Inertial Sensor and Electronic Device

Abstract

An inertial sensor (20) and an electronic device (100) are provided. A mass block (312 or 315) of the inertial sensor (20) for detecting the Y-axis is driven to have a displacement component in the X-axis direction. When the inertial sensor (20) receives an angular velocity component around the Z-axis, the mass block (312 or 315) for detecting the Y-axis may pull the mass block (313 or 316) for detecting the Z-axis, so that the mass block (313 or 316) for detecting the Z-axis may have a displacement component in the Y-axis direction. The inertial sensor (20) can implement a fundamental decoupling between the Y-axis detection and the Z-axis detection, thereby contributing to considering both the size and detection accuracy of the inertial sensor (20).

Description

Technical Field

[0001] This application relates to the field of inertial sensing and the field of electronic devices, and more specifically, to inertial sensors and electronic devices.

Background Art

[0002] This application claims priority to Chinese Patent Application No. 202111016671.3, titled "Inertial Sensor and Electronic Device", filed with the China National Intellectual Property Administration on August 31, 2021, the entire disclosure of which is incorporated herein by reference.

[0003] An electronic device can detect an operating state such as the tilt of the electronic device by using an inertial sensor (which may sometimes be referred to as an inertial measurement unit (IMU)). The inertial sensor plays an important role in application scenarios such as shake correction during shooting, navigation, game directionality, and screen rotation.

[0004] The inertial sensor can be configured to detect the angular velocity of the electronic device with respect to a plurality of rotationally symmetrical beams. If the operation of the inertial sensor with respect to rotationally symmetrical beam A affects the detection of the angular velocity of rotationally symmetrical beam B, the detection result of the inertial sensor may become inaccurate. In an inertial sensor, if the part for detecting the angular velocity of rotationally symmetrical beam A and the part for detecting the angular velocity of rotationally symmetrical beam B are separately arranged and do not interfere with each other, the overall size of the inertial sensor may become large. Therefore, how to consider the size and detection accuracy of the inertial sensor is a problem to be solved.

Summary of the Invention

[0005] This application provides an inertial sensor and an electronic device, provides an inertial sensor with a small structure and high detection accuracy, thereby contributing to the improvement of the application performance of the inertial sensor in the electronic device.

[0006] According to a first aspect, an inertial sensor is provided that includes the following. That is, A first mass block and a first detection electrode, wherein the first mass block is movable relative to the first detection electrode, and the first mass block and the first detection electrode are arranged in a first direction to form a first capacitor, and the first capacitor is configured to detect an angular velocity around a second direction, the first mass block and the first detection electrode. A second mass block and a second detection electrode, wherein the second mass block is movable relative to the second detection electrode, and the second mass block and the second detection electrode are arranged in a second direction to form a second capacitor, and the second capacitor is configured to detect an angular velocity around the first direction, the second mass block and the second detection electrode. And, A first connector, wherein the first connector is connected between a first end of the first mass block and a first end of the second mass block, the first connector. Here, the first mass block is driven to have a displacement component in a third direction, and the first direction, the second direction, and the third direction are orthogonal to each other. Also, when the first mass block has an angular velocity component around the first direction, the first mass block has a displacement component in the second direction, and the first mass block is configured to pull the second mass block and move it in the second direction by using the first connector, and the displacement component of the second mass block in the second direction corresponds to a variation in the capacitance value of the second capacitor. Furthermore, when the first mass block has an angular velocity component around the second direction, the first mass block has a displacement component in the first direction, and the displacement component of the first mass block in the first direction corresponds to a variation in the capacitance value of the first mass block.

[0007] In this application, the first mass block pulls the second mass block in the second direction to detect the angular velocity of the second mass block around the first direction. When the first mass block detects the angular velocity around the second direction, the first mass block has displacement components in the first direction and the third direction, and the first mass block can be regarded as being stationary in the second direction. When the second mass block detects the angular velocity around the first direction, the second mass block has a displacement component in the second direction. Based on the detection principle, when the first mass block has only an angular velocity component around the second direction, the first mass block may not have a displacement component in the second direction. Therefore, the detection of the angular velocity around the second direction by the first mass block hardly affects the detection of the angular velocity around the first direction by the second mass block. This contributes to reducing the application of differential decoupling of the inertial sensor and contributes to improving the detection accuracy of the inertial sensor. Furthermore, the inertial sensor provided in this application can supply power to the first mass block and the second mass block by using one drive source, thereby contributing to improving the detection accuracy of the inertial sensor.

[0008] When the second mass block has only an angular velocity component around the second direction, the first mass block has a smaller displacement component in the second direction, and the first mass block has a smaller tensile force exerted on the second mass block in the second direction. Therefore, this contributes to Upward both the degree of coupling between the first mass block and the second mass block

[0009] Regarding the first aspect, in some implementations of the first aspect, the first connector includes a first elastic connector. The first elastic connector is configured to provide a buffer space for the first mass block in the first direction and the third direction, so that the displacement component of the first end of the second mass block in the first direction is smaller than the displacement component of the first end of the second mass block in the first direction, and the displacement component of the first end of the second mass block in the third direction is smaller than the displacement component of the first end of the first mass block in the third direction.

[0010] The first elastic connector may have a buffering function between the first mass block and the second mass block. When the first mass block detects an angular velocity around the second direction, the displacement of the first mass block in the first direction may increase. The first elastic connector contributes to reducing the displacement of the second mass block in the first direction after the second mass block is pulled by the first mass block. When the first mass block moves back and forth in the third direction, the displacement of the first mass block in the third direction may increase. The first elastic connector contributes to reducing the displacement of the second mass block in the third direction after the second mass block is pulled by the first mass block. The first elastic connector may contribute to reducing the influence of the displacement components of the first mass block in the second and third directions on the second mass block.

[0011] The rigidity of the first elastic connector in the second direction may be lower than, for example, the rigidity of the first elastic connector in the first direction. The rigidity of the first elastic connector in the third direction may be lower than, for example, the rigidity of the first elastic connector in the first direction.

[0012] Regarding the first aspect, in some implementations of the first aspect, the first connector further includes the following. That is, A first support beam, which is connected between a first elastic connector and a second mass block.

[0013] The first support beam is connected between the first elastic connector and the second mass block. This contributes to further absorption of displacement components that cannot be fully absorbed by the first elastic connector, and reduces the displacement of the second mass block in the first direction and / or the third direction after the second mass block is pulled by the first mass block.

[0014] Regarding the first aspect, in some implementations of the first aspect, the first connector further includes the following. That is, A first transmission beam that extends in the third direction, with one end of the first transmission beam connected between the first elastic connector and the second mass block. When the first mass block has an angular velocity component of the first mass block in the first direction, the first transmission beam is rotatable about the first direction.

[0015] In other words, when the first mass block has an angular velocity component around the first direction, the first transmission beam may have a rotation angle around the first direction.

[0016] Part of the position of the first transmission beam is fixed, and the deformation amount of the first transmission beam is small. When the first mass block shifts in the first direction, the first mass block tends to pull the second mass block and move it in the first direction. The second mass block is conversely pulled by the second part of the first transmission beam, and after the second mass block is pulled by the first mass block, the displacement of the second mass block in the first direction can be further reduced.

[0017] Regarding the first aspect, in some implementations of the first aspect, when the first mass block has an angular velocity component around the second direction, the rotation angle of the first transmission beam around the second direction is smaller than the rotation angle of the first mass block around the second direction.

[0018] The first transmission beam is connected between the first mass block and the second mass block, and the rotation angle of the first transmission beam around the second direction is small. This contributes to reducing the deformation amount of the second mass block.

[0019] In one embodiment, the length of the first transmission beam can be large. For example, half of the length of the first transmission beam in the third direction may be larger than the length of the second mass block in the third direction.

[0020] Regarding the first aspect, in some implementations of the first aspect, the first mass block extends from the first end of the second mass block to the second end of the second mass block. The inertial sensor further includes the following. That is, A second connector, which is connected between the second end of the first mass block and the second end of the second mass block, and the second connector and the first connector are symmetric with respect to the second mass block.

[0021] The first mass block can pull the second mass block from both ends of the second mass block, and the connectors at both ends of the second mass block are also symmetric. This contributes to improving the symmetry of the displacement of the second mass block in the first direction and further contributes to improving the detection accuracy of the inertial sensor.

[0022] Regarding the first aspect, in some implementations of the first aspect, the inertial sensor further includes the following. That is, A drive electrode and a drive block, wherein a capacitor formed by these drive electrodes and drive blocks is configured to drive the drive block so as to move back and forth in a third direction relative to the drive electrode. And, A second support beam, which is connected between the drive block and the first mass block, and the drive block is configured to drive the first mass block by using the second support beam, whereby the first mass block has a displacement in the third direction. Second support beam.

[0023] The drive block can drive the first mass block from the side away from the second mass block. This contributes to reducing the influence caused by the drive block on the movement of the second mass block when the drive block pulls the first mass block, and further contributes to improving the detection accuracy of the inertial sensor.

[0024] Regarding the first aspect, in some implementations of the first aspect, the inertial sensor further includes the following. That is, A third mass block and a third detection electrode, wherein the third mass block is movable relative to the third detection electrode, the third mass block and the third detection electrode are arranged in a first direction to form a third capacitor, and the third capacitor is configured to detect an angular velocity around the third direction. The third mass block is driven to have a displacement component in a second direction. When the third mass block has an angular velocity component around the third direction, the third mass block has a displacement component in the first direction, and the displacement component of the third mass block in the first direction corresponds to a change in the capacitance value of the third capacitor. Third mass block and third detection electrode.

[0025] Since the third mass block moves back and forth in the second direction and the third mass block and the third detection electrode are arranged in the first direction, the influence of the movement and detection of the third mass block on the first mass block and the second mass block is reduced. As a result, the inertial sensor can have high precision while detecting the angular velocity in three axes.

[0026] Regarding the first aspect, in some implementation forms of the first aspect, the first mass block is driven by a driving block. The driving block is configured to move back and forth in the third direction, and a steering beam is connected between the third mass block and the driving block. The end of the steering beam close to the driving block is configured to move back and forth in the third direction, and the end of the steering beam close to the third mass block is configured to move back and forth in the second direction. As a result, the third mass block has a displacement component in the second direction.

[0027] The first mass block and the third mass block are driven by using the same driving block. This contributes to reducing the number of components in the inertial sensor, improving the coupling degree of the first mass block, the second mass block, and the third mass block, and contributing to the improvement of the detection accuracy of the inertial sensor.

[0028] Regarding the first aspect, in some implementation forms of the first aspect, the inertial sensor further includes the following. That is, A second elastic connector, which is connected between the driving block and the first mass block and is configured to provide a buffer space in the first direction with respect to the third mass block.

[0029] When the third mass block detects the angular velocity around the third direction, the third mass block may shift in the first direction. The second elastic connector helps to absorb the displacement component in the first direction, thereby reducing the influence of the third mass block on the driving block.

[0030] The stiffness of the second elastic connector in the second direction can be, for example, greater than the stiffness of the second elastic connector in the first direction. The stiffness of the second elastic connector in the third direction may be, for example, greater than the stiffness of the second elastic connector in the first direction.

[0031] Regarding the first aspect, in some implementations of the first aspect, the inertial sensor further includes the following. That is, A second transmission beam, which is connected between the second elastic connector and the drive block, the second transmission beam is rotatable about a third direction, and when the third mass block rotates about the third direction, the rotation angle of the second transmission beam about the third direction is smaller than the rotation angle of the third mass block about the third direction, the second transmission beam.

[0032] The second transmission beam can be connected between the third mass block and the symmetric mass block of the third mass block. The deformation amount of the second transmission beam is small. When the third mass block and the symmetric mass block of the third mass block are shifted in the opposite direction in the first direction, the second transmission beam can pull both the third mass block and the symmetric mass block of the third mass block in the opposite direction. This contributes to improving the symmetry of the displacement between the third mass block and the symmetric mass block of the third mass block in the first direction.

