Surveillance system

Abstract

To provide a monitoring system which performs predictor monitoring on operation abnormality of a conveyance body floating and moving on a conveyance stage, and which can detect an obstacle on the conveyance stage.SOLUTION: A monitoring system 10 monitors a conveyance device 100 which includes a conveyance stage 20, and a conveyance body 30 moving on the conveyance stage 20. The conveyance body 30 has a magnet. The conveyance stage 20 includes a magnetic force generation part which generates a magnetic force from electric power, and by mutual action with the magnet, which floats the conveyance body 30 from the conveyance stage 20 and moves it on the conveyance stage 20. The monitoring system 10 includes: a region measurement sensor 2 which makes a region a detection region R where the conveyance body 30 floats in the normal direction of the conveyance stage 20; and an abnormality determination part 14 for determining abnormality of the conveyance stage 20 or the conveyance body 30, based on the detection information of the region measurement sensor 2.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a monitoring system for monitoring a transfer apparatus including a transfer stage and a transfer body that moves on the transfer stage. [Background technology]

[0002] There is known a conveying device in which a plurality of conveyors run tracklessly within a conveying area without rails or the like. For example, Patent Document 1 discloses a conveying device including a movable stage with a plurality of magnet arrays, and a stator stage having a plurality of layers with coils providing linear and elongated coil traces. In this conveying device, the movable stage is levitated in the Z direction from above the stator stage by the magnetic force generated by the interaction between the coils and the magnet array, and is movable in the XY directions above the stator stage.

[0003] Patent document 2 also discloses a system comprising a plurality of transport bodies loaded with containers, a workspace within which the transport bodies move, and a unit operation station within which processing operations are performed on the containers loaded by the transport bodies, the transport bodies being capable of moving tracklessly within the workspace, and the paths of the individual transport bodies being able to be set independently. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Special Publication No. 2014-531189 [Patent Document 2] Special Publication No. 2021-513487 Summary of the Invention [Problem to be solved by the invention]

[0005] The conveying device disclosed in Patent Document 1 has a movable stage that floats up from a stator stage, but does not consider any predictive monitoring of operational abnormalities in the movable stage or detection of obstacles on the stator stage. Patent Document 2 does not disclose a technology in which the conveying body floats up and moves, and does not consider any detection of operational abnormalities of the conveying body or obstacles on the conveying route.

[0006] The present invention relates to providing a monitoring system capable of predictively monitoring for abnormal operation of a transport body that floats and moves above a transport stage, and of detecting obstacles on the transport stage. [Means for solving the problem]

[0007] The present invention relates to a monitoring system for monitoring a transfer apparatus including a transfer stage and a transfer body that moves on the transfer stage. In one embodiment, the carrier preferably has a magnet. In one embodiment, it is preferable that the transport stage has a magnetic force generating unit that generates a magnetic force and, through interaction with the magnet provided on the transport body, levitates the transport body from the transport stage in a normal direction to the transport stage and moves it on the transport stage. In one embodiment, the monitoring system includes a range sensor having a detection area in a normal direction of the transport stage where the transport body is levitated; It is preferable to further include an abnormality determination unit that determines an abnormality in the transport stage or the transport body based on detection information from the range sensor. Effect of the Invention

[0008] The monitoring system of the present invention can perform predictive monitoring of abnormalities in the operation of a carrier that floats and moves above a carrier stage, and can also detect obstacles on the carrier stage. [Brief description of the drawings]

[0009] [Figure 1]FIG. 1 is a perspective view showing an embodiment of a monitoring system and a transport device according to the present invention, and a block diagram of the monitoring system. [Diagram 2] FIG. 2 is a perspective view showing the article shown in FIG. 1 and the carrier carrying the article. [Diagram 3] FIG. 3 is a perspective view showing the inside of the carrier shown in FIG. [Figure 4] FIG. 4 is a perspective view showing the transfer stage shown in FIG. 1 with some sections seen through. [Diagram 5] FIG. 5 is a block diagram of the conveying device shown in FIG. [Figure 6] FIG. 6 is a plan view showing the positional relationship between the detection range of the range measurement sensor shown in FIG. 1 and the transfer stage. [Figure 7] FIG. 7 is a side view showing the detection area of ​​the range measurement sensor shown in FIG. [Figure 8] FIG. 8 is a plan view of a monitoring system and a transport device, illustrating an example of a route change performed by the transport route generating unit illustrated in FIG. [Figure 9] FIG. 9 is a side view showing an example of a method for determining an operational abnormality of the working device using the detection area of ​​the range sensor shown in FIG. [Figure 10] FIG. 10 is a side view showing an example of a method for moving a conveying body to a support base on a conveying stage using the detection area of ​​the range measurement sensor shown in FIG. [Figure 11] 11(a) to (c) are plan views showing the layout of the range measurement sensor according to the present invention. [Figure 12] FIG. 12 is a diagram equivalent to FIG. 7, showing range measurement sensors whose detection areas are positioned differently in the normal direction. [Figure 13] 13(a) and 13(b) are a plan view and a side view showing an example of an image processing device that can be provided in a surveillance system. [Figure 14] FIG. 14 is a flow diagram of a monitoring process executed by the monitoring system shown in FIG. [Figure 15] FIG. 15 is a plan view for explaining the range of the detection region. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] A monitoring system according to a preferred embodiment of the present invention will be described below with reference to the drawings. The monitoring system 10 of this embodiment monitors the operation of a transport device 100 shown in Fig. 1. The transport device 100 of this embodiment includes a transport stage 20, a plurality of transport bodies 30 that move on the transport stage 20, and a transport device control unit 50 that controls the operation of the transport device 100, including the movement of the transport bodies 30. The conveying device 100 can be used in a production method in which, for example, an item (transported object 5) is conveyed to a working area on the conveying stage 20, and a process for processing the item in the working area is carried out multiple times to complete a product. The types of processing of the processes carried out multiple times are different, and examples of such processing include filling, assembly, and cutting. The working area on the conveying stage 20 is an area in which any one of these processes is carried out.

[0011] In the transfer device 100 of this embodiment, the transfer stage 20 is placed on a horizontal surface and extends in the horizontal direction. The transfer stage 20 of this embodiment has an X direction and a Y direction perpendicular to the X direction, and has a rectangular shape that is long in the X direction. The transfer stage 20 of this embodiment is composed of a plurality of segments 21. Each segment 21 is the smallest unit of hardware that is individually supplied with power and generates magnetic force. The transfer stage 20 can be composed of a single or a plurality of segments 21. The transfer stage 20 can be formed into a desired planar shape by arbitrarily arranging the plurality of segments 21. The plurality of segments 21 that compose the transfer stage 20 are arranged with no gaps between adjacent segments 21 in each of the transfer X direction and Y direction. In the transfer stage 20 of this embodiment, multiple segments 21 are arranged in both the X and Y directions. These segments 21 have a square shape in a plan view. The upper surfaces of the segments 21 are substantially flush with each other. This makes the transfer stage 20 substantially flat.

