Measuring Equipment

Abstract

To provide a measurement device that can more accurately measure flatness even when an object to be measured has a relatively thin shape.SOLUTION: A measurement device 20 for measuring a disc 10 includes an A surface measurement section that measures a surface of the disc 10 and a first conveyance section 24 that conveys the disc 10, the A surface measurement section has a measurement reference surface 61a that is inclined at an inclination angle θ from a vertical direction, the first conveyance section 24 has a holding section 81 that holds the disc 10 so that the disc 10 is parallel to the measurement reference surface 61a, and the holding section 81 holds the disc 10 and moves it in the vertical direction while keeping the disc 10 in a posture of being inclined at the inclination angle θ and mounts and removes the disc 10 to and from the A surface measurement section 23.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a measuring device for measuring a plate-shaped object to be measured. [Background technology]

[0002] 13(a) and 13(b), one such type of measuring device has been disclosed that includes a base block 1, a measurement stage 2 that is provided on the base block 1 and horizontally holds a measurement object D such as a circular disk, and a sensor 3 (see Patent Document 1). This measuring device is configured to measure the flatness of the surface of the measurement object D by moving the sensor in a non-contact manner parallel to the surface of the measurement object D held on the measurement stage 2. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 11-183115 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the measuring device described in Patent Document 1, since the object D is held horizontally on the measurement table 2, gravity acts in a direction that deflects the object D. That is, the weight of the object D causes the object D to deflect. When the object D is relatively thick and the deflection due to its own weight is small, the measurement can be performed satisfactorily. However, when the object D is relatively thin, the deflection due to its own weight is large and the object D is deformed, resulting in a problem that the flatness cannot be measured accurately.

[0005] The present invention has been made to solve such problems, and has an object to provide a measuring device that can measure flatness more accurately even if the object to be measured has a relatively thin shape. [Means for solving the problem]

[0006] (1) A measuring device according to the present invention is a measuring device for measuring an object to be measured, comprising a measuring means for measuring the shape of at least one of the front and back surfaces of the object to be measured, and a transporting means for transporting the object to be measured, wherein the measuring means has a measurement reference surface inclined at a predetermined angle from the vertical direction, the transporting means has a holding section for holding the object to be measured so that the object to be measured is parallel to the measurement reference surface, and the holding section is adapted to attach and detach the object to and from the measuring means while maintaining the object to be measured in an orientation inclined at the predetermined angle.

[0007] (2) The measuring device of the present invention is the measuring device described in (1), characterized in that the conveying means has an attachment holding portion for attaching the object to be measured to the measuring means and a removal holding portion for removing the object to be measured from the measuring means.

[0008] (3) The measuring device of the present invention is the measuring device described in (1) or (2), characterized in that when the conveying means conveys the object to be measured opposite the measuring means, the object to be measured is conveyed parallel to the measurement reference surface.

[0009] (4) The measuring device according to the present invention is the measuring device according to (1), characterized in that the measuring means has a first measuring means and a second measuring means arranged opposite to each other.

[0010] (5) The measuring device of the present invention is the measuring device described in (4), characterized in that the conveying means has a first conveying means which conveys the object to be measured opposite the first measuring means, and a second conveying means which conveys the object to be measured opposite the second measuring means, and the conveying direction of the first conveying means and the conveying direction of the second conveying means are opposite to each other.

[0011] (6) The measuring device of the present invention is a measuring device as described in any one of (1) to (5), characterized in that it has a transfer unit that converts between a vertical posture in which the object to be measured is positioned along the vertical direction and an inclined posture in which the object to be measured is positioned at a predetermined angle from the vertical direction.

[0012] (7) The measuring device of the present invention is the measuring device described in (1), characterized in that it has a driving means for driving the conveying means, and the driving means is arranged vertically lower than the measuring means.

[0013] (8) The measuring device of the present invention is the measuring device described in (1), characterized in that the conveying means is configured to be able to move back and forth in a horizontal direction and a direction perpendicular to the measurement reference surface, and the object to be measured is conveyed by the conveying means from the entrance side to the exit side of the measuring device while maintaining the orientation of its main surface toward the measurement reference surface.

[0014] (9) The measuring device of the present invention is the measuring device described in (1), characterized in that the object to be measured has a through hole penetrating in the plate thickness direction, and the holding portion holds the inner wall portion of the through hole.

[0015] (10) The measuring device of the present invention is the measuring device described in (1), characterized in that the measurement reference surface has a support body that supports the object to be measured and a vibration rest that abuts the object to be measured supported by the support body.

[0016] The measuring device according to the present invention described in (1) above includes a measuring means for measuring the shape of at least one of the front and back surfaces of an object to be measured, and a transporting means for transporting the object to be measured, the measuring means having a measurement reference surface tilted at a predetermined angle from the vertical direction, and the transporting means having a holding section for holding the object to be measured so that the object is parallel to the measurement reference surface. The holding section also mounts and removes the object to and from the measuring means while maintaining the object in a position tilted at the predetermined angle.

[0017] This configuration effectively prevents the problem of the conventional measuring device, that is, the deflection of the object to be measured caused by the object being held horizontally on the measurement table, and solves the problem of the decrease in the accuracy of the flatness measurement when the object to be measured is thin. With this configuration, the object to be measured is held in a position tilted at a predetermined angle to measure the shape of at least one of its front and back surfaces, so that the deflection of the object to be measured caused by its own weight is prevented, and the shape can be measured more accurately.

[0018] The holding section is configured to mount and remove the object to be measured from the measuring means while maintaining the inclined posture of the object at a predetermined angle. With this configuration, the inclined posture can be maintained with high precision, and the object to be measured can be smoothly mounted and removed from the measuring means. Furthermore, the influence of deflection due to the object's own weight can be suppressed, and the posture of the object to be measured when placed on the measuring device can be stabilized.

[0019] According to the measuring device of the present invention described in (2) above, the object to be measured is attached to the measuring means by the attachment transport section and is detached from the measuring means by the detachment transport section. With this configuration, the object to be measured is quickly transported, and the object to be measured can be smoothly attached to and detached from the measuring means, making it possible to transport the object to be measured efficiently.

[0020] According to the measuring device of the present invention described in (3) above, when the conveying means conveys the objects to be measured facing the measuring means, the objects are conveyed parallel to the measurement reference surface. With this configuration, no unnecessary stress is generated in the objects to be measured, and many objects to be measured can be conveyed efficiently and quickly measured.

[0021] According to the measuring device of the present invention described in (4) above, the measuring means has the first measuring means and the second measuring means arranged opposite each other, so that the arrangement space for the components of the measuring device is reduced, and the measuring device can be made compact.

[0022] According to the measuring device of the present invention described in (5) above, the conveying means has a first conveying means which conveys the object to be measured facing the first measuring means, and a second conveying means which conveys the object to be measured facing the second measuring means, and the conveying directions of the first conveying means and the second conveying means are opposite to each other. With this configuration, the arrangement space of the first conveying means and the first measuring means, and the arrangement space of the second conveying means and the second measuring means are reduced, thereby making the measuring device more compact.

[0023] According to the measuring device of the present invention described in (6) above, the measuring device has a transfer section that converts the vertical posture between a vertical posture in which the object to be measured is positioned along the vertical direction and an inclined posture in which the object to be measured is positioned at a predetermined angle from the vertical direction. With this configuration, the object to be measured that has been transported in a vertical posture is smoothly converted to an inclined posture in the transfer section, and the object to be measured that has been transported in an inclined posture is smoothly converted to a vertical posture in the transfer section. eye, This eliminates the need for a process of converting the object to an inclined posture in the transport section, suppresses the generation of unnecessary stress on the object during transport, and stabilizes the posture of the object when placed on the measuring device.

[0024] The measuring device according to the present invention described in (7) above has a driving means for driving the conveying means, and the driving means is disposed vertically below the measuring means. With this configuration, fine dust generated by the driving means is less likely to adhere to the components of the measuring means, such as the substrate, reducing the risk of contamination of the components, such as the substrate.

[0025] According to the measuring device of the present invention described in (8) above, the transport means is configured to be capable of reciprocating in the horizontal direction and in the direction perpendicular to the measurement reference surface, so that the objects to be measured are transported efficiently and quickly. Also, the objects to be measured are transported by the transport means from the entrance to the exit of the measuring device while maintaining the orientation of their main surfaces toward the measurement reference surface, so that a large number of objects to be measured are measured and transported quickly and without waste.

[0026] According to the measuring device of the present invention described in (9) above, the object to be measured has a through hole penetrating in the plate thickness direction, and the holding portion holds the inner wall portion of the through hole. Therefore, the object to be measured is held stably without generating unnecessary stress on the inclined object to be measured.