[0033] Regarding the first aspect, in some implementations of the first aspect, the inertial sensor further includes the following. That is, A third elastic connector, which is connected to the third mass block, the third elastic connector is configured to provide a supporting force in the first direction with respect to the third mass block, and is configured to provide a buffer space in the second direction with respect to the third mass block, the third elastic connector.

[0034] The third elastic connector can provide a torsional force and a supporting force to the third mass block, whereby the third mass block moves in a preset manner.

[0035] The rigidity of the third elastic connector in the second direction may be lower than, for example, the rigidity of the third elastic connector in the first direction. The rigidity of the third elastic connector in the third direction may be lower than, for example, the rigidity of the third elastic connector in the first direction. The rigidity of the third elastic connector in the second direction may be smaller than, for example, the rigidity of the third elastic connector in the third direction.

[0036] Regarding the first aspect, in some implementations of the first aspect, the third elastic connector is located on the side of the third mass block and away from the second mass block.

[0037] In the embodiments of the present application, the natural vibration frequency mode of the inertial sensor is adjusted, for example, by using a rigidity design or a decoupling mode design, whereby the effective mode of the inertial sensor can be as far away as possible from the interference mode of the inertial sensor. This improves the filtering effect of the inertial sensor and reduces the noise level of the inertial sensor. Furthermore, by adjusting the detection frequency and the driving frequency of the inertial sensor, the sensitivity of the inertial sensor is improved.

[0038] Regarding the first aspect, in some implementations of the first aspect, the inertial sensor includes a mechanical structure layer, a coating layer, and a substrate layer. The mechanical structure layer is located between the coating layer and the substrate layer. The first mass block and the second mass block are disposed on the mechanical structure layer. The first detection electrode is disposed on the substrate layer, and the second detection electrode is disposed on the substrate layer or the mechanical structure layer.

[0039] In one embodiment, the third mass block may be disposed on the mechanical structure layer, and the third detection electrode may be disposed on the substrate layer.

[0040] The solution provided in this application can be applied to microelectromechanical systems (MEMS) scenarios and is compatible with other components in an electronic device.

[0041] Regarding a first aspect, in some implementations of the first aspect, the inertial sensor is symmetric with respect to a second direction, and the inertial sensor is symmetric with respect to a third direction.

[0042] The mechanical structure layer has symmetry and suppresses the influence of factors such as material strain and processing deviation. The mechanical structure layer has symmetry and, by applying the differential principle, helps to remove common-mode noise caused by material strain and processing deviation, etc., and helps to improve the temperature drift performance and zero-drift performance of the inertial sensor.

[0043] According to a second aspect, an electronic device is provided that includes an inertial sensor according to any implementation of the first aspect.

Brief Description of the Drawings

[0044]

Figure 1

Figure 2

Figure 3A

Figure 3B

Figure 4

Figure 5

Figure 6

Figure 7A

Figure 7B

Figure 7C

Figure 8A

Figure 8B

Figure 9A

Figure 9B

Figure 10A

Figure 10B

Embodiments for Carrying Out the Invention

[0045] Hereinafter, with reference to the accompanying drawings, the technical solution of the present application will be described.

[0046] FIG. 1 is a schematic diagram showing the structure of an electronic device 100 according to an embodiment of the present invention. The electronic device 100 can be, for example, a terminal consumer product or 3C electronic product (computer electronic product, communication electronic product, or consumer electronic product), such as, for example, a mobile phone, a portable computer, a tablet computer, an e-book reader, a notebook computer, a digital camera, a wearable device, a headset, a watch, or a stylus. In the embodiment shown in FIG. 1, an example where the electronic device 100 is a mobile phone will be used for explanation.

[0047] The electronic device 100 may include a housing 11, a display 12, and a circuit board assembly 13. Specifically, the housing 11 may include a frame and a back cover. This frame may be disposed between the display 12 and the back cover. The frame may surround the periphery of the display 12 and the periphery of the back cover. The cavity formed between the display 12, the frame, and the back cover may be configured to accommodate the circuit board assembly 13. The circuit board assembly 13 may include a circuit board and an inertial sensor 20 disposed on the circuit board. This circuit board may be, for example, a main board or a sub-board.

[0048] FIG. 2 shows two embodiments of the inertial sensor 20. In the embodiment shown in FIG. 2, the inertial sensor 20 may be a gyroscope, or an acceleration sensor and a gyroscope may be integrated. In the embodiment where the inertial sensor 20 integrates an acceleration sensor and a gyroscope, the inertial sensor 20 may be a sensor capable of realizing both the function of the acceleration sensor and the function of the gyroscope.

[0049] The gyroscope sensor can be configured to determine the operating posture of the electronic device 100. In some embodiments, the angular velocity of the electronic device 100 around each of the three axes (i.e., the X-axis, Y-axis, and Z-axis) can be determined by using the gyroscope sensor. The gyroscope sensor can be used for shake correction during shooting. For example, when the shutter is pressed, the gyroscope sensor detects the angle by which the electronic device 100 shakes, calculates the distance that the lens module needs to compensate based on that angle, and enables the lens to cancel the shake of the electronic device 100 by reverse movement, thereby implementing shake correction. The gyroscope sensor can also be further used in navigation and motion game scenarios.

[0050] The acceleration sensor can detect accelerations in various directions (usually three axes) in the electronic device 100. When the electronic device 100 is stationary, the magnitude and direction of gravity can be detected. The acceleration sensor can be further configured to identify the posture of the electronic device 100 and is applicable to uses such as a pedometer and switching between landscape mode and portrait mode.

[0051] As shown in FIG. 2, the inertial sensor 20 can include a chip 21 and one or more detection units 22. Some or all of the detection units 22 may also be called microelectromechanical systems (MEMS). The chip 21 can be electrically connected to the detection units 22. In the embodiment shown in FIG. 2, the inertial sensor 20 can include a single detection unit 22. The chip 21 can obtain signals related to acceleration and / or angular velocity by using the detection unit 22. In other embodiments, the inertial sensor 20 can include two detection units 22. The chip 21 can obtain acceleration-related signals by using one detection unit 22 and obtain angular velocity-related signals by using the other detection unit 22.

[0052] With reference to FIGS. 1 and 2, the principle of obtaining the operating state of the electronic device 100 by using the inertial sensor 20 will be described below.

[0053] The detection unit 22 may include a substrate layer, a mechanical structure layer, and a coating layer. The mechanical structure layer may be sealed and connected between the mechanical structure layer and the coating layer. The mechanical structure layer may also be called a MEMS layer. The mechanical structure layer may be the main part of the detection unit 22 for implementing angular velocity detection.

[0054] The mechanical structure layer may include a rotor and a stator. The stator may be fixed within the inertial sensor 20. For example, the stator may be fixed to the substrate layer. There is a gap between the stator and the rotor, whereby the stator and the rotor can form a capacitor. The capacitor formed by the stator and the rotor may be used to drive the rotor to move relative to the stator. For example, the rotor may be suspended above the substrate layer and can move relative to the substrate layer. In one embodiment, each of the rotor and the stator may include, for example, a comb structure. This comb-shaped rotor may be a movable comb. The comb-shaped stator may be a fixed comb.

[0055] The inertial sensor 20 may further include detection electrodes. The detection electrodes may be fixed to the inertial sensor 20. A capacitor may be formed between the rotor and the detection electrodes. The capacitor formed by the rotor and the detection electrodes may be configured to detect the operating state of the electronic device 100. In the embodiment shown in FIG. 2, for example, the detection electrodes may be fixed to the substrate layer.

[0056] Assume that there is an XYZ coordinate system in which the X-axis, Y-axis, and Z-axis are mutually orthogonal. The embodiment shown in FIG. 2 is used as an example. The detection electrode and the rotor can be arranged along the Z-axis, and both the detection electrode and the rotor can be arranged parallel to the XY plane. The chip 21 can transmit an alternating current signal to the detection unit 22 to drive the rotor of the detection unit 22 to move back and forth in a translational mode along the X-axis with a preset frequency relative to the stator. This movement hardly changes the distance on the Z-axis between the detection electrode and the rotor. The distance between the detection electrode and the rotor along the Z-axis can correspond to the capacitance value of the capacitor formed by the detection electrode and the rotor. Therefore, the capacitance value of the capacitor formed by the detection electrode and the rotor can basically remain unchanged.

[0057] When the electronic device 100 has no movement (including translation and rotation, etc.), the capacitance value of the capacitor formed by the detection electrode and the rotor can basically remain unchanged.

[0058] When the electronic device 100 has movement, for example, when the electronic device has an angular velocity component for rotating around the Y-axis due to an external force, that is, when the rotation direction of the electronic device is in the Y-axis direction, the rotor also tends to rotate around the Y-axis and bears an additional acting force. This acting force is sometimes called the Coriolis force. The direction of the acting force (for example, the Z-axis direction, etc.) can be orthogonal to both the rotation direction of the rotor (for example, the Y-axis direction, etc.) and the movement direction of the rotor (for example, the X-axis direction, etc.). Therefore, the acting force can change the distance between the detection electrode and the rotor and change the capacitance value of the capacitor formed by the detection electrode and the rotor. The chip 21 can obtain the angular velocity ω of the electronic device 100 for rotating around the Y-axis by acquiring the variation of the capacitance value of the capacitor formed by the detection electrode and the rotor.

[0059] The variation y in the distance between the detection electrode and the rotor can be determined based on the variation ΔC in the capacitance value. The variation ΔC in the capacitance value and the variation y in the distance can satisfy, for example, the following equation. That is,

[0060]

Equation

[0061] is satisfied.

[0062] Based on the rigidity k of the rotor and the variation y in the distance, the Coriolis force F borne by the rotor can be determined. The Coriolis force F, the rigidity k, and the variation y in the distance can satisfy, for example, the following equation. That is,

[0063]

Equation

[0064] is satisfied.

[0065] The angular velocity ω of the rotor can be determined based on the Coriolis force F, the rotor mass m, and the speed v at which the rotor moves back and forth. The Coriolis force F, the rotor mass m, the speed v at which the rotor moves back and forth, and the angular velocity ω can satisfy, for example, the following equation. That is,

[0066]

Equation

[0067] is satisfied.

[0068] When the electronic device 100 actually moves, the electronic device 100 can rotate around the three axes of the X-axis, Y-axis, and Z-axis. The inertial sensor can acquire the angular velocities around the X-axis, Y-axis, and Z-axis with reference to the principle described above.

[0069] In one example, the inertial sensor may include three detection systems that are independent of each other. The three detection systems can be driven independently and are configured to detect the angular velocity around the X-axis, Y-axis, and Z-axis. However, in this method, the space occupied by the inertial sensor becomes large.

[0070] In another example, the inertial sensor may include detection system A. In the structural design, detection system A can be configured to detect the angular velocity in direction A, and further configured to detect the angular velocity in direction B, and can implement the detection coupling between direction A and direction B. However, when detection system A detects the angular velocity around direction A, if the movement of detection system A affects the detection of the angular velocity around direction B, the detection accuracy of the inertial sensor may deteriorate.

[0071] To ensure the detection accuracy of the inertial sensor, the processing accuracy of the inertial sensor is also increased.

[0072] To solve the above-mentioned problems, the embodiments of the present application provide a series of technical solutions to enable the inertial sensor to meet various requirements and help improve the application performance of the inertial sensor in an electronic device. For example, the inertial sensor provided by the embodiments of the present application may have characteristics such as small size, excellent detection accuracy, and low processing difficulty.

[0073] FIG. 3A is a schematic diagram showing the structure of the mechanical structure layer 300 according to an embodiment of the present application. FIG. 3B is a schematic diagram showing the movement of the rotor of the mechanical structure layer 300 shown in FIG. 3A when the mechanical structure layer 300 is not rotating. For ease of explanation, as shown in FIGS. 3A and 3B, it is assumed that there is an XYZ coordinate system, the XY plane is parallel to the paper surface in FIGS. 3A and 3B, and the Z-axis is perpendicular to the paper surface of FIGS. 3A and 3B. The X-axis, Y-axis, and Z-axis are perpendicular to each other. The mechanical structure layer 300 can be arranged parallel to the XY plane.