[0012] The segment 21 of this embodiment includes a flat segment body 22 and a magnetic force generating unit 23 provided in the segment body 22 (see FIG. 4). The magnetic force generating unit 23 of this embodiment includes coils 23a, 23b, 23c, and 23d arranged along the periphery of the four sides of the segment body 22, and generates magnetic force by electric power. In a plan view, these coils 23a, 23b, 23c, and 23d are arranged in a substantially rectangular ring shape. In the segment 21, two coils 23a and 23d facing each other are arranged in parallel, and another two coils 23b and 23c perpendicular to these coils 23a and 23d are arranged facing each other and in parallel.

[0013] The conveying body 30 of this embodiment has a flat conveying body 31 and a holding part 35 that is provided on the upper surface of the conveying body 31 and holds the conveyed object 5 (see FIG. 2). The conveying body 31 has a substantially square shape with rounded corners in a plan view. The shape of the conveying body 31 in a plan view may be a hexagon, a circle, or the like. The conveyor 30 of this embodiment conveys cylindrical bottle containers as the goods 5. The type of goods 5 is not particularly limited, and may be various containers such as bottle containers, tube containers, squeeze containers, bag-shaped containers, and cosmetic palettes. Furthermore, these containers may or may not contain contents. The conveyor 30 of this embodiment is provided with a holding section 35, but may not be provided with the holding section 35. The holding part 35 in this embodiment has a cylindrical part capable of accommodating the bottom part of the transported object 5, and a plate part on which the cylindrical part is erected, and the plate part is fixed to the upper surface of the transport body 31. For the sake of convenience of explanation, the holding part 35 is omitted from the drawings other than FIG. 2 below.

[0014] The carrier 30 of this embodiment is identifiable and is provided with identification information. The identification information is information for identifying each carrier 30, and may be displayed, for example, by letters, numbers, symbols, or a combination of these, or may be displayed in an optically or electronically readable manner. For example, a two-dimensional code such as a barcode or a QR code (registered trademark), an electronic information medium such as an RFID (Radio Frequency Identification) tag, or the like is used. The RFID tag can be read by an RFID reader (RFID antenna). The identification information may also be the arrangement of the magnet arrays 33a, 33b, 33c, and 33d of the carrier 30, or the shape of a specific part of the carrier 30 (a shape unique to each carrier 30), or the like. The identification information may be assigned to the vehicle 30 based on a video of the vehicle 30 on the transport stage 20. For example, based on an analysis of a video stream related to the vehicle 30, the behavior of the vehicle 30 may be monitored and analyzed to assign an identifier (identification information) that associates multiple characteristics of the vehicle 30 with the tracking of the vehicle 30.

[0015] The conveying body 30 includes a magnet (permanent magnet) inside the conveying body 31. More specifically, the conveying body 31 includes magnet arrays 33a, 33b, 33c, and 33d arranged along the periphery of the four sides of the conveying body 31 (see FIG. 3). The magnet arrays 33a, 33b, 33c, and 33d are arranged in a substantially rectangular ring shape. In the conveyor 30, two magnet arrays 33a and 33d facing each other are arranged in parallel, and two other magnet arrays 33b and 33c perpendicular to the magnet arrays 33a and 33d are arranged facing each other and in parallel. The carrier 30 may include a single magnet array instead of multiple magnet arrays.

[0016] The conveying stage 20 has a magnetic force generating unit 23 that generates a magnetic force by electric power. The magnetic force interacts with the magnet arrays 33a, 33b, 33c, and 33d of the conveying body 30, causing the conveying body 30 to levitate from the conveying stage 20 and move on the conveying stage 20. More specifically, when electric power is supplied to the magnetic force generating unit 23 provided in each segment 21 of the conveying stage 20, a magnetic force is generated in the horizontal direction (X direction and Y direction). This magnetic force causes the conveying body 30 to levitate from the upper surface of the conveying stage 20 (segment 21) and move in the horizontal direction (X direction and Y direction). The transfer stage 20 may move the transfer body 30 by changing the distance, angle, polarity direction of the magnets provided on the stage, or a combination of these.

[0017] The moving direction of the conveyor 30 can be changed according to the manner of supplying power to the coils 23a, 23b, 23c, and 23d of the segment 21, for example, the combination of the coils that supply power. As a result, on each segment 21, each conveyor 30 can be moved in a direction that combines one or both of the X and Y directions. For example, when the Y direction is the front-rear direction and the X direction is the left-right direction, the conveyor 30 can be moved in a desired direction selected from the front, rear, left, right, and diagonal directions thereof, when the Y direction is the front-rear direction and the X direction is the left-right direction. For example, as shown in FIG. 6, the conveyor 30 of this embodiment can move straight along the paths C1 and C2 that move in the Y direction after moving in the X direction, and can also move along a path C3 that moves straight in a diagonal direction relative to the X direction or the Y direction, or along a path C4 that moves in a curved direction relative to the X direction or the Y direction.

[0018] Furthermore, the transport body 30 floats in the normal direction of the transport stage 20 relative to the transport stage 20 (each segment 21). In this embodiment, each transport body 30 floats upward in the vertical direction Z relative to the transport stage 20 (each segment 21). The vertical direction Z relative to the transport stage 20 coincides with the normal direction relative to the transport stage 20. The normal direction and the vertical direction Z are directions perpendicular to the X direction and the Y direction, respectively. In addition, "plan view" means that the transport stage 20 is viewed from above in the vertical direction Z relative to the transport stage 20. The floating amount of each transport body 30 floating above the transport stage 20 (each segment 21) is set to be approximately the same. The floating amount is the distance between the stage 20 and the bottom surface of the transport body 30 in the normal direction of the transport stage 20 (hereinafter also simply referred to as the "normal direction"). That is, in this embodiment, the distance between the bottom surface of the transport body 30 and the transport stage 20 in the vertical direction Z is the floating amount of the transport body 30. From the viewpoint of smoother transportation, the floating amount of the transport body 30 is preferably 3 mm or more and 20 mm or less, and more preferably 10 mm or more and 20 mm or less. The transport body 30 can arbitrarily set a route (path) from a movement start point to a destination point (for example, a segment 21a shown in FIG. 6) on the transport stage 20, and the route can be set according to each transport body 30. The route is not necessarily uniquely determined, but can be changed to an arbitrary route as appropriate according to the movement or arrangement of other transport bodies 30. The movement of the transport body 30 on the transport stage 20, including the setting and changing of the route, is controlled by a transport device control unit 50 described later. The transport device control unit 50 is communicably connected to the transport stage 20 (segment 21) via a network. In this embodiment, the movement route of the transport body 30 is set or changed under the control of the transport device control unit 50. The transport device control unit 50 may also be communicably connected to the transport body 30.

[0019] The operating principle of levitating and moving the transport body 30 by the magnetic force generating unit 23 of the transport stage 20 is similar to the principle of levitating and moving a movable stage equipped with multiple magnet arrays by the coil of the stator stage disclosed in Patent Document 1.