[0027] According to the measuring device of the present invention described in (10) above, the measurement reference surface has a support body for supporting the object to be measured and a vibration rest, so that the vibration of the object to be measured is suppressed, the posture of the object to be measured is maintained, and the measurement accuracy of the flatness can be improved by stabilizing it. Effect of the Invention

[0028] According to the present invention, it is possible to provide a measuring device that can more accurately measure the flatness of an object to be measured even if the object has a relatively thin shape. [Brief description of the drawings]

[0029] [Figure 1] 1A and 1B are views of a disk measured by the measuring device according to the first to third embodiments of the present invention, in which FIG. 1A shows a perspective view of the disk, and FIG. 1B shows a cross-sectional view of the disk. [Diagram 2] 1A to 1C are process diagrams showing the manufacturing process of the disk according to the first to third embodiments of the present invention. [Diagram 3] FIG. 1 is a schematic diagram showing a configuration of a measurement device according to a first embodiment of the present invention. [Figure 4] FIG. 1 is a schematic diagram showing a front view of a measurement device according to a first embodiment of the present invention. [Diagram 5] 5A and 5B are schematic diagrams of a measurement device according to a first embodiment of the present invention, where FIG. 5A shows an enlarged front view of the measurement device, and FIG. 5B shows an enlarged side view of the measurement device. [Figure 6]6(a) is a schematic diagram of a measuring device for a first embodiment of the present invention, where Figure 6(a) shows the disk holding part of the robot transport part and the front of the disk, Figure 6(b) shows the disk holding part of the robot transport part and the side of the disk, Figure 6(c) shows a support provided on the measurement reference surface side of the A-side measurement part, a disk vibration rest and the front of the disk, Figure 6(d) shows a support provided on the measurement reference surface side of the A-side measurement part and the side of the disk, Figure 6(e) shows the holding part of the mounting transport mechanism or the removal transport mechanism and the front of the disk, and Figure 6(f) shows the holding part of the mounting transport mechanism or the removal transport mechanism and the side of the disk. [Figure 7] 7 is a schematic diagram showing the operation of the measuring device of the first embodiment of the present invention, in which FIG. 7(1) shows a state in which the holding part is waiting in a position away from the disk, FIG. 7(2) shows a state in which the holding part is approaching the disk, FIG. 7(3) shows a state in which the holding part is rising, and FIG. 7(4) shows a state in which the disk is being held by the holding part. [Figure 8] 8A and 8B are schematic diagrams showing the operation of the measuring device according to the first embodiment of the present invention, in which FIG. 8(a) shows the disk holding section of the robot transport section handing over the disk to the entry-side transfer section, FIG. 8(b) shows the entry-side transfer section handing over the disk to the attachment transport mechanism of the first transport section, and FIG. 8(c) shows the attachment transport mechanism attaching the disk to the disk holding section of the A-side measurement section. [Figure 9] 9A and 9B are schematic diagrams showing the operation of the measuring device according to the first embodiment of the present invention, in which FIG. 9(a) shows a state in which the attachment transport mechanism of the first transport unit is separated from the A-side measurement unit, and FIG. 9(b) shows a state in which the attachment transport mechanism of the first transport unit is close to the A-side measurement unit and has attached the disc to the disc holding unit of the A-side measurement unit. [Figure 10] 10A and 10B are schematic diagrams showing the operation of a measuring device according to a first embodiment of the present invention, in which FIG. 10(a) shows the state in which the sensor of the A-side measuring section moves toward the entrance transfer section to measure the A-side of the disk, FIG. 10(b) shows the state in which the removal transport mechanism of the first transport section delivers the disk to the exit transfer section, and FIG. 10(c) shows the state in which the exit transfer section delivers the disk to the disk holding section of the third transport section. [Figure 11]FIG. 5 is a schematic diagram showing the configuration of a measurement device according to a second embodiment of the present invention. [Figure 12] FIG. 5 is a schematic diagram showing the configuration of a measurement device according to a third embodiment of the present invention. [Figure 13] 13A and 13B are diagrams of a conventional measuring device, in which FIG. 13A shows a perspective view of the measuring device and FIG. 13B shows a plan view of the measuring device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0030] Measurement devices 20, 20A, and 20B according to a first embodiment, a second embodiment, and a third embodiment to which the measurement device according to the present invention is applied will be described with reference to the drawings.

[0031] First, a disk 10 as a measurement object measured by the measuring devices 20, 20A, and 20B according to the first, second, and third embodiments will be described. As shown in Fig. 1(a) and Fig. 1(b), the disk 10 has a disk shape with a thickness th, an outer diameter D, and an inner diameter d of a central through hole h. Note that the disk 10 is not limited to a disk, and may have other shapes other than a disk, such as a square or elliptical shape. In the present embodiment, the second embodiment, and the third embodiment, the disk 10 is a disk for a hard disk, but may be a disk for other uses.

[0032] The disk 10 has a thickness th of about 0.3 mm to 2 mm, an outer diameter D of about 30 mm to 270 mm, and an inner diameter d of about 10 mm to 70 mm. Specifically, the disk has a thickness th of 1.75 mm, 1.6 mm, 1.27 mm, 1.0 mm, 0.8 mm, 0.635 mm, 0.6 mm, 0.5 mm, 0.38 mm, or 0.3 mm, an outer diameter D of 3.5 inches, 2.8 inches, or 2.5 inches, and an inner diameter d of 20 mm or 25 mm.

[0033] The disk 10 is made of an aluminum base material made of aluminum or aluminum alloy plate material. The disk 10 has smoothness and surface hardness, and also has rigidity and impact resistance that can suppress the generation of vibrations due to high-speed rotation. In addition, the disk 10 has rigidity that can self-maintain its posture when supported vertically by a support member inserted into the through hole h, for example. In order to have these characteristics, the disk 10 is made of a hard material, and may be a glass substrate made of a glass plate material.

[0034] Next, an example of a manufacturing process for the disk 10 will be briefly described with reference to FIG. First, an aluminum blank as a base material is turned on a lathe including chamfering (step S1) to form a disk, and the formed disk is then annealed (step S2).

[0035] Next, the first grinding stage (step S3) and the second grinding stage (step S4) are performed on the disk, the front and back surfaces of the disk are ground, and the disk is annealed (step S5). After annealing, the front and back surfaces of the disk are pretreated and electroless nickel-phosphorus plating (NiP) is performed, a nickel-phosphorus plating film is formed on the disk (step S6), and the disk is annealed (step S7).

[0036] Next, the first polishing step (step S8) and the second polishing step (step S9) are performed on the disk using a polishing pad, and the front and back surfaces of the disk are precisely polished. After the finish polishing, the disk is finally cleaned, and after cleaning, the disk is dried, completing the disk 10 (step S10). As the final cleaning, for example, ultrasonic precision cleaning using detergent can be used.

[0037] After the final cleaning, the flatness of all of the disks 10 is measured by the measuring device 20 according to the first embodiment. The flatness is a ratio representing the degree of flatness of the front and back surfaces of the disk 10, and may be, for example, the same degree as the flatness defined in the JIS standard (JIS B 0621-1984).

[0038] After measuring the flatness of all the disks 10, a surface inspection machine inspects the surfaces of the disks 10 (step S11). Disks 10 that are determined to be defective in the surface inspection (step S11) are processed as defective products, and disks 10 that are determined to be non-defective are vacuum packed (step S12), packed in cardboard boxes (step S13), and shipped to a specified destination.

[0039] On the other hand, depending on the specifications of the disk 10, a shipping inspection is performed on the disks 10 that are determined to be non-defective in the surface inspection (step S14). Disks 10 that are determined to be defective in the shipping inspection are processed as defective products, and disks 10 that are determined to be non-defective are shipped to a predetermined destination in a predetermined packaging form.

[0040] Next, the measuring device 20 according to this embodiment will be described with reference to the drawings. As shown in Figures 3, 4, 5(a) and 5(b), the measuring device 20 has a first robot transport section 21, a first delivery section 22, an A-side measuring section 23, a first transport section 24, and a first drive section 25.

[0041] The measuring device 20 also has a third transport section 36, a second delivery section 32, a second transport section 34, a second drive section 35, a B-side measurement section 33, a second robot transport section 31, and a control section (not shown) that controls the operation of each component.

