [Second Embodiment] The second embodiment of the mirror according to the present invention will be mainly described with respect to the differences from the first embodiment.

[0052] In the above-described first embodiment, as an example of the light reflecting member 2, a diffuse reflection film is formed on the surface of the first glass member 31. However, a thin metal film may be formed on the surface of the first glass member 31. Examples of the metal constituting the thin film include aluminum, silver, gold, and alloys containing these metals. Examples of the method for forming the thin metal film include vacuum evaporation and sputtering.

[0053] [Third Embodiment] The third embodiment of the mirror according to the present invention will be mainly described with respect to the differences from the first embodiment.

[0054] In the foregoing first and second embodiments, as the light reflecting member 2, an example in which a film is formed (deposited) on the surface of the first glass member 31 is shown, but the present invention is not limited thereto. As the light reflecting member 2, a thin plate of metal or ceramics may be disposed between the first glass member 31 and the second glass member 32. Examples of the metal constituting the plate material include aluminum, silver, gold, and alloys containing these metals. Examples of the ceramics constituting the plate material include alumina (Al 2 O 3 ), and zirconia (ZrO 2 ).

[0055] [Fourth Embodiment] The fourth embodiment of the reflecting mirror according to the present invention will be mainly described with respect to the differences from the first embodiment. For the components common to the first embodiment, the same reference numerals are given and the description will be omitted as appropriate.

[0056] In the foregoing first embodiment, the reflecting mirror 1 has a curved shape in a cross-sectional view in the short side direction, but the reflecting mirror 1 may have a flat plate shape without being curved. FIGS. 13A to 13D are schematic views showing the manufacturing process of the reflecting mirror 1 according to the fourth embodiment. FIG. 13A shows the first glass member 31 coated with the light reflecting member 2 on the surface and the second glass member 32 to which the exhaust pipe 320 is connected. Also in the fourth embodiment, the light reflecting member 2 may be constituted by a plate material of metal or ceramics. FIG. 13B shows a state in which the first glass member 31 and the second glass member 32 are overlapped. FIG. 13C shows a state in which the ends of the first glass member 31 and the second glass member 32 are welded. FIG. 13D shows a state in which the first glass member 31 and the second glass member 32 are welded and exhausted, and then the exhaust pipe 320 is removed and the reflecting mirror 1 is sealed.

[0057] [Fifth Embodiment] The fifth embodiment of the reflecting mirror according to the present invention will be mainly described with respect to the differences from the first embodiment. For the components common to the first embodiment, the same reference numerals are given and the description will be omitted as appropriate.

[0058] FIG. 14 is a schematic diagram showing a part of the manufacturing process of the mirror 1 according to the fifth embodiment. In the above-described embodiment, an example was shown in which the respective ends of the first glass member 31 and the second glass member 32 were melted and the two were welded together, but the present invention is not limited to this. For example, a heat-resistant glass 30 may be added and melted to seal the respective ends of the first glass member 31 and the second glass member 32. Further, the respective ends of the first glass member 31 and the second glass member 32 may be sealed by pinch sealing (heating the ends of the first glass member 31 and the second glass member 32 to a high temperature and sandwiching them with an external force to join them). When performing pinch sealing, it may be performed separately for each end, or all the ends may be performed simultaneously.

[0059] [Sixth Embodiment] The sixth embodiment of the mirror according to the present invention will be mainly described with respect to the differences from the first embodiment. Note that the same reference numerals are given to the components common to the first embodiment, and the description thereof will be omitted as appropriate.

[0060] As shown in FIGS. 15A to 15C, the mirror 1 may be provided with guides 5 (an example of a protruding portion) for connecting to another member. Here, the another member is, for example, the base of a lamp. Two guides 5 are provided at each longitudinal end of the mirror 1. The guide 5 is rod-shaped and extends in the longitudinal direction of the mirror 1.

[0061] FIG. 16 is a perspective view showing an example of the base. FIG. 17 is a front view showing an example of a heater lamp with a mirror.

[0062] The heater lamp 10 is held at both ends in the tube axis direction by the base 11, respectively. The base 11 has a substantially rectangular parallelepiped shape, and a lamp holding hole 11a and a pair of mirror holding holes 11b are formed in the same end face. The material of the base 11 is, for example, ceramics. The heater lamp 10 is, for example, a filament lamp that emits light mainly from the visible region to the infrared region, having a structure in which a filament made of tungsten is disposed inside a tube body made of quartz glass and a small amount of halogen is enclosed inside the tube body.

[0063] The sealing portions located at both ends of the heater lamp 10 in the tube axis direction are inserted and held in the lamp holding holes 11a of the base 11, and the guides 5 formed at both longitudinal ends of the reflector 1 are inserted and held in the reflector holding holes 11b of the base 11.

[0064] [Seventh Embodiment] Regarding the seventh embodiment of the reflector according to the present invention, the differences from the first embodiment will be mainly described. For the components common to the first embodiment, the same reference numerals will be given and the description will be omitted as appropriate.

[0065] In the example shown in FIGS. 18A to 18C, the guides 5 are provided one by one at the longitudinal ends of the reflector 1. The guide 5 is in the shape of a flat plate extending in the longitudinal direction of the reflector 1. The guide 5 may be provided with a through hole 51 for passing a fixing mounting screw. By screwing the mounting screw passed through the through hole 51 into a screw hole (not shown) provided in the base 11, the guide 5 is fixed to the base 11.