[0020] The transport stage 20, which is an assembly of multiple segments 21, has a larger area (planar dimensions) than the transport body 30. The area (planar dimensions) of the segments 21 may be larger than, equal to, or smaller than the area (planar dimensions) of the transport body 30. In this embodiment, the segments 21 have a larger area (planar dimensions) than the transport body 30. From the viewpoint of controlling the movement of the transport body 30 with higher precision, the length of one side of the square segment 21 is preferably two to four times the length of one side of the approximately square transport body 30.

[0021] The transport device control unit 50 includes a communication module 51, a transport information acquisition unit 52, and a transport path generation unit 53 (see FIG. 5). The communication module 51 is capable of communicating with the transport stage 20 and the transport body 30 together with the monitoring system 10 described later, and receives signals from the monitoring system 10, as well as identification information of the transport body 30 and position information on the transport stage 20. The communication module 51 also transmits each piece of information generated or calculated by the transport path generation unit 53 (such as route information or route change information for the transport body 30 described later) to the transport stage 20 (segment 21). As the communication module 51, for example, a communication module compatible with LTE, 4G, or 5G, or a communication module compatible with existing standards such as IEEE802.11 can be used.

[0022] The transport information acquisition unit 52 acquires and records identification information and position information of the transport body 30 over time. The position information of the transport body 30 is information related to the coordinate position of the transport body 30 on the transport stage 20, and includes information on the coordinate position where the transport body 30 is actually located (hereinafter also referred to as the "actual coordinate position") and the coordinate position of the planned movement path (hereinafter also referred to as the "planned coordinate position"). In this embodiment, these coordinate positions are indicated as positions in the X direction and the Y direction (X, Y) when the transfer stage 20 is viewed in a plan view. While the transfer device 100 is in operation, the transfer information acquisition unit 52 acquires position information of the transfer body 30 every 0.1 to 1 second. This makes it possible to show (map) the continuous change over time (trajectory) of the actual coordinate positions as the path that the transfer body 30 actually moved. The planned coordinate position information is information that continuously indicates the planned route from the movement start point to the target point of the transport body 30 using coordinate positions. The movement start point and the target start point are each indicated by a coordinate position on the transport stage 20. This makes it possible to grasp the actual coordinate position (current location) on the planned route on the transport stage 20. The information on the planned coordinate position is generated by the transport path generating unit 53. The generated planned coordinate position is set for each transport body 30. In addition, in the transport device 100 of this embodiment, the abnormality handling unit 54 described later changes the information on the planned coordinate position based on a control signal received from the monitoring system 10, thereby changing the planned path of the transport body 30 (see FIG. 8 described later).

[0023] In this embodiment, the position information is preferably obtained for each of the multiple sections that make up the transport stage 20. In this embodiment, the section is formed by a segment 21 of the transport stage 20 or a collection of two or more segments 21. For example, a collection of four segments 21 that form a square can be set as one section. From the viewpoint of obtaining more detailed position information, it is preferable that the section set on the transport stage 20 is for each single segment 21.

[0024] The transport information acquisition unit 52 may record the identification information of the transport body 30 and the position information of the transport body 30 in association with each other. The transport information acquisition unit 52 of this embodiment records the identification information and the position information in association with each other. More specifically, the transport information acquisition unit 52 of this embodiment records the identification information of the transport body 30 and the corresponding position information in association with each other for each transport body 30. The identification information and the position information are stored in a recording unit (not shown) of the transport device control unit 50.

[0025] The transport path generating unit 53 generates or changes a movement path of the transport body 30 on the transport stage 20. The movement path on the transport stage 20 can be set as a trajectory that connects the coordinate positions of the transport body 30 on the stage 20. The transport path generating unit 53 includes an abnormality response unit 54. The abnormality response unit 54 executes evacuation of the transport body 30 in which an abnormality has occurred or stops the transport device 100 based on a control signal received from the monitoring system 10. The abnormality response unit 54 also changes the movement path of the transport body 30 based on the control signal received from the monitoring system 10. The transfer path generating unit 53 and the abnormality handling unit 54 can generate or change the movement path by using a known algorithm, for example, Dijkstra's algorithm, A-star algorithm, etc. The transfer path generating unit 53 is capable of setting the current position of one transfer body 30 and a movement area (estimated coordinate position) preceding the other transfer body 30 by a predetermined time as obstacles in the movement path of the other transfer body 30, and generating or changing a path that avoids the other transfer body 30.

[0026] Next, a detailed description will be given of the monitoring system 10 of this embodiment. The monitoring system 10 of this embodiment includes a range sensor 2 and a monitoring control unit 4 that controls the operation of the monitoring system 10. The monitoring system 10 of this embodiment includes two range sensors 2. These range sensors 2 are installed on both outer sides of the transfer stage 20 in the Y direction in a plan view (see FIGS. 1 and 6). The number of range sensors 2 included in the monitoring system 10 is not particularly limited.

[0027] As the range sensor 2, a sensor that detects, with a light receiving section, that light such as laser light irradiated from a light projecting section is reflected or blocked by an object can be suitably used. For example, a laser range finder, a photoelectric sensor, an optical fiber sensor, etc. can be used. A laser range finder has a light projecting section and a light receiving section provided in a housing, measures the time it takes for the laser light emitted from the light projecting section to be reflected by an object and return to the light receiving section, and outputs data on the distance and position to the object when the transfer stage is viewed from the normal direction (when viewed from a plane). The laser range finder scans the laser light in an approximately fan-shaped manner when viewed from a plane. Such an approximately fan-shaped area becomes the detection area R when viewed from the normal direction (when viewed from a plane) (see Figs. 1 and 6). The range sensor 2 of this embodiment is a laser range finder, and the sensor unit 3 of the range sensor 2 serves as a light receiving unit. The angle θ1 (see FIG. 15) of the detection area R by the laser range finder in a plan view is preferably greater than 0° and equal to or less than 270°, and more preferably equal to or greater than 60° and equal to or less than 180°. Furthermore, assuming a center line CL that symmetrically bisects the detection area R in a planar view, the angle θ2 (see FIG. 15) between the radius r of the detection area R and the center line CL is preferably greater than 0° and less than 135°, and more preferably greater than 30° and less than 90°.

[0028] In the monitoring system 10 of this embodiment, two range sensors 2 are arranged on both sides of the transport stage 20 in the Y direction. The two range sensors 2 are located at different positions in the X direction (see FIG. 1 and FIG. 6). When the laser light from the range sensor 2 is blocked by an object in the detection area R, the range sensor 2 detects the object. In this case, the object creates a blind spot where the light does not reach, so it may be difficult to detect other objects that overlap with the object in the light projection direction and are farther from the range sensor 2 in the light projection direction than the object. In order to more reliably detect multiple objects that overlap in the light projection direction, when multiple range sensors 2 are provided, it is preferable to arrange the range sensors 2 so that the central light projection directions D1 of the sensors are opposite to each other across the transport stage 20 when viewed from a direction perpendicular to the light projection direction D1 (hereinafter also referred to as the "central light projection direction D1") in the center of the detection area R. In this embodiment, the central light projection direction D1 is along the Y direction. In this case, it is preferable that the range sensors 2 are arranged such that their central light projection directions D1 are opposite to each other across the transfer stage 20 when viewed from the X direction (see FIG. 6). More specifically, the central light projection direction D1 of one range sensor 2 faces one side in the Y direction, and the central light projection direction D1 of the other range sensor 2 faces the other side in the Y direction. The central light projection direction D1 coincides with the extension direction of the center line of the above-mentioned detection area R (see FIG. 15).