[0042] The measuring device 20 carries in the disk 10 from a predetermined location by the first robot transport unit 21, and measures the shape of the front surface of the disk 10, i.e., the flatness of the A side, at the A side measurement unit 23. The disk 10 is then transported from the A side measurement unit 23 to the B side measurement unit 33, and the B side measurement unit 33 measures the shape of the rear surface of the disk 10, i.e., the flatness of the B side. The measuring device 20 is configured to carry out the measured disk 10 to a predetermined location by the second robot transport unit 31. The measuring device 20 is capable of carrying out the processes from carrying in the disk 10 from a predetermined location, measuring the flatness of the A side and the B side, and carrying out the disk 10 to the predetermined location in a fully automated manner.

[0043] The first transport unit 24 and the second transport unit 34 of the measuring device 20 according to this embodiment correspond to the first transport means and the second transport means constituting the transport means of the transport device according to the present invention. The first delivery unit 22 and the second delivery unit 32 correspond to the delivery unit of the transport device according to the present invention, the A-side measurement unit 23 and the B-side measurement unit 33 correspond to the first measurement means and the second measurement means constituting the measurement means of the transport device according to the present invention, and the first drive unit 25 and the second drive unit 35 correspond to the drive means of the transport device according to the present invention.

[0044] 4, first robot transfer unit 21 has arms 41 and 42 and a disk holding unit 43. First robot transfer unit 21 is configured to transfer disk 10 from a predetermined location and deliver it to inlet delivery unit 51.

[0045] The first robot transport unit 21 is composed of a small multi-joint robot. The multi-joint robot may be, for example, a vertical multi-joint robot that can assume various postures and operate in a wide range in the direction of gravity, or a horizontal multi-joint robot whose arm operates in the horizontal direction.

[0046] As shown in Figures 6(a) and 6(b), the disk holding unit 43 of the first robot transfer unit 21 has an upper disk receiver 43a and a grooved hook 43b, and is configured to hold the disk 10 vertically, i.e., vertically. The grooved hook 43b of the disk holding unit 43 moves up and down to grip the disk 10 between the upper disk receiver 43a and the grooved hook 43b.

[0047] 3, first delivery section 22 has an entry-side delivery section 51 and an exit-side delivery section 52. Entrance-side delivery section 51 is disposed on the entry side of first drive section 25, and is configured to receive disk 10 from disk holding section 43 of first robot transport section 21, move along the X direction, and deliver disk 10 to attachment transport mechanism 71 of first transport section 24.

[0048] When receiving and holding the disk 10 from the disk holding unit 43, the entry-side delivery unit 51 has a configuration in which the entry-side delivery unit 51 converts the vertical posture of the disk 10 held vertically by the disk holding unit 43 into an inclined posture inclined at an inclination angle θ from the vertical direction and holds the disk 10 as shown in Fig. 5(b) and Fig. 6(c) to Fig. 6(f). That is, when the entry-side delivery unit 51 receives the disk 10 held in a vertical posture by the disk holding unit 43, the entry-side delivery unit 51 holds the disk 10 in an inclined posture inclined from the vertical posture at an inclination angle θ. The inclination angle θ according to this embodiment corresponds to a predetermined angle according to the measuring device of the present invention, and the inclination angle θ is set to, for example, a range larger than 0° and smaller than 15°, and preferably an angle of about 5° to 10°.

[0049] The exit-side delivery unit 52 is disposed on the exit side of the first driving unit 25, receives the disk 10 from the first transport unit 24, and moves it in the X direction while maintaining the inclined attitude at the inclination angle θ. Then, the exit-side delivery unit 52 converts the attitude of the disk 10 inclined at the inclination angle θ to a vertical attitude, and then delivers the disk 10 to the third transport unit 36.

[0050] The inlet-side delivery section 51 and the outlet-side delivery section 52 have a function of converting the attitude of the disk 10 between a vertical attitude and an inclined attitude, separate from the transport mechanism described below. Therefore, it is possible to prevent unnecessary stress from being generated in the disk 10 when the disk 10 is transported by the transport mechanism, to stabilize the attitude, including the angle, of the disk 10 when it is placed on the measuring device 20, and to improve the measurement accuracy of the flatness.

[0051] For example, in the case of a thin disk having such rigidity that it can stand on its own in a vertical position but bends under its own weight in a horizontal position, when the position of the disk is changed from a vertical position to an inclined position, stress acts on the disk 10, and the position of the disk 10 may become unstable. In contrast, in this embodiment, the position of the disk 10 is changed in advance in the inlet-side delivery section 51 and the outlet-side delivery section 52, and the disk is delivered to the A-side measurement section 23 and the B-side measurement section 33 in the same position. Therefore, the influence of bending due to its own weight is suppressed, and the position of the object to be measured when attached to the A-side measurement section 23 and the B-side measurement section 33 is stabilized, allowing more accurate measurement to be performed.

[0052] In addition, in this embodiment, the entrance-side delivery section 51 and the exit-side delivery section 52 are configured to move in the X direction, but the entrance-side delivery section 51 and the exit-side delivery section 52 may be configured not to move in the X direction, but only to have the function of converting the attitude of the disk 10 between a vertical attitude and an inclined attitude. By transferring the disk 10 in the X direction by the drive section of the delivery section, the work efficiency of the transport operation can be improved, especially when the distance from the first robot transport section 21 and the second robot transport section 31 to the transport mechanism is long.

[0053] 5(a) and 5(b), the A-side measuring unit 23 has a measuring unit main body 61, a support 62, a sensor 63, a vibration prevention member 64, and a sensor moving mechanism (not shown). The A-side measuring unit 23 is configured to hold the disk 10 on a measurement reference surface 61a of the measuring unit main body 61, and to measure the flatness of the A-side, which is the surface of the disk 10, by moving the sensor 63, which is disposed opposite the measurement reference surface 61a, along the measurement reference surface 61a.

[0054] The measurement unit main body 61 is provided with a sensor moving mechanism that supports the sensor 63 and moves it along the measurement reference surface 61a. The measurement reference surface 61a is a surface that serves as a reference when the A-side measurement unit 23 measures the flatness of the surface of the disk 10, and the flatness of the measurement reference surface 61a has a value that is infinitely close to zero. The disk 10 is supported by the support 62 so that the B side faces the measurement reference surface 61a and the A side is exposed.

[0055] The support 62 is inserted into the through hole h of the disk 10 to hook the disk 10 and support it in a suspended state facing the measurement reference surface 61a, and is configured by a pair of hooks in this embodiment. As shown in Figures 6(c) and 6(d), the support 62 has a chamfered portion formed at the upper corner in the vertical direction, and the chamfered portion abuts against the inner wall portion of the through hole h of the disk 10 (a part of the through hole excluding the main surface of the disk). In other words, the disk 10 is hung on the chamfered portion of the support 62.

[0056] The vibration stopper 64 is provided on the measurement reference surface 61a to stop the vibration of the disk 10 and support the disk 10 at a preset inclination angle θ when the disk 10 is supported on the measurement reference surface 61a by the support 62. As shown in Fig. 6(c) and Fig. 6(d), the vibration stopper 64 has a chamfered portion formed at the upper corner in the vertical direction, and the chamfered portion abuts against the outer wall of the disk (a part of the outer peripheral end face excluding the main surface of the disk). As shown in Fig. 6(c), the vibration stopper 64 is provided in a pair so as to contact the left and right of the lower part of the disk. The vibration stopper 64 can maintain and stabilize the attitude of the disk 10 when the disk 10 is supported by the support 62, and has the function of increasing the accuracy of the measurement of the flatness by the sensor 63. The interval between the pair of vibration stoppers 64 is set to an interval that allows the lower disk receiver 81b of the holding portion 80 of each of the attachment transport mechanism 71 and the removal transport mechanism 72 described later to pass between the pair of vibration stoppers 64 in the vertical direction.

[0057] The sensor 63 is configured by a known sensor capable of measuring the flatness of side A of the disk 10. The sensor 63 is moved parallel to the measurement reference surface 61a of the measurement unit main body 61 by a sensor moving mechanism, and at that time, measures the flatness of side A of the disk 10 that is hung on the support 62 and held on the measurement reference surface 61a.

[0058] Examples of sensors include a laser displacement sensor that can measure flatness with high precision by detecting the amount of vertical displacement of side A of disk 10 while moving the sensor in a non-contact manner, and an eddy current displacement sensor that can measure flatness with high precision by detecting the intensity of the induced current flowing through a coil by electromagnetic induction while moving the sensor in a non-contact manner.

[0059] The sensor moving mechanism includes a known driving mechanism, for example, a linear motor (not shown) that generates power in a linear direction. Note that the driving mechanism is not limited to one that generates power in a linear direction, and includes a moving mechanism that includes a rotating electric machine such as a motor, and a conversion mechanism such as a timing pulley, timing belt, or ball screw that converts the rotational motion of the rotating electric machine into linear motion.