[0074] The mechanical structure layer 300 may include a mass block 311, a mass block 312, and a mass block 313. The mass block 311 is configured to detect the angular velocity around the X axis. The mass block 312 is configured to detect the angular velocity around the Y axis. The mass block 313 is configured to detect the angular velocity around the Z axis.

[0075] The mechanical structure layer 300 further includes a support beam 3201. The support beam 3201 is driven to have a displacement component in the X-axis direction. When the inertial sensor is not subject to an external force, the support beam 3201 can move back and forth along the X axis. For example, the mechanical structure layer 300 further includes a drive block (not shown in FIGS. 3A and 3B), and the drive block is connected to the support beam 3201, whereby the drive block can be configured to drive the support beam 3201 to move back and forth along the X axis.

[0076] In this application, a component may have displacement components in the X-axis direction, the Y-axis direction, and the Z-axis direction. The displacement component of the component in the X-axis direction may be the projection of the displacement of the component onto the X axis. The displacement component of the component in the Y-axis direction may be the projection of the displacement of the component onto the Y axis. The displacement component of the component in the Z-axis direction may be the projection of the displacement of the component onto the Z axis. The displacement of the component may be the vector sum of the displacement component of the component in the X-axis direction, the displacement component of the component in the Y-axis direction, and the displacement component of the component in the Z-axis direction. When the component has only a displacement component on the X axis, the component can move along the X axis. When the component has only a displacement component on the Y axis, the component can move along the Y axis. When the component has only a displacement component on the Z axis, the component can move along the Z axis.

[0077] In one embodiment, the drive block may include drive piece 1 and drive piece 2. Drive piece 1 may belong to the stator. Drive piece 1 and drive piece 2 may form a capacitor. By configuring an alternating current signal on drive piece 1 and drive piece 2, drive piece 2 may move back and forth along the X-axis relative to drive piece 1. Support beam 3201 may be connected to drive piece 2, and support beam 3201 may move back and forth under the drive of drive piece 2.

[0078] One end of support beam 3201 may be disposed close to mass block 311. The displacement component of support beam 3201 in the X-axis direction is used to drive mass block 311 to move along the Y-axis. Mechanical structure layer 300 may further include operation beam 351. Operation beam 351 may transmit a translational driving force between support beam 3201 and mass block 311, whereby mass block 311 moves back and forth under the drive of support beam 3201. Further, operation beam 351 is further configured to convert the translational driving force along the X-axis from support beam 3201 into a translational driving force along the Y-axis, whereby mass block 311 has a displacement component in the Y-axis direction under the action of operation beam 351. When the inertial sensor is not subject to an external force, mass block 311 may move back and forth along the Y-axis. For example, operation beam 351 may be connected between support beam 3201 and mass block 311. In one embodiment, the included angle between operation beam 351 and the X-axis may be about 45°, and the included angle between operation beam 351 and the Y-axis may be about 45°.

[0079] Mechanical structure layer 300 may further include anchor 341 and elastic connector 3301. Elastic connector 3301 may be connected between anchor 341 and mass block 311.

[0080] In this application, the anchor may belong to the stator. For example, the anchor may be fixed to the substrate layer shown in FIG. 2. In this application, compared with the support beam, the elastic connector may have a smaller rigidity.

[0081] The elastic connector 3301 can be configured to support the mass block 311, whereby the mass block 311 is suspended between the substrate layer and the coating layer shown in FIG. 2. The elastic connector 3301 can be configured to provide suspension support along the Z-axis of the mass block 311, whereby the mass block 311 is suspended between the substrate layer and the coating layer shown in FIG. 2. In other words, the elastic connector 3301 can have great rigidity in the Z-axis direction. The elastic connector 3301 can be further configured to provide a buffer space in the Y-axis direction between the mass block 311 and the anchor 34. In other words, the elastic connector 3301 can have low rigidity in the Y-axis direction, or the connector 3301 can have elasticity in the Y-axis direction.

[0082] FIG. 3B is a schematic diagram showing the structure in which the mass block 311 moves along the Y-axis under the action of the support beam 3201. The dashed line in FIG. 3B indicates the position of the mass block 311 before movement, and the solid line in FIG. 3B indicates the position of the mass block 311 after movement.

[0083] To facilitate the movement of the mass block 311, the mechanical structure layer 300 may further include an elastic connector 3302. The elastic connector 3302 can have low rigidity or elasticity in the X-axis and Y-axis directions to facilitate the relative movement of the support beam 3201 and the mass block 311 in a preset direction. For example, the elastic connector 3302 can be configured to absorb displacement along the X-axis and reduce the displacement component of the mass block 311 in the X-axis direction. This facilitates the movement of the mass block 311 along the Y-axis. The elastic connector 3302 can be configured to absorb displacement along the Y-axis and reduce the displacement component of the support beam 3201 in the Y-axis direction. This facilitates the movement of the support beam 3201 along the X-axis.

[0084] The mechanical structure layer 300 may further include a support beam 3202. The support beam 3202 is driven to have a displacement component in the X-axis direction. When the inertial sensor is not subjected to an external force, the support beam 3202 can move back and forth along the X-axis. For the embodiment in which the support beam 3202 is driven to move back and forth, refer to the above-described embodiment in which the support beam 3201 is driven to move back and forth. In the embodiment shown in FIG. 3A, the support beam 3202 can be connected to the support beam 3201. Since the directions of the forces for driving the support beam 3201 and the support beam 3202 to move back and forth can be along the X-axis and are the same, the support beam 3201 and the support beam 3202 can be driven by the same drive block.

[0085] The support beam 3202 can be further connected to the mass block 312. The support beam 3202 can move back and forth so as to drive the mass block 312 to move along the X-axis. FIG. 3B is a schematic diagram showing a structure in which the mass block 312 moves along the X-axis under the action of the support beam 3202. The dashed line in FIG. 3B indicates the position of the mass block 312 before movement, and the solid line in FIG. 3B indicates the position of the mass block 312 after movement.

[0086] The mechanical structure layer 300 further includes a support beam 3203 and an anchor 342. The support beam 3203 is connected between the anchor 342 and the mass block 313. The support beam 3203 is configured to support the mass block 313, whereby the mass block 313 is suspended between the substrate layer and the coating layer shown in FIG. 2. The support beam 3203 can be configured to provide suspension support to the mass block 313.

[0087] The mechanical structure layer 300 may further include an elastic connector 3303. The elastic connector 3303 can be connected between the mass block 312 and the mass block 313. As shown in FIGS. 3A and 3B, the mass block 312 and the mass block 313 can be connected to the support beam 3203 by using the elastic connector 3303.

[0088] The elastic connector 3303 can be configured to provide a buffer space along the X-axis with respect to the mass block 312. In other words, the elastic connector 3303 can have a small rigidity or elasticity on the X-axis. As described above, the mass block 312 can have a displacement component in the X-axis direction under the action of the support beam 3202. When the inertial sensor is not subjected to an external force, the mass block 312 can move back and forth along the X-axis. The elastic connector 3303 can be configured to absorb the displacement along the X-axis and reduce the displacement component of the mass block 313 in the X-axis direction under the tension of the mass block 312, as shown in FIG. 3B.

[0089] The mechanical structure layer 300 has symmetry to suppress the influence of factors such as material strain and processing deviation. The mechanical structure layer 300 has symmetry and, by applying the differential principle, helps to remove the common mode noise caused by material strain and processing deviation, etc., and helps to improve the temperature drift performance and zero drift performance of the inertial sensor.

[0090] The mechanical structure layer 300 can be symmetric with respect to the symmetry axis x and can be symmetric with respect to the symmetry axis y The symmetry axis x can be parallel to the X-axis, and the symmetry axis x can be parallel to the Y-axis. In the present application, the moving directions of two structures symmetric with respect to the symmetry axis x or the symmetry axis y may be symmetric or opposite.

[0091] In the embodiments shown in FIGS. 3A and 3B, the support beam 3202 and the support beam 3203 can correspond to the symmetry axis x of the mechanical structure layer 300. The mechanical structure layer can further include a symmetric beam 371 and a symmetric beam 372. The symmetric beam 371 and the symmetric beam 371 are located on both sides of the anchor 342, and both the symmetric beam 371 and the symmetric beam 372 are connected to the anchor 342. The symmetric beam 371 and the symmetric beam 372 can correspond to the symmetry axis y of the mechanical structure layer. The anchor 342 can be arranged at the intersection position of the symmetry axis x and the symmetry axis x.

[0092] The mass block 1 is symmetric about the symmetry axis y. The mass block 2 may be symmetric about the symmetry axis x. The mass block 3 may be symmetric about the symmetry axis x. The mechanical structure layer 300 may further include a mass block 314, a mass block 315, and a mass block 316. The mass block 314 is configured to detect the angular velocity about the X axis. The mass block 315 is configured to detect the angular velocity about the Y axis. The mass block 316 is configured to detect the angular velocity about the Z axis. The mass block 4 is symmetric about the symmetry axis y. The mass block 5 may be symmetric about the symmetry axis x. The mass block 6 may be symmetric about the symmetry axis x. The mass block 314 and the mass block 311 may be symmetrically arranged about the symmetry axis x. The mass block 315 and the mass block 312 are symmetrically arranged about the symmetry axis y. The mass block 316 and the mass block 313 are symmetrically arranged about the symmetry axis y.

[0093] The mechanical structure layer 300 may further include a support beam 3204, a support beam 3205, and a support beam 3206. The support beam 3204, the support beam 3205, and the support beam 3206 are driven to have displacement components in the X-axis direction respectively. When the inertial sensor is not subject to an external force, the support beam 3204, the support beam 3205, and the support beam 3206 may move back and forth along the X axis. In one embodiment, the support beam 3204 and the support beam 3201 may be symmetrically arranged about the symmetry axis y. The support beam 3205 and the support beam 3201 are symmetrically arranged about the symmetry axis x. The support beam 3206 and the support beam 3205 are symmetrically arranged about the symmetry axis y.

[0094] In the embodiment shown in FIG. 3A, the support beam 3201 and the support beam 3205 may be connected by using a transmission beam 361. The transmission beam 361 may be symmetric about the symmetry axis x. The support beam 3204 and the support beam 3206 may be connected by using a transmission beam 362. The transmission beam 362 may be symmetric about the symmetry axis x. The transmission beam 361 and the transmission beam 36 2 may be symmetric about the symmetry axis y.

[0095] The support beam 3204 and the support beam 3201 can be respectively connected to two ends of the mass block 311. The support beam 3201 can move back and forth to drive one end of the mass block 311 to move along the Y-axis, and the support beam 3204 can move back and forth to drive the other end of the mass block 311 to move along the Y-axis. Thereby, the mass block 311 can have a displacement component in the Y-axis direction under the action of the support beam 3201 and the support beam 3204. The moving directions of the support beam 3201 and the support beam 3204 in the X-axis direction can be opposite. The support beam 3201 and the support beam 3204 can be driven by different drive blocks. Therefore, the mass block 311 can be driven by two different drive blocks. In one embodiment, the drive block used to drive the support beam 3201 and the drive block used to drive the support beam 3204 can be symmetric with respect to the symmetry axis y.

[0096] The mechanical structure layer 300 may further include an operation beam 352. In one embodiment, the operation beam 352 and the operation beam 351 can be symmetric with respect to the symmetry axis y. The operation beam 351 can transmit a translational driving force between the support beam 3201 and one end of the mass block 311, and the operation beam 352 can transmit a translational driving force between the support beam 3204 and the other end of the mass block 311. Thereby, the mass block 311 moves back and forth under the drive of the support beam 3201 and the support beam 3204. Also, the operation beam 352 is further configured to convert the translational driving force along the X-axis from the support beam 3204 into a translational driving force along the Y-axis. Thereby, the mass block 311 has a displacement component in the Y-axis direction under the action of the operation beam 351 and the operation beam 352. For related embodiments of the operation beam 352, refer to the related embodiments of the operation beam 351.