[0029] Furthermore, when the range measurement sensors 2 are arranged on both sides of the transport stage 20 so that the central light projection direction D1 is in the opposite direction, it is preferable that the positions of the range measurement sensors 2 in the direction perpendicular to the central light projection direction D1 are different. For example, when the central light projection direction D1 is along the Y direction, it is preferable that the range measurement sensors 2 arranged on both sides of the transport stage 20 are arranged at different positions in the X direction. In this case, even if three objects are lined up along the Y direction, the light projection is unlikely to be blocked by the two objects on the outside in the Y direction, and other objects sandwiched between the two objects can be detected.

[0030] The range measurement sensor 2 of this embodiment includes multiple sensor units 3 with different positions in the normal direction (vertical direction Z). That is, it has multiple detection areas R with different positions in the normal direction (vertical direction Z) (see FIG. 7). Each detection area R with a different position in the normal direction has the same shape and area in a plan view. The range sensor 2 shown in Figure 7 is defined, in the normal direction, with a first detection area R1 corresponding to the first sensor unit 3a which is closest to the transport stage 20, a second detection area R2 corresponding to the second sensor unit 3b which is farther from the transport stage 20 than the first sensor unit 3a, and a third detection area R3 corresponding to the third sensor unit 3c which is farther from the transport stage 20 than the second sensor unit 3b (see Figure 7). For ease of explanation, FIG. 7 shows the area between the transfer stage 20 and the transfer body 30 in a very large scale.

[0031] The range sensor 2 sets a detection area R at a position away from the upper surface of the conveying stage 20 in the normal direction (vertical direction Z in this embodiment). The detection area R in this embodiment is set in the area where the conveying body 30 floats in the normal direction of the conveying stage 20. That is, the detection area R is set in the space between the lower surface of the conveying body 30 floating in the normal direction and the upper surface of the conveying stage 20. The area where the conveying body 30 floats (hereinafter also referred to as the "floating area") is the area between the bottom surface of the conveying body 30 floating by magnetic force and the conveying stage 20 in a normally operating conveying device 100. The detection area R is parallel to the upper surface of the conveying stage 20. The range of the detection area R in the normal direction is preferably 0.5 mm to 30 mm, more preferably 0.5 mm to 2 mm. The range is the width (spot diameter) of light such as laser light in the normal direction. The position of the detection area R in the normal direction is set within the levitation area and away from the upper surface of the transfer stage 20. The position of the detection area R in the normal direction is set between the bottom surface of the transfer body 30 that normally levitates in the normal direction and the transfer stage 20. The position of the detection area R in the normal direction is the position of the sensor unit 3 corresponding to the area R in the normal direction. Moreover, the detection region R in plan view has an area including a plurality of segments 21.

[0032] The range sensor 2 outputs information on the coordinate position of an object detected in the detection area R. Such coordinate position information is information on the coordinate position in the detection area R, and is output for each sensor unit 3 having a different position in the normal direction. The coordinate position of the object output by the range sensor 2 is called the "detected coordinate position." From the viewpoint of matching the detected coordinate position with the position on the transport stage 20, it is preferable to match the coordinate position and coordinate range of the detection area R when the transport stage 20 is viewed from the normal direction (when viewed in a plan view) with the coordinate position and coordinate range of the transport stage 20. Thereby, similar to the position information, the detected coordinate position can be expressed as a position in the X direction and a position in the Y direction (X, Y) when the transport stage 20 is viewed from the normal direction (when viewed in a plan view).

[0033] The monitoring control unit 4 is connected to a transport device control unit 50 via a network so as to be able to communicate with each other. The monitoring and control unit 4 includes a communication module 11, a location information acquisition unit 12, an information integration unit 13, and an abnormality determination unit . The communication module 11 is capable of communicating with both the range measurement sensor 2 and the transport device control unit 50, and receives the detection coordinate position output by the range measurement sensor 2, a signal from the transport device control unit 50, and the identification information and position information of the transport body 30 acquired by the transport information acquisition unit 52. The communication module 11 also transmits each piece of information generated or calculated by the abnormality determination unit 14 (such as an abnormality response signal generation unit described later) to the transport device control unit 50. As the communication module 11, a communication module similar to the communication module 51 of the transport device control unit 50 described above can be used.

[0034] The position information acquisition unit 12 records the detection coordinate position output by the range measurement sensor 2 in association with the position in the normal direction of the sensor unit 3 included in the range measurement sensor 2. The normal direction position of the sensor unit 3 is the position in the normal direction of the detection area R corresponding to the sensor unit 3. Since the range measurement sensor 2 of this embodiment is equipped with multiple sensor units 3 with different positions in the normal direction, the detection coordinate position is associated with which sensor unit 3 has detected it. Information in which the detection coordinate position is associated with the position in the normal direction of the sensor unit 3 is hereinafter also referred to as "detection information". In this manner, the position information acquisition unit 12 acquires the detection information.

[0035] In addition, the position information acquisition unit 12 preferably acquires detection information for each of a plurality of sections (a single segment 21 or a group of two or more segments 21) constituting the transport stage 20 for the detection region R when the transport stage 20 is viewed from the normal direction. This makes it possible to grasp the detection information and the section that overlaps with the detection coordinate position in a planar view. For example, when the transported object 5 unintentionally falls from the transport body 30 onto the transport stage 20, the transported object 5 is detected in the detection region R1 of the sensor unit 3a that is closest to the transport stage 20 in the normal direction. Based on the detection information of the dropped transported object 5, the drop point of the transported object 5 can be specified, and it can be grasped which section of the transport stage 20 the drop point corresponds to. In this case, it is preferable to correspond the coordinate position and coordinate range of the detection region R when the transport stage 20 is viewed from the normal direction (when viewed from the planar view) to the coordinate position and coordinate range of the transport stage 20.

[0036] The information integration unit 13 acquires the detection information acquired by the position information acquisition unit 12 and either or both of the identification information and the position information of the transport body 30 for each section. This makes it possible to grasp the relationship between the detection information (detection coordinate position) when the transport stage 20 is viewed from the normal direction (when viewed in a plan view) and the position information of the transport body 30. In other words, it is possible to grasp the relationship between the position of the object detected by the range measurement sensor 2 and the position of the transport body 30 when the transport stage 20 is viewed from the normal direction. For example, if the object detected by the range measurement sensor 2 is a transport body 30 with insufficient levitation amount, the detection coordinate position of the detection information and the actual coordinate position of the transport body 30 match. In addition, it is possible to grasp whether the position of the dropped transport object 5 in a plan view is in the planned route (planned coordinate position) of another transport body 30 that has not fallen. The information integration unit 13 of this embodiment maps the detection information acquired for each section and either or both of the identification information and the position information of the transport body 30 as coordinate positions on the transport stage 20, and records this as integrated information. This integrated information is stored in a recording unit (not shown) of the monitoring system 10.