[0060] The first transport section 24 has a configuration in which, when transporting the disk 10 facing the A-side measurement section 23, the disk 10 is transported parallel to the measurement reference surface 61a. As shown in Figs. 3 and 4, the first transport section 24 has a configuration in which the disk 10 can be shuttle-transported by moving back and forth between the entrance-side delivery section 51 and the exit-side delivery section 52 along the X direction. The first transport section 24 is provided with an attachment transport mechanism 71 and a removal transport mechanism 72. The attachment transport mechanism 71 and the removal transport mechanism 72 each have a holder 81 for holding the disk 10. The attachment transport mechanism 71 receives the disk 10 from the entrance-side delivery section 51 and sets it on the measurement reference surface 61a of the measurement section main body 61, and the removal transport mechanism 72 removes the disk 10 from the measurement reference surface 61a of the measurement section main body 61 and delivers it to the exit-side delivery section 52. The attachment transport mechanism 71 and the removal transport mechanism 72 hold and transport the disk 10 so that side A of the disk 10 is exposed on the side away from the measurement unit main body 61, and side B of the disk 10 is oriented opposite on the side approaching the measurement unit main body 61.

[0061] As shown in Fig. 5(a), Fig. 6(e) and Fig. 6(f), the holding part 81 has a hook part 81a, a lower disk receiver 81b, an upper disk receiver 81c and a frame 81d. The hook part 81a is inserted into the through hole h of the disk 10 and hooks the inner wall part of the through hole h to hold the disk 10, and the lower disk receiver 81b is configured to place and hold the lower part of the disk 10. The upper disk receiver 81c is fixed to the frame 81d and is configured to abut against the upper part of the disk 10 to restrict the upward movement of the disk 10. The hook part 81a and the lower disk receiver 81b are provided so as to be movable together with the frame 81d, and are moved in the Z direction and the Y direction by a moving means (not shown) to hold and release the disk 10 in cooperation with the upper disk receiver 81c.

[0062] The attachment transport mechanism 71 and the removal transport mechanism 72 are fixed integrally to the first transport section 24 of the first drive section 25, and are reciprocated in the horizontal direction, i.e., along the X direction shown in Fig. 4, by moving the first transport section 24 by the horizontal movement section 91 of the first drive section 25. The first drive section 25 also has a width-direction movement section 92 between the first transport section 24 and the horizontal movement section 91, and is capable of reciprocating the attachment transport mechanism 71 and the removal transport mechanism 72 in the vertical direction approaching or moving away from the measurement reference surface 61a, i.e., in the Y direction shown in Fig. 5(b), by moving the first transport section 24 by the width-direction movement section 92.

[0063] The mounting conveying mechanism 71 can position the holding portion 81 at a position opposite the entry-side delivery portion 51 by the horizontal moving portion 91 of the first driving portion 25 (see FIG. 7(1)). Then, the width-direction moving portion 92 of the first driving portion 25 can move the holding portion 81 in the Y direction to insert the hook portion 81a into the through hole h of the disk 10, position the lower disk receiver 81b below the disk 10, and position the upper disk receiver 81c opposite the upper portion of the disk 10 (see FIG. 7(2)). Then, the hook portion 81a and the lower disk receiver 81b are raised along the Z direction (see FIG. 7(3)), and the disk 10 is sandwiched between the hook portion 81a and the upper disk receiver 81c, and is lifted up to receive the disk 10 from the entry-side delivery portion 51 and hold it in the holding portion 81 (see FIG. 7(4)).

[0064] Then, the attachment transport mechanism 71 is moved in the X direction by the horizontal moving part 91 of the first driving part 25, and the holding part 81 is placed in a position facing the measurement reference surface 61a, and the holding part 81 is moved along the Y direction to approach the measurement reference surface 61a of the measurement part main body 61. This allows the support 62 of the measurement part main body 61 to be inserted into the through hole h of the disk 10. Then, the hook part 81a and the lower disk receiver 81b are lowered along the Z direction, and the holding of the disk 10 by the holding part 81 is released. As a result, the support 62 of the disk 10 is hooked into the through hole h and the vibration stopper 64 is brought into contact with the lower part of the disk 10, and the disk 10 is held on the measurement reference surface 61a (see FIGS. 6(c) and (d)).

[0065] When the mounting transport mechanism 71 causes the disk 10 held by the holder 81 to be held on the measurement reference surface 61a of the measurement unit main body 61, the first transport unit 24 is moved from the outlet-side delivery section 52 toward the inlet-side delivery section 51 by the horizontal movement section 91 of the first drive unit 25, and the holder 81 is disposed at a position facing the inlet-side delivery section 51. At the same time that the first transport unit 24 is moved from the outlet-side delivery section 52 toward the inlet-side delivery section 51, the sensor 63 is moved from the inlet-side delivery section 51 side toward the outlet-side delivery section 52 side, or from the outlet-side delivery section 52 side toward the inlet-side delivery section 51 side, and the flatness of side A of the disk 10 held on the measurement reference surface 61a is measured.

[0066] The removal transport mechanism 72 has a holding portion 81, similar to the mounting transport mechanism 71. When the removal transport mechanism 72 is moved in the X direction by the horizontal moving portion 91 of the first driving unit 25 and the holding portion 81 of the mounting transport mechanism 71 is disposed in a position facing the inlet delivery portion 51, the holding portion 81 of the removal transport mechanism 72 is disposed in a position facing the measurement reference surface 61a.

[0067] With the holding part 81 positioned opposite the measurement reference surface 61a, the removal transport mechanism 72 moves the holding part 81 in the Y direction by the width direction moving part 92 of the first drive part 25. Then, the hook part 81a is inserted into the through hole h of the disk 10 held on the measurement reference surface 61a, the lower disk receiver 81b is positioned below the disk 10, and the upper disk receiver 81c is positioned opposite the upper part of the disk 10. Then, the hook part 81a and the lower disk receiver 81b are raised along the Z direction, and the disk 10 is sandwiched between the hook part 81a and the upper disk receiver 81c and lifted up to remove the disk 10 from the measurement reference surface 61a and hold it in the holding part 81.

[0068] Then, removal transport mechanism 72 is moved in the X direction by horizontal movement unit 91 of first drive unit 25, and holder 81 is positioned opposite exit-side delivery unit 52. Then, hook unit 81a and lower disc receiver 81b are lowered in the Z direction to release holder 81 working in cooperation with upper disc receiver 81c from gripping disc 10. As a result, disc 10 is held by exit-side delivery unit 52.

[0069] 9, the first drive unit 25 has a horizontal movement unit 91 and a width direction movement unit 92. The horizontal movement unit 91 has a known drive mechanism, for example, a linear motor (not shown) that generates power in a linear direction. The drive mechanism is not limited to one that generates power in a linear direction, and may have a rotating electric machine such as a motor, and a conversion mechanism such as a timing pulley, timing belt, or ball screw that converts the rotational motion of the rotating electric machine into linear motion.

[0070] The horizontal moving unit 91 is configured to reciprocate the first transport unit 24 in the X direction. The width direction moving unit 92 is configured to reciprocate the holding unit 81 in a direction perpendicular to the measurement reference surface 61a, i.e., in the Y direction shown in FIG.

[0071] As shown in FIG. 3, the disk 10 is delivered from the exit-side delivery section 52 to the third transfer section 36 , transported to the opposing second delivery section 32 , and delivered to the entrance-side delivery section 51 of the second delivery section 32 .

[0072] The second transfer section 32, like the first transfer section 22, has an entrance side transfer section 51 and an exit side transfer section 52, and is configured to receive the disk 10 from the third transport section 36 at the entrance side transfer section 51 and transfer it to the second robot transport section 31 at the exit side transfer section 52.

[0073] 3, the B-side measurement unit 33 is disposed opposite the A-side measurement unit 23. Similar to the A-side measurement unit 23, the B-side measurement unit 33 has a measurement unit main body 61, a support 62, a sensor 63, a vibration stopper 64, and a sensor moving mechanism (not shown). The B-side measurement unit 33 holds the disc 10 on a measurement reference surface 61a of the measurement unit main body 61, and measures the flatness of the B-side, which is the back surface of the disc 10, by moving the sensor 63 disposed opposite the measurement reference surface 61a along the measurement reference surface 61a.

[0074] The second transport section 34 is configured to transport the disk 10 parallel to the measurement reference surface 61a when transporting the disk 10 facing the B-side measurement section 33. Similar to the first transport section 24, the second transport section 34 is configured to be able to shuttle transport the disk 10 by reciprocating in the X direction between the entrance-side delivery section 51 and the exit-side delivery section 52, and has an attachment transport mechanism 71 and a removal transport mechanism 72 attached thereto.