[0097] The support beam 3205 and the support beam 3206 can be respectively connected to two ends of the mass block 314. The support beam 3205 can move back and forth to drive one end of the mass block 314 to move along the Y-axis, and the support beam 3206 can move back and forth to drive the other end of the mass block 314 to move along the Y-axis. Thus, the mass block 314 can have a displacement component in the Y-axis direction under the action of the support beam 3205 and the support beam 3206.

[0098] The moving directions of the support beam 3205 and the support beam 3206 in the X-axis direction can be opposite. The support beam 3205 and the support beam 3206 can be driven by different drive blocks. The mass block 314 can be driven by two different drive blocks. The two drive blocks configured to drive the mass block 314 can be further configured to drive the mass block 311.

[0099] Based on symmetry, the moving direction of the support beam 3205 can be the same as the moving direction of the support beam 3201, and the support beam 3205 and the support beam 3201 can be driven by the same drive block. The moving direction of the support beam 3206 can be the same as the moving direction of the support beam 3204, and the support beam 3206 and the support beam 3204 can be driven by the same drive block.

[0100] The moving directions of the mass block 314 and the mass block 311 in the Y-axis direction are opposite. The mass block 314 and the mass block 311 may be close to each other or away from each other in the Y-axis direction.

[0101] FIG. 3B is a schematic diagram showing the structure in which the mass block 314 moves along the Y-axis. The dashed line in FIG. B indicates the position of the mass block 314 before movement, and the solid line in FIG. 3B indicates the position of the mass block 314 after movement.

[0102] The mechanical structure layer 300 may further include an operation beam 353 and an operation beam 354. In one embodiment, the operation beam 353 and the operation beam 354 may be symmetric with respect to the symmetry axis y. The operation beam 353 may transmit a translational driving force between the support beam 3205 and one end of the mass block 314, and the operation beam 354 may transmit a translational driving force between the support beam 3206 and the other end of the mass block 314. Thereby, the mass block 314 is driven by the support beam 3205 and the support beam 3206 and has a displacement component in the Y-axis direction. Further, the operation beam 353 is further configured to convert a translational driving force along the X-axis from the support beam 3205 into a translational driving force along the Y-axis, and the operation beam 354 is further configured to convert a translational driving force along the X-axis from the support beam 3206 into a translational driving force along the Y-axis. Thereby, the mass block 314 has a displacement component along the Y-axis under the action of the operation beam 353 and the operation beam 354. For related embodiments of the operation beam 353 and the operation beam 354, refer to the related embodiments of the operation beam 351 and the operation beam 352.

[0103] The mechanical structure layer 300 further includes an anchor 343 and an elastic connector 3304. The anchor 343 and the anchor 341 may be symmetric with respect to the symmetry axis x. The elastic connector 3304 and the elastic connector 3301 may be symmetric with respect to the symmetry axis x. The elastic connector 3304 may be connected between the anchor 343 and the mass block 314. The elastic connector 3304 may be configured to provide a suspension support along the Z-axis for the mass block 314. The elastic connector 3304 may be further configured to provide a buffer space on the Y-axis between the mass block 314 and the anchor 34.

[0104] The mechanical structure layer 300 may further include an elastic connector 3305, an elastic connector 3306, and an elastic connector 3307. In one embodiment, the elastic connector 3305 and the elastic connector 3302 may be symmetric with respect to the symmetry axis y. The elastic connector 3306 and the elastic connector 3302 may be symmetric with respect to the symmetry axis x. The elastic connector 3307 and the elastic connector 3305 may be symmetric with respect to the symmetry axis x.

[0105] The elastic connector 3305 may have a small rigidity or may have elasticity in the X-axis direction and the Y-axis direction. As a result, the support beam 3204 moves along the X-axis, and the mass block 311 moves along the Y-axis. The elastic connector 3306 may have a small rigidity or may have elasticity in the X-axis direction and the Y-axis direction. As a result, the support beam 3205 moves along the X-axis, and the mass block 314 moves along the Y-axis. The elastic connector 3307 may have a small rigidity or may have elasticity in the X-axis direction and the Y-axis direction. As a result, the support beam 3206 moves along the X-axis, and the mass block 314 moves along the Y-axis.

[0106] The mechanical structure layer 300 may further include a support beam 3207. The support beam 3207 is driven to have a displacement component in the X-axis direction. When the inertial sensor is not subject to an external force, the support beam 3207 may move back and forth along the X-axis. The moving direction of the support beam 3207 in the X-axis direction and the moving direction of the support beam 3202 may be opposite. In one embodiment, the support beam 3207 and the support beam 3202 may be symmetric with respect to the symmetry axis y. In the embodiment shown in FIG. 3A, the support beam 3207 may be connected to the transmission beam 362. The support beam 3207 may move back and forth so as to drive the mass block 315, whereby the mass block 315 is driven to have a displacement component in the X-axis direction.

[0107] The moving direction of the mass block 315 in the X-axis direction and the moving direction of the mass block 312 may be opposite. The mass block 315 and the mass block 312 may be close to or away from each other in the X-axis direction. The mass block 315 and the mass block 312 may be driven by different drive blocks. In one embodiment, the two drive blocks configured to drive the mass block 315 and the mass block 312 may be further configured to drive the mass block 311.

[0108] FIG. 3B is a schematic diagram showing the structure in which the mass block 315 moves along the X axis. The dashed line in FIG. 3B indicates the position of the mass block 315 before movement, and the solid line in FIG. 3B indicates the position of the mass block 315 after movement.

[0109] The mechanical structure layer 300 may further include a support beam 3208, a support beam 3209, and a support beam 3210. In one embodiment, the support beam 3208 and the support beam 3203 may be symmetric with respect to the symmetry axis x. The support beam 3209 and the support beam 3203 may be symmetric with respect to the symmetry axis y. The support beam 3210 and the support beam 3208 may be symmetric with respect to the symmetry axis y.

[0110] The support beam 3203 may be connected to the first end of the mass block 313. The support beam 3208 may be connected between the anchor 342 and the second end of the mass block 313. The support beam 3208 and the support beam 3203 are configured to support the mass block 313, whereby the mass block 313 is suspended between the substrate layer and the coating layer shown in FIG. 2. The support beam 3208 and the support beam 3203 may cooperate to provide suspension support along the Z axis for the mass block 313.

[0111] The support beam 3209 may be connected between the anchor 342 and the first end of the mass block 316. The support beam 3210 may be connected between the anchor 342 and the second end of the mass block 316. The support beam 3209 and the support beam 3210 may cooperate to provide suspension support along the Z axis for the mass block 316.

[0112] The mechanical structure layer 300 may further include transfer beams 363 and 364. The transfer beam 363 may be symmetric with respect to the symmetry axis y. The transfer beam 364 may be symmetric with respect to the symmetry axis y. The transfer beams 363 and 364 may be symmetric with respect to the symmetry axis x. The transfer beam 363 may be connected between the support beams 3203 and 3208. The transfer beam 363 may be connected between the support beams 3208 and 3210. The transfer beam 363 may provide suspension support along the Z axis for the support beams 3203 and 3209. The transfer beam 364 may provide suspension support along the Z axis for the support beams 3208 and 3210.

[0113] The mechanical structure layer 300 may further include symmetric beams 371 and 372. The symmetric beams 371 and 372 may be fixed to both ends of the anchor 342. The symmetric beam 371 may be connected between the transfer beam 363 and the anchor 342. The symmetric beam 372 may be connected between the transfer beam 364 and the anchor 342. The symmetric beam 371 may be symmetric with respect to the symmetry axis y. The symmetric beam 372 may be symmetric with respect to the symmetry axis y. The symmetric beams 371 and 372 may be symmetric with respect to the symmetry axis x.

[0114] The mechanical structure layer 300 further includes elastic connectors 3308, 3309, and 3310. In one embodiment, the elastic connectors 3308 and 3303 may be symmetric with respect to the symmetry axis x. The elastic connectors 3309 and 3303 may be symmetric with respect to the symmetry axis y. The elastic connectors 3310 and 3308 may be symmetric with respect to the symmetry axis y.

[0115] The mass block 312 can extend from the first end of the mass block 313 to the second end of the mass block 313. The elastic connector 3303 can be connected between the first end of the mass block 312 and the first end of the mass block 313. The elastic connector 3308 can be connected between the second end of the mass block 312 and the second end of the mass block 313. As shown in FIGS. 3A and 3B, the first end of the mass block 312 and the first end of the mass block 313 can be connected to the support beam 3203 by using the elastic connector 3303. The second end of the mass block 312 and the second end of the mass block 313 can be connected to the support beam 3208 by using the elastic connector 3308.

[0116] The elastic connector 3303 can have a small rigidity in the X-axis direction or have elasticity to provide a buffer space along the X-axis between the first end of the mass block 312 and the first end of the mass block 313. The elastic connector 3308 can have a small rigidity in the X-axis direction or have elasticity to provide a buffer space along the X-axis between the second end of the mass block 312 and the second end of the mass block 313. Therefore, this contributes to the reduction of the displacement of the mass block 313 in the X-axis direction.

[0117] The mass block 315 can extend from the first end of the mass block 316 to the second end of the mass block 316. The elastic connector 3309 can be connected between the first end of the mass block 315 and the first end of the mass block 316. The elastic connector 3310 can be connected between the second end of the mass block 315 and the second end of the mass block 316. As shown in FIGS. 3A and 3B, the first end of the mass block 315 and the first end of the mass block 316 can be connected to the support beam 3209 by using the elastic connector 3309. The second end of the mass block 315 and the second end of the mass block 316 can be connected to the support beam 3210 by using the elastic connector 3310.

[0118] For the specific embodiments of the elastic connector 3309, refer to the specific embodiments of the elastic connector 3303. For the specific embodiments of the elastic connector 3310, refer to the specific embodiments of the elastic connector 3308.

[0119] The mass block 312 pulls the mass block 313 by using the elastic connector 3303 and the support beam 3203. As a result, the mass block 313 has a displacement component in the Y-axis direction. Compared with the embodiment in which the mass block 31 and the mass block 313 are connected only by using the elastic connector 3303, the embodiment in which the elastic connector 3303 and the support beam 3203 are used to connect the mass block 312 and the mass block 313 helps to reduce the influence on the asymmetry of the mechanical structure layer 300 caused by the unstable deformation amount of the elastic connector 3303, and further helps to reduce the processing requirements of the mechanical structure layer 300. The support beam 3203 along the Y-axis may have a larger width than the elastic connector 3303.

[0120] The schematic diagram of the structure shown in FIG. 4 can be obtained by observing the mechanical structure layer 300 shown in FIG. 3B in the X+ direction. With reference to FIGS. 3B and 4, the principle of detecting the angular velocity around the X-axis by using the mass block 311 and the mass block 314 will be described below.

[0121] The inertial sensor may include the detection electrode 231 and the detection electrode 234. For example, the detection electrode 231 and the detection electrode 234 may be arranged on the substrate layer shown in FIG. 2.

[0122] The detection electrode 231 can be arranged to face the mass block 311, and the detection electrode 234 can be arranged to face the mass block 314. The detection electrode 231 and the mass block 311 can be arranged along the Z-axis. The detection electrode 231 and the mass block 311 can be arranged parallel to the XY plane, whereby the detection electrode 231 and the mass block 311 can form the capacitor 1. The detection electrode 234 and the mass block 314 can be arranged along the Z-axis. The detection electrode 234 and the mass block 314 can be arranged parallel to the XY plane, whereby the detection electrode 234 and the mass block 314 can form the capacitor 4.