[0037] For example, the information integration unit 13 may acquire, together with the detection information, either or both of the identification information and the position information of the transport body 30 for each section consisting of a single segment 21. In this case, a single segment 21 and a single section can be placed in one-to-one correspondence, which is preferable in that various control processes performed by the monitoring control unit 4 or the transport device control unit 50 are simplified. The information integration unit 13 may also divide a single segment 21 into a plurality of subdivisions and acquire the detection information and either or both of the identification information and the position information of the transport body 30 for each subdivision. In this case, the resolution of the detection information can be improved, which is preferable in that the accuracy of generating or changing a travel path executed by the anomaly response unit 54 described later can be improved.

[0038] The abnormality determination unit 14 determines an abnormality in the transport stage 20 or the transport body 30 based on the detection information. The abnormality determination unit 14 of this embodiment determines an abnormality in the transport stage 20 or the transport body 30 based on integrated information including the detection information. The abnormality determination unit 14 of this embodiment determines the following items as abnormalities. (1) Occurrence of an obstacle 9 on the transfer stage 20 (2) Reduction in the amount of levitation of the carrier 30 In the case of the abnormality (1) above, for example, if the dropped transported object 5 is on the planned path of the transport body 30, the transported object 5 can become an obstacle 9 to transport. In addition, the transported object 30 that has dropped onto the transport stage 20 due to unintentional loss of magnetic force can also become an obstacle 9. The former is an abnormality of the transport stage 20, and the latter is an abnormality of the transported object 30. The abnormality determination unit 14 can detect the obstacle 9 of (1) above at one or more locations within the detection area R that at least partially includes the transport stage 20 in a planar view.

[0039] The abnormality in (2) above refers to a state in which the levitation amount of the transport body 30 is lower than the levitation amount when the transport body 30 is normally levitated (hereinafter also referred to as the "normal levitation amount"). For example, when a failure or a sign of such a failure occurs in at least one of the coils equipped in the transport body 30 and the single or multiple segments 21 constituting the transport stage 20, a decrease in the levitation amount can occur. In other words, the causes of (2) above include the occurrence of a failure or a sign of such a failure in at least one of the transport body 30 and the transport stage 20. The abnormality determination unit 14 can detect one or more conveying bodies 30 or sections in which the abnormality (2) described above has occurred in the detection area R. For example, if the levitation amount of multiple conveying bodies 30 decreases in a specific section, while the levitation amount of the conveying bodies 30 is normal in other sections, it is considered that a malfunction or a malfunction that is a precursor to a malfunction has occurred in the specific section. On the other hand, if a specific conveying body 30 experiences a decrease in levitation amount across multiple sections, it is considered that the specific conveying body 30 has experienced a malfunction or a malfunction that is a precursor to a malfunction. In this manner, the monitoring system 10 of this embodiment can monitor for a malfunction or a sign of a malfunction of the transport body 30 or the transport stage 20 by detecting the abnormality (2) described above.

[0040] The abnormality determination unit 14 of this embodiment can determine whether or not the object detected by the range measurement sensor 2 is an obstacle 9, based on the position in the normal direction of the detection area R (sensor unit 3) included in the detection information. For example, as shown in FIG. 7, when an object is detected by the detection area R1 of the first sensor unit 3a that is closest to the transfer stage 20 among multiple sensor units 3 that have different positions in the normal direction, the object can be determined to be an obstacle 9. In other words, it can be determined that the abnormality in (1) above has occurred. Hereinafter, the detection area R1 corresponding to the first sensor unit 3a is also referred to as the "obstacle detection area." On the other hand, when an object is detected in the detection areas R2, R3 of the sensor units 3b, 3c other than the first sensor unit 3a, it can be determined that the object has floated up from the transfer stage 20, and the above-mentioned (2) abnormality can be determined to be occurring. Hereinafter, the detection areas R2, R3 corresponding to the sensor units 3b, 3c other than the first sensor unit 3a are also referred to as "floating detection areas."

[0041] From the viewpoint of facilitating the abnormality determination of the above (1), the distance L1 (see FIG. 7) between the obstacle detection region R1 and the transport stage 20 in the normal direction is preferably 1% to 25% and more preferably 5% to 10% of the floating amount L10 when the transport body 30 is normally floating. The distance L1 (see FIG. 7) between the obstacle detection region R1 and the transport stage 20 in the normal direction is preferably 0.1 mm to 2.0 mm and more preferably 0.5 mm to 1.0 mm. The distance L1 is the minimum distance between the transport stage 20 and the sensor unit 3 in the normal direction, and in the case where the range sensor 2 has multiple sensor units 3, it is the distance between the transport stage 20 and the sensor unit 3a that is closest to the transport stage 20 in the normal direction.

[0042] From the viewpoint of facilitating the abnormality determination of the above (2), the distance L2 (see FIG. 7) between the floating detection area and the transport stage 20 in the normal direction is preferably 90% to 99% of the floating amount L10 when the transport body 30 is normally floating, more preferably 95% to 98%. The distance L2 (see FIG. 7) between the floating detection area and the transport stage 20 in the normal direction is preferably 1.5 mm to 3.0 mm, more preferably 1.5 mm to 2.0 mm. The distance L2 is the distance between the transport stage 20 in the normal direction and the sensor unit 3 in which the floating detection area is set. When the range sensor 2 includes a plurality of sensor units 3, the distance L2 is the distance between the transport stage 20 and the sensor units 3b and 3c other than the sensor unit 3a that is closest to the transport stage 20 in the normal direction.

[0043] In this embodiment, the floating detection area is set to a plurality of areas R2, R3 having different positions in the normal direction. In this case, from the viewpoint of further improving the detection accuracy of the floating amount of the transport body 30, the distance L3 (see FIG. 7) between the floating detection areas R2, R3 having different positions in the normal direction is preferably 0.1 mm or more and 2.0 mm or less, more preferably 0.5 mm or more and 1.0 mm or less. The distance L3 is the distance between the floating detection areas R2, R3 adjacent to each other in the normal direction.

[0044] The abnormality determination unit 14 of this embodiment can estimate the type of abnormality as shown in Table 1 below based on the position information of the detection area R in the normal direction, i.e., depending on whether the detection area R is an obstacle detection area R1 or a rising detection area R2 or R3. That is, the abnormality determination unit 14 can estimate the above-mentioned (1) or (2).