[0066] [Eighth Embodiment] Regarding the eighth embodiment of the reflector according to the present invention, the differences from the first embodiment will be mainly described. For the components common to the first embodiment, the same reference numerals will be given and the description will be omitted as appropriate.

[0067] As shown in FIG. 19, the reflector 1 may be combined with a single-ended type heater lamp 12. In FIG. 19, the reflector 1 is shown in a cross-sectional view along the tube axis direction of the heater lamp 12. Examples of the reflecting surface shape of the reflector 1 include a paraboloid and an ellipsoid. A mounting hole 1b for mounting the base 13 is formed at the center of the reflector 1. Here, the single-ended type heater lamp is, for example, one provided with a bulb made of quartz glass and having a sealing portion formed at one end of the bulb. On the other hand, one having sealing portions formed at both ends like the heater lamp shown in FIG. 17 is called a double-ended type.

[0068] As described above, the embodiments of the present invention have been described with reference to the drawings. However, the specific configuration should be considered not to be limited to these embodiments. The scope of the present invention is indicated not only by the description of the above embodiments but also by the scope of claims, and further includes all modifications within the meaning and scope equivalent to the scope of claims.

[0069] It is possible to adopt the structure employed in each of the above embodiments in any other embodiment. The specific configuration of each part is not limited to only the above-described embodiments, and various modifications are possible without departing from the gist of the present invention.

[0070] In the above embodiment, an example in which the reflecting mirror 1 is combined with a heater lamp is shown, but it is not limited thereto. For example, the reflecting mirror 1 may be combined with a heating LED light source.

[0071] [Examples] Hereinafter, examples and the like specifically showing the configuration and effects of the present invention will be described.

[0072] An experiment was conducted to confirm the effect of the reflecting mirror according to the present invention.

[0073] (1) Experimental samples Examples · Shape of the reflecting mirror: flat plate (size: 50 mm × 100 mm) · Material of the glass member: quartz glass · Light reflecting member: A diffusion reflection film mainly composed of silica is formed on the inner surface of the glass member · Sealing: Each end of the first glass member and the second glass member is pinch-sealed Comparative examples · Shape of the reflecting mirror: flat plate (size: 50 mm × 100 mm) · Material of the glass member: quartz glass · Light reflecting member: A diffusion reflection film mainly composed of silica is formed on the inner surface of the glass member · Sealing: Each end of the first glass and the second glass member is welded with a sealing glass made of a low melting point glass (bismuth-based glass) (2) Experimental conditions Experimental samples of the examples and comparative examples were placed in an electric furnace under a vacuum atmosphere. After heating up to a temperature of 600 °C, it was kept for 1 hour. Since the mirror may be used in a high-temperature environment of 600 °C or higher together with the heater lamp, the heat resistance was evaluated at a temperature of 600 °C.

[0074] (3) Experimental results After the experimental samples reached room temperature, each mirror was visually observed. For the examples, it was confirmed that there was no damage or deformation (the state was the same as before the experiment). For the comparative examples, cracks occurred in the low-melting-point glass part.

Explanation of symbols

[0075] 1: Mirror 1a: Reflective surface 1b: Mounting hole 2: Light reflecting member 3: Glass member 4: Gap 5: Guide 10: Heater lamp 11: Base 11a: Lamp holding hole 11b: Mirror holding hole 12: Heater lamp 13: Base 30: Heat-resistant glass 31: First glass member 31a: Outer peripheral part 32: Second glass member 51: Through hole 320: Exhaust pipe 321: Chip part

Claims

1. It has a film-like or plate-like light reflecting member and a glass member composed only of heat-resistant glass, The glass member includes a first glass member having a reflecting surface and a second glass member disposed with a space between the inner surface of the first glass member, The light reflecting member is disposed only on the inner surface of the first glass member and is hermetically sealed inside the glass member, There is a gap between the inner surface of the second glass member and the light reflecting member inside the glass member, A chip portion is formed on the outer surface of the second glass member, a mirror.

2. The light reflecting member is a diffused reflection film, the mirror according to claim 1.

3. The main component of the diffuse reflection film is silica (SiO ２ ), alumina (Al ２ O ３ ), or titania (TiO ２ ). The mirror according to claim 2, wherein the main component is any one of these.

4. The light reflecting member is a thin film of metal, the mirror according to claim 1.

5. The metal constituting the light reflecting member is any one of aluminum, silver, gold, and alloys containing these metals, the mirror according to claim 4.

6. The light reflecting member is a plate material of metal or ceramics, the mirror according to claim 1.

7. The metal constituting the plate material is any one of aluminum, silver, gold, and alloys containing these metals, the mirror according to claim 6.

8. There is a gap in which the light reflecting member is not provided inside the glass member, the mirror according to claim 1.

9. The gap is a vacuum or an inert gas is introduced, the mirror according to claim 8.

10. The gap is provided on the side opposite to the reflecting surface of the light reflecting member, the mirror according to claim 8.

11. The heat-resistant glass is quartz glass, the mirror according to claim 1.

12. It has a protrusion portion connectable to other members, the mirror according to claim 1.

13. It has the mirror according to any one of claims 1 to 12, a heater lamp, and a base, The heater lamp and the mirror are held by the base, a heater lamp with a mirror.

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