[0075] The attachment transport mechanism 71 and the removal transport mechanism 72 are fixed integrally to the second transport section 34 of the second drive section 35, and are reciprocated in the X direction by the horizontal movement section 91 of the second drive section 35 moving the second transport section 34. The second drive section 35 also has a width direction movement section 92 between the second transport section 34 and the horizontal movement section 91, and by moving the second transport section 34 with the width direction movement section 92, the attachment transport mechanism 71 and the removal transport mechanism 72 are reciprocated in the Y direction, which is the vertical direction approaching or moving away from the measurement reference surface 61a of the B-side measurement section 33. R It is now possible to do so.

[0076] The third transfer section 36 is made up of a disk holding section (not shown) and a transfer drive section (not shown), and the disk holding section is configured similarly to the disk holding section 43 of the first robot transfer section 21. The third transfer section 36 is configured to receive the disk 10 in a vertical position from the exit-side delivery section 52, hold the disk 10 in the vertical position by the disk holding section, and deliver the disk 10 to the entrance-side delivery section 51 of the second delivery section 32.

[0077] As shown in FIG. 3, the transport driver of the third transport section 36 has a configuration for reciprocating the disk holding section of the third transport section 36 in the Y direction.

[0078] The control unit is equipped with a central processing unit that performs calculations and a memory that stores a control program, and is configured to control the operation of each component that makes up the measuring device 20, i.e., each operation from receiving the disk 10 from the first robot transport unit 21, measuring the flatness of sides A and B of the disk 10, and passing the disk 10 after measurement to the second robot transport unit 31.

[0079] Next, the operation of the measurement device 20 according to this embodiment will be described with reference to the drawings. In addition, since the operation of each component of the measuring device 20 is controlled by the control unit, the operation of each component will be mainly described, and the explanation of the control of each operation of each component by the control unit will be omitted. The operation of each component of the measuring device 20 is all performed automatically.

[0080] The measuring device 20 first measures the flatness of the A-side of the disk 10 by the A-side measuring section 23 , and then measures the flatness of the B-side of the disk 10 by the B-side measuring section 33 .

[0081] (Measurement of the flatness of the A side) In the measuring device 20, first, the disk 10 at a predetermined location is held in the vertical position shown in FIGS. 6(a) and 6(b) by the disk holding section 43 of the first robot transport section 21 shown in FIG. 3, and then the disk 10 is moved from the predetermined location in the X-, Y-, and Z-directions to be transported to the entry side transport section 51 of the first transport section 22.

[0082] The transported disk 10 is handed over from the disk holding section 43 to the entry side delivery section 51 of the first delivery section 22, as shown in FIG. 8(a), and when handed over, the disk 10 is converted to an inclined posture, for example, tilted 5° from the vertical direction, and held in the entry side delivery section 51 of the first delivery section 22.

[0083] 8(b), the entry-side delivery section 51 is moved in the X direction by the horizontal moving section 91 until it reaches the attachment transport mechanism 71 of the first transport section 24, and the disk 10 is delivered from the entry-side delivery section 51 to the holder 81 of the attachment transport mechanism 71. At this time, the delivered disk 10 is maintained in an inclined position.

[0084] Next, the first transport unit 24 is moved in the X direction by the horizontal moving unit 91, and the holding unit 81 of the mounting transport mechanism 71 is disposed in a position facing the measurement reference surface 61a of the A-side measurement unit 23, as shown in Figures 8(c) and 9(a). Then, the holding unit 81 of the mounting transport mechanism 71 rises once in the Z direction indicated by the arrow a from the position shown in Figure 9(a), and then moves in the Y direction in a direction approaching the measurement reference surface 61a as shown in Figure 9(b), and disposes the disk 10 in a position where the support 62 is inserted into the through-hole h of the disk 10.

[0085] After stopping, the holding part 81 of the attachment transport mechanism 71 descends in the Z direction and hangs the disk 10 on the support 62, thereby holding the disk 10 on the measurement reference surface 61a. Next, in the attachment transport mechanism 71, the first transport part 24 is moved in the Y direction by the width direction moving part 92, and moves away from the measurement reference surface 61a, returning to the position shown in Figure 9(a). Then, as shown in Figure 10(a), the first transport part 24 is moved in the X direction by the horizontal moving part 91, and the holding part 81 of the removal transport mechanism 72 is positioned to face the measurement reference surface 61a of the A-side measurement part 23.

[0086] When the attachment transport mechanism 71 returns to the position shown in Fig. 10(a), the sensor 63 of the A-side measuring unit 23 is moved by the sensor moving mechanism in the direction of the arrow a shown in Fig. 5(a) and passes over the A-side of the disk 10. The sensor 63 passes over the A-side of the disk 10, thereby measuring the flatness of the A-side. Note that in the example shown in Fig. 5(a), the case where the sensor 63 moves in the direction of the arrow a from a standby state in a position biased toward the entrance-side delivery section 51 rather than the holding section 81 has been described, but when the sensor 63 is standby in a position biased toward the exit-side delivery section 52 rather than the holding section 81, the sensor 63 moves in the direction opposite to the direction of the arrow a to measure the flatness.

[0087] When the first driving unit 25 positions the holding unit 81 of the removal transport mechanism 72 at a position facing the support body 62 of the measurement reference surface 61a of the A-side measurement unit 23 and the measurement of the flatness of the A-side by the sensor 63 is completed, the holding unit 81 of the removal transport mechanism 72 is moved by the width-direction moving unit 92 along the Y direction in a direction approaching the measurement reference surface 61a, similar to the attachment transport mechanism 71 shown in Figures 9(a) and 9(b). Then, the hook unit 81a is inserted into the through-hole h of the disk 10, the lower disk receiver 81b is positioned below the disk 10, and the upper disk receiver 81c is positioned opposite the upper part of the disk 10.

[0088] The holder 81 of the removal transport mechanism 72 then raises the hook portion 81a and the lower disk receiver 81b along the Z direction, clamps the disk 10 between itself and the upper disk receiver 81c, and lifts it up to remove it from the measurement reference surface 61a and hold it. The holder 81 then raises in the Z direction to remove the disk 10 from the support 62, moves it in the Y direction away from the measurement reference surface 61a, and further lowers it in the Z direction to return to the position shown in FIG. 9(a) and stop there, similar to the holder 81 of the attachment transport mechanism 71.

[0089] In this state, the disk 10 is held in an inclined position by the holding portion 81 of the removal transport mechanism 72. Furthermore, the holding portion 81 of the mounting transport mechanism 71 and the holding portion 81 of the removal transport mechanism 72 have the function of improving transport efficiency when measuring many disks 10 consecutively by simultaneously preparing to mount the next disk 10 to be measured and removing the disk 10 for which measurement has been completed.

[0090] Next, the attachment transport mechanism 71 and the removal transport mechanism 72 of the first transport section 24 are moved by the horizontal moving section 91 along the X direction in a direction approaching the exit-side delivery section 52, and as shown in Fig. 10(b), the holding section 81 of the removal transport mechanism 72 of the first transport section 24 is stopped at a position facing the exit-side delivery section 52. Then, the disk 10 is delivered from the holding section 81 of the removal transport mechanism 72 to the exit-side delivery section 52. Even in this state, the disk 10 is held in an inclined position by the exit-side delivery section 52.

[0091] Next, as shown in Fig. 10(c), exit-side delivery section 52 moves in a direction away from removal transport mechanism 72 and stops. At this time, disk 10 is converted from the inclined posture to a vertical posture. Then, as shown in Fig. 3, disk 10 is delivered from exit-side delivery section 52 to a disk holding section (not shown) of third transport section 36.

[0092] The third transport section 36 is moved in the Y direction away from the exit-side delivery section 52 by a transport drive section (not shown), and reaches the entry-side delivery section 51 on the B-side measurement section 33 side that measures the B-side. Then, the disk 10 is delivered from the disk holding section of the third transport section 36 to the entry-side delivery section 51 on the B-side measurement section 33 side.

[0093] (Measurement of flatness of B side) The measurement of side B is performed in the same manner as the measurement of side A, but since side A measurement unit 23 and side B measurement unit 33 are disposed opposite each other, the transport direction of disk 10 by first transport unit 24 and the transport direction of disk 10 by second transport unit 34 are opposite each other. However, disk 10 itself is transported in one direction from the start of transport by first robot transport unit 21, through first transport unit 24, third transport unit and second transport unit 34, until transport by second robot transport unit 31 is completed.