[0123] The mass block 311 and the mass block 314 can each have a displacement component in the Y-axis direction. When the inertial sensor as a whole rotates around the X-axis with an angular velocity component under the action of an external force, the mass block 311 and the mass block 314 may receive a Coriolis force along the Z-axis. The mass block 311 and the mass block 314 can each have a displacement component in the Z-axis direction. Therefore, the distance between the mass block 311 and the detection electrode 231 can be changed, and the capacitance value of the capacitor 1 formed by the mass block 311 and the detection electrode 231 can be changed. The distance between the mass block 314 and the detection electrode 234 can be changed, and the capacitance value of the capacitor 4 formed by the mass block 314 and the detection electrode 234 can be changed. The variation in the capacitance value of the capacitor 1 formed by the mass block 311 and the detection electrode 231 can correspond to the displacement component of the mass block 311 in the Z-axis direction. The variation in the capacitance value of the capacitor 4 formed by the mass block 314 and the detection electrode 234 can correspond to the displacement component of the mass block 314 in the Z-axis direction.

[0124] In this application, the inertial sensor is rotated by an external force, and the inertial sensor may have angular velocity components around the X-axis direction, Y-axis direction, and Z-axis direction. What is obtained by projecting the angular velocity direction of the inertial sensor onto the X-axis direction may be the angular velocity component of the inertial sensor around the X-axis direction. What is obtained by projecting the angular velocity direction of the inertial sensor onto the Y-axis direction may be the angular velocity component of the inertial sensor around the Y-axis direction. What is obtained by projecting the angular velocity direction of the inertial sensor onto the Z-axis direction may be the angular velocity component of the inertial sensor around the Z-axis direction. The vector sum of the angular velocity components of the inertial sensor around the X-axis direction, Y-axis direction, and Z-axis direction may be the angular velocity direction of the inertial sensor.

[0125] Referring to FIGS. 3B and 4, assume that the driving direction of the mass block 311 is Y+ and the driving direction of the mass block 314 is Y-. When subjected to the action of an external force, the mass block 311 may exist around the anchor 341 and has an angular velocity component for rotating around the X-axis. The mass block 314 may exist around the anchor 343 and has an angular velocity component for rotating around the X-axis. Therefore, the mass block 311 may have a displacement component in the Z+ direction, and the mass block 314 may have a displacement component in the Z- direction. The mass block 311 tends to move away from the detection electrode 231, and the mass block 314 tends to approach the detection electrode 234.

[0126] Since the detection results of the detection electrode 231 and the detection electrode 234 both include common-mode noise, by combining the detection results output by the detection electrode 231 and the detection electrode 234, the common-mode noise can be effectively removed relatively. This contributes to the improvement of the temperature drift performance and zero drift performance of the inertial sensor.

[0127] As shown in FIG. 4, the transmission beam 361 is connected between the elastic connector 3302 and the elastic connector 3306. Referring to FIG. 3B, the transmission beam 361 can be connected between the support beam 3201 and the support beam 3205. Since the directions of the displacement components of the mass block 311 and the mass block 312 in the Z-axis direction are opposite, the transmission beam 361 is used to rotate about the symmetry axis x with respect to the anchor 342. Since the elastic connector 3302 and the elastic connector 3306 have a buffering function, the inclination of the transmission beam 361 can be reduced. For example, the inclination of the transmission beam 361 with respect to the Y-axis can be smaller than the inclination of the elastic connector 3302 with respect to the Y-axis.

[0128] Referring to FIG. 3B, the drive block may further include a transmission beam 362. The transmission beam 362 and the transmission beam 361 are symmetric with respect to the symmetry axis y. The transmission beam 362 can be connected between the elastic connector 3305 and the elastic connector 3307. The transmission beam 362 can be used to rotate about the symmetry axis x with respect to the anchor 342. The rotation directions of the transmission beam 361 and the transmission beam 362 about the X-axis can be opposite. For the specific embodiments of the transmission beam 362, refer to the specific embodiments of the transmission beam 361.

[0129] The schematic diagram of the structure shown in FIG. 5 can be obtained by observing the mechanical structure layer 300 shown in FIG. 3B in the Y+ direction. With reference to FIGS. 3B and 5, the principle of detecting the angular velocity about the Y-axis by using the mass block 312 and the mass block 315 will be described below.

[0130] The inertial sensor may include a detection electrode 232 and a detection electrode 235. For example, the detection electrode 232 and the detection electrode 235 can be arranged on the substrate layer shown in FIG. 2.

[0131] The detection electrode 232 can be arranged to face the mass block 312, and the detection electrode 235 can be arranged to face the mass block 315. The detection electrode 232 and the mass block 312 can be arranged along the Z-axis. The detection electrode 232 and the mass block 312 are arranged parallel to the XY plane, whereby the detection electrode 232 and the mass block 312 can form the capacitor 2. The detection electrode 235 and the mass block 315 can be arranged along the Z-axis. The detection electrode 235 and the mass block 315 can be arranged parallel to the XY plane, whereby the detection electrode 235 and the mass block 315 can form the capacitor 5.

[0132] The mass block 312 and the mass block 315 can each have a displacement component in the X-axis direction. When the inertial sensor as a whole has an angular velocity component for rotation around the Y-axis under the action of an external force, the mass block 312 and the mass block 315 may receive a Coriolis force along the Z-axis. The mass block 312 and the mass block 315 each have a displacement component in the Z-axis direction. Therefore, the distance between the mass block 312 and the detection electrode 232 can be changed, and the capacitance value of the capacitor 2 formed by the mass block 312 and the detection electrode 232 can be changed. The distance between the mass block 315 and the detection electrode 235 can be changed, and the capacitance value of the capacitor 5 formed by the mass block 315 and the detection electrode 235 can be changed. The variation in the capacitance value of the capacitor 2 formed by the mass block 312 and the detection electrode 232 can correspond to the displacement component of the mass block 312 in the Z-axis direction. The variation in the capacitance value of the capacitor 5 formed by the mass block 315 and the detection electrode 235 can correspond to the displacement component of the mass block 315 in the Z-axis direction.

[0133] Referring to FIGS. 3B and 5, assume that the driving direction of the mass block 312 is X− and the driving direction of the mass block 315 is X+. When subjected to an external force, the mass block 312 may exist around the anchor 342 and have an angular velocity component for rotating about the Y axis. The mass block 315 may exist around the anchor 342 and have an angular velocity component for rotating about the Y axis. Therefore, the mass block 312 may have a displacement component in the Z− direction, and the mass block 315 may have a displacement component in the Z+ direction. The mass block 312 tends to approach the detection electrode 232, and the mass block 315 tends to move away from the detection electrode 235.

[0134] Since the detection results of the detection electrode 232 and the detection electrode 235 both include common-mode noise, by combining the detection results output by the detection electrode 232 and the detection electrode 235, the common-mode noise can be effectively removed relatively. This contributes to improvements in the temperature drift performance and zero drift performance of the inertial sensor.

[0135] As shown in FIG. 5, the transmission beam 364 is connected between the elastic connector 3308 and the elastic connector 3310. Referring to FIG. 3B, the transmission beam 364 can be connected to the anchor 342. Since the directions of the displacement components of the mass block 312 and the mass block 315 in the Z-axis direction are opposite, the transmission beam 364 tends to rotate about the symmetry axis y with respect to the anchor 342. Since the elastic connector 3308 and the elastic connector 3310 have a buffering function and the transmission beam 364 is fixed to the anchor 342, the inclination of the transmission beam 364 can be reduced. In other words, the elastic connector 3308 and the elastic connector 3310 can help reduce the inclination of the transmission beam 364 with respect to the X axis, and the rigidity of the transmission beam 364 can further help reduce the inclination of the transmission beam 364 with respect to the X axis. This contributes to reducing the amount of rotation of the mass block 313 about the Y axis.

[0136] When the displacement component directions of the elastic connectors 3308 and 3310 in the X-axis direction are reversed, the transmission beam 364 can further provide the deformation reaction forces of the elastic connectors 3308 and 3310 along the X-axis, which can help reduce the displacement components of the mass blocks 313 and 316 in the X-axis direction.

[0137] Referring to FIG. 3B, the drive block may further include a transmission beam 364. The transmission beam 364 and the transmission beam 363 are symmetric with respect to the symmetry axis x. The transmission beam 364 may be connected between the elastic connectors 3303 and 3309. For the specific embodiments of the transmission beam 364, refer to the specific embodiments of the transmission beam 363.

[0138] The schematic diagram of the structure shown in FIG. 6 can be obtained by observing a local part of the mechanical structure layer 300 shown in FIG. 3B in the Z-direction. With reference to FIGS. 3B and 6, the principle of detecting the angular velocity around the Z-axis by using the mass blocks 312, 313, 315, and 316 will be described below.

[0139] The inertial sensor may include a detection electrode 233 and a detection electrode 236. The detection electrode 233 and the detection electrode 236 may be disposed on the substrate layer shown in the figure, or may be disposed on the mechanical structure layer 300. When the detection electrode 233 and the detection electrode 236 are disposed on the mechanical structure layer 300, the detection electrode 233 and the detection electrode 236 may belong to the stator of the mechanical structure layer 300. 2 which can be disposed on the substrate layer shown in the figure or may be disposed on the mechanical structure layer 300. When the detection electrode 233 and the detection electrode 236 are disposed on the mechanical structure layer 300, the detection electrode 233 and the detection electrode 236 may belong to the stator of the mechanical structure layer 300.

[0140] The detection electrode 233 can be arranged to face the mass block 313, and the detection electrode 236 can be arranged to face the mass block 316. The detection electrode 233 and the mass block 313 can be arranged along the Y-axis. The detection electrode 233 and the mass block 313 can be arranged parallel to the XZ plane, whereby the detection electrode 233 and the mass block 313 can form the capacitor 3. The detection electrode 236 and the mass block 316 can be arranged along the Y-axis. The detection electrode 236 and the mass block 316 can be arranged parallel to the XZ plane, whereby the detection electrode 236 and the mass block 316 can form the capacitor 6.

[0141] The mass blocks 312 and 315 can be driven to have displacement components in the X-axis direction. When the inertial sensor as a whole has an angular velocity component for rotation about the Z-axis under the action of an external force, the mass blocks 312 and 315 may receive a Coriolis force along the Y-axis. The mass blocks 312 and 315 tend to move along the Y-axis. Since the mass blocks 312 and 313 are connected by using the support beams 3203 and 3208, the mass block 313 may have a displacement component in the Y-axis direction under the tension of the mass block 312. Therefore, the distance between the mass block 313 and the detection electrode 233 can be changed, and the capacitance value of the capacitor 3 formed by the mass block 313 and the detection electrode 233 can be changed. The variation of the capacitance value of the capacitor 3 formed by the mass block 313 and the detection electrode 233 may correspond to the displacement component of the mass block 313 in the Y-axis direction. Since the mass blocks 315 and 316 are connected by using the support beams 3209 and 3210, the mass block 316 may have a displacement component in the Y-axis direction under the tension of the mass block 315. Therefore, the distance between the mass block 316 and the detection electrode 236 can be changed, and the capacitance value of the capacitor 6 formed by the mass block 316 and the detection electrode 236 can be changed. The variation of the capacitance value of the capacitor 6 formed by the mass block 316 and the detection electrode 236 may correspond to the displacement component of the mass block 316 in the Y-axis direction.

[0142] Referring to FIGS. 3B and 6, assume that the driving direction of the mass block 312 is X− and the driving direction of the mass block 315 is X+. When subjected to an external force, the mass blocks 312 and 313 may be present around the anchor 342 and may each have an angular velocity component for rotating about the Z axis. The mass blocks 315 and 316 may be present around the anchor 342 and may each have an angular velocity component for rotating about the Z axis. Therefore, the mass blocks 312 and 313 may each have a displacement component in the Z− direction, and the mass blocks 315 and 316 may each have a displacement component in the Z+ direction. For example, the mass block 313 may tend to approach the detection electrode 233, and for example, the mass block 316 may tend to move away from the detection electrode 236.