[0045] [Table 1]

[0046] In order to facilitate the abnormality judgment of (1) or (2) above, it is preferable that the abnormality judgment unit 14 estimates the type of abnormality based on the detection coordinate position for each section and either or both of the identification information and the position information. For example, based on the detection information (detection coordinate position) in the obstacle detection area R1 or the floating detection area and the position information of the conveying body 30, it can be estimated whether the object detected in the detection area is the conveying body 30 or something other than the conveying body 30. More specifically, if the detection coordinate position of the detection information matches the actual position coordinate of the conveying body 30, it can be estimated that the abnormality is caused by the conveying body 30. Also, if the detection coordinate position of the detection information does not match the actual position coordinate of the conveying body 30, it can be estimated that the abnormality is caused by something other than the conveying body 30, for example, the conveyed object 5. The abnormality judgment unit 14 of this embodiment can estimate the type of abnormality as shown in Table 2 below based on the detection information and position information for each section, in addition to information on the position of the detection area R in the normal direction (whether the detection area R is an obstacle detection area R1 or a floating detection area).

[0047] [Table 2]

[0048] Furthermore, when multiple objects are detected in the detection area R and the multiple objects are detected in the same section, the abnormality determination unit 14 can infer that an abnormality has occurred in that section. Furthermore, when the levitation amount of the conveying body 30 decreases in a specific section, while the levitation amount of the conveying body 30 recovers in other sections, it can be inferred that an abnormality has occurred in that specific section. From these abnormalities, it can be inferred that an abnormality has occurred in the coil or electrical system of the segment 21 that constitutes the section. Such an abnormality is also called a "section abnormality." Regarding estimation of a compartment abnormality, it is preferable that the compartment consists of a single segment 21, since the segment 21 in which the abnormality has occurred can be easily identified.

[0049] The abnormality determination unit 14 of the present embodiment includes an abnormality response signal generation unit 15 that generates a signal to respond to the abnormality based on information on the type of the estimated abnormality. The abnormality response signal generation unit 15 generates an alarm generation signal and a control signal for the conveying device 100 according to the type of abnormality. For example, when the anomaly response signal generating unit 15 issues an alarm occurrence signal, the alarm is issued via a speaker provided in the monitoring control unit 4. Alternatively, the alarm is issued by displaying alarm information on a display means such as a display provided in the monitoring control unit 4. The alarm issued by the signal may be visual information or may be auditory information.

[0050] The control signal to the device 100 includes information on the detected coordinate position estimated to be the drop point of the obstacle 9 (1) above, or information on the identification information of the conveying body 30 whose levitation amount has decreased and information on the levitation amount (2) above. When the control signal including such information is received by the conveying device control unit 50, the abnormality response unit 54 of the conveying device control unit 50 changes the operation or behavior of the conveying device 100 based on the control signal. FIG. 8 illustrates a form of changing the operation of the conveying device 100. Such an operation relates to changing the movement path (planned path) of the conveying body 30 or setting an evacuation path. The target point of the movement path is set to the segment 21a.

[0051] For example, if the control signal includes information on a detection coordinate position that is estimated to be the falling point of the obstacle 9 in (1) above, the abnormality response unit 54 determines, based on the information on the detection coordinate position, whether to change the planned route of the conveying body 30 to a detour route or to stop operation of the conveying device 100. If the detected coordinate position is not on the planned route C10 of the conveying body 30, the anomaly response unit 54 causes the conveying body 30 to travel along the planned route C10. On the other hand, if the detected coordinate position is on the planned route C10, the anomaly response unit 54 determines whether or not it is possible to change the planned route C10 and create a detour route C11 that avoids the detected coordinate position. If the detour route C11 can be created, the anomaly response unit 54 changes the planned route C10 to the coordinate position of the detour route C11 (see FIG. 8). If it is not possible to create a detour route that avoids the detected coordinate position because the detected coordinate position interferes with the planned route of another conveying body 30, the operation of the conveying device 100 is stopped.

[0052] In the case where the control signal includes the identification information of the conveyance body 30 and the information on the floating amount of the conveyance body 30 in (2) above, and there is no section abnormality, the abnormality handling unit 54 identifies the conveyance body 30 whose floating amount has decreased based on the information on the floating amount of the conveyance body 30. Then, it is determined whether to retreat the conveyance body 30 whose floating amount has decreased to a specific location on the conveyance stage 20, or to continue conveyance without retreating it. More specifically, when the floating amount of the conveyance body 30 is extremely small, the target point of the conveyance body 30 is set to the retreat point b, and the planned route C13 is changed to the retreat route C14 (see FIG. 8). This makes it possible to predict the fall of the conveyance body 30, while preventing interference with the planned route C12 of other conveyance bodies 30 due to the fall in advance. In this case, the retreat point b can be set for a predetermined coordinate position or for each section (for example, a single segment 21). Moreover, if the reduction in the amount of levitation is not so great as to affect transportation, the transportation of the transport body 30 is continued. When the transport body 30 is set to repeatedly move along the same path, instead of returning to the initial movement start point after completing one cycle of movement, the transport body 30 may be moved to another position (evacuation point b) and made to wait. After the transport body 30 with a reduced amount of levitation is moved to another position, information that the transport body 30 is waiting at another position may be displayed on a display means such as a display provided in the monitoring control unit 4. Such control may be performed when the movement path of the transport body 30 is switched or when maintenance of the transport device 100 is performed, instead of when one cycle of movement is completed. Moreover, if there are many transport bodies 30 with reduced levitation amounts or many compartment abnormalities, the operation of the transport device 100 is stopped.

[0053] The above-mentioned surveillance system 10 includes a CPU, a ROM (Read Only Memory), a RAM (Random Access Memory), a flash memory, a camera, a display unit, an input device for a user to perform input operations, etc. The CPU may include a graphics processor (Graphics Processing Unit (GPU)) for displaying images, a multimedia processor for encoding and decoding High-Definition (HD) video and the like, a display controller for controlling the display, and a power management Integrated Circuit (IC) for controlling power supply and charging. The display unit of the surveillance system 10 may be a touch panel or the like that has both display and operation functions. The monitoring system 10 may also be manually operated. In this case, the input device may be a touch panel, a keyboard, a keypad, a touchpad, a mouse, a microphone, or the like. The transport device control unit 50 may also have the same configuration as the monitoring system 10 described above.

[0054] The processes performed by each unit (such as the abnormality determination unit 14) of the monitoring system 10 are realized by the CPU expanding a program stored in a ROM, a disk, etc., into a RAM and executing the program. The processes may be realized by an ASIC (Application Specific Integrated Circuit) or an FPGA (Field Programmable Gate Array), or may be realized by a combination of an ASIC and an FPGA. The processes performed by each unit (such as the abnormality response unit 54) of the transport device control unit 50 are also realized in a manner similar to that described above.