[0094] In the measurement of the B side, first, as shown in FIG. 3, the inlet delivery section 51 on the B side measurement section 33 side is Third conveying section 36When the disk 10 is received from the entrance-side delivery section 51, it is converted to an inclined posture, for example, tilted 5° from the vertical direction. Then, it moves in the X direction toward the exit side of the second drive section 35 and is handed over to the attachment transport mechanism 71 of the second transport section 34. The disk 10 is handed over from the entrance-side delivery section 51 to the holder 81 of the attachment transport mechanism 71 of the second transport section 34 while maintaining the inclined posture tilted 5° from the vertical direction.

[0095] Next, the second transport unit 34 is moved in the X direction toward the exit side of the second drive unit 35, and the holding unit 81 of the attachment transport mechanism 71 is stopped at a position facing the support 62 provided on the measurement reference surface 61a of the B-side measurement unit 33. Then, the holding unit 81 of the attachment transport mechanism 71 is moved in the Z direction. Once The support 62 is then raised and moves in the Y direction toward the support 62 , and stops at a position where the support 62 is inserted into the through hole h of the disk 10 .

[0096] After stopping, the holding part 81 of the attachment transport mechanism 71 descends and hangs the disk 10 on the support 62, thereby attaching the disk 10 to the support 62. Next, the attachment transport mechanism 71 moves in the Y direction away from the measurement reference surface 61a and returns to its original position. Then, the second transport unit 34 is moved in the X direction toward the entrance side of the second drive unit 35, and the holding part 81 of the removal transport mechanism 72 returns to its original position facing the measurement reference surface 61a of the B-side measurement unit 33.

[0097] When the mounting transport mechanism 71 returns to its original position, the sensor 63 of the B side measuring unit 33 is moved by the sensor moving mechanism and passes over the B side of the disk 10. As the sensor 63 passes over the B side of the disk 10, the flatness of the B side is measured.

[0098] When the second drive unit 35 positions the holder 81 of the removal transport mechanism 72 at a position facing the support 62 of the measurement reference surface 61a of the B-side measurement unit 33 and the measurement of the flatness of the B-side by the sensor 63 is completed, Removal transport mechanism 72The holding portion 81 is moved in the Y direction by the width-direction moving portion 92 in a direction approaching the measurement reference surface 61a. Then, the hook portion 81a is inserted into the through-hole h of the disk 10, the lower disk receiver 81b is positioned below the disk 10, and the upper disk receiver 81c is positioned opposite the upper portion of the disk 10.

[0099] The removal transport mechanism 72 then raises the holding part 81 in the Z direction to remove the disk 10 from the support 62, moves it along the Y direction away from the measurement reference surface 61a, and further lowers it in the Z direction to return to its original position and stop. In this state, the disk 10 is held in an inclined position by the holding part 81 of the removal transport mechanism 72.

[0100] Next, second transport unit 34 is moved in the X direction toward the exit side of second drive unit 35, and holding unit 81 of removal transport mechanism 72 is stopped at a position facing exit-side delivery unit 52. Then, disk 10 is delivered from holding unit 81 of removal transport mechanism 72 to exit-side delivery unit 52. In this state, disk 10 is held in an inclined position by exit-side delivery unit 52.

[0101] Next, exit-side delivery section 52 moves in a direction away from removal transport mechanism 72 and stops. Then, as shown in FIG 3, disk 10 is delivered from exit-side delivery section 52 to disk holding section 43 of second robot transport section 31.

[0102] At this time, the disk 10 is converted from an inclined posture to a vertical posture, and the second robot transport unit 31 transports the disk 10 to a predetermined location. Then, the operation from when the first robot transport unit 21 starts transporting to when the second robot transport unit 31 finishes transporting is repeated, and when the measurement of the flatness of sides A and B of all disks 10 is completed, the operation of the measuring device 20 ends.

[0103] The effects of the measurement device 20 according to this embodiment will be described below. (1) The measuring device 20 according to this embodiment includes an A-side measuring unit 23 and a B-side measuring unit 33 for a disk 10, and a first transport unit 24 and a second transport unit 34. The A-side measuring unit 23 and the B-side measuring unit 33 have a measurement reference surface 61a that is inclined at an inclination angle θ° from the vertical direction, and the first transport unit 24 and the second transport unit 34 have a holder 81 that holds the disk 10 so that the disk 10 is parallel to the measurement reference surface 61a. The holder 81 is configured to mount and remove the disk 10 to and from the A-side measuring unit 23 or the B-side measuring unit 33 while the disk 10 maintains an inclined position at an inclination angle θ°.

[0104] In the measuring device 20 according to this embodiment, the A-side measuring unit 23 and the B-side measuring unit 33 have a measurement reference surface 61a inclined at an inclination angle θ° from the vertical direction, and the disk 10 is supported along the measurement reference surface 61a. As a result, a problem with conventional measuring devices, i.e., deflection of the disk caused by the disk being held horizontally on the measurement table, can be effectively suppressed, and the effect of being able to measure the flatness more accurately can be obtained.

[0105] Moreover, the holding unit 81 is configured to mount and remove the disk 10 to and from the A-side measurement unit 23 or the B-side measurement unit 33 while maintaining the inclined attitude of the disk 10 at an inclination angle of θ°. As a result, it is possible to obtain the effect that the inclined attitude can be maintained with high precision, and the disk 10 can be smoothly mounted and removed to and from the A-side measurement unit 23 or the B-side measurement unit 33. Furthermore, it is possible to suppress the effect of deflection due to its own weight, and to stabilize the attitude of the object to be measured when placed on the measurement device.

[0106] In addition, the measuring device 20 according to the first embodiment is configured to include a first robot transport unit 21 and a second robot transport unit 31, and automatically measures the disk 10 from the time the disk 10 is transported from the first robot transport unit 21 to the time it is transported by the second robot transport unit 31, thereby obtaining the effect of being able to measure a large number of disks 10 relatively quickly.

[0107] (2) In the measuring device 20 according to this embodiment, the first transport unit 24 has an attachment transport mechanism 71 and a removal transport mechanism 72. The attachment transport mechanism 71 attaches the disk 10 to the A-side measurement unit 23 or the B-side measurement unit 33, and the removal transport mechanism 72 removes the disk 10 from the A-side measurement unit 23 or the B-side measurement unit 33. As a result, the disk 10 can be transported quickly, and the attachment and removal of the disk 10 to and from the A-side measurement unit 23 or the B-side measurement unit 33 can be smoothly performed, resulting in an effect of efficient transport.

[0108] (3) The measuring device 20 according to this embodiment is configured so that when the first transport unit 24 transports the disk 10 facing the A-side measurement unit 23, and when the second transport unit 34 transports the disk 10 facing the B-side measurement unit 33, the disk 10 is transported parallel to the measurement reference surface 61a. As a result, no unnecessary stress is generated on the disk 10, and an effect is obtained in which many disks 10 can be transported efficiently.

[0109] (4) In the measuring device 20 according to this embodiment, the A-side measuring unit 23 and the B-side measuring unit 33 are arranged opposite each other, thereby reducing the space required for arranging the components of the measuring device 20, thereby achieving the effect of making the measuring device 20 more compact.

[0110] (5) The measuring device 20 according to this embodiment is configured such that the first transport section 24 is disposed opposite the A-side measuring section 23, and the second transport section 34 is disposed opposite the B-side measuring section 33, with the transport directions of the first transport section 24 and the second transport section 34 being opposite to each other. As a result, the respective arrangement spaces of the first transport section 24 and the A-side measuring section 23, and the second transport section 34 and the B-side measuring section 33 are reduced, resulting in an effect of making the measuring device 20 more compact.

[0111] (6) The measuring device 20 according to this embodiment has a first delivery unit 22 and a second delivery unit 32 that convert the vertical posture between a vertical posture in which the disk 10 is positioned along the vertical direction and an inclined posture in which the disk 10 is inclined at an inclination angle of θ degrees from the vertical direction of the disk 10. As a result, the disk 10 in a vertical posture transferred from the first robot transfer unit 21 can be smoothly made into an inclined posture by the first delivery unit 22, and the disk 10 transferred in an inclined posture is smoothly converted into a vertical posture by the second delivery unit 32. That is, the process of converting into an inclined posture in the transfer unit is not required, and the effect of being able to suppress unnecessary stress generated in the disk 10 and stabilize the posture of the object to be measured when placed in the measuring device is obtained.

[0112] (7) The measuring device 20 according to this embodiment has a horizontal movement unit 91 that drives the first transport unit 24, and the first drive unit 25 is disposed vertically below the measuring unit main body 61. With this configuration, fine dust generated from the first drive unit 25 falls directly downward and is less likely to adhere to the measuring unit main body 61 located above the first drive unit 25. This reduces the risk of the measuring unit main body 61 being contaminated by dust.