[0143] One end of the mass block 313 may be connected to one end of the mass block 316 by using the transmission beam 363. The transmission beam 363 may provide a balancing force in the X direction and help reduce the displacement of the mass blocks 313 and 316 in the X direction. The transmission beam 363 may further provide a torsional support for rotating about the Z axis with respect to the mass blocks 312 and 313. Similarly, the other end of the mass block 313 may be connected to the other end of the mass block 316 by using the transmission beam 364. The transmission beam 364 may provide a balancing force in the X direction and a torsional support for rotation about the Z axis with respect to the mass blocks 313 and 316.

[0144] Since the detection results of the detection electrode 233 and the detection electrode 236 both include common-mode noise, by combining the detection results output by the detection electrode 233 and the detection electrode 236, the common-mode noise can be effectively removed relatively. This contributes to improvements such as the temperature drift performance and zero drift performance of the inertial sensor.

[0145] To facilitate the description of the advantageous effects of the solutions provided in the embodiments of the present application, three types of decoupling, namely mechanical decoupling, principle decoupling, and differential decoupling, will be described first.

[0146] Mechanical decoupling means that component A and component B are separately arranged, and the operation of component A (this operation includes the operation driven by the chip and the rotation under the action of an external force) does not affect the operation of the component B can be meant.

[0147] Principle decoupling means that component A and component B are not separately arranged, component A detects a change in capacitance in the direction of axis a, component B does not move on axis a, or the amount of movement of component B on axis a can be ignored. In other words, the resonance of component B does not affect the detection of component A. Principle decoupling is to avoid or reduce the influence between two components from the perspective of the detection principle.

[0148] Differential decoupling can mean that part A and part B are symmetric, and the operation modes of part A and part B belong to differential operation. The differential operation of the symmetric structure can eliminate the influence of the common mode and help reduce the influence between component A and component B. Differential decoupling strongly depends on symmetry and has high processing requirements for inertial sensors.

[0149] Referring to the explanations of the above terms, the decoupling mode between the components of the mechanical structure layer 300 provided in the embodiments of the present application will be described below.

[0150] The mass block 311 may have a displacement component in the Y-axis direction under the action of the drive block, and the detection direction is in the Z-axis direction. Therefore, the decoupling mode of the mass block 311 and the drive block may be a principle decoupling. The mass block 312 may have a displacement component in the X-axis direction under the action of the drive block, and the detection direction is in the Z-axis direction. Therefore, the decoupling mode of the mass block 312 and the drive block may be a principle decoupling. The mass block 313 and the drive block may be regarded as being independently arranged, that is, under the action of the drive block, the mass block 313 may be regarded as hardly moving. Therefore, the decoupling mode of the mass block 313 and the drive block may be a mechanical decoupling.

[0151] The operations of the mass block 311 and the mass block 312 do not interfere with each other. Therefore, the decoupling mode of the mass block 311 and the mass block 312 may be a mechanical decoupling. The operations of the mass block 311 and the mass block 313 do not interfere with each other. Therefore, the decoupling mode of the mass block 311 and the mass block 313 may be a mechanical decoupling.

[0152] When the Y-axis angular velocity is detected by using the mass block 312, the detection direction of the mass block 312 is in the Z-axis direction, and the mass block 313 cannot move in the Z-axis direction. Therefore, from this perspective, the decoupling mode of the mass block 312 and the mass block 313 may be a mechanical decoupling. When the Z-axis angular velocity is detected by using the mass block 313, the detection direction of the mass block 313 is in the Y-axis direction, the mass block 312 may have a displacement component in the Y-axis direction, and the detection direction of the mass block 312 is in the Z-axis direction. Therefore, from this perspective, the decoupling mode of the mass block 313 and the mass block 312 may be a principle decoupling.

[0153] Table 1 shows the decoupling modes of the mechanical structure layer 300 shown in FIG. 3A.

[0154]

Table 1

[0155] The mechanical structure layer provided in the embodiment of the present application can reduce the application of the differential coupling mode, which helps to reduce the processing accuracy requirements of the inertial sensor and further helps to improve the detection accuracy of the inertial sensor. Since the inertial sensor can be coaxially driven, it reduces the number of drive blocks in the inertial sensor, improves the integration degree of the inertial sensor, and further helps to miniaturize the inertial sensor.

[0156] FIG. 7A is a perspective view showing another mechanical structure layer 300 according to an embodiment of the present application. The plan view shown in FIG. 7B can be obtained by observing the mechanical structure layer 300 in the Z - direction shown in FIG. 7A. FIG. 7C is a schematic diagram showing the operation of the rotor of the mechanical structure layer 300 shown in FIG. 7B when the mechanical structure layer 300 is not rotating. For ease of explanation, as shown in FIGS. 7A, 7B, and 7C, it is assumed that there is an XYZ coordinate system in which the X - axis, Y - axis, and Z - axis are perpendicular to each other. The mechanical structure layer 300 can be arranged parallel to the XY plane.

[0157] Similar to the embodiments shown in FIGS. 3A to 6, in the embodiments shown in FIGS. 7A to 7C, the mechanical structure layer 300 may include anchors 341, 342, 343, mass blocks 311, 312, 313, 314, 315, 316, support beams 3201, 3202, 3203, 3204, 3205, 3206, 3207, 3208, 3209, 3210, elastic connectors 3301, 3302, 3303, 3304, 3305, 3306, 3307, 3308, 3309, 3310, transmission beams 361, 362, 363, and transmission beam 364. The mass blocks 311, 312, 313, 314, 315, and 316 in the mechanical structure layer 300 form capacitors 1, 2, 3, 4, 5, and 6 respectively having detection electrodes 231, 232, 233, 234, 235, and 236 in the inertial sensor. By using capacitors 1 and 4, the angular velocity around the X-axis can be detected. By using capacitors 2 and 5, the angular velocity around the Y-axis can be detected. By using capacitors 3 and 6, the angular velocity around the Z-axis can be detected.

[0158] The mechanical structure layer 300 may further include an anchor 344 and a drive block 381. The anchor 344 may belong to the stator of the mechanical structure layer 300. The drive block 381 may belong to the rotor of the mechanical structure layer 300. The drive block 381 can move along the X-axis with respect to the anchor 344.

[0159] In one embodiment, the mechanical structure layer 300 may further include a fixed comb 39 1 and a movable comb 396. The fixed comb 39 1 may be fixed to the anchor 344. The movable comb may be fixed to the drive block 381. The fixed comb39 1 and the movable comb 396 can be arranged to intersect at intervals.

[0160] In the present application, the fixed comb may belong to the stator of the mechanical structure layer 300, and the movable comb may belong to the rotor of the mechanical structure layer 300. The fixed comb includes a plurality of fixed comb fingers, and the movable comb may include a plurality of fixed comb fingers. The comb may include a plurality of movable comb fingers. The fact that the fixed comb and the movable comb are arranged to intersect at intervals means that there is one movable comb finger between two adjacent fixed comb fingers, there is one fixed comb finger between two adjacent movable comb fingers, and the adjacent fixed comb fingers and movable comb fingers are arranged at intervals.

[0161] By supplying an alternating current to the drive block 381 and the anchor 344, the interaction force between the movable comb 396 and the fixed comb 39 1 drives the movable comb 396 to move along the X-axis with respect to the fixed comb 39 1, whereby the drive block 381 moves along the X-axis with respect to the anchor 344. The displacement of the drive block 381 in the Y-axis direction and the Z-axis direction can be small or even negligible. For example, the drive block 381 can be attached to the substrate layer or the anchor 34 4 and is limited to movement along the X-axis.

[0162] The mechanical structure layer 300 may further include an anchor 345 and a drive block 382. The anchor 345 and the anchor 344 may be symmetric with respect to the symmetric beam 371 or the symmetric beam 372. The drive block 381 and the drive block 382 may be symmetric with respect to the symmetric beam 371 or the symmetric beam 372. The drive block 382 can move along the X-axis with respect to the anchor 345. The moving direction of the drive block 382 can be opposite to the moving direction of the driving device. For the specific embodiments of the drive block 382, refer to the specific embodiments of the drive block 381. For the specific embodiments of the anchor 345, refer to the specific embodiments of the anchor 344.

[0163] The mechanical structure layer 300 may further include a symmetric beam 373. The symmetric beam 373 may be symmetric with respect to the symmetry axis x shown in FIG. 3A. The symmetric beam 373 may be connected on the side of the drive block 381 and away from the drive block 382. The symmetric beam 373 may extend in the X-axis direction. The drive block 381 may be symmetric with respect to the symmetric beam 373. The anchor 344 may be symmetric with respect to the symmetric beam 373.

[0164] The end of the symmetric beam 373 that is away from the drive block 381 may be connected to the transmission beam 361. The transmission beam 361 may extend in the Y-axis direction. Therefore, the drive block 381 may drive the transmission beam 361 by using the symmetric beam 373, whereby the transmission beam 361 has a displacement component in the X-axis direction. Both ends of the transmission beam 361 are respectively connected to the support beam 3201 and the support beam 3205. The support beam 3201 and the support beam 3205 have a displacement component in the X-axis direction under the action of the transmission beam 361.

[0165] The end of the support beam 3201 that is away from the transmission beam 361 is connected to the first end of the mass block 311 by using an operation beam and an elastic connector 3302, and the first end of the mass block 311 can be driven to have a displacement component in the Y-axis direction.

[0166] On the side of the mass block 311 and away from the mass block 314, the anchor 341 and the elastic connector 3301 are arranged close to the first end of the mass block 311. The elastic connector 3301 is connected between the first end of the mass block 311 and the anchor 341. The elastic connector 3301 may provide a buffer space for the mass block 311 in the Y-axis direction. Further, the elastic connector 3301 may further provide support for the mass block 311 in the Z direction. In other words, the rigidity of the elastic connector 3301 along the Z-axis may increase, and the rigidity of the elastic connector 3301 along the Y-axis may decrease.

[0167] In one embodiment, as shown in the local schematic diagram of FIG. 7B, the elastic connector 3301 may further provide a buffer space in the X-axis direction with respect to the mass block 311. The tensile force exerted by the displacement component of the mass block 311 in the X-axis direction on the anchor 341 can be reduced. This contributes to reducing the stress influence exerted by the displacement component of the mass block 311 in the X-axis direction on the substrate layer.

[0168] Based on the simulation results, the anchor 341 is disposed at the end of the mass block 311 and is softly connected to the mass block 311 in at least one direction (i.e., the elastic connector 3301 has elasticity in at least one direction), whereby the interference mode of the mechanical structure layer 300 can be adjusted. In this way, the effective mode of the mechanical structure layer 300 can be separated from the interference mode of the mechanical structure layer 300.

[0169] The mechanical structure layer 300 may further include an anchor 346 and an elastic connector 3311. The anchor 346 and the anchor 341 may be symmetric with respect to the symmetric beam 371. The elastic connector 3311 and the elastic connector 3301 may be symmetric with respect to the symmetric beam 371. The anchor 346 and the elastic connector 3301 are disposed on the side of the mass block 311 that is away from the mass block 314 and is close to the second end of the mass block 311. The connector 3311 is connected between the second end of the mass block 314 and the anchor 346. For the specific embodiment of the elastic connector 3311, refer to the specific embodiment of the elastic connector 3301. For the specific embodiment of the anchor 346, refer to the specific embodiment of the anchor 341.

[0170] The end of the support beam 3205 that is away from the transmission beam 361 is connected to the first end of the mass block 314 by using an operation beam and an elastic connector 3306, and the first end of the mass block 314 is driven such that the mass block 314 has a displacement component in the Y-axis direction. The displacement component of the first end of the mass block 311 may be opposite in direction to the displacement component of the first end of the mass block 314.