[0055] The monitoring system 10 of this embodiment can be used not only for monitoring the operation of the conveying device 100 but also for managing the operation of a production method using the conveying device 100. In the embodiment shown in FIGS. 9 and 10, the working devices W2, W are performing work on a container, which is the transported article 5 placed on the transport body 30. The working device W2 shown in FIG. 9 is an attachment device W2 that attaches a cap to a container, which is a transported object 5. This cap has a threaded portion formed on its inner circumferential surface, and can be screwed with a threaded portion formed on the outer circumferential surface of the neck of a container having an opening. The attachment device W2 is equipped with a gripping hand 63 that can grip a cap and move up and down. With the central axis of the cap gripped by the gripping hand 63 overlapping with the central axis of the container, the transport body 30 rotates about the center of gravity, and the gripping hand 63 gripping the cap descends. This allows the neck and the cap to be screwed together. On the other hand, when the gripping hand 63 descends with the central axis of the cap misaligned with the central axis of the container in the attachment device W2, the gripping hand 63 comes into contact with the container, and the container and the transport body 30 carrying it are pushed downward by the hand 63. The monitoring system 10 can detect a decrease in the floating amount of the transport body 30 caused by the pushing of the gripping hand 63 by the detection area R. This makes it possible to detect any operational abnormality in the mounting device W2. Furthermore, when the attachment device W2 attaches a cap to a container by fitting, the container and the carrier 30 carrying it are pushed downward by the lowering of the gripping hand 63. In particular, when there is a fitting failure, the gripping hand 63 tends to push in too much, so the reduction in the amount of floating of the carrier 30 caused by the pushing can be detected by the detection area R.

[0056] The monitoring system 10 of this embodiment can be used in a production method in which the transport body 30 is moved onto a support table 25 provided on a transport stage 20, and the working device W performs work on the transported object on the support table 25. The working device W shown in FIG. 10 is a filling device that fills the inside of a container body, which is the transported object 5, with a content. In the embodiment shown in FIG. 10, the support table 25 is provided on the transport stage 20, and the working part of the working device W is installed above the support table 25. When the floating amount of the transport body 30 is larger than the position of the second detection area R2 in the normal direction, the transport body 30 can move onto the support table 25, and when the floating amount is not sufficient for the position of the second detection area R2, the transport body 30 cannot move onto the support table 25. This allows the monitoring system 10 to grasp the presence or absence of work processing by the working device W performed on the support table 25 for each transport body 30 based on the floating amount. In addition, the work on the support table 25 can be preferably applied to work that generates a force that presses the transport body 30 downward. Such an operation may include fitting a part such as a cap by pushing it downward onto the transported object 5 on the transport body 30 . In the embodiment shown in FIG. 10, the support base 25 is made of a material that does not affect the magnetic force of the transport device 100.

[0057] The monitoring system of the present invention is not limited to the above-mentioned embodiment. Another embodiment of the monitoring system according to the present invention will be described below. In the following, the other embodiment will be described mainly with respect to components different from the embodiment shown in Figs. 1 to 8, and similar components will be given the same reference numerals and description will be omitted. For components that are not particularly described, the description of the embodiment shown in Figs. 1 to 8 will be applied as appropriate.

[0058] The monitoring system 10 of the above-described embodiment includes a plurality of range sensors 2 installed at different positions relative to the transfer stage 20 (see FIG. 6). In this case, a combined detection area TR is formed by combining the plurality of detection areas R in a planar view. The combined detection area TR may be such that the plurality of detection areas R partially overlap in a planar view. Furthermore, it is sufficient that the combined detection area TR at least partially encompasses the transfer stage 20 in a planar view. From the viewpoint of performing detection by the range sensor 2 over the entire area where the transport body 30 travels, when the transport stage 20 is viewed from the normal direction (when viewed from above), it is preferable that the combined detection area TR covers the entire area of ​​the transport stage 20. From this viewpoint, it is preferable that the multiple range sensors 2c and 2d are positioned on the diagonal line of the outline of the transport stage 20 (see FIGS. 11(a) and (b)). The monitoring system 10 may also be equipped with more than two range sensors 2 (see FIG. 11(b)). In this case, the range sensors 2 may be disposed near each corner of the contour of the transfer stage 20, for example.

[0059] From the viewpoint of performing detection by the range sensor 2 over the entire area in which the conveying body 30 travels, the range sensor 2 may be movable. For example, as shown in Fig. 11(c), the range sensor 2 may be rotatable or movable. In the former case, it is rotatable about a vertical axis by a driving source such as a motor (not shown), while in the latter case, it is reciprocally movable in one direction by a slide mechanism 7 equipped with a rail extending in that direction.

[0060] Furthermore, when the monitoring system 10 includes multiple range sensors 2, the positions of the detection areas R in the normal direction may differ between the range sensors 2. For example, in the monitoring system shown in Fig. 12, the detection area Ra of one range sensor 2f is located between the detection areas Rb and Rc of the other range sensor 2e in the normal direction (vertical direction Z).

[0061] The surveillance system may include an image processing device 6 in addition to the range sensor 2 (see Figs. 13(a) and (b)). The image processing device 6 includes an imaging means such as a camera, a communication module, and an image processing unit (not shown). The communication module included in the image processing device 6 may have the same configuration as the communication module 11 included in the surveillance control unit 4. The imaging means of this embodiment is installed at a position away from the transfer stage 20 in the normal direction (vertical direction) so as to be able to image the top of the transfer stage 20. Based on information on the detected coordinate position acquired by the position information acquisition unit 12 of the monitoring control unit 4, the imaging means images an area including the coordinate position. The image processing unit performs image processing such as pattern matching and color area measurement on the image captured by the imaging means, and determines, from the characteristics of the object shown in the image, whether or not the object is a transported item 5, or the type of the transported item 5. The image processing unit may also read a two-dimensional code such as a barcode displayed on the transported item 5 to determine whether or not the object is a transported item 5, or the type of the transported item 5.

[0062] In the monitoring system of this embodiment, when the conveyance body 30 is present in an area 6R (hereinafter, also referred to as the "imaging area 6R") captured by the imaging means (see FIG. 13(a)), the image processing unit transmits information on the coordinate range of the imaging area 6R to the conveyance device control unit 50. Based on the information on the coordinate range of the imaging area 6R, the abnormality response unit 54 of the conveyance device control unit 50 generates an evacuation signal for evacuating the conveyance body 30 from the imaging area 6R or preventing it from entering the imaging area 6R, and transmits this to the conveyance body 30 on the conveyance stage 20. The evacuation signal is a signal for guiding the conveyance body 30 outside the coordinate range of the imaging area 6R. After the evacuation signal moves the conveyance body 30 outside the imaging area 6R, the imaging means captures the imaging area 6R (see FIG. 13(b)). As a result, the conveying body 30 or the goods 5 loaded on the conveying body 30 are not reflected in the image, making it easier to perform differential processing with the background, and further improving the accuracy of image processing such as the pattern matching method described above.

[0063] Next, a flow of a monitoring process of the conveying device 100 using the monitoring system 10 according to the embodiment shown in FIGS. 1 to 8 will be described with reference to FIG. In the monitoring process of this embodiment, first, the monitoring system 10 is operated, and as part of that, the range sensor 2 is also started (step S1). In the flow shown in FIG. 14, the operation of the conveying device 100 is omitted. The operation of the conveying device 100 is preferably performed after step S1. In the following step S2, the range sensor 2 detects the presence or absence of an object in the detection area R. The monitoring system 10 of this embodiment scans the laser light within the range of the detection area R on a plane consisting of the X direction and the Y direction. If there is no detection by the range sensor 2, step S2 is repeated. Step S2 is executed at a frequency of 0.2 times / second or more and 10,000 times / second or less.