[0113] (8) In the measuring device 20 according to this embodiment, the first transport unit 24 is configured to be capable of reciprocating horizontally and vertically to the measurement reference plane, which provides the effect of efficiently and quickly transporting the disc 10 and hanging it on the support 62 of the A-side measuring unit 23. In addition, the first transport unit 24 transports the disc 10 from the entrance side to the exit side of the measuring device while maintaining the orientation of the main surface toward the measurement reference plane, which provides the effect of quickly measuring a large number of discs 10 without waste and transporting the discs 10.

[0114] (9) The measuring device 20 of this embodiment has a through hole through which the disk 10 penetrates in the thickness direction, and the holding portions 81 of the mounting transport mechanism 71 and the removal transport mechanism 72 hold the inner wall portions of the through hole, thereby achieving the effect of stably holding the disk 10 in an inclined position without generating unnecessary stress.

[0115] (10) The measuring device 20 according to this embodiment has a support 62 that supports the disk 10 on the measurement reference surface 61a, and a vibration stopper 64 that comes into contact with the disk 10 supported by the support 62. As a result, it is possible to obtain an effect that the vibration of the disk 10 supported by the support 62 is suppressed, and the attitude of the disk 10 is maintained and stabilized, thereby improving the accuracy of the flatness measurement by the sensor 63.

[0116] In the measurement device 20 according to the first embodiment, the A-side measurement unit 23 and the B-side measurement unit 33 are configured to face each other. However, in the measurement device according to the present invention, the A-side measurement unit 23 and the B-side measurement unit 33 may be configured to a structure other than a structure in which they are configured to face each other.

[0117] For example, the measuring device 20A may be configured in such a manner that the A-side measuring unit 23 and the B-side measuring unit 33 are arranged in parallel in the same direction, or the measuring device 20B may be configured in such a manner that the A-side measuring unit 23 and the B-side measuring unit 33 are arranged in parallel in different directions.

[0118] In addition, in this embodiment, an example has been described in which the measuring device 20 has both the A-side measurement unit 23 and the B-side measurement unit 33, but it may have only one of them, or it may have at least one of the A-side measurement unit 23 and the B-side measurement unit 33.

[0119] Second embodiment Hereinafter, a measuring apparatus 20A according to the second embodiment will be described with reference to the drawings. 11, the measuring apparatus 20A according to the second embodiment differs from the measuring apparatus 20 according to the first embodiment in that the A-side measuring unit 23 and the B-side measuring unit 33 are arranged in parallel in the same orientation. Note that the same components as those in the measuring apparatus 20 according to the first embodiment are given the same reference numerals as those in the measuring apparatus 20 according to the first embodiment, and detailed explanations will be omitted.

[0120] The measuring device 20A according to the second embodiment includes an A-side measuring unit 11, a B-side measuring unit 12, and a front / back inversion mechanism 13. The measuring device 20A is configured to measure the flatness of the A-side of the disc 10 with the A-side measuring unit 11, invert the disc 10 with the front / back inversion mechanism 13, and measure the flatness of the B-side of the disc 10 with the B-side measuring unit 12.

[0121] The A-side measuring unit 11 includes an entrance-side delivery section 51, a first transport section 24, an A-side measuring section 23, and a horizontal movement section 91. The B-side measuring unit 12 includes a B-side measuring section 33, a second transport section 34, and an exit-side delivery section 52.

[0122] The front / back inversion mechanism 13 is configured to be a known inversion mechanism (not shown). When the front / back inversion mechanism 13 receives the disk 10 from the A-side measurement unit 11 with the A-side of the disk 10 facing the measurement reference surface 61a of the A-side measurement section 23, the front / back inversion mechanism 13 has a configuration to maintain the orientation of the disk 10 and hand it over to the B-side measurement unit 12 so that the B-side of the disk 10 faces the measurement reference surface 61a of the B-side measurement section 33. The A-side and B-side of the disk 10 are inverted by the front / back inversion mechanism 13.

[0123] Next, the operation of the measuring device 20A according to the second embodiment will be described with reference to the drawings. The operation of the components with the same reference numerals as those of the measuring device 20 according to the first embodiment will be described briefly because they operate in the same manner as the components of the measuring device 20.

[0124] In the measuring device 20A, first, when the disk 10 is received at the inlet delivery section 51 shown in FIG. 11, the disk 10 is converted to an inclined posture, and while the disk 10 remains in the inclined posture, the horizontal moving section 91 moves the disk 10 in the X direction toward the first conveying section 24, and stops at a position where the disk can be handed over to the first conveying section 24.

[0125] After the disk 10 has stopped, the disk 10 is transferred in the inclined position to the holder 81 of the attachment transport mechanism 71 of the first transport unit 24, and the attachment transport mechanism 71 is moved by the horizontal movement unit 91, and the disk 10 is hung on the support 62 of the A-side measurement unit 23. Next, the sensor 63 moves to measure the flatness of the A-side of the disk 10. Then, the removal transport mechanism 72 removes the disk 10 from the support 62, and the removal transport mechanism 72 moves by the horizontal movement unit 91 to stop at a position where the disk 10 is transferred to the front-back reversing mechanism 13.

[0126] After the disc 10 has stopped, the disc 10 is handed over to the front / back inversion mechanism 13, which inverts the disc 10. After inverting the disc 10, the front / back inversion mechanism 13 changes the inclined attitude of the disc 10 to an attitude inclined toward the B-side measurement section 33. This maintains the inclined attitude of the disc 10 in the same direction as before it was handed over to the front / back inversion mechanism 13.

[0127] The inverted disc 10 is delivered, while maintaining an inclined attitude, to the holder 81 of the attachment transport mechanism 71 of the second transport section 34. The attachment transport mechanism 71 hangs the disc 10 on the support 62 of the B-side measurement section 33.

[0128] Next, the sensor 63 moves to measure the flatness of side B of the disk 10. Then, the disk 10 is removed from the support 62 by the removal transport mechanism 72, and the removal transport mechanism 72 moves by the horizontal moving part 91 to stop at a position where the disk 10 is handed over to the next transport process.

[0129] The effects of the measuring device 20A according to the second embodiment will be described below. The measuring device 20A has the same configuration as the measuring device 20 according to the first embodiment, and operates in the same manner as the measuring device 20, so that the measuring device 20A can obtain the same effects as the measuring device 20.

[0130] That is, the measuring device 20A according to the second embodiment has an effect of solving the problem of disk bending that occurs in conventional measuring devices. Also, since there is no risk of bending of the disk 10, the flatness can be measured more accurately.

[0131] Furthermore, the holding section 81 of the first transport section 24 of the measuring device 20A according to the second embodiment is configured to hold the disk 10 and move it vertically while maintaining the inclined attitude of the disk 10 at an inclination angle of θ°, thereby mounting and removing the disk 10 to and from the A-side measuring section 23 or the B-side measuring section 33. As a result, it is possible to obtain the effect that the disk 10 can be smoothly mounted and removed to and from the A-side measuring section 23 or the B-side measuring section 33. Furthermore, it is possible to suppress the influence of deflection due to its own weight, and to stabilize the attitude of the object to be measured when placed on the measuring device.

[0132] Note that in the measuring device 20A according to the second embodiment, the front / back inversion mechanism 13 may be configured to invert the front / back of the disk 10, and without changing the inclined attitude of the disk 10, pass the disk 10 toward the A-side measurement section 23 and deliver it to the first transport section 24 of the A-side measurement unit 11, so that the A-side measurement section 23 measures the flatness of the B-side of the disk 10. With this configuration, the B-side measurement unit 12 that measures the B-side is not necessary, and the configuration can be simplified.

[0133] Third embodiment 12, the measuring apparatus 20B according to the third embodiment differs from the measuring apparatus 20 according to the first embodiment and the measuring apparatus 20A according to the second embodiment in that the A-side measuring unit 23 and the B-side measuring unit 33 are arranged in parallel but in different orientations. The same components as those in the measuring apparatus 20 according to the first embodiment are given the same reference numerals as those in the measuring apparatus 20 according to the first embodiment, and detailed explanations will be omitted.

[0134] 12, measuring device 20B according to the third embodiment includes an A-side measuring unit 11, a B-side measuring unit 12, and a tilt conversion mechanism 14. Measuring device 20B has a configuration in which A-side measuring unit 11 measures the flatness of A-side of disk 10, tilt conversion mechanism 14 converts the tilt attitude of disk 10, and B-side measuring unit 12 measures the flatness of B-side of disk 10.