[0171] On the side of the mass block 314 and on the side away from the mass block 311, the anchor 343 and the elastic connector 3304 are disposed close to the first end of the mass block 314. The elastic connector 3304 is connected between the first end of the mass block 314 and the anchor 343. For the specific embodiment of the elastic connector 3304, refer to the specific embodiment of the elastic connector 3301.

[0172] The mechanical structure layer 300 may further include a symmetric beam 374. The symmetric beam 374 may be symmetric with respect to the symmetry axis x shown in FIG. 3A. The symmetric beam 374 and the symmetric beam 373 may be symmetric with respect to the symmetric beam 371 or the symmetric beam 372. The symmetric beam 374 may be connected on the side of the drive block 382 and on the side away from the drive block. For the specific embodiment of the symmetric beam 374, refer to the specific embodiment of the symmetric beam 371.

[0173] The anchor 345 may be symmetric with respect to the symmetric beam 374. The drive block 382 may be symmetric with respect to the symmetric beam 374. The end of the symmetric beam 374 and away from the drive block 382 may be connected to the transmission beam 362. Therefore, the drive block 382 may drive the transmission beam 362 by using the symmetric beam 374, whereby Transmission The beam 362 has a displacement component in the X-axis direction. The displacement component of the transmission beam 362 may be opposite in direction to the displacement component of the transmission beam 361. Both ends of the transmission beam 362 are respectively connected to the support beam 3204 and the support beam 3206. The support beam 3204 and the support beam 3206 may respectively have a displacement component in the X-axis direction under the action of the transmission beam 362. For the specific embodiment of the transmission beam 362, refer to the specific embodiment of the transmission beam 361.

[0174] At the end of the support beam 3204 that is away from the transfer beam 362, the end is connected to the second end of the mass block 311 by using the operating beam and the elastic connector 3305, and the second end of the mass block 311 can be driven to have a displacement component in the Y-axis direction.

[0175] At the end of the support beam 3206 that is away from the transfer beam 362, the end is connected to the second end of the mass block 314 by using the operating beam and the elastic connector 3307, and the second end of the mass block 314 is driven to have a displacement component in the Y-axis direction. The displacement component of the second end of the mass block 311 can be in the opposite direction to the displacement component of the second end of the mass block 314.

[0176] The mechanical structure layer 300 may further include an anchor 347 and an elastic connector 3312. The anchor 347 and the anchor 343 may be symmetric with respect to the symmetric beam 372. The elastic connector 3312 and the elastic connector 3304 may be symmetric with respect to the symmetric beam 372. The anchor 347 and the anchor 346 may be symmetric with respect to the symmetric beam 374. The elastic connector 3312 and the elastic connector 3311 may be symmetric with respect to the symmetric beam 374. The anchor 347 and the elastic connector 3312 are arranged on the side of the mass block 314 and away from the mass block 311, and are close to the second end of the mass block 314. The elastic connector 3312 is connected between the second end of the mass block and the anchor 347. For the specific embodiment of the elastic connector 3312, refer to the specific embodiment of the elastic connector 3311 or the elastic connector 3304. For the specific embodiment of the anchor 347, refer to the specific embodiment of the anchor 346 or the anchor 343.

[0177] FIG. 7C is a schematic diagram showing a structure in which the mass blocks 311 and 314 move in opposite directions along the Y axis. The dashed lines in FIG. 7C indicate the positions of the mass blocks 311 and 314 before movement, and the solid lines in FIG. 7C indicate the positions of the mass blocks 311 and 314 after movement.

[0178] The mechanical structure layer 300 may further include a plurality of support beams 3202. The plurality of support beams 3202 may be symmetric with respect to the symmetric beam 373.

[0179] The side of the drive block 381 and close to the drive block 382 may be connected to the support beam 3202. One support beam 3202 may be connected to the end of the drive block 381 and close to the drive block 382, and the other support beam 3202 may be connected to the end of the drive block 381 and close to the mass block 314. The end of one support beam 3202 and away from the drive block 381 may be connected to the end of the mass block 312 and close to the mass block 311. The end of the other support beam 3202 and away from the drive block 381 may be connected to the end of the mass block 312 and close to the mass block 314. The drive block 381 may be configured to drive the mass block 312 by using the support beam 3202, whereby the mass block 312 has a displacement component in the X-axis direction.

[0180] The mechanical structure layer 300 may further include a plurality of support beams 3207. The plurality of support beams 3207 may be symmetric with respect to the symmetric beam 374. The plurality of support beams 3202 and the plurality of support beams 3207 may be symmetric with respect to the symmetric beam 372.

[0181] On the side of the drive block 382 and close to the drive block 381, it can be connected to the support beam 3207. On the side of the support beam 3207 and away from the drive block 382, it can be connected to the mass block 315. The drive block 382 can be configured to drive the mass block 315 by using the support beam 3207, whereby the mass block 315 has a displacement component in the X-axis direction. The displacement component of the mass block 315 in the X-axis direction can be opposite in direction to the displacement component of the mass block 312 in the X-axis direction. The displacement component of the support beam 3207 in the X-axis direction can be opposite in direction to the displacement component of the support beam 3202 in the X-axis direction. For the specific embodiments of the support beam 3207, refer to the specific embodiments of the support beam 3202.

[0182] Figure 7C is a schematic diagram showing a structure in which the mass block 312 and the mass block 315 move in opposite directions along the X-axis. The dashed lines in Figure 7C indicate the positions of the mass block 312 and the mass block 315 before movement, and the solid lines in Figure 7C indicate the positions of the mass block 312 and the mass block 315 after movement.

[0183] The mechanical structure layer 300 may further include an anchor 348. The anchor 348 can be symmetric with respect to the symmetric beam 373. The fixed comb 392 is fixed to the anchor 348. The movable comb 397 is fixed to the mass block 313. The fixed comb 392 can be symmetric with respect to the symmetric beam 373. The movable comb 397 can be symmetric with respect to the symmetric beam 373. The fixed comb 392 and the movable comb 397 are arranged to intersect at intervals. Detection electrodes are arranged on the fixed comb 392. The movable comb 397 and the detection electrodes can form a capacitor. The angular velocity component of the mass block 313 around the Z-axis can be determined by detecting the variation in the capacitance value of the capacitor formed by the movable comb 397 and the detection electrodes.

[0184] The mechanical structure layer 300 may further include an anchor 349. The anchor 349 may be symmetric with respect to the symmetric beam 374. The anchor 348 and the anchor 349 may be symmetric with respect to the symmetric beam 371 or the symmetric beam 372. The mass block 316 and the detection electrode on the anchor 349 may form a capacitor. The angular velocity component of the mass block 316 about the Z-axis may be determined by detecting the variation in the capacitance value of the capacitor. For the specific embodiment of the anchor 349, refer to the specific embodiment of the anchor 348. For the specific embodiment of the mass block 316, refer to the specific embodiment of the mass block 313.

[0185] FIG. 8A is a structural diagram showing the structure of the mechanical structure layer 300 for detecting the angular velocity about the X-axis. The schematic diagram of the structure shown in FIG. 8B can be obtained by observing the mechanical structure layer 300 shown in FIG. 8A in the X+ direction. With reference to FIGS. 8A and 8B, the principle of detecting the angular velocity about the X-axis by using the mass block 311 and the mass block 314 will be described below.

[0186] As described above, when the inertial sensor has an angular velocity component for rotating about the X-axis, the mass block 311 and the mass block 314 each have a displacement component in the Z-axis direction, and the displacement components of the mass block 311 and the mass block 314 in the Z-axis direction are opposite in direction. Assume that the mass block 311 may have a displacement component in the Z+ direction and the mass block 314 may have a displacement component in the Z- direction. The mass block 311 tends to move away from the detection electrode 231, and the mass block 314 tends to approach the detection electrode 234.

[0187] Since the mass block 311 can be connected to the anchor 341 by using the elastic connector 3301, the other end of the mass block 311 can be connected to the anchor 346 by using the elastic connector 3311. The side of the mass block 311 that is close to the anchors 341 and 346 has a small displacement in the Z-axis direction, and the side of the mass block 311 that is away from the anchors 341 and 346 has a large displacement in the Z-axis direction. The mass block 311 can be inclined in a first direction with respect to the Y-axis. Similarly, the mass block 314 can be inclined in a second direction with respect to the Y-axis, and the first direction is opposite to the second direction. In other words, the mass block 311 and the mass block 314 can each have an angular velocity component for rotating around the X-axis, and the directions of the angular velocity components of the mass block 311 and the mass block 314 for rotating around the X-axis can be opposite. The elastic connectors 3301 and 3311 can provide torsional support to the mass block 311 so as to rotate around the Y-axis. The elastic connectors 3304 and 3312 can provide torsional support to the mass block 314 so as to rotate around the Y-axis.

[0188] When the mass block 311 and the mass block 314 are pulled, the transmission beam 361 tends to rotate around the symmetric beam 371. The elastic connector 3302 can be connected between the transmission beam 361 and the mass block 311. Since the rigidity of the transmission beam 361 may be greater than the rigidity of the elastic connector 3302, the elasticity of the elastic connector 3302 in the Z-axis direction can be increased to provide a buffer space in the Z-axis direction for the mass block 311. The inclination angle of the elastic connector 3302 with respect to the Y-axis can be greater than the inclination angle of the transmission beam 361 with respect to the Y-axis. In one embodiment, the inclination angle of the mass block 311 with respect to the Y-axis can be greater than the inclination angle of the transmission beam 361 with respect to the Y-axis. In other words, the rotation angle of the transmission beam 361 around the X-axis is smaller than the rotation angle of the mass block 311 around the X-axis.

[0189] The width of the elastic connector 3302 in the Y-axis direction can be smaller than the width of the mass block 311 in the Y-axis direction. The inclination angle of each of the elastic connector 3302 and the elastic connector 3306 with respect to the Y-axis can be larger than the inclination angle of the mass block 311 with respect to the Y-axis.

[0190] Similarly, the inclination angle of the elastic connector 3306 with respect to the Y-axis can be larger than the inclination angle of the transmission beam 361 with respect to the Y-axis. For the specific embodiments of the elastic connector 3306, refer to the specific embodiments of the elastic connector 3302. For the specific embodiments of the transmission beam 362 and the elastic connector connected to the transmission beam 362, refer to the specific embodiments of the transmission beam 361 and the elastic connector connected to the transmission beam 361.

[0191] FIG. 9A is a structural diagram showing the structure of the mechanical structure layer 300 for detecting the angular velocity around the Y-axis. A schematic diagram of the structure shown in FIG. 9B can be obtained by observing the mechanical structure layer 300 shown in FIG. 9A in the Y+ direction. With reference to FIGS. 9A and 9B, the principle of detecting the angular velocity around the Y-axis by using the mass blocks 312 and 315 will be described below.

[0192] As described above, when the inertial sensor has an angular velocity component for rotating around the Y-axis, the mass blocks 312 and 315 each have a displacement component in the Z-axis direction, and the displacement components of the mass blocks 312 and 315 in the Z-axis direction are opposite in direction. Assume that the mass block 312 may have a displacement component in the Z+ direction and the mass block 315 may have a displacement component in the Z- direction. The mass block 312 tends to move away from the detection electrode 232, and the mass block 315 tends to approach the detection electrode 235.

[0193] Since the mass block 312 can be connected to the drive block 381 by using the support beam 3202, the drive block 381 cannot move in the Z-axis direction. The side of the mass block 312 that is close to the drive block 381 has a small displacement in the Z-axis direction, and the side of the mass block 312 that is away from the drive block 381 also has a small displacement in the Z-axis direction. The mass block 312 can be inclined in a first direction with respect to the X-axis. Similarly, the mass block 315 can be inclined in a second direction with respect to the X-axis, and the first direction is opposite to the second direction. In other words, the mass block 312 and the mass block 315 can each have an angular velocity component for rotating around the Y-axis. The directions of the angular velocity components of the mass block 312 and the mass block 315 for rotating around the Y-axis can be opposite.