[0064] If the range sensor 2 detects an object in step S2, i.e., if the range sensor 2 detects an object in the detection area R, the process proceeds to step S3. In step S3, the abnormality determination unit 14 of the monitoring control unit 4 infers the type of abnormality based on the detection information for each section (segment 21) (the position of the detection area R in the normal direction and the detection coordinate position) and either or both of the identification information and the position information. In other words, it infers whether the abnormality is the abnormality of (1) or (2). If the abnormality (1) is estimated in step S3, the process proceeds to step S4. In step S4, the abnormality response signal generating unit 15 issues an alarm generation signal and a control signal based on the information on the detection coordinate position of the abnormality (1) estimated in step S3 and the position in the normal direction of the detection area R.

[0065] In the next step S5, the abnormality handling unit 54 determines whether or not the detected coordinate position is on the planned route of the conveyance body 30 based on the control signal. If the detected coordinate position is not on the planned route, the process returns to step S2. In this case, the conveyance body 30 continues to travel along the planned route. In step S5, if the detected coordinate position is on the planned route of the transport body 30, the process proceeds to step S6, where the abnormality response unit 54 of the transport device control unit 50 determines whether or not the route can be changed to a detour route that avoids the detected coordinate position. If it is determined in step S6 that the route can be changed to a detour route, the process proceeds to step S7, where the planned coordinate position is changed to the coordinate position of the detour route, and the route is changed to the detour route. As a result, the transport body 30 travels along the detour route. After step S7, the process returns to step S2. If it is not possible to change to the detour route in step S6, the process proceeds to step S13, where the operation of the conveying device 100 is stopped.

[0066] In step S3, if the type of abnormality is estimated to be the abnormality of (2), the process proceeds to step S8. In step S8, the abnormality determination unit 14 determines whether or not the abnormality is a section abnormality based on the detection coordinate position of the abnormality of (2) estimated in step S3, the identification information and the position information of the conveying body 30. The section abnormality can be determined as a section abnormality when the detection coordinate positions of the detection information detected multiple times by the range measurement sensor 2 are the same section, or when the levitation amount decreases in a specific section while the levitation amount recovers in another section. If the section abnormality is determined to be a section abnormality in step S8, the process proceeds to step S9, and the abnormality response signal generation unit 15 issues an alarm generation signal and a control signal. After this step S9, the process proceeds to step S6. In step S6, the abnormality response unit 54 determines whether or not it is possible to change to a detour route that avoids the section determined to be the section abnormality based on the control signal. The flow from this step S6 onwards is the same as above.

[0067] If it is determined in step S8 that there is no section abnormality, the process proceeds to step S10, where the abnormality response signal generating unit 15 transmits a control signal. In the following step S11, the abnormality response unit 54, which has received the control signal, determines whether or not to evacuate the conveying body 30 whose levitation amount has decreased. If the conveying body 30 is to be evacuated in step S11, the process proceeds to step S12. In step S12, the abnormality response signal generating unit 15 issues an evacuation signal to evacuate the conveying body 30 whose levitation amount has decreased and an alarm generation signal. After this step S12, the process returns to step S2. As a result, the conveying device 100 continues to operate while evacuating the conveying body 30 whose levitation amount has decreased. In step S12, the evacuation signal may be issued immediately after receiving the control signal, or at an appropriate timing. For example, if the conveyance body 30 is set to repeatedly move along the same path, the abnormality response signal generating unit 15 may issue the evacuation signal when the conveyance body 30 completes one cycle of movement. Alternatively, the evacuation signal may be issued when the movement path of the conveyance body 30 is switched or when the conveyance device 100 is undergoing maintenance. If it is determined in step S11 that the conveying body 30 cannot be evacuated, the process proceeds to step S13, where the operation of the conveying device 100 is stopped.

[0068] Although the present invention has been described based on the preferred embodiments, the present invention is not limited to the above-described embodiments. For example, the monitoring system 10 in the above-described embodiment includes a plurality of range sensors 2, but may include only one range sensor 2. [Explanation of symbols]

[0069] 2 Range finder 3 Sensor section 3a First sensor section 3b Second sensor section 3c Third sensor section 4. Monitoring and control section 5. Transported goods 6 Image Processing Device 7 Slide mechanism 9. Obstacles 10. Surveillance System 11 Communication Module 12 Location information acquisition section 13 Information Integration Department 14 Abnormality determination section 15. Abnormality response signal generator 20 Transport Stage 21 Segments 22 Segment body 23 Magnetic force generating unit 23a, 23b, 23c, 23d Coils 25 Support stand 30 Carrier 31 Transport body 33a, 33b, 33c, 33d Magnet array 35 Holding part 50 Conveyor device control section 51 Communication Module 52 Transportation information acquisition unit 53 Transport path generation unit 63 Grasping Hand 100 Transport device b. Evacuation point C1, C2, C3, C4 pathway C10, C12, C13 Planned route C11 Detour route C14 Evacuation route D1 Light projection direction R Detection area R1 First detection area R2 Second detection area R3 Third detection area TR Combined Detection Area W Work Equipment W2 Mounting Device

Claims

1. A monitoring system for monitoring a transport device including a transport stage and a transport body that moves on the transport stage, The carrier has a magnet, the transport stage has a magnetic force generating unit that generates a magnetic force and causes the transport body to levitate from the transport stage in a normal direction of the transport stage and move on the transport stage by interaction with the magnet provided on the transport body, a range sensor having a detection area in a normal direction of the transport stage where the transport body is levitated; and an abnormality determination unit that determines an abnormality in the transport stage or the transport body based on detection information from the range sensor.

2. The monitoring system according to claim 1 , wherein the detection information is obtained for each of a plurality of sections constituting the transport stage, for the detection area when the transport stage is viewed from the normal direction.

3. Identification information is provided to the carrier, the transport device includes a position information acquisition unit that acquires position information of the transport body on the transport stage, The surveillance system according to claim 2 , further comprising an information integration unit that acquires the identification information and / or the location information, and the detection information for each of the sections.

4. The monitoring system according to claim 3 , wherein the abnormality determination unit estimates a type of the abnormality based on the detection information for each of the sections and either or both of the identification information and the position information.

5. The surveillance system according to claim 1 , wherein the range sensor includes a plurality of sensor units each having a different position in the normal direction.

6. the detection information includes information on a position of the detection area in the normal direction, The monitoring system according to claim 4 , wherein the abnormality determination unit estimates the type of the abnormality based on information about a position of the detection area in the normal direction.

7. 7. The monitoring system according to claim 3, further comprising an abnormality response signal generating unit that generates an alarm signal and a control signal for the transport device according to the type of the abnormality.

8. The range measurement sensor is provided in a plurality of positions different from each other with respect to the conveyance stage, 3. The monitoring system according to claim 1, wherein when the transport stage is viewed from the normal direction, a combined detection area obtained by combining the detection areas of the respective plurality of range sensors at least partially includes the transport stage.

Images