[0135] The A-side measurement unit 11 has an entrance-side delivery section 51, a first transport section 24, an A-side measurement section 23, and a horizontal movement section 91. The B-side measurement unit 12 has a B-side measurement section 33, a second transport section 34, and an exit-side delivery section 52. The A-side measurement section 23 and the B-side measurement section 33 are arranged separately on the right side, which is one side in the width direction, and on the left side, which is the other side in the width direction, with respect to the movement direction of the horizontal movement section 91.

[0136] The tilt conversion mechanism 14 is composed of an inlet delivery section 14a, an outlet delivery section 14b, and a known conversion mechanism (not shown). The conversion mechanism receives the disk 10 from the A-side measurement unit 11 in a position where the A-side of the disk 10 faces parallel to the measurement reference surface of the A-side measurement section 23. The conversion mechanism is configured to convert the position of the disk 10 so that the B-side of the disk 10 faces parallel to the B-side measurement section 33, and to pass the disk 10 to the B-side measurement unit 12.

[0137] Next, the operation of the measurement device 20B according to the third embodiment will be described with reference to the drawings. The operations of the components with the same reference numerals as those of the measurement device 20 according to the first embodiment are the same as those of the measurement device 20, and therefore will be described briefly.

[0138] In the measuring device 20B, first, when the entry-side delivery section 51 receives the disk 10, the disk 10 is converted to an inclined posture inclined toward the A-side measurement section 23. Then, while the disk 10 remains in the inclined posture, the entry-side delivery section 51 moves in the X direction toward the first transport section 24, and stops at a position where the disk 10 is delivered to the first transport section 24.

[0139] After the disk 10 has stopped, it is transferred in the inclined position to the holder 81 of the attachment transport mechanism 71 of the first transport section 24, and the attachment transport mechanism 71 moves by the horizontal movement section 91, and the disk 10 is hung on the support 62 of the A-side measurement section 23. Next, the sensor 63 moves to measure the flatness of the A-side of the disk 10. Then, the removal transport mechanism 72 removes the disk 10 from the support 62, and the removal transport mechanism 72 moves by the horizontal movement section 91 to stop at a position where it delivers the disk 10 to the entrance delivery section 14a of the tilt conversion mechanism 14.

[0140] After the disk 10 has stopped, the disk 10 is delivered to the entrance-side delivery section 14a of the inclination conversion mechanism 14, and the inclination of the disk 10 is converted to an inclination to the opposite side. In other words, the disk 10 is converted from an inclined attitude tilted toward the A-side measurement section 23 to an inclined attitude tilted toward the B-side measurement section 33. The disk 10 is then transported to the exit-side delivery section 14b of the inclination conversion mechanism 14. The disk 10 is delivered to the attachment transport mechanism 71 at the exit-side delivery section 14b, and is hung on the support body 62 of the B-side measurement section 33 by the attachment transport mechanism 71.

[0141] Next, the sensor 63 moves to measure the flatness of side B of the disk 10. Then, the disk 10 is removed from the support 62 by the removal transport mechanism 72, and the removal transport mechanism 72 moves by the horizontal moving part 91 to stop at a position where the disk 10 is handed over to the next transport process.

[0142] The effects of the measurement apparatus 20B according to the third embodiment will be described below. The measuring apparatus 20B has the same configuration as the measuring apparatus 20A and the measuring apparatus 20 according to the first embodiment, and operates in the same manner as the measuring apparatus 20. Therefore, the measuring apparatus 20B can obtain the same effects as the measuring apparatus 20.

[0143] That is, the measuring device 20B according to the third embodiment has an effect of solving the problem of disk bending that occurs in conventional measuring devices. Also, since there is no risk of bending of the disk 10, the flatness can be measured more accurately.

[0144] Furthermore, the holding section 81 of the first transport section 24 of the measuring device 20B according to the third embodiment is configured to hold the disk 10 and move it vertically while maintaining the inclined attitude of the disk 10 at an inclination angle of θ°, thereby mounting and removing the disk 10 to and from the A-side measuring section 23 or the B-side measuring section 33. As a result, it is possible to obtain the effect that the disk 10 can be smoothly mounted and removed to and from the A-side measuring section 23 or the B-side measuring section 33. Furthermore, it is possible to suppress the influence of deflection due to its own weight, and to stabilize the attitude of the object to be measured when placed on the measuring device.

[0145] Although the first to third embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described first to third embodiments, and various design modifications can be made without departing from the spirit of the present invention as described in the claims. In particular, in each of the above-described embodiments, the measuring device according to the present invention is described as being used as a measuring device for measuring an object to be measured, but the present invention is not limited to this, and can also be used, for example, as an inspection device for inspecting an object to be measured, or a sorting device for sorting objects into good and defective after inspection. [Explanation of symbols]

[0146] 10...Disk (object to be measured) 11 A-side measurement unit 12 B-side measuring unit 13. Front / back reversal mechanism 14. Tilt conversion mechanism 14a, 51...Entry side delivery section (delivery section) 14b, 52... Output side delivery section (delivery section) 20, 20A, 20B...Measuring device 21...First robot transfer section 22...1st delivery department (delivery department) 23...A side measuring section (measuring means, first measuring means) 24... First conveying section (conveying means, first conveying means) 25... First drive unit (drive means) 31 Second robot transfer section 32...Second delivery section (delivery section) 33...B side measurement section (measuring means, second measuring means) 34... Second conveying section (conveying means, second conveying means) 35... Second drive unit (drive means) 36 Third conveyor section 41, 42 Arm 43...Disc holding part 43a Upper disc holder 43b Grooved hook 61 Measuring unit body 61a...Measurement reference plane 61b...Support part 62...Support 63 Sensor 64...Sway rest 71: Mounting transport mechanism (first mounting transport section) 72...Removal transport mechanism (second removal transport section) 81...Holding part 81a Hook part (holding part) 81b Lower disc holder (retaining part) 81c Upper disc holder (retaining part) 81d···Frame 91... Horizontal movement unit (transport drive unit) 92 Width direction moving part θ...inclination angle (predetermined angle)

Claims

1. A measuring device for measuring an object to be measured, comprising: A measuring means for measuring the shape of at least one of the front surface and the back surface of the object to be measured; A conveying means for conveying the object to be measured, The measuring means has a measurement reference surface that is inclined at a predetermined angle from the vertical direction, the conveying means has a holder that holds the object to be measured so that the object is parallel to the measurement reference surface, the holding unit attaches and detaches the object to and from the measuring means while maintaining the object in a position tilted at the predetermined angle; the conveying means is configured to be capable of reciprocating movement in a horizontal direction and in a direction perpendicular to the measurement reference surface, and the object to be measured is conveyed by the conveying means from an entrance side to an exit side of the measurement device while maintaining the orientation of its principal surface toward the measurement reference surface.

2. A measuring device for measuring an object to be measured, comprising: A measuring means for measuring the shape of at least one of the front surface and the back surface of the object to be measured; A conveying means for conveying the object to be measured, The measuring means has a measurement reference surface that is inclined at a predetermined angle from the vertical direction, the conveying means has a holder that holds the object to be measured so that the object is parallel to the measurement reference surface, the holding unit attaches and detaches the object to and from the measuring means while maintaining the object in a position tilted at the predetermined angle; the measurement reference surface has a support that supports the object to be measured and a vibration rest that abuts against the object to be measured supported by the support, the support body is inserted into a through hole of the object to be measured and supports the object to be measured in a suspended state; The vibration rest supports the object to be measured, which is suspended and supported by the support, at a preset inclination angle. A measuring device comprising:

3. 3. The measuring apparatus according to claim 1, wherein the transport means has a mounting holder for mounting the object to the measuring means and a detachment holder for detaching the object from the measuring means.

4. 3. The measuring apparatus according to claim 1, wherein when the transport means transports the object to be measured opposite to the measuring means, the object is transported parallel to the measurement reference surface.

5. 3. The measuring apparatus according to claim 1, wherein the measuring means comprises a first measuring means and a second measuring means arranged opposite to each other.

6. 6. The measuring apparatus according to claim 5, wherein the conveying means includes a first conveying means for conveying the object to be measured opposite the first measuring means, and a second conveying means for conveying the object to be measured opposite the second measuring means, and the conveying direction of the first conveying means and the conveying direction of the second conveying means are opposite to each other.

7. 3. The measuring device according to claim 1, further comprising a transfer unit that converts the object to be measured between a vertical position in which the object is positioned along a vertical direction and an inclined position in which the object is positioned at a predetermined angle from the vertical direction.

8. 3. The measuring apparatus according to claim 1, further comprising a driving means for driving the transporting means, the driving means being disposed vertically below the measuring means.

9. 3. The measuring device according to claim 1, wherein the object to be measured has a through hole penetrating in a plate thickness direction, and the holding portion holds an inner wall portion of the through hole.

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