[0194] The elastic connector 3303 can be connected between the transmission beam 363 and the mass block 312. The elastic connector 3303 extends outward and retracts in the Z-axis direction to reduce the displacement component of the transmission beam 363 in the Z-axis direction, provides a buffer space in the Z-axis direction for the mass block 312, and a torsional rigidity for rotating around the Y-axis, and can reduce the influence exerted by the mass block 312 and the mass block 315 on the transmission beam 363. The transmission beam 363 can further absorb a part of the torque for rotating around the Y-axis to reduce the displacement of the mass block 313 and the mass block 316 along the Z-axis. The rigidity of the transmission beam 363 can be greater than the rigidity of the elastic connector 3303, and the inclination angle of the elastic connector 3303 with respect to the X-axis can be greater than the inclination angle of the transmission beam 363 with respect to the X-axis. In one embodiment, the inclination angle of the mass block 312 with respect to the X-axis can be greater than the inclination angle of the transmission beam 363 with respect to the X-axis. In other words, the rotation angle of the transmission beam 363 around the Y-axis is smaller than the rotation angle of the mass block 312 around the Y-axis.

[0195] The width of the elastic connector 3303 in the X-axis direction can be smaller than the width of the mass block 312 in the X-axis direction. The inclination angle of the elastic connector 3303 with respect to the X-axis can be larger than the inclination angle of the mass block 312 with respect to the X-axis.

[0196] Similarly, the inclination angle of the elastic connector 3309 with respect to the X-axis can be larger than the inclination angle of the transmission beam 363 with respect to the X-axis. For the specific embodiments of the elastic connector 3309, refer to the specific embodiments of the elastic connector 3303. For the specific embodiments of the transmission beam 364 and the elastic connector connected to the transmission beam 364, refer to the specific embodiments of the transmission beam 363 and the elastic connector connected to the transmission beam 363.

[0197] FIG. 10A is a structural diagram showing the structure of the mechanical structure layer 300 for detecting the angular velocity around the Y-axis. The schematic diagram of the structure shown in FIG. 10B can be obtained by observing the mechanical structure layer 300 shown in FIG. 10A in the Y+ direction. With reference to FIGS. 10A and 10B, the principle of detecting the angular velocity around the Z-axis by using the mass blocks 313 and 316 will be described below.

[0198] As described above, when the inertial sensor has an angular velocity component for rotating around the Z-axis, the mass blocks 312 and 315 each have a displacement component in the Y-axis direction, and the directions of the displacement components of the mass blocks 312 and 315 in the Y-axis direction are reversed so as to drive the mass blocks 313 and 316 to have displacement components in the Y-axis direction, and the displacement components of the mass blocks 313 and 316 in the Y-axis direction are reversed. Assume that the mass block 313 may have a displacement component in the Y+ direction and the mass block 316 may have a displacement component in the Y- direction. The mass block 313 tends to move away from the detection electrode, and the mass block 316 tends to approach the detection electrode.

[0199] Since the mass block 312 is connected to the drive block 381 by using the support beam 3202, the drive block 381 cannot move in the Y-axis direction. The side of the mass block 312 that is close to the drive block 381 has a small displacement in the Y-axis direction, and the side of the mass block 312 that is away from the drive block 381 has a large displacement in the Y-axis direction. The mass block 312 can be inclined in a first direction with respect to the X-axis. Similarly, the mass block 315 can be inclined in a second direction with respect to the X-axis, and the first direction is opposite to the second direction. In other words, the mass block 312 and the mass block 315 can each have an angular velocity component for rotating around the Z-axis, and the directions of the angular velocity components of the mass block 312 and the mass block 315 for rotating around the Z-axis can be opposite. The transmission beam 363 can provide a torsional support for rotating around the Z-axis with respect to the mass block 313 and the mass block 316.

[0200] The mass block 312 can extend from one end of the mass block 313 to the other end of the mass block 313. The elastic connector 3303 can be connected between one end of the mass block 312 and one end of the mass block 313. The connector 3308 can be connected between the other end of the mass block 312 and the other end of the mass block 313.

[0201] The elastic connectors 3303 and 3308 can extend outward and be pulled back in the Y-axis direction, and the elastic forces of the elastic connectors 3303 and 3308 can cancel each other out. As a result, the mass block 313 can have a displacement component along the Y-axis direction that faces the first direction to follow the mass block 312. The elastic connectors 3303 and 3308 can have elasticity in the Y-axis direction so as to reduce the displacement component of the mass block 313 in the Y-axis direction and provide a buffer space in the Y-axis direction with respect to the mass block 312. The displacement component of the mass block 312 along the Y-axis can be larger than the displacement component of the mass block 313 along the Y-axis. Similarly, the displacement component of the mass block 315 along the Y-axis can be larger than the displacement component of the mass block 316 along the Y-axis.

[0202] In one embodiment, the width of the support beam 3203 in the X-axis direction can be smaller than the width of the mass block 312 in the X-axis direction. The inclination angle of the support beam 3202 with respect to the X-axis can be larger than the inclination angle of the mass block 312 with respect to the X-axis.

[0203] In another embodiment, the width of the support beam 3202 in the X-axis direction can be less than half of the width of the transmission beam 363 in the X-axis direction. The inclination angle of the support beam 3202 with respect to the X-axis can be larger than the inclination angle of the transmission beam 363 with respect to the X-axis.

[0204] For a specific embodiment of another support beam arranged symmetrically with the support beam 3202, refer to the specific embodiment of the support beam 3202.

[0205] In an embodiment of the present application, the natural vibration frequency modal of the inertial sensor is adjusted by, for example, using a rigid design or a decoupling mode design, whereby the effective modal of the inertial sensor can be made as far as possible away from the interference modal of the inertial sensor. This improves the filtering effect of the inertial sensor and reduces the noise level of the inertial sensor. Furthermore, by adjusting the detection frequency and the drive frequency of the inertial sensor, the sensitivity of the inertial sensor is improved.

[0206] The above description is merely a specific implementation of the present application and is not intended to limit the protection scope of the present application. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present application shall be included within the protection scope of the present application. Therefore, the protection scope of the present application shall follow the protection scope of the claims.

Claims

Claim 1 An inertial sensor, comprising: A first mass block and a first detection electrode, wherein the first mass block is movable relative to the first detection electrode, the first mass block and the first detection electrode are arranged in a first direction to form a first capacitor, and the first capacitor is configured to detect an angular velocity around a second direction; the first mass block and the first detection electrode; A second mass block and a second detection electrode, wherein the second mass block is movable relative to the second detection electrode, the second mass block and the second detection electrode are arranged in the second direction to form a second capacitor, and the second capacitor is configured to detect an angular velocity around the first direction; the second mass block and the second detection electrode; A first connector connected between a first end of the first mass block and a first end of the second mass block; the first connector and the first mass block is driven to have a displacement component in a third direction, and the first direction, the second direction, and the third direction are orthogonal to each other; when the first mass block has an angular velocity component around the first direction, the first mass block has a displacement component in the second direction, and the first mass block is configured to pull the second mass block and move it in the second direction by using the first connector, and the displacement component of the second mass block in the second direction corresponds to a change in the capacitance value of the second capacitor; when the first mass block has an angular velocity component around the second direction, the first mass block has a displacement component in the first direction, and the displacement component of the first mass block in the first direction corresponds to a change in the capacitance value of the first capacitor. The first connector includes a first elastic connector, and the first elastic connector is configured to provide a buffer space for the first mass block in the first direction and the third direction. Thereby, the displacement component of the first end portion of the second mass block in the first direction is smaller than the displacement component of the first end portion of the first mass block in the first direction, and the displacement component of the first end portion of the second mass block in the third direction is smaller than the displacement component of the first end portion of the first mass block in the third direction. Inertial sensor. **Claim 2** The first connector is a first support beam, and the first support beam is connected between the first elastic connector and the second mass block. The inertial sensor according to claim 1, further comprising the first support beam. **Claim 3** The first connector is a first transmission beam, the first transmission beam extends in the third direction, one end portion of the first transmission beam is connected between the first elastic connector and the second mass block, and when the first mass block has an angular velocity component around the first direction, the first transmission beam rotates around the first direction. The inertial sensor according to claim 2, further comprising the first transmission beam. **Claim 4** When the first mass block has an angular velocity component around the second direction, the rotation angle of the first transmission beam around the second direction is smaller than the rotation angle of the first mass block around the second direction. The inertial sensor according to claim 3. **Claim 5** The first mass block extends from the first end portion of the second mass block to the second end portion of the second mass block, and the inertial sensor is a second connector, the second connector is connected between the second end portion of the first mass block and the second end portion of the second mass block, and the second connector and the first connector are symmetric with respect to the second mass block. The inertial sensor according to claim 1, further comprising the second connector. **Claim 6** The inertial sensor is A drive electrode and a drive block, wherein a capacitor formed by the drive electrode and the drive block is configured to drive the drive block to move back and forth in the third direction relative to the drive electrode, the drive electrode and the drive block; A second support beam, wherein the second support beam is connected between the drive block and the first mass block, and the drive block is configured to drive the first mass block by using the second support beam, whereby the first mass block has the displacement component in the third direction, the second support beam; The inertial sensor according to any one of claims 1 to 4, further comprising.

7. The inertial sensor is A third mass block and a third detection electrode, wherein the third mass block is movable relative to the third detection electrode, the third mass block and the third detection electrode are arranged in the first direction to form a third capacitor, and the third capacitor is configured to detect an angular velocity around the third direction, the third mass block and the third detection electrode; A third connector, which is connected between a second end of the first mass block and a first end of the third mass block, the third connector; further comprising the third mass block is driven to have a displacement component in the second direction; When the third mass block has an angular velocity component around the third direction, the third mass block has a displacement component in the first direction, and the third mass block is configured to pull the first mass block by using the third connector and move it in the first direction, and the displacement component of the third mass block in the first direction corresponds to a change in the capacitance value of the third capacitor; The inertial sensor according to any one of claims 1 to 4.

8. The first mass block is driven by a drive block, the drive block is configured to move back and forth in the third direction, an operation beam is connected between the third mass block and the drive block, and an end of the operation beam close to the drive block is configured to move back and forth in the third direction, and an end of the operation beam close to the third mass block is configured to move back and forth in the second direction. Thereby, the third mass block has the displacement component in the second direction. The inertial sensor according to claim 7.

9. The inertial sensor is a second elastic connector, the second elastic connector is connected between the drive block and the first mass block, and is configured to provide a buffer space in the first direction with respect to the third mass block. The second elastic connector further comprises the inertial sensor according to claim 7.

10. The inertial sensor is a second transmission beam, the second transmission beam is connected between the second elastic connector and the drive block, the second transmission beam is rotatable around the third direction, and when the third mass block rotates around the third direction, the rotation angle of the second transmission beam around the third direction is smaller than the rotation angle of the third mass block around the third direction. The second transmission beam further comprises the inertial sensor according to claim 9.

11. The inertial sensor is a third elastic connector, the third elastic connector is connected to the third mass block, the third elastic connector is configured to provide a supporting force in the first direction with respect to the third mass block, and is further configured to provide a buffer space in the second direction with respect to the third mass block. The third elastic connector further comprises the inertial sensor according to claim 7.

12. The third elastic connector is located on a side of the third mass block away from the second mass block. The inertial sensor according to claim 11.

13. The inertial sensor includes a mechanical structure layer, a coating layer, and a substrate layer. The mechanical structure layer is located between the coating layer and the substrate layer. The first mass block and the second mass block are disposed on the mechanical structure layer. The first detection electrode is disposed on the substrate layer. The second detection electrode is disposed on the substrate layer or the mechanical structure layer. The inertial sensor according to claim 7.

14. The inertial sensor is symmetric with respect to the second direction, and the inertial sensor is symmetric with respect to the third direction. The inertial sensor according to any one of claims 1 to 4.

15. An electronic device comprising the inertial sensor according to any one of claims 1 to 14